TWI560528B - - Google Patents

Info

Publication number
TWI560528B
TWI560528B TW101130361A TW101130361A TWI560528B TW I560528 B TWI560528 B TW I560528B TW 101130361 A TW101130361 A TW 101130361A TW 101130361 A TW101130361 A TW 101130361A TW I560528 B TWI560528 B TW I560528B
Authority
TW
Taiwan
Application number
TW101130361A
Other versions
TW201314380A (zh
Inventor
Hisaji Miyoshi
Eiji Kimura
Original Assignee
Orc Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2011191691A external-priority patent/JP5841381B2/ja
Priority claimed from JP2011283476A external-priority patent/JP5873327B2/ja
Application filed by Orc Mfg Co Ltd filed Critical Orc Mfg Co Ltd
Publication of TW201314380A publication Critical patent/TW201314380A/zh
Application granted granted Critical
Publication of TWI560528B publication Critical patent/TWI560528B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
    • G03F7/70116—Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70133—Measurement of illumination distribution, in pupil plane or field plane
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70558—Dose control, i.e. achievement of a desired dose

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW101130361A 2011-09-02 2012-08-22 曝光用調光裝置 TW201314380A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011191691A JP5841381B2 (ja) 2011-09-02 2011-09-02 露光用調光装置
JP2011283476A JP5873327B2 (ja) 2011-12-26 2011-12-26 露光用調光装置

Publications (2)

Publication Number Publication Date
TW201314380A TW201314380A (zh) 2013-04-01
TWI560528B true TWI560528B (zh) 2016-12-01

Family

ID=47756123

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101130361A TW201314380A (zh) 2011-09-02 2012-08-22 曝光用調光裝置

Country Status (2)

Country Link
TW (1) TW201314380A (zh)
WO (1) WO2013031632A1 (zh)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1801648A1 (en) * 2004-08-17 2007-06-27 FUJIFILM Corporation Photosensitive transfer material and pattern forming method and pattern
EP1843204A1 (en) * 2005-01-25 2007-10-10 Nikon Corporation Exposure device, exposure method, and micro device manufacturing method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH088154A (ja) * 1994-06-16 1996-01-12 Nec Yamagata Ltd 露光装置
JP2006319098A (ja) * 2005-05-12 2006-11-24 Pentax Industrial Instruments Co Ltd 描画装置
JP2007333965A (ja) * 2006-06-14 2007-12-27 Adtec Engineeng Co Ltd 露光用照明装置
JP2010272631A (ja) * 2009-05-20 2010-12-02 Nikon Corp 照明装置、露光装置、及びデバイス製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1801648A1 (en) * 2004-08-17 2007-06-27 FUJIFILM Corporation Photosensitive transfer material and pattern forming method and pattern
EP1843204A1 (en) * 2005-01-25 2007-10-10 Nikon Corporation Exposure device, exposure method, and micro device manufacturing method

Also Published As

Publication number Publication date
TW201314380A (zh) 2013-04-01
WO2013031632A1 (ja) 2013-03-07

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees