TWI539874B - Embedded component package structure and manufacturing method thereof - Google Patents

Embedded component package structure and manufacturing method thereof Download PDF

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TWI539874B
TWI539874B TW103138740A TW103138740A TWI539874B TW I539874 B TWI539874 B TW I539874B TW 103138740 A TW103138740 A TW 103138740A TW 103138740 A TW103138740 A TW 103138740A TW I539874 B TWI539874 B TW I539874B
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layer
conductive
flexible
circuit board
conductive layer
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TW201618614A (en
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余丞博
李國維
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欣興電子股份有限公司
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Description

內埋式元件封裝結構及其製作方法 Buried component packaging structure and manufacturing method thereof

本發明是有關於一種封裝結構及其製作方法,且特別是有關於一種內埋式元件封裝結構及其製作方法。 The present invention relates to a package structure and a method of fabricating the same, and more particularly to a buried component package structure and a method of fabricating the same.

印刷電路板大致上可分為剛性(rigid)電路板以及可撓性(flexible)電路板(或稱軟板),其中可撓性電路板是由軟質介電材料所支撐的一種線路板,適於應用在連續性動態彎折的產品中。目前運用於液晶顯示器驅動IC之封裝、可攜式電子產品以及穿戴式電子產品上尤其廣泛,例如智慧型手錶、智慧型手機、平板電腦、筆記型電腦及數位相機等。 A printed circuit board can be roughly divided into a rigid circuit board and a flexible circuit board (or a flexible board), wherein the flexible circuit board is a circuit board supported by a soft dielectric material. Used in continuous dynamic bending products. It is currently widely used in packaging for LCD driver ICs, portable electronic products, and wearable electronic products, such as smart watches, smart phones, tablets, notebook computers, and digital cameras.

通常而言,可撓性電路板的設計是將元件接合於軟質介電材料上的線路層,由於軟質介電材料具有可撓曲的特性,因此較不利於將元件接合於其上。另一方面,剛性電路板與可撓性電路板之間,或者是可撓性電路板與可撓性電路板之間大多是以連接器作為連接的介面。然而,透過連接器來連接剛性電路板與可 撓性電路板,或者是連接可撓性電路板與可撓性電路板,勢必會耗費掉一部分的配置空間,使得整體結構的體積無法有效縮減,進而不利於應用在薄型化設計的電子產品當中。 In general, the design of a flexible circuit board is to bond the component to a circuit layer on a soft dielectric material that is less advantageous for bonding the component to it due to the flexible nature of the flexible dielectric material. On the other hand, between the rigid circuit board and the flexible circuit board, or between the flexible circuit board and the flexible circuit board, the connector is mostly used as a connection interface. However, the rigid circuit board can be connected through the connector Flexible circuit boards, or the connection of flexible circuit boards and flexible circuit boards, will inevitably consume a part of the configuration space, so that the overall structure volume can not be effectively reduced, which is not conducive to the application of thin design electronic products. .

本發明提供一種內埋式元件封裝結構,其具有較薄的厚度。 The present invention provides a buried component package structure having a relatively thin thickness.

本發明提供一種內埋式元件封裝結構的製作方法,其能降低封裝結構的整體厚度。 The invention provides a method for fabricating a buried component package structure, which can reduce the overall thickness of the package structure.

本發明提出一種內埋式元件封裝結構,包括第一可撓性電路板、第二可撓性電路板、元件以及線路連接結構。第二可撓性電路板與第一可撓性電路板對向設置,其中第一可撓性電路板與第二可撓性電路板之間具有間隙。元件埋設於間隙內。線路連接結構包括連接層以及第一連接線路層。連接層連接第一可撓性電路板與第二可撓性電路板,並填入間隙內以包覆元件。第一連接線路層位於連接層的上表面上,其中第一可撓性電路板與第二可撓性電路板分別透過第一連接線路層電性連接至元件。 The present invention provides a buried component package structure including a first flexible circuit board, a second flexible circuit board, an element, and a line connection structure. The second flexible circuit board is disposed opposite the first flexible circuit board, wherein the first flexible circuit board and the second flexible circuit board have a gap therebetween. The component is buried in the gap. The line connection structure includes a connection layer and a first connection line layer. The connection layer connects the first flexible circuit board and the second flexible circuit board and fills the gap to cover the component. The first connecting circuit layer is located on the upper surface of the connecting layer, wherein the first flexible circuit board and the second flexible circuit board are electrically connected to the component through the first connecting circuit layer, respectively.

在本發明的一實施例中,上述的內埋式元件封裝結構更包括與第一可撓性電路板並列設置的第三可撓性電路板。第三可撓性電路板透過連接層連接第一可撓性電路板與第二可撓性電路板,其中線路連接結構還包括位於連接層的下表面上的第二連接線路層,且第三可撓性電路板電性連接至第二連接線路層。 In an embodiment of the invention, the buried component package structure further includes a third flexible circuit board disposed in parallel with the first flexible circuit board. The third flexible circuit board connects the first flexible circuit board and the second flexible circuit board through the connection layer, wherein the line connection structure further comprises a second connection circuit layer on the lower surface of the connection layer, and the third The flexible circuit board is electrically connected to the second connection circuit layer.

