TWI495617B - A method for preparing powdered zinc oxide nanowires - Google Patents
A method for preparing powdered zinc oxide nanowires Download PDFInfo
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- TWI495617B TWI495617B TW102103415A TW102103415A TWI495617B TW I495617 B TWI495617 B TW I495617B TW 102103415 A TW102103415 A TW 102103415A TW 102103415 A TW102103415 A TW 102103415A TW I495617 B TWI495617 B TW I495617B
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本發明係一種製備粉末型氧化鋅奈米線之方法,尤指一種兩階段式熱氧化處理,以及配合含鋅金屬片於高溫爐內之設置位置,以進行加熱及冷卻處理之製備粉末型氧化鋅奈米線之方法。 The invention relates to a method for preparing a powder type zinc oxide nanowire, in particular to a two-stage thermal oxidation treatment, and a powder type oxidation for heating and cooling treatment by setting a position of a zinc-containing metal sheet in a high-temperature furnace. The method of zinc nanowires.
現今已有粉末型氧化鋅奈米線製備的案例與在感測器及光觸媒上的應用,但是其製備過程繁複且成本昂貴。於中國學者Y.Zhang,K.Yu,D.Jiang,Z.Zhu,,H.Geng,and L.Luo,Zinc oxide nanorod and nanowire for humidity sensor,Applied Surface Science 242,212-217(2005)所提出的此一文獻中,曾藉由氣液固法將氧化鋅奈米線生長於矽基板上,此氣液固法乃是將等量的氧化鋅粉末與石墨粉末相混合於石英舟內,並置放於石英管中,通入氬及氧氣,在溫度450℃~600℃之間反應一小時,隨後讓系統自然降到室溫,即將氧化鋅奈米線生長於預備好之矽基板上。然而,此係直接生長氧化鋅奈米線於疏狀電極上,只能做出小面積的感測器且需要使用兩種氣體。 Nowadays, there are cases of powder type zinc oxide nanowire preparation and application on sensors and photocatalysts, but the preparation process is complicated and expensive. Presented by Chinese scholars Y. Zhang, K. Yu, D. Jiang, Z. Zhu, H. Geng, and L. Luo, Zinc oxide nanorod and nanowire for humidity sensor, Applied Surface Science 242, 212-217 (2005) In this document, a zinc oxide nanowire has been grown on a tantalum substrate by a gas-liquid-solid method in which an equal amount of zinc oxide powder and graphite powder are mixed in a quartz boat and placed. In the quartz tube, argon and oxygen are introduced, and the reaction is carried out at a temperature of 450 ° C to 600 ° C for one hour, and then the system is naturally lowered to room temperature, that is, the zinc oxide nanowire is grown on the prepared substrate. However, this system directly grows the zinc oxide nanowire on the sparse electrode, and can only make a small area sensor and requires the use of two gases.
中國學者Q.Qi,T.Zhang,Q.Yu,R.Wang,Y.Zeng,L.Liu,and H.Yang,Properties of humidity sensing ZnO nanorods-base sensor fabricated by screen-printing, Sensors and Actuators B 133,638-643(2008)所提出的此一文獻中,則利用濕化學方法合成像花形狀的氧化鋅奈米柱作為濕度感測器材料。此濕化學方法為將濃度0.05M硝酸鋅(Zn(NO3)2)水溶液與濃度0.05M四氮六甲圜(CH2)6N4)水溶液相混合,並攪拌5分鐘。隨後將混合的溶液在溫度90℃下,加熱3小時,接著白色的產物會被分離出,以去離子水及酒精清洗後,在於空氣中加熱至60℃,像花形狀的氧化鋅奈米柱即可被合成。此氧化鋅奈米柱製程繁複且費時,是其一大缺點。 Chinese scholars Q.Qi, T.Zhang, Q.Yu, R.Wang, Y.Zeng, L.Liu, and H.Yang, Properties of humidity sensing ZnO nanorods-base sensor fabricated by screen-printing, Sensors and Actuators B In this document proposed by 133, 638-643 (2008), a zinc oxide nano column as a flower shape is synthesized by a wet chemical method as a humidity sensor material. This wet chemical method was to mix a 0.05 M aqueous solution of zinc nitrate (Zn(NO 3 ) 2 ) with an aqueous solution of 0.05 M hexamethylenetetramine (CH 2 ) 6 N 4 ) and stir for 5 minutes. The mixed solution is then heated at a temperature of 90 ° C for 3 hours, then the white product is separated, washed with deionized water and alcohol, and heated to 60 ° C in air, like a flower-shaped zinc oxide nano column. It can be synthesized. This zinc oxide nano column process is complicated and time consuming, which is a major drawback.
而在中華民國學者W.Y.Wu,J.M.Ting,and P.J.Huang,Electrospun ZnO nanowires as gas sensors for ethanol detection,Nanoscale Res Lett 4,513-517(2009)所提出的此一文獻中,其係利用電紡絲(electrospinning)法合成氧化鋅奈米線作為電阻式酒精感測器材料。此方法首先預備醋酸鋅(Zinc Acetate)與聚醋酸乙烯酯(Polyvinyl Alcohol,PVA)的凝膠,將此凝膠放入注射器內,此注射器與一個高壓(15KV)的電源器相連接當成正電極,負電極為製作有疏形狀電極的矽晶片置於鋁箔片上。當供應15KV的電壓後,電轉的奈米線聚合物會形成在矽晶片上,隨後利用鍛燒法在600℃下反應7小時,將奈米線聚合物轉變為無機的氧化鋅奈米線。此氧化鋅奈米線的製程也是非常繁複且費時。 In the literature proposed by the Chinese scholars WYWu, JMTing, and PJHuang, Electrospun ZnO nanowires as gas sensors for ethanol detection, Nanoscale Res Lett 4, 513-517 (2009), electrospinning is utilized. The method of synthesizing zinc oxide nanowires as a resistive alcohol sensor material. The method first prepares a gel of zinc acetate (Zinc Acetate) and polyvinyl acetate (PVA), and the gel is placed in a syringe. The syringe is connected to a high voltage (15 kV) power source as a positive electrode. The negative electrode is a crucible wafer on which an elongated electrode is formed and placed on an aluminum foil. After supplying a voltage of 15 kV, the electrically converted nanowire polymer was formed on a tantalum wafer, and then subjected to a calcination method at 600 ° C for 7 hours to convert the nanowire polymer into an inorganic zinc oxide nanowire. The process of this zinc oxide nanowire is also very complicated and time consuming.
另外,中華民國專利號TW I242540曾揭示了一種氧化鋅奈米線之製造方法,其係將直徑為10μm以下之鋅粉加入於反應槽內,且於反應槽內通入氬氣,使反應槽持續旋轉攪拌鋅粉,以防止鋅粉氧化;再持續加熱至400℃後,停止氬氣之進入並通入水蒸 氣,且持續加熱至500℃後,保持溫度於一反應溫度,反應溫度可為400℃~500℃,以供鋅粉與水蒸氣產生有還原反應,進而產生氧化鋅奈米線體。在此方法中,需要使用惰性氣體與水蒸氣的交替搭配,因此硬體管路上較為複雜,且在製備時間上也非理想,仍有改進的空間。 In addition, the Republic of China Patent No. TW I242540 discloses a method for producing a zinc oxide nanowire by adding zinc powder having a diameter of 10 μm or less to a reaction tank, and introducing argon gas into the reaction tank to make a reaction tank. Continue to rotate and stir the zinc powder to prevent oxidation of the zinc powder; after heating to 400 °C, stop the entry of argon and steam. After the gas is continuously heated to 500 ° C, the temperature is maintained at a reaction temperature, and the reaction temperature may be 400 ° C to 500 ° C to reduce the reaction between the zinc powder and the water vapor to generate a zinc oxide nanowire body. In this method, an alternate combination of an inert gas and water vapor is required, so that the hardware piping is complicated and unpredictable in preparation time, and there is still room for improvement.
