TWI549881B - Substrate storage container and its manufacturing method - Google Patents

Description

Substrate storage container and manufacturing method thereof

The present invention relates to a substrate storage container and a method of fabricating the same, and particularly to a C-shaped rib portion provided around a circumference of a casing thereof, and a special longitudinal and lateral ratio of the structural design thereof, so as to be accommodated therein The thinned substrate inside can be made flatter, and there is no substrate storage container that is excessively downward, outwardly or warped due to gravity.

In recent years, the high development of electronic related industries and the increasing demand for light and thin electronic products have become increasingly important. Therefore, the semiconductor process as the basis of integrated circuits has become more and more important. Generally, semiconductor wafers must pass through nearly 100 processes such as diffusion, imprinting, etching, reticle, or wafer lithography before they become usable integrated circuits (ICs), and the current integrated circuit process has entered deep. In the sub-micron stage, the requirements for environmental cleanliness are more stringent, but if the cleanliness of the entire working environment is to be upgraded to a higher level, the cost of input will increase and the benefits will not be high. Therefore, it is generally necessary to set a clean production space around the process equipment, and the overall working environment can be generally clean. Therefore, it is necessary to use a wafer cassette that can carry a plurality of wafers (ie SMIF Pod, FOSB or FOUP) to move, store and transfer wafers between the high cleanliness required for workstations, storage cabinets or wafer processes in each production block and the general cleanliness of the general working environment for wafers The film is related to the process required for each fabrication step of the semiconductor.

According to the conventional open-type wafer cassette, please refer to the cross-section shown in Fig. 1. The casing 10 is composed of two side walls 11, 12, a rear wall 13 connecting the two side walls, and an upper wall and a lower wall. (not shown), the substrate 20 is formed to form an accommodation space (indicated by a broken line), and an opening (not shown) is provided in front of the casing 10 for the substrate to enter and exit the casing 10, and A door panel 17 is provided in the opening corresponding to the casing 10 to close the opening of the casing 10 and maintain proper airtightness inside the casing 10. The inner surfaces of the side walls 11 and 12 are respectively provided with a plurality of parallel plates. And facing the lateral tooth ribs 110, 120, and on the two sides of the rear wall 13 are respectively provided with a plurality of mutually parallel rearward tooth ribs 131, 132, with four positions of the tooth ribs for each block The substrate 20 can be stably placed inside the wafer cassette.

However, the silicon wafer substrate of the IC has been gradually thinned, and its thickness has been gradually reduced from 0.7 cm to 200 μm or even smaller, and the thin ribs of the thinned substrate 20 are interposed between the wafer cassettes. When the groove pitch (about 5 mm) is constant, please refer to FIG. 1 again, the thinned substrate 20 is caused to have the thinned substrate 20 due to the structure of the tooth ribs 110, 120, 131, and 132. The amount of downward or outward sag or warpage is too large, causing the robot arm of the substrate 20 to be picked up and dropped during the process, and the substrate 20 is easily collided, and the substrate 20 is damaged, that is, the thinned wafer is easily broken. Excessively interfered by the robot arm's pick and place stroke, which makes the risk of fragmentation large increase.

It can be seen that there are still many missing rib structures in the above-mentioned industry-prepared open wafer cassettes, which is not a good designer and needs to be improved.

In view of this, the inventor of the present invention has been engaged in the manufacturing development and design experience of related products for many years. After detailed design and careful evaluation of the above objectives, the present invention has finally become practical.

The main object of the present invention is to provide a substrate storage container and a manufacturing method thereof, which are provided by a plurality of vertically arranged C-shaped ribs surrounding a circumference of a casing, and each of the C-shaped ribs is provided The special longitudinal and lateral ratio structural design enables the thinned substrate contained therein to be flatter, and the downward or outward amount of sag or warpage generated does not exceed the spacing between the C-shaped ribs. Accordingly, the risk of thinning the substrate fragments is greatly reduced.

