TWI505875B - Film applying device - Google Patents

Description

Film coating device

The present disclosure relates to a film coating apparatus, and more particularly to a film coating apparatus that can adjust the width of a coating slit.

The film coating apparatus can apply a film material to a workpiece. The thickness of the formed film can be controlled by adjusting the width of the coating slit of the film coating apparatus. However, the coating slit is located in the thin film coating device, and the width of the portion where the rigidity is strong is different from the width of the other portion, so that the thickness of the formed film is greatly varied, for example, the thickness of the edge of the film is larger than the thickness of other portions (fertilizer Side phenomenon).

The present disclosure relates to a film coating apparatus that improves the conventional fat edge phenomenon.

According to an embodiment of the present disclosure, a thin film coating apparatus is proposed. The film coating device includes a first body, a second body and a first side cover. The first body has a first outer side surface and a recess extending from the first outer side surface toward the interior of the first body. The recess of the first body is separated by the first body as an adjustable portion and a base portion. The second body is disposed opposite to the first body and forms a coating slit with the first body. The first side cover has a first fixing point fixed to the adjustable portion and has a An inner side surface, a second outer side surface, a first cutting lane and a second cutting lane. The inner side surface faces the first body and the second body, the first cutting path exposes an opening from the inner side surface, the opening and the coating slit are separated from each other, and the second outer side surface and the first outer side surface are located on the same side of the film coating device, The second cutting path extends from the second outer side surface toward the inside of the first side cover, and the first fixing point is located in a region surrounded by the first cutting path and the second cutting path.

According to another embodiment of the present disclosure, a thin film coating apparatus is proposed. The film coating device includes a first body, a second body and a first side cover. The first body has a first outer side surface and a groove extending inwardly from the first outer side surface. The recessed portion partitions the first body into an adjustable portion and a base portion. The second body is disposed opposite to the first body and forms a coating slit with the first body. The first side cover has a first fixing point fixed to the adjustable portion, an inner side surface and a cutting path. The cutting track surrounds the first fixed point.

In order to better understand the above and other aspects of the present disclosure, the preferred embodiments are described below in detail with reference to the accompanying drawings.

100‧‧‧film coating device

100R‧‧‧ coating slit

100Ra‧‧‧ openings

110‧‧‧First Ontology

110h‧‧‧through hole

110s1‧‧‧ first outer side

110r‧‧‧ Groove

111‧‧‧Adjustable part of the first body

111t‧‧‧first keyhole

112‧‧‧The base of the first body

112t‧‧‧second keyhole

120‧‧‧Second ontology

120r‧‧‧inner runner

120t‧‧‧ third keyhole

130‧‧‧First side cover

130a‧‧‧ openings

130b‧‧‧ lower edge

130c1, 230c1‧‧‧ first cutting lane

130c2, 230c2‧‧‧ second cutting lane

130h1‧‧‧first through hole

130h2‧‧‧second through hole

130h3‧‧‧Through hole

130r‧‧‧ Groove

130s1‧‧‧ inside side

130s2‧‧‧Second outer side

130s3‧‧‧ end face

130s4‧‧‧ third outer side

130s5‧‧‧fourth outer side

130u‧‧‧Upper edge

131‧‧‧Adjustable part of the first side cover

131t, 132t‧‧‧ inner screw hole

132‧‧‧Base portion of the first side cover

140‧‧‧Second side cover

150‧‧‧Adjustment components

151‧‧‧ inner nut

152‧‧‧ bolt

153‧‧‧ outer nut

230c‧‧‧ cutting road

230c3‧‧‧Circular cutting

230c4‧‧‧First linear cutting

230c5‧‧‧Second linear cutting

A1‧‧‧ obtuse angle

A2‧‧‧ acute angle

C1~C5‧‧‧ Curve

W, W’‧‧‧Width

FIG. 1A is an exploded view of a thin film coating apparatus according to an embodiment of the present disclosure.

FIG. 1B is a side view showing the first side cover of FIG. 1A.

Fig. 1C is a plan view showing Fig. 1B.

Fig. 1D is a plan view showing the combination of the film coating apparatuses of Fig. 1A.

FIG. 2 is a side view of the first side cover according to another embodiment of the present disclosure.

