TWI556874B - Hollow and buffering actuating device - Google Patents

Description

Hollow buffer drive

The invention relates to an adjusting device, in particular to a hollow buffer driving device for installing a conveying pipeline for conveying fluid and adjusting an outlet of the conveying pipeline to a target position, which can be applied to a semiconductor wafer and a solar substrate. The process of a flat substrate such as a display glass substrate or an LED substrate, but is not limited to such a process, and supplies a liquid or gas to the substrate when a single piece of rotary etching, cleaning, drying, or the like is performed using different chemicals in the process. Above, with the program to control the lifting or rotating the coating or spraying mechanism.

In the prior art, there are a number of adjustment devices for the delivery line to be dispensed therein, and the processing fluid in the delivery line is sprayed onto the workpiece as required. However, these adjusting devices often need to additionally erect a rack passage on their base or other members in order to allow the conveying pipeline to be installed and installed, thereby causing the construction of the adjusting device to be complicated, and even worse. Part of the conveying pipeline may be exposed outside the pipeline supporting unit, so that the conveying pipeline is liable to be cracked or collided and damaged due to external environmental influences, thereby causing fluid loss inside the conveying pipeline; or, although part The adjustment device does not have an additional rack passage and the transport line is otherwise installed, but there are still portions of the transfer line that are exposed to the outside world.

Figure 8 shows a prior art line adjustment device 1001A with additional brackets The structure has a base 1010A, a lift cylinder 1012A, a rotating mechanism unit 1014A, a pipe support unit 1016A, and a frame passage 1300A. The lower part of the lift cylinder 1012A is mounted to the base 1010A, and has a lifting base 1020A above it; the rotating mechanism unit 1014A and the pipeline supporting unit 1016A are mounted to the lifting base 1020A, so that when the lifting cylinder 1012A is actuated, the rotating mechanism unit The 1014A and the line support unit 1016A will be moved upward or downward with respect to the base 1010A together with the lift base 1020A; the rotary mechanism unit 1014A is used to rotate the line support unit 1016A to adjust the position of the transfer line outlet 1100A. Wherein, the base 1010A and the lifting base 1020A form a rack channel 1300A, and the rack channel 1300A is slidably connected to at least one of the base 1010A or the lifting base 1020A; a conveying pipeline 1090A can be pedestal Below 1010A passes through the rack channel 1300A into the pipeline support unit 1016A. However, this prior art, on the one hand, causes the conveying line 1090A to easily come into contact with the external environment because the rack passage 1300A is open space defined by the two-piece cylinder, the base 1010A, and the lifting base 1020A. Problem; on the other hand, due to the need for additional construction of the lift base 1020A and the rack passage 1300A, the overall construction is complicated.

9 shows another prior art line adjustment device 1001B having an additional bracket configuration having a base (not shown), a lift cylinder 1012B, a rotating mechanism unit 1014B, a line support unit 1016B, and a Rack channel 1300B. A lifting pneumatic cylinder 1012B is mounted to the base, a lifting base 1020B is mounted above the lifting pneumatic cylinder 1012B; a rotating mechanism unit 1014B and a pipeline supporting unit 1016B are mounted above the lifting base 1020B; and a rotating mechanism unit 1014B is used for rotating The line support unit 1016B adjusts the position of the delivery line outlet 1100B. Wherein, a rack passage 1300B is formed between the lifting bases 1020B; a conveying pipeline 1090B can pass through the rack passage 1300B to the pipeline supporting unit 1016B under the lifting base 1020B. however, This prior art, on the one hand, facilitates the problem that the delivery line 1090B is exposed to the external environment below the lifting base 1020B; on the other hand, the construction of the additional lifting seat 1020B and the frame channel 1300B is required, resulting in an overall construction. More complicated issues.

10 shows a prior art line adjustment device 1001C having a base (not shown), a lift cylinder 1012C, a rotating mechanism unit 1014C, and a line support unit 1016C. Wherein, the conveying pipeline 1090C enters from one end of the pipeline supporting unit 1016C; although it does not have a complicated structure such as the rack passages 1300A, 1300B of the pipeline adjusting devices 1001A, 1001B of FIGS. 8-9, Portions of the transfer line 1090C are still exposed to the external environment, even though the transfer line 1090C is exposed to the outside more than the prior art described above (Figs. 8-9).

In order to solve the above problems, one of the objects of the present invention is to provide a hollow buffer driving device that utilizes a hollow piston rod or a hollow piston rod and a cylinder to form a first passage, which greatly simplifies the mechanism and makes the overall device configuration more The tightness enables the conveying pipeline installed in the first passage to better avoid exposure to the external environment, thereby achieving aesthetics, reducing costs and reducing the device.

According to an embodiment of the present invention, a hollow buffer driving device includes: a lifting mechanism unit having a cylinder and a piston rod, the cylinder having a housing defining a cylinder space, the piston rod having a handle portion and a head portion, the handle portion is hollow to define a shank space, and is disposed at one end or both ends of the housing, the head portion is fixed to the handle portion and located at the cylinder block In the space, wherein when the handle passes through one end of the housing, the housing has an inner column extending in the cylinder space, and the inner column is hollow to define an inner column space, the handle Department Slidably connecting the inner column, and the shank space is in communication with the inner column space to jointly define a first passage; when the shank passes through the two ends of the casing of the cylinder, the shank space is For a first channel.

According to another embodiment of the present invention, a hollow buffer driving device includes: a base, a lifting mechanism unit, and a rotating mechanism unit; the lifting mechanism unit has a cylinder and a piston rod, and the cylinder has a shell a housing defining a cylinder space, the piston rod having a handle and a head, the handle being hollow to define a handle space and threading one or both ends of the housing The head is fixed to the handle and located in the cylinder space; the rotating mechanism unit has a driving motor and a transmission mechanism, the driving motor has a motor seat and a driving shaft, and the motor base and the base Fixedly, the drive shaft is rotatably coupled to the motor base, the transmission mechanism is coupled to the drive shaft and the lift mechanism unit for transmitting power of the drive shaft to the lift mechanism unit, and the lift mechanism unit is Rotating relative to the base; wherein when the handle passes through one end of the housing, the housing has an inner column extending in the cylinder space, and the inner column is hollow to define an inner column space, The handle is slidably Connecting the inner column, and the shank space is in communication with the inner column space to jointly define a first passage; when the shank passes through the two ends of the housing of the cylinder, the shank space is The first channel.

The purpose, technical contents, features, and effects achieved by the present invention will become more apparent from the detailed description of the appended claims.

1‧‧‧ hollow buffer drive

10‧‧‧ Pedestal

12‧‧‧ Lifting unit

14‧‧‧Rotating mechanism unit

16‧‧‧Pipe support unit

20‧‧‧ cylinder

22‧‧‧ housing

23‧‧‧ Inner column

24‧‧‧ Inner column space

25‧‧‧End seals

26‧‧‧buffer seal

27‧‧‧ buffer space

28‧‧‧ buffer channel

29‧‧‧buffer adjustment components

30‧‧‧ piston rod

32‧‧‧ handle

34‧‧‧ head

36‧‧‧handle space

40‧‧‧Drive motor

42‧‧‧Motor seat

44‧‧‧ drive shaft

50‧‧‧Transmission mechanism

52‧‧‧Proactive pulley

54‧‧‧Passive pulley

56‧‧‧Land

58‧‧‧Adjusting the idler

60‧‧‧ drive gear

62‧‧‧passive gear

64‧‧‧Iner gear

70‧‧‧ hollow body

80‧‧‧Children

82‧‧‧Adjustment agency

90‧‧‧Transportation line

100‧‧‧Transport line outlet

200‧‧‧Cylinder space

300‧‧‧First Passage

400‧‧‧second channel

1001A, 1001B, 1001C‧‧‧ pipeline adjustment device

1010A‧‧‧Base

1012A, 1012B, 1012C‧‧‧ lifting pneumatic cylinder

1014A, 1014B, 1014C‧‧‧ Rotating mechanism unit

1016A, 1016B, 1016C‧‧‧ Pipe support unit

1020A, 1020B‧‧‧ lifting seat

1090A, 1090B, 1090C‧‧‧ delivery lines

1100A, 1100B‧‧‧ delivery line outlet

1300A, 1300B‧‧‧ rack channel

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a perspective view of a hollow buffer driving device according to an embodiment of the present invention.

