TWI495050B - Resin-sealed semiconductor device, mold for resin seal, method for manufacturing resin-sealed semiconductor device and lead frame - Google Patents

Resin-sealed semiconductor device, mold for resin seal, method for manufacturing resin-sealed semiconductor device and lead frame Download PDF

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TWI495050B
TWI495050B TW101100526A TW101100526A TWI495050B TW I495050 B TWI495050 B TW I495050B TW 101100526 A TW101100526 A TW 101100526A TW 101100526 A TW101100526 A TW 101100526A TW I495050 B TWI495050 B TW I495050B
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mold
main body
resin
semiconductor device
curved
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TW201230257A (en
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Toshiyuki Tamate
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Shindengen Electric Mfg
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Description

樹脂密封型半導體裝置、樹脂密封用模具、樹脂密封型半導體裝置的製造方法及引線架Resin-sealed semiconductor device, resin sealing mold, resin sealing type semiconductor device manufacturing method, and lead frame

本發明涉及一種可以安裝散熱扇的樹脂密封型半導體裝置、製造樹脂密封型半導體裝置時使用的樹脂密封用模具、樹脂密封型半導體裝置的製造方法及用於樹脂密封型半導體裝置的引線架。The present invention relates to a resin-sealed semiconductor device in which a heat dissipation fan can be mounted, a resin sealing mold used in the production of a resin-sealed semiconductor device, a method of manufacturing a resin-sealed semiconductor device, and a lead frame for a resin-sealed semiconductor device.

將半導體元件及安裝這些半導體元件的晶粒座(die pad,如:壓料墊、頂料板、沖模墊)等的半導體元件安裝部用樹脂密封的樹脂密封型半導體裝置(參照非專利文獻1),被廣泛應用於各種電子機器。A resin-sealed semiconductor device in which a semiconductor element and a semiconductor element mounting portion such as a die pad (such as a die pad, a top plate, and a die pad) are sealed with a resin (see Non-Patent Document 1) ), is widely used in various electronic machines.

圖24是表示非專利文獻1公開的以往的樹脂密封型半導體裝置900的斜視圖。在這裡,圖24是將樹脂透明化顯示的圖。另外,圖24所示的以往的樹脂密封型半導體裝置900,是單列直插橋式二極體。FIG. 24 is a perspective view showing a conventional resin sealing type semiconductor device 900 disclosed in Non-Patent Document 1. Here, FIG. 24 is a view showing a transparent display of a resin. Moreover, the conventional resin-sealed type semiconductor device 900 shown in FIG. 24 is a single-row in-line bridge type diode.

如圖24所示,以往的樹脂密封型半導體裝置900,具有作為半導體元件安裝部的晶粒座(第一晶粒座911及第二晶粒座912)、半導體元件、接合連接端子(第一接合連接端子921及第二接合連接端子922)等通過樹脂密封形成的樹脂密封型半導體裝置主體(以下簡稱為“主體”)930,作為外部接線端子的4條外部導線(第一外部導線951、952及第二外部導線953、954)。As shown in FIG. 24, the conventional resin-sealed semiconductor device 900 includes a die pad (first die pad 911 and second die pad 912) as a semiconductor element mounting portion, a semiconductor element, and a bonding connection terminal (first a resin-sealed type semiconductor device main body (hereinafter simply referred to as "main body") 930 formed by resin sealing, such as a joint connection terminal 921 and a second joint connection terminal 922), and four external wires (first external wires 951, 952 and second outer conductor 953, 954).

這種結構的樹脂密封型半導體裝置900,在主體930的背面(在圖24中紙張的內側)設有螺絲(screw)通過孔H,用於通過螺絲安裝散熱扇980(參照圖25)。In the resin-sealed type semiconductor device 900 of such a structure, a screw passage hole H is provided on the back surface of the main body 930 (inside the paper sheet in Fig. 24) for mounting the heat dissipation fan 980 by screws (refer to Fig. 25).

圖25是表示在圖24所示的以往的樹脂密封型半導體裝置900上安裝了散熱扇980的狀態的說明圖。在以往的樹脂密封型半導體裝置900上安裝散熱扇980時,是在使散熱扇980接觸主體930的背面的狀態下,從主體930的正面將螺絲990插入螺絲通過孔H,將螺絲990旋入散熱扇980上設置的陰螺紋部(即螺母部,圖中未標示),通過旋緊螺絲990來安裝散熱扇980。FIG. 25 is an explanatory view showing a state in which the heat dissipation fan 980 is attached to the conventional resin-sealed semiconductor device 900 shown in FIG. When the heat dissipating fan 980 is attached to the conventional resin sealing type semiconductor device 900, the screw 990 is inserted into the screw through hole H from the front surface of the main body 930 while the heat dissipating fan 980 is in contact with the back surface of the main body 930, and the screw 990 is screwed in. The female screw portion (ie, the nut portion, not shown) provided on the heat dissipation fan 980 is attached to the heat dissipation fan 980 by tightening the screw 990.

先行技術文獻Advanced technical literature

專利文獻Patent literature

非專利文獻1:產品資訊>半導體產品>二極體>橋式二極體>導線插入型、[online]、新電元工業株式會社、[2010年9月16日檢索]、網際網路(Internet)、URL:http://www.shindengen.co.jp/product/semi/list_detail_NEW.php?category_id=01&sub_id=03&product_id=D25JAB80V>Non-Patent Document 1: Product Information > Semiconductor Products > Diodes > Bridge Diodes > Wire Insertion Type, [online], New Electric Industrial Co., Ltd., [Search on September 16, 2010], Internet ( Internet), URL: http://www.shindengen.co.jp/product/semi/list_detail_NEW.php? Category_id=01&sub_id=03&product_id=D25JAB80V>

但是,在將上述方式製造的樹脂密封型半導體裝置900安裝在電子機器的基板(圖中未標示)上時,將外部導線951~954插入基板上設置的安裝孔後,一般是通過焊接等進行電氣連接。這時,隨著近年來電子機器的高功能化及小型化,樹脂密封型半導體裝置也被以各種各樣的形態安裝,因而在基板等上安裝樹脂密封型半導體裝置900時,對於安裝的自由度的需求越來越高。因此,對於散熱扇980的安裝位置,有時也需要不設在主體930的背面,而是例如主體930的上面(頂面)等。However, when the resin-sealed semiconductor device 900 manufactured as described above is mounted on a substrate (not shown) of an electronic device, the external wires 951 to 954 are inserted into the mounting holes provided on the substrate, and then generally soldered or the like. Electrical connections. In this case, the resin-sealed semiconductor device is mounted in various forms in recent years due to the high functionality and miniaturization of the electronic device. Therefore, when the resin-sealed semiconductor device 900 is mounted on a substrate or the like, the degree of freedom in mounting is attached. The demand is getting higher and higher. Therefore, the mounting position of the heat dissipation fan 980 may not necessarily be provided on the back surface of the main body 930, but may be, for example, the upper surface (top surface) of the main body 930 or the like.

然而,在以往的樹脂密封型半導體裝置900中,由於其散熱扇980的安裝位置是固定的,因而要變更散熱扇980的安裝位置,並不是很容易。However, in the conventional resin-sealed type semiconductor device 900, since the mounting position of the heat radiating fan 980 is fixed, it is not easy to change the mounting position of the heat radiating fan 980.

因此,本發明的目的在於,提供一種樹脂密封型半導體裝置,通過使散熱扇的安裝位置可以選擇,來提高將樹脂密封型半導體裝置安裝在基板等時的安裝自由度。另外,本發明的目的還在於,提供可以製造本發明的樹脂密封型半導體裝置的樹脂密封用模具(金屬模具)及樹脂密封型半導體裝置的製造方法。再者,本發明的目的還在於,提供通過在本發明的樹脂密封型半導體裝置上使用可以提高散熱性能的引線架。In view of the above, it is an object of the present invention to provide a resin-sealed semiconductor device in which the mounting position of the heat-dissipating fan can be selected to improve the degree of freedom in mounting the resin-sealed semiconductor device on a substrate or the like. Further, another object of the present invention is to provide a resin sealing mold (metal mold) and a resin sealing type semiconductor device which can produce the resin-sealed semiconductor device of the present invention. Further, another object of the present invention is to provide a lead frame which can improve heat dissipation performance by using the resin-sealed type semiconductor device of the present invention.

[1]本發明的樹脂密封型半導體裝置,具有一個把半導體元件與半導體元件安裝部被樹脂密封的主體、以及從所述主體向外部沿預定方向伸出的外部導線,當所述外部導線伸出的面為所述主體的下面、其反面為所述主體的上面、所述下面與所述上面之間可以安裝散熱扇的面為所述主體的背面、其反面為所述主體的正面時,在所述主體的不同面上,設有將所述散熱扇安裝在所述背面或所述上面的第一螺絲通過部及第二螺絲通過部。[1] The resin-sealed type semiconductor device of the present invention has a body in which a semiconductor element and a semiconductor element mounting portion are resin-sealed, and an external wire extending from the body to the outside in a predetermined direction, when the external wire is extended The surface that is out is the lower surface of the main body, the reverse side of which is the upper surface of the main body, and the surface on which the heat dissipating fan can be mounted between the lower surface and the upper surface is the back surface of the main body, and the reverse side thereof is the front surface of the main body. A first screw passing portion and a second screw passing portion for mounting the heat dissipating fan on the back surface or the upper surface are provided on different faces of the main body.

[2] 在本發明的樹脂密封型半導體裝置中,所述半導體元件安裝部由用於安裝所述半導體元件的板狀晶粒座構成,所述晶粒座具有裝載所述半導體元件的裝載部、以及使該裝載部的所述上面側的端部向所述正面側彎曲形成的彎曲平面部。[2] In the resin-sealed type semiconductor device of the present invention, the semiconductor element mounting portion is constituted by a plate-like die pad for mounting the semiconductor element, and the die pad holder has a loading portion on which the semiconductor element is mounted And a curved flat portion formed by bending the end portion of the upper surface side of the loading portion toward the front surface side.

[3] 在本發明的樹脂密封型半導體裝置中,所述彎曲平面部的先端部,被形成在比所述正面與所述背面之間的中間位置更靠近所述正面側的位置。[3] In the resin-sealed semiconductor device of the present invention, the tip end portion of the curved flat portion is formed at a position closer to the front surface side than an intermediate position between the front surface and the back surface.

