TWI530955B - Operation Method of Small Area Electron Removal Type Rewritable Read Only Memory Array - Google Patents

Operation Method of Small Area Electron Removal Type Rewritable Read Only Memory Array Download PDF

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TWI530955B
TWI530955B TW103140773A TW103140773A TWI530955B TW I530955 B TWI530955 B TW I530955B TW 103140773 A TW103140773 A TW 103140773A TW 103140773 A TW103140773 A TW 103140773A TW I530955 B TWI530955 B TW I530955B
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bit lines
field effect
effect transistor
common source
memory
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TW103140773A
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TW201619973A (en
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xin-zhang Lin
wen-qian Huang
ya-ting Fan
Yang-Sen Ye
zheng-ying Wu
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Description

小面積電子抹除式可複寫唯讀記憶體陣列的操作方法 Operation method of small area electronic erasing rewritable read-only memory array

本發明係有關一種記憶體陣列,特別是關於一種小面積電子抹除式可複寫唯讀記憶體陣列的操作方法。 The present invention relates to a memory array, and more particularly to a method of operating a small area electronic erase rewritable read-only memory array.

按,互補式金屬氧化半導體(Complementary Metal Oxide Semiconductor,CMOS)製程技術已成為特殊應用積體電路(application specific integrated circuit,ASIC)之常用製造方法。在電腦資訊產品發達的今天,快閃記憶體(Flash)與電子式可清除程式化唯讀記憶體(Electrically Erasable Programmable Read Only Memory,EEPROM)由於皆具備有電性編寫和抹除資料之非揮發性記憶體功能,且在電源關掉後資料不會消失,所以被廣泛使用於電子產品上。 According to Complementary Metal Oxide Semiconductor (CMOS) process technology, it has become a common manufacturing method for application specific integrated circuits (ASICs). In today's computer information products, Flash and Electronically Erasable Programmable Read Only Memory (EEPROM) are non-volatile with electrical writing and erasing data. The memory function, and the data does not disappear after the power is turned off, so it is widely used in electronic products.

非揮發性記憶體係為可程式化的,其係用以儲存電荷以改變記憶體之電晶體的閘極電壓,或不儲存電荷以留下原記憶體之電晶體的閘極電壓。抹除操作則是將儲存在非揮發性記憶體中之電荷移除,使得非揮發性記憶體回到原記憶體之電晶體之閘極電壓。對於目前之非揮發記憶體,其電路圖與電路佈局圖分別如第1圖與第2圖所示,非揮發性記憶體是由許多記憶晶胞所組成的一種記憶體,圖中每一記憶晶胞包含了一電晶體10與一電容結構12,每二相鄰之一位元組之記憶晶胞間會設有二位元線, 如此便會增加面積成本。而第3圖為每一記憶晶胞之結構剖視圖,由圖可知,電容結構12係設於電晶體10之一側,由於這樣的結構,同樣會造成大面積,進而提高成本需求。 The non-volatile memory system is programmable to store charge to change the gate voltage of the transistor of the memory or to store the charge to leave the gate voltage of the transistor of the original memory. The erase operation removes the charge stored in the non-volatile memory, causing the non-volatile memory to return to the gate voltage of the transistor of the original memory. For the current non-volatile memory, the circuit diagram and circuit layout are shown in Figures 1 and 2, respectively. The non-volatile memory is a memory composed of many memory cells, each memory crystal in the figure. The cell comprises a transistor 10 and a capacitor structure 12, and a binary line is arranged between the memory cells of each two adjacent bytes. This will increase the area cost. FIG. 3 is a cross-sectional view showing the structure of each memory cell. As can be seen from the figure, the capacitor structure 12 is disposed on one side of the transistor 10. Due to such a structure, a large area is also generated, thereby increasing the cost.

因此,本案申請人係針對上述先前技術之缺失,特別研發一種小面積電子抹除式可複寫唯讀記憶體陣列,並進而提出基於此架構之低電流低電壓的操作方法,可同時複寫大量記憶晶胞。 Therefore, the applicant of the present invention has developed a small-area electronic erasing rewritable read-only memory array in response to the above-mentioned prior art, and further proposed a low current and low voltage operation method based on the architecture, which can simultaneously rewrite a large number of memories. Unit cell.

本發明的主要目的在於提供一種小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,乃於具有小面積且低成本之電子抹除式可複寫唯讀記憶體架構下,利用特殊的偏壓方式,達成大量記憶晶胞寫入及抹除之功能。 The main object of the present invention is to provide a small area electronic erasing rewritable read-only memory array operation method, which has a small area and low cost electronic erasing rewritable read-only memory architecture, utilizing special The bias mode achieves a large number of memory cell writing and erasing functions.

為達上述目的,本發明提供一種小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,應用於小面積電子抹除式可複寫唯讀記憶體陣列,此小面積電子抹除式可複寫唯讀記憶體陣列包含複數條平行之位元線、字線與共源線,此些位元線係區分為複數組位元線,其係包含一第一組位元線與一第二組位元線,且字線與位元線互相垂直,並包含一第一字線,共源線與字線互相平行,並包含一第一共源線。另有複數子記憶體陣列,每一子記憶體陣列連接二組位元線、一字線與一共源線,每一子記憶體陣列包含一第一、第二、第三、第四記憶晶胞。第一記憶晶胞連接第一組位元線、第一共源線與第一字線,第二記憶晶胞連接第二組位元線、第一共源線與第一字線,第一、第二記憶晶胞互相對稱配置,並位於第一共源線之同一側。第三記憶晶胞連接第一組位元線、第一共源線與第一字線, 並以第一共源線為軸與第一記憶晶胞對稱配置。第四記憶晶胞連接第二組位元線、第一共源線與第一字線,並以第一共源線為軸與第二記憶晶胞對稱配置,又第三、第四記憶晶胞互相對稱配置,且與第一、第二記憶晶胞位於第一共源線之相異兩側。 To achieve the above object, the present invention provides a small area electronic erasing rewritable read-only memory array operation method, which is applied to a small area electronic erasing rewritable read-only memory array, and the small area electronic erasing type can be The copy-reading memory array includes a plurality of parallel bit lines, word lines and common source lines, and the bit lines are divided into complex array bit lines, which comprise a first group of bit lines and a second The bit line is grouped, and the word line and the bit line are perpendicular to each other, and include a first word line. The common source line and the word line are parallel to each other and include a first common source line. There is a plurality of sub-memory arrays, each sub-memory array is connected to two sets of bit lines, a word line and a common source line, and each sub-memory array comprises a first, second, third, fourth memory crystal Cell. The first memory cell is connected to the first group of bit lines, the first common source line and the first word line, and the second memory cell is connected to the second group of bit lines, the first common source line and the first word line, first The second memory cells are symmetrically arranged with each other and are located on the same side of the first common source line. The third memory cell is connected to the first group of bit lines, the first common source line and the first word line, And symmetrically arranged with the first memory cell by using the first common source line as an axis. The fourth memory cell is connected to the second group of bit lines, the first common source line and the first word line, and is symmetrically arranged with the second memory cell by using the first common source line as an axis, and the third and fourth memory crystals are further The cells are symmetrically arranged with each other and are located on opposite sides of the first common source line from the first and second memory cells.

