TWI507698B - Semiconductor device test apparatus and method thereof - Google Patents

Semiconductor device test apparatus and method thereof Download PDF

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TWI507698B
TWI507698B TW102119901A TW102119901A TWI507698B TW I507698 B TWI507698 B TW I507698B TW 102119901 A TW102119901 A TW 102119901A TW 102119901 A TW102119901 A TW 102119901A TW I507698 B TWI507698 B TW I507698B
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semiconductor component
processor interface
module
industry processor
component testing
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TW201447322A (en
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Che Yi Su
Chia Hung Tsai
Pin Yan Tsai
Po Kuan Sung
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King Yuan Electronics Co Ltd
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半導體元件測試裝置及其測試方法Semiconductor component testing device and testing method thereof

本發明係有關於一種半導體元件測試裝置及其測試方法,特別是有關於一種能夠高速傳輸及處理龐大的影像資料,又可隨著測試需求的改變來進行配備的替換或升級,且硬體相容性極高的半導體元件測試裝置及其測試方法。The invention relates to a semiconductor component testing device and a testing method thereof, in particular to a replacement or upgrade capable of transmitting and processing a large amount of image data at a high speed, and changing with the test requirements, and the hardware phase Highly capacitive semiconductor component test device and test method thereof.

本發明係有關於一種半導體元件測試裝置及其測試方法,特別是有關於一種能夠高速傳輸及處理龐大的影像資料,又可隨著測試需求的改變來進行配備的替換或升級,且硬體相容性極高的半導體元件測試裝置及其測試方法。The invention relates to a semiconductor component testing device and a testing method thereof, in particular to a replacement or upgrade capable of transmitting and processing a large amount of image data at a high speed, and changing with the test requirements, and the hardware phase Highly capacitive semiconductor component test device and test method thereof.

行動產業處理器介面(MobileIndustry Processor Interface,MIPI)取代了傳統平行資料介面而成為目前常用一種傳輸協定,其可將電子裝置內部的鏡頭、顯示、射頻介面等元件標準化已達到減少複雜度並增加相容性的目的,且行動產業處理器介面之傳輸頻率可以達到1.6GHz,因此其能夠傳送大量影像資料。也因為如此,行動產業處理器介面被大量應用於智慧型手機及其它各種行動上網設備上。而在利用自動測試設備(AutomaticTest Equipment,ATE)對一待測半導體元件進行影像測試時,通常是透過分析測試設備接收影像資料的正確性,來判斷待測半導體元件的功能是否正常,藉此分析待測半導體元件的好壞。然而,由於一般的邏輯測試機台並無法高速傳輸影像資料,也無法處理資料量龐大的影像資料,因此,若需要進行影像測試往往需要花費龐大的成本來添購硬體模組,且受限於模組所能提供的功能有限,往往測試的效能也往往不盡理想,例如,測試的涵蓋率不足等問題。The Mobile Industry Processor Interface (MIPI) has replaced the traditional parallel data interface and has become a commonly used transmission protocol. It can standardize the components such as lens, display and RF interface inside the electronic device to reduce complexity and increase phase. For the purpose of capacitiveness, the mobile industry processor interface can transmit up to 1.6 GHz, so it can transmit a large amount of image data. Because of this, the mobile industry processor interface is widely used in smart phones and other mobile Internet devices. When using an automatic test equipment (ATE) to perform image test on a semiconductor component to be tested, it is usually determined by analyzing the correctness of the image data received by the test equipment to determine whether the function of the semiconductor component to be tested is normal or not. The quality of the semiconductor component to be tested. However, since the general logic test machine cannot transmit image data at high speed and cannot process image data with a large amount of data, it is often costly to purchase a hardware module if the image test is required. The functions that the module can provide are limited, and often the performance of the test is often not ideal, for example, the coverage of the test is insufficient.

請參閱第1圖,係為習知技藝之半導體元件測試裝置之示意圖,此裝置為其中一種針對影像測試需求所特別設計以安裝於測試機台的裝置,其具備行動產業處理器介面模組111來解碼待測半導體元件之行動產業處理器介面訊號。如圖所示,半導體元件測試裝置1 包含探針介面板(ProberInterface Board,PIB)10及四個行動產業處理器介面模組111,此半導體元件測試裝置1主要利用探針介面板10擷取待測半導體元件之行動產業處理器介面訊號,再利用行動產業處理器介面模組111來解碼以進行後續的處理。這種方式雖然能夠處理影像訊號,但由於這種裝置需要個別設計以安裝於測試機台上,且其探針介面板10的造價十分昂貴,因此會大量增加設備的成本。另外,設置於探針介面板10的行動產業處理器介面模組111無法進行替換或升級,故無法因應不同的測試方式及測試需求,因此,此半導體元件測試裝置1的硬體相容性也無法符合現在的需求。再者,設置於探針介面板10的行動產業處理器介面模組111數量固定,且每個行動產業處理器介面模組111僅能支援二顆半導體元件的測試,因此,此半導體元件測試裝置1最多也僅能支援八顆半導體元件的測試。由上述可以,此半導體元件測試裝置1不但成本高昂,其硬體也無法依待測半導體元件的需求來進行替換或升級,相容性不佳,且也無法再增加同時測試的顆數,故其效能也受到很大的限制,而其它習知技藝之測試裝置也有著相同的問題。Please refer to FIG. 1 , which is a schematic diagram of a semiconductor component testing device of the prior art. The device is one of the devices specially designed for image testing needs to be mounted on a testing machine, and has a mobile industry processor interface module 111. The action industry processor interface signal for decoding the semiconductor component to be tested. As shown in the figure, the semiconductor component testing device 1 includes a probe interface panel (PIB) 10 and four mobile industry processor interface modules 111. The semiconductor component testing device 1 is mainly used by the probe interface panel 10 The mobile industry processor interface signal of the semiconductor component is measured and then decoded by the mobile industry processor interface module 111 for subsequent processing. Although this method can process the image signal, since the device needs to be individually designed to be mounted on the test machine, and the probe interface panel 10 is expensive, the cost of the device is greatly increased. In addition, the mobile industry processor interface module 111 disposed on the probe interface panel 10 cannot be replaced or upgraded, and thus cannot meet different test methods and test requirements. Therefore, the hardware compatibility of the semiconductor component test device 1 is also Can not meet the current needs. Furthermore, the number of mobile industry processor interface modules 111 disposed on the probe interface panel 10 is fixed, and each of the mobile industry processor interface modules 111 can only support testing of two semiconductor components. Therefore, the semiconductor component testing device 1 can only support up to eight semiconductor components. As described above, the semiconductor device test apparatus 1 is not only costly, but the hardware cannot be replaced or upgraded according to the requirements of the semiconductor component to be tested, the compatibility is not good, and the number of simultaneous tests cannot be increased. Its performance is also greatly limited, and other test devices of the prior art have the same problem.

因此,如何提出一種半導體元件測試裝置,能夠有效改善習知技藝之半導體元件測試裝置在如硬體相容性不佳,影像測試資料庫受限等情況,已成為一個刻不容緩的問題。Therefore, how to propose a semiconductor component testing device, which can effectively improve the semiconductor component testing device of the prior art, such as poor hardware compatibility and limited image testing database, has become an urgent problem.

有鑑於上述習知技藝之問題,本發明之其中一目的就是在提供一種半導體元件測試裝置及其測試方法,以解決習知技藝之半導體元件測試裝置無法高速傳輸及處理大量的影像資料,硬體相容性不佳,測試效能低落的問題。In view of the above-mentioned problems of the prior art, one of the objects of the present invention is to provide a semiconductor device testing device and a testing method thereof, which can solve the problem that the semiconductor component testing device of the prior art cannot transmit and process a large amount of image data at high speed, hardware. Poor compatibility and low test performance.

根據本發明之其中一目的,提出一種半導體元件測試裝置,此裝置可連結於半導體元件測試介面,半導體元件測試介面可擷取至少一待測半導體元件之行動產業處理器介面訊號,此半導體元件測試裝置可包含測試載板及至少一行動產業處理器介面模組。測試載板可接收該些行動產業處理器介面訊號。行動產業處理器介面模組可設置於測試載板,並對該些行動產業處理器介面訊號進行解碼以產生經解碼之影像資料,以備進行後續的影像分析。According to one of the objects of the present invention, a semiconductor component testing device is provided. The device can be connected to a semiconductor component testing interface, and the semiconductor component testing interface can capture at least one mobile industry processor interface signal of the semiconductor component to be tested. The device can include a test carrier and at least one mobile industry processor interface module. The test carrier can receive the mobile industry processor interface signals. The mobile industry processor interface module can be disposed on the test carrier and decode the mobile industry processor interface signals to generate decoded image data for subsequent image analysis.

根據本發明之其中一目的,再提出一種半導體元件測試方法,可應用於半導體元件測試裝置以對至少一待測半導體元件進行影像訊號之測試,此半導體元件測試方法可包含下列步驟:利用半導體元件測試介面擷取該些待測半導體元件之行動產業處理器介面訊號;透過半導體元件測試裝置之測試載板接收該些行動產業處理器介面訊號;以及經由半導體元件測試裝置之至少一行動產業處理器介面模組對該些行動產業處理器介面訊號進行解碼以產生經解碼之影像資料,以備進行後續的影像分析。According to one of the objects of the present invention, a semiconductor component testing method can be applied to a semiconductor component testing device for performing image signal testing on at least one semiconductor component to be tested. The semiconductor component testing method can include the following steps: using a semiconductor component The test interface captures the action industry processor interface signals of the semiconductor components to be tested; receives the mobile industry processor interface signals through the test carrier of the semiconductor component test device; and at least one mobile industry processor via the semiconductor component test device The interface module decodes the mobile industry processor interface signals to generate decoded image data for subsequent image analysis.

較佳地,半導體元件測試裝置更可包含緩衝模組,其可設置於測試載板,並對該些影像資料進行存取及運算程序,緩衝模組可連接至影像處理電腦.影像處理電腦可利用內建之影像處理函式庫(IP Library)來分析判讀該些影像資料以產生分析結果,並將該分析結果傳送至主電腦以顯示該分析結果。Preferably, the semiconductor component testing device further includes a buffer module, which can be disposed on the test carrier and accesses and operates the image data, and the buffer module can be connected to the image processing computer. The image processing computer can use the built-in image processing library (IP Library) to analyze and interpret the image data to generate an analysis result, and transmit the analysis result to the host computer to display the analysis result.

較佳地,各個該行動產業處理器介面模組更可包含影像處理模組,其可利用可程式化閘陣列(Field Programmable Gate Array,FPGA)來實現,此影像處理模組可對該些行動產業處理器介面訊號進行解碼,再利用內建之影像處理函式庫來分析判讀該些影像資料以產生分析結果,並將分析結果傳送至主電腦以顯示分析結果。Preferably, each of the mobile industry processor interface modules further includes an image processing module, which can be implemented by using a Field Programmable Gate Array (FPGA), and the image processing module can perform the operations. The industrial processor interface signal is decoded, and the built-in image processing library is used to analyze and interpret the image data to generate an analysis result, and the analysis result is transmitted to the host computer to display the analysis result.

較佳地,半導體元件測試裝置更可包含複數個測試插槽,複數個該測試載板可替換地設置於該些測試插槽。Preferably, the semiconductor component testing device further includes a plurality of test slots, and the plurality of test carriers are alternatively disposed in the test slots.

較佳地,該些行動產業處理器介面模組可解碼多個待測半導體元件之該些行動產業處理器介面訊號,且可透過緩衝模組連接至複數個影像處理電腦。Preferably, the mobile industry processor interface module can decode the mobile industry processor interface signals of the plurality of semiconductor components to be tested, and can be connected to the plurality of image processing computers through the buffer module.

較佳地,各個行動產業處理器介面模組可替換地設置於各個測試載板之上。Preferably, each of the mobile industry processor interface modules is alternatively disposed on each test carrier.

較佳地,半導體元件測試裝置更可包含差動緩衝模組,可將該些影像資料轉換為差動訊號,再傳送至影像處理電腦。Preferably, the semiconductor component testing device further includes a differential buffer module, and the image data can be converted into a differential signal and then transmitted to the image processing computer.

較佳地,行動產業處理器介面模組更可包含解碼模組,解碼模組可為一可程式化閘陣列模組,並對該些行動產業處理器介面訊號進行解碼。Preferably, the mobile industry processor interface module further includes a decoding module, and the decoding module can be a programmable gate array module and decode the mobile industry processor interface signals.

較佳地,緩衝模組可為一可程式化閘陣列模組。Preferably, the buffer module can be a programmable gate array module.

較佳地,存取及運算程序可為對該些影像資料之垂直同步、水平同步及時脈訊號進行邏輯閘運算。Preferably, the access and operation program can perform a logic gate operation on the vertical synchronization, horizontal synchronization and time pulse signals of the image data.

根據本發明之其中一目的,又提出一種半導體元件測試方法,可應用於半導體元件測試裝置以對至少一待測半導體元件進行影像訊號之測試,此半導體元件測試方法可包含下列步驟:利用半導體元件測試介面擷取該些待測半導體元件之行動產業處理器介面訊號;將半導體元件測試裝置之測試載板外接於外部之行動產業處理器介面模組;利用行動產業處理器介面模組接收並解碼該些行動產業處理器介面訊號以產生經解碼之影像資料;由半導體元件測試裝置之緩衝模組對該些影像資料進行存取及運算程序;透過一影像處理電腦分析及判讀該些影像資料以產生分析結果;以及,經由一主電腦顯示分析結果,以供分析該些待測半導體元件之好壞。According to another aspect of the present invention, a semiconductor component testing method is further applicable to a semiconductor component testing apparatus for performing image signal testing on at least one semiconductor component to be tested. The semiconductor component testing method may include the following steps: using a semiconductor component The test interface captures the action industry processor interface signals of the semiconductor components to be tested; the test carrier of the semiconductor component test device is externally connected to the external mobile industry processor interface module; and the mobile industry processor interface module receives and decodes The action industry processor interface signals are used to generate decoded image data; the image data is accessed and operated by a buffer module of the semiconductor component test device; and the image data is analyzed and interpreted by an image processing computer. The analysis result is generated; and the analysis result is displayed via a host computer for analyzing the quality of the semiconductor components to be tested.

承上所述,依本發明之半導體元件測試裝置及其測試方法,其可具有一或多個下述優點:In view of the above, the semiconductor component testing apparatus and the testing method thereof according to the present invention may have one or more of the following advantages:

(1) 本發明之一實施例中利用行動產業處理器介面模組解碼待測半導體元件之行動產業處理器介面訊號,並利用影像處理電腦分析並判讀解碼之影像資料。(1) In one embodiment of the present invention, an action industry processor interface module is used to decode an action industry processor interface signal of a semiconductor component to be tested, and an image processing computer is used to analyze and interpret the decoded image data.

(2) 本發明之一實施例中,半導體元件測試裝置具備多個測試插槽,因此可以設置多個測試載板,各個測試載板更可設置二個以上的行動產業處理器介面模組,因此可以依需求擴充,故半導體元件測試裝置可支援多顆半導體元件同測,大幅提高了裝置的效能。(2) In one embodiment of the present invention, the semiconductor component testing device is provided with a plurality of test slots, so that a plurality of test carriers can be disposed, and each test carrier can be provided with more than two mobile industry processor interface modules. Therefore, it can be expanded according to requirements, so the semiconductor component test device can support multiple semiconductor components to be tested, which greatly improves the performance of the device.

(3) 本發明之一實施例中,設置於測試載板之行動產業處理器介面模組可替換,因此可以依照不同的測試方式及測試需求來更換或升級行動產業處理器介面模組,故其可應付各種不同的情況,因此也提高了測試裝置的硬體相容性。(3) In an embodiment of the present invention, the action industry processor interface module disposed on the test carrier can be replaced, so that the action industry processor interface module can be replaced or upgraded according to different test methods and test requirements. It can handle a variety of different situations and therefore also improves the hardware compatibility of the test device.

(4) 本發明之一實施例中,影像資料可透過一差動緩衝模組轉換為差動訊號再傳送至影像處理電腦,可增強訊號之完整性。(4) In an embodiment of the present invention, image data can be converted into a differential signal by a differential buffer module and then transmitted to an image processing computer to enhance signal integrity.

(5) 本發明之一實施例中,半導體元件測試裝置之測試載板不但可以根據不同測試方式或測試需求選擇適合的行動產業處理器介面模組,更可直接外接一外部之行動產業處理器介面模組以處理行動產業處理器介面訊號,因此使用上具備較佳的彈性。(5) In one embodiment of the present invention, the test carrier of the semiconductor component test device can select a suitable mobile industry processor interface module according to different test methods or test requirements, and can directly connect an external mobile industry processor. The interface module handles the mobile industry processor interface signal, so it has better flexibility in use.

(6)本發明之一實施例中,半導體元件測試裝置之行動產業處理器介面模組中更可包含影像處理模組,其可利用可程式化閘陣列來實現多個硬體電路,並利用內建之影像處理函式庫來分析判讀該些影像資料以實現多個硬體電路的平行運算,藉此產生分析結果,如此可大幅加速影像處理分析的速度。(6) In one embodiment of the present invention, the action industry processor interface module of the semiconductor component test device may further include an image processing module, which can implement a plurality of hardware circuits by using a programmable gate array, and utilize The built-in image processing library analyzes and interprets the image data to realize parallel operation of multiple hardware circuits, thereby generating analysis results, which can greatly accelerate the speed of image processing analysis.

(7)本發明之一實施例中,由於半導體元件測試裝置之行動產業處理器介面模組中可直接整合影像處理模組,因此若僅需要執行標準測試項目,則不需要外接其它的電腦設備,因此可大幅地減少測試所需要的成本。(7) In one embodiment of the present invention, since the image processing module can be directly integrated in the mobile industry processor interface module of the semiconductor component testing device, if only standard test items need to be executed, no external computer device is needed. Therefore, the cost required for testing can be greatly reduced.

以下將參照相關圖式,說明依本發明之半導體元件測試裝置及其測試方法之較佳實施例,為使便於理解,下述實施例中之相同元件係以相同之符號標示來說明。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the preferred embodiments of the semiconductor device test apparatus and the test method thereof according to the present invention will be described with reference to the accompanying drawings. For the sake of understanding, the same components in the following embodiments are denoted by the same reference numerals.

請參閱第2圖,係為本發明之半導體元件測試裝置之方塊圖。如圖中所示,半導體元件測試裝置2可包含測試載板21、行動產業處理器介面模組211、緩衝模組212。Please refer to FIG. 2, which is a block diagram of a semiconductor component testing device of the present invention. As shown in the figure, the semiconductor component testing device 2 can include a test carrier 21, a mobile industry processor interface module 211, and a buffer module 212.

其中,半導體元件測試介面20可擷取待測半導體元件24之行動產業處理器介面訊號241以執行影像訊號的測試。而半導體元件測試裝置2之測試載板21可連接至半導體元件測試介面20,並可接收待測半導體元件24之行動產業處理器介面(Mobile Industry Processor Interface,MIPI)訊號241,再利用設置於測試載板21之行動產業處理器介面模組211對行動產業處理器介面訊號241進行解碼,以產生經解碼之影像資料2111。而設置於測試載板21之緩衝模組212則可接收影像資料2111,並對其進行存取及運算程序2121。在一實施例中,此存取及運算程序2121可以為對影像資料2111之垂直同步(V-Sync)、水平同步(H-Sync)及時脈(Clock)等訊號執行邏輯閘運算。The semiconductor component test interface 20 can capture the action industry processor interface signal 241 of the semiconductor component 24 to be tested to perform image signal testing. The test carrier 21 of the semiconductor component testing device 2 can be connected to the semiconductor component test interface 20, and can receive the Mobile Industry Processor Interface (MIPI) signal 241 of the semiconductor component 24 to be tested. The mobile industry processor interface module 211 of the carrier 21 decodes the mobile industry processor interface signal 241 to produce decoded image data 2111. The buffer module 212 disposed on the test carrier 21 can receive the image data 2111 and access and calculate the program 2121. In an embodiment, the access and operation program 2121 may perform a logic gate operation on signals such as vertical synchronization (V-Sync), horizontal synchronization (H-Sync), and clock (Clock) of the image data 2111.

在完成了存取及運算程序2121後,半導體元件測試裝置2可將影像資料2111傳送至影像處理電腦22,並利用內建之影像處理函式庫(IP Library)以進行影像資料2111的分析及判讀,藉此產生分析結果221,此影像處理電腦22可為一般的測試機電腦或是其它能夠進行影像處理的設備。最後,分析結果221可藉由主電腦23顯示,以對待測半導體元件24之好壞進行分析。After the access and operation program 2121 is completed, the semiconductor component testing device 2 can transmit the image data 2111 to the image processing computer 22, and use the built-in image processing library (IP Library) to analyze the image data 2111 and The interpretation is performed to generate an analysis result 221, and the image processing computer 22 can be a general test machine computer or other device capable of image processing. Finally, the analysis result 221 can be displayed by the host computer 23 to analyze the quality of the semiconductor component 24 to be tested.

值得一提的是,習知技藝之半導體元件測試裝置大都並非專門為影像處理而設計,因此無法處理大量的影像資料,若欲提高對影像資料的處理能力,則需要耗費大量的成本來購置設備。相反的,由上述可知,在本實施例中,半導體元件測試裝置之測試載板可緩衝影像資料,而測試載板更可連結於影像處理電腦以進行影像資料的分析及判讀,因此可以高速傳輸影像資料,並處理大量的影像資料,且能大幅降低設備的成本,因此本實施例確實有效地改善了習知技藝之缺點。It is worth mentioning that most of the semiconductor component testing devices of the prior art are not designed for image processing, so they cannot process a large amount of image data. If you want to improve the processing ability of image data, it will cost a lot of money to purchase equipment. . On the contrary, it can be seen from the above that in the present embodiment, the test carrier of the semiconductor component test device can buffer the image data, and the test carrier can be connected to the image processing computer for image data analysis and interpretation, thereby enabling high-speed transmission. The image data, and processing a large amount of image data, can greatly reduce the cost of the device, so this embodiment does effectively improve the shortcomings of the prior art.