[4] 在本發明的樹脂密封型半導體裝置中,所述主體上設有用於防止所述散熱扇的安裝位置錯位的防錯位用結合部。[4] In the resin-sealed semiconductor device of the present invention, the main body is provided with a misalignment preventing joint for preventing the mounting position of the heat dissipating fan from being displaced.

[5] 在本發明的樹脂密封型半導體裝置中,由所述第一螺絲通過部及所述第二螺絲通過部形成穿過螺絲的第一插通路徑及第二插通路徑,所述第一插通路徑及所述第二插通路徑被交叉設置。[5] In the resin-sealed semiconductor device of the present invention, the first screw passage portion and the second screw passage portion form a first insertion path and a second insertion path through the screw, the first A plug-in path and the second plug-in path are cross-arranged.

[6] 在本發明的樹脂密封型半導體裝置中,所述第一螺絲通過部及所述第二螺絲通過部,是通過用於形成該第一螺絲通過部的具有第一突出部的第一模具及用於形成該第二螺絲通過部的具有第二突出部的第二模具構成的樹脂密封用模具形成的。[6] In the resin-sealed type semiconductor device of the present invention, the first screw passing portion and the second screw passing portion are first through the first protruding portion for forming the first screw passing portion A mold and a resin sealing mold formed of a second mold having a second protruding portion for forming the second screw passing portion are formed.

[7] 在本發明的樹脂密封型半導體裝置中,所述第一螺絲通過部是由第一U字狀空間及與該第一U字狀空間共用空間的第二U字狀空間構成,所述第一U字狀空間為在所述正面具有呈半圓形的彎曲部及開口部的U字狀,所述彎曲部位於所述正面的所述上面側的端邊與所述下面側的端邊之間,同時,所述開口部位於所述正面的所述下面側的端邊,該第一U字狀空間被形成至面向所述背面的預定位置,所述第二U字狀空間為在所述下面具有呈半圓形的彎曲部及開口部的U字狀,所述彎曲部位於所述下面的所述正面側的端邊與所述背面側的端邊之間,同時,所述開口部位於所述下面的所述正面側的端邊,該第二U字狀空間被形成至面向所述上面的預定位置,所述第二螺絲通過部是由第三U字狀空間及與該第三U字狀空間共用空間的第四U字狀空間構成,所述第三U字狀空間為在所述背面具有呈半圓形的彎曲部及開口部的U字狀,所述彎曲部位於所述背面的所述上面側的端邊與所述下面側的端邊之間,同時,所述開口部位於所述背面的所述上面側的端邊,該第三U字狀空間被形成至面向所述正面的預定位置,所述第四U字狀空間為在所述上面具有呈半圓形的彎曲部及開口部的U字狀,所述彎曲部位於所述上面的所述正面側的端邊與所述背面側的端邊之間,同時,所述開口部位於所述上面的所述北面側的端邊,該第四U字狀空間被形成至面向所述下面的預定位置,所述第一螺絲通過部及所述第二螺絲通過部共用空間,在觀察所述上面或所述下面時,由所述第二U字狀空間的彎曲部與所述第四U字狀空間的彎曲部形成呈圓形的所述第一插通路徑,在觀察所述正面或所述背面時,由所述第一U字狀空間的彎曲部與所述第三U字狀空間的彎曲部形成呈圓形的所述第二插通路徑。[7] In the resin-sealed semiconductor device of the present invention, the first screw passage portion is configured by a first U-shaped space and a second U-shaped space that shares a space with the first U-shaped space. The first U-shaped space has a U-shape having a semicircular curved portion and an opening portion on the front surface, and the curved portion is located on the upper end side and the lower surface side of the front surface of the front surface Between the end edges, at the same time, the opening portion is located at an end side of the lower surface side of the front surface, the first U-shaped space is formed to a predetermined position facing the back surface, and the second U-shaped space a U-shape having a semicircular curved portion and an opening portion on the lower surface, the curved portion being located between the end side of the lower surface on the front side and the end side on the back side, and The opening portion is located at an end side of the lower surface of the lower surface, the second U-shaped space is formed to a predetermined position facing the upper surface, and the second screw passage portion is formed by a third U-shaped space And a fourth U-shaped space sharing the space with the third U-shaped space, the third U-shaped space a U-shape having a semicircular curved portion and an opening portion on the back surface, the curved portion being located between the end side of the upper surface side of the back surface and the end side of the lower surface side, and The opening portion is located at an end side of the upper surface side of the back surface, the third U-shaped space is formed to a predetermined position facing the front surface, and the fourth U-shaped space has a a semi-circular curved portion and a U-shape of the opening portion, wherein the curved portion is located between the end side of the upper surface side and the end side of the back surface side, and the opening portion is located at the The fourth U-shaped space on the upper side of the upper surface is formed to a predetermined position facing the lower surface, and the first screw passage portion and the second screw passage portion share a space, and the observation is made Above or below, the curved portion of the second U-shaped space and the curved portion of the fourth U-shaped space form a circular first path of the insertion, when the front or The back surface, the curved portion of the first U-shaped space and the third U-shaped space Circular curved portion of the second insertion path.

[8] 在本發明的樹脂密封型半導體裝置中,在將所述散熱扇安裝在所述背面的狀態時,所述螺絲由所述第一U字狀空間的彎曲部和所述第三U字狀空間的彎曲部定位,在將所述散熱扇安裝在所述上面的狀態時,所述螺絲由所述第二U字狀空間的彎曲部和所述第四U字狀空間的彎曲部定位。[8] In the resin-sealed semiconductor device of the present invention, the screw is bent by the first U-shaped space and the third U when the heat dissipating fan is attached to the back surface Positioning a curved portion of the word space, the screw being bent by the curved portion of the second U-shaped space and the curved portion of the fourth U-shaped space when the heat dissipating fan is mounted on the upper surface Positioning.

[9] 在本發明的樹脂密封型半導體裝置中,所述第一螺絲通過部作為開口槽是通過對所述正面從所述上面至所述下面進行開槽而形成的,該開口槽是在所述上面具有呈半圓形的彎曲部與開口部的U字狀,所述彎曲部位於所述上面的所述正面側的端邊與所述背面側的端邊之間,同時,所述開口部位於所述上面的所述正面側的端邊,所述彎曲部及所述開口部被形成至所述正面,該彎曲部被作為所述第一插通路徑使用,所述第二螺絲通過部被形成為從所述彎曲面至所述背面貫通的貫通孔,該貫通孔被作為所述第二插通路徑使用,在觀察所述正面或所述背面時呈圓形。[9] In the resin-sealed type semiconductor device of the present invention, the first screw passage portion is formed as an open groove by grooving the front surface from the upper surface to the lower surface, and the open groove is The upper surface has a U-shaped portion having a semicircular curved portion and an opening portion, and the curved portion is located between the end side of the upper surface side and the end side of the back surface side, and at the same time, An opening portion is located at an end side of the upper surface side of the upper surface, the curved portion and the opening portion are formed to the front surface, the curved portion is used as the first insertion path, the second screw The passage portion is formed as a through hole penetrating from the curved surface to the back surface, and the through hole is used as the second insertion path, and has a circular shape when the front surface or the back surface is observed.

[10] 在本發明的樹脂密封型半導體裝置中,所述第一螺絲通過部及所述第二螺絲通過部中,至少一個螺絲通過部是通過開孔用機器在所述主體上形成的。[10] In the resin-sealed type semiconductor device of the present invention, at least one of the first screw passing portion and the second screw passing portion is formed on the main body by an opening machine.

[11] 本發明的樹脂密封用模具,是用於製造樹脂密封型半導體裝置的樹脂密封用模具,所述樹脂密封型半導體裝置具有一個通過樹脂將半導體元件和半導體元件安裝部密封的主體,以及,從所述主體向外部沿預定方向伸出的外部導線,設所述外部導線伸出的為所述主體的下面、其反面為所述主體的上面、所述下面與所述上面之間可以安裝散熱扇的面為所述主體的背面、其反面為所述主體的正面時,用於將所述散熱扇安裝在所述背面或所述上面的第一螺絲通過部及第二螺絲通過部,被設置在所述主體的不同的面,所述樹脂密封用模具,具有在將所述主體分為所述正面側及所述背面側時,與所述正面側對應的第一模具及與所述背面側對應的第二模具,所述第一模具的模具腔體上設有用於形成所述第一螺絲通過部的第一突出部,所述第二模具的模具腔體上設有用於形成所述第二螺絲通過部的第二突出部,所述第一突出部及所述第二突出部,在向所述第一模具的模具腔體的開口面與第二模具的模具腔體的開口面對接形成的空間中注入樹脂形成所述主體時,為可以在該主體上形成所述第一螺絲通過部及所述第二螺絲通過部的形狀。[11] The resin sealing mold of the present invention is a resin sealing mold for producing a resin sealing type semiconductor device having a body in which a semiconductor element and a semiconductor element mounting portion are sealed by a resin, and An external wire extending from the main body to the outside in a predetermined direction, wherein the outer wire protrudes from a lower surface of the main body, the reverse surface thereof is an upper surface of the main body, and the lower surface and the upper surface may be When the surface on which the heat dissipation fan is mounted is the back surface of the main body and the reverse side thereof is the front surface of the main body, the first screw passage portion and the second screw passage portion for mounting the heat dissipation fan on the back surface or the upper surface Provided on a different surface of the main body, the resin sealing mold having a first mold corresponding to the front side and when the main body is divided into the front side and the back side a second mold corresponding to the back side, a mold cavity of the first mold is provided with a first protrusion for forming the first screw passage portion, and a mold cavity of the second mold Providing a second protrusion for forming the second screw passing portion, the first protrusion and the second protrusion being on an opening face of the mold cavity of the first mold and the second mold When the resin is formed by injecting resin into the space formed by the opening of the mold cavity, the first screw passing portion and the second screw passing portion may be formed on the main body.

