TWI557517B - A detection device, a lithographic apparatus, and a manufacturing method of the device - Google Patents

Description

Detection device, lithography device, and method of manufacturing the device

The present invention relates to a detecting device for detecting a plurality of marks provided on a substrate, a lithographic device having the same, and a method of manufacturing the article.

As a lithographic apparatus used for manufacturing a semiconductor device or the like, for example, there is an exposure apparatus that transfers a pattern of a mask onto a substrate while scanning the substrate by moving the slit light by moving the substrate. . In such an exposure apparatus, it is required to transfer the pattern of the mask to each of a plurality of shot regions formed on the substrate with high accuracy. To this end, it is necessary to detect the position of each of the plurality of alignment marks provided for each shot area, and obtain information indicating the position and shape of each shot area.

In Japanese Laid-Open Patent Publication No. 2010-268005, an exposure apparatus is proposed which arranges a plurality of detection units of an OFF-AXIS method for detecting one alignment mark. In the exposure apparatus disclosed in Japanese Laid-Open Patent Publication No. 2010-268005, a plurality of detecting portions can simultaneously detect the positions of a plurality of alignment marks.

It is described in Japanese Patent Laid-Open Publication No. 2010-268005 In the exposure apparatus, there is a problem that the detection portions cannot be brought close to each other when the interval of the alignment marks is narrower than the width of the detection portion. That is, since a plurality of detecting sections interfere, the interval of the alignment marks detectable by the plurality of detecting sections is limited.

The present invention is, for example, a technique that facilitates detecting a plurality of indicia provided on a substrate.

In order to achieve the above object, a detecting device according to an aspect of the present invention detects a plurality of marks provided on a substrate, and includes: a light that is reflected by the first indicator light among the plurality of marks And a first range display for detecting the first indicator; wherein the second indicator light different from the first indicator among the plurality of labels is detected by the reflected light and the second indicator is detected a range display; a transmissive portion that transmits light emitted from the first range display to be incident on the substrate; and an optical structure that has a surface that reflects light emitted from the second range display toward the substrate a change in a relative position of an incident position of light from the first range display incident on the optical member and a reflection position of light from the second range display reflected on the surface of the optical member, a position on the substrate on which the light emitted from the first range display is transmitted through the transmissive portion and irradiated The second display range of the emitted light is reflected on the surface as a distance between a position of irradiation of the substrate changes.

Further objects and other aspects of the invention will be apparent from the following description of the preferred embodiments.

1‧‧‧Exposure device

10‧‧‧ masking table

11‧‧‧ mask

20‧‧‧ substrate table

21‧‧‧Substrate

22‧‧‧ marked

22a, b‧‧‧ marked

22e~l‧‧‧ marked

23‧‧‧ Shooting area

23a, b‧‧‧ shooting area

24a, b‧‧‧ interval

24c~e‧‧‧ interval

24g‧‧‧ interval

30‧‧‧Projection optical system

40‧‧‧Lighting optical system

100‧‧‧Detection system

110‧‧‧Detection system

200‧‧‧ Drive Department

300‧‧‧Detection Department

300a, b‧‧‧Detection Department

301‧‧‧Lighting Department

302‧‧‧Optical system

303‧‧‧beam splitter

304‧‧‧ aperture diaphragm

305‧‧‧ Sight objective

306‧‧‧Relay lens

307‧‧‧Photographic components

310‧‧‧ range display

311‧‧‧ Sight objective

312‧‧‧Relay lens

313‧‧ Mirror

314‧‧‧ Vision lens

315‧‧‧ Vision lens

316‧‧‧beam splitter

317‧‧‧Photographic components

320a, b‧‧‧ range display

400‧‧‧Detection Department

500‧‧‧Detection Department

500a‧‧‧Detection Department

503‧‧‧beam splitter

505‧‧‧ Sightpiece

506‧‧‧Relay lens

507‧‧‧Photographic components

510a‧‧‧1st range display

510b‧‧‧2nd range display

520‧‧‧ range display

520a~d‧‧‧ range display

523‧‧‧beam splitter

525‧‧‧ Sight objective

526‧‧‧Relay lens

527‧‧‧Photographic components

550‧‧‧Optical members

550a~c‧‧‧ face

550d‧‧‧Transmission Department

560‧‧‧稜鏡

560a, b‧‧‧

580‧‧‧Optical members

580a~d‧‧‧ face

600‧‧‧Detection Department

700‧‧‧Detection Department

Fig. 1 is a view showing an exposure apparatus according to a first embodiment.

Fig. 2 is a view showing a conventional detection system viewed from the Y direction.

FIG. 3 is a view showing a configuration example of a conventional detecting unit.

Fig. 4 is a view for explaining the arrangement of a plurality of detecting sections.

Fig. 5 is a view showing the arrangement of two conventional detecting units when detecting two adjacent marks in the X direction.

Fig. 6 is a view showing a conventional detecting unit configured to simultaneously detect two marks adjacent in the X direction.

Fig. 7 is a view showing the configuration of a detecting unit according to the first embodiment.

Fig. 8 is a view showing the detection system of the first embodiment viewed from the Y direction.

FIG. 9 is a view showing an arrangement example of a plurality of detecting units in the detecting system according to the first embodiment.

FIG. 10 is a view showing an arrangement example of a plurality of detecting units in the detecting system according to the first embodiment.

Fig. 11 is a view showing the detection system of the first embodiment viewed from the Y direction.

Fig. 12 is a view showing the configuration of a detecting unit in the second embodiment.

Fig. 13 is a view showing the configuration of a detecting unit in the second embodiment.

Fig. 14 is a view of the detecting unit of the third embodiment when viewed from the Y direction. Figure.

Fig. 15 is a view showing a state in which the detecting unit of the third embodiment is viewed from the Z direction.

Fig. 16 is a view showing a state in which the detecting unit of the third embodiment is viewed from the Y direction.

Fig. 17 is a view showing the detection unit of the third embodiment viewed from the Z direction.

Hereinafter, embodiments suitable for the present invention will be described with reference to the drawings. In the drawings, the same reference numerals are attached to the same members or elements, and the description thereof will not be repeated. In the following embodiments, an example in which an exposure device is used as the lithographic apparatus will be described. However, the lithographic apparatus may include, for example, an imprint apparatus and a drawing apparatus.

<First embodiment>

The exposure apparatus 1 according to the first embodiment of the present invention will be described with reference to Fig. 1 . Fig. 1 is a view showing an exposure apparatus 1 according to a first embodiment of the present invention. The exposure apparatus 1 of the first embodiment is a step-and-scan type scanning exposure apparatus that scans and exposes the substrate 21 by slit light. The exposure device 1 may include an illumination optical system 40, a mask stage 10, a projection optical system 30, a substrate stage 20, and a control unit 50. In addition, the exposure device 1 may include: for forming relative to the base An off-axis (OFF-AXIS) detection system 100 that detects a plurality of alignment marks (hereinafter, labeled) of each of a plurality of shot regions of the board 21 is provided. Here, the control unit 50 has, for example, a CPU, a memory, and the like, and controls exposure processing (control of each part of the exposure apparatus 1).

The illumination optical system 40 is a light-shielding member such as a light-shielding sheet contained therein, and the light emitted from a light source (not shown) is, for example, formed into a strip shape or an arc shape that is long in the X direction. The slit light of the shape illuminates a part of the mask 11 with the slit light. The mask 11 and the substrate 21 are held by the mask stage 10 and the substrate stage 20, respectively, and are disposed at positions substantially optically conjugate (object surface and image plane of the projection optical system 30) via the projection optical system 30. The projection optical system 30 has a predetermined projection magnification (for example, 1/2 times and 1/4 times), and the pattern formed on the mask 11 is projected onto the substrate by slit light. The area on the substrate on which the pattern of the mask 11 is projected (the area irradiated by the slit light) is hereinafter referred to as an irradiation area. Then, the mask stage 10 and the substrate stage 20 are configured to be movable in a direction orthogonal to the optical axis direction (Z direction) of the projection optical system 30 (in the first embodiment, the Y direction), and are synchronized with each other. The relative scanning is performed at a speed ratio corresponding to the projection magnification of the projection optical system 30. Thereby, the irradiation region can be scanned on the substrate in the Y direction, and the pattern formed on the mask 11 can be transferred to the shot region on the substrate. Then, such scanning exposure can be sequentially repeated for each of a plurality of shot regions on the substrate while moving the substrate stage 20 to complete the exposure processing on one substrate 21.

Further, the exposure apparatus 1 may be configured to include a TTL (Through The Lens) type alignment range display (not shown) and a surface position detecting unit that detects the position of the surface of the substrate 21 in the Z direction ( Not shown) and so on. The TTL type alignment range display can overlap the alignment mark formed on the mask and the alignment mark formed on the substrate through the projection optical system, thereby observing the relative position of the mask pattern and each shot area. Measurement.

Here, the off-axis detection system 100 will be described in comparison with the conventional detection system 110. First, a description will be given of the conventional detection system 110. FIG. 2 is a view of the conventional detection system 110 viewed from the Y direction. The conventional detection system 110 may include, for example, a plurality of detection units 300 (detection devices) that individually detect the marks on the substrate, and a drive unit 200 that individually drives the plurality of detection units 300. The plurality of detecting units 300 are arranged along the X direction, and the driving unit 200 is individually driven in the X direction with respect to the plurality of detecting units 300. Then, the conventional detection system 110 arranges a plurality of detection units 300 in accordance with the arrangement of the plurality of marked X directions (second directions) so that the substrate 21 can be moved in the Y direction (first direction) while being relatively The position of each mark provided in each shooting area is detected. Hereinafter, a configuration example of the conventional detecting unit 300 and an arrangement of a plurality of conventional detecting units 300 will be described.

FIG. 3 is a view showing a configuration example of the conventional detecting unit 300. The detecting unit 300 can illuminate the indicator 22 on the substrate and detect the indicator 22 by the reflected light. The conventional detection unit 300, a series of examples For example, one range display 310 having the light-emitting portion 301, the optical system 302, the beam splitter 303, the aperture stop 304, the objective lens 305, the relay lens 306, and the imaging element 307 may be included. The light-emitting unit 301 includes, for example, an optical fiber that emits light from a light source such as an LED and light emitted from the light source, and emits light. The light emitted from the light-emitting unit 301 is incident on the beam splitter 303 through the optical system 302, and is reflected by the beam splitter 303. The light reflected by the beam splitter 303 is transmitted through the objective lens 305, and Kohler illumination is performed on the mark 22 on the substrate. The image of the mark 22 on the substrate illuminated by Kohler is imaged by the objective lens 305, the beam splitter 303, and the relay lens 306 on the imaging element 307 (for example, a CCD sensor). By performing image processing on the image of the indicator 22 of the imaging element 307 thus imaged in the control unit 50, the position of the marker 22 can be detected.

FIG. 4 is a diagram for explaining the arrangement of a plurality of detecting sections 300. In the substrate 21, a plurality of marks 22 are provided with respect to the respective shot regions 23 formed on the substrate. In the example shown in Fig. 4, six indicia 22 are provided with respect to each shot region 23. By setting a plurality of marks 22 in this way, it is possible to measure the position and deformation (including the magnification component and the offset component, the barrel component, the pillow component, and the like) of each of the shooting regions 23 with high accuracy, and the mask 11 can be highly accurate. The pattern is transferred to each shot area 23. Further, the plurality of detecting units 300 are arranged along the X direction in accordance with the arrangement of the plurality of marks 22 in the X direction. By arranging the plurality of detecting units 300 in this manner, it is possible to simultaneously detect a plurality of ranges of displays 22 for a plurality of ranges 22 arranged along the X direction. Then, as shown in FIG. 4, the column of the plurality of marks 22 arranged along the X direction has six columns in the Y direction, and The substrate stage 20 moves the substrate 21 stepwise in the Y direction so that all of the plurality of marks 22 provided on the substrate 21 can be detected.

Here, attention is paid to the two marks 22 disposed between the two shot regions 23 adjacent in the X direction. For example, attention is paid to the indication 22a and the indication 22b disposed between the shooting area 23a and the shooting area 23b. In Fig. 4, the marks 22a and 22b are arranged at intervals 24a in the X direction. The interval between the two directions 22 arranged in the X direction can be changed by the substrate 21 in the range of, for example, 1 mm to 40 mm depending on the size of the shot region 23. At this time, when the interval between the two directions 22 in the X direction between the two shot regions 23 adjacent in the X direction is narrower than the width in the X direction of the detecting portion 300, the range displays may not be brought close to each other. problem. In other words, it may become impossible to perform measurement simultaneously using the two detecting units 300 for the two markers 22. The interval between the detecting portions 300 may be restricted by, for example, the diameter of the objective lens 305 included in the range display 310 of each detecting unit 300.

FIG. 5 is a view showing the arrangement of two conventional detecting units 300a and 300b when two indicia 22 adjacent in the X direction are detected. In the range display 310 of each detecting unit 300 shown in Fig. 5, the illustration of the light emitting unit and the optical system is omitted. For example, when the NA of the range display 310 of each detection unit 300 is 0.1 and the focal length is 20 mm, the size of the aperture stop 303 is 4 mm. Then, in this case, when the diameter of the objective lens 305 is required to be 2 mm, for example, a member for controlling the objective lens 305, a margin of 2 mm is added to the size of the aperture stop 303. That is, for adjacent in the X direction When the two indications 22 are detected by the two detection units 300, if the interval between the two indications 22 is narrower than the diameter of the objective lens 305 by 6 mm, the two detection units 300 cannot be approached. Therefore, it may become impossible to perform measurement simultaneously using the two detection units 300 for the two markers 22. Here, the width of the detecting unit 300 in the X direction is wider than the diameter of the objective lens 305 by the lens barrel or the like. Therefore, even if the interval between the two marks 22 is wider than the diameter of the objective lens 305, There are cases where it becomes difficult to bring the two range displays close.

