TWI496991B - A pump rotor and manufacturing method thereof - Google Patents

Description

Pump rotor and manufacturing method thereof

The present invention relates to a pump rotor and a method of manufacturing the same, and more particularly to a pump rotor for a positive exhaust pump, such as a blower rotor or a dry vacuum pump rotor, which is formed by extrusion or injection.

In a semiconductor foundry process, it is often necessary to deposit specific materials on or from a semiconductor wafer, wherein the materials used to make the semiconductor wafer are related to the electrical properties of the semiconductor wafer. In order to deposit or remove these specific materials, a variety of gases can be used to impact the semiconductor wafer. For example, to remove contaminants from the semiconductor wafer, the processing gas can be used to contact the semiconductor wafer to react with its contaminants for removal. effect. In particular, in this process, the semiconductor wafer needs to be placed in a low-voltage environment to operate. Therefore, the vacuum processing system is used to generate a low-pressure environment in the process of removing the semiconductor wafer.

The so-called vacuum processing system requires at least one vacuum chamber and a plurality of vacuum pumps. During operation, the semiconductor wafer is first placed in a vacuum chamber. Then, the vacuum pump draws the gas in the vacuum chamber to a predetermined standard. After the standard is reached, the semiconductor wafer is in a low pressure environment and can be further processed.

As can be seen from the above, a dry vacuum pump can be used to evacuate the vacuum chamber to a low pressure. In general, the following five variables affect the cost of vacuuming: (1) the amount of gas to be evacuated; and (2) the internal surface area loaded into the vacuum chamber; (3) the low pressure required to be loaded into the vacuum chamber; (4) the resistance between the line between the vacuum chamber and the dry vacuum pump; and (5) the time required to supply the low pressure in the vacuum chamber.

The dry vacuum pump includes a rotating blade that rotates the blade and squeezes the fluid to carry the fluid out of the vacuum chamber; in general, the rotating blade is formed by an iron casting method and rotated by an iron casting method. The blade has sufficient strength and is easy to mass-produce, so it is used in a large amount; however, the rotating blade made by the iron casting method is actually overweight and has a large moment of inertia, which requires a large amount of energy in addition to driving the rotation. Bearings and other parts are also more susceptible to damage, and their weight also makes assembly difficult.

For this reason, the former has been modified to design a light-weight rotating blade. Please refer to the first figure, which is a vacuum pump of US Pat. No. 6,616,945, wherein the vacuum pump comprises a rotating housing A11, including two connected ones. Rotating space A111, each of which is placed with two rotating blades A12, which are bent by sheet metal and then welded Then, the rotor casing is formed and then connected to the rotating shaft A13 to complete the assembly; the rotating blade designed by US Pat. No. 616945 is lighter in weight, but the strength is weaker than that of the rotating blade made by the iron casting method in the past, and the rotating blade is easy to use. In the case of twisting and deformation, and the manufacturing process is complicated, it needs to be bent, cut, positioned, welded, vacuumed, vacuumed, etc., which is quite time-consuming and difficult to control.

Therefore, in view of the above-mentioned conventional vacuum pumps, which have disadvantages and disadvantages, the inventors of the present invention have designed the pump rotor and the manufacturing method thereof.

A first object of the present invention is to provide a pump rotor and a method of manufacturing the same that can form a light weight pump rotor, and therefore, the pump rotor of the present invention has a lower moment of inertia at the same size. The power to be consumed is also relatively low, and at the same time, the bearing is not easily damaged, and the difficulty of assembly is reduced.

A second object of the present invention is to provide a pump rotor and a method of manufacturing the same, which are characterized in that the rotor blade is formed by extrusion or injection, and the manufacturing process is simple, and the formed pump rotor has sufficient strength to reduce manufacturing time. The manufacturing quality is also easier to control.

In order to achieve the object of the present invention, the inventor of the present invention designs a pump rotor comprising: a blade body; a plurality of support ribs integrally formed with the blade body, wherein the plurality of support ribs are attached to the blade master The body is separated by a plurality of space units; and a rotating shaft is formed in the center of the blade body and connected to the plurality of supporting ribs; wherein, when the rotating shaft rotates, the blade body and the plurality of blades are driven The support rib rotates; in the present invention, the blade body and the plurality of support ribs may be made of iron, aluminum or other plastic materials, wherein when the iron or aluminum material is selected, the shape may be extruded In the pump rotor of the invention, when a plastic material which can be thermoplastically or thermoformed is used, the pump rotor can be extruded or injection molded into the present invention; in addition, the shaft can be thermally sleeved, bolted, and latched. The plurality of support ribs are connected in any one of a combination and a tight fit.

In order to achieve the object of the present invention, the inventors of the present invention provide a flow chart of the manufacturing steps of the pump rotor. In order to achieve the above object, the present invention provides a method for manufacturing a pump rotor, as shown in the seventh figure, comprising the steps of: (01) confirming the shape of a blade body and a plurality of space units; (02) forming the blade a body, and a plurality of support ribs are formed inside the blade body, and the plurality of support ribs are respectively separated by the plurality of space units; (03) determining whether the space unit is filled with plastic material, and if yes, performing step (04) If not, performing step (05); (04) filling the space unit with plastic material; (05) assembling a shaft to the blade body, and rotating the shaft to drive the blade body and the plurality of Supporting rib rotation: in step (01), the blade main system may be at least a Lu and a claw shape; wherein, in step (02), the space unit is It is triangular, square, honeycomb, elliptical or circular; in step (05), the shaft can be combined with the plurality of support ribs by a hot sleeve fit, a bolt lock, a bolt joint, or a tight fit. connection.

10‧‧‧ pump rotor

11‧‧‧ Blade body

12‧‧‧Support ribs

13‧‧‧ Space unit

14‧‧‧ shaft

15‧‧‧Plastic materials

A11‧‧‧Rotating housing

A111‧‧‧Rotating space

A12‧‧‧Rotating blades

A13‧‧‧ shaft

Steps (S01) to (S05) ‧‧‧ are a manufacturing step flow of a pump rotor of the present invention

Steps (S21) to (S023) ‧ ‧ are detailed steps of the manufacturing process step (S02) of a pump rotor of the present invention

The first figure is a vacuum pump of US Pat. No. 6,616,945; the second figure is a front view of a first embodiment of a pump rotor of the present invention; and the second B is a first embodiment of a pump rotor of the present invention. 3 is a schematic view of a pump rotor having a triangular space unit of the present invention; FIG. 3B is a schematic view of a pump rotor having a circular space unit of the present invention; A schematic diagram of a pump rotor of a space unit; a fourth diagram is a schematic view of a second embodiment of a pump rotor according to the present invention; and a fifth diagram is a schematic diagram of a blade body of the present invention; The blade body of the present invention is a schematic view of a Lu style; the sixth figure is a side view of a third embodiment of the pump rotor of the present invention; and the seventh figure is a flow chart of the manufacturing steps of the pump rotor of the present invention; The eighth figure is a detailed step of the manufacturing process step (S02) of the pump rotor of the present invention.

In order to more clearly describe a pump rotor and a method of manufacturing the same according to the present invention, a preferred embodiment of the present invention will be described in detail below with reference to the drawings.

First, the main components of the present invention will be described. Referring to FIG. 2A and FIG. 2B, respectively, a front view of a first embodiment of a pump rotor according to the present invention, and a first embodiment of a pump rotor according to the present invention. Side view of the schematic. As shown in FIG. 2A and FIG. 2B, the present invention is a pump rotor 10 including: a blade body 11; a plurality of support ribs 12 integrally formed with the blade body 11, wherein the plurality of supports The ribs 12 are embedded in the blade body 11 and are respectively separated by a plurality of space units 13; and a rotating shaft 14 is formed at the center of the blade body 11 and connected to the plurality of supporting ribs 12; wherein the rotating shaft 14 When rotating, the blade body 11 and the plurality of support ribs 12 can be rotated; in the present invention, the blade body 11 and the plurality of support ribs 12 can be made of iron, aluminum material and plastic material, wherein When the iron or aluminum material is selected, the pump rotor 10 of the present invention can be extruded, and when the plastic material is selected, the pump rotor 10 of the present invention can be extruded or injection molded; in addition, the rotating shaft 14 can be The plurality of support ribs 12 are connected in any manner, such as a heat sleeve fit, a bolt lock, a bolt combination, and a tight fit. Pick up.

In the second A diagram, the shape of the space unit 13 is a honeycomb shape. In fact, in the present invention, the shape of the space unit can be varied. Please refer to the third to third C diagrams, respectively. Schematic diagram of a pump rotor with triangular, circular, and square spatial elements. As shown in the third to third C, in the present invention, the space unit 13 of the pump rotor 10 can be triangular, circular and square, triangular and square, and its direction and shape can be adjusted according to requirements. There is no limitation to this. In fact, in addition to the shape provided by the present invention, the space unit can be made into other polygons as long as it can conform to the extrusion method or the injection molding method.

Next, please refer to the fourth figure, which is a front view of a second embodiment of a pump rotor according to the present invention. As shown in the fourth figure, in the present invention, the user controls the moment of inertia below a predetermined value according to requirements, and appropriately fills the space unit 13 with a plastic material 15 which is thermoplastic or thermoformable. In the second embodiment of the present invention, the plastic material 15 may be an industrial epoxy (Epoxy). However, this is only one embodiment of the present invention, and is not intended to limit the scope of the present invention; After the plastic material 15 is properly disposed, since the end faces are not interconnected, the pumping efficiency can be improved, and the air leakage doubt can be reduced. At the same time, since the plastic material is light in weight and small in mass, the moment of inertia does not change much.

The main blade system of the invention can be applied to a Lu type blower, or For the application of the claw pump, please refer to the fifth diagram A and the fifth diagram B, respectively, which are schematic diagrams of the blade body of the invention in the form of a claw, and a schematic diagram of the blade body of the invention in a Lu style. As shown in FIG. 5A and FIG. 5B, the blade main body 11 of the present invention can be made into a claw type or a roots according to requirements, and does not affect the shape. The process step, or the strength of the pump rotor; the blade body 11 in the fifth A diagram is applied to the claw pump, the space unit 13 is designed in a honeycomb shape, and the blade body 11 in the fifth B diagram is It is a three-leaf type, which can be applied to a Lu type blower or a vacuum pump. The space unit 13 is also designed in a honeycomb shape. Of course, the space unit 13 can be designed into other shapes, such as a circle, a square, an ellipse, etc. . In addition, please refer to the sixth drawing, which is a side view of a third embodiment of the pump rotor of the present invention, which is a multi-stage rotor structure and can be used for a positive exhaust compression type pump. The rotor can be produced in two ways. The first one is to form a rotor blade by extrusion or injection molding, and after combining with the rotating shaft, the rotor blade is processed into a multi-stage rotor with different thickness by cutting or other processing methods; The second is to use the extrusion or injection to produce rotor blades with different thicknesses, and use the hot sleeve fit, the bolt lock, the bolt combination, or the tight fit to combine with the rotating shaft to achieve the purpose of completing the multi-stage rotor.

In addition, depending on the use environment and specifications of the rotor, the shape of the rotor can be processed without any processing, or processed according to requirements, to meet the requirements of various application processes.

Please refer to the seventh figure, which is a flow chart of the manufacturing steps of the pump rotor of the present invention. In order to achieve the above object, the present invention provides a method for manufacturing a pump rotor, as shown in the seventh figure, comprising the steps of: (S01) confirming the shape of a blade body and a plurality of space units; (S02) a blade body, and a plurality of support ribs are formed inside the blade body, and the plurality of support ribs are respectively separated by the plurality of space units; (S03) determining whether the space unit is filled with plastic material, and if so, performing the step (S04) And if not, performing the step (S05); (S04) filling the space unit with the plastic material; (S05) assembling a shaft to the blade body, and causing the blade body to rotate the blade body and the plurality Rotation of the supporting ribs: in the step (S01), the main system of the blade may be at least a Roots and a Claw; wherein, in the step (S02), the spatial unit may be a triangle, a square, Honeycomb, elliptical or circular; in step (S05), the shaft can be coupled to the plurality of support ribs by a thermal fit, a bolt lock, a bolt joint, or a tight fit.

In the step (S02) of the present invention, the following steps may be further subdivided. Please refer to the eighth figure, which is a detailed step of the manufacturing process step (S02) of the pump rotor of the present invention, wherein the manufacturing of the pump rotor of the present invention The detailed steps of the process step (S02) include: (S21) selecting the material of the blade body and the plurality of support ribs; (S22) if the material is selected from the material, the blade body and the plurality of support ribs are formed by extrusion molding, if plasticity is selected The material can be extruded or shot forming to make the blade body and multiple supports a rib; (S23) forming a plurality of spatial units, and the plurality of support ribs are respectively separated by the plurality of spatial units.

The above has fully and clearly disclosed a pump rotor and a method of manufacturing the same according to the present invention, and it can be seen from the above that a pump rotor and a method of manufacturing the same according to the conventional vacuum pump can be found to have the following advantages:

(1) The present invention can use a lightweight material such as an aluminum alloy or a plastic material. Thus, the present invention is manufactured by extrusion molding or injection molding, and has a high production speed and can reduce the time required for the process; and a lightweight material. The small moment of inertia reduces the energy required for rotation, and the rotating bearings and other parts are less susceptible to damage. In addition, the difficulty in assembly can be reduced.

(2) The present invention uses a lightweight material, and in combination with the support rib of the present invention, can increase the strength of the pump rotor of the present invention, can be applied to the positive exhaust pump, and does not generate a change in the differential pressure and the load of the operation. Structural deformation.

The detailed description of the present invention is intended to be illustrative of the preferred embodiments of the present invention, and is not intended to limit the scope of the invention. In the scope of patents.

10‧‧‧ pump rotor

11‧‧‧ Blade body

12‧‧‧Support ribs

13‧‧‧ Space unit

14‧‧‧ shaft

Claims (13)

A pump rotor for a positive exhaust pump includes: a blade body; a plurality of support ribs integrally formed with the blade body, wherein the plurality of support ribs are embedded in the blade body, and the plurality Supporting ribs are connected or interlaced to form a plurality of spatial units; wherein the blade body and the plurality of support ribs are formed by extrusion or injection molding; and a rotating shaft is formed at the center of the blade body And the plurality of supporting ribs are connected; wherein the blade body and the plurality of supporting ribs are made of any one of the following materials: an aluminum metal material and a plastic material; and when the rotating shaft rotates, the blade body and the blade body are driven The plurality of support ribs are rotated; wherein, in order to adjust the moment of inertia of the pump rotor, the plastic material may be appropriately filled in the space unit. The pump rotor according to claim 1, wherein the space unit can be any of the following shapes: a triangle, a square, a honeycomb, an ellipse, and a circle or a combination of various shapes. The pump rotor of claim 1, wherein the plastic material is an industrial epoxy (Epoxy). The pump rotor of claim 1, wherein the shaft is coupled to the plurality of support ribs in any of the following manners: a heat sleeve fit, a bolt lock, a bolt joint, and a tight fit. The pump rotor of claim 1, wherein the blade main system is at least one of the following shapes: Roots and Claw. A manufacturing method of a pump rotor, which is a pump rotor for a positive exhaust pump, comprising the following steps: (01) confirming the basic shape of a blade body and a plurality of space units; (02) using aluminum metal material Or the plastic material is a raw material, the blade body is formed by extrusion molding or injection molding, and a plurality of support ribs are formed inside the blade body, and the plurality of support ribs are connected or interlaced to form the plurality of spaces. a unit; (03) determining whether the plastic material is filled in the space unit to adjust the moment of inertia of the pump rotor, and if so, executing step (04), if not, performing step (05); (04) in the space unit Filled with plastic material; (05) A shaft is assembled to the blade body, and when the shaft is rotated, the blade body and the plurality of support ribs can be rotated. The manufacturing method of the pump rotor according to claim 6, wherein in the step (02), the following detailed steps are further included: (21) selecting a forming material of the blade body and the plurality of supporting ribs; (22) If the metal material is selected as the material, the blade body and the plurality of support ribs are formed by extrusion molding, and if the plastic material is selected, the blade body and the plurality of support ribs can be manufactured by extrusion or injection molding; and (23) the plurality of supports The ribs are connected or interwoven to form the plurality of spatial units. The manufacturing method of the pump rotor according to claim 6, wherein in the step (02), the space unit may be in any of the following shapes: a triangle, a square, a honeycomb, an ellipse, and a circle. The manufacturing method of the pump rotor according to claim 6, wherein in the step (05), the rotating shaft is connected to the plurality of supporting ribs in any one of the following manners: a hot sleeve fit, a bolt lock, The bolts are combined and tightly fitted. The manufacturing method of the pump rotor according to claim 6, wherein in the step (01), the blade main system is at least one of the following Shapes: Roots and Claw. The manufacturing method of the pump rotor according to the sixth aspect of the invention, wherein the shape of the rotor can be selected according to the use requirement or the specification, and the processing is performed to the required precision to meet various use requirements. The manufacturing method of the pump rotor according to claim 6, wherein after the step (5) is completed, the rotor blade can be processed into a plurality of rotors having different thicknesses by cutting or other machining methods. The manufacturing method of the pump rotor according to claim 6, wherein in the step (2), the rotor blades having different thicknesses can be completed first, so that the rotor blades of different thicknesses can be used in the step (5). The shaft is assembled into a multi-stage rotor.