[12] 在本發明的樹脂密封用模具中,在所述第一模具的模具腔體及所述第二模具的模具腔體各自內部的各個面中,形成所述主體的下面的面為下面成形面,在使該下面成形面水準且朝向上方放置所述第一模具及所述第二模具的狀態下,從所述第一模具的模具腔體的開口面及所述第二模具的模具腔體的開口面分別觀察所述第一模具的模具腔體內部及所述第二模具的模具腔體內部時,設左右方向為x軸、前後方向為y軸、上下方向為z軸,所述第一突出部在該第一突出部的下端形成為平坦面,同時,在該第一突出部的先端,從所述第一突出部的下端沿z軸至預定位置,形成有呈半圓形的第一先端彎曲面,在所述第一突出部的上端,從該第一突出部的基部沿y軸至預定的位置,形成有呈半圓形的上端彎曲面,在所述第一先端彎曲面與所述上端彎曲面之間,形成有以預定角度傾斜的第一傾斜面,所述第二突出部在該第二突出部的上端形成有平坦面,同時,在該第二突出部的先端,在從該第二突出部的上端側沿z軸至預定位置,形成有呈半圓形的第二先端彎曲面,在所述第二突出部的下端,在從該第二突出部的基部沿y軸至預定的位置,形成有呈半圓形的下端彎曲面,在所述第二先端彎曲面與所述下端彎曲面之間,形成有具有與所述第一傾斜面對應的形狀的第二傾斜面。[12] In the resin sealing mold of the present invention, in the respective surfaces of the mold cavity of the first mold and the mold cavity of the second mold, the lower surface of the main body is formed as a lower surface a molding surface from a surface of the mold cavity of the first mold and a mold of the second mold in a state where the lower molding surface is leveled and the first mold and the second mold are placed upward When the opening surface of the cavity is respectively observed inside the mold cavity of the first mold and the inside of the mold cavity of the second mold, the left-right direction is the x-axis, the front-rear direction is the y-axis, and the vertical direction is the z-axis. The first protruding portion is formed as a flat surface at a lower end of the first protruding portion, and at the tip end of the first protruding portion, a semicircle is formed from a lower end of the first protruding portion along a z-axis to a predetermined position. a first curved end surface of the shape, at an upper end of the first protruding portion, from a base portion of the first protruding portion along a y-axis to a predetermined position, a semi-circular upper end curved surface is formed at the first Forming between the tip end curved surface and the upper end curved surface a first inclined surface inclined at a predetermined angle, the second protruding portion is formed with a flat surface at an upper end of the second protruding portion, and at a tip end of the second protruding portion, at an upper end side from the second protruding portion A second tip end curved surface having a semicircular shape is formed along the z-axis to a predetermined position, and a lower end of the second protruding portion is formed at a position from the base portion of the second protruding portion along the y-axis to a predetermined position. A semicircular lower end curved surface is formed with a second inclined surface having a shape corresponding to the first inclined surface between the second tip end curved surface and the lower end curved surface.

[13] 在本發明的樹脂密封用模具中,在所述第一模具的模具腔體及所述第二模具的模具腔體各自內部的各個面中,形成所述主體的下面的面為下面成形面,在使該下面成形面水準且朝向上方放置所述第一模具及所述第二模具的狀態下,從所述第一模具的模具腔體的開口面及所述第二模具的模具腔體的開口面分別觀察所述第一模具的模具腔體內部及所述第二模具的模具腔體內部時,設左右方向為x軸、前後方向為y軸、上下方向為z軸,所述第一突出部在該第一突出部的先端,沿z軸從所述第一模具的內部的上端至下端形成有呈半圓形的彎曲面,所述第二突出部形成有沿y軸方向,且向在所述第一突出部的先端形成的彎曲面突出的圓柱狀突出部。[13] In the resin sealing mold of the present invention, in the respective surfaces of the mold cavity of the first mold and the mold cavity of the second mold, the lower surface of the main body is formed as a lower surface a molding surface from a surface of the mold cavity of the first mold and a mold of the second mold in a state where the lower molding surface is leveled and the first mold and the second mold are placed upward When the opening surface of the cavity is respectively observed inside the mold cavity of the first mold and the inside of the mold cavity of the second mold, the left-right direction is the x-axis, the front-rear direction is the y-axis, and the vertical direction is the z-axis. The first protrusion is formed at a tip end of the first protrusion, and has a semicircular curved surface from an upper end to a lower end of the inner portion of the first mold along a z-axis, and the second protrusion is formed along a y-axis a cylindrical protrusion protruding in a direction and formed on a curved surface formed at a tip end of the first protrusion.

[14] 在本發明的樹脂密封用模具中,在所述第一突出部的先端形成的彎曲面上,沿y軸方向設置有突出部,該突出部具有與所述圓柱狀突出部的圓柱先端面對應形狀的先端面。[14] In the resin sealing mold of the present invention, a protruding portion having a cylindrical portion with the cylindrical protruding portion is provided on a curved surface formed at a tip end of the first protruding portion in a y-axis direction The first end face corresponds to the first end face of the shape.

[15] 在本發明的樹脂密封用模具中,所述第二模具,具有形成防錯位用結合部的結合成形部,所述防錯位用結合部,在將所述散熱扇安裝在所述主體的狀態下,用於防止所述散熱扇的位置錯位。[15] In the resin sealing mold of the present invention, the second mold has a joint forming portion that forms a joint for preventing misalignment, and the joint for preventing misalignment is attached to the main body In the state of being used, the position of the heat dissipation fan is prevented from being displaced.

[16] 本發明的樹脂密封型半導體裝置的製造方法,是製造具有一個把半導體元件及半導體元件安裝部通過樹脂密封的主體、以及從所述主體向外部沿預定方向伸出的外部導線,當所述外部導線伸出的面為所述主體的下面、其反面為所述主體的上面、所述下面與所述上面之間可以安裝散熱扇的面為所述主體的背面、其反面為所述主體的正面時,所述主體的所述背面或所述上面分別設有將所述散熱扇安裝在所述主體的第一螺絲通過部及第二螺絲通過部的樹脂密封型半導體裝置的樹脂密封型半導體裝置的製造方法,具有準備樹脂密封用模具的樹脂密封用模具準備工程,所述模具具有將所述主體分為所述正面側及所述背面側時,與所述正面側的主體對應的第一模具及與所述背面側的主體對應的第二模具,所述第一模具的模具腔體上設有用於形成所述第一螺絲通過部的第一突出部,所述第二模具的模具腔體上設有用於形成所述第二螺絲通過部的第二突出部,所述第一突出部及所述第二突出部,在向所述第一模具的模具腔體的開口面與第二模具的模具腔體的開口面對接形成的空間中注入樹脂形成所述主體時,為可以在該主體上形成所述第一螺絲通過部及所述第二螺絲通過部的形狀;在所述半導體元件安裝部安裝所述半導體元件的半導體元件安裝工程;將包含所述半導體元件與所述半導體元件安裝部的預定範圍,通過所述樹脂密封用模具覆蓋後,向該樹脂密封用模型注入樹脂,將包含所述半導體元件與所述半導體元件安裝部的預定範圍以樹脂密封的樹脂密封工程。[16] A method of manufacturing a resin-sealed semiconductor device according to the present invention is to manufacture a main body having a semiconductor element and a semiconductor element mounting portion sealed by a resin, and an external wire extending from the main body to the outside in a predetermined direction. The surface on which the outer wire protrudes is the lower surface of the main body, the reverse surface of which is the upper surface of the main body, and the surface on which the heat dissipation fan can be mounted between the lower surface and the upper surface is the back surface of the main body, and the reverse side thereof is In the front surface of the main body, the back surface or the upper surface of the main body is respectively provided with a resin of a resin sealing type semiconductor device in which the heat dissipating fan is attached to the first screw passing portion and the second screw passing portion of the main body The method for producing a sealed semiconductor device includes a resin sealing mold preparation process for preparing a resin sealing mold, wherein the mold has a main body side and a front surface side when the main body is divided into the front side and the back side Corresponding first mold and a second mold corresponding to the main body on the back side, the mold cavity of the first mold is provided on the mold cavity for forming the first screw a first protruding portion of the wire passing portion, wherein the mold cavity of the second mold is provided with a second protruding portion for forming the second screw passing portion, the first protruding portion and the second protruding portion, Forming the first body on the body when injecting resin into the space formed by the opening face of the mold cavity of the first mold facing the opening of the mold cavity of the second mold a screw passage portion and a shape of the second screw passage portion; a semiconductor component mounting process in which the semiconductor component is mounted on the semiconductor component mounting portion; and a predetermined range including the semiconductor component and the semiconductor component mounting portion After the resin sealing mold is covered, the resin is injected into the resin sealing mold, and the resin including the semiconductor element and the predetermined range of the semiconductor element mounting portion is sealed with a resin.

[17] 本發明的引線架,是用於樹脂密封型半導體裝置的引線架,所述樹脂密封型半導體裝置,具有一個把半導體元件及半導體元件安裝部通過樹脂密封的主體、以及從所述主體向外部沿預定方向伸出的外部導線,當所述外部導線伸出的面為所述主體的下面、其反面為所述主體的上面、所述下面與所述上面之間可以安裝散熱扇的面為所述主體的背面、其反面為所述主體的正面時,所述主體的所述背面或所述上面分別設有將所述散熱扇安裝在所述主體的第一螺絲通過部及第二螺絲通過部,所述引線架,具有安裝所述半導體元件的板狀的晶粒座及所述外部導線,所述晶粒座具有裝載所述半導體元件的裝載部,以及,通過使該裝載部的所述上面側的端部向所述正面側彎曲形成的彎曲平面部。[17] The lead frame of the present invention is a lead frame for a resin-sealed type semiconductor device having a body in which a semiconductor element and a semiconductor element mounting portion are sealed by a resin, and a body from the body An external wire extending outward in a predetermined direction, wherein a surface of the outer wire protruding from the lower surface of the main body, a reverse surface thereof is an upper surface of the main body, and a heat dissipating fan may be installed between the lower surface and the upper surface When the surface is the back surface of the main body and the back surface thereof is the front surface of the main body, the back surface or the upper surface of the main body is respectively provided with a first screw passing portion and a first screw connecting the heat dissipating fan to the main body a screw passing portion having a plate-like die holder mounting the semiconductor element and the external lead, the die pad having a loading portion for loading the semiconductor element, and by loading the same An end portion of the upper surface of the portion is curved at a curved plane portion formed on the front side.

[18] 在本發明的引線架中,所述彎曲平面部的先端被形成在比所述正面與所述背面之間的中間位置更靠近所述正面側的位置。[18] In the lead frame of the present invention, the tip end of the curved flat portion is formed at a position closer to the front side than an intermediate position between the front surface and the back surface.

[19] 是與樹脂密封用模具一同使用製造樹脂密封型半導體裝置的引線架,所述樹脂密封型半導體裝置,具有一個把半導體元件及半導體元件安裝部通過樹脂密封的主體、以及從所述主體向外部沿預定方向伸出的外部導線,當所述外部導線伸出的面為所述主體的下面、其反面為所述主體的上面、所述下面與所述上面之間可以安裝散熱扇的面為所述主體的背面、其反面為所述主體的正面時,所述主體的所述背面或所述上面分別設有將所述散熱扇安裝在所述主體的第一螺絲通過部及第二螺絲通過部,所述樹脂密封用模具,具有將所述主體分為所述正面側及所述背面側時,與所述正面側的主體對應的第一模具及與所述背面側的主體對應的第二模具,所述第一模具的模具腔體上設有用於形成所述第一螺絲通過部的第一突出部,所述第二模具的模具腔體上設有用於形成所述第二螺絲通過部的第二突出部,所述第一突出部及所述第二突出部,在向所述第一模具的模具腔體的開口面與第二模具的模具腔體的開口面對接形成的空間中注入樹脂形成所述主體時,為可以在該主體上形成所述第一螺絲通過部及所述第二螺絲通過部的形狀,所述引線架,具有安裝半導體元件的板狀的晶粒座及所述外部導線,在所述晶粒座上,形成有空間部,用於避免與所述樹脂密封用模具的所述第一模具的模具腔體上設置的所述第一突出部及所述第二模具的模具腔體上設置的所述第二突出部中的至少一個相抵接。[19] A lead frame for manufacturing a resin-sealed type semiconductor device, which has a body for sealing a semiconductor element and a semiconductor element mounting portion by resin, and a body from the body, together with a resin sealing mold An external wire extending outward in a predetermined direction, wherein a surface of the outer wire protruding from the lower surface of the main body, a reverse surface thereof is an upper surface of the main body, and a heat dissipating fan may be installed between the lower surface and the upper surface When the surface is the back surface of the main body and the back surface thereof is the front surface of the main body, the back surface or the upper surface of the main body is respectively provided with a first screw passing portion and a first screw connecting the heat dissipating fan to the main body In the second screw passing portion, the resin sealing mold has a first mold corresponding to the front side body and a main body on the back side when the main body is divided into the front side and the back side Corresponding second mold, the first cavity of the first mold is provided with a first protrusion for forming the first screw passage portion, and the mold cavity of the second mold is provided a second protrusion for forming the second screw passing portion, the first protrusion and the second protrusion, at an opening face of the mold cavity of the first mold and a mold of the second mold When the body is formed by injecting resin into the space formed by the opening of the cavity, the shape of the first screw passing portion and the second screw passing portion may be formed on the main body, the lead frame having Mounting a plate-like die holder of the semiconductor element and the external lead, and forming a space portion on the die pad for avoiding a mold cavity of the first mold with the resin sealing mold At least one of the first protrusion and the second protrusion provided on the mold cavity of the second mold are abutted.

通過本發明的樹脂密封型半導體裝置,由於設有將散熱扇安裝在主體的背面或上面的第一螺絲通過部及第二螺絲通過部,因而可以將散熱扇選擇性地安裝在主體的背面或上面。這樣,通過本發明的樹脂密封型半導體裝置,在將樹脂密封型半導體裝置安裝在電子機器的基板等時,可以提高安裝的自由度。According to the resin-sealed semiconductor device of the present invention, since the first screw passing portion and the second screw passing portion are provided to mount the heat dissipating fan on the back surface or the upper surface of the main body, the heat dissipating fan can be selectively attached to the back surface of the main body or Above. As described above, in the resin-sealed semiconductor device of the present invention, when the resin-sealed semiconductor device is mounted on a substrate of an electronic device or the like, the degree of freedom in mounting can be improved.

另外,通過本發明的樹脂密封用模具,當將主體分為正面側與背面側時,具有與主體的正面側相對應的第一模具及與主體的背面側相對應的第二模具,第一模具設有形成第一螺絲通過部的第一突出部,第二模具設有形成第二螺絲通過部的第二突出部。因此,通過使用本發明的樹脂密封用模具,可以製造上述[1]所述的樹脂密封型半導體裝置。In addition, when the main body is divided into a front side and a back side, the resin sealing mold of the present invention has a first mold corresponding to the front side of the main body and a second mold corresponding to the back side of the main body, first The mold is provided with a first protrusion forming a first screw passage portion, and the second mold is provided with a second protrusion forming a second screw passage portion. Therefore, the resin-sealed semiconductor device according to the above [1] can be produced by using the resin sealing mold of the present invention.

另外,通過本發明的樹脂密封型半導體裝置的製造方法,具有準備可以在主體上形成第一螺絲通過部及第二螺絲通過部的形狀的樹脂密封用模具的樹脂密封用模具準備工程、在半導體元件安裝部安裝半導體元件的半導體元件安裝工程、將包含半導體元件和半導體元件安裝部的預定範圍通過樹脂密封用模具覆蓋後,在該樹脂密封用模具的內部注入樹脂,對包含半導體元件和半導體元件安裝部的預定範圍進行樹脂密封的樹脂密封工程。因此,通過依次進行上述工程,可以製造上述[1]所述的樹脂密封型半導體裝置。In addition, the resin sealing type semiconductor device manufacturing method of the present invention has a resin sealing mold preparation process for preparing a resin sealing mold which can form a first screw passing portion and a second screw passing portion in a main body, and is used in a semiconductor. The semiconductor element mounting process in which the semiconductor element is mounted on the element mounting portion, and the predetermined range including the semiconductor element and the semiconductor element mounting portion are covered by the resin sealing mold, and then resin is injected into the resin sealing mold to include the semiconductor element and the semiconductor element. The predetermined range of the mounting portion is subjected to a resin sealing resin sealing process. Therefore, the resin-sealed semiconductor device according to the above [1] can be manufactured by sequentially performing the above-described processes.

通過本發明的引線架,由於晶粒座具有使裝載部的上端向主體的正面側彎曲形成的彎曲平面部,因此在將散熱扇安裝在主體的上面時,散熱扇能夠以較大的面積與彎曲平面部對向。這樣,就可以獲得較高的散熱效果。According to the lead frame of the present invention, since the die pad has a curved flat portion formed by bending the upper end of the loading portion toward the front side of the main body, the heat dissipating fan can be mounted on a large area when the heat dissipating fan is mounted on the main body. The curved plane faces opposite. In this way, a higher heat dissipation effect can be obtained.

通過本發明的引線架,由於在晶粒座上形成有空間部,用於避免與樹脂密封用模具的第一模具的模具腔體內部設置的第一突出部及第二模具的模具腔體內部設置的第二突出部中的任一突出部相抵接,因此在使用樹脂密封用模具形成主體時,構成本發明的引線架的晶粒座與設置在樹脂密封用模具的突出部不會抵接。這樣,就可以順利地將晶粒座設置在樹脂密封用模具內。According to the lead frame of the present invention, since the space portion is formed in the die pad, the first protrusion portion and the mold cavity inside the second mold for avoiding the inside of the mold cavity of the first mold for the resin sealing mold are avoided. Since any of the protruding portions of the second protruding portion is in contact with each other, when the main body is formed by using the resin sealing mold, the die holder constituting the lead frame of the present invention does not abut against the protruding portion provided in the resin sealing mold. . Thus, the die pad can be smoothly placed in the resin sealing mold.

下面對本發明的具體形態進行說明。Specific embodiments of the present invention will be described below.

實施方式一Embodiment 1

圖1是表示實施方式一的樹脂密封型半導體裝置200A的結構的說明圖。圖1(a)是表示從正面斜側方向觀察樹脂密封型半導體裝置200A時的斜視圖,圖1(b)是表示從正面斜下方向觀察樹脂密封型半導體裝置200A時的斜視圖。在這裡,將樹脂密封型半導體裝置200A以單列直插橋式二極體為例進行說明。另外,圖1是表示沒有安裝散熱扇500(參照圖6及圖7)的狀態的說明圖。FIG. 1 is an explanatory view showing a configuration of a resin-sealed semiconductor device 200A according to the first embodiment. 1(a) is a perspective view showing the resin-sealed semiconductor device 200A as viewed from the front side oblique direction, and FIG. 1(b) is a perspective view showing the resin-sealed semiconductor device 200A as viewed obliquely from the front. Here, the resin-sealed semiconductor device 200A will be described by taking a single-row in-line bridge diode as an example. In addition, FIG. 1 is an explanatory view showing a state in which the heat dissipation fan 500 (see FIGS. 6 and 7) is not attached.

如圖1所示,實施方式一的樹脂密封型半導體裝置200A,具有樹脂密封型半導體裝置主體(在實施方式中也簡稱為“主體”)210和引線架100A(參照圖2(a))的外部導線(第一外部導線121、122及第二外部導線123、124)。關於引線架100A的結構將在後文敘述。另外,第一外部導線121、122及第二外部導線123、124從主體210沿z軸(箭頭z’方向)伸出。As shown in FIG. 1, the resin-sealed semiconductor device 200A of the first embodiment includes a resin-sealed semiconductor device main body (also simply referred to as "main body" in the embodiment) 210 and a lead frame 100A (see FIG. 2(a)). External wires (first outer wires 121, 122 and second outer wires 123, 124). The structure of the lead frame 100A will be described later. Further, the first outer leads 121, 122 and the second outer leads 123, 124 protrude from the body 210 along the z-axis (arrow z' direction).

另外,在該說明書中,關於主體210的各個面,設外部導線121~124伸出的面為下面210a、其反面(在圖1中沿箭頭z’方向觀察主體210時主體210的面)為上面210b、下面210a與上面210b之間可以安裝散熱扇500(在圖1中未標示)的面(在圖1中沿箭頭y方向觀察主體210時主體210的面)為背面210c、其反面(在圖1中沿箭頭y’方向觀察主體210時主體210的面)為正面210d、從箭頭x方向或x’方向觀察主體210時的面分別為側面210e。Further, in this specification, with respect to each surface of the main body 210, the surface on which the external wires 121 to 124 protrude is the lower surface 210a, and the reverse surface thereof (the surface of the main body 210 when the main body 210 is viewed in the arrow z' direction in FIG. 1) is A surface of the upper surface 210b, the lower surface 210a and the upper surface 210b may be mounted with a heat dissipating fan 500 (not shown in FIG. 1) (the surface of the main body 210 when the main body 210 is viewed in the direction of the arrow y in FIG. 1) is the back surface 210c and the reverse side thereof ( The surface of the main body 210 when the main body 210 is viewed in the direction of the arrow y' in FIG. 1 is the front surface 210d, and the surface when the main body 210 is viewed from the arrow x direction or the x' direction is the side surface 210e.

