TWI512082B - A red nitride phosphor with high color rendering and high heat characteristics - Google Patents

A red nitride phosphor with high color rendering and high heat characteristics Download PDF

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TWI512082B
TWI512082B TW102139438A TW102139438A TWI512082B TW I512082 B TWI512082 B TW I512082B TW 102139438 A TW102139438 A TW 102139438A TW 102139438 A TW102139438 A TW 102139438A TW I512082 B TWI512082 B TW I512082B
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color rendering
phosphor
red nitride
red
properties
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TW201516128A (en
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Yin Chih Lin
Li Chun Wang
Shin Mou Wu
Hao En Hung
Chi Hsing Hsieh
Ru Shi Liu
Yi Ting Tsai
Chun Che Lin
Mu Huai Fang
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Nat Inst Chung Shan Science & Technology
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Description

一種具高演色性與高熱特性之紅色氮化物螢光粉Red nitride phosphor with high color rendering and high thermal properties

本發明係為一種紅色氮化物之螢光粉,特別關於紅色M2 Si5 N8 :Eu螢光粉材料,其中M以Ca、Sr與Ba為共同主體,搭配藍光LED及黃色螢光粉下可可調控放光波長位置與半高寬大小,兼具高演色性與高耐熱之特性。The invention relates to a red nitride fluorescent powder, in particular to a red M 2 Si 5 N 8 :Eu fluorescent powder material, wherein M is a common body of Ca, Sr and Ba, and is matched with blue LED and yellow fluorescent powder. Cocoa regulates the position of the light-emitting wavelength and the half-height width, and has the characteristics of high color rendering and high heat resistance.

近年來白光發光二極體(White Light-Emitting diodes,WLEDs)為次世代新興產業之一,其具有體積小、熱輻射小、壽命長且耗電量低等優點,能解決白熾燈泡難以克服的問題。當今國際間基於節約能源與環境保護概念的成長,更顯現白光發光二極體作為新世代照明的市場發展價值,據專家評估,若白熾燈泡均以白光發光二極體所取代,則每年可省下至少1座發電廠之發電量。最近,核四廠興建問題的台灣為例,若台灣四分之一的白熾燈泡與日光燈均由白光發光二極體取代,則每年可省下約110億度之電力,相當於核電廠一年的發電量,亦促使目前新能源之開發與提高能源效率之議題受大眾重視。近十年,彩色發光二極體用於色彩照明、顯示器、娛樂產品等已相當普遍,其中以電子顯示器產業為發展最迅速之領域,相信未來在光電元件上的應用將會扮演重要角色。In recent years, White Light-Emitting Diodes (WLEDs) are one of the next generations of emerging industries. They have the advantages of small size, small heat radiation, long life and low power consumption, which can solve the problem that incandescent bulbs are difficult to overcome. problem. Today's international growth based on the concept of energy conservation and environmental protection shows the market development value of white light-emitting diodes as a new generation of lighting. According to experts' evaluation, if incandescent bulbs are replaced by white light-emitting diodes, they can be saved every year. The amount of electricity generated by at least one power plant. Recently, Taiwan, where the nuclear plant was built, is an example. If one-fourth of the incandescent bulbs and fluorescent lamps in Taiwan are replaced by white light-emitting diodes, about 11 billion kilowatt-hours of electricity can be saved each year, equivalent to one year for nuclear power plants. The power generation has also attracted the attention of the public in the current development of new energy and energy efficiency. In the past ten years, color light-emitting diodes have been widely used in color lighting, displays, entertainment products, etc. Among them, the electronic display industry is the fastest growing field, and it is believed that the future application of optoelectronic components will play an important role.

習知,美國專利US5998925提出第一顆白光二極體,係藉由藍光發光二極體激發鈰摻雜之釔鋁石榴石螢光粉,該螢光粉所發出之黃光與藍光混合產生白光,於產生白光方面最常使用之方法係在發藍光的LED晶片的發光面置放波長轉換材料,如黃色螢光粉,在LED晶片上之波長轉換材料層會吸收一些LED發出的光子,並將該光子向下轉換為可見光波長的光,進而產生藍色及黃色波長光源,具有一定比例之雙色光源,從人眼感受來看較接近白光,而近年來彩色發光二極體用於顯示器、娛樂產 品上相當普遍,白色發光二極體須具有完整的全光譜波段,其中,紅色光譜為目前發展之方向。Conventionally, U.S. Patent No. 5,998,925 discloses a first white light diode which is an ytterbium-doped yttrium aluminum garnet luminescent powder which is excited by a blue light emitting diode. The yellow light and blue light emitted by the fluorescent powder are mixed to produce white light. The most commonly used method for producing white light is to place a wavelength converting material such as yellow phosphor powder on the light emitting surface of the blue light emitting LED chip, and the wavelength converting material layer on the LED chip absorbs some photons emitted by the LED, and the photon is The photon is converted down to visible light wavelength, and then the blue and yellow wavelength light source is generated. The two-color light source has a certain proportion, which is closer to white light when viewed by the human eye. In recent years, the color light-emitting diode is used for display and entertainment production. It is quite common in the product, the white light-emitting diode must have a complete full-spectrum band, and the red spectrum is the current development direction.

按,目前國際主要LED大廠均朝RGB高演色性白光LED為發展方向,為彌補YAG螢光粉所欠缺的紅色光譜,添加紅色螢光粉之白光LED製程已成為新課題,目前已經有許多紅色螢光粉的合成與應用資訊,其中德國Osram公司Bogner等人之專利(US 6,649,946)揭示Mx Siy Nz :Eu(其中M=Ca、Sr與Ba,z=2/3x+4/3y)氮化物可作為LED之紅色螢光粉材料。1995年Schlieper等人(T.Schlieper,W.Milius and W.Schnick,Z.anorg.allg.Chem. 621,1995 ,1380-1384)合成與研究M2 Si5 N8 (M=Sr與Ba)氮化物之單晶結構。其中Ca2 Si5 N8 、Sr2 Si5 N8 與Ba2 Si5 N8 之空間群分別屬Cc、Pmn21與Pmn2,對於紅色螢光粉之演色性及耐熱特性仍有待改善。According to the current international major LED manufacturers are moving towards RGB high color rendering white LEDs. To compensate for the red spectrum lacking YAG phosphor powder, the white LED process with red phosphor powder has become a new topic. The synthesis and application information of red fluorescent powder, the patent of Bogner et al. (US 6,649,946) of Osram, Germany, reveals M x Si y N z :Eu (where M=Ca, Sr and Ba, z=2/3x+4/ 3y) Nitride can be used as a red phosphor material for LEDs. 1995, Schlieper et al. (T. Schlieper, W. Milius and W. Schnick, Z. anorg. allg. Chem. 621, 1995 , 1380-1384) synthesis and study of M 2 Si 5 N 8 (M=Sr and Ba) Single crystal structure of nitride. The space groups of Ca 2 Si 5 N 8 , Sr 2 Si 5 N 8 and Ba 2 Si 5 N 8 belong to Cc, Pmn21 and Pmn2, respectively, and the color rendering and heat resistance of red phosphor powder still need to be improved.

鑒於上述習知技術之缺點,本發明主要目的在於提供一種可兼具高演色性與高耐熱特性之以(Ca、Sr與Ba)為共同主體之紅色M2 Si5 N8 :Eu螢光粉材料。其中,該紅色螢光粉之組成係為Sr2-x-y (Ca0.55 Ba0.45 )x Si5 N8 :Eu2+ y (0<x<2;0<y<2;0<x+y<2)。In view of the above-mentioned disadvantages of the prior art, the main object of the present invention is to provide a red M 2 Si 5 N 8 :Eu phosphor powder having a high color rendering property and a high heat resistance characteristic (Ca, Sr and Ba) as a common body. material. Wherein, the composition of the red phosphor is Sr 2-xy (Ca 0.55 Ba 0.45 ) x Si 5 N 8 :Eu 2+ y (0<x<2;0<y<2;0<x+y< 2).

本發明係以M3 N2 (其中M包含Ca、Sr與Ba三種)、Si3 N4 與EuN作為合成原料,利用金屬離子半徑配比之固態合成法,可降低不同原子取代造成晶格體積變化之變因,並於常壓或高壓及高溫下持溫兩小時,燒結合成Sr2-x-y (Ca0.55 Ba0.45 )x Si5 N8 :Eu2+ y (0<x<2;0<y<2;0<x+y<2)紅色氮化物螢光粉。本發明以Sr1.98 Si5 N8 :Eu2+ 0.02 (即y=0.02)為主體,藉特殊配比之(Ba,Ca)取代Sr,可降低不同原子取代造成晶格體積變化之變因,並保持原本晶相。此外,光激光譜圖得知此材料可被370~470nm波長範圍之光源激發,說明本發明可應用於白光發光二極體之紅色螢光粉,主峰產生紅位移由613nm至633nm,而半高寬則由84nm增加至115nm,顯示此材料具有調控放光波長位置與半高寬大小之特性,以提高作為白光發光二極體之演色性。此外,透過變溫螢光光譜可發現隨著(Ba,Ca)取代量增加,熱特性逐漸上升(即具較佳耐熱特性),其中以x=1.5最佳。演色性是物體在光源下的感受與在太陽光下的感受的真實度百 分比,其測量標準是以自然光Ra-100為100%真實色彩。由光激光譜圖可得知主峰波長之半高寬,螢光粉之半高寬越寬,及其所發出之色彩越多,有助演色性的提升,一般應用於通用照明,反之,半高寬越窄則適用於顯示器中,可求得較高之解析,色彩之再現性也越佳。The invention adopts M 3 N 2 (wherein M comprises three kinds of Ca, Sr and Ba), Si 3 N 4 and EuN as synthetic raw materials, and the solid state synthesis method of metal ion radius ratio can reduce the lattice volume caused by different atom substitutions. The variation of the change, and holding the temperature at normal pressure or high pressure and high temperature for two hours, sintering synthesis of Sr 2-xy (Ca 0.55 Ba 0.45 ) x Si 5 N 8 :Eu 2+ y (0<x<2;0<y<2;0<x+y<2) red nitride phosphor. The invention is mainly composed of Sr 1.98 Si 5 N 8 :Eu 2+ 0.02 (ie y=0.02), and the special ratio of (Ba, Ca) is substituted for Sr, which can reduce the variation of lattice volume caused by different atom substitutions. And maintain the original crystal phase. In addition, the optical laser spectrum shows that the material can be excited by a light source of a wavelength range of 370 to 470 nm, indicating that the present invention can be applied to a red phosphor of a white light emitting diode, and the main peak produces a red shift from 613 nm to 633 nm, and a half height. The width is increased from 84 nm to 115 nm, indicating that the material has the characteristics of adjusting the position of the light-emitting wavelength and the width at half maximum to improve the color rendering property as a white light-emitting diode. In addition, through the temperature-dependent fluorescence spectrum, it is found that as the (Ba, Ca) substitution amount increases, the thermal characteristics gradually increase (i.e., have better heat resistance characteristics), and x = 1.5 is optimal. Color rendering is the percentage of the real feeling of an object under the light source and the feeling under the sun. The measurement standard is 100% true color with natural light Ra-100. The half-height width of the main peak wavelength can be known from the optical laser spectrum. The wider the width and width of the fluorescent powder, the more colors it emits, which contribute to the improvement of color rendering. Generally, it is applied to general illumination, and vice versa. The narrower the width and width, the more suitable for the display, the higher the resolution and the better the reproducibility of the color.

以上之概述與接下來的詳細說明,是為了能進一步說明本發明達到預定目的所採取的方式、手段及功效。而有關本發明的其它目的及優點,將在後續的說明中加以闡述。The above summary and the following detailed description are intended to further illustrate the manner, means and function of the present invention to achieve the intended purpose. Other objects and advantages of the present invention will be set forth in the description which follows.

第一圖係為本發明實施例紅色氮化物螢光粉末之X光粉末繞射圖。The first figure is an X-ray powder diffraction pattern of a red nitride fluorescent powder according to an embodiment of the present invention.

第二圖係為本發明實施例紅色氮化物螢光粉末之激發光譜圖。The second figure is an excitation spectrum of the red nitride fluorescent powder of the embodiment of the present invention.

第三圖係為本發明實施例紅色氮化物螢光粉末之放光光譜圖。The third figure is a luminescence spectrum of the red nitride fluorescent powder of the embodiment of the present invention.

第四圖係為本發明實施例紅色氮化物螢光粉末之變溫放光光譜圖。The fourth figure is a temperature-dependent emission spectrum of the red nitride fluorescent powder of the embodiment of the present invention.

以下係藉由特定具體實例說明本發明之實施方式,熟悉此技藝之人士可由本說明書所揭示內容輕易地瞭解本發明之其它優點與功效。The embodiments of the present invention are described below by way of specific examples, and those skilled in the art can readily appreciate the other advantages and advantages of the present invention.

實施例Example

以M3 N2 (其中M包含Ca、Sr與Ba三種)、Si3 N4 與EuN作為合成原料,並於壓力0.5Mpa、溫度1600℃持溫兩小時燒結合成Sr2-x-y (Ca0.55 Ba0.45 )x Si5 N8 :Eu2+y (0x1.98;y=0.02;0.02x+y2)紅色氮化物螢光粉。本發明以Sr1.98 Si5 N8 :Eu2+ 0.02 (即y=0.02)為主體,藉特殊配比之(Ba,Ca)取代Sr,可降低不同原子取代造成晶格體積變化之變因,即產生Sr1.98-x (Ca0.55 Ba0.45 )x Si5 N8 :Eu2+ 0.02 (0x1.98;y=0.02;0.02x+y2)紅色氮化物螢光粉配方。請參閱第一圖所示之係為本發明實施例紅色氮化物螢光粉末之X光粉末繞射圖,經燒結後之螢光粉以X光粉末繞射分析(XRD)鑑定其晶體結構,將其與純相Sr1.98 Si5 N8 :Eu2+ 0.02 (x=0;y=0.02)之紅色螢光粉比較圖譜,發現本實施例在於取代量x<1.5時均為純相之結構,當取代量x=1.98時,晶相會產生變化,藉此可得知本發明藉由特殊配比之(Ba,Ca)取代Sr,可降低不同原子取代造成晶格體積變化之變因,並 保持原本晶相。M 3 N 2 (where M contains Ca, Sr and Ba), Si 3 N 4 and EuN as synthetic raw materials, and sintered at a pressure of 0.5 Mpa and a temperature of 1600 ° C for two hours to synthesize Sr 2-xy (Ca 0.55 Ba 0.45 ) x Si 5 N 8 :Eu2+ y (0 x 1.98;y=0.02;0.02 x+y 2) Red nitride phosphor powder. The invention is mainly composed of Sr 1.98 Si 5 N 8 :Eu 2+ 0.02 (ie y=0.02), and the special ratio of (Ba, Ca) is substituted for Sr, which can reduce the variation of lattice volume caused by different atom substitutions. That is, Sr 1.98-x (Ca 0.55 Ba 0.45 ) x Si 5 N 8 :Eu 2+ 0.02 (0) x 1.98;y=0.02;0.02 x+y 2) Red nitride phosphor powder formula. Referring to the first figure, the X-ray powder diffraction pattern of the red nitride fluorescent powder of the embodiment of the present invention is characterized, and the sintered phosphor powder is identified by X-ray powder diffraction analysis (XRD). Comparing with the red fluorescent powder of pure phase Sr 1.98 Si 5 N 8 :Eu 2+ 0.02 (x=0; y=0.02), it was found that the structure of the present embodiment is pure phase in the substitution amount x<1.5. When the substitution amount x=1.98, the crystal phase changes, and it can be known that the special substitution ratio (Ba, Ca) in place of Sr can reduce the variation of lattice volume caused by different atom substitutions. And maintain the original crystal phase.

