TWI561685B - - Google Patents

Info

Publication number
TWI561685B
TWI561685B TW104118022A TW104118022A TWI561685B TW I561685 B TWI561685 B TW I561685B TW 104118022 A TW104118022 A TW 104118022A TW 104118022 A TW104118022 A TW 104118022A TW I561685 B TWI561685 B TW I561685B
Authority
TW
Taiwan
Application number
TW104118022A
Other versions
TW201643280A (zh
Inventor
Wen-Bin Yang
jin-ming Zhu
shu-ling Huang
Original Assignee
Univ Nat United
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat United filed Critical Univ Nat United
Priority to TW104118022A priority Critical patent/TW201643280A/zh
Application granted granted Critical
Publication of TWI561685B publication Critical patent/TWI561685B/zh
Publication of TW201643280A publication Critical patent/TW201643280A/zh

Links

TW104118022A 2015-06-03 2015-06-03 電子元件微電鍍監測添加劑含量之快速定量法 TW201643280A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW104118022A TW201643280A (zh) 2015-06-03 2015-06-03 電子元件微電鍍監測添加劑含量之快速定量法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW104118022A TW201643280A (zh) 2015-06-03 2015-06-03 電子元件微電鍍監測添加劑含量之快速定量法

Publications (2)

Publication Number Publication Date
TWI561685B true TWI561685B (zh) 2016-12-11
TW201643280A TW201643280A (zh) 2016-12-16

Family

ID=58055854

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104118022A TW201643280A (zh) 2015-06-03 2015-06-03 電子元件微電鍍監測添加劑含量之快速定量法

Country Status (1)

Country Link
TW (1) TW201643280A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114438548A (zh) * 2022-01-12 2022-05-06 杭州三耐环保科技股份有限公司 一种电解生产中的添加剂异常监控方法和系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200727755A (en) * 2006-01-06 2007-07-16 Rockwood Electrochemicals Asia Ltd Method for monitoring the filling performance of copper plating formular
TW201425924A (zh) * 2012-12-20 2014-07-01 Atotech Deutschland Gmbh 監控銅電解質填充性質之方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200727755A (en) * 2006-01-06 2007-07-16 Rockwood Electrochemicals Asia Ltd Method for monitoring the filling performance of copper plating formular
TW201425924A (zh) * 2012-12-20 2014-07-01 Atotech Deutschland Gmbh 監控銅電解質填充性質之方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
盧政泯，"微電子製程中銅電鍍快速監測及動力學之研究"，國立聯合大學 化學工程學系碩士班 碩士論文，國家圖書館上架日 2014/08/20 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114438548A (zh) * 2022-01-12 2022-05-06 杭州三耐环保科技股份有限公司 一种电解生产中的添加剂异常监控方法和系统

Also Published As

Publication number Publication date
TW201643280A (zh) 2016-12-16

Similar Documents

Publication Publication Date Title
BE2015C047I2 (zh)
BE2015C044I2 (zh)
BR0009182B1 (zh)
BR0007688B1 (zh)
BR0000126B1 (zh)
BR0000695B1 (zh)
BR0009373B1 (zh)
BR0001536B1 (zh)
BR0001684B1 (zh)
BR0001810B1 (zh)
BR0002033B1 (zh)
BR0002402B1 (zh)
BR0002435B1 (zh)
BR0002694B1 (zh)
BR0002802B1 (zh)
BR0002874B1 (zh)
BR0003166B1 (zh)
BR0003189B1 (zh)
BR0003208B1 (zh)
BR0003401B1 (zh)
BR0003686B1 (zh)
BR0003746B1 (zh)
BR0003751B1 (zh)
BR0003928B1 (zh)
BR0004687B1 (zh)

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees