TWI517244B - - Google Patents
Info
- Publication number
- TWI517244B TWI517244B TW101126972A TW101126972A TWI517244B TW I517244 B TWI517244 B TW I517244B TW 101126972 A TW101126972 A TW 101126972A TW 101126972 A TW101126972 A TW 101126972A TW I517244 B TWI517244 B TW I517244B
- Authority
- TW
- Taiwan
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011102101484A CN102260856A (zh) | 2011-07-26 | 2011-07-26 | 抗刻蚀层、半导体处理装置及制作方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201316401A TW201316401A (zh) | 2013-04-16 |
TWI517244B true TWI517244B (zh) | 2016-01-11 |
Family
ID=45007684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW101126972A TW201316401A (zh) | 2011-07-26 | 2012-07-26 | 抗刻蝕層、半導體處理裝置及其製作方法 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN102260856A (zh) |
TW (1) | TW201316401A (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102637573B (zh) * | 2012-04-28 | 2016-02-17 | 中微半导体设备(上海)有限公司 | 半导体处理装置及制作方法 |
CN103255409A (zh) * | 2013-05-13 | 2013-08-21 | 上海大学 | 一种基于纳米技术在低碳钢表面制备不锈钢涂层的方法 |
CN112553598B (zh) * | 2019-09-25 | 2023-03-28 | 中微半导体设备(上海)股份有限公司 | 利用ald技术增强修复刻蚀设备部件阳极氧化涂层的方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100418331B1 (ko) * | 1999-12-28 | 2004-02-14 | 가부시끼가이샤 도시바 | 진공 성막 장치용 부품 및 그것을 이용한 진공 성막 장치,및 타깃 장치 |
US6620520B2 (en) * | 2000-12-29 | 2003-09-16 | Lam Research Corporation | Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof |
US6780787B2 (en) * | 2002-03-21 | 2004-08-24 | Lam Research Corporation | Low contamination components for semiconductor processing apparatus and methods for making components |
US6863990B2 (en) * | 2003-05-02 | 2005-03-08 | Deloro Stellite Holdings Corporation | Wear-resistant, corrosion-resistant Ni-Cr-Mo thermal spray powder and method |
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2011
- 2011-07-26 CN CN2011102101484A patent/CN102260856A/zh active Pending
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2012
- 2012-07-26 TW TW101126972A patent/TW201316401A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
CN102260856A (zh) | 2011-11-30 |
TW201316401A (zh) | 2013-04-16 |