TWI542030B - Processing Apparatus and Processing Method for Solar Cells - Google Patents

Description

Solar cell processing device and processing method

The invention provides a solar cell processing apparatus and a processing method for improving a Light Induced Degradation (LID) phenomenon of a solar cell.

With the development of science and technology, energy demand is increasing day by day. However, the earth contains limited energy, so all countries are competing for the development of alternative energy. Among them, solar power generation, which meets environmental protection requirements, has attracted attention from all walks of life.

A solar cell is a photovoltaic component that converts solar energy into electrical energy, and Silicon is the most important raw material for solar cells. Among them, germanium can be generally classified into three types: single crystal silicon, polycrystalline silicon, and amorphous silicon. In terms of conversion efficiency, single crystal germanium is the highest, polycrystalline germanium is the second, and amorphous germanium is the lowest. However, in terms of production cost, the production cost of amorphous germanium is the lowest. Therefore, current solar cells are mainly composed of single crystal germanium and amorphous germanium.

Most solar cells are made of a boron-doped single crystal crucible made of a Czochralski (CZ) crystal growth method having a low manufacturing cost. However, due to the high oxygen content in the boron-doped single crystal tantalum sheet prepared by the Chai's long crystal method, and under the illumination or under the carrier, the boron atom in the boron-doped single crystal tantalum sheet The boron-oxygen complex is formed with the oxygen atom to trap the carrier, which in turn causes the conversion efficiency of the solar cell to decrease. This phenomenon is Light Induced Degradation (LID).

Therefore, how to improve the photo-induced attenuation of the solar cell to avoid affecting the conversion efficiency of the solar cell is an important issue to be solved by those skilled in the art.

In view of this, the present invention provides a solar cell processing apparatus including a housing, a conveying path, at least one light source, a light transmissive heat insulating panel, a first heating unit, and a second heating unit. Wherein the housing comprises a first section and a second section adjacent to the first section. A conveyor lane is disposed in the housing and passes through the first section and the second section for conveying the solar cell from the first section toward the second section. At least one light source is disposed within the housing, and the light transmissive heat shield is disposed between the at least one light source and the transport path. The first heating unit is disposed in the first section and below the conveying lane, and the second heating unit is disposed in the second section and is also located below the conveying lane.

In one aspect of the solar cell processing apparatus of the present invention, the first heating unit heats the temperature of the solar cell to a first predetermined temperature at a first heating rate; and the second heating unit is at a second heating rate. The temperature of the solar cell is heated to a second predetermined temperature.

In one aspect of the solar cell processing apparatus of the present invention, the second heating rate is between 5 ^o C/s and 20 ^o C/s, and the second predetermined temperature is 200 ^o C to Between 300 ^o C.

In one aspect of the solar cell processing apparatus of the present invention, the first temperature increase rate is between 5 ^o C/s and 15 ^o C/s, and the first predetermined temperature is at 100 ^o C to Between 150 ^o C.

In one aspect of the solar cell processing apparatus of the present invention, the third section and the cooling unit are further included, wherein the third section is adjacent to the second section, and the transport lane passes through the first section and the second section. And a third section to transport the solar cells from the first section toward the third section; the cooling unit is disposed in the third section and located below the transport lane.

In one aspect of the solar cell processing apparatus of the present invention, the cooling unit cools the temperature of the solar cell to a third predetermined temperature at a cooling rate.

In one aspect of the solar cell processing apparatus of the present invention, the above cooling rate is 20 ^o C/sec or more, and the third predetermined temperature is between 30 ^o C and 70 ^o C.

In one aspect of the solar cell processing apparatus of the present invention, the light-transmitting heat-insulating panel comprises a light-homogenizing layer, and the light-homogenizing layer is disposed on a surface of the light-transmitting heat insulating panel.

The invention also provides a method for processing a solar cell, comprising: illuminating a solar cell with a light source, wherein a light-transmitting heat-insulating plate is disposed between the light source and the solar cell, and the solar cell is heated to a first preset temperature at a first heating rate, The first heating rate is between 5 ^o C/s and 15 ^o C/s, the first preset temperature is between 100 ^o C and 150 ^o C, and the solar cell is heated to the second at a second heating rate. The preset temperature, wherein the second heating rate is between 5 ^o C/s and 20 ^o C/s, and the second preset temperature is between 200 ^o C and 300 ^o C.

Concept of a processing method in which a solar cell of the present invention, further comprising not less than 20 ^o C to the temperature of the cooling rate of the solar cell / seconds to between 30 ^o C to 70 ^o C.

In one aspect of the method of processing a solar cell of the present invention, wherein the first predetermined temperature is between 130 ^o C and 150 ^o C.

Concept of a processing method in which a solar cell of the present invention in which the above-described system in the second preset temperature between 210 ^o C to 250 ^o C.

In one aspect of the method of processing a solar cell of the present invention, wherein the second predetermined temperature is between 220 ^o C and 240 ^o C.

In summary, the solar cell processing apparatus and the processing method according to an embodiment of the present invention, the solar cell is irradiated by the light source, and the solar cell is subjected to a two-stage heat treatment by the heating unit to improve the photoinduced attenuation of the solar cell. (Light Induced Degradation, LID) effect, and by the addition of a light-transmitting heat shield between the light source and the solar cell to reduce the influence of the heat energy emitted by the light source on the solar cell, the photo-attenuation effect of the solar cell can be obtained. Better improvement.

The detailed features and advantages of the present invention are described in detail in the embodiments of the present invention. The objects and advantages associated with the present invention can be readily understood by those skilled in the art.

1 is a schematic perspective view of a solar cell processing apparatus according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view showing a solar cell processing apparatus according to an embodiment of the present invention and a temperature-to-time change of a solar cell during processing. Schematic diagram of the outline. Referring to Figures 1 and 2, a solar cell processing apparatus 100 is disclosed that can be used to simultaneously illuminate and heat treat a solar cell 160 to repair defects in the semiconductor substrate of the solar cell 160 (e.g., by Czochralski, CZ) Boron-doped single crystal crucibles made by the long crystal method have boron atoms and oxygen atoms forming a boron-oxygen complex which hinders the carrier) to improve the Light Induced Degradation (LID) effect of the solar cell 160. .

In this embodiment, the solar cell 160 may be a crystalline germanium solar cell, such as a boron-doped single crystal germanium solar cell or a boron doped polycrystalline solar cell, but the invention is not limited thereto.

The solar cell processing apparatus 100 includes a housing 110, a conveying path 120, at least one light source 130, a light transmissive heat insulating panel 140, and at least two heating units. The number of heating units depends on the heat treatment design requirements of the solar cell processing apparatus 100. Herein, the solar cell processing apparatus 100 performs a two-stage heat treatment on the solar cell 160 as an example. Therefore, two heating units (hereinafter referred to as a first heating unit 151 and a second heating unit 152, respectively) are disposed in the solar cell treatment. In device 100.

The housing 110 includes a first section A1 and a second section A2 adjacent to the first section A1. In this embodiment, the housing 110 can be a processing chamber when the solar cell processing apparatus 100 processes the solar cell 160, and has other devices (such as the aforementioned conveying path 120, the light source 130, and the transparent heat insulating plate 140). The accommodating space of the first heating unit 151 and the second heating unit 152, and the first section A1 and the second section A2 are part of the accommodating space of the housing 110. Here, as shown in FIG. 1, the outer appearance of the housing 110 is a rectangular parallelepiped, but the invention is not limited thereto.

The conveying path 120 is disposed in the accommodating space of the housing 110 for conveying the solar battery 160 according to a conveying direction. Here, the direction in which the first section A1 faces the second section A2 is the conveying direction of the conveying path 120. Accordingly, the conveyor path 120 can pass through the first section A1 and the second section A2 of the housing 110 and transport the solar cell 160 from the first section A1 toward the second section A2.

In this embodiment, the conveying path 120 may be composed of a plurality of rollers and/or conveyor belts, but the invention is not limited thereto. In addition, the number of the transport lanes 120 may be not only one, in other words, a plurality of transport lanes 120 may be simultaneously disposed in the housing 110 to improve the overall processing throughput of the solar cell processing apparatus 100, and each of the transport lanes 120 Both pass through the first section A1 and the second section A2 of the housing 110 and transport the solar cell 160 from the first section A1 toward the second section A2.

