TWI415251B - Small area of electronic erasure can be rewritten read only memory array - Google Patents
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Description
本發明係有關一種記憶體陣列,特別是關於一種小面積電子抹除式可複寫唯讀記憶體陣列。The present invention relates to a memory array, and more particularly to a small area electronic erase rewritable read-only memory array.
按,互補式金屬氧化半導體(Complementary Metal Oxide Semiconductor,CMOS)製程技術已成為特殊應用積體電路(application specific integrated circuit,ASIC)之常用製造方法。在電腦資訊產品發達的今天,快閃記憶體(Flash)與電子式可清除程式化唯讀記憶體(Electrically Erasable Programmable Read Only Memory,EEPROM)由於皆具備有電性編寫和抹除資料之非揮發性記憶體功能,且在電源關掉後資料不會消失,所以被廣泛使用於電子產品上。According to Complementary Metal Oxide Semiconductor (CMOS) process technology, it has become a common manufacturing method for application specific integrated circuits (ASICs). In today's computer information products, Flash and Electronically Erasable Programmable Read Only Memory (EEPROM) are non-volatile with electrical writing and erasing data. The memory function, and the data does not disappear after the power is turned off, so it is widely used in electronic products.
非揮發性記憶體係為可程式化的,其係用以儲存電荷以改變記憶體之電晶體的閘極電壓,或不儲存電荷以留下原記憶體之電晶體的閘極電壓。抹除操作則是將儲存在非揮發性記憶體中之電荷移除,使得非揮發性記憶體回到原記憶體之電晶體之閘極電壓。對於目前之非揮發記憶體,其電路圖與電路佈局圖分別如第1圖與第2圖所示,非揮發性記憶體是由許多記憶晶胞所組成的一種記憶體,圖中每一記憶晶胞包含了一電晶體10與一電容結構12,每二相鄰之一位元組之記憶晶胞間會設有二位元線,如此便會增加面積成本。而第3圖為每一記憶晶胞之結構剖視圖,由圖可知,電容結構12係設於電晶體10之一側,由於這樣的結構,同樣會造成大面積,進而提高成本需求。The non-volatile memory system is programmable to store charge to change the gate voltage of the transistor of the memory or to store the charge to leave the gate voltage of the transistor of the original memory. The erase operation removes the charge stored in the non-volatile memory, causing the non-volatile memory to return to the gate voltage of the transistor of the original memory. For the current non-volatile memory, the circuit diagram and circuit layout are shown in Figures 1 and 2, respectively. The non-volatile memory is a memory composed of many memory cells, each memory crystal in the figure. The cell comprises a transistor 10 and a capacitor structure 12, and a memory line between two adjacent ones of the memory cells is provided with a two-bit line, which increases the area cost. FIG. 3 is a cross-sectional view showing the structure of each memory cell. As can be seen from the figure, the capacitor structure 12 is disposed on one side of the transistor 10. Due to such a structure, a large area is also generated, thereby increasing the cost.
因此,本發明係在針對上述之困擾,提出一種小面積電子抹除式可複寫唯讀記憶體陣列,以解決習知所產生的問題。Accordingly, the present invention has been directed to a small area electronic erasable rewritable read-only memory array in order to solve the above problems.
本發明之主要目的,在於提供一種小面積電子抹除式可複寫唯讀記憶體陣列,其係利用閘極接點與汲極接點共用的方式,來減少晶胞面積,進而降低成本。The main object of the present invention is to provide a small-area electronic erasing rewritable read-only memory array, which uses a method in which a gate contact and a drain contact are shared to reduce the cell area and thereby reduce the cost.
為達上述目的,本發明提供一種小面積電子抹除式可複寫唯讀記憶體陣列,包含複數條平行之位元線、字線與共源線,此些位元線係區分為複數組位元線,其係包含一第一組位元線與一第二組位元線,且字線與位元線互相垂直,並包含一第一字線,共源線與字線互相平行,並包含一第一共源線。另有複數子記憶體陣列,每一子記憶體陣列連接二組位元線、一字線與一共源線,每一子記憶體陣列包含一第一、第二、第三、第四記憶晶胞。第一記憶晶胞連接第一組位元線、第一共源線與第一字線,第二記憶晶胞連接第二組位元線、第一共源線與第一字線,第一、第二記憶晶胞互相對稱配置,並位於第一共源線之同一側。第三記憶晶胞連接第一組位元線、第一共源線與第一字線,並以第一共源線為軸與第一記憶晶胞對稱配置。第四記憶晶胞連接第二組位元線、第一共源線與第一字線,並以第一共源線為軸與第二記憶晶胞對稱配置,又第三、第四記憶晶胞互相對稱配置,且與第一、第二記憶晶胞位於第一共源線之相異兩側。To achieve the above objective, the present invention provides a small area electronic erasing rewritable read-only memory array comprising a plurality of parallel bit lines, word lines and common source lines, and the bit lines are divided into complex array bits. a line comprising a first set of bit lines and a second set of bit lines, wherein the word lines and the bit lines are perpendicular to each other and comprising a first word line, the common source line and the word line being parallel to each other, and Contains a first common source line. There is a plurality of sub-memory arrays, each sub-memory array is connected to two sets of bit lines, a word line and a common source line, and each sub-memory array comprises a first, second, third, fourth memory crystal Cell. The first memory cell is connected to the first group of bit lines, the first common source line and the first word line, and the second memory cell is connected to the second group of bit lines, the first common source line and the first word line, first The second memory cells are symmetrically arranged with each other and are located on the same side of the first common source line. The third memory cell is connected to the first group of bit lines, the first common source line and the first word line, and is symmetrically arranged with the first memory cell with the first common source line as an axis. The fourth memory cell is connected to the second group of bit lines, the first common source line and the first word line, and is symmetrically arranged with the second memory cell by using the first common source line as an axis, and the third and fourth memory crystals are further The cells are symmetrically arranged with each other and are located on opposite sides of the first common source line from the first and second memory cells.
