TWI534986B - High voltage ed nmos embedded high voltage lateral njfet - Google Patents
High voltage ed nmos embedded high voltage lateral njfet Download PDFInfo
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本發明的具體實施例一般與半導體裝置有關,且更特別地,與包括嵌入的高壓接面閘極場效應電晶體(JFET)的一個n-通道金屬氧化物場效應電晶體(NMOS)有關。 Particular embodiments of the present invention are generally associated with semiconductor devices and, more particularly, with an n-channel metal oxide field effect transistor (NMOS) including an embedded high voltage junction gate field effect transistor (JFET).
高壓製程已經被廣泛地用於功率管理積體電路(PMIC)以及切換式電源供應器(SMPS),該兩者通常被作為LED驅動器使用。 High press cycles have been widely used in power management integrated circuits (PMICs) and switched power supplies (SMPS), both of which are commonly used as LED drivers.
在近年內,令人感興趣的有效“綠能”電子裝置穩定增加,迫使裝置製造商尋求更高的變換效率和更低的備用功耗。切換模式功率IC需要整合的起動電路和脈寬調變(PWM)電路。令人遺憾,一般的高壓起動電路使用一功率電阻器方法,其中功率在起動後持續由功率電阻器消散。功率電阻器係被選擇為使得它將在起動操作期間為電容器和PWM電路提供充電電流。PWM電路將繼續操作,直到它的Vcc電壓低於最小工作電壓額定,在那個點輔助電壓被施加至PWM電路的Vcc。PWM電路是在5V~30V之間正常操作。 In recent years, the steadily increasing number of effective "green" electronic devices of interest has forced device manufacturers to seek higher conversion efficiency and lower standby power consumption. Switching mode power ICs require integrated start-up circuitry and pulse width modulation (PWM) circuitry. Unfortunately, a typical high voltage starting circuit uses a power resistor approach in which power is continuously dissipated by the power resistor after starting. The power resistor is selected such that it will provide a charging current for the capacitor and PWM circuitry during the startup operation. The PWM circuit will continue to operate until its Vcc voltage is below the minimum operating voltage rating at which point the auxiliary voltage is applied to Vcc of the PWM circuit. The PWM circuit operates normally between 5V and 30V.
在近年的進一步發展是在LED驅動IC中使用電源線電壓(即AC100~240V)來驅動LED。這些LED驅動IC常規上使用降壓轉換器並且包括高壓切換類型NMOS,以提供電流來驅動LED。傳統的解決方法也使用高壓空乏型MOS,以提供參考電壓或者功率以供應內部電路。不過,高壓空乏型MOS需要額外的電路區域和額外的遮罩以供形成。因此,有對現存的傳統解決辦法之外的另一種選擇的需求。 In recent years, the power line voltage (ie, AC100~240V) is used to drive the LED in the LED driver IC. These LED driver ICs conventionally use a buck converter and include a high voltage switching type NMOS to provide current to drive the LEDs. Conventional solutions also use high voltage depletion MOS to provide a reference voltage or power to supply internal circuitry. However, high voltage depletion MOS requires additional circuit areas and additional masks for formation. Therefore, there is a need for an alternative to existing traditional solutions.
一些示例實施例因此指向一個n-通道金屬氧化物場效應電晶體(NMOS或者nMOSFET),其包括一嵌入的高壓接面閘極場效應電晶體(JFET)。在一些例子中,NMOS嵌入的JFET可能至少部分基於對標準高壓(HV)製程的修改而提供,且可能不需要另外的遮罩或者程序。以這種方法,本發明的具體實施例可能使用現有的半導體裝置製程,藉由把HV JFET嵌入NMOS的源極或汲極邊緣而提供在一相對小區域中的高壓JFET。 Some example embodiments thus point to an n-channel metal oxide field effect transistor (NMOS or nMOSFET) that includes an embedded high voltage junction gate field effect transistor (JFET). In some examples, an NMOS embedded JFET may be provided based at least in part on modifications to a standard high voltage (HV) process, and may not require additional masking or programming. In this manner, embodiments of the present invention may use existing semiconductor device processes to provide a high voltage JFET in a relatively small area by embedding the HV JFET in the source or drain edge of the NMOS.
在一個示例實施例中,提供一半導體裝置,其包括P型基板、設置為鄰近該基板的N型井區、設置為鄰近該N型井區的P型井區、以及設置為鄰近該N型井及在該第一和第二P型井區的相對側的N+摻雜區。P型井區包括P+摻雜區、第三N+摻雜區和閘極結構,第三N+摻雜區被安插在P+摻雜區和閘極結構之間。 In an exemplary embodiment, a semiconductor device is provided that includes a P-type substrate, an N-type well region disposed adjacent to the substrate, a P-type well region disposed adjacent to the N-type well region, and disposed adjacent to the N-type A well and an N+ doped region on opposite sides of the first and second P-type well regions. The P-type well region includes a P+ doped region, a third N+ doped region, and a gate structure, and a third N+ doped region is interposed between the P+ doped region and the gate structure.
