TWI576254B - Method for manufacturing a fine-structured transfer film and apparatus for manufacturing the same - Google Patents

Method for manufacturing a fine-structured transfer film and apparatus for manufacturing the same Download PDF

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TWI576254B
TWI576254B TW101111237A TW101111237A TWI576254B TW I576254 B TWI576254 B TW I576254B TW 101111237 A TW101111237 A TW 101111237A TW 101111237 A TW101111237 A TW 101111237A TW I576254 B TWI576254 B TW I576254B
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mold
film
roller
cooling
fine structure
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TW101111237A
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TW201249668A (en
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末宗徹也
箕浦潔
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東麗股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D7/00Producing flat articles, e.g. films or sheets
    • B29D7/01Films or sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/04Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)

Description

細微構造轉印膜之製造方法及製造裝置 Manufacturing method and manufacturing device of fine structure transfer film

本發明係關於藉由將細微凹凸圖案構造轉印於熱可塑性膜之表面而製造細微構造轉印膜之方法及其裝置。藉由本方法獲得之細微構造轉印膜,係作為具有擴散、聚光、反射、透光等之光學功能的光學膜等的表面需要作成微米尺寸乃至奈米尺寸的細微構造之構件而予使用。 The present invention relates to a method and apparatus for producing a fine structure transfer film by transferring a fine concavo-convex pattern structure onto a surface of a thermoplastic film. The fine structure transfer film obtained by the present method is used as a member having a fine structure of a micron size or a nanometer size as a surface of an optical film having an optical function such as diffusion, condensing, reflection, and light transmission.

作為使用於稜鏡片、光擴散片、透鏡片等之光學膜的光學膜之製造方法,有將膜按壓於在表面形成有細微凹凸圖案之帶狀模具的表面,於該膜之表面轉印模具之細微凹凸圖案的方法。又,提出一種可應用於由長尺的之熱可塑性材料所構成之膜,且能連續地進行自捲出、經轉印製程至捲取為止的處理之方法或裝置。 As a method of producing an optical film used for an optical film such as a ruthenium sheet, a light-diffusing sheet, or a lens sheet, a film is pressed against a surface of a strip-shaped mold having a fine uneven pattern formed on a surface thereof, and a mold is transferred onto the surface of the film. The method of fine concavo-convex pattern. Further, a method or apparatus which can be applied to a film made of a long thermoplastic material and which can be continuously subjected to self-winding and transfer processing to winding is proposed.

於專利文獻1中記載有一種方法,其採用由表面形成有細微構造之無端環帶所構成之模具,將由熱可塑性樹脂所構成之膜按壓於已加熱之模具上,於膜表面形成細微凹凸構造之後,待模具冷卻後再將膜剝離。模具之加熱及冷卻,係藉由使由無端環帶所構成之模具與加熱輥及冷卻輥接觸而進行,對膜進行細微構造之轉印,係藉由於加熱輥及與加熱輥對向之軋輥之間對由無端環帶所構成之模具與膜挾壓而進行。於此構造中,因為可獨立地控制轉印時之溫度及剝離時的溫度,所以,即使較高地設定轉印時之模具溫度,仍不會有剝離性之問題,所 以能以高精度進行細微凹凸構造之轉印。 Patent Document 1 describes a method in which a film made of a thermoplastic resin is pressed against a heated mold by a mold comprising an endless belt having a fine structure on its surface, and a fine uneven structure is formed on the surface of the film. Thereafter, the film is peeled off after the mold is cooled. The heating and cooling of the mold are performed by bringing the mold composed of the endless belt into contact with the heating roller and the cooling roller, and the fine structure of the film is transferred by the heating roller and the roller opposite to the heating roller. The mold and the film composed of the endless belt are pressed together. In this configuration, since the temperature at the time of transfer and the temperature at the time of peeling can be independently controlled, even if the mold temperature at the time of transfer is set high, there is no problem of peeling property. The transfer can be performed with a fine uneven structure with high precision.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本國專利第4450078號公報 [Patent Document 1] Japanese Patent No. 4450078

然而,於專利文獻1所記載之細微構造轉印膜的製造方法中,為了能以快速之運送速度獲得更高之轉印性,當將加熱輥加熱為高溫後進行運送時,成為高溫之膜變得太軟,使得於寬度方向無法維持均勻之張力狀態,造成膜於加壓部發生急遽的蛇行,而會產生無法穩定地連續成型轉印膜之問題。 However, in the method for producing a fine structure transfer film described in Patent Document 1, in order to obtain higher transferability at a high transport speed, when the heat roller is heated to a high temperature and then transported, the film becomes a high temperature film. It becomes too soft so that a uniform tension state cannot be maintained in the width direction, causing a rapid meandering of the film in the pressurizing portion, and there is a problem that the transfer film cannot be stably formed continuously.

本發明之目的在於解決該先前技術之課題,其提供一種細微構造轉印膜之製造方法及製造裝置,係在將由表面形成有細微構造之無端環帶所構成的模具壓抵於由熱可塑性樹脂所構成的膜上,於膜之表面連續地轉印細微構造的細微構造轉印膜之製造方法及製造裝置中,即使於以高速進行高精度之形狀轉印的情況下,仍不會使膜發生蛇行,可穩定地進行運送。 An object of the present invention is to solve the problems of the prior art, and to provide a method and a manufacturing apparatus for manufacturing a fine structure transfer film by pressing a mold composed of an endless belt having a fine structure on its surface against a thermoplastic resin In the method and apparatus for producing a fine structure transfer film having a fine structure continuously transferred onto the surface of the film, even in the case of performing high-precision shape transfer at a high speed, the film is not formed. Snakes occur and can be transported steadily.

為了解決該課題,本發明具有以下之構成。亦即, In order to solve this problem, the present invention has the following constitution. that is,

(1)一種細微構造轉印膜之製造方法,係使用細微構造轉印膜之製造裝置,在滿足以下之[A1]或[A2]之條件下依序通過至少為以下之[I]~[V]的製程,藉以對至少一面具有被轉印層之膜進行加工,該細微構造轉印膜之製 造裝置係具有懸跨於加熱輥與冷卻輥上且表面具有細微構造之無端環帶狀的轉印模具;[I]模具加熱製程,係一面使表面形成有細微構造之無端環帶狀的模具環抱於已被加熱之加熱輥一面進行加熱;[II]加壓轉印製程,係在使膜之轉印側表面與該模具的細微構造表面密接之狀態下,藉由包含該加熱輥之一對輥進行挾持加壓;[III]運送製程,係在使加壓後之該模具與該膜保持密接的狀態下運送至冷卻區;[IV]冷卻製程,係在該冷卻區使模具與膜保持密接之狀態下自模具側進行冷卻;[V]剝離製程,係剝離冷卻後之模具及膜;[A1]該膜之寬度係比該模具之寬度還寬,且在該加壓轉印製程中,該膜之寬度方向兩端部係自該加熱輥分離;[A2]該模具之寬度係比該膜之寬度還寬,且在該加壓轉印製程中,該膜受到加壓之區域的寬度係比該膜之寬度還窄。 (1) A method for producing a fine structure transfer film, which is a device for manufacturing a fine structure transfer film, which passes through at least the following [I] to [[] in the following conditions [A1] or [A2]; The process of V] is to process a film having at least one transfer layer, the fine structure of the transfer film The manufacturing device has an endless belt-shaped transfer mold which is suspended on the heating roller and the cooling roller and has a fine structure on the surface; [I] the mold heating process is a mold having an endless belt-like shape on the surface of which a fine structure is formed. Heating on one side of the heated heating roller; [II] pressure transfer process is performed by including one of the heating rollers in a state in which the transfer side surface of the film is in close contact with the fine structural surface of the mold Pressing and holding the roller; [III] conveying process is carried out to the cooling zone in a state where the pressed mold is kept in close contact with the film; [IV] cooling process, in which the mold and the film are made in the cooling zone Cooling from the mold side while maintaining the close contact; [V] peeling process, peeling off the cooled mold and film; [A1] the width of the film is wider than the width of the mold, and in the pressure transfer process Wherein both ends of the film in the width direction are separated from the heating roller; [A2] the width of the mold is wider than the width of the film, and the film is pressurized in the pressure transfer process The width is narrower than the width of the film.

(2)如(1)記載之細微構造轉印膜之製造方法,其中再於以下之[B][C]之控制下進行加工:[B]於該冷卻輥上設置調整該模具之運送方向的位置之手段、及檢測施加於該模具上之張力的手段,且以始終使施加於該模具之張力形成於既定之範圍內的方式控制該冷卻輥之位置; [C]於該模具上設置檢測寬度方向之位置的蛇行檢測感測器、及調整該冷卻輥之角度的手段,且以始終使該模具之寬度方向的位置形成於既定範圍內的方式控制該冷卻輥之角度。 (2) The method for producing a fine structure transfer film according to (1), wherein the processing is performed under the control of [B] [C] below: [B] setting the conveying direction of the mold on the cooling roll And means for detecting the tension applied to the mold, and controlling the position of the cooling roller so that the tension applied to the mold is always formed within a predetermined range; [C] providing a meandering detecting sensor for detecting the position in the width direction of the mold and means for adjusting the angle of the cooling roll, and controlling the position in the width direction of the mold to be always within a predetermined range The angle of the chill roll.

(3)如(2)記載之細微構造轉印膜之製造方法,其中追隨該冷卻輥之角度調整,以保持與該冷卻輥之平行度的方式,使於該剝離製程中自該模具上剝離膜之剝離輥動作。 (3) The method for producing a fine structure transfer film according to (2), wherein the angle of the cooling roll is adjusted to maintain the parallelism with the cooling roll so as to be peeled off from the mold during the peeling process The peeling roller of the film acts.

(4)如(2)或(3)記載之細微構造轉印膜之製造方法,其中調整該冷卻輥之角度的手段,係使支撐該冷卻輥之一方或雙方的軸承朝該模具之運送方向移動者。 (4) The method for producing a fine structure transfer film according to (2) or (3), wherein the means for adjusting the angle of the cooling roll is such that a bearing supporting one or both of the cooling rolls is oriented toward the mold Mover.

(5)如(2)至(4)中任一項記載之細微構造轉印膜之製造方法,其中該冷卻輥之角度調整的分解能為0.005度以下。 (5) The method for producing a fine structure transfer film according to any one of (2) to (4), wherein a decomposition energy of the angle adjustment of the cooling roll is 0.005 or less.

(6)如(1)至(5)中任一項記載之細微構造轉印膜之製造方法,其中於該加壓轉印製程中,在該模具之寬度方向兩端,使壓力朝寬度方向外側漸漸地降低。 (6) The method for producing a fine structure transfer film according to any one of (1) to (5), wherein, in the pressure transfer process, pressure is applied to both ends in a width direction of the mold The outside gradually decreases.

(7)如(1)至(6)中任一項記載之細微構造轉印膜之製造方法,其中於該模具加熱製程中,將加熱後之模具表面溫度調整於膜之Tg+50℃至Tg+100℃的範圍內;於該加壓轉印製程中,將膜所負載之線壓調整為400kN/m以上;於該冷卻製程中,將冷卻後之模具表面溫度調整於膜之Tg-40℃至Tg-100℃的範圍內。 (7) The method for producing a fine structure transfer film according to any one of (1) to (6), wherein, in the mold heating process, the surface temperature of the heated mold is adjusted to a Tg + 50 ° C of the film to In the range of Tg+100°C; in the pressure transfer process, the line pressure supported by the film is adjusted to be 400 kN/m or more; in the cooling process, the surface temperature of the cooled mold is adjusted to the Tg of the film. From 40 ° C to Tg - 100 ° C.

(8)一種細微構造轉印膜之製造裝置,係具有懸跨於 加熱輥與冷卻輥上且表面具有細微構造之無端環帶狀的轉印模具;該細微構造轉印膜之製造裝置至少具有以下之[i]~[v]之基本構成,且滿足以下之[a1]或[a2];[i]加熱手段,其設於與轉印模具之背面接觸的加熱輥上;[ii]加壓手段,其至少具有該加熱輥、與該加熱輥平行配置且表面覆有彈性體之軋輥、及使用該兩輥之挾壓機構;[iii]冷卻手段,其設於與該轉印模具之背面接觸的冷卻輥上;[iv]運送手段,其使該加熱輥及該冷卻輥旋轉,用以運送該轉印模具;及[v]剝離手段,其至少具有接近於該冷卻輥而平行配置,且朝與該冷卻輥相反之方向旋轉的剝離輥;[a1]於該加熱輥與該模具之接觸部的寬度方向兩端部,以在寬度方向外側輥徑減小的方式,於該加熱輥之表面具有段差;[a2]該模具之寬度係比該軋輥加壓部的寬度還寬。 (8) A manufacturing apparatus for finely constructing a transfer film having a suspension An endless belt-shaped transfer mold having a fine structure on the surface of the heating roller and the cooling roller; the apparatus for manufacturing the fine structure transfer film has at least the following basic structures [i] to [v], and satisfies the following [ A1] or [a2]; [i] a heating means provided on a heating roller that is in contact with the back surface of the transfer mold; [ii] a pressurizing means having at least the heating roller disposed in parallel with the heating roller and having a surface a roll coated with an elastomer, and a rolling mechanism using the two rolls; [iii] a cooling means provided on a cooling roll that is in contact with the back surface of the transfer mold; [iv] a transport means for the heat roll And the cooling roller rotates for transporting the transfer mold; and [v] a peeling means having at least a peeling roller disposed in parallel with the cooling roller and rotating in a direction opposite to the cooling roller; [a1] The both ends of the contact portion of the heating roller and the mold in the width direction have a step on the surface of the heating roller so that the diameter of the roller on the outer side in the width direction decreases; [a2] the width of the mold is larger than the width of the roller. The width of the pressure portion is also wide.

(9)如(8)記載之細微構造轉印膜之製造裝置,其中再具有以下之[b][c]的控制手段:[b]控制手段,其中懸跨該模具之冷卻輥係設置於能沿該模具之運送方向滑行的架台上,該架台及使該架台滑行之可動手段係透過荷重檢測器所連結,且以自該荷重檢測器所獲得之施加於該模具的張力始終形成於既定之範圍內的方式調整由該可動手段所造成之該架台的滑 行量;[c]控制手段,其設有檢測該模具之寬度方向位置的蛇行檢測感測器、及調整設於該架台上之該冷卻輥的角度之輥傾動手段,以自該蛇行檢測感測器所獲得之該模具的寬度方向位置始終形成於既定之範圍內的方式調整該冷卻輥之傾動量。 (9) The apparatus for manufacturing a fine structure transfer film according to (8), further comprising the following control means of [b][c]: [b] control means, wherein a cooling roll system suspended over the mold is provided in The gantry that can slide along the direction of transport of the mold, the gantry and the movable means for sliding the gantry are connected by a load detector, and the tension applied to the mold obtained from the load detector is always formed at a predetermined Adjusting the slip of the gantry caused by the movable means in a manner within the range [c] control means provided with a meandering detecting sensor for detecting the position of the width direction of the mold, and a roller tilting means for adjusting the angle of the cooling roller provided on the stand, to sense the sense of the snake The tilting amount of the cooling roller is adjusted in such a manner that the width direction position of the mold obtained by the measuring device is always formed within a predetermined range.

(10)如(9)記載之細微構造轉印膜之製造裝置,其中與該冷卻輥靠近配置之該剝離輥的輥傾動手段,係與該冷卻輥相同之輥傾動手段。 (10) The apparatus for manufacturing a fine structure transfer film according to (9), wherein the roller tilting means of the peeling roller disposed adjacent to the cooling roller is the same roller tilting means as the cooling roller.

(11)如(8)至(10)中任一項記載之細微構造轉印膜之製造裝置,其中該軋輥之表面的彈性體之橡膠硬度,係於ASTM D2240:2005之規格下為70~97°。 (11) The apparatus for manufacturing a fine structure transfer film according to any one of (8) to (10), wherein the rubber hardness of the elastomer on the surface of the roll is 70~ under the specification of ASTM D2240:2005. 97°.

(12)如(8)至(11)中任一項記載之細微構造轉印膜之製造裝置,其中於該加熱輥之寬度方向兩端部,輥徑係朝寬度方向外側漸漸地減小。 The apparatus for manufacturing a fine structure transfer film according to any one of the aspects of the present invention, wherein the roller diameter gradually decreases toward the outer side in the width direction at both end portions in the width direction of the heating roller.

(13)如(8)至(11)中任一項記載之細微構造轉印膜之製造裝置,其中於該模具之寬度方向兩端部,模具之厚度係朝寬度方向外側漸漸地減小。 (13) The apparatus for manufacturing a fine structure transfer film according to any one of (8) to (11), wherein the thickness of the mold gradually decreases toward the outer side in the width direction at both end portions in the width direction of the mold.

(14)如(8)至(11)中任一項記載之細微構造轉印膜之製造裝置,其中於該軋輥之寬度方向兩端部,輥徑係朝寬度方向外側漸漸地減小。 (14) The apparatus for manufacturing a fine structure transfer film according to any one of (8) to (11), wherein the roll diameter gradually decreases toward the outer side in the width direction at both end portions in the width direction of the roll.

根據本發明,於將由表面形成有細微構造之無端環帶所構成的模具壓抵於由熱可塑性樹脂所構成的膜上,於膜之表面連續地轉印細微構造的細微構造轉印膜之製 造方法及製造裝置中,即使於以高速進行高精度之形狀轉印的情況下,仍不會使膜發生蛇行,可穩定地進行運送,藉此,能以高生產性製造高性能之轉印膜。 According to the present invention, a mold comprising a terminally formed endless belt having a fine structure is pressed against a film made of a thermoplastic resin, and a fine structure of a fine structure transfer film is continuously transferred onto the surface of the film. In the manufacturing method and the manufacturing apparatus, even when the shape transfer is performed at a high speed, the film does not become meandering, and the film can be stably conveyed, whereby the high-performance transfer can be manufactured with high productivity. membrane.

[實施發明之形態] [Formation of the Invention]

本發明之細微構造轉印膜之製造裝置,係至少具有:無端環帶狀之模具,於表面形成有細微構造;加壓機構,其至少具有用以加熱該模具之加熱輥、與加熱輥平行配置且表面覆有彈性體之軋輥、及使用該兩輥之挾壓手段;冷卻輥,其用以冷卻該模具;剝離機構,其用以剝離密接於模具上之膜;及運送機構,其使該加熱輥及該冷卻輥旋轉,用以運送該模具;該細微構造轉印膜之製造裝置之特徵為:於該加熱輥與該模具之接觸部的寬度方向兩端部,以在寬度方向外側輥徑減小的方式,於該加熱輥之表面具有段差,或者,該模具之寬度係比該軋輥加壓部的寬度還寬。 The apparatus for manufacturing a fine structure transfer film of the present invention has at least an endless belt-shaped mold having a fine structure formed on the surface, and a pressurizing mechanism having at least a heating roller for heating the mold, parallel to the heating roller a roll disposed on the surface and covered with an elastomer, and a rolling means using the two rolls; a cooling roll for cooling the mold; a peeling mechanism for peeling off the film adhered to the mold; and a conveying mechanism The heating roller and the cooling roller rotate to transport the mold; the manufacturing device for the fine structure transfer film is characterized in that both ends in the width direction of the contact portion of the heating roller and the mold are outward in the width direction The method of reducing the roll diameter has a step on the surface of the heating roll, or the width of the mold is wider than the width of the roll pressing portion.

