CN103982432B - A kind of pump rotor and manufacture method thereof - Google Patents
A kind of pump rotor and manufacture method thereof Download PDFInfo
- Publication number
- CN103982432B CN103982432B CN201310049771.5A CN201310049771A CN103982432B CN 103982432 B CN103982432 B CN 103982432B CN 201310049771 A CN201310049771 A CN 201310049771A CN 103982432 B CN103982432 B CN 103982432B
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- China
- Prior art keywords
- blade body
- ribs
- pump rotor
- rotor
- pump
- Prior art date
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Abstract
The invention relates to a kind of pump rotor and manufacture method thereof, this pump rotor includes blade body；Multiple ribs, one-body molded with this blade body, wherein, the plurality of ribs is in this blade body, and is separated by multiple space cells respectively；So, the present invention can extrude shaping or injection molding manufactures, and has that to shape speed fast, and rotor can use less material, light weight, the advantages such as rotary inertia is little because of structural strength, it is possible to decrease rotate the energy needed for rotor.
Description
Technical field
The present invention relates to a kind of pump rotor and manufacture method thereof, particularly relate to a kind of for positive exhaust pump
Pump rotor, seem blower rotor or dry type vacuum pump rotor, be with extrusion or injection side
Formula shapes.
Background technology
In semiconductor foundry manufacturing process, often need deposit certain material on a semiconductor wafer or from
Move apart certain material on semiconductor crystal wafer, wherein, these make material that semiconductor crystal wafers are used with
The electrical properties of semiconductor crystal wafer is relevant.In order to deposit or remove these certain materials, multiple gases meeting
Being used for impacting semiconductor crystal wafer, such as, in order to get on depollution thing from semiconductor crystal wafer, regulate the flow of vital energy in place
Body can be used for contacting semiconductor crystal wafer, and its pollutant reaction, to reach the effect removed.Particularly
Be, in this processing routine, semiconductor crystal wafer need to be placed in a lower pressure environment can operation, therefore,
Vacuum flush system is i.e. for producing a lower pressure environment in the manufacturing process remove semiconductor crystal wafer.
So-called vacuum flush system at least needs a vacuum chamber and multiple vacuum pumps, during operation, and half
Semiconductor wafer is first placed in vacuum chamber, and then, the gas of vacuum pump extracting vacuum room reaches one and makes a reservation for
Standard, after reaching standard, semiconductor crystal wafer is i.e. in a lower pressure environment, and followed by entering one
Step processes.
From the foregoing, it will be observed that dry vacuum pump can be used for being evacuated to vacuum chamber one low pressure, generally, below
Five variablees can affect the cost of evacuation: the gas flow that (1) to be evacuated；(2) it is loaded into the interior of vacuum chamber
Portion's surface area；(3) low pressure required in being loaded into vacuum chamber；(4) pipeline and dry type between vacuum chamber is loaded
Resistance in vacuum pump；And (5) are for the time required when loading offer low pressure in vacuum chamber.
Dry vacuum pump includes moving blade, by moving blade, and extrusion fluid, so that fluid is taken out of
Vacuum chamber；It is said that in general, the generation type of moving blade utilizes cast iron casting method to make, cast iron casting method institute
The moving blade intensity made is enough, and is prone to volume production, therefore, is used in a large number；But, cast iron casting method
Made moving blade, its solid construction causes preponderance, and rotary inertia is big, turns except driving
Moving and need to expend outside substantial amounts of energy, rolling bearing and other spare and accessory parts are the most fragile, and it is heavy
Amount also results in the degree of difficulty of assembling.
To this end, forefathers improve, design the moving blade of lighter in weight, refer to Fig. 1, be beautiful
A kind of vacuum pump in state's patent No. US616945, wherein, this vacuum pump includes roll-shell A11,
Including two the rotation space A111 being connected, this rotation space A111 respectively places two moving blades
A12, this moving blade A12 with panel beating bend, then through welding and form rotor case, then with rotating shaft
A13 has connected assembling；Although the moving blade lighter in weight designed by U.S. Patent number US616945,
But the moving blade that the strength ratio past is made by cast iron casting method is also weak, and moving blade is the most in use
Torsional deformation, and manufacture process is complicated, needs through curved metal plate, cuts out metal plate, positions, welds smoothing, takes out
Vacuum etc., quite expends man-hour, and quality is also difficult to control to.