FIG. 3 is a side view of the first side cover according to another embodiment of the present disclosure.

FIG. 4 is a side view of the first side cover according to another embodiment of the present disclosure.

FIG. 5 is a side view of the first side cover according to another embodiment of the present disclosure.

FIG. 6 is a side view of the first side cover according to another embodiment of the present disclosure.

FIG. 7 is a side view of the first side cover according to another embodiment of the present disclosure.

FIG. 8 is a side view of the first side cover according to another embodiment of the present disclosure.

FIG. 9 is a side view of the first side cover according to another embodiment of the present disclosure.

FIG. 10 is a side view of a first side cover according to another embodiment of the present disclosure.

11 is a side view of a first side cover in accordance with another embodiment of the present disclosure.

Figure 12 is a side elevational view of the first side cover in accordance with another embodiment of the present disclosure.

Figure 13 is a side elevational view of the first side cover in accordance with another embodiment of the present disclosure.

Figure 14 is a side elevational view of the first side cover in accordance with another embodiment of the present disclosure.

15A is a side view of a first side cover according to another embodiment of the present disclosure.

Fig. 15B is a plan view showing Fig. 15A.

Fig. 16 is a view showing the width of a coating slit of the conventional film coating apparatus and the present embodiment.

Fig. 17 is a graph showing the thickness of a film coated by the film coating apparatus of Fig. 1A.

Please refer to FIG. 1A, which is an exploded view of a thin film coating apparatus according to an embodiment of the present disclosure. The film coating apparatus 100 includes a first body 110, a second body 120, a first side cover 130, and a second side cover 140.

The first body 110 has a first outer side surface 110s1 and a recess 110r. The groove 110r extends from the first outer side surface 110s1 to the inside of the first body 110. The recess 110r partitions the first body 110 into an adjustable portion 111 and a base portion 112. The rigidity of the base portion 112 is greater than the adjustable portion 111, that is, the flexibility of the adjusting portion 111 is greater than that of the base portion 112. The adjustment portion 111 is deformable with respect to the base portion 112, thereby adjusting the width W of the coating slit 100R (Fig. 1D). By adjusting the width W of the coating slit 100R (Fig. 1D), the thickness of the film formed using the film can be controlled. In addition, the first body 110 has a plurality of through holes 110h, and a plurality of adjusting elements 150 (shown in FIG. 1B) are respectively disposed in the corresponding through holes 110h, thereby adjusting the relative position of the adjustable portion 111 and the base portion 112. position.

The second body 120 has an inner flow passage 120r. When the film coating apparatus 100 performs a coating process, the working fluid is ejected from the coating slit 100R via the inner flow path 120r to be applied to a workpiece (not shown).

The first side cover 130 and the second side cover 140 are respectively fixed to opposite end faces of the first body 110 and the second body 120. The first side cover 130 and the second side cover 140 have a similar structure, and the first side cover 130 is exemplified below.

The first side cover 130 has a first through hole 130h1 (first fixed point), and the adjustable portion 111 of the first body 110 has a first locking hole 111t through which the locking component (not shown) passes. 130h1 is locked in the first locking hole 111t to fix the relative position of the first side cover 130 and the adjustable portion 111. In addition, the first side cover 130 has a second through hole 130h2 (second fixed point), and the base portion 112 of the first body 110 has a second locking hole 112t, and a locking component (not shown) passes through the second The through hole 130h2 is locked in the second locking hole 112t to fix the phase of the first side cover 130 and the base portion 112. For the location. In addition, the first side cover 130 and the second body 120 can be fixed in their relative positions by a similar locking manner.

Please refer to FIG. 1B, which shows a side view of the first side cover of FIG. 1A. The first side cover 130 has an inner side surface 130s1 and a second outer side surface 130s2 (FIG. 1A), a first cutting lane 130c1, and a second cutting lane 130c2. The inner side surface 130s1 faces the first body 110 and the second body 120. The first cutting lane 130c1 exposes an opening 130a from the inner side surface 130s1. After the film coating apparatus 100 is assembled, the opening 130a and the coating slit 100R (for ease of understanding, the position of the coating slit 100R is shown by a broken line in FIG. 1B) is staggered and isolated, that is, not connected, thus The working fluid located in the coating slit 100R is less likely to leak through the first scribe line 130c1. The second outer side surface 130s2 and the first outer side surface 110s1 are located on the same side of one of the film coating devices 100, and the second cutting path 130c2 extends from the second outer side surface 130s2 to the inside of the first side cover 130.