第1圖顯示本發明之實施形態的一例,顯示自成型用膜寬度方向觀察細微構造轉印膜之製造裝置1的概略剖視圖。 1 is a schematic cross-sectional view showing a manufacturing apparatus 1 for observing a fine structure transfer film from the film width direction of the molding, as an example of the embodiment of the present invention.

如第1圖所示,本發明之細微構造轉印膜之製造裝置1,係具有該無端環帶狀之模具3、懸跨該模具3之加熱輥4及冷卻輥5、與加熱輥4平行配置且對膜進行加壓成型之軋輥6、及將成型後之膜自模具3剝離而作為剝離機構的剝離輥7。又,加熱輥4與軋輥6係在將模具3及成型用膜2 積層之狀態下以兩輥夾入而予加壓,所以,至少任一方之輥連接於按壓手段12而作為加壓機構所構成。另外,作為以使懸跨於加熱輥4與冷卻輥5上之模具3旋轉的方式進行運送用之運送機構,具有用以旋轉驅動加熱輥4及/或冷卻輥5之驅動手段。另外,作為成型用膜2之運送裝置,具有捲出輥8及捲取輥9,又,還可根據需要具備一或複數個未圖示之導引輥。 As shown in Fig. 1, the apparatus 1 for manufacturing a fine structure transfer film of the present invention has the endless belt-shaped mold 3, the heating roller 4 and the cooling roller 5 suspended over the mold 3, and is parallel to the heating roller 4. A roll 6 that is configured to press-form a film, and a peeling roll 7 that peels the formed film from the mold 3 as a peeling mechanism. Further, the heating roller 4 and the roll 6 are used to mold the mold 3 and the film 2 for molding. In the state of laminating, the two rolls are sandwiched and pressurized, so that at least one of the rolls is connected to the pressing means 12 and is configured as a pressurizing means. In addition, a transport mechanism for transporting the mold 3 that is suspended over the heating roller 4 and the cooling roller 5 has a driving means for rotationally driving the heating roller 4 and/or the cooling roller 5. Moreover, the conveying device for the film 2 for molding has the winding roller 8 and the winding roller 9, and one or a plurality of guide rollers (not shown) may be provided as needed.

作為細微構造轉印膜製造裝置1之動作,自捲出輥8捲出之成型用膜2被供給於藉由加熱輥4所加熱之模具3上,同時藉由軋輥6按壓於模具3之細微構造面3a,將與模具3的表面形狀對應之形狀,即與模具3之細微構造為相反圖案的細微構造轉印成型於膜2之成型面2a,然後,在保持膜2與模具3密接之狀態下被運送,藉由冷卻輥5進行冷卻,然後藉由剝離輥7自模具3上剝離,而捲取於捲取輥9上。此動作係連續地進行。 As the operation of the fine structure transfer film manufacturing apparatus 1, the film 2 for molding which is taken up from the take-up roll 8 is supplied onto the mold 3 heated by the heat roller 4 while being pressed against the fineness of the mold 3 by the roll 6. The structural surface 3a is formed by transferring a shape corresponding to the surface shape of the mold 3, that is, a fine structure having a pattern opposite to the fine structure of the mold 3, to the molding surface 2a of the film 2, and then, the holding film 2 is in close contact with the mold 3. In the state, it is conveyed, cooled by the cooling roll 5, and then peeled off from the mold 3 by the peeling roller 7, and taken up on the take-up roll 9. This action is performed continuously.

使用第2及第3圖,針對本發明之特徵部分,藉由加熱輥4及與加熱輥4構成一對之軋輥6對成型用膜2進行挾壓之加壓成型部的裝置構成進行說明。 In the second and third aspects of the present invention, the configuration of the apparatus for press-forming the forming film 2 by the heating roll 4 and the pair of rolls 6 formed by the heating roll 4 will be described.

第2圖為顯示將成型用膜2之寬度作成比模具3的寬度還寬,且於加熱輥4之兩端設置段差4a的情況之構造之模式圖。於加壓轉印製程中,當軋輥6直接接觸於被加熱為高溫之模具3的細微構造面3a時,會有產生軋輥6表面之彈性層10的熱損傷及產生細微構造面3a的傷痕之問題,因此,為了防止這些問題之發生,以將膜2之寬度作成比模具3的寬度還寬較為適宜。於是,藉由設置段差4a ,將膜2之兩端部與加熱輥4分離,所以,不會有膜2與加熱輥4局部黏著,可抑制膜2之蛇行而進行穩定之運送。 Fig. 2 is a schematic view showing a structure in which the width of the film for molding 2 is made wider than the width of the mold 3, and the step 4a is provided at both ends of the heating roller 4. In the pressure transfer process, when the roll 6 is in direct contact with the fine structural surface 3a of the mold 3 heated to a high temperature, there is a thermal damage of the elastic layer 10 which causes the surface of the roll 6, and a flaw of the fine structural surface 3a is generated. The problem is therefore, in order to prevent these problems from occurring, it is preferable to make the width of the film 2 wider than the width of the mold 3. Thus, by setting the step difference 4a Since both ends of the film 2 are separated from the heating roller 4, the film 2 and the heating roller 4 are not partially adhered to each other, and the film 2 can be prevented from being serpentine and stably transported.

另外,第3圖為將模具3的寬度作成比成型用膜2之寬度還寬,且將藉由軋輥6所加壓之區域的寬度作成比膜2之寬度還窄的情況下之模式圖。與第2圖之構成相反,藉由將膜2之寬度作成比軋輥6的加壓區域之寬度還寬,可防止模具3的細微構造面3a與軋輥6直接接觸所引起的軋輥6之彈性層10之熱損傷。於是,藉由將模具3之寬度作成比膜2的寬度還寬,膜2全面被模具3所支撐,所以,可防止膜2與加熱輥4之局部性黏著,其結果,與第2圖之構成相同,可抑制膜2之蛇行而進行穩定之運送。 Further, Fig. 3 is a schematic view showing a case where the width of the mold 3 is made wider than the width of the film 2 for molding, and the width of the region pressed by the roll 6 is made narrower than the width of the film 2. Contrary to the configuration of Fig. 2, by making the width of the film 2 wider than the width of the pressurizing region of the roll 6, the elastic layer of the roll 6 caused by the direct contact between the fine structural face 3a of the mold 3 and the roll 6 can be prevented. 10 heat damage. Then, by making the width of the mold 3 wider than the width of the film 2, the film 2 is entirely supported by the mold 3, so that the local adhesion of the film 2 to the heating roller 4 can be prevented, and as a result, it is the same as Fig. 2 The configuration is the same, and it is possible to suppress the meandering of the film 2 and to perform stable transportation.

於習知技術中,一般取軋輥6之加壓區域的寬度為比模具3之寬度更寬的寬度,且將成型用膜2之寬度作成比模具3之寬度還寬,藉此,可防止軋輥6直接接觸於被加熱為高溫之模具3的細微構造面3a。然而,於此情況下,本發明者等查明,於將模具3及加熱輥4加熱為高溫進行運送時,於比模具3更靠寬度方向外側的區域,加熱輥4與膜2會發生局部黏著,致使膜2之運送張力在寬度方向上變得不均等,從而有引起膜2之蛇行的情況。 In the prior art, the width of the pressing portion of the take-up roll 6 is generally wider than the width of the mold 3, and the width of the film 2 for forming is made wider than the width of the mold 3, whereby the roll can be prevented. 6 is in direct contact with the fine structural surface 3a of the mold 3 heated to a high temperature. However, in this case, the inventors of the present invention have found that when the mold 3 and the heating roller 4 are heated to a high temperature and are transported, the heating roller 4 and the film 2 are partially exposed in the region outside the width direction of the mold 3. Adhesion causes the transport tension of the film 2 to become uneven in the width direction, thereby causing the meandering of the film 2.

本發明係針對成型用膜2、模具3、加熱輥4及軋輥6,以使加壓成型部上之各自的寬度成為所確定之大小關係,藉此,即使使模具3及加熱輥4形成高溫後連續地進行轉印,膜2與加熱輥4亦不會發生黏著,從而能以連續穩定之張力狀態進行運送。其結果,能以比以往更高之高溫或高速進行膜之運送,可實現更高精度之轉印精度 或者因高速運送所帶來之生產性提高的效果。 The present invention is directed to the film for molding 2, the mold 3, the heating roller 4, and the roll 6, so that the respective widths on the press-molded portions become a determined size relationship, whereby the mold 3 and the heat roller 4 are formed at a high temperature. After the transfer is continuously performed, the film 2 and the heating roller 4 are not adhered, and the film can be conveyed in a continuously stable tension state. As a result, the film can be transported at a higher temperature or higher speed than in the past, and a higher precision transfer precision can be realized. Or the effect of productivity improvement due to high-speed transportation.

另外,於成型用膜2之蛇行防止上,以不僅能防止膜2之蛇行,還能防止模具3的蛇行較為適宜。這是因為於在加壓轉印製程後之膜2與模具3保持密接之狀態下進行運送之運送製程中,當模具3發生蛇行時,支撐於模具3上之膜2亦一起發生蛇行,因此,會有自模具3脫模後之運送變得不穩定之情況。本發明者等查明,於對由無端環帶所構成之模具3進行加熱之加熱製程中,因模具3之熱膨脹致使施加於模具3之張力變弱而產生鬆弛的情況,於是,當於模具3之寬度方向存在溫度不均時,因熱膨脹之變異造成模具3之寬度方向的張力變得不均勻而產生蛇行的情況。因此,針對為了防止模具3之蛇行,於懸跨模具3之一方的輥之冷卻輥5具有檢測並控制施加於模具3之張力及模具3的寬度方向位置之模具蛇行防止機構的構成例,依圖進行說明。又,控制可為自動控制及手動控制之任一者,但以自動控制較為適宜。 Further, in the meandering prevention of the film for molding 2, it is possible to prevent not only the meandering of the film 2 but also the meandering of the mold 3. This is because in the transport process in which the film 2 and the mold 3 are kept in close contact with each other after the pressure transfer process, when the mold 3 is meandered, the film 2 supported on the mold 3 also snakes together. There is a case where the transportation after the mold 3 is released from the mold becomes unstable. The present inventors have found that in the heating process of heating the mold 3 composed of the endless belt, the tension applied to the mold 3 is weakened by the thermal expansion of the mold 3, and thus the mold is loosened. When there is temperature unevenness in the width direction of 3, the tension in the width direction of the mold 3 becomes uneven due to the variation in thermal expansion, and a meandering occurs. Therefore, in order to prevent the squeezing of the mold 3, the cooling roller 5 of the roller which is one of the suspension molds 3 has a configuration example of the mold meandering prevention mechanism for detecting and controlling the tension applied to the mold 3 and the position in the width direction of the mold 3. The figure is explained. Moreover, the control may be either automatic control or manual control, but automatic control is preferred.

第4圖為顯示針對懸跨於加熱輥4與冷卻輥5之模具3,檢測及控制其張力變動及蛇行之模具蛇行防止機構的第一構成例之概略俯視圖,第5圖為顯示自膜寬度方向觀察同構成例之概略圖,第9圖為顯示藉由檢測模具3之蛇行的蛇行檢測感測器24而進行之模具的寬度方向位置測量方法之概略圖。 Fig. 4 is a schematic plan view showing a first configuration example of a mold meandering mechanism for detecting and controlling the tension fluctuation and the meandering of the mold 3 which is suspended between the heating roller 4 and the cooling roller 5, and Fig. 5 is a view showing the width of the film from the film width. A schematic view of the configuration example is shown in the direction, and FIG. 9 is a schematic view showing a method of measuring the position in the width direction of the mold by detecting the meandering detecting sensor 24 of the mold 3.

無端環帶狀之模具3被懸跨於加熱輥4及冷卻輥5上,冷卻輥5係設於能朝模具之運送方向平行地滑行移動之架台15上。藉由架台15之移動,加熱輥4與冷卻輥5之間 的距離變化,施加於模具3之張力變化。架台15之移動係藉由使伺服馬達17及進給螺桿18組合而成之可動手段19所執行,架台15與可動手段19係透過荷重檢測器20所連結。施加於模具3之張力係由此荷重檢測器20所檢測,且以此檢測出之值形成於規定之範圍內的方式控制可動手段19的移動量,以使模具3之張力保持一定。 The endless belt-shaped mold 3 is suspended over the heating roller 4 and the cooling roller 5, and the cooling roller 5 is attached to the gantry 15 that can slide in parallel in the direction in which the mold is conveyed. By the movement of the gantry 15, between the heating roller 4 and the cooling roller 5 The distance varies, and the tension applied to the mold 3 changes. The movement of the gantry 15 is performed by the movable means 19 which combines the servo motor 17 and the feed screw 18, and the gantry 15 and the movable means 19 are connected by the load detector 20. The tension applied to the mold 3 is detected by the load detector 20, and the amount of movement of the movable means 19 is controlled such that the detected value is formed within a predetermined range so that the tension of the mold 3 is kept constant.

另外,使支撐冷卻輥5之兩端的軸承13、14當中至少一軸承14能在架台15上沿模具3之運送方向平行移動。軸承14之移動係藉由使伺服馬達21及進給螺桿22組合而成之可動手段23所執行,於模具3之寬度方向位置因蛇行而發生偏移時,藉由此軸承14之移動,使冷卻輥5以軸承13作為支點而傾動,以模具3之寬度方向位置成為中心的方式進行修正。模具3之寬度方向位置的偏移係藉由蛇行檢測感測器24所檢測,並根據此偏移量控制可動手段23的移動量,亦即冷卻輥5之傾動量,藉由冷卻輥5之傾動以使模具3之寬度方向位置始終維持於中心。 Further, at least one of the bearings 13 and 14 supporting the both ends of the cooling roller 5 can be moved in parallel on the gantry 15 in the conveying direction of the mold 3. The movement of the bearing 14 is performed by the movable means 23 in which the servo motor 21 and the feed screw 22 are combined, and when the position of the mold 3 in the width direction is shifted by the meandering, the movement of the bearing 14 is caused by the movement of the bearing 14. The cooling roll 5 is tilted with the bearing 13 as a fulcrum, and is corrected so that the position of the width direction of the mold 3 becomes center. The offset of the position of the mold 3 in the width direction is detected by the meandering detecting sensor 24, and the amount of movement of the movable means 23, that is, the amount of tilting of the cooling roller 5, by the cooling roller 5, is controlled according to the offset amount. The tilting is performed so that the position of the width direction of the mold 3 is always maintained at the center.

藉由以上之模具蛇行防止機構,可防止因模具3之熱膨脹所產生的張力之鬆弛、以寬度方向之溫度不均所造成之張力不均等為起因的模具3之蛇行。於是,其結果,於加壓轉印製程後之運送製程中,膜2不會追隨模具3而發生蛇行,從而能以更為穩定且更高之生產性成型高精度之細微構造轉印膜。 According to the above-described mold meandering prevention mechanism, it is possible to prevent the slack of the mold 3 caused by the slack of the tension generated by the thermal expansion of the mold 3 and the unevenness of the tension caused by the temperature unevenness in the width direction. As a result, in the conveyance process after the pressure transfer process, the film 2 does not follow the mold 3, and the transfer film can be formed with a finer structure with higher precision and higher productivity.

又,作為使架台15移動之可動手段,不限於伺服馬達及進給螺桿,亦可使用以油壓或空氣壓作為作動流體之流體壓汽缸。第6圖為顯示本發明之第二構成例的概略 俯視圖。架台15與流體壓汽缸25係透過荷重檢測器20所連結,且根據以荷重檢測器20所檢測之值控制流體壓汽缸25的壓力。於使用流體壓汽缸作為可動手段之情況亦連結荷重檢測器的理由,係為了不受因汽缸之劣化所引起的滑動阻力的變動、作動流體之壓力不穩定的影響而將模具之張力保持為一定,及為了於視覺上容易明白地顯示模具之張力。另外,第6圖之構成例顯示使支撐冷卻輥5之軸承13、14的雙方分別能在架台15上移動之情況。藉此,比只能移動一方之軸承的情況,能以更細微之精度調整冷卻輥5的角度。 Further, the movable means for moving the gantry 15 is not limited to the servo motor and the feed screw, and a fluid pressure cylinder using hydraulic pressure or air pressure as the operating fluid may be used. Figure 6 is a view showing the outline of a second configuration example of the present invention. Top view. The gantry 15 and the fluid pressure cylinder 25 are coupled to the load detector 20, and the pressure of the fluid pressure cylinder 25 is controlled based on the value detected by the load detector 20. When the fluid pressure cylinder is used as the movable means, the load detector is also connected. The tension of the mold is kept constant in order to prevent the fluctuation of the sliding resistance caused by the deterioration of the cylinder and the pressure instability of the operating fluid. And in order to visually and easily display the tension of the mold. Further, the configuration example of Fig. 6 shows a case where both of the bearings 13 and 14 supporting the cooling roller 5 can be moved on the gantry 15. Thereby, the angle of the cooling roll 5 can be adjusted with finer precision than the case where only one bearing can be moved.

另外,於模具3之蛇行防止中使冷卻輥5傾動時,以使靠近冷卻輥5之剝離輥7亦跟隨著發生傾動,使得冷卻輥5與剝離輥7始終保持平行較為適宜。於剝離輥7相對於冷卻輥5傾斜時,自模具3剝離成型用膜2時之剝離位置係於寬度方向不同,因而會有於膜2之寬度方向產生剝離溫度不均,或者產生因剝離張力之不均等而引起之膜2或模具3的蛇行之情況。以圖針對用以使剝離輥7追隨冷卻輥5之傾動的構成例進行說明。 Further, when the cooling roller 5 is tilted during the meandering prevention of the mold 3, it is preferable that the peeling roller 7 which is close to the cooling roller 5 is also tilted so that the cooling roller 5 and the peeling roller 7 are always kept parallel. When the peeling roller 7 is inclined with respect to the cooling roller 5, the peeling position at the time of peeling the film for molding 2 from the mold 3 is different in the width direction, so that peeling temperature unevenness occurs in the width direction of the film 2, or peeling tension occurs. The circumstance of the film 2 or the mold 3 caused by the unequality. A configuration example for causing the peeling roller 7 to follow the tilting of the cooling roller 5 will be described.

第7圖為顯示本發明之模具之張力控制及蛇行防止機構的第三構成例之概略俯視圖,第8圖為顯示自膜寬度方向觀察之概略圖。 Fig. 7 is a schematic plan view showing a third configuration example of the tension control and meandering prevention mechanism of the mold of the present invention, and Fig. 8 is a schematic view showing the direction from the film width direction.

剝離輥7係於架台15上靠近冷卻輥5而平行設置,支撐剝離輥7之軸承26、27當中至少一軸承27,與支撐冷卻輥5之一軸承14一起,係藉由由伺服馬達21及進給螺桿22所構成之可動手段23,於架台15上可沿模具3之運送方向 平行移動。藉此,於為了防止模具3之蛇行而使冷卻輥5傾動時,連接於與冷卻輥5相同之輥傾動手段上之剝離輥7,追隨冷卻輥5而發生傾動,所以,兩輥始終保持平行,其結果,膜2係於寬度方向上被以均勻之溫度及剝離張力所剝離。 The peeling roller 7 is disposed on the gantry 15 in parallel with the cooling roller 5, and at least one of the bearings 27 and 27 supporting the peeling roller 7 is coupled with the bearing 14 of the supporting chill roller 5 by the servo motor 21 and The movable means 23 formed by the feed screw 22 can be transported along the mold 3 on the gantry 15. parallel movement. Therefore, when the cooling roller 5 is tilted in order to prevent the mold 3 from being meandered, the peeling roller 7 connected to the roller tilting means similar to the cooling roller 5 follows the cooling roller 5 and tilts. Therefore, the two rollers are always parallel. As a result, the film 2 was peeled off at a uniform temperature and peeling tension in the width direction.

只是,作為此時之注意點,需要以剝離輥7之支點間距離與冷卻輥5的支點間距離相等,且兩輥之中心位於模具3之寬度方向中心截面上的方式設置。當未滿足這些條件時,於使用可動手段23使冷卻輥5及剝離輥7傾動時,兩輥之傾斜角度不同,因而不能保持平行。 However, as a point of attention at this time, it is necessary to set the distance between the fulcrums of the peeling roller 7 to be equal to the distance between the fulcrums of the cooling rolls 5, and the centers of the two rolls are located on the center cross section of the mold 3 in the width direction. When these conditions are not satisfied, when the cooling roller 5 and the peeling roller 7 are tilted by the movable means 23, the inclination angles of the two rollers are different, and thus it is impossible to maintain parallel.

又,於第7、第8圖中,剝離輥7係以成型用膜2對冷卻輥5之抱角成為90度的方式所配置,但若是於0~180度之範圍內的話,亦可配置於其他之位置。成型用膜2對冷卻輥5之抱角越大,則膜2被冷卻之時間越長,從而可充分地冷卻膜2。 Further, in the seventh and eighth drawings, the peeling roller 7 is disposed such that the wrap angle of the cooling roll 5 is 90 degrees in the film for forming 2, but it may be arranged in the range of 0 to 180 degrees. In other locations. The larger the wrap angle of the film for molding 2 to the cooling roll 5, the longer the film 2 is cooled, so that the film 2 can be sufficiently cooled.

以下,針對本發明之特徵的構成加壓成型部的加熱輥4及軋輥6進行說明。 Hereinafter, the heating roller 4 and the roll 6 constituting the press molding portion which are the features of the present invention will be described.

軋輥6係於芯層之外表面被覆有彈性層10的構造。芯層係要求具有強度及加工精度,例如適合採用鋼、纖維強化樹脂、陶瓷、鋁合金等。另外,彈性層10係藉由按壓力而變形之層,以採用以橡膠為代表之樹脂層或彈性體材質較為適宜。芯層之兩端部係藉由軸承11所旋轉支撐,又,該軸承11係與汽缸等之按壓手段12連接。軋輥6係藉由此按壓手段12之衝程所開閉,挾壓或者開放成型用膜2。 The roll 6 is a structure in which the outer surface of the core layer is covered with the elastic layer 10. The core layer is required to have strength and processing precision, and is suitable, for example, for steel, fiber reinforced resin, ceramic, aluminum alloy, and the like. Further, the elastic layer 10 is a layer which is deformed by pressing, and is preferably a resin layer or an elastomer material represented by rubber. Both ends of the core layer are rotatably supported by a bearing 11, and the bearing 11 is connected to a pressing means 12 such as a cylinder. The roll 6 is opened and closed by the stroke of the pressing means 12, and the film 2 for molding is rolled or opened.

另外,軋輥6亦可配合所需之製程或膜材質而具有調溫機構。作為調溫機構,亦可為將輥內部設成中空而埋入匣形加熱器或感應加熱裝置,或者於內部加工成流路而流動油、水或蒸氣等之熱媒,藉此,自輥內部加熱之構造。另外,亦可為於輥外表面附近設置紅外線加熱器,自輥外表面加熱之構造。 In addition, the roll 6 can also have a temperature control mechanism in accordance with the required process or film material. The temperature adjustment mechanism may be a heat medium in which a crucible heater or an induction heating device is embedded in a hollow interior of the roller, or a flow path is internally processed to flow oil, water, or steam. Internal heating construction. Further, an infrared heater may be provided in the vicinity of the outer surface of the roller to heat the outer surface of the roller.

以軋輥6之加工精度係於JIS B 0621(改訂年1984)所定義之圓筒度公差上為0.03mm以下,圓周振動公差上為0.03mm以下較為適宜。當這些值太大時,於挾壓時之加熱輥4與軋輥6之間形成局部間隙,所以,變得無法均勻地按壓成型用膜2,而有於膜2之成型面2a上產生轉印不均的情況。另外,以彈性層10之表面粗度係以JIS B 0601(改訂年2001)所定義之算術平均粗度Ra為1.6μm以下較為適宜。這是因為當Ra超過1.6μm時,會於按壓時產生彈性層11之表面形狀轉印於膜2的背面之情況。 The machining accuracy of the roll 6 is 0.03 mm or less in the cylindrical tolerance defined by JIS B 0621 (revised year 1984), and the circumferential vibration tolerance is preferably 0.03 mm or less. When these values are too large, a local gap is formed between the heating roller 4 and the roll 6 at the time of rolling, so that it becomes impossible to uniformly press the film 2 for molding, and transfer occurs on the molding surface 2a of the film 2. Uneven situation. Further, it is preferable that the surface roughness of the elastic layer 10 is an arithmetic mean roughness Ra defined by JIS B 0601 (Revised Year 2001) of 1.6 μm or less. This is because when Ra exceeds 1.6 μm, the surface shape of the elastic layer 11 is transferred to the back surface of the film 2 at the time of pressing.

以軋輥6之彈性層10的耐熱性係具有160℃以上之耐熱溫度較為適宜,又以具有180℃以上之耐熱溫度更為適宜。在此,耐熱溫度係指於該溫度下放置24小時時的拉伸強度的變化率超過10%時之溫度。 The heat resistance of the elastic layer 10 of the roll 6 is preferably a heat-resistant temperature of 160 ° C or more, and more preferably a heat-resistant temperature of 180 ° C or more. Here, the heat-resistant temperature means a temperature at which the rate of change in tensile strength at a temperature of more than 10% when left at this temperature for 24 hours.

作為彈性層10之材質,於使用例如橡膠的情況下,可使用矽酮橡膠、EDPM(乙烯丙烯二元橡膠)、氯丁橡膠(neoprene)、CSM(氯磺化聚乙烯橡膠)、聚胺基甲酸酯橡膠、NBR(腈橡膠)、硬質橡膠(ebonite)等。於要求更高之彈性率及硬度的情況下,作為壓光輥用樹脂,可根據各橡膠製造商而使用對上述橡膠採用特殊處方者、或者使 韌性提高之硬質耐壓樹脂(例如,聚酯樹脂)。 As the material of the elastic layer 10, in the case of using, for example, rubber, fluorenone rubber, EDPM (ethylene propylene binary rubber), neoprene, CSM (chlorosulfonated polyethylene rubber), polyamine group can be used. Formate rubber, NBR (nitrile rubber), hard rubber (ebonite), and the like. When a higher modulus of elasticity and hardness are required, the resin for the calender roll may be used according to each rubber manufacturer, or may be used as a special prescriber for the above rubber. A hard pressure-resistant resin (for example, a polyester resin) having improved toughness.

第10圖為僅取出供給按壓力時之軋輥6而自成型用膜2的寬度方向所觀察之概略圖。此時,於彈性層10之厚度方向上產生有變形量δ,伴隨此,軋輥6與成型用膜2係保持接觸寬度B而進行接觸。為了控制彈性層10之變形量δ,以彈性層10之橡膠硬度係依照ASTM D2240:2005(邵氏硬度D)規格而處於70~97°的範圍較為適宜。這是因為若硬度低於70°時,彈性層11之變形量δ增大,造成與膜2之接觸寬度B變得過大,恐有無法確保細微構造之轉印所需要的壓力之虞,另外,若硬度超過97°時,反過來該層之變形量δ減小,造成接觸寬度B變得過小,恐有無法確保細微構造之轉印所需要的按壓時間之虞。 Fig. 10 is a schematic view of the film 2 from the molding film 2 as viewed in the width direction of the film 2 when the pressing force is applied. At this time, the amount of deformation δ is generated in the thickness direction of the elastic layer 10, and the roll 6 and the film for molding 2 are brought into contact with each other by maintaining the contact width B. In order to control the amount of deformation δ of the elastic layer 10, it is preferable that the rubber hardness of the elastic layer 10 is in the range of 70 to 97° in accordance with the ASTM D2240:2005 (Shore hardness D) specification. This is because when the hardness is less than 70°, the amount of deformation δ of the elastic layer 11 is increased, and the contact width B with the film 2 is excessively large, and there is a fear that the pressure required for the transfer of the fine structure cannot be ensured, and When the hardness exceeds 97°, the deformation amount δ of the layer is reversed, and the contact width B becomes too small, so that it is impossible to ensure the pressing time required for the transfer of the fine structure.

其次,針對與軋輥6對向以挾壓成型用膜2及模具3之加熱輥4進行說明。 Next, the heating roll 4 which presses the film 2 for press molding and the mold 3 with respect to the roll 6 is demonstrated.

加熱輥4係於軋壓時受到荷重,所以,要求具有強度及加工精度,且其還具有加熱手段。作為材質,可考慮例如鋼、纖維強化樹脂、陶瓷、鋁合金等。另外,作為加熱手段,亦可為藉由將內部作成中空而設置匣形加熱器或感應加熱裝置,或者於內部加工流路而流動油、水或蒸氣等之熱媒,而自輥內部加熱之構造。另外,亦可為於輥外表面附近設置紅外線加熱器或感應加熱裝置,自輥外表面加熱之構造。 Since the heating roller 4 is subjected to a load at the time of rolling, it is required to have strength and processing precision, and it also has a heating means. As the material, for example, steel, fiber reinforced resin, ceramic, aluminum alloy, or the like can be considered. Further, as the heating means, a crucible heater or an induction heating device may be provided by hollowing the inside, or a heat medium such as oil, water or steam may be flowed through the internal processing flow path, and heated from the inside of the roller. structure. Further, an infrared heater or an induction heating device may be provided in the vicinity of the outer surface of the roller to heat the outer surface of the roller.

加熱輥4之加工精度亦與該軋輥6相同,以於JIS B 0621(改訂年1984)所定義之圓筒度公差上為0.03mm以下,圓周振動公差上為0.03mm以下較為適宜。當這些值太 大時,於挾壓時之加熱輥4與軋輥6之間形成局部間隙,所以,變得無法均勻地按壓成型用膜2,而有於膜2之成型面2a上產生轉印不均的情況。另外,以加熱輥4之表面粗度係依照JIS B 0601(改訂年2001)所定義之算術平均粗度Ra為0.2μm以下較為適宜。這是因為當Ra超過0.2μm時,會產生加熱輥4之形狀轉印於模具3之背面,且該形狀再被轉印於膜2之成型面2a的情況。 The processing precision of the heating roller 4 is also the same as that of the roller 6, and is preferably 0.03 mm or less in the cylindrical tolerance defined by JIS B 0621 (revised year 1984) and 0.03 mm or less in the circumferential vibration tolerance. When these values are too When the pressure is large, a partial gap is formed between the heating roller 4 and the roll 6 at the time of rolling, so that the film 2 for molding cannot be uniformly pressed, and uneven transfer occurs on the molding surface 2a of the film 2. . Further, the surface roughness of the heating roller 4 is preferably 0.2 μm or less in accordance with the arithmetic mean roughness Ra defined in JIS B 0601 (Revised 2001). This is because when Ra exceeds 0.2 μm, the shape of the heating roller 4 is transferred to the back surface of the mold 3, and the shape is transferred to the molding surface 2a of the film 2.

以於加熱輥4之表面實施鍍硬質鉻、陶瓷溶射、類鑽碳鍍膜等之高硬度皮膜的形成處理較為適宜。這是因為加熱輥4經常與模具3接觸而承受軋輥6之按壓力,所以,其表面非常容易磨損,當加熱輥4之表面磨耗或損傷時,亦會產生如前述之成型用膜2的轉印不均或輥表面形狀轉印至膜2的成型面2a的問題。 It is preferable to form a high-hardness film such as hard chromium plating, ceramic spray coating, or diamond-like carbon coating on the surface of the heating roller 4. This is because the heating roller 4 is often in contact with the mold 3 to withstand the pressing force of the roller 6, so that the surface thereof is very easily worn, and when the surface of the heating roller 4 is worn or damaged, the film 2 for molding as described above is also generated. The problem of uneven printing or transfer of the surface shape of the roll to the molding surface 2a of the film 2 is problematic.

於是,作為本發明之特徵的加壓成型部之構成,係於以加熱輥4及軋輥6使成型用膜2及模具3密接而予挾壓之加壓轉印製程中,構成為滿足以下之(1)或(2)的條件。亦即, Then, the pressure-molded portion which is a feature of the present invention is configured to satisfy the following in a pressure-transfer process in which the heating film 4 and the roll 6 are brought into close contact with each other and the mold 3 is pressed. The condition of (1) or (2). that is,

(1)成型用膜2之寬度係比模具3的寬度還寬,且於加壓轉印製程中,成型用膜2之寬度方向兩端部係自加熱輥4分離。 (1) The width of the film for molding 2 is wider than the width of the mold 3, and both end portions in the width direction of the film for molding 2 are separated from the heating roller 4 in the pressure transfer process.

(2)模具3之寬度係比成型用膜2之寬度還寬,且於加壓轉印製程中,成型用膜2所受到加壓之區域的寬度係比成型用膜2之寬度還窄。 (2) The width of the mold 3 is wider than the width of the film for molding 2, and the width of the region where the film for molding 2 is pressurized is narrower than the width of the film for molding 2 in the pressure transfer process.

以下,使用第2及3圖,針對本發明之加壓成型部的構成詳細地進行說明。又,於第2及3圖中,將成型用膜2 所受到加壓之區域的寬度定義為W,將自被加壓之區域的端至成型用膜2的端部之長度定義為v,如第2圖,於模具3之寬度比軋輥6的寬度還窄之情況下,模具3之寬度成為W,如第3圖,於軋輥6之寬度比模具3的寬度還窄之情況下,軋輥6之寬度成為W。 Hereinafter, the configuration of the press-molded portion of the present invention will be described in detail using Figs. 2 and 3. Further, in the second and third drawings, the film for molding 2 is used. The width of the region subjected to pressurization is defined as W, and the length from the end of the pressed region to the end portion of the film for molding 2 is defined as v, as in Fig. 2, the width of the mold 3 is wider than the width of the roll 6. In the case of a narrower case, the width of the mold 3 becomes W. As shown in Fig. 3, when the width of the roll 6 is narrower than the width of the mold 3, the width of the roll 6 becomes W.

使用第2圖,針對滿足(1)之條件時的加壓成型部之構成進行說明。如第2圖所示,將成型用膜2之寬度設成比模具3的寬度,即成型用膜2所受到加壓之區域的寬度W更長。此理由係為了防止因軋輥6直接接觸於被加熱為高溫之模具3的細微構造面3a而造成的軋輥6表面之彈性層10的熱損傷、模具之細微構造面3a的傷痕的產生。於是,以自模具3之寬度方向端部至膜2的寬度方向端部之長度v為5~15mm之範圍內較為適宜。這是因為當v低於5mm時,恐有因於膜2之運送中可能自然產生的略微之蛇行而使得模具3與軋輥6直接接觸之虞。另一方面,當v大於15mm時,相對於膜2之面積,所獲得之細微構造轉印膜的面積減小,明顯造成收率降低,故而不理想。 The configuration of the press-molded portion when the condition of (1) is satisfied will be described with reference to Fig. 2 . As shown in Fig. 2, the width of the film for molding 2 is set to be longer than the width of the mold 3, that is, the width W of the region where the film for molding 2 is pressurized. The reason for this is to prevent thermal damage of the elastic layer 10 on the surface of the roll 6 due to the direct contact of the roll 6 with the fine structural surface 3a of the mold 3 heated to a high temperature, and generation of scratches on the fine structural surface 3a of the mold. Therefore, it is preferable that the length v from the end portion in the width direction of the mold 3 to the end portion in the width direction of the film 2 is in the range of 5 to 15 mm. This is because when v is less than 5 mm, there is a fear that the mold 3 and the roll 6 are in direct contact due to a slight meander which may naturally occur in the conveyance of the film 2. On the other hand, when v is larger than 15 mm, the area of the fine structure transfer film obtained with respect to the area of the film 2 is small, which is remarkably caused to lower the yield, which is not preferable.

於是,作為加熱輥4之表面構造,係於成型用膜2之端部設置以膜2與加熱輥4不接觸之方式而予分離的區域。作為分離之手段,係設置段差4a。以段差之高低差(分離距離)H為10~30mm之範圍內較為適宜,以自模具3之端部至段差4a之距離u為1~3mm之範圍內較為適宜。 Then, as the surface structure of the heating roller 4, a region where the film 2 and the heating roller 4 are not separated from each other is provided at the end portion of the film 2 for molding. As a means of separation, a step difference 4a is set. It is preferable that the height difference (separation distance) H of the step is in the range of 10 to 30 mm, and it is suitable from the end of the mold 3 to the step u of the step 4a of 1 to 3 mm.