另外,上述下面210a、上面210b、背面210c、正面210d及側面210e有時表述為“主體210的下面210a”、“主體210的上面210b”、“主體210的背面210c”、“主體210的正面210d”、“主體210的側面210e”,有時也會省略“主體210的”,直接表述為“下面210a”、“上面210b”、“背面210c”、“正面210d”、“側面210e”。Further, the lower surface 210a, the upper surface 210b, the rear surface 210c, the front surface 210d, and the side surface 210e may be expressed as "the lower surface 210a of the main body 210", "the upper surface 210b of the main body 210", "the rear surface 210c of the main body 210", and "the front surface of the main body 210". 210d" and "side surface 210e of the main body 210" may be omitted from "the main body 210" and may be directly referred to as "lower surface 210a", "upper surface 210b", "back surface 210c", "front surface 210d", and "side surface 210e".

主體210的側面210e的形狀(以下簡稱“側面形狀”)為正方形或略正方形,即主體210的整體為直方體。另外,在本說明書中,將正方形或略正方形表述為“正方形狀”。The shape of the side surface 210e of the main body 210 (hereinafter referred to as "side shape") is a square or a square shape, that is, the entirety of the main body 210 is a rectangular parallelepiped. In addition, in the present specification, a square or a square is expressed as "square shape".

另外,在主體210上,可以將散熱扇500(在圖1中未標示)安裝在主體210的背面210c或上面210b上的第一螺絲通過部300及第二螺絲通過部400被設置在主體210的不同面。關於上述第一螺絲通過部300及第二螺絲通過部400將在後文敘述。In addition, on the main body 210, the first screw passing portion 300 and the second screw passing portion 400, which are mounted on the back surface 210c or the upper surface 210b of the main body 210, may be disposed on the main body 210. Different faces. The first screw passing portion 300 and the second screw passing portion 400 will be described later.

圖2是表示實施方式一的樹脂密封型半導體裝置200A的製造工程的說明圖。在圖2中,僅顯示了安裝散熱扇500之前的階段的各個工程。圖3是表示第一晶粒座111及第二晶粒座112的放大圖。FIG. 2 is an explanatory view showing a manufacturing process of the resin-sealed semiconductor device 200A according to the first embodiment. In Fig. 2, only the various stages of the stage before the installation of the cooling fan 500 are shown. FIG. 3 is an enlarged view showing the first die pad 111 and the second die pad 112.

圖2(a)是表示準備引線架100A的引線架準備工程。在這裡準備的引線架100A,具有由板狀的晶粒座(第一晶粒座111及第二晶粒座112)構成的半導體元件安裝部110,作為與外部的接線端子的多條(4條)外部導線(第一外部導線121、122及第二外部導線123、124),被設置為將該第一外部導線121、122及第二外部導線123、124的各個導線之間連接、用於在樹脂密封工程中防止樹脂流出的系杆130,被設置為將第一外部導線121、122及第二外部導線123、124的各先端部連接、用於保持引線架100A的剛性的輔助杆140。系杆130及輔助杆140最終將被從外部導線(第一外部導線121、122及第二外部導線123、124)分離。Fig. 2(a) shows a lead frame preparation process for preparing the lead frame 100A. The lead frame 100A prepared here has a semiconductor element mounting portion 110 composed of a plate-like die pad (first die pad 111 and second die pad 112) as a plurality of terminals with external terminals (4) The outer leads (the first outer leads 121, 122 and the second outer leads 123, 124) are arranged to connect the respective leads of the first outer leads 121, 122 and the second outer leads 123, 124, The tie bar 130 for preventing resin from flowing out in the resin sealing process is provided as an auxiliary lever for connecting the respective leading ends of the first outer wires 121, 122 and the second outer wires 123, 124 for maintaining the rigidity of the lead frame 100A. 140. The tie rod 130 and the auxiliary rod 140 will eventually be separated from the outer conductors (the first outer conductors 121, 122 and the second outer conductors 123, 124).

第一晶粒座111具有分別裝載1個半導體元件(在圖2(a)中未標示)的2個半導體元件裝載部(以下簡稱“裝載部”)111a、111b,以及在第一晶粒座111的下端連接上述裝載部111a、111b的第一連接部111c。另外,第二晶粒座1112具有分別裝載1個半導體元件(在圖2(a)中未標示)的2個裝載部112a、112b,以及在第一晶粒座112的上端連接上述裝載部112a、112b的第二連接部112c。關於上述第一晶粒座111及第二晶粒座112,如圖3的放大圖所示。The first die pad 111 has two semiconductor component mounting portions (hereinafter referred to as "loading portions") 111a, 111b respectively loaded with one semiconductor element (not shown in FIG. 2(a)), and in the first die pad holder The lower end of 111 is connected to the first connecting portion 111c of the above-described loading portions 111a and 111b. Further, the second die pad 1112 has two loading portions 112a and 112b respectively loaded with one semiconductor element (not shown in FIG. 2(a)), and the above-described loading portion 112a is connected to the upper end of the first die pad 112. a second connecting portion 112c of 112b. The first die pad 111 and the second die pad 112 are as shown in an enlarged view of FIG. 3 .

下面通過圖3對第一晶粒座111及第二晶粒座112進行說明。如圖3所示,第一晶粒座111,具有將裝載部111a、111b的主體210的上面210b側端部向正面210d側(y軸方向)彎曲90度形成的彎曲平面部111d、111e。另外,第二晶粒座112也同樣,具有將裝載部112a、112b的主體210的上面210b側端部向正面210d側(y軸方向)彎曲90度形成的彎曲平面部112d、112e。另外,設彎曲平面部111d、112d、112e在y軸方向的長度(以下簡稱“彎曲長度”)為“k”、彎曲平面部111e的彎曲長度為“k’”。關於該彎曲長度k、k’將在後文敘述。The first die pad 111 and the second die pad 112 will be described below with reference to FIG. As shown in FIG. 3, the first die pad 111 has curved flat portions 111d and 111e formed by bending the end portion on the upper surface 210b side of the main body 210 of the loading portions 111a and 111b by 90 degrees on the front surface 210d side (y-axis direction). Similarly, the second die pad 112 has curved flat portions 112d and 112e which are formed by bending the end portion on the upper surface 210b side of the main body 210 of the loading portions 112a and 112b by 90 degrees toward the front surface 210d side (y-axis direction). In addition, the length of the curved flat portions 111d, 112d, and 112e in the y-axis direction (hereinafter simply referred to as "bending length") is "k", and the curved length of the curved flat portion 111e is "k'". The bending lengths k and k' will be described later.

另外,連接裝載部112a、112b的第二連接部112c,被設置為將裝載部112a、112b的彎曲平面部112d、112e的彎曲先端部之間連接。Further, the second connecting portion 112c that connects the loading portions 112a and 112b is provided to connect the curved leading end portions of the curved flat portions 112d and 112e of the loading portions 112a and 112b.

另外,在晶粒座(第一晶粒座111及第二晶粒座112)上,形成有空間部S。該空間部S是為了避免該晶粒座與設置在形成主體210的樹脂密封用模具700(參照圖8及圖9)的第二模具720上的第二突出部722相抵接。Further, a space portion S is formed on the die pad (the first die pad 111 and the second die pad 112). The space portion S is for preventing the die pad from abutting against the second projecting portion 722 provided on the second die 720 of the resin sealing mold 700 (see FIGS. 8 and 9) forming the main body 210.

通過形成這樣的空間部S,在使用樹脂密封用模具700形成主體210時,構成該引線架100A的晶粒座(第一晶粒座111及第二晶粒座112)就可以不與設置在第二模具720上的第二突出部722相抵接。這樣就可以順利地將晶粒座(第一晶粒座111及第二晶粒座112)設置在樹脂密封用模具700內。By forming such a space portion S, when the main body 210 is formed using the resin sealing mold 700, the die pad (the first die pad 111 and the second die pad 112) constituting the lead frame 100A may not be disposed. The second protrusions 722 on the second mold 720 abut. Thus, the die pad (the first die pad 111 and the second die pad 112) can be smoothly placed in the resin sealing mold 700.

下面返回圖2(a)進行說明。第一外部導線121、122中的第一外部導線121與第一晶粒座111被形成為一體,並被設置為先端向箭頭z’方向伸出。另外,第一外部導線121、122中的第一外部導線122與第二晶粒座112被形成為一體,並被設置為先端向圖中箭頭z’方向伸出。Next, return to Fig. 2(a) for explanation. The first outer lead 121 of the first outer lead wires 121, 122 is formed integrally with the first die pad 111, and is disposed such that the tip end projects in the direction of the arrow z'. Further, the first outer lead 122 of the first outer lead wires 121, 122 is integrally formed with the second die pad 112, and is disposed such that the tip end projects in the direction of the arrow z' in the figure.

第二外部導線123、124中的第二外部導線123被配置為與第二晶粒座112隔離,同時後端具有連接部123a,先端被配置為向箭頭z’方向伸出。另外,第二外部導線123、124中的第二外部導線124被配置為與第一晶粒座111隔離,同時後端具有連接部124a,先端被配置為向箭頭z’方向伸出。The second outer lead 123 of the second outer leads 123, 124 is configured to be isolated from the second die pad 112 while the rear end has a connecting portion 123a, the tip end being configured to protrude in the direction of the arrow z'. In addition, the second outer lead 124 of the second outer leads 123, 124 is configured to be isolated from the first die pad 111 while the rear end has a connecting portion 124a, the tip end being configured to protrude in the direction of the arrow z'.

系杆130被設置在第一外部導線121、122及第二外部導線123、124正交的方向,與第一外部導線121、122及第二外部導線123、124形成為一體。The tie bar 130 is disposed in a direction orthogonal to the first outer leads 121, 122 and the second outer leads 123, 124, and is integrally formed with the first outer leads 121, 122 and the second outer leads 123, 124.

圖2(b)及圖2(c)是表示安裝半導體元件151~154的半導體元件安裝工程的示意圖。如圖2(b)所示,半導體元件安裝工程是通過焊接,在第一晶粒座111的裝載部111a、111b上進行與半導體元件(二極體)151、152的電氣連接,同時,在第二晶粒座112的裝或部112a、112b上進行與半導體元件(二極體)153、154的電氣連接。另外,第一晶粒座111的裝載部111a、111b具有比半導體元件151、152更大的面積。同樣,第二晶粒座112的裝載部112a、112b具有比半導體元件153、154更大的面積。2(b) and 2(c) are schematic views showing a semiconductor element mounting process in which the semiconductor elements 151 to 154 are mounted. As shown in FIG. 2(b), the semiconductor element mounting process is performed by soldering to the semiconductor elements (diodes) 151 and 152 on the mounting portions 111a and 111b of the first die pad 111, and at the same time, Electrical connection to the semiconductor elements (diodes) 153, 154 is performed on the pads 112a, 112b of the second die pad 112. In addition, the loading portions 111a, 111b of the first die paddle 111 have a larger area than the semiconductor elements 151, 152. Likewise, the loading portions 112a, 112b of the second die pad 112 have a larger area than the semiconductor components 153, 154.