The light source 130 is disposed within the housing 110. In this case, the light sources 130 can be arranged at a fixed interval and arranged at the top of the housing 110 corresponding to the transport path 120 to project light toward the transport path 120 to illuminate the solar cell 160 carried by the transport path 120. . In the embodiment, the light source 130 may be a halogen lamp or an incandescent bulb or the like. Here, the spherical light source 130 is taken as an example, but the invention is not limited thereto, and the light source 130 may also be a strip light source.

In this embodiment, the solar cell processing apparatus 100 further includes at least one lamp cover 131 corresponding to each of the light sources 130. Here, the lamp cover 131 can surround the periphery of the light source 130 to guide the light projected by the light source 130 to the conveying path 120.

The light-transmitting heat-insulating board 140 is disposed between the transport path 120 and the at least one light source 130, and is spaced apart from the light source 130 by a first predetermined distance and spaced apart from the transport path 120 by a second predetermined distance to reduce the light source 130. The effect of the emitted radiant heat on the solar cells 160 carried by the transport path 120.

Fig. 3 is a schematic cross-sectional view showing an example of a light-transmitting heat-insulating panel according to an embodiment of the present invention. Referring to FIG. 3 , the light-transmissive heat-insulating panel 140 may include a light-homogenizing layer 141 disposed on the surface thereof so that the light projected by the light source 130 passes through the transparent heat-insulating panel 140 and is uniformly irradiated to the transport path 120 . In addition, each of the solar cells 160 transported by the transport path 120 can be uniformly received, so that the solar cells 160 can be substantially equalized after being processed by the solar cell processing apparatus 100 according to an embodiment of the present invention. Here, the light homogenizing layer 141 may include the plurality of light homogenizing particles 142 uniformly dispersed in the light homogenizing layer 141 so that the light can be diffused through the plurality of light homogenizing particles 142 of the light homogenizing layer 141, thereby generating Light with a uniform brightness is emitted. In other embodiments, the light homogenizing layer 141 may be disposed only on one side of the light-transmitting heat shield 140, for example, on one side facing the light source 130 or on the side facing the transport path 120.

Fig. 4 is a schematic cross-sectional view showing another example of the light-transmitting heat-insulating panel of the present invention. Referring to FIG. 4, in another embodiment, the light homogenizing layer 141 may be a roughened surface structure disposed on the surface of the transparent heat insulating panel 140, for example, a pyramid structure. However, the present invention is not limited thereto, and the entire light-transmitting heat-insulating panel 140 may be directly made of a material of light homogenization, and a plurality of light-homogenizing particles 142 may be dispersed therein. In other embodiments, the light homogenizing layer 141 having a roughened surface structure may be disposed only on one side of the light-transmitting heat shield 140, for example, on one side facing the light source 130 or on the side facing the transport path 120.

Further, the thickness of the light-transmitting heat shield 140 may be in the range of 1.5 millimeters (mm) to 20 millimeters (mm).

Referring to FIG. 1 and FIG. 2 , the first heating unit 151 can be a plate-shaped heating plate and disposed under the conveying path 120 of the first section A1 of the housing 110 for the first conveying path 120 . Each of the solar cells 160 transported on the segment A1 is heated. Here, the first heating unit 151 heats the solar cells 160 transported by the transport path 120 on the first segment A1 at the first temperature increase rate S1, so that the temperature of each solar cell 160 is in the first segment A1. The inside can be raised to a first preset temperature T1, and each solar cell 160 can be maintained at the first preset temperature T1 for a first processing time d1.

In other words, as shown in FIG. 2, the conveying path 120 can continuously transport the solar cell 160 into the first section A1 at a conveying rate to start the heat treatment of the first stage, and the solar cell 160 on the conveying path 120 enters the first zone. After the segment A1, it is irradiated by the light source 130 and simultaneously heated by the first heating unit 151 to start heating up to the first preset temperature T1 according to the first heating rate S1 of the first heating unit 151. At this time, the solar cell 160 Still in the first section A1, and continuously carried by the conveying lane 120 in the direction of the first section A1 toward the second section A2, after leaving the first processing time d1, leaving the first section A1 and The second stage of heat treatment is carried out by the conveying path 120 successively feeding into the second section A2. The temperature of the solar cell 160 is maintained at the first preset temperature T1 during the first processing time d1.

In this embodiment, the first heating rate S1 may be between 5 ^o C/s and 15 ^o C/s, and the first preset temperature T1 may be between 100 ^o C and 150 ^o C. Here, the first preset temperature T1 is preferably 140 ^o C. Further, the first processing time d1 may be between 10 seconds and 30 seconds.

The second heating unit 152 can be a plate-shaped heating plate disposed under the conveying path 120 of the second section A2 of the housing 110 for each solar cell 160 conveyed on the second section A2 by the conveying path 120. Heat up. Here, the second heating unit 152 heats the solar cells 160 transported by the transport path 120 on the second segment A2 at the second temperature increase rate S2, so that the temperature of each solar cell 160 is in the second segment A2. The inside can be raised to a second preset temperature T2, and the solar cells 160 can be maintained at the second preset temperature T2 for a second processing time d2.

In other words, the conveying path 120 can continuously transport the solar cell 160 to the second section A2 at a conveying rate, and the solar cell 160 on the conveying path 120 is exposed to the light source 130 and simultaneously receives the first time after entering the second section A2. The heating of the heating unit 152 starts to increase to the second preset temperature T2 according to the second heating rate S2 of the second heating unit 152. After the solar cell 160 is heated to the second preset temperature T2, the solar cell 160 is still transported. The track 120 is transported in the second section A2 until the second processing time d2 has elapsed before the second stage of heat treatment is completed and exits the second section A2. The temperature of the solar cell 160 is maintained at the second preset temperature T2 during the second processing time d2.

In this embodiment, the second heating rate S2 may be between 5 ^o C/s and 20 ^o C/s, and the second preset temperature T2 may be between 200 ^o C and 300 ^o C. Here, the second preset temperature T2 is preferably 230 ^o C. Further, the second processing time d2 may be between 60 seconds and 200 seconds.

As described above, the solar cell processing apparatus 100 according to an embodiment of the present invention can simultaneously illuminate and heat the solar cell 160 through the light source 130 and the first heating unit 151 in the first section A1 to first attenuate the solar cell 160. After the conversion efficiency, the solar cell 160 is simultaneously illuminated and heated by the light source 130 and the second heating unit 152 in the second segment A2 to restore the conversion efficiency of the solar cell 160, thereby improving the photo-induced attenuation effect of the solar cell 160. . Therefore, the processes performed by the solar cell processing apparatus 100 in the first section A1 may be collectively referred to as a degradation process, and the processes performed in the second section A2 may be collectively referred to as a regeneration process. .

In another embodiment of the present invention, in addition to the two-stage processing (ie, the attenuation process and the regeneration process) of the solar cell 160, the solar cell processing apparatus 100 can further cool the solar cell 160 afterwards. In order to help the conversion efficiency of the solar cell 160 to achieve a better recovery effect.

Therefore, the housing 110 of the solar cell processing apparatus 100 may further include a third section A3 adjacent to the second section A2 and a cooling unit 153 installed below the conveying lane 120 of the third section A3.

Here, the conveying path 120 can pass through the first section A1, the second section A2 and the third section A3 in sequence, and is used to transport the solar cell 160 from the first section A1 toward the third section A3. Therefore, the conveying path 120 can continuously transport the solar cell 160 exiting from the second section A2 into the third section A3, and cool the temperature of the solar cell 160 to the third pre-cooling through the lower cooling unit 153 at a cooling rate S3. After the temperature T3 is set, the solar cell 160 is again transported away from the third section A3.

In this embodiment, the cooling rate S3 may be greater than or equal to 20 ^o C/sec, and the third predetermined temperature may be between 30 ^o C and 70 ^o C. The third preset temperature is preferably 40 ^o C.

