TWI547344B - Positioning tool and processing device - Google Patents

Description

Positioning fixture and process machine

The invention relates to a positioning fixture and a processing machine, and in particular to an adjustable positioning fixture and a processing machine using the adjustable positioning fixture.

In the existing semiconductor process, as the process line width is reduced and the component accumulation is increased, the planarization technique is more important. Among them, Chemical Mechanical Planarization (CMP) is one of the most effective techniques for achieving planar planarization in semiconductor processes. Generally, chemical mechanical polishing involves contacting the substrate directly with a rotating polishing pad and applying a load to the back side of the substrate with a load. During polishing, the polishing pad rotates with the table while maintaining a downward force on the back side of the substrate, and the abrasive and chemically active solution (commonly referred to as the slurry) is applied to the gasket through the slurry and The polished film undergoes a chemical reaction to begin the polishing process.

Since the slurry is a high viscosity chemical and usually contains a large amount of abrasive particles, the tantalum wafer must be cleaned immediately after the chemical mechanical polishing process, otherwise it is easy to condense on the surface of the tantalum wafer into a solid residue. general For example, the cleaning step can be performed by brush cleaning, spray cleaning, and ultrasonic cleaning. The most common cleaning method is to use diluted ammonia to remove the grinding. Residual particulate contaminants, or diluted hydrofluoric acid, remove traces of metallic contaminants.

However, strong acids and strong bases can easily cause damage to copper wires and low dielectric materials. Therefore, in copper metallization, mild organic acids or organic bases are usually used. Organic basic), supplemented by added surfactants and chelating agents, to remove fine particles and metal impurities from the slurry. During the brushing process, two side-by-side brushers are typically used to scrub the surface of the wafer, and the distance between the two side-by-side brushes will affect the actual cleaning of the wafer. In the case where the distance between the two parallel brushing members is improperly adjusted, the damage of the silicon wafer is easily caused, and the process yield is degraded.

The invention provides a positioning fixture, which can have better flexibility of use.

The invention provides a process machine, which can have better process flexibility and help to improve the process yield.

The positioning fixture of the present invention is suitable for a processing machine and can be used to calibrate the distance between two brushing members arranged side by side. The positioning fixture includes a body and a positioning block. The body has a plurality of tick marks. The body includes an extension. The extension has opposite sides The sides and the widths corresponding to the sides thereof, wherein the width at a position near the trailing end of the extension is smaller than the width at a position relatively far from the trailing end. The positioning block is slid on the main body. The positioning block has a bearing surface, and the extending portion is adapted to be inserted between the two brushing members, wherein when the bearing surface and the two side edges of the extending portion bear the two brushing members together, the positioning block corresponds to the marking marks One, and the corresponding tick marks indicate the distance between the two scrubbing members.

In an embodiment of the invention, the main body has a first sliding portion, and the positioning block has a second sliding portion that cooperates with the first sliding portion.

In an embodiment of the invention, the first sliding portion is a 凸-shaped protrusion, and the second sliding portion is a 鸠-shaped groove.

In an embodiment of the invention, the first sliding portion is a 鸠-shaped groove, and the second sliding portion is a 凸-shaped convex portion.

In an embodiment of the invention, the positioning block has an end face that is parallel to the tick marks. When the positioning block corresponds to one of the tick marks, the end face is aligned with the corresponding tick mark.

The process machine of the present invention includes a process device and the aforementioned positioning fixture. The process equipment includes a receiving tank and two brushing parts, wherein the two brushing parts are juxtaposed in the receiving tank.

In an embodiment of the invention, the process device further includes at least one adjustment mechanism. The adjustment mechanism is disposed in the pocket and connects one of the two scrubbing members. When the extension portion is inserted between the two brushing members, and the positioning block corresponds to one of the scale marks, the adjusting mechanism drives the brushing member connected to the adjustment mechanism to make the two brushing The pieces abut against the abutment surface and the two sides of the extension.

Based on the above, the body of the positioning jig of the present invention has a taper, that is, a width at a position close to the trailing end of the extension of the main body is smaller than a width at a position relatively far from the trailing end. Moreover, the positioning block of the positioning fixture can be slid relative to the main body, so that the positioning flexibility of the positioning fixture can be adjusted to have better flexibility of use. The process machine of the present invention can appropriately adjust the distance between the two brushing members through the positioning fixture, thereby having better process flexibility, and avoiding damage to the object to be polished during the process of brushing the object to be polished. In order to improve the process yield.

The above described features and advantages of the invention will be apparent from the following description.

1‧‧‧ items to be polished

10‧‧‧Processing machine

100‧‧‧Processing equipment

110‧‧‧ 容容

120a‧‧‧First brushing parts

120b‧‧‧Second brushing parts

130‧‧‧Spray parts

140‧‧‧Adjustment agency

141‧‧‧Brakes

142‧‧‧ shaft

143‧‧‧ drive parts

200‧‧‧ positioning fixture

210, 210a‧‧‧ subjects

211‧‧‧ tick marks

212‧‧‧Extension

212a‧‧‧ side

212b‧‧‧ tail

213‧‧‧First sliding part

220, 220a‧‧‧ positioning block

221‧‧‧ bearing surface

222‧‧‧Second sliding part

223‧‧‧ end face

W1, W2‧‧‧ width

1A is a schematic view of a process machine according to an embodiment of the present invention.

Figure 1B is a schematic illustration of the chemical mechanical polishing of the process apparatus of Figure 1A.

2 is a schematic diagram of the process device of FIG. 1A and a positioning fixture applied to the process device.

3 is a schematic view of the positioning fixture of FIG. 2.

4 is a partial schematic view of the process apparatus of FIG. 1A.

Fig. 5 is a positioning jig according to another embodiment of the present invention.

1A is a schematic view of a process machine according to an embodiment of the present invention. Figure 1B is a schematic illustration of the chemical mechanical polishing of the process apparatus of Figure 1A. 2 is a schematic diagram of the process device of FIG. 1A and a positioning fixture applied to the process device. For clarity and illustration, FIG. 2 omits the adjustment mechanism 140. Referring to FIG. 1A , FIG. 1B and FIG. 2 , in the embodiment, the process machine 10 includes a process device 100 and a positioning fixture 200 , wherein the process device 100 is, for example, a chemical mechanical polishing device applied to a semiconductor process, but the present invention Not limited to this.

The process device 100 includes a housing 110, a first brushing member 120a, and a second brushing member 120b, wherein the first brushing member 120a and the second brushing member 120b are juxtaposed in the housing 100, and the first brushing member 120a and the second brushing unit The distance between the pieces 120b can be adjusted according to different thicknesses of the object 1 to be polished (for example, a wafer), so that the first brushing part 120a and the second brushing part 120b can respectively contact the two surfaces opposite to the object 1 to be polished. . Moreover, the contact state between the first surface of the first brushing member 120a and the second brushing member 120b opposite to the object to be polished 1 is such that the irregular contour on the opposite surfaces of the object to be polished 1 can be polished when the brushing step is performed. The principle is to flatten the opposite surfaces of the polishing article 1 without damaging the wiring on the opposite surfaces of the body of the article to be polished 1 .

Generally, the process equipment 100 further includes two spray parts 130 arranged side by side. The spray parts 130 can provide diluted ammonia to remove the first brushing part 120a and the second brushing part 120b to grind the object 1 to be polished. Residual grain Sub-contaminants, or diluted hydrofluoric acid to remove traces of metal contaminants. Since the distance between the first brushing member 120a and the second brushing member 120b can be adjusted according to different thicknesses of the object to be polished 1, such as a wafer, when the first brushing member 120a and the second brushing member 120b are rotated, The magnitude of the torque applied to the object to be polished by the first brushing member 120a and the second brushing member 120b can be controlled appropriately, so that damage to the object to be polished 1 is not easily caused to improve the process yield.