根據第二示例實施例,提供一半導體裝置,其包括P型基板、設置為鄰近該基板的N型井區、設置為鄰近該N型井區的第一和第二P型井區、以及設置為鄰近N型井區及該基板的一第三P型井區。N型井區包含第一和第二P型井區,使得該N型井區的至少一部分被安插在該第一和第二,第二和第三,以及第一和第三P型井區之間。半導體裝置更進一步包括設置為鄰近該N型井及在該第一和第二P型井區的相對側的第一和第二N+摻雜區。第三P型井包括第三P+摻雜區,第二P型井區包括第二P+摻雜區,且該第一P型井包括第一P+摻雜區、第三N+摻雜區和一閘極結構,第三N+摻雜區被安插在該第一P+摻雜區和該閘極結構之間。第一P型井區的至少一部分被安插在該第一P+摻雜區及該第一N+摻雜區之間。 According to a second exemplary embodiment, there is provided a semiconductor device including a P-type substrate, an N-type well region disposed adjacent to the substrate, first and second P-type well regions disposed adjacent to the N-type well region, and setting It is adjacent to the N-type well region and a third P-type well region of the substrate. The N-type well region includes first and second P-type well regions such that at least a portion of the N-type well region is interposed in the first and second, second, and third, and first and third P-type well regions between. The semiconductor device still further includes first and second N+ doped regions disposed adjacent to the N-type well and on opposite sides of the first and second P-type well regions. The third P-type well includes a third P+ doped region, the second P-type well region includes a second P+ doped region, and the first P-type well includes a first P+ doped region, a third N+ doped region, and a first P-type well region A gate structure, a third N+ doped region is interposed between the first P+ doped region and the gate structure. At least a portion of the first P-type well region is interposed between the first P+ doped region and the first N+ doped region.
根據第三示例實施例,提供一半導體裝置,其包含P型基板、設置為鄰近基板的N型井區、設置為鄰近N型井區的第一P型井區、設置為鄰近N型井區以及基板的第二P型井區、以及設置為鄰近N型井區以及在第一P型井區的相對側的第一及第二N+摻雜區。該N型井區包含第一P型井區,使得N型井區的至少一部分介於第一及第二P型井區之間。該第二P型井包含第二P+摻雜區,以及第一P型井區包含第一P+摻雜區、第三N+摻雜區以及閘極結構,該第三N+摻雜區介於P+摻雜區以及閘極結 構之間。第二P型井區的至少一部分介於第一P+摻雜區以及第一N+摻雜區之間。 According to a third exemplary embodiment, there is provided a semiconductor device including a P-type substrate, an N-type well region disposed adjacent to the substrate, a first P-type well region disposed adjacent to the N-type well region, and disposed adjacent to the N-type well region And a second P-type well region of the substrate, and first and second N+ doped regions disposed adjacent to the N-type well region and on opposite sides of the first P-type well region. The N-type well region includes a first P-type well region such that at least a portion of the N-type well region is between the first and second P-type well regions. The second P-type well includes a second P+ doped region, and the first P-type well region includes a first P+ doped region, a third N+ doped region, and a gate structure, the third N+ doped region being between P+ Doped region and gate junction Between the structures. At least a portion of the second P-type well region is interposed between the first P+ doped region and the first N+ doped region.
本發明以上所述的實施例和其他細節被描述於下文中,本發明中具有嵌入的JFET的NMOS的相應和其他實施例亦被描述於下文中。 The above described embodiments and other details of the invention are described below, and corresponding and other embodiments of the NMOS with embedded JFETs in the present invention are also described below.
101‧‧‧JFET 101‧‧‧JFET
102‧‧‧NMOS 102‧‧‧NMOS
103‧‧‧IC封裝 103‧‧‧IC package
201‧‧‧P型材料基板 201‧‧‧P type material substrate
205‧‧‧額外的P型井區 205‧‧‧Additional P-type well area
207‧‧‧第一P型井區 207‧‧‧First P-type well area
208‧‧‧N型井區 208‧‧‧N type well area
209‧‧‧第一N+摻雜區 209‧‧‧First N+ doped area
210‧‧‧第二N+摻雜區 210‧‧‧Second N+ doped region
211‧‧‧閘極結構 211‧‧‧ gate structure
212‧‧‧P-頂部分 212‧‧‧P-top part
213‧‧‧N型層 213‧‧‧N-type layer
214‧‧‧P+摻雜區 214‧‧‧P+ doped area
215‧‧‧第三N+摻雜區 215‧‧‧ Third N+ doped area
216‧‧‧場氧化部分 216‧‧ ‧ field oxidation
305‧‧‧第三P型井區 305‧‧‧ Third P-type well area
307、405‧‧‧第二P型井區 307, 405‧‧‧Second P-type well area
308、409‧‧‧第二P+摻雜區 308, 409‧‧‧Second P+ doped area
309‧‧‧第三P+摻雜區 309‧‧‧ Third P+ doped area
上述已概括說明本發明,現在伴隨圖式(其並不一定依比例繪製)作為參考,且其中:第1a圖描繪傳統的降壓轉換器電路的方塊圖;第1b圖描繪示例實施例的方塊圖;第2a圖描繪根據本發明第一示例實施例的等效電路表現;第2b圖描繪根據該第一示例實施例的半導體裝置的俯視圖;第2c圖描繪第2b圖說明的半導體裝置沿線A-A'以及B-B'的兩個橫截面圖;第3a圖描繪根據本發明第二示例實施例的等效電路表現;第3b圖描繪根據該第二示例實施例的半導體裝置的俯視圖;第3c圖描繪第3b圖說明的半導體裝置沿線A-A'以及B-B'的兩個橫截面圖;第4a圖描繪根據本發明第三示例實施例的等效電路表現;第4b圖描繪根據該第三示例實施例的半導體裝置的俯視圖;第4c圖描繪第4b圖說明的半導體裝置沿線A-A'以及B-B'的兩個橫截面圖;第5a圖描繪第四示例實施例的電性圖;第5b圖描繪根據該第四示例實施例的半導體裝置的俯視圖;第5c圖描繪第5b圖說明的半導體裝置沿線A-A'以及B-B'的兩個橫截面圖;第6a圖描繪根據第五示例實施例的半導體裝置的俯視圖;以及第6b圖描繪第6a圖說明的半導體裝置沿線A-A'以及B-B'的兩個橫 截面圖。 