Here, the cooling unit 153 may be a plate-shaped cooling plate. In addition, the third section A3 of the housing 110 may be provided with other cooling means, such as a fan, to help the solar cell 160 be rapidly cooled to a third preset temperature T3 at a cooling rate S3.

In all embodiments of the invention, solar cell processing apparatus 100 may further include an exhaust device 170. The venting device 170 can be mounted to the housing 110 and control the amount of airflow drawn from the accommodating space of the housing 110 by its adjustable valve. Here, the exhaust device 170 can be mounted on the top of the housing 110.

Fig. 5 is a flow chart showing a method of processing a solar cell according to an embodiment of the present invention. Referring to FIG. 2 and FIG. 5 , a method for processing a solar cell according to an embodiment of the present invention includes irradiating a solar cell 160 with a light source 130 , wherein a light transmissive heat shield 140 is disposed between the light source 130 and the solar cell 160 (step S01), heating the solar cell 160 to the first preset temperature T1 at the first heating rate S1 (step S02), and heating the solar cell 160 to the second preset temperature T2 at the second heating rate S2 (step S03).

The solar cell processing apparatus 100 can be applied to the transport path 120 by the light projected by the at least one light source 130 mounted on the top of the first section A1 and the second section A2 of the housing 110 in step S01. The carried solar cell 160 is irradiated, and the irradiated light is required to cause the solar cell 160 to perform photoelectric reaction.

Since the light source 130 generates high heat, and the gas in the vicinity of the light source 130 is heated to rise to a high temperature, if the gases are unrestricted and flow freely, the temperature control in the solar cell processing apparatus 100 is not easy, and the solar energy is affected. The battery regeneration process is implemented. Therefore, in the embodiment, the light-transmitting heat-insulating panel 140 can be disposed between the light source 130 and the solar cell 160 to block the heating by the light source 130 by the transparent heat-insulating panel 140. The random flow of gas. In an embodiment in which the exhaust device 170 is partially disposed, the light-heated heat shield 140 can block the gas heated by the light source 130 between the light-transmitting heat shield 140 and the light source 130 and pass through the exhaust device 170. The operation allows such gases to be quickly exhausted through the exhaust device 170, thereby achieving good temperature control and further reducing the thermal energy affecting the temperature of the solar cell 160 to achieve a better state for the solar cell regeneration process. The solar cell processing apparatus 100 shown in FIGS. 1 and 2, wherein the housing 110 and the light-transmissive heat insulating panel 140 form a space, the light source 130 is disposed in the space, and the gas existing in the space can be arranged through the row. The gas device 170 is discharged. In addition, the light homogenizing layer 141 on the transparent heat insulating board 140 can be made to make the light projected by the light source 130 pass through the transparent heat insulating board 140, and the light uniformity is better, and the light uniformity can be more uniform. Irradiation onto the solar cell 160.

In step S02, the solar cell processing apparatus 100 can transport the solar cell 160 into the first section A1 by using the transport path 120, and irradiate the solar cell 160 through the light source 130 while transmitting through the first section A1. The first heating unit 151 below the conveying path 120 heats the solar cell 160 to attenuate the conversion efficiency of the solar cell 160. Here, the first heating unit 151 can heat the temperature of the solar cell 160 to the first preset temperature T1 at a first heating rate S1. In addition, after the temperature of the solar cell 160 is raised to the first preset temperature T1, the solar cell processing apparatus 100 can continuously maintain the temperature of the solar cell 160 at the first preset temperature T1 through the first heating unit 151.

In this embodiment, the first heating rate S1 may be between 5 ^o C/s and 15 ^o C/s, and the first preset temperature T1 may be between 100 ^o C and 150 ^o C. In an embodiment, the first preset temperature T1 may be between 130 ^o C and 150 ^o C. The first preset temperature T1 is preferably 140 ^o C.

After the first processing time d1 has elapsed, step S03 is performed. Here, the first processing time d1 may be between 10 seconds and 30 seconds.

