TWI560141B - Micro/nano-molding template and method of forming micro-structure on substrate by use of such micor/nano-molding template - Google Patents

Micro/nano-molding template and method of forming micro-structure on substrate by use of such micor/nano-molding template

Info

Publication number
TWI560141B
TWI560141B TW103140458A TW103140458A TWI560141B TW I560141 B TWI560141 B TW I560141B TW 103140458 A TW103140458 A TW 103140458A TW 103140458 A TW103140458 A TW 103140458A TW I560141 B TWI560141 B TW I560141B
Authority
TW
Taiwan
Prior art keywords
nano
micro
molding template
micor
substrate
Prior art date
Application number
TW103140458A
Other languages
English (en)
Other versions
TW201619043A (zh
Inventor
Shao Kang Hung
Chih Hsien Lin
Cheng Lung Chen
Original Assignee
Force Prec Instr Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Force Prec Instr Co Ltd filed Critical Force Prec Instr Co Ltd
Priority to TW103140458A priority Critical patent/TWI560141B/zh
Publication of TW201619043A publication Critical patent/TW201619043A/zh
Application granted granted Critical
Publication of TWI560141B publication Critical patent/TWI560141B/zh

Links

TW103140458A 2014-11-21 2014-11-21 Micro/nano-molding template and method of forming micro-structure on substrate by use of such micor/nano-molding template TWI560141B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW103140458A TWI560141B (en) 2014-11-21 2014-11-21 Micro/nano-molding template and method of forming micro-structure on substrate by use of such micor/nano-molding template

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103140458A TWI560141B (en) 2014-11-21 2014-11-21 Micro/nano-molding template and method of forming micro-structure on substrate by use of such micor/nano-molding template

Publications (2)

Publication Number Publication Date
TW201619043A TW201619043A (zh) 2016-06-01
TWI560141B true TWI560141B (en) 2016-12-01

Family

ID=56754886

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103140458A TWI560141B (en) 2014-11-21 2014-11-21 Micro/nano-molding template and method of forming micro-structure on substrate by use of such micor/nano-molding template

Country Status (1)

Country Link
TW (1) TWI560141B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108627994A (zh) * 2017-03-24 2018-10-09 敦捷光电股份有限公司 光准直器及其制造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010074659A1 (en) * 2008-12-22 2010-07-01 Helios Applied Systems Pte Ltd 3d mold for manufacture of sub-micron 3d structures using 2-d photon lithography and nanoimprinting and process thereof
TW201405866A (zh) * 2012-04-18 2014-02-01 Hunetplus Co Ltd 製造供高效率氮化物系發光二極體用之奈米圖案化基材之方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010074659A1 (en) * 2008-12-22 2010-07-01 Helios Applied Systems Pte Ltd 3d mold for manufacture of sub-micron 3d structures using 2-d photon lithography and nanoimprinting and process thereof
TW201405866A (zh) * 2012-04-18 2014-02-01 Hunetplus Co Ltd 製造供高效率氮化物系發光二極體用之奈米圖案化基材之方法

Also Published As

Publication number Publication date
TW201619043A (zh) 2016-06-01

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees