TWI570077B - Burner modules, methods of forming glass sheets, and glass sheets formed threby - Google Patents

Description

Burner module, method of forming glass sheet, and glass sheet formed thereby [Cross-reference to related applications]

This patent application claims the benefit of priority to the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit.

The present disclosure relates generally to glass flakes and tapes, and more particularly to burner modules, methods of forming glass sheets and tapes, and glass sheets and tapes formed thereby.

The glass sheet material can be formed using a variety of different methods including, for example, a float glass process and a fusion draw process. A glass ribbon is a subset of glass sheets that are thin enough to be rolled into a roll of practical size because the glass sheet is thin enough so that its material can be continuously wound. Floating glass is impractical for making glass ribbons and is generally for thicker sheets. The fusion draw process is extended to a thin extent to form a tape, but is still limited to soft glass compositions having high vermiculite levels and high softening points. Further, the vermiculite glass substrate can be produced by cutting, grinding, and polishing a vermiculite ingot produced in a batch flame hydrolysis furnace, but this is impractical for the glass ribbon. The inventors have recognized the need for replacement The process of the above process, and more specifically, requires an economical alternative process for forming uniform thin glass sheets and tapes having high surface quality.

The present disclosure describes a burner module, a method of forming a glass sheet and a belt, and a glass sheet and belt product formed thereby.

In accordance with a particular embodiment of the present disclosure, a burner module is provided that includes a combustor gas inlet block, a lower flow plate, an upper flow plate, a burner gas flow disperser, and a combustor gas discharge block . The combustor gas inlet block, the combustor gas flow disperser, and the combustor gas exhaust block each comprise a plurality of channels separated by a baffle. The burner gas flow disperser and the separator of the burner gas discharge block comprise a knife edge. The upper flow plate and the lower flow plate each include a plurality of pressure holes, the plurality of pressure holes being in fluid communication with the plurality of channels.

In accordance with a further embodiment of the present disclosure, a method of forming a glass sheet and a belt is provided, wherein the method includes depositing a plurality of glass dust particles produced via the disclosed burner module on a deposition surface of the rotating drum to form a dust sheet. Dissipating at least a portion of the dust sheet from the deposition surface of the rotating drum; and sintering at least a portion of the dust sheet into a dense glass by heating the dust sheet of the moving portion to a sintering temperature.

In accordance with still further embodiments of the present disclosure, a glass sheet and tape product made by the disclosed burner module is contemplated.

Other features and advantages will be set forth in the description which follows, and from the description or the implementation of the various embodiments described herein (including the embodiments below, the scope of the claims and the accompanying drawings) Those of ordinary skill will readily appreciate that some of the features and advantages are obvious.

100‧‧‧burner module

200‧‧‧ burner gas discharge block

202‧‧‧ hole

204‧‧‧burner surface

206‧‧‧ gas discharge channel

208‧‧‧ gas discharge channel partition

210‧‧‧ burner gas discharge block

212‧‧‧ burner surface passage

214‧‧‧Flower plate contact surface on the edge of the blade

300‧‧‧ burner gas flow disperser

302‧‧‧Distributed channel

304‧‧‧Distributed channel partition

306‧‧‧Inlet face of burner gas flow disperser

308‧‧‧Exit face of burner gas flow disperser

310‧‧‧ Flowing plate contact surface under the edge of the blade

400‧‧‧burner gas inlet block

402‧‧‧ gas inlet

404‧‧‧Base

406‧‧‧ gas inlet passage

408‧‧‧ gas inlet channel partition

410‧‧‧Export face of burner gas inlet block

500‧‧‧Upstream board

502‧‧‧Upper flow plate pressure hole

504‧‧‧Upstream board land

600‧‧‧ under the flow board

602‧‧‧ Lower flow plate pressure hole

604‧‧‧ under the flow board land

700‧‧‧ positioning tips

800‧‧‧ bolt

Embodiments of the specific embodiments of the present disclosure are best understood by the following description, in which the same reference numerals are used to indicate a similar structure, and wherein: Figure 1 is in accordance with the present disclosure. 2 is a schematic exploded view of a burner module in accordance with an embodiment of the present disclosure; and FIG. 3 is a combustion in accordance with an embodiment of the present disclosure 4 is a schematic side view of an upper flow plate or a lower flow plate according to an embodiment of the present disclosure; and FIG. 5 is a burner module according to an embodiment of the present disclosure The cut front view; and Fig. 6 is a top plan view of the burner gas inlet block in accordance with one embodiment of the present disclosure.

Coming to Figures 1 and 2, Figures 1 and 2 illustrate a schematic view of the assembly and disassembly of the burner module. The combustor module 100 includes a combustor gas exhaust block 200, a combustor gas flow disperser 300, a combustor gas inlet block 400, an upper flow plate 500, and a lower flow plate 600. The terms "upper" and "lower" are used only to distinguish between the upper flow plate 500 and the lower flow plate 600, and are not intended to limit the relative position of the flow plates because the burner module 100 can be used in a variety of orientations.

Referring to Figures 2 and 3, the combustor gas discharge block 200 includes a plurality of holes 202 located on the combustor face 204 of the combustor gas discharge block. The combustor gas discharge block 200 also includes a plurality of gas exhaust passages 206 separated by a gas exhaust passage partition 208. The gas exhaust passage 206 extends from the inlet face of the combustor gas discharge block 210 to a plurality of combustor face passages 212. The combustor face passage 212 extends from the gas exhaust passage 206 to a bore 202 located on the combustor face 204. The gas exhaust passage partition 208 includes a knife edge upper flow plate contact surface 214 at the inlet face of the combustor gas discharge block 210. The edge of the blade is a partial structure with a reduced width.