3 is a schematic view of the positioning fixture of FIG. 2. Referring to FIG. 2 and FIG. 3, in the embodiment, the positioning fixture 200 is adapted to calibrate the distance between the first brushing member 120a and the second brushing member 120b, so that the first brushing member 120a and the second brushing member 120b The contact state between the two surfaces opposite to the object to be polished can be controlled. The positioning jig 200 includes a main body 210 and a positioning block 220, wherein the main body 210 has a plurality of tick marks 211, and the tick marks 211 are, for example, equally spaced along the length direction of the main body 210, but the present invention is not limited thereto. In other embodiments, the tick marks 211 may also be designed in an unequal arrangement according to different operational requirements such as fine adjustment or coarse adjustment, that is, the scale on the main body 210. The mark 211 can be classified as sparse.

The body 210 may include an extension portion 212, wherein the extension portion 212 has opposite side edges 212a and a width corresponding to the two side edges 212a, and the width corresponding to the two side edges 212a at different positions of the extension portion 212 the same. For example, the width W1 at a position near the trailing end 212b of the extension 212 is less than relatively far The width W2 at the position of the trailing end 212b, that is, the extension portion 212 has substantially a taper, so the width corresponding to the side edges 212a is smaller as it is closer to the trailing end 212b.

The positioning block 220 is slidably disposed on the main body 210 , and the positioning block 220 has a bearing surface 221 . The extending portion 212 is adapted to be inserted into the cavity 110 and inserted between the first brushing member 120a and the second brushing member 120b, wherein the bearing surface 221 and the two side edges 212a of the extending portion 212 bear together with the first brushing member When the 120a and the second brushing member 120b are located, the positioning block 220 corresponds to one of the scale marks 211, and the corresponding scale mark 211 indicates the distance between the first brushing member 120a and the second brushing member 120b. For example, the distance may be the distance between the axis of the first brushing member 120a and the axis of the second brushing member 120b, or the first brushing member 120a and the second brushing member 120b respectively support the two sides. The distance between the contact points at the side 212a is not limited by the present invention.

Specifically, the main body 210 has a first sliding portion 213, and the positioning block 220 has a second sliding portion 222 that cooperates with the first sliding portion 213, that is, the contour of the first sliding portion 213 is substantially the same as the second sliding portion. The contours of the portions 222 are complementary. Here, the first sliding portion 213 may be a 鸠-shaped protrusion, and the second sliding portion 222 may be a 鸠-shaped groove that cooperates with the aforementioned 鸠-shaped protrusion. Thereby, the positioning block 220 can be moved back and forth along the length direction of the body 210 to correspond to one of the scale marks 211, so that the extension portion 212 is inserted between the first brushing member 120a and the second brushing member 120b, and The abutting surface 221 and the two side edges 212a of the extending portion 212 bear together with the first brushing member In the case of 120a and the second brushing member 120b, the distance between the first brushing member 120a and the second brushing member 120b is indicated by the corresponding scale mark 211.

In the present embodiment, these scale marks 211 are, for example, depicted on the first sliding portion 213, but the present invention is not limited thereto. In other embodiments, the tick marks 211 may also be depicted on the surface 214 relative to the first sliding portion 213, or depicted on one of the two sides 212a, or simultaneously engraved on the body 210. Face up.

On the other hand, the positioning block 220 may have an end surface 223 parallel to the scale marks 211. When the positioning block 220 corresponds to one of the scale marks 211, the end surface 223 may be aligned with the corresponding scale mark 211 for bearing When the facing surface 221 and the two side edges 212a of the extending portion 212 bear together against the first brushing member 120a and the second brushing member 120b, the distance between the first brushing member 120a and the second brushing member 120b is clearly indicated. It should be noted that the end surface 223 indicated in FIG. 3 is only for illustration. Therefore, in other embodiments, the actual position of the end surface 223 is adjusted according to design requirements, and the present invention does not limit this. For example, the end surface 223 can also be the bearing surface 221 .

Since the distance between the first brushing member 120a and the second brushing member 120b can be adjusted according to different thicknesses of the object to be polished, the distance between the first brushing member 120a and the second brushing member 120b can be determined by the positioning fixture 200. Calibration, so that when the positioning block 220 corresponds to one of the scale marks 211, the extension 212 can be inserted between the first brushing member 120a and the second brushing member 120b. At this time, the bearing surface The two sides 212a of the extension portion 212 and the extension portion 212 may not bear the first brushing member 120a and the second brushing member 120b together, so the distance between the two brushing members 120 needs to be further adjusted to make the bearing surface 221 and the extension. The two side edges 212a of the portion 212 collectively bear against the first brushing member 120a and the second brushing member 120b. Further explanation will be made below regarding the operation of adjusting the relative position between the first brushing member 120a and the second brushing member 120b.

