TWI503922B - Lifting mechanism - Google Patents

Description

Lifting mechanism

The present invention relates to a lifting mechanism, and more particularly to a lifting mechanism for lifting a substrate.

In general, a thin film deposition machine used in IC manufacturing includes a lifting mechanism for carrying and lifting a substrate for performing a substrate deposition process. Among them, the stability of the lifting mechanism is often one of the main factors affecting the quality of film deposition.

During the reaction of film deposition, the accompanying particles are often easily deposited on the wall of the lifting mechanism, resulting in the sliding unit in the lifting mechanism not moving smoothly, which will affect the quality of the film deposition process; in addition, it is generated in the sliding unit and The frequent friction between the walls of the guiding tube also affects the vertical orientation of the sliding unit, which causes the substrate to tilt and cause abnormalities in manufacturing. Therefore, how to improve the stability of the lifting mechanism and solve the above problems is worthy of correlation. Thoughtful thinking.

The invention provides a lifting mechanism, which can improve the wear problem between the traditional sliding unit and the guiding tube, and can reduce the chance of the reactants accumulating on the tube wall, thereby improving the stability of the lifting mechanism and the quality of the film deposition process.

An embodiment of the present invention provides a lifting mechanism for moving a substrate. The lifting mechanism includes a loading platform for carrying a substrate, and the loading platform has a first passage; and a guiding tube is connected to the loading platform. And the guiding tube has a second passage, the second passage is connected to the first passage; a first sleeve is disposed in the guiding tube and formed with a smooth surface; And disposed in the first sleeve and slidable relative to the smooth surface, the sliding unit has a magnetic element and a rod body, wherein the rod body is fixed on the magnetic element and extends from the second passage toward the first passage; a collar disposed on the magnetic member and abutting between the magnetic member and the smooth surface; and an annular member sleeved on the outside of the guiding tube and slidable relative to the guiding tube, the annular member having a magnet ring And the magnet ring acts a magnetic force on the magnetic element to drive the rod through the first passage and lift the substrate.

In an embodiment, the first sleeve has a Teflon material.

In one embodiment, the lifting mechanism further includes a base and a gasket, the base is detachably connected to the guiding tube, and closes one end of the second passage, and the gasket abuts against the first sleeve and Between the bases.

In an embodiment, the spacer has a Teflon material.

In an embodiment, the collar has a Teflon material.

In one embodiment, the magnetic element is formed with a recess and a plurality of projections extending toward the first sleeve and the rod is coupled to the recess.

In an embodiment, the annular member further has a plurality of magnet rings, and the magnet rings respectively correspond to the protruding portions.

In one embodiment, the first channel includes a first segment and a second segment. The first segment is formed on one side of the first channel adjacent to the substrate, and the second segment is in communication with the first segment. Wherein the second section has a larger outer diameter than the first section.

In one embodiment, the lifting mechanism further includes a second sleeve and a support ring, wherein the second sleeve and the support ring are disposed in the second section, the support ring is fixed to the carrying platform, and the second sleeve is located First section and support ring between.

In an embodiment, the second sleeve has a ceramic material, and the support ring has an aluminum material.

The above described objects, features, and advantages of the invention will be apparent from the description and appended claims

1 is a cross-sectional view of an elevating mechanism according to an embodiment of the present invention. As shown in the drawing, the elevating mechanism 10 can be used in a semiconductor processing machine (for example, a thin film deposition machine), which mainly includes a carrying platform 100 and a guiding tube. 200. A first sleeve 300, a sliding unit 400, at least one set of rings 500, and an annular member 600. The carrying platform 100 is configured to carry a substrate W and has a first channel 101. The guiding tube 200 is connected to the lower side of the carrying platform 100 and has a second channel 201 interconnected with the first channel 101. The sleeve 300 is disposed in the guiding tube 200 and formed with a smooth surface S. The sliding unit 400 is disposed in the first sleeve 300 and slidable along the smooth surface S, wherein the sliding unit 400 includes a magnetic element 401 and a The rod body 402 is fixed to the magnetic element 401 and extends from the second passage 201 toward the first passage 101; the collar 500 is sleeved on the outer side of the magnetic element 401 and abuts against the magnetic element 401 and the foregoing Smooth surface S between. In the embodiment, a set of rings 500 is disposed on each of the upper and lower ends of the magnetic element 401.

In addition, an annular member 600 is sleeved on the outer side of the guiding tube 200 and slidable relative to the guiding tube 200. The annular member 600 is driven by a lifting drive device, and the lifting and lowering driving device may include a cylinder or It is a stepper motor. As shown in FIG. 1, the annular member 600 has at least one magnet ring 601, a magnetic force can be applied to the magnetic element 401, thereby driving the magnetic element 401 and the rod 402 to slide up and down along the second passage 201, and the rod 402 can pass through the first passage 101 to lift the substrate W.

Specifically, the first sleeve 300 and the collar 500 may contain a Teflon material and are in contact with each other, thereby reducing the friction between the first sleeve 300 and the collar 500 to improve the conventional sliding unit 400 ( The problem of wear between the magnetic element 401) and the guide tube 200. In addition, the first sleeve 300 of the embodiment is replaceably disposed in the guiding tube 200, and can be replaced after being used for a long time to avoid tilting of the substrate due to wear of the magnetic member 401, and at the same time reducing the maintenance of the mechanism. The cost.

Continuing to refer to FIG. 1 , the lifting mechanism 10 of the present embodiment further includes a base 700 disposed on the other side of the guiding tube 200 opposite to the loading platform 100 for closing one end of the second channel 201. Maintain the pressure inside the internal cavity of the process machine. It should be emphasized that the base 700 in this embodiment is connected to the guiding tube 200 in a detachable manner (for example, by using the thread structure 702 shown in the drawing), so that the guiding tube 200 can be maintained and the first set can be replaced. The work of the tube 300 is more convenient.

In the embodiment, the bottom of the base 700 is further provided with a gasket 701. The gasket 701 can have a Teflon material like the first sleeve 300, and the gasket 701 abuts the first sleeve 300 and the base. Between 700, the airtightness between the base 700 and the guide tube 200 can be improved accordingly. It should be understood that the first sleeve 300, the collar 500 and the gasket 701 may be made of other materials, and only need to have low friction coefficient and high/low temperature resistance.

Fig. 2 is a view showing the magnetic member 401 of the sliding unit 400 in Fig. 1 It is intended that, as shown in the figure, the magnetic member 401 is formed with a recess 401a and a plurality of projections 401b, wherein the rod 402 is coupled to the recess 401a (see FIG. 1), and the projection is formed. The 401b extends in the direction of the first sleeve 300 and is spaced apart from the first sleeve 300 (as shown in Fig. 1), whereby wear between the magnetic member 401 and the first sleeve 300 can be avoided.

In this embodiment, the magnetic element 401 is integrally formed and contains an iron material, wherein the protruding portions 401b respectively correspond to the magnet rings 601 (refer to FIG. 1) on the annular member 600, and are designed through the structure. The magnet ring 601 can apply a suitable magnetic force to the magnetic element 401, thereby driving the rod 402 connected to the magnetic element 401 through the first passage 101 to lift the substrate W.

3 is a cross-sectional view of the first channel 101 of the carrier 100 in FIG. 1, wherein the first channel 101 includes a first segment 101a and a second segment 101b, and the first segment 101a is formed in the first channel 101. And adjacent to one side of the substrate (not shown), the second segment portion 101b and the first segment portion 101a communicate with each other, and the second segment portion 101b has a larger outer diameter than the first segment portion 101a for A second sleeve 102 and a support ring 103 are received. The support ring 103 is detachably fixed to the bottom side of the carrier 100, and the second sleeve 102 is connected to the first segment 101a and abuts the support ring 103, thereby being fixed in the second segment 101b. In this embodiment, the second sleeve 102 has a ceramic material, and the support ring has an aluminum material. Since the second sleeve 102 has an integrally formed strip-like structure, the particles generated in the thin film deposition reaction can be easily dropped into the guiding tube 200 through the first passage 101, thereby preventing the sliding unit 400 from being Suffered during exercise Sediment is stuck to improve the stability of the lifting mechanism and the quality of the process.