In order to achieve the above object, the substrate storage container and the manufacturing method thereof include: a body, a door body and a plurality of tooth ribs; wherein the body has an accommodating space and an opening, the accommodating space For accommodating a plurality of thinned substrates, wherein the thickness of the thinned substrate is up to 200 micrometers; the door system is configured to cover the opening of the body, thereby forming a proper airtightness in the accommodating space; The ribs are formed around the inner circumference of the body to present a C-shaped opening and the ribs are substantially aligned with each other at a vertical interval, thereby horizontally supporting the thinned substrates, and each of the ribs is Near the two ends of the C-shaped opening Each of the tooth ribs has a longitudinal extension from an outermost edge of the extending portion to an innermost edge of the tooth rib; and each of the tooth ribs has a length extending into the accommodating space. a narrow lateral opening width; wherein each of the tooth ribs has a longitudinal ratio between 0.85 and 1.0, and the longitudinal ratio is defined as a longitudinal extension of the tooth rib and a diameter of the thinned substrate a ratio, thereby ensuring that the outwardly warped amount of the thinned substrate does not exceed a vertical spacing between the rib portions; wherein each of the rib portions has a lateral ratio between 0.6 and 0.7, The lateral ratio is defined as the ratio of the narrow lateral opening width of the tooth rib to the diameter of the thinned substrate, thereby ensuring that the amount of warpage of the thinned substrate inward (or downward) does not exceed The spacing between the ribs is vertically spaced.

For the sake of the examination, the reviewer can make a further understanding and understanding of the purpose, shape, structure and function of the present invention. The embodiment is combined with the diagram and is described in detail as follows:

(customary)

10‧‧‧Box

11, 12‧‧‧ side wall

13‧‧‧ Back wall

14‧‧‧上壁

15‧‧‧ Lower wall

16‧‧‧ openings

17‧‧‧ Door panel

110, 120‧‧‧ lateral ribs

131, 132‧‧‧ rearward ribs

(this invention)

30‧‧‧Ontology

40‧‧‧

50‧‧‧ tooth ribs

31, 32‧‧‧ two side walls

33‧‧‧ top surface

34‧‧‧ bottom

35‧‧‧ openings

36‧‧‧Back wall

37‧‧‧Support ribs

38‧‧‧ accommodating space

20‧‧‧Substrate

41‧‧‧Withholding mechanism

51‧‧‧ Depression

52‧‧‧Extension

W _R ‧‧‧lateral elongation

L‧‧‧Longitudinal extension

W _N ‧‧‧ narrower lateral opening width

D‧‧‧Thin diameter of thinned substrate

T‧‧‧ thickness

301‧‧‧Intake 埠

302‧‧‧Exhaust gas

340‧‧‧Motion Coupling

341‧‧‧ recessed joint

360‧‧‧guide

361‧‧ ‧

Fig. 1 is a plan sectional view showing a conventional substrate storage container.

Fig. 2 is a perspective view showing the substrate storage container of the present invention and a method of manufacturing the same.

Fig. 3 is a schematic view showing the use of the substrate storage container of the present invention and a method of manufacturing the same.

Fig. 4 is a schematic view showing the main body and the rib portion of the substrate storage container and the manufacturing method thereof according to the present invention.

Fig. 5 is a schematic view showing the longitudinal ratio of the rib portions of the substrate storage container and the manufacturing method thereof according to the present invention.

Fig. 6 is a schematic view showing the lateral ratio of the rib portion of the substrate storage container and the manufacturing method thereof according to the present invention.

Fig. 7 is a perspective view showing the appearance of a tooth rib portion (before joining the support rib) of the substrate storage container of the present invention and the manufacturing method thereof.

Fig. 8 is a schematic view showing a plurality of tooth ribs (before being joined to the support ribs) of the substrate storage container of the present invention and the method of manufacturing the same.

Fig. 9 is a schematic view showing the combination of the support rib and the tooth rib of the substrate storage container and the manufacturing method thereof according to the present invention.

Fig. 10A is a schematic view showing the detachable rear wall assembly process of the substrate storage container of the present invention.

Figure 10B is a schematic view of the body during assembly of Figure 10A.

Figure 10C is a schematic view showing the stacking of two substrate storage containers.

Fig. 11 is a schematic view showing a motion coupling portion at the bottom of the substrate storage container of the present invention.

According to a first embodiment of the present invention, there is provided a "substrate storage container and a method of manufacturing the same", as shown in Figures 2, 3 and 4, the substrate storage container is for storing a thickness of not more than 200 μm. The substrate 20 mainly includes a body 30, a door body 40 (indicated by a broken line), and a plurality of tooth ribs 50.

