TWI520185B - Method of fabricating transparent electrode for touch panel and transparent electrode for touch panel provided by the same - Google Patents

Method of fabricating transparent electrode for touch panel and transparent electrode for touch panel provided by the same Download PDF

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TWI520185B
TWI520185B TW100105060A TW100105060A TWI520185B TW I520185 B TWI520185 B TW I520185B TW 100105060 A TW100105060 A TW 100105060A TW 100105060 A TW100105060 A TW 100105060A TW I520185 B TWI520185 B TW I520185B
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transparent electrode
touch panel
substrate
film
carbon nanotubes
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TW201236057A (en
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高騏
蕭鉉樺
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國立成功大學
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觸控面板之透明電極之製備方法以及使用該方法所製得之觸控面板之透明電極Method for preparing transparent electrode of touch panel and transparent electrode of touch panel prepared by using same

本發明係關於一種觸控面板之透明電極之製備方法以及使用該方法所製得之觸控面板之透明電極,尤指一種使用單璧奈米碳管之觸控面板之透明電極之製備方法以及使用該方法所製得之觸控面板之透明電極。The invention relates to a method for preparing a transparent electrode of a touch panel and a transparent electrode of the touch panel prepared by using the method, in particular to a method for preparing a transparent electrode using a touch panel of a single carbon nanotube and The transparent electrode of the touch panel produced by the method.

隨著各式各樣電子產品之開發,觸控面板於各種方面的應用及使用也隨之增加(例如,隨身撥放器、筆記型電腦等)。觸控面板依感應原理可分為電容式、紅外線式、超音波式及電阻式四種。其中,電阻式觸控面板由於重量輕、厚度薄及消耗電力少,適合用於手機、PDA等行動裝置,而電容式觸控面版由於高耐用性,因此可以用於提款機、大型娛樂機等公共資訊用途。With the development of various electronic products, the application and use of touch panels in various aspects has also increased (for example, portable devices, notebook computers, etc.). According to the principle of induction, the touch panel can be divided into four types: capacitive type, infrared type, ultrasonic type and resistive type. Among them, the resistive touch panel is suitable for mobile phones, PDAs and other mobile devices due to its light weight, thin thickness and low power consumption, and the capacitive touch panel can be used for cash machines and large entertainments due to its high durability. Machine and other public information purposes.

如圖1所示,其係為常見之F/G電阻式觸控面板基本結構,F代表上基板為薄膜(Film)材,而G代表下基板為玻璃。其基本架構由兩個透明導電薄片組成,分別稱為上部電極11與下部電極12,兩片電極11,12都有透明之基材13,14與分別鍍在基材13,14上之透明導電薄膜15,16。兩片電極11,12的導電面相對,兩者之間以貼合劑17做為支撐(support),並在下基板13旋塗間隔點(dot spacer)18,完成電阻式觸控之基本構造。當手指由上方基板施力時,此些間隔點18會因外力移開而使該施力點之上下電極導通,產生電流訊號至控制器傳達指令。As shown in FIG. 1 , it is a basic structure of a common F/G resistive touch panel, F represents an upper substrate as a film material, and G represents a lower substrate as a glass. The basic structure is composed of two transparent conductive sheets, which are respectively referred to as an upper electrode 11 and a lower electrode 12, and the two electrodes 11, 12 have transparent substrates 13, 14 and transparent conductive plates respectively plated on the substrates 13, 14. Film 15,16. The conductive surfaces of the two electrodes 11, 12 are opposed to each other, and the bonding agent 17 is used as a support therebetween, and a dot spacer 18 is spin-coated on the lower substrate 13, thereby completing the basic structure of the resistive touch. When the finger is biased by the upper substrate, the spacers 18 are moved by the external force to make the lower electrode above the applied point, and a current signal is generated to the controller to transmit an instruction.

在控制面板結構中,透明導電膜是非常重要的材料,現行常用之TCO(Transparent Conductive Oxide)透明金屬氧化物薄膜如ITO(氧化銦錫)、FTO(摻氟二氧化錫)、ATO(氧化錫銻)等材料,係使用濺鍍方法直接沈積於上下基板之上,因製程簡單故為目前之材料主流。但其透光性不佳、不耐撓曲且易破裂之缺點使其應用受限。In the control panel structure, the transparent conductive film is a very important material. The commonly used TCO (Transparent Conductive Oxide) transparent metal oxide film such as ITO (indium tin oxide), FTO (fluorinated tin dioxide), ATO (tin oxide)锑) and other materials are directly deposited on the upper and lower substrates by sputtering method, which is the current material mainstream due to the simple process. However, its poor light transmission, inflexibility and susceptibility to cracking make its application limited.

在下一世代可撓式電子元件開始發展之際,對於透明導電薄膜之各種特性要求也將越趨於嚴格,因此本領域亟需發展出一種新穎材料,使可順利取代傳統透明材料,而成為各種型態之觸控面板電極材料之主流。As the next generation of flexible electronic components begins to develop, the requirements for various characteristics of transparent conductive films will become stricter. Therefore, there is a need in the art to develop a novel material that can smoothly replace traditional transparent materials and become various The mainstream of the touch panel electrode materials.