The burner gas flow disperser 300 includes a plurality of dispersing channels 302 separated by a dispersing channel partition 304. The dispersion passage 302 extends from the inlet face 306 of the burner gas flow disperser to the outlet face 308 of the burner gas flow disperser. The exit face 308 of the burner gas flow disperser serves as an anvil for the flow plate contact surface 214 on the rim. The dispersing channel baffle 304 includes a knife edge lower flow plate contact surface 310 at the inlet face 306 of the combustor gas flow disperser.

The combustor gas inlet block 400 includes a plurality of gas inlets 402 positioned on a susceptor 404 of the combustor gas inlet block. The combustor gas inlet block 400 also includes a plurality of gas inlet passages 406 separated by a gas inlet passage partition 408. Gas inlet passage 406 extends from gas inlet 402 of combustor gas inlet block 400 to outlet face 410 of the combustor gas inlet block. The exit face 410 of the burner gas inlet block acts as an anvil for the underflow plate contact surface 310.

Referring to Figure 4, the upper flow plate 500 includes a plurality of upper flow plate pressure holes 502 separated by an upper flow plate land 504, and the upper flow plate land 504 is vertical. Extend in the direction. Additionally, each of the plurality of upper flow plate pressure ports 502 is in fluid communication with one of the dispersion channels 302 and one of the gas discharge channels 206.

The lower flow plate 600 includes a plurality of lower flow plate pressure holes 602 separated by a lower flow plate land 604, and the lower flow plate land 604 extends in the longitudinal direction. Additionally, each of the plurality of lower flow plate pressure ports 602 is in fluid communication with one of the gas inlet passages 406 and one of the dispersion passages 302.

An insulating package (not shown) may also be included as part of the burner module 100.

The burner module 100 is a modular design. The combustor gas discharge block 200, the combustor gas flow disperser 300, the combustor gas inlet block 400, the upper flow plate 500, and the lower flow plate 600 can each be replaced independently of other components. The modular nature of the burner module 100 is advantageous both in the manufacturing process and in the application and use of the burner module.

In the manufacturing stage, as a whole, it is not necessary to scrap the entire assembly due to small defects in a single part of the burner module 100. The defective part can be scrapped separately and the remaining components can still be used. In addition, the division of the combustor module 100 into a plurality of sections reduces the difficulty of processing a plurality of channels, pressure holes, and holes disposed throughout the combustor module. It would be impossible to fabricate the precise internal geometry of the burner module 100 as a single piece using conventional processing techniques because of the blind passages that the tool cannot access. Attempts have been made to overcome this challenge by fabricating other burner units from sintered or photocured metals, but such efforts have brought their own challenges and shortcomings.

During the operation phase of the burner module 100, by disassembly and The ability to enter a plurality of channels, pressure holes, and holes throughout the burner module facilitates cleaning of the burner module. Moreover, if a single component is damaged or defective in some way, the single component can be replaced without requiring the entire unit to be replaced more expensively. This is particularly beneficial if the life of all components on the burner module 100 is not the same.

As shown, the assembly is assembled and held as a single burner module 100 by bolts 800. There should be sufficient torque to tighten the bolts 800 to staple the components of the burner module 100 together. As illustrated in FIG. 1, an example of a method of bolting the bolts 800 when there are 12 bolts 800 is, for example, to bolt the bolts 800 in a plurality of operations in a specified sequence. Using a torque program that facilitates the interface of the uniform load burner module, the bolt 800 should be bolted to 90 inches-pounds. This is preferably by bolting each bolt 800 in a non-circumferential sequence to about 30 inches-pounds, further tightening each bolt to about 60 inches-pounds, and finally further tightening each bolt to about 90 inches.吋-pounds to achieve. This procedure can be repeated for each set of sequence bolts 800 that connect the components together. Other tools, such as rivets, that hold the various components together can also be envisioned.

Referring to FIG. 5, the burner module 100 is disposed via a gas inlet 402, a gas inlet passage 406, a lower flow plate pressure hole 602, a dispersion passage 302, an upper flow plate pressure hole 502, a gas discharge passage 206, and the plurality of burners. The face channel 212 and the plurality of holes 202 transport combustion gases, oxidants, dust precursors, and inert gases to a combustion location in the chemical vapor deposition process to create a burner flame in the combustion zone adjacent the burner face.

The plurality of gas inlets 402 includes at least one combustion gas inlet, at least one oxidant inlet, and optionally at least one inert gas inlet And at least one precursor inlet. The at least one combustion gas inlet provides combustion gases from a source of combustion gases to a combustor module 100, the at least one oxidant inlet providing an oxidant from an oxidant source to a combustor module, the at least one inert gas inlet providing an inert gas from an inert gas source to A burner module, and the at least one precursor inlet provides a dust precursor from the dust precursor source to the burner module.

Exemplary combustion gases include methane and hydrogen. An exemplary oxidant gas is oxygen. An exemplary inert gas is nitrogen. In an embodiment, the combustion gases may be premixed with oxygen. Various ruthenium-containing precursor materials can be used as the precursor gas. Such precursor materials include, but are not limited to, halide-containing precursors, such as hafnium tetrachloride; halide-free precursors, such as decane, particularly polyalkyl siloxanes, such as octamethylcyclotetradecene. Oxytomane (OMCTS). In addition, suitable dopants can also be used. These dopants can be delivered to the combustor module 100 along with the precursor gas. Alternatively, dopants may be delivered to the combustor module 100 via separate gas inlets 402 and exit the combustor module 100 via separate apertures 202 or arrays of apertures.

Referring to Figure 6, in one embodiment, the combustor gas inlet block 400 includes five gas inlets 402 in each gas inlet passage 406 having a length of about 8 inches. Alternatively, the combustor gas inlet block 400 can include 3 to 7 gas inlets 402 disposed in the susceptor of each gas inlet passage 406. Each gas inlet 402 disposed at each gas inlet passage 406 provides the same single input gas or mixture of input gases. For example, a given gas inlet passage 406 containing a combustion gas (e.g., methane) is fed from 3 to 7 gas inlets 402, all of which provide methane. Gas inlet 402 Distribution is distributed throughout each gas inlet passage 406 to provide a more uniform gas distribution than a single gas inlet fed to each passage.

Each gas inlet 402 can also supply a premixed gas to each gas inlet passage 406. For example, the combustion gases may comprise methane and oxygen, or the dust precursors and inert gases may be premixed to the individual gas inlets 402. In an embodiment, the source of combustion gas, the source of oxidant, the source of inert gas, and/or the source of dust precursor comprise a mixture of at least two input media. Input media include combustion gases, oxidants, dust precursors, and inert gases.

The combustor gas venting block 200 is discussed in more detail, with the holes 202 being disposed throughout the array on the combustor face 204 to evenly span the length and width of the combustor module 100 and the flow of reactive gases entering the combustion zone. As a result, a uniform flame is provided within the combustion zone, thereby producing a uniform dust distribution on the deposition surface. It should be noted that the equal reaction gas flow across the length and width of the combustor module 100 is also a result of other components of the combustor gas module, including the combustor gas flow disperser 300, the combustor gas inlet. The block 400, the upper flow plate 500, and the lower flow plate 600, the components disperse the reaction gas before the reaction gas reaches the burner gas discharge block 200.

The array of apertures 202 can include individual sub-arrays, each having a predetermined number of apertures at preselected locations, sizes, and the like. For example, the array of holes 202 can include an array of holes for combustion gases, an array of holes for oxidant, an array of holes for precursor gases, and an array of holes for inert gases, and each array has a different aperture. Location, size, etc. It can be appreciated that the architecture of the apertures 202 illustrated in Figures 1 and 2 is only a single embodiment. And there may be other architectures within the scope of this disclosure. For example, although Figures 1 and 2 illustrate a hole array for a combustion gas, an array of holes for an oxidant, a hole array for a precursor gas, and a hole array for a gas array for an inert gas, there is a uniform hole 202. Position, any sub-array can have more or fewer rows of holes or holes than other sub-arrays.

In a particular embodiment, the overall array of apertures 202 includes a plurality of apertures arranged in n parallel columns, where n is at least five. The exemplary combustor module 100 includes nine rows of holes 202. The array of parallel rows has a length l and a width w defined by the respective distances between the outer edges of the holes on the opposite outer edges of the array. In forming the vermiculite glass dust, for example, according to one embodiment, the row of centerlines (e.g., row 5) provides a vermiculite gas precursor/carrier gas mixture. Directly adjacent rows (e.g., rows 4 and 6) provide oxygen for stoichiometric control of the vermiculite gas precursor. The next two rows of vents on either side of the centerline (eg, rows 2, 3, 7, and 8) provide additional oxygen, and the flow rate of oxygen can be used to control stoichiometry and dust density for use. An oxidant that ignites the flame. The outermost rows of holes (e.g., rows 1 and 9) can provide a mixture that ignites the flame, such as CH ₄ /O ₂ or H ₂ /O ₂ .

According to an exemplary combustor module 100 comprising 9 rows of holes 202, In selected embodiments, the combustor gas inlet block 400 includes nine gas inlet passages 406, the combustor gas flow disperser 300 includes nine dispersing passages 302, and the combustor gas discharge block 200 includes nine gas exhaust passages. 206.

The blade lower flow plate contact surface 310 and the blade edge upper flow plate contact surface 214 each include a blade edge width, and the dispersion channel spacer 304 and the gas discharge channel spacer 208 each include a channel spacer width, and the channel spacer width is greater than the blade edge width. The edge width is preferably from about 0.005 inches to about 0.031 inches. The blade edge width is preferably from about 0.010 inches to about 0.015 inches. The blade edge width is even more preferably from about 0.012 inches to about 0.013 inches. The channel spacer width is preferably from about 0.04 inches to about 0.08 inches. The channel spacer width is preferably from about 0.05 inches to about 0.07 inches.

In selected embodiments, the blade lower flow plate contact surface 310 and the blade edge flow plate contact surface 214 are truncated triangular prisms.

In one embodiment, the seal is formed by the lower flow plate 600 between the lower edge of the blade edge of the burner gas flow disperser 300 and the outlet face of the combustor gas inlet block 410. When the burner module 100 is assembled, the blade lower flow plate contact surface 310 of the burner gas flow disperser 300 matches the lower flow plate land 604 of the lower flow plate 600. The knife edge lower flow plate contact surface 310 and the lower flow plate land 604 junction form a seal. Additionally, an additional seal is formed between the planar surface of the lower flow plate 600 and the exit face of the combustor gas inlet block 410. The seal between the blade lower flow plate contact surface 310 of the burner gas flow disperser 300, the lower flow plate land 604 of the lower flow plate 600, and the outlet face of the burner gas inlet block 410 is preferably capable of Sealed up to a pressure of at least 15 psig, more preferably at pressures up to 30 psig.

In one embodiment, the seal is formed by the upper flow plate 500 between the flow plate contact surface 214 on the edge of the burner gas discharge block 200 and the outlet face of the burner gas flow disperser 308. When the burner module 100 is assembled, the flow plate contact surface 214 on the edge of the burner gas discharge block 200 matches the upper flow plate land 504 of the upper flow plate 500. The flow plate contact surface 214 on the knife edge and the upper flow plate land 504 junction form a seal. Additionally, an additional seal is formed between the planar surface of the upper flow plate 500 and the exit face of the burner gas flow disperser 308. The seal between the flow plate contact surface 214 on the blade edge of the burner gas discharge block 200, the upper flow plate land 504 of the upper flow plate 500, and the outlet face of the burner gas flow disperser 308 is preferably capable of up to at least 15 Sealed under psig pressure, preferably at pressures up to 30 psig.

