TWI560858B - Back-illuminated image sensor and fabricating method thereof - Google Patents
Back-illuminated image sensor and fabricating method thereofInfo
- Publication number
- TWI560858B TWI560858B TW101121373A TW101121373A TWI560858B TW I560858 B TWI560858 B TW I560858B TW 101121373 A TW101121373 A TW 101121373A TW 101121373 A TW101121373 A TW 101121373A TW I560858 B TWI560858 B TW I560858B
- Authority
- TW
- Taiwan
- Prior art keywords
- image sensor
- fabricating method
- illuminated image
- illuminated
- fabricating
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW101121373A TWI560858B (en) | 2012-06-14 | 2012-06-14 | Back-illuminated image sensor and fabricating method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW101121373A TWI560858B (en) | 2012-06-14 | 2012-06-14 | Back-illuminated image sensor and fabricating method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201351623A TW201351623A (en) | 2013-12-16 |
TWI560858B true TWI560858B (en) | 2016-12-01 |
Family
ID=50158133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW101121373A TWI560858B (en) | 2012-06-14 | 2012-06-14 | Back-illuminated image sensor and fabricating method thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI560858B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9786710B2 (en) * | 2015-09-30 | 2017-10-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Image sensor device with sub-isolation in pixels |
TWI707465B (en) * | 2019-10-09 | 2020-10-11 | 晶相光電股份有限公司 | Image sensing device and method of forming the same |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070210395A1 (en) * | 2006-02-24 | 2007-09-13 | Yasushi Maruyama | Solid-state imaging device, method for producing same, and camera |
US20080061330A1 (en) * | 2006-09-13 | 2008-03-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Methods for fabricating image sensor devices |
US20090090937A1 (en) * | 2007-10-05 | 2009-04-09 | Samsung Electronics Co., Ltd. | Unit pixels, image sensor containing unit pixels, and method of fabricating unit pixels |
US20110242376A1 (en) * | 2010-04-02 | 2011-10-06 | Sony Corporation | Solid-state imaging device and method for manufacturing the same, and electronic apparatus and camera module |
-
2012
- 2012-06-14 TW TW101121373A patent/TWI560858B/en active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070210395A1 (en) * | 2006-02-24 | 2007-09-13 | Yasushi Maruyama | Solid-state imaging device, method for producing same, and camera |
US20080061330A1 (en) * | 2006-09-13 | 2008-03-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Methods for fabricating image sensor devices |
US20090090937A1 (en) * | 2007-10-05 | 2009-04-09 | Samsung Electronics Co., Ltd. | Unit pixels, image sensor containing unit pixels, and method of fabricating unit pixels |
US20110242376A1 (en) * | 2010-04-02 | 2011-10-06 | Sony Corporation | Solid-state imaging device and method for manufacturing the same, and electronic apparatus and camera module |
Also Published As
Publication number | Publication date |
---|---|
TW201351623A (en) | 2013-12-16 |
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