TWI538200B - High voltage junction field effect transistor - Google Patents

Description

High voltage junction field effect transistor

This invention relates to a junction field effect transistor, and more particularly to a high voltage junction field effect transistor.

With the development of semiconductor technology, a Junction Field Effect Transistor (JFET) has been widely used in various electronic products.

In the junction field effect transistor, a channel is formed between the drain and the source. The gates are located on both sides of the channel. The size of the depletion zone is controlled by the voltage of the gate to cause the channel to have a pinch off, thereby controlling the switching of the channel.

The junction field effect transistor can be used as a constant current diode or a fixed value resistor. Alternatively, the junction field effect transistor can be used to adjust the signal voltage at low and high frequencies.

Due to the development of high-voltage semiconductor technology, a high-voltage junction field effect transistor has been developed. Researchers are currently working to improve the performance of high voltage junction field effect transistors.

The present invention relates to a high voltage junction field effect transistor that utilizes a P-type top layer design to avoid leakage currents escaping from the surface, thereby effectively reducing the breakdown voltage of the high voltage junction field effect transistor.

According to an aspect of the invention, a high voltage junction field effect transistor is proposed (High Voltage Junction Field Effect Transistor, HV JFET). The high voltage junction field effect transistor includes a substrate, a drain, a source and a P-type top layer. The drain is placed on the substrate. The source is disposed on the substrate. A channel is formed between the source and the drain. The P-type top layer is placed above the channel.

In order to make the above-mentioned contents of the present invention more comprehensible, various embodiments are described below, and in conjunction with the drawings, the detailed description is as follows:

The following is a detailed description of various embodiments, which utilizes a P-type top layer design to avoid leakage current, thereby effectively reducing the threshold voltage of the High Voltage Junction Field Effect Transistor (HV JFET). Voltage). However, the examples are for illustrative purposes only and are not intended to limit the scope of the invention. Further, the drawings in the embodiments are omitted to partially illustrate the technical features of the present invention.

First embodiment

Referring to FIG. 1 , a top view of the high voltage junction field effect transistor 100 of the first embodiment is illustrated. The high voltage junction field effect transistor 100 includes a substrate 110P (shown in FIG. 5), a drain 120N, a source 130N, and a P-type top layer 140P. The drain 120N and the source 130N are disposed on the substrate 110P. A channel 150 is formed between the source 120N and the drain 130N. The P-type top layer 140P is disposed above the channel 150. When the channel 150 is closed, the P-type top layer 140P can avoid leakage current from traversing the surface of the substrate 110P.

Please refer to Figures 1~2. Figure 2 shows the high-voltage junction field of Figure 1. Schematic diagram of N-type well 160N and P-type well 170P of effect transistor 100. The high-voltage junction field effect transistor 100 further includes an N-type well 160N, a two-P-type well 170P, and two second-poles 180P. The relationship between the N-well 160N and the P-well 170P can be more clearly understood from Fig. 2. The P-well 170P and the N-well 160N are disposed on the substrate 110P. Since the substrate 110P is located below the N-well 160N and the P-well 170P, it is indicated by a broken line. In this embodiment, both the base 110P and the P-type well 170P are P-type, and the N-type well 160N is N-type.

As shown in Fig. 1, the source 130N and the drain 120N are disposed in the N-well 160N, and the passage 150 is formed in the N-well 160N. In this embodiment, the source 130N and the drain 120N are N-type heavily doped layers. The gate 180P is disposed in the P-well 170P. In the present embodiment, the gate 180P is a P-type heavily doped layer.

Referring to Fig. 3, there is shown a cross-sectional view of the high voltage junction field effect transistor 300 of Fig. 1 along section line 3-3'. As seen from Fig. 3, such P-type wells 170P are disposed on both sides of the N-type well 160N such that the N-type well 160N creates a depletion zone therein. The width of the depletion zone is a function of the reverse bias. When the width of the depletion zone reaches a certain level, the channel 150 (shown in Figure 1) can be pinched off. The N-well 160N depicted in Figure 3 is part of the passage 150. In this embodiment, the P-type top layer 140P is disposed on the channel 150. The P-type top layer 140P can prevent leakage current from traversing from the surface of the N-type well 160N, thereby effectively reducing the breakdown voltage of the high-voltage junction field effect transistor 100.

Referring to FIG. 2, the P-type wells 170P are arranged along an annular line and connected to each other to form a C-shaped structure. The loop line surrounds the N-well 160N. As shown in Figure 1, the drain 120N is located at the geometric center point of the loop line, while the source 130N Located outside the loop line. The region surrounded by the P-well 170P forms a drift region 190. The drift zone 190 can provide the high voltage withstand characteristics of the high voltage junction field effect transistor 100.