其中,第一、第二、第三、第四記憶晶胞皆包含N型場效電晶體,且第一、第二、第三、第四記憶晶胞皆作為操作記憶晶胞,則在選取所有操作記憶晶胞進行操作時,乃藉由於所有操作記憶晶胞連接之P型基板或P型井區施加基底電壓Vsub,且於所有操作記憶晶胞連接之位元線、字線、共源線分別施加位元電壓Vb、字電壓Vw、共源電壓Vs,來進行寫入或抹除。其中,於寫入時,使滿足Vsub=接地,VS=Vb=0,且Vw=高壓(HV)之條件;於抹除時,使滿足Vsub=接地,Vs=Vb=高壓,且Vw=浮接之條件。 Wherein, the first, second, third, and fourth memory cells each comprise an N-type field effect transistor, and the first, second, third, and fourth memory cells are all used as operational memory cells, All operating memory cells are operated by applying a substrate voltage V sub to all P-type substrates or P-type well regions connected to the memory cell, and all the bit lines, word lines, and totals connected to the memory cells are connected. The source line applies a bit voltage V b , a word voltage V w , and a common source voltage V s to perform writing or erasing. Wherein, when writing, the condition that V sub = ground, V S = V b =0, and V w = high voltage (HV) is satisfied; when erasing, it is satisfied that V sub = ground, V s = V b = high voltage, and V w = the condition of floating.

另外,當第一、第二、第三、第四記憶晶胞之場效電晶體為P型時,本發明也提供另一種小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,在選取所有操作記憶晶胞進行操作時,乃藉由於所有操作記憶晶胞連接之N型基板或N型井區施加基底電壓Vsub,且於所有操作記憶晶胞連接之位元線、字線、共源線分別施加位元電壓Vb、字電壓Vw、共源電壓Vs,來進行寫入或抹除。其中,於寫入時,使滿足Vsub=高壓(HV),Vw=0,且Vs=Vb=高壓之條件;於抹除時,使滿足Vsub=高壓,Vw=浮接,且Vs=Vb=0之條件。 In addition, when the field effect transistors of the first, second, third, and fourth memory cells are P-type, the present invention also provides an operation method of another small area electronic erasing rewritable read-only memory array. when all operations selected memory cell is operated, it is operated by all the memory cell connected to the N-type substrate or N-type well region Shijia Ji substrate voltage V sub, and the cell bit line connected to all of the working memory, the word line The common source line applies a bit voltage V b , a word voltage V w , and a common source voltage V s to perform writing or erasing. Wherein, when writing, the condition that V sub = high voltage (HV), V w =0, and V s = V b = high voltage is satisfied; when erasing, it is satisfied that V sub = high voltage, V w = floating And the condition of V s =V b =0.

底下藉由具體實施例配合所附的圖式詳加說明,當更容易瞭解本發明之目的、技術內容、特點及其所達成之功效。 The purpose, technical contents, features and effects achieved by the present invention will be more readily understood by the detailed description of the embodiments and the accompanying drawings.

10‧‧‧電晶體 10‧‧‧Optoelectronics

12‧‧‧電容結構 12‧‧‧Capacitor structure

14‧‧‧位元線 14‧‧‧ bit line

16‧‧‧位元線 16‧‧‧ bit line

18‧‧‧第一組位元線 18‧‧‧The first group of bit lines

19‧‧‧第二組位元線 19‧‧‧Second group of bit lines

20‧‧‧字線 20‧‧‧ word line

22‧‧‧第一字線 22‧‧‧First word line

24‧‧‧共源線 24‧‧‧Common source line

26‧‧‧第一共源線 26‧‧‧The first common source line

28‧‧‧子記憶體陣列 28‧‧‧Sub Memory Array

30‧‧‧第一記憶晶胞 30‧‧‧First memory cell

32‧‧‧第二記憶晶胞 32‧‧‧Second memory cell

34‧‧‧第三記憶晶胞 34‧‧‧ Third memory cell

36‧‧‧第四記憶晶胞 36‧‧‧The fourth memory cell

38‧‧‧場效電晶體 38‧‧‧ Field Effect Crystal

40‧‧‧電容 40‧‧‧ Capacitance

42‧‧‧場效電晶體 42‧‧‧ Field Effect Crystal

44‧‧‧電容 44‧‧‧ Capacitance

46‧‧‧場效電晶體 46‧‧‧ Field Effect Crystal

48‧‧‧電容 48‧‧‧ Capacitance

50‧‧‧場效電晶體 50‧‧‧ field effect transistor

52‧‧‧電容 52‧‧‧ Capacitance

54‧‧‧閘極接點 54‧‧‧gate contacts

56‧‧‧汲極接點 56‧‧‧汲pole contacts

58‧‧‧N型場效電晶體 58‧‧‧N type field effect transistor

60‧‧‧P型半導體基板 60‧‧‧P type semiconductor substrate

62‧‧‧導電閘極 62‧‧‧Electrical gate

64‧‧‧電容 64‧‧‧ Capacitance

66‧‧‧P型場效電晶體 66‧‧‧P type field effect transistor

68‧‧‧N型半導體基板 68‧‧‧N type semiconductor substrate

70‧‧‧導電閘極 70‧‧‧ Conductive gate

72‧‧‧電容 72‧‧‧ Capacitance

第1圖為先前技術之非揮發性記憶體之電路示意圖。 Figure 1 is a schematic diagram of a prior art non-volatile memory circuit.

第2圖為第1圖之電路佈局示意圖。 Figure 2 is a schematic diagram of the circuit layout of Figure 1.

第3圖為先前技術之非揮發性記憶體之記憶晶胞結構剖視圖。 Figure 3 is a cross-sectional view of the memory cell structure of the prior art non-volatile memory.

第4圖為本發明之第一實施例之電路示意圖。 Figure 4 is a circuit diagram showing a first embodiment of the present invention.

第5圖為本發明之第一實施例之電路佈局示意圖。 Figure 5 is a schematic diagram showing the circuit layout of the first embodiment of the present invention.

第6圖為本發明之第一實施例之子記憶體陣列的電路示意圖。 Figure 6 is a circuit diagram of a sub-memory array of the first embodiment of the present invention.

第7圖為本發明之N型場效電晶體與電容之結構剖視圖。 Figure 7 is a cross-sectional view showing the structure of an N-type field effect transistor and a capacitor of the present invention.

第8圖為本發明之P型場效電晶體與電容之結構剖視圖。 Figure 8 is a cross-sectional view showing the structure of a P-type field effect transistor and a capacitor of the present invention.

第9圖為本發明之第二實施例之電路示意圖。 Figure 9 is a circuit diagram showing a second embodiment of the present invention.

第10圖為本發明之第二實施例之電路佈局示意圖。 Figure 10 is a schematic diagram showing the circuit layout of the second embodiment of the present invention.

第11圖為本發明之第二實施例之子記憶體陣列的電路示意圖。 Figure 11 is a circuit diagram of a sub-memory array of a second embodiment of the present invention.

以下請同時參閱第4圖及第5圖,以介紹第一實施例。本發明包含複數條平行之位元線14,其係區分為複數組位元線16,此些組位元線16包含一第一組位元線18與一第二組位元線19,此第一組位元線18與第二組位元線19皆包含一位元線14。另有與位元線14互相垂直的複數條平行之字線20,其係包含一第一字線22。與字線20互相平行的有複數條平行之共源線24,其係包含一第一共源線26。上述位元線14、字線20與共源線24會連接複數子記憶體陣列28,即2x2位元記憶晶胞。每一子記憶體陣列28連接二組位元線16、二字線20與一共源線24,且每一子記憶體陣列28係位於相鄰之二組位元線16之間。由於每一子記憶體陣列28與位元線16、二字線20、 共源線24的連接關係極為相近,以下就相同處陳述之。 Please refer to FIG. 4 and FIG. 5 at the same time to introduce the first embodiment. The present invention includes a plurality of parallel bit lines 14 that are divided into complex array bit lines 16, which include a first set of bit lines 18 and a second set of bit lines 19, Both the first set of bit lines 18 and the second set of bit lines 19 comprise a single bit line 14. There is also a plurality of parallel word lines 20 that are perpendicular to the bit line 14 and that comprise a first word line 22. Parallel to the word line 20 are a plurality of parallel common source lines 24 comprising a first common source line 26. The bit line 14, the word line 20 and the common source line 24 are connected to a plurality of sub-memory arrays 28, that is, 2x2 bit memory cells. Each sub-memory array 28 is connected to two sets of bit lines 16, two word lines 20 and a common source line 24, and each sub-memory array 28 is located between two adjacent sets of bit lines 16. Since each sub-memory array 28 is connected to bit line 16, two word line 20, The connection relationship of the common source line 24 is very similar, and the following is stated in the same place.