The invention has been described in detail above with reference to the drawings, which are not necessarily drawn to scale, and wherein: FIG. 1a depicts a block diagram of a conventional buck converter circuit; FIG. 1b depicts a block of an example embodiment Figure 2a depicts an equivalent circuit representation in accordance with a first exemplary embodiment of the present invention; Figure 2b depicts a top view of a semiconductor device in accordance with the first exemplary embodiment; and Figure 2c depicts a semiconductor device illustrated in Figure 2b along line A Two cross-sectional views of -A' and BB'; FIG. 3a depicts an equivalent circuit representation in accordance with a second exemplary embodiment of the present invention; and FIG. 3b depicts a top view of the semiconductor device in accordance with the second exemplary embodiment; Figure 3c depicts two cross-sectional views of the semiconductor device illustrated along Figure 3b along lines A-A' and BB'; Figure 4a depicts an equivalent circuit representation in accordance with a third exemplary embodiment of the present invention; Figure 4b depicts A top view of the semiconductor device according to the third exemplary embodiment; FIG. 4c depicts two cross-sectional views of the semiconductor device illustrated in FIG. 4b along lines AA' and BB'; FIG. 5a depicts a fourth exemplary embodiment Electrical map; Figure 5b depicts A top view of the semiconductor device according to the fourth exemplary embodiment; FIG. 5c depicts two cross-sectional views of the semiconductor device illustrated in FIG. 5b along lines AA' and BB'; FIG. 6a depicts a fifth example implementation a top view of the semiconductor device of the example; and FIG. 6b depicts two horizontal lines of the semiconductor device along the line A-A' and BB' illustrated in FIG. 6a Sectional view.
參照附圖,本發明的一些實施例將更充分地描述於下文,附圖中顯示部分,並非所有,本發明的實施例。事實上,本發明的各種實施例可以用許多不同的形式體現,且不應被理解為僅限於此處提出的實施方案,反而是藉由提供這些實施例使本揭露內容將符合適用的法律規定。 Some embodiments of the present invention will be described more fully hereinafter with reference to the accompanying drawings in which, In fact, the various embodiments of the present invention may be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. .
一些本發明的示例實施例可提供NMOS,例如具有嵌入JFET(例如高壓JFET)的高壓切換類型NMOS。例如,該JFET可被嵌入在NMOS的源極或汲極邊緣。示例實施例的JFET可因此被提供在一相對小區域中。再者,示例實施例的JFET在一些例子中可提供相同於或近乎相同於高壓切換類型NMOS的擊穿電壓。示例實施例可使用N型井來形成該嵌入JFET的通道,例如NJFET。示例實施例可允許,例如藉由調整與NMOS源極相關的P型井或高壓N型井(HVNW)的間隔來改變嵌入JFET的夾止電壓。另一示例實施例可允許藉由調整與NMOS源極相關的P型井的寬度來改變線性以及飽和區的特性。例如JFET從線性至飽和區的轉換可更急遽,例如突然增加P型井的寬度。 Some example embodiments of the present invention may provide an NMOS, such as a high voltage switching type NMOS with an embedded JFET (eg, a high voltage JFET). For example, the JFET can be embedded at the source or drain edge of the NMOS. The JFET of the example embodiment can thus be provided in a relatively small area. Moreover, the JFET of the example embodiment can provide a breakdown voltage that is the same or nearly the same as the high voltage switching type NMOS in some examples. An example embodiment may use an N-type well to form the JFET-embedded channel, such as an NJFET. Example embodiments may allow the clamping voltage of the embedded JFET to be varied, for example, by adjusting the spacing of the P-well or high voltage N-well (HVNW) associated with the NMOS source. Another example embodiment may allow for changing the characteristics of the linear and saturated regions by adjusting the width of the P-type well associated with the NMOS source. For example, the conversion of a JFET from a linear to a saturated region can be more impulsive, such as a sudden increase in the width of a P-well.
示例實施例在一些例子中,可至少部分使用標準高壓(HV)製程而製成,例如不需要使用任何額外遮罩或製程。示例實施例可使用矽局部氧化(LOCOS)製程、淺溝槽隔離(STI)製程、深溝槽隔離(DTI)製程、絕緣層上矽晶(SOI)製程、磊晶(EPI)(例如N/P-EPI)製程、及/或非EPI製程。嵌入JFET的N通道,例如NJFET,可被體現為,例如N型井、N型漂移層、N型緩衝層、或/及N型深井。根據示例實施例,HV JFET可被嵌入各種結構的HV NMOS中,例如圓形結構HV NMOS或橢圓結構HV NMOS。本發明的示例實施例在一些例子中,可被應用至電流源或減壓裝置。例如藉由如上所討論地調整HV JFET夾止電壓,某些示例實施例可被配置以供應5V以及30V之間的功率至脈寬調變(PWM)電路。 Example embodiments may be made, at least in part, using standard high pressure (HV) processes, such as without the use of any additional masks or processes, in some examples. Example embodiments may use a germanium local oxidation (LOCOS) process, a shallow trench isolation (STI) process, a deep trench isolation (DTI) process, a silicon-on-insulator (SOI) process, epitaxial (EPI) (eg, N/P). -EPI) Process, and / or non-EPI process. N-channels embedded in JFETs, such as NJFETs, can be embodied, for example, as N-type wells, N-type drift layers, N-type buffer layers, or/and N-type deep wells. According to an example embodiment, the HV JFET may be embedded in a HV NMOS of various structures, such as a circular structure HV NMOS or an elliptical structure HV NMOS. Example embodiments of the invention may be applied to current sources or decompression devices in some examples. Certain example embodiments may be configured to supply power between 5V and 30V to a pulse width modulation (PWM) circuit, for example, by adjusting the HV JFET pinch voltage as discussed above.