As shown in FIG. 1, the C-shaped structure to which the P-well 170P is connected has a notch 171, the P-type top layer 140P is located in the notch 171, and the source 130N is located outside the notch 171. At the notch 171, the P-well 170P is located on either side of the channel 150, enabling the channel 150 at the notch 171 to create a pinch phenomenon. In this embodiment, the P-type top layer 140P is disposed at the notch 171, and when the pinching phenomenon occurs, leakage current can be effectively prevented from passing through the surface of the notch 171.

Referring to Figure 4, there is shown a cross-sectional view of the high voltage junction field effect transistor 100 of Figure 1 taken along section line 4-4'. The section line 4-4' of Fig. 1 is tangential to the source 130N from the drain 120N and passes through the notch 171. As seen from Fig. 4, a channel 150 is formed in the N-well 160N between the drain 120N and the source 130N. The pinch phenomenon of the passage 150 will be formed at the notch 171. The P-type top layer 140P is disposed on the channel 150 to prevent leakage current from traversing from the surface at the notch 171 when the pinch phenomenon occurs.

In addition, as shown in FIG. 4, the high voltage junction field effect transistor 100 further includes a plurality of field oxide layers 191, an N type adjustment layer 192N, and a P type adjustment layer 193P. To avoid overcomplicating the top view, the field oxide layer 191 is not depicted in FIG. The field oxide layer 191 is used to partition the drain 120N, the P-type top layer 140P, and the source 130N. The N-type adjustment layer 192N and the P-type adjustment layer 193P are disposed in the N-type well 160N and are located below the field oxide layer 191. The P-type adjustment layer 193P is disposed below the N-type adjustment layer 192N such that the channel 150 is slightly offset downward to prevent the channel 150 from being too close to the surface. In this way, more The threshold voltage of the high voltage junction field effect transistor 100 is improved.

Referring to FIG. 5, a cross-sectional view of the high voltage junction field effect transistor 100 of FIG. 1 along section line 5-5' is shown. The section line 5-5' of Fig. 1 is tangential to the gate 180P from the drain 120N without crossing the notch 171. As seen from FIG. 5, the field oxide layer 191 is used to partition the drain 120N and the gate 180P. The N-type adjustment layer 192N and the P-type adjustment layer 193P are also disposed in the N-type well 160N and are located below the field oxide layer 191. Between the drain 120N and the gate 180P, the drift region 190 described above is formed to provide high voltage withstand characteristics of the high voltage junction field effect transistor 100.

The manufacturing method of the high-voltage junction field effect transistor 100 will be described in detail below with reference to FIGS. 3 to 4. As shown in Fig. 3, first, a substrate 110P is provided. Next, an N-type well 160N and a P-type well 170P are formed in the substrate 110P.

Then, as shown in FIG. 4, a P-type adjustment layer 193P and an N-type adjustment layer 192N are formed in the N-type well 160N. Next, a field oxide layer 191 is formed.

Next, as shown in FIG. 4, an N-type material is doped to form a drain 120N and a source 130N. Then, as shown in FIG. 4, the P material is doped to form a gate 180P (shown in FIG. 3) and a P-type top layer 140P. The steps of doping the N-type material and doping the P-type material may be exchanged in order, depending on the design and process requirements.

Then, as shown in FIG. 3, the insulating layer 194 is formed to cover the N-well 160N and the P-well 170P. Thus, the high voltage junction field effect transistor 100 of the present embodiment is completed.

In addition, the high voltage junction field effect transistor 100 of the present embodiment can not only avoid leakage current from traversing the surface of the substrate 110P and improve the threshold voltage. It is also suitable for regional oxidation of silicon (LOCOS) technology, shallow trench isolation (STI) technology, deep trench isolation (DTI) technology, silicon overlying silicon (silicon) -on insulator, SOI) technology and epitaxial (EPI) technology.

Second embodiment

Referring to FIG. 6, a top view of the high voltage junction field effect transistor 200 of the second embodiment is illustrated. The high-voltage junction field effect transistor 200 of this embodiment differs from the high-voltage junction field effect transistor 100 of the first embodiment in the number of channels 250, and the rest of the same is not repeated.

As shown in Fig. 6, the six P-wells 270P of the present embodiment are separated by six notches 271. These P-type wells 270P are symmetrically arranged along the annular line. These notches 271 are also arranged symmetrically along the loop line.