Therefore, because the above-mentioned existing vacuum pump commonly used, all have the disadvantage in that with not enough, therefore, this case
Inventor do one's utmost design, finally design a kind of pump rotor and the manufacture method thereof of the present invention.
Summary of the invention
Present invention is primarily targeted at a kind of pump rotor of offer, its lighter in weight, therefore, identical
Under size, the pump rotor of the present invention has a relatively low rotary inertia, the required power consumed of operating also than
Relatively low, meanwhile, bearing is hardly damaged, and reduces the degree of difficulty assembled.
The secondary objective of the present invention is to provide the manufacture method of a kind of pump rotor, with extrude or penetrate
Mode forming rotor blade, production process is simple, and the pump rotor formed has enough intensity,
Can reduce manufacturing time, workmanship is also relatively easy to control.
The object of the invention to solve the technical problems realizes by the following technical solutions.Foundation
A kind of pump rotor that the present invention proposes, for positive exhaust pump, it includes: blade body；Multiple
Stake rib, one-body molded with this blade body, wherein, the plurality of ribs in this blade body, and
Separated by multiple space cells respectively；And rotating shaft, be formed at the central authorities of this blade body, and with this
Multiple ribs connect；Wherein, during this axis of rotation, this blade body and the plurality of support can be driven
Rib rotates.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid pump rotor, wherein, this blade body and the plurality of ribs can any one materials following
Matter is made: metal material and plastic material.
Aforesaid pump rotor, wherein, this blade body and the plurality of ribs can any one sides following
Formula is made: extrusion forming and ejection formation.
Aforesaid pump rotor, wherein, this space cell can be any one shape following: triangle, side
Shape, honeycomb, ellipse and circular or a combination thereof.
Aforesaid pump rotor, wherein, this space cell can filling plastic material.
Aforesaid pump rotor, wherein, this rotating shaft is connected with the plurality of ribs in any one mode following:
Hot jacket coordinates, bolt is locked admittedly, latch combines and tight fit.
Aforesaid pump rotor, wherein this blade body 11 can be at least any one shape following: Shandong formula with
And claw.
The object of the invention to solve the technical problems realizes the most by the following technical solutions.According to this
The manufacture method of a kind of pump rotor that invention proposes, manufactures a kind of pump rotor for positive exhaust pump, its
Comprise the steps of (01) and confirm blade body and the shape of multiple space cell；(02) make
This blade body, and it is internally formed multiple ribs at this blade body, and the plurality of ribs is respectively
Separated by the plurality of space cell；(03) judge whether to fill plastic material in space cell, if so,
Perform step (04), if it is not, perform step (05)；(04) in this space cell, plastic material is filled；
(05) rotating shaft is assemblied in this blade body, and when making this axis of rotation, this blade master can be driven
Body and the plurality of ribs rotate.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
The manufacture method of aforesaid pump rotor, wherein, in step (02), further includes following thin portion step
Rapid: (21) select blade body and the shaping material of multiple ribs；(22) if selecting gold in material
Genus material is then to extrude figuration manufacture blade body and multiple ribs, if selecting plastic material, permissible
Extrude or ejection forming method manufactures blade body and multiple ribs；And (23) form multiple space
Unit, and the plurality of ribs separates by the plurality of space cell respectively.
The manufacture method of aforesaid pump rotor, wherein, in step (02), under this space cell can be
Arrange any one shape: triangle, square, honeycomb, oval and circular.
The manufacture method of aforesaid pump rotor, wherein, in step (05), this rotating shaft is with following arbitrary
The mode of kind connects with the plurality of ribs: hot jacket coordinates, bolt is locked admittedly, latch is combined and close-fitting
Close.
The manufacture method of aforesaid pump rotor, wherein, in step (01), this blade body at least may be used
For any one shape following: Lu Shi and claw.
The manufacture method of aforesaid pump rotor, wherein, this rotor profile can according to using demand or specification,
Selection is not required to processing, or is worked into required precision, meets various use demand.
The manufacture method of aforesaid pump rotor, wherein, after completing step (5), available machining or
It is that rotor blade is processed into the multipiece rotor that thickness is different by other processing method.