第1a圖描繪傳統的降壓轉換電路的方塊圖,其例如可被用以驅動LED。如第1a圖所示,該傳統的降壓轉換電路需要高壓空乏型 NMOS,以提供參考電壓或功率,以供應內部電路及個別的MOSFET,以提供電流來驅動負載。因為HV空乏型NMOS以及HV MOSFET存在於分開的積體電路(IC)封裝中,傳統降壓轉換電路的整體尺寸可能會相對較大。比較之下,第1b圖描繪本發明的示例實施例的方塊圖,其藉由將JFET 101嵌入在NMOS 102中來將JFET 101以及HV NMOS 102提供在單一IC封裝103中。因此,相較於第1a圖所描繪的傳統降壓轉換電路,整個電路保持類似的電性,但具有減小的封裝(footprint)。 Figure 1a depicts a block diagram of a conventional buck conversion circuit that can be used, for example, to drive an LED. As shown in Figure 1a, the conventional buck converter circuit requires high voltage depletion. The NMOS is used to provide a reference voltage or power to supply internal circuitry and individual MOSFETs to provide current to drive the load. Because HV depletion NMOS and HV MOSFETs are present in separate integrated circuit (IC) packages, the overall size of a conventional buck conversion circuit can be relatively large. In contrast, FIG. 1b depicts a block diagram of an example embodiment of the present invention in which JFET 101 and HV NMOS 102 are provided in a single IC package 103 by embedding JFET 101 in NMOS 102. Thus, the overall circuit maintains similar electrical performance compared to the conventional buck conversion circuit depicted in Figure 1a, but with a reduced footprint.
現轉向第2a圖至第6b圖,各種本發明示例實施例的結構現將討論如下。 Turning now to Figures 2a through 6b, the various structures of the exemplary embodiments of the present invention will now be discussed below.
第2a圖描繪第一示例實施例的等效電路的方塊圖,其中嵌入JFET 101的閘極(G)與NMOS 102的源極(S)相結合。第2b圖描繪第一示例實施例的示例配置的俯視圖,其中嵌入JFET 101的閘極與NMOS 102的源極相結合。如圖所示,此示例配置提供靠近NMOS 102的源極端的兩嵌入JFET。嵌入JFET 101的其中之一的大約位置由虛線所圍繞。為了理解嵌入JFET 101的結構以及其如何與NMOS的結構相符,請參考第2c圖,其中沿第2b圖的線A-A'以及B-B'描繪兩橫截面圖。根據一些實施例,沿著B-B’線繪製的橫截面圖(從第2b圖的俯視圖的視角)可相同於沿著A-A’線繪製的橫截面圖,如第二條虛線的A-A’線所指出。根據此實施例,A-A’實線透過其通過的第一P型井區207與A-A’虛線透過其通過的第一P型井區207之間的距離可被調整,以調整嵌入JFET 101的夾止電壓。然而,根據結構其他示例實施例的結構,該些橫截面圖可能不會相同。 Figure 2a depicts a block diagram of an equivalent circuit of the first exemplary embodiment in which the gate (G) of the embedded JFET 101 is combined with the source (S) of the NMOS 102. 2b depicts a top view of an example configuration of the first example embodiment in which the gate of the embedded JFET 101 is combined with the source of the NMOS 102. As shown, this example configuration provides two embedded JFETs near the source terminal of NMOS 102. The approximate location of one of the embedded JFETs 101 is surrounded by a dashed line. To understand the structure of the embedded JFET 101 and how it conforms to the structure of the NMOS, please refer to Figure 2c, in which two cross-sectional views are depicted along lines A-A' and BB' of Figure 2b. According to some embodiments, the cross-sectional view taken along line BB' (from the perspective of the top view of Figure 2b) may be the same as the cross-sectional view taken along line A-A', such as the second dotted line A -A' line pointed out. According to this embodiment, the distance between the first P-type well region 207 through which the A-A' solid line passes and the first P-type well region 207 through which the A-A' dashed line passes can be adjusted to adjust the embedding. The clamping voltage of JFET 101. However, according to the structure of other example embodiments of the structure, the cross-sectional views may not be the same.