接下來,如圖2(c)所示,將長圓形的第一接合連接端子161的一端與半導體元件152、153連接,同時另一端與第二外部導線124的連接部124a連接,將半導體元件152、153與第二外部導線124進行電氣連接。另外,將與第一接合連接端子161同樣呈長圓形的第二接合連接端子162的一端與半導體元件151、154連接,同時另一端與第二外部導線123的連接部123a連接,將半導體元件151、154與第二外部導線123進行電氣連接。Next, as shown in FIG. 2(c), one end of the elliptical first joint connection terminal 161 is connected to the semiconductor elements 152, 153 while the other end is connected to the connection portion 124a of the second outer conductor 124, and the semiconductor is connected. The elements 152, 153 are electrically connected to the second outer lead 124. Further, one end of the second joint connection terminal 162 which is similar in length to the first joint connection terminal 161 is connected to the semiconductor elements 151, 154 while the other end is connected to the connection portion 123a of the second outer lead 123, and the semiconductor element is connected. 151, 154 are electrically connected to the second outer lead 123.

隨後進行樹脂密封工程。樹脂密封工程是通過樹脂密封用模具700(參照圖8及圖9)將第一晶粒座111及第二晶粒座112、各半導體元件151~154、第一接合連接端子161及第二接合連接端子162等覆蓋後,向該樹脂密封用模具700的內部注入樹脂,並通過使注入的樹脂硬化,形成主體210(參照圖2(d))。另外,在向樹脂密封用模具700的內部注入樹脂時,由於有系杆130的存在,可以防止樹脂從樹脂密封用模具700中流出。The resin sealing process was then carried out. In the resin sealing process, the first die pad 111 and the second die pad 112, the semiconductor elements 151 to 154, the first bonding terminal 161, and the second bonding are formed by the resin sealing die 700 (see FIGS. 8 and 9). After the connection terminal 162 or the like is covered, the resin is injected into the inside of the resin sealing mold 700, and the injected resin is cured to form the main body 210 (see FIG. 2(d)). Further, when the resin is injected into the inside of the resin sealing mold 700, the presence of the tie bar 130 prevents the resin from flowing out of the resin sealing mold 700.

另外還要進行通過沖切模具(圖中未標示)將系杆130分離的系杆分離工程。在系杆分離工程中,還將進行輔助杆140的分離。這樣,就可以製造圖2(e)所示的樹脂密封型半導體裝置200A。In addition, a tie bar separation process for separating the tie bars 130 by a die cutting die (not shown) is also performed. In the tie separation process, separation of the auxiliary lever 140 will also be performed. Thus, the resin-sealed type semiconductor device 200A shown in Fig. 2(e) can be manufactured.

下面對第一螺絲通過部300及第二螺絲通過部400進行說明。Next, the first screw passing portion 300 and the second screw passing portion 400 will be described.

圖4是表示第一螺絲通過部300及第二螺絲通過部400的說明圖。圖4(a)是表示主體210的第一螺絲通過部300及第二螺絲通過部400及其周邊的放大圖,圖4(b)是表示圖4(a)所示的a-a的矢視斷面圖。FIG. 4 is an explanatory view showing the first screw passing portion 300 and the second screw passing portion 400. 4(a) is an enlarged view showing the first screw passing portion 300 and the second screw passing portion 400 of the main body 210 and its periphery, and FIG. 4(b) is a view showing the aa of the aa shown in FIG. 4(a). Surface map.

圖5是表示從各個方向觀察圖4所示的第一螺絲通過部300及第二螺絲通過部400的說明圖。圖5(a)是表示從主體210的正面210d觀察的圖,圖5(b)是表示從主體210的背面210c觀察的圖,圖5(c)是表示從主體210的上面210b觀察的圖,圖5(d)是表示從主體210的下面210a觀察的圖。FIG. 5 is an explanatory view showing the first screw passing portion 300 and the second screw passing portion 400 shown in FIG. 4 as seen from various directions. Fig. 5(a) is a view as seen from the front surface 210d of the main body 210, Fig. 5(b) is a view as seen from the rear surface 210c of the main body 210, and Fig. 5(c) is a view as viewed from the upper surface 210b of the main body 210. Fig. 5(d) is a view showing the lower surface 210a of the main body 210.

在圖5(a)及圖5(b)中,上面210b被顯示為在圖的上側位置,在圖5(c)及圖5(d)中,正面210d被顯示為在圖的左側位置。In Figs. 5(a) and 5(b), the upper surface 210b is shown at the upper side of the figure, and in Figs. 5(c) and 5(d), the front surface 210d is shown at the left side of the figure.

第一螺絲通過部300及第二螺絲通過部400由具有呈半圓形的彎曲部與開口部的U字狀空間形成,首先對第一螺絲通過部300進行說明。The first screw passing portion 300 and the second screw passing portion 400 are formed by a U-shaped space having a semicircular curved portion and an opening portion. First, the first screw passing portion 300 will be described.

第一螺絲通過部300是由第一U字狀空間310(參照圖5(a))、與該第一U字狀空間310共用空間的第二U字狀空間320(參照圖5(d))構成的。The first screw passage portion 300 is a second U-shaped space 320 that is shared by the first U-shaped space 310 (see FIG. 5( a )) and the first U-shaped space 310 (see FIG. 5( d ) ) constitutes.

如圖5(a)所示,第一U字狀空間310在主體210的正面210d呈U字狀,具有呈半圓形的彎曲部311與開口部312。在這樣的第一U字狀空間310中,其彎曲部311位於正面210d的主體210上面210b側的端邊與下面210a側的端邊之間,同時,開口部312位於正面210d的下面210a側的端邊。該第一U字狀空間310被形成至朝向背面210c的預定位置。As shown in FIG. 5(a), the first U-shaped space 310 has a U-shape on the front surface 210d of the main body 210, and has a semicircular curved portion 311 and an opening portion 312. In such a first U-shaped space 310, the curved portion 311 is located between the end side on the upper surface 210b side of the main body 210 of the front surface 210d and the end side on the lower surface 210a side, while the opening portion 312 is located on the lower surface 210a side of the front surface 210d. The end of the line. The first U-shaped space 310 is formed to a predetermined position toward the back surface 210c.

如圖5(d)所示,第二U字狀空間320在主體210的下面210a呈U字狀,具有呈半圓形的彎曲部321與開口部322。在這樣的第二U字狀空間320中,其彎曲部321位於下面210a的主體210正面210d側的端邊與背面210c側的端邊之間,同時,開口部322位於下面210a的正面210d側的端邊。該第二U字狀空間320被形成至朝向上面210b的預定位置。As shown in FIG. 5(d), the second U-shaped space 320 has a U-shape on the lower surface 210a of the main body 210, and has a semicircular curved portion 321 and an opening portion 322. In such a second U-shaped space 320, the curved portion 321 is located between the end side on the front surface 210d side of the main body 210 of the lower surface 210a and the end side on the back surface 210c side, and the opening portion 322 is located on the front surface 210d side of the lower surface 210a. The end of the line. The second U-shaped space 320 is formed to a predetermined position toward the upper surface 210b.

另外,第二螺絲通過部400是由第三U字狀空間410(參照圖5(b))、與該第三U字狀空間410共用空間的第四U字狀空間420(參照圖5(c))構成的。Further, the second screw passage portion 400 is a fourth U-shaped space 420 that is shared by the third U-shaped space 410 (see FIG. 5(b)) and the third U-shaped space 410 (see FIG. 5 (refer to FIG. 5 ( c)).

如圖5(b)所示,第三U字狀空間410在背面210c呈U字狀,具有呈半圓形的彎曲部411與開口部412。在這樣的第三U字狀空間410中,其彎曲部411位於背面210c的主體210上面210b側的端邊與下面210a側的端邊之間,同時,開口部412位於背面210c的上面210b側的端邊。該第三U字狀空間410被形成至朝向正面210d的預定位置。As shown in FIG. 5(b), the third U-shaped space 410 has a U-shape on the back surface 210c, and has a semicircular curved portion 411 and an opening portion 412. In such a third U-shaped space 410, the curved portion 411 is located between the end side on the upper surface 210b side of the main body 210 of the back surface 210c and the end side on the lower surface 210a side, and the opening portion 412 is located on the upper surface 210b side of the back surface 210c. The end of the line. The third U-shaped space 410 is formed to a predetermined position toward the front surface 210d.

如圖5所示,第四U字狀空間420在上面210b呈U字狀,具有呈半圓形的彎曲部421與開口部422。在這樣的第四U字狀空間420中,其彎曲部421位於上面210b的主體210正面210d側的端邊與背面210c側的端邊之間,同時,開口部422位於上面210b的背面210c側的端邊。該第四U字狀空間420被形成至朝向下面210a的預定位置。As shown in FIG. 5, the fourth U-shaped space 420 has a U-shape on the upper surface 210b, and has a semicircular curved portion 421 and an opening portion 422. In the fourth U-shaped space 420, the curved portion 421 is located between the end side on the front surface 210d side of the main body 210 of the upper surface 210b and the end side on the back surface 210c side, and the opening portion 422 is located on the back surface 210c side of the upper surface 210b. The end of the line. The fourth U-shaped space 420 is formed to a predetermined position toward the lower surface 210a.

通過第一螺絲通過部300及第二螺絲通過部400這樣的結構,該第一螺絲通過部300及第二螺絲通過部400在主體210的內部為共用共間的結構。而且,如圖5(a)及圖5(b)所示,第一螺絲通過部300的第一U字狀空間310沿z軸方向的中心線L1與第二螺絲通過部400的第三U字狀空間410沿z軸方向的中心線L2存在於同一軸(y軸)上,另外,如圖5(c)及圖5(d)所示,第一螺絲通過部300的第二U字狀空間320沿y軸方向的中心線L3與第二螺絲通過部400的第四U字狀空間420沿y軸方向的中心線L4存在於同一軸(z軸)上。With the first screw passing portion 300 and the second screw passing portion 400, the first screw passing portion 300 and the second screw passing portion 400 have a common common structure inside the main body 210. Further, as shown in FIGS. 5(a) and 5(b), the first U-shaped space 310 of the first screw passing portion 300 is along the center line L1 in the z-axis direction and the third U of the second screw passing portion 400. The center line L2 of the word space 410 along the z-axis direction exists on the same axis (y-axis), and as shown in FIGS. 5(c) and 5(d), the second U-shape of the first screw passing portion 300 The center line L3 of the space 320 in the y-axis direction and the center line L4 of the fourth U-shaped space 420 of the second screw passing portion 400 in the y-axis direction exist on the same axis (z axis).