In this embodiment, the body 30 can be a bottom open type or The hollow box of the Front Opening Unified Pod (FOUP) is mainly a front open wafer cassette for the sake of explanation. The body 30 is composed of a pair of left and right side walls 31, 32 and adjacent thereto. The side walls 31, 32 are formed to face a top surface 33 and a bottom surface 34, and a forward opening 35 is formed on one side, and a rear wall 36 is formed on the other side of the opening 35 to connect the pair of left and right side walls. 31, 32, and the two side walls 31, 32 of the body 30 are respectively disposed with a plurality of pairs of left and right support ribs 37 (as shown in FIG. 9) vertically aligned with each other, and the body 30 has an accommodation space 38 through the opening 35, a plurality of general or thinned substrates 20 (eg, germanium wafers) are horizontally placed into the accommodating space 38, and the accommodating space 38 horizontally accommodates a plurality of vertically aligned substrates 20.

Referring to FIG. 2 again, the door body 40 is used to cover the opening 35 of the body 30, and the latching mechanism of the fastening mechanism 41 (shown by a broken line) is used to fasten the door body 40 to the opening. 35. The accommodating space 38 is sealed to ensure that the foreign dust does not enter, thereby maintaining the required cleanliness in the accommodating space 38 of the thinned substrate 20.

Referring to FIG. 3 again, the outer edge of each of the tooth ribs 50 surrounds the entire inner circumference of the body 30 and presents a C-shaped opening near the opening 35 at a central portion thereof, and the respective tooth ribs 50 are substantially perpendicular to each other. The spacers are aligned with each other and connected to the pair of left and right support ribs 37 corresponding to the above, that is, the tooth ribs 50 at each horizontal position are matched with a pair of corresponding left and right support ribs 37, wherein each of the ribs The lower surface of the portion 50 is concavely provided with a portion of the recessed step 51 (as shown in FIGS. 7 and 8), so that the recessed step 51 of the specific horizontal position of each of the tooth ribs 50 is respectively engaged. The upper surface of the support rib 37 (as shown in FIG. 9) is used to horizontally support the thinned substrates 20. Further, an extension portion 52 projecting into the accommodating space 38 is disposed on each of the front edges of the two rib portions 50 adjacent to the C-shaped opening, as shown in FIG. 4. The outermost edge of the extension 52 has a lateral extension W _R and the each tooth rib 50 has a narrower lateral opening width W _N at its leading edge opening, as shown in FIG. Each of the tooth ribs 50 has a longitudinal extension L from the outermost edge of the extension 52 to the innermost edge of the tooth rib 50, as shown in FIG. In addition, in order to avoid the phenomenon that the tooth rib 50 and the support rib 37 are broken due to high temperature or deflection, the two may be designed to be integrally formed.

Referring to FIG. 5 again, a specific length (which is parallel to the diameter D of the thinned substrate 20) is longitudinally protruded outward (ie, toward the opening direction) on the left and right extension portions 52 of each of the tooth ribs 50. Each of the tooth ribs 50 has a longitudinal ratio of between 0.85 and 1.0, wherein the longitudinal ratio is defined as the ratio of the longitudinal extension L of the tooth rib 50 to the diameter D of the thinned substrate 20, according to which It is ensured that when the thinned substrate 20 is placed on the tooth rib 50, the outward warpage amount does not exceed the pitch of the vertical spacing between the tooth ribs 50, wherein the pitch is at least 20 cm.

Referring to FIG. 6, the specific width W _{R is} laterally protruded inwardly from the extending portion 52 on the left and right sides of each of the tooth ribs 50 (for the central axis of the substrate perpendicular to the door body), so that each The tooth rib 50 has a lateral ratio of between 0.6 and 0.7, wherein the lateral ratio is defined as the ratio of the narrower lateral opening width W _{N of} the tooth rib 50 to the diameter D of the thinned substrate 20, thereby ensuring The amount of warpage of the thinned substrate 20 inwardly does not exceed the spacing of the vertical spacing between the rib portions 50, wherein the pitch is at least 20 cm.

