TWI518568B - Touch substrate and manufacturing method thereof - Google Patents

Touch substrate and manufacturing method thereof Download PDF

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TWI518568B
TWI518568B TW102127354A TW102127354A TWI518568B TW I518568 B TWI518568 B TW I518568B TW 102127354 A TW102127354 A TW 102127354A TW 102127354 A TW102127354 A TW 102127354A TW I518568 B TWI518568 B TW I518568B
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substrate
opaque
electrode layer
touch
nano silver
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TW102127354A
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TW201504887A (en
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林志忠
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林志忠
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觸控基板及其製造方法 Touch substrate and manufacturing method thereof

本發明係有關於一種觸控基板及其製造方法,尤指兼具有達到減少(或簡化)製程工序及低電阻值的效果,進而還有效增加走線空間的效果之觸控基板及其製造方法。 The present invention relates to a touch substrate and a method of fabricating the same, and more particularly to a touch substrate having the same effect of reducing (or simplifying) a process process and a low resistance value, and thereby effectively increasing the effect of the wiring space. method.

觸控面板已經廣泛地應用於目前生活中,透過將觸控面板整合於顯示面板,人們可以透過觸控操作其顯示畫面來控制電子裝置執行對應的指令。目前觸控面板的導電薄膜如是氧化銦錫(Indium tin oxide,簡稱之為ITO)薄膜或奈米銀絲薄膜,且此導電薄膜(或稱為透明電極層)形成於透明基板上,例如玻璃板或聚對苯二甲酸乙二酯(Polyethylene terephthalate,簡稱之為PET)板。其中所述奈米銀絲薄膜係由複數奈米金屬線所構成的。 The touch panel has been widely used in the current life. By integrating the touch panel into the display panel, one can control the electronic device to execute the corresponding command through the touch operation of the display screen. At present, the conductive film of the touch panel is, for example, an indium tin oxide (ITO) film or a nano silver film, and the conductive film (or a transparent electrode layer) is formed on a transparent substrate, such as a glass plate. Or polyethylene terephthalate (PET) plate. Wherein the nanosilver film is composed of a plurality of nanowires.

而一般習知之導電薄膜(如氧化銦錫薄膜或奈米銀絲薄膜)形成在透明基板上的製造方法大致為:將於該透明基板之表面上的導電薄膜進行塗怖光阻後,接著對以塗佈該基板之表面上的導電薄膜進行烘烤,待烘烤完後則進行曝光及顯影製程,使該基板之表面上形成有電極圖案的透明電極層,其中如以奈米銀絲薄膜為例,於該基板之表面的透明電極層係由複數奈米金屬線所構成的;然後再依序對該基板之表面的透明電極層經清洗、蝕刻、清洗、烘烤等步驟後,接著對該基板之表面的透明電極層進行網版印刷,使該基板之表面周邊形成有一走線層電性連接相鄰透明電極層後,再次經烘烤而得一觸控基板。 The conventionally known conductive film (such as an indium tin oxide film or a nano-silver film) is formed on a transparent substrate by substantially: after the conductive film on the surface of the transparent substrate is subjected to photoresist, and then Baking the conductive film on the surface of the substrate, and after performing baking, performing an exposure and development process to form a transparent electrode layer having an electrode pattern on the surface of the substrate, wherein a nano-silver film is formed. For example, the transparent electrode layer on the surface of the substrate is composed of a plurality of nanowires; and then the transparent electrode layer on the surface of the substrate is sequentially cleaned, etched, cleaned, baked, etc., and then The transparent electrode layer on the surface of the substrate is screen-printed, and a wiring layer is electrically connected to the adjacent transparent electrode layer around the surface of the substrate, and then baked to obtain a touch substrate.

雖習知透過上述製程步驟可達到製造出所述觸控面板的觸控基板,但其卻延伸出另一問題,就是必須經過上述多道繁雜步驟作業才能製造出所述觸控基板。另者,奈米銀絲薄膜的低面電阻值約在50ohm/□,而氧化銦錫薄膜(ITO Film)的低面電阻約在150ohms/□,且氧化銦錫薄膜面電阻較低的話,則導電性會較好,但會造成氧化銦錫薄膜的厚膜必須增大,以導致氧化銦錫薄膜的穿透度降低,故前述氧化銦錫薄膜的面阻值會影響到氧化銦錫薄膜厚度及穿透度,因此,使得面阻值越小成本會越高且技術門檻也越高,以致於面阻值居高不下。 Although it is known that the touch substrate for manufacturing the touch panel can be manufactured through the above-described process steps, it extends another problem that the touch substrate must be manufactured through the above-mentioned multiple complicated steps. In addition, the low-side resistance of the nano-silver film is about 50 ohm/□, and the low-surface resistance of the ITO film is about 150 ohms/□, and the surface resistance of the indium tin oxide film is low. The conductivity will be better, but the thick film of the indium tin oxide film must be increased to cause the penetration of the indium tin oxide film to decrease, so the surface resistance of the indium tin oxide film affects the thickness of the indium tin oxide film. And the degree of penetration, therefore, the smaller the surface resistance value, the higher the cost and the higher the technical threshold, so that the surface resistance value remains high.