請參閱第5圖與第6圖,每一子記憶體陣列28包含一第一、第二、第三、第四記憶晶胞30、32、34、36,並位於第一組位元線18與第二組位元線19之間。第一記憶晶胞30連接第一組位元線18之位元線14、第一共源線26與第一字線22,第二記憶晶胞32連接第二組位元線19之位元線14、第一共源線26與第一字線22,第一、第二記憶晶胞32、34互相對稱配置,並位於第一共源線26之同一側。第三記憶晶胞34連接第一組位元線18之位元線14、第一共源線26與第一字線22,並以第一共源線26為軸,與第一記憶晶胞30對稱配置。第四記憶晶胞36連接第二組位元線19之位元線14、第一共源線26與第一字線22,並以第一共源線26為軸,與第二記憶晶胞32對稱配置,又第四記憶晶胞36與第三記憶晶胞34對稱配置,且第一、第二記憶晶胞30、32與第三、第四記憶晶胞34、36分別位於第一共源線26之相異兩側。 Referring to FIGS. 5 and 6, each sub-memory array 28 includes a first, second, third, and fourth memory cells 30, 32, 34, 36 and is located in the first set of bit lines 18. Between the second set of bit lines 19. The first memory cell 30 is connected to the bit line 14 of the first group of bit lines 18, the first common source line 26 and the first word line 22, and the second memory cell 32 is connected to the bit of the second group of bit lines 19. The line 14, the first common source line 26 and the first word line 22, the first and second memory cells 32, 34 are symmetrically arranged on each other and on the same side of the first common source line 26. The third memory cell 34 connects the bit line 14 of the first group of bit lines 18, the first common source line 26 and the first word line 22, and the first common source line 26 is the axis, and the first memory cell 30 symmetric configuration. The fourth memory cell 36 is connected to the bit line 14 of the second group of bit lines 19, the first common source line 26 and the first word line 22, and the first common source line 26 is the axis, and the second memory cell 32 symmetrically arranged, the fourth memory cell 36 is symmetrically arranged with the third memory cell 34, and the first and second memory cells 30, 32 and the third and fourth memory cells 34, 36 are respectively located in the first The two sides of the source line 26 are different.

由於第一、第二、第三、第四記憶晶胞30、32、34、36以對稱方式配置,又皆連接第一字線22,因此可於第一字線22共用同一接點。此外,在相鄰二之子記憶體陣列28中,二第三記憶晶胞34彼此相鄰,且連接同一位元線14,以共用同一接點;二第四記憶晶胞36彼此相鄰,亦且連接同一位元線14,以共用同一接點,利用此共用接點配置方式,便可縮小整體佈局面積。 Since the first, second, third, and fourth memory cells 30, 32, 34, 36 are arranged in a symmetrical manner and are both connected to the first word line 22, the same contact can be shared by the first word line 22. In addition, in the adjacent two-child memory array 28, the two third memory cells 34 are adjacent to each other and connected to the same bit line 14 to share the same contact; and the second memory cells 36 are adjacent to each other. And the same bit line 14 is connected to share the same contact point, and the common contact arrangement mode can be used to reduce the overall layout area.

第一記憶晶胞30更包含一場效電晶體38與一電容40,場效電晶體38具有一導電閘極,且場效電晶體38之汲極連接第一組位元線18之位元線14,源極連接第一共源線26,第一字線22之偏壓Vw係經由與場效電晶 體38之導電閘極相同多晶矽形成之電容40耦合至場效電晶體38,場效電晶體38接收第一組位元線18之位元線14與第一共源線26之偏壓Vb、Vs,以對場效電晶體38之導電閘極進行寫入資料或將場效電晶體38之導電閘極之資料進行抹除。 The first memory cell 30 further includes a field transistor 38 and a capacitor 40. The field effect transistor 38 has a conductive gate, and the drain of the field effect transistor 38 is connected to the bit line of the first group of bit lines 18. 14. The source is coupled to the first common source line 26. The bias voltage V w of the first word line 22 is coupled to the field effect transistor 38 via a capacitor 40 formed of the same polysilicon as the conductive gate of the field effect transistor 38. The transistor 38 receives the bias voltages V b , V s of the bit line 14 of the first set of bit lines 18 and the first common source line 26 to write data or field the conductive gate of the field effect transistor 38. The data of the conductive gate of the effect transistor 38 is erased.

第二記憶晶胞32更包含一場效電晶體42與一電容44,場效電晶體42具有一導電閘極,且場效電晶體42之汲極連接第二組位元線19之位元線14,源極連接第一共源線26,第一字線22之偏壓Vw係經由與場效電晶體42之導電閘極相同多晶矽形成之電容44耦合至場效電晶體42,電容44與電容40直接連接,以位於場效電晶體38與場效電晶體42之間。場效電晶體42接收第二組位元線19之位元線14與第一共源線26之偏壓Vb、Vs,以對場效電晶體42之導電閘極進行寫入資料或將場效電晶體42之導電閘極之資料進行抹除。 The second memory cell 32 further includes a field transistor 42 and a capacitor 44. The field effect transistor 42 has a conductive gate, and the drain of the field effect transistor 42 is connected to the bit line of the second group of bit lines 19. 14. The source is coupled to the first common source line 26. The bias voltage V w of the first word line 22 is coupled to the field effect transistor 42 via a capacitor 44 formed of the same polysilicon as the conductive gate of the field effect transistor 42. The capacitor 40 is directly connected to be placed between the field effect transistor 38 and the field effect transistor 42. The field effect transistor 42 receives the bias voltages V b , V s of the bit line 14 of the second group of bit lines 19 and the first common source line 26 to write data to the conductive gate of the field effect transistor 42 or The data of the conductive gate of the field effect transistor 42 is erased.

第三記憶晶胞34更包含一場效電晶體46與一電容48,場效電晶體46具有一導電閘極,且場效電晶體46之汲極連接第一組位元線18之位元線14,源極連接第一共源線26,以與第一記憶晶胞30共用同一接點,第一字線22之偏壓Vw係經由與場效電晶體46之導電閘極相同多晶矽形成之電容48耦合至場效電晶體46,電容48與場效電晶體46係以第一共源線26為軸,分別與電容40與場效電晶體38對稱配置。場效電晶體46接收第一組位元線18之位元線14與第一共源線26之偏壓Vb、Vs,以對場效電晶體46之導電閘極進行寫入資料或將場效電晶體46之導電閘極之資料進行抹除。 The third memory cell 34 further includes a field transistor 46 and a capacitor 48. The field effect transistor 46 has a conductive gate, and the drain of the field effect transistor 46 is connected to the bit line of the first group of bit lines 18. 14. The source is coupled to the first common source line 26 to share the same contact with the first memory cell 30. The bias voltage V w of the first word line 22 is formed by the same polysilicon as the conductive gate of the field effect transistor 46. The capacitor 48 is coupled to the field effect transistor 46. The capacitor 48 and the field effect transistor 46 are symmetrical with the capacitor 40 and the field effect transistor 38, respectively, with the first common source line 26 as the axis. The field effect transistor 46 receives the bias voltages V b , V s of the bit line 14 of the first group of bit lines 18 and the first common source line 26 to write data to the conductive gate of the field effect transistor 46 or The data of the conductive gate of the field effect transistor 46 is erased.