本發明提出一種內埋式元件封裝結構的製作方法,其包括以下步驟。提供對向設置的至少兩可撓性基材,並使前述至少兩可撓性基材之間具有間隙,其中各個可撓性基材上形成有相對的第一導電層與第二導電層。將元件埋設於間隙內。提供第一介電材料層與第二介電材料層,分別位於前述至少兩可撓性基材的相對兩側,其中第一介電材料層上形成有第三導電層,且第二介電材料層上形成有第四導電層。使第一介電材料層朝向間隙移動以壓合至前述至少兩可撓性基材的第一導電層,並使第二介電材料層朝向間隙移動以壓合至前述至少兩可撓性基材的第二導電層。部分第一介電材料層與部分第二介電材料層分別填入間隙內而相互連接,以形成連接層。連接層連接前述至少兩可撓性基材並包覆元件。圖案化第三導電層以形成第一連接線路層。形成多個導電盲孔於連接層,以電性連接各個第一導電層與第一連接線路層以及電性連接元件與第一連接線路層。 The invention provides a method for fabricating a buried component package structure, which comprises the following steps. Providing at least two flexible substrates disposed opposite each other and having a gap between the at least two flexible substrates, wherein each of the flexible substrates is formed with an opposite first conductive layer and a second conductive layer. The component is buried in the gap. Providing a first dielectric material layer and a second dielectric material layer respectively on opposite sides of the at least two flexible substrates, wherein a third conductive layer is formed on the first dielectric material layer, and the second dielectric layer is A fourth conductive layer is formed on the material layer. Moving the first layer of dielectric material toward the gap to press fit to the first conductive layer of the at least two flexible substrates, and moving the second layer of dielectric material toward the gap to press fit to the at least two flexible groups The second conductive layer of the material. A portion of the first dielectric material layer and a portion of the second dielectric material layer are respectively filled into the gap and connected to each other to form a connection layer. The tie layer joins the at least two flexible substrates and covers the component. The third conductive layer is patterned to form a first connecting wiring layer. A plurality of conductive blind vias are formed on the connection layer to electrically connect the first conductive layer and the first connection circuit layer and the electrical connection component and the first connection circuit layer.

在本發明的一實施例中,上述的內埋式元件封裝結構的製作方法更包括在形成這些導電盲孔於連接層之後,圖案化各個可撓性基材上的第一導電層與第二導電層,以分別形成第一圖案化線路層與第二圖案化線路層。 In an embodiment of the present invention, the method for fabricating the embedded component package structure further includes: patterning the first conductive layer and the second layer on each flexible substrate after forming the conductive blind vias in the connection layer Conductive layers to form a first patterned wiring layer and a second patterned wiring layer, respectively.

在本發明的一實施例中,上述的內埋式元件封裝結構的製作方法更包括在圖案化各個可撓性基材上的第一導電層與第二導電層之後,形成覆蓋層於這些第一圖案化線路層上以及第一連接線路層上,其中覆蓋層暴露出部分第一連接線路層。 In an embodiment of the present invention, the method for fabricating the embedded component package structure further includes forming a cap layer on the first conductive layer and the second conductive layer on each flexible substrate after patterning And a patterned circuit layer and the first connecting circuit layer, wherein the covering layer exposes a portion of the first connecting circuit layer.

在本發明的一實施例中,上述的內埋式元件封裝結構的製作方法更包括在圖案化各個可撓性基材上的第一導電層與第二導電層之後,形成覆蓋層於這些第二圖案化線路層上以及第四導電層上。 In an embodiment of the present invention, the method for fabricating the embedded component package structure further includes forming a cap layer on the first conductive layer and the second conductive layer on each flexible substrate after patterning Two patterned circuit layers and a fourth conductive layer.

在本發明的一實施例中,上述的內埋式元件封裝結構的製作方法更包括在形成覆蓋層於這些第二圖案化線路層上以及第四導電層上之後,形成補強板於覆蓋層上,其中補強板對應於連接層而設置,且覆蓋層位於連接層與補強板之間。 In an embodiment of the present invention, the method for fabricating the embedded device package structure further includes forming a reinforcing plate on the cover layer after forming the cover layer on the second patterned circuit layer and the fourth conductive layer. Wherein the reinforcing plate is disposed corresponding to the connecting layer, and the covering layer is located between the connecting layer and the reinforcing plate.

在本發明的一實施例中,上述的內埋式元件封裝結構的製作方法更包括在將元件埋設於間隙內之前,形成至少一導電通孔於各個可撓性基材,以電性連接各個可撓性基材上的第一導電層與第二導電層。接著,圖案化各個可撓性基材上的第一導電層與第二導電層,以分別形成第一圖案化線路層與第二圖案化線路。 In an embodiment of the present invention, the method for fabricating the embedded component package structure further includes forming at least one conductive via hole on each flexible substrate to electrically connect each component before embedding the component in the gap. a first conductive layer and a second conductive layer on the flexible substrate. Next, the first conductive layer and the second conductive layer on each flexible substrate are patterned to form a first patterned circuit layer and a second patterned line, respectively.

在本發明的一實施例中,上述的內埋式元件封裝結構的製作方法更包括在圖案化各個可撓性基材上的第一導電層與第二導電層之後,形成第一覆蓋層於這些第一圖案化線路層上以及形成第二覆蓋層於這些第二圖案化線路層上。部分導電盲孔貫穿第一覆蓋層以電性連接至第一圖案化線路層,且又一部分導電盲孔貫穿第二覆蓋層以電性連接至第二圖案化線路層的其中至少一者。 In an embodiment of the present invention, the method for fabricating the embedded component package further includes forming a first cap layer after patterning the first conductive layer and the second conductive layer on each flexible substrate. The first patterned circuit layers and the second cover layer are formed on the second patterned circuit layers. A portion of the conductive via hole is electrically connected to the first patterned circuit layer, and a portion of the conductive via hole is electrically connected to the second patterned layer to electrically connect to at least one of the second patterned circuit layer.

在本發明的一實施例中,上述的內埋式元件封裝結構的製作方法更包括在圖案化第三導電層的同時,圖案化第四導電層 以形成第二連接線路層。第二連接線路層透過貫穿第二覆蓋層的導電盲孔的其中至少一者電性連接至第二圖案化線路層的其中至少一者。 In an embodiment of the invention, the method for fabricating the embedded component package structure further includes patterning the fourth conductive layer while patterning the third conductive layer. To form a second connecting circuit layer. The second connection line layer is electrically connected to at least one of the second patterned circuit layer through at least one of the conductive via holes penetrating the second cover layer.