從第2c圖中沿線A-A’的橫截面圖可見,根據所描繪的示例實施例,P型材料基板201可被提供為具有配置於其上的N型井區208,例如高壓N型井(HVNW)區。第一P型井區207可被設置為鄰近該N型井區208。藉由比較描繪於第2b圖的俯視圖中沿著兩條A-A’線的兩個橫截面圖與沿著B-B’線的橫截面圖將可理解,根據一示例實施例,第二P型井區可更被設置為鄰近該N型井區。該N型井區208可因此包含該第一及第二P型井區207,使得N型井區208的至少一部分介於第一及第二P型井區207之間。再如第2c圖所示,第一及第二N+摻雜區209、210可 被設置為鄰近該N型井區208以及在該第一P型井區207的相對側。如圖所示,該第一N+摻雜區209對應於嵌入JFET101的源極,而該第二N+摻雜區210對應於NMOS 102以及嵌入JFET101的汲極。再如第2c圖所示,第一P型井區207可包含P+摻雜區214、第三N+摻雜區215、以及閘極結構211,該第三N+摻雜區215介於P+摻雜區214以及該閘極結構211之間。閘極結構211可賦能第三N+摻雜區215以及P+摻雜區214的共同操作,如圖所示,第三N+摻雜區215以及P+摻雜區214共同地對應於NMOS 102的源極以及嵌入JFET 101的閘極。 From the cross-sectional view along line AA' in Figure 2c, it can be seen that, according to the depicted example embodiment, the P-type material substrate 201 can be provided with an N-type well region 208 disposed thereon, such as a high pressure N-type well. (HVNW) area. A first P-well region 207 can be disposed adjacent to the N-well region 208. It will be understood by comparing two cross-sectional views along the two AA' lines and the cross-sectional views along the line BB' in the top view depicted in Figure 2b, according to an example embodiment, second The P-type well region may be further disposed adjacent to the N-type well region. The N-type well region 208 can thus include the first and second P-type well regions 207 such that at least a portion of the N-type well region 208 is between the first and second P-type well regions 207. As shown in FIG. 2c, the first and second N+ doping regions 209, 210 can It is disposed adjacent to the N-well region 208 and on the opposite side of the first P-well region 207. As shown, the first N+ doped region 209 corresponds to the source embedded in the JFET 101, and the second N+ doped region 210 corresponds to the NMOS 102 and the drain of the JFET 101. As further shown in FIG. 2c, the first P-type well region 207 can include a P+ doped region 214, a third N+ doped region 215, and a gate structure 211, the third N+ doped region 215 being interposed between P+ doping The region 214 is between the gate structure 211. The gate structure 211 can be coupled to the common operation of the third N+ doping region 215 and the P+ doping region 214. As shown, the third N+ doping region 215 and the P+ doping region 214 collectively correspond to the source of the NMOS 102. The pole is also embedded in the gate of JFET 101.
場氧化部分(FOX)216可更被設置為鄰近N型井區208。例如第一FOX部分可被設置為鄰近第一N+摻雜區209的一末端,第二FOX部分可介於第一N+摻雜區209的末端以及P+摻雜區214的末端、以及第三FOX部分可介於P型井區以及第二N+摻雜區210的末端之間,且更介於閘極結構211以及第一P型井區207之間。額外的P型井區205亦可設置為鄰近N型井區208以及介於第一FOX部分216以及P型基板之間。N型層213以及P-頂部分212亦可再設置為鄰近N型井區208,N型層213介於第三FOX部分216以及P-頂部分212之間。 The field oxidation portion (FOX) 216 may be further disposed adjacent to the N-type well region 208. For example, the first FOX portion may be disposed adjacent one end of the first N+ doping region 209, and the second FOX portion may be interposed between the end of the first N+ doping region 209 and the end of the P+ doping region 214, and the third FOX Portions may be interposed between the P-well region and the end of the second N+ doped region 210, and more between the gate structure 211 and the first P-well region 207. Additional P-type well regions 205 may also be disposed adjacent to the N-type well region 208 and between the first FOX portion 216 and the P-type substrate. The N-type layer 213 and the P-top portion 212 may also be disposed adjacent to the N-type well region 208, and the N-type layer 213 is interposed between the third FOX portion 216 and the P-top portion 212.
第3a圖描繪第二示例實施例的等效電路的方塊圖,其中嵌入JFET 101的閘極(G)被隔離。第3b圖描繪第二示例實施例的示例配置的俯視圖,其中嵌入JFET 101的閘極被隔離。雖然第3b圖中僅示出一半的NMOS 102,此示例配置亦可提供靠近NMOS 102的源極端的兩個嵌入JFET。為了理解嵌入JFET 101的結構以及其如何與NMOS的結構相符,請參考第3c圖,其中沿第3b圖的線A-A'以及B-B'描繪兩橫截面圖。 Fig. 3a depicts a block diagram of an equivalent circuit of the second exemplary embodiment in which the gate (G) embedded in the JFET 101 is isolated. Figure 3b depicts a top view of an example configuration of a second example embodiment in which the gates embedded in JFET 101 are isolated. Although only half of the NMOS 102 is shown in FIG. 3b, this example configuration can also provide two embedded JFETs near the source terminal of NMOS 102. To understand the structure of the embedded JFET 101 and how it conforms to the structure of the NMOS, please refer to Figure 3c, in which two cross-sectional views are depicted along lines A-A' and BB' of Figure 3b.