此外,由於走線層係透過網版印刷方式形成的,使得於該基板表面上的走線空間會受到局限。以上所述,習知具有下列之缺點:1.製造工序複雜繁多;2.成本提高;3.走線空間受限。 In addition, since the wiring layer is formed by screen printing, the wiring space on the surface of the substrate is limited. As described above, the conventional disadvantages have the following disadvantages: 1. The manufacturing process is complicated and complicated; 2. The cost is increased; 3. The wiring space is limited.

是以,要如何解決上述習用之問題與缺失,即為本案之發明人與從事此行業之相關廠商所亟欲研究改善之方向所在者。 Therefore, how to solve the above problems and problems in the past, that is, the inventors of this case and the relevant manufacturers engaged in this industry are eager to study the direction of improvement.

爰此,為有效解決上述之問題,本發明之主要目的在提供一種具有減少(或簡化)製造工序及低面阻值的觸控基板。 Accordingly, in order to effectively solve the above problems, the main object of the present invention is to provide a touch substrate having a reduced (or simplified) manufacturing process and a low surface resistance value.

本發明之另一目的係提供一種具有達到增加走線空間的觸控基板。 Another object of the present invention is to provide a touch substrate having an increased wiring space.

本發明之另一目的係提供一種具有減少(或簡化)製造工序及低面阻值的觸控基板之製造方法。 Another object of the present invention is to provide a method of manufacturing a touch substrate having a reduced (or simplified) manufacturing process and a low sheet resistance value.

本發明之另一目的係提供一種具有達到增加走線空間的觸控基板之製造方法。 Another object of the present invention is to provide a method of manufacturing a touch substrate having an increased wiring space.

為達上述目的,本發明係提供一種觸控基板,係應用於一觸控裝置上,且該觸控基板包括一基板、至少一不透明感應電極層及一不透明電極走線層,該基板具有一第一表面及一相反該第一表面之第二表面,該不透明感應電極層係形成在該基板的第一表面上,且其具有複數奈米銀粒及複數不透明感應區塊,該等不透明感應區塊係由該等奈米銀粒以網格狀排列所構成,且該不透明電極走線層係形成在該基板之第一表面的周邊上,且相鄰連接對應該不透明感應電極層;透過本發明此觸控基板的結構設計,得有效達到簡化製程工序及低面電阻的效果,進而還有效達到增加走線佈設空間之效果者。 To achieve the above objective, the present invention provides a touch substrate for use in a touch device, and the touch substrate includes a substrate, at least one opaque sensing electrode layer, and an opaque electrode routing layer, the substrate having a a first surface and a second surface opposite to the first surface, the opaque sensing electrode layer is formed on the first surface of the substrate, and has a plurality of nano silver particles and a plurality of opaque sensing blocks, the opaque sensing The block is formed by arranging the nano silver particles in a grid shape, and the opaque electrode trace layer is formed on the periphery of the first surface of the substrate, and the adjacent connection corresponds to the opaque sensing electrode layer; The structural design of the touch substrate of the invention can effectively achieve the effects of simplifying the process process and low surface resistance, and further effectively achieving the effect of increasing the wiring layout space.

本發明另提供一種觸控基板之製造方法,首先提供一基板,該基板之表面上形成有一感光性之奈米銀粒薄膜,並再提供一具有網格與電極走線圖案之光罩對該基板之表面上的奈米銀粒薄膜進行一曝光製程,以將在該光罩上的網格與電極走線圖案轉移到該奈米銀粒薄膜上,然後進行一顯影製程,以於該基板之表面上形成有呈網格狀的不透明感應電極層與不透明電極走線層,最後對於該基板之表面上的不透明感應電極層進行高導電化及安定處理作業;所以藉由本發明此方法的設計,得有效達到簡化製程工序及低面電阻的效果,進而還有效達到增加走線佈設空間之效果者。 The invention further provides a method for manufacturing a touch substrate. First, a substrate is provided. A photosensitive nano silver film is formed on the surface of the substrate, and a mask having a grid and an electrode trace pattern is further provided. The nano-silver film on the surface of the substrate is subjected to an exposure process to transfer the grid and electrode trace pattern on the mask to the nano-silver film, and then a developing process is performed on the substrate. A grid-shaped opaque sensing electrode layer and an opaque electrode wiring layer are formed on the surface, and finally the opaque sensing electrode layer on the surface of the substrate is highly conductive and stable; therefore, the design of the method by the present invention It is effective to achieve the effect of simplifying the process and low-face resistance, and thus effectively achieving the effect of increasing the layout space.