Although the present invention has been disclosed above in the foregoing embodiments, it is not intended to limit the invention. Those skilled in the art having the ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

10‧‧‧ Lifting mechanism

100‧‧‧Loading station

101‧‧‧First Passage

101a‧‧‧The first paragraph

101b‧‧‧second section

102‧‧‧second casing

103‧‧‧Support ring

200‧‧‧ Guide tube

201‧‧‧second channel

300‧‧‧First casing

400‧‧‧Sliding unit

401‧‧‧Magnetic components

401a‧‧‧ Groove

401b‧‧‧protrusion

402‧‧‧ rod body

500‧‧‧ collar

600‧‧‧ ring members

601‧‧‧ magnet ring

700‧‧‧Base

701‧‧‧shims

702‧‧‧Thread structure

S‧‧‧Smooth surface

W‧‧‧Substrate

1 is a cross-sectional view showing an elevating mechanism according to an embodiment of the present invention; FIG. 2 is a view showing a magnetic element of the sliding unit in FIG. 1; and FIG. 3 is a cross-sectional view showing a first passage of the stage in FIG.

10‧‧‧ Lifting mechanism

100‧‧‧Loading station

101‧‧‧First Passage

200‧‧‧ Guide tube

201‧‧‧second channel

300‧‧‧First casing

400‧‧‧Sliding unit

401‧‧‧Magnetic components

402‧‧‧ rod body

500‧‧‧ collar

600‧‧‧ ring members

601‧‧‧ magnet ring

700‧‧‧Base

701‧‧‧shims

702‧‧‧Thread structure

S‧‧‧Smooth surface

W‧‧‧Substrate

Claims (10)

An elevating mechanism for moving a substrate, the elevating mechanism comprising: a carrying platform for carrying the substrate, the carrying platform having a first passage; a guiding tube connecting the carrying platform and having a second passage The second channel is connected to the first channel; a first sleeve is disposed in the guiding tube and formed with a smooth surface; a sliding unit is disposed in the first sleeve and slidable relative to the smooth surface, The sliding unit has a magnetic element and a rod body, wherein the rod body is fixed on the magnetic element and extends from the second passage toward the first passage; a set of rings is disposed on the magnetic element Connected between the magnetic element and the smooth surface; and an annular member sleeved on the outside of the guiding tube and slidable relative to the guiding tube, the annular member has a magnet ring, and the magnet ring acts Magnetic force is applied to the magnetic element to drive the rod through the first passage and lift the substrate. The lifting mechanism of claim 1, wherein the first sleeve has a Teflon material. The lifting mechanism of claim 1, wherein the lifting mechanism further comprises a base and a spacer, the base is detachably connected to the guiding tube, and one end of the second channel is closed, and the The gasket is abutted between the first sleeve and the base. The lifting mechanism of claim 3, wherein the spacer has a Teflon material. The lifting mechanism of claim 1, wherein the collar has a Teflon material. The lifting mechanism of claim 1, wherein the magnetic element is formed with a groove and a plurality of protrusions, the protrusions extending toward the first sleeve, and the rod is coupled to the recess Inside the slot. The lifting mechanism of claim 6, wherein the annular member further has a plurality of magnet rings, and the magnet rings respectively correspond to the protrusions. The lifting mechanism of claim 1, wherein the first channel comprises a first segment and a second segment, the first segment being formed in the first channel adjacent to one side of the substrate, And the second segment is in communication with the first segment, wherein the second segment has a larger outer diameter than the first segment. The lifting mechanism of claim 8, wherein the lifting mechanism further comprises a second sleeve and a support ring, wherein the second sleeve and the support ring are disposed in the second section, the support ring is fixed And the second sleeve is located between the first section and the support ring. The lifting mechanism of claim 9, wherein the second sleeve has a ceramic material, and the support ring has an aluminum material.