In order to solve the above problem, there is a detection unit 400 configured to simultaneously detect two markers 22a and 22b using one of the objective lenses 311, one relay lens 312, and two range displays 320a and 320b. FIG. 6 is a view showing a conventional detecting unit 400 configured to simultaneously detect two indicia 22a and 22b adjacent in the X direction. The detecting unit 400 includes two range displays 320 including a mirror 313, aligning lenses 314 and 315, a beam splitter 316, and an imaging element 317 with respect to one of the objective lenses 311 and one relay lens 312. The display (320a and 320b) of each range shown in Fig. 6 has a light-emitting portion and an optical system as shown in Fig. 3. The light emitted from the light-emitting portion is incident on the beam splitter 316 through the optical system, but in Fig. 6 The illustration of the light-emitting portion and the optical system is omitted. Then, in the detecting unit 400, each of the range displays (320a and 320b) is relatively moved and moved in the X direction with respect to the objective lens 311 and the relay lens 312. Thereby, it is possible to detect the two marks 22a and 22b arranged at intervals smaller than the method shown in Fig. 5. However, the detecting unit 400 configured as described above is configured to have a wide space. When the partition (for example, 40 mm) is simultaneously detected by the two markers 22 arranged in the X direction, it may become necessary to increase the diameter of the objective lens 311. That is, the detecting unit 400 shown in Fig. 6 increases in size in the X direction as the diameter of the objective lens 311 increases, and the size in the Y direction may become larger.

Therefore, in the detection system 100 according to the first embodiment, the detection unit 500 included in the detection system 100 is configured to have two range displays 510a and 510b for illuminating the indicator 22 with the reflected light. The position of the marker 22 is detected. The detecting unit 500 according to the first embodiment is configured such that the interval between the two marks 22 disposed between the two shooting regions 23 adjacent in the X direction is narrower than the width of the X display in the range display. In this case, the two markers can still be detected simultaneously. Further, the detecting unit 500 according to the first embodiment may be configured to be arranged at a wide interval (for example, 40 mm) by increasing the size in the X direction (the dimension of the optical member 550 in the X direction described later). Two markers 22 in the X direction are simultaneously detected. In other words, when the detection unit 500 is configured to simultaneously detect the two markers 22 arranged in the X direction at a wide interval, the size in the Y direction can be reduced. Next, the configuration of the detecting unit 500 according to the first embodiment will be described.

Fig. 7 is a view showing the configuration of the detecting unit 500 according to the first embodiment. The detecting unit 500 according to the first embodiment includes, for example, two range displays (the first range display 510a and the second range display 510b) and the optical member 550. The first range display 510a and the second range display 510b are respectively as shown in the range of FIG. 310 may include, for example, a light emitting unit, an optical system, a beam splitter 503, an aperture stop, an objective lens 505, a relay lens 506, and an imaging element 507. Further, the optical member 550 has a transmissive portion 550d that transmits light emitted from the first range display 510a so as to be incident on the substrate 21, and light emitted from the second range display 510b toward the substrate 21. And the reflecting surface 550a. Here, in FIG. 7, the illustration of the light-emitting portion, the optical system, and the aperture diaphragm of each of the first range display 510a and the second range display 510b is omitted.

The first range display 510a is as shown in the range display 310 of FIG. 3, and the light emitted from the light-emitting portion is transmitted through the optical system, the beam splitter 503, and the objective lens 505, and is performed on the first indicator 22a on the substrate. Kohler lighting. At this time, the light emitted from the first range display 510a is transmitted through the optical member 550 (surface 550b and surface 550c) and incident on the substrate 21, and Kohler illumination is performed on the first indicator 22a. Further, the second range display 510b is like the first range display 510a, and the light emitted from the light-emitting portion is transmitted through the optical system, the beam splitter 503, and the objective lens 505, and Kohler illumination is performed on the second indicator 22b on the substrate. . At this time, the light emitted from the second range display 510b is incident on the substrate 21 by reflecting the surface 550a of the optical member, and Kohler illumination is performed on the second indicator 22b. In the first range display 510a and the second range display 510b of the first embodiment, for example, the range display having the same configuration as each other can be used in such a manner that the wavelength and the polarization characteristics are the same. Further, the first range display 510a is preferably disposed such that its optical axis is perpendicular to the surface of the substrate 21, and the second range display 510b is It is preferable that the angle between the optical axis and the optical axis of the first range display 510a is less than 90 degrees.

The optical member 550 (transmission portion 550d) is formed of a material that can transmit light such as glass, and may include an upper surface (Z-direction side) 550b that is formed so as to be parallel to the surface of the substrate 21. The surface 550c (parallel plate) with the lower side (-Z direction side). By forming the upper surface 550b and the lower surface 550c in this way, the chief ray of the light emitted from the first range display 510a so as to be perpendicular to the surface of the substrate 21 can be made to be relatively transparent after the transmission optical member 550 It is perpendicular to the surface of the substrate 21. Further, the optical member 550 includes a surface 550a that reflects light emitted from the second range display 510b toward the substrate 21. The surface 550a of the optical member 550 is configured such that the chief ray of the light reflected by the surface 550a is perpendicular to the surface of the substrate 21. Here, in the surfaces 550b and 550c of the optical member 550, in order to increase the transmittance of light, it is preferable to provide an anti-reflection film for preventing reflection of light, and the surface 550a of the optical member 550 is for reflecting light. The rate is increased, and it is preferable to provide a reflective film that reflects light.