The first dicing street 130c1 and the second dicing street 130c2 may be, for example, a Wire Electrical Discharging Machine, a mechanical tooling, a sawing, an Electrical Discharge Machining (EDM), a casting method, or other suitable process. Formed. In the embodiment, the first cutting lane 130c1 and the second cutting lane 130c2 weaken the strength of the first side cover 130, so that the area surrounded by the first cutting lane 130c1 and the second cutting lane 130c2 becomes an adjustable portion 131. The first through hole 130h1 is provided in the adjustable portion 131. Since the adjustable portion 131 of the first side cover 130 is fixed to the adjustable portion 111 (FIG. 1A) of the first body 110, when the adjustable portion 111 of the first body 110 is adjusted, the first side cover 130 can be The adjustment unit 131 is deformed by the adjustable portion 111. Due to the first side cover The adjustable portion 131 of the 130 itself has flexibility due to weakening, so that when the adjustable portion 111 of the first body 110 is deformed by adjustment, the adjustable portion 131 of the first side cover 130 is easily deformed, thereby making the coating narrow. The width W (FIG. 1D) of the slit 100R close to the first side cover 130 can be easily adjusted, such as being easily enlarged or reduced.

Further, the region other than the region surrounded by the first dicing street 130c1 and the second dicing street 130c2 becomes the base portion 132 which is relatively rigid (relative to the adjustable portion 131). The second through hole 130h2 is provided in the base portion 132.

The first side cover 130 has an end surface 130s3 which is located on the same side of the first side cover 130 as the opening 100Ra of the coating slit 100R. The first cutting lane 130c1 extends from the end surface 130s3 in a direction close to the second cutting lane 130c2 along a curved path, a straight path, or a combination thereof. The first dicing street 130c1 of this embodiment is extended as an example along a straight path.

The first scribe line 130c1 extends to intersect the extension line of the second scribe line 130c2. For example, the extension line L1 of the upper edge 130u of the second scribe line 130c2 intersects the first scribe line 130c1, so that the adjustable portion 131 has sufficient flexibility. In another embodiment, the extension line of the lower edge 130b of the second scribe line 130c2 intersects the first scribe line 130c1 to provide the adjustable portion 131 with better flexibility. Compared to the first scribe line 130c1 not extending to intersect the extension line of the second scribe line 130c2, since the first scribe line 130c1 of the embodiment extends to intersect the extension line of the second scribe line 130c2, the first side cover is made The material of the first cutting lane 130c1 and the second cutting lane 130c2 is less than 130, and the adjustable portion 131 has better flexibility. When the first side cover 130 is connected to the first cutting lane 130c1 and the second cutting lane 130c2 The less the material is, the better the flexibility of the adjustable portion 131 is.

The film coating apparatus 100 further includes an adjusting component 150 that connects the adjustable portion 131 of the first side cover 130 and the base portion 132 to adjust the relative position of the adjustable portion 131 and the base portion 132. Specifically, the adjustable portion 131 and the base portion 132 have inner screw holes 131t and 132t, respectively. The adjusting member 150 includes an inner nut 151, a bolt 152 and an outer nut 153. Through the stroke adjustment of the inner nut 151 and the bolt 152, the relative position of the adjustable portion 131 and the base portion 132 can be adjusted, and the coating slit can be adjusted. The width W of 100R (Fig. 1D). When the width W (FIG. 1D) of the coating slit 100R is adjusted to a predetermined width, the relative position of the adjustable portion 131 and the base portion 132 can be fixed by the locking outer nut 153. After the adjustable portion 111 of the first body 110 is adjusted, if the desired coating slit width is still not obtained (for example, the width of the coating slit 100R near the first side cover 130 is smaller than that in the middle. If the slit width is still too large or too small, the adjustment member 150 can be operated separately to obtain coating slits having substantially the same width at each dot.