By using the composition of the above components, in use, each of the tooth ribs 50 has a dimension ratio between 0.85 and 1.0 or a lateral ratio of between 0.6 and 0.7, so as to be accommodated therein. The thinned substrate 20 in the accommodating space 38 of the body 30 can be flatter without excessive sag, for example, does not exceed the vertical spacing between the ribs 50 to avoid excessive sag. The robot arm of the thinned substrate 20 easily collides with the drooping portion of the thinned substrate 20, causing damage to the thinned substrate 20.

Referring to FIG. 7 again, the inner circumference of each of the tooth ribs 50 has substantially the same thickness T, which is different from the structure in which the thickness of the conventional tooth rib is gradually thinned at the center portion thereof, and the horizontal support can be effectively strengthened. rigidity.

Referring to FIGS. 10A-10B, the rear wall 36 of the body 30 is of a detachable structure, and a guide groove 360 formed by a pair of guide rails is provided at the side ends of the left and right side walls 31, 32 for the rear. The wall 36 is detachably inserted or removed, so that the body 30 of the substrate storage container is removed from the rear wall 36 to form another opening relative to the opening 35 of the body 30 during cleaning and drying. The liquid is more easily removed without remaining in it, and the hot air that is dried can be quickly convected in the front open container. In addition, referring to FIG. 10C, a lower portion of the lower substrate storage container 36 is provided with a handle portion 361 for receiving a plurality of substrates corresponding to a recessed portion 341 provided on the bottom surface 34 of the upper substrate storage container. The containers are stacked in a vertical orientation. In addition, the detachable rear wall 36 can be made of a transparent material so that the operator can observe it at any time while cleaning and drying the body 30.

Referring to FIGS. 2, 3, and 4, the number of the thinned substrates 30 that can be accommodated in the body 30 is not more than 13, that is, compared with the conventional wafer thickness of 300 cm and can accommodate 25 pieces of open crystal. For the round box, for example, the vertical spacing between the ribs can be increased by half of the number of ribs remaining, for example, the number of ribs is 12 or 13, so that the thinned substrate can be accommodated. The number is 12 or 13.

Referring to Figures 2, 3 and 4 again, the vertical spacing between the tooth ribs 50 is at least 20 cm, which is the same as the example in which the number of thinned substrates is not more than 13, for example, when half of the ribs are retained. The number of ways, the original 25-inch wafer cassette can be horizontally accommodated with a 10 cm rib pitch, which will increase to 20 cm.

Referring to FIG. 2 again, the body 30 is further provided with an air inlet 301 and an air outlet 302. The air inlet 301 and the air outlet 302 are adjacent to the opening 35 of the body 30, and are respectively adjacent to each other. The two side walls 32 and 31 of the main body 30 allow the clean air to enter the accommodating space 38 by the air intake 301, and the dust ventilating air of the accommodating space 38 is discharged by the air vent 302, thereby The air in the accommodating space 38 circulates to carry away the dust on the surface of the thinned substrate 20.

As described above, the materials used for the tooth ribs 50 have the effect of dissipating static electricity. Referring to FIG. 11 , the substrate storage container further includes three concave movement coupling portions 340 on the bottom surface 34 thereof. The substrate storage container houses a plurality of first diameter wafers (not shown), and the motion coupling is performed. The three-point positioning of portion 340 is suitably adjusted such that the substrate receiving container can be coupled to a machine interface (not shown) for processing the second diameter wafer, wherein the first diameter is less than the second diameter, for example: the first diameter 8 inches, and the second diameter is 12 吋, can effectively solve the traditional suitable for small size (such as 8 晶圆) wafer cassette can not be directly used in the coupling interface of wafer processing equipment for larger size (such as 12 。).