Without wishing to be bound by theory, it is believed that the seal is formed between the flow plate, the rim, and subsequent components of the combustor module 100 because of the edge of the blade (the flow plate under the blade contact surface 310 or the flow plate on the edge of the blade) When the contact surface 214) is pressed into the flow plate (the lower flow plate land 604 of the lower flow plate 600 or the upper flow plate land 504 of the upper flow plate 500), the flow plate is deformed, and the material is pressed out onto the back surface to form Sealing with the subsequent combustor module assembly (the exit face of the combustor gas inlet block 410 or the exit face of the combustor gas flow disperser 308).

To ensure that the contour of the burner flame is uniform, each fluid path is in the channel group (gas inlet channel 406, dispersion channel 302, and gas row) At least one flow plate for gas expansion (upper flow plate 500 and lower flow plate 600) is included between the outlet passages 206). Adjacent gas inlet passages 406 are separated by a gas inlet passage partition 408. Adjacent dispersing channels 302 are separated by a dispersing channel partition 304. Adjacent gas exhaust passages 206 are separated by a gas exhaust passage partition 208. It will be readily apparent to those of ordinary skill in the art that the burner module 100 can include a greater or lesser number of channels, flow plates, and the like. For example, an embodiment of the combustor module 100 may not include one of the combustor gas flow disperser 300 and the lower flow plate 600 or the upper flow plate 500. In another embodiment, each additional burner gas disperser of the combustor module 100 can include at least two combustor gas flow dispersers 300 and an additional lower flow plate 600 or upper flow plate 500. The only requirement is that each component of the burner module 100 is separated by a flow plate for sealing purposes. The modular nature of the burner module 100 allows for the addition and subtraction of components as needed for each particular application.

The channels, flow plates, and other flow altering or flow restricting structures described herein and the array of holes 202 are used to equalize gas flow along the length l of the burner face 204 of the combustor module 100 such that gas flow through the holes More uniform speed and pressure. Due to the lower flow plate pressure port 602 and the upper flow plate pressure port 502, the restricted flow promotes diffusion of gas at each respective passage (gas inlet passage 406, dispersion passage 302, and gas discharge passage 206) to the entire passage. As a result, a more uniform flame and glass precursor distribution is provided. Such uniformity can be characterized by a high degree of uniformity of the flame core, a temperature profile of the flame core, a velocity or pressure distribution of the gas, and a gas concentration across the entire width and along the length of the array of holes 202.

In an embodiment, the upper flow plate 500 and the lower flow plate 600 comprise the same number of pressure holes, geometry, and position. The upper flow plate pressure holes 502 of the upper flow plate 500 match the number, geometry, and position of the lower flow plate pressure holes 602 of the lower flow plate 600.

In another embodiment, it is envisioned that the upper flow plate 500 and the lower flow plate 600 comprise different numbers of pressure holes, geometries or locations. The number, geometry, and position of the upper flow plate pressure holes 502 of the upper flow plate 500 and the lower flow plate pressure holes 602 of the lower flow plate 600 do not match. The pressure holes of the upper flow plate 500 and the lower flow plate 600 may differ in position, hole geometry, size, number, or combination of attributes.

In an embodiment, the upper flow plate 500, the lower flow plate 600, or both the upper flow plate 500 and the lower flow plate 600 comprise at least 150 pressure holes. Each upper flow plate pressure port 502 is in fluid communication with one of the dispersion channels 302 and one of the gas discharge channels 206. Each lower flow plate pressure port 602 is in fluid communication with one of the dispersion channels 302 and one of the gas inlet channels 406.

In another embodiment, the upper flow plate 500, the lower flow plate 600, or both the upper flow plate 500 and the lower flow plate 600 comprise at least 450 pressure holes. Each upper flow plate pressure port 502 is in fluid communication with one of the dispersion channels 302 and one of the gas discharge channels 206. Each lower flow plate pressure port 602 is in fluid communication with one of the dispersion channels 302 and one of the gas inlet channels 406.

In still another embodiment, the upper flow plate 500, the lower flow plate 600, or both the upper flow plate 500 and the lower flow plate 600 comprise at least 1000 pressures hole. Each upper flow plate pressure port 502 is in fluid communication with one of the dispersion channels 302 and one of the gas discharge channels 206. Each lower flow plate pressure port 602 is in fluid communication with one of the dispersion channels 302 and one of the gas inlet channels 406.

In an embodiment of the combustor module 100, the upper flow plate 500, the lower flow plate 600, or both the upper flow plate 500 and the lower flow plate 600 comprise circular pressure holes having a diameter of from about 0.020 inches to about 0.030 inches. . The upper flow plate pressure port 502 is in communication with a single dispersion passage 302 and a single gas discharge passage 206, the dispersion passage 302 and the gas discharge passage 206 being disposed along a single line, and the center of the upper flow plate pressure hole is from about 0.030 inches to about 0.040 inches. Interspersed. The columns of upper flow plate pressure holes 502 are separated by upper flow plate land 504 by a width of about 0.060 inches to about 0.180 inches. The lower flow plate pressure port 602 is in communication with a single gas inlet passage 406 and a single dispersion passage 302, the gas inlet passage 406 and the dispersion passage 302 are placed along a single line, and the center of the lower flow plate pressure port is from about 0.030 inches to about 0.040 inches. Interspersed. The columns of lower flow plate pressure holes 602 are separated by lower flow plate land 604 by a width of from about 0.060 inches to about 0.180 inches.

In another embodiment of the combustor module 100, the upper flow plate 500, the lower flow plate 600, or both the upper flow plate 500 and the lower flow plate 600 comprise a circular pressure having a diameter of from about 0.010 inches to about 0.030 inches. hole. The upper flow plate pressure port 502 is in communication with a single dispersion passage 302 and a single gas discharge passage 206, the dispersion passage 302 and the gas discharge passage 206 are placed along at least two lines, and the center of the upper flow plate pressure hole is along each line From 0.015 inches to about 0.030 inches apart. The at least two lines of the upper flow plate pressure port 502 can be aligned or staggered. The group of columns of the upper flow plate pressure holes 502 are flowed up The land 504 is separated by a width of from about 0.060 inches to about 0.180 inches. The lower flow plate pressure port 602 is in communication with a single gas inlet passage 406 and a single dispersion passage 302, the gas inlet passage 406 and the dispersion passage 302 are placed along at least two lines, and the center of the lower flow plate pressure hole is along each line From 0.015 inches to about 0.030 inches apart. The at least two lines of the lower flow plate pressure port 602 can be aligned or staggered. The group of columns of lower flow plate pressure holes 602 are separated by lower flow plate land 604 by a width of about 0.060 inches to about 0.180 inches.