基於上述,在本發明的內埋式元件封裝結構及其製作方法中,可透過線路連接結構作為兩對向設置的可撓性電路板的連接介面,其中元件(例如主動元件或被動元件)可埋設於前述兩對向設置的可撓性電路板之間的間隙內,並由填入前述間隙內的線路連接結構的連接層所包覆。另一方面,前述元件可透過線路連接結構的連接線路層電性連接至前述各個可撓性電路板。因此,相較於習知技術將元件接合於軟質介電材料上的線路層,並透過連接器連接兩對向設置的可撓性電路板而言,本發明的內埋式元件封裝結構及其製作方法能有效降低封裝結構的整體厚度,以應用在薄型化設計的電子產品中。 Based on the above, in the embedded component package structure of the present invention and the manufacturing method thereof, the permeable line connection structure is used as a connection interface of two oppositely disposed flexible circuit boards, wherein components (such as active components or passive components) can be The invention is embedded in a gap between the two oppositely disposed flexible circuit boards, and is covered by a connection layer of the line connection structure filled in the gap. On the other hand, the aforementioned components can be electrically connected to the respective flexible circuit boards through the connection wiring layers of the line connection structure. Therefore, the embedded component package structure of the present invention and the connector layer of the present invention are connected to the circuit layer on the flexible dielectric material by a conventional technique and connected to the two oppositely disposed flexible circuit boards through the connector The manufacturing method can effectively reduce the overall thickness of the package structure for use in thin-formed electronic products.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。 The above described features and advantages of the invention will be apparent from the following description.

100、100A‧‧‧內埋式元件封裝結 100, 100A‧‧‧ buried component package junction

110‧‧‧第一可撓性電路板 110‧‧‧First flexible circuit board

110’‧‧‧第三可撓性電路板 110’‧‧‧ Third flexible circuit board

111、121‧‧‧可撓性基材 111, 121‧‧‧Flexible substrate

111a、121a‧‧‧導電通孔 111a, 121a‧‧‧ conductive through holes

112、122‧‧‧第一導電層 112, 122‧‧‧ first conductive layer

112a、122a‧‧‧第一圖案化線路層 112a, 122a‧‧‧ first patterned circuit layer

113、123‧‧‧第二導電層 113, 123‧‧‧Second conductive layer

113a、123a‧‧‧第二圖案化線路層 113a, 123a‧‧‧Second patterned circuit layer

120‧‧‧第二可撓性電路板 120‧‧‧Second flexible circuit board

130‧‧‧元件 130‧‧‧ components

140‧‧‧線路連接結構 140‧‧‧Line connection structure

141‧‧‧第一介電材料層 141‧‧‧First dielectric material layer

142‧‧‧第二介電材料層 142‧‧‧Second dielectric material layer

143‧‧‧第三導電層 143‧‧‧ Third conductive layer

143a‧‧‧第一連接線路層 143a‧‧‧First connection circuit layer

144‧‧‧第四導電層 144‧‧‧4th conductive layer

144a‧‧‧第二連接線路層 144a‧‧‧Second connection circuit layer

145‧‧‧連接層 145‧‧‧Connection layer

146‧‧‧導電盲孔 146‧‧‧ Conductive blind holes

150、160‧‧‧覆蓋層 150, 160‧‧ ‧ overlay

151、152‧‧‧第一覆蓋層 151, 152‧‧‧ first cover

153、154‧‧‧第二覆蓋層 153, 154‧‧‧second cover

170‧‧‧補強板 170‧‧‧ reinforcing plate

S‧‧‧間隙 S‧‧‧ gap

圖1A至圖1I是本發明一實施例的內埋式元件封裝結構的製作流程示意圖。 1A to FIG. 1I are schematic diagrams showing a manufacturing process of a buried component package structure according to an embodiment of the invention.

圖2A至圖2J是本發明另一實施例的內埋式元件封裝結構的製作流程示意圖。 2A to 2J are schematic diagrams showing a manufacturing process of a buried component package structure according to another embodiment of the present invention.

圖1A至圖1I是本發明一實施例的內埋式元件封裝結構的製作流程示意圖。請先參考圖1A,提供對向設置的至少兩可撓性基材111、121(圖1A至圖1I示意地繪示出兩個),並使可撓性基材111、121之間維持間隙S。通常而言,可撓性基材111、121可以是由聚醯亞胺(polyimide,PI)或其他適當的可撓性材質所構成,例如聚乙烯對苯二甲酸酯(polyethylene terephthalate,PET)、聚醚(polyethersulfone,PES)或聚間苯二甲酸乙二酯(polyethylene naphthalate,PEN)等。另一方面,可撓性基材111的厚度與可撓性基材121的厚度可相同或不同,其中本實施例是以可撓性基材111的厚度小於可撓性基材121的厚度作說明,但本發明不限於此。 1A to FIG. 1I are schematic diagrams showing a manufacturing process of a buried component package structure according to an embodiment of the invention. Referring first to FIG. 1A, at least two flexible substrates 111, 121 (two are schematically shown in FIGS. 1A to 1I) disposed opposite each other are provided, and a gap is maintained between the flexible substrates 111, 121. S. In general, the flexible substrates 111, 121 may be composed of polyimide (PI) or other suitable flexible materials, such as polyethylene terephthalate (PET). Polyethersulfone (PES) or polyethylene naphthalate (PEN). On the other hand, the thickness of the flexible substrate 111 and the thickness of the flexible substrate 121 may be the same or different, wherein the thickness of the flexible substrate 111 is smaller than the thickness of the flexible substrate 121. Note, but the invention is not limited thereto.

可撓性基材111的兩相對表面上分別形成有第一導電層112與第二導電層113,相似地,可撓性基材121的兩相對表面上分別形成有第一導電層122與第二導電層123。一般來說,第一導電層112、113以及第二導電層113、123可以是由銅或其他適當的金屬材質所構成,例如金、銀、錫或上述金屬材質的合金,本發明對此不加以限制。 The first conductive layer 112 and the second conductive layer 113 are respectively formed on the opposite surfaces of the flexible substrate 111. Similarly, the first conductive layer 122 and the first surface are respectively formed on the opposite surfaces of the flexible substrate 121. Two conductive layers 123. In general, the first conductive layers 112, 113 and the second conductive layers 113, 123 may be made of copper or other suitable metal materials, such as gold, silver, tin or alloys of the above metals. Limit it.