通過第一螺絲通過部300及第二螺絲通過部400這樣的結構,即,第一螺絲通過部300及第二螺絲通過部400在主體210的內部分別為共用空間的結構,僅共用空間的部分就能夠以較小的空間設置第一螺絲通過部300及第二螺絲通過部400。The first screw passing portion 300 and the second screw passing portion 400 are configured such that the first screw passing portion 300 and the second screw passing portion 400 are shared spaces in the main body 210, and only the portion sharing the space The first screw passing portion 300 and the second screw passing portion 400 can be provided in a small space.

另外,第一螺絲通過部300及第二螺絲通過部400,在從上面210b或下面210a觀察時,如圖5(c)及圖5(d)所示,通過第一螺絲通過部300的第二U字狀空間320的彎曲部321與第二螺絲通過部400的第四U字狀空間420的彎曲部421,形成呈圓形的第一插通路徑Wa。Further, when viewed from the upper surface 210b or the lower surface 210a, the first screw passing portion 300 and the second screw passing portion 400 pass through the first screw passing portion 300 as shown in FIGS. 5(c) and 5(d). The curved portion 321 of the two U-shaped space 320 and the curved portion 421 of the fourth U-shaped space 420 of the second screw passing portion 400 form a circular first insertion path Wa.

另外,第一螺絲通過部300及第二螺絲通過部400,在從正面210d或背面210c觀察時,如圖5(a)及圖5(b)所示,通過第一螺絲通過部300的第一U字狀空間310的彎曲部311與第二螺絲通過部400的第三U字狀空間410的彎曲部411,形成呈圓形的第二插通路徑Wb。Further, when viewed from the front surface 210d or the rear surface 210c, the first screw passing portion 300 and the second screw passing portion 400 pass through the first screw passing portion 300 as shown in FIGS. 5(a) and 5(b). The curved portion 311 of the U-shaped space 310 and the curved portion 411 of the third U-shaped space 410 of the second screw passage portion 400 form a circular second insertion path Wb.

以下為使說明簡單化,將“第一螺絲通過部300的第一U字狀空間310的彎曲部311”表述為“第一螺絲通過部300的彎曲部311”,將“第一螺絲通過部300的第二U字狀空間320的彎曲部321”表述為“第一螺絲通過部300的彎曲部321”,將“第二螺絲通過部400的第三U字狀空間410的彎曲部411”表述為“第二螺絲通過部400的彎曲部411”,將“第二螺絲通過部400的第四U字狀空間420的彎曲部421”表述為“第二螺絲通過部400的彎曲部421”。Hereinafter, the simplification of the description will be described as "the curved portion 311 of the first U-shaped space 310 of the first screw passing portion 300" as "the curved portion 311 of the first screw passing portion 300", and the "first screw passing portion" The curved portion 321" of the second U-shaped space 320 of 300 is expressed as "the curved portion 321 of the first screw passing portion 300", and the "curved portion 411 of the third U-shaped space 410 of the second screw passing portion 400" The expression "the curved portion 411 of the second screw passing portion 400" is described as "the curved portion 421 of the fourth U-shaped space 420 of the second screw passing portion 400" as "the curved portion 421 of the second screw passing portion 400". .

在這樣的結構中,在觀察上面210b時,如圖5(c)所示,通過第一插通路徑Wa,可以看穿下面210a至更遠處。另外,在觀察下面210a時,如圖5(d)所示,可以通過第二插通路徑Wb看穿上面210b至更遠處。In such a configuration, when the upper surface 210b is observed, as shown in Fig. 5(c), the lower surface 210a can be seen through the first insertion path Wa. In addition, when observing the lower surface 210a, as shown in FIG. 5(d), the upper surface 210b can be seen through the second insertion path Wb to a farther distance.

另外,在觀察正面210d時,如圖5(a)所示,可以通過第二插通路徑Wb看穿背面210c至更遠處;在觀察背面210c時,如圖5(b)所示,可以通過第二插通路徑Wb看穿正面210d至更遠處。In addition, when observing the front surface 210d, as shown in FIG. 5(a), the back surface 210c can be seen through the second insertion path Wb to a farther position; when the back surface 210c is observed, as shown in FIG. 5(b), The second insertion path Wb sees through the front surface 210d to a greater extent.

通過第一螺絲通過部300及第二螺絲通過部400的上述結構,可以將用於安裝散熱扇500的螺絲600(參照圖6及圖7)從主體210的正面210d貫穿背面210c,另外,也可以從主體210的下面210a貫穿上面210b。這樣,即可以選擇性地將散熱扇500安裝在主體210的背面210c或上面210b上。By the above configuration of the first screw passage portion 300 and the second screw passage portion 400, the screw 600 (see FIGS. 6 and 7) for mounting the heat dissipation fan 500 can be passed through the back surface 210c from the front surface 210d of the main body 210, and also The upper surface 210b may be penetrated from the lower surface 210a of the main body 210. Thus, the heat dissipation fan 500 can be selectively mounted on the back surface 210c or the upper surface 210b of the main body 210.

另外,第一插通路徑Wa的中心軸Pa的位置,在實施方式一的樹脂密封型半導體裝置200A中,是在主體210的y軸方向尺寸的例如1/2的位置(正面210d與背面210c之間的例如中間位置),同時在主體210的x軸方向尺寸的例如1/2的位置(兩側面210e之間的例如中間位置)。In the resin sealed semiconductor device 200A of the first embodiment, the position of the central axis Pa of the first insertion path Wa is, for example, 1/2 of the size of the main body 210 in the y-axis direction (front surface 210d and rear surface 210c). There is, for example, an intermediate position therebetween, at the same time, for example, a position of 1/2 of the dimension of the main body 210 in the x-axis direction (for example, an intermediate position between the two side faces 210e).

另外,第二插通路徑Qb的中心軸Pb的位置,在實施方式一的樹脂密封型半導體裝置200A中,是在主體210的z軸方向尺寸的例如1/2的位置(主體210的上面210b與下面210a之間的例如中間位置),同時在主體210的x軸方向尺寸的例如1/2的位置(兩側面210e之間的例如中間位置)。另外,如果設定第一插通路徑Wa的中心軸Pa及第二插通路徑Wb的中心軸Pb的各中心軸正交,則也可以從上述各位置略微錯開。In the resin sealing type semiconductor device 200A of the first embodiment, the position of the central axis Pb of the second insertion path Qb is, for example, 1/2 of the dimension of the main body 210 in the z-axis direction (the upper surface 210b of the main body 210) At least an intermediate position between the lower surface 210a and the lower surface of the main body 210, for example, a position of 1/2 (for example, an intermediate position between the two side surfaces 210e). Further, if the central axes Pa of the first insertion path Wa and the central axes Pb of the second insertion path Wb are orthogonal to each other, they may be slightly shifted from the respective positions.

另外,在散熱扇500上,設有將該散熱扇500在主體210上用螺絲固定的陰螺紋部500a。該陰螺紋部500a被設置在將散熱扇500安裝在主體210時散熱扇側的安裝面510(以下簡稱“散熱扇側安裝面510”)的中央部。Further, the heat radiating fan 500 is provided with a female screw portion 500a that fixes the heat radiating fan 500 to the main body 210 by screws. The female screw portion 500a is provided at a central portion of a mounting surface 510 (hereinafter simply referred to as "heat dissipation fan side mounting surface 510") on the heat radiating fan side when the heat radiating fan 500 is attached to the main body 210.

通過這樣設置主體210的第一插通路徑Wa及第二插通路徑Wb的位置和散熱扇500的陰螺紋部500a的位置,無論將散熱扇500安裝在主體210的背面210c或上面210b,都可以將散熱扇500在穩定的狀態下進行安裝。這是因為,將散熱扇500安裝在主體210的背面210c或上面210b時的螺絲固定位置,在主體210中,分別位於背面210c或上面210b的幾乎各中央。另外,在散熱扇500中,位於散熱扇側安裝面510的中央。By thus arranging the positions of the first insertion path Wa and the second insertion path Wb of the main body 210 and the position of the female screw portion 500a of the heat dissipation fan 500, regardless of whether the heat dissipation fan 500 is attached to the back surface 210c or the upper surface 210b of the main body 210, The heat dissipation fan 500 can be installed in a stable state. This is because the screw fixing position when the heat radiating fan 500 is attached to the back surface 210c or the upper surface 210b of the main body 210 is located at almost the center of the back surface 210c or the upper surface 210b in the main body 210. Further, in the heat dissipation fan 500, it is located at the center of the heat dissipation fan side mounting surface 510.

另外,關於第一晶粒座111上形成的彎曲平面部111d的彎曲長度k(參照圖3)及第二晶粒座112上形成的彎曲平面部112d、112e的彎曲長度k(參照圖3),這些彎曲平面部111d、112d、112e的彎曲先端部被設定為,至少比第一插通路徑Wa的中心軸Pa更靠近主體210的正面210d側的位置。另外,第一晶粒座111上形成的彎曲平面部111e的彎曲長度k’(參照圖3)也同樣,該彎曲平面部111e的彎曲先端部被設定為,至少比第一插通路徑Wa的中心軸Pa更靠近主體210的正面210d側的位置。Further, the bending length k of the curved flat portion 111d formed on the first die pad 111 (refer to FIG. 3) and the curved length k of the curved flat portions 112d and 112e formed on the second die pad 112 (refer to FIG. 3) The curved tip end portions of the curved flat portions 111d, 112d, and 112e are set to be at least closer to the front surface 210d side of the main body 210 than the central axis Pa of the first insertion path Wa. Further, similarly, the curved length k' (see FIG. 3) of the curved flat portion 111e formed on the first die pad 111 is similar, and the curved tip end portion of the curved flat portion 111e is set to be at least smaller than the first insertion path Wa The center axis Pa is closer to the position on the front side 210d side of the main body 210.