1‧‧‧觸控裝置 1‧‧‧ touch device

10‧‧‧觸控基板 10‧‧‧ touch substrate

101‧‧‧基板 101‧‧‧Substrate

1011‧‧‧第一表面 1011‧‧‧ first surface

1012‧‧‧第二表面 1012‧‧‧ second surface

11‧‧‧不透明感應電極層 11‧‧‧Opacity sensing electrode layer

111‧‧‧奈米銀粒 111‧‧‧Neon Silver

113‧‧‧不透明感應區塊 113‧‧‧Opacity sensing block

115‧‧‧不透明無感應區塊 115‧‧‧opaque, non-sensing block

13‧‧‧不透明電極走線層 13‧‧‧opaque electrode trace layer

14‧‧‧觸控區 14‧‧‧ touch area

15‧‧‧周邊區 15‧‧‧The surrounding area

16‧‧‧網格 16‧‧‧Grid

161‧‧‧小網格 161‧‧‧Small grid

17‧‧‧光學膠 17‧‧‧Optical adhesive

d‧‧‧線寬 d‧‧‧Line width

X‧‧‧第一方向 X‧‧‧ first direction

Y‧‧‧第二方向 Y‧‧‧second direction

第1A圖係本發明之第一較佳實施例之立體示意圖;第1B圖係本發明之第1A圖之局部放大示意圖;第1C圖係本發明之第1A圖之另一局部放大示意圖;第2圖係本發明之第一較佳實施例之另一立體示意圖;第3圖係本發明之第一較佳實施例之觸控裝置立體示意圖;第4圖係本發明之第一較佳實施例之觸控裝置剖面示意圖; 第5圖係本發明之第二較佳實施例之流程示意圖。 1A is a perspective view of a first preferred embodiment of the present invention; FIG. 1B is a partially enlarged schematic view of a first embodiment of the present invention; FIG. 1C is a partially enlarged schematic view of a first embodiment of the present invention; 2 is a perspective view of a first preferred embodiment of the present invention; FIG. 3 is a perspective view of a touch device according to a first preferred embodiment of the present invention; and FIG. 4 is a first preferred embodiment of the present invention. A schematic cross-sectional view of a touch device; Figure 5 is a schematic flow chart of a second preferred embodiment of the present invention.

本發明之上述目的及其結構與功能上的特性,將依據所附圖式之較佳實施例予以說明。 The above object of the present invention, as well as its structural and functional features, will be described in accordance with the preferred embodiments of the drawings.

本發明係提供一種觸控基板及其製造方法,請參閱第1A圖示係顯示本發明之第一較佳實施例之立體示意圖,並輔以參閱第1B、3、4圖示;該觸控基板10係應用於一觸控裝置1(或稱觸控面板)上,於具體實施時,本發明之觸控基板10可應用於各種疊層結構的觸控裝置1,如GFF(Glass-Film-Film)、G1F(Glass-Film)、GG(Glass-Glass)…等,也就是將本發明此觸控基板10取代觸控裝置1上形成有感應電極(如氧化銦錫薄膜或奈米銀絲薄膜)之基板101(如聚對苯二甲酸乙二酯或玻璃)。 The present invention provides a touch substrate and a method of fabricating the same. Referring to FIG. 1A, a perspective view of a first preferred embodiment of the present invention is shown, and reference is made to FIGS. 1B, 3, and 4; The substrate 10 is applied to a touch device 1 (or a touch panel). In a specific implementation, the touch substrate 10 of the present invention can be applied to various touch devices 1 of a stacked structure, such as GFF (Glass-Film). -Film), G1F (Glass-Film), GG (Glass-Glass), etc., that is, the touch substrate 10 of the present invention is formed with a sensing electrode (such as an indium tin oxide film or a nano silver) instead of the touch device 1. A substrate 101 of a silk film (such as polyethylene terephthalate or glass).

