TWI505875B - Film applying device - Google Patents
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- TWI505875B TWI505875B TW102147219A TW102147219A TWI505875B TW I505875 B TWI505875 B TW I505875B TW 102147219 A TW102147219 A TW 102147219A TW 102147219 A TW102147219 A TW 102147219A TW I505875 B TWI505875 B TW I505875B
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Description
本揭露是有關於一種薄膜塗佈裝置,且特別是有關於一種可調整塗佈狹縫寬度的薄膜塗佈裝置。The present disclosure relates to a film coating apparatus, and more particularly to a film coating apparatus that can adjust the width of a coating slit.
薄膜塗佈裝置可塗佈一薄膜材料於一工件上。藉由調整薄膜塗佈裝置之塗佈狹縫的寬度,可控制形成之薄膜的厚度。然而,塗佈狹縫位於薄膜塗佈裝置中剛性較強部位的寬度與其它部位的寬度差異大,如此導致所形成之薄膜的厚度變異大,例如是薄膜的邊緣厚度大於其它部位的厚度(肥邊現象)。The film coating apparatus can apply a film material to a workpiece. The thickness of the formed film can be controlled by adjusting the width of the coating slit of the film coating apparatus. However, the coating slit is located in the thin film coating device, and the width of the portion where the rigidity is strong is different from the width of the other portion, so that the thickness of the formed film is greatly varied, for example, the thickness of the edge of the film is larger than the thickness of other portions (fertilizer Side phenomenon).
本揭露係有關於一種薄膜塗佈裝置,可改善習知肥邊現象。The present disclosure relates to a film coating apparatus that improves the conventional fat edge phenomenon.
根據本揭露之一實施例,提出一種薄膜塗佈裝置。薄膜塗佈裝置包括一第一本體、一第二本體及一第一側蓋。第一本體具有一第一外側面及一從第一外側面往第一本體內部延伸之凹槽。第一本體之凹槽區隔第一本體為一可調整部與一基座部。第二本體相對第一本體配置,且與第一本體之間形成一塗佈狹縫。第一側蓋具有一與可調整部固定的一第一固定點且具有一 內側面、一第二外側面、一第一切割道及一第二切割道。內側面面向第一本體及第二本體,第一切割道從內側面露出一開口,開口與塗佈狹縫彼此隔離,第二外側面與第一外側面位於薄膜塗佈裝置之一同側,第二切割道從第二外側面往第一側蓋內部延伸,第一固定點位於第一切割道與第二切割道所圍繞的區域內。According to an embodiment of the present disclosure, a thin film coating apparatus is proposed. The film coating device includes a first body, a second body and a first side cover. The first body has a first outer side surface and a recess extending from the first outer side surface toward the interior of the first body. The recess of the first body is separated by the first body as an adjustable portion and a base portion. The second body is disposed opposite to the first body and forms a coating slit with the first body. The first side cover has a first fixing point fixed to the adjustable portion and has a An inner side surface, a second outer side surface, a first cutting lane and a second cutting lane. The inner side surface faces the first body and the second body, the first cutting path exposes an opening from the inner side surface, the opening and the coating slit are separated from each other, and the second outer side surface and the first outer side surface are located on the same side of the film coating device, The second cutting path extends from the second outer side surface toward the inside of the first side cover, and the first fixing point is located in a region surrounded by the first cutting path and the second cutting path.
根據本揭露之另一實施例,提出一種薄膜塗佈裝置。薄膜塗佈裝置包括一第一本體、一第二本體及一第一側蓋。第一本體具有一第一外側面及一從第一外側面往內延伸之凹槽,凹槽區隔第一本體為一可調整部與一基座部。第二本體相對第一本體配置,且與第一本體之間形成一塗佈狹縫。第一側蓋具有一與可調整部固定的第一固定點、一內側面及一切割道。切割道環繞第一固定點。According to another embodiment of the present disclosure, a thin film coating apparatus is proposed. The film coating device includes a first body, a second body and a first side cover. The first body has a first outer side surface and a groove extending inwardly from the first outer side surface. The recessed portion partitions the first body into an adjustable portion and a base portion. The second body is disposed opposite to the first body and forms a coating slit with the first body. The first side cover has a first fixing point fixed to the adjustable portion, an inner side surface and a cutting path. The cutting track surrounds the first fixed point.
為了對本揭露之上述及其他方面有更佳的瞭解,下文特舉較佳實施例,並配合所附圖式,作詳細說明如下:In order to better understand the above and other aspects of the present disclosure, the preferred embodiments are described below in detail with reference to the accompanying drawings.
100‧‧‧薄膜塗佈裝置100‧‧‧film coating device
100R‧‧‧塗佈狹縫100R‧‧‧ coating slit
100Ra‧‧‧開口100Ra‧‧‧ openings
110‧‧‧第一本體110‧‧‧First Ontology
110h‧‧‧貫孔110h‧‧‧through hole
110s1‧‧‧第一外側面110s1‧‧‧ first outer side
110r‧‧‧凹槽110r‧‧‧ Groove
111‧‧‧第一本體之可調整部111‧‧‧Adjustable part of the first body
111t‧‧‧第一鎖孔111t‧‧‧first keyhole
112‧‧‧第一本體之基座部112‧‧‧The base of the first body
112t‧‧‧第二鎖孔112t‧‧‧second keyhole
120‧‧‧第二本體120‧‧‧Second ontology
120r‧‧‧內流道120r‧‧‧inner runner
120t‧‧‧第三鎖孔120t‧‧‧ third keyhole
130‧‧‧第一側蓋130‧‧‧First side cover
130a‧‧‧開口130a‧‧‧ openings
130b‧‧‧下緣130b‧‧‧ lower edge
130c1、230c1‧‧‧第一切割道130c1, 230c1‧‧‧ first cutting lane
130c2、230c2‧‧‧第二切割道130c2, 230c2‧‧‧ second cutting lane
130h1‧‧‧第一貫孔130h1‧‧‧first through hole
130h2‧‧‧第二貫孔130h2‧‧‧second through hole
130h3‧‧‧第三貫孔130h3‧‧‧Through hole
130r‧‧‧凹槽130r‧‧‧ Groove
130s1‧‧‧內側面130s1‧‧‧ inside side
130s2‧‧‧第二外側面130s2‧‧‧Second outer side
130s3‧‧‧端面130s3‧‧‧ end face
130s4‧‧‧第三外側面130s4‧‧‧ third outer side
130s5‧‧‧第四外側面130s5‧‧‧fourth outer side
130u‧‧‧上緣130u‧‧‧Upper edge
131‧‧‧第一側蓋之可調整部131‧‧‧Adjustable part of the first side cover
131t、132t‧‧‧內螺孔131t, 132t‧‧‧ inner screw hole
132‧‧‧第一側蓋之基座部132‧‧‧Base portion of the first side cover
140‧‧‧第二側蓋140‧‧‧Second side cover
150‧‧‧調整元件150‧‧‧Adjustment components
151‧‧‧內螺帽151‧‧‧ inner nut
152‧‧‧螺栓152‧‧‧ bolt
153‧‧‧外螺帽153‧‧‧ outer nut
230c‧‧‧切割道230c‧‧‧ cutting road
230c3‧‧‧環形切割道230c3‧‧‧Circular cutting
230c4‧‧‧第一線形切割道230c4‧‧‧First linear cutting
230c5‧‧‧第二線形切割道230c5‧‧‧Second linear cutting
A1‧‧‧鈍角A1‧‧‧ obtuse angle
A2‧‧‧銳角A2‧‧‧ acute angle
C1~C5‧‧‧曲線C1~C5‧‧‧ Curve
W、W’‧‧‧寬度W, W’‧‧‧Width
第1A圖繪示依照本揭露一實施例之薄膜塗佈裝置的分解圖。FIG. 1A is an exploded view of a thin film coating apparatus according to an embodiment of the present disclosure.
第1B圖繪示第1A圖之第一側蓋的側視圖。FIG. 1B is a side view showing the first side cover of FIG. 1A.
第1C圖繪示第1B圖之俯視圖。Fig. 1C is a plan view showing Fig. 1B.
第1D圖繪示第1A圖之薄膜塗佈裝置組合後的俯視圖。Fig. 1D is a plan view showing the combination of the film coating apparatuses of Fig. 1A.
第2圖繪示依照本揭露另一實施例之第一側蓋的側視圖。FIG. 2 is a side view of the first side cover according to another embodiment of the present disclosure.
第3圖繪示依照本揭露另一實施例之第一側蓋的側視圖。FIG. 3 is a side view of the first side cover according to another embodiment of the present disclosure.
第4圖繪示依照本揭露另一實施例之第一側蓋的側視圖。FIG. 4 is a side view of the first side cover according to another embodiment of the present disclosure.
第5圖繪示依照本揭露另一實施例之第一側蓋的側視圖。FIG. 5 is a side view of the first side cover according to another embodiment of the present disclosure.
第6圖繪示依照本揭露另一實施例之第一側蓋的側視圖。FIG. 6 is a side view of the first side cover according to another embodiment of the present disclosure.
第7圖繪示依照本揭露另一實施例之第一側蓋的側視圖。FIG. 7 is a side view of the first side cover according to another embodiment of the present disclosure.
第8圖繪示依照本揭露另一實施例之第一側蓋的側視圖。FIG. 8 is a side view of the first side cover according to another embodiment of the present disclosure.
第9圖繪示依照本揭露另一實施例之第一側蓋的側視圖。FIG. 9 is a side view of the first side cover according to another embodiment of the present disclosure.
第10圖繪示依照本揭露另一實施例之第一側蓋的側視圖。FIG. 10 is a side view of a first side cover according to another embodiment of the present disclosure.
第11圖繪示依照本揭露另一實施例之第一側蓋的側視圖。11 is a side view of a first side cover in accordance with another embodiment of the present disclosure.
第12圖繪示依照本揭露另一實施例之第一側蓋的側視圖。Figure 12 is a side elevational view of the first side cover in accordance with another embodiment of the present disclosure.
第13圖繪示依照本揭露另一實施例之第一側蓋的側視圖。Figure 13 is a side elevational view of the first side cover in accordance with another embodiment of the present disclosure.
第14圖繪示依照本揭露另一實施例之第一側蓋的側視圖。Figure 14 is a side elevational view of the first side cover in accordance with another embodiment of the present disclosure.
第15A圖繪示依照本揭露另一實施例之第一側蓋的側視圖。15A is a side view of a first side cover according to another embodiment of the present disclosure.
第15B圖繪示第15A圖之俯視圖。Fig. 15B is a plan view showing Fig. 15A.
第16圖繪示習知薄膜塗佈裝置與本實施例之塗佈狹縫寬度的示意圖。Fig. 16 is a view showing the width of a coating slit of the conventional film coating apparatus and the present embodiment.
第17圖繪示第1A圖之薄膜塗佈裝置所塗佈之薄膜的厚度曲線圖。Fig. 17 is a graph showing the thickness of a film coated by the film coating apparatus of Fig. 1A.
請參照第1A圖,其繪示依照本揭露一實施例之薄膜塗佈裝置的分解圖。薄膜塗佈裝置100包括第一本體110、第二本體120、第一側蓋130及第二側蓋140。Please refer to FIG. 1A, which is an exploded view of a thin film coating apparatus according to an embodiment of the present disclosure. The film coating apparatus 100 includes a first body 110, a second body 120, a first side cover 130, and a second side cover 140.
第一本體110具有第一外側面110s1及凹槽110r, 其中凹槽110r從第一外側面110s1往第一本體110內部延伸。凹槽110r區隔第一本體110為可調整部111與基座部112,其中基座部112的剛性大於可調整部111,即可調整部111的可撓性大於基座部112,使可調整部111相對基座部112係可形變,藉以調整塗佈狹縫100R(第1D圖)的寬度W。藉由調整塗佈狹縫100R(第1D圖)的寬度W,可控制使用其所形成之薄膜的厚度。此外,第一本體110具有數個貫孔110h,數個調整元件150(繪示於第1B圖)各別設於對應之貫孔110h內,藉以調整可調整部111與基座部112的相對位置。The first body 110 has a first outer side surface 110s1 and a recess 110r. The groove 110r extends from the first outer side surface 110s1 to the inside of the first body 110. The recess 110r partitions the first body 110 into an adjustable portion 111 and a base portion 112. The rigidity of the base portion 112 is greater than the adjustable portion 111, that is, the flexibility of the adjusting portion 111 is greater than that of the base portion 112. The adjustment portion 111 is deformable with respect to the base portion 112, thereby adjusting the width W of the coating slit 100R (Fig. 1D). By adjusting the width W of the coating slit 100R (Fig. 1D), the thickness of the film formed using the film can be controlled. In addition, the first body 110 has a plurality of through holes 110h, and a plurality of adjusting elements 150 (shown in FIG. 1B) are respectively disposed in the corresponding through holes 110h, thereby adjusting the relative position of the adjustable portion 111 and the base portion 112. position.
