TWI546610B - Projection device and fabrication method of a polarization grating - Google Patents

Projection device and fabrication method of a polarization grating Download PDF

Info

Publication number
TWI546610B
TWI546610B TW103108680A TW103108680A TWI546610B TW I546610 B TWI546610 B TW I546610B TW 103108680 A TW103108680 A TW 103108680A TW 103108680 A TW103108680 A TW 103108680A TW I546610 B TWI546610 B TW I546610B
Authority
TW
Taiwan
Prior art keywords
polarization
light
light beam
polarization grating
grating
Prior art date
Application number
TW103108680A
Other languages
Chinese (zh)
Other versions
TW201535037A (en
Inventor
郭海成
譚力
李悅榮
Original Assignee
香港科技大學
立景光電股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 香港科技大學, 立景光電股份有限公司 filed Critical 香港科技大學
Priority to TW103108680A priority Critical patent/TWI546610B/en
Publication of TW201535037A publication Critical patent/TW201535037A/en
Application granted granted Critical
Publication of TWI546610B publication Critical patent/TWI546610B/en

Links

Description

投影裝置和偏振光柵的製造方法 Projection device and method of manufacturing polarization grating

本發明是有關於一種顯示裝置及其製造方法,且特別是有關於一種投影裝置及偏振光柵的製造方法。 The present invention relates to a display device and a method of fabricating the same, and more particularly to a projection device and a method of fabricating the polarization grating.

在顯示技術的領域中,當需要大的顯示畫面時,平板顯示器需要具有相稱的尺寸。然而,具有較小尺寸的投影裝置可在屏幕上形成大的顯示畫面。因此,在許多人一起觀看顯示畫面(例如,會議、簡報或觀看電影)的情況下,投影裝置具有優點。因此,投影裝置在顯示技術的領域中具有不可替代的地位。 In the field of display technology, when a large display screen is required, the flat panel display needs to have a commensurate size. However, a projection device having a smaller size can form a large display on the screen. Therefore, in the case where many people watch a display screen together (for example, a conference, a briefing, or watching a movie), the projection apparatus has an advantage. Therefore, projection devices have an irreplaceable position in the field of display technology.

在常規矽上液晶(liquid-crystal-on-silicon,LCOS)投影機中,使非偏振光束偏振且所述光束接著行進到矽上液晶面板。矽上液晶面板反射經偏振光束且調製所述經偏振光束的偏振狀態。偏振分光器接著阻隔來自矽上液晶面板的經偏振光束中具有一偏振方向的部分且允許經偏振光束中具有另一垂直偏振方向的另一部分行進到投影鏡頭。當使非偏振光束偏振且所述光束通過偏振分光器時,矽上液晶投影機的光學效率顯著降低。對於常規 彩色濾光片矽上液晶投影機,其光學效率為約3%到4%。 In a conventional liquid-crystal-on-silicon (LCOS) projector, the unpolarized beam is polarized and the beam then travels to the upper liquid crystal panel. The upper liquid crystal panel reflects the polarized light beam and modulates the polarization state of the polarized light beam. The polarizing beam splitter then blocks a portion of the polarized beam from the upper liquid crystal panel that has a polarization direction and allows another portion of the polarized beam having another vertical polarization direction to travel to the projection lens. When the non-polarized beam is polarized and the beam passes through a polarizing beam splitter, the optical efficiency of the liquid crystal projector is significantly reduced. For routine The color filter is a liquid crystal projector with an optical efficiency of about 3% to 4%.

本發明提供一種具有較高光學效率的投影裝置。 The present invention provides a projection apparatus having higher optical efficiency.

本發明提供一種偏振光柵的製造方法,其可製造具有優良品質的偏振光柵。 The present invention provides a method of manufacturing a polarization grating which can produce a polarization grating having excellent quality.

根據本發明的實施例,提供一種投影裝置,包含光源、反射式空間偏振調製器、偏振光柵和投影鏡頭。光源用以提供光束。反射式空間偏振調製器設置在光束的路徑上且用以反射光束且調製光束的偏振狀態。偏振光柵設置在光源與反射式空間偏振調製器之間的光束的路徑上,其中反射式空間偏振調製器將來自偏振光柵的光束反射回偏振光柵。投影鏡頭設置在來自反射式空間偏振調製器的光束的路徑上,其中偏振光柵設置在反射式空間偏振調製器與投影鏡頭之間的光束的路徑上。 In accordance with an embodiment of the present invention, a projection apparatus is provided that includes a light source, a reflective spatial polarization modulator, a polarization grating, and a projection lens. The light source is used to provide a light beam. A reflective spatial polarization modulator is disposed on the path of the beam and is used to reflect the beam and modulate the polarization state of the beam. A polarization grating is disposed on the path of the beam between the source and the reflective spatial polarization modulator, wherein the reflective spatial polarization modulator reflects the beam from the polarization grating back to the polarization grating. The projection lens is disposed on the path of the light beam from the reflective spatial polarization modulator, wherein the polarization grating is disposed on the path of the light beam between the reflective spatial polarization modulator and the projection lens.

根據本發明的實施例,提供一種偏振光柵的製造方法。此方法包含:提供偏振敏感材料;以及使兩束偏振態彼此正交的光掃描偏振敏感材料且在偏振敏感材料上會合。 According to an embodiment of the present invention, a method of fabricating a polarization grating is provided. The method includes: providing a polarization-sensitive material; and scanning the polarization-sensitive material with light that orthogonalizes the two polarization states to each other and on the polarization-sensitive material.

鑒於上述內容,根據本發明的實施例的投影裝置採用偏振光柵來繞射來自光源的光束,且被傳送到投影鏡頭的光能可集中於具有某一繞射階的光束上。因此,投影裝置的光學效率為優良的,以使得投影裝置可提供具有高亮度的影像畫面。另外,在偏振光柵的製造方法中,是通過光來處理偏振敏感材料,而不是 通過使偏振敏感材料與配向層接觸來處理偏振敏感材料。因此,可防止與配向層的接觸問題。因此,偏振光柵的製造方法為簡單的且可製造具有優良品質的偏振光柵。 In view of the above, a projection apparatus according to an embodiment of the present invention employs a polarization grating to diffract a light beam from a light source, and light energy transmitted to the projection lens can be concentrated on a light beam having a certain diffraction order. Therefore, the optical efficiency of the projection device is excellent, so that the projection device can provide an image picture with high brightness. In addition, in the manufacturing method of the polarization grating, the polarization-sensitive material is processed by light instead of The polarization sensitive material is processed by contacting the polarization sensitive material with an alignment layer. Therefore, the problem of contact with the alignment layer can be prevented. Therefore, the manufacturing method of the polarization grating is simple and a polarizing grating having excellent quality can be manufactured.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。 The above described features and advantages of the invention will be apparent from the following description.