Furthermore, a second embodiment of the present invention relates to a method of fabricating a substrate storage container, comprising the steps of: (101) providing a body 30, wherein the body is provided with an accommodation space 38 and an opening 35; The accommodating space 38 is used for accommodating a plurality of thinned substrates 20, and the opening 35 is used for accessing the thinned substrates 20 (as shown in FIGS. 2, 3, and 4); 40, the opening 35 for covering the body 30, wherein the door body 40 is provided with a latching mechanism of the latching mechanism 41 (as shown in FIG. 2) to tightly fasten the door body 40 to the opening 35, The accommodating space 38 is sealed to ensure that the external dust does not enter; (103) the plurality of supporting ribs 37 are horizontally and vertically spaced apart from each other on the side walls 31 and 32 of the body 30 (eg, the seventh, 8 is shown); (104) a plurality of vertically arranged ribs 50 are disposed along the inner circumference of the body 30, and a concave portion 51 is concavely formed on the lower surface of each of the ribs 50. The concave section difference 51 of each of the tooth ribs 50 on both sides of the specific horizontal position thereof is adhered, welded, clamped, locked and integrally buried. One of the modes is joined to the corresponding support rib 37 to support the thinned substrate 20 horizontally (as shown in FIG. 9); wherein each of the tooth ribs 50 has a longitudinal ratio of 0.85 and Between 1.0; and, each of the tooth ribs 50 has a lateral ratio between 0.6 and 0.7. Thus, the finished product of the substrate storage container of the present invention is formed. For the manufacturing method described above, please refer to FIG. 2 again. The body 30 is further provided with an intake port 301 and an air outlet 302, wherein the intake port 301 is adjacent to the position of the air outlet 302. The opening 35 of the 30, and adjacent to the two side walls 31, 32 of the body 30, respectively, allows the air intake 301 to allow clean air to enter the accommodating space 38 and the air vent 302 to allow air to exit the accommodating space 38. The clean air is circulated in the accommodating space 38, and the dust adhering to the surface of the thinned substrate 20 is carried away.

For the manufacturing method described above, please refer to FIG. 10A-10C. The rear wall 36 of the main body 30 can also adopt a detachable design, and the side ends of the left and right side walls 31 and 32 are formed by a pair of guide rails. The guiding groove 360 is configured for the rear wall 36 to be detachably and movably inserted or removed from the body 30, so that when the substrate storage container is dried after washing, the rear wall 36 is removed to form a relative door. The other opening of the opening 35 of the body 30 causes the cleaning liquid to be more easily removed without remaining therein, and the hot air to be dried can be quickly convected in the front opening container. In addition, a lower portion of the lower substrate storage container rear wall 36 is provided with a handle portion 361 for corresponding to a recessed portion 341 provided on the bottom surface 34 of the upper substrate storage container, and a plurality of substrate storage containers can be stacked in a vertical direction. put. In addition, the detachable rear wall 36 can be made of a transparent material so that the operator can observe it at any time while cleaning and drying the body 30. In addition, the structure of the tooth rib 50 and the support rib 37 formed by integrally molded-in can be effectively prevented from being broken due to high temperature drying.

As described above, referring to FIG. 11, the substrate storage container is further provided with a concave movement coupling on the bottom surface 34 thereof. The substrate 340 is configured to receive a plurality of wafers (not shown) having a diameter of 8 Å. The substrate storage container can be coupled to the wafer machine having a diameter of 12 Å by adjusting the motion coupling portion. The interface (not shown) can effectively solve the traditional coupling box suitable for smaller size (such as 8 吋) and can not be directly used in the coupling interface of wafer processing equipment suitable for larger size (such as 12 。).

As described above, the features, components, and materials used are the same as those disclosed in the first embodiment.

From the above detailed description, it will be apparent to those skilled in the art that the present invention can achieve the foregoing objects, and in accordance with the provisions of the Patent Law, the patent application is filed. However, the foregoing open wafer cassette is only a preferred embodiment of the present invention. In other words, the scope of the present invention can also be applied to a bottom open wafer cassette or other substrate storage container for the semiconductor field. The method of making the same; therefore, the simple equivalent changes and modifications made by the scope of the invention and the content of the invention are within the scope of the invention.

30‧‧‧Ontology

31, 32‧‧‧ two side walls

33‧‧‧ top surface

34‧‧‧ bottom

36‧‧‧Back wall

38‧‧‧ accommodating space

40‧‧‧

41‧‧‧Withholding mechanism

37‧‧‧Support ribs

301‧‧‧Intake 埠

50‧‧‧ tooth ribs

302‧‧‧Exhaust gas

Claims (20)