第二本體120具有內流道120r。當薄膜塗佈裝置100進行塗佈製程時,工作流體經由內流道120r從塗佈狹縫100R噴出而塗佈於一工件(未繪示)上。The second body 120 has an inner flow passage 120r. When the film coating apparatus 100 performs a coating process, the working fluid is ejected from the coating slit 100R via the inner flow path 120r to be applied to a workpiece (not shown).
第一側蓋130與第二側蓋140分別固定於第一本體110與第二本體120的相對二端面。第一側蓋130與第二側蓋140具有相似結構,以下係以第一側蓋130為例說明。The first side cover 130 and the second side cover 140 are respectively fixed to opposite end faces of the first body 110 and the second body 120. The first side cover 130 and the second side cover 140 have a similar structure, and the first side cover 130 is exemplified below.
第一側蓋130具有第一貫孔130h1(第一固定點),而第一本體110之可調整部111具有一第一鎖孔111t,鎖合元件(未繪示)穿過第一貫孔130h1而鎖合於第一鎖孔111t內,以固定第一側蓋130與可調整部111的相對位置。此外,第一側蓋130具有第二貫孔130h2(第二固定點),而第一本體110之基座部112具有一第二鎖孔112t,鎖合元件(未繪示)穿過第二貫孔130h2而鎖和於第二鎖孔112t內,以固定第一側蓋130與基座部112的相 對位置。另外,第一側蓋130與第二本體120可採用相似的鎖合方式固定其相對位置。The first side cover 130 has a first through hole 130h1 (first fixed point), and the adjustable portion 111 of the first body 110 has a first locking hole 111t through which the locking component (not shown) passes. 130h1 is locked in the first locking hole 111t to fix the relative position of the first side cover 130 and the adjustable portion 111. In addition, the first side cover 130 has a second through hole 130h2 (second fixed point), and the base portion 112 of the first body 110 has a second locking hole 112t, and a locking component (not shown) passes through the second The through hole 130h2 is locked in the second locking hole 112t to fix the phase of the first side cover 130 and the base portion 112. For the location. In addition, the first side cover 130 and the second body 120 can be fixed in their relative positions by a similar locking manner.
請參照第1B圖,其繪示第1A圖之第一側蓋的側視圖。第一側蓋130且具有內側面130s1、與第二外側面130s2(第1A圖)、第一切割道130c1及第二切割道130c2。內側面130s1面向第一本體110及第二本體120。第一切割道130c1從內側面130s1露出一開口130a。當薄膜塗佈裝置100組裝後,開口130a與塗佈狹縫100R(為方便理解,塗佈狹縫100R的位置以虛線繪示於第1B圖)係錯開且隔離,即不相通,如此,使位於塗佈狹縫100R內的工作流體不易經由第一切割道130c1洩漏。第二外側面130s2與第一外側面110s1位於薄膜塗佈裝置100之一同側,第二切割道130c2從第二外側面130s2往第一側蓋130內部延伸。Please refer to FIG. 1B, which shows a side view of the first side cover of FIG. 1A. The first side cover 130 has an inner side surface 130s1 and a second outer side surface 130s2 (FIG. 1A), a first cutting lane 130c1, and a second cutting lane 130c2. The inner side surface 130s1 faces the first body 110 and the second body 120. The first cutting lane 130c1 exposes an opening 130a from the inner side surface 130s1. After the film coating apparatus 100 is assembled, the opening 130a and the coating slit 100R (for ease of understanding, the position of the coating slit 100R is shown by a broken line in FIG. 1B) is staggered and isolated, that is, not connected, thus The working fluid located in the coating slit 100R is less likely to leak through the first scribe line 130c1. The second outer side surface 130s2 and the first outer side surface 110s1 are located on the same side of one of the film coating devices 100, and the second cutting path 130c2 extends from the second outer side surface 130s2 to the inside of the first side cover 130.
第一切割道130c1與第二切割道130c2可採用例如是線切割放電加工(Wire Electrical Discharging Machine)、機械刀具加工、鋸削、電火花加工(Electrical Discharge Machining,EDM)、鑄造工法或其它合適製程所形成。本實施例中,第一切割道130c1與第二切割道130c2弱化第一側蓋130的強度,使第一切割道130c1與第二切割道130c2所圍繞的區域成為一可調整部131。上述第一貫孔130h1係設於可調整部131。由於第一側蓋130之可調整部131與第一本體110的可調整部111(第1A圖)固定,使當第一本體110的可調整部111受到調整時,第一側蓋130之可調整部131被可調整部111帶動而形變。由於第一側蓋 130之可調整部131本身因為弱化而具有可撓性,使當第一本體110的可調整部111受到調整而形變時,第一側蓋130之可調整部131容易形變,進而使塗佈狹縫100R靠近第一側蓋130的寬度W(第1D圖)可容易調整,如容易擴大或縮小。The first dicing street 130c1 and the second dicing street 130c2 may be, for example, a Wire Electrical Discharging Machine, a mechanical tooling, a sawing, an Electrical Discharge Machining (EDM), a casting method, or other suitable process. Formed. In the embodiment, the first cutting lane 130c1 and the second cutting lane 130c2 weaken the strength of the first side cover 130, so that the area surrounded by the first cutting lane 130c1 and the second cutting lane 130c2 becomes an adjustable portion 131. The first through hole 130h1 is provided in the adjustable portion 131. Since the adjustable portion 131 of the first side cover 130 is fixed to the adjustable portion 111 (FIG. 1A) of the first body 110, when the adjustable portion 111 of the first body 110 is adjusted, the first side cover 130 can be The adjustment unit 131 is deformed by the adjustable portion 111. Due to the first side cover The adjustable portion 131 of the 130 itself has flexibility due to weakening, so that when the adjustable portion 111 of the first body 110 is deformed by adjustment, the adjustable portion 131 of the first side cover 130 is easily deformed, thereby making the coating narrow. The width W (FIG. 1D) of the slit 100R close to the first side cover 130 can be easily adjusted, such as being easily enlarged or reduced.
此外,第一切割道130c1與第二切割道130c2所圍繞區域之外的區域成為剛性較強(相對於可調整部131)的基座部132。上述第二貫孔130h2係設於基座部132。Further, the region other than the region surrounded by the first dicing street 130c1 and the second dicing street 130c2 becomes the base portion 132 which is relatively rigid (relative to the adjustable portion 131). The second through hole 130h2 is provided in the base portion 132.
第一側蓋130具有一端面130s3,其與塗佈狹縫100R之開口100Ra位於第一側蓋130之同側。第一切割道130c1從端面130s3沿一曲線路徑、一直線路徑或其組合路徑往接近第二切割道130c2的方向延伸。本實施例之第一切割道130c1係以沿直線路徑延伸為例說明。The first side cover 130 has an end surface 130s3 which is located on the same side of the first side cover 130 as the opening 100Ra of the coating slit 100R. The first cutting lane 130c1 extends from the end surface 130s3 in a direction close to the second cutting lane 130c2 along a curved path, a straight path, or a combination thereof. The first dicing street 130c1 of this embodiment is extended as an example along a straight path.
第一切割道130c1延伸至與第二切割道130c2的延伸線相交。例如,第二切割道130c2的上緣130u的延伸線L1與第一切割道130c1相交,使可調整部131具有足夠的可撓性。另一實施例中,第二切割道130c2的下緣130b的延伸線與第一切割道130c1相交,使可調整部131具有更好的可撓性。相較於第一切割道130c1未延伸至與第二切割道130c2的延伸線相交,由於本實施例之第一切割道130c1延伸至與第二切割道130c2的延伸線相交,使第一側蓋130中連接第一切割道130c1與第二切割道130c2的材料較少,進而使可調整部131具有更好的可撓性。當第一側蓋130中連接第一切割道130c1與第二切割道130c2的材 料愈少時,可調整部131的撓性愈好。The first scribe line 130c1 extends to intersect the extension line of the second scribe line 130c2. For example, the extension line L1 of the upper edge 130u of the second scribe line 130c2 intersects the first scribe line 130c1, so that the adjustable portion 131 has sufficient flexibility. In another embodiment, the extension line of the lower edge 130b of the second scribe line 130c2 intersects the first scribe line 130c1 to provide the adjustable portion 131 with better flexibility. Compared to the first scribe line 130c1 not extending to intersect the extension line of the second scribe line 130c2, since the first scribe line 130c1 of the embodiment extends to intersect the extension line of the second scribe line 130c2, the first side cover is made The material of the first cutting lane 130c1 and the second cutting lane 130c2 is less than 130, and the adjustable portion 131 has better flexibility. When the first side cover 130 is connected to the first cutting lane 130c1 and the second cutting lane 130c2 The less the material is, the better the flexibility of the adjustable portion 131 is.
薄膜塗佈裝置100更包括調整元件150,其連接第一側蓋130之可調整部131與基座部132,以調整可調整部131與基座部132的相對位置。詳細來說,可調整部131及基座部132分別具有內螺孔131t及132t。調整元件150包括內螺帽151、螺栓152及外螺帽153,透過內螺帽151及螺栓152的行程調整,可調整可調整部131與基座部132的相對位置,進而調整塗佈狹縫100R的寬度W(第1D圖)。當塗佈狹縫100R的寬度W(第1D圖)調整至一預設寬度後,透過鎖緊外螺帽153可固定可調整部131與基座部132的相對位置。在調整第一本體110之可調整部111後,若仍未獲得預期的塗佈狹縫寬度(例如,塗佈狹縫100R靠近第一側蓋130之處的寬度相較於中間的塗佈狹縫寬度仍過大或過小),則可單獨操作調整元件150,以獲得各點寬度大致相同的塗佈狹縫。The film coating apparatus 100 further includes an adjusting component 150 that connects the adjustable portion 131 of the first side cover 130 and the base portion 132 to adjust the relative position of the adjustable portion 131 and the base portion 132. Specifically, the adjustable portion 131 and the base portion 132 have inner screw holes 131t and 132t, respectively. The adjusting member 150 includes an inner nut 151, a bolt 152 and an outer nut 153. Through the stroke adjustment of the inner nut 151 and the bolt 152, the relative position of the adjustable portion 131 and the base portion 132 can be adjusted, and the coating slit can be adjusted. The width W of 100R (Fig. 1D). When the width W (FIG. 1D) of the coating slit 100R is adjusted to a predetermined width, the relative position of the adjustable portion 131 and the base portion 132 can be fixed by the locking outer nut 153. After the adjustable portion 111 of the first body 110 is adjusted, if the desired coating slit width is still not obtained (for example, the width of the coating slit 100R near the first side cover 130 is smaller than that in the middle. If the slit width is still too large or too small, the adjustment member 150 can be operated separately to obtain coating slits having substantially the same width at each dot.
請參照第1C圖,其繪示第1B圖之俯視圖。第一側蓋130具有第三外側面130s4,其與內側面130s1相對。如第1C圖所示,第一切割道130c1從內側面130s1沿直線路徑、曲線路徑或其組合路徑延伸到第三外側面130s4,即第一切割道130c1貫穿第一側蓋130的厚度。本實施例中,第一切割道130c1垂直於內側面130s1,且以直線路徑延伸至第三外側面130s4。Please refer to FIG. 1C for a plan view of FIG. 1B. The first side cover 130 has a third outer side 130s4 that is opposite to the inner side 130s1. As shown in FIG. 1C, the first scribe line 130c1 extends from the inner side surface 130s1 along a linear path, a curved path, or a combination thereof to the third outer side surface 130s4, that is, the first scribe line 130c1 penetrates the thickness of the first side cover 130. In this embodiment, the first cutting lane 130c1 is perpendicular to the inner side surface 130s1 and extends in a straight path to the third outer side surface 130s4.