In the detection unit 500 configured as described above, the first range display 510a is configured to be relatively movable with respect to the optical member 550 so that the height of the focus of the light transmitting the optical member does not change. For example, the detecting unit 500 includes a driving mechanism that drives the first range display 510a in the X direction, and the driving mechanism can be controlled by the control unit 50. Thereby, the detecting unit 500 can irradiate the irradiation position of the light emitted from the first range display 510a and the irradiation position of the light emitted from the second range display 510b. The distance between them is changed depending on the relative positions of the two adjacent marks 22a and 22b in the X direction. Here, the irradiation position refers to a position on the substrate that will illuminate the light emitted from each of the range displays 510a and 510b.

Fig. 8 is a view showing the detection system 100 of the first embodiment viewed from the Y direction. In the detection system 100 of the first embodiment, the plurality of detecting units 500 configured as described above (FIG. 7) are arranged along the X direction. Further, in the detection system 100, in order to detect one of the indications arranged in the X direction (-X direction), the X direction side (the -X direction side) of the plurality of detection sections 500 is arranged as shown in FIG. The detecting unit 300 is configured in a manner. Here, for example, as shown in FIG. 9, the interval between the first indicator 22a and the second indicator 22b disposed between the two shot regions 23a and 23b adjacent in the X direction in the X direction is the interval 24a. Happening. In this case, the control unit 50 controls the driving unit 200 so that the light emitted from the second range display 510b of the detecting unit 500a is irradiated onto the second indicator 22b, and moves the detecting unit 500a in the X direction. Then, the control unit 50 controls the drive mechanism so that the light emitted from the first range display 510a of the detecting unit 500a is illuminated by the first indicator 22a, and the first range display 510a is opposed to the optical member 550 ( The second range display 510b) is relatively moved in the X direction. Thereby, as shown in FIG. 7, the distance (X direction) between the irradiation position of the light emitted from the first range display 510a and the irradiation position of the light emitted from the second range display 510b can be made first. The interval 24a in the X direction between the mark 22a and the second mark 22b is indicated. Further, the control unit 50 is configured as the detection unit 500 other than the detection unit 500a as the detection unit 500a. The first range display 510a and the second range display 510b are disposed such that the detecting unit 300 detects one of the labels 22 disposed at the end sides in the X direction (−X direction). Thereby, the detection system 100 can simultaneously detect a plurality of indicia 22 arranged along the X direction on the substrate.

On the other hand, for example, as shown in FIG. 10, the interval between the X direction of the first indicator 22a and the second indicator 22b is smaller than the interval 24b which is narrower than the interval 24a of FIG. In this case, the control unit 50 controls the drive unit 200 such that the light emitted from the second range display 510b of the detection unit 500a is illuminated by the second indicator 22b, and moves the detection unit 500a in the X direction. Then, the control unit 50 controls the drive mechanism so that the light emitted from the first range display 510a of the detecting unit 500a is illuminated by the first indicator 22a, and the first range display 510a is opposed to the optical member 550 ( The second range display 510b) is relatively moved in the X direction. That is, the incident position of the light from the first range display 510a incident on the optical member 550 (transmission portion 550d) and the reflection position of the light from the second range display 510b reflected on the surface 550a of the optical member 550 are The relative position is changed. At this time, the first range display 510a is disposed at a position closer to the second range display 510b than the position shown in FIG. Thereby, as shown in FIG. 11, the interval (X direction) between the irradiation position of the light emitted from the first range display 510a and the irradiation position of the light emitted from the second range display 510b can be made narrower than the interval 24a. Interval 24b. As described above, the detecting unit 500 of the first embodiment can move the first range display 510a in the X direction. The interval between the irradiation positions of the two range displays 510a and 510b corresponds to the interval between the two marks 22a and 55b adjacent in the X direction.

Here, in the detecting unit 500 according to the first embodiment, when the light emitted from the first range display 510a is transmitted through the optical member 550, the light is not exposed from the surface 550c of the optical member 550. It is preferable to move the first range display 510a in the X direction. That is, the irradiation position of the light emitted from the first range display 510a and the irradiation position of the light emitted from the second range display 510b are close to the light emitted from the first range display 510a. The end of the surface 550c of the material 550 in the X direction is exposed. On the other hand, when the irradiation position of the light emitted from the first range display 510a and the irradiation position of the light emitted from the second range display 510b are enlarged, the optical member 550 (surface 550b and 550c) Elongate in the -X direction and respond. Further, the detecting unit 500 of the first embodiment is configured such that the first range display 510a moves relative to the optical member 550, but the invention is not limited thereto, and the optical member 550 may be configured to be opposed to the first The 1 range display 510a is moved. In this case, the second range display 510b can be moved together with the optical member 550. Further, when the surface 550a of the optical member 550 faces the Y direction, and the second range display 510b has an optical axis extending in the Y direction and is movable in the X direction, it may be configured to move only the second range display. . Further, an optical path bending mirror may be provided in the optical path of the first range display 510a and the second range display 510b, and the optical path bending mirror may be configured to be movable.

