TWI560445B - - Google Patents
Info
- Publication number
- TWI560445B TWI560445B TW104142261A TW104142261A TWI560445B TW I560445 B TWI560445 B TW I560445B TW 104142261 A TW104142261 A TW 104142261A TW 104142261 A TW104142261 A TW 104142261A TW I560445 B TWI560445 B TW I560445B
- Authority
- TW
- Taiwan
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0654—Imaging
- G01N29/069—Defect imaging, localisation and sizing using, e.g. time of flight diffraction [TOFD], synthetic aperture focusing technique [SAFT], Amplituden-Laufzeit-Ortskurven [ALOK] technique
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/0289—Internal structure, e.g. defects, grain size, texture
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/26—Scanned objects
- G01N2291/269—Various geometry objects
- G01N2291/2697—Wafer or (micro)electronic parts
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014262597A JP5764251B1 (ja) | 2014-12-25 | 2014-12-25 | 超音波映像装置、およびそれを用いた観察方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201623958A TW201623958A (zh) | 2016-07-01 |
| TWI560445B true TWI560445B (zh) | 2016-12-01 |
Family
ID=53887961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104142261A TW201623958A (zh) | 2014-12-25 | 2015-12-16 | 超音波成像裝置及使用此之觀察方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5764251B1 (zh) |
| KR (1) | KR101723752B1 (zh) |
| CN (1) | CN105738476B (zh) |
| TW (1) | TW201623958A (zh) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3291286A1 (en) * | 2016-08-31 | 2018-03-07 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Method of and system for performing defect detection on or characterization of a layer of a semiconductor element or semimanufactured semiconductor element |
| JP6273055B1 (ja) * | 2017-01-31 | 2018-01-31 | 株式会社日立パワーソリューションズ | 位置制御装置、位置制御方法、及び超音波映像システム |
| JP6479243B1 (ja) * | 2018-07-02 | 2019-03-06 | 株式会社日立パワーソリューションズ | 超音波映像システム |
| EP3853598A4 (en) * | 2018-09-18 | 2022-04-13 | The University of British Columbia | ULTRASOUND ANALYSIS OF A SUBJECT |
| JP6641054B1 (ja) * | 2019-04-26 | 2020-02-05 | 株式会社日立パワーソリューションズ | プローブの可動範囲設定装置及び可動範囲設定方法 |
| CN113466340B (zh) * | 2021-06-18 | 2023-12-05 | 之江实验室 | 一种用于超声扫描显微镜的预扫描全局对焦方法及装置 |
| JP7368654B1 (ja) | 2023-06-28 | 2023-10-24 | 株式会社日立パワーソリューションズ | 超音波映像装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005342337A (ja) * | 2004-06-04 | 2005-12-15 | Matsushita Electric Ind Co Ltd | 超音波探触子 |
| CN101617223A (zh) * | 2007-02-28 | 2009-12-30 | 杰富意钢铁株式会社 | 超声波探伤的校正方法、管体的品质管理方法及制造方法 |
| TW201415056A (zh) * | 2012-07-19 | 2014-04-16 | Hitachi Power Solutions Co Ltd | 測定頻率可變之超音波影像裝置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4398539A (en) * | 1980-06-30 | 1983-08-16 | Second Foundation | Extended focus transducer system |
| JP2005319199A (ja) * | 2004-05-11 | 2005-11-17 | Toshiba Corp | 超音波診断装置 |
| JP4787914B2 (ja) * | 2005-12-22 | 2011-10-05 | 本多電子株式会社 | 音速測定方法、音速測定装置、及び超音波画像検査装置 |
| US10228354B2 (en) | 2012-10-26 | 2019-03-12 | Nordson Corporation | Single channel scanning acoustic microscope with multiple focused ultrasonic transducers |
-
2014
- 2014-12-25 JP JP2014262597A patent/JP5764251B1/ja active Active
-
2015
- 2015-12-08 KR KR1020150173945A patent/KR101723752B1/ko active IP Right Grant
- 2015-12-16 TW TW104142261A patent/TW201623958A/zh unknown
- 2015-12-18 CN CN201510958357.5A patent/CN105738476B/zh active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005342337A (ja) * | 2004-06-04 | 2005-12-15 | Matsushita Electric Ind Co Ltd | 超音波探触子 |
| CN101617223A (zh) * | 2007-02-28 | 2009-12-30 | 杰富意钢铁株式会社 | 超声波探伤的校正方法、管体的品质管理方法及制造方法 |
| TW201415056A (zh) * | 2012-07-19 | 2014-04-16 | Hitachi Power Solutions Co Ltd | 測定頻率可變之超音波影像裝置 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101723752B1 (ko) | 2017-04-05 |
| CN105738476A (zh) | 2016-07-06 |
| TW201623958A (zh) | 2016-07-01 |
| KR20160078875A (ko) | 2016-07-05 |
| JP5764251B1 (ja) | 2015-08-19 |
| JP2016121951A (ja) | 2016-07-07 |
| CN105738476B (zh) | 2019-05-14 |