The manufacture method of aforesaid pump rotor, wherein, can first complete various thickness not when step (2)
Same rotor blade, so, can be assembled into many by different-thickness rotor blade and rotating shaft when step (5)
Segmentation rotor.
By technique scheme, one pump rotor of the present invention and manufacture method thereof at least have following excellent
Point and beneficial effect:
(1) present invention can use light material, seems aluminium alloy or plastic material, so, the present invention
With extrude shaping or injection molding manufactures, speed of production is fast, it is possible to reduce manufacturing process is taken
Between；And the rotary inertia of lightweight material is little, it is possible to decrease the energy needed for rotation, rolling bearing and other
Spare and accessory parts are also less susceptible to damage, additionally, degree of difficulty when also can reduce assembling.
(2) present invention uses light material, then the ribs of the present invention that arranges in pairs or groups, and can increase pump of the present invention and turn
The intensity of son, it is possible to apply at positive exhaust pump, all will not produce for the change of pressure reduction and the load of operating
Raw malformation.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the present invention's
Technological means, and can being practiced according to the content of description, and in order to allow the above-mentioned of the present invention and
Other objects, features and advantages can become apparent, and below especially exemplified by preferred embodiment, and coordinates attached
Figure, describes in detail as follows.
Accompanying drawing explanation
Fig. 1 is a kind of vacuum pump in U.S. Patent number US616945；
Fig. 2 A is the schematic front view of the first embodiment of a kind of pump rotor of the present invention；
Fig. 2 B is the schematic side view of the first embodiment of a kind of pump rotor of the present invention；
Fig. 3 A is the schematic diagram that the present invention has the pump rotor of triangle space unit；
Fig. 3 B is the schematic diagram that the present invention has the pump rotor of circular space unit；
Fig. 3 C is the schematic diagram that the present invention has the pump rotor of square space unit；
Fig. 4 is the schematic front view of the second embodiment of a kind of pump rotor of the present invention；
Fig. 5 A be blade body of the present invention be the schematic diagram of claw structure；
Fig. 5 B be blade body of the present invention be the schematic diagram of Shandong formula structure；
Fig. 6 is the schematic side view of the 3rd embodiment of a kind of pump rotor of the present invention；
Fig. 7 is the manufacturing step flow chart of a kind of pump rotor of the present invention；
Fig. 8 is the thin portion step of the manufacturing process step (S02) of a kind of pump rotor of the present invention.
10: pump rotor 11: blade body
12: ribs 13: space cell
14: rotating shaft 15: plastic material
A11: roll-shell A111: rotation space
A12: moving blade A13: rotating shaft
Step (S01) to (S05) is the manufacturing step flow process of a kind of pump rotor of the present invention；
Step (S21) to (S023) is the thin portion of the manufacturing process step (S02) of a kind of pump rotor of the present invention
Step.
Detailed description of the invention
By further illustrating the technological means and merit that the present invention taked by reaching predetermined goal of the invention
Effect, below in conjunction with accompanying drawing and preferred embodiment, to a kind of pump rotor proposed according to the present invention and manufacture thereof
Its detailed description of the invention of method, structure, manufacture method, step, feature and effect thereof, describe in detail
As rear.
First, introduce the main element of the present invention, refer to Fig. 2 A and Fig. 2 B, be the present invention one respectively
Plant the schematic front view of the first embodiment of pump rotor, and the first enforcement of a kind of pump rotor of the present invention
The schematic side view of example.As shown in Figure 2 A and 2 B, one pump rotor 10 of the present invention, include:
Blade body 11；Multiple ribs 12, one-body molded with this blade body 11, wherein, the plurality of
Ribs 12 is in this blade body 11, and is separated by multiple space cells 13 respectively；And rotating shaft
14, it is formed at the central authorities of this blade body 11, and is connected with the plurality of ribs 12；Wherein, should
When rotating shaft 14 rotates, this blade body 11 and the plurality of ribs 12 can be driven to rotate；In the present invention
In, this blade body 11 and the plurality of ribs 12 can iron, aluminum material and plastic material systems
Become, wherein, when selecting iron or aluminum material, can with the pump rotor 10 of the extrusion forming present invention, and
When selecting plastic material, can extrude or the pump rotor 10 of the ejection formation present invention；It addition, this rotating shaft
14 can coordinate with hot jacket, bolt is locked admittedly, latch combines and any one mode such as tight fit is with the plurality of
Ribs 12 connects.