另者,前述觸控基板10包括一基板101、至少一不透明(但可選擇可透光或不可透光其中任一)感應電極層11及一不透明(但可選擇可透光或不可透光其中任一)電極走線層13,該基板101係以可撓性材料所構成,於該較佳實施例之基板101係以聚對苯二甲酸乙二酯(Polyethyleneterephthalate,PET)做說明,但並不侷限於此;且該基板101具有一第一表面1011、一相對該第一表面1011之第二表面1012、一觸控區14及一周邊區15,該觸控區14位於該第一表面1011的中央位置,該周邊區15則位於該觸控區14外側。 In addition, the touch substrate 10 includes a substrate 101, at least one opaque (but optionally permeable or non-transmissive) sensing electrode layer 11 and an opaque layer (but may be transparent or opaque). Any of the electrode wiring layers 13, the substrate 101 is made of a flexible material, and the substrate 101 of the preferred embodiment is described by polyethylene terephthalate (PET), but The substrate 101 has a first surface 1011, a second surface 1012 opposite to the first surface 1011, a touch area 14 and a peripheral area 15. The touch area 14 is located on the first surface 1011. The central area 15 is located outside the touch area 14 .

再者,所述不透明感應電極層11係形成在該基板101之第一表面1011上,且其具有複數奈米銀粒111及複數不透明(但可選擇可透光或不可透光其中任一)感應區塊113,該等不透明感應區塊113係由該等奈米銀粒111以網格狀排列所構成,亦即一感光性之奈米銀粒薄膜係透過化學燒結方式形成在該基板101之第一表面1011上,然後依序經曝光、顯影製程,使該 等不透明感應區塊113呈網格狀成形在第一表面1011的觸控區14上(如第1A或2圖示中標號113的虛框部份);簡言而之,就是不透明感應電極層11係形成設置在該基板101之第一表面1011上。 Furthermore, the opaque sensing electrode layer 11 is formed on the first surface 1011 of the substrate 101, and has a plurality of nano silver particles 111 and a plurality of opaque layers (but may be selected to be transparent or non-transparent) In the sensing block 113, the opaque sensing blocks 113 are formed by arranging the nano silver particles 111 in a grid shape, that is, a photosensitive nano silver film is formed on the substrate 101 by chemical sintering. On the first surface 1011, and then sequentially exposed and developed to make the The opaque sensing block 113 is formed in a grid shape on the touch area 14 of the first surface 1011 (such as the dashed portion of the label 113 in FIG. 1A or 2); in short, the opaque sensing electrode layer The 11 series is formed on the first surface 1011 of the substrate 101.

此外,所述每一奈米銀粒111的直徑是介於數奈米至數十奈米之間,且前述不透明感應區塊113內網格16的線寬d係為1μm~10μm之間,於該較佳實施例係以較佳為7μm做說明。並該等不透明感應區塊113內網格16中的每一小網格161係以呈菱形狀做說明,但並不侷限於此,亦可選擇為矩形或其他形狀,藉以改變穿透率,亦即透過小網格161形狀來改變穿透率;所以於具體實施時,使用者可以事先根據所需面阻值及透光率的需求,調整設計所述不透明感應電極層11之網格16的線寬d粗細、改變網格16內小網格161的形狀大小,藉以達到低面阻值(約25ohms/□)及高透光率之效果者。 In addition, the diameter of each of the nano silver particles 111 is between several nanometers and several tens of nanometers, and the line width d of the mesh 16 in the opaque sensing block 113 is between 1 μm and 10 μm. The preferred embodiment is illustrated by a preferred 7 μm. And each of the small grids 161 in the grid 16 in the opaque sensing block 113 is illustrated in a diamond shape, but is not limited thereto, and may be selected as a rectangle or other shapes to change the transmittance. That is, the transmittance is changed by the shape of the small mesh 161; therefore, in a specific implementation, the user can adjust the grid 16 of the opaque sensing electrode layer 11 according to the required surface resistance value and the transmittance. The line width d is thick, and the shape of the small mesh 161 in the grid 16 is changed to achieve a low surface resistance value (about 25 ohms/□) and a high light transmittance.

續參閱第1A、1B、2圖示,該等不透明感應區塊113彼此相鄰之間具有一不透明(但可選擇可透光或不可透光其中任一)無感應區塊115,該等不透明無感應區塊115係由複數奈米銀粒以網格狀排列所構成的,亦即該等不透明無感應區塊115呈網格狀形成在第一表面1011的觸控區14上(如第1A或2圖示中標號115的虛框部份),且位於該等不透明感應區塊113彼此之間,並該等不透明無感應區塊115與相鄰的不透明感應區塊113是未有電性連接,換言之,就是該等不透明無感應區塊115未有電流通過,使其不會有感應電極之功效。而該等不透明無感應區塊115係用以避免不透明感應區塊113容易被觀察到,藉以有效達到平衡視覺的效果。其中於該較佳實施例之該等不透明無感應區塊115與相鄰的不透明感應區塊113之間係呈斷開7μm(如第1C圖示)而達到未有電性連接做說明,但於具體實施時上述斷開的距離不侷限於7μm,使用者可以事先根據視覺感官及感應靈敏度做 適當的調整,合先陳明。 Continuing to refer to FIGS. 1A, 1B, and 2, the opaque sensing blocks 113 have an opaque (but may be permeable or non-transmissive) adjacent to each other without an inductive block 115, such opaque The non-sensing block 115 is formed by arranging a plurality of nano silver particles in a grid shape, that is, the opaque non-sensing blocks 115 are formed in a grid shape on the touch area 14 of the first surface 1011 (eg, The imaginary opaque sensing block 113 and the adjacent opaque sensing block 113 are unpowered. The sexual connection, in other words, is that the opaque non-sensing block 115 has no current passing through, so that it does not have the effect of sensing electrodes. The opaque non-sensing blocks 115 are used to prevent the opaque sensing block 113 from being easily observed, thereby effectively achieving a balanced visual effect. The opaque non-sensing block 115 and the adjacent opaque sensing block 113 of the preferred embodiment are disconnected by 7 μm (as shown in FIG. 1C) to reach an electrically non-electrical connection, but In the specific implementation, the distance of the above disconnection is not limited to 7 μm, and the user can perform the visual sensory and the sensing sensitivity in advance. Appropriate adjustments, combined with Chen Ming.