藉此,本發明提供了一種觸控面板之透明電極之製備方法,包括步驟:(A)將複數含金屬之奈米顆粒放入於一溶劑中以形成一催化劑;(B)提供一基板,將該基板浸泡於該催化劑中;(C)將該經浸泡後之基板拿出,並將該基板進行煅燒處理;以及(D)加熱該經煅燒處理後之基板,並同時提供一醇類之成長氣源,使藉由該醇類之成長氣源於該基板之表面形成複數單璧奈米碳管,其中,該些複數單璧奈米碳管係互相連接形成一網狀結構之薄膜。Accordingly, the present invention provides a method for preparing a transparent electrode of a touch panel, comprising the steps of: (A) placing a plurality of metal-containing nanoparticles in a solvent to form a catalyst; and (B) providing a substrate. Soaking the substrate in the catalyst; (C) taking out the soaked substrate, and calcining the substrate; and (D) heating the calcined substrate while providing an alcohol The gas source is grown such that a plurality of monoterpene carbon nanotubes are formed on the surface of the substrate by the growth gas of the alcohol, wherein the plurality of monoterpene carbon nanotubes are interconnected to form a film of a network structure.

本發明之觸控面板之透明電極之製備方法,係利用酒精催化化學氣相沈積系統(Alcohol Catalytic Chemical Vapor Deposition,ACCVD)成長高純度之單壁奈米碳管(Single-walled Carbon Nanotubes),在眾多單壁奈米碳管交錯情形之下,形成一具有特殊外貌與特性之觸控面板之透明電極。由於本發明以單壁奈米碳管所形成之觸控面板之透明電極具有高透光率以及導電度,因此可順利取代如ITO、FTO、ATO等傳統之透明導電材料。The method for preparing the transparent electrode of the touch panel of the present invention is to grow high-purity single-walled carbon nanotubes by using Alcohol Catalytic Chemical Vapor Deposition (ACCVD). A plurality of single-walled carbon nanotubes are interlaced to form a transparent electrode of a touch panel having a special appearance and characteristics. Since the transparent electrode of the touch panel formed by the single-walled carbon nanotube has high transmittance and electrical conductivity, the conventional transparent conductive material such as ITO, FTO, ATO can be successfully replaced.

習知技術中,以奈米碳管作為電子元件之技術多以市售之商業化碳管為材料,輔以濕式旋塗技術將奈米碳管材料散佈於基板上後加工處理。然而由於奈米材料間具有強大的凡得瓦力,因此容易使得材料產生團聚現象而不易分散,以致材料密度無法精準控制,造成元件特性變異過大、主動區傳輸效率難以提升等嚴重問題。此外,習知技術中,通常係以易爆之甲烷或乙炔並搭配氫氣作為氣源的成長方法,因此安全性較不佳。本發明之觸控面板之透明電極之製備方法,係利用醇類氣體來進行,因此安全性可大幅提升。In the prior art, the technology of using carbon nanotubes as electronic components is mostly based on a commercially available commercial carbon tube, and the nano-carbon tube material is dispersed on a substrate by a wet spin coating technique. However, due to the strong van der Waals force between the nano materials, it is easy to cause the material to agglomerate and not easily disperse, so that the material density can not be precisely controlled, resulting in serious problems such as excessive variation of component characteristics and difficulty in improving the transmission efficiency of the active region. In addition, in the prior art, it is generally a growth method in which explosive methane or acetylene is used together with hydrogen as a gas source, and thus safety is poor. The method for preparing the transparent electrode of the touch panel of the present invention is carried out using an alcohol gas, so that the safety can be greatly improved.

本發明所製得之觸控面板之透明電極與習知常用之透明導電薄膜之特性比較係如下表1所示。The characteristics of the transparent electrode of the touch panel produced by the present invention and the conventional transparent conductive film are as shown in Table 1 below.

本發明之觸控面板之透明電極之製備方法,該步驟(D)之後較佳可更包括步驟:(E)形成一高分子膜於該薄膜上;(F)熱處理該覆有高分子膜之薄膜,使該薄膜與該高分子膜結合;以及(G)將該薄膜與該基板分離。The method for preparing the transparent electrode of the touch panel of the present invention, after the step (D), preferably further comprises the steps of: (E) forming a polymer film on the film; and (F) heat treating the polymer film. a film that binds the film to the polymer film; and (G) separates the film from the substrate.

本發明之觸控面板之透明電極之製備方法,該步驟(F)中之熱處理溫度較佳可為50至100℃。In the method for preparing the transparent electrode of the touch panel of the present invention, the heat treatment temperature in the step (F) is preferably from 50 to 100 °C.

本發明之觸控面板之透明電極之製備方法,其中,該步驟(D)中,加熱該基板之溫度較佳可為600℃至900℃。The method for preparing a transparent electrode of the touch panel of the present invention, wherein in the step (D), the temperature of the substrate is preferably from 600 ° C to 900 ° C.

本發明之觸控面板之透明電極之製備方法,其中,該步驟(D)中,該醇類之成長氣源係較佳可選自由:甲醇、乙醇、丙醇、異丙醇、正丁醇、異丁醇、正戊醇、及其混合所組成之群組;最佳係使用乙醇,但不限於此。The method for preparing a transparent electrode of the touch panel of the present invention, wherein in the step (D), the growing gas source of the alcohol is preferably: methanol, ethanol, propanol, isopropanol, n-butanol a group consisting of isobutanol, n-pentanol, and a mixture thereof; the best system uses ethanol, but is not limited thereto.

