TWI557261B - Precursor delivery system - Google Patents

Precursor delivery system Download PDF

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Publication number
TWI557261B
TWI557261B TW100113130A TW100113130A TWI557261B TW I557261 B TWI557261 B TW I557261B TW 100113130 A TW100113130 A TW 100113130A TW 100113130 A TW100113130 A TW 100113130A TW I557261 B TWI557261 B TW I557261B
Authority
TW
Taiwan
Prior art keywords
delivery system
precursor delivery
precursor
system
Prior art date
Application number
TW100113130A
Other versions
TW201209216A (en
Inventor
Kyle Fondurulia
Eric Shero
Mohith E Verghese
Carl L White
Original Assignee
Asm Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US12/763,037 priority Critical patent/US8986456B2/en
Application filed by Asm Inc filed Critical Asm Inc
Publication of TW201209216A publication Critical patent/TW201209216A/en
Application granted granted Critical
Publication of TWI557261B publication Critical patent/TWI557261B/en

Links

TW100113130A 2006-10-10 2011-04-15 Precursor delivery system TWI557261B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/763,037 US8986456B2 (en) 2006-10-10 2010-04-19 Precursor delivery system

Publications (2)

Publication Number Publication Date
TW201209216A TW201209216A (en) 2012-03-01
TWI557261B true TWI557261B (en) 2016-11-11

Family

ID=44885899

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100113130A TWI557261B (en) 2006-10-10 2011-04-15 Precursor delivery system

Country Status (3)

Country Link
KR (1) KR101943099B1 (en)
CN (1) CN102234790B (en)
TW (1) TWI557261B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5199603A (en) * 1991-11-26 1993-04-06 Prescott Norman F Delivery system for organometallic compounds
US20030232138A1 (en) * 2002-06-17 2003-12-18 Marko Tuominen System for controlling the sublimation of reactants
US20050000428A1 (en) * 2003-05-16 2005-01-06 Shero Eric J. Method and apparatus for vaporizing and delivering reactant
US20050008799A1 (en) * 2003-07-08 2005-01-13 Shizuo Tomiyasu Solid organometallic compound-filled container and filling method thereof
US20050072357A1 (en) * 2002-07-30 2005-04-07 Shero Eric J. Sublimation bed employing carrier gas guidance structures

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7156380B2 (en) * 2003-09-29 2007-01-02 Asm International, N.V. Safe liquid source containers
CN101522943B (en) * 2006-10-10 2013-04-24 Asm美国公司 Precursor delivery system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5199603A (en) * 1991-11-26 1993-04-06 Prescott Norman F Delivery system for organometallic compounds
US20030232138A1 (en) * 2002-06-17 2003-12-18 Marko Tuominen System for controlling the sublimation of reactants
US20050072357A1 (en) * 2002-07-30 2005-04-07 Shero Eric J. Sublimation bed employing carrier gas guidance structures
US20050000428A1 (en) * 2003-05-16 2005-01-06 Shero Eric J. Method and apparatus for vaporizing and delivering reactant
US20050008799A1 (en) * 2003-07-08 2005-01-13 Shizuo Tomiyasu Solid organometallic compound-filled container and filling method thereof

Also Published As

Publication number Publication date
TW201209216A (en) 2012-03-01
CN102234790A (en) 2011-11-09
CN102234790B (en) 2015-12-16
KR101943099B1 (en) 2019-01-28
KR20110117021A (en) 2011-10-26

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