In addition, six sources 230N are disposed outside the six notches 271, and six channels 250 are formed between the drain 220N and the six sources 230N. These channels 250 all pass through the drift zone 290. The threshold voltages of the six channels 250 are substantially the same. The source 230N is electrically connected to the same terminal end, and the sum of the threshold voltages of the six channels 250 is the threshold voltage of the high voltage junction field effect transistor 200.

Third embodiment

Referring to FIG. 7, a top view of the high voltage junction field effect transistor 300 of the third embodiment is illustrated. The high-voltage junction field effect transistor 300 of this embodiment differs from the high-voltage junction field effect transistor 200 of the second embodiment in the arrangement and number of channels 350, and the rest of the same is not repeated.

As shown in Fig. 7, the twelve P-wells 370P of this embodiment are ten The two notches 371 are separated. These P-type wells 370P are symmetrically arranged along the annular line. These notches 371 are also arranged symmetrically along the loop line. In this embodiment, the loop line is substantially elliptical.

In addition, twelve sources 330N are disposed outside the twelve notches 371, and twelve channels 350 are formed between the drain 320N and the twelve sources 330N. These channels 350 all pass through the drift zone 390. The source 330N is electrically connected to the same end point, and the sum of the threshold voltages of the twelve channels 350 is the threshold voltage of the high voltage junction field effect transistor 300.

In view of the above, the present invention has been disclosed in various embodiments, and is not intended to limit the present invention. A person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

100, 200, 300‧‧‧ high voltage junction field effect transistor

110P‧‧‧Base

120N, 220N, 320N‧‧‧汲

130N, 230N, 330N‧‧‧ source

140P‧‧‧P type top

150, 250, 350‧‧ channels

160N‧‧‧N well

170P, 270P, 370P‧‧‧P type well

171, 271, 371‧‧ ‧ gap

180P‧‧‧ gate

190, 290, 390‧‧‧ drift zone

191‧‧ ‧ field oxide layer

192N‧‧‧N type adjustment layer

193P‧‧‧P type adjustment layer

194‧‧‧Insulation

FIG. 1 is a plan view showing a High Voltage Junction Field Effect Transistor (HV JFET) of the first embodiment.

FIG. 2 is a schematic view showing the N-type well and the P-type well of the high-voltage junction field effect transistor of FIG. 1 .

Figure 3 is a cross-sectional view of the high voltage junction field effect transistor of Figure 1 taken along section line 3-3'.

Figure 4 is a cross-sectional view of the high voltage junction field effect transistor of Figure 1 taken along section line 4-4'.

Figure 5 is a cross-sectional view of the high voltage junction field effect transistor of Figure 1 taken along section line 5-5'.

Figure 6 is a plan view showing the high voltage junction field effect transistor of the second embodiment.

Fig. 7 is a plan view showing the high voltage junction field effect transistor of the third embodiment.

100‧‧‧High-voltage junction field effect transistor

110P‧‧‧Base

140P‧‧‧P type top

160N‧‧‧N well

170P‧‧‧P type well

180P‧‧‧ gate

194‧‧‧Insulation

Claims (9)

A high voltage Junction Field Effect Transistor (HV JFET) includes: a substrate; a drain electrode disposed on the substrate; a source disposed on the substrate, the source And forming a channel between the drain, the channel is located under a layer of oxide; a P-type top layer disposed under the oxide layer and above the channel; and two gates disposed on the channel side. The high-voltage junction field effect transistor according to claim 1, wherein the substrate is a P-type, the high-voltage transistor further includes: an N-type well disposed on the substrate, the source and the The bungee is disposed in the N-type well; and the second P-type well is disposed on both sides of the N-type well. The high voltage junction field effect transistor of claim 2, wherein the P-type top layer is disposed on the N-type well. The high voltage junction field effect transistor according to claim 2, wherein the P type wells are connected to each other. The high voltage junction field effect transistor of claim 2, wherein the P-type wells are arranged along an annular line surrounding the N-type well. The high voltage junction field effect transistor of claim 5, wherein the drain is located at a geometric center point of the loop line. High-voltage junction field effect electric crystal as described in claim 5 a body, wherein the source is located outside the loop line. The high-voltage junction field effect transistor according to claim 5, wherein the P-type wells are arranged along the annular line and connected to a C-shaped structure, the C-shaped structure has a notch, and the P-shaped top layer is located The gap. The high voltage junction field effect transistor of claim 8, wherein the source is located outside the gap.