接著,請參考圖1B,將元件130埋設於間隙S內,並提供第一介電材料層141與第二介電材料層142。元件130可為主動元件或被動元件,其數量可為一個或多個,本發明對此不加以限制。另一方面,第一介電材料層141與第二介電材料層142分別 位於可撓性基材111、121的相對兩側,其中第一介電材料層141上形成有第三導電層143,且第二介電材料層142上形成有第四導電層144。通常而言,第三導電層143與第四導電層144可以是由銅或其他適當的金屬材質所構成,例如金、銀、錫或上述金屬材質的合金,本發明對此不加以限制。又,第一介電材料層141與第二介電材料層142可以是介電膠體、介電膠體與聚醯亞胺膜(PI film)的組合、液晶高分子(Liquid Crystal Polymer,LCP)或半固化片(prepreg)。 Next, referring to FIG. 1B, the component 130 is buried in the gap S, and the first dielectric material layer 141 and the second dielectric material layer 142 are provided. The component 130 may be an active component or a passive component, and the number of the components 130 may be one or more, which is not limited by the present invention. On the other hand, the first dielectric material layer 141 and the second dielectric material layer 142 are respectively Located on opposite sides of the flexible substrates 111, 121, a third conductive layer 143 is formed on the first dielectric material layer 141, and a fourth conductive layer 144 is formed on the second dielectric material layer 142. Generally, the third conductive layer 143 and the fourth conductive layer 144 may be made of copper or other suitable metal materials, such as gold, silver, tin or an alloy of the above metal materials, which is not limited in the present invention. Moreover, the first dielectric material layer 141 and the second dielectric material layer 142 may be a dielectric colloid, a combination of a dielectric colloid and a polyimide film, a liquid crystal polymer (LCP) or Prepreg.

接著,請參考圖1C,使第一介電材料層141朝向間隙S移動以壓合至靠近間隙S所在處的第一導電層112、122,並使第二介電材料層142朝向間隙S移動以壓合至靠近間隙S所在處的第二導電層113、123。此處,第一介電材料層141的厚度與第二介電材料層142的厚度的總和實質上大於可撓性基材111的厚度、第一導電層112的厚度與第二導電層113的厚度的總和,亦大於可撓性基材121的厚度、第一導電層122的厚度與第二導電層123的厚度的總和,藉以在使第一介電材料層141朝向間隙S移動以壓合至靠近間隙S所在處的第一導電層112、122,並使第二介電材料層142朝向間隙S移動以壓合至靠近間隙S所在處的第二導電層113、123之後,得以讓部分第一介電材料層141以及部分第二介電材料層142分別填入間隙S內而相互連接。具體而言,相互連接後的第一介電材料層141與第二介電材料層142會形成連接層145,以作為連接可撓性基材111、121所用。另一方 面,連接層145包覆了元件130,以固定元件130於間隙S。 Next, referring to FIG. 1C, the first dielectric material layer 141 is moved toward the gap S to be pressed to the first conductive layer 112, 122 near the gap S, and the second dielectric material layer 142 is moved toward the gap S. Pressing to the second conductive layer 113, 123 near the gap S. Here, the sum of the thickness of the first dielectric material layer 141 and the thickness of the second dielectric material layer 142 is substantially larger than the thickness of the flexible substrate 111, the thickness of the first conductive layer 112, and the thickness of the second conductive layer 113. The sum of the thicknesses is also greater than the sum of the thickness of the flexible substrate 121, the thickness of the first conductive layer 122, and the thickness of the second conductive layer 123, thereby moving the first dielectric material layer 141 toward the gap S to be pressed. Up to the first conductive layer 112, 122 near the gap S, and moving the second dielectric material layer 142 toward the gap S to be pressed to the second conductive layer 113, 123 near the gap S, allowing the portion The first dielectric material layer 141 and a portion of the second dielectric material layer 142 are filled in the gaps S to be connected to each other. Specifically, the interconnected first dielectric material layer 141 and the second dielectric material layer 142 form a connection layer 145 for use in connecting the flexible substrates 111, 121. The other side In the face, the tie layer 145 covers the component 130 to secure the component 130 to the gap S.

接著,請參考圖1D至圖1G,例如透過微影蝕刻的方式圖案化第三導電層143以形成第一連接線路層143a,並例如依序以雷射鑽孔(或機械鑽孔)與電鍍等製作程序形成多個導電盲孔146於連接層145,其中這些導電盲孔146可分別電性連接第一導電層112與第一連接線路層143a、第一導電層122與第一連接線路層143a以及元件130與第一連接線路層143a,而本實施例的線路連接結構140大致上是由第一連接線路層143a、第四導電層144、連接層145與導電盲孔146所組成。在形成導電盲孔146於連接層145之後,例如透過微影蝕刻的方式圖案化可撓性基材111上的第一導電層112與第二導電層113,以分別形成第一圖案化線路層112a與第二圖案化線路層113a。並且,圖案化可撓性基材121上的第一導電層122與第二導電層123,以分別形成第一圖案化線路層122a與第二圖案化線路層123a。在本實施例中,第一可撓性電路板110大致上是由可撓性基材110、第一圖案化線路層112a與第二圖案化線路層113a所組成,而第二可撓性電路板120大致上是由可撓性基材120、第一圖案化線路層122a與第二圖案化線路層123a所組成。 Next, referring to FIG. 1D to FIG. 1G, the third conductive layer 143 is patterned, for example, by lithography to form the first connection circuit layer 143a, and is sequentially laser-drilled (or mechanically drilled) and plated, for example. The fabrication process forms a plurality of conductive vias 146 on the connection layer 145, wherein the conductive vias 146 are electrically connected to the first conductive layer 112 and the first connection layer 143a, the first conductive layer 122 and the first connection layer, respectively. The line connection structure 140 of the present embodiment is substantially composed of a first connection line layer 143a, a fourth conductive layer 144, a connection layer 145 and a conductive via 146. After the conductive via 146 is formed on the connection layer 145, the first conductive layer 112 and the second conductive layer 113 on the flexible substrate 111 are patterned, for example, by lithography to form a first patterned circuit layer, respectively. 112a and the second patterned circuit layer 113a. And, the first conductive layer 122 and the second conductive layer 123 on the flexible substrate 121 are patterned to form a first patterned wiring layer 122a and a second patterned wiring layer 123a, respectively. In this embodiment, the first flexible circuit board 110 is substantially composed of a flexible substrate 110, a first patterned circuit layer 112a and a second patterned circuit layer 113a, and the second flexible circuit The board 120 is substantially composed of a flexible substrate 120, a first patterned wiring layer 122a, and a second patterned wiring layer 123a.