A substrate storage container includes: a body having an accommodating space and an opening, wherein the accommodating space is for accommodating a plurality of thinned substrates; a door body for covering the opening of the body; The tooth ribs are formed around the inner circumference of the body to present C-shaped openings and are aligned with each other substantially at a vertical interval, thereby supporting the thinned substrates, and each of the tooth ribs is adjacent to the C-shaped opening Each of the two sides is provided with an extension protruding toward the accommodating space, and each of the ribs has a longitudinal extension from an outermost edge of the extension to an innermost edge of the rib; wherein each of the ribs The tooth rib has a longitudinal ratio of between 0.85 and 1.0, thereby ensuring that the outwardly warped amount of the thinned substrate does not exceed a vertical spacing between the tooth ribs, the longitudinal ratio being defined as the tooth The ratio of the longitudinal extension of the rib to the diameter of the thinned substrate. The substrate storage container according to claim 1, wherein the inner peripheral edge of each of the tooth ribs has substantially the same thickness, and the tooth rib portion has an electrostatic dissipating effect. The substrate storage container of claim 1, wherein the plurality of opposite side walls of the adjacent body openings are respectively provided with a plurality of support ribs such that each pair of support ribs corresponds to each of the tooth ribs. The substrate storage container of claim 3, wherein a concave portion is further recessed on a lower surface of each of the two sides of each of the tooth ribs to Correspondingly, each pair of support ribs is accommodated. The substrate storage container of claim 1, wherein the substrate storage container is a front opening container and the body further has a detachable rear wall, so that the substrate storage container is removed by drying after washing The rear wall forms another opening relative to the opening of the door body, and the drying hot gas can be quickly convected within the front opening container. The substrate storage container of claim 5, wherein the number of the thinned substrates in the body is not more than 13, and the vertical spacing between the ribs is at least 20 cm. The substrate storage container of claim 6, further comprising a motion coupling portion at a bottom portion thereof, wherein the substrate storage container houses a plurality of first diameter wafers, and the substrate storage container is coupled to the substrate storage container by the motion coupling portion To process the machine interface of the second diameter wafer, wherein the first diameter is less than the second diameter. The substrate storage container of claim 7, wherein the body is further provided with an air inlet and an air outlet, wherein the air inlet and the air outlet are adjacent to the opening of the body, and adjacent to the body respectively. Two side walls. The substrate storage container of claim 8, wherein the upper edge of the front opening of the front opening container is provided with a handle portion for corresponding to a concave portion for stacking the plurality of substrate storage containers. A substrate storage container includes: a body having an accommodating space and an opening, the accommodating space Storing a plurality of thinned substrates; a door for covering the opening of the body; and a plurality of ribs extending around the inner circumference of the body to form C-shaped openings and being substantially aligned with each other at a vertical interval By supporting the thinned substrates, each of the tooth ribs is provided with an inwardly projecting extension portion at both side ends adjacent to the C-shaped opening, and each of the pair of oppositely extending portions is made The tooth rib has a narrower lateral opening width; wherein each of the tooth ribs has a lateral ratio of between 0.6 and 0.7, thereby ensuring that the inward warping of the thinned substrate does not exceed the ribs The spacing between the portions is vertically spaced, and the lateral ratio is defined as the ratio of the narrower lateral opening width of the tooth rib to the diameter of the thinned substrate. The substrate storage container according to claim 10, further comprising a motion coupling portion at a bottom portion thereof, wherein the substrate storage container houses a plurality of first diameter wafers, and the substrate storage container is coupled to the substrate storage container by the motion coupling portion To process the machine interface of the second diameter wafer, wherein the first diameter is less than the second diameter. The substrate storage container of claim 10, wherein a plurality of support ribs are respectively disposed on opposite side walls of the adjacent body openings, such that each pair of support ribs corresponds to each of the tooth ribs, and each of the tooth ribs A portion of the lower surface of each of the two sides is further recessed with a recessed step to accommodate the pair of support ribs. The substrate storage container of claim 12, wherein the substrate storage container is a front opening container and the body further has a detachable rear wall, so that the substrate storage container is removed by drying after washing The rear wall forms another opening relative to the opening of the door body, and the drying hot gas can be quickly convected within the front opening container. The substrate storage container of claim 12, wherein the upper edge of the rear wall of the front opening container is provided with a handle portion for stacking a plurality of substrate storage containers corresponding