茲為使 貴審查委員對本發明之結構特徵及所達成之功效更有進一步之瞭解與認識,謹佐以較佳之實施例圖及配合詳細之說明,說明如後:For a better understanding and understanding of the structural features and the achievable effects of the present invention, please refer to the preferred embodiment and the detailed description.
以下請同時參閱第4圖及第5圖,以介紹第一實施例。本發明包含複數條平行之位元線14,其係區分為複數組位元線16,此些組位元線16包含一第一組位元線18與一第二組位元線19,此第一組位元線18與第二組位元線19皆包含一位元線14。另有與位元線14互相垂直的複數條平行之字線20,其係包含一第一字線22。與字線20互相平行的有複數條平行之共源線24,其係包含一第一共源線26。上述位元線14、字線20與共源線24會連接複數子記憶體陣列28,即2x2位元記憶晶胞。每一子記憶體陣列28連接二組位元線16、二字線20與一共源線24,且每一子記憶體陣列28係位於相鄰之二組位元線16之間。由於每一子記憶體陣列28與位元線16、二字線20、共源線24的連接關係極為相近,以下就相同處陳述之。Please refer to FIG. 4 and FIG. 5 at the same time to introduce the first embodiment. The present invention includes a plurality of parallel bit lines 14 that are divided into complex array bit lines 16, which include a first set of bit lines 18 and a second set of bit lines 19, Both the first set of bit lines 18 and the second set of bit lines 19 comprise a single bit line 14. There is also a plurality of parallel word lines 20 that are perpendicular to the bit line 14 and that comprise a first word line 22. Parallel to the word line 20 are a plurality of parallel common source lines 24 comprising a first common source line 26. The bit line 14, the word line 20 and the common source line 24 are connected to a plurality of sub-memory arrays 28, that is, 2x2 bit memory cells. Each sub-memory array 28 is connected to two sets of bit lines 16, two word lines 20 and a common source line 24, and each sub-memory array 28 is located between two adjacent sets of bit lines 16. Since the connection relationship between each sub-memory array 28 and the bit line 16, the second word line 20, and the common source line 24 is very similar, the following is stated in the same place.
請參閱第5圖與第6圖,每一子記憶體陣列28包含一第一、第二、第三、第四記憶晶胞30、32、34、36,並位於第一組位元線18與第二組位元線19之間。第一記憶晶胞30連接第一組位元線18之位元線14、第一共源線26與第一字線22,第二記憶晶胞32連接第二組位元線19之位元線14、第一共源線26與第一字線22,第一、第二記憶晶胞32、34互相對稱配置,並位於第一共源線26之同一側。第三記憶晶胞34連接第一組位元線18之位元線14、第一共源線26與第一字線22,並以第一共源線26為軸,與第一記憶晶胞30對稱配置。第四記憶晶胞36連接第二組位元線19之位元線14、第一共源線26與第一字線22,並以第一共源線26為軸,與第二記憶晶胞32對稱配置,又第四記憶晶胞36與第三記憶晶胞34對稱配置,且第一、第二記憶晶胞30、32與第三、第四記憶晶胞34、36分別位於第一共源線26之相異兩側。Referring to FIGS. 5 and 6, each sub-memory array 28 includes a first, second, third, and fourth memory cells 30, 32, 34, 36 and is located in the first set of bit lines 18. Between the second set of bit lines 19. The first memory cell 30 is connected to the bit line 14 of the first group of bit lines 18, the first common source line 26 and the first word line 22, and the second memory cell 32 is connected to the bit of the second group of bit lines 19. The line 14, the first common source line 26 and the first word line 22, the first and second memory cells 32, 34 are symmetrically arranged on each other and on the same side of the first common source line 26. The third memory cell 34 connects the bit line 14 of the first group of bit lines 18, the first common source line 26 and the first word line 22, and the first common source line 26 is the axis, and the first memory cell 30 symmetric configuration. The fourth memory cell 36 is connected to the bit line 14 of the second group of bit lines 19, the first common source line 26 and the first word line 22, and the first common source line 26 is the axis, and the second memory cell 32 symmetrically arranged, the fourth memory cell 36 is symmetrically arranged with the third memory cell 34, and the first and second memory cells 30, 32 and the third and fourth memory cells 34, 36 are respectively located in the first The two sides of the source line 26 are different.
由於第一、第二、第三、第四記憶晶胞30、32、34、36以對稱方式配置,又皆連接第一字線22,因此可於第一字線22共用同一接點。此外,在相鄰二之子記憶體陣列28中,二第三記憶晶胞34彼此相鄰,且連接同一位元線14,以共用同一接點;二第四記憶晶胞36彼此相鄰,亦且連接同一位元線14,以共用同一接點,利用此共用接點配置方式,便可縮小整體佈局面積。Since the first, second, third, and fourth memory cells 30, 32, 34, 36 are arranged in a symmetrical manner and are both connected to the first word line 22, the same contact can be shared by the first word line 22. In addition, in the adjacent two-child memory array 28, the two third memory cells 34 are adjacent to each other and connected to the same bit line 14 to share the same contact; and the second memory cells 36 are adjacent to each other. And the same bit line 14 is connected to share the same contact point, and the common contact arrangement mode can be used to reduce the overall layout area.
第一記憶晶胞30更包含一場效電晶體38與一電容40,場效電晶體38具有一導電閘極,且場效電晶體38之汲極連接第一組位元線18之位元線14,源極連接第一共源線26,第一字線22之偏壓係經由與場效電晶體38之導電閘極相同多晶矽形成之電容40耦合至場效電晶體38,場效電晶體38接收第一組位元線18之位元線14與第一共源線26之偏壓,以對場效電晶體38之導電閘極進行寫入資料或將場效電晶體38之導電閘極之資料進行抹除。The first memory cell 30 further includes a field transistor 38 and a capacitor 40. The field effect transistor 38 has a conductive gate, and the drain of the field effect transistor 38 is connected to the bit line of the first group of bit lines 18. 14. The source is coupled to the first common source line 26. The bias of the first word line 22 is coupled to the field effect transistor 38 via a capacitor 40 formed of the same polysilicon as the conductive gate of the field effect transistor 38. 38 receiving the bias of the bit line 14 of the first set of bit lines 18 and the first common source line 26 to write data to the conductive gate of the field effect transistor 38 or to electrically switch the field effect transistor 38. Extreme data is erased.
第二記憶晶胞32更包含一場效電晶體42與一電容44,場效電晶體42具有一導電閘極,且場效電晶體42之汲極連接第二組位元線19之位元線14,源極連接第一共源線26,第一字線22之偏壓係經由與場效電晶體42之導電閘極相同多晶矽形成之電容44耦合至場效電晶體42,電容44與電容40直接連接,以位於場效電晶體38與場效電晶體42之間。場效電晶體42接收第二組位元線19之位元線14與第一共源線26之偏壓,以對場效電晶體42之導電閘極進行寫入資料或將場效電晶體42之導電閘極之資料進行抹除。The second memory cell 32 further includes a field transistor 42 and a capacitor 44. The field effect transistor 42 has a conductive gate, and the drain of the field effect transistor 42 is connected to the bit line of the second group of bit lines 19. 14. The source is coupled to the first common source line 26. The bias of the first word line 22 is coupled to the field effect transistor 42 via a capacitor 44 formed of the same polysilicon as the conductive gate of the field effect transistor 42. The capacitor 44 and the capacitor 40 is directly connected to be located between the field effect transistor 38 and the field effect transistor 42. The field effect transistor 42 receives the bias voltage of the bit line 14 of the second group of bit lines 19 and the first common source line 26 to write data to the conductive gate of the field effect transistor 42 or to apply a field effect transistor. The data of the conductive gate of 42 is erased.
第三記憶晶胞34更包含一場效電晶體46與一電容48,場效電晶體46具有一導電閘極,且場效電晶體46之汲極連接第一組位元線18之位元線14,源極連接第一共源線26,以與第一記憶晶胞30共用同一接點,第一字線22之偏壓係經由與場效電晶體46之導電閘極相同多晶矽形成之電容48耦合至場效電晶體46,電容48與場效電晶體46係以第一共源線26為軸,分別與電容40與場效電晶體38對稱配置。場效電晶體46接收第一組位元線18之位元線14與第一共源線26之偏壓,以對場效電晶體46之導電閘極進行寫入資料或將場效電晶體46之導電閘極之資料進行抹除。The third memory cell 34 further includes a field transistor 46 and a capacitor 48. The field effect transistor 46 has a conductive gate, and the drain of the field effect transistor 46 is connected to the bit line of the first group of bit lines 18. 14. The source is coupled to the first common source line 26 to share the same contact with the first memory cell 30. The bias of the first word line 22 is formed by a capacitor formed by the same polysilicon as the conductive gate of the field effect transistor 46. 48 is coupled to the field effect transistor 46. The capacitor 48 and the field effect transistor 46 are axially aligned with the capacitor 40 and the field effect transistor 38, respectively, with the first common source line 26 as the axis. The field effect transistor 46 receives the bias voltage of the bit line 14 of the first set of bit lines 18 and the first common source line 26 to write data to the conductive gate of the field effect transistor 46 or to apply a field effect transistor. The data of the conductive gate of 46 is erased.