4 is a partial schematic view of the process apparatus of FIG. 1A. Referring to FIG. 2 to FIG. 4 , in the embodiment, the process device 100 further includes at least one adjusting mechanism 140 (only one is schematically illustrated in FIG. 2 ). The adjusting mechanism 140 is disposed in the receiving slot and connected to the first brushing. Piece 120a. When the extending portion 212 is inserted between the first brushing member 120a and the second brushing member 120b, and the positioning block 220 corresponds to one of the scale marks 221, the adjusting mechanism 140 can drive the first brushing member 120a relative to the second brushing. The piece 120b is moved to change the relative position between the first brushing member 120a and the second brushing member 120b such that the first brushing member 120a and the second brushing member 120b can abut against the bearing surface 221 and the extension portion 212, respectively. Both sides 212a.

Although in the above embodiment, the adjustment mechanism 140 is connected to the first brushing member 120a, in other embodiments, the adjustment mechanism 140 may be connected to the second brushing member 120b, or the number of the adjusting mechanism 140 is In the case of the two, the two adjustment mechanisms 140 are respectively connected to the first brushing member 120a and the second brushing member 120b, which is not limited in the present invention.

Furthermore, the adjustment mechanism 140 can be located inside the pocket 110 The brake member 141, the shaft 142 and the driving member 143. The shaft 142 passes through the braking member 141, the driving member 143 and the side wall of the receiving slot 110, respectively, and the braking member 141 and the driving member 143 are respectively located on opposite sides of the side wall of the receiving slot 110. When the driving force is applied to the driving member 143 to drive the driving member 143 to rotate, the driving member 143 simultaneously drives the shaft 142 to rotate, and causes the braking member 141 to move toward or away from the pocket 110, thereby changing the first brushing member 120a and The relative position between the second brushing members 120b.

The above is a description of one of the calibration methods of the positioning fixture 200, that is, the positioning block 220 is fixed to the main body 210 corresponding to one of the scale marks 211, and then the extension portion 212 is inserted into the first brushing member 120a and the Between the two brushing members 120b, and adjusting the relative position between the first brushing member 120a and the second brushing member 120b through the adjusting mechanism 140, so that the first brushing member 120a and the second brushing member 120b can respectively abut the bearing surface 221 The distance between the first brushing member 120a and the second brushing member 120b is determined by the two side edges 212a of the extending portion 212, and the distance is, for example, coincident with the value of the scale mark 211 corresponding to the positioned block 220. However, the calibration method of the positioning jig 200 is not limited to the above, and another calibration method will be described below.

For example, in a case where the relative position between the first brushing member 120a and the second brushing member 120b is fixed, the user may first insert the extending portion 212 between the first brushing member 120a and the second brushing member 120b. The first brushing member 120a and the second brushing member 120b are supported by the two side edges 212a of the extending portion 212. Then, moving toward the first scrubbing member 120a and the second scrubbing member 120b The block 200 is positioned such that the bearing surface 221 of the positioning block 200 also bears against the first brushing member 120a and the second brushing member 120b. At this time, the scale mark 211 corresponding to the positioned block 200 can indicate the distance between the first brushing member 120a and the second brushing member 120b. As described above, the aforementioned distance corresponds, for example, to the value of the scale mark 211 corresponding to the positioned block 220.

The positioning jig of the other embodiments will be listed below as an illustration. It is to be noted that the following embodiments use the same reference numerals and parts of the above-mentioned embodiments, and the same reference numerals are used to refer to the same or similar elements, and the description of the same technical content is omitted.

Fig. 5 is a positioning jig according to another embodiment of the present invention. Referring to FIG. 5, in the embodiment, the first sliding portion 213 of the main body 210a may be a 凹槽-shaped groove, and the second sliding portion 222 of the positioning block 220a may be a 鸠-shaped convex matching the aforementioned 鸠-shaped groove. Piece.