請參照第1D圖,其繪示第1A圖之薄膜塗佈裝置組合後的俯視圖。薄膜塗佈裝置100組合後,第二本體120相對第 一本體110配置,且與第一本體110之間形成塗佈狹縫100R。由於第一切割道130c1及第二切割道130c2的設計,塗佈狹縫100R靠近第一側蓋130的寬度W比習知塗佈狹縫靠近第一側蓋130的寬度W’更容易調整。進一步地說,就擴大寬度的相同大小調整力而言,本實施例之塗佈狹縫100R靠近第一側蓋130的寬度W比習知塗佈狹縫之靠近第一側蓋130的寬度W’還寬(因為容易調寬)。雖然未繪示,然就縮小寬度的相同大小調整力而言,本實施例之塗佈狹縫100R靠近第一側蓋130的寬度W比習知塗佈狹縫之靠近第一側蓋130的寬度W’還窄(因為容易調窄)。Referring to FIG. 1D, a plan view of the film coating apparatus of FIG. 1A is shown. After the film coating device 100 is combined, the second body 120 is relatively A body 110 is disposed and a coating slit 100R is formed with the first body 110. Due to the design of the first dicing street 130c1 and the second dicing street 130c2, the width W of the coating slit 100R close to the first side cover 130 is more easily adjusted than the width W' of the conventional coating slit near the first side cover 130. Further, in terms of the same size adjustment force for expanding the width, the width W of the coating slit 100R of the present embodiment close to the first side cover 130 is closer to the width W of the first side cover 130 than the conventional coating slit. 'It's still wide (because it's easy to widen). Although not shown, the width W of the coating slit 100R of the present embodiment near the first side cover 130 is closer to the first side cover 130 than the conventional coating slit, in terms of the same size adjustment force of the reduced width. The width W' is also narrow (because it is easy to narrow).
請參照第2圖,其繪示依照本揭露另一實施例之第一側蓋的側視圖。相較於第1B圖之第一側蓋130,本實施例之第二切割道130c2係細線形切割道,其寬度小於第1B圖之第二切割道130c2。本實施例中,凹槽110r(為方便理解,以虛線繪示凹槽110r的位置)位於第一貫孔130h1與第二貫孔130h2之間,使第一側蓋130的可調整部131與第一本體110的可調整部111(可調整部111的可撓性較佳)固定,而不與第一本體110的基座部112(基座部112的可撓性較差)固定,因此不致讓可調整部131受到過度拘束。Please refer to FIG. 2 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. Compared with the first side cover 130 of FIG. 1B, the second cutting path 130c2 of the present embodiment is a thin line-shaped cutting path having a width smaller than that of the second cutting path 130c2 of FIG. In this embodiment, the groove 110r (for the sake of easy understanding, the position of the groove 110r is indicated by a broken line) is located between the first through hole 130h1 and the second through hole 130h2, so that the adjustable portion 131 of the first side cover 130 is The adjustable portion 111 of the first body 110 (the flexibility of the adjustable portion 111 is preferably) is fixed, and is not fixed to the base portion 112 of the first body 110 (the flexibility of the base portion 112 is poor), so The adjustable portion 131 is excessively restrained.
請參照第3圖,其繪示依照本揭露另一實施例之第一側蓋的側視圖。與第2圖之第一側蓋不同的是,本實施例之第二切割道130c2的位置位於凹槽110r與第一貫孔130h1之間。與第2圖之第一側蓋130相似的是,凹槽110r(為方便理解,凹槽 110r的位置以虛線繪示)仍位於第一貫孔130h1與第二貫孔130h2之間,如此使可調整部131不與第一本體110的基座部112固定,因此不會讓可調整部131受到過度拘束。Please refer to FIG. 3 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. Different from the first side cover of FIG. 2, the second cutting path 130c2 of the present embodiment is located between the groove 110r and the first through hole 130h1. Similar to the first side cover 130 of FIG. 2, the groove 110r (for ease of understanding, the groove The position of the 110r is shown by a broken line. It is still located between the first through hole 130h1 and the second through hole 130h2, so that the adjustable portion 131 is not fixed to the base portion 112 of the first body 110, so that the adjustable portion is not allowed. 131 is over-constrained.
請參照第4圖,其繪示依照本揭露另一實施例之第一側蓋的側視圖。第一側蓋130具有第一切割道130c1、第二切割道130c2及數個第一貫孔130h1。本實施例中,數個第一貫孔130h1位於第一切割道130c1與第二切割道130c2圍繞的區域內。由於凹槽110r(為方便理解,凹槽110r的位置以虛線繪示)仍位於第一貫孔130h1與第二貫孔130h2之間,使可調整部131不與第一本體110的基座部112固定,因此不會讓可調整部131受到過度拘束。第一貫孔130h1的數量可以是二個,或二個以上。Please refer to FIG. 4 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. The first side cover 130 has a first cutting lane 130c1, a second cutting lane 130c2, and a plurality of first through holes 130h1. In this embodiment, the plurality of first through holes 130h1 are located in a region surrounded by the first cutting path 130c1 and the second cutting path 130c2. Since the groove 110r (the position of the groove 110r is shown by a broken line for convenience of understanding) is still located between the first through hole 130h1 and the second through hole 130h2, so that the adjustable portion 131 does not overlap with the base portion of the first body 110. 112 is fixed, so that the adjustable portion 131 is not excessively restrained. The number of the first constant holes 130h1 may be two or more.
請參照第5圖,其繪示依照本揭露另一實施例之第一側蓋的側視圖。本實施例中,第二切割道103c2的剖面形狀係三角形。另一實施例中,第二切割道103c2的剖面形狀可以是橢圓形的一部分、圓形的一部分或多邊形的一部分。只要可讓第一側蓋130具備可撓性,第一側蓋130之第二切割道130c2的剖面形狀不受本揭露實施例所限制。Please refer to FIG. 5, which illustrates a side view of a first side cover according to another embodiment of the present disclosure. In this embodiment, the cross-sectional shape of the second dicing street 103c2 is a triangle. In another embodiment, the cross-sectional shape of the second scribe line 103c2 may be a part of an ellipse, a part of a circle, or a part of a polygon. The cross-sectional shape of the second scribe line 130c2 of the first side cover 130 is not limited by the disclosed embodiment as long as the first side cover 130 can be made flexible.
請參照第6圖,其繪示依照本揭露另一實施例之第一側蓋的側視圖。第一側蓋130之第一切割道130c1從內側面130s1傾斜地延伸至第三外側面130s4。具體而言,第一切割道130c1從內側面130s1以遠離第二外側面130s2的方式傾斜地延伸至第三外側面130s4,使第一切割道130c1與內側面130s1夾 一鈍角A1。另一實施例中,第一切割道130c1可沿曲線路徑或直線與曲線的組合路徑傾斜地延伸至第三外側面130s4。藉由設計鈍角A1的數值,可決定第一側蓋130中連接第一切割道130c1與第一切割道130c1的材料體積,藉此決定可調整部131的可撓性。Please refer to FIG. 6 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. The first cutting lane 130c1 of the first side cover 130 extends obliquely from the inner side surface 130s1 to the third outer side surface 130s4. Specifically, the first cutting lane 130c1 extends obliquely from the inner side surface 130s1 away from the second outer side surface 130s2 to the third outer side surface 130s4, so that the first cutting lane 130c1 and the inner side surface 130s1 are sandwiched. An obtuse angle A1. In another embodiment, the first scribe line 130c1 may extend obliquely to the third outer side surface 130s4 along a curved path or a combined path of a straight line and a curved line. By designing the value of the obtuse angle A1, the material volume connecting the first dicing street 130c1 and the first dicing street 130c1 in the first side cover 130 can be determined, thereby determining the flexibility of the adjustable portion 131.