The upper flow plate pressure port 502 and the lower flow plate pressure hole 602 are not necessarily circular. The upper flow plate pressure port 502 and the lower flow plate pressure hole 602 can have any geometric shape including, for example, an elliptical shape, a square shape, a triangular shape, or an oblong shape.

In one embodiment, the upper flow plate 500, the lower flow plate 600, or both the upper flow plate 500 and the lower flow plate 600 are fabricated using, for example, photochemical processing (PCM) corrosion resistant alloy sheets. An exemplary alloy is a nickel alloy. The alloy used to form the upper flow plate 500 or the lower flow plate 600 can be heat treated to optimize its mechanical properties, including hardness and ductility. The PCM process can be used to form features with precision and accuracy, such as upper flow plate pressure port 502 and lower flow plate pressure port 602. For example, an upper flow plate pressure port 502 and a lower flow plate pressure hole 602 having a diameter of about 0.004 inches +/- 0.0005 inches can be formed. In addition, the PCM process can be used to precisely control the relative position of the pressure holes of each flow plate. The PCM process allows the upper flow plate pressure port 502 and the lower flow plate pressure port 602 to be formed accurately, efficiently, and without machined burrs or tool marks.

Due to the flow plate contact surface 214 on the edge of the blade and the flow plate connection under the edge of the blade The contact surface 310 forms a seal with the upper flow plate 500 and the lower flow plate 600, respectively, so the relative hardness of the two materials is important. The flow plate upper surface contact surface 214 and the lower edge flow plate contact surface 310 are preferably harder than the upper flow plate 500 and the lower flow plate 600, so the upper flow plate and the lower flow plate are deformed, and the upper flow plate contacts the surface and The flow plate contact surface under the knife edge retains its shape during assembly. The Rockwell hardness level C of the flow plate contact surface 214 on the edge of the blade and the flow plate contact surface 310 below the blade edge is preferably at least about 50. The upper flow plate 500 and the lower flow plate 600 preferably have a Knoop hardness of about 94.6 and have a load of 100 grams on the indenter. Preferably, the upper flow plate 500 and the lower flow plate 600 have a maximum Knoop hardness of 100 or less when the load is 100 g.

The burner gas inlet block 400, the burner gas flow disperser 300, and the combustor gas discharge block 200 are preferably made of hardened steel. More specifically, the combustor gas inlet block 400, the combustor gas flow disperser 300, and the combustor gas discharge block 200 are preferably made of 420 stainless steel. This material allows the components of the burner module 100 to be used in harsh environments and is sufficiently robust and well constructed. In addition, 420 stainless steel makes traditional machining easy.

Referring again to FIG. 5, in an exemplary embodiment, the combustor module 100 includes at least two locating tips 700 that are positioned to alignly position the combustor gas flow disperser 300, the upper flow plate 500, and the combustion The gas is discharged from the block 200.

In a further embodiment, the combustor module 100 further includes at least two locating tips 700 that are positioned to alignly position the combustor gas flow disperser 300, the lower flow plate 600, and the combustor gas inlet block 400. .

The locating tip 700 ensures that the flow plate contact surface 214 on the knife edge contacts the upper flow plate 500 and the blade edge width is disposed on the upper flow plate land 504. The locating tip 700 also ensures that the blade lower flow plate contact surface 310 contacts the lower flow plate 600 and the blade edge width is disposed on the lower flow plate land 604. Additionally, the gas exhaust passage 206, the dispersing passage 302, and the gas inlet passage 406 must be aligned with the upper flow plate pressure port 502 and the lower flow plate pressure port 602. The locating tip 700 ensures that the channel and pressure port are properly aligned.

As an assembly of equipment for forming thin, uniform glass sheets and belts, the burner module 100 can be used to produce thin glass sheets and belts. The apparatus for forming a thin, uniform glass sheet and belt includes a dust supply device, a dust receiving device, a dust sheet guiding device, and a dust sheet sintering device.

According to an exemplary method, glass dust particles formed by the dust supply device are deposited on the deposition surface of the dust receiving device. The dust receiving device is in the form of a rotatable drum or belt and thus may comprise a continuous deposition surface. The deposited dust particles form a dust layer on the deposition surface. Once formed, the dust layer can be released from the deposition surface into a separate, continuous dust sheet. The action of releasing the dust layer from the deposition surface can occur without physical intervention due to, for example, thermal mismatch, mismatch in thermal expansion coefficient between the dust layer and the deposition surface, and/or under the influence of gravity. After the dust sheet is released from the dust receiving device, the dust sheet guiding device can guide the dust sheet to move through the dust sheet sintering device, and the dust sheet sintering device sinters and combines the dust sheet to form a glass sheet. An example of a dust deposition system is described in U.S. Patent No. 8,137,469, entitled "Method and Apparatus for Making Fused Silica" by Daniel W. Hawtof The applicant filed an application on December 14, 2005.

Thus, the process of forming a thin, uniform glass sheet comprises providing a plurality of glass dust particles; depositing a uniform layer of glass dust particles on a deposition surface of the dust receiving device to form a dust layer; releasing the dust layer from the dust receiving surface, To form a dust sheet; and to sinter the dust sheet to form a glass sheet or tape. An example of a process and apparatus for making a glass sheet is described in U.S. Patent No. 7,677,058, entitled "Process and Apparatus for Making Glass Sheet," by Daniel W. Hawtof et al. Apply on May 7. Additional aspects of the process and apparatus for making glass sheets are disclosed in detail below.