第四記憶晶胞36更包含一場效電晶體50與一電容52,場效電晶體50具有一導電閘極,且場效電晶體50之汲極連接第二組位元線19之位 元線14,源極連接第一共源線26,以與第二記憶晶胞32共用同一接點,第一字線22之偏壓Vw係經由與場效電晶體50之導電閘極相同多晶矽形成之電容52耦合至場效電晶體50,電容52與場效電晶體50係以第一共源線26為軸,分別與電容44與場效電晶體42對稱配置,又電容52與電容48直接連接,以位於場效電晶體50與場效電晶體46之間。場效電晶體50接收第二組位元線19之位元線14與第一共源線26之偏壓Vb、Vs,以對場效電晶體50之導電閘極進行寫入資料或將場效電晶體50之導電閘極之資料進行抹除。 The fourth memory cell 36 further includes a field transistor 50 and a capacitor 52. The field effect transistor 50 has a conductive gate, and the drain of the field effect transistor 50 is connected to the bit line of the second group of bit lines 19. 14. The source is coupled to the first common source line 26 to share the same contact with the second memory cell 32. The bias voltage V w of the first word line 22 is formed by the same polysilicon as the conductive gate of the field effect transistor 50. The capacitor 52 is coupled to the field effect transistor 50. The capacitor 52 and the field effect transistor 50 are symmetrical with the capacitor 44 and the field effect transistor 42 respectively, and the capacitor 52 and the capacitor 48 are directly connected. Connected to be located between field effect transistor 50 and field effect transistor 46. The field effect transistor 50 receives the bias voltages V b , V s of the bit line 14 of the second group of bit lines 19 and the first common source line 26 to write data to the conductive gate of the field effect transistor 50 or The data of the conductive gate of the field effect transistor 50 is erased.

由於電容40、44、48、52皆連接第一字線22,因此可於第一字線22共用同一閘極接點54。此外,在相鄰二之子記憶體陣列28中,二場效電晶體46彼此相鄰,且連接同一位元線14,以共用同一汲極接點56;二場效電晶體50彼此相鄰,亦且連接同一位元線14,以共用同一汲極接點56,利用此共用接點配置方式,可縮小整體佈局面積,進而大幅降低製造成本。 Since the capacitors 40, 44, 48, 52 are all connected to the first word line 22, the same gate contact 54 can be shared by the first word line 22. In addition, in the adjacent two sub-memory arrays 28, the two field effect transistors 46 are adjacent to each other and connected to the same bit line 14 to share the same drain contact 56; the two field effect transistors 50 are adjacent to each other. Also, the same bit line 14 is connected to share the same drain contact 56. With this common contact arrangement, the overall layout area can be reduced, thereby greatly reducing the manufacturing cost.

請再參閱第4圖,上述場效電晶體38、42、46、50可皆為位於P型基板或P型井區中之N型場效電晶體,亦或位於N型基板或N型井區中之P型場效電晶體,而本發明之操作方式因應N型或P型場效電晶體而有不同,以下先說明場效電晶體38、42、46、50為N型場效電晶體的操作方式。 Referring to FIG. 4, the field effect transistors 38, 42, 46, 50 may all be N-type field effect transistors located in a P-type substrate or a P-type well region, or may be located in an N-type substrate or an N-type well. The P-type field effect transistor in the region, and the operation mode of the present invention is different according to the N-type or P-type field effect transistor. The following description shows that the field effect transistor 38, 42, 46, 50 is the N-type field effect electric power. The way the crystal operates.

上述之第一、第二、第三、第四記憶晶胞30、32、34、36皆作為一操作記憶晶胞,本發明係選取所有操作記憶晶胞,以進行寫入或抹除操作。第一實施例的操作方式如下,利用下面的操作方式,可於低電壓、低電流的條件下同時複寫大量記憶晶胞。 The first, second, third, and fourth memory cells 30, 32, 34, and 36 are all used as an operational memory cell, and the present invention selects all of the operational memory cells for writing or erasing operations. The operation mode of the first embodiment is as follows. With the following operation mode, a large number of memory cells can be simultaneously written under conditions of low voltage and low current.

於所有操作記憶晶胞連接之P型基板或P型井區施加基底電壓Vsub,且於所有操作記憶晶胞連接之位元線14、字線20、共源線24分別施 加位元電壓Vb、字電壓Vw、共源電壓Vs,並滿足下列條件:寫入時,滿足Vsub為接地,Vs=Vb=0,且Vw=高壓(HV);抹除時,滿足Vsub為接地,Vs=Vb=高壓,且Vw=浮接。 The substrate voltage V sub is applied to all P-type substrates or P-type well regions in which the memory cell is connected, and the bit voltage V is applied to the bit lines 14 , the word lines 20 , and the common source lines 24 connected to all the memory cells. b , word voltage V w , common source voltage V s , and satisfy the following conditions: when writing, V sub is grounded, V s = V b =0, and V w = high voltage (HV); V sub ground, V s = V b = high voltage, and V w = floating.

當場效電晶體38、42、46、50為P型場效電晶體時,根據上述記憶晶胞與電壓之定義,更於N型井區或N型基板施加基底電壓Vsub,並於寫入時,Vsub=高壓(HV),Vw=0,且Vs=Vb=高壓;抹除時,Vsub=高壓,Vw=浮接,且Vs=Vb=0。 38,42,46,50 spot effect transistor is a P-type field effect transistor, the memory cell in accordance with the above definition of the voltage, but the N-well or N-type substrate Shijia Ji substrate voltage V sub, and a write When V sub = high voltage (HV), V w =0, and V s = V b = high voltage; when erasing, V sub = high voltage, V w = floating, and V s = V b =0.

由於對於同一子記憶體陣列28而言,同一位元線14連接二記憶晶胞,所以進行寫入或抹除時,一次便對一位元組之記憶晶胞進行動作,而非單一記憶晶胞。利用上述偏壓方式,可在不外加隔絕電晶體的前提下,達到非揮發記憶體使用上位元組寫入(byte write)、抹除(byte erase)的功能。 Since the same bit line 14 is connected to the two memory cells for the same sub-memory array 28, when writing or erasing, the memory cell of one tuple is operated once instead of a single memory crystal. Cell. By using the above bias method, the function of byte writing and byte erase can be achieved in the non-volatile memory without adding an isolation transistor.

以下介紹場效電晶體38、42、46、50及電容40、44、48、52的結構剖視圖,並以N型場效電晶體為例。請參閱第7圖,N型場效電晶體58設於一作為半導體基板之P型半導體基板60中,並具有一導電閘極62,另有一電容64同時與N型場效電晶體58水平設於P型半導體基板60中,電容64為與導電閘極同一多晶矽之電容。當半導體基板為N型時,則可在基板中設一P型井區,再讓N型場效電晶體58設於P型井區中。 The structural cross-sectional views of the field effect transistors 38, 42, 46, 50 and the capacitors 40, 44, 48, 52 are described below, and an N-type field effect transistor is taken as an example. Referring to FIG. 7, the N-type field effect transistor 58 is disposed in a P-type semiconductor substrate 60 as a semiconductor substrate, and has a conductive gate 62. The capacitor 64 is simultaneously horizontally disposed with the N-type field effect transistor 58. In the P-type semiconductor substrate 60, the capacitor 64 is a capacitor of the same polysilicon as the conductive gate. When the semiconductor substrate is N-type, a P-type well region may be disposed in the substrate, and the N-type field effect transistor 58 may be disposed in the P-type well region.