本發明之主要目的,係提供一種製備粉末型氧化鋅奈米線之方法,其採用兩階段加熱,讓含鋅金屬片於空氣中熱氧化後,再繼續於真空下做高溫處理,即可合成出粉末型氧化鋅奈米線。 The main object of the present invention is to provide a method for preparing a powder type zinc oxide nanowire, which uses two-stage heating to thermally oxidize a zinc-containing metal sheet in air, and then continues to perform high temperature treatment under vacuum to synthesize A powdered zinc oxide nanowire is produced.
本發明之次要目的,係提供一種製備粉末型氧化鋅奈米線之方法,其在加熱含鋅金屬片之前,預先將該含鋅金屬片之表面與有機酸反應以及冷卻處理,以讓奈米線得以在高溫處理後形成。 A secondary object of the present invention is to provide a method for preparing a powder type zinc oxide nanowire, which preliminarily reacts the surface of the zinc-containing metal sheet with an organic acid and cools it before heating the zinc-containing metal sheet to allow Nai The rice noodles are formed after high temperature treatment.
本發明之另一目的,係提供一種製備粉末型氧化鋅奈米線之方法,其控制含鋅金屬片在高溫爐中的放置位置,以確保含鋅金屬片能夠在高溫爐中能依序被施以冷卻和加熱處理。 Another object of the present invention is to provide a method for preparing a powder type zinc oxide nanowire which controls the placement position of a zinc-containing metal sheet in a high temperature furnace to ensure that the zinc-containing metal sheet can be sequentially placed in a high temperature furnace. Apply cooling and heat treatment.
為了達到上述之目的,本發明揭示了一種製備粉末型氧化鋅奈米線之方法,其步驟係包含:浸泡一含鋅金屬片於一有機酸溶液之中;移置該含鋅金屬片至一石英板之上;放置該石英板於一高溫爐之中;加熱該含鋅金屬片至一第一溫度,使該含鋅金屬片與該高溫爐中之空氣接觸而氧化,形成氧化鋅之表面;抽真空而在真空下繼續加熱該含鋅金屬片至一第二溫度,使氧化鋅經退火而裂解;以及降溫後即可合成粉末型氧化鋅奈米線。所製備完成的粉末型氧化鋅奈米線可做進一步之利用,例如經由塗佈的方式 使其附著於電極上而做成高感度的感測元件,亦可成為壓電式微型發電機的材料,也可作為空氣清淨機及防蟎的光觸媒材料。 In order to achieve the above object, the present invention discloses a method for preparing a powder type zinc oxide nanowire, the method comprising: immersing a zinc-containing metal sheet in an organic acid solution; and disposing the zinc-containing metal sheet to a Above the quartz plate; placing the quartz plate in a high temperature furnace; heating the zinc-containing metal piece to a first temperature, causing the zinc-containing metal piece to be in contact with the air in the high-temperature furnace to oxidize to form a surface of zinc oxide The vacuum is applied to continue heating the zinc-containing metal sheet to a second temperature under vacuum to oxidize the zinc oxide by annealing; and after cooling, the powder type zinc oxide nanowire can be synthesized. The prepared powder type zinc oxide nanowire can be further utilized, for example, by coating. It can be attached to the electrode to form a high-sensitivity sensing element, and can also be used as a material for a piezoelectric micro-generator, or as a photocatalyst for air cleaners and tamper-proof materials.
1‧‧‧高溫爐 1‧‧‧High temperature furnace
2‧‧‧石英管 2‧‧‧Quartz tube
21‧‧‧端點處 21‧‧‧Endpoint
3‧‧‧石英板 3‧‧‧Quartz plate
4‧‧‧含鋅金屬片 4‧‧‧Zinc-containing metal sheet
5‧‧‧冷卻裝置 5‧‧‧Cooling device
6‧‧‧抽氣裝置 6‧‧‧Exhaust device
S1‧‧‧步驟一 S1‧‧‧Step one
S2‧‧‧步驟二 S2‧‧‧Step 2
S3‧‧‧步驟三 S3‧‧‧Step three
S4‧‧‧步驟四 S4‧‧‧Step four
S5‧‧‧步驟五 S5‧‧‧Step five
S6‧‧‧步驟六 S6‧‧‧Step six
第一圖:其係為本發明之步驟流程圖;第二圖:其係為本發明中,放置含鋅金屬片於高溫爐之示意圖;以及第三圖:其係為本發明中,整體操作設備之剖面示意圖。 The first figure is a flow chart of the steps of the present invention; the second figure is a schematic diagram of placing a zinc-containing metal sheet in a high-temperature furnace in the present invention; and a third figure: it is an overall operation in the present invention. Schematic diagram of the equipment.
為使本發明之特徵及所達成之功效有更進一步之瞭解與認識,謹佐以較佳之實施例及配合詳細之說明,說明如後:首先,請參考第一圖,其係為本發明之操作步驟,其係包含:步驟S1:浸泡一含鋅金屬片於一有機酸溶液之中;步驟S2:移置該含鋅金屬片至一石英板之上;步驟S3:放置該石英板於一高溫爐之中;步驟S4:加熱該含鋅金屬片至一第一溫度,使該含鋅金屬片與該高溫爐中之空氣接觸而氧化,形成氧化鋅之表面;步驟S5:抽真空而在真空下繼續加熱該含鋅金屬片至一第二溫度,使氧化鋅經退火而裂解;以及步驟S6:降溫後,即可形成穩定的粉末型氧化鋅奈米線。 For a better understanding and understanding of the features and advantages of the present invention, the preferred embodiments and the detailed description are as follows: First, please refer to the first figure, which is the present invention. The operation step comprises: step S1: soaking a zinc-containing metal piece in an organic acid solution; step S2: dislocating the zinc-containing metal piece onto a quartz plate; and step S3: placing the quartz plate in a In the high temperature furnace; step S4: heating the zinc-containing metal sheet to a first temperature, causing the zinc-containing metal sheet to be oxidized by contacting with air in the high-temperature furnace to form a surface of zinc oxide; step S5: vacuuming The zinc-containing metal sheet is further heated to a second temperature under vacuum to cause the zinc oxide to be annealed to be cracked; and in step S6: after the temperature is lowered, a stable powder type zinc oxide nanowire is formed.
配合上述的步驟,請參考第二圖以及第三圖所示之操作設備,本發明於製備粉末型氧化鋅奈米線時,其係先取含鋅金屬片4 為材料,此含鋅金屬片4為一薄形的片材,其面積則可視所需要而做調整,因此有利於大量製備。而於其材質上並不限定為純鋅金屬片,其他如鋅碳合金片等含有鋅元素之金屬片材亦可選用,只要其於熱氧化過程中,能與氧作用而合成出氧化鋅晶體即可。而在將其放置入石英管2中之前,本發明會先將此含鋅金屬片1浸泡於有機酸溶液之中,此有機酸的種類並無特殊限定,而本發明於此實施例係以0.3M之草酸(C2H2O4)為素材,經浸泡處理約10分鐘後,將之移至一石英板3上。 With reference to the above steps, please refer to the operation equipment shown in the second figure and the third figure. When preparing the powder type zinc oxide nanowire, the zinc-based metal sheet 4 is taken as the material, and the zinc-containing metal sheet 4 is used. In the case of a thin sheet, the area can be adjusted as needed, thus facilitating mass production. The material is not limited to a pure zinc metal sheet, and other metal sheets such as zinc-carbon alloy sheets containing zinc may be used as long as they can react with oxygen to synthesize zinc oxide crystals during thermal oxidation. Just fine. The present invention first immerses the zinc-containing metal sheet 1 in an organic acid solution before placing it in the quartz tube 2. The type of the organic acid is not particularly limited, and the present invention is 0.3 M oxalic acid (C 2 H 2 O 4 ) was used as a material, and after soaking for about 10 minutes, it was transferred to a quartz plate 3.
接著,將此石英板3放置高溫爐1當中準備進行加熱。此高溫爐1係會對其中心貫穿之石英管2進行加熱,因此石英板3是放置於石英管2之中;另外,在石英管2的兩端則具有冷卻裝置5,具有冷卻之功能。如第三圖所示,石英管2兩端之部分暴露於該高溫爐1之外,且該冷卻裝置5係位於該石英管2之端點處21。 Next, the quartz plate 3 is placed in the high temperature furnace 1 to be heated. The high temperature furnace 1 heats the quartz tube 2 penetrating the center thereof, so that the quartz plate 3 is placed in the quartz tube 2, and the cooling device 5 is provided at both ends of the quartz tube 2, and has a function of cooling. As shown in the third figure, a portion of both ends of the quartz tube 2 is exposed outside the high temperature furnace 1, and the cooling device 5 is located at the end point 21 of the quartz tube 2.
本發明將石英板3放置於高溫爐1之中時,而石英板3除了係被放置於石英管2中之外,其與冷卻裝置5之距離也相當重要;若操作者將石英板3放置於高溫爐1之中心,也就是最遠離兩端冷卻裝置5的位置,則失敗率會大幅提高,因為本發明需要在加熱之前先進行冷卻處理,因此石英板3的位置係靠近冷卻裝置5,但不暴露於該高溫爐1之外,以在冷卻和後續之加熱處理間取得平衡。 When the quartz plate 3 is placed in the high temperature furnace 1, the quartz plate 3 is placed in the quartz tube 2, and the distance from the cooling device 5 is also important; if the operator places the quartz plate 3 In the center of the high temperature furnace 1, that is, the position farthest from the cooling device 5 at both ends, the failure rate is greatly increased, because the present invention requires cooling treatment before heating, so the position of the quartz plate 3 is close to the cooling device 5, However, it is not exposed to the outside of the high temperature furnace 1 to achieve a balance between cooling and subsequent heat treatment.
放置該石英板3後,接著即進入步驟S4,也就是加熱含鋅金屬片4至第一溫度,此第一溫度並不高,只要能夠高於所使用之有機酸之熔點即可。以草酸之熔點為例,此時第一溫度控制於大於190℃,其目的則是在於加速含鋅金屬片4的表面於空氣中發生 氧化而形成氧化鋅的進程。而為了達成氧化的目的,因此石英管2於此階段當中,尚未被抽氣為真空狀態。 After the quartz plate 3 is placed, the process proceeds to step S4, that is, the zinc-containing metal piece 4 is heated to a first temperature, which is not high as long as it can be higher than the melting point of the organic acid used. Taking the melting point of oxalic acid as an example, the first temperature is controlled to be greater than 190 ° C, and the purpose is to accelerate the surface of the zinc-containing metal sheet 4 to occur in the air. The process of oxidation to form zinc oxide. In order to achieve the purpose of oxidation, the quartz tube 2 has not been evacuated to a vacuum state during this stage.
在高溫爐透過加熱石英管2而間接加熱了石英板3以及含鋅金屬片4至第一溫度約幾十分鐘後,接著進入步驟S5,將石英管2內部抽為真空狀態,並在真空下繼續加熱含鋅金屬片4至一第二溫度。第二溫度為680℃以上,使得形成氧化鋅之表面經裂解,然後再經冷卻回室溫,即可合成出穩定的粉末型氧化鋅,其係為奈米線之結構。 After the quartz plate 3 and the zinc-containing metal piece 4 are indirectly heated in the high-temperature furnace through the heating quartz tube 2 to the first temperature for about several tens of minutes, the process proceeds to step S5, and the inside of the quartz tube 2 is evacuated and under vacuum. Heating of the zinc-containing metal sheet 4 to a second temperature is continued. The second temperature is above 680 ° C, so that the surface on which the zinc oxide is formed is cleaved, and then cooled back to room temperature to synthesize a stable powder type zinc oxide, which is a structure of a nanowire.
其中,經第二溫度退火處理後之冷卻程序,係可透過自然冷卻而降溫至室溫,而並不限制需要透過冷卻裝置5的運作。 The cooling process after the second temperature annealing process can be cooled to room temperature by natural cooling without limiting the operation of the cooling device 5.