As described above, the detecting unit 500 of the first embodiment includes: The first range display 510a and the second range display 510b that detect the position of the mark 22 by the reflected light are indicated by the light. The detecting unit 500 according to the first embodiment includes a transmissive portion that transmits light emitted from the first range display 510a so as to be incident on the substrate 21, and has a light that is emitted from the second range display 510b. The optical member 550 of the surface 550a on which the light is directed toward the substrate 21. Further, the detecting unit 500 can relatively move the first range display 510a in the X direction with respect to the optical member 550 in accordance with the interval in the X direction of the two marks 22 provided on the substrate. By configuring the detecting unit 500 in this manner, for example, the interval between the two marks 22 adjacent in the X direction is different between the substrates, and the first range display 510a can be moved for the two marks. 22 simultaneous testing.

<Second embodiment>

The detection unit 600 according to the second embodiment will be described. In the detection unit 600 of the second embodiment, the irradiation position of the light emitted from the first range display 510a and the emission from the second range display 510b can be made in comparison with the detection unit 500 of the first embodiment. The illumination position of the light is closer.

FIG. 12 is a view showing the configuration of the detecting unit 600 according to the second embodiment. In the detecting unit 600 of the second embodiment, the crucible 560 is joined to the surface 550a of the optical member 550. The crucible 560 is preferably made of the same material as the material of the optical member 550 such as glass. The crucible 560 bonded to the face 550a of the optical member 550, for example, may include: continuous The surface 560c of the optical member 550 is parallel to the surface 560a of the surface of the substrate 21 and the surface 560b orthogonal to the optical axis of the second range display 510b. Thereby, as shown in FIG. 13, the light emitted from the first range display 510a can be transmitted to the substrate 21 through the surface 550a of the optical member 550. Therefore, the detecting unit 600 according to the second embodiment can compare the irradiation position of the light emitted from the first range display 510a with the second range display 510b as compared with the detecting unit 500 of the first embodiment. The illumination position of the light is closer. It is also possible to match the irradiation position of the light emitted from the first range display 510a with the irradiation position of the light emitted from the second range display 510b. Thereby, even if the interval between the adjacent mark 22a and the mark 22b in the X direction is smaller than the interval 24d shown in the interval 24c of FIG. 12, the detecting portion 600 can simultaneously detect the mark 22a and the mark 22b.

In the detection unit 600 configured as described above, it is preferable that the surface 550a of the optical member 550 is provided with a light-splitting film that cuts reflection and transmission in terms of a wavelength band, and a polarization beam splitting film that cuts reflection and transmission in terms of polarization characteristics. When a spectroscopic film is provided on the surface 550a of the optical member 550, each range of display is configured such that the light emitted from the first range display 510a and the light emitted from the second range display 510b have different wavelength bands from each other. 510a and 510b are preferred. As a method of making the wavelength bands of the light emitted from the first range display 510a and the second range display 510b different from each other, for example, there is a method of using a light source that emits light of a different wavelength band, and a wavelength band different from each other. A method of transmitting a wavelength filter of light or the like. In addition, a partial offset is provided on the surface 550a of the optical member 550. In the case of the optical splitting film, it is preferable that each of the range displays 510a and 510b is configured such that the light emitted from the first range display 510a and the light emitted from the second range display 510b have mutually different polarization characteristics. For example, the polarization characteristic of the light emitted from the first range display 510a is one of S-polarized light and P-polarized light, and the polarization characteristics of the light emitted from the second range display 510b are S-polarized and P-polarized. The other one is better. The method of making the polarization characteristics of the light emitted from the first range display 510a and the second range display 510b different from each other is, for example, a method in which the light emitted from each of the range displays 510a and 510b has a desired polarization characteristic. A method of arranging a polarizing plate on each of the range displays 510a and 510b.

As described above, the detecting unit 600 of the second embodiment is configured to bond the crucible 560 to the surface 550a of the optical member 550, and to make the characteristics of the light emitted from the first range display 510a and the second range display 510b (band or The polarization characteristics are different from each other. As a result, the detecting unit 600 according to the second embodiment can detect the irradiation position of the light emitted from the first range display 510a and the second range display 510b as compared with the detecting unit 500 of the first embodiment. The illumination position of the light is closer.