請參閱第3圖,係為本發明之半導體元件測試裝置之第一實施例之示意圖。如圖所示,在本實施例中,半導體元件測試裝置3更可具備多個測試插槽35,而多個測試載板31則可設置於該些插槽35並可隨時拆裝,故半導體元件測試裝置3可同時設置多個測試載板31,另外,各個測試載板31則可設置二個以上的行動產業處理器介面模組,如此一來,使用者則可依照測試上的需求增加測試載板31的數量,以達到多顆半導體元件同時測試的目的。Please refer to FIG. 3, which is a schematic view of a first embodiment of a semiconductor component testing device of the present invention. As shown in the figure, in the embodiment, the semiconductor component testing device 3 can further include a plurality of test sockets 35, and a plurality of test carriers 31 can be disposed in the slots 35 and can be detached at any time. The component testing device 3 can simultaneously set a plurality of test carriers 31. In addition, each test carrier 31 can be provided with more than two mobile industry processor interface modules, so that the user can increase according to the test requirements. The number of the carrier plates 31 is tested to achieve the purpose of simultaneous testing of a plurality of semiconductor components.

更進一步的,在本發明的一實施例中,半導體元件測試裝置之測試載板上所設置的行動產業處理器介面模組(子板)可替換。因此,使用者可根據測試的方式或測試上的需求來對行動產業處理器介面模組進行替換或升級,更可以自行設計所需要的行動產業處理器介面模組。因此,在本實施例中,半導體元件測試裝置的硬體相容性也獲得了有效的提升,且硬體成本較低,更可快速變更多種測試組合,增加了使用上的彈性。Further, in an embodiment of the invention, the mobile industry processor interface module (sub-board) provided on the test carrier of the semiconductor component testing device can be replaced. Therefore, the user can replace or upgrade the mobile industry processor interface module according to the test method or the test requirements, and can also design the required mobile industry processor interface module. Therefore, in the present embodiment, the hardware compatibility of the semiconductor element test device is also effectively improved, and the hardware cost is low, and the plurality of test combinations can be quickly changed, thereby increasing the flexibility in use.

請參閱第4圖,係為本發明之半導體元件測試裝置之第二實施例之示意圖。首先,半導體元件測試介面40可擷取數個待測半導體元件44之行動產業處理器介面(Mobile Industry Processor Interface,MIPI)訊號,再經由Hi-Fix纜線47傳送至測試載板41,測試載板41內的MIPI子板411則接收MIPI訊號,並可利用設置於其中的第一可程式化閘陣列(Field Programmable Gate Array,FPGA)模組4112對MIPI訊號進行解碼以產生影像資料。MIPI子板411中之隨機存取記憶體4113則可用於暫存資料。其中,在本實施例中,半導體元件測試介面40可為包含針測卡(Probe Card)等元件的針測系統。Please refer to FIG. 4, which is a schematic view showing a second embodiment of the semiconductor component testing device of the present invention. First, the semiconductor component test interface 40 can capture a number of Mobile Industry Processor Interface (MIPI) signals of the semiconductor component 44 to be tested, and then transmit it to the test carrier 41 via the Hi-Fix cable 47. The MIPI sub-board 411 in the board 41 receives the MIPI signal and can decode the MIPI signal by using a first Field Programmable Gate Array (FPGA) module 4112 disposed therein to generate image data. The random access memory 4113 in the MIPI daughter board 411 can be used to temporarily store data. In this embodiment, the semiconductor component test interface 40 can be a pinhole measurement system including components such as a probe card.

解碼後之影像資料則可傳送至第二可程式化閘陣列模組412進行存取運算,其中包含垂直同步、水平同步及時脈等訊號的邏輯閘運算,完成後再將影像資料由差動緩衝模組414轉換為差動訊號,並分別經由接點413透過差動纜線傳送至影像處理電腦42,並利用其內建之影像處理函式庫來進行圖像的分析及判讀以獲得分析結果。各個影像處理電腦42所產生的分析結果則可透過路由器46傳送至主電腦43以分析數個待測半導體元件44的好壞。The decoded image data can be transmitted to the second programmable gate array module 412 for access operation, which includes logic gate operations of vertical synchronization, horizontal synchronization, time and pulse, etc., and then the image data is buffered by differential buffering. The module 414 is converted into a differential signal and transmitted to the image processing computer 42 through the differential cable via the contact 413, and uses the built-in image processing library for image analysis and interpretation to obtain an analysis result. . The analysis results generated by the respective image processing computers 42 can be transmitted to the host computer 43 via the router 46 to analyze the quality of the plurality of semiconductor elements 44 to be tested.

請參閱第5圖,係為本發明之半導體元件測試裝置之第二實施例之流程圖。本實施例包含下列步驟:Please refer to FIG. 5, which is a flow chart of a second embodiment of the semiconductor component testing apparatus of the present invention. This embodiment includes the following steps:

在步驟S51中,由半導體元件測試介面擷取數個待測半導體元件之MIPI訊號,再經由Hi-Fix纜線傳送至測試載板之MIPI子板。In step S51, the MIPI signals of the plurality of semiconductor components to be tested are extracted by the semiconductor component test interface, and then transmitted to the MIPI daughter board of the test carrier via the Hi-Fix cable.

在步驟S52中,利用設置於MIPI子板中之第一可程式化閘陣列模組解碼MIPI訊號以產生影像資料。In step S52, the MIPI signal is decoded by the first programmable gate array module disposed in the MIPI daughter board to generate image data.

在步驟S53中,透過測試載板之第二可程式化閘陣列模組對影像資料進行的存取運算。In step S53, the access operation of the image data is performed through the second programmable gate array module of the test carrier.

在步驟S54中,經由差動緩衝模組將影像資料轉換為差動訊號,再經由差動纜線傳送至影像處理電腦。In step S54, the image data is converted into a differential signal via the differential buffer module, and then transmitted to the image processing computer via the differential cable.

在步驟S55中,利用影像處理電腦分析及判讀影像資料以產生分析結果。In step S55, the image data is analyzed and interpreted by the image processing computer to generate an analysis result.

在步驟S56中,藉由主電腦顯示此分析結果。In step S56, the analysis result is displayed by the host computer.

請參閱第6圖,係為本發明之半導體元件測試裝置之第三實施例之示意圖。如圖所示,在本實施例中,半導體元件測試介面60也可更包含測試插座(Socket),其可電性連結於測試載板61,並可用以測試封裝完成之半導體元件64 ,測試插座中設置有複數個探針以接觸待測半導體元件64並擷取其行動產業處理器介面訊號以進行測試,而本實施例其餘之運作步驟則與第二實施例相同,故在此不多加贅述。而以上僅為舉例,半導體元件測試介面60還可包含其它形式,本發明並不以此為限。Please refer to FIG. 6, which is a schematic view of a third embodiment of the semiconductor component testing apparatus of the present invention. As shown in the figure, in the embodiment, the semiconductor component test interface 60 may further include a test socket (Socket), which may be electrically connected to the test carrier 61, and may be used to test the packaged semiconductor component 64 and the test socket. A plurality of probes are disposed to contact the semiconductor component 64 to be tested and the mobile industry processor interface signal is taken for testing, and the remaining operational steps of the embodiment are the same as those of the second embodiment, so no further description is provided herein. . The above is only an example, and the semiconductor component test interface 60 may also include other forms, and the invention is not limited thereto.