Please refer to FIG. 1C for a plan view of FIG. 1B. The first side cover 130 has a third outer side 130s4 that is opposite to the inner side 130s1. As shown in FIG. 1C, the first scribe line 130c1 extends from the inner side surface 130s1 along a linear path, a curved path, or a combination thereof to the third outer side surface 130s4, that is, the first scribe line 130c1 penetrates the thickness of the first side cover 130. In this embodiment, the first cutting lane 130c1 is perpendicular to the inner side surface 130s1 and extends in a straight path to the third outer side surface 130s4.

Referring to FIG. 1D, a plan view of the film coating apparatus of FIG. 1A is shown. After the film coating device 100 is combined, the second body 120 is relatively A body 110 is disposed and a coating slit 100R is formed with the first body 110. Due to the design of the first dicing street 130c1 and the second dicing street 130c2, the width W of the coating slit 100R close to the first side cover 130 is more easily adjusted than the width W' of the conventional coating slit near the first side cover 130. Further, in terms of the same size adjustment force for expanding the width, the width W of the coating slit 100R of the present embodiment close to the first side cover 130 is closer to the width W of the first side cover 130 than the conventional coating slit. 'It's still wide (because it's easy to widen). Although not shown, the width W of the coating slit 100R of the present embodiment near the first side cover 130 is closer to the first side cover 130 than the conventional coating slit, in terms of the same size adjustment force of the reduced width. The width W' is also narrow (because it is easy to narrow).

Please refer to FIG. 2 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. Compared with the first side cover 130 of FIG. 1B, the second cutting path 130c2 of the present embodiment is a thin line-shaped cutting path having a width smaller than that of the second cutting path 130c2 of FIG. In this embodiment, the groove 110r (for the sake of easy understanding, the position of the groove 110r is indicated by a broken line) is located between the first through hole 130h1 and the second through hole 130h2, so that the adjustable portion 131 of the first side cover 130 is The adjustable portion 111 of the first body 110 (the flexibility of the adjustable portion 111 is preferably) is fixed, and is not fixed to the base portion 112 of the first body 110 (the flexibility of the base portion 112 is poor), so The adjustable portion 131 is excessively restrained.

Please refer to FIG. 3 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. Different from the first side cover of FIG. 2, the second cutting path 130c2 of the present embodiment is located between the groove 110r and the first through hole 130h1. Similar to the first side cover 130 of FIG. 2, the groove 110r (for ease of understanding, the groove The position of the 110r is shown by a broken line. It is still located between the first through hole 130h1 and the second through hole 130h2, so that the adjustable portion 131 is not fixed to the base portion 112 of the first body 110, so that the adjustable portion is not allowed. 131 is over-constrained.

Please refer to FIG. 4 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. The first side cover 130 has a first cutting lane 130c1, a second cutting lane 130c2, and a plurality of first through holes 130h1. In this embodiment, the plurality of first through holes 130h1 are located in a region surrounded by the first cutting path 130c1 and the second cutting path 130c2. Since the groove 110r (the position of the groove 110r is shown by a broken line for convenience of understanding) is still located between the first through hole 130h1 and the second through hole 130h2, so that the adjustable portion 131 does not overlap with the base portion of the first body 110. 112 is fixed, so that the adjustable portion 131 is not excessively restrained. The number of the first constant holes 130h1 may be two or more.

Please refer to FIG. 5, which illustrates a side view of a first side cover according to another embodiment of the present disclosure. In this embodiment, the cross-sectional shape of the second dicing street 103c2 is a triangle. In another embodiment, the cross-sectional shape of the second scribe line 103c2 may be a part of an ellipse, a part of a circle, or a part of a polygon. The cross-sectional shape of the second scribe line 130c2 of the first side cover 130 is not limited by the disclosed embodiment as long as the first side cover 130 can be made flexible.

Please refer to FIG. 6 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. The first cutting lane 130c1 of the first side cover 130 extends obliquely from the inner side surface 130s1 to the third outer side surface 130s4. Specifically, the first cutting lane 130c1 extends obliquely from the inner side surface 130s1 away from the second outer side surface 130s2 to the third outer side surface 130s4, so that the first cutting lane 130c1 and the inner side surface 130s1 are sandwiched. An obtuse angle A1. In another embodiment, the first scribe line 130c1 may extend obliquely to the third outer side surface 130s4 along a curved path or a combined path of a straight line and a curved line. By designing the value of the obtuse angle A1, the material volume connecting the first dicing street 130c1 and the first dicing street 130c1 in the first side cover 130 can be determined, thereby determining the flexibility of the adjustable portion 131.