2A-2B are respectively schematic views showing a section of a lifting mechanism unit according to an embodiment of the present invention. Figure.

3A-3B are respectively schematic views showing a perspective view of a lifting mechanism unit and a rotating mechanism unit according to an embodiment of the present invention.

Figure 4 is a schematic cross-sectional view showing the elevating mechanism unit and the pipe support unit in accordance with an embodiment of the present invention.

5A-5B are respectively schematic views showing a cross-sectional view of one embodiment of the pipe support unit of the present invention, and illustrating the adjustment of the length of the sub-tube.

6A-6B are respectively schematic views showing a cross-sectional view of one embodiment of the pipeline support unit of the present invention, and illustrating the adjustment of the sub-tubes in an angular manner.

Figure 7 is a schematic view showing the installation of a pipe to a hollow buffer drive in accordance with an embodiment of the present invention.

Figure 8 is a schematic view showing a prior art tubing adjustment device having an additional stent configuration.

Figure 9 is a schematic view showing a prior art tubing adjustment device having an additional stent configuration.

Figure 10 is a schematic view showing a prior art line conditioning device having no rotating mechanism unit and its delivery line being mounted in a different manner.

Referring to FIG. 1, there is shown a perspective view of a hollow buffer drive device 1 in accordance with an embodiment of the present invention. The hollow buffer drive device 1 includes a base 10, a lifting mechanism unit 12, a rotating mechanism unit 14, and a pipe support unit 16. Wherein, the lifting mechanism unit 12 is rotatably mounted to the base 10; the rotating mechanism unit 14 is mounted to the base 10 and is used for rotating the lifting mechanism Unit 12; the line support unit 16 is mounted to the lift mechanism unit 12.

Referring to Figure 2A, a cross-sectional view of the lift mechanism unit 12 in accordance with an embodiment of the present invention is shown. The lifting mechanism unit 12 has a cylinder 20 and a piston rod 30. The cylinder 20 has a casing 22 defining a cylinder space 200. The piston rod 30 has a shank 32, and the shank 32 is hollow. A handle space 36 is defined and penetrates both ends of the housing 22; the handle space 36 is a first passage 300. Referring to Figure 2B, a cross-sectional view of the lift mechanism unit 12 in accordance with another embodiment of the present invention is shown. Wherein, the handle 32 is threaded through one end of the housing 22, and the housing 22 has an inner column 23 extending in the cylinder space 200, and the inner column 23 is hollow to define an inner column space 24, and the handle 32 is The inner column 23 is slidably coupled, and the shank space 36 is in communication with the inner column space 24 to collectively define a first channel 300.

2A-2B, preferably, the cylinder 20 is a cylinder, and at least one end of the casing 22 of the cylinder 20 has an end seal 25 and at least one buffer seal 26 is located in the cylinder. In the space 200, a buffer space 27 is defined between the end seal ring 25 and the buffer seal ring 26. A buffer passage 28 is disposed in the casing 22 to communicate the buffer space 27 with the outer space of the casing 22, and a buffer adjusting member 29 The buffer channel 28 is disposed to adjust the size of the buffer channel 28; and the adjustment of the buffer channel 28 can change the reaction of the cylinder 20 to the relative movement of the piston rod 30 therein; when the buffer channel 28 is small, the piston rod The actuation of 30 is faster; when the buffer passage 28 is larger, the actuation of the piston rod 30 produces less vibration to the cylinder 20. Preferably, the opposite ends of the casing 22 of the cylinder block 20 respectively have one end seal ring 25 and two buffer seal rings 26 corresponding to the two end seal rings 25, thereby defining two buffer spaces 27, and The buffer space 27 has a buffer channel 28 and a corresponding buffer adjustment element 29, respectively. Preferably, in an embodiment, the buffer adjusting member 29 is a screw that changes its volume in the buffer passage 28 by rotating the screw to change The size of the buffer channel 28 and the buffering capacity of the buffer space 27.