從第3c圖中沿著線B-B’的橫截面圖可看到,根據所描繪的示例實施例,P型材料基板201可被提供為具有設置於其上的N型井區208。參考描繪於第2c圖的第一實施例,第一P型井區207可被設置為鄰近N型井區208,以及第一及第二N+摻雜區209、210可被設置為鄰近N型井區208以及在第一P型井區207的相對側。如圖所示,該第一N+摻雜區209對應於嵌入JFET101的源極,而該第二N+摻雜區210對應於NMOS 102以及嵌入JFET101的汲極。再如第2c圖所示,第一P型井區207 可包含第一P+摻雜區214、第三N+摻雜區215、以及閘極結構211,該第三N+摻雜區215介於第一P+摻雜區214以及閘極結構211之間。閘極結構211可賦能第三N+摻雜區215以及第一P+摻雜區的共同操作,如圖所示,第三N+摻雜區215以及第一P+摻雜區共同地對應於HV NMOS 102的源極。 As can be seen from the cross-sectional view of line B-B' in Figure 3c, in accordance with the depicted example embodiment, P-type material substrate 201 can be provided with an N-type well region 208 disposed thereon. Referring to the first embodiment depicted in FIG. 2c, the first P-well region 207 can be disposed adjacent to the N-well region 208, and the first and second N+ doped regions 209, 210 can be disposed adjacent to the N-type The well region 208 is on the opposite side of the first P-well region 207. As shown, the first N+ doped region 209 corresponds to the source embedded in the JFET 101, and the second N+ doped region 210 corresponds to the NMOS 102 and the drain of the JFET 101. As shown in Fig. 2c, the first P-type well region 207 A first P+ doped region 214, a third N+ doped region 215, and a gate structure 211 may be included, the third N+ doped region 215 being interposed between the first P+ doped region 214 and the gate structure 211. The gate structure 211 can be coupled to the third N+ doping region 215 and the first P+ doping region to operate together. As shown, the third N+ doping region 215 and the first P+ doping region collectively correspond to the HV NMOS. The source of 102.
第二P型井區307可亦被設置為鄰近該N型井區208。如圖所示,N型井區可包含第一及第二P型井區207、307,使得N型井區208的部分介於該兩者之間。第一P型井區207以及第二P型井區307之間的距離可被調整,以調整嵌入JFET的夾止電壓。如圖所示,第二P型井區可包含第二P+摻雜區308,其對應於嵌入JFET的被隔離閘極。 A second P-well region 307 can also be disposed adjacent to the N-well region 208. As shown, the N-type well region can include first and second P-type well regions 207, 307 such that a portion of the N-type well region 208 is between the two. The distance between the first P-well region 207 and the second P-well region 307 can be adjusted to adjust the clamping voltage of the embedded JFET. As shown, the second P-well region can include a second P+ doped region 308 that corresponds to the isolated gate embedded in the JFET.
如沿線A-A’的橫截面圖所示,第三P型井區305可亦被設置為鄰近N型井區208以及P型基板201。如圖所示,第三P型井區305可具有設置於其上的第三P+摻雜區309,其可對應於嵌入JFET 101的基極。藉由回去參閱第3b圖將更容易理解,第三P型井區305的部分可介於第三P+摻雜區309以及第一N+摻雜區209之間。再者,部分的N型井區208可介於第二P型井區307以及第三P型井區305之間以及介於第一P型井區207以及第三P型井區305之間。 As shown in the cross-sectional view along line A-A', the third P-well region 305 can also be disposed adjacent to the N-well region 208 and the P-type substrate 201. As shown, the third P-well region 305 can have a third P+ doped region 309 disposed thereon that can correspond to the base of the embedded JFET 101. As will be more readily understood by referring back to FIG. 3b, portions of the third P-type well region 305 may be interposed between the third P+ doped region 309 and the first N+ doped region 209. Furthermore, a portion of the N-type well region 208 can be interposed between the second P-type well region 307 and the third P-type well region 305 and between the first P-type well region 207 and the third P-type well region 305. .
FOX部分216可亦被設置為鄰近N型井區208。例如參考沿線B-B’的橫截面圖,第一FOX部分可被設置為鄰近第一N+摻雜區209的末端,第二FOX部分可介於第一N+摻雜區209的末端以及第二P+摻雜區308的末端之間,第三FOX部分可介於第二P+摻雜區308的末端以及第一P+摻雜區214的末端之間,以及第四FOX部分可介於第一P型井區207以及第二N+摻雜區210的末端之間,且第四FOX部分更介於閘極結構211以及第一P型井區207之間。N型層213以及P-頂部分212亦可被設置為鄰近N型井區208,該N型層213介於第四FOX部分216以及P-頂部分212之間。 The FOX portion 216 can also be disposed adjacent to the N-well region 208. For example, with reference to a cross-sectional view along line BB', a first FOX portion can be disposed adjacent the end of the first N+ doped region 209, and a second FOX portion can be interposed between the end of the first N+ doped region 209 and a second Between the ends of the P+ doping region 308, the third FOX portion may be between the end of the second P+ doping region 308 and the end of the first P+ doping region 214, and the fourth FOX portion may be interposed between the first P Between the well region 207 and the end of the second N+ doped region 210, and the fourth FOX portion is further between the gate structure 211 and the first P-type well region 207. The N-type layer 213 and the P-top portion 212 may also be disposed adjacent to the N-type well region 208 between the fourth FOX portion 216 and the P-top portion 212.
第4a圖描繪第三示例實施例的等效電路的方塊圖,其中嵌入JFET 101的閘極(G)是單獨的。第4b圖描繪第二示例實施例的示例配置的俯視圖,其中嵌入JFET 101的閘極是單獨的。雖然僅有一半的NMOS 102 示於第3b圖中,此示例配置亦可提供靠近NMOS 102的源極端的兩個嵌入JFET。為了理解嵌入JFET 101的結構以及其如何與NMOS的結構相符,請參考第4c圖,其中沿第4b圖的線A-A'以及B-B'描繪兩橫截面圖。 Figure 4a depicts a block diagram of an equivalent circuit of a third example embodiment in which the gate (G) embedded in JFET 101 is separate. Figure 4b depicts a top view of an example configuration of a second example embodiment in which the gates embedded in JFET 101 are separate. Although only half of the NMOS 102 As shown in FIG. 3b, this example configuration can also provide two embedded JFETs near the source terminal of NMOS 102. To understand the structure of the embedded JFET 101 and how it conforms to the structure of the NMOS, please refer to Figure 4c, in which two cross-sectional views are depicted along lines A-A' and BB' of Figure 4b.