Please refer to FIG. 7 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. Different from the first side cover 130 of FIG. 6, the first cutting path 130c1 of the first side cover 130 of the embodiment has an acute angle A2 with the inner side surface 130s1 and extends obliquely along the straight path to the third outer side surface 130s4. .

Please refer to FIG. 8 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. Different from the first side cover 130 of FIG. 6, the first cutting path 130c1 of the first side cover 130 of the present embodiment extends obliquely along a plurality of straight paths, wherein the plurality of straight paths are not smoothly connected.

Please refer to FIG. 9 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. The first side cover 230 has a cutting lane 230c that surrounds the first through hole 130h1. Specifically, the cutting path 230c is a spiral cutting path that surrounds the first through hole 130h1 at least one turn, so that the adjustable portion 131 of the first side cover 230 has sufficient flexibility. The forming method of the cutting lane 230c can be similar to the first cutting lane 130c1, and will not be described again.

Please refer to FIG. 10, which illustrates a side view of a first side cover according to another embodiment of the present disclosure. Different from the first side cover 230 of FIG. 9, the cutting path 230c of the present embodiment extends from the end surface 130s3 to surround the first through hole 130h1.

Please refer to FIG. 11 , which illustrates another embodiment of the present disclosure. Side view of the side cover. Different from the first side cover 230 of FIG. 10, the cutting path 230c of the present embodiment extends from the second outer side surface 130s2 to surround the first through hole 130h1.

Please refer to FIG. 12, which illustrates a side view of a first side cover according to another embodiment of the present disclosure. In this embodiment, the cutting lane 230c includes a first cutting lane 230c1 and a second cutting lane 230c2, wherein the first cutting lane 230c1 surrounds the first side of the first through hole 130h1, and the second cutting lane 230c2 surrounds the first through hole 130h1. The second side of the first side, wherein the first side is opposite the second side. Specifically, the first cutting lane 230c1 and the second cutting lane 230c2 each include an annular cutting lane 230c3, a first linear cutting lane 230c4, and a second linear cutting lane 230c5, wherein the circular cutting lane 230c3 has a first end and a second end, The first linear cutting channel 230c4 extends from the first end of the annular cutting channel 230c3 to the outside of the first side cover 130, and the second linear cutting channel 230c5 extends from the second end of the annular cutting channel 230c3 to the first side cover 130. . In this embodiment, the first linear cutting path 230c4 extends from the first end of the annular cutting path 230c3 toward the end surface 130s3 or the second outer side surface 130s2, but does not extend to the end surface 130s3 or the second outer side surface 130s2, and the second linear shape The cutting lane 230c5 extends from the second end of the annular cutting passage 230c3 toward the fourth outer side surface 130s5, but does not extend to the inner flow passage.

Please refer to FIG. 13 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. In this embodiment, the cutting lane 230c includes an annular cutting passage 230c3 and two second linear cutting passages 230c5, wherein the circular cutting passage 230c3 surrounds the first through hole 130h1, and the second second linear cutting passage 230c5 is respectively connected to the circular cutting passage 230c3. Two ends. In this embodiment, the annular cutting channel 230c3 is at least half a turn around the first through hole 130h1; in another embodiment, the circular cutting channel 230c3 surrounds the first through hole 130h1. Can be less than half a circle.

Please refer to FIG. 14 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. Unlike the first side cover 230 of Fig. 12, the first linear cutting path 230c4 of the present embodiment extends to the end surface 130s3, and the second linear cutting path 230c5 extends to the second outer side surface 130s2. In another embodiment, the first linear cut channel 230c4 can extend to the second outer side 130s2.

In summary, the first dicing street 130c1 and the second dicing street 130c2 have various extension modes, such as a continuous linear path, a multi-segment linear path (multi-segment lines are not smoothly connected), a continuous curved path (smooth curve), and multiple segments. The curved path (the multi-segment curve is connected non-smoothly) or a combination thereof is extended, wherein the curved path is, for example, a spiral path, a circular path, an elliptical path or a curved path of other geometrical forms. The cutting track 230c has a plurality of extensions, which extend, for example, along a curved path or a combined path of a straight path and a curved path, wherein the curved path is, for example, a spiral path, a circular path, an elliptical path, or a curved path of other geometric shapes. . The manner in which the scribe lines (130c1, 130c2, 230c, 230c1, 230c2) of the first side covers 130 and 230 extend is not limited by the disclosed embodiments as long as the first side covers 130 and 230 are flexible.

Referring to FIGS. 15A and 15B, FIG. 15A is a side view of the first side cover according to another embodiment of the present disclosure, and FIG. 15B is a top view of FIG. 15A. The first side cover 130 has a third through hole 130h3 (third fixed point), which is located on opposite sides of the first cutting path 130c1 and the first through hole 130h1, respectively. The second body 120 has a third locking hole 120t (FIG. 1A), and the locking component (not shown) can pass through the third through hole. 130h3 is locked in the third locking hole 120t to fix the first side cover 130 to the second body 120. The first side cover 130 has a recess 130r extending from the inner side surface 130s1 toward the third outer side surface 130s4 to reduce the contact area between the inner side surface 130s1 and the second body 120, thereby lifting the inner side surface 130s1 and the first surface. The contact pressure of the body 110. In this way, the adhesion between the inner side surface 130s1 and the first body 110 can be enhanced.

Although the above-mentioned fixing points are realized in a locking manner, the fixing points of another embodiment can also be realized by engaging, bonding, welding, riveting, and other temporary or permanent fixing methods.

Please refer to Fig. 16, which is a schematic view showing the width of the coating slit of the conventional film coating apparatus and the present embodiment. The width W (X = 0) indicates the width of the coating slit 100R (Fig. 1D) near the first side cover 130, and the width W (X = L) indicates that the coating slit 100R is close to the second side cover 140. The width. Curve C1 represents the width distribution of the conventional coating slit from position X=0 to X=L, and curve C2 represents the coating slit 100R adjusted by the first side cover 130 of FIG. 1B from the position X=0 to X. The width distribution of =L, and the curve C3 represents the width distribution of the coating slit 100R adjusted by the first side cover 130 of FIG. 2 from the position X=0 to X=L. As can be seen from the figure, the coating slit 100R is close to the coating slit width W of the first side cover 130 due to the design of the first side cover 130 weakened by the embodiment of the present disclosure. X=0), the difference between the coating slit width W (X=L) of the second side cover 140 and the intermediate coating slit width W (X=L/2) is reduced, so that a uniform size can be formed. film. As shown by the curve C2 of Fig. 16, the coating slit is made by the individual adjustment of the adjusting member 150 (Fig. 1B). The difference between the coating slit width W (X = 0) of 100R close to the first side cover 130 and the intermediate coating slit width W (X = L/2) is greatly reduced.

Please refer to Fig. 17, which is a graph showing the thickness of a film coated by the film coating apparatus of Fig. 1A. Curve C4 is a thickness curve of a film formed by a conventional film coating apparatus, and curve C5 is a thickness curve of a film formed by the film coating apparatus 100 of the disclosed embodiment. As can be seen from the figure, the difference between the thickness T (X=0) of the film formed by the film coating apparatus 100 of the present disclosure near the first side cover 130 and the thickness T (X=L/2) of the intermediate portion is reduced. That is, the thickness of the film formed by the film coating apparatus 100 of the present embodiment is relatively uniform compared to the film formed by the conventional film coating apparatus, and the fat edge phenomenon is remarkably improved.

In the above, the disclosure has been disclosed in the above preferred embodiments, and is not intended to limit the disclosure. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the disclosure. Therefore, the scope of protection of this disclosure is subject to the definition of the scope of the appended claims.

100‧‧‧film coating device

110‧‧‧First Ontology

110h‧‧‧through hole

111‧‧‧Adjustable Department

110s1‧‧‧ first outer side

110r‧‧‧ Groove

111t‧‧‧first keyhole

112‧‧‧Base section

112t‧‧‧second keyhole

120‧‧‧Second ontology

120r‧‧‧inner runner

120t‧‧‧ third keyhole

130‧‧‧First side cover

130h1‧‧‧first through hole

130h2‧‧‧second through hole

130s1‧‧‧ inside side

130s2‧‧‧Second outer side

130s4‧‧‧ third outer side

140‧‧‧Second side cover

Claims (18)

A film coating apparatus comprising: a first body having a first outer side surface and a recess extending from the first outer side surface toward the interior of the first body, the recess of the first body being separated by the The first body is an adjustable portion and a base portion; a second body is disposed opposite to the first body and forms a coating slit with the first body; a first side cover has a a first fixing point fixed by the adjustable portion, and having an inner side surface, a second outer side surface, a first cutting line and a second cutting line, the inner side surface facing the first body and the second body The first cutting lane exposes an opening from the inner side surface, the opening is isolated from the coating slit, the second outer side surface and the first outer side surface are located on the same side of one of the film coating devices, the second cutting lane Extending from the second outer side to the interior of the first side cover, the first fixing point is located in a region surrounded by the first cutting lane and the second cutting lane. The film coating device of claim 1, wherein the first side cover has an end surface that is on the same side as the opening of the coating slit, and the first cutting path approaches the end surface The direction of the second scribe line extends. The film coating apparatus of claim 2, wherein the first scribe line extends from the end surface along a curved path, a straight path, or a combination thereof to a direction close to the second scribe line. The film coating apparatus of claim 1, wherein the extension of the second scribe line intersects the first scribe line. The film coating device of claim 1, wherein the first side cover has a third outer side opposite the inner side, the first cutting path extending from the inner side to the third outer side . The film coating apparatus of claim 5, wherein the first cutting lane extends obliquely from the inner side surface to the third outer side surface. The film coating apparatus of claim 5, wherein the first scribe line extends perpendicularly from the inner side surface to the third outer side surface. The film coating device of claim 1, wherein the first side cover has a second fixing point fixed to the base portion, the second fixing point is located at the first cutting path and the first Outside the area surrounded by the two cutting streets. The film coating device of claim 1, wherein the portion surrounded by the first scribe line and the second scribe line defines an adjustable portion of the first side cover, and the first scribe line and A portion of the first side cover defines a base portion of the first side cover, the adjustable portion of the first side cover and the first portion The adjustable portion of the body is fixed, and the base portion of the first side cover is fixed to the base portion of the first body. The film coating device further comprises: an adjusting component connected to the first side cover The adjustable portion and the base portion of the first side cover adjust a relative position of the adjustable portion of the first side cover and the base portion of the first side cover. The film coating device of claim 1, wherein the first side cover has a third fixed point of the second body, and the first fixed point and the third fixed point are located at the first The first side cover has a recess, and the groove of the first side cover extends from the inner side toward the third outer side. The film coating device of claim 1, further comprising: a second side cover having the same structure as the first side cover; wherein the first side cover and the second side cover are respectively provided And opposite end faces of the first body. A film coating device comprising: a first body having a first outer side surface and a groove extending inwardly from the first outer side surface, the recess portion separating the first body as an adjustable portion and a a second body disposed opposite to the first body and forming a coating slit with the first body; A first side cover has a first fixing point fixed to the adjustable portion, an inner side surface and a cutting path, the cutting path surrounding the first fixing point. The film coating apparatus of claim 12, wherein the cutting channel is a spiral cutting track. The film coating apparatus of claim 12, wherein the cutting lane comprises: a first cutting lane surrounding a first side of the first fixing point; and a second cutting lane surrounding the first One of the fixed points on the second side. The film coating device of claim 14, wherein the first cutting lane and the second cutting lane each comprise: a circular cutting lane having a first end and a second end; a first linear shape a cutting lane extending from the first end of the annular cutting passage to the first side cover; and a second linear cutting passage extending from the second end of the annular cutting passage into the first side cover . The film coating device of claim 12, wherein the first side cover has a third outer side opposite the inner side, the cutting path extending from the inner side to the third outer side. The film coating apparatus of claim 12, wherein the first side cover has an end surface on the same side as the opening of the coating slit, the cutting path extending to the end surface. The film coating device of claim 12, further comprising: a second side cover having the same structure as the first side cover; wherein the first side cover and the second side cover are respectively provided And opposite end faces of the first body.