to a concave portion. A substrate storage container includes: a body having an accommodating space and an opening, wherein the accommodating space is for accommodating a plurality of thinned substrates; a door body for covering the opening of the body; The tooth ribs are formed around the inner circumference of the body to present C-shaped openings and are aligned with each other substantially at a vertical interval, thereby supporting the thinned substrates, and each of the tooth ribs is adjacent to the C-shaped opening Each of the two side ends is provided with an inwardly projecting extension portion, each of the tooth rib portions having a longitudinal extension from an outermost edge of the extension portion to an innermost edge of the tooth rib portion; and each of the tooth rib portions has a narrower lateral opening width; wherein each of the tooth ribs has a longitudinal ratio of between 0.85 and 1.0, thereby ensuring that the outwardly warped amount of the thinned substrate does not exceed the vertical between the rib portions The spacing of the spacing, the longitudinal ratio is defined as the longitudinal extension of the rib of the tooth and the thin The ratio of the diameter of the substrate; wherein each of the rib portions has a lateral ratio between 0.6 and 0.7, thereby ensuring that the inward warpage of the thinned substrate does not exceed the vertical between the rib portions The spacing ratio is defined as the ratio of the narrower lateral opening width of the tooth rib to the diameter of the thinned substrate. The substrate storage container of claim 15 further comprising a motion coupling portion at a bottom portion thereof, wherein the substrate storage container houses a plurality of first diameter wafers, and the substrate storage container is coupled to the substrate storage container by the motion coupling portion To process the machine interface of the second diameter wafer, wherein the first diameter is less than the second diameter. The substrate storage container of claim 15, wherein the substrate storage container is a front opening container and the body further has a detachable rear wall, so that the substrate storage container is removed by drying after washing The rear wall forms another opening relative to the opening of the door body, and the drying hot gas can be quickly convected within the front opening container. A method for fabricating a substrate storage container includes: providing a body, wherein the body is provided with an accommodating space and an opening, and the accommodating space is for accommodating a plurality of thinned substrates, and the opening is used for accessing The thinned substrate is provided with a door for covering the opening of the body; the two side walls of the body are respectively disposed horizontally and vertically spaced apart from each other a plurality of support ribs; a plurality of tooth ribs are disposed on the inner circumference of the body, and a concave section is respectively recessed on the lower surfaces of the two sides of each of the ribs, so that each of the ribs is on both sides thereof The recessed sections of the specific horizontal position respectively engage the corresponding supporting ribs to support the thinned substrates, and the joints are carried out in a manner of being buried; wherein each of the ribs has a longitudinal ratio Between 0.85 and 1.0, and the longitudinal ratio is defined as a ratio of a longitudinal extension of the rib portion to a diameter of the thinned substrate; and each of the rib portions has a lateral ratio between 0.6 and 0.7 And the lateral ratio is defined as the ratio of the narrow lateral opening width of the tooth rib to the diameter of the thinned substrate. The method of manufacturing a substrate storage container according to claim 18, wherein the substrate storage container is a front opening container, and the body is further provided with a detachable rear wall, so that the substrate storage container is used for drying after washing. Forming another opening corresponding to the opening of the door body by removing the rear wall, the drying hot air can be quickly convected in the front opening container; and the body is further equipped with an air inlet and an air outlet The air inlet and the air outlet are adjacent to the opening of the body, and adjacent to the two side walls of the body, and further a movable coupling portion is disposed at the bottom of the body, wherein the substrate storage container is configured to receive a plurality of A diameter wafer, the substrate receiving container is coupled to the machine interface for processing the second diameter wafer by the motion coupling portion, and the first diameter is smaller than the second diameter. A substrate storage container comprising a body and a door body The utility model comprises a pair of opposing side walls, a top surface, a bottom surface and a rear wall, wherein the top surface and the bottom surface are connected to the pair of side walls, and a front opening is formed opposite to the rear wall, and the door body is tightly engaged Opening and having an accommodating space inside the body, further respectively providing a plurality of tooth ribs vertically aligned with each other on the inner surface of the pair of side walls to horizontally accommodate a plurality of vertically aligned first diameter wafers in the accommodating space The rear wall is movably inserted or removed by a guide groove, and a bottom of the body is provided with a motion coupling portion, and the substrate storage container is coupled to the substrate by the motion coupling portion. Processing a machine interface of the second diameter wafer, wherein the first diameter is less than the second diameter.