從第4c圖中沿著線B-B’的橫截面圖可看到,根據所描繪的示例實施例,P型材料基板201可被提供為具有設置於其上的N型井區208。參考描繪於第2c圖的第一實施例,第一P型井區207可被設置為鄰近N型井區208,以及第一及第二N+摻雜區209、210可被設置為鄰近N型井區208以及在第一P型井區207的相對側。如圖所示,該第一N+摻雜區209對應於嵌入JFET 101的源極,而該第二N+摻雜區210對應於NMOS 102以及嵌入JFET101的汲極。再如第2c圖所示,第一P型井區207可包含P+摻雜區214、第三N+摻雜區215、以及閘極結構211,該第三N+摻雜區215介於P+摻雜區214以及該閘極結構211之間。閘極結構211可賦能第三N+摻雜區215以及P+摻雜區214的共同操作,如圖所示,第三N+摻雜區215以及P+摻雜區214共同地對應於NMOS 102的源極。 As can be seen from the cross-sectional view of line B-B' in Figure 4c, in accordance with the depicted example embodiment, P-type material substrate 201 can be provided with an N-type well region 208 disposed thereon. Referring to the first embodiment depicted in FIG. 2c, the first P-well region 207 can be disposed adjacent to the N-well region 208, and the first and second N+ doped regions 209, 210 can be disposed adjacent to the N-type The well region 208 is on the opposite side of the first P-well region 207. As shown, the first N+ doped region 209 corresponds to the source embedded in the JFET 101, and the second N+ doped region 210 corresponds to the NMOS 102 and the drain of the JFET 101. As further shown in FIG. 2c, the first P-type well region 207 can include a P+ doped region 214, a third N+ doped region 215, and a gate structure 211, the third N+ doped region 215 being interposed between P+ doping The region 214 is between the gate structure 211. The gate structure 211 can be coupled to the common operation of the third N+ doping region 215 and the P+ doping region 214. As shown, the third N+ doping region 215 and the P+ doping region 214 collectively correspond to the source of the NMOS 102. pole.
如沿著線A-A’的橫截面圖所示,第二P型井區405亦可被設置為鄰近N型井區208以及P型基板201。如圖所示,第二P型井區405可具有設置於其上的第二P+摻雜區409,其可對應於嵌入JFET 101的閘極。藉由回去參閱第4b圖將更容易理解,部分的第二P型井區405可介於第一P+摻雜區409以及第一N+摻雜區209之間。繼續參閱第4b圖,“上面的”P型井區405以及“下面的”P型井區405之間的距離(也就是說,P型井區405在HVNW 208的任一側)可被調整,以調整嵌入JFET 101的夾止電壓。 The second P-well region 405 can also be disposed adjacent to the N-well region 208 and the P-type substrate 201 as shown along the cross-sectional view of line A-A'. As shown, the second P-well region 405 can have a second P+ doped region 409 disposed thereon that can correspond to a gate embedded in the JFET 101. As will be more readily understood by referring back to FIG. 4b, a portion of the second P-well region 405 can be interposed between the first P+ doped region 409 and the first N+ doped region 209. With continued reference to Figure 4b, the distance between the "upper" P-well 405 and the "lower" P-well 405 (that is, the P-well 405 on either side of the HVNW 208) can be adjusted. To adjust the clamping voltage embedded in JFET 101.
FOX部分216可被設置為鄰近N型井區208。例如第一FOX部分可被設置為鄰近第一N+摻雜區209的末端;第二FOX部分可介於第一N+摻雜區209的末端以及第一P+摻雜區214的末端之間;以及第三FOX部分可介於第一P型井區以及第二N+摻雜區210的末端之間以及更介於閘極結構211以及第一P型井區207之間。N型層213以及P-頂部分212亦可被設置為鄰近N型井區208,N型層213介於第三FOX部分216以及P-頂部分212之間。 The FOX portion 216 can be disposed adjacent to the N-well region 208. For example, the first FOX portion may be disposed adjacent to an end of the first N+ doping region 209; the second FOX portion may be interposed between an end of the first N+ doping region 209 and an end of the first P+ doping region 214; The third FOX portion may be between the first P-type well region and the end of the second N+ doped region 210 and more between the gate structure 211 and the first P-type well region 207. The N-type layer 213 and the P-top portion 212 may also be disposed adjacent to the N-type well region 208, and the N-type layer 213 is interposed between the third FOX portion 216 and the P-top portion 212.