同樣地,當場效電晶體38、42、46、50及電容40、44、48、52的結構剖視圖以P型場效電晶體為例時,如第8圖所示,P型場效電晶體66設於一作為半導體基板之N型半導體基板68中,並具有一導電閘極70,另有一電容72同時與P型場效電晶體66水平設於N型半導體基板68中,電容72為 與導電閘極同一多晶矽之電容。當半導體基板為P型時,則可在基板中設一N型井區,再讓P型場效電晶體66設於N型井區中。 Similarly, when the cross-sectional views of the field effect transistors 38, 42, 46, 50 and the capacitors 40, 44, 48, 52 are exemplified by a P-type field effect transistor, as shown in Fig. 8, the P-type field effect transistor 66 is disposed in an N-type semiconductor substrate 68 as a semiconductor substrate, and has a conductive gate 70, and a capacitor 72 is simultaneously disposed horizontally with the P-type field effect transistor 66 in the N-type semiconductor substrate 68, and the capacitor 72 is The same polysilicon capacitor as the conductive gate. When the semiconductor substrate is P-type, an N-type well region may be disposed in the substrate, and the P-type field effect transistor 66 may be disposed in the N-type well region.

以下提供第二實施例。請同時參閱第9圖、第10圖與第11圖,此第二實施例與第一實施例差別僅在於每一組位元線16包含二條位元線14,因此第一組位元線18亦包含二條位元線14,其係分別連接同一子記憶體陣列28之第一、第三記憶晶胞30、34;第二組位元線19包含二條位元線14,其係分別連接同一子記憶體陣列28之第二、第四記憶晶胞32、36。此外,在相鄰二之子記憶體陣列28中,二第三記憶晶胞34彼此相鄰且連接同一位元線14,以共用同一接點,二第四記憶晶胞36彼此相鄰且連接同一位元線14,以共用同一接點。換言之,即二第三記憶晶胞34之場效電晶體46彼此相鄰且連接同一位元線14,以共用同一汲極接點56,二第四記憶晶胞36之場效電晶體50彼此相鄰且連接同一位元線14,以共用同一汲極接點56,如此便可縮小整體佈局面積。 A second embodiment is provided below. Please refer to FIG. 9 , FIG. 10 and FIG. 11 simultaneously. This second embodiment differs from the first embodiment only in that each group of bit lines 16 includes two bit lines 14 , so the first group of bit lines 18 . Also included are two bit lines 14, which are respectively connected to the first and third memory cells 30, 34 of the same sub-memory array 28; the second set of bit lines 19 comprise two bit lines 14, which are respectively connected to the same The second and fourth memory cells 32, 36 of the sub-memory array 28. Further, in the adjacent two-child memory array 28, the two third memory cells 34 are adjacent to each other and connected to the same bit line 14 to share the same contact, and the second and fourth memory cells 36 are adjacent to each other and connected to each other. Bit line 14 to share the same contact. In other words, the field effect transistors 46 of the second memory cell 34 are adjacent to each other and connected to the same bit line 14 to share the same gate contact 56, and the field effect transistors 50 of the second memory cell 36 are mutually Adjacent and connected to the same bit line 14 to share the same bungee contact 56, the overall layout area can be reduced.

請再參閱第9圖,場效電晶體38、42、46、50可皆為位於P型基板或P型井區中之N型場效電晶體,亦或位於N型基板或N型井區中之P型場效電晶體,而第二實施例之操作方式因應N型或P型場效電晶體而有不同,以下先說明場效電晶體38、42、46、50為N型場效電晶體的操作方式。 Referring to FIG. 9, the field effect transistors 38, 42, 46, 50 may all be N-type field effect transistors located in the P-type substrate or the P-type well region, or in the N-type substrate or the N-type well region. In the case of the P-type field effect transistor, the operation mode of the second embodiment differs depending on the N-type or P-type field effect transistor. The following describes the field effect transistor 38, 42, 46, 50 as the N-type field effect. The mode of operation of the transistor.

上述之第一、第二、第三、第四記憶晶胞30、32、34、36皆作為一操作記憶晶胞,本發明係選取所有操作記憶晶胞,以進行寫入或抹除操作。第二實施例的操作方式如下,利用下面的操作方式,可於低電壓、低電流的條件下同時複寫大量記憶晶胞。 The first, second, third, and fourth memory cells 30, 32, 34, and 36 are all used as an operational memory cell, and the present invention selects all of the operational memory cells for writing or erasing operations. The operation mode of the second embodiment is as follows. With the following operation mode, a large number of memory cells can be simultaneously written under conditions of low voltage and low current.

於所有操作記憶晶胞連接之P型基板或P型井區施加基底電 壓Vsub,並於所有操作記憶晶胞連接之位元線14、字線20、共源線24分別施加位元電壓Vb、字電壓Vw、共源電壓Vs,並滿足下列條件:寫入時,滿足Vsub=接地,Vs=Vb=0,且Vw=高壓(HV);抹除時,滿足Vsub=接地,Vs=Vb=高壓,且Vw=浮接。 Sub Shijia Ji bottom voltage V P-type substrate or on a P-type well region of the memory cell connected to all operations, and the memory cell connected to the bit line 14 all operations, the word lines 20, 24 are respectively applied to common source line voltage V bit b , word voltage V w , common source voltage V s , and satisfy the following conditions: when writing, satisfy V sub = ground, V s = V b =0, and V w = high voltage (HV); V sub = ground, V s = V b = high voltage, and V w = floating.

當場效電晶體38、42、46、50為P型場效電晶體時,根據上述記憶晶胞與電壓之定義,更於N型井區或N型基板施加基底電壓Vsub,並於寫入時,Vsub=高壓(HV),Vw=0,且Vs=Vb=高壓;抹除時,Vsub=高壓,Vw=浮接,且Vs=Vb=0。 38,42,46,50 spot effect transistor is a P-type field effect transistor, the memory cell in accordance with the above definition of the voltage, but the N-well or N-type substrate Shijia Ji substrate voltage V sub, and a write When V sub = high voltage (HV), V w =0, and V s = V b = high voltage; when erasing, V sub = high voltage, V w = floating, and V s = V b =0.

利用上述偏壓方式,可在不外加隔絕電晶體的前提下,同樣可達到非揮發記憶體使用上位元組寫入、抹除的功能。 By using the above bias method, the function of writing and erasing the non-volatile memory using the upper byte can be achieved without the addition of the isolation transistor.

當記憶晶胞在作寫入的操作時,其電壓由約2.5伏特或3.3伏特經由昇壓(charge pump)加到一穩定高壓而來,但因汲極與源極間壓差,會造成汲極與源極間電流產生,而使高壓產生變動;當電流愈大,高壓產生的變動愈大,其所需charge pump愈強,在佈局上的面積也愈大,通常快閃記憶體之架構在作程式化時,其所加偏壓為:閘極電容與汲極加高壓,源極接地,其汲極與源極間電流約為500u安培/位元。而本發明在同時選取所有記憶晶胞進行寫入操作時,乃於閘極電容加高壓;進行抹除操作時,則在源極及汲極兩端加高壓,這兩端的電壓分別由約5伏特和3.3伏特加到約9伏特和7伏特,其遠低於電晶體的耐受壓。本發明之操作方法在所加偏壓條件下,可以一次抹除所有記憶晶胞,也可以一起進行所有記憶晶胞的程式化,而沒有負載,導致可以降低charge pump,使效率提高。 When the memory cell is in the write operation, its voltage is applied to a stable high voltage by a charge pump of about 2.5 volts or 3.3 volts, but the voltage difference between the drain and the source causes 汲The current between the pole and the source is generated, and the high voltage is changed. When the current is larger, the higher the fluctuation of the high voltage is, the stronger the required charge pump is, the larger the layout area is, and the structure of the flash memory is usually When programmed, the bias voltage is: the gate capacitance and the drain are applied with high voltage, the source is grounded, and the current between the drain and the source is about 500u amps/bit. In the present invention, when all the memory cells are selected for writing operation, the gate capacitance is increased by a high voltage; when the erasing operation is performed, a high voltage is applied to both the source and the drain, and the voltages at the two ends are respectively about 5 Volts and 3.3 volts are added to about 9 volts and 7 volts, which is much lower than the withstand voltage of the transistor. The operating method of the present invention can erase all the memory cells at one time under the bias condition, and can also perform the stylization of all the memory cells together without load, thereby reducing the charge pump and improving the efficiency.