In summary, the main body of the positioning jig of the present invention has a taper, that is, a width at a position close to a trailing end of the extending portion of the main body is smaller than a width at a position relatively far from the trailing end. Also, the positioning block of the positioning fixture can be slid relative to the body to correspond to one of the plurality of tick marks on the body with a different positioning reference. That is to say, in the case where the positioning reference of the positioning jig is adjustable, it can have better flexibility of use.

In another aspect, the process machine of the present invention can moderately adjust the distance between the two brushing members through the positioning fixture, wherein the bearing surface of the positioning block and the extension of the main body When the two sides of the extension jointly bear against the two brushing members, the corresponding mark of the scale can indicate the distance between the two brushing members. In this way, not only can the process machine of the present invention have better process flexibility, but also the damage of the object to be polished can be avoided during the process of brushing the object to be polished, thereby improving the process yield.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

200‧‧‧ positioning fixture

210‧‧‧ Subject

211‧‧‧ tick marks

212‧‧‧Extension

212a‧‧‧ side

212b‧‧‧ tail

213‧‧‧First sliding part

220‧‧‧ Positioning block

221‧‧‧ bearing surface

222‧‧‧Second sliding part

223‧‧‧ end face

Claims (10)

A positioning fixture is applicable to a processing machine for calibrating the distance between two brushing members arranged side by side. The positioning fixture comprises: a main body having a plurality of tick marks, the main body comprising an extension portion, the extension portion Having opposite side edges and a width corresponding to the two side edges, wherein the width at a position near a trailing end of the extending portion is smaller than the width at a position relatively far from the trailing end; and a positioning block is slidably disposed The main body, the positioning block has a bearing surface, and the extending portion is adapted to be inserted between the two brushing members, wherein when the bearing surface and the two side edges of the extending portion bear the two brushing members together, The positioning block corresponds to one of the tick marks, and the corresponding tick mark indicates the distance between the two brushing members. The positioning fixture of claim 1, wherein the body has a first sliding portion, and the positioning block has a second sliding portion that cooperates with the first sliding portion. The positioning fixture of claim 2, wherein the first sliding portion is a 凸-shaped protrusion, and the second sliding portion is a 凹槽-shaped groove. The positioning fixture of claim 2, wherein the first sliding portion is a 凹槽-shaped groove, and the second sliding portion is a 凸-shaped convex portion. The positioning fixture of claim 1, wherein the positioning block has an end surface parallel to the tick marks, and when the positioning block corresponds to one of the tick marks, the end face is corresponding to The scale marks are aligned. A process machine comprising: a processing device, comprising: a receiving slot; and two brushing members disposed side by side in the receiving slot; and a positioning fixture adapted to calibrate a distance between the two brushing members, the positioning fixture comprising: a main body Having a plurality of tick marks, the body includes an extension having opposite side edges and a width corresponding to the two sides, wherein the width near the end of the extension is less than the distance a width at a position of the trailing end; and a positioning block slidably disposed on the body, the positioning block having a bearing surface adapted to be inserted between the two brushing members, wherein the bearing surface and the extension When the two sides of the portion bear the two brushing members together, the positioning block corresponds to one of the tick marks, and the corresponding tick mark indicates the distance between the two brush members. The process machine of claim 6, wherein the main body has a first sliding portion, and the positioning block has a second sliding portion that cooperates with the first sliding portion. The process machine of claim 7, wherein the first sliding portion is a 凸-shaped protrusion, and the second sliding portion is a 凹槽-shaped groove. The process machine of claim 7, wherein the first sliding portion is a meandering groove, and the second sliding portion is a meandering bump. The process machine of claim 6, wherein the process device further comprises: at least one adjustment mechanism disposed in the pocket, and connecting one of the two brushing members, when the extension portion is inserted into the two brushing Between the pieces, and the positioning block corresponds to one of the tick marks, the at least one adjusting mechanism drives the brushing member connected to the at least one adjusting mechanism, so that the two brushing members respectively abut the bearing surface and The two sides of the extension.