請參照第7圖,其繪示依照本揭露另一實施例之第一側蓋的側視圖。與第6圖之第一側蓋130不同的是,本實施例之第一側蓋130之第一切割道130c1與內側面130s1夾一銳角A2,並沿一直線路徑傾斜地延伸至第三外側面130s4。Please refer to FIG. 7 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. Different from the first side cover 130 of FIG. 6, the first cutting path 130c1 of the first side cover 130 of the embodiment has an acute angle A2 with the inner side surface 130s1 and extends obliquely along the straight path to the third outer side surface 130s4. .
請參照第8圖,其繪示依照本揭露另一實施例之第一側蓋的側視圖。與第6圖之第一側蓋130不同的是,本實施例之第一側蓋130之第一切割道130c1沿多段直線路徑傾斜地延伸,其中多段直線路徑係不平滑地連接。Please refer to FIG. 8 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. Different from the first side cover 130 of FIG. 6, the first cutting path 130c1 of the first side cover 130 of the present embodiment extends obliquely along a plurality of straight paths, wherein the plurality of straight paths are not smoothly connected.
請參照第9圖,其繪示依照本揭露另一實施例之第一側蓋的側視圖。第一側蓋230具有切割道230c,其環繞第一貫孔130h1。具體而言,切割道230c係一螺旋形切割道,其環繞第一貫孔130h1至少一圈,使第一側蓋230的可調整部131具備足夠可撓性。切割道230c的形成方法可相似於第一切割道130c1,容此不再贅述。Please refer to FIG. 9 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. The first side cover 230 has a cutting lane 230c that surrounds the first through hole 130h1. Specifically, the cutting path 230c is a spiral cutting path that surrounds the first through hole 130h1 at least one turn, so that the adjustable portion 131 of the first side cover 230 has sufficient flexibility. The forming method of the cutting lane 230c can be similar to the first cutting lane 130c1, and will not be described again.
請參照第10圖,其繪示依照本揭露另一實施例之第一側蓋的側視圖。與第9圖之第一側蓋230不同的是,本實施例之切割道230c從端面130s3延伸至環繞第一貫孔130h1。Please refer to FIG. 10, which illustrates a side view of a first side cover according to another embodiment of the present disclosure. Different from the first side cover 230 of FIG. 9, the cutting path 230c of the present embodiment extends from the end surface 130s3 to surround the first through hole 130h1.
請參照第11圖,其繪示依照本揭露另一實施例之第 一側蓋的側視圖。與第10圖之第一側蓋230不同的是,本實施例之切割道230c從第二外側面130s2延伸至環繞第一貫孔130h1。Please refer to FIG. 11 , which illustrates another embodiment of the present disclosure. Side view of the side cover. Different from the first side cover 230 of FIG. 10, the cutting path 230c of the present embodiment extends from the second outer side surface 130s2 to surround the first through hole 130h1.
請參照第12圖,其繪示依照本揭露另一實施例之第一側蓋的側視圖。本實施例中,切割道230c包括第一切割道230c1及第二切割道230c2,其中第一切割道230c1環繞第一貫孔130h1之第一側,而第二切割道230c2環繞第一貫孔130h1之第二側,其中第一側相對於第二側。具體而言,第一切割道230c1與第二切割道230c2各包括環形切割道230c3、第一線形切割道230c4及第二線形切割道230c5,其中環形切割道230c3具有第一端與第二端,第一線形切割道230c4從環形切割道230c3之第一端往第一側蓋130之外延伸,而第二線形切割道230c5從環形切割道230c3之第二端往第一側蓋130之內延伸。本實施例中,第一線形切割道230c4從環形切割道230c3之第一端往端面130s3或第二外側面130s2的方向延伸,但不延伸至端面130s3或第二外側面130s2,而第二線形切割道230c5從環形切割道230c3之第二端往第四外側面130s5的方向延伸,但不延伸至內部流道。Please refer to FIG. 12, which illustrates a side view of a first side cover according to another embodiment of the present disclosure. In this embodiment, the cutting lane 230c includes a first cutting lane 230c1 and a second cutting lane 230c2, wherein the first cutting lane 230c1 surrounds the first side of the first through hole 130h1, and the second cutting lane 230c2 surrounds the first through hole 130h1. The second side of the first side, wherein the first side is opposite the second side. Specifically, the first cutting lane 230c1 and the second cutting lane 230c2 each include an annular cutting lane 230c3, a first linear cutting lane 230c4, and a second linear cutting lane 230c5, wherein the circular cutting lane 230c3 has a first end and a second end, The first linear cutting channel 230c4 extends from the first end of the annular cutting channel 230c3 to the outside of the first side cover 130, and the second linear cutting channel 230c5 extends from the second end of the annular cutting channel 230c3 to the first side cover 130. . In this embodiment, the first linear cutting path 230c4 extends from the first end of the annular cutting path 230c3 toward the end surface 130s3 or the second outer side surface 130s2, but does not extend to the end surface 130s3 or the second outer side surface 130s2, and the second linear shape The cutting lane 230c5 extends from the second end of the annular cutting passage 230c3 toward the fourth outer side surface 130s5, but does not extend to the inner flow passage.
請參照第13圖,其繪示依照本揭露另一實施例之第一側蓋的側視圖。本實施例中,切割道230c包括環形切割道230c3及二第二線形切割道230c5,其中環形切割道230c3環繞第一貫孔130h1,而二第二線形切割道230c5分別連接於環形切割道230c3的二端。本實施例中,環形切割道230c3環繞第一貫孔130h1至少半圈;另一實施例中,環形切割道230c3環繞第一貫孔130h1 可少於半圈。Please refer to FIG. 13 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. In this embodiment, the cutting lane 230c includes an annular cutting passage 230c3 and two second linear cutting passages 230c5, wherein the circular cutting passage 230c3 surrounds the first through hole 130h1, and the second second linear cutting passage 230c5 is respectively connected to the circular cutting passage 230c3. Two ends. In this embodiment, the annular cutting channel 230c3 is at least half a turn around the first through hole 130h1; in another embodiment, the circular cutting channel 230c3 surrounds the first through hole 130h1. Can be less than half a circle.
請參照第14圖,其繪示依照本揭露另一實施例之第一側蓋的側視圖。與第12圖之第一側蓋230不同的是,本實施例之第一線形切割道230c4延伸至端面130s3,而第二線形切割道230c5延伸至第二外側面130s2。另一實施例中,第一線形切割道230c4可延伸至第二外側面130s2。Please refer to FIG. 14 , which illustrates a side view of a first side cover according to another embodiment of the present disclosure. Unlike the first side cover 230 of Fig. 12, the first linear cutting path 230c4 of the present embodiment extends to the end surface 130s3, and the second linear cutting path 230c5 extends to the second outer side surface 130s2. In another embodiment, the first linear cut channel 230c4 can extend to the second outer side 130s2.
綜合上述,第一切割道130c1及第二切割道130c2具有多種延伸方式,其例如是沿一連續直線路徑、多段直線路徑(多段直線非平滑地連接)、一連續曲線路徑(平滑曲線)、多段曲線路徑(多段曲線非平滑地連接)或其組合路徑的方式延伸,其中曲線路徑例如是螺旋路徑、圓形路徑、橢圓形路徑或其它幾何型態的曲線路徑。切割道230c具有多種延伸方式,其例如是沿曲線路徑或直線路徑與曲線路徑的組合路徑的方式延伸,其中曲線路徑例如是螺旋路徑、圓形路徑、橢圓形路徑或其它幾何型態的曲線路徑。只要可讓第一側蓋130及230具備可撓性,第一側蓋130及230之切割道(130c1、130c2、230c、230c1、230c2)的延伸方式不受本揭露實施例所限制。In summary, the first dicing street 130c1 and the second dicing street 130c2 have various extension modes, such as a continuous linear path, a multi-segment linear path (multi-segment lines are not smoothly connected), a continuous curved path (smooth curve), and multiple segments. The curved path (the multi-segment curve is connected non-smoothly) or a combination thereof is extended, wherein the curved path is, for example, a spiral path, a circular path, an elliptical path or a curved path of other geometrical forms. The cutting track 230c has a plurality of extensions, which extend, for example, along a curved path or a combined path of a straight path and a curved path, wherein the curved path is, for example, a spiral path, a circular path, an elliptical path, or a curved path of other geometric shapes. . The manner in which the scribe lines (130c1, 130c2, 230c, 230c1, 230c2) of the first side covers 130 and 230 extend is not limited by the disclosed embodiments as long as the first side covers 130 and 230 are flexible.
請參照第15A及15B圖,第15A圖繪示依照本揭露另一實施例之第一側蓋的側視圖,而第15B圖繪示第15A圖之俯視圖。第一側蓋130具有第三貫孔130h3(第三固定點),其與第一貫孔130h1分別位於第一切割道130c1的相對二側。第二本體120具有第三鎖孔120t(第1A圖),鎖合元件(未繪示)可穿過第三貫孔 130h3而鎖合於第三鎖孔120t內,使第一側蓋130固定於第二本體120。第一側蓋130具有一凹槽130r,凹槽130r從內側面130s1往第三外側面130s4的方向延伸,以減少內側面130s1與第二本體120的接觸面積,進而提升內側面130s1與第一本體110的接觸壓力。如此一來,可增強內側面130s1與第一本體110之間的密合性。Referring to FIGS. 15A and 15B, FIG. 15A is a side view of the first side cover according to another embodiment of the present disclosure, and FIG. 15B is a top view of FIG. 15A. The first side cover 130 has a third through hole 130h3 (third fixed point), which is located on opposite sides of the first cutting path 130c1 and the first through hole 130h1, respectively. The second body 120 has a third locking hole 120t (FIG. 1A), and the locking component (not shown) can pass through the third through hole. 130h3 is locked in the third locking hole 120t to fix the first side cover 130 to the second body 120. The first side cover 130 has a recess 130r extending from the inner side surface 130s1 toward the third outer side surface 130s4 to reduce the contact area between the inner side surface 130s1 and the second body 120, thereby lifting the inner side surface 130s1 and the first surface. The contact pressure of the body 110. In this way, the adhesion between the inner side surface 130s1 and the first body 110 can be enhanced.
雖然上述固定點係以鎖合方式實現,然另一實施例之固定點亦可以卡合、黏合、焊合、鉚合、其它暫時性或永久性的固定方式實現。Although the above-mentioned fixing points are realized in a locking manner, the fixing points of another embodiment can also be realized by engaging, bonding, welding, riveting, and other temporary or permanent fixing methods.
請參照第16圖,其繪示習知薄膜塗佈裝置與本實施例之塗佈狹縫寬度的示意圖。寬度W(X=0)表示塗佈狹縫100R(第1D圖)接近第一側蓋130之處的寬度,寬度W(X=L)表示塗佈狹縫100R接近第二側蓋140之處的寬度。曲線C1表示習知塗佈狹縫從位置X=0至X=L的寬度分佈,曲線C2表示採用第1B圖之第一側蓋130所調整的塗佈狹縫100R從位置X=0至X=L的寬度分佈,而曲線C3表示第2圖之第一側蓋130所調整的塗佈狹縫100R從位置X=0至X=L的寬度分佈。由圖可知,相較於習知塗佈狹縫寬度,由於本揭露實施例弱化之第一側蓋130的設計,使塗佈狹縫100R靠近第一側蓋130的塗佈狹縫寬度W(X=0)、第二側蓋140的塗佈狹縫寬度W(X=L)與中間的塗佈狹縫寬度W(X=L/2)之間的差異縮小,如此可形成尺寸均勻的薄膜。如第16圖之曲線C2所示,藉由調整元件150(第1B圖)的個別調整,使塗佈狹縫 100R靠近第一側蓋130的塗佈狹縫寬度W(X=0)與中間的塗佈狹縫寬度W(X=L/2)之間的差異大幅縮小。Please refer to Fig. 16, which is a schematic view showing the width of the coating slit of the conventional film coating apparatus and the present embodiment. The width W (X = 0) indicates the width of the coating slit 100R (Fig. 1D) near the first side cover 130, and the width W (X = L) indicates that the coating slit 100R is close to the second side cover 140. The width. Curve C1 represents the width distribution of the conventional coating slit from position X=0 to X=L, and curve C2 represents the coating slit 100R adjusted by the first side cover 130 of FIG. 1B from the position X=0 to X. The width distribution of =L, and the curve C3 represents the width distribution of the coating slit 100R adjusted by the first side cover 130 of FIG. 2 from the position X=0 to X=L. As can be seen from the figure, the coating slit 100R is close to the coating slit width W of the first side cover 130 due to the design of the first side cover 130 weakened by the embodiment of the present disclosure. X=0), the difference between the coating slit width W (X=L) of the second side cover 140 and the intermediate coating slit width W (X=L/2) is reduced, so that a uniform size can be formed. film. As shown by the curve C2 of Fig. 16, the coating slit is made by the individual adjustment of the adjusting member 150 (Fig. 1B). The difference between the coating slit width W (X = 0) of 100R close to the first side cover 130 and the intermediate coating slit width W (X = L/2) is greatly reduced.