本發明者等查明,於採用適用於本發明之高壓力條件的製程中,在加壓部之端部,成型用膜2發生彎曲的現象尤其明顯。因此,藉由於加熱輥4設置段差4a,可抑制 因彎曲現象而撓曲之膜端部接觸及黏著於加熱輥4上。膜2係藉由軋輥6而於非轉印面之寬度方向全面承受按壓力,相對於此,轉印面係僅於模具3之範圍內受到支撐。此時,於膜2之比模具3更靠寬度方向外側的區域,產生以模具3之寬度方向端部為支點的彎曲力矩,藉此,如第2圖所示,成型用膜2之端部朝加熱輥4側彎曲。此時,藉由將H及u設為上述適正之範圍,即使於產生有彎曲現象之情況,膜2仍不會與加熱輥4接觸,可更為穩定地連續成型膜。 The present inventors have found that, in the process using the high pressure conditions applicable to the present invention, the film 2 for forming is particularly bent at the end portion of the pressurizing portion. Therefore, by setting the step 4a of the heating roller 4, it is possible to suppress The end of the film which is deflected by the bending phenomenon contacts and adheres to the heating roller 4. The film 2 is subjected to a full pressing force in the width direction of the non-transfer surface by the rolls 6, whereas the transfer surface is supported only in the range of the mold 3. At this time, in the region outside the width direction of the mold 3 in the film 2, a bending moment is generated as a fulcrum at the end portion in the width direction of the mold 3, and as shown in Fig. 2, the end portion of the film 2 for molding is formed. Bending toward the side of the heating roller 4. At this time, by setting H and u to the above-mentioned proper range, even if a bending phenomenon occurs, the film 2 does not come into contact with the heating roller 4, and the film can be continuously formed more stably.

於習知技術中,因無此分離部分,所以,於將模具3及加熱輥4加熱為高溫進行運送時,加熱輥4與成型用膜2局部發生黏著,致使膜2之運送張力於寬度方向變得不均勻,而會較多地引起膜2之蛇行。於設置本構成之分離部分的轉印方法中,即使將模具3及加熱輥4加熱為高溫而連續轉印,膜2與加熱輥4亦不會發生黏著,從而能以連續穩定之張力狀態進行運送。其結果,能以比以往更高之高溫或高速進行膜之運送,可實現更高精度之轉印精度或者因高速運送所帶來之生產性提高的效果。 In the prior art, since the separation portion is not provided, when the mold 3 and the heating roller 4 are heated to a high temperature for transportation, the heating roller 4 and the molding film 2 are locally adhered, so that the conveying tension of the film 2 is in the width direction. It becomes uneven, and it causes the film 2 to snake more. In the transfer method in which the separation portion of the present configuration is provided, even if the mold 3 and the heating roller 4 are heated to a high temperature and continuously transferred, the film 2 and the heating roller 4 are not adhered, so that the continuous stable tension state can be performed. transport. As a result, the film can be transported at a higher temperature or higher speed than ever before, and the transfer precision with higher precision or the productivity improvement by high-speed transport can be achieved.

接著,使用第3圖,針對滿足(2)之條件的情況之加壓成型部之構成進行說明。如第3圖所示,將模具3之寬度作成比成型用膜2之寬度還寬,且將軋輥6之加壓部的寬度,即膜2所受到加壓之區域的寬度W作成比膜2之寬度還窄。此理由係與(1)之條件相同,為了防止因模具3與軋輥6直接接觸而產生的彈性層10的熱損傷、模具之細微構造面3a的傷痕的產生。於是,以自軋輥6之加壓部的 寬度方向端部至膜2的寬度方向端部之長度v為5~15mm之範圍較為適宜。此理由亦與(1)之條件相同,是因為當v低於5mm時,恐有因於膜2之運送中的略微之蛇行而使得模具3與軋輥6接觸之虞,另一方面,當v大於15mm時,相對於膜2之面積,所獲得之細微構造轉印膜的收率明顯降低。 Next, the configuration of the press-molded portion in the case where the condition of (2) is satisfied will be described using FIG. As shown in Fig. 3, the width of the mold 3 is made wider than the width of the film for molding 2, and the width of the pressurizing portion of the roll 6, that is, the width W of the region where the film 2 is pressurized is formed as the specific film 2. The width is also narrow. This reason is the same as the condition of (1), in order to prevent thermal damage of the elastic layer 10 caused by direct contact between the mold 3 and the roll 6, and generation of scratches on the fine structural surface 3a of the mold. Thus, by the pressing portion of the self-rolling roll 6 The length v of the end portion in the width direction to the end portion in the width direction of the film 2 is preferably in the range of 5 to 15 mm. This reason is also the same as the condition of (1) because when v is less than 5 mm, there is a fear that the mold 3 is in contact with the roll 6 due to a slight meandering in the conveyance of the film 2, and on the other hand, when v When it is larger than 15 mm, the yield of the fine structure transfer film obtained is remarkably lowered with respect to the area of the film 2.

本構成係藉由將模具3之寬度作成比成型用膜2之寬度還寬,膜2於寬度方向全面受到模具3之支撐,即使將模具3及加熱輥4加熱為高溫而連續轉印,膜2與加熱輥4亦不會發生黏著,能以連續穩定之張力狀態進行運送。其結果,能以比以往更高之高溫或高速進行膜之運送,可實現更高精度之轉印精度或者因高速運送所帶來之生產性提高的效果。 In the present configuration, the width of the mold 3 is made wider than the width of the film 2 for molding, and the film 2 is entirely supported by the mold 3 in the width direction, and the film 3 and the heating roller 4 are continuously transferred while being heated to a high temperature. 2, the heating roller 4 does not adhere, and can be transported in a continuously stable tension state. As a result, the film can be transported at a higher temperature or higher speed than ever before, and the transfer precision with higher precision or the productivity improvement by high-speed transport can be achieved.

另外,於(1)及(2)之雙方的構成中,以於加壓部之寬度方向端部使壓力漸漸地朝端部降低較為適宜。藉由使端部之壓力降低,可緩和成型用膜2之端部的彎曲現象、產生於加壓區域與非加壓區域之境界部的加壓痕跡,抑制成型後之膜的平面性惡化、捲繞姿勢的混亂,從而能以更為穩定之狀態連續地對膜進行運送及成型。 Further, in the configuration of both of (1) and (2), it is preferable that the pressure is gradually lowered toward the end portion at the end portion in the width direction of the pressurizing portion. By lowering the pressure at the end portion, it is possible to alleviate the bending phenomenon at the end portion of the film for molding 2 and the pressure trace generated in the boundary portion between the pressed region and the non-pressurized region, thereby suppressing the deterioration of the planarity of the film after molding. The winding posture is disordered, so that the film can be continuously conveyed and molded in a more stable state.

第11圖~第13圖顯示於加壓部之端部使壓力降低的一例。又,於各圖中,(a)顯示滿足條件(1)的構成,(b)顯示滿足條件(2)的構成時之一例。 Figs. 11 to 13 show an example in which the pressure is lowered at the end portion of the pressurizing portion. Further, in each of the drawings, (a) shows a configuration that satisfies the condition (1), and (b) shows an example of a configuration that satisfies the condition (2).

第11圖為顯示於加熱輥4之寬度方向端部,輥徑漸漸減小時之加壓成型部的裝置構成之模式圖。彈性層10之變形量係隨著朝向加壓部之寬度方向外側漸漸減小,藉 此,成型用膜2所負載之壓力,亦隨著朝向加壓部之寬度方向端部漸漸減小。其結果,可緩和膜2之端部的彎曲現象、產生於加壓區域與非加壓區域之境界部的加壓痕跡。 Fig. 11 is a schematic view showing the configuration of a press-molded portion when the roll diameter is gradually decreased at the end portion in the width direction of the heating roller 4. The amount of deformation of the elastic layer 10 gradually decreases toward the outer side in the width direction of the pressurizing portion. As a result, the pressure applied to the film 2 for molding gradually decreases toward the end portion in the width direction of the pressurizing portion. As a result, the bending phenomenon at the end portion of the film 2 and the pressure trace generated in the boundary portion between the pressurized region and the non-pressurized region can be alleviated.

又,第12圖顯示使模具3之厚度於端部朝寬度方向外側漸漸減小的構造,第13圖顯示將軋輥6之輥徑朝寬度方向端部減小的構造。這些構成亦與第11圖之構成相同,藉由使負載於成型用膜2之壓力隨著朝向加壓部之寬度方向端部漸漸減小,可緩和膜2之端部的彎曲現象、產生於加壓區域與非加壓區域之境界部的加壓痕跡。 Further, Fig. 12 shows a structure in which the thickness of the mold 3 is gradually decreased toward the outer side in the width direction, and Fig. 13 shows a structure in which the roll diameter of the roll 6 is reduced toward the end in the width direction. In the same manner as in the configuration of Fig. 11, the pressure applied to the film for molding 2 gradually decreases toward the end portion in the width direction of the pressurizing portion, so that the bending phenomenon at the end portion of the film 2 can be alleviated. Pressurization marks at the boundary between the pressurized region and the non-pressurized region.

以下針對加熱輥4與軋輥6之較佳加壓條件進行說明。 Hereinafter, preferred pressurization conditions of the heating roller 4 and the roll 6 will be described.

以加熱輥4與軋輥6之相對位置精度,係於JIS B 0621(改訂年1984)所定義之平行度公差上為0.1mm以下較為適宜。當平行度公差超過0.1mm時,成型用膜2所負載之按壓力,不會於寬度方向變得均等,從而有產生轉印不均或膜2的蛇行之情況。 The relative positional accuracy of the heating roller 4 and the roll 6 is preferably 0.1 mm or less in the parallel tolerance defined by JIS B 0621 (Revised 1984). When the parallelism tolerance exceeds 0.1 mm, the pressing force applied to the film for molding 2 does not become uniform in the width direction, and there is a case where uneven transfer or filming of the film 2 occurs.

另外,以兩輥之加壓時之撓曲量的合計為,於成型用膜2所受到加壓的區域之寬度W內為50μm以下較為適宜,又以30μm以下更為適宜。若撓曲量超過50μm時,則軋輥6之彈性層10變得無法追隨變形,使得負載於膜2之按壓力變得不均等。 In addition, the total amount of the deflection at the time of pressurization of the two rolls is preferably 50 μm or less in the width W of the region where the film for molding 2 is pressed, and more preferably 30 μm or less. When the amount of deflection exceeds 50 μm, the elastic layer 10 of the roll 6 becomes unable to follow the deformation, and the pressing force applied to the film 2 becomes uneven.

較佳之軋壓,如第10圖所示,於設藉由按壓手段12供給於軋輥6之力為P、成型用膜2與軋輥6之接觸長度為B,如第2、3圖所示,設成型用膜2所受到加壓之區域寬度 為W時,以將以σ=P/BW所定義之外觀軋壓σ設為80MPa以上較為適宜,又以100MPa以上更為適宜。另外,以彈性層10之按壓距離,即接觸長度B為4~8mm之範圍內較為適宜,又以5~7mm之範圍內更為適宜。若接觸長度B比4mm狹小時,則對膜2之細微構造轉印無法確保充分之按壓時間。另一方面,若寬於8mm時,則變得難以以充分之值確保該軋壓。另外,以加壓區域之寬度W除以供給於軋輥之力P而得之P/W,係被定義為線壓,此值顯示施加於每單位寬度之挾持荷重。以線壓P/W之範圍為400kN/m以上較為適宜,又以500kN/m以上更為適宜。 Preferably, as shown in Fig. 10, the force supplied to the roll 6 by the pressing means 12 is P, and the contact length between the forming film 2 and the roll 6 is B, as shown in Figs. 2 and 3, The width of the region to be pressurized by the film 2 for molding is set In the case of W, it is preferable to set the external rolling rolling σ defined by σ=P/BW to 80 MPa or more, and more preferably 100 MPa or more. Further, it is preferable that the pressing distance of the elastic layer 10, that is, the contact length B is in the range of 4 to 8 mm, and it is more preferably in the range of 5 to 7 mm. If the contact length B is narrower than 4 mm, the fine structure transfer of the film 2 cannot ensure sufficient pressing time. On the other hand, when it is wider than 8 mm, it becomes difficult to ensure this rolling pressure with sufficient value. Further, the P/W obtained by dividing the width W of the pressurizing region by the force P supplied to the roll is defined as the line pressure, and this value indicates the load applied to the unit weight. The range of the line pressure P/W is preferably 400 kN/m or more, and more preferably 500 kN/m or more.

接著,針對構成本發明之細微構造轉印膜的製造裝置之其他構件進行說明。 Next, other members of the manufacturing apparatus constituting the fine structure transfer film of the present invention will be described.

模具3係於表面加工有細微構造面之無端環帶。材質係以強度及熱傳導率高之金屬較為適宜,例如,以鎳、鋼、不鏽鋼、銅等較為適宜。另外,亦可使用於該金屬帶之表面施以鍍敷者。有關表面具有細微構造之模具3的製作方法,可舉出對金屬帶之表面直接施以切削、雷射加工之方法、對形成於金屬帶之表面的鍍敷皮膜直接施以切削、雷射加工之方法、對內面具有細微構造之圓筒狀的原版施以電鑄的方法、於金屬帶之表面連續地貼附具有細微構造面的薄板之方法等。 The mold 3 is an endless belt in which a fine structural surface is machined. The material is preferably a metal having high strength and thermal conductivity. For example, nickel, steel, stainless steel, copper, or the like is suitable. In addition, it is also possible to apply a plating to the surface of the metal strip. The method for producing the mold 3 having a fine structure on the surface may be a method in which a surface of a metal strip is directly subjected to cutting or laser processing, and a plating film formed on the surface of the metal strip is directly subjected to cutting and laser processing. A method of electroforming a cylindrical original plate having a fine structure on the inner surface thereof, a method of continuously attaching a thin plate having a fine structural surface to the surface of the metal strip, and the like.

無端環狀之金屬帶係藉由使具有既定厚度、長度之金屬板的端部彼此對接而予焊接的方法、將既定倍數之厚度的金屬板以既定之一半的長度予以焊接而形成無端環狀後再予壓延之方法等所製造。此時,考慮到金屬帶 之強度及操作性的理由,以厚度為0.1~0.4mm之範圍較為適宜。若厚度比此範圍小時,因藉由加熱輥4及冷卻輥5懸跨時所供給之張力,恐有金屬帶發生破斷或塑性變形之虞。另一方面,於厚度比此範圍大之情況下,金屬帶之彎曲剛性太大,使得懸跨於加熱輥4及冷卻輥5上或者於懸跨在這些輥上之狀態下進行運送變得困難。 The endless annular metal strip is a method of pre-welding the ends of the metal sheets having a predetermined thickness and length, and welding the metal sheets of a predetermined multiple thickness by a predetermined length of one half to form an endless loop. It is then produced by a method such as calendering. At this point, considering the metal strip The reason for the strength and workability is preferably in the range of 0.1 to 0.4 mm in thickness. If the thickness is smaller than this range, the tension applied by the heating roller 4 and the cooling roller 5 may cause breakage or plastic deformation of the metal strip. On the other hand, in the case where the thickness is larger than this range, the bending rigidity of the metal strip is too large, so that it becomes difficult to carry over the heating roller 4 and the cooling roller 5 or to be suspended over the rollers. .

於對無端環狀之金屬帶的表面實施鍍敷之情況下,以鍍敷之材質為鎳或銅等較為適宜。另外,以金屬帶之厚度為0.1~0.3mm、鍍敷之厚度為0.03~0.1mm之範圍較為適宜。若鍍敷之厚度相對於金屬帶的厚度變大時,恐有於金屬帶與鍍敷之境界面產生剝離之虞。另一方面,若鍍敷之厚度過小時,則難以精度良好地加工細微構造。 In the case of plating the surface of the metal strip of the endless loop, it is preferable that the material of the plating is nickel or copper. Further, it is preferable that the thickness of the metal strip is 0.1 to 0.3 mm, and the thickness of the plating is 0.03 to 0.1 mm. If the thickness of the plating becomes larger than the thickness of the metal strip, there is a fear that peeling occurs at the interface between the metal strip and the plating. On the other hand, if the thickness of the plating is too small, it is difficult to accurately process the fine structure.

以下,顯示無端環帶模具之製造方法的一例。 Hereinafter, an example of a method of manufacturing an endless belt mold will be described.

首先,使薄不鏽鋼板的端部對接並予焊接,加工成無端環狀之金屬帶。接著,將此金屬帶嵌合固定於輥上,於表面施以鍍鎳處理。然後,藉由磨床加工機於金屬帶之鍍敷層切削加工既定的細微構造。然後,自輥上取下施以切削加工後之金屬帶,藉此,可獲得表面具有既定之細微構造的無端環帶模具。 First, the ends of the thin stainless steel sheets are butted and pre-welded to form an endless looped metal strip. Next, the metal strip was fitted and fixed to a roll, and nickel plating treatment was applied to the surface. Then, the predetermined fine structure is cut by a grinder processing machine on the plating layer of the metal strip. Then, the metal strip subjected to the cutting process is removed from the roll, whereby an endless belt mold having a predetermined fine structure on the surface can be obtained.

細微構造表示高度為10nm~1mm之凸形狀以間距10nm~1mm呈周期性重複之形狀,又以高度為1μm~100μm之凸形狀以間距1μm~100μm呈周期性重複之形狀較為適宜,例如,可為三角形狀之槽排列成複數個條紋狀者,或者亦可為矩形、半圓形或半橢圓形等。又, 槽不需要為直線,亦可為曲線條紋圖案。另外,其稜線方向不限於帶之周方向,亦可為寬度方向。又,細微構造不限於連續成直線狀或曲線狀者,其他亦可為呈點狀離散地配置有半球、圓錐或長方體等的凸形狀或者凹形狀者。 The fine structure indicates that the convex shape having a height of 10 nm to 1 mm has a periodically repeating shape with a pitch of 10 nm to 1 mm, and a shape having a height of 1 μm to 100 μm in a convex shape with a pitch of 1 μm to 100 μm is preferably repeated periodically, for example, The grooves of the triangular shape are arranged in a plurality of stripes, or may be rectangular, semi-circular or semi-elliptical. also, The groove does not need to be a straight line, and may also be a curved stripe pattern. Further, the ridge line direction is not limited to the circumferential direction of the belt, and may be the width direction. Further, the fine structure is not limited to a continuous linear shape or a curved shape, and may be a convex shape or a concave shape in which a hemisphere, a cone, a rectangular parallelepiped or the like is discretely arranged in a dot shape.