另者複數不透明感應區塊113於該較佳實施例係以一第一方向X(即X軸方向)形成設置在該基板101之第一表面1011上(如第1A圖示中標號113的虛框部份)做說明,但於本發明實施時,亦可選擇設計如第2圖示將複數不透明感應區塊113以一第二方向Y(即Y軸方向)形成設置在該基板101之第一表面1011上(如第2圖示中標號113的虛框部份),或是如第3、4圖示將觸控裝置1之兩基板101分別以第一方向X與第二方向Y形成有不透明感應區塊113,且兩基板之間具有一光學膠17(如OCR)。 In the preferred embodiment, the plurality of opaque sensing blocks 113 are formed on the first surface 1011 of the substrate 101 in a first direction X (ie, the X-axis direction) (as indicated by the reference numeral 113 in FIG. 1A). In the embodiment of the present invention, the second opaque sensing block 113 is formed in the second direction Y (ie, the Y-axis direction) on the substrate 101. On a surface 1011 (such as the dashed portion of the reference numeral 113 in the second figure), or as shown in FIGS. 3 and 4, the two substrates 101 of the touch device 1 are respectively formed in the first direction X and the second direction Y. There is an opaque sensing block 113 with an optical glue 17 (such as OCR) between the two substrates.

再者前述不透明電極走線層13係形成在該第一表面1011的周邊上,且相鄰連接對應該不透明感應電極層11,亦即該不透明電極走線層13係形成在該第一表面1011的周邊區15上,且連接對應於所述觸控區14上的不透明感應電極層11。 Furthermore, the opaque electrode trace layer 13 is formed on the periphery of the first surface 1011, and the adjacent connection corresponds to the opaque sensing electrode layer 11, that is, the opaque electrode trace layer 13 is formed on the first surface 1011. The peripheral area 15 is connected to the opaque sensing electrode layer 11 corresponding to the touch area 14.

所以透過本發明此觸控基板10的設計,使得有效達到簡化製程工序及低面電阻值的效果,進而還有效達到增加走線佈設空間之效果者。 Therefore, through the design of the touch substrate 10 of the present invention, the effect of simplifying the process process and the low surface resistance value is effectively achieved, and the effect of increasing the wiring layout space is effectively achieved.

請參閱第5圖,係顯示本發明之第二較佳實施例之流程示意圖,並輔以參閱第1A、1B圖示;該較佳實施例係為前述第一較佳實施例之觸控基板的製造方法,該方法包括下列步驟: 5 is a schematic flow chart showing a second preferred embodiment of the present invention, and is supplemented with reference to FIGS. 1A and 1B; the preferred embodiment is the touch substrate of the first preferred embodiment. Manufacturing method, the method comprising the following steps:

(S1)提供一基板,該基板的一表面上形成有一感光性之奈米銀粒薄膜;提供一基板101,該基板101之表面(即第一較佳實施例所述的第一表面1011)上形成有一感光性之奈米銀粒薄膜。其中該基板101係以可撓性材料所構成,於該較佳實施例之基板101係以聚對苯二甲酸乙二酯(Polyethyleneterephthalate,PET)做說明;並該奈米銀粒薄膜係由複數奈米銀粒所構成的薄膜,且該每一奈米銀粒的直徑介於數奈米至數十奈米之間。 (S1) providing a substrate on which a photosensitive nano-silver grain film is formed; a substrate 101 is provided, and the surface of the substrate 101 (ie, the first surface 1011 described in the first preferred embodiment) A photosensitive nano-silver film is formed thereon. The substrate 101 is made of a flexible material, and the substrate 101 of the preferred embodiment is described by polyethylene terephthalate (PET); and the nano silver film is composed of plural a film composed of nano silver particles, and the diameter of each nano silver particle is between several nanometers and several tens of nanometers.

