TWI560141B - Micro/nano-molding template and method of forming micro-structure on substrate by use of such micor/nano-molding template - Google Patents
Micro/nano-molding template and method of forming micro-structure on substrate by use of such micor/nano-molding templateInfo
- Publication number
- TWI560141B TWI560141B TW103140458A TW103140458A TWI560141B TW I560141 B TWI560141 B TW I560141B TW 103140458 A TW103140458 A TW 103140458A TW 103140458 A TW103140458 A TW 103140458A TW I560141 B TWI560141 B TW I560141B
- Authority
- TW
- Taiwan
- Prior art keywords
- nano
- micro
- molding template
- micor
- substrate
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103140458A TWI560141B (en) | 2014-11-21 | 2014-11-21 | Micro/nano-molding template and method of forming micro-structure on substrate by use of such micor/nano-molding template |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103140458A TWI560141B (en) | 2014-11-21 | 2014-11-21 | Micro/nano-molding template and method of forming micro-structure on substrate by use of such micor/nano-molding template |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201619043A TW201619043A (zh) | 2016-06-01 |
TWI560141B true TWI560141B (en) | 2016-12-01 |
Family
ID=56754886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103140458A TWI560141B (en) | 2014-11-21 | 2014-11-21 | Micro/nano-molding template and method of forming micro-structure on substrate by use of such micor/nano-molding template |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI560141B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108627994A (zh) * | 2017-03-24 | 2018-10-09 | 敦捷光电股份有限公司 | 光准直器及其制造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010074659A1 (en) * | 2008-12-22 | 2010-07-01 | Helios Applied Systems Pte Ltd | 3d mold for manufacture of sub-micron 3d structures using 2-d photon lithography and nanoimprinting and process thereof |
TW201405866A (zh) * | 2012-04-18 | 2014-02-01 | Hunetplus Co Ltd | 製造供高效率氮化物系發光二極體用之奈米圖案化基材之方法 |
-
2014
- 2014-11-21 TW TW103140458A patent/TWI560141B/zh not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010074659A1 (en) * | 2008-12-22 | 2010-07-01 | Helios Applied Systems Pte Ltd | 3d mold for manufacture of sub-micron 3d structures using 2-d photon lithography and nanoimprinting and process thereof |
TW201405866A (zh) * | 2012-04-18 | 2014-02-01 | Hunetplus Co Ltd | 製造供高效率氮化物系發光二極體用之奈米圖案化基材之方法 |
Also Published As
Publication number | Publication date |
---|---|
TW201619043A (zh) | 2016-06-01 |
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Legal Events
Date | Code | Title | Description |
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MM4A | Annulment or lapse of patent due to non-payment of fees |