如第4、5圖所示,模具3被懸跨於加熱輥4及冷卻輥5上,冷卻輥5係於藉由軸承13、14所旋轉支撐兩端之狀態下被設置於架台15上。於是,架台15係藉由滑軌16可朝模具3之運送方向平行地滑行移動,藉此,使設有冷卻輥5之架台15移動,藉以調整懸跨於冷卻輥5上之模具3的運送方向之位置。此時,以架台15及滑軌16係設置於水平之面上,且對於可動方向之外力以極小的阻力移動較為適宜。架台15係透過荷重檢測器20來與將伺服馬達17及進給螺桿18組合而成之可動手段19連結,荷重檢測器20係於測量施加於架台15之可動方向的力,即自模具3對設置於架台15上的冷卻輥5所傳遞的張力之方向連接。藉此,於架台15移動,使得模具3在施加張力之狀態下懸跨於加熱輥4及冷卻輥5之間時,於荷重檢測器20負載有與施加於模具3之上下面的張力大致相等的力。伺服馬達17及荷重檢測器20係藉由未圖示之控制電路所連接,且配合荷重檢測器20之檢測值的變動,控制可動手段19之移動量,以施加於模具3上之張力始終保持一定的方式,自動地調整冷卻輥5之位置。 As shown in Figs. 4 and 5, the mold 3 is suspended over the heating roller 4 and the cooling roller 5, and the cooling roller 5 is placed on the gantry 15 in a state in which both ends of the bearings 13 and 14 are rotatably supported. Then, the gantry 15 is slidably moved in parallel by the slide rail 16 in the transport direction of the mold 3, whereby the gantry 15 provided with the chill roll 5 is moved, thereby adjusting the transport of the mold 3 suspended over the chill roll 5. The position of the direction. At this time, the gantry 15 and the slide rail 16 are provided on the horizontal surface, and it is preferable to move the force with a small resistance to the force other than the movable direction. The gantry 15 is coupled to the movable means 19 in which the servo motor 17 and the feed screw 18 are combined by the load detector 20, and the load detector 20 is used to measure the force applied to the movable direction of the gantry 15, that is, from the mold 3 The direction of the tension transmitted by the cooling rolls 5 provided on the gantry 15 is connected. Thereby, when the gantry 15 is moved so that the mold 3 is suspended between the heating roller 4 and the cooling roller 5 in a state where tension is applied, the load detector 20 is loaded with the tension substantially equal to the upper and lower sides applied to the mold 3. Force. The servo motor 17 and the load detector 20 are connected by a control circuit (not shown), and the amount of movement of the movable means 19 is controlled in accordance with the fluctuation of the detected value of the load detector 20, so that the tension applied to the mold 3 is always maintained. In a certain manner, the position of the cooling roller 5 is automatically adjusted.

支撐冷卻輥5之兩端的轴承當中的一軸承14,係藉由將設於架台15上之伺服馬達21及進給螺桿22組合而成之 可動手段23,可於架台15上進一步朝模具3之運送方向平行移動。此時,另一軸承13係固定於架台15上,藉由軸承14於架台15上移動,冷卻輥5以軸承13為支點進行旋轉,而相對於加熱輥4作傾動。決定冷卻輥5傾動之角度的軸承14之位置,係配合模具3之寬度方向位置而被控制,於第4圖中,將加熱輥4與冷卻輥5平行時之軸承14的位置作為基準,於模具3之寬度方向位置朝第4圖之y1方向偏移時,軸承14朝x1方向移動,於模具3朝y2方向偏移時,軸承14朝x2方向移動。模具3之寬度方向位置的變動,係藉由蛇行檢測感測器24所監視。第9圖為顯示自膜運送方向下游側觀察蛇行檢測感測器24及模具3時之概略圖。蛇行檢測感測器24係被分為發訊側24a及收訊側24b之光量檢測式等的非接觸線型感測器,且以發訊訊號之一部分被模具3所遮斷的方式,並以覆被於模具3之寬度方向端部的方式所設置。然後,根據收訊側24b所接收之訊號量的大小來檢測模具3之寬度方向位置。伺服馬達21及蛇行檢測感測器24係藉由未圖示之控制電路所連接,並配合蛇行檢測感測器24之檢測值來確定可動手段23之移動量。另外,以模具3之寬度方向位置始終在既定範圍內的方式控制冷卻輥5之角度,防止模具3之蛇行。又,作為使冷卻輥5傾動之手段,如第6圖所示,亦可於架台15上使支撐冷卻輥5之軸承13及14移動。藉此,比僅使一方之軸承移動的情況,可更高精度地調整冷卻輥5之角度。 One of the bearings supporting the both ends of the cooling roller 5 is formed by combining a servo motor 21 and a feed screw 22 provided on the gantry 15. The movable means 23 is further movable parallel to the transport direction of the mold 3 on the gantry 15. At this time, the other bearing 13 is fixed to the gantry 15, and the bearing 14 is moved on the gantry 15, and the cooling roller 5 is rotated by the bearing 13 as a fulcrum, and is tilted with respect to the heating roller 4. The position of the bearing 14 that determines the angle at which the cooling roller 5 is tilted is controlled in accordance with the position in the width direction of the mold 3. In Fig. 4, the position of the bearing 14 when the heating roller 4 and the cooling roller 5 are parallel is used as a reference. When the position in the width direction of the mold 3 is shifted in the y1 direction of FIG. 4, the bearing 14 moves in the x1 direction, and when the mold 3 is displaced in the y2 direction, the bearing 14 moves in the x2 direction. The change in the position of the mold 3 in the width direction is monitored by the meandering detecting sensor 24. Fig. 9 is a schematic view showing the meandering detection sensor 24 and the mold 3 viewed from the downstream side in the film transport direction. The meandering detection sensor 24 is divided into a non-contact line type sensor such as a light amount detecting type of the transmitting side 24a and the receiving side 24b, and is blocked by the mold 3 in a part of the signaling signal, and The cover is provided in such a manner as to cover the end portion of the mold 3 in the width direction. Then, the width direction position of the mold 3 is detected based on the magnitude of the signal amount received by the receiving side 24b. The servo motor 21 and the meandering detecting sensor 24 are connected by a control circuit (not shown), and the amount of movement of the movable means 23 is determined in accordance with the detected value of the meandering detecting sensor 24. Further, the angle of the cooling roller 5 is controlled such that the position in the width direction of the mold 3 is always within a predetermined range, and the mold 3 is prevented from being meandered. Further, as a means for tilting the cooling roller 5, as shown in Fig. 6, the bearings 13 and 14 supporting the cooling roller 5 can be moved on the gantry 15. Thereby, the angle of the cooling roll 5 can be adjusted with higher precision than when only one of the bearings is moved.

另外,為了高精度地對模具3之寬度方向位置進行定位,以細微地控制冷卻輥5之角度較為適宜,具體而言, 以將冷卻輥5之角度分解能設定為0.005度以下較為適宜。在此,冷卻輥5之角度分解能係表示於為了進行模具3之蛇行修正而使冷卻輥5傾動時,冷卻輥5之旋轉軸相對於加熱輥4之旋轉軸的角度變化之最小量。藉由將冷卻輥5之角度分解能設定為0.005度以下,於蛇行修正時,模具3之寬度方向位置不會擺動、散開,而被迅速地約束於中心之基準位置。其結果,模具3始終位於寬度方向之中心,從而可穩定且連續地成型膜2。 Further, in order to accurately position the position of the mold 3 in the width direction, it is preferable to finely control the angle of the cooling roll 5, specifically, It is preferable to set the angular decomposition energy of the cooling roll 5 to 0.005 or less. Here, the angular decomposition energy of the cooling roller 5 is the minimum amount of change in the angle of the rotation axis of the cooling roller 5 with respect to the rotation axis of the heating roller 4 when the cooling roller 5 is tilted in order to perform the meandering correction of the mold 3. By setting the angular decomposition energy of the cooling roll 5 to 0.005 degrees or less, the position of the width direction of the mold 3 does not swing and spread during the meander correction, and is quickly restrained to the reference position of the center. As a result, the mold 3 is always located at the center in the width direction, so that the film 2 can be formed stably and continuously.

冷卻輥5之角度分解能,係於將軸承13作為固定側、將軸承14作為移動側之情況下,藉由兩軸承13、14之支點間距離及軸承14之移動分解能所確定,例如,若支點間距離為600mm,則當軸承14之移動分解能為0.05mm時,冷卻輥5之角度分解能約為0.0048度。 The angular decomposition energy of the cooling roller 5 is determined by the distance between the fulcrums of the two bearings 13 and 14 and the movement decomposition energy of the bearing 14 in the case where the bearing 13 is used as the fixed side and the bearing 14 is used as the moving side, for example, if the fulcrum When the distance between the two is 600 mm, the angular decomposition energy of the cooling roller 5 is about 0.0048 degrees when the displacement of the bearing 14 is 0.05 mm.

以冷卻輥5係藉由例如於內部設有通水路,且連續地使一定溫度之水循環之水冷式的冷卻手段等所冷卻較為適宜。於是,藉由與模具3之接觸面上的熱傳導來冷卻模具3。 It is preferable that the cooling roll 5 is cooled by, for example, a water-cooling type cooling means in which a water passage is provided inside and a water of a certain temperature is continuously circulated. Thus, the mold 3 is cooled by heat conduction on the contact surface with the mold 3.

剝離輥7係與冷卻輥5相同內建有冷卻手段,自背面側冷卻成型用膜2,以發揮輔助自模具3剝離之功能。此時,於在模具3之蛇行防止上而使冷卻輥5傾動時,以剝離輥7亦追隨冷卻輥5而傾動,以始終與冷卻輥5保持平行度之方式動作較為適宜。剝離輥7之傾動,例如,如第7及8圖所示,係藉由與冷卻輥5之傾動手段相同的手段所執行。或者,剝離輥7亦可為藉由流體壓汽缸等而對冷卻輥5進行壓抵的構造。剝離輥7之對成型用膜2的按壓力並 無特別限制,只要使剝離輥7之周面與成型用膜2的背面密接即可。 The peeling roller 7 has a cooling means built in the same manner as the cooling roll 5, and the film 2 for molding is cooled from the back side to function to assist the peeling from the die 3. At this time, when the cooling roller 5 is tilted while the meandering of the mold 3 is prevented, the peeling roller 7 is also tilted following the cooling roller 5, and it is preferable to operate in such a manner as to always maintain parallelism with the cooling roller 5. The tilting of the peeling roller 7, for example, as shown in Figs. 7 and 8, is performed by the same means as the tilting means of the cooling roller 5. Alternatively, the peeling roller 7 may have a structure in which the cooling roller 5 is pressed against a fluid pressure cylinder or the like. Pressing force of the peeling roller 7 against the film 2 for forming It is not particularly limited as long as the circumferential surface of the peeling roller 7 is in close contact with the back surface of the film for molding 2 .

捲出輥8及捲取輥9均為可固定捲繞成型用膜2之芯的構造,端部與馬達等之驅動手段連結,且可一面控制速度一面旋轉。另外,以可藉由轉矩控制,來調整供給於成型用膜2之張力較為適宜。 Each of the take-up roll 8 and the take-up roll 9 has a structure in which the core of the film 2 for winding and molding can be fixed, and the end portion is connected to a driving means such as a motor, and can be rotated while controlling the speed. Further, it is preferable to adjust the tension applied to the film 2 for molding by torque control.

各輥之端部係藉由滾動軸承等所旋轉支撐。加熱輥4係與馬達等之驅動手段連結,且可一面控制速度一面旋轉。另外,以冷卻輥5係通過帶模具而藉由加熱輥4之驅動力進行旋轉較為適宜。運送速度係考慮細微構造之成型性及成型膜之生產性的平衡所決定,但為了一面高精度地轉印細微構造一面提高生產性,以速度係自1~30m/分鐘之範圍所決定較為適宜。以軋輥6之驅動手段係以鍊條或皮帶等與加熱輥4之端部連結,與加熱輥4連動進行旋轉,或者使用能與加熱輥4之速度同步的馬達等獨立地進行旋轉較為適宜,但作為可自由旋轉之構造,亦可藉由與成型用膜2摩擦而進行旋轉。 The ends of the rolls are rotatably supported by rolling bearings or the like. The heating roller 4 is coupled to a driving means such as a motor, and is rotatable while controlling the speed. Further, it is preferable that the cooling roller 5 is rotated by the driving force of the heating roller 4 by the belt mold. The transport speed is determined in consideration of the balance between the moldability of the fine structure and the productivity of the formed film. However, in order to improve the productivity while transferring the fine structure with high precision, it is preferable to determine the speed from 1 to 30 m/min. . The driving means of the roll 6 is connected to the end of the heating roller 4 by a chain or a belt, and is rotated in conjunction with the heating roller 4, or is rotated independently using a motor that can synchronize with the speed of the heating roller 4, but it is preferable to rotate independently. As a structure which can rotate freely, it can rotate by rubbing with the film 2 for shaping|molding.

又,支撐各輥之軸承係根據此輥之質量或受到之負載、旋轉速度等所設計,但以使用調心式之軸承作為支撐冷卻輥5及剝離輥7的軸承較為適宜。這些輥使用不是調心式之軸承的情況下,於輥傾動時,恐有撬起而損傷軸承之虞。 Further, the bearing for supporting each roller is designed according to the quality of the roller or the load, the rotational speed, and the like. However, it is preferable to use a bearing of a aligning type as a bearing for supporting the cooling roller 5 and the peeling roller 7. When these rolls are used as bearings that are not self-aligning, when the rolls are tilted, they may be picked up and the bearings may be damaged.

針對使用該裝置而於表面形成細微構造之膜的製造方法進行說明。 A method of producing a film having a fine structure on its surface using this apparatus will be described.

本發明之細微構造轉印膜之製造方法,係使用細微 構造轉印膜之製造裝置,在滿足以下之(1)或(2)之條件下依序通過以下之5個製程,藉以對至少一面具有被轉印層之膜進行加工,該細微構造轉印膜之製造裝置係具有懸跨於加熱輥與冷卻輥且表面具有細微構造之無端環帶狀的轉印模具;模具加熱製程,係一面使表面形成有細微構造之無端環帶狀的模具環抱於已被加熱之加熱輥一面進行加熱;加壓轉印製程,係在使膜之轉印側表面與該模具的細微構造表面密接之狀態下,藉由包含該加熱輥之一對輥進行挾持加壓;運送製程,係在使加壓後之該模具與該膜保持密接的狀態下運送至冷卻區;冷卻製程,係在該冷卻區使模具與膜保持密接之狀態下自模具側進行冷卻;剝離製程,係剝離冷卻後之模具及膜。在此,條件(1)係指該膜之寬度係比該模具之寬度還寬,且在該加壓轉印製程中,該膜之寬度方向兩端部係自該加熱輥分離。條件(2)係指該模具之寬度係比該膜之寬度還寬,且在該加壓轉印製程中,該膜所受到加壓之區域的寬度係比該膜之寬度還窄。 The manufacturing method of the fine structure transfer film of the present invention is fine The manufacturing apparatus for constructing a transfer film sequentially passes through the following five processes under the conditions of (1) or (2) below, thereby processing a film having a transfer layer on at least one side, the fine structure transfer The film manufacturing apparatus has an endless belt-shaped transfer mold which is suspended from the heating roller and the cooling roller and has a fine structure on the surface thereof; the mold heating process is surrounded by a mold having an endless belt-like shape in which a fine structure is formed on the surface. The heated heating roller is heated while being heated; the pressure transfer printing process is performed by holding one of the heating rollers in a state in which the transfer side surface of the film is in close contact with the fine structural surface of the mold. The conveying process is carried to the cooling zone in a state in which the mold is kept in close contact with the film after being pressurized; the cooling process is performed in the cooling zone to keep the mold and the film in close contact with each other; The stripping process is to strip the cooled mold and film. Here, the condition (1) means that the width of the film is wider than the width of the mold, and in the pressure transfer process, both ends in the width direction of the film are separated from the heating roller. The condition (2) means that the width of the mold is wider than the width of the film, and in the press transfer process, the width of the pressed region of the film is narrower than the width of the film.

使用第1~4圖,針對本發明之實施形態的一例進行說明。 An example of an embodiment of the present invention will be described using Figs. 1 to 4 .

首先,作為製造方法之準備階段,構成自捲出輥8引出成型用膜2,於開放軋輥6之狀態下,沿懸跨於加熱輥4與冷卻輥5之模具3上,經由剝離輥7,以捲取輥9給予捲繞的狀態。 First, as a preparation stage of the manufacturing method, the film 2 for forming is taken out from the take-up roll 8, and in a state where the roll 6 is opened, the mold 3 which is suspended over the heat roller 4 and the cooling roll 5 passes through the peeling roll 7, The winding state is given by the take-up roll 9.

接著,一面藉由驅動手段以低速運送成型用膜2,一面使加熱輥4之加熱手段及冷卻輥5的冷卻手段動作,將 加熱輥4及冷卻輥5之表面溫度調溫至既定的溫度。一面運送一面進行調溫之理由,是因為若不予運送時,則成型用膜2之位於加熱輥4上的部分會蓄熱,因而發生熔融、破裂。加熱輥4之表面溫度、冷卻輥5之表面溫度的條件,係依存於成型用膜2之材質、模具3的細微構造之形狀、深寬比等,以加熱輥4之表面溫度設定為膜2之Tg+50℃至Tg+100℃的範圍內,冷卻輥5之表面溫度設定為膜2之Tg-40℃至Tg-100℃的範圍內較為適宜。在此,Tg表示膜之玻璃轉移溫度。另外,以調溫中之運送速度為0.1~5m/分鐘較為適宜,又以0.1~1m/分鐘更為適宜。 Then, while the molding film 2 is conveyed at a low speed by the driving means, the heating means of the heating roller 4 and the cooling means of the cooling roller 5 are operated. The surface temperatures of the heating roller 4 and the cooling roller 5 are tempered to a predetermined temperature. The reason why the temperature is adjusted while transporting is because the portion of the molding film 2 located on the heating roller 4 stores heat when it is not transported, and thus melts and ruptures. The conditions of the surface temperature of the heating roller 4 and the surface temperature of the cooling roll 5 depend on the material of the film for molding 2, the shape of the fine structure of the mold 3, the aspect ratio, etc., and the surface temperature of the heating roller 4 is set to the film 2 In the range of Tg + 50 ° C to Tg + 100 ° C, the surface temperature of the cooling roll 5 is preferably set within the range of Tg - 40 ° C to Tg - 100 ° C of the film 2. Here, Tg represents the glass transition temperature of the film. In addition, the transport speed in the temperature adjustment is preferably 0.1 to 5 m/min, and more preferably 0.1 to 1 m/min.

將加熱輥4及冷卻輥5之表面溫度(又,模具表面溫度為相同溫度。以下相同。)調溫至設定值,然後,與以成型速度運捲出之同時,閉合軋輥6,以加熱輥4及軋輥6對成型用膜2及模具3進行加壓,將模具3之細微構造面3a的形狀轉印於於膜2之成型面2a。作為此時之條件,膜之成型速度係設定為1~30m/分鐘,線壓係設定為400kN/m以上的範圍。 The surface temperature of the heating roller 4 and the cooling roller 5 (again, the mold surface temperature is the same temperature. The same applies hereinafter) is adjusted to a set value, and then, while being rolled out at the molding speed, the roll 6 is closed to heat the roller. 4 and the roll 6 pressurize the film for molding 2 and the mold 3, and transfer the shape of the fine structure surface 3a of the mold 3 to the molding surface 2a of the film 2. As conditions at this time, the film forming speed was set to 1 to 30 m/min, and the line pressure system was set to a range of 400 kN/m or more.

若配合模具之旋轉動作而排列各製程時,膜之連續轉印係由模具加熱製程、加壓轉印製程、運送製程、冷卻製程、剝離製程所構成。模具3係在與加熱輥4接觸之部分,常藉由來自高溫之加熱輥4的熱傳導而被加熱,迄至藉由加熱輥4及軋輥6所挾壓為止,模具3之溫度被升溫至加熱輥4的表面溫度(模具加熱製程)。成型用膜2係在加熱輥4及軋輥6的挾壓部處,壓抵並密接於被加熱之模 具3,將軟化之構成膜的樹脂充填於模具3之細微構造面3a的圖案內(加壓轉印製程)。被模具3所按壓之膜在保持與模具4密接之狀態下被運送至冷卻區(運送製程)。在此,冷卻區表示模具3與冷卻輥5接觸之範圍。於該冷卻區中,膜藉由與冷卻輥5之熱傳導,將每個模具3冷卻至構成膜之樹脂的玻璃轉移點以下(冷卻製程)。冷卻後之膜,藉由剝離輥7以自冷卻輥5上連續地剝離之方式被脫模(剝離製程)。剝離後之膜則捲繞於捲取輥9上。 When the respective processes are arranged in accordance with the rotation of the mold, the continuous transfer of the film is composed of a mold heating process, a pressure transfer process, a transport process, a cooling process, and a peeling process. The mold 3 is heated in the portion in contact with the heating roller 4, and is usually heated by the heat transfer from the high temperature heating roller 4, and the temperature of the mold 3 is raised to the temperature until the heating roller 4 and the roller 6 are pressed. The surface temperature of the roller 4 (mold heating process). The film for molding 2 is attached to the pressing portion of the heating roller 4 and the roll 6, and is pressed against and adhered to the heated mold. The resin having the softened constituent film is filled in the pattern of the fine structural surface 3a of the mold 3 (pressure transfer process). The film pressed by the mold 3 is conveyed to the cooling zone (conveying process) while being kept in close contact with the mold 4. Here, the cooling zone indicates the range in which the mold 3 is in contact with the cooling roller 5. In the cooling zone, the film is cooled by heat conduction with the cooling roll 5, and each mold 3 is cooled below the glass transition point of the resin constituting the film (cooling process). The film after cooling is released from the cooling roll 5 by the peeling roller 7 (peeling process). The peeled film is wound around the take-up roll 9.

於是,於其中之加壓轉印製程中,如第2圖所示,將成型用膜2之寬度作成比模具3之寬度還寬,且膜2之寬度方向兩端部自加熱輥4分離。或者,如第3圖所示,將模具3之寬度作成比膜2的寬度還寬,且軋輥6之加壓部的寬度比膜2之寬度還窄。藉此,可防止膜2與高溫之加熱輥4直接接觸,可防止膜2之端部因高溫熔化而貼附於加熱輥4的表面,被朝加熱輥4之旋轉方向牽引,以致造成膜2之張力狀態的混亂而發生蛇行。因此,於加壓轉印製程中,以使膜2與加熱輥4不直接接觸較為適宜。 Then, in the pressure transfer process, as shown in FIG. 2, the width of the film for molding 2 is made wider than the width of the mold 3, and both end portions in the width direction of the film 2 are separated from the heating roller 4. Alternatively, as shown in Fig. 3, the width of the mold 3 is made wider than the width of the film 2, and the width of the pressing portion of the roll 6 is narrower than the width of the film 2. Thereby, the film 2 can be prevented from directly contacting the high-temperature heating roller 4, and the end portion of the film 2 can be prevented from being attached to the surface of the heating roller 4 due to high-temperature melting, and is pulled toward the rotating direction of the heating roller 4, so that the film 2 is caused. The chaos of the tension state occurs and snakes. Therefore, in the pressure transfer process, it is preferable that the film 2 and the heating roller 4 are not in direct contact with each other.

另外,於利用該方法製造細微構造轉印膜之期間,以藉由第4圖所示之模具的張力控制及蛇行防止機構,將模具3之張力及寬度方向位置於既定之範圍內始終保持為一定較為適宜。藉由防止模具3之張力變動及蛇行,於加壓轉印製程後之運送製程中,可防止膜2被密接之模具3的蛇行所牽引而一起蛇行的情況。 Further, during the production of the fine structure transfer film by the method, the tension and the width direction of the mold 3 are always maintained within a predetermined range by the tension control and the meandering prevention mechanism of the mold shown in Fig. 4 . It must be more appropriate. By preventing the tension fluctuation and the meandering of the mold 3, it is possible to prevent the film 2 from being caught by the meandering of the mold 3 which is in close contact with each other during the conveyance process after the pressure transfer process.

於是,除上述之外,於加壓轉印製程中,亦可在加壓區域之寬度方向兩端部,使壓力朝寬度方向外側漸漸 地降低。可緩和成型用膜2之端部上的彎曲、於加壓區域與非加壓區域之境界部所產生之加壓痕跡,抑制成型後之膜的平面性惡化、或捲繞時之捲取姿勢的混亂。 Therefore, in addition to the above, in the pressure transfer process, the pressure may be gradually increased toward the outside in the width direction at both end portions in the width direction of the pressurizing region. Reduced ground. The bending at the end portion of the film 2 for molding and the pressure trace generated at the boundary portion between the pressurized region and the non-pressurized region can be alleviated, and the deterioration of the planarity of the film after molding or the winding posture at the time of winding can be suppressed. pickle.

應用於本發明之成型用膜2,係採用以熱可塑性樹脂作為主成分之熱可塑性膜,具體而言,以由聚對苯二甲酸乙二酯、聚2,6-萘二甲酸乙二酯、聚對苯二甲酸丙二酯、聚對苯二甲酸丁二酯等之聚酯系樹脂、聚乙烯、聚苯乙烯、聚丙烯、聚異丁烯、聚丁烯、聚甲基戊烯等之聚烯烴系樹脂、聚醯胺系樹脂、聚醯亞胺系樹脂、聚醚系樹脂、聚酯醯胺系樹脂、聚醚酯系樹脂、丙烯酸系樹脂、聚胺基甲酸酯系樹脂、聚碳酸酯系樹脂、或者聚氯乙烯系樹脂等所構成。其中考慮到共聚合之單體種類眾多,且能根據此情況容易進行材料物性之調整等的理由,尤其以自聚酯系樹脂、聚烯烴系樹脂、聚醯胺系樹脂、丙烯酸系樹脂或這些之混合物中所選出的熱可塑性樹脂為主而形成較為適宜,又以該熱可塑性樹脂係由50重量%以上所構成較為適宜。 The film 2 for molding used in the present invention is a thermoplastic film containing a thermoplastic resin as a main component, specifically, polyethylene terephthalate or polyethylene-2,6-naphthalate. Polyester resin such as polytrimethylene terephthalate or polybutylene terephthalate, polyethylene, polystyrene, polypropylene, polyisobutylene, polybutene, polymethylpentene, etc. Olefin resin, polyamine resin, polyimide resin, polyether resin, polyester amide resin, polyether ester resin, acrylic resin, polyurethane resin, polycarbonate It is composed of an ester resin or a polyvinyl chloride resin. In view of the fact that the number of monomers to be copolymerized is large, and the physical properties of the material can be easily adjusted according to the above circumstances, in particular, polyester-based resins, polyolefin-based resins, polyamine-based resins, acrylic resins, or the like are used. It is preferable that the thermoplastic resin selected in the mixture is mainly formed, and it is preferable that the thermoplastic resin is composed of 50% by weight or more.

成型用膜2可為由上述樹脂之單體所構成的膜,亦可為由複數之樹脂層所構成的積層體。於此情況下,與單體膜比較,可賦予易滑性、耐摩擦性等之表面特性、機械強度、耐熱性。如此,作為由複數之樹脂層所構成的積層體之情況,以膜整體滿足以該熱可塑性樹脂為主成分之要件較為適宜,但作為膜整體亦可不滿足該要件,只要至少於表層形成滿足該要件之層的話,即可容易地形成表面。尤其是於為了完善成型性而欲將模具溫度升 為高溫之情況下,藉由使用所謂於表層為玻璃轉移點低且容易轉印細微構造之樹脂、於芯層為玻璃轉移點高且強度高之樹脂的構成之膜,可一面維持膜之平面性,一面提高膜之成型性。 The film for molding 2 may be a film composed of a monomer of the above resin, or may be a laminate composed of a plurality of resin layers. In this case, surface characteristics, mechanical strength, and heat resistance such as slipperiness and abrasion resistance can be imparted as compared with the monomer film. As described above, in the case of a laminate comprising a plurality of resin layers, it is preferable that the entire film satisfies a requirement of the thermoplastic resin as a main component, but the film may not satisfy the requirements as a whole, as long as at least the surface layer satisfies the requirement. The surface of the element can be easily formed by the layer of the element. Especially in order to improve the moldability, the mold temperature is raised. In the case of a high temperature, the film can be maintained while using a film having a structure in which the surface layer is a resin having a low glass transition point and is easy to transfer a fine structure, and the core layer is a resin having a high glass transition point and high strength. Sex, while improving the formability of the film.

若採用以上之細微構造轉印膜之製造方法,於壓抵由表面形成有細微構造之無端環帶所構成的模具,於膜之表面連續地轉印細微構造時,不會使膜發生蛇行,可穩定地進行運送,從而能以高生產性製造高精度之轉印膜。 According to the above method for producing a fine structure transfer film, when a mold composed of an endless belt having a fine structure formed on the surface is pressed, and the fine structure is continuously transferred to the surface of the film, the film does not cause a meandering. The transport can be carried out stably, so that a high-precision transfer film can be manufactured with high productivity.

[實施例] [Examples] 實施例1 Example 1

成型用膜2係使用藉由對將聚碳酸酯樹脂作為芯層,且於其兩面作為成型層而積層PMMA樹脂的3層積層膜進行共擠壓而製成者。該膜之總厚度為200μm,各層之積層比大約為1:8:1,寬度為220mm。 The film for molding 2 is produced by co-extruding a three-layer laminated film in which a polycarbonate resin is used as a core layer and a PMMA resin is laminated on both surfaces thereof as a molding layer. The film had a total thickness of 200 μm, and the laminate ratio of each layer was approximately 1:8:1 and the width was 220 mm.

模具3係於在厚度為0.2mm之不鏽鋼帶的表面施以厚度為0.1mm之鍍鎳而得者上,與該帶之周方向平行地切削加工間距為40μm、深度為20μm之V槽形狀所製成。另外,該帶之寬度為200mm,周長為1200mm。 The mold 3 is formed by applying nickel plating having a thickness of 0.1 mm to the surface of a stainless steel belt having a thickness of 0.2 mm, and a V-groove shape having a cutting pitch of 40 μm and a depth of 20 μm in parallel with the circumferential direction of the belt. production. In addition, the belt has a width of 200 mm and a circumference of 1200 mm.

加熱輥4係使用於由碳素鋼構成之筒狀芯材的表面施以鍍硬質鉻者。加熱輥4係作成於輥部之寬度方向兩端具有段差4a的形狀,懸跨模具3之中央部,係寬度為204mm,外徑為180mm,兩端之段差4a的表面與膜寬度方向端部之分離距離H為10mm,自該段差4a至模具3的端部之長度u為2mm,將中央部與兩端之段差4a合併所得之 整體寬度為220mm。另外,中央部係作成於整個寬度上無錐形(taper)等之外徑變化的圓筒形。加熱手段係使用紅外線燈管加熱器,且將加熱輥4之表面溫度加熱至180℃。 The heating roller 4 is used for applying hard chromium to the surface of a cylindrical core material made of carbon steel. The heating roller 4 is formed in a shape having a step 4a at both ends in the width direction of the roller portion, and is suspended from the center portion of the mold 3 to have a width of 204 mm and an outer diameter of 180 mm, and a surface of the step 4a at both ends and an end portion in the film width direction. The separation distance H is 10 mm, and the length u from the step 4a to the end of the mold 3 is 2 mm, and the difference between the central portion and the end portions 4a is obtained. The overall width is 220mm. Further, the central portion is formed in a cylindrical shape in which the outer diameter of the taper or the like is changed over the entire width. The heating means uses an infrared lamp heater, and the surface temperature of the heating roller 4 is heated to 180 °C.

冷卻輥5係與加熱輥4相同,使用將碳素鋼作為芯材且表面施以鍍硬質鉻者。冷卻輥5係藉由循環於內部之流水,始終將表面溫度保持為20℃。 The cooling roll 5 is the same as the heating roll 4, and a carbon steel is used as a core material and the surface is plated with hard chromium. The chill roll 5 is maintained at a surface temperature of 20 ° C by circulating water inside.

軋輥6係使用於由寬度為220mm、外徑為160mm之碳素鋼構成的筒狀之芯材表面全面,以20mm之厚度披覆作為彈性層10的聚酯樹脂(硬度:邵氏D86°)的膜者。 The roll 6 is used for a cylindrical core material composed of carbon steel having a width of 220 mm and an outer diameter of 160 mm, and is covered with a polyester resin (hardness: Shore D86°) as the elastic layer 10 at a thickness of 20 mm. The filmer.

按壓手段12係使用空氣壓汽缸,對軋輥6負載120kN之按壓力。此時,於使用壓力測量膜(感壓紙(prescale),Fuji Film股份有限公司製)對軋輥6與成型用膜2之接觸寬度B進行確認時,為6mm。藉此,負載於成型用膜2上之外觀軋壓σ=100MPa。 The pressing means 12 uses an air pressure cylinder to apply a pressing force of 120 kN to the roll 6. At this time, when the contact width B of the roll 6 and the film for molding 2 was confirmed using a pressure measuring film (pre-scale, manufactured by Fuji Film Co., Ltd.), it was 6 mm. Thereby, the external rolling pressure σ of the film for molding 2 is 100 MPa.

膜之成型速度係設為5m/分鐘、10m/分鐘、15m/分鐘之3個條件。 The molding speed of the film was set to three conditions of 5 m/min, 10 m/min, and 15 m/min.

於本實施例中,加壓成型部上之膜2與加熱輥4不會黏著,且能以運送速度15m/分鐘穩定且連續地成型細微構造轉印膜。 In the present embodiment, the film 2 on the press-molded portion and the heat roller 4 are not adhered, and the fine structure transfer film can be stably and continuously formed at a transport speed of 15 m/min.

實施例2 Example 2

本實施例係除了實施例1之構成以外,還於加熱輥4之懸跨模具3的中央部的寬度方向長度204mm中的兩端12mm的範圍內,將輥徑自原來之外徑180mm朝寬度方向外側漸漸地減小最大為0.1mm。段差4a之表面與膜寬度 方向端部之分離距離H、及自段差4a至模具3的端部之長度u,係與實施例1相同,另外,有關加熱輥4以外之構成,亦與實施例1相同。 In the present embodiment, in addition to the configuration of the first embodiment, the roller diameter is from the original outer diameter of 180 mm toward the width direction in the range of 12 mm from both ends in the width direction length 204 mm of the center portion of the heating roller 4 in the center portion of the suspension mold 3. The outer side gradually decreases by a maximum of 0.1 mm. Surface and film width of step 4a The separation distance H of the direction end portion and the length u from the step difference 4a to the end portion of the mold 3 are the same as those of the first embodiment, and the configuration other than the heating roller 4 is also the same as that of the first embodiment.

按壓手段12係使用空氣壓汽缸,且對軋輥6負載120kN之按壓力。此時,於使用壓力測量膜(感壓紙(prescale),Fuji Film股份有限公司製)對軋輥6與成型用膜2之接觸寬度B進行測量時,軋壓部之中央部為6mm,但於兩端部漸漸地減少,最外端之寬度成為5.5mm,藉此,確認於膜寬度方向兩端部上,軋壓漸漸地減小。 The pressing means 12 uses an air pressure cylinder and applies a pressing force of 120 kN to the roller 6. At this time, when the contact width B between the roll 6 and the film 2 for molding was measured using a pressure measuring film (pre-scale, manufactured by Fuji Film Co., Ltd.), the center portion of the rolled portion was 6 mm, but The both end portions were gradually reduced, and the width of the outermost end was 5.5 mm. This confirmed that the rolling pressure gradually decreased at both end portions in the film width direction.

膜之成型速度係設為5m/分鐘、10m/分鐘、15m/分鐘之3個條件。於本實施例中,除了迄至運送速度15m/分鐘為止能無蛇行而連續地成型細微構造轉印膜以外,還可緩和成型後之膜端部上的彎曲,穩定地成型平面性優良之膜。 The molding speed of the film was set to three conditions of 5 m/min, 10 m/min, and 15 m/min. In the present embodiment, the fine structure transfer film can be continuously formed without a meandering until the conveyance speed is 15 m/min, and the bending at the end portion of the film after molding can be relaxed, and the film having excellent planarity can be stably molded. .

實施例3 Example 3

成型用膜2係使用藉由對將聚碳酸酯樹脂作為芯層,且於其兩面作為成型層而積層PMMA樹脂的3層積層膜進行共擠壓而製成者。該膜之總厚度為200μm,各層之積層比大約為1:8:1,寬度為180mm。 The film for molding 2 is produced by co-extruding a three-layer laminated film in which a polycarbonate resin is used as a core layer and a PMMA resin is laminated on both surfaces thereof as a molding layer. The film had a total thickness of 200 μm, and the laminate ratio of each layer was approximately 1:8:1 and the width was 180 mm.

模具3係於在厚度為0.2mm之不鏽鋼帶的表面施以厚度為0.1mm之鍍鎳者上,與該帶之周方向平行地切削加工間距為40μm、深度為20μm之V槽形狀而製成。另外,該帶之寬度為200mm,周長為1200mm。 The mold 3 is formed by applying a nickel plating having a thickness of 0.1 mm to the surface of a stainless steel belt having a thickness of 0.2 mm, and cutting a V-groove having a pitch of 40 μm and a depth of 20 μm in parallel with the circumferential direction of the belt. . In addition, the belt has a width of 200 mm and a circumference of 1200 mm.

加熱輥4係使用於由碳素鋼構成之筒狀芯材的表面施以鍍硬質鉻者。加熱輥4係作成於輥部之整個寬度上無 段差或錐形等之形狀變化的圓筒形,外徑為180mm,寬度為220mm。另外,加熱手段係使用紅外線燈管加熱器,且將加熱輥4之表面溫度加熱至180℃。 The heating roller 4 is used for applying hard chromium to the surface of a cylindrical core material made of carbon steel. The heating roller 4 is formed on the entire width of the roller portion. A cylindrical shape in which the shape of the step or the taper changes, the outer diameter is 180 mm, and the width is 220 mm. Further, the heating means uses an infrared lamp heater, and the surface temperature of the heating roller 4 is heated to 180 °C.

冷卻輥5係與加熱輥4相同,使用將碳素鋼作為芯材且表面施以鍍硬質鉻者。冷卻輥5係藉由循環於內部之流水,始終將表面溫度保持為20℃。 The cooling roll 5 is the same as the heating roll 4, and a carbon steel is used as a core material and the surface is plated with hard chromium. The chill roll 5 is maintained at a surface temperature of 20 ° C by circulating water inside.

軋輥6係使用於由寬度為160mm、外徑為160mm之碳素鋼構成的筒狀之芯材表面全面,以20mm之厚度披覆作為彈性層10的聚酯樹脂(硬度:邵氏D86°)的膜者。 The roll 6 is used for a cylindrical core material composed of carbon steel having a width of 160 mm and an outer diameter of 160 mm, and is covered with a polyester resin (hardness: Shore D86°) as the elastic layer 10 at a thickness of 20 mm. The filmer.

按壓手段12係使用空氣壓汽缸,對軋輥6負載96kN之按壓力。此時,於使用壓力測量膜(感壓紙(prescale),Fuji Film股份有限公司製)對軋輥6與成型用膜2之接觸寬度B進行確認時,為6mm。藉此,負載於成型用膜2上之外觀軋壓σ=100MPa。 The pressing means 12 uses an air pressure cylinder to apply a pressing force of 96 kN to the roll 6. At this time, when the contact width B of the roll 6 and the film for molding 2 was confirmed using a pressure measuring film (pre-scale, manufactured by Fuji Film Co., Ltd.), it was 6 mm. Thereby, the external rolling pressure σ of the film for molding 2 is 100 MPa.

膜之成型速度係設為5m/分鐘、10m/分鐘、15m/分鐘之3個條件。本實施例亦與實施例1相同,加壓成型部上之膜2與加熱輥4不會黏著,且能迄至運送速度15m/分鐘為止穩定且連續地成型細微構造轉印膜。 The molding speed of the film was set to three conditions of 5 m/min, 10 m/min, and 15 m/min. Also in the present embodiment, as in the first embodiment, the film 2 on the press-molded portion and the heat roller 4 are not adhered, and the fine structure transfer film can be stably and continuously formed up to a conveyance speed of 15 m/min.

實施例4 Example 4

本實施例係除了實施例3之構成以外,還於加熱輥4之懸跨模具3的中央部的寬度方向長度220mm中的兩端30mm的範圍內,將輥徑自原來之外徑180mm朝寬度方向外側漸漸地減小最大為0.2mm。有關加熱輥4以外之構成,係與實施例3相同。 In the present embodiment, in addition to the configuration of the third embodiment, the roller diameter is 180 mm from the original outer diameter to the width direction in the range of 30 mm from both ends in the width direction of the center portion of the heating roller 4 in the width direction of the center portion of the die 3 The outer side gradually decreases by a maximum of 0.2 mm. The configuration other than the heating roller 4 is the same as that of the third embodiment.

按壓手段12係使用空氣壓汽缸,且對軋輥6負載96kN 之按壓力。此時,於使用壓力測量膜(感壓紙(prescale),Fuji Film股份有限公司製)對軋輥6與成型用膜2之接觸寬度B進行測量時,軋壓部之中央部為6mm,但於兩端部漸漸地減少,最外端之寬度成為5.6mm,藉此,確認於膜寬度方向兩端部上,軋壓漸漸地減小。 The pressing means 12 uses an air pressure cylinder and loads the roller 6 with 96 kN. Pressing pressure. At this time, when the contact width B between the roll 6 and the film 2 for molding was measured using a pressure measuring film (pre-scale, manufactured by Fuji Film Co., Ltd.), the center portion of the rolled portion was 6 mm, but The width of the outermost end was gradually reduced, and the width of the outermost end was 5.6 mm. This confirmed that the rolling pressure gradually decreased at both end portions in the film width direction.

膜之成型速度係設為5m/分鐘、10m/分鐘、15m/分鐘之3個條件。 The molding speed of the film was set to three conditions of 5 m/min, 10 m/min, and 15 m/min.

於本實施例中,除了迄至運送速度15m/分鐘為止能無蛇行而連續地成型細微構造轉印膜以外,還可緩和於成型後之膜端部上的加壓/非加壓區域之境界部所產生的加壓痕跡,穩定地成型平面性優良之膜。 In the present embodiment, the fine structure transfer film can be continuously formed without a meandering until the conveyance speed of 15 m/min, and the boundary of the pressed/non-pressurized region on the end portion of the film after molding can be alleviated. The pressure trace generated by the part stably forms a film excellent in planarity.

實施例5 Example 5

本實施例係除了實施例1之構成以外,還使用如第4圖所示之模具3的張力控制及蛇行防止機構,進行模具3之張力及寬度方向位置的控制。施加於模具3之張力係設為6kN/m,以裝置運行中始終保持此值之方式控制架台15的位置。另外,以蛇行檢測感測器24監視模具3之寬度方向位置,以模具3之寬度方向位置始終成為中央的方式,以0.005度單位控制冷卻輥5之角度。 In the present embodiment, in addition to the configuration of the first embodiment, the tension control and the meandering prevention mechanism of the mold 3 shown in Fig. 4 are used to control the position of the mold 3 in the tension and width directions. The tension applied to the mold 3 was set to 6 kN/m, and the position of the gantry 15 was controlled in such a manner that the value was always maintained during the operation of the apparatus. Further, the meandering detection sensor 24 monitors the position in the width direction of the mold 3, and controls the angle of the cooling roller 5 in units of 0.005 degrees so that the position in the width direction of the mold 3 is always centered.

有關其他構成及成型條件,係與實施例1相同。 The other constitutions and molding conditions are the same as in the first embodiment.

本實施例係與實施例1相同,除了加壓成型部上之膜2與加熱輥4不會黏著,且能迄至運送速度15m/分鐘為止穩定且連續地成型細微構造轉印膜以外,將成型後之膜2自模具3脫模之後的運送狀態亦穩定,可獲得捲繞偏差小之成型膜的輥子。 This embodiment is the same as that of the first embodiment except that the film 2 on the press-molded portion and the heat roller 4 are not adhered, and the fine structure transfer film can be stably and continuously formed up to a conveyance speed of 15 m/min. The conveyance state of the film 2 after molding after being released from the mold 3 is also stabilized, and a roll of a molded film having a small winding deviation can be obtained.

實施例6 Example 6

本實施例係除了實施例5之構成以外,還於加熱輥4之寬度方向長度204mm中的兩端12mm的範圍內,將輥徑自原來之外徑180mm朝寬度方向外側漸漸地減小最大為0.1mm。 In the present embodiment, in addition to the configuration of the fifth embodiment, the roller diameter is gradually reduced from the original outer diameter of 180 mm toward the outer side in the width direction to a maximum of 0.1 in the range of 12 mm in both ends of the heating roller 4 in the width direction of 204 mm. Mm.

另外,按壓手段12係使用空氣壓汽缸,且對軋輥6負載120kN之按壓力時,於使用壓力測量膜(感壓紙(prescale),Fuji Film股份有限公司製)對軋輥6與成型用膜2之接觸寬度B進行測量時,軋壓部之中央部為6mm,但於兩端部漸漸地減少,最外端之寬度成為5.5mm,藉此,確認於膜寬度方向兩端部上,軋壓漸漸地減小。 In addition, when the pressing means 12 uses an air-pressure cylinder and applies a pressing force of 120 kN to the roll 6, a pressure measuring film (prescale, manufactured by Fuji Film Co., Ltd.) is used for the roll 6 and the film for molding 2 When the contact width B is measured, the center portion of the rolled portion is 6 mm, but the both end portions are gradually reduced, and the width of the outermost end is 5.5 mm, thereby confirming the rolling at both end portions in the film width direction. Gradually reduce.

有關其他構成及成型條件,係與實施例5相同。 The other constitution and molding conditions are the same as in the fifth embodiment.

本實施例中,不會有加壓成型部上之膜2與加熱輥4之黏著,脫模後之膜2的運送狀態亦穩定,又,成型後之平面性優良,可進行無捲繞姿勢錯亂之細微構造轉印膜的連續成型。 In the present embodiment, the film 2 on the press-molded portion is not adhered to the heat roller 4, the transport state of the film 2 after the mold release is stabilized, and the flatness after molding is excellent, and the roll-free posture can be performed. Discontinuous fine construction of the transfer film.

實施例7 Example 7

本實施例係除了實施例3之構成以外,還使用如第4圖所示之模具3的張力控制及蛇行防止機構,進行模具3之張力及寬度方向位置的控制。施加於模具3之張力係設為6kN/m,以裝置運行中始終保持此值之方式控制架台15的位置。另外,以蛇行檢測感測器24監視模具3之寬度方向位置,以模具3之寬度方向位置始終成為中央的方式,以0.005度單位控制冷卻輥5之角度。 In the present embodiment, in addition to the configuration of the third embodiment, the tension control and the meandering prevention mechanism of the mold 3 shown in Fig. 4 are used to control the position of the mold 3 in the tension and width directions. The tension applied to the mold 3 was set to 6 kN/m, and the position of the gantry 15 was controlled in such a manner that the value was always maintained during the operation of the apparatus. Further, the meandering detection sensor 24 monitors the position in the width direction of the mold 3, and controls the angle of the cooling roller 5 in units of 0.005 degrees so that the position in the width direction of the mold 3 is always centered.

有關其他構成及成型條件,係與實施例3相同。 The other constitutions and molding conditions are the same as in the third embodiment.

本實施例係與實施例3相同,除了加壓成型部上之膜2與加熱輥4不會黏著,且能迄至運送速度15m/分鐘為止穩定且連續地成型細微構造轉印膜以外,將成型後之膜2自模具3脫模之後的運送狀態亦穩定,可獲得捲繞偏差小之成型膜的輥子。 This embodiment is the same as that of the third embodiment except that the film 2 on the press-molded portion and the heat roller 4 are not adhered, and the fine structure transfer film can be stably and continuously formed up to a conveyance speed of 15 m/min. The conveyance state of the film 2 after molding after being released from the mold 3 is also stabilized, and a roll of a molded film having a small winding deviation can be obtained.

實施例8 Example 8

本實施例係除了實施例7之構成以外,還於加熱輥4之寬度方向長度220mm中的兩端30mm的範圍內,將輥徑自原來之外徑180mm朝寬度方向外側漸漸地減小最大為0.2mm。 In the present embodiment, in addition to the configuration of the seventh embodiment, the roller diameter is gradually reduced from the original outer diameter of 180 mm toward the outer side in the width direction to a maximum of 0.2 in the range of 30 mm from both ends of the heating roller 4 in the width direction of 220 mm. Mm.

另外,按壓手段12係使用空氣壓汽缸,且對軋輥6負載96kN之按壓力時,於使用壓力測量膜(感壓紙(prescale),Fuji Film股份有限公司製)對軋輥6與成型用膜2之接觸寬度B進行測量時,軋壓部之中央部為6mm,但於兩端部漸漸地減少,最外端之寬度成為5.6mm,藉此,確認於膜寬度方向兩端部上,軋壓漸漸地減小。 In addition, when the pressing means 12 uses an air-pressure cylinder and applies a pressing force of 96 kN to the roll 6, the pressure measuring film (pre-scale, manufactured by Fuji Film Co., Ltd.) is used for the roll 6 and the film for molding 2 When the contact width B is measured, the center portion of the rolled portion is 6 mm, but the both end portions are gradually reduced, and the width of the outermost end is 5.6 mm, thereby confirming the rolling at both end portions in the film width direction. Gradually reduce.

有關其他構成及成型條件,係與實施例7相同。 The other constitution and molding conditions are the same as in the seventh embodiment.

本實施例中,不會有加壓成型部上之膜2與加熱輥4之黏著,脫模後之膜2的運送狀態亦穩定,又,成型後之平面性優良,可進行無捲繞姿勢混亂之細微構造轉印膜的連續成型。 In the present embodiment, the film 2 on the press-molded portion is not adhered to the heat roller 4, the transport state of the film 2 after the mold release is stabilized, and the flatness after molding is excellent, and the roll-free posture can be performed. The chaotic fine construction of the transfer film is continuously formed.

比較例1 Comparative example 1

成型用膜2係使用藉由對將聚碳酸酯樹脂作為芯層,且於其兩面作為成型層而積層PMMA樹脂的3層積層膜進行共擠壓而製成者。該膜之總厚度為200μm,各層之 積層比大約為1:8:1,寬度為220mm。 The film for molding 2 is produced by co-extruding a three-layer laminated film in which a polycarbonate resin is used as a core layer and a PMMA resin is laminated on both surfaces thereof as a molding layer. The total thickness of the film is 200 μm, and the layers are The laminate ratio is approximately 1:8:1 and the width is 220 mm.

模具3係於在厚度為0.2mm之不鏽鋼帶的表面施以厚度為0.1mm之鍍鎳者上,與該帶之周方向平行地切削加工間距為40μm、深度為20μm之V槽形狀而製成。另外,該帶之寬度為200mm,周長為1200mm。 The mold 3 is formed by applying a nickel plating having a thickness of 0.1 mm to the surface of a stainless steel belt having a thickness of 0.2 mm, and cutting a V-groove having a pitch of 40 μm and a depth of 20 μm in parallel with the circumferential direction of the belt. . In addition, the belt has a width of 200 mm and a circumference of 1200 mm.

加熱輥4係使用於由碳素鋼構成之筒狀芯材的表面施以鍍硬質鉻者。加熱輥4係作成於輥部之全寬度上無段差或錐形等之形狀變化的圓筒形,外徑為180mm,寬度為220mm。另外,加熱手段係使用紅外線燈管加熱器,且將加熱輥4之表面溫度加熱至180℃。 The heating roller 4 is used for applying hard chromium to the surface of a cylindrical core material made of carbon steel. The heating roller 4 is formed into a cylindrical shape having a shape which does not have a step or a taper shape over the entire width of the roller portion, and has an outer diameter of 180 mm and a width of 220 mm. Further, the heating means uses an infrared lamp heater, and the surface temperature of the heating roller 4 is heated to 180 °C.

冷卻輥5係與加熱輥4相同,使用將碳素鋼作為芯材且表面施以鍍硬質鉻者。冷卻輥5係藉由循環於內部之流水,始終將表面溫度保持為20℃。 The cooling roll 5 is the same as the heating roll 4, and a carbon steel is used as a core material and the surface is plated with hard chromium. The chill roll 5 is maintained at a surface temperature of 20 ° C by circulating water inside.

軋輥6係使用於由寬度為220mm、外徑為160mm之碳素鋼所構成的筒狀之芯材表面全面,以20mm之厚度披覆作為彈性層10的聚酯樹脂(邵氏硬度:D86°)的膜者。藉此,成型用膜2係於整個寬度上被挾持,膜之寬度方向兩端部直接接觸於加熱輥4。 The roll 6 is used for a cylindrical core material composed of carbon steel having a width of 220 mm and an outer diameter of 160 mm, and is coated with a polyester resin as the elastic layer 10 at a thickness of 20 mm (Shore hardness: D86°). The filmer. Thereby, the film for molding 2 is held over the entire width, and both end portions in the width direction of the film are in direct contact with the heating roller 4.

按壓手段12係使用空氣壓汽缸,且設負載於軋輥6之按壓力為120kN,設負載於成型用膜2上之外觀軋壓σ=100MPa。 The pressing means 12 is an air-pressure cylinder, and the pressing force applied to the roll 6 is 120 kN, and the external rolling pressure σ = 100 MPa which is supported on the film 2 for forming.

膜之成型速度係設為5m/分鐘、10m/分鐘、15m/分鐘之3個條件。比較例1之細微構造轉印膜,係於運送速度5m/分鐘時略微產生蛇行,而無法穩定地連續成型。另外,當成為運送速度10m/分鐘以上時,膜於加壓後立即急 遽地發生蛇行,而無法連續地成型。 The molding speed of the film was set to three conditions of 5 m/min, 10 m/min, and 15 m/min. The fine structure transfer film of Comparative Example 1 was slightly serpentine at a conveyance speed of 5 m/min, and was not stably molded continuously. In addition, when the conveyance speed is 10 m/min or more, the film is urgent immediately after pressurization. Snakes occur in the ground and cannot be formed continuously.

1‧‧‧細微構造轉印膜之製造裝置 1‧‧‧Manufacturing device for fine structure transfer film

2‧‧‧成型用膜 2‧‧‧Forming film

2a‧‧‧成型用膜之成型面 2a‧‧‧Forming surface of molding film

3‧‧‧模具 3‧‧‧Mold

3a‧‧‧模具之細微構造面 3a‧‧‧Miniature construction surface of the mold

4‧‧‧加熱輥 4‧‧‧heating roller

4a‧‧‧加熱輥之段差部 4a‧‧‧The section of the heating roller

5‧‧‧冷卻輥 5‧‧‧Cooling roller

6‧‧‧軋輥 6‧‧‧ Rolls

7‧‧‧剝離輥 7‧‧‧ peeling roller

8‧‧‧捲出輥 8‧‧‧Rolling roll

9‧‧‧捲取輥 9‧‧‧Winding roller

10‧‧‧彈性層 10‧‧‧Elastic layer

11、13、14、26、27‧‧‧軸承 11, 13, 14, 26, 27‧ ‧ bearings

12‧‧‧按壓手段 12‧‧‧Measure means

15‧‧‧架台 15‧‧‧ 台台

16‧‧‧滑軌 16‧‧‧Slide rails

17、21‧‧‧伺服馬達 17, 21‧‧‧ servo motor

18、22‧‧‧進給螺桿 18, 22‧‧‧ Feed screw

19、23‧‧‧可動手段 19, 23‧‧‧ movable means

20‧‧‧荷重檢測器 20‧‧‧Load detector

24‧‧‧蛇行檢測感測器 24‧‧‧Snake detection sensor

24a‧‧‧蛇行檢測感測器之發訊側 24a‧‧‧Snake detection sensor side

24b‧‧‧蛇行檢測感測器之收訊側 24b‧‧‧The detection side of the snake detection sensor

25‧‧‧流體壓汽缸 25‧‧‧Liquid pressure cylinder

28‧‧‧膜通道 28‧‧‧membrane channel

W‧‧‧成型用膜藉由模具及軋輥所加壓之區域的寬度方向長度 W‧‧‧The length of the width direction of the area where the film for molding is pressed by the mold and the roll

H‧‧‧自加熱輥之懸跨模具的部分表面至兩端段差部的表面之高度(分離距離) H‧‧‧Height of the surface of the heating roller from the surface of the mold to the surface of the difference between the two ends (separation distance)

v‧‧‧自成型用膜受到加壓之區域的端部至成型用膜之寬度方向端部的長度 V‧‧‧ Length from the end of the region where the film for molding is pressed to the end portion in the width direction of the film for molding

u‧‧‧自懸跨於加熱輥之模具的端部至加熱輥兩端的段差部的長度 u‧‧‧The length of the step from the end of the mold of the heating roller to the end of the heating roller

P‧‧‧藉由按壓手段供給於軋輥之力 P‧‧‧Power supplied to the rolls by means of pressing

B‧‧‧與伴隨軋輥表面彈性層之變形的成型用膜的接觸寬度 B‧‧‧Contact width of the film for forming with deformation of the elastic layer on the surface of the roll

δ‧‧‧軋輥表面之彈性層的厚度方向變形量 δ‧‧‧The amount of deformation of the elastic layer on the surface of the roll

σ‧‧‧於加壓部施加於成型用膜之壓力 σ‧‧‧Pressure applied to the film for molding at the pressurizing part

第1圖為自成型用膜寬度方向觀察本發明之細微構造轉印膜製造裝置的一實施形態之概略圖。 Fig. 1 is a schematic view showing an embodiment of the apparatus for manufacturing a fine structure transfer film of the present invention as seen from the film width direction of molding.