請參閱第7圖,係為本發明之半導體元件測試裝置之第四實施例之示意圖。在本實施例中,係利用一外接之外部MIPI解碼模組來處理MIPI訊號。同樣的,半導體元件測試介面70可擷取數個待測半導體元件74之MIPI訊號,而此MIPI訊號則可被直接傳送至一外接的MIPI解碼模組來對MIPI訊號進行接收並解碼出影像資料。接著,影像資料則被傳送至測試載板71,並經過可程式化閘陣列模組712進行存取及運算後,再由差動緩衝模組(未繪於圖中)先轉換為差動訊號,之後再經由接點713傳送至影像處理電腦72,並利用內建之影像處理函式庫來進行影像分析以獲得分析結果。所有的分析結果同樣可透過路由器76傳送至主電腦73以分析待測半導體元件74的好壞。Please refer to FIG. 7, which is a schematic view of a fourth embodiment of the semiconductor component testing apparatus of the present invention. In this embodiment, the MIPI signal is processed by an external external MIPI decoding module. Similarly, the semiconductor component test interface 70 can capture a plurality of MIPI signals of the semiconductor component 74 to be tested, and the MIPI signal can be directly transmitted to an external MIPI decoding module to receive and decode the MIPI signal. . Then, the image data is transmitted to the test carrier 71, and after being accessed and operated by the programmable gate array module 712, the differential buffer module (not shown) is first converted into a differential signal. Then, it is transmitted to the image processing computer 72 via the contact 713, and the built-in image processing library is used for image analysis to obtain the analysis result. All analysis results can also be transmitted to the host computer 73 via the router 76 to analyze the quality of the semiconductor component 74 to be tested.

值得一提的是,習知技藝之半導體元件測試裝置無法隨時依測試需求對MIPI模組進行替換或升級,而同測數的數量也是固定的,因此其相容性與效能均受到極大的限制。另外,針對MIPI訊號測試需求的測試裝置造價昂貴,因此成本極高。相反的,以上所列舉的實施例可以看出,半導體元件測試裝置之測試載板可做為一個橋接的介面,並根據不同的測試需求選擇不同的D-PHY解碼模組,又或是連結一外部解碼模組,解碼後的影像資料可以通過測試載板傳送至影像處理電腦進行分析,因此,這樣的設計使測試裝置能夠具有很高的訊號格式相容性,可節省測試成本。It is worth mentioning that the semiconductor component testing device of the prior art cannot replace or upgrade the MIPI module at any time according to the test requirements, and the number of the same measurement is also fixed, so the compatibility and performance are greatly limited. . In addition, test devices for MIPI signal testing requirements are expensive and therefore extremely costly. On the contrary, as can be seen from the above-exemplified embodiments, the test carrier of the semiconductor component test device can be used as a bridge interface, and different D-PHY decoding modules can be selected according to different test requirements, or a link is used. The external decoding module can decode the decoded image data to the image processing computer through the test carrier board. Therefore, the design enables the test device to have high signal format compatibility and save test cost.

另外,若需要進行多顆同時測試,更可以透過增設測試載板的數量來達成,使效能大幅增加。再者,由於影像訊號可透過差動緩衝模組轉換為差動訊號再經由差動纜線傳送至影像處理電腦,而差動纜線成本較低,故可進一步降低測試設備所需的成本。In addition, if multiple simultaneous tests are required, it can be achieved by adding the number of test carriers, which greatly increases the performance. Furthermore, since the image signal can be converted into a differential signal through the differential buffer module and then transmitted to the image processing computer via the differential cable, the differential cable has a lower cost, thereby further reducing the cost of the test device.

請參閱第8圖,係為本發明之半導體元件測試裝置之第四實施例之流程圖。本實施例包含下列步驟:Please refer to FIG. 8, which is a flow chart of a fourth embodiment of the semiconductor component testing apparatus of the present invention. This embodiment includes the following steps:

在步驟S81中,由半導體元件測試介面擷取數個待測半導體元件之MIPI訊號,再傳送至一外接的外部MIPI解碼模組。In step S81, the MIPI signals of the semiconductor components to be tested are extracted by the semiconductor component test interface, and then transmitted to an external external MIPI decoding module.

在步驟S82中,利用外部MIPI解碼模組解碼MIPI訊號以產生影像資料。In step S82, the MIPI signal is decoded by the external MIPI decoding module to generate image data.

在步驟S83中,透過測試載板之可程式化閘陣列模組對影像資料進行存取及運算。In step S83, the image data is accessed and operated through the programmable gate array module of the test carrier.

在步驟S84中,經由差動緩衝模組將影像資料轉換為差動訊號,再經由差動纜線傳送至影像處理電腦。In step S84, the image data is converted into a differential signal via the differential buffer module, and then transmitted to the image processing computer via the differential cable.

在步驟S85中,利用影像處理電腦分析及判讀影像資料以產生分析結果。In step S85, the image data is analyzed and interpreted by the image processing computer to generate an analysis result.

在步驟S86中,藉由主電腦顯示此分析結果。In step S86, the analysis result is displayed by the host computer.

請參閱第9圖,係為本發明之半導體元件測試裝置之第五實施例之示意圖。同樣的,半導體元件測試介面90可擷取數個待測半導體元件94之行動產業處理器介面訊號,再傳送至測試載板91,測試載板91內的MIPI子板911則接收MIPI訊號。而在本實施例中,MIPI子板911中設置的第一可程式化閘陣列模組9112可為影像處理模組,其不僅可對MIPI訊號進行解碼以產生影像資料,更可以利用其中內建的影像處理函式庫對影像進行分析判讀,以產生分析結果。在本實施例中,第一可程式化閘陣列模組9112可利用內建之影像函式庫對解碼後的影像資料進行畫素之平均值的分析,以判斷影像資料的畫素之平均值是否符合預設之上限及下限,以產生分析結果,並利用主電腦93顯示分析結果。當然,影像處理函式庫可視實際的需求來進行選擇,本發明並不以此為限。Please refer to FIG. 9, which is a schematic view showing a fifth embodiment of the semiconductor component testing device of the present invention. Similarly, the semiconductor component test interface 90 can capture the action industry processor interface signals of the plurality of semiconductor components 94 to be tested, and then transmit them to the test carrier 91. The MIPI daughter board 911 in the test carrier 91 receives the MIPI signal. In this embodiment, the first programmable gate array module 9112 provided in the MIPI sub-board 911 can be an image processing module, which can not only decode the MIPI signal to generate image data, but also can be utilized therein. The image processing library analyzes and interprets the image to generate an analysis result. In this embodiment, the first programmable gate array module 9112 can analyze the average value of the pixels of the decoded image data by using the built-in image library to determine the average value of the pixels of the image data. Whether the upper limit and the lower limit of the preset are met to generate an analysis result, and the analysis result is displayed by the host computer 93. Of course, the image processing library can be selected according to actual needs, and the present invention is not limited thereto.

值得一提的是,本實施例利用可程式化閘陣列來實現MIPI子板中的影像處理模組,其不但可以對MIPI訊號進行解碼以產生影像資料,更可以利用其中預設的影像處理函式庫直接對影像進行分析判讀,使MIPI子板同時具備解碼及影像處理的功能,故不需要如同前述實施例需要外接影像處理電腦。由於利用可程式化閘陣列可實現多個硬體電路,因此可以搭配特定的影像處理函式庫來分析判讀經分割的影像,藉此實現多個硬體電路的平行運算,如此則可大幅地加速影像處理的速度,上述的方式可以利用硬體語言來實現。此外,若半導體元件測試裝置僅需要執行標準測試項目,則不需要外接其它的電腦設備,因此可大幅地減少測試所需要的成本。It is worth mentioning that the embodiment uses a programmable gate array to implement an image processing module in the MIPI daughter board, which can not only decode the MIPI signal to generate image data, but also utilize the preset image processing function. The library directly analyzes and interprets the image, so that the MIPI daughter board has the functions of decoding and image processing at the same time, so there is no need for an external image processing computer as in the foregoing embodiment. Since a plurality of hardware circuits can be realized by using a programmable gate array, a specific image processing library can be used to analyze and interpret the divided images, thereby realizing parallel operations of a plurality of hardware circuits, so that To speed up image processing, the above method can be implemented using a hardware language. In addition, if the semiconductor component test device only needs to perform standard test items, no external computer equipment is required, so the cost required for the test can be greatly reduced.

而前述實施例係利用外接的影像處理電腦來對影像資料進行分析判讀,而此方式可利用C語言來實現,雖然C語言屬於較高階的語言,其具備較高的靈活性,但是其並無法達成對經分割的影像執行平行運算的功能。因此,利用本實施例的方式可以更進一步的加速影像處理的速度。The foregoing embodiment uses an external image processing computer to analyze and interpret the image data, and the method can be implemented by using the C language. Although the C language belongs to a higher-order language, it has high flexibility, but it cannot A function of performing parallel operations on the divided images is achieved. Therefore, the speed of image processing can be further accelerated by the method of the embodiment.

儘管前述在說明本發明之半導體元件測試裝置的過程中,亦已同時說明本發明之半導體元件測試方法的概念,但為求清楚起見,以下仍然另繪示流程圖以詳細說明。Although the concept of the semiconductor component testing method of the present invention has been simultaneously described in the description of the semiconductor component testing apparatus of the present invention, for the sake of clarity, the flowchart will be further described below in detail.

請參閱第10圖,係為本發明之半導體元件測試方法之流程圖,此方法可應用於半導體元件測試裝置以對至少一待測半導體元件進行影像訊號之測試,此方法包含下列步驟:Please refer to FIG. 10 , which is a flow chart of a semiconductor component testing method according to the present invention. The method can be applied to a semiconductor component testing device for performing image signal testing on at least one semiconductor component to be tested. The method comprises the following steps:

在步驟S101中,利用半導體元件測試介面擷取至少一待測半導體元件之行動產業處理器介面訊號。In step S101, the semiconductor device test interface is used to capture at least one mobile industry processor interface signal of the semiconductor component to be tested.

在步驟S102中,透過半導體元件測試裝置之測試載板接收該些行動產業處理器介面訊號。In step S102, the mobile industry processor interface signals are received through the test carrier of the semiconductor component test device.

在步驟S103中,經由半導體元件測試裝置之行動產業處理器介面模組對該些行動產業處理器介面訊號進行解碼以產生經解碼之影像資料。In step S103, the mobile industry processor interface signals are decoded by the mobile industry processor interface module of the semiconductor component testing device to generate decoded image data.

在步驟S104中,由半導體元件測試裝置之緩衝模組對該些影像資料進行存取及運算程序。In step S104, the image data is accessed and operated by the buffer module of the semiconductor component testing device.

在步驟S105中,利用一影像處理電腦分析判讀該些影像資料以產生分析結果。In step S105, the image data is interpreted by an image processing computer to generate an analysis result.

在步驟S106中,由一主電腦顯示分析結果,以供分析該些待測半導體元件之好壞。In step S106, the analysis result is displayed by a host computer for analyzing the quality of the semiconductor components to be tested.

本發明之半導體元件測試方法的詳細說明以及實施方式已於前面敘述本發明之半導體元件測試裝置時描述過,在此為了簡略說明便不再重覆敘述。The detailed description and embodiments of the semiconductor element test method of the present invention have been described above in connection with the semiconductor element test apparatus of the present invention, and will not be repeatedly described herein for the sake of brevity.

綜上所述,本發明之一實施例揭露半導體元件測試裝置可以使用行動產業處理器介面模組解碼待測半導體元件之行動產業處理器介面訊號,之後再利用影像處理電腦分析並判讀解碼之影像資料,因此不但可以處理資料量龐大的影像資料,也可以降低測試成本。另外,本發明之一實施例揭露半導體元件測試裝置可具備多個測試插槽以多個測試載板,各個測試載板也可設置二個以上的行動產業處理器介面模組,因此不但可擴充,也同時可支援多顆半導體元件同時測試,故裝置的測試效能獲得了提升。又,本發明之一實施例中揭露了設置於半導體元件測試裝置之測試載板之行動產業處理器介面模組可替換,因此可以視情況進行更換或升級,使半導體元件測試裝置可應付各種情況,也提高了其硬體相容性。而本發明之一實施例揭示半導體元件測試裝置可將解碼後之影像資料先轉換為差動訊號再傳送至影像處理電腦,故可降低I/O線之頻寬需求並減少線材成本。此外,本發明之一實施例中揭示半導體元件測試裝置之測試載板可以根據需求選擇欲設置的行動產業處理器介面模組,也可直接外接一外部之行動產業處理器介面模組,使半導體元件測試裝置使用上極具彈性。而本發明之一實施例中,半導體元件測試裝置之行動產業處理器介面模組中更可包含影像處理模組,其可利用可程式化閘陣列來實現多個硬體電路,並利用內建之影像處理函式庫來分析判讀該些影像資料以實現多個硬體電路的平行運算,藉此產生分析結果,如此可大幅加速影像處理分析的速度,而若是半導體元件測試裝置僅需要執行標準測試項目,則不需要外接其它的電腦設備,因此可大幅地減少測試所需要的成本。In summary, an embodiment of the present invention discloses that a semiconductor component testing device can use a mobile industry processor interface module to decode an action industry processor interface signal of a semiconductor component to be tested, and then use an image processing computer to analyze and interpret the decoded image. Data, therefore, can not only deal with a large amount of data, but also reduce the cost of testing. In addition, an embodiment of the present invention discloses that a semiconductor component testing device can be provided with a plurality of test slots for multiple test carriers, and each test carrier can also be provided with more than two mobile industry processor interface modules, so that not only can the expansion be expanded. At the same time, it can support multiple semiconductor components to be tested at the same time, so the test performance of the device has been improved. Moreover, in an embodiment of the present invention, the mobile industry processor interface module disposed on the test carrier of the semiconductor component testing device is replaceable, and thus can be replaced or upgraded as needed, so that the semiconductor component testing device can cope with various situations. It also improves its hardware compatibility. One embodiment of the present invention discloses that the semiconductor component testing device can convert the decoded image data into a differential signal and then transmit the image data to the image processing computer, thereby reducing the bandwidth requirement of the I/O line and reducing the wire cost. In addition, in one embodiment of the present invention, the test carrier of the semiconductor component testing device can be selected according to requirements, and the mobile industry processor interface module to be set can be directly connected, or an external mobile industry processor interface module can be directly connected to enable the semiconductor. The component test device is extremely flexible in use. In an embodiment of the present invention, the action industry processor interface module of the semiconductor component testing device may further include an image processing module, which can implement a plurality of hardware circuits by using a programmable gate array, and utilizes built-in The image processing library analyzes and interprets the image data to realize parallel operation of a plurality of hardware circuits, thereby generating an analysis result, which can greatly speed up the image processing analysis, and if the semiconductor component test device only needs to execute the standard Test items eliminate the need for external computer equipment, thus significantly reducing the cost of testing.

可見本發明在突破先前之技術下,確實已達到所欲增進之功效,且也非熟悉該項技藝者所易於思及,其所具之進步性、實用性,顯已符合專利之申請要件,爰依法提出專利申請,懇請  貴局核准本件發明專利申請案,以勵創作,至感德便。It can be seen that the present invention has achieved the desired effect under the prior art, and is not familiar with the skill of the artist, and its progressiveness and practicability have been met with the patent application requirements.提出 Submit a patent application in accordance with the law, and ask your office to approve the application for this invention patent to encourage creation.

以上所述僅為舉例性,而非為限制性者。任何未脫離本發明之精神與範疇,而對其進行之等效修改或變更,均應包含於後附之申請專利範圍中。The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.

2、3...半導體元件測試裝置2, 3. . . Semiconductor component tester

20、40、60、70、90...半導體元件測試介面20, 40, 60, 70, 90. . . Semiconductor component test interface

21、31、41、61、71...測試載板21, 31, 41, 61, 71. . . Test carrier

22、42、62、72...影像處理電腦22, 42, 62, 72. . . Image processing computer

221...分析結果221. . . Analysis result

211、411、611、711、911...行動產業處理器介面模組211, 411, 611, 711, 911. . . Mobile Industry Processor Interface Module

23、43、63、73、93...主電腦23, 43, 63, 73, 93. . . Main computer

24、44、64、74、94...待測半導體元件24, 44, 64, 74, 94. . . Semiconductor component to be tested

241...行動產業處理器介面訊號241. . . Mobile industry processor interface signal

2111...影像資料2111. . . video material

212...緩衝模組212. . . Buffer module

2121...存取及運算程序2121. . . Access and computing program

35...測試插槽35. . . Test slot

412、4112、612、6112、712、9112...可程式化閘陣列模組(MIPI子板)412, 4112, 612, 6112, 712, 9112. . . Programmable gate array module (MIPI daughter board)

4113、6113、9113...隨機存取記憶體4113, 6113, 9113. . . Random access memory

413、613、713...接點413, 613, 713. . . contact

414...差動緩衝模組414. . . Differential buffer module

46、66、76...路由器46, 66, 76. . . router

47、67...Hi-Fix纜線47, 67. . . Hi-Fix cable

711...外部行動產業處理器介面模組711. . . External Action Industry Processor Interface Module

S51~S56、S81~S86、S101~S106...步驟流程S51~S56, S81~S86, S101~S106. . . Step flow

第1圖 係為習知技藝之半導體元件測試裝置之示意圖。第2圖 係為本發明之半導體元件測試裝置之方塊圖。第3圖 係為本發明之半導體元件測試裝置之第一實施例之示意圖。第4圖 係為本發明之半導體元件測試裝置之第二實施例之示意圖。第5圖 係為本發明之半導體元件測試裝置之第二實施例之流程圖。第6圖 係為本發明之半導體元件測試裝置之第三實施例之示意圖。第7圖 係為本發明之半導體元件測試裝置之第四實施例之示意圖。第8圖 係為本發明之半導體元件測試裝置之第四實施例之流程圖。第9圖 係為本發明之半導體元件測試裝置之第五實施例之示意圖。第10圖 係為本發明之半導體元件測試方法之流程圖。Figure 1 is a schematic diagram of a semiconductor component test apparatus of the prior art. Figure 2 is a block diagram of a semiconductor component testing device of the present invention. Figure 3 is a schematic view showing a first embodiment of the semiconductor component testing apparatus of the present invention. Figure 4 is a schematic view showing a second embodiment of the semiconductor component testing device of the present invention. Fig. 5 is a flow chart showing a second embodiment of the semiconductor component testing apparatus of the present invention. Figure 6 is a schematic view showing a third embodiment of the semiconductor component testing device of the present invention. Figure 7 is a schematic view showing a fourth embodiment of the semiconductor component testing device of the present invention. Figure 8 is a flow chart showing a fourth embodiment of the semiconductor component testing apparatus of the present invention. Figure 9 is a schematic view showing a fifth embodiment of the semiconductor component testing device of the present invention. Figure 10 is a flow chart showing the method of testing a semiconductor device of the present invention.

2...半導體元件測試裝置2. . . Semiconductor component tester

20...半導體元件測試介面20. . . Semiconductor component test interface

21...測試載板twenty one. . . Test carrier

22...影像處理電腦twenty two. . . Image processing computer

221...分析結果221. . . Analysis result

211...行動產業處理器介面模組211. . . Mobile Industry Processor Interface Module

23...主電腦twenty three. . . Main computer

24...待測半導體元件twenty four. . . Semiconductor component to be tested

241...行動產業處理器介面訊號241. . . Mobile industry processor interface signal

211...行動產業處理器介面模組211. . . Mobile Industry Processor Interface Module

2111...影像資料2111. . . video material

212...緩衝模組212. . . Buffer module

2121...存取及運算程序2121. . . Access and computing program

Claims (17)

一種半導體元件測試裝置,係連結於一半導體元件測試介面,該半導體元件測試介面係擷取至少一待測半導體元件之行動產業處理器介面訊號,該半導體元件測試裝置係包含:一測試載板,係接收該些行動產業處理器介面訊號;至少一行動產業處理器介面模組,係設置於該測試載板,並對該些行動產業處理器介面訊號進行解碼以產生經解碼之影像資料;以及一緩衝模組,係設置於該測試載板,並對該些影像資料進行一存取及運算程序,該緩衝模組係連接至一影像處理電腦.該影像處理電腦係利用內建之影像處理函式庫(IP Library)來分析判讀該些影像資料以產生一分析結果,並將該分析結果傳送至一主電腦以顯示該分析結果;其中該些行動產業處理器介面模組解碼多個該待測半導體元件之該些行動產業處理器介面訊號,且透過該緩衝模組連接至複數個該影像處理電腦。 A semiconductor component testing device is coupled to a semiconductor component testing interface, wherein the semiconductor component testing interface is configured to capture at least one mobile industry processor interface signal of the semiconductor component to be tested, the semiconductor component testing device comprising: a test carrier board, Receiving the mobile industry processor interface signals; at least one mobile industry processor interface module is disposed on the test carrier and decoding the mobile industry processor interface signals to generate decoded image data; A buffer module is disposed on the test carrier and performs an access and operation process on the image data, the buffer module is connected to an image processing computer. The image processing computer analyzes and interprets the image data by using a built-in image processing library (IP Library) to generate an analysis result, and transmits the analysis result to a host computer to display the analysis result; The mobile industry processor interface module decodes the plurality of mobile industry processor interface signals of the semiconductor component to be tested, and is connected to the plurality of image processing computers through the buffer module. 根據申請專利範圍第1項所述之半導體元件測試裝置,其中各個該行動產業處理器介面模組更包含一影像處理模組,係為可程式化閘陣列模組,該影像處理模組對該些行動產業處理器介面訊號進行解碼,再利用內建之影像處理函式庫來分析判讀該些影像資料以產生一分析結果,並將該分析結果傳送至一主電腦以顯示該分析結果。 According to the semiconductor component testing device of claim 1, wherein each of the mobile industry processor interface modules further includes an image processing module, which is a programmable gate array module, and the image processing module The mobile industry processor interface signals are decoded, and the built-in image processing library is used to analyze and interpret the image data to generate an analysis result, and the analysis result is transmitted to a host computer to display the analysis result. 根據申請專利範圍第2項或第1項所述之半導體元件測試裝置,更包含複數個測試插槽,係用以可替換地設置複數個該測試載板。 The semiconductor component testing device according to Item 2 or Item 1 of the patent application further includes a plurality of test slots for alternately setting a plurality of the test carriers. 根據申請專利範圍第3項所述之半導體元件測試裝置,其中各個該行動產業處理器介面模組係可替換地設置於各個該測試載板。 The semiconductor component testing device of claim 3, wherein each of the mobile industry processor interface modules is alternatively disposed on each of the test carriers. 根據申請專利範圍第1項所述之半導體元件測試裝置,更包含一差動緩衝模組,係將該些影像資料轉換為差動訊號,再傳送至該影像處理電腦。 The semiconductor component testing device according to claim 1 further includes a differential buffer module that converts the image data into a differential signal and transmits the image to the image processing computer. 根據申請專利範圍第5項所述之半導體元件測試裝置,其中該行動產業處理器介面模組更包含一解碼模組,該解碼模組係為可程式化閘陣列模組,並對該些行動產業處理器介面訊號進行解碼。 The semiconductor component testing device according to claim 5, wherein the mobile industry processor interface module further comprises a decoding module, wherein the decoding module is a programmable gate array module, and the actions are The industrial processor interface signal is decoded. 根據申請專利範圍第6項所述之半導體元件測試裝置,其中該緩衝模組係為可程式化閘陣列模組。 The semiconductor component testing device according to claim 6, wherein the buffer module is a programmable gate array module. 根據申請專利範圍第7項所述之半導體元件測試裝置,其中該存取及運算程序係對該些影像資料之垂直同步、水平同步及時脈訊號執行邏輯閘運算。 The semiconductor component testing device according to claim 7, wherein the access and computing program performs a logic gate operation on the vertical synchronization, horizontal synchronization and time pulse signals of the image data. 一種半導體元件測試方法,係應用於一半導體元件測試裝置以對至少一待測半導體元件進行影像訊號之測試,該半導體元件測試方法係包含下列步驟:利用一半導體元件測試介面擷取該些待測半導體元件之行動產業處理器介面訊號;透過該半導體元件測試裝置之一測試載板接收該些行動產業處理器介面訊號;經由該半導體元件測試裝置之至少一行動產業處理器介面模組對該些行動產業處理器介面訊號進行解碼以產生經解碼之影像資料; 由該半導體元件測試裝置之一緩衝模組對該些影像資料進行一存取及運算程序;利用一影像處理電腦根據其內建之影像處理函式庫(IP Library)來分析判讀該些影像資料以產生一分析結果;以及由一主電腦顯示該分析結果;利用該些行動產業處理器介面模組解碼多個該待測半導體元件之該些行動產業處理器介面訊號,且透過該緩衝模組連接至複數個該影像處理電腦。 A semiconductor component testing method is applied to a semiconductor component testing device for performing image signal testing on at least one semiconductor component to be tested. The semiconductor component testing method includes the following steps: using a semiconductor component testing interface to extract the to-be-tested components An action industry processor interface signal of a semiconductor component; receiving, by the test component carrier of the semiconductor component test device, the mobile industry processor interface signals; and at least one mobile industry processor interface module of the semiconductor component test device The mobile industry processor interface signal is decoded to generate decoded image data; The buffer module of the semiconductor component testing device performs an access and operation process on the image data; and the image processing computer analyzes and interprets the image data according to the built-in image processing library (IP Library). And generating an analysis result; and displaying the analysis result by a host computer; using the mobile industry processor interface module to decode the plurality of mobile industry processor interface signals of the semiconductor component to be tested, and using the buffer module Connect to multiple image processing computers. 根據申請專利範圍第9項所述之半導體元件測試方法,更包含下列步驟:由各個該行動產業處理器介面模組之一影像處理模組對該些行動產業處理器介面訊號進行解碼,再利用內建之影像處理函式庫來分析判讀該些影像資料以產生一分析結果;以及由一主電腦顯示該分析結果。 The semiconductor component testing method according to claim 9 further includes the following steps: decoding, and reusing, the mobile industry processor interface signals by an image processing module of each of the mobile industry processor interface modules The built-in image processing library analyzes and interprets the image data to generate an analysis result; and displays the analysis result by a host computer. 根據申請專利範圍第9項或第10項所述之半導體元件測試方法,更包含下列步驟:利用該半導體元件測試裝置之複數個測試插槽可替換地設置複數個該測試載板。 The semiconductor component testing method according to claim 9 or 10, further comprising the step of: arranging a plurality of the test carriers by using a plurality of test slots of the semiconductor component testing device. 根據申請專利範圍第11項所述之半導體元件測試方法,更包含下列步驟:將各個該行動產業處理器介面模組可替換地設置於各個該測試載板上。 The semiconductor component testing method of claim 11, further comprising the step of: arranging each of the mobile industry processor interface modules alternatively on each of the test carriers. 根據申請專利範圍第9項所述之半導體元件測試方法,更包含下列步驟: 經由該半導體元件測試裝置之一差動緩衝模組將該些影像資料轉換為差動訊號,再傳送至該影像處理電腦。 According to the semiconductor component testing method described in claim 9 of the patent application, the following steps are further included: The image data is converted into a differential signal by a differential buffer module of the semiconductor component testing device, and then transmitted to the image processing computer. 根據申請專利範圍第13項所述之半導體元件測試方法,其中該行動產業處理器介面模組更包含一解碼模組,該解碼模組係為可程式化閘陣列模組,並對該些行動產業處理器介面訊號進行解碼。 According to the semiconductor component testing method of claim 13, wherein the mobile industry processor interface module further comprises a decoding module, the decoding module is a programmable gate array module, and the actions are The industrial processor interface signal is decoded. 根據申請專利範圍第14項所述之半導體元件測試方法,其中該緩衝模組係為可程式化閘陣列模組。 The semiconductor component testing method according to claim 14, wherein the buffer module is a programmable gate array module. 根據申請專利範圍第15項所述之半導體元件測試方法,更包含下列步驟:利用該緩衝模組對該些影像資料之垂直同步、水平同步及時脈訊號執行進行邏輯閘運算。 According to the semiconductor component testing method of claim 15, the method further includes the following steps: performing a logic gate operation on the vertical synchronization, horizontal synchronization, and time pulse signal execution of the image data by using the buffer module. 一種半導體元件測試方法,係應用於一半導體元件測試裝置以對至少一待測半導體元件進行影像訊號之測試,該半導體元件測試方法係包含下列步驟:利用一半導體元件測試介面擷取該些待測半導體元件之行動產業處理器介面訊號;將該半導體元件測試裝置之該測試載板外接於外部之一行動產業處理器介面模組;利用行動產業處理器介面模組接收並解碼該些行動產業處理器介面訊號以產生經解碼之影像資料; 由該半導體元件測試裝置之一緩衝模組對該些影像資料進行一存取及運算程序;透過一影像處理電腦分析及判讀該些影像資料以產生一分析結果;以及經由一主電腦顯示該分析結果。 A semiconductor component testing method is applied to a semiconductor component testing device for performing image signal testing on at least one semiconductor component to be tested. The semiconductor component testing method includes the following steps: using a semiconductor component testing interface to extract the to-be-tested components The mobile industry processor interface signal of the semiconductor component; the test carrier of the semiconductor component test device is externally connected to an external mobile industry processor interface module; and the mobile industry processor interface module is used to receive and decode the mobile industry processing Device interface signal to generate decoded image data; Performing an access and operation process on the image data by a buffer module of the semiconductor component testing device; analyzing and interpreting the image data through an image processing computer to generate an analysis result; and displaying the analysis via a host computer result.
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