In fig. 2, this space cell 13 be shaped as honeycomb, in fact, in the present invention, empty
Between the shape of unit can be changeable, refer to Fig. 3 A to Fig. 3 C, be respectively the present invention have triangle,
The schematic diagram of the pump rotor of circle and square space unit.As shown in Fig. 3 A to Fig. 3 C, at this
In bright, the space cell 13 of this pump rotor 10 can be triangle, circular and square, triangle and
Square, its direction and shape can adjust on demand, there is no at this and limit, it is true that except the present invention
Beyond the shape provided, space cell can also be made into other polygon, as long as can meet crowded
Method processed, or ejection forming method.
Next please see Figure 4, be the schematic front view of the second embodiment of a kind of pump rotor of the present invention.As
Shown in Fig. 4, in the present invention, user is according to demand, and control rotary inertia is below default value, suitable
Local inserting plastic material 15 in this space cell 13, this plastic material is for can be with thermoplastic or be heat-set into
Shape mode thermoforming, in second embodiment of the invention, this plastic material 15 can be industry epoxy glue
(Epoxy), but, this is only a present invention wherein embodiment, is not intended to limit patent model of the present invention
Enclose；Filling suitably after plastic material 15, due to end face not intercommunication, pumping efficiency can improved, and
Reducing gas leakage doubt, simultaneously as plastic material lighter in weight, quality is less, therefore, rotates used
The change of amount is little.
The blade body of the present invention can be applicable to Shandong formula aerator, it is possible to applies in claw pumps, refer to
Fig. 5 A and Fig. 5 B, be respectively blade body of the present invention be the schematic diagram of claw structure, and leaf of the present invention
Sheet main body is the schematic diagram of Shandong formula structure.As shown in Fig. 5 A and Fig. 5 B, the blade body 11 of the present invention
Claw (Claw) structure or Shandong formula (Roots) structure can be made into according to demand, will not be because of shape
Difference, and affect manufacturing technology steps, or the intensity of pump rotor；Blade body 11 in Fig. 5 A
Applying in claw pumps, its space cell 13 is designed to comb shapes, and blade body in figure 5b
11 is cloverleaf, can be applicable to Shandong formula aerator or vacuum pump, its space cell 13 same design
Becoming comb shapes, certainly, space cell 13 may be designed to other shape, the most circular, square, ellipse
Circular etc..It addition, refer to Fig. 6, it is that the side-looking of the 3rd embodiment of a kind of pump rotor of the present invention is shown
Being intended to, this structure is multipiece rotor structure, can be used for positive exhaust pressure miniature pump.The making side of this rotor
Formula can have two kinds, and the first extrudes shaping or injection molding one rotor blade for use, ties with rotating shaft
After conjunction, it is different many that rotor blade is processed into thickness by recycling machining or other processing method
Section rotor；The second is to produce, first with extruding or penetrating, the rotor blade that thickness is different, utilizes heat
Set coordinates, bolt is locked admittedly, latch combines or tight fit is combined with rotating shaft, has reached many
The purpose of section rotor.
It addition, the use environment of foundation rotor and the difference of specification requirement, the profile of this rotor can not
Need processing, or be worked into specification precision according to demand, various different application process requirements can be met.
Refer to Fig. 7, be the manufacturing technology steps flow chart of a kind of pump rotor of the present invention.On reaching
Stating purpose, the present invention provides the manufacture method of a kind of pump rotor, as it is shown in fig. 7, comprise the steps of
(S01) blade body and shape ok of multiple space cell are confirmed；(S02) this blade body is made,
And be internally formed multiple ribs at this blade body, and the plurality of ribs is respectively by the plurality of space
Unit separates；(S03) judge whether to fill plastic material in space cell, if so, perform step
(S04), if it is not, perform step (S05)；(S04) in this space cell, plastic material is filled；(S05)
Rotating shaft is assemblied in this blade body, and when making this axis of rotation, this blade body can be driven and be somebody's turn to do
Multiple ribs rotate: in step (S01), this blade body can be at least Shandong formula (Roots) and
Claw (Claw)；Wherein, in step (S02), this space cell can be triangle, square, Nidus Vespae
Shape, oval or circular；In step (S05), this rotating shaft can coordinate with hot jacket, bolt is locked admittedly,
The modes such as latch combination or tight fit are connected with the plurality of ribs.