(S2)提供一具有網格與電極走線圖案之光罩對該基板之表面上的奈米銀粒薄膜進行一曝光製程,以將在該光罩上的網格與電極走線圖案轉移到該奈米銀粒薄膜上;提供一具有網格與電極走線圖案之光罩,並將光罩覆蓋在該基板101之表面(即第一表面1011)具有奈米銀粒薄膜上進行曝光製程,待曝光製程完後,使該光罩上的網格與電極走線圖案轉移到該基板101之表面(即第一表面1011)具有奈米銀粒薄膜上。 (S2) providing a mask having a grid and an electrode trace pattern to perform an exposure process on the nano-silver film on the surface of the substrate to transfer the grid and electrode trace pattern on the mask to Providing a reticle having a grid and an electrode trace pattern, and covering the surface of the substrate 101 (ie, the first surface 1011) with a reticle on the nano silver film to perform an exposure process After the exposure process is completed, the grid and the electrode trace pattern on the mask are transferred to the surface of the substrate 101 (ie, the first surface 1011) to have a nano-silver film.

(S3)進行一顯影製程,以於該基板之表面上形成有呈網格狀的不透明感應電極層與不透明電極走線層; 進行顯影製程,以將該基板101之表面(即第一表面1011)的奈米銀粒薄膜上需要的網格圖案、走線圖案留下,不要的部份則顯影掉後,利用一溫水清洗該基板101之表面(即第一表面1011)上的不透明感應電極層11與不透明電極走線層13後,並進行黑化處理,令該基板101之表面(即第一表面1011)上的不透明感應電極層11與不透明電極走線層13更不明顯,並再次利用溫水將該基板101之表面(即第一表面1011)殘留的黑化液清洗掉後,使得該基板101之第一表面1011上形成有呈網格狀的不透明感應電極層11與電性連接該不透明感應電極層11之不透明電極走線層13;其中前述不透明感應電極層11內具有複數呈網格狀之不透明感應區塊113,該等不透明感應區塊113係形成在第一表面1011的觸控區14上,而不透明電極走線層13則是形成在該第一表面1011的周邊區15上。 (S3) performing a developing process to form a grid-shaped opaque sensing electrode layer and an opaque electrode wiring layer on the surface of the substrate; The developing process is performed to leave a desired grid pattern and a trace pattern on the surface of the substrate 101 (ie, the first surface 1011) of the nano silver film, and the unnecessary portion is developed, and a warm water is used. After the opaque sensing electrode layer 11 and the opaque electrode wiring layer 13 on the surface of the substrate 101 (ie, the first surface 1011) are cleaned, blackening treatment is performed to make the surface of the substrate 101 (ie, the first surface 1011) The opaque sensing electrode layer 11 and the opaque electrode wiring layer 13 are less noticeable, and the blackening liquid remaining on the surface of the substrate 101 (ie, the first surface 1011) is washed away again by warm water, so that the substrate 101 is first. An opaque sensing electrode layer 11 in a grid shape and an opaque electrode wiring layer 13 electrically connected to the opaque sensing electrode layer 11 are formed on the surface 1011; wherein the opaque sensing electrode layer 11 has a plurality of grid-shaped opaque sensing layers. The opaque sensing block 113 is formed on the touch area 14 of the first surface 1011, and the opaque electrode trace layer 13 is formed on the peripheral area 15 of the first surface 1011.

(S4)對於該基板之表面上的不透明感應電極層進行高導電化及安定化處理作業;對於該基板101之第一表面1011上的不透明感應電極層11進行 高導電化處理作業,藉以使該第一表面1011上的不透明感應電極層11增加導電效果,然後利用溫水將表面(即第一表面1011)殘留的高導電處理液洗掉,接著再進行安定化處理作業,使該第一表面1011上的不透明感應電極層11之導電性達到穩定效果;然後,再次以溫水清洗表面(即第一表面1011)殘留的安定化溶劑。 (S4) performing high-conductivity and stabilization processing on the opaque sensing electrode layer on the surface of the substrate; performing opaque sensing electrode layer 11 on the first surface 1011 of the substrate 101 The high conductivity processing operation is performed to increase the conductive effect of the opaque sensing electrode layer 11 on the first surface 1011, and then the high conductive processing liquid remaining on the surface (ie, the first surface 1011) is washed away with warm water, and then stabilized. The processing operation is such that the conductivity of the opaque sensing electrode layer 11 on the first surface 1011 is stabilized; then, the stabilization solvent remaining on the surface (ie, the first surface 1011) is washed again with warm water.