請參閱第二圖所示之係為本發明實施例紅色氮化物螢光粉末之激發光譜圖,本發明所製備Sr1.98-x (Ca0.55 Ba0.45 )x Si5 N8 :Eu2+ 0.02 (0x1.98;y=0.02;0.02x+y2)一系列紅色氮化物螢光粉之激發光譜圖,得知該紅色螢光粉可被370~470nm波長範圍之光源激發,說明本發明可應用於白光發光二極體之紅色螢光粉。請參閱第三圖所示之係為本發明實施例紅色氮化物螢光粉末之放光光譜圖,該圖譜為歸一化(normalize)之放光光譜圖,其中顯示隨取代量x值增加,主峰產生紅位移由613nm至633nm,而半高寬則由84nm增加至115nm,由第一圖、第二圖及第三圖得知對照Sr1.98 Si5 N8 :Eu2+ 0.02 之紅色螢光粉與以特殊配比之Ca及Ba取代部分Sr之紅色螢光粉時顯示晶相未產生變化下,當Ca及Ba取代Sr之取代量增加時,所測得之光譜圖之主峰產生紅移且半高寬漸寬,顯示本發明具有調控主峰波長與半高寬之特性。Please refer to the second figure for the excitation spectrum of the red nitride fluorescent powder according to the embodiment of the present invention. The Sr 1.98-x (Ca 0.55 Ba 0.45 ) x Si 5 N 8 :Eu 2+ 0.02 (prepared by the present invention) 0 x 1.98;y=0.02;0.02 x+y 2) Excitation spectrum of a series of red nitride phosphors, it is known that the red phosphor can be excited by a light source of a wavelength range of 370 to 470 nm, indicating that the present invention can be applied to a red phosphor of a white light emitting diode. Please refer to the third embodiment for the luminescence spectrum of the red nitride fluorescent powder according to the embodiment of the present invention. The spectrum is a normalized spectroscopy spectrum, wherein the value of the substitution amount x increases. The main peak produces a red shift from 613 nm to 633 nm, while the full width at half maximum increases from 84 nm to 115 nm. From the first, second and third figures, the red fluorescence of the control Sr 1.98 Si 5 N 8 :Eu 2+ 0.02 is known . When the powder and the red phosphor of the partial Sr are replaced by a special ratio of Ca and Ba, the crystal phase is not changed. When the substitution amount of Ca and Ba substituted Sr is increased, the main peak of the measured spectrum is red-shifted. Moreover, the width at half maximum is gradually wide, indicating that the present invention has the characteristics of regulating the main peak wavelength and the full width at half maximum.

請參閱第四圖所示之係為本發明實施例紅色氮化物螢光粉末之變溫放光光譜圖,為本發明製備之Sr1.98-x (Ca0.55 Ba0.45 )x Si5 N8 :Eu2+ 0.02 (0x1.98;y=0.02;0.02x+y2)其變溫放射光譜圖,如圖可得知對照未以Ca及Ba取代部分Sr時(即x=0),當取代量x增加時,熱特性逐漸提升,以x=1.5具最佳耐熱特性,此結果顯示本發明有助於改善白光發光二極體熱穩定性之問題。Please refer to the fourth embodiment for the temperature-dependent emission spectrum of the red nitride fluorescent powder according to the embodiment of the present invention, which is the Sr 1.98-x (Ca 0.55 Ba 0.45 ) x Si 5 N 8 :Eu 2 prepared by the invention. + 0.02 (0 x 1.98;y=0.02;0.02 x+y 2) The variable temperature radiation spectrum diagram, as shown in the figure, can be seen that when the control does not replace part of Sr with Ca and Ba (ie, x=0), when the substitution amount x increases, the thermal characteristics gradually increase, and x=1.5 has the best heat resistance. Characteristics, this result shows that the present invention contributes to the problem of improving the thermal stability of the white light emitting diode.

上述之實施例僅為例示性說明本發明之特點及其功效,而非用於限制本發明之實質技術內容的範圍。任何熟悉此技藝之人士均可在不違背本發明之精神及範疇下,對上述實施例進行修飾與變化。因此,本發明之權利保護範圍,應如後述之申請專利範圍所列。The above-described embodiments are merely illustrative of the features and functions of the present invention and are not intended to limit the scope of the technical scope of the present invention. Modifications and variations of the above-described embodiments can be made by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention should be as set forth in the scope of the claims described below.

Claims (10)

一種具高演色性與高熱特性之紅色氮化物螢光粉,其組成係為M2 Si5 N8 :Eu,其中M係包含Sr、Ca及Ba三種金屬,該Ca及Ba係以特殊比例取代Sr,該螢光粉之金屬間比例係為Sr2-x-y (Ca0.55 Ba0.45 )x Si5 N8 :Eu2+ y ,其中0<x<2;0<y<2;0<x+y<2。A red nitride phosphor with high color rendering and high thermal properties, the composition of which is M 2 Si 5 N 8 :Eu, wherein the M system comprises three metals of Sr, Ca and Ba, and the Ca and Ba are replaced by special ratios. Sr, the intermetallic ratio of the phosphor is Sr 2-xy (Ca 0.55 Ba 0.45 ) x Si 5 N 8 :Eu 2+ y , where 0<x<2;0<y<2;0<x+y<2. 如申請專利範圍第1項所述之一種具高演色性與高熱特性之紅色氮化物螢光粉,其中該螢光粉之製備原料係為M3 N2 、Si3 N4 與EuN,其中M包含Ca、Sr與Ba三種金屬。A red nitride phosphor having high color rendering properties and high thermal properties as described in claim 1, wherein the phosphor powder is prepared by using M 3 N 2 , Si 3 N 4 and EuN, wherein M Contains three metals: Ca, Sr and Ba. 如申請專利範圍第1項所述之一種具高演色性與高熱特性之紅色氮化物螢光粉,其中當0<x<1.98具相同結晶相。A red nitride fluorescent powder having high color rendering property and high thermal property as described in claim 1, wherein 0<x<1.98 has the same crystal phase. 如申請專利範圍第1項所述之一種具高演色性與高熱特性之紅色氮化物螢光粉,其中該螢光粉係可被波長370~470nm範圍之光源激發。A red nitride phosphor having high color rendering properties and high thermal characteristics as described in claim 1 wherein the phosphor powder is excited by a light source having a wavelength in the range of 370 to 470 nm. 如申請專利範圍第1項所述之一種具高演色性與高熱特性之紅色氮化物螢光粉,其中該螢光粉之主要放光波長係於613~633nm。A red nitride phosphor having high color rendering properties and high thermal properties as described in claim 1, wherein the phosphor has a main light emission wavelength of 613 to 633 nm. 如申請專利範圍第1項所述之一種具高演色性與高熱特性之紅色氮化物螢光粉,其中當x=1.5時,演色性Ra值為87。A red nitride fluorescent powder having high color rendering property and high thermal property as described in claim 1, wherein when x=1.5, the color rendering property Ra is 87. 如申請專利範圍第1項所述之一種具高演色性與高熱特性之紅色氮化物螢光粉,其中當x=1.5時,具最佳耐熱特性。A red nitride phosphor having high color rendering properties and high thermal properties as described in claim 1 wherein the optimum heat resistance is obtained when x = 1.5. 如申請專利範圍第1項所述之一種具高演色性與高熱特性之紅色氮化物螢光粉,其中該螢光粉係可於常壓或高壓下合成,其中高壓係指0.5MPa。A red nitride phosphor having high color rendering properties and high thermal properties as described in claim 1, wherein the phosphor powder can be synthesized under normal pressure or high pressure, wherein the high pressure means 0.5 MPa. 如申請專利範圍第1項所述之一種具高演色性與高熱特性之紅色氮化物螢光粉,其中該螢光粉係可調控放光波長位置與半高寬大小。A red nitride fluorescent powder having high color rendering property and high thermal property as described in claim 1, wherein the fluorescent powder system can adjust the wavelength of the light emitting wavelength and the full width at half maximum. 如申請專利範圍第1項所述之一種具高演色性與高熱特性之紅色氮化物螢光粉,其中該螢光粉之放光波長半高寬係為84nm至115nm。A red nitride fluorescent powder having high color rendering properties and high thermal characteristics as described in claim 1, wherein the phosphor powder has a half-height width of the light-emitting wavelength of 84 nm to 115 nm.
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WO2007148303A2 (en) * 2006-06-22 2007-12-27 Koninklijke Philips Electronics N.V. Low-pressure gas discharge lamp
WO2012165906A2 (en) * 2011-06-01 2012-12-06 한국화학연구원 Manufacturing method for silicon nitride fluorescent substance using metal silicon oxynitride fluorescent substance, halo-nitride red fluorescent substance, manufacturing method for same and light emitting element comprising same
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WO2007148303A2 (en) * 2006-06-22 2007-12-27 Koninklijke Philips Electronics N.V. Low-pressure gas discharge lamp
WO2012165906A2 (en) * 2011-06-01 2012-12-06 한국화학연구원 Manufacturing method for silicon nitride fluorescent substance using metal silicon oxynitride fluorescent substance, halo-nitride red fluorescent substance, manufacturing method for same and light emitting element comprising same
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