3A and 3B, respectively, perspective views of the elevating mechanism unit 12 and the rotating mechanism unit 14 according to an embodiment of the present invention are shown. The rotating mechanism unit 14 has a driving motor 40 and a transmission mechanism 50. The driving motor 40 has a motor base 42 and a driving shaft 44. The motor base 42 is fixedly coupled to the base 10. The driving shaft 44 is rotatably coupled to the motor base 42. The transmission mechanism 50 is coupled to the drive shaft 44 and the lifting mechanism unit 12 for transmitting the power of the drive shaft 44 to the lifting mechanism unit 12 to rotate the lifting mechanism unit 12 relative to the base 10. FIG. 3A shows an embodiment of the transmission mechanism 50 of the present invention. The transmission mechanism 50 includes a driving pulley 52, a driven pulley 54 and a belt 56. The driving pulley 52 is fixedly connected to the driving shaft 44, and the driven pulley 54 is coupled with The lifting mechanism unit 12 is fixedly coupled to the driving pulley 52 and the driven pulley 54 via the belt 56 to transmit the power of the driving motor 40 to the lifting mechanism unit 12 to achieve the effect of the rotary lifting mechanism unit 12. Preferably, the transmission mechanism 50 further has an adjustment idler 58 coupled to the belt 56. In addition, FIG. 3B shows another embodiment of the transmission mechanism 50 of the present invention. The transmission mechanism 50 includes a driving gear 60 and a driven gear 62. The driving gear 60 is fixedly coupled to the driving shaft 44, and the driven gear 62 is coupled to the lifting mechanism unit 12. In the fixed manner, the driving gear 60 meshes with the driven gear 62 for transmitting the power of the driving motor 40 to the lifting mechanism unit 12 to achieve the effect of the rotating lifting mechanism unit 12. Preferably, the transmission mechanism 50 further has at least one idle gear 64 coupled between the drive gear 60 and the driven gear 62.

Referring to FIG. 4, a cross-sectional view of the lift mechanism unit 12 and the pipeline support unit 16 in accordance with an embodiment of the present invention is shown. The tubing support unit 16 has a hollow tubular body 70 that defines a second passage 400 and is secured to the handle 32 such that the first passage 300 communicates with the second passage 400.

Preferably, as shown in Figures 5A-5B, one of the pipeline support units 16 of the present invention is shown. A cross-sectional view of the embodiment is used to illustrate the adjustment of its length. The hollow tube body 70 has at least two sub-tubes 80, and the two sub-tubes 80 are slidably coupled to each other and define a second passage 400. The hollow tube body 70 has an adjusting mechanism 82 connecting at least two sub-tubes 80. In one case, through the adjustment mechanism 82, the two sub-tubes 80 can slide relative to each other to a specific length. Wherein, the adjusting mechanism 82 is a cap member (not shown) having a thread at one end and having a tapered opening, and one of the two sub-tubes 80 has a sub-pipe thread (not shown) corresponding to the adjusting mechanism 82, thereby changing The degree of screwing of the adjusting mechanism 82 and the sub-tube 80 having the sub-tube thread achieves the effect of clamping or loosening the other sub-tube 80, and in the loosened state, one sub-tube 80 can be adjusted relative to the other sub-tube 80. Or the adjustment mechanism 82 is a buckle (not shown) that can be fixed to a sub-tube 80 and has a buckle. The position of the buckle is changed to change the aperture of the buckle to achieve clamping or The effect of the other sub-tube 80 is released. With the above configuration, when the adjustment mechanism 82 is in the released state, the two sub-tubes 80 can be relatively slid; when the adjustment mechanism 82 is in the clamped state, the two sub-tubes 80 cannot be relatively slid and fixed in a specific state. length. Alternatively, the adjustment mechanism 82 and the two sub-tubes 80 form a rack and pinion mechanism, and the adjustment mechanism 82 includes a pinion (not shown) mounted to a sub-tube 80, and the other sub-tube 80 includes a rack (not Displaying, the gear and the rack have at least one intermediate gear (not shown), through which the speed ratio between the pinion, the intermediate gear, and the rack is configured to achieve the effect of adjusting the length and self-locking; The adjusting mechanism 82 has a latch portion (not shown) and is fixedly coupled to a sub-tube 80, and the other sub-tube 80 has a jack (not shown) corresponding to the latch portion and having a plurality of intervals in a length direction. This achieves the effect of adjusting the length by changing the position at which the latch portion is inserted into the jack. Preferably, the two sub-tubes 80 are connected by a flexible sleeve 84 in the vicinity of the junction of the two sub-tubes 80 to cover the second passage 400.