(S5)對基板之表面上的不透明感應電極層與不透明電極走線層進行檢查作業;對基板101之表面(即第一表面1011)的不透明感應電極層11與不透明電極走線層13進行檢查作業,如電測與外觀檢查是否有斷線、短路,或是外觀不良的情況。 (S5) inspecting the opaque sensing electrode layer and the opaque electrode wiring layer on the surface of the substrate; inspecting the opaque sensing electrode layer 11 and the opaque electrode wiring layer 13 on the surface of the substrate 101 (ie, the first surface 1011) Work, such as electrical and visual inspection, for broken wires, short circuits, or poor appearance.

(S6)將檢查後的基板之表面與一保護膜相貼合,用以覆蓋該基板之表面上的不透明感應電極層與不透明電極走線層。 (S6) bonding the surface of the inspected substrate to a protective film for covering the opaque sensing electrode layer and the opaque electrode wiring layer on the surface of the substrate.

將檢查後的基板101之第一表面1011與保護膜(圖中未示)相貼合一起,用以覆蓋於基板101之第一表面1011上的不透明感應電極層11與不透明電極走線層13,藉以達到保護的效果者。 The first surface 1011 of the inspected substrate 101 is bonded to a protective film (not shown) for covering the opaque sensing electrode layer 11 and the opaque electrode wiring layer 13 on the first surface 1011 of the substrate 101. To achieve the effect of protection.

所以透過本發明此方法的設計,使得有效直接將不透明感應電極層11與不透明電極走線層13同時形成在該基板101之表面上,藉以有效達到減少(或簡化)製造工序的效果,進而還有效達到低面電阻值及增加走線佈設空間的效果。以上所述,本發明相較於習知具有下列之優點:1.具有達到減少(或簡化)製造工序及低面電阻值的效果;2.具有增加走線佈設空間的效果。 Therefore, the design of the method of the present invention makes it possible to directly form the opaque sensing electrode layer 11 and the opaque electrode wiring layer 13 on the surface of the substrate 101, thereby effectively reducing (or simplifying) the manufacturing process, and further Effectively achieve low surface resistance and increase the effect of routing space. As described above, the present invention has the following advantages as compared with the prior art: 1. It has the effect of reducing (or simplifying) the manufacturing process and the low surface resistance value; 2. It has the effect of increasing the wiring space.

按,以上所述,僅為本發明的較佳具體實施例,惟本發明的特徵並不侷限於此,任何熟悉該項技藝者在本發明領域內,可輕易思及的變化或修 飾,皆應涵蓋在以下本發明的申請專利範圍中。 The above description is only a preferred embodiment of the present invention, but the features of the present invention are not limited thereto, and any change or repair that can be easily considered in the field of the present invention is familiar to those skilled in the art. The decoration should be covered by the following patent application scope of the present invention.

10‧‧‧觸控基板 10‧‧‧ touch substrate

101‧‧‧基板 101‧‧‧Substrate

1011‧‧‧第一表面 1011‧‧‧ first surface

1012‧‧‧第二表面 1012‧‧‧ second surface

11‧‧‧不透明感應電極層 11‧‧‧Opacity sensing electrode layer

113‧‧‧不透明感應區塊 113‧‧‧Opacity sensing block

115‧‧‧不透明無感應區塊 115‧‧‧opaque, non-sensing block

13‧‧‧不透明電極走線層 13‧‧‧opaque electrode trace layer

14‧‧‧觸控區 14‧‧‧ touch area

15‧‧‧周邊區 15‧‧‧The surrounding area

16‧‧‧網格 16‧‧‧Grid

161‧‧‧小網格 161‧‧‧Small grid

X‧‧‧第一方向 X‧‧‧ first direction

Claims (10)