至於第二實施例的場效電晶體38、42、46、50及電容40、44、 48、52的結構剖視圖,與第一實施例相同,因此不再贅述。 As for the field effect transistors 38, 42, 46, 50 and the capacitors 40, 44 of the second embodiment, The structural cross-sectional views of 48 and 52 are the same as those of the first embodiment, and therefore will not be described again.

綜上所述,本發明乃於具有小面積與低成本之電子抹除式可複寫唯讀記憶體架構下,利用所加偏壓,可以將全部的記憶晶胞一起抹除或寫入,而達到大量複寫的功能。 In summary, the present invention is capable of erasing or writing all memory cells together with a bias voltage in an electronic erasing rewritable read-only memory architecture having a small area and a low cost. Achieve a lot of replication features.

以上所述者,僅為本發明一較佳實施例而已,並非用來限定本發明實施之範圍,故舉凡依本發明申請專利範圍所述之形狀、構造、特徵及精神所為之均等變化與修飾,均應包括於本發明之申請專利範圍內。 The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, so that the shapes, structures, features, and spirits described in the claims of the present invention are equally varied and modified. All should be included in the scope of the patent application of the present invention.

14‧‧‧位元線 14‧‧‧ bit line

16‧‧‧位元線 16‧‧‧ bit line

18‧‧‧第一組位元線 18‧‧‧The first group of bit lines

19‧‧‧第二組位元線 19‧‧‧Second group of bit lines

20‧‧‧字線 20‧‧‧ word line

24‧‧‧共源線 24‧‧‧Common source line

26‧‧‧第一共源線 26‧‧‧The first common source line

28‧‧‧子記憶體陣列 28‧‧‧Sub Memory Array

30‧‧‧第一記憶晶胞 30‧‧‧First memory cell

32‧‧‧第二記憶晶胞 32‧‧‧Second memory cell

34‧‧‧第三記憶晶胞 34‧‧‧ Third memory cell

36‧‧‧第四記憶晶胞 36‧‧‧The fourth memory cell

38‧‧‧場效電晶體 38‧‧‧ Field Effect Crystal

40‧‧‧電容 40‧‧‧ Capacitance

42‧‧‧場效電晶體 42‧‧‧ Field Effect Crystal

44‧‧‧電容 44‧‧‧ Capacitance

46‧‧‧場效電晶體 46‧‧‧ Field Effect Crystal

48‧‧‧電容 48‧‧‧ Capacitance

50‧‧‧場效電晶體 50‧‧‧ field effect transistor

52‧‧‧電容 52‧‧‧ Capacitance

Claims (22)