Preferably, another embodiment of the pipeline support unit 16 of the present invention as shown in FIGS. 6A-6B A cross-sectional view of the embodiment is used to illustrate the adjustment of the angle. The hollow tube body 70 has at least two sub-tubes 80, and the two sub-tubes 80 are connected to each other in a relatively rotatable manner, and the hollow tube body 70 has an adjusting mechanism 82 connecting at least one of the two sub-tubes 80, and through the adjusting mechanism 82, The two sub-tubes 80 are rotatable relative to one another to a particular angle. Wherein, the adjusting mechanism 82 is a threaded component (not shown), and one of the two sub-tubes 80 has a sub-pipe thread (not shown) corresponding to the adjusting mechanism 82, thereby transmitting and adjusting the adjusting mechanism 82 and having the sub-tube The degree of screwing of the tube-threaded sub-tube 80 achieves the effect of clamping or loosening the other sub-tube 80, and in the loosened state, the angle of one sub-tube 80 relative to the other sub-tube 80 can be adjusted; or, the adjustment mechanism A worm gear mechanism or a gear set mechanism (not shown) is formed between the 82 and the two sub-tubes 80. When the adjustment mechanism 82 includes a worm (not shown) and is mounted to a sub-tube 80, the other sub-tube 80 includes a worm gear. (not shown); when the adjustment mechanism 82 includes a pinion gear and is mounted to a sub-tube 80, the other sub-tube 80 includes a gear (not shown) having at least one intermediate gear between the pinion and the gear (not shown) ). With the above configuration, the worm worm gear mechanism or the gear set mechanism can achieve the effect of adjusting the angle and self-locking; or the adjusting mechanism 82 has a latch portion (not shown) and is fixed to a sub-tube 80, and A sub-tube 80 has a receptacle (not shown) corresponding to the latch portion and having a multi-angle configuration, whereby the effect of adjusting the angle is achieved by changing the position at which the latch portion is inserted into the jack.

Referring to FIG. 7, there is shown a schematic view of the delivery line 90 mounted to the hollow buffer drive unit 1 in accordance with an embodiment of the present invention. Through the arrangement of the lifting mechanism unit 12 and the pipeline supporting unit 16, the piston rod 30 (or the piston rod 30 and the cylinder 20) of the lifting mechanism unit 12 defines a first passage 300 for at least one conveying pipe 90 to be directly worn. The first passage 300 of the lifting mechanism unit 12 is provided, and the configuration of the frame passage 1300 (shown in FIGS. 8 and 9) through which the conveying pipe 90 is disposed outside the lifting mechanism unit 12 is not required in the prior art. Making the hollow buffer drive of the present invention The configuration of the first embodiment is relatively tight, and the first passage 300 of the lifting mechanism unit 12 to the second passage 400 of the pipeline supporting unit 16 is directly penetrated from the closely-configured structure of the present invention through the conveying line 90, thereby greatly reducing the conveying pipeline. The degree of exposure is 90, which in turn effectively avoids the problem of damage to the delivery line 90 due to exposure. Preferably, the hollow tube body 70 or any of the sub-tubes 80 has a delivery line outlet 100 for the delivery line 90 to output the fluid it delivers to a particular location or area. In addition, the adjustment of the length and angle of the piston rod 30 of the lifting mechanism unit 12 with respect to the cylinder 20, the rotation mechanism unit 14 rotating the lifting mechanism unit 12, and the pipeline supporting unit 16 makes the hollow buffer driving device 1 of the present invention The conveying line outlet 100 can perform at least two axial length adjustments and at least one axial angle adjustment in a three-dimensional space; preferably, the conveying line outlet 100 of the hollow buffer driving device 1 of the present invention can be in three-dimensional space. Perform length and angle adjustments in any axial direction. Therefore, by the aforementioned adjustment of the length and the angle, the hollow buffer driving device 1 of the present invention can match the size of various processing machines and the fluid in the conveying pipe 90 to a specific position or region in accordance with various processing requirements. .