一種觸控基板,係包括:一基板,係具有一第一表面及一相反該第一表面之第二表面;至少一不透明感應電極層,係形成在該基板的第一表面上,且其具有複數奈米銀粒及複數不透明感應區塊,該等不透明感應區塊係由該等奈米銀粒以網格狀排列所構成,並該等不透明感應區塊彼此相鄰之間具有一不透明無感應區塊,該等不透明無感應區塊係由複數奈米銀粒以網格狀排列所構成,且該等不透明無感應區塊係與相鄰的不透明感應區塊未有電性連接;及一不透明電極走線層,係形成在該基板之第一表面的周邊上,且相鄰連接對應該不透明感應電極層。 A touch substrate includes: a substrate having a first surface and a second surface opposite to the first surface; at least one opaque sensing electrode layer formed on the first surface of the substrate, and having a plurality of nano silver particles and a plurality of opaque sensing blocks, wherein the opaque sensing blocks are formed by arranging the nano silver particles in a grid shape, and the opaque sensing blocks have an opacity between adjacent ones. Inductive block, the opaque non-sensing block is formed by arranging a plurality of nano silver particles in a grid, and the opaque non-sensing blocks are not electrically connected to adjacent opaque sensing blocks; An opaque electrode routing layer is formed on the periphery of the first surface of the substrate, and the adjacent connections correspond to the opaque sensing electrode layer. 如申請專利範圍第1項所述之觸控基板,其中該等不透明感應區塊係以一第一方向形成設在該基板之第一表面上。 The touch substrate of claim 1, wherein the opaque sensing blocks are formed on the first surface of the substrate in a first direction. 如申請專利範圍第1項所述之觸控基板,其中該等不透明感應區塊係以一第二方向形成設在該基板之第一表面上。 The touch substrate of claim 1, wherein the opaque sensing blocks are formed on the first surface of the substrate in a second direction. 如申請專利範圍第1項所述之觸控基板,其中該基板係為一聚對苯二甲酸乙二酯(Polyethyleneterephthalate,PET)。 The touch substrate of claim 1, wherein the substrate is a polyethylene terephthalate (PET). 如申請專利範圍第1項所述之觸控基板,其中該基板係以可撓性材料所構成。 The touch substrate of claim 1, wherein the substrate is made of a flexible material. 如申請專利範圍第1項所述之觸控基板,其中該每一奈米銀粒的直徑介於數奈米至數十奈米之間。 The touch substrate of claim 1, wherein the diameter of each nano silver particle is between several nanometers and several tens of nanometers. 一種觸控基板之製造方法,係包括:提供一基板,該基板的一表面上形成有一感光性之奈米銀粒薄膜;提供一具有網格與電極走線圖案之光罩對該基板之表面上的奈米銀粒薄 膜進行一曝光製程,以將在該光罩上的網格與電極走線圖案轉移到該奈米銀粒薄膜上;進行一顯影製程,以於該基板之表面上形成有呈網格狀的不透明感應電極層與對應電性連接該不透明感應電極層的不透明電極走線層;及對於該基板之表面上的不透明感應電極層進行高導電化及安定化處理作業;其中前述顯影製程包含利用一溫水清洗該基板之表面上的不透明感應電極層與不透明電極走線層後,並進行黑化處理,令該基板之表面上的不透明感應電極層與不透明電極走線層更不明顯,再次利用溫水將該基板之表面殘留的黑化液清洗掉。 A method for manufacturing a touch substrate includes: providing a substrate having a photosensitive nano-silver film formed on a surface thereof; and providing a mask having a grid and an electrode trace pattern on the surface of the substrate Thin nano silver particles Performing an exposure process to transfer the grid and electrode trace pattern on the mask to the nano silver film; performing a developing process to form a grid on the surface of the substrate An opaque sensing electrode layer and an opaque electrode routing layer electrically connected to the opaque sensing electrode layer; and a high conductivity and stabilization operation on the opaque sensing electrode layer on the surface of the substrate; wherein the developing process comprises using one Warming the opaque sensing electrode layer and the opaque electrode wiring layer on the surface of the substrate, and performing blackening treatment, so that the opaque sensing electrode layer and the opaque electrode wiring layer on the surface of the substrate are less obvious, and are reused. Warm water washes away the blackening liquid remaining on the surface of the substrate. 如申請專利範圍第7項所述之觸控基板之製造方法,其中對於該基板之表面上的不透明感應電極層進行高導電化及安定化處理作業之步驟後,更包含:對基板之表面上的不透明感應電極層與不透明電極走線層進行檢查作業;及將檢查後的基板之表面與一保護膜相貼合,用以覆蓋該基板之表面上的不透明感應電極層與不透明電極走線層。 The method for manufacturing a touch substrate according to claim 7, wherein after the step of performing high conductivity and stabilization processing on the opaque sensing electrode layer on the surface of the substrate, the method further comprises: on the surface of the substrate The opaque sensing electrode layer and the opaque electrode wiring layer are inspected; and the surface of the inspected substrate is bonded to a protective film to cover the opaque sensing electrode layer and the opaque electrode wiring layer on the surface of the substrate . 如申請專利範圍第7項所述之觸控基板之製造方法,其中基板係以可撓性材料所構成。 The method of manufacturing a touch substrate according to claim 7, wherein the substrate is made of a flexible material. 如申請專利範圍第7項所述之觸控基板之製造方法,其中該奈米銀粒薄膜係由複數奈米銀粒所構成,且該每一奈米銀粒的直徑介於數奈米至數十奈米之間。 The method for manufacturing a touch substrate according to claim 7, wherein the nano silver film is composed of a plurality of nano silver particles, and each nano silver particle has a diameter of several nanometers to Between dozens of nanometers.
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