也就是說,線路連接結構140不僅可作為固定元件130於間隙S內所用,亦可作為第一可撓性電路板110與第二可撓性電路板120的連接介面,且元件130可透過線路連接結構140的導電盲孔146與第一連接線路層143a電性連接至第一可撓性電路 板110與第二可撓性電路板120。相較於習知技術將元件接合於軟質介電材料上的線路層,並透過連接器連接兩對向設置的可撓性電路板而言,本發明的內埋式元件封裝結構及其製作方法能有效降低封裝結構的整體厚度,以應用在薄型化設計的電子產品中。 In other words, the line connection structure 140 can be used not only as the fixing component 130 in the gap S but also as the connection interface between the first flexible circuit board 110 and the second flexible circuit board 120, and the component 130 can be transmitted through the line. The conductive blind via 146 of the connection structure 140 is electrically connected to the first connection circuit layer 143a to the first flexible circuit The board 110 and the second flexible circuit board 120. The embedded component package structure of the present invention and the method of fabricating the same according to the prior art, the component is bonded to the circuit layer on the soft dielectric material, and the two oppositely disposed flexible circuit boards are connected through the connector It can effectively reduce the overall thickness of the package structure for use in thin-formed electronic products.

之後,請參考圖1H至圖1I,為了保護第一可撓性電路板110與第二可撓性電路板120上的線路結構,可形成覆蓋層150於第一圖案化線路層112a、122a上以及第一連接線路層143a上,其中覆蓋層150會暴露出部分第一連接線路層143a,以作為電性連接至其他元件的連接介面。相似地,亦可形成覆蓋層160於第二圖案化線路層113a、123a上以及第四導電層144上,其中為了提高線路連接結構140的抗拉強度、抗彎強度以及抗剪強度等,以避免第一可撓性電路板110與第二可撓性電路板120因受外力作用而與線路連接結構140分離,可形成補強板170於覆蓋層160上,其中補強板170對應於連接層145而設置,且覆蓋層160位於連接層145與補強板170之間。一般來說,補強板170可為玻璃環氧基樹脂(FR-4)或金屬等材質所構成。至此,已大致完成本實施例的內埋式元件封裝結構100的製作。 Thereafter, referring to FIG. 1H to FIG. 1I, in order to protect the line structure on the first flexible circuit board 110 and the second flexible circuit board 120, a cover layer 150 may be formed on the first patterned circuit layers 112a, 122a. And the first connection circuit layer 143a, wherein the cover layer 150 exposes a portion of the first connection circuit layer 143a as a connection interface electrically connected to other components. Similarly, a cover layer 160 may be formed on the second patterned circuit layers 113a, 123a and the fourth conductive layer 144, wherein in order to improve the tensile strength, bending strength, shear strength, etc. of the line connection structure 140, The first flexible circuit board 110 and the second flexible circuit board 120 are prevented from being separated from the line connection structure 140 by an external force, and the reinforcing plate 170 may be formed on the cover layer 160, wherein the reinforcing plate 170 corresponds to the connection layer 145. The cover layer 160 is disposed between the connection layer 145 and the reinforcement plate 170. Generally, the reinforcing plate 170 may be made of a material such as glass epoxy resin (FR-4) or metal. Thus far, the fabrication of the embedded component package structure 100 of the present embodiment has been substantially completed.

以下將列舉其他實施例以作為說明。在此必須說明的是,下述實施例沿用前述實施例的元件標號與部分內容,其中採用相同的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例,下述實施例不再重複贅述。 Other embodiments are listed below for illustration. It is to be noted that the following embodiments use the same reference numerals and parts of the above-mentioned embodiments, and the same reference numerals are used to refer to the same or similar elements, and the description of the same technical content is omitted. For the description of the omitted portions, reference may be made to the foregoing embodiments, and the following embodiments are not repeated.

圖2A至圖2J是本發明另一實施例的內埋式元件封裝結構的製作流程示意圖。請先參考圖2A,提供兩個可撓性基材111以及一個可撓性基材121,其中兩個可撓性基材111為並列設置,並使前述兩個可撓性基材111與可撓性基材121之間維持間隙S。接著,請參考圖2B與圖2C,形成至少一個導電通孔111a於各個可撓性基材111,以電性連接各個可撓性基材111上的第一導電層112與第二導電層113。並且,形成至少一個導電通孔121a於可撓性基材121,以電性連接可撓性基材121上的第一導電層122與第二導電層123。通常而言,導電通孔111a例如是先透過雷射鑽孔或機械鑽孔等方式形成貫穿第一導電層112、可撓性基材111與第二導電層113的通孔,接著電鍍前述通孔而得,藉以電性連接第一導電層112與第二導電層113。相似地,導電通孔121a例如是先透過雷射鑽孔或機械鑽孔等方式形成貫穿第一導電層122、可撓性基材121與第二導電層123的通孔,接著電鍍前述通孔而得,藉以電性連接第一導電層122與第二導電層123。 2A to 2J are schematic diagrams showing a manufacturing process of a buried component package structure according to another embodiment of the present invention. Referring first to FIG. 2A, two flexible substrates 111 and a flexible substrate 121 are provided, wherein the two flexible substrates 111 are juxtaposed, and the two flexible substrates 111 are A gap S is maintained between the flexible substrates 121. Next, referring to FIG. 2B and FIG. 2C, at least one conductive via 111a is formed on each flexible substrate 111 to electrically connect the first conductive layer 112 and the second conductive layer 113 on each flexible substrate 111. . Further, at least one conductive via 121a is formed on the flexible substrate 121 to electrically connect the first conductive layer 122 and the second conductive layer 123 on the flexible substrate 121. Generally, the conductive vias 111a are formed through through holes of the first conductive layer 112, the flexible substrate 111, and the second conductive layer 113 by laser drilling or mechanical drilling, and then plating the through holes. The holes are electrically connected to electrically connect the first conductive layer 112 and the second conductive layer 113. Similarly, the conductive vias 121a are formed through through holes of the first conductive layer 122, the flexible substrate 121 and the second conductive layer 123 by laser drilling or mechanical drilling, and then the via holes are plated. Therefore, the first conductive layer 122 and the second conductive layer 123 are electrically connected.