The dust supply device may include one or more burner modules 100, such as external vapor deposition OVD, vapor phase axial deposition (VAD), and users in a planar deposition process. The dust supply device may comprise a single burner module 100 or a plurality of burner modules. Optionally, the plurality of combustor modules 100 can be configured as an array of combustor modules that can produce a substantially continuous stream of dust particles over the length and width of the array.

The array of combustor modules, for example, can include a plurality of individual combustor modules 100 (e.g., placed end to end) that are configured to form and deposit a temporally uniform layer of glass dust. The end-to-end placed combustor module 100 is preferably modified from the alternative embodiment illustrated in Figure 1 to remove the land of the end of the combustor module. Removal of the land allows the burner faces 204 to be placed closer together and continue from one burner module 100 to the next in a substantially uninterrupted manner. Each of the burner modules 100 can be connected together by, for example, adding a cutting edge to the modified end of the burner module, and will burn each The burner modules are bolted together to form a seal. Thus, each dust providing device can be used to form an individual dust layer having a substantially uniform chemical composition and a substantially uniform thickness. By "uniform composition" and "thickness uniformity" is meant an average composition or thickness of compositional and thickness variations in a given area that is less than or equal to about 2%. In certain embodiments, one or both of the composition and thickness variations of the dust sheet may be less than or equal to about 1% of their respective average values on the dust sheet. The burner module 100 can be resistant to thermal shock and can provide a dispersed, even one or more, precursor gas streams to form glass dust.

In an embodiment, the disclosed combustor module 100 can deliver a uniform flow of gaseous reactants throughout the exit face. By "uniform flow rate" is meant (a) for any particular gaseous reactant, the change in the gas velocity at a particular orifice 202 of the burner face 204 and the average velocity of all orifices exiting the gas is less than about 2% and/or (b) For a gas, the average gas velocity at the pores of the burner face is about 2% less than the average velocity of all the pores for all gases. A dust sheet having a uniform thickness can be formed by providing a uniform flow rate of the gaseous precursor through the exit face of the burner module.

The uniformity between the flow rates of each of the holes 202 allows the formation of dust and thin glass sheets with excellent uniformity. Even a single hole 202 that is not proportionally larger or smaller than the remaining holes affects the surface topography of the resulting thin glass sheet. The aperture 202, which exhibits a flow rate that exceeds the remaining holes, results in the formation of elevated ridges from the thin glass sheets formed by the dust sheets. The extra dust deposited forms a potentially visible line in the human glass eye in a thin glass sheet or strip. The aperture 202 exhibiting insufficient flow rate compared to the remaining apertures results in the formation of a recess in the thin glass sheet formed from the dust sheet or tape.

The design and precise manufacturing techniques of the embodiment of the burner module 100 enable the formation of thin glass sheets without wires. Glass sheets without wires are those that have lines that are invisible to the human eye. The precise and consistent gas flow from each of the orifices 202 forms a dust sheet having a uniform mass density throughout, allowing the formation of glass without wires. Thin glass sheets formed using the burner module 100 can exhibit peak-to-valley shifts of less than 0.1 microns (including 0.08 microns, 0.05 microns, 0.03 microns, 0.02 microns, and less than 0.01 microns).

The glass flakes produced using the above method may have an average thickness of 200 microns or less and an average surface roughness of at least one of the two major opposing surfaces of 1 nm or less. In one embodiment, the average surface roughness exceeds 1 nm or less for both major surfaces. An exemplary sorghum glass sheet is measured to be at least 2.5 x 2.5 cm ² . For example, the width of the glass sheet can range from about 2.5 centimeters (cm) to 2 meters (m), and the length of the glass sheet - measured in the machine direction - can range from about 2.5 cm to 10 m or more. In principle, the length of the glass sheet is limited only by the deposition time and can extend beyond 10 meters to 10 kilometers or more.

In view of the precise manufacturing requirements of the burner module 100, conventional processing techniques do not provide a clean, consistent, and sufficiently accurate work product. Conventional machining techniques include turning, milling, grinding, drilling, and any other process, and the material removal mechanisms for such processes are based primarily on mechanical forces. To achieve the required accuracy, electrical discharge machining (EDM) is used to form, for example, holes 202 in the burner face 204. The EDM allows the formed holes 202 to have smooth walls and no tool marks or burrs to disturb the flow of gas through the holes 202. Tool marks or burrs disturb the flow of gas through the holes 202 which will result in holes and lines formed in the finished thin glass sheet. There is an inconsistent flow between them.

The machined surface of the combustor module 100 can be selectively post-treated to smooth the walls and holes. The smoothing of the post-treatment can be achieved, for example, by deburring, polishing, and surface conditioning agents (e.g., Extrude Hone® (Kennametal, Irwin, PA)) through the components of the burner module 100.

The dust supply means may be held stationary during the formation and deposition of the dust particles, or the dust supply means may be moved (e.g., oscillated) relative to the deposition surface. The distance from the burner face 204 to the deposition surface can range from about 20 millimeters (mm) to about 100 mm (eg, 20 mm, 25 mm, 30 mm, 35 mm, 40 mm, 45 mm, 50 mm, 55 mm, 60). Mm, 65 mm, 70 mm, 75 mm, 80 mm, 85 mm, 90 mm, 95 mm or 100 mm).

The initially produced or initially deposited dust particles may consist essentially of a single phase (e.g., a single oxide) which may be sintered to form, for example, undoped, high purity glass. Alternatively, the dust particles may comprise two or more components or two or more phases, which may be sintered to form, for example, doped glass. For example, a multi-phase glass sheet can be made by incorporating a titanium oxide precursor or a phosphorous oxide precursor into the OMCTS gas flow. Exemplary titanium and phosphorous oxide precursors include various soluble metal salts and metal alkoxides, such as phosphorus and titanium (IV) isopropoxide halides.

Doping can occur in situ during the flame hydrolysis process by introducing a dopant precursor into the flame. It is also possible to incorporate the dopant into the dust sheet before or during the sintering of the dust sheet. Exemplary dopants include Group IA, Group IB, Group IIA, Group IIB, and Group IIIA from the Periodic Table of the Elements. Elements of Group III, Group IIIB, Group IVA, Group IVB, Group VA, Group VB and the rare earth series.

The dust particles can have a substantially uniform composition, size and/or shape. Alternatively, one or more of the composition, size and shape of the dust particles may vary. For example, the dust particles of the main glass component may be provided by a dust supply device, and the dust particles of the dopant composition may be provided by different dust supply devices. In certain embodiments, the dust particles may be mixed and/or adhered to each other during the formation and deposition of dust particles to form composite particles. It is also possible to substantially prevent the dust particles from sticking to each other to form mixed particles before or while being deposited on the deposition surface.

As used herein, the singular forms "a" and "the" are also meant to refer to the plural referents. The use of "at least one of" components, elements, etc., as used herein, should not be construed as an inferred.

In order to describe and define the purpose of the present embodiment, it is noted that the terms "substantially" and "about" are used herein to mean the degree of uncertainty of the degree of inherentity, which can be attributed to any quantitative Comparison, value, measurement or other representation. The terms "substantially" and "about" are also used herein to mean that the quantitative representation may differ from the reference without causing a change in the basic function of the subject matter in question.

Unless otherwise expressly stated, there is no intention to interpret any of the methods presented herein as requiring that the steps be performed in a particular order. Therefore, the method request items are not actually described in the order in which they are to be followed, or are not specifically stated in the scope and description of the patent application. In the order, there is no intention to infer any particular order.

It is also noted that the components of the present disclosure are set forth to provide a detailed description of the specific nature or function in a particular manner. More specifically, the reference to a component "set" herein refers to the existing physical state of the component and is therefore considered to be a clear detail of the structural characteristics of the component.

It is noted that the terms "preferably" and "typically" as used herein are used to limit the scope of the claimed embodiments or suggest that certain features are critical to the structure or function of the embodiments. Basic, or even important. Instead, the terms are intended to identify particular aspects of the embodiments of the present disclosure, or to emphasize alternative or additional features that may or may not be used in a particular embodiment of the present disclosure.

It will be apparent to those skilled in the art that various modifications and changes can be made without departing from the spirit and scope of the disclosure. Modifications, sub-combinations, and variations of the disclosed embodiments of the present invention in light of the present disclosure may be considered by those of ordinary skill in the art, and the present disclosure should be construed as being included in the scope of the appended claims. Everything within the scope of its equivalent.

100‧‧‧burner module

200‧‧‧ burner gas discharge block

202‧‧‧ hole

204‧‧‧burner surface

300‧‧‧ burner gas flow disperser

302‧‧‧Distributed channel

308‧‧‧Exit face of burner gas flow disperser

400‧‧‧burner gas inlet block

406‧‧‧ gas inlet passage

410‧‧‧Export face of burner gas inlet block

500‧‧‧Upstream board

600‧‧‧ under the flow board

Claims (20)

A burner module includes a burner gas inlet block, a lower flow plate, an upper flow plate, a burner gas flow disperser, and a combustor gas discharge block, wherein: the combustor gas inlet block comprises a plurality of gas inlets on a base of one of the burner gas inlet blocks and a plurality of gas inlet passages separated by a gas inlet passage partition, the gas inlet passages from the burner gas inlet block a gas inlet extending to an outlet face of the combustor gas inlet block; the combustor gas flow disperser comprising a plurality of dispersing channels separated by a dispersing channel baffle from an inlet of the combustor gas flow disperser a face extending to an outlet face of the burner gas flow disperser; each of the dispersing channel baffles including a lower edge flow plate contact surface at the inlet face of the burner gas flow disperser; the combustor gas discharge block Included in the plurality of holes and a plurality of gas discharge passages, the plurality of holes are located on a burner surface of the burner gas discharge block, the plurality The gas discharge passage is partitioned by a gas discharge passage partition extending from an inlet face of one of the burner gas discharge blocks to a plurality of burner face passages from which the burner face passage extends to The holes on the burner face; each of the gas discharge passage partitions includes a blade upper flow plate contact surface on the inlet face of the burner gas discharge block; the lower flow plate includes a plurality of lower flow plates a lower flow plate pressure hole that is separated by a land, the lower flow plate land extending in a longitudinal direction, wherein the plurality of Each of the lower flow plate pressure holes is in fluid communication with one of the gas inlet channels and one of the dispersion channels; the upper flow plate includes a plurality of upper flow plate pressure holes separated by an upper flow plate land, the upper flow plate The land extends in a longitudinal direction, wherein each of the plurality of upper flow plate pressure holes is in fluid communication with one of the dispersion channels and one of the gas discharge channels; and the burner module is configured to pass through the gas inlets The gas inlet passages, the lower flow plate pressure holes, the dispersion channels, the upper flow plate pressure holes, the gas discharge passages, the plurality of burner face passages, and the plurality of holes for conveying a combustion gas An oxidant, a dust precursor, and an inert gas to a combustion location in a chemical vapor deposition process to produce a burner flame in a combustion zone adjacent the burner face. The burner module of claim 1, wherein the burner module further comprises a combustion gas source, an oxidant source, an inert gas source, and a dust precursor source; the plurality of gas inlets comprising at least one combustion a gas inlet, at least one oxidant inlet, at least one inert gas inlet, and at least one precursor inlet; the at least one combustion gas inlet provides the combustion gas from the combustion gas source to the burner module; the at least one oxidant inlet from the oxidant Providing the oxidant to the combustor module; the at least one inert gas inlet providing the inert gas from the inert gas source to the combustor module; The at least one precursor inlet provides the dust precursor from the dust precursor source to the burner module. The burner module of claim 2, wherein: the source of combustion gas, the source of the oxidant, the source of the inert gas, the source of the dust precursor, or a subset of the foregoing comprises a mixture of at least two input media, such The input medium is selected from the group consisting of the combustion gases, the oxidant, the dust precursor, and the inert gas. The burner module of claim 1, wherein: the blade lower flow plate contact surface and the flow plate contact surface on the blade edge each include a blade edge width; the dispersion channel spacer and the gas discharge channel spacer include a channel spacer width; and the channel spacer width is greater than the blade edge width. The burner module of claim 4, wherein the channel spacer width is at least an order of magnitude greater than the blade edge width. The burner module of claim 4, wherein the blade edge width is from about 0.005 inches to about 0.031 inches. The burner module of claim 4, wherein: the edge width is from about 0.005 inches to about 0.031 inches; The channel separator has a width of from about 0.04 inches to about 0.08 inches. The burner module of claim 1, wherein the lower blade flow surface contact surface and the flow plate contact surface on the blade edge have a hardness that exceeds the hardness of the lower flow plate and the upper flow plate. The burner module of claim 1, wherein the flow plate contact surface under the blade edge or the flow plate contact surface on the blade edge is a truncated triangular prism. The burner module of claim 1, wherein the lower flow plate between the lower flow plate contact surface of the burner and the outlet face of the burner gas inlet block by the burner gas flow disperser Form a seal. The burner module of claim 1, wherein the upper flow plate between the flow plate contact surface on the edge of the burner and the outlet face of the burner gas flow disperser by the burner gas discharge block Form a seal. The burner module of claim 1, wherein the upper flow plate, the lower flow plate or the upper flow plate and the lower flow plate both comprise at least 150 pressure holes, the pressure holes and the individual Each of the gas inlet passages, the individual discrete passages, or the individual gas discharge passages are in fluid communication. The burner module of claim 1, wherein the upper flow plate, the lower flow plate or the upper flow plate and the lower flow plate both contain at least 450 pressures Force holes that are in fluid communication with the individual gas inlet channels, the individual dispersion channels, or each of the individual gas outlet channels. The burner module of claim 1, wherein the upper flow plate, the lower flow plate, or both the upper flow plate and the lower flow plate comprise pressure holes having a diameter of from about 0.02 inches to about 0.03 inches. The burner module of claim 14, wherein the circular pressure holes are in communication with a single passage, the single passage being disposed along a single line, and the center of the pressure holes is from about 0.030 inches to about 0.040 inches吋 spaced apart. The burner module of claim 1, wherein the upper flow plate, the lower flow plate or both the upper flow plate and the lower flow plate comprise pressure holes having a diameter of from about 0.01 inches to about 0.03 inches. And the pressure holes are in communication with a single passage disposed along at least two lines, and the centers of the pressure holes are spaced apart from each line by about 0.015 inches to about 0.030 inches. The burner module of claim 1, wherein the burner module further comprises at least two positioning tips disposed to alignably position the burner gas flow disperser, the upper flow plate, and the The burner gas is discharged from the block. The burner module of claim 1, wherein the burner module further comprises at least two positioning tips, wherein the at least two positioning tips are arranged to align the burning A burner gas flow disperser, the lower flow plate, and the burner gas inlet block. A method of forming a glass sheet or tape, the method comprising the steps of: depositing a plurality of glass dust particles on a deposition surface of a rotating drum to form a dust sheet; releasing at least a portion of the deposition surface from the rotating drum The dust sheet; and at least a portion of the dust sheet is sintered into a dense glass by heating the dust sheet of the moving portion to a sintering temperature, wherein the glass dust particles are generated via a burner module, The burner module includes a burner gas inlet block, a lower flow plate, an upper flow plate, a burner gas flow disperser, and a combustor gas discharge block; the burner gas inlet block includes a plurality of positions a gas inlet on a base of one of the burner gas inlet blocks and a plurality of gas inlet passages separated by a gas inlet passage partition extending from the base of the burner gas inlet block to the An exit surface of one of the burner gas inlet blocks; the burner gas flow disperser comprising a plurality of dispersing channels separated by a dispersing channel partition Dispersing a passage extending from an inlet face of one of the burner gas flow dispersers to an outlet face of the combustor gas flow disperser; each of the dispersing passage baffles being at the inlet face of the combustor gas flow disperser Included in the lower edge of the flow plate contact surface; the burner gas discharge block includes a plurality of holes and a plurality of gas discharge passages, the plurality of holes being located on a burner surface of the burner gas discharge block, the plurality of gases The discharge passage is partitioned by a gas discharge passage partition extending from one of the inlet faces of the burner gas discharge block to the plurality Burner face passages extending from the gas discharge passages to the holes on the burner face; each of the gas discharge passage partitions being at the inlet face of the burner gas discharge block Including a flow plate contact surface on a blade edge; the lower flow plate includes a plurality of lower flow plate pressure holes separated by a lower flow plate land, the lower flow plate land extending in a longitudinal direction, wherein the plurality of lower flow plate pressure holes are Each of the ones is in fluid communication with one of the gas inlet passages and one of the plurality of dispersion passages; the upper flow plate includes a plurality of upper flow plate pressure holes separated by an upper flow plate land, the upper flow plate land being in a longitudinal direction Up extending, wherein each of the plurality of upper flow plate pressure holes is in fluid communication with one of the dispersion channels and one of the gas discharge channels; and the burner module is configured to pass through the gas inlets, etc. Gas inlet passage, the lower flow plate pressure holes, the dispersion channels, the upper flow plate pressure holes, the gas discharge passages, the plurality of burners The passage and the plurality of holes convey a combustion gas, an oxidant, a dust precursor and an inert gas to a combustion position in a chemical vapor deposition process to generate a combustion in a combustion zone near the burner face Flame. A glass sheet or tape formed in accordance with the method of claim 19, wherein the formed glass sheet exhibits a peak-to-valley surface offset of less than about 0.05 microns.