請參照第17圖,其繪示第1A圖之薄膜塗佈裝置所塗佈之薄膜的厚度曲線圖。曲線C4係習知薄膜塗佈裝置所形成之薄膜的厚度曲線,而曲線C5係以本揭露實施例之薄膜塗佈裝置100所形成之薄膜的厚度曲線。由圖可知,本揭露實施例之薄膜塗佈裝置100所形成之薄膜靠近第一側蓋130的厚度T(X=0)與中間區域的厚度T(X=L/2)之間的差異縮小,即,相較於習知薄膜塗佈裝置所形成之薄膜,本揭露實施例之薄膜塗佈裝置100所形成之薄膜的厚度較為均勻,明顯改善肥邊現象。Please refer to Fig. 17, which is a graph showing the thickness of a film coated by the film coating apparatus of Fig. 1A. Curve C4 is a thickness curve of a film formed by a conventional film coating apparatus, and curve C5 is a thickness curve of a film formed by the film coating apparatus 100 of the disclosed embodiment. As can be seen from the figure, the difference between the thickness T (X=0) of the film formed by the film coating apparatus 100 of the present disclosure near the first side cover 130 and the thickness T (X=L/2) of the intermediate portion is reduced. That is, the thickness of the film formed by the film coating apparatus 100 of the present embodiment is relatively uniform compared to the film formed by the conventional film coating apparatus, and the fat edge phenomenon is remarkably improved.
綜上所述,雖然本揭露已以較佳實施例揭露如上,然其並非用以限定本揭露。本揭露所屬技術領域中具有通常知識者,在不脫離本揭露之精神和範圍內,當可作各種之更動與潤飾。因此,本揭露之保護範圍當視後附之申請專利範圍所界定者為準。In the above, the disclosure has been disclosed in the above preferred embodiments, and is not intended to limit the disclosure. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the disclosure. Therefore, the scope of protection of this disclosure is subject to the definition of the scope of the appended claims.
100‧‧‧薄膜塗佈裝置100‧‧‧film coating device
110‧‧‧第一本體110‧‧‧First Ontology
110h‧‧‧貫孔110h‧‧‧through hole
111‧‧‧可調整部111‧‧‧Adjustable Department
110s1‧‧‧第一外側面110s1‧‧‧ first outer side
110r‧‧‧凹槽110r‧‧‧ Groove
111t‧‧‧第一鎖孔111t‧‧‧first keyhole
112‧‧‧基座部112‧‧‧Base section
112t‧‧‧第二鎖孔112t‧‧‧second keyhole
120‧‧‧第二本體120‧‧‧Second ontology
120r‧‧‧內流道120r‧‧‧inner runner
120t‧‧‧第三鎖孔120t‧‧‧ third keyhole
130‧‧‧第一側蓋130‧‧‧First side cover
130h1‧‧‧第一貫孔130h1‧‧‧first through hole
130h2‧‧‧第二貫孔130h2‧‧‧second through hole
130s1‧‧‧內側面130s1‧‧‧ inside side
130s2‧‧‧第二外側面130s2‧‧‧Second outer side
130s4‧‧‧第三外側面130s4‧‧‧ third outer side
140‧‧‧第二側蓋140‧‧‧Second side cover
Claims (18)
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TW102147219A TWI505875B (en) | 2013-12-19 | 2013-12-19 | Film applying device |
CN201410018970.4A CN104722452B (en) | 2013-12-19 | 2014-01-16 | Film coating device |
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TW200615148A (en) * | 2004-11-04 | 2006-05-16 | Lg Philips Lcd Co Ltd | A printing device and method of coating a printing roll and fabricating a lcd device using the printing device |
US20060269673A1 (en) * | 2003-09-17 | 2006-11-30 | Yapel Robert A | Methods for forming a coating layer having substantially uniform thickness, and die coaters |
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US6017207A (en) * | 1996-09-24 | 2000-01-25 | Cloeren Incorporated | Apparatus for adjusting die lip gap |
JP2009106904A (en) * | 2007-10-31 | 2009-05-21 | Clean Technology Kk | Thin film applying apparatus |
CN201380146Y (en) * | 2009-04-03 | 2010-01-13 | 深圳市嘉拓自动化技术有限公司 | Coating device capable of adjusting clearance between die lips |
JP5498826B2 (en) * | 2010-03-18 | 2014-05-21 | 株式会社城北精工所 | Coating die |
KR101125649B1 (en) * | 2010-05-24 | 2012-03-27 | 삼성에스디아이 주식회사 | Active material coating apparatus and coating method using the same |
CN202570521U (en) * | 2012-03-06 | 2012-12-05 | 宁德新能源科技有限公司 | Extrusion coating head |
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US5702527A (en) * | 1995-02-22 | 1997-12-30 | Minnesota Mining And Manufacturing Company | Restricted flow die |
US6443639B1 (en) * | 1999-06-29 | 2002-09-03 | Applied Science Fiction, Inc. | Slot coater device for applying developer to film for electronic film development |
US20060269673A1 (en) * | 2003-09-17 | 2006-11-30 | Yapel Robert A | Methods for forming a coating layer having substantially uniform thickness, and die coaters |
TW200615148A (en) * | 2004-11-04 | 2006-05-16 | Lg Philips Lcd Co Ltd | A printing device and method of coating a printing roll and fabricating a lcd device using the printing device |
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