一種小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,該小面積電子抹除式可複寫唯讀記憶體陣列包含:複數條平行之位元線,係區分為複數組位元線,該些組位元線包含一第一組位元線與一第二組位元線;複數條平行之字線,係與該些位元線互相垂直,並包含一第一字線;複數條平行之共源線,係與該些字線互相平行,並包含一第一共源線;及複數子記憶體陣列,每一該子記憶體陣列連接二組該位元線、一該字線與一該共源線,每一該子記憶體陣列包含:一第一記憶晶胞,係連接該第一組位元線、該第一共源線與該第一字線;以及一第二記憶晶胞,係連接該第二組位元線、該第一共源線與該第一字線,該第一、第二記憶晶胞互相對稱配置,並位於該第一共源線之同一側;一第三記憶晶胞,係連接該第一組位元線、該第一共源線與該第一字線,並以該第一共源線為軸與該第一記憶晶胞對稱配置;及一第四記憶晶胞,係連接該第二組位元線、該第一共源線與該第一字線,並以該第一共源線為軸與該第二記憶晶胞對稱配置,又該第三、第四記憶晶胞互相對稱配置,且與該第一、第二記憶晶胞位於該第一共源線之相異兩側,其中,該第一、第二、第三、第四記憶晶胞皆包含位於P型基板或P型井區中之N型場效電晶體,且該第一、第二、第三、第四記憶晶胞皆作為一操作記憶晶胞,則在選取所有該操作記憶晶胞進行操作時,該操作方法之特徵在於:於所有該操作記憶晶胞連接之該P型基板或該P型井區施加一基底電壓Vsub,且於所有該操作記憶晶胞連接之該位元線、該字線、該共源線分別施加一位元電壓Vb、一字電壓Vw、一共源電壓Vs,並滿足下列條 件:寫入時,滿足Vsub=接地;Vs=Vb=0;及Vw=高壓(HV);及抹除時,滿足Vsub=接地;Vs=Vb=高壓;及Vw=浮接。 A small area electronic erasing rewritable read-only memory array operation method, the small area electronic erasing rewritable read-only memory array comprises: a plurality of parallel bit lines, which are divided into complex array bit lines The set of bit lines includes a first set of bit lines and a second set of bit lines; a plurality of parallel word lines are perpendicular to the bit lines and include a first word line; a parallel common source line parallel to the word lines and including a first common source line; and a plurality of sub-memory arrays, each of the sub-memory arrays connecting two sets of the bit lines, one word a line and a common source line, each of the sub-memory arrays comprising: a first memory cell connecting the first set of bit lines, the first common source line and the first word line; and a first a second memory cell connected to the second group of bit lines, the first common source line and the first word line, the first and second memory cells being symmetrically arranged with each other and located at the first common source line a third memory cell connected to the first group of bit lines, the first common source line and the first word line And aligning with the first memory cell with the first common source line as an axis; and a fourth memory cell connecting the second group of bit lines, the first common source line and the first word line And symmetrically arranging the second common memory cell with the first common source line as an axis, and the third and fourth memory cells are symmetrically arranged with each other, and the first and second memory cells are located at the first The first, second, third, and fourth memory cells each include an N-type field effect transistor located in the P-type substrate or the P-type well region, and the first The second, third, and fourth memory cells are all operated as a memory cell, and when all of the operational memory cells are selected for operation, the method of operation is characterized in that all of the operational memory cells are connected Applying a substrate voltage V sub to the P-type substrate or the P-type well region, and applying a bit voltage V b to the bit line, the word line, and the common source line respectively connected to the operation memory cell Voltage V w , a common source voltage V s , and satisfying the following conditions: when writing, satisfy V sub = ground; V s = V b =0; and V w = high voltage (HV); and when erasing, satisfy V sub = ground; V s = V b = high voltage; and V w = floating. 如請求項1所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中每一該子記憶體陣列係位於相鄰之二組該位元線之間。 The method of operating a small area electronic erasable rewritable read-only memory array according to claim 1, wherein each of the sub-memory arrays is located between two adjacent sets of the bit lines. 如請求項1所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該第一、第二、第三、第四記憶晶胞皆連接該第一字線,以共用同一接點。 The method for operating a small-area electronic erasable rewritable read-only memory array according to claim 1, wherein the first, second, third, and fourth memory cells are connected to the first word line for sharing The same contact. 如請求項1所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該第一組位元線包含一該位元線,其係連接該第一、第三記憶晶胞,且該第二組位元線亦包含一該位元線,其係連接該第二、第四記憶晶胞。 The method for operating a small-area electronic erasable rewritable read-only memory array according to claim 1, wherein the first set of bit lines includes a bit line connecting the first and third memory crystals And the second set of bit lines also includes a bit line connecting the second and fourth memory cells. 如請求項1所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該第一組位元線包含二該位元線,其係分別連接該第一、第三記憶晶胞,且該第二組位元線亦包含二該位元線,其係分別連接該第二、第四記憶晶胞。 The method for operating a small-area electronic erasable rewritable read-only memory array according to claim 1, wherein the first set of bit lines includes two bit lines, which are respectively connected to the first and third memories. The unit cell, and the second group of bit lines also includes two bit lines, which are respectively connected to the second and fourth memory cells. 如請求項4或5所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中相鄰二之該子記憶體陣列中,該二第三記憶晶胞彼此相鄰且連 接同一該位元線,以共用同一接點,該二第四記憶晶胞彼此相鄰且連接同一該位元線,以共用同一接點。 The method of operating a small area electronic erasable rewritable read-only memory array according to claim 4, wherein the two third memory cells are adjacent to each other and connected to each other in the adjacent sub-memory array. The same bit line is connected to share the same contact, and the two fourth memory cells are adjacent to each other and connected to the same bit line to share the same contact. 如請求項1所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該第一記憶晶胞之該N型場效電晶體具有具有一汲極、一源極及一導電閘極,且該汲極連接該第一組位元線,該源極連接該第一共源線,又該第一字線之偏壓係經由與該N型場效電晶體之該導電閘極相同多晶矽形成之一電容耦合至該N型場效電晶體,該N型場效電晶體接收該第一組位元線與該第一共源線之偏壓,對該導電閘極進行寫入資料或將該導電閘極之資料進行抹除。 The method for operating a small-area electronic erasing rewritable read-only memory array according to claim 1, wherein the N-type field effect transistor of the first memory cell has a drain, a source, and a a conductive gate, and the drain is connected to the first group of bit lines, the source is connected to the first common source line, and the bias of the first word line is via the conductive with the N-type field effect transistor One of the gates having the same polysilicon formation is capacitively coupled to the N-type field effect transistor, and the N-type field effect transistor receives a bias voltage between the first set of bit lines and the first common source line, and the conductive gate is performed Write data or erase the data of the conductive gate. 如請求項1所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該第二記憶晶胞之該N型場效電晶體具有一汲極、一源極及一導電閘極,且該汲極連接該第二組位元線,該源極連接該第一共源線,又該第一字線之偏壓係經由與該N型場效電晶體之該導電閘極相同多晶矽形成之一電容耦合至該N型場效電晶體,該N型場效電晶體接收該第二組位元線與該第一共源線之偏壓,對該導電閘極進行寫入資料或將該導電閘極之資料進行抹除。 The method for operating a small-area electronic erasing rewritable read-only memory array according to claim 1, wherein the N-type field effect transistor of the second memory cell has a drain, a source, and a conductive a gate, and the drain is connected to the second group of bit lines, the source is connected to the first common source line, and the bias of the first word line is via the conductive gate of the N-type field effect transistor One of the extremely identical polysilicon formations is capacitively coupled to the N-type field effect transistor, the N-type field effect transistor receiving a bias voltage of the second set of bit lines and the first common source line, writing the conductive gate Enter the data or erase the data of the conductive gate. 如請求項1所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該第三記憶晶胞之該N型場效電晶體具有一汲極、一源極及一導電閘極,且該汲極連接該第一組位元線,該源極連接該第一共源線,又該第一字線之偏壓係經由與該N型場效電晶體之該導電閘極相同多晶矽形成之一電容耦合至該N型場效電晶體,該N型場效電晶體接收該第一組位元線與該第一共源線之偏壓,對該導電閘極進行寫入資料或將該導 電閘極之資料進行抹除。 The method for operating a small-area electronic erasing rewritable read-only memory array according to claim 1, wherein the N-type field effect transistor of the third memory cell has a drain, a source, and a conductive a gate, and the drain is connected to the first group of bit lines, the source is connected to the first common source line, and the bias of the first word line is via the conductive gate of the N-type field effect transistor One of the most identical polysilicon formations is capacitively coupled to the N-type field effect transistor, the N-type field effect transistor receiving a bias voltage of the first set of bit lines and the first common source line, writing the conductive gate Entry information or the guide The data of the electric gate is erased. 如請求項1所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該第四記憶晶胞之該N型場效電晶體具有一汲極、一源極及一導電閘極,且該汲極連接該第二組位元線,該源極連接該第一共源線,又該第一字線之偏壓係經由與該N型場效電晶體之該導電閘極相同多晶矽形成之一電容耦合至該N型場效電晶體,該N型場效電晶體接收該第二組位元線與該第一共源線之偏壓,對該導電閘極進行寫入資料或將該導電閘極之資料進行抹除。 The method for operating a small-area electronic erasing rewritable read-only memory array according to claim 1, wherein the N-type field effect transistor of the fourth memory cell has a drain, a source, and a conductive a gate, and the drain is connected to the second group of bit lines, the source is connected to the first common source line, and the bias of the first word line is via the conductive gate of the N-type field effect transistor One of the extremely identical polysilicon formations is capacitively coupled to the N-type field effect transistor, the N-type field effect transistor receiving a bias voltage of the second set of bit lines and the first common source line, writing the conductive gate Enter the data or erase the data of the conductive gate. 如請求項7、8、9或10所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該N型場效電晶體與該電容係水平設於一半導體基板中。 The method of operating a small-area electronic erasing rewritable read-only memory array according to claim 7, wherein the N-type field effect transistor and the capacitor are horizontally disposed in a semiconductor substrate. 一種小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,該小面積電子抹除式可複寫唯讀記憶體陣列包含:複數條平行之位元線,係區分為複數組位元線,該些組位元線包含一第一組位元線與一第二組位元線;複數條平行之字線,係與該些位元線互相垂直,並包含一第一字線;複數條平行之共源線,係與該些字線互相平行,並包含一第一共源線;及複數子記憶體陣列,每一該子記憶體陣列連接二組該位元線、一該字線與一該共源線,每一該子記憶體陣列包含:一第一記憶晶胞,係連接該第一組位元線、該第一共源線與該第一字線;以及一第二記憶晶胞,係連接該第二組位元線、該第一共源線與該第一字線,該第一、第二記憶晶胞互相對稱配置,並位於該第一共源線之同一側;一第三記憶晶胞,係連接該第一組位元線、該第一共源線與該第一字線,並以該第一共源線為軸與該第一記憶晶胞對稱配置;及一第四記憶晶胞,係連接該第二 組位元線、該第一共源線與該第一字線,並以該第一共源線為軸與該第二記憶晶胞對稱配置,又該第三、第四記憶晶胞互相對稱配置,且與該第一、第二記憶晶胞位於該第一共源線之相異兩側,其中,該第一、第二、第三、第四記憶晶胞皆包含位於N型基板或N型井區中之P型場效電晶體,且該第一、第二、第三、第四記憶晶胞皆作為一操作記憶晶胞,則在選取所有該操作記憶晶胞進行操作時,該操作方法之特徵在於:於所有該操作記憶晶胞連接之該N型基板或該N型井區施加一基底電壓Vsub,且於所有該操作記憶晶胞連接之該位元線、該字線、該共源線分別施加一位元電壓Vb、一字電壓Vw、一共源電壓Vs,並滿足下列條件:寫入時,滿足Vsub高壓(HV);Vs=Vb=高壓(HV);及Vw=0;及抹除時,滿足Vsub=高壓(HV);Vs=Vb=0;及Vw=浮接。 A small area electronic erasing rewritable read-only memory array operation method, the small area electronic erasing rewritable read-only memory array comprises: a plurality of parallel bit lines, which are divided into complex array bit lines The set of bit lines includes a first set of bit lines and a second set of bit lines; a plurality of parallel word lines are perpendicular to the bit lines and include a first word line; a parallel common source line parallel to the word lines and including a first common source line; and a plurality of sub-memory arrays, each of the sub-memory arrays connecting two sets of the bit lines, one word a line and a common source line, each of the sub-memory arrays comprising: a first memory cell connecting the first set of bit lines, the first common source line and the first word line; and a first a second memory cell connected to the second group of bit lines, the first common source line and the first word line, the first and second memory cells being symmetrically arranged with each other and located at the first common source line a third memory cell connected to the first group of bit lines, the first common source line and the first word line And aligning with the first memory cell with the first common source line as an axis; and a fourth memory cell connecting the second group of bit lines, the first common source line and the first word line And symmetrically arranging the second common memory cell with the first common source line as an axis, and the third and fourth memory cells are symmetrically arranged with each other, and the first and second memory cells are located at the first The first, second, third, and fourth memory cells each include a P-type field effect transistor located in the N-type substrate or the N-type well region, and the first The second, third, and fourth memory cells are all operated as a memory cell, and when all of the operational memory cells are selected for operation, the method of operation is characterized in that all of the operational memory cells are connected N-type substrate is applied to the N-type well region or a substrate voltage V sub, and all the operation of the bit line connected to the memory cell, the word line, are respectively applied to the common source line one yuan voltage V b, the word The voltage V w , a common source voltage V s , and satisfying the following conditions: when writing, satisfying V sub high voltage (HV); V s = V b = high voltage (H) V); and V w =0; and when erasing, satisfy V sub = high voltage (HV); V s = V b =0; and V w = floating. 如請求項12所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中每一該子記憶體陣列係位於相鄰之二組該位元線之間。 The method of operating a small area electronic erasable rewritable read-only memory array according to claim 12, wherein each of the sub-memory arrays is located between two adjacent sets of the bit lines. 如請求項12所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該第一、第二、第三、第四記憶晶胞皆連接該第一字線,以共用同一接點。 The method for operating a small area electronic erasable rewritable read-only memory array according to claim 12, wherein the first, second, third, and fourth memory cells are connected to the first word line for sharing The same contact. 如請求項12所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方 法,其中該第一組位元線包含一該位元線,其係連接該第一、第三記憶晶胞,且該第二組位元線亦包含一該位元線,其係連接該第二、第四記憶晶胞。 The operator of the small area electronic erasing rewritable read-only memory array as claimed in claim 12 The first group of bit lines includes a bit line connecting the first and third memory cells, and the second group of bit lines also includes a bit line, which is connected to the bit line The second and fourth memory cells. 如請求項12所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該第一組位元線包含二該位元線,其係分別連接該第一、第三記憶晶胞,且該第二組位元線亦包含二該位元線,其係分別連接該第二、第四記憶晶胞。 The method for operating a small area electronic erasable rewritable read-only memory array according to claim 12, wherein the first set of bit lines includes two bit lines, which are respectively connected to the first and third memories. The unit cell, and the second group of bit lines also includes two bit lines, which are respectively connected to the second and fourth memory cells. 如請求項15或16所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中相鄰二之該子記憶體陣列中,該二第三記憶晶胞彼此相鄰且連接同一該位元線,以共用同一接點,該二第四記憶晶胞彼此相鄰且連接同一該位元線,以共用同一接點。 The method of operating a small-area electronic erasable rewritable read-only memory array according to claim 15 or 16, wherein in the adjacent two sub-memory arrays, the two third memory cells are adjacent to each other and connected The same bit line is shared to share the same contact, and the two fourth memory cells are adjacent to each other and connected to the same bit line to share the same contact. 如請求項12所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該第一記憶晶胞之該P型場效電晶體具有一汲極、一源極及一導電閘極,且該汲極連接該第一組位元線,該源極連接該第一共源線,又該第一字線之偏壓係經由與該P型場效電晶體之該導電閘極相同多晶矽形成之一電容耦合至該P型場效電晶體,該P型場效電晶體接收該第一組位元線與該第一共源線之偏壓,對該導電閘極進行寫入資料或將該導電閘極之資料進行抹除。 The method of operating a small-area electronic erasing rewritable read-only memory array according to claim 12, wherein the P-type field effect transistor of the first memory cell has a drain, a source, and a conductive a gate, and the drain is connected to the first group of bit lines, the source is connected to the first common source line, and the bias of the first word line is via the conductive gate of the P-type field effect transistor One of the extremely identical polysilicon formations is capacitively coupled to the P-type field effect transistor, the P-type field effect transistor receiving a bias voltage of the first set of bit lines and the first common source line, writing the conductive gate Enter the data or erase the data of the conductive gate. 如請求項12所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該第二記憶晶胞之該P型場效電晶體具有一汲極、一源極及一導電閘極,且該汲極連接該第二組位元線,該源極連接該第一共源線,又該第一字線之偏壓係經由與該P型場效電晶體之該導電閘極相同多晶矽 形成之一電容耦合至該P型場效電晶體,該P型場效電晶體接收該第二組位元線與該第一共源線之偏壓,對該導電閘極進行寫入資料或將該導電閘極之資料進行抹除。 The method for operating a small-area electronic erasing rewritable read-only memory array according to claim 12, wherein the P-type field effect transistor of the second memory cell has a drain, a source, and a conductive a gate, and the drain is connected to the second group of bit lines, the source is connected to the first common source line, and the bias of the first word line is via the conductive gate of the P-type field effect transistor Very identical polysilicon Forming a capacitive coupling to the P-type field effect transistor, the P-type field effect transistor receiving a bias voltage of the second group of bit lines and the first common source line, writing the data to the conductive gate or The information of the conductive gate is erased. 如請求項12所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該第三記憶晶胞之該P型場效電晶體具有一汲極、一源極及一導電閘極,且該汲極連接該第一組位元線,該源極連接該第一共源線,又該第一字線之偏壓係經由與該P型場效電晶體之該導電閘極相同多晶矽形成之一電容耦合至該P型場效電晶體,該P型場效電晶體接收該第一組位元線與該第一共源線之偏壓,對該導電閘極進行寫入資料或將該導電閘極之資料進行抹除。 The method for operating a small-area electronic erasing rewritable read-only memory array according to claim 12, wherein the P-type field effect transistor of the third memory cell has a drain, a source, and a conductive a gate, and the drain is connected to the first group of bit lines, the source is connected to the first common source line, and the bias of the first word line is via the conductive gate of the P-type field effect transistor One of the extremely identical polysilicon formations is capacitively coupled to the P-type field effect transistor, the P-type field effect transistor receiving a bias voltage of the first set of bit lines and the first common source line, writing the conductive gate Enter the data or erase the data of the conductive gate. 如請求項12所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該第四記憶晶胞之該P型場效電晶體具有一汲極、一源極及一導電閘極,且該汲極連接該第二組位元線,該源極連接該第一共源線,又該第一字線之偏壓係經由與該P型場效電晶體之該導電閘極相同多晶矽形成之一電容耦合至該P型場效電晶體,該P型場效電晶體接收該第二組位元線與該第一共源線之偏壓,對該導電閘極進行寫入資料或將該導電閘極之資料進行抹除。 The method for operating a small-area electronic erasing rewritable read-only memory array according to claim 12, wherein the P-type field effect transistor of the fourth memory cell has a drain, a source, and a conductive a gate, and the drain is connected to the second group of bit lines, the source is connected to the first common source line, and the bias of the first word line is via the conductive gate of the P-type field effect transistor One of the extremely identical polysilicon formations is capacitively coupled to the P-type field effect transistor, the P-type field effect transistor receiving a bias voltage of the second set of bit lines and the first common source line, writing the conductive gate Enter the data or erase the data of the conductive gate. 如請求項18、19、20或21所述之小面積電子抹除式可複寫唯讀記憶體陣列的操作方法,其中該P型場效電晶體與該電容係水平設於一半導體基板中。 The method of operating a small area electronic erasable rewritable read-only memory array according to claim 18, 19, 20 or 21, wherein the P-type field effect transistor and the capacitor are horizontally disposed in a semiconductor substrate.
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