本發明之觸控面板之透明電極之製備方法,其中,該步驟(C)中,煅燒處理之溫度較佳可為320℃至480℃。In the method for preparing a transparent electrode of the touch panel of the present invention, in the step (C), the temperature of the calcination treatment may preferably be 320 ° C to 480 ° C.

本發明之觸控面板之透明電極之製備方法,其中,該步驟(D)與步驟(C)之間,較佳可更包括一步驟(D0):提供一氨氣以進行還原反應。The method for preparing a transparent electrode of the touch panel of the present invention, wherein the step (D) and the step (C) preferably further comprise a step (D0) of providing an ammonia gas for the reduction reaction.

本發明之觸控面板之透明電極之製備方法,其中,該步驟(D)中,由複數單璧奈米碳管互相連接形成之該網狀結構薄膜之厚度較佳可為10nm~200nm,而考量到光穿透性而言更佳可為10nm-20nm。The method for preparing a transparent electrode of the touch panel of the present invention, wherein in the step (D), the thickness of the network structure film formed by interconnecting a plurality of single-twisted carbon nanotubes is preferably 10 nm to 200 nm. More preferably, it is from 10 nm to 20 nm in view of light transmittance.

本發明之觸控面板之透明電極之製備方法,其中,該步驟(A)中,該複數含金屬之奈米顆粒之金屬較佳可選自由:鈷、鉬、及其混合所組成之群組,其中該含金屬之奈米顆粒較佳係為醋酸鈷、醋酸鉬、醋酸鐵、醋酸鎳、及其混合所組成之群組;最佳係醋酸鈷、或醋酸鉬。本發明之發明人在經過使用不同粉末溶於乙醇之溶液,並以相同參數成長奈米碳管,經實驗分析後,發現以醋酸鈷及醋酸鉬溶解於乙醇之溶液,可成長密度較高、G/D比值較佳之單壁奈米碳管薄膜。The method for preparing a transparent electrode of a touch panel of the present invention, wherein in the step (A), the metal of the plurality of metal-containing nano particles is preferably selected from the group consisting of cobalt, molybdenum, and a mixture thereof. The metal-containing nanoparticle is preferably a group consisting of cobalt acetate, molybdenum acetate, iron acetate, nickel acetate, and a mixture thereof; preferably cobalt acetate or molybdenum acetate. The inventors of the present invention have developed a nanocarbon tube by using a solution in which different powders are dissolved in ethanol and growing the carbon nanotubes with the same parameters. After experimental analysis, it is found that a solution in which cobalt acetate and molybdenum acetate are dissolved in ethanol can have a higher growth density. A single-walled carbon nanotube film with a better G/D ratio.

本發明之觸控面板之透明電極之製備方法中,該步驟(A)中,該溶劑較佳可選自由:乙醇、甲醇、丙醇、異丙醇、正丁醇、異丁醇、正戊醇、及其混合溶液所組成之群組。且溶劑與含金屬之奈米顆粒之比例較佳為[含金屬之奈米顆粒:溶劑]=0.01~0.05wt%。In the preparation method of the transparent electrode of the touch panel of the present invention, in the step (A), the solvent is preferably selected from the group consisting of ethanol, methanol, propanol, isopropanol, n-butanol, isobutanol and n-pentane. a group of alcohols and mixed solutions thereof. Further, the ratio of the solvent to the metal-containing nanoparticle is preferably [metal-containing nanoparticle: solvent] = 0.01 to 0.05% by weight.

本發明之觸控面板之透明電極之製備方法,其中,該步驟(D)中,所形成之該複數單璧奈米碳管之直徑較佳為0.5至2.0nm,更佳為0.8至1.2nm。The method for preparing a transparent electrode of the touch panel of the present invention, wherein the diameter of the plurality of monoterpene carbon nanotubes formed in the step (D) is preferably 0.5 to 2.0 nm, more preferably 0.8 to 1.2 nm. .

本發明之觸控面板之透明電極之製備方法,其中,該步驟(D)中,所形成之該複數單璧奈米碳管經由拉曼散射光譜(Raman Scattering Spectrum)分析後,所得到之G/D比值較佳可為10至25,更佳為10至20。The method for preparing a transparent electrode of a touch panel of the present invention, wherein in the step (D), the plurality of formed monoterpene carbon nanotubes are analyzed by Raman Scattering Spectrum, and the obtained G is obtained. The /D ratio is preferably from 10 to 25, more preferably from 10 to 20.

本發明另提供一種觸控面板之透明電極,係包括:一基板;以及複數單璧奈米碳管,係位於該基板上,該些複數單璧奈米碳管係互相連接形成一網狀結構之薄膜,且該些複數單璧奈米碳管經由拉曼散射光譜(Raman Scattering Spectrum)分析後,所得到之G/D比值為10至25。The present invention further provides a transparent electrode of a touch panel, comprising: a substrate; and a plurality of single carbon nanotubes, the plurality of carbon nanotubes are disposed on the substrate, and the plurality of single carbon nanotubes are interconnected to form a network structure The film, and the plurality of monoterpene carbon nanotubes were analyzed by Raman Scattering Spectrum to obtain a G/D ratio of 10 to 25.