現在參考第5a圖、第5b圖以及第5c圖,第三示例實施例中嵌入JFET 101的閘極是單獨的,第三示例實施例可形成多通道嵌入JFET結構的基礎,其可增加JFET汲極電流。例如第5a圖描繪五通道JFET與單一通道JFET的汲極電流之間的比較。如圖所示,在可比較的Vds電壓之下,五通道JFET結構可產生比單一通道JFET結構多於五倍的汲極電流。 如第5b圖所示,多通道嵌入JFET結構可藉由複製沿著NMOS周邊的描繪於第4b圖中的單一通道單獨閘極嵌入JFET的結構而提供。更確切地,由描繪於第5c圖中的A-A’以及B-B’橫截面圖可看到,其內部結構近乎相同於描繪於第4c圖中單一通道單獨閘極嵌入JFET的內部結構。然而,某些示例實施例可呈現差異,例如描繪於第5b圖以及第5c圖中的第二P+摻雜區409的配置中,可(例如)向內偏移。 Referring now to Figures 5a, 5b, and 5c, the gates of the JFET 101 embedded in the third exemplary embodiment are separate, and the third exemplary embodiment can form the basis of a multi-channel embedded JFET structure that can add JFETs. Extreme current. For example, Figure 5a depicts a comparison between the five-channel JFET and the single-channel JFET's drain current. As shown, the five-channel JFET structure can produce more than five times the drain current of a single-channel JFET structure below the comparable Vds voltage. As shown in Figure 5b, the multi-channel embedded JFET structure can be provided by replicating the structure of the JFET embedded along the single channel of the NMOS periphery depicted in Figure 4b. More precisely, as can be seen from the cross-sectional views of A-A' and BB' depicted in Figure 5c, the internal structure is nearly identical to the internal structure of a single channel single gate embedded JFET depicted in Figure 4c. . However, certain example embodiments may present differences, such as in the configuration of the second P+ doped region 409 depicted in Figures 5b and 5c, which may, for example, be offset inward.
第6a以及6b圖描繪第4b圖以及第4c圖的單獨閘極嵌入JFET的其他變化。在此示例實施例中,嵌入JFET係形成為鄰近NMOS汲極210,而非鄰近NMOS源極。如由第6a以及6b圖中所示,在如上討論的汲極側嵌入JFET以及源極側嵌入JFET之間可有微小至不顯著的結構差異。 Figures 6a and 6b depict other variations of the individual gate-embedded JFETs of Figures 4b and 4c. In this example embodiment, the embedded JFET is formed adjacent to the NMOS drain 210 instead of the adjacent NMOS source. As shown in Figures 6a and 6b, there may be minor to insignificant structural differences between the drain side embedded JFET and the source side embedded JFET as discussed above.
示例實施例的N型井區208可由N型井、N型漂移層、N型緩衝層、N型深井所形成。示例實施例的P型井區可利用P型井以及P+埋層或P-植入進行堆疊。在一些例子中,示例實施例的N型井區208亦可為N-植入。 The N-type well region 208 of the example embodiment may be formed of an N-type well, an N-type drift layer, an N-type buffer layer, and an N-type deep well. The P-well region of the example embodiment can be stacked using a P-well and a P+ buried layer or P-implant. In some examples, the N-well region 208 of the example embodiment may also be an N-implant.
示例實施例可因此提供嵌入於NMOS(例如HV NMOS)的相對小尺寸的JFET,例如NJFET或HV NJFET。再者,示例實施例可被應用至標準HV製程而不需要使用額外遮罩或製程。因此,可包含JFET以及NMOS兩者的電路(例如降壓轉換電路)可從此處提供的NMOS嵌入JFET結構所提供的減小的電路封裝獲益。 Example embodiments may thus provide a relatively small size JFET embedded in an NMOS (eg, HV NMOS), such as an NJFET or HV NJFET. Again, example embodiments can be applied to standard HV processes without the need for additional masks or processes. Thus, circuits that can include both JFETs and NMOSs (eg, buck conversion circuits) can benefit from the reduced circuit package provided by the NMOS embedded JFET structures provided herein.
在本文提出的本發明的其他實施例及許多修改將提示熟悉本領域人士所作出的發明,然而這些發明已涉及上述說明和相關圖式所提出的教導。因此,可以理解的的是,發明不侷限於已公開的特定實施例,修改和其他實施例將被包含在所附請求項的範圍之中,再者,儘管上述說 明和相關圖式只描述了涵蓋某些單元和/或功能之示例性的組合的示例性實施例,應當理解的是,不同單元和/或功能的組合可以由不同實施例所提供,卻不偏離所附請求項的範圍。在這方面,例如不僅前述所明確地描述的,除了以上所述,單元和/或功能上的不同組合也包括於一些所附請求項之內。雖然本文使用特定名詞,它們被只用於通例和描述之用,而不為了侷限之目的。 Other embodiments of the invention and many modifications presented herein will be apparent to those skilled in the art, which are intended to cover the teachings of the foregoing description and related drawings. Therefore, it is understood that the invention is not limited to the specific embodiments disclosed, and modifications and other embodiments are included in the scope of the appended claims. The exemplary embodiments of the present invention are described by way of example only, and the combination of different elements and/or functions may be provided by different embodiments without departing. The scope of the attached request. In this regard, for example, not only the foregoing is explicitly described, but in addition to the above, various combinations of elements and/or functions are also included in some of the appended claims. Although specific nouns are used herein, they are used for general purposes and description only, and not for purposes of limitation.
201‧‧‧P型材料基板 201‧‧‧P type material substrate
205‧‧‧額外的P型井區 205‧‧‧Additional P-type well area
207‧‧‧第一P型井區 207‧‧‧First P-type well area
208‧‧‧N型井區 208‧‧‧N type well area
209‧‧‧第一N+摻雜區 209‧‧‧First N+ doped area
210‧‧‧第二N+摻雜區 210‧‧‧Second N+ doped area
211‧‧‧閘極結構 211‧‧‧ gate structure
212‧‧‧P-頂部分 212‧‧‧P-top part
213‧‧‧N型層 213‧‧‧N-type layer
214‧‧‧P+摻雜區 214‧‧‧P+ doped area
215‧‧‧第三N+摻雜區 215‧‧‧ Third N+ doped area
216‧‧‧場氧化部分 216‧‧ ‧ field oxidation
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