In step of the present invention (S02), also can subdivide following steps, refer to Fig. 8, be the present invention
A kind of thin portion step of the manufacturing process step (S02) of pump rotor, wherein, a kind of pump rotor of the present invention
The thin portion step of manufacturing process step (S02) including: (S21) selects blade body and multiple ribs
Material；(S22) if selecting metal material in material, to extrude figuration manufacture blade body and multiple
Stake rib, if selecting plastic material, can extrude or ejection forming method manufactures blade body and multiple
Ribs；(S23) form multiple space cell, and the plurality of ribs is respectively by the plurality of space cell
Separate.
The above, be only presently preferred embodiments of the present invention, and the present invention not makees any form
On restriction, although the present invention is disclosed above with preferred embodiment, but is not limited to this
Bright, any those skilled in the art, in the range of without departing from technical solution of the present invention, when can profit
Method and technology contents by the disclosure above make a little changing or be modified to the equivalence of equivalent variations in fact
Execute example, as long as being the content without departing from technical solution of the present invention, according to the present invention technical spirit to
Any simple modification, equivalent variations and the modification that upper embodiment is made, all still falls within the technology of the present invention side
In the range of case.
Claims (13)
1. a pump rotor, for positive exhaust pump, it is characterised in that it includes:
Blade body；
Multiple ribs, one-body molded with this blade body, wherein, the plurality of ribs is at this blade
In main body, and the plurality of ribs is connected or interweaves to constitute multiple space cells, wherein, this blade
Main body and the plurality of ribs are made by extrusion forming or ejection formation；And
Rotating shaft, is formed at the central authorities of this blade body, and is connected with the plurality of ribs；
Wherein, blade body and the plurality of ribs are to make with any one material following: aluminum metal material
Material and plastic material；Further, during this axis of rotation, this blade body and the plurality of ribs are driven
Rotate；
Wherein, in order to adjust the rotary inertia of described pump rotor, suitably insert in this space cell
Plastic material.
Pump rotor the most according to claim 1, it is characterised in that this space cell is following arbitrary
Kind shape: triangle, square, honeycomb, ellipse and circular or a combination thereof.
Pump rotor the most according to claim 1, it is characterised in that this plastic material is industry epoxy
Glue (Epoxy).
Pump rotor the most according to claim 1, it is characterised in that this rotating shaft is with any one side following
Formula connects with the plurality of ribs: bolt is locked admittedly, latch is combined and tight fit.
Pump rotor the most according to claim 1, it is characterised in that this blade body is the most following
Any one shape: Lu Shi and claw.
6. a manufacture method for pump rotor, manufactures a kind of pump rotor for positive exhaust pump, its feature
It is that it comprises the steps of
(01) blade body and the shape of multiple space cell are confirmed；
(02) make this blade body, and be internally formed multiple ribs at this blade body, and these are many
Individual ribs is separated by the plurality of space cell respectively；
(03) judge whether to fill plastic material in space cell, if so, perform step (04), if
No, perform step (05)；
(04) in this space cell, plastic material is filled；
(05) rotating shaft is assemblied in this blade body, and when making this axis of rotation, by this leaf of drive
Sheet main body and the plurality of ribs rotate.
The manufacture method of pump rotor the most according to claim 6, it is characterised in that in step (02)
In, further include following thin portion step:
(21) blade body and the shaping material of multiple ribs are selected；
(22) if selecting metal material in material, to extrude figuration manufacture blade body and multiple support
Rib, if selecting plastic material, to extrude or ejection forming method manufactures blade body and multiple support
Rib；And
(23) form multiple space cell, and the plurality of ribs is separated by the plurality of space cell respectively.
The manufacture method of pump rotor the most according to claim 6, it is characterised in that in step (02)
In, this space cell is any one shape following: triangle, square, honeycomb, ellipse and circle
Shape.