<Third embodiment>

The detection unit 700 according to the third embodiment will be described. The detecting unit 700 according to the third embodiment may include four range displays 520a to 520d and optical members 580 having four faces 580a to 580d that reflect light emitted from the respective range displays 520a to 520d. . Of course Thereafter, the detecting unit 700 changes the interval between the irradiation positions of the light emitted from the respective range displays 520a to 520d by moving the optical member 580 in a direction perpendicular to the surface of the substrate 21.

FIG. 14 is a view showing the detection unit 700 of the third embodiment viewed from the Y direction, and shows two range displays 520 (the first range display 520a and the second range display 520b) among the four range displays 520. In addition, FIG. 15 is a view showing the detection unit 700 of the third embodiment viewed from the Z direction, and shows four range displays 520 (first range display 520a, second range display 520b, third range display 520c, and 4 range display 520d). Each range display 520 is similar to the range display 310 shown in FIG. 3. For example, it may include a light emitting unit, an optical system, a beam splitter 523, an aperture stop, an objective lens 525, a relay lens 526, and an imaging element 527. In FIGS. 14 and 15, the illustrations of the light-emitting portion, the optical system, and the aperture diaphragm of each range display are omitted.

The optical member 580 may have a quadrangular pyramid shape having four faces 580a to 580d that reflect light emitted from the respective range displays 520a to 520d toward the substrate 21. In FIG. 14, the optical member 580 is a surface 580a (first surface) for reflecting light emitted from the first range display 520a, and light emitted from the second range display 520b. Reflected surface 580b (second surface). In addition, in FIG. 14, the surface 580c which reflects the light emitted from the 3rd range display 520c is shown. The detecting unit 700 configured as described above can simultaneously detect the adjacent marks 22e to 22h on the substrate by using the range displays 520a to 520d.

In the detecting unit 700 of the third embodiment configured as described above, the optical member 580 is configured to be movable in a direction (Z direction) orthogonal to the surface of the substrate 21. For example, the detecting unit 700 includes a driving mechanism that drives the optical member 580 in the Z direction, and the driving mechanism can be controlled by the control unit 50. Thereby, the detecting unit 700 can change the interval between the irradiation positions of the light beams emitted from the respective range displays 520a to 520d in accordance with the relative positions of the four adjacent marks. For example, imagine a case where the optical member 580 is moved in the Z direction as shown in FIG. In this case, the interval between the irradiation position of the light emitted from the first range display 520a and the irradiation position of the light emitted from the second range display 520b can be narrowed from the interval 24e shown in FIG. 14 to be shown in FIG. The interval is 24g. Further, as shown in FIG. 17 when the optical member 580 is moved in the Z direction from the Z direction, as shown in FIG. 17 , the optical member 580 can be moved in the Z direction to be emitted from the respective range displays 520a to 520d. The interval between the irradiation positions of the light is narrowed. Therefore, the detecting unit 700 can simultaneously detect the four marks 22i to 22l arranged at intervals narrower than the four marks 22e to 22h shown in FIG. 15 by moving the optical member 580 in the Z direction.

As described above, the detecting unit 700 of the third embodiment may include four range displays 520a to 520d and four faces 580a that have light reflected from the range displays 520a to 520d toward the substrate 21. 580d optical member 580. According to this configuration, the detecting unit 700 can change the interval of the irradiation position of the light emitted from each of the range displays 520a to 520d by moving the optical member 580 in the Z direction. For this reason, even if the adjacent four mark intervals are between mutually different substrates, The four markers can be simultaneously detected by moving the optical member 580 in the Z direction. Here, in the third embodiment, the case where the four range displays 520a to 520d are included in the detecting unit 700 is described, but the present invention is not limited thereto. For example, the present invention can be applied in the case where the detecting unit 700 includes two or three range displays 520, or in the case where five or more range displays 520 are included.

<Embodiment of Manufacturing Method of Article>

The method for producing an article according to the embodiment of the present invention is, for example, an article suitable for manufacturing a semiconductor device or the like having a micro device and a fine structure. The method for producing an article according to the present embodiment includes a procedure of transferring a pattern of a master to a substrate by using the above-described photolithography apparatus (exposure apparatus, imprint apparatus, drawing apparatus, etc.), and transferring to such a program The process of processing the substrate of the pattern. Further, such a manufacturing method includes other well-known procedures (oxidation, film formation, vapor deposition, doping, planarization, etching, resist peeling, dicing, bonding, encapsulation, etc.). The method for producing an article according to the present embodiment is advantageous for at least one of performance, quality, productivity, and production cost of the article compared to the conventional method.

The present invention has been described with reference to the preferred embodiments of the present invention. However, the present invention is not limited thereto, and various changes and modifications can be made therein.