本發明之觸控面板之透明電極具有特殊型態(包含有複數單璧奈米碳管係互相連接形成一網狀結構之薄膜),其中薄膜厚度依需求可隨意調整,且由於本發明以單壁奈米碳管所形成之觸控面板之透明電極具有高透光率以及導電度,加上製作成本低廉,因此可順利取代如ITO、FTO、ATO等傳統之透明導電材料。The transparent electrode of the touch panel of the present invention has a special type (including a film in which a plurality of single-twisted carbon nanotubes are interconnected to form a network structure), wherein the film thickness can be arbitrarily adjusted according to requirements, and The transparent electrode of the touch panel formed by the wall carbon nanotube has high transmittance and conductivity, and the manufacturing cost is low, so that the conventional transparent conductive material such as ITO, FTO, ATO can be successfully replaced.

本發明之觸控面板之透明電極,其中,該基板之材質較佳可為矽基板、石英基板、一般玻璃基板、耐高溫玻璃基板、或如塑膠基板之可撓性基板。The transparent electrode of the touch panel of the present invention may preferably be a germanium substrate, a quartz substrate, a general glass substrate, a high temperature resistant glass substrate, or a flexible substrate such as a plastic substrate.

本發明之觸控面板之透明電極,其中,該高分子材料較佳可為聚二甲基矽氧烷(PDMS,polydimethyl siloxane)、聚甲基丙烯酸甲酯(PMMA,polymethyl methacrylate)、或聚對二甲苯(Parylene,poly-para-xylylen)。The transparent electrode of the touch panel of the present invention, wherein the polymer material is preferably polydimethyl siloxane (PDMS), polymethyl methacrylate (PMMA), or poly pair. Parylene (poly-para-xylylen).

本發明之觸控面板之透明電極,其中,由複數單璧奈米碳管互相連接形成之該網狀結構薄膜之厚度較佳可為100nm至400nm。In the transparent electrode of the touch panel of the present invention, the thickness of the network structure film formed by interconnecting a plurality of individual tantalum carbon nanotubes may preferably be 100 nm to 400 nm.

本發明又提供一種觸控面板,其包括:一第一透明電極;一第二透明電極,係相對該第一透明電極配置;複數間隔點,係配置於該第一透明電極與第二透明電極之間;以及接合劑,係連接該第一透明電極與第二透明電極,其中,該第一透明電極係包括:一基板;以及複數單璧奈米碳管,係位於該基板上,該些複數單璧奈米碳管係互相連接形成一網狀結構之薄膜,且該些複數單璧奈米碳管經由拉曼散射光譜(Raman Scattering Spectrum)分析後,所得到之G/D比值為10至25。The present invention further provides a touch panel comprising: a first transparent electrode; a second transparent electrode disposed opposite to the first transparent electrode; and a plurality of spaced-apart electrodes disposed on the first transparent electrode and the second transparent electrode And a bonding agent connecting the first transparent electrode and the second transparent electrode, wherein the first transparent electrode system comprises: a substrate; and a plurality of single-sized carbon nanotubes on the substrate, wherein A plurality of monoterpene carbon nanotubes are interconnected to form a film of a network structure, and the plurality of monoterpene carbon nanotubes are analyzed by Raman Scattering Spectrum to obtain a G/D ratio of 10 To 25.

本發明之觸控面板係為電阻式觸控面板,當手指由第二透明電極上方施力時,位於第一透明電極與第二透明電極之間之間隔點會因外力移開,而使第一透明電極與第二透明電極接觸導通,產生電流訊號至控制器傳達指令。The touch panel of the present invention is a resistive touch panel. When the finger is biased by the second transparent electrode, the interval between the first transparent electrode and the second transparent electrode is removed by an external force. A transparent electrode is in contact with the second transparent electrode to generate a current signal to the controller to transmit an instruction.

由於本發明之觸控面板係以單壁奈米碳管形成透明電極,而此透明電極具有高透光率以及導電度,因此可順利取代習知以ITO、FTO、ATO等傳統透明導電材料形成透明電極之觸控面板。Since the touch panel of the present invention forms a transparent electrode by a single-walled carbon nanotube, and the transparent electrode has high transmittance and conductivity, it can be successfully replaced by a conventional transparent conductive material such as ITO, FTO, or ATO. Transparent electrode touch panel.

本發明之觸控面板中,其第二透明電極較佳亦可與第一透明電極具有相同的結構。亦即,第二透明電極較佳可包括:一基板;以及複數單璧奈米碳管,係位於該基板上,該些複數單璧奈米碳管係互相連接形成一網狀結構之薄膜,且該些複數單璧奈米碳管經由拉曼散射光譜(Raman Scattering Spectrum)分析後,所得到之G/D比值為10至25。In the touch panel of the present invention, the second transparent electrode preferably has the same structure as the first transparent electrode. That is, the second transparent electrode may preferably include: a substrate; and a plurality of single-sized carbon nanotubes on the substrate, the plurality of monoterpene carbon nanotubes being interconnected to form a film of a network structure, And the plurality of monoterpene carbon nanotubes were analyzed by Raman Scattering Spectrum to obtain a G/D ratio of 10 to 25.

本發明之觸控面板中,基板之材質較佳可為矽基板、石英基板、一般玻璃基板、耐高溫玻璃基板、或如塑膠基板之可撓性基板。In the touch panel of the present invention, the material of the substrate may preferably be a germanium substrate, a quartz substrate, a general glass substrate, a high temperature resistant glass substrate, or a flexible substrate such as a plastic substrate.

本發明之觸控面板中,高分子材料較佳可為聚二甲基矽氧烷(PDMS,polydimethyl siloxane)、聚甲基丙烯酸甲酯(PMMA,polymethyl methacrylate)、或聚對二甲苯(Parylene,poly-para-xylylen)。In the touch panel of the present invention, the polymer material may preferably be polydimethyl siloxane (PDMS), polymethyl methacrylate (PMMA), or parylene (Parylene). Poly-para-xylylen).

本發明之觸控面板中,由複數單璧奈米碳管互相連接形成之該網狀結構薄膜之厚度較佳可為10nm~200nm,而考量到光穿透性而言更佳可為10nm-20nm。In the touch panel of the present invention, the thickness of the network structure film formed by interconnecting a plurality of single-twisted carbon nanotubes is preferably 10 nm to 200 nm, and more preferably 10 nm in consideration of light transmittance. 20nm.

[實施例1][Example 1]

本實施例之觸控面板之透明電極之製備方法,包括如下步驟。首先,(A)將複數含金屬之奈米顆粒(在此係使用醋酸鈷粉末、以及醋酸鉬粉末)放入於一溶劑中以形成一催化劑,在此溶劑係使用乙醇,且醋酸鈷以及醋酸鉬與乙醇之比例為[醋酸鈷以及醋酸鉬:乙醇]=0.01wt%。接著,(B0)提供一厚度為1.1mm之玻璃基板,將該基板基板進行表面處裡,使增加基板表面之親水性。接著,(B)將該基板浸泡於該催化劑中,使基板表面附著有催化劑。而後,(C)將該經浸泡後之基板拿出,並將該基板進行煅燒處理,其中煅燒溫度係為400℃。然後,(D0)提供氨氣與氬氣以使經煅燒後之基板表面進行還原反應,還原反應係以氨氣/氬氣為30/200sccm、溫度為350℃至750℃、以及壓力為15-20torr之條件中進行。接著,(D)加熱該經煅燒與還原處理後之基板至750℃,並同時提供一醇類之成長氣源(在此係使用純度為99.9%以上之乙醇,壓力為690torr,溫度為50℃),使藉由該醇類之成長氣源於該基板之表面形成複數單璧奈米碳管(成長時間為15分鐘,使用ACCVD儀器),其中,該些複數單璧奈米碳管係互相連接形成一網狀結構之薄膜,且該網狀結構薄膜之厚度約為10~20nm。The method for preparing the transparent electrode of the touch panel of the embodiment includes the following steps. First, (A) a plurality of metal-containing nanoparticles (here, using cobalt acetate powder and molybdenum acetate powder) are placed in a solvent to form a catalyst, in which the solvent is ethanol, cobalt acetate and acetic acid. The ratio of molybdenum to ethanol is [cobalt acetate and molybdenum acetate: ethanol] = 0.01 wt%. Next, (B0) a glass substrate having a thickness of 1.1 mm is provided, and the substrate is placed in the surface to increase the hydrophilicity of the surface of the substrate. Next, (B) the substrate was immersed in the catalyst to adhere a catalyst to the surface of the substrate. Then, (C) the immersed substrate was taken out, and the substrate was subjected to calcination treatment, wherein the calcination temperature was 400 °C. Then, (D0) provides ammonia gas and argon gas to carry out a reduction reaction on the surface of the calcined substrate, the reduction reaction is 30/200 sccm of ammonia/argon gas, the temperature is 350 ° C to 750 ° C, and the pressure is 15- In the condition of 20torr. Next, (D) heating the calcined and reduced substrate to 750 ° C, and simultaneously providing a growing gas source of alcohol (in this case, using a purity of 99.9% or more of ethanol, a pressure of 690 torr, a temperature of 50 ° C a plurality of monoterpene carbon nanotubes (growth time of 15 minutes, using an ACCVD apparatus) formed by the growth gas of the alcohol from the surface of the substrate, wherein the plurality of monoterpene carbon nanotubes are mutually The film is formed to form a network structure, and the thickness of the network structure film is about 10-20 nm.

圖2a及2b分別為本實施例所完成之觸控面板之透明電極(單壁奈米碳管薄膜直接成長於玻璃基板上)之側示圖以及立體示意圖,本實施例之透明電極可作為電阻式觸控面板之下部電極,其係利用ACCVD儀器並調整適當之製程參數,沈積厚度約為10~20nm之單壁奈米碳管薄膜,由於單壁奈米碳管係直接成長於玻璃基板之上,因此分布均勻性極佳。2a and 2b are respectively a side view and a perspective view of a transparent electrode (a single-walled carbon nanotube film directly grown on a glass substrate) of the touch panel of the present embodiment, and the transparent electrode of the embodiment can be used as a resistor The lower electrode of the touch panel is a single-walled carbon nanotube film having a thickness of about 10-20 nm by using an ACCVD instrument and adjusting appropriate process parameters, since the single-walled carbon nanotube system directly grows on the glass substrate. Upper, so the distribution uniformity is excellent.

如圖2a及2b所示,本實施例所製得之觸控面板之透明電極2係包括:一基板21;以及複數單璧奈米碳管221,係位於該基板21上,該些複數單璧奈米碳管221係互相連接形成一網狀結構之薄膜22。As shown in FIG. 2a and FIG. 2b, the transparent electrode 2 of the touch panel prepared in this embodiment includes: a substrate 21; and a plurality of single carbon nanotubes 221 disposed on the substrate 21, and the plurality of sheets The carbon nanotubes 221 are interconnected to form a film 22 of a network structure.

本實施例之透明電極之不同波長照光-透光度測試結果係如圖3所示。由圖3可看出,本實施例之透明電極於可見光範圍之透光率可達約94%~96%,相較於傳統ITO透明電極高許多。此外經由拉曼散射光譜(Raman Scattering Spectrum)分析後,可得到本實施例之透明電極之複數單璧奈米碳管之G/D比值約為10至20。The different wavelength illumination-transparency test results of the transparent electrode of this embodiment are shown in FIG. As can be seen from FIG. 3, the transparent electrode of the present embodiment has a light transmittance of about 94% to 96% in the visible light range, which is much higher than that of the conventional ITO transparent electrode. Further, after analysis by Raman Scattering Spectrum, the G/D ratio of the plurality of monoterpene carbon nanotubes of the transparent electrode of the present embodiment is about 10 to 20.

[實施例2][Embodiment 2]

本實施例係利用轉印之方法使單壁奈米碳管貼附於軟性基板上,作為觸控面板之透明電極。其製備步驟包括了實施例1中之步驟(步驟(A)至(D))以外,如圖4a-4b所示,於步驟(D)之後更包括了步驟:(E)使用聚甲基丙烯酸甲酯(PMMA)膠狀溶液之高分子材料旋塗於含有單壁奈米碳管之薄膜22上,以形成一高分子膜23於該薄膜22上;接著,(F)置入真空系統(圖未示)中,加熱至75℃熱處理該覆有高分子膜23之薄膜22,使PMMA膠狀溶液之高分子膜23充分與單壁奈米碳管薄膜22結合,之後取出冷卻;最後,如圖4b所示,(G)將該與高分子膜23結合之薄膜22完整由基板21分離,而得到本實施例之觸控面板之透明電極3。In this embodiment, a single-walled carbon nanotube is attached to a flexible substrate by a transfer method as a transparent electrode of the touch panel. The preparation step includes the steps in the first embodiment (steps (A) to (D)), as shown in FIGS. 4a-4b, and further includes the step after the step (D): (E) using polymethacrylic acid A polymer material of a methyl ester (PMMA) colloidal solution is spin-coated on a film 22 containing a single-walled carbon nanotube to form a polymer film 23 on the film 22; and then, (F) is placed in a vacuum system ( In the drawing, the film 22 coated with the polymer film 23 is heat-treated to 75 ° C, and the polymer film 23 of the PMMA colloidal solution is sufficiently combined with the single-walled carbon nanotube film 22, and then taken out and cooled; finally, As shown in FIG. 4b, (G) the film 22 bonded to the polymer film 23 is completely separated from the substrate 21, and the transparent electrode 3 of the touch panel of the present embodiment is obtained.

本實施例中,如圖4b所示,用以載覆複數單璧奈米碳管221網狀結構之薄膜22係為高分子膜23,高分子膜23之厚度約為200μm,而此高分子膜23具有可撓性,因此本實施例之透明電極3非常適合用於作為觸控面板之上部電極。In this embodiment, as shown in FIG. 4b, the film 22 for carrying the network structure of the plurality of single carbon nanotubes 221 is a polymer film 23, and the thickness of the polymer film 23 is about 200 μm, and the polymer The film 23 has flexibility, so the transparent electrode 3 of the present embodiment is very suitable for use as an upper electrode of a touch panel.

本實施例之透明電極之不同波長照光-透光度測試結果係如圖5所示。由圖5可看出,本實施例之透明電極於可見光範圍之透光率可達約86%~91%。The different wavelength illumination-transmittance test results of the transparent electrode of this embodiment are shown in FIG. 5. As can be seen from FIG. 5, the transparent electrode of the present embodiment has a light transmittance of about 86% to 91% in the visible light range.

[實施例3][Example 3]

如圖6所示,其係本實施例之觸控面板4,係包括有:第一透明電極2;第二透明電極3,係相對該第一透明電極2配置;複數間隔點24,係配置於該第一透明電極2與第二透明電極3之間;以及接合劑25,係連接該第一透明電極2與第二透明電極3。本實施例中,第一透明電極2係為實施例1所製得之透明電極2,且第二透明電極3係為實施例2所製得之透明電極3,因此其詳細結構不在此贅述。As shown in FIG. 6 , the touch panel 4 of the present embodiment includes: a first transparent electrode 2; a second transparent electrode 3 disposed opposite to the first transparent electrode 2; The first transparent electrode 2 and the second transparent electrode 3 are connected between the first transparent electrode 2 and the second transparent electrode 3; and the bonding agent 25 is connected to the first transparent electrode 2 and the second transparent electrode 3. In the present embodiment, the first transparent electrode 2 is the transparent electrode 2 obtained in the first embodiment, and the second transparent electrode 3 is the transparent electrode 3 obtained in the second embodiment. Therefore, the detailed structure thereof will not be described herein.

本實施例之觸控面板4係為電阻式觸控面板,當手指由第二透明電極3上方施力時,位於第一透明電極2與第二透明電極3之間之間隔點24會因外力移開,而使第一透明電極2與第二透明電極3接觸導通,產生電流訊號至控制器傳達指令。The touch panel 4 of the present embodiment is a resistive touch panel. When the finger is biased by the second transparent electrode 3, the interval 24 between the first transparent electrode 2 and the second transparent electrode 3 is due to an external force. The first transparent electrode 2 is brought into contact with the second transparent electrode 3 to generate a current signal to the controller to transmit an instruction.