In step S03, the solar cell processing apparatus 100 can transport the solar cell 160 into the second section A2 by using the transport path 120, and irradiate the solar cell 160 through the light source 130 while transmitting through the second section A2. The second heating unit 152 below the conveying path 120 heats the solar cell 160 to restore the conversion efficiency of the solar cell 160. Here, the second heating unit 152 may heat the temperature of the solar cell 160 to the second preset temperature T2 at a second heating rate S2. In addition, after the temperature of the solar cell 160 is raised to the second preset temperature T2, the solar cell processing apparatus 100 can continuously maintain the temperature of the solar cell 160 at the second preset temperature T2 through the second heating unit 152, and wait for the second process to be processed. After time d2, the solar cell 160 is transported away from the second section A2 through the transport path 120.

In this embodiment, the second heating rate S2 may be between 5 ^o C/s and 20 ^o C/s, and the second preset temperature T2 may be between 200 ^o C and 300 ^o C. In an embodiment, the second preset temperature T2 may be between 210 ^o C and 250 ^o C. In another embodiment, the second preset temperature T2 can be between 220 ^o C and 240 ^o C. The second preset temperature T2 is preferably 230 ^o C, and the higher the second preset temperature T2 deviates from 230 ^o C, the less effective the photo-attenuation recovery effect is.

Furthermore, the method of treating a solar cell according to an embodiment of the present invention further comprises cooling the temperature of the solar cell 160 to between 30 ^o C and 70 ^o C at a cooling rate of 20 ^o C/sec or more (step S04).

In step S04, the solar cell processing apparatus 100 can transport the solar cell 160 into the third section A3 by using the conveying path 120, and pass the cooling unit 153 disposed below the conveying path 120 of the third section A3 to the solar cell. The cooling process is performed to help the conversion efficiency of the solar cell 160 to achieve a better recovery effect. Here, the cooling rate S3 of the cooling unit 153 may be greater than or equal to 20 ^o C/sec, and the third preset temperature may be between 30 ^o C and 70 ^o C. The third preset temperature is preferably 40 ^o C.

In summary, the solar cell processing apparatus and the processing method according to an embodiment of the present invention, the solar cell is irradiated by the light source, and the solar cell is subjected to a two-stage heat treatment by the heating unit to improve the photoinduced attenuation of the solar cell. The effect is to reduce the influence of the heat energy emitted by the light source on the solar cell by the light-transmitting heat insulation plate added between the light source and the solar cell, so that the photo-attenuation effect of the solar cell can be better improved.

The technical contents of the present invention have been disclosed in the preferred embodiments as described above, and are not intended to limit the present invention. Any modifications and refinements made by those skilled in the art without departing from the spirit of the present invention should be The scope of the invention is therefore defined by the scope of the appended claims.

100‧‧‧Solar battery treatment unit
110‧‧‧shell
120‧‧‧Conveyor
130‧‧‧Light source
131‧‧‧shade
140‧‧‧Lighting insulation board
141‧‧‧Light homogenization layer
142‧‧‧Light homogenized particles
151‧‧‧First heating unit
152‧‧‧second heating unit
153‧‧‧Cooling unit
160‧‧‧ solar cells
170‧‧‧Exhaust device
A1‧‧‧ first section
A2‧‧‧second section
A3‧‧‧ third section
D1‧‧‧First processing time
D2‧‧‧second processing time
S1‧‧‧First heating rate
S2‧‧‧second heating rate
S3‧‧‧ cooling rate
T1‧‧‧ first preset temperature
T2‧‧‧ second preset temperature
T3‧‧‧ Third preset temperature step S01‧‧‧Using the light source to illuminate the solar cell, wherein the light source and the solar cell are provided with a light-transmissive heat-insulating plate. Step S02‧‧‧ Heating the solar cell at the first heating rate a preset temperature step S03‧‧ ‧ heating the solar cell to a second preset temperature at a second heating rate step S04‧‧ ‧ cooling the temperature of the solar cell to 30 ^o C to 70 at a cooling rate of 20 ^o C/sec or more ^o C

[Fig. 1] Fig. 1 is a schematic perspective view showing a solar cell processing apparatus according to an embodiment of the present invention. 2 is a schematic cross-sectional view showing a solar cell processing apparatus according to an embodiment of the present invention and a schematic diagram showing changes in temperature and time during processing of a solar cell. [Fig. 3] Fig. 3 is a schematic cross-sectional view showing an example of a light-transmitting heat-insulating panel. Fig. 4 is a schematic cross-sectional view showing another example of the light-transmitting heat-insulating panel of the present invention. [Fig. 5] Fig. 5 is a flow chart showing a method of processing a solar cell according to an embodiment of the present invention.