本發明的效率很高,其對加熱含鋅金屬片4之整體時間係不超過50分鐘,可在一個小時內完成製備粉末型氧化鋅奈米線,不若過去沉積法的操作繁複以及廢時。而所製備的粉末型氧化鋅奈米線可進一步利用溶液,將其塗佈在所需的基板上,作為感測器元件、發電機元件或光觸媒元件。此種粉末型氧化鋅奈米線因為有較多的表面氧缺陷及氧空洞,可作為高感度的感測器元件,對於染劑的光退化效率亦相當高,其可結合智慧型電路設計,應用作多種機械設備上,如除濕機、空氣清淨機、瓦斯防爆器或毒氣偵測機等。 The invention has high efficiency, and the whole time for heating the zinc-containing metal sheet 4 is not more than 50 minutes, and the preparation of the powder type zinc oxide nano-wire can be completed in one hour, which is not complicated in the operation of the deposition method in the past and waste time. . The prepared powder type zinc oxide nanowire can be further coated with a solution on a desired substrate as a sensor element, a generator element or a photocatalytic element. The powder type zinc oxide nanowire can be used as a high-sensitivity sensor element because of its many surface oxygen defects and oxygen cavities, and the photo-degradation efficiency of the dye is also relatively high, which can be combined with a smart circuit design. Used in a variety of mechanical equipment, such as dehumidifiers, air purifiers, gas explosion-proof devices or gas detectors.
本發明所揭示之製備粉末型氧化鋅奈米線之方法,透過兩階段熱氧化,並且巧妙地藉由含鋅金屬片在高溫爐中的設置位置,良好地控制含鋅金屬片所接受到的加溫與冷卻處理,即可讓氧化鋅奈米線得以迅速合成,在效率、品質和成本上都有所兼顧之下 ,本發明無疑提供了一具經濟和實用價值之製備粉末型氧化鋅奈米線之方法。 The method for preparing a powder type zinc oxide nanowire disclosed by the present invention is subjected to two-stage thermal oxidation, and is skillfully controlled by a zinc-containing metal sheet in a high-temperature furnace to control the zinc-containing metal sheet. Heating and cooling treatment allows the zinc oxide nanowire to be synthesized quickly, with efficiency, quality and cost. The present invention undoubtedly provides an economical and practical method for preparing a powder type zinc oxide nanowire.
惟以上所述者,僅為本發明之較佳實施例而已,並非用來限定本發明實施之範圍,舉凡依本發明申請專利範圍所述之形狀、構造、特徵及精神所為之均等變化與修飾,均應包括於本發明之申請專利範圍內。 The above is only the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and the variations, modifications, and modifications of the shapes, structures, features, and spirits described in the claims of the present invention. All should be included in the scope of the patent application of the present invention.
S1‧‧‧步驟一 S1‧‧‧Step one
S2‧‧‧步驟二 S2‧‧‧Step 2
S3‧‧‧步驟三 S3‧‧‧Step three
S4‧‧‧步驟四 S4‧‧‧Step four
S5‧‧‧步驟五 S5‧‧‧Step five
S6‧‧‧步驟六 S6‧‧‧Step six
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TW200724495A (en) * | 2005-12-30 | 2007-07-01 | Ind Tech Res Inst | Nanowires and a method of the same |
CN101092743A (en) * | 2007-06-29 | 2007-12-26 | 陕西师范大学 | Hydrothermal method for preparing zinc - oxalate of monocrstalline ZnO Nano line |
CN202054923U (en) * | 2011-04-21 | 2011-11-30 | 浙江大学 | Preparation device for cadmium selenide sulfide zinc nanowires |
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CN101092743A (en) * | 2007-06-29 | 2007-12-26 | 陕西师范大学 | Hydrothermal method for preparing zinc - oxalate of monocrstalline ZnO Nano line |
CN202054923U (en) * | 2011-04-21 | 2011-11-30 | 浙江大学 | Preparation device for cadmium selenide sulfide zinc nanowires |
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許乃鋒 博士論文,’金屬氧化物奈米線的合成技術及其在奈米發電機之應用’上架日2012/03/01,摘要 * |
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