TWI497050B - Rectangular plate-like crack inspection method and an inspection apparatus of - Google Patents

Description

Crack inspection method and inspection device for rectangular plate

The present invention relates to a crack inspection method and an inspection apparatus for a rectangular plate such as a glass plate, and the invention relates to an inspection method capable of quickly inspecting a crack without waiting for the cutting of a rectangular plate such as a glass plate. .

In the prior art, in the aspect of quality management, it is required to inspect the crack of the end surface of a rectangular plate such as a glass plate. As a device for the request, for example, an inspection device for photographing the end surface of the transparent substrate is used. The captured image detects defects or the like on the end surface of the transparent substrate (see, for example, Patent Document 1).

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] International Patent Publication No. 04/079352

However, the inspection apparatus disclosed in Patent Document 1 includes a configuration in which an end surface of the transparent substrate after the cutting is imaged after the transparent substrate is cut, based on the intensity (concentration, etc.) of the light in the captured image. The defects such as cracks are detected. Therefore, there is a problem that in order to inspect the end surface of the transparent substrate, it is necessary to wait for the cutting of the transparent substrate to be completed, so that the end surface cannot be inspected quickly.

The present invention has been made in view of the above circumstances, and an object of the invention is to provide an inspection method which can quickly inspect a crack without waiting for completion of cutting of a rectangular plate such as a glass plate.

The invention disclosed in claim 1 is an inspection method for inspecting a crack of a rectangular plate as a cutting object by using a cutter having a blade, the blade and the rectangular plate as the object to be cut One end contact and moving from the one end surface to the other end surface of the opposite side, and at the same time, the surface of the rectangular plate is made to be a scratch of the starting point of the cutting, and when the other end surface is reached, the surface is released. And the contact of the other end surface, the inspection method comprising the steps of: detecting whether the cutting edge has contacted one end surface of the rectangular plate member as the object to be cut; and the cutting edge and the rectangular plate as the object to be cut The position of the blade at the point of contact of one end of the object is detected as the position of one end surface of the rectangular plate as the object to be cut; and the end face of the rectangular plate which is the above-mentioned object to be cut is detected The position is compared with a predetermined setting range; and based on the result of the above comparison, the above-mentioned detected rectangular plate as the object of cutting is determined Whether there is a crack in one of the end faces.

According to the invention of claim 1, the position of the blade at the time when the blade is brought into contact with one end surface of the rectangular plate as the object to be cut is detected as the position of one end face of the rectangular plate as the object to be cut. Comparing the position of one end surface of the rectangular plate which is the object to be cut, with a predetermined setting range, and based on the result of the comparison, determining whether or not there is a crack in one end surface of the rectangular plate as the object to be cut, Therefore, it is not necessary to wait for the cutting of the rectangular plate to be completed, and in the middle of cutting the rectangular plate, it is checked whether there is a crack in one end surface of the rectangular plate, that is, a rectangular plate shape as a cutting object can be obtained. A scratch is formed on the surface of the object as a starting point of the cut, and a crack is detected in the rectangular plate as the object to be cut.

Further, since the blade detects the crack by coming into contact with one end surface of the rectangular plate member of the object to be cut, the erroneous determination can be reduced as compared with the case of detecting without contact.

According to the invention disclosed in claim 1, the invention disclosed in claim 2 is characterized by comprising the steps of: detecting whether the contact of the blade with the surface and the other end surface has been released; and the cutting edge and the surface and the other end surface The position of the blade at the time when the contact is released is detected as the position of the other end surface of the rectangular plate as the object to be cut, and the position of the other end surface of the rectangular plate which is the above-mentioned object to be cut is detected. Comparing with a predetermined setting range; and based on the result of the above comparison, it is determined whether or not the other end surface of the rectangular plate member as the object to be cut is detected to have a crack.

According to the invention of claim 2, the position of the blade at the time when the contact between the blade and the surface of the rectangular plate as the object to be cut is released is detected as a rectangular plate as the object to be cut. The position of the other end surface is compared with the predetermined setting range of the detected end surface of the rectangular plate as the object to be cut, and based on the result of the comparison, the rectangular plate as the object to be cut is determined. Whether there is a crack on the other end surface, therefore, it is not necessary to wait for the cutting of the rectangular plate to be completed, and in the middle of cutting the rectangular plate, it is checked whether there is a crack at the other end surface of the rectangular plate, that is, The surface of the rectangular plate as the object to be cut is made to be a scratch at the starting point of the cut, and at the same time, whether or not the crack is formed in the rectangular plate as the object to be cut.

Further, in the invention disclosed in claim 1 or 2, the rectangular plate member is preferably a glass substrate for FPD. The reason is that the end faces can be machined with high precision.

Further, the invention disclosed in claim 3 is an inspection apparatus which inspects a crack of a rectangular plate as a cutting target by using a cutter having a blade, the blade and the rectangular plate as the object to be cut One end of the object is in contact with, and moves from the one end surface to the other end surface on the opposite side thereof, and at the same time, the surface of the rectangular plate is made to be a scratch of the starting point of the cutting, and when the other end surface is reached, the lifting is performed. The inspection apparatus is characterized in that: the inspection apparatus includes: a mechanism for detecting whether the cutting edge has contacted an end surface of the rectangular plate member as the object to be cut; and the cutting edge and the object as the object to be cut a position at which the edge of the rectangular plate is in contact with the end surface of the rectangular plate is detected as a position of the end face of the rectangular plate member of the object to be cut; and the above-mentioned rectangular plate is detected as the object to be cut a mechanism for comparing a position of one end face with a predetermined set range; and determining, based on the result of the comparison, the above-mentioned detected object A mechanism for the presence or absence of a crack in one of the end faces of a rectangular plate.

According to the invention disclosed in claim 3, it is possible to provide an inspection method and an inspection apparatus which do not use a complicated cutting device, are easy to maintain, can shorten the processing time in the step, and have high reliability. The present invention is applicable to a step of cutting a rectangular plate, and the present invention is suitable for producing a glass plate for an electronic component requiring accuracy in shape quality or end face quality. It is especially suitable for the manufacture of glass substrates for FPD.

As described above, according to the present invention, it is possible to provide an inspection method which can quickly inspect cracks without waiting for the cutting of a rectangular plate such as a glass plate.

Hereinafter, preferred embodiments of the method for inspecting cracks in the glass sheet of the present invention will be described in detail with reference to the drawings.

Fig. 1 is a view for explaining an operation of a glass blade portion used in the glass cutter 10 used in the crack inspection method for a glass sheet according to an embodiment of the present invention. Fig. 2 is a system configuration diagram of a glass cutter 10 used in a crack inspection method for a glass sheet according to an embodiment of the present invention. Fig. 3 is an explanatory view showing a general manufacturing procedure of a glass plate.

[Summary of glass cutting machine]

As shown in FIG. 3, in general, a flat panel display is manufactured through a dicing step (T ₁ ), a chamfering step (T ₂ ), a cleaning ‧ drying step (T ₃ ), and a measuring step (T ₄ ). A glass plate (for example, a glass plate for a liquid crystal display (LCD), a glass plate for a field emission display, an organic EL (Electroluminescence) display, or a glass plate for an organic EL planar light source) The folding step (T ₁ ) cuts the glass sheet manufactured to a specific thickness into a specific size, and the chamfering step (T ₂ ) uses a grinding stone or a grinding stone to pour the end surface of the glass sheet after the cutting. The corner processing, the cleaning/drying step (T ₃ ), the glass sheet after the chamfering processing is cleaned and dried, and the measuring step (T ₄ ) measures the outer shape of the glass sheet after the cleaning and drying.

As shown in Fig. 1, the glass cutter 10 is provided with a blade 12b. The blade 12b is a device for contacting an end surface (for example, 20a) of the glass plate 20 as a cutting target, and moving from the one end surface (for example, 20a) toward the other end surface (for example, 20b) on the opposite side thereof, At the same time, the surface of the glass sheet 20 which is the object to be cut is made to have a scratch which is the starting point of the bending. The blade 12b is provided on the upstream side of the cutting step. The glass plate 20 to be cut is a rectangular glass plate (for example, several meters in length × several meters in width × several millimeters in thickness), and the glass plate as a cutting target is conveyed by a well-known conveying mechanism (not shown). 20. Position it and place it on a platform (not shown) of the glass cutter 10.

The glass cutter 10 uses the blade 12b to cause a scratch as a starting point of the bending of the surface of the glass plate 20 which is positioned and placed on the above-mentioned platform. Further, at the same time, it is possible to detect whether or not the glass plate 20 as the object to be cut has cracks.

[Composition of glass cutting machine]

As shown in FIG. 1 and FIG. 2, the glass cutter 10 in this example is provided with four glass blade portions 12 _X1 to 12 _Y2 and four blade drive mechanisms 14 _X1 to 14 _Y2 corresponding to the four sides of the glass plate 20. The control device 16, the memory device 18, and the like.

As shown in Fig. 2, the glass blade portions 12 _X1 to 12 _Y2 respectively include a blade block 12a, a blade 12b (e.g., a diamond piece) that is movably mounted to the blade block 12a, and a switch for contacting the sensor (not For example, when the blade 12b is in contact with the end surface (for example, 20a) of the glass plate 20 and is moved upward by a certain amount with respect to the blade block 12a, the switch is energized, and when the contact is released, the blade 12b is opposed to the blade block. 12a does not power when returning to its original state.

The glass blade portions 12 _X1 and 12 _X2 are slidably attached to, for example, two guide members (not shown) that are disposed at regular intervals and extend in the X direction. Similarly, the glass blade portions 12 _Y1 and 12 _{Y2 are} slidably attached to, for example, two guide members (not shown) that are disposed at regular intervals and extend in the Y direction.

The blade drive mechanisms 14 _X1 and 14 _X2 are mechanisms for directly moving the glass blade portions 12 _X1 and 12 _X2 in the X direction along a guide member (not shown) extending in the X direction. For example, the blade drive mechanisms 14 _X1 and 14 _X2 include a ball screw that is coupled to the glass blade portions 12 _X1 and 12 _X2 and extends in the X direction, and a servo motor that rotates the ball screw (none of which is shown) And other servo mechanisms. Similarly, the blade drive mechanisms 14 _Y1 and 14 _Y2 are mechanisms for directly moving the glass blade portions 12 _Y1 and 12 _Y2 in the Y direction along the guide members extending in the Y direction. For example, the blade drive mechanisms 14 _Y1 and 14 _Y2 include a ball screw that is coupled to the glass blade portions 12 _Y1 and 12 _Y2 and extends in the Y direction, and a servo motor for rotating the ball screw (none of which is shown) And other servo mechanisms.

The control device 16 includes an arithmetic/measurement unit such as an MPU (Micro Processor Unit) or a CPU (Central Processing Unit), and the calculation/control mechanism functions as a control unit or the like, and the control unit or the like The specific program read into the memory device 18 is executed, whereby each servo motor is controlled such that the glass blade portions 12 _X1 to 12 _Y2 are moved from the origin position to the command position.

The memory device 18 is a memory device such as a RAM (Random Access Memory), which stores a predetermined setting range (for example, a position of an end face of a normal glass plate without cracks ± a few millimeters).

[Method of crack detection of glass plate]

Next, a method for inspecting cracks in the glass sheet using the above-described glass cutter 10 will be described with reference to the drawings. Figure 4 is a flow chart for explaining the method. The following processing is mainly implemented by the control device 16 executing a specific program read into the memory device 18.

In the following processing, the glass plate 20 as the object to be cut is positioned and placed on a platform (not shown) of the glass cutter 10.

The control device 12 controls each of the servo motors so that the glass blade portions 12 _X1 to 12 _Y2 (the blades 12b) are moved from the origin position to the command position (step S10).

Each servo motor rotates in accordance with control from the control device 16, thereby rotating the ball screw. Thereby, the glass blade portions 12 _X1 and 12 _X2 are slid in the X direction (the direction opposite to each other) from the origin position in the X direction, and the glass blade portions 12 _Y1 and 12 _{Y2 are} positioned from the origin position. The guiding members extending in the Y direction are slid in the Y direction (the direction opposite to each other) (see Fig. 1).

The glass blade portions 12 _X1 and 12 _{X2 are} soon in a state in which the respective blade edges 12b are in contact with one end faces 20a and 20b of the glass sheet 20, and are placed on the surface of the glass plate 20 (see Fig. 2). Thereby, the respective blade edges 12b of the glass blade portions 12 _X1 and 12 _X2 are moved upward by a specific amount with respect to the blade block 12a, and the switch as the contact sensor is energized.

Similarly, the glass blade portions 12 _Y1 and 12 _{Y2 are} soon in contact with each other, that is, the respective blades 12b are in contact with the end faces 20c and 20d of the glass plate 20, and are placed on the surface of the glass plate 20 (see Fig. 2). Thereby, the respective blade edges 12b of the glass blade portions _12Y1 and _12Y2 are moved upward by a specific amount with respect to the blade block 12a, and the switch as the contact sensor is energized.

The control device 16 checks the energization state of each of the switches as the contact sensors (step S12), thereby detecting whether the respective blade edges 12 of the glass blade portions 12 _X1 to 12 _Y2 have been in contact with one end faces 20a to 20d of the glass plate 20. .

When the control device 16 detects the energization of the switch (step S14: the branch of the direction of Yes), that is, the blade edge 12 of each of the glass blade portions 12 _X1 to 12 _Y2 and one end surface 20a to 20d of the glass plate 20 are detected. At the time of contact, the position of the blade edge 12b of each of the glass blade portions 12 _X1 to 12 _{Y2 at} the time of energization (this position is obtained, for example, from the control device 16) is detected as the position of one end surface 20a to 20d of the glass plate 20 (step S16). .

Then, the control device 16 respectively positions the detected end faces 20a to 20d of the glass plate 20 to a predetermined setting range (for example, the position of the end face of the normal glass plate which is stored in the memory device 18 without cracks in advance) The range of millimeters is compared, whereby the crack determination of the glass sheet 20 is performed (step S18).

That is, if the position of one of the end faces 20a to 20d of the glass plate 20 detected is outside the predetermined setting range, the control device 16 determines that there is a crack in one of the end faces 20a to 20d of the detected glass plate 20 (step S18). : a branch toward the direction of No, the above content is reported by displaying an alarm or the like (step S30).

On the other hand, if the position of one of the end faces 20a to 20d of the glass plate 20 detected is within a predetermined setting range, the control device 16 determines that there is no crack in one of the end faces 20a to 20d of the detected glass plate 20 ( Step S18: a branch in the direction of Yes, the servo motors are controlled such that the glass blade portions 12 _X1 to 12 _{Y2 are} moved to the command position (step S20).

Each servo motor rotates in accordance with control from the control device 16, thereby rotating the ball screw. Thereby, the glass blade portions 12 _X1 and 12 _X2 are slid in the X direction (the direction opposite to each other) along the guiding members extending in the X direction, and the glass blade portions 12 _Y1 and 12 _Y2 are guided along the Y direction. , slide in the Y direction (in the direction opposite to each other) (refer to Figure 1).

The glass blade portions 12 _X1 and 12 _X2 slide on the surface of the glass plate 20 which is formed in the X direction, and the blade edges 12b reach the other end faces 20b and 20a of the glass plate 20, and the surface of the glass plate 20 is released. And the contact of the end faces 20b, 20a. Thereby, the respective blade edges 12b of the glass blade portions 12 _X1 and 12 _X2 are returned to the original state (that is, each blade edge 12b is moved downward by a specific amount with respect to the blade block 12a), and the switch as the contact sensor is not energized.

Similarly, the glass blade portions 12 _Y1 and 12 _Y2 slide on the surface of the glass plate 20 which is generated in the Y direction, and the blade edges 12b reach the other end faces 20d and 20e of the glass plate 20, and the glass plate is released. Contact between surface 20 and end faces 20d, 20e. Thereby, the respective blades 12b of 12 _Y1 and 12 _Y2 are returned to the original state (that is, each blade 12b is moved downward by a specific amount with respect to the blade block 12a), and the switch as the contact sensor is not energized.

The control device 16 checks the energization state of each of the switches as the contact sensors (step S22), thereby detecting whether the respective blade edges 12 of the glass blade portions 12 _X1 to 12 _Y2 have been released from the surface and the other end surface of the glass plate 20. Contact 20a~20d.

When the control device 16 detects that the switch is not energized (step S24: branch toward the direction of Yes), that is, detects that the blade 12 of each of the glass blade portions 12 _X1 to 12 _{Y2 is} released from the surface of the glass plate 20 and When the one end faces 20a to 20d are in contact, the position of the blade edge 12b of each of the glass blade portions 12 _X1 to 12 _{Y2 at} the time when the power is not applied (this position is obtained, for example, from the control device 16) is detected as the other end face 20a of the glass plate 20 The position of 20d (step S26).

Then, the control device 16 respectively positions the other end faces 20a to 20d of the detected glass plate 20 to a predetermined setting range (for example, the position of the end face of the normal glass plate which is stored in advance in the memory device 18 without cracks) The range of millimeters is compared, whereby the crack determination of the glass sheet 20 is performed (step S28).

That is, if the position of the other end faces 20a to 20d of the glass plate 20 detected is outside the predetermined setting range, the control device 16 determines that there is a crack in the other end faces 20a to 20d of the detected glass plate 20. Step S28: a branch toward the direction of No, the above content is reported by displaying an alarm or the like (step S30).

On the other hand, if the position of the other end faces 20a to 20d of the glass plate 20 detected is within a predetermined setting range, the control device 16 determines that the other end faces 20a to 20d of the detected glass plate 20 do not exist. The crack (step S28: branch toward the direction of Yes) ends the process.

As described above, the glass cutter 10 of the present embodiment uses the blade 12b to cause a scratch on the surface of the glass sheet 20 to be cut, and detects whether or not the glass sheet 20 as the object to be cut exists. crack.

As described above, according to the present embodiment, the position of the blade edge 12b at the time when the blade edge 12b is in contact with the end surface 20a of the glass plate 20 which is a rectangular plate member to be cut, is detected as the glass plate 20 The position of one end surface 20a or the like is compared with the predetermined setting range of one end surface 20a of the glass plate 20 (step S18), and based on the result of the comparison, it is determined whether one end surface 20a of the glass sheet 20, etc. There is a crack (step S18). Therefore, it is not necessary to wait for the cutting of the glass sheet 20 to be completed, and it is possible to check whether or not there is a crack in one end surface 20a of the glass sheet 20 during the cutting of the glass sheet 20.

Further, since the blade 12 detects the crack by coming into contact with the end surface 20a of the glass plate 20 which is the object to be cut, etc., the erroneous determination can be reduced as compared with the case of detecting the contactlessly.

Further, according to the present embodiment, the position of the blade 12b at the time when the blade edge 12b is released from contact with the surface of the glass plate 20, which is a rectangular plate object to be cut, and the other end surface 20b, etc., is detected as another glass plate 20. The position of the end surface 20b or the like is compared with the predetermined setting range of the detected other end surface 20b of the glass sheet 20, and based on the result of the comparison, it is determined whether or not the other end surface 20b of the glass sheet 20 has cracks. (Step S28), therefore, it is not necessary to wait for the cutting of the glass sheet 20 to be completed, and it is possible to check whether or not there is a crack in the other end surface 20b of the glass sheet 20 during the cutting of the glass sheet 20.

Next, a modification of the present invention will be described.

In the above embodiment, the glass plate 20 to be cut is an example of a glass plate for a flat panel display. However, the present invention is not limited thereto. For example, all rectangular plates such as a glass plate for an automobile or a resin plate can be used as a folding target.

Further, in the above-described embodiment, the glass blade portions 12 _X1 and 12 _X2 (the glass blade portions 12 _Y1 and 12 _{Y2 are} also the same) are respectively moved in the opposite directions as shown in Fig. 1, but the present invention does not Limited to this. For example, the glass blade portions 12 _X1 and 12 _X2 (the glass blade portions 12 _Y1 and 12 _{Y2 are} also the same) can be controlled to move in the same direction as shown in FIG. 5 .

Further, in the above embodiment, an example in which four glass blade portions 12 _X1 to 12 _Y2 are provided is described, but the present invention is not limited thereto. For example, even one to three or more glass blade portions can be similarly applied.

The above embodiments are merely illustrative in all respects. It is not to be construed as limiting the invention by the above disclosure. The present invention may be embodied in other various forms without departing from the spirit or essential characteristics thereof.

10. . . Glass cutting machine

12a. . . Blade block

12b. . . Blade

12 _X1 ~12 _Y2 . . . Glass blade

14 _X1 ~14 _Y2 . . . Blade drive mechanism

16. . . Control device

18. . . Memory device

20. . . glass substrate

20a. . . One end

20b. . . Another end

20c, 20d. . . End face

S10, S12, S14, S16, S18, S20, S22, S24, S26, S28, S30. . . step

T ₁ . . . Cutting step

T ₂ . . . Chamfering step

T ₃ . . . Cleaning ‧ drying step

T ₄ . . . Measuring step

Fig. 1 is an explanatory view showing the operation of a glass blade portion used in the glass cutter 10 used in the crack inspection method for a glass sheet according to an embodiment of the present invention.

Fig. 2 is a system configuration diagram of a glass cutter 10 used in a crack inspection method for a glass sheet according to an embodiment of the present invention.

Fig. 3 is an explanatory view of a manufacturing step (a subsequent step after cutting) of the glass plate.

4 is a flow chart for explaining a method for inspecting a crack of the glass sheet 20.

FIG. 5 is an explanatory view showing an operation (variation) of the glass blade portion used in the glass cutter 10 used in the crack inspection method for a glass sheet according to an embodiment of the present invention.

10. . . Glass cutting machine

12a. . . Blade block

12b. . . Blade

12 _X1 ~12 _Y2 . . . Glass blade

14 _X1 ~14 _Y2 . . . Blade drive mechanism

16. . . Control device

18. . . Memory device

20. . . glass substrate

20a. . . One end

20b. . . Another end

20c, 20d. . . End face

Claims (3)

A crack inspection method for a rectangular plate, which uses a cutter having a blade to inspect a crack of a rectangular plate as a cutting target, the blade being in contact with one end surface of the rectangular plate as the object to be cut, and Moving from the one end surface toward the other end surface of the opposite side, and simultaneously forming a scratch as a starting point of the cutting on the surface of the rectangular plate, and releasing the surface and the other end surface when the other end surface is reached Contact, the crack inspection method of the rectangular plate is characterized in that it comprises the steps of: detecting whether the cutting edge has been in contact with one end surface of the rectangular plate as the object to be cut; detecting that the blade contacts the rectangular shape as the object to be cut The position of the blade at the time of one end surface of the plate is the position of one end surface of the rectangular plate as the object to be cut; and the end face of the rectangular plate which is the above-mentioned object to be cut is detected. The position is compared with a predetermined setting range; and based on the result of the comparison, the above-mentioned detected rectangular plate shape as the object of cutting is determined One end face of the presence or absence of cracks. The method for inspecting a crack of a rectangular plate according to claim 1, comprising the steps of: detecting whether contact between the blade and the surface and the other end surface has been released; detecting when the blade is in contact with the surface and the other end surface The position of the blade is the position of the other end surface of the rectangular plate member to be cut, and the position of the other end surface of the rectangular plate member to be cut as described above is set to a predetermined setting range. Comparing; and based on the result of the above comparison, it is determined whether or not there is a crack in the other end surface of the rectangular plate member which is the object to be cut. A crack inspection device for a rectangular plate, which uses a cutter having a blade to inspect a crack of a rectangular plate as a cutting target, the blade being in contact with one end surface of the rectangular plate as the object to be cut, and Moving from the one end surface toward the other end surface of the opposite side, and simultaneously forming a scratch as a starting point of the cutting on the surface of the rectangular plate, and releasing the surface and the other end surface when the other end surface is reached Contact, the rectangular plate crack inspecting device is characterized by: detecting a mechanism for detecting whether the blade has contact with an end surface of the rectangular plate as the object to be cut; detecting that the blade contacts the rectangle as the object to be cut a position of the blade at the time of one end surface of the plate as a position of an end surface of the rectangular plate as the object to be cut; and the end face of the rectangular plate which is the above-mentioned object to be cut a mechanism for comparing the position with a predetermined setting range; and based on the result of the comparison, determining the above-mentioned detected rectangle as the object of cutting One end surface was mechanism whether cracks exist.