接著,請參考圖2D與圖2E,圖案化各個可撓性基材111上的第一導電層112與第二導電層113,以分別形成第一圖案化線路層112a與第二圖案化線路層113a。並且,圖案化可撓性基材121上的第一導電層122與第二導電層123,以分別形成第一圖案化線路層122a與第二圖案化線路層123a。在本實施例中,第一可撓性電路板110與第三可撓性電路板110’大致上是由可撓性基材110、第一圖案化線路層112a與第二圖案化線路層113a所組成, 第二可撓性電路板120大致上是由可撓性基材120、第一圖案化線路層122a與第二圖案化線路層123a所組成。 Next, referring to FIG. 2D and FIG. 2E, the first conductive layer 112 and the second conductive layer 113 on each flexible substrate 111 are patterned to form a first patterned circuit layer 112a and a second patterned circuit layer, respectively. 113a. And, the first conductive layer 122 and the second conductive layer 123 on the flexible substrate 121 are patterned to form a first patterned wiring layer 122a and a second patterned wiring layer 123a, respectively. In this embodiment, the first flexible circuit board 110 and the third flexible circuit board 110' are substantially composed of a flexible substrate 110, a first patterned circuit layer 112a and a second patterned circuit layer 113a. Composition, The second flexible circuit board 120 is substantially composed of a flexible substrate 120, a first patterned wiring layer 122a and a second patterned wiring layer 123a.

為了保護第一可撓性電路板110、第二可撓性電路板120與第三可撓性電路板110’上的線路結構,可形成第一覆蓋層151於各個可撓性基材111的第一圖案化線路層112a上,以及形成第一覆蓋層152於可撓性基材121的第一圖案化線路層122a上。相似地,可形成第二覆蓋層153於各個可撓性基材111的第二圖案化線路層113a上,以及形成第二覆蓋層154於可撓性基材121的第二圖案化線路層123a上。 In order to protect the line structure on the first flexible circuit board 110, the second flexible circuit board 120 and the third flexible circuit board 110', a first cover layer 151 may be formed on each of the flexible substrates 111. The first patterned wiring layer 112a is formed on the first patterned wiring layer 122a of the flexible substrate 121. Similarly, a second cover layer 153 may be formed on the second patterned circuit layer 113a of each flexible substrate 111, and a second cover layer 154 may be formed on the second patterned circuit layer 123a of the flexible substrate 121. on.

接著,請參考圖2F與圖2G,使第一介電材料層141朝向間隙S移動以壓合至第一可撓性電路板110上的第一圖案化線路層112a以及第二可撓性電路板120上的第一圖案化線路層122a。詳細而言,第一介電材料層141實質上是與第一可撓性電路板110上的第一覆蓋層151相接觸,並與第二可撓性電路板120上的第一覆蓋層152相接觸。相似地,使第二介電材料層142朝向間隙S移動以壓合至第三可撓性電路板110’上的第二圖案化線路層113a以及第二可撓性電路板120上的第二圖案化線路層123a。詳細而言,第二介電材料層142實質上是與第三可撓性電路板110’上的第二覆蓋層153相接觸,並與第二可撓性電路板120上的第二覆蓋層154相接觸。此時,部分第一介電材料層141以及部分第二介電材料層142分別會填入間隙S內而相互連接。具體而言,相互連接後的第一介電材料層141與第二介電材料層 142會形成連接層145,以作為連接第一可撓性電路板110、第二可撓性電路板120與第三可撓性電路板110’所用。另一方面,連接層145包覆了元件130,以固定元件130於間隙S。 Next, referring to FIG. 2F and FIG. 2G, the first dielectric material layer 141 is moved toward the gap S to be pressed onto the first patterned circuit layer 112a and the second flexible circuit on the first flexible circuit board 110. The first patterned circuit layer 122a on the board 120. In detail, the first dielectric material layer 141 is substantially in contact with the first cover layer 151 on the first flexible circuit board 110 and with the first cover layer 152 on the second flexible circuit board 120. Contact. Similarly, the second dielectric material layer 142 is moved toward the gap S to be pressed to the second patterned circuit layer 113a on the third flexible circuit board 110' and the second on the second flexible circuit board 120. The wiring layer 123a is patterned. In detail, the second dielectric material layer 142 is substantially in contact with the second cover layer 153 on the third flexible circuit board 110' and the second cover layer on the second flexible circuit board 120. 154 contact. At this time, a part of the first dielectric material layer 141 and a part of the second dielectric material layer 142 are filled in the gap S and connected to each other. Specifically, the first dielectric material layer 141 and the second dielectric material layer are connected to each other The connection layer 145 is formed as a connection between the first flexible circuit board 110, the second flexible circuit board 120, and the third flexible circuit board 110'. On the other hand, the connection layer 145 covers the element 130 to fix the element 130 to the gap S.

之後,請參考圖2H至圖2J,例如透過微影蝕刻的方式圖案化第三導電層143以形成第一連接線路層143a,並例如透過微影蝕刻的方式圖案化第四導電層144以形成第二連接線路層144a。再例如依序透過雷射鑽孔(或機械鑽孔)與填充導電膏(或電鍍)等製作程序形成多個導電盲孔146於連接層145。詳細而言,部分的導電盲孔146可電性連接第一連接線路層143a與元件130。另一部份的導電盲孔146貫穿了第一可撓性電路板110上的第一覆蓋層151以電性連接至第一可撓性電路板110上的第一圖案化線路層112a,以及貫穿了第二可撓性電路板120上的第一覆蓋層152以電性連接至第二可撓性電路板120上的第一圖案化線路層122a。又一部分的導電盲孔146貫穿了第三可撓性電路板110’上的第二覆蓋層153以電性連接至第三可撓性電路板110’上的第二圖案化線路層113a。 Thereafter, please refer to FIG. 2H to FIG. 2J, for example, by patterning the third conductive layer 143 to form the first connection line layer 143a, and patterning the fourth conductive layer 144 by lithography, for example, to form The second connection circuit layer 144a. Further, a plurality of conductive blind vias 146 are formed on the connection layer 145 by, for example, laser drilling (or mechanical drilling) and filling conductive paste (or plating). In detail, a portion of the conductive via 146 is electrically connected to the first connection layer 143a and the component 130. Another portion of the conductive via 146 extends through the first cover layer 151 on the first flexible circuit board 110 to be electrically connected to the first patterned circuit layer 112a on the first flexible circuit board 110, and The first cover layer 152 penetrating the second flexible circuit board 120 is electrically connected to the first patterned circuit layer 122a on the second flexible circuit board 120. A further portion of the conductive via 146 extends through the second cover layer 153 on the third flexible circuit board 110' to electrically connect to the second patterned circuit layer 113a on the third flexible circuit board 110'.