50‧‧‧偏振敏感材料 50‧‧‧Polarization sensitive materials

60‧‧‧原始光 60‧‧‧Original light

62‧‧‧偏振態彼此正交的光 62‧‧‧Lights whose polarization states are orthogonal to each other

64‧‧‧偏振態彼此正交的光 64‧‧‧Lights whose polarization states are orthogonal to each other

70‧‧‧雷射源 70‧‧‧Laser source

80‧‧‧偏振分光器 80‧‧‧Polarizing beam splitter

92‧‧‧掃描鏡 92‧‧‧Scan mirror

94‧‧‧掃描鏡 94‧‧‧Scan mirror

100‧‧‧投影裝置 100‧‧‧Projection device

100b‧‧‧投影裝置 100b‧‧‧projector

105‧‧‧屏幕 105‧‧‧ screen

110‧‧‧光源 110‧‧‧Light source

112‧‧‧光束 112‧‧‧ Beam

120‧‧‧反射式空間偏振調製器 120‧‧‧Reflective spatial polarization modulator

130‧‧‧偏振光柵 130‧‧‧Polarization grating

130a‧‧‧偏振光柵 130a‧‧‧Density grating

131‧‧‧慢軸 131‧‧‧ slow axis

132‧‧‧第一相位延遲條 132‧‧‧First phase delay strip

133‧‧‧慢軸 133‧‧‧ slow axis

134‧‧‧第二相位延遲條 134‧‧‧Second phase delay strip

135a‧‧‧慢軸 135a‧‧‧ slow axis

140‧‧‧投影鏡頭 140‧‧‧Projection lens

150‧‧‧全內反射稜鏡 150‧‧‧ Total internal reflection稜鏡

150c‧‧‧反射器 150c‧‧‧ reflector

152‧‧‧稜鏡 152‧‧‧稜鏡

154‧‧‧稜鏡 154‧‧‧稜鏡

156‧‧‧全內反射表面 156‧‧‧ Total internal reflection surface

160‧‧‧光遮罩件 160‧‧‧Light cover parts

170‧‧‧透鏡 170‧‧‧ lens

210‧‧‧矽基板 210‧‧‧矽 substrate

212‧‧‧電晶體 212‧‧‧Optoelectronics

222‧‧‧畫素電極 222‧‧‧ pixel electrodes

240‧‧‧配向層 240‧‧‧Alignment layer

250‧‧‧液晶層 250‧‧‧Liquid layer

260‧‧‧配向層 260‧‧‧Alignment layer

270‧‧‧透明導電層 270‧‧‧Transparent conductive layer

280‧‧‧彩色濾光片陣列 280‧‧‧Color Filter Array

282‧‧‧紅色濾光片 282‧‧‧Red filter

284‧‧‧綠色濾光片 284‧‧‧Green Filter

286‧‧‧藍色濾光片 286‧‧‧Blue filter

290‧‧‧透明基板 290‧‧‧Transparent substrate

D1‧‧‧第一方向 D1‧‧‧ first direction

D2‧‧‧第二方向 D2‧‧‧ second direction

D3‧‧‧第三方向 D3‧‧‧ third direction

L‧‧‧入射位置 L‧‧‧Injection position

P0‧‧‧偏振方向 P0‧‧‧polarization direction

P1‧‧‧偏振方向 P1‧‧‧polarization direction

P2‧‧‧偏振方向 P2‧‧‧polarization direction

S1‧‧‧第一側繞射子光束 S1‧‧‧ first side diffracted beam

S2‧‧‧第二側繞射子光束 S2‧‧‧second side diffracted beam

SC‧‧‧中央繞射子光束 SC‧‧‧Central diffracted beam

φ‧‧‧夾角 Φ‧‧‧ angle

圖1A為根據本發明的實施例的投影裝置的示意圖。 FIG. 1A is a schematic diagram of a projection apparatus in accordance with an embodiment of the present invention.

圖1B為圖1A中的反射式空間偏振調製器的示意性橫截面圖。 1B is a schematic cross-sectional view of the reflective spatial polarization modulator of FIG. 1A.

圖1C為圖1A中的偏振光柵的示意性俯視圖。 1C is a schematic plan view of the polarization grating of FIG. 1A.

圖2為根據本發明的另一實施例的偏振光柵的示意性俯視圖。 2 is a schematic top plan view of a polarization grating in accordance with another embodiment of the present invention.

圖3為根據本發明的另一實施例的投影裝置的示意圖。 3 is a schematic diagram of a projection apparatus in accordance with another embodiment of the present invention.

圖4A為說明偏振光柵的製造方法的示意圖。 4A is a schematic view illustrating a method of manufacturing a polarization grating.

圖4B為展示圖4A中的光照射於圖4A中的偏振敏感材料上的座標和位置的示意圖。 Figure 4B is a schematic diagram showing the coordinates and position of the light of Figure 4A illuminated on the polarization sensitive material of Figure 4A.

圖4C為展示當圖4A中的兩束光在圖4A中的偏振敏感材料上會合時所述兩束光的組合偏振狀態的示意圖。 4C is a schematic diagram showing the combined polarization states of the two beams of light when the two beams of FIG. 4A meet on the polarization sensitive material of FIG. 4A.

圖5A和圖5B分別為本發明的另一實施例中的圖4B和圖4C的其他變體。 5A and 5B are other variants of Figs. 4B and 4C, respectively, in another embodiment of the present invention.

圖1A為根據本發明的實施例的投影裝置的示意圖;圖1B為圖1A中的反射式空間偏振調製器的示意性橫截面圖;且圖1C為圖1A中的偏振光柵的示意性俯視圖。參看圖1A到圖1C,此實施例中的投影裝置100包含光源110、反射式空間偏振調製器120、偏振光柵130和投影鏡頭140。光源110用以提供光束112。在此實施例中,光束112為白色光束,且光源110包含至少一個發射白色光束的白光發光二極體(light-emitting diode,LED)。然而,在其他實施例中,光源110可為發射白色光束的超高壓(ultra-high-pressure,UHP)燈。或者,光束112可包含多個不同顏色的子光束,且這些不同顏色混合以形成白色。舉例來說,光束112可包含紅色、綠色和藍色子光束,且此三種子光束混合以形成白色光束。此外,光源110可包含多個不同顏色的LED,且不同顏色的子光束可分別從不同顏色的LED發射。在一個實施例中,不同顏色的子光束同時從光源110發射。然而,在另一實施例中,不同顏色的子光束輪流從光源110發射。在另一實施例中,光源110可包含至少一個雷射發射器,例如,至少一個雷射二極體。 1A is a schematic diagram of a projection apparatus in accordance with an embodiment of the present invention; FIG. 1B is a schematic cross-sectional view of the reflective spatial polarization modulator of FIG. 1A; and FIG. 1C is a schematic top view of the polarization grating of FIG. 1A. Referring to FIGS. 1A through 1C, the projection apparatus 100 in this embodiment includes a light source 110, a reflective spatial polarization modulator 120, a polarization grating 130, and a projection lens 140. Light source 110 is used to provide beam 112. In this embodiment, the beam 112 is a white beam, and the source 110 includes at least one white-light emitting diode (LED) that emits a white beam. However, in other embodiments, light source 110 can be an ultra-high-pressure (UHP) lamp that emits a white light beam. Alternatively, beam 112 may comprise a plurality of sub-beams of different colors, and these different colors are mixed to form a white color. For example, beam 112 can include red, green, and blue sub-beams, and the three sub-beams mix to form a white beam. In addition, light source 110 can include a plurality of LEDs of different colors, and sub-beams of different colors can be emitted from LEDs of different colors, respectively. In one embodiment, sub-beams of different colors are simultaneously emitted from light source 110. However, in another embodiment, sub-beams of different colors are alternately emitted from the light source 110. In another embodiment, light source 110 can include at least one laser emitter, such as at least one laser diode.