第四記憶晶胞36更包含一場效電晶體50與一電容52,場效電晶體50具有一導電閘極,且場效電晶體50之汲極連接第二組位元線19之位元線14,源極連接第一共源線26,以與第二記憶晶胞32共用同一接點,第一字線22之偏壓係經由與場效電晶體50之導電閘極相同多晶矽形成之電容52耦合至場效電晶體50,電容52與場效電晶體50係以第一共源線26為軸,分別與電容44與場效電晶體42對稱配置,又電容52與電容48直接連接,以位於場效電晶體50與場效電晶體46之間。場效電晶體46接收第一組位元線18之位元線14與第一共源線26之偏壓,以對場效電晶體46之導電閘極進行寫入資料或將場效電晶體46之導電閘極之資料進行抹除。The fourth memory cell 36 further includes a field transistor 50 and a capacitor 52. The field effect transistor 50 has a conductive gate, and the drain of the field effect transistor 50 is connected to the bit line of the second group of bit lines 19. 14. The source is coupled to the first common source line 26 to share the same contact with the second memory cell 32. The bias of the first word line 22 is formed by a capacitor formed by the same polysilicon as the conductive gate of the field effect transistor 50. The capacitor 52 is coupled to the field effect transistor 50. The capacitor 52 and the field effect transistor 50 are symmetrical with the capacitor 44 and the field effect transistor 42 respectively, and the capacitor 52 is directly connected to the capacitor 48. It is located between the field effect transistor 50 and the field effect transistor 46. The field effect transistor 46 receives the bias voltage of the bit line 14 of the first set of bit lines 18 and the first common source line 26 to write data to the conductive gate of the field effect transistor 46 or to apply a field effect transistor. The data of the conductive gate of 46 is erased.
由於電容40、44、48、52皆連接第一字線22,因此可於第一字線22共用同一閘極接點54。此外,在相鄰二之子記憶體陣列28中,二場效電晶體46彼此相鄰,且連接同一位元線14,以共用同一汲極接點56;二場效電晶體50彼此相鄰,亦且連接同一位元線14,以共用同一汲極接點56,利用此共用接點配置方式,可縮小整體佈局面積,進而大幅降低製造成本。Since the capacitors 40, 44, 48, 52 are all connected to the first word line 22, the same gate contact 54 can be shared by the first word line 22. In addition, in the adjacent two sub-memory arrays 28, the two field effect transistors 46 are adjacent to each other and connected to the same bit line 14 to share the same drain contact 56; the two field effect transistors 50 are adjacent to each other. Also, the same bit line 14 is connected to share the same drain contact 56. With this common contact arrangement, the overall layout area can be reduced, thereby greatly reducing the manufacturing cost.
請再參閱第4圖,上述場效電晶體38、42、46、50可皆為位於P型基板或P型井區中之N型場效電晶體,亦或位於N型基板或N型井區中之P型場效電晶體,而本發明之操作方式因應N型或P型場效電晶體而有不同,以下先說明場效電晶體38、42、46、50為N型場效電晶體的操作方式。為了清楚說明此操作方式,需對每一個記憶晶胞之名稱作明確的定義:上述之第一、第二、第三、第四記憶晶胞30、32、34、36皆作為一操作記憶晶胞,且可選取此些操作記憶晶胞其中之一作為選取記憶晶胞,以進行操作。與選取記憶晶胞連接同一位元線14,且未與選取記憶晶胞連接同一共源線24之操作記憶晶胞,作為複數同位元記憶晶胞;與選取記憶晶胞連接同一字線20之操作記憶晶胞,作為複數同字記憶晶胞,其餘操作記憶晶胞則作為複數未選取記憶晶胞。Referring to FIG. 4, the field effect transistors 38, 42, 46, 50 may all be N-type field effect transistors located in a P-type substrate or a P-type well region, or may be located in an N-type substrate or an N-type well. The P-type field effect transistor in the region, and the operation mode of the present invention is different according to the N-type or P-type field effect transistor. The following description shows that the field effect transistor 38, 42, 46, 50 is the N-type field effect electric power. The way the crystal operates. In order to clearly illustrate this mode of operation, the name of each memory cell should be clearly defined: the first, second, third, and fourth memory cells 30, 32, 34, and 36 are all used as an operational memory crystal. The cell, and one of the operational memory cells can be selected as the selected memory cell for operation. An operational memory cell connected to the same bit line 14 as the selected memory cell and not connected to the same common source line 24 as the selected memory cell, as a complex allomorphic memory cell; connected to the same word line 20 as the selected memory cell The memory cell is operated as a complex word cell, and the rest of the memory cell is used as a complex memory cell.
第一實施例的操作方式如下,利用下面的操作方式,可使除了與選取記憶晶胞連接同一位元線與同一共源線之操作記憶晶胞外,其他操作記憶晶胞不受選取偏壓影響。The operation mode of the first embodiment is as follows. According to the following operation mode, other operational memory cells are not subjected to the selection bias except for the operation memory cell which is connected to the same bit line and the same common source line as the selected memory cell. influences.
於選取記憶晶胞連接之P型基板或P型井區施加基底電壓Vsubp ,並於選取記憶晶胞連接之位元線14、字線20、共源線24分別施加第一位元電壓Vb1 、第一字電壓Vw1 、第一共源電壓VS1 ,於每一同位元記憶晶胞連接之字線20、共源線24分別施加第二字電壓Vw2 、第二共源電壓VS2 ,於每一同字記憶晶胞連接之位元線24、共源線24分別施加第二位元電壓Vb2 、第一共源電壓VS1 ,於每一未選取記憶晶胞連接之位元線14、字線20、共源線24分別施加第二位元電壓Vb2 、第二字電壓Vw2 、第二共源電壓VS2 ,並滿足下列條件:寫入時,Vsubp 為接地,Vb2 為浮接,且Vb1 >VS1 ,Vw1 >VS1 ,Vb1 >VS1 >0,Vb1 >Vw2 >0,Vb1 >VS2 >0;抹除時,滿足Vsubp 為接地,VS1 為接地,Vb2 為浮接,且Vb1 >Vw2 >Vw1 ≧0,Vb1 >VS2 >Vw1 ≧0。 Applying a substrate voltage Vsubp to a P-type substrate or a P-type well region in which the memory cell is connected, and applying a first bit voltage V to the bit line 14, the word line 20, and the common source line 24 of the selected memory cell connection, respectively. B1 , the first word voltage V w1 , the first common source voltage V S1 , the second word voltage V w2 and the second common source voltage V are respectively applied to the word line 20 and the common source line 24 connected to each of the same memory cells. S2 , applying a second bit voltage V b2 and a first common source voltage V S1 to each of the bit line 24 and the common source line 24 connected to the same word memory cell, respectively, for each bit connected to the memory cell The line 14, the word line 20, and the common source line 24 respectively apply the second bit voltage V b2 , the second word voltage V w2 , and the second common source voltage V S2 , and satisfy the following conditions: when writing, V subp is grounded. V b2 is floating, and V b1 >V S1 , V w1 >V S1 , V b1 >V S1 >0, V b1 >V w2 >0, V b1 >V S2 >0; when erasing, V subp is satisfied For grounding, V S1 is grounded, V b2 is floating, and V b1 >V w2 >V w1 ≧0, V b1 >V S2 >V w1 ≧0.
當場效電晶體38、42、46、50為P型場效電晶體時,根據上述記憶晶胞與電壓之定義,更於N型井區或N型基板施加基底電壓Vsubn ,並於寫入時,滿足Vb2 為浮接,且Vsubn >VS1 >Vb1 ,Vsubn1 >VS1 >Vw1 ,Vsubn >VS2 >Vb1 ,Vsubn >Vw2 >Vb1 ;抹除時,滿足Vb2 為浮接,且Vsubn =VS1 ≧Vw1 >Vb1 ,Vsubn >VS2 >Vb1 ,Vsubn >Vw2 >Vb1 。When the field effect transistors 38, 42, 46, 50 are P-type field effect transistors, the substrate voltage Vsubn is applied to the N-type well region or the N-type substrate according to the definition of the memory cell and the voltage, and is written. When V b2 is satisfied as floating, and V subn >V S1 >V b1 , V subn1 >V S1 >V w1 , V subn >V S2 >V b1 , V subn >V w2 >V b1 ; V b2 is satisfied as floating, and V subn =V S1 ≧V w1 >V b1 , V subn >V S2 >V b1 , V subn >V w2 >V b1 .
由於對於同一子記憶體陣列28而言,同一位元線14連接二記憶晶胞,所以進行寫入或抹除時,一次便對一位元組之記憶晶胞進行動作,而非單一記憶晶胞。而利用上述偏壓方式,可在不外加隔絕電晶體的前提下,達到非揮發記憶體使用上位元組寫入(byte write)的功能。Since the same bit line 14 is connected to the two memory cells for the same sub-memory array 28, when writing or erasing, the memory cell of one tuple is operated once instead of a single memory crystal. Cell. By using the above bias method, the function of using byte writes in non-volatile memory can be achieved without adding an isolation transistor.
以下介紹場效電晶體38、42、46、50及電容40、44、48、52的結構剖視圖,並以N型場效電晶體為例。請參閱第7圖,N型場效電晶體58設於一作為半導體基板之P型半導體基板60中,並具有一導電閘極62,另有一電容64同時與N型場效電晶體58水平設於P型半導體基板60中,電容64為與導電閘極同一多晶矽之電容。當半導體基板為N型時,則可在基板中設一P型井區,再讓N型場效電晶體58設於P型井區中。The structural cross-sectional views of the field effect transistors 38, 42, 46, 50 and the capacitors 40, 44, 48, 52 are described below, and an N-type field effect transistor is taken as an example. Referring to FIG. 7, the N-type field effect transistor 58 is disposed in a P-type semiconductor substrate 60 as a semiconductor substrate, and has a conductive gate 62. The capacitor 64 is simultaneously horizontally disposed with the N-type field effect transistor 58. In the P-type semiconductor substrate 60, the capacitor 64 is a capacitor of the same polysilicon as the conductive gate. When the semiconductor substrate is N-type, a P-type well region may be disposed in the substrate, and the N-type field effect transistor 58 may be disposed in the P-type well region.
同樣地,當場效電晶體38、42、46、50及電容40、44、48、52的結構剖視圖以P型場效電晶體為例時,如第8圖所示,P型場效電晶體66設於一作為半導體基板之N型半導體基板68中,並具有一導電閘極70,另有一電容72同時與P型場效電晶體66水平設於N型半導體基板68中,電容72為與導電閘極同一多晶矽之電容。當半導體基板為P型時,則可在基板中設一N型井區,再讓P型場效電晶體66設於N型井區中。Similarly, when the cross-sectional views of the field effect transistors 38, 42, 46, 50 and the capacitors 40, 44, 48, 52 are exemplified by a P-type field effect transistor, as shown in Fig. 8, the P-type field effect transistor 66 is disposed in an N-type semiconductor substrate 68 as a semiconductor substrate, and has a conductive gate 70, and a capacitor 72 is simultaneously disposed horizontally with the P-type field effect transistor 66 in the N-type semiconductor substrate 68, and the capacitor 72 is The conductive gate is the same as the capacitor of the polysilicon. When the semiconductor substrate is P-type, an N-type well region may be disposed in the substrate, and the P-type field effect transistor 66 may be disposed in the N-type well region.
為了操作特定單一記憶晶胞,以下提供第二實施例。請同時參閱第9圖、第10圖與第11圖,此第二實施例與第一實施例差別僅在於每一組位元線16包含二條位元線14,因此第一組位元線18亦包含二條位元線14,其係分別連接同一子記憶體陣列28之第一、第三記憶晶胞30、34;第二組位元線19包含二條位元線14,其係分別連接同一子記憶體陣列28之第二、第四記憶晶胞32、36。此外,在相鄰二之子記憶體陣列28中,二第三記憶晶胞34彼此相鄰且連接同一位元線14,以共用同一接點,二第四記憶晶胞36彼此相鄰且連接同一位元線14,以共用同一接點。換言之,即二第三記憶晶胞34之場效電晶體46彼此相鄰且連接同一位元線14,以共用同一汲極接點56,二第四記憶晶胞36之場效電晶體50彼此相鄰且連接同一位元線14,以共用同一汲極接點56,如此便可縮小整體佈局面積。In order to operate a particular single memory cell, a second embodiment is provided below. Please refer to FIG. 9 , FIG. 10 and FIG. 11 simultaneously. This second embodiment differs from the first embodiment only in that each group of bit lines 16 includes two bit lines 14 , so the first group of bit lines 18 . Also included are two bit lines 14, which are respectively connected to the first and third memory cells 30, 34 of the same sub-memory array 28; the second set of bit lines 19 comprise two bit lines 14, which are respectively connected to the same The second and fourth memory cells 32, 36 of the sub-memory array 28. Further, in the adjacent two-child memory array 28, the two third memory cells 34 are adjacent to each other and connected to the same bit line 14 to share the same contact, and the second and fourth memory cells 36 are adjacent to each other and connected to each other. Bit line 14 to share the same contact. In other words, the field effect transistors 46 of the second memory cell 34 are adjacent to each other and connected to the same bit line 14 to share the same gate contact 56, and the field effect transistors 50 of the second memory cell 36 are mutually Adjacent and connected to the same bit line 14 to share the same bungee contact 56, the overall layout area can be reduced.
請再參閱第9圖,場效電晶體38、42、46、50可皆為位於P型基板或P型井區中之N型場效電晶體,亦或位於N型基板或N型井區中之P型場效電晶體,而第二實施例之操作方式因應N型或P型場效電晶體而有不同,以下先說明場效電晶體38、42、46、50為N型場效電晶體的操作方式。為了清楚說明此操作方式,需對每一個記憶晶胞之名稱作明確的定義:上述之第一、第二、第三、第四記憶晶胞30、32、34、36皆作為一操作記憶晶胞,且可選取此些操作記憶晶胞其中之一作為選取記憶晶胞,以進行操作。與選取記憶晶胞連接同一位元線14之操作記憶晶胞,作為複數同位元記憶晶胞;與選取記憶晶胞連接同一字線20之操作記憶晶胞,作為複數同字記憶晶胞,其餘操作記憶晶胞則作為複數未選取記憶晶胞。Referring to FIG. 9, the field effect transistors 38, 42, 46, 50 may all be N-type field effect transistors located in the P-type substrate or the P-type well region, or in the N-type substrate or the N-type well region. In the case of the P-type field effect transistor, the operation mode of the second embodiment differs depending on the N-type or P-type field effect transistor. The following describes the field effect transistor 38, 42, 46, 50 as the N-type field effect. The mode of operation of the transistor. In order to clearly illustrate this mode of operation, the name of each memory cell should be clearly defined: the first, second, third, and fourth memory cells 30, 32, 34, and 36 are all used as an operational memory crystal. The cell, and one of the operational memory cells can be selected as the selected memory cell for operation. An operational memory cell connected to the same bit line 14 as the memory cell is selected as a complex allo memory cell; an operational memory cell connected to the same word line 20 as the selected memory cell, as a complex word memory cell, the rest The memory cell is operated as a complex number of memory cells.
第二實施例的操作方式如下,利用下面的操作方式,可使其他未選取之記憶晶胞不受影響,以操作特定單一記憶晶胞。The second embodiment operates in the following manner, and the other unselected memory cells can be left unaffected to operate a particular single memory cell by the following operation.
