TWI560795B - Wafer probing device - Google Patents
Wafer probing deviceInfo
- Publication number
- TWI560795B TWI560795B TW104128019A TW104128019A TWI560795B TW I560795 B TWI560795 B TW I560795B TW 104128019 A TW104128019 A TW 104128019A TW 104128019 A TW104128019 A TW 104128019A TW I560795 B TWI560795 B TW I560795B
- Authority
- TW
- Taiwan
- Prior art keywords
- probing device
- wafer probing
- wafer
- probing
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562169181P | 2015-06-01 | 2015-06-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI560795B true TWI560795B (en) | 2016-12-01 |
TW201643981A TW201643981A (en) | 2016-12-16 |
Family
ID=58055992
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW104128019A TWI560795B (en) | 2015-06-01 | 2015-08-26 | Wafer probing device |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI560795B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10976363B2 (en) | 2017-12-15 | 2021-04-13 | Mpi Corporation | Wafer inspection method and wafer probing system |
US11353501B2 (en) | 2017-12-15 | 2022-06-07 | Mpi Corporation | Wafer inspection method and wafer probing system |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW293126B (en) * | 1994-02-22 | 1996-12-11 | Gen Electric | |
CN101285865A (en) * | 2007-03-23 | 2008-10-15 | 东京毅力科创株式会社 | Method and apparatus for detecting tip position of probe, alignment method, and probe apparatus |
TW201202720A (en) * | 2010-03-12 | 2012-01-16 | Tokyo Electron Ltd | Probe apparatus |
-
2015
- 2015-08-26 TW TW104128019A patent/TWI560795B/en active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW293126B (en) * | 1994-02-22 | 1996-12-11 | Gen Electric | |
CN101285865A (en) * | 2007-03-23 | 2008-10-15 | 东京毅力科创株式会社 | Method and apparatus for detecting tip position of probe, alignment method, and probe apparatus |
TW201202720A (en) * | 2010-03-12 | 2012-01-16 | Tokyo Electron Ltd | Probe apparatus |
Also Published As
Publication number | Publication date |
---|---|
TW201643981A (en) | 2016-12-16 |
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