反射式空間偏振調製器120設置在光束112的路徑上且用以反射光束112且調製光束112的偏振狀態。反射式空間偏振調製器120可為矽上液晶(LCOS)面板。在此實施例中,反射式 空間偏振調製器120為彩色濾光片矽上液晶面板。具體地說,在此實施例中,彩色濾光片矽上液晶面板包含矽基板210、多個畫素電極222、絕緣層230、配向層240、液晶層250、配向層260、透明導電層270、彩色濾光片陣列280和透明基板290。多個電晶體212陣列式地排列在矽基板210上。電晶體212可電耦接到矽基板210上的多條掃描線和多條資料線。畫素電極222分別電耦接到電晶體212且覆蓋電晶體212。畫素電極222由金屬(例如,鋁)製成。絕緣層230分離畫素電極222。配向層240覆蓋畫素電極222。彩色濾光片陣列280設置在透明基板290上。透明基板290可由玻璃或任何其他適當的透明材料製成。彩色濾光片陣列280包含具有不同顏色的多個彩色濾光片。舉例來說,彩色濾光片陣列280包含排成陣列的多個紅色濾光片282、多個綠色濾光片284和多個藍色濾光片286。透明導電層270覆蓋彩色濾光片陣列280,且配向層260覆蓋透明導電層270。透明導電層270例如由氧化銦錫(indium tin oxide,ITO)製成。液晶層250填充在配向層240與配向層260之間。 A reflective spatial polarization modulator 120 is disposed on the path of the beam 112 and is used to reflect the beam 112 and modulate the polarization state of the beam 112. The reflective spatial polarization modulator 120 can be a liquid crystal on the surface (LCOS) panel. In this embodiment, reflective The spatial polarization modulator 120 is a color filter and a liquid crystal panel. Specifically, in this embodiment, the color filter on-chip liquid crystal panel includes a germanium substrate 210, a plurality of pixel electrodes 222, an insulating layer 230, an alignment layer 240, a liquid crystal layer 250, an alignment layer 260, and a transparent conductive layer 270. The color filter array 280 and the transparent substrate 290. A plurality of transistors 212 are arrayed on the ruthenium substrate 210. The transistor 212 can be electrically coupled to a plurality of scan lines and a plurality of data lines on the germanium substrate 210. The pixel electrodes 222 are electrically coupled to the transistor 212 and cover the transistor 212, respectively. The pixel electrode 222 is made of a metal such as aluminum. The insulating layer 230 separates the pixel electrode 222. The alignment layer 240 covers the pixel electrode 222. The color filter array 280 is disposed on the transparent substrate 290. The transparent substrate 290 can be made of glass or any other suitable transparent material. The color filter array 280 includes a plurality of color filters having different colors. For example, color filter array 280 includes a plurality of red filters 282, a plurality of green filters 284, and a plurality of blue filters 286 arranged in an array. The transparent conductive layer 270 covers the color filter array 280, and the alignment layer 260 covers the transparent conductive layer 270. The transparent conductive layer 270 is made of, for example, indium tin oxide (ITO). The liquid crystal layer 250 is filled between the alignment layer 240 and the alignment layer 260.

在此實施例中,彩色濾光片陣列280設置在配向層260與透明基板290之間,但本發明不限於此。在其他實施例中,彩色濾光片陣列280設置在畫素電極222與配向層240之間或可設置在任何其他適當位置。 In this embodiment, the color filter array 280 is disposed between the alignment layer 260 and the transparent substrate 290, but the invention is not limited thereto. In other embodiments, color filter array 280 is disposed between pixel electrode 222 and alignment layer 240 or may be disposed at any other suitable location.

在另一實施例中,可不採用彩色濾光片陣列280;即,在透明導電層270與透明基板290之間不存在彩色濾光片陣列280。 In another embodiment, the color filter array 280 may not be employed; that is, there is no color filter array 280 between the transparent conductive layer 270 and the transparent substrate 290.

偏振光柵130設置在光源110與反射式空間偏振調製器120之間的光束112的路徑上,且反射式空間偏振調製器120將來自偏振光柵130的光束112反射回偏振光柵130。投影鏡頭140設置在來自反射式空間偏振調製器120的光束112的路徑上,且偏振光柵130設置在反射式空間偏振調製器120與投影鏡頭140之間的光束112的路徑上。來自偏振光柵130的光束112依序通過透明基板290、彩色濾光片陣列280、透明導電層270、配向層260、液晶層250和配向層240以到達畫素電極222。光束112接著被畫素電極222反射且接著依序通過配向層240、液晶層250、配向層260、透明導電層270、彩色濾光片陣列280和透明基板290以到達投影鏡頭140。 Polarization grating 130 is disposed on the path of beam 112 between source 110 and reflective spatial polarization modulator 120, and reflective spatial polarization modulator 120 reflects beam 112 from polarization grating 130 back to polarization grating 130. The projection lens 140 is disposed on the path of the light beam 112 from the reflective spatial polarization modulator 120, and the polarization grating 130 is disposed on the path of the light beam 112 between the reflective spatial polarization modulator 120 and the projection lens 140. The light beam 112 from the polarization grating 130 sequentially passes through the transparent substrate 290, the color filter array 280, the transparent conductive layer 270, the alignment layer 260, the liquid crystal layer 250, and the alignment layer 240 to reach the pixel electrode 222. The beam 112 is then reflected by the pixel electrode 222 and then sequentially passes through the alignment layer 240, the liquid crystal layer 250, the alignment layer 260, the transparent conductive layer 270, the color filter array 280, and the transparent substrate 290 to reach the projection lens 140.

在此實施例中,偏振光柵130包含在第一方向D1上交替排列的多個第一相位延遲條132和多個第二相位延遲條134。第一相位延遲條132中的每一者沿著第二方向D2延伸,且第二相位延遲條134中的每一者沿著第二方向D2延伸。在此實施例中,第一方向D1和第二方向D2垂直於第三方向D3,且第三方向D3平行於偏振光柵130的法線,且第一方向D1垂直於第二方向D2。第一相位延遲條132的慢軸131垂直於第二相位延遲條134的慢軸133。第一相位延遲條132的慢軸131和第二相位延遲條134的慢軸133可為第一相位延遲條132和第二相位延遲條134的特別軸(extraordinary axis),或可為第一相位延遲條132和第二相位延遲條134的普通軸(ordinarv axis)。在此實施例中,第一相位延 遲條132和第二相位延遲條134沿著第一方向D1週期性地排列佈置。 In this embodiment, the polarization grating 130 includes a plurality of first phase retardation strips 132 and a plurality of second phase retardation strips 134 that are alternately arranged in the first direction D1. Each of the first phase delay bars 132 extends along a second direction D2, and each of the second phase delay bars 134 extends along a second direction D2. In this embodiment, the first direction D1 and the second direction D2 are perpendicular to the third direction D3, and the third direction D3 is parallel to the normal of the polarization grating 130, and the first direction D1 is perpendicular to the second direction D2. The slow axis 131 of the first phase delay strip 132 is perpendicular to the slow axis 133 of the second phase delay strip 134. The slow axis 131 of the first phase delay bar 132 and the slow axis 133 of the second phase delay bar 134 may be an extraordinary axis of the first phase delay bar 132 and the second phase delay bar 134, or may be a first phase The ordinary axis (ordinarv axis) of the delay strip 132 and the second phase delay strip 134. In this embodiment, the first phase delay The delay strip 132 and the second phase delay strip 134 are periodically arranged along the first direction D1.

在此實施例中,從光源110發射的光束112在行進到偏振光柵130之前為非偏振光束。光束112通過偏振光柵130主要繞射為+1繞射階子光束和-1繞射階子光束。當偏振光柵130設計良好時,0繞射階子光束的強度遠小於+1繞射階子光束的強度且遠小於-1繞射階子光束的強度。因此,可忽略0繞射階子光束。 In this embodiment, the beam 112 emitted from the source 110 is an unpolarized beam before traveling to the polarization grating 130. The beam 112 is primarily diffracted by the polarization grating 130 into a +1 diffraction order sub-beam and a -1 diffraction order sub-beam. When the polarization grating 130 is well designed, the intensity of the 0-diffraction order sub-beam is much smaller than the intensity of the +1 diffraction-order sub-beam and much less than the intensity of the -1 diffraction-order sub-beam. Therefore, the zero-order sub-beam can be ignored.

首先如下描述光束112垂直入射在偏振光柵130上的狀況。+1繞射階子光束可為順時針圓偏振子光束且具有相對於偏振光柵130的法線的繞射角+θ。-1繞射階子光束可為逆時針圓偏振子光束且具有相對於偏振光柵130的法線的繞射角-θ。當反射式空間偏振調製器120的任何畫素處於類似於鏡面加透明層的狀態(即,0波長相位延遲器)時,+1繞射階子光束由畫素沿著相對於偏振光柵130的法線傾斜達角度+θ的方向反射且維持順時針圓偏振。接著,+1繞射階子光束由偏振光柵130沿著相對於偏振光柵130的法線傾斜達角度+2 θ的方向繞射且維持順時針圓偏振,且在下文中被稱作“第一側繞射子光束S1”。此外,-1繞射階子光束由畫素沿著相對於偏振光柵130的法線傾斜達角度-θ的方向反射且維持逆時針圓偏振。接著,-1繞射階子光束由偏振光柵130沿著相對於偏振光柵130的法線傾斜達角度-2 θ的方向繞射且維持逆時針圓偏振,且在下文中被稱作“第二側繞射子光束S2”。另一方面,當反射式空間偏振調製器120的任何畫素處於 類似於鏡面加四分之一波片的狀態時,+1繞射階子光束由畫素沿著相對於偏振光柵130的法線傾斜達角度+θ的方向反射且具有改變為逆時針圓偏振的偏振狀態,且-1繞射階子光束由畫素沿著相對於偏振光柵130的法線傾斜達角度-θ的方向反射且具有改變為順時針圓偏振的偏振狀態。接著,+1繞射階子光束和-1繞射階子光束由偏振光柵130沿著偏振的法線繞射,且組合成中央繞射子光束SC。 First, the condition in which the light beam 112 is perpendicularly incident on the polarization grating 130 will be described as follows. The +1 diffraction order sub-beam may be a clockwise circularly polarized sub-beam and have a diffraction angle + θ with respect to the normal to the polarization grating 130. The -1 diffraction step sub-beam may be a counterclockwise circularly polarized sub-beam and have a diffraction angle -θ with respect to the normal to the polarization grating 130. When any pixel of the reflective spatial polarization modulator 120 is in a state similar to a mirror plus transparent layer (ie, a 0 wavelength phase retarder), the +1 diffraction order sub-beam is pixel-wise along the polarization grating 130 The normal is tilted in the direction of the angle + θ and maintains a clockwise circular polarization. Next, the +1 diffraction step sub-beam is diffracted by the polarization grating 130 in a direction inclined by an angle +2 θ with respect to the normal to the polarization grating 130 and maintains a clockwise circular polarization, and is hereinafter referred to as "the first side". The sub-beam S1" is diffracted. In addition, the -1 diffraction-order sub-beam is reflected by the pixel in a direction inclined by an angle -θ with respect to the normal line of the polarization grating 130 and maintains a counterclockwise circular polarization. Next, the -1 diffraction order sub-beam is diffracted by the polarization grating 130 in a direction inclined by an angle -2 θ with respect to the normal to the polarization grating 130 and maintained counterclockwise circularly polarized, and is hereinafter referred to as "the second side" The sub-beam S2" is diffracted. On the other hand, when any pixel of the reflective spatial polarization modulator 120 is at Similar to the state of the mirror plus quarter wave plate, the +1 diffraction order sub-beam is reflected by the pixel in a direction inclined by an angle +θ with respect to the normal line of the polarization grating 130 and has a change to a counterclockwise circular polarization. The polarization state, and the -1 diffraction order sub-beam is reflected by the pixel in a direction inclined by an angle -θ with respect to the normal to the polarization grating 130 and has a polarization state changed to a clockwise circular polarization. Next, the +1 diffraction order sub-beam and the -1 diffraction order sub-beam are diffracted by the polarization grating 130 along the normal of the polarization and combined into a central diffracted beam SC.

在此實施例中,光束112傾斜地入射在偏振光柵130上,以使得第一側繞射子光束S1、第二側繞射子光束S2和中央繞射子光束SC分別相對於上述狀況中的第一側繞射子光束S1、第二側繞射子光束S2和中央繞射子光束SC傾斜。此外,在此實施例中,中央繞射子光束SC充當影像光束且進入投影鏡頭140,但第一側繞射子光束S1和第二側繞射子光束S2不行進到投影鏡頭140。投影鏡頭140將中央繞射子光束SC(即,影像光束)投影到屏幕上以在所述屏幕上形成影像畫面。 In this embodiment, the light beam 112 is obliquely incident on the polarization grating 130 such that the first side diffracted beam S1, the second side diffracted beam S2, and the central diffracted sub-beam SC are respectively relative to the first of the above conditions. The one side diffracted sub-beam S1, the second side diffracted sub-beam S2, and the central diffracted sub-beam S are tilted. Further, in this embodiment, the central diffracted sub-beam SC acts as an image beam and enters the projection lens 140, but the first side diffracted sub-beam S1 and the second side sub-sub-beam S2 do not travel to the projection lens 140. Projection lens 140 projects a central diffracted sub-beam SC (i.e., image beam) onto a screen to form an image frame on the screen.

在此實施例中,投影裝置100更包含全內反射(total internal reflection,TIR)稜鏡150,其設置在光源110與偏振光柵130之間的光束112的路徑上和偏振光柵130與投影鏡頭140之間的光束112的路徑上。全內反射稜鏡150可包含兩個稜鏡152和154。稜鏡152倚靠著稜鏡154且具有面向稜鏡154的全內反射表面(TIR表面)156。TIR表面156使來自光源110的光束112全反射到偏振光柵130,且允許中央繞射子光束SC通過且接著行進 到投影鏡頭140。在此實施例中,投影裝置100可更包含至少一個透鏡170,其設置在稜鏡152與光源110之間的光束112的路徑上以聚集光束112。 In this embodiment, the projection apparatus 100 further includes a total internal reflection (TIR) 稜鏡 150 disposed on the path of the light beam 112 between the light source 110 and the polarization grating 130 and the polarization grating 130 and the projection lens 140. Between the paths of the beam 112. The total internal reflection 稜鏡150 can include two turns 152 and 154. The crucible 152 rests against the crucible 154 and has a total internal reflection surface (TIR surface) 156 facing the crucible 154. The TIR surface 156 totally reflects the beam 112 from the source 110 to the polarization grating 130 and allows the central diffract beam SC to pass and then travel To the projection lens 140. In this embodiment, the projection device 100 can further include at least one lens 170 disposed on the path of the light beam 112 between the crucible 152 and the light source 110 to concentrate the light beam 112.

在此實施例中,投影裝置100更包含光遮罩件160,其設置在從反射式空間偏振調製器120反射且由偏振光柵130繞射的光束112的路徑上。光遮罩件160用以阻隔具有部分繞射階的經繞射光束112(例如,第一側繞射子光束S1和第二側繞射子光束S2)行進到投影鏡頭140,且允許具有另一部分的繞射階的經繞射光束112(例如,中央繞射子光束SC)行進到投影鏡頭140。 In this embodiment, projection device 100 further includes a light mask 160 disposed on the path of beam 112 that is reflected from reflective spatial polarization modulator 120 and that is diffracted by polarization grating 130. The light masking member 160 is configured to block the diffracted beam 112 (eg, the first side divergence beam S1 and the second side divergence beam S2) having a partial diffraction order to travel to the projection lens 140, and allow another A portion of the diffracted diffracted beam 112 (eg, central diffracted beam SC) travels to projection lens 140.

在另一實施例中,也可不採用光遮罩件160,且投影鏡頭140具有擁有較小孔徑的孔徑光闌,以使得中央繞射子光束SC可通過投影鏡頭140,但第一側繞射子光束S1和第二側繞射子光束S2無法通過。或者,在另一實施例中,第一側繞射子光束S1可由TIR表面156全反射且因此無法行進到投影鏡頭140,且第二側繞射子光束S2與偏振光柵130的法線之間的夾角足夠大,以使得第二側繞射子光束S2偏離投影鏡頭140。 In another embodiment, the light mask member 160 may not be used, and the projection lens 140 has an aperture stop having a smaller aperture such that the central diffracted beam SC can pass through the projection lens 140, but the first side is diffracted. The sub-beam S1 and the second side diffracted beam S2 cannot pass. Alternatively, in another embodiment, the first side diffracted beam S1 may be totally reflected by the TIR surface 156 and thus cannot travel to the projection lens 140, and the second side of the diffracted beam S2 is between the normal to the polarization grating 130 The angle is sufficiently large that the second side diffracted beam S2 is offset from the projection lens 140.

在此實施例中,投影裝置100採用偏振光柵130來繞射來自光源110的光束112,且被傳送到投影鏡頭140的光能可集中於具有某一繞射階的光束112(例如,中央繞射子光束)上。因此,可不採用降低光學效率的偏振分光器(polarizing beam splitter,PBS)。因此,投影裝置100的光學效率為優良的,以使得投影裝置100可提供具有高亮度的影像畫面。 In this embodiment, the projection device 100 employs a polarization grating 130 to circulate the light beam 112 from the light source 110, and the light energy transmitted to the projection lens 140 can be concentrated on the light beam 112 having a certain diffraction order (eg, central winding) On the beam of the beam). Therefore, a polarizing beam splitter (PBS) that reduces optical efficiency may not be employed. Therefore, the optical efficiency of the projection apparatus 100 is excellent, so that the projection apparatus 100 can provide an image picture with high brightness.

圖2為根據本發明的另一實施例的偏振光柵的示意性俯視圖。參看圖2,此實施例中的偏振光柵130a可替代圖1A中的偏振光柵130來形成投影裝置的另一實施例。在此實施例中,偏振光柵130具有慢軸135a,其沿著第一方向D1週期性地旋轉地變化,且沿著第二方向D2不變化。 2 is a schematic top plan view of a polarization grating in accordance with another embodiment of the present invention. Referring to Fig. 2, a polarization grating 130a in this embodiment can be substituted for the polarization grating 130 of Fig. 1A to form another embodiment of the projection device. In this embodiment, the polarization grating 130 has a slow axis 135a that periodically changes rotationally along the first direction D1 and does not change along the second direction D2.

圖3為根據本發明的另一實施例的投影裝置的示意圖。參看圖3,此實施例中的投影裝置100b類似於圖1A中的投影裝置100,且兩者之間的差異如下。在投影裝置100b中,採用反射器150c以替代全內反射稜鏡150。反射器150c設置在光源110與偏振光柵130之間的光束112的路徑上。反射器150c阻隔具有部分繞射階的經繞射光束112(例如,中央繞射子光束SC)行進到投影鏡頭140。在此實施例中,反射器150c反射中央繞射子光束SC,以便使中央繞射子光束SC不行進到投影鏡頭140。此外,反射器150c允許具有另一部分的繞射階的經繞射光束112(例如,第一側繞射子光束S1和第二側繞射子光束S2)行進到投影鏡頭140。這是因為來自偏振光柵130的第一側繞射子光束S1和第二側繞射子光束S2不被反射器150c阻隔。在此實施例中,反射器150c為鏡面。然而,在其他實施例中,反射器150c可為反射稜鏡。接著,第一側繞射子光束S1和第二側繞射子光束S2投影到屏幕105上。 3 is a schematic diagram of a projection apparatus in accordance with another embodiment of the present invention. Referring to Fig. 3, the projection apparatus 100b in this embodiment is similar to the projection apparatus 100 in Fig. 1A, and the difference between the two is as follows. In the projection device 100b, a reflector 150c is employed instead of the total internal reflection cymbal 150. The reflector 150c is disposed on the path of the light beam 112 between the light source 110 and the polarization grating 130. The reflector 150c blocks the diffracted beam 112 (eg, the central diffracted beam SC) having a partial diffraction order to travel to the projection lens 140. In this embodiment, the reflector 150c reflects the central diffracted beam SC such that the central diffracted beam SC does not travel to the projection lens 140. Furthermore, the reflector 150c allows the diffracted beam 112 (eg, the first side divergence beam S1 and the second side divergence beam S2) having another portion of the diffraction order to travel to the projection lens 140. This is because the first side diffracted beam S1 and the second side diffracted beam S2 from the polarization grating 130 are not blocked by the reflector 150c. In this embodiment, the reflector 150c is mirrored. However, in other embodiments, the reflector 150c can be a reflective ridge. Next, the first side diffracted beam S1 and the second side diffracted beam S2 are projected onto the screen 105.

圖4A為說明偏振光柵的製造方法的示意圖,圖4B為展示圖4A中的光照射於圖4A中的偏振敏感材料上的座標和位置的 示意圖,且圖4C為展示當圖4A中的兩束光在圖4A中的偏振敏感材料上會合時所述兩束光的組合偏振狀態的示意圖。參看圖4A到圖4C,此實施例中的偏振光柵的製造方法可用以製造上述偏振光柵130。所述製造方法包含提供偏振敏感材料50。在此實施例中,偏振敏感材料50為液晶材料。接著,製造方法包含使兩束偏振態彼此正交的光62和64掃描偏振敏感材料50且在偏振敏感材料50上會合。 4A is a schematic view illustrating a method of fabricating a polarization grating, and FIG. 4B is a view showing coordinates and positions of light in FIG. 4A irradiated on the polarization sensitive material of FIG. 4A. Schematic, and Figure 4C is a schematic diagram showing the combined polarization states of the two beams of light when the two beams of Figure 4A meet on the polarization sensitive material of Figure 4A. Referring to Figures 4A through 4C, a method of fabricating a polarization grating in this embodiment can be used to fabricate the above-described polarization grating 130. The method of fabrication includes providing a polarization sensitive material 50. In this embodiment, the polarization sensitive material 50 is a liquid crystal material. Next, the fabrication method includes scanning the polarization sensitive material 50 with light 62 and 64 that orthogonalize the two polarization states to each other and on the polarization sensitive material 50.

在此實施例中,所述製造方法更包含發射原始光60且將原始光60分裂為兩束偏振態彼此正交的光62和64。原始光60例如為雷射光。在此實施例中,雷射源70可用以發射原始光60。此外,在此實施例中,偏振分光器(PBS)80設置在原始光60的路徑上以將原始光60分裂為兩束偏振態彼此正交的光62和64。在此實施例中,原始光60、光62和光64為線性偏振光。光62的偏振方向P1垂直於光64的偏振方向P2。原始光60的偏振方向P0和光62的偏振方向P1形成45°的夾角。原始光60的偏振方向P0和光64的偏振方向P2形成45°的夾角。採用兩個掃描鏡92和94以分別反射兩束光62和64,以便使兩束光62和64在偏振敏感材料50上會合。在此實施例中,夾角φ形成在兩束偏振態彼此正交的光62和64之間且在入射在偏振敏感材料50上的兩束偏振態彼此正交的光62和64的入射位置L處。 In this embodiment, the method of fabrication further includes emitting the original light 60 and splitting the original light 60 into light 62 and 64 that are orthogonal to each other in two polarization states. The original light 60 is, for example, laser light. In this embodiment, laser source 70 can be used to emit raw light 60. Moreover, in this embodiment, a polarizing beam splitter (PBS) 80 is disposed on the path of the original light 60 to split the original light 60 into light 62 and 64 whose two polarization states are orthogonal to each other. In this embodiment, the original light 60, light 62, and light 64 are linearly polarized light. The polarization direction P1 of the light 62 is perpendicular to the polarization direction P2 of the light 64. The polarization direction P0 of the original light 60 and the polarization direction P1 of the light 62 form an angle of 45°. The polarization direction P0 of the original light 60 and the polarization direction P2 of the light 64 form an angle of 45°. Two scanning mirrors 92 and 94 are employed to reflect the two beams 62 and 64, respectively, such that the two beams 62 and 64 meet on the polarization sensitive material 50. In this embodiment, the angle φ is formed between the lights 62 and 64 of the two polarization states orthogonal to each other and the incident positions L of the lights 62 and 64 orthogonal to each other on the polarization sensitive material 50. At the office.

當兩個掃描鏡92和94旋轉時,兩束光62和64沿著一方向(例如,x方向)掃描偏振敏感材料50。此時,兩束光62和 64之間的光程長度(optical path length)的差改變,以使得偏振敏感材料50上的兩束光62和64的組合偏振狀態改變。在圖4C中,兩束光62和64的組合偏振狀態沿著x方向變化。偏振敏感材料50的液晶分子的特別軸旋轉到垂直於組合偏振方向的方向。因此,偏振敏感材料50的慢軸沿著x方向週期性地改變但沿著y方向不改變。在兩束光62和64掃描偏振敏感材料50之後,偏振敏感材料50被固化以形成圖1C中的偏振光柵130,其中圖4A中的x方向對應於圖1C中的第一方向D1,圖4A中的y方向對應於圖1C中的第二方向D2,且z方向垂直於x方向和y方向。在圖4C中,在兩個鄰近的正交線性偏振狀態之間存在圓偏振狀態和橢圓偏振狀態,以使得鄰近的第一相位延遲條132與第二相位延遲條134之間的邊界實際上模糊。 When the two scanning mirrors 92 and 94 are rotated, the two beams 62 and 64 scan the polarization sensitive material 50 in one direction (e.g., the x direction). At this point, two beams of light 62 and The difference in optical path length between 64 changes such that the combined polarization states of the two beams 62 and 64 on the polarization sensitive material 50 change. In Figure 4C, the combined polarization states of the two beams 62 and 64 vary along the x-direction. The particular axis of the liquid crystal molecules of the polarization sensitive material 50 is rotated to a direction perpendicular to the combined polarization direction. Therefore, the slow axis of the polarization sensitive material 50 periodically changes along the x direction but does not change along the y direction. After the two beams 62 and 64 scan the polarization sensitive material 50, the polarization sensitive material 50 is cured to form the polarization grating 130 of FIG. 1C, wherein the x direction in FIG. 4A corresponds to the first direction D1 in FIG. 1C, FIG. 4A The y direction in the middle corresponds to the second direction D2 in FIG. 1C, and the z direction is perpendicular to the x direction and the y direction. In FIG. 4C, there is a circular polarization state and an elliptical polarization state between two adjacent orthogonal linear polarization states such that the boundary between the adjacent first phase delay bar 132 and the second phase delay bar 134 is substantially blurred. .

在另一實施例中,參看圖5A和圖5B,兩個四分之一波片可分別設置在PBS 80與偏振敏感材料50之間的光62和64的路徑上,以使得兩束正交圓偏振光在偏振敏感材料50上會合。舉例來說,光62在到達偏振敏感材料50之前被轉換成逆時針圓偏振光,且光64在到達偏振敏感材料50之前被轉換成順時針圓偏振光。在此狀況下,當光62和64掃描偏振敏感材料50時,光62和64的組合偏振狀態始終為線性的,且組合偏振狀態的線性偏振方向沿著x方向週期性地旋轉地變化且沿著y方向不變化。因此,在對偏振敏感材料50進行掃描及固化之後,形成偏振光柵130a。在又一實施例中,光62和64可為兩束正交橢圓偏振光。 In another embodiment, referring to Figures 5A and 5B, two quarter-wave plates may be disposed on the paths of light 62 and 64 between PBS 80 and polarization sensitive material 50, respectively, such that the two beams are orthogonal. The circularly polarized light meets on the polarization sensitive material 50. For example, light 62 is converted to counterclockwise circularly polarized light before reaching polarization sensitive material 50, and light 64 is converted to clockwise circularly polarized light before reaching polarization sensitive material 50. In this case, when the lights 62 and 64 scan the polarization sensitive material 50, the combined polarization states of the lights 62 and 64 are always linear, and the linear polarization direction of the combined polarization state periodically varies rotationally along the x direction and along The y direction does not change. Therefore, after the polarization sensitive material 50 is scanned and cured, the polarization grating 130a is formed. In yet another embodiment, lights 62 and 64 can be two beams of orthogonal elliptically polarized light.

在此實施例中的偏振光柵的製造方法中,是通過光來處理偏振敏感材料50,而不是通過使偏振敏感材料與配向層接觸來處理偏振敏感材料50。因此,可防止與配向層接觸的問題(例如,污染)。因此,偏振光柵的製造方法為簡單的且可製造具有優良品質的偏振光柵。此外,光62和64的光程長度易於調整,因此可自由地設計偏振光柵的空間週期。此外,偏振光柵的空間週期可小於常規光刻(photolithography)可實現的空間週期。也就是說,偏振光柵的製造方法可製造具有較小空間週期的偏振光柵。 In the method of fabricating the polarization grating in this embodiment, the polarization sensitive material 50 is processed by light, rather than by contacting the polarization sensitive material with the alignment layer. Therefore, problems of contact with the alignment layer (for example, contamination) can be prevented. Therefore, the manufacturing method of the polarization grating is simple and a polarizing grating having excellent quality can be manufactured. Furthermore, the optical path lengths of the lights 62 and 64 are easily adjusted, so that the spatial period of the polarization grating can be freely designed. Furthermore, the spatial period of the polarization grating can be smaller than the space period achievable by conventional photolithography. That is to say, the manufacturing method of the polarization grating can produce a polarization grating having a small spatial period.

總之,根據本發明的實施例的投影裝置採用偏振光柵來繞射來自光源的光束,且被傳送到投影鏡頭的光能可集中於具有某一繞射階的光束上。因此,投影裝置的光學效率為優良的,以使得投影裝置可提供具有高亮度的影像畫面。另外,在偏振光柵的製造方法中,是通過光來處理偏振敏感材料,而不是通過使偏振敏感材料與配向層接觸來處理偏振敏感材料。因此,可防止與配向層的接觸問題。因此,偏振光柵的製造方法為簡單的且可製造具有優良品質的偏振光柵。 In summary, a projection apparatus according to an embodiment of the present invention employs a polarization grating to diffract a light beam from a light source, and light energy transmitted to the projection lens can be concentrated on a light beam having a certain diffraction order. Therefore, the optical efficiency of the projection device is excellent, so that the projection device can provide an image picture with high brightness. In addition, in the method of fabricating a polarizing grating, the polarization-sensitive material is processed by light, rather than by contacting the polarization-sensitive material with the alignment layer. Therefore, the problem of contact with the alignment layer can be prevented. Therefore, the manufacturing method of the polarization grating is simple and a polarizing grating having excellent quality can be manufactured.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

100‧‧‧投影裝置 100‧‧‧Projection device

110‧‧‧光源 110‧‧‧Light source

112‧‧‧光束 112‧‧‧ Beam

120‧‧‧反射式空間偏振調製器 120‧‧‧Reflective spatial polarization modulator

130‧‧‧偏振光柵 130‧‧‧Polarization grating

132‧‧‧第一相位延遲條 132‧‧‧First phase delay strip

134‧‧‧第二相位延遲條 134‧‧‧Second phase delay strip

140‧‧‧投影鏡頭 140‧‧‧Projection lens

150‧‧‧全內反射稜鏡 150‧‧‧ Total internal reflection稜鏡

152‧‧‧稜鏡 152‧‧‧稜鏡

154‧‧‧稜鏡 154‧‧‧稜鏡

156‧‧‧全內反射表面 156‧‧‧ Total internal reflection surface

160‧‧‧光遮罩件 160‧‧‧Light cover parts

170‧‧‧透鏡 170‧‧‧ lens

D1‧‧‧第一方向 D1‧‧‧ first direction

D2‧‧‧第二方向 D2‧‧‧ second direction

D3‧‧‧第三方向 D3‧‧‧ third direction

S1‧‧‧第一側繞射子光束 S1‧‧‧ first side diffracted beam

S2‧‧‧第二側繞射子光束 S2‧‧‧second side diffracted beam

SC‧‧‧中央繞射子光束 SC‧‧‧Central diffracted beam

Claims (13)