於選取記憶晶胞連接之P型基板或P型井區施加基底電壓Vsubp ,並於選取記憶晶胞連接之位元線14、字線20、共源線24分別施加第一位元電壓Vb1 、第一字電壓Vw1 、第一共源電壓VS1 ,於每一同位元記憶晶胞連接之字線20、共源線24分別施加第二字電壓Vw2 、第二共源電壓VS2 ,於每一同字記憶晶胞連接之位元線14、共源線24分別施加第二位元電壓Vb2 、第一共源電壓VS1 ,於每一未選取記憶晶胞連接之位元線14、字線20、共源線24分別施加第二位元電壓Vb2 、第二字電壓Vw2 、第二共源電壓VS2 ,並滿足下列條件:寫入時,Vsubp 為接地,Vb2 為浮接,且Vb1 >VS1 ,Vw1 >VS1 ,Vb1 >VS1 >0,Vb1 >Vw2 >0,Vb1 >VS2 >0;抹除時,滿足Vsubp 為接地,VS1 為接地,Vb2 為浮接,且Vb1 >Vw2 >Vw1 ≧0,Vb1 >VS2 >Vw1 ≧0。 Applying a substrate voltage Vsubp to a P-type substrate or a P-type well region in which the memory cell is connected, and applying a first bit voltage V to the bit line 14, the word line 20, and the common source line 24 of the selected memory cell connection, respectively. B1 , the first word voltage V w1 , the first common source voltage V S1 , the second word voltage V w2 and the second common source voltage V are respectively applied to the word line 20 and the common source line 24 connected to each of the same memory cells. S2 , a second bit voltage V b2 and a first common source voltage V S1 are respectively applied to the bit line 14 and the common source line 24 connected to each of the same word memory cells, respectively, and the bit connected to each memory cell is not selected. The line 14, the word line 20, and the common source line 24 respectively apply the second bit voltage V b2 , the second word voltage V w2 , and the second common source voltage V S2 , and satisfy the following conditions: when writing, V subp is grounded. V b2 is floating, and V b1 >V S1 , V w1 >V S1 , V b1 >V S1 >0, V b1 >V w2 >0, V b1 >V S2 >0; when erasing, V subp is satisfied For grounding, V S1 is grounded, V b2 is floating, and V b1 >V w2 >V w1 ≧0, V b1 >V S2 >V w1 ≧0.
當場效電晶體38、42、46、50為P型場效電晶體時,根據上述記憶晶胞與電壓之定義,更於N型井區或N型基板施加基底電壓Vsubn ,並於寫入時,滿足Vb2 為浮接,且Vsubn >VS1 >Vb1 ,Vsubn >VS1 >Vw1 ,Vsubn >VS2 >Vb1 ,Vsubn >Vw2 >Vb1 ;抹除時,滿足Vb2 為浮接,且Vsubn =VS1 ≧Vw1 >Vb1 ,Vsubn >VS2 >Vb1 ,Vsubn >Vw2 >Vb1 。When the field effect transistors 38, 42, 46, 50 are P-type field effect transistors, the substrate voltage Vsubn is applied to the N-type well region or the N-type substrate according to the definition of the memory cell and the voltage, and is written. When V b2 is satisfied as floating, and V subn >V S1 >V b1 , V subn >V S1 >V w1 , V subn >V S2 >V b1 , V subn >V w2 >V b1 ; V b2 is satisfied as floating, and V subn =V S1 ≧V w1 >V b1 , V subn >V S2 >V b1 , V subn >V w2 >V b1 .
利用上述偏壓方式,可在不外加隔絕電晶體的前提下,同樣可達到非揮發記憶體使用上byte write的功能。By using the above bias method, the function of byte write can be achieved in the non-volatile memory without adding an isolation transistor.
至於第二實施例的場效電晶體38、42、46、50及電容40、44、48、52的結構剖視圖,與第一實施例相同,因此不再贅述。The structural cross-sectional views of the field effect transistors 38, 42, 46, 50 and the capacitors 40, 44, 48, 52 of the second embodiment are the same as those of the first embodiment, and therefore will not be described again.
綜上所述,本發明利用共用接點之方式,以具有小面積之架構,更可利用偏壓方式,以達到byte write的功能。In summary, the present invention utilizes a common contact method to have a small area structure, and can also utilize a bias mode to achieve a byte write function.
以上所述者,僅為本發明一較佳實施例而已,並非用來限定本發明實施之範圍,故舉凡依本發明申請專利範圍所述之形狀、構造、特徵及精神所為之均等變化與修飾,均應包括於本發明之申請專利範圍內。The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, so that the shapes, structures, features, and spirits described in the claims of the present invention are equally varied and modified. All should be included in the scope of the patent application of the present invention.
10...電晶體10. . . Transistor
12...電容結構12. . . Capacitor structure
14...位元線14. . . Bit line
16...位元線16. . . Bit line
18...第一組位元線18. . . First set of bit lines
19...第二組位元線19. . . Second set of bit lines
20...字線20. . . Word line
22...第一字線twenty two. . . First word line
24...共源線twenty four. . . Common source line
26...第一共源線26. . . First common source line
28...子記憶體陣列28. . . Sub-memory array
30...第一記憶晶胞30. . . First memory cell
32...第二記憶晶胞32. . . Second memory cell
34...第三記憶晶胞34. . . Third memory cell
36...第四記憶晶胞36. . . Fourth memory unit cell
38...場效電晶體38. . . Field effect transistor
40...電容40. . . capacitance
42...場效電晶體42. . . Field effect transistor
44...電容44. . . capacitance
46...場效電晶體46. . . Field effect transistor
48...電容48. . . capacitance
50...場效電晶體50. . . Field effect transistor
52...電容52. . . capacitance
54...閘極接點54. . . Gate contact
56...汲極接點56. . . Bungee contact
58...N型場效電晶體58. . . N-type field effect transistor
60...P型半導體基板60. . . P-type semiconductor substrate
62...導電閘極62. . . Conductive gate
64...電容64. . . capacitance
66...P型場效電晶體66. . . P-type field effect transistor
68...N型半導體基板68. . . N-type semiconductor substrate
70...導電閘極70. . . Conductive gate
72...電容72. . . capacitance
第1圖為先前技術之非揮發性記憶體之電路示意圖。Figure 1 is a schematic diagram of a prior art non-volatile memory circuit.
第2圖為第1圖之電路佈局示意圖。Figure 2 is a schematic diagram of the circuit layout of Figure 1.
第3圖為先前技術之非揮發性記憶體之記憶晶胞結構剖視圖。Figure 3 is a cross-sectional view of the memory cell structure of the prior art non-volatile memory.
第4圖為本發明之第一實施例之電路示意圖。Figure 4 is a circuit diagram showing a first embodiment of the present invention.
第5圖為本發明之第一實施例之電路佈局示意圖。Figure 5 is a schematic diagram showing the circuit layout of the first embodiment of the present invention.
第6圖為本發明之第一實施例之子記憶體陣列的電路示意圖。Figure 6 is a circuit diagram of a sub-memory array of the first embodiment of the present invention.
第7圖為本發明之N型場效電晶體與電容之結構剖視圖。Figure 7 is a cross-sectional view showing the structure of an N-type field effect transistor and a capacitor of the present invention.
第8圖為本發明之P型場效電晶體與電容之結構剖視圖。Figure 8 is a cross-sectional view showing the structure of a P-type field effect transistor and a capacitor of the present invention.
第9圖為本發明之第二實施例之電路示意圖。Figure 9 is a circuit diagram showing a second embodiment of the present invention.
第10圖為本發明之第二實施例之電路佈局示意圖。Figure 10 is a schematic diagram showing the circuit layout of the second embodiment of the present invention.
第11圖為本發明之第二實施例之子記憶體陣列的電路示意圖。Figure 11 is a circuit diagram of a sub-memory array of a second embodiment of the present invention.
14...位元線14. . . Bit line
16...位元線16. . . Bit line
18...第一組位元線18. . . First set of bit lines
19...第二組位元線19. . . Second set of bit lines
20...字線20. . . Word line
22...第一字線twenty two. . . First word line
24...共源線twenty four. . . Common source line
26...第一共源線26. . . First common source line
28...子記憶體陣列28. . . Sub-memory array
30...第一記憶晶胞30. . . First memory cell
32...第二記憶晶胞32. . . Second memory cell
34...第三記憶晶胞34. . . Third memory cell
36...第四記憶晶胞36. . . Fourth memory unit cell
38...場效電晶體38. . . Field effect transistor
40...電容40. . . capacitance
42...場效電晶體42. . . Field effect transistor
44...電容44. . . capacitance
46...場效電晶體46. . . Field effect transistor
48...電容48. . . capacitance
50...場效電晶體50. . . Field effect transistor
52...電容52. . . capacitance
Claims (16)
Priority Applications (1)
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TW99125321A TWI415251B (en) | 2010-07-30 | 2010-07-30 | Small area of electronic erasure can be rewritten read only memory array |
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TW99125321A TWI415251B (en) | 2010-07-30 | 2010-07-30 | Small area of electronic erasure can be rewritten read only memory array |
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TW201205787A TW201205787A (en) | 2012-02-01 |
TWI415251B true TWI415251B (en) | 2013-11-11 |
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Citations (5)
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US6731544B2 (en) * | 2001-05-14 | 2004-05-04 | Nexflash Technologies, Inc. | Method and apparatus for multiple byte or page mode programming of a flash memory array |
US6747899B2 (en) * | 2001-05-14 | 2004-06-08 | Nexflash Technologies, Inc. | Method and apparatus for multiple byte or page mode programming of a flash memory array |
US6992936B2 (en) * | 1998-02-16 | 2006-01-31 | Renesas Technology Corp. | Semiconductor, memory card, and data processing system |
US7301818B2 (en) * | 2005-09-12 | 2007-11-27 | Macronix International Co., Ltd. | Hole annealing methods of non-volatile memory cells |
US7339231B2 (en) * | 2004-09-15 | 2008-03-04 | Renesas Technology Corp. | Semiconductor device and an integrated circuit card |
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US6992936B2 (en) * | 1998-02-16 | 2006-01-31 | Renesas Technology Corp. | Semiconductor, memory card, and data processing system |
US6731544B2 (en) * | 2001-05-14 | 2004-05-04 | Nexflash Technologies, Inc. | Method and apparatus for multiple byte or page mode programming of a flash memory array |
US6747899B2 (en) * | 2001-05-14 | 2004-06-08 | Nexflash Technologies, Inc. | Method and apparatus for multiple byte or page mode programming of a flash memory array |
US7339231B2 (en) * | 2004-09-15 | 2008-03-04 | Renesas Technology Corp. | Semiconductor device and an integrated circuit card |
US7301818B2 (en) * | 2005-09-12 | 2007-11-27 | Macronix International Co., Ltd. | Hole annealing methods of non-volatile memory cells |
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