120‧‧‧Conveyor

130‧‧‧Light source

131‧‧‧shade

140‧‧‧Lighting insulation board

151‧‧‧First heating unit

152‧‧‧second heating unit

153‧‧‧Cooling unit

160‧‧‧ solar cells

170‧‧‧Exhaust device

A1‧‧‧ first section

A2‧‧‧second section

A3‧‧‧ third section

D1‧‧‧First processing time

D2‧‧‧second processing time

S1‧‧‧First heating rate

S2‧‧‧second heating rate

S3‧‧‧ cooling rate

T1‧‧‧ first preset temperature

T2‧‧‧ second preset temperature

T3‧‧‧ third preset temperature

Claims (13)

A solar cell processing apparatus comprising: a housing including a first section and a second section adjacent to the first section; a conveyorway disposed in the housing and passing through the first zone And a second section, the conveying lane is configured to transport a solar cell from the first section toward the second section; at least one light source is disposed in the housing; a light transmissive heat shield is disposed on the Between the conveying path and the at least one light source, the gas heated by the at least one light source is blocked between the transparent heat insulating plate and the at least one light source; a first heating unit is disposed in the first area a section below the conveyor lane; and a second heating unit disposed below the conveyor lane of the second section. The solar cell processing apparatus of claim 1, wherein the first heating unit heats the temperature of the solar cell to a first predetermined temperature at a first heating rate, and the second heating unit heats at a second heating rate. The temperature of the solar cell is to a second predetermined temperature. The solar cell processing apparatus of claim 2, wherein the second heating rate is between 5 ° C / s and 20 ° C / s, and the second predetermined temperature is between 200 ° C and 300 ° C. The solar cell processing apparatus according to any one of claims 2 to 3, wherein the first heating rate is between 5 ° C / s and 15 ° C / s, the first preset temperature is between 100 ° C and 150 Between °C. The solar cell processing apparatus according to claim 1, further comprising: a third section adjacent to the second section, wherein the transport lane passes through the first section, the second section and the third section to face the third section from the first section The segment transports the solar cell; and a cooling unit disposed below the transport lane of the third segment. The solar cell processing apparatus of claim 5, wherein the cooling unit cools the temperature of the solar cell to a third predetermined temperature at a cooling rate. The solar cell processing apparatus according to claim 6, wherein the cooling rate is 20 ° C / sec or more, and the third preset temperature is between 30 ° C and 70 ° C. The solar cell processing apparatus of claim 1, wherein the light-transmissive heat-insulating panel comprises: a light homogenizing layer disposed on a surface of the light-transmitting heat-insulating panel. A solar cell processing method includes: illuminating a solar cell with a light source, wherein a light transmissive heat insulating plate is disposed between the light source and the solar cell, and the transparent heat insulating plate is used to be heated by the light source The gas is blocked between the transparent heat insulating plate and the light source; the solar cell is heated to a first preset temperature at a first heating rate, wherein the first heating rate is between 5 ° C / s and 15 ° C Between /s, the first preset temperature is between 100 ° C and 150 ° C; and heating the solar cell to a second predetermined temperature at a second heating rate, wherein the second heating rate is 5 Between ° C / s and 20 ° C / s, the second preset temperature is between 200 ° C and 300 ° C. The method for processing a solar cell according to claim 9, further comprising: The temperature of the solar cell is cooled to between 30 ° C and 70 ° C at a rate of 20 ° C / sec or more. The method of processing a solar cell according to claim 9, wherein the first preset temperature is between 130 ° C and 150 ° C. The method of processing a solar cell according to claim 9, wherein the second preset temperature is between 210 ° C and 250 ° C. The method of processing a solar cell according to claim 12, wherein the second preset temperature is between 220 ° C and 240 ° C.