此處,第二連接線路層144a可透過貫穿第三可撓性電路板110’上的第二覆蓋層153的導電盲孔146以電性連接至第三可撓性電路板110’上的第二圖案化線路層113a。至此,已大致完成本實施例的內埋式元件封裝結構100A的製作。 Here, the second connection line layer 144a can be electrically connected to the third flexible circuit board 110' through the conductive blind holes 146 of the second cover layer 153 on the third flexible circuit board 110'. The second patterned circuit layer 113a. Thus far, the fabrication of the embedded component package structure 100A of the present embodiment has been substantially completed.

綜上所述,在本發明的內埋式元件封裝結構及其製作方法中,可透過線路連接結構作為兩對向設置的可撓性電路板的連 接介面,其中元件(例如主動元件或被動元件)可埋設於前述兩對向設置的可撓性電路板之間的間隙內,並由填入前述間隙內的線路連接結構的連接層所包覆。另一方面,前述元件可透過線路連接結構的連接線路層電性連接至前述各個可撓性電路板。因此,相較於習知技術將元件接合於軟質介電材料上的線路層,並透過連接器連接兩對向設置的可撓性電路板而言,本發明的內埋式元件封裝結構及其製作方法能有效降低封裝結構的整體厚度,以應用在薄型化設計的電子產品中。 In summary, in the embedded component package structure of the present invention and the manufacturing method thereof, the line connection structure can be used as a connection of two oppositely disposed flexible circuit boards. a interface in which an element (for example, an active element or a passive element) is embedded in a gap between the two oppositely disposed flexible circuit boards and covered by a connection layer of the line connection structure filled in the gap . On the other hand, the aforementioned components can be electrically connected to the respective flexible circuit boards through the connection wiring layers of the line connection structure. Therefore, the embedded component package structure of the present invention and the connector layer of the present invention are connected to the circuit layer on the flexible dielectric material by a conventional technique and connected to the two oppositely disposed flexible circuit boards through the connector The manufacturing method can effectively reduce the overall thickness of the package structure for use in thin-formed electronic products.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

100‧‧‧內埋式元件封裝結 100‧‧‧Internal component package junction

110‧‧‧第一可撓性電路板 110‧‧‧First flexible circuit board

111、121‧‧‧可撓性基材 111, 121‧‧‧Flexible substrate

112a、122a‧‧‧第一圖案化線路層 112a, 122a‧‧‧ first patterned circuit layer

113a、123a‧‧‧第二圖案化線路層 113a, 123a‧‧‧Second patterned circuit layer

120‧‧‧第二可撓性電路板 120‧‧‧Second flexible circuit board

130‧‧‧元件 130‧‧‧ components

140‧‧‧線路連接結構 140‧‧‧Line connection structure

143a‧‧‧第一連接線路層 143a‧‧‧First connection circuit layer

144‧‧‧第四導電層 144‧‧‧4th conductive layer

145‧‧‧連接層 145‧‧‧Connection layer

146‧‧‧導電盲孔 146‧‧‧ Conductive blind holes

150、160‧‧‧覆蓋層 150, 160‧‧ ‧ overlay

170‧‧‧補強板 170‧‧‧ reinforcing plate

S‧‧‧間隙 S‧‧‧ gap

Claims (10)