由於本實施例之觸控面板係以單壁奈米碳管形成透明電極,而此透明電極具有高透光率以及導電度,因此可順利取代習知以ITO、FTO、ATO等傳統透明導電材料形成透明電極之觸控面板。Since the touch panel of the present embodiment forms a transparent electrode by using a single-walled carbon nanotube, and the transparent electrode has high transmittance and conductivity, it can successfully replace the conventional transparent conductive materials such as ITO, FTO, and ATO. A touch panel forming a transparent electrode.

綜上所述,本發明提供了一種觸控面板之透明電極之製備方法、以及使用該方法所製得之觸控面板之透明電極。本發明之觸控面板之透明電極之製備方法,係利用酒精催化化學氣相沈積系統(Alcohol Catalytic Chemical Vapor Deposition,ACCVD)成長高純度之單壁奈米碳管(Single-walled Carbon Nanotubes),在眾多單壁奈米碳管交錯情形之下,形成一具有特殊外貌與特性之觸控面板之透明電極。由於本發明以單壁奈米碳管所形成之觸控面板之透明電極具有高透光率以及導電度,因此可順利取代如ITO、FTO、ATO等傳統之透明導電材料。In summary, the present invention provides a method for preparing a transparent electrode of a touch panel, and a transparent electrode of the touch panel produced by the method. The method for preparing the transparent electrode of the touch panel of the present invention is to grow high-purity single-walled carbon nanotubes by using Alcohol Catalytic Chemical Vapor Deposition (ACCVD). A plurality of single-walled carbon nanotubes are interlaced to form a transparent electrode of a touch panel having a special appearance and characteristics. Since the transparent electrode of the touch panel formed by the single-walled carbon nanotube has high transmittance and electrical conductivity, the conventional transparent conductive material such as ITO, FTO, ATO can be successfully replaced.

上述實施例僅係為了方便說明而舉例而已,本發明所主張之權利範圍自應以申請專利範圍所述為準,而非僅限於上述實施例。The above-mentioned embodiments are merely examples for convenience of description, and the scope of the claims is intended to be limited to the above embodiments.

11,12...電極11,12. . . electrode

13,14...基材13,14. . . Substrate

15,16...透明導電薄膜15,16. . . Transparent conductive film

17...貼合劑17. . . Adhesive

18,24...間隔點18,24. . . Interval

2,3...透明電極2,3. . . Transparent electrode

21...基板twenty one. . . Substrate

22...薄膜twenty two. . . film

221...單璧奈米碳管221. . . Single carbon nanotube

23...高分子膜twenty three. . . Polymer film

25...接合劑25. . . Adhesive

4...觸控面板4. . . Touch panel

圖1係習知電阻式觸控面板基本結構。FIG. 1 is a basic structure of a conventional resistive touch panel.

圖2a及2b係分別為本發明實施例1之觸控面板之透明電極之側示圖以及立體示意圖。2a and 2b are respectively a side view and a perspective view of a transparent electrode of a touch panel according to Embodiment 1 of the present invention.

圖3係本發明實施例1之不同波長照光-透光度測試結果圖。Fig. 3 is a graph showing the results of different wavelength illumination-transmittance tests in the first embodiment of the present invention.

圖4a-4b係本發明實施例2之觸控面板之透明電極之製備流程圖。4a-4b are flowcharts showing the preparation of a transparent electrode of a touch panel according to Embodiment 2 of the present invention.

圖5係本發明實施例2之觸控面板之透明電極之不同波長照光-透光度測試結果圖。FIG. 5 is a graph showing the results of different wavelength illumination-transmittance tests of the transparent electrodes of the touch panel of Embodiment 2 of the present invention.

圖6係本發明實施例3之觸控面板之示意圖。FIG. 6 is a schematic diagram of a touch panel according to Embodiment 3 of the present invention.

2...透明電極2. . . Transparent electrode

21...基板twenty one. . . Substrate

22...薄膜twenty two. . . film

221...單璧奈米碳管221. . . Single carbon nanotube

Claims (13)

一種觸控面板之透明電極之製備方法,包括步驟:(A)將複數含金屬之奈米顆粒放入於一溶劑中以形成一催化劑,其中,該複數含金屬之奈米顆粒之金屬係選自由:鈷、鉬、及其混合所組成之群組;(B)提供一基板,將該基板浸泡於該催化劑中;(C)將該經浸泡後之基板拿出,並將該基板進行煅燒處理;以及(D)加熱該經煅燒處理後之基板,並同時提供一醇類之成長氣源,使藉由該醇類之成長氣源於該基板之表面形成複數單璧奈米碳管,其中,該些複數單璧奈米碳管係互相連接形成一網狀結構之薄膜。 A method for preparing a transparent electrode of a touch panel, comprising the steps of: (A) placing a plurality of metal-containing nanoparticles in a solvent to form a catalyst, wherein the metal of the plurality of metal-containing nanoparticles is selected Free: a group consisting of cobalt, molybdenum, and mixtures thereof; (B) providing a substrate, immersing the substrate in the catalyst; (C) taking out the soaked substrate, and calcining the substrate And (D) heating the calcined substrate, and simultaneously providing a growing gas source of alcohol, so that a plurality of monoterpene carbon nanotubes are formed on the surface of the substrate by the growth gas of the alcohol, Wherein, the plurality of monoterpene carbon nanotubes are interconnected to form a film of a network structure. 如申請專利範圍第1項所述之觸控面板之透明電極之製備方法,該步驟(D)之後更包括步驟:(E)形成一高分子膜於該薄膜上;(F)熱處理該覆有高分子膜之薄膜,使該薄膜與該高分子膜結合;以及(G)將該薄膜與該基板分離。 The method for preparing a transparent electrode of a touch panel according to claim 1, wherein the step (D) further comprises the steps of: (E) forming a polymer film on the film; (F) heat treating the coating a film of a polymer film that binds the film to the polymer film; and (G) separates the film from the substrate. 如申請專利範圍第2項所述之觸控面板之透明電極之製備方法,該步驟(F)中之熱處理溫度係50至100℃。 The method for preparing a transparent electrode of a touch panel according to claim 2, wherein the heat treatment temperature in the step (F) is 50 to 100 °C. 如申請專利範圍第1項所述之觸控面板之透明電極之製備方法,其中,該步驟(D)中,加熱該基板之溫度係為600℃至900℃。 The method for preparing a transparent electrode of a touch panel according to claim 1, wherein in the step (D), the substrate is heated at a temperature of 600 ° C to 900 ° C. 如申請專利範圍第1項所述之觸控面板之透明電極之製備方法,其中,該步驟(D)中,該醇類之成長氣源係選 自由:甲醇、乙醇、丙醇、異丙醇、正丁醇、異丁醇、正戊醇、及其混合所組成之群組。 The method for preparing a transparent electrode of a touch panel according to claim 1, wherein in the step (D), the growth source of the alcohol is selected Free: a group consisting of methanol, ethanol, propanol, isopropanol, n-butanol, isobutanol, n-pentanol, and mixtures thereof. 如申請專利範圍第1項所述之觸控面板之透明電極之製備方法,其中,該步驟(C)中,煅燒處理之溫度係為320℃至480℃。 The method for preparing a transparent electrode of a touch panel according to claim 1, wherein in the step (C), the temperature of the calcination treatment is 320 ° C to 480 ° C. 如申請專利範圍第1項所述之觸控面板之透明電極之製備方法,其中,該步驟(D)與步驟(C)之間,更包括一步驟(D0):提供一氨氣以進行還原反應。 The method for preparing a transparent electrode of a touch panel according to the first aspect of the invention, wherein the step (D) and the step (C) further comprise a step (D0): providing an ammonia gas for reduction reaction. 如申請專利範圍第1項所述之觸控面板之透明電極之製備方法,其中,該步驟(D)中,由複數單璧奈米碳管互相連接形成之該網狀結構薄膜之厚度係為10nm~20nm。 The method for preparing a transparent electrode of a touch panel according to claim 1, wherein in the step (D), the thickness of the network structure film formed by interconnecting a plurality of single-tube carbon nanotubes is 10nm~20nm. 如申請專利範圍第1項所述之觸控面板之透明電極之製備方法,其中,該步驟(D)中,所形成之該複數單璧奈米碳管經由拉曼散射光譜(Raman Scattering Spectrum)分析後,所得到之G/D比值為10至25。 The method for preparing a transparent electrode of a touch panel according to claim 1, wherein in the step (D), the plurality of monoterpene carbon nanotubes formed by Raman Scattering Spectrum After the analysis, the obtained G/D ratio was 10 to 25. 一種觸控面板之透明電極,係包括:一基板;以及複數單璧奈米碳管,係位於該基板上,該些複數單璧奈米碳管係互相連接形成一網狀結構之薄膜,且該些複數單璧奈米碳管經由拉曼散射光譜(Raman Scattering Spectrum)分析後,所得到之G/D比值為10至25。 A transparent electrode of a touch panel, comprising: a substrate; and a plurality of single carbon nanotubes, the plurality of single carbon nanotubes are connected to each other, and the plurality of single carbon nanotubes are interconnected to form a film of a network structure, and The plurality of monoterpene carbon nanotubes were analyzed by Raman Scattering Spectrum to obtain a G/D ratio of 10 to 25. 如申請專利範圍第10項所述之觸控面板之透明電極,其中,該基板係玻璃基板、矽基板、石英基板、或高分子材料基板。 The transparent electrode of the touch panel according to claim 10, wherein the substrate is a glass substrate, a germanium substrate, a quartz substrate, or a polymer material substrate. 如申請專利範圍第11項所述之觸控面板之透明電極,其中,該高分子材料係聚二甲基矽氧烷(PDMS,polydimethyl siloxane)、聚甲基丙烯酸甲酯(PMMA,polymethyl methacrylate)、或聚對二甲苯(Parylene,poly-para-xylylen)。 The transparent electrode of the touch panel of claim 11, wherein the polymer material is polydimethyl siloxane (PDMS) or polymethyl methacrylate (PMMA). Or parylene (poly-para-xylylen). 如申請專利範圍第10項所述之觸控面板之透明電極,其中,由複數單璧奈米碳管互相連接形成之該網狀結構薄膜之厚度係為10nm~20nm。 The transparent electrode of the touch panel according to claim 10, wherein the thickness of the network structure film formed by interconnecting a plurality of single-tube carbon nanotubes is 10 nm to 20 nm.
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