第2圖為於本發明之細微構造轉印膜製造裝置之一實施形態中,自成型用膜之運送方向觀察藉由加熱輥及與加熱輥對向之軋輥將成型用膜按壓於模具上的構造之概略圖。 2 is an embodiment of the apparatus for manufacturing a fine structure transfer film according to the present invention, in which the film for molding is pressed against the mold by a heating roll and a roll opposed to the heating roll in the direction in which the film for molding is conveyed. A schematic diagram of the structure.

第3圖為於本發明之細微構造轉印膜製造裝置之另一實施形態中,自成型用膜之運送方向觀察藉由加熱輥及與加熱輥對向之軋輥將成型用膜按壓於模具上的構造之概略圖。 In a third embodiment of the apparatus for manufacturing a fine structure transfer film of the present invention, the film for molding is pressed against the mold by a heating roll and a roll opposed to the heating roll in the direction in which the film for molding is conveyed. A schematic diagram of the structure.

第4圖為顯示本發明之細微構造轉印膜製造裝置中的模具之張力控制及蛇行防止機構的第一實施形態之概略俯視圖。 Fig. 4 is a schematic plan view showing a first embodiment of a tension control and a meandering prevention mechanism of a mold in the apparatus for manufacturing a fine structure transfer film of the present invention.

第5圖為自成型用膜寬度方向觀察本發明之細微構造轉印膜製造裝置中的模具之張力控制及蛇行防止機構的第一實施形態之概略圖。 Fig. 5 is a schematic view showing a first embodiment of the tension control and the meandering prevention mechanism of the mold in the apparatus for manufacturing a fine structure transfer film of the present invention, as seen from the film width direction of the molding.

第6圖為顯示本發明之細微構造轉印膜製造裝置中的模具之張力控制及蛇行防止機構的第二實施形態之概略俯視圖。 Fig. 6 is a schematic plan view showing a second embodiment of the tension control and the meandering prevention mechanism of the mold in the apparatus for manufacturing a fine structure transfer film of the present invention.

第7圖為顯示本發明之細微構造轉印膜製造裝置中的模具之張力控制及蛇行防止機構的第三實施形態之概略俯視圖。 Fig. 7 is a schematic plan view showing a third embodiment of the tension control and the meandering prevention mechanism of the mold in the apparatus for manufacturing a fine structure transfer film of the present invention.

第8圖為自成型用膜寬度方向觀察本發明之細微構 造轉印膜製造裝置中的模具之張力控制及蛇行防止機構的第三實施形態之概略圖。 Figure 8 is a view showing the fine structure of the present invention in the width direction of the film for molding. A schematic view of a third embodiment of the tension control of the mold and the meandering prevention mechanism in the transfer film manufacturing apparatus.

第9圖為藉由蛇行檢測感測器進行之模具的寬度方向位置測量方法之概略圖。 Fig. 9 is a schematic view showing a method of measuring the position in the width direction of the mold by the meandering detecting sensor.

第10圖為用以顯示本發明之一實施形態中的軋輥表面之彈性層的變形量之概略圖。 Fig. 10 is a schematic view showing the amount of deformation of the elastic layer on the surface of the roll in the embodiment of the present invention.

第11圖為顯示於本發明之細微構造轉印膜製造裝置之另一實施形態中,於加熱輥之懸跨模具的部分之兩端部,輥徑朝寬度方向外側漸漸減小時,將成型用膜按壓於模具上的構造之概略圖。 Fig. 11 is a view showing another embodiment of the apparatus for manufacturing a fine structure transfer film according to the present invention, in which the roll diameter is gradually decreased toward the outer side in the width direction at both end portions of the portion of the heating roll which is suspended from the mold, and is used for molding. A schematic view of the structure in which the film is pressed against the mold.

第12圖為顯示於本發明之細微構造轉印膜製造裝置之另一實施形態中,於模具之寬度方向兩端部,模具之厚度朝寬度方向外側漸漸減小時的、成型用膜按壓於模具上的構造之概略圖。 In another embodiment of the apparatus for manufacturing a fine structure transfer film of the present invention, the film for molding is pressed against the mold when the thickness of the mold gradually decreases toward the outer side in the width direction at both end portions in the width direction of the mold. A schematic diagram of the structure above.

第13圖為顯示於本發明之細微構造轉印膜製造裝置之另一實施形態中,於軋輥之寬度方向兩端部,輥徑朝寬度方向外側漸漸減小時的、成型用膜按壓於模具上的構造之概略圖。 Fig. 13 is a view showing another embodiment of the apparatus for manufacturing a fine structure transfer film according to the present invention, wherein the film for molding is pressed against the mold when the roll diameter gradually decreases toward the outer side in the width direction at both end portions in the width direction of the roll. A schematic diagram of the structure.

2‧‧‧成型用膜 2‧‧‧Forming film

2a‧‧‧成型用膜之成型面 2a‧‧‧Forming surface of molding film

3‧‧‧模具 3‧‧‧Mold

3a‧‧‧模具之細微構造面 3a‧‧‧Miniature construction surface of the mold

4‧‧‧加熱輥 4‧‧‧heating roller

4a‧‧‧加熱輥之段差部 4a‧‧‧The section of the heating roller

6‧‧‧軋輥 6‧‧‧ Rolls

10‧‧‧彈性層 10‧‧‧Elastic layer

W‧‧‧成型用膜藉由模具及軋輥所加壓之區域的寬度方向長度 W‧‧‧The length of the width direction of the area where the film for molding is pressed by the mold and the roll

H‧‧‧自加熱輥之懸跨模具的部分表面至兩端段差部的表面之高度(分離距離) H‧‧‧Height of the surface of the heating roller from the surface of the mold to the surface of the difference between the two ends (separation distance)

v‧‧‧自成型用膜受到加壓之區域的端部至成型用膜之寬度方向端部的長度 V‧‧‧ Length from the end of the region where the film for molding is pressed to the end portion in the width direction of the film for molding

u‧‧‧自懸跨於加熱輥之模具的端部至加熱輥兩端的段差部的長度 u‧‧‧The length of the step from the end of the mold of the heating roller to the end of the heating roller

Claims (14)

一種細微構造轉印膜之製造方法,係使用細微構造轉印膜之製造裝置,在滿足以下之[A1]或[A2]之條件下依序通過至少為以下之[I]~[V]的製程,藉以對至少一面具有被轉印層之膜進行加工,該細微構造轉印膜之製造裝置係具有懸跨於加熱輥與冷卻輥上且表面具有細微構造之無端環帶狀的轉印模具:[I]模具加熱製程,係一面使表面形成有細微構造之無端環帶狀的模具環抱於已被加熱之加熱輥一面進行加熱;[II]加壓轉印製程,係在使膜之轉印側表面與該模具的細微構造表面密接之狀態下,藉由包含該加熱輥之一對輥進行挾持加壓;[III]運送製程,係在使加壓後之該模具與該膜保持密接的狀態下運送至冷卻區;[IV]冷卻製程,係在該冷卻區使模具與膜保持密接之狀態下自模具側進行冷卻;[V]剝離製程,係剝離冷卻後之模具及膜;[A1]該膜之寬度係比該模具之寬度還寬,且在該加壓轉印製程中,該膜之寬度方向兩端部係自該加熱輥分離;[A2]該模具之寬度係比該膜之寬度還寬,且在該加壓轉印製程中,該膜受到加壓之區域的寬度係比該膜之寬度還窄。 A manufacturing method of a fine structure transfer film is a manufacturing apparatus using a fine structure transfer film, and sequentially passes at least the following [I] to [V] under the condition of satisfying [A1] or [A2] below; a process for processing a film having at least one surface of a transfer layer having an endless belt-shaped transfer mold suspended over a heating roll and a cooling roll and having a fine structure on the surface thereof : [I] The mold heating process is performed by heating the heated heating roller on the surface of the endless belt-shaped mold having a fine structure on the surface; [II] the pressure transfer process is to make the film transfer In a state in which the printing side surface is in close contact with the fine structural surface of the mold, the roller is held and pressurized by one of the heating rollers; [III] the transportation process is performed to keep the mold adhered to the film after being pressurized. The state is transported to the cooling zone; [IV] the cooling process is performed by the mold side in a state where the mold and the film are kept in close contact with each other in the cooling zone; [V] the stripping process is to peel off the cooled mold and film; A1] the width of the film is wider than the mold Further, in the pressure transfer process, both ends of the film in the width direction are separated from the heating roller; [A2] the width of the mold is wider than the width of the film, and the pressure is turned In the printing process, the width of the region where the film is pressurized is narrower than the width of the film. 如申請專利範圍第1項之細微構造轉印膜之製造方法 ,其中再於以下之[B][C]之控制下進行加工:[B]於該冷卻輥上設置調整該模具之運送方向的位置之手段、及檢測施加於該模具上之張力的手段,且以始終使施加於該模具之張力形成於既定範圍內的方式控制該冷卻輥之位置;[C]於該模具上設置檢測寬度方向之位置的蛇行檢測感測器、及調整該冷卻輥之角度的手段,且以始終使該模具之寬度方向的位置形成於既定範圍內的方式控制該冷卻輥之角度。 Manufacturing method of fine structure transfer film as claimed in claim 1 , wherein the processing is performed under the control of [B] [C] below: [B] means for adjusting the position of the mold in the direction of conveyance on the cooling roll, and means for detecting the tension applied to the mold, And controlling the position of the cooling roller so that the tension applied to the mold is always formed within a predetermined range; [C] providing a meandering detection sensor for detecting the position in the width direction on the mold, and adjusting the cooling roller The angle is controlled by controlling the angle of the cooling roll so that the position in the width direction of the mold is always formed within a predetermined range. 如申請專利範圍第2項之細微構造轉印膜之製造方法,其中追隨該冷卻輥之角度調整,以保持與該冷卻輥之平行度的方式,使於該剝離製程中自模具上剝離膜之剝離輥動作。 The method for producing a fine structure transfer film according to claim 2, wherein the film is removed from the mold in the stripping process in such a manner as to maintain the parallelism with the cooling roll in accordance with the angle adjustment of the cooling roll. The peeling roller moves. 如申請專利範圍第2或3項之細微構造轉印膜之製造方法,其中調整該冷卻輥之角度的手段,係使支撐該冷卻輥之一方或雙方的軸承朝該模具之運送方向移動者。 The method for producing a fine structure transfer film according to the second or third aspect of the invention, wherein the means for adjusting the angle of the cooling roll is such that a bearing supporting one or both of the cooling rolls is moved in a direction in which the mold is conveyed. 如申請專利範圍第2或3項之細微構造轉印膜之製造方法,其中該冷卻輥之角度調整的分解能為0.005度以下。 The method for producing a fine structure transfer film according to the second or third aspect of the invention, wherein the resolution of the angle adjustment of the cooling roll is 0.005 or less. 如申請專利範圍第1至3項中任一項之細微構造轉印膜之製造方法,其中於該加壓轉印製程中,在該模具之寬度方向兩端,使壓力朝寬度方向外側漸漸地降低。 The method for producing a fine structure transfer film according to any one of claims 1 to 3, wherein in the pressure transfer process, the pressure is gradually increased toward the outside in the width direction at both ends in the width direction of the mold. reduce. 如申請專利範圍第1至3項中任一項之細微構造轉印膜之製造方法,其中於該模具加熱製程中,將加熱後之 模具表面溫度調整於膜之Tg+50℃至Tg+100℃的範圍內;於該加壓轉印製程中,將膜所負載之線壓調整為400kN/m以上;於該冷卻製程中,將冷卻後之模具表面溫度調整於膜之Tg-40℃至Tg-100℃的範圍內。 The method for producing a fine structure transfer film according to any one of claims 1 to 3, wherein in the mold heating process, after heating The surface temperature of the mold is adjusted within a range of Tg+50° C. to Tg+100° C. of the film; in the pressurization transfer process, the line pressure supported by the film is adjusted to be 400 kN/m or more; in the cooling process, The surface temperature of the mold after cooling is adjusted within the range of Tg - 40 ° C to Tg - 100 ° C of the film. 一種細微構造轉印膜之製造裝置,係具有懸跨於加熱輥與冷卻輥上且表面具有細微構造之無端環帶狀的轉印模具;該細微構造轉印膜之製造裝置至少具有以下之[i]~[v]之基本構成,且滿足以下之[a1]或[a2]:[i]無端環帶狀之模具,於其表面形成有細微構造;[ii]加壓機構,其至少具有用以加熱該模具之加熱輥、與加熱輥平行配置且表面覆有彈性體之軋輥、及使用該兩輥之挾壓手段;[iii]冷卻輥,其用以冷卻該模具;[iv]剝離機構,其用以剝離密接於模具上之膜;及[v]運送機構,其使該加熱輥及該冷卻輥旋轉,用以運送該模具;[a1]於該加熱輥與該模具之接觸部的寬度方向兩端部,以在寬度方向外側輥徑減小的方式,於該加熱輥之表面具有段差;[a2]該模具之寬度係比該軋輥加壓部的寬度還寬。 A manufacturing apparatus for a finely structured transfer film is a transfer mold having an endless belt shape which is suspended over a heating roller and a cooling roller and has a fine structure on a surface thereof; the manufacturing apparatus of the fine structure transfer film has at least the following [ The basic composition of i]~[v], and satisfying the following [a1] or [a2]: [i] endless belt-shaped mold, having a fine structure formed on the surface thereof; [ii] a pressurizing mechanism having at least a heating roller for heating the mold, a roller disposed parallel to the heating roller and having an surface coated with an elastomer, and a rolling device using the two rollers; [iii] a cooling roller for cooling the mold; [iv] peeling a mechanism for peeling off a film adhered to the mold; and [v] a transport mechanism that rotates the heat roller and the cooling roller for transporting the mold; [a1] a contact portion of the heat roller with the mold Both ends in the width direction have a step on the surface of the heating roller in such a manner that the outer diameter of the roller is reduced in the width direction; [a2] the width of the mold is wider than the width of the roller pressing portion. 如申請專利範圍第8項之細微構造轉印膜之製造裝置,其中再具有以下之[b][c]的控制手段:[b]控制手段,其中懸跨該模具之冷卻輥係設置於 能沿該模具之運送方向滑行的架台上,該架台及使該架台滑行之可動手段係透過荷重檢測器所連結,且以自該荷重檢測器所獲得之施加於該模具的張力始終形成於既定範圍內的方式調整由該可動手段所造成之該架台的滑行量;[c]控制手段,其設有檢測該模具之寬度方向位置的蛇行檢測感測器、及調整設於該架台上之該冷卻輥的角度之輥傾動手段,以自該蛇行檢測感測器所獲得之該模具的寬度方向位置始終形成於既定範圍內的方式調整該冷卻輥之傾動量。 The manufacturing apparatus of the fine structure transfer film of claim 8 which further has the following control means of [b][c]: [b] control means, wherein the cooling roll system suspended over the mold is disposed at The gantry that can slide along the direction of transport of the mold, the gantry and the movable means for sliding the gantry are connected by a load detector, and the tension applied to the mold obtained from the load detector is always formed at a predetermined a method of adjusting the amount of sliding of the gantry caused by the movable means; [c] a control means provided with a meandering detecting sensor for detecting a position in a width direction of the mold, and adjusting the setting provided on the gantry The roller tilting means of the angle of the cooling roller adjusts the tilting amount of the cooling roller in such a manner that the position of the width direction of the mold obtained from the meandering detecting sensor is always formed within a predetermined range. 如申請專利範圍第9項之細微構造轉印膜之製造裝置,其中與該冷卻輥靠近配置之該剝離輥的輥傾動手段,係與該冷卻輥相同之輥傾動手段。 The apparatus for manufacturing a fine structure transfer film according to the ninth aspect of the invention, wherein the roller tilting means of the peeling roller disposed adjacent to the cooling roller is the same roller tilting means as the cooling roller. 如申請專利範圍第8至10項中任一項之細微構造轉印膜之製造裝置,其中該軋輥之表面的彈性體之橡膠硬度,係於ASTM D2240:2005之規格下為70~97°。 The apparatus for manufacturing a fine structure transfer film according to any one of claims 8 to 10, wherein the rubber hardness of the elastomer on the surface of the roll is 70 to 97° under the specification of ASTM D2240:2005. 如申請專利範圍第8至10項中任一項之細微構造轉印膜之製造裝置,其中於該加熱輥之寬度方向兩端部,輥徑係朝寬度方向外側漸漸地減小。 The apparatus for manufacturing a fine structure transfer film according to any one of claims 8 to 10, wherein the roller diameter gradually decreases toward the outer side in the width direction at both end portions in the width direction of the heating roller. 如申請專利範圍第8至10項中任一項之細微構造轉印膜之製造裝置,其中於該模具之寬度方向兩端部,模具之厚度係朝寬度方向外側漸漸地減小。 The apparatus for manufacturing a fine structure transfer film according to any one of claims 8 to 10, wherein the thickness of the mold gradually decreases toward the outer side in the width direction at both end portions in the width direction of the mold. 如申請專利範圍第8至10項中任一項之細微構造轉印膜之製造裝置,其中於該軋輥之寬度方向兩端部,輥徑係朝寬度方向外側漸漸地減小。 The apparatus for manufacturing a fine structure transfer film according to any one of claims 8 to 10, wherein the roll diameter gradually decreases toward the outer side in the width direction at both end portions in the width direction of the roll.
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