一種內埋式元件封裝結構,包括:一第一可撓性電路板;一第二可撓性電路板,與該第一可撓性電路板對向設置,其中該第一可撓性電路板與該第二可撓性電路板之間具有一間隙;一元件,埋設於該間隙內;以及一線路連接結構,包括:一連接層,連接該第一可撓性電路板與該第二可撓性電路板,並填入該間隙內以包覆該元件;以及一第一連接線路層,位於該連接層的一上表面上,其中該第一可撓性電路板與該第二可撓性電路板分別透過該第一連接線路層電性連接至該元件。 A buried component package structure includes: a first flexible circuit board; a second flexible circuit board disposed opposite the first flexible circuit board, wherein the first flexible circuit board Having a gap with the second flexible circuit board; an element embedded in the gap; and a line connection structure comprising: a connection layer connecting the first flexible circuit board and the second a flexible circuit board filled in the gap to cover the component; and a first connection circuit layer on an upper surface of the connection layer, wherein the first flexible circuit board and the second flexible The circuit boards are electrically connected to the component through the first connection circuit layer. 如申請專利範圍第1項所述的內埋式元件封裝結構,更包括:一第三可撓性電路板,與該第一可撓性電路板並列設置,並透過該連接層連接該第一可撓性電路板與該第二可撓性電路板,其中該線路連接結構還包括位於該連接層的一下表面上的一第二連接線路層,且該第三可撓性電路板電性連接至該第二連接線路層。 The embedded component package structure of claim 1, further comprising: a third flexible circuit board disposed in parallel with the first flexible circuit board and connected to the first through the connection layer a flexible circuit board and the second flexible circuit board, wherein the line connection structure further comprises a second connection circuit layer on a lower surface of the connection layer, and the third flexible circuit board is electrically connected To the second connection circuit layer. 一種內埋式元件封裝結構的製作方法,包括:提供對向設置的至少兩可撓性基材,並在該至少兩可撓性基材之間具有一間隙,其中各該可撓性基材上形成有相對的一第一 導電層與一第二導電層;將一元件埋設於該間隙內;提供一第一介電材料層與一第二介電材料層,分別位於該至少兩可撓性基材的相對兩側,其中該第一介電材料層上形成有一第三導電層,且該第二介電材料層上形成有一第四導電層;使該第一介電材料層朝向該間隙移動以壓合至該至少兩可撓性基材的該些第一導電層,並使該第二介電材料層朝向該間隙移動以壓合至該至少兩可撓性基材的該些第二導電層,部分該第一介電材料層與部分該第二介電材料層的分別填入該間隙內而相互連接以形成一連接層,該連接層該連接該至少兩可撓性基材並包覆該元件;圖案化該第三導電層以形成一第一連接線路層;以及形成多個導電盲孔於該連接層,以電性連接各該第一導電層與該第一連接線路層以及電性連接該元件與該第一連接線路層。 A method of fabricating a buried component package structure, comprising: providing at least two flexible substrates disposed oppositely, and having a gap between the at least two flexible substrates, wherein each of the flexible substrates Formed with a relative first a conductive layer and a second conductive layer; an element is buried in the gap; a first dielectric material layer and a second dielectric material layer are respectively disposed on opposite sides of the at least two flexible substrates, Forming a third conductive layer on the first dielectric material layer, and forming a fourth conductive layer on the second dielectric material layer; moving the first dielectric material layer toward the gap to press the at least The first conductive layers of the two flexible substrates, and the second dielectric material layer is moved toward the gap to be pressed to the second conductive layers of the at least two flexible substrates, part of the first a dielectric material layer and a portion of the second dielectric material layer are respectively filled into the gap and connected to each other to form a connection layer, the connection layer connecting the at least two flexible substrates and covering the component; The third conductive layer is formed to form a first connecting circuit layer; and a plurality of conductive blind holes are formed in the connecting layer to electrically connect the first conductive layer and the first connecting circuit layer and electrically connect the component And the first connecting circuit layer. 如申請專利範圍第3項所述的內埋式元件封裝結構的製作方法,更包括:在形成該些導電盲孔於該連接層之後,圖案化各該可撓性基材上的該第一導電層與該第二導電層,以分別形成一第一圖案化線路層與一第二圖案化線路層。 The method for fabricating a buried component package structure according to claim 3, further comprising: patterning the first of the flexible substrates after forming the conductive vias in the connection layer And a conductive layer and the second conductive layer to form a first patterned circuit layer and a second patterned circuit layer, respectively. 如申請專利範圍第4項所述的內埋式元件封裝結構的製作方法,更包括:在圖案化各該可撓性基材上的該第一導電層與該第二導電層 之後,形成一覆蓋層於該些第一圖案化線路層上以及該第一連接線路層上,其中該覆蓋層暴露出部分該第一連接線路層。 The method for fabricating a buried component package structure according to claim 4, further comprising: patterning the first conductive layer and the second conductive layer on each of the flexible substrates Thereafter, a capping layer is formed on the first patterned circuit layers and on the first connecting circuit layer, wherein the capping layer exposes a portion of the first connecting circuit layer. 如申請專利範圍第4項所述的內埋式元件封裝結構的製作方法,更包括:在圖案化各該可撓性基材上的該第一導電層與該第二導電層之後,形成一覆蓋層於該些第二圖案化線路層上以及該第四導電層上。 The method for fabricating a buried component package structure according to claim 4, further comprising: forming a first conductive layer and the second conductive layer on each of the flexible substrates after forming A cover layer is on the second patterned circuit layers and on the fourth conductive layer. 如申請專利範圍第6項所述的內埋式元件封裝結構的製作方法,更包括:在形成該覆蓋層於該些第二圖案化線路層上以及該第四導電層上之後,形成一補強板於該覆蓋層上,其中該補強板對應於該連接層而設置,且該覆蓋層位於該連接層與該補強板之間。 The method for fabricating a buried component package structure according to claim 6, further comprising: forming a reinforcement after forming the cap layer on the second patterned circuit layer and the fourth conductive layer The plate is disposed on the cover layer, wherein the reinforcing plate is disposed corresponding to the connecting layer, and the cover layer is located between the connecting layer and the reinforcing plate. 如申請專利範圍第3項所述的內埋式元件封裝結構的製作方法,更包括:在將該元件埋設於該間隙內之前,形成至少一導電通孔於各該可撓性基材,以電性連接各該可撓性基材上的該第一導電層與該第二導電層;以及圖案化各該可撓性基材上的該第一導電層與該第二導電層,以分別形成一第一圖案化線路層與一第二圖案化線路層。 The method for fabricating a buried component package structure according to claim 3, further comprising: forming at least one conductive via hole in each of the flexible substrates before embedding the component in the gap Electrically connecting the first conductive layer and the second conductive layer on each of the flexible substrates; and patterning the first conductive layer and the second conductive layer on each of the flexible substrates to respectively A first patterned circuit layer and a second patterned circuit layer are formed. 如申請專利範圍第8項所述的內埋式元件封裝結構的製作方法,更包括:在圖案化各該可撓性基材上的該第一導電層與該第二導電層 之後,形成一第一覆蓋層於該些第一圖案化線路層上以及形成一第二覆蓋層於該些第二圖案化線路層上,其中部分該些導電盲孔貫穿該第一覆蓋層以電性連接至該些第一圖案化線路層,且又一部分該些導電盲孔貫穿該第二覆蓋層以電性連接至該些第二圖案化線路層的其中至少一者。 The method for fabricating a buried component package structure according to claim 8 , further comprising: patterning the first conductive layer and the second conductive layer on each of the flexible substrates Forming a first capping layer on the first patterned circuit layer and forming a second capping layer on the second patterned circuit layer, wherein a portion of the conductive blind vias extend through the first capping layer And electrically connecting to the at least one of the second patterned circuit layers. 如申請專利範圍第9項所述的內埋式元件封裝結構的製作方法,更包括:在圖案化該第三導電層的同時,圖案化該第四導電層以形成一第二連接線路層,該第二連接線路層透過貫穿該第二覆蓋層的該些導電盲孔的其中至少一者電性連接至該些第二圖案化線路層的其中至少一者。 The method for fabricating a buried component package structure according to claim 9 , further comprising: patterning the third conductive layer to form a second connecting circuit layer while patterning the third conductive layer; The second connection line layer is electrically connected to at least one of the second patterned circuit layers through at least one of the conductive vias extending through the second cover layer.
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