The manufacture method of pump rotor the most according to claim 6, it is characterised in that in step (05)
In, this rotating shaft connects with the plurality of ribs in any one mode following: bolt is locked admittedly, latch is combined,
And tight fit.
The manufacture method of pump rotor the most according to claim 6, it is characterised in that in step (01)
In, this blade body is at least any one shape following: Lu Shi and claw.
The manufacture method of 11. pump rotors according to claim 6, it is characterised in that this rotor profile
According to the demand of use, select to be not required to processing, or be worked into required precision, meet various use
Demand.
The manufacture method of 12. pump rotors according to claim 6, it is characterised in that complete step (5)
After, utilize cutting working method that blade body is processed into the multipiece rotor that thickness is different.
The manufacture method of 13. pump rotors according to claim 6, it is characterised in that in step (2)
Time can first complete the blade body that various thickness is different, so, when step (5) again by different-thickness
Blade body and rotating shaft are assembled into multisection type rotor.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310049771.5A CN103982432B (en) | 2013-02-07 | 2013-02-07 | A kind of pump rotor and manufacture method thereof |
| TW102106361A TWI496991B (en) | 2013-02-07 | 2013-02-23 | A pump rotor and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310049771.5A CN103982432B (en) | 2013-02-07 | 2013-02-07 | A kind of pump rotor and manufacture method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103982432A CN103982432A (en) | 2014-08-13 |
| CN103982432B true CN103982432B (en) | 2016-09-28 |
Family
ID=51274543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310049771.5A Expired - Fee Related CN103982432B (en) | 2013-02-07 | 2013-02-07 | A kind of pump rotor and manufacture method thereof |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN103982432B (en) |
| TW (1) | TWI496991B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW202037814A (en) * | 2019-04-10 | 2020-10-16 | 亞台富士精機股份有限公司 | Rotor and roots pump |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6466488A (en) * | 1987-09-05 | 1989-03-13 | Daihatsu Motor Co Ltd | Composite rotor for supercharger |
| CN101033747A (en) * | 2007-04-23 | 2007-09-12 | 马容 | Pawl-type dry vacuum pump rotor |
| CN201007276Y (en) * | 2007-02-13 | 2008-01-16 | 聂如国 | Roter used for rotary type displacement pump |
| CN201196148Y (en) * | 2008-04-15 | 2009-02-18 | 聂如国 | Rotor used for cam type rotor pump |
| CN101655089A (en) * | 2009-08-25 | 2010-02-24 | 山东理工大学 | Ceramic rotor of energy recovery pump and preparation method thereof |
| CN202157958U (en) * | 2011-07-06 | 2012-03-07 | 宁波得利时泵业有限公司 | Rotors of bi-rotor pump |
| CN202451426U (en) * | 2012-01-09 | 2012-09-26 | 山东长青金属表面工程有限公司 | Roots blower rotor with anti-corrosion spraying coating |
-
2013
- 2013-02-07 CN CN201310049771.5A patent/CN103982432B/en not_active Expired - Fee Related
- 2013-02-23 TW TW102106361A patent/TWI496991B/en not_active IP Right Cessation
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6466488A (en) * | 1987-09-05 | 1989-03-13 | Daihatsu Motor Co Ltd | Composite rotor for supercharger |
| CN201007276Y (en) * | 2007-02-13 | 2008-01-16 | 聂如国 | Roter used for rotary type displacement pump |
| CN101033747A (en) * | 2007-04-23 | 2007-09-12 | 马容 | Pawl-type dry vacuum pump rotor |
| CN201196148Y (en) * | 2008-04-15 | 2009-02-18 | 聂如国 | Rotor used for cam type rotor pump |
| CN101655089A (en) * | 2009-08-25 | 2010-02-24 | 山东理工大学 | Ceramic rotor of energy recovery pump and preparation method thereof |
| CN202157958U (en) * | 2011-07-06 | 2012-03-07 | 宁波得利时泵业有限公司 | Rotors of bi-rotor pump |
| CN202451426U (en) * | 2012-01-09 | 2012-09-26 | 山东长青金属表面工程有限公司 | Roots blower rotor with anti-corrosion spraying coating |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201432147A (en) | 2014-08-16 |
| TWI496991B (en) | 2015-08-21 |
| CN103982432A (en) | 2014-08-13 |
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