一種投影裝置,包括:光源,用以提供光束;反射式空間偏振調製器,設置在所述光束的路徑上,用以反射所述光束,且調製所述光束的偏振狀態;偏振光柵,設置在所述光源與所述反射式空間偏振調製器之間的所述光束的所述路徑上,其中所述反射式空間偏振調製器將來自所述偏振光柵的所述光束反射回所述偏振光柵;以及投影鏡頭,設置在來自所述反射式空間偏振調製器的所述光束的所述路徑上,其中所述偏振光柵設置在所述反射式空間偏振調製器與所述投影鏡頭之間的所述光束的所述路徑上,其中,所述光束被所述偏振光柵繞射為具有多個繞射階的經繞射光束。 A projection apparatus comprising: a light source for providing a light beam; a reflective spatial polarization modulator disposed on a path of the light beam for reflecting the light beam and modulating a polarization state of the light beam; and a polarization grating disposed at The path of the light beam between the light source and the reflective spatial polarization modulator, wherein the reflective spatial polarization modulator reflects the light beam from the polarization grating back to the polarization grating; And a projection lens disposed on the path of the light beam from the reflective spatial polarization modulator, wherein the polarization grating is disposed between the reflective spatial polarization modulator and the projection lens The path of the beam of light, wherein the beam is diffracted by the polarization grating into a diffracted beam having a plurality of diffraction orders. 如申請專利範圍第1項所述的投影裝置,其中所述反射式空間偏振調製器為矽上液晶面板。 The projection device of claim 1, wherein the reflective spatial polarization modulator is an upper liquid crystal panel. 如申請專利範圍第2項所述的投影裝置,其中所述矽上液晶面板為彩色濾光片矽上液晶面板。 The projection device of claim 2, wherein the liquid crystal panel is a color filter and a liquid crystal panel. 如申請專利範圍第3項所述的投影裝置,其中所述光束為白色光束。 The projection device of claim 3, wherein the light beam is a white light beam. 如申請專利範圍第3項所述的投影裝置,其中所述光束包括多個不同顏色的子光束,且所述不同顏色混合以形成白色。 The projection apparatus of claim 3, wherein the light beam comprises a plurality of sub-beams of different colors, and the different colors are mixed to form a white color. 如申請專利範圍第5項所述的投影裝置,其中所述不同 顏色的子光束同時從所述光源發射。 The projection device of claim 5, wherein the difference is The sub-beams of color are simultaneously emitted from the light source. 如申請專利範圍第5項所述的投影裝置,其中所述不同顏色的子光束輪流從所述光源發射。 The projection device of claim 5, wherein the sub-beams of different colors are alternately emitted from the light source. 如申請專利範圍第1項所述的投影裝置,更包括光遮罩件,所述光遮罩件設置在從所述反射式空間偏振調製器反射且經所述偏振光柵繞射的所述光束的所述路徑上,且所述光遮罩件用以阻隔具有部分繞射階的所述經繞射光束行進到所述投影鏡頭,且允許具有另一部分的繞射階的所述經繞射光束行進到所述投影鏡頭。 The projection device of claim 1, further comprising a light masking member disposed on the light beam reflected from the reflective spatial polarization modulator and diffracted by the polarization grating And on the path, the light mask is configured to block the diffracted beam having a partial diffraction order from traveling to the projection lens, and to allow the diffraction of the diffraction order having another portion The beam travels to the projection lens. 如申請專利範圍第1項所述的投影裝置,更包含全內反射稜鏡,所述全內反射稜鏡設置在所述光源與所述偏振光柵之間的所述光束的所述路徑上和所述偏振光柵與所述投影鏡頭之間的所述光束的所述路徑上。 The projection device of claim 1, further comprising a total internal reflection 稜鏡 disposed on the path of the light beam between the light source and the polarization grating The path of the light beam between the polarization grating and the projection lens. 如申請專利範圍第1項所述的投影裝置,更包括反射器,所述反射器設置在所述光源與所述偏振光柵之間的所述光束的所述路徑上,其中所述反射器阻隔具有部分繞射階的經所述偏振光柵繞射的所述光束行進到所述投影鏡頭,且允許具有另一部分的繞射階的所述經繞射光束行進到所述投影鏡頭。 The projection device of claim 1, further comprising a reflector disposed on the path of the light beam between the light source and the polarization grating, wherein the reflector blocks The light beam diffracted by the polarization grating having a partial diffraction order travels to the projection lens and allows the diffracted beam having another portion of the diffraction order to travel to the projection lens. 如申請專利範圍第1項所述的投影裝置,其中從所述光源發射的所述光束在行進到所述偏振光柵之前為非偏振光束。 The projection apparatus of claim 1, wherein the light beam emitted from the light source is an unpolarized light beam before traveling to the polarization grating. 如申請專利範圍第1項所述的投影裝置,其中所述偏振光柵包括在第一方向上交替排列的多個第一相位延遲條和多個第 二相位延遲條,所述第一相位延遲條中的每一者沿著第二方向延伸,所述第二相位延遲條中的每一者沿著所述第二方向延伸,且所述第一相位延遲條的慢軸垂直於所述第二相位延遲條的慢軸。 The projection apparatus of claim 1, wherein the polarization grating comprises a plurality of first phase retardation strips and a plurality of first alternating rows arranged in a first direction a two-phase delay strip, each of the first phase delay strips extending along a second direction, each of the second phase delay strips extending along the second direction, and the first The slow axis of the phase delay strip is perpendicular to the slow axis of the second phase delay strip. 如申請專利範圍第1項所述的投影裝置,其中所述偏振光柵具有沿著第一方向週期性地旋轉地變化且沿著第二方向不變化的慢軸。 The projection apparatus of claim 1, wherein the polarization grating has a slow axis that periodically rotates in a first direction and does not change along a second direction.
TW103108680A 2014-03-12 2014-03-12 Projection device and fabrication method of a polarization grating TWI546610B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW103108680A TWI546610B (en) 2014-03-12 2014-03-12 Projection device and fabrication method of a polarization grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103108680A TWI546610B (en) 2014-03-12 2014-03-12 Projection device and fabrication method of a polarization grating

Publications (2)

Publication Number Publication Date
TW201535037A TW201535037A (en) 2015-09-16
TWI546610B true TWI546610B (en) 2016-08-21

Family

ID=54695197

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103108680A TWI546610B (en) 2014-03-12 2014-03-12 Projection device and fabrication method of a polarization grating

Country Status (1)

Country Link
TW (1) TWI546610B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI744923B (en) * 2019-06-26 2021-11-01 英國商波動光學有限公司 Pupil relay system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI744923B (en) * 2019-06-26 2021-11-01 英國商波動光學有限公司 Pupil relay system

Also Published As

Publication number Publication date
TW201535037A (en) 2015-09-16

Similar Documents

Publication Publication Date Title
CN107918241B (en) Method for manufacturing polarization grating
US8690338B2 (en) Reflective liquid crystal projector
CN110998418B (en) Phase modulator, illumination system, and projector
US9927689B2 (en) Illumination device
JP2007328129A (en) Liquid crystal display
JP5256941B2 (en) Liquid crystal device and projector
CN108388021B (en) Polarization conversion element and projector
US7625093B2 (en) Image display device having a plurality of basic-color projection units
US8469523B2 (en) Illumination apparatus and projector having the same
JP7322691B2 (en) Light source device and projector
WO2014181539A1 (en) Optical device
TWI546610B (en) Projection device and fabrication method of a polarization grating
US10142602B2 (en) Fabrication method of a polarizing grating
JP2012189930A (en) Projector
JP7468267B2 (en) Light source device and projector
JP5582148B2 (en) LIGHT EMITTING ELEMENT AND IMAGE DISPLAY DEVICE USING THE LIGHT EMITTING ELEMENT
JP7484605B2 (en) Light source device and projector
JP7243529B2 (en) Lighting optical device and projector
JP2018054720A (en) projector
US9482936B2 (en) Projector with tilt projection
JP2022049266A (en) Light source device and projector
JP2021096321A (en) Light source device and projector
JP2021103201A (en) Light source device and projector
JP2020030303A (en) projector
JP2019197124A (en) Projection type display device