It should be noted that the adjustment mechanism 82 of the pipeline support unit 16 of the present invention includes a configuration capable of adjusting the length or angle of the two sub-tubes 80 to a fixed specific length or angle, and is not limited to the ones listed in the description of the present invention. Implementation examples. In addition, the lifting mechanism unit 12 of the present invention preferably uses the air pressure type as the lifting power source, but may also use the hydraulic type as the lifting power source.

The embodiments described above are only intended to illustrate the technical idea and the features of the present invention, and the purpose of the present invention is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention. That is, the equivalent variations or modifications made by the spirit of the present invention should still be included in the scope of the present invention.

1‧‧‧ hollow buffer drive

10‧‧‧ Pedestal

12‧‧‧ Lifting unit

14‧‧‧Rotating mechanism unit

16‧‧‧Pipe support unit

20‧‧‧ cylinder

30‧‧‧ piston rod

40‧‧‧Drive motor

50‧‧‧Transmission mechanism

Claims (7)

A hollow buffer driving device comprising: a lifting mechanism unit having a cylinder body and a piston rod, the cylinder body having a casing defining a cylinder space, the piston rod having a handle portion, the handle portion Hollow to define a shank space and threaded through one or both ends of the housing, wherein at least one end of the housing has an end seal and has at least one buffer seal In the cylinder space, a buffer space is defined between the end seal and the buffer seal, and a buffer passage is disposed in the housing to communicate the buffer space and the outer space of the housing, and a buffer adjustment component is disposed. The buffer channel is configured to adjust a size of the buffer channel; wherein when the handle passes through one end of the housing, the housing has an inner column extending in the cylinder space, and the inner column is Hollow to define an inner column space, the handle is slidably coupled to the inner column, and the handle space is in communication with the inner column space to collectively define a first passage; when the handle is inserted through the cylinder When the two ends of the casing are Namely a first channel. A hollow buffer driving device comprising: a base; a lifting mechanism unit having a cylinder and a piston rod, the cylinder having a casing defining a cylinder space, the piston rod having a handle The handle is hollow to define a shank space and is disposed at one end or both ends of the housing, wherein at least one end of the housing has an end seal and at least one buffer a sealing ring is disposed in the cylinder space, and a buffer space is defined between the end sealing ring and the buffer sealing ring, and a buffer channel is disposed in the housing to communicate the buffer space and the outer space of the housing, and a buffer An adjustment component is disposed in the buffer channel to adjust a size of the buffer channel; a rotating mechanism unit having a driving motor and a transmission mechanism, the driving motor having a motor base and a driving shaft fixed to the base, the driving shaft being rotatably coupled to the motor base, The transmission mechanism connects the drive shaft and the lifting mechanism unit for transmitting power of the driving shaft to the lifting mechanism unit, so that the lifting mechanism unit rotates relative to the base; wherein when the handle passes through the housing In one end, the housing has an inner column extending in the cylinder space, and the inner column is hollow to define an inner column space, the handle is slidably coupled to the inner column, and the handle space And communicating with the inner column space to jointly define a first passage; when the handle passes through the two ends of the casing of the cylinder, the shank space is a first passage. The hollow buffer drive device according to any one of claims 1 to 2, further comprising a pipe support unit having a hollow pipe body defining a second passage, the hollow pipe The system is secured to the handle such that the first passage communicates with the second passage. The hollow buffer drive device of claim 3, wherein the hollow tubular body has at least two sub-tubes, and the two sub-tubes are slidably or rotatably connected, and the hollow tubular body has an adjusting mechanism connecting the two sub-tubes At least one of the tubes; wherein, when the two sub-tubes are relatively slidable, the two sub-tubes are slidable relative to each other to a specific length through the adjusting mechanism; and when the two sub-tubes are relatively rotatable, the adjusting mechanism is The two sub-tubes can be rotated relative to each other to a specific angle. The hollow buffer drive device of any one of claims 1 to 2, further comprising at least one delivery line disposed in the first passage. The hollow buffer driving device of claim 3, further comprising at least one delivery line disposed in the first channel and the second channel. The hollow buffer drive device of claim 4, further comprising at least one delivery conduit disposed in the first passage and the second passage.