21‧‧‧Substrate

22a, b‧‧‧ marked

24a, b‧‧‧ interval

503‧‧‧beam splitter

505‧‧‧ Sightpiece

506‧‧‧Relay lens

507‧‧‧Photographic components

510a‧‧‧1st range display

510b‧‧‧2nd range display

550a~c‧‧‧ face

550d‧‧‧Transmission Department

Claims (18)

A detecting device for detecting a plurality of marks provided on a substrate, comprising: illuminating the first light with respect to the first mark among the plurality of marks, and the first light is reflected by the first mark a first range display for detecting the detection; wherein the second indicator is different from the first indicator different from the first indicator, and the second indicator is detected by the light reflected by the second indicator. a second range display; and an optical member having a transmissive portion that transmits the first light to be incident on the substrate and a surface that reflects the second light toward the substrate; and the first portion incident on the optical member a position at which the incident position of the light is changed from a position at which the second light is reflected by the surface of the optical member is changed, and a position on the substrate on which the first light is transmitted through the transmitting portion and the aforementioned The distance between the positions of the second light reflected on the surface and irradiated on the substrate is changed. The detecting device according to claim 1, wherein the optical member is configured to: a principal ray of the first light transmitted through the transmitting portion, and a second ray reflected by the surface The chief rays become parallel. The detecting device according to claim 1, wherein the optical member is configured to: a principal ray of the first light transmitted through the optical member, and a second ray reflected on the surface Main light They are perpendicular to the surface of the substrate, respectively. The detecting device according to claim 1, wherein the optical member has a surface configured to transmit the first light emitted from the first range display and to be displayed from the second range display The aforementioned second light reflection is emitted. The detecting device according to claim 4, wherein the first light and the second light have mutually different polarization characteristics, and the polarizing property of the light is made on the surface of the optical member. A polarizing beam splitting film that is reflected or transmitted. The detection device according to the first aspect of the invention, wherein the first light-based light in the first wavelength band and the second light-based light in a wavelength band different from the first wavelength band are in the optical member The surface is provided with a spectroscopic film that reflects or transmits light according to the wavelength band. The detecting device according to claim 1, wherein the reflecting surface of the optical member is provided with a reflecting film that reflects light emitted from the display of the second range. The detecting device according to the first aspect of the invention, wherein the first range display is relatively moved relative to the optical member such that a height of a focus of light transmitted through the transmitting portion does not change. The detecting device according to claim 1, wherein the first range display is disposed such that an optical axis thereof is perpendicular to a surface of the substrate, and the second range display is the first range display Light The angle between the axis and the optical axis of the second range display is set to be less than 90 degrees. The detecting device of claim 1, wherein the surface of the optical member is joined to the surface. The detecting device according to claim 1, wherein an incident position of the first light incident on the optical member and the optical member are in a direction of the first indicator and the second indicator card row The relative position of the reflection position of the second light reflected by the surface is changed such that the position on the substrate on which the first light is transmitted through the transmission portion and the second light are reflected on the surface and irradiated The distance between the positions on the aforementioned substrate changes. The detecting device according to claim 11, wherein the first range display is moved in the direction to change an incident position of the first light incident on the optical member and the surface of the optical member The relative position in the aforementioned direction of the reflected position of the reflected second light. The detecting device of claim 11, wherein the optical member is moved in the direction to change an incident position of the first light incident on the optical member and reflected on a surface of the optical member The relative position in the aforementioned direction of the reflection position of the second light. The detecting device according to claim 1, wherein the surface is obliquely arranged with respect to the substrate, and a surface on which the first light of the optical member enters is along the surface Arranged on the substrate. The detecting device according to claim 1, wherein the substrate has a plurality of shooting regions, and the first indicator and the second indicator are disposed between shot regions adjacent to each other. The detecting device according to claim 1, further comprising: a changing unit that changes a relative position between the first range display and the optical member; and a relative position between the first indicator and the second indicator, The control unit that controls the change unit is configured such that the first light is irradiated onto the first indicator and the second light is irradiated on the second indicator. A lithographic apparatus for patterning a substrate, comprising: a detecting device for detecting a plurality of marks provided on the substrate as set forth in claims 1 to 16. A manufacturing method of a manufacturing apparatus, comprising: a program for forming a pattern on a substrate using a lithography apparatus; and a program for processing the substrate on which the pattern is formed by the program; and the lithographic apparatus includes: a detecting device for detecting a plurality of indications on the substrate, wherein the detecting device includes: the first indicator illuminating the first light with respect to the first indicator, and the light reflected by the first indicator 1 marked for testing a first range display; wherein the second indicator that emits the second light from the second indicator different from the first indicator among the plurality of labels, and the second range display that detects the second indicator by the light reflected by the second indicator And an optical member having a transmissive portion that transmits the first light to be incident on the substrate and a surface that reflects the second light toward the substrate; and incident on the first light incident on the optical member a position is changed between a position of the reflection position of the second light reflected by the surface of the optical member, and a position of the first light transmitted through the transmission portion on the substrate and the second light is changed The distance between the positions on the aforementioned substrate reflected by the aforementioned surface changes.