TWI562279B - Method for forming semiconductor structure having metal connection - Google Patents

Method for forming semiconductor structure having metal connection

Info

Publication number
TWI562279B
TWI562279B TW101145686A TW101145686A TWI562279B TW I562279 B TWI562279 B TW I562279B TW 101145686 A TW101145686 A TW 101145686A TW 101145686 A TW101145686 A TW 101145686A TW I562279 B TWI562279 B TW I562279B
Authority
TW
Taiwan
Prior art keywords
semiconductor structure
metal connection
forming semiconductor
forming
metal
Prior art date
Application number
TW101145686A
Other languages
English (en)
Other versions
TW201423908A (zh
Inventor
Chieh Te Chen
feng yi Chang
Chih Sen Huang
Ching Wen Hung
Ching Pin Hsu
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW101145686A priority Critical patent/TWI562279B/zh
Publication of TW201423908A publication Critical patent/TW201423908A/zh
Application granted granted Critical
Publication of TWI562279B publication Critical patent/TWI562279B/zh

Links

TW101145686A 2012-12-05 2012-12-05 Method for forming semiconductor structure having metal connection TWI562279B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW101145686A TWI562279B (en) 2012-12-05 2012-12-05 Method for forming semiconductor structure having metal connection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW101145686A TWI562279B (en) 2012-12-05 2012-12-05 Method for forming semiconductor structure having metal connection

Publications (2)

Publication Number Publication Date
TW201423908A TW201423908A (zh) 2014-06-16
TWI562279B true TWI562279B (en) 2016-12-11

Family

ID=51394138

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101145686A TWI562279B (en) 2012-12-05 2012-12-05 Method for forming semiconductor structure having metal connection

Country Status (1)

Country Link
TW (1) TWI562279B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9627215B1 (en) 2015-09-25 2017-04-18 Taiwan Semiconductor Manufacturing Company, Ltd. Structure and method for interconnection
US10886226B2 (en) 2018-07-31 2021-01-05 Taiwan Semiconductor Manufacturing Co, Ltd. Conductive contact having staircase barrier layers

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200816482A (en) * 2006-09-04 2008-04-01 Samsung Electronics Co Ltd Semiconductor device free of gate spacer stress and method of manufacturing the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200816482A (en) * 2006-09-04 2008-04-01 Samsung Electronics Co Ltd Semiconductor device free of gate spacer stress and method of manufacturing the same

Also Published As

Publication number Publication date
TW201423908A (zh) 2014-06-16

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