在實施方式一的樹脂密封型半導體裝置200A中,彎曲長度k及彎曲長度k’,在沿第一晶粒座111及第二晶粒座112的z軸方向的高度h(參照圖3)為同等或幾乎同等。但,由於存在連接第二晶粒座112的彎曲平面部112d、112e之間的第二連接部112c,因而彎曲長度k’比彎曲長度k略短。In the resin-sealed semiconductor device 200A of the first embodiment, the bending length k and the bending length k' are in the height h along the z-axis direction of the first die pad 111 and the second die pad 112 (see FIG. 3). Equivalent or almost equal. However, since there is a second connecting portion 112c connecting the curved flat portions 112d, 112e of the second die pad 112, the bending length k' is slightly shorter than the bending length k.

這樣,由於彎曲長度k及彎曲長度k’在第一晶粒座111及第二晶粒座112的沿z軸方向的高度h(參照圖3)為同等或幾乎同等,因而在將這些晶粒座及半導體元件等進行樹脂密封時,主體210的側面形狀可以為正方形狀。Thus, since the bending length k and the bending length k' are equal or nearly equal in the height h (see FIG. 3) of the first die pad 111 and the second die pad 112 in the z-axis direction, the crystal grains are When the seat and the semiconductor element are resin-sealed, the side surface shape of the main body 210 may be square.

由於主體210的側面形狀為正方形狀,主體210的上面210b則與原本具有較大面積的主體210的背面210c具有同等的面積。Since the side surface shape of the main body 210 is square, the upper surface 210b of the main body 210 has the same area as the rear surface 210c of the main body 210 having a large area.

圖6是表示在主體210的背面210c上安裝散熱扇500的說明圖。圖6(a)為斜視圖,圖6(b)是說明第一螺絲通過部300及第二螺絲通過部400與螺絲600的關係的擴大斷面圖。FIG. 6 is an explanatory view showing that the heat dissipation fan 500 is attached to the back surface 210c of the main body 210. 6(a) is a perspective view, and FIG. 6(b) is an enlarged cross-sectional view showing the relationship between the first screw passing portion 300 and the second screw passing portion 400 and the screw 600.

在將散熱扇500安裝在主體210的背面210c上時,如圖6所示,在使散熱扇500接觸主體210的背面210c的狀態下,將螺絲600的先端部從設置在主體210的正面210d的第一螺絲通過部300穿過第二插通路徑Wb(參照圖5(c))後,從主體210的背面210c突出。同時,將螺絲600的先端部插入散熱扇500的陰螺紋部500a並旋緊,將散熱扇500固定。這樣,即可將散熱扇500安裝在主體210的背面210c上。When the heat dissipation fan 500 is mounted on the back surface 210c of the main body 210, as shown in FIG. 6, in a state where the heat dissipation fan 500 is brought into contact with the back surface 210c of the main body 210, the tip end portion of the screw 600 is provided from the front surface 210d of the main body 210. The first screw passing portion 300 passes through the second insertion path Wb (refer to FIG. 5(c)), and then protrudes from the back surface 210c of the main body 210. At the same time, the tip end portion of the screw 600 is inserted into the female screw portion 500a of the heat dissipation fan 500 and screwed to fix the heat dissipation fan 500. Thus, the heat dissipation fan 500 can be mounted on the back surface 210c of the main body 210.

另外,螺絲600通過在該螺絲600插入方向離間的2個彎曲部(第一螺絲通過部300的彎曲部311及第二螺絲通過部400的彎曲部411),螺絲600的靠近頭部的部分與靠近先端部的部分分別被定位在相反側(參照圖6(b)),因而左右方向及上下方向不會錯位,從而可以將散熱扇500在穩定的狀態下固定。Further, the screw 600 passes through two curved portions (the curved portion 311 of the first screw passing portion 300 and the curved portion 411 of the second screw passing portion 400) in the direction in which the screw 600 is inserted, and the portion of the screw 600 near the head is The portions close to the tip end portions are respectively positioned on the opposite sides (see FIG. 6(b)), so that the left and right directions and the up and down direction are not displaced, so that the heat radiating fan 500 can be fixed in a stable state.

如圖6所示,在將散熱扇500安裝在主體210的背面210c上時,散熱扇500由於以較大的面積與第一晶粒座111及第二晶粒座112對向設置,因而可以獲得較高的散熱效果。如圖3所示,這是因為位於主體210的背面210c的第一晶粒座111及第二晶粒座112具有較大的面積,因而通過使散熱扇500與具有這樣較大面積的第一晶粒座111及第二晶粒座112對向,即可獲得較高的散熱效果。As shown in FIG. 6 , when the heat dissipation fan 500 is mounted on the back surface 210 c of the main body 210 , the heat dissipation fan 500 is disposed opposite to the first die pad 111 and the second die pad 112 by a large area, and thus Get a higher heat dissipation. As shown in FIG. 3, this is because the first die pad 111 and the second die pad 112 located on the back surface 210c of the main body 210 have a large area, thereby making the heat dissipation fan 500 and the first having such a large area. When the die pad 111 and the second die pad 112 are opposed to each other, a high heat dissipation effect can be obtained.

圖7是表示在主體210的上面210b上安裝散熱扇500的說明圖。圖7(a)為斜視圖,圖7(b)是說明第一螺絲通過部300及第二螺絲通過部400與螺絲600的關係的擴大斷面圖。FIG. 7 is an explanatory view showing that the heat dissipation fan 500 is attached to the upper surface 210b of the main body 210. Fig. 7(a) is a perspective view, and Fig. 7(b) is an enlarged cross-sectional view showing the relationship between the first screw passing portion 300 and the second screw passing portion 400 and the screw 600.

在將散熱扇500安裝在主體210的上面210b上時,如圖7所示,在使散熱扇500載放在主體210的上面210b的狀態下,將螺絲600的先端部從設置在主體210的下面210a的第一螺絲通過部300穿過第一插通路徑Wa(參照圖5(b))後,從主體210的上面210b突出。同時,將螺絲600的先端部插入散熱扇500的陰螺紋部500a並旋緊,將散熱扇500固定。這樣,即可將散熱扇500安裝在主體210的上面210b。When the heat dissipation fan 500 is mounted on the upper surface 210b of the main body 210, as shown in FIG. 7, in a state where the heat dissipation fan 500 is placed on the upper surface 210b of the main body 210, the tip end portion of the screw 600 is disposed from the main body 210. The first screw passing portion 300 of the lower portion 210a passes through the first insertion path Wa (refer to FIG. 5(b)), and then protrudes from the upper surface 210b of the main body 210. At the same time, the tip end portion of the screw 600 is inserted into the female screw portion 500a of the heat dissipation fan 500 and screwed to fix the heat dissipation fan 500. Thus, the heat dissipation fan 500 can be mounted on the upper surface 210b of the main body 210.

另外,在圖7所示的情況下,螺絲600通過在該螺絲600插入方向離間的2個彎曲部(第一螺絲通過部300的彎曲部321及第二螺絲通過部400的彎曲部421),螺絲600的靠近頭部的部分與靠近先端部的部分分別被定位在相反側(參照圖7(b)),因而左右方向及上下方向不會錯位,從而可以將散熱扇500在穩定的狀態下固定。Further, in the case shown in FIG. 7, the screw 600 passes through the two bent portions (the curved portion 321 of the first screw passing portion 300 and the curved portion 421 of the second screw passing portion 400) in the direction in which the screw 600 is inserted. The portion of the screw 600 near the head and the portion near the tip end are respectively positioned on the opposite side (refer to FIG. 7(b)), so that the left and right directions and the up and down direction are not displaced, so that the heat dissipation fan 500 can be stabilized. fixed.

如圖7所示,在將散熱扇500安裝在主體210的上面210b時,與將散熱扇500安裝在主體210的背面210c時同樣,可以獲得較高的散熱效果。這是因為,將散熱扇500安裝在主體210的上面210b時,散熱扇側安裝面510是在與裝載部111a、111b及裝載部112a、112b具有幾乎同等面積的彎曲平面部111d、111e及彎曲平面部112d、112e對向的狀態下被安裝。As shown in FIG. 7, when the heat radiating fan 500 is attached to the upper surface 210b of the main body 210, a high heat radiating effect can be obtained similarly to when the heat radiating fan 500 is attached to the back surface 210c of the main body 210. This is because when the heat radiating fan 500 is attached to the upper surface 210b of the main body 210, the heat radiating fan side mounting surface 510 is a curved flat portion 111d, 111e and curved which have almost the same area as the mounting portions 111a and 111b and the loading portions 112a and 112b. The flat portions 112d and 112e are mounted in a state of being opposed to each other.

即,各彎曲平面部111d、111e及112d、112e的彎曲長度k、k’與在第一晶粒座111及第二晶粒座112沿z軸方向的高度h同等或幾乎同等(參照圖3),因而主體210的側面形狀為正方形狀,因此,主體210的上面210b與原本具有較大面積的主體210的背面210c具有同等的面積。In other words, the curved lengths k and k' of the respective curved flat portions 111d, 111e and 112d, 112e are equal or nearly equal to the height h in the z-axis direction of the first die pad 111 and the second die pad 112 (refer to FIG. 3). Therefore, the side surface shape of the main body 210 is square, and therefore, the upper surface 210b of the main body 210 has the same area as the rear surface 210c of the main body 210 having a large area.

這樣,在將散熱扇500安裝在主體210的上面210b上時(參照圖7),由於散熱扇500以較大的面積與彎曲平面部111d、111e、112d、112e對向,因而可以獲得與將散熱扇500安裝在主體210的背面210c時同樣的高散熱效果。Thus, when the heat dissipation fan 500 is mounted on the upper surface 210b of the main body 210 (refer to FIG. 7), since the heat dissipation fan 500 is opposed to the curved flat portions 111d, 111e, 112d, and 112e with a large area, it is possible to obtain and The heat dissipation fan 500 is mounted on the back surface 210c of the main body 210 with the same high heat dissipation effect.

如以上說明所述,通過實施方式一的樹脂密封型半導體裝置200A,可以選擇性地將散熱扇500安裝在主體210的背面210c或上面210b上(參照圖6及圖7)。因此,散熱扇500的安裝位置,除了主體210的背面210c以外,在希望安裝在主體210的上面210b時也可以很容易地操作,從而可以提高將樹脂密封型半導體裝置200A安裝在基板上時的安裝自由度。As described above, with the resin-sealed semiconductor device 200A of the first embodiment, the heat dissipation fan 500 can be selectively attached to the back surface 210c or the upper surface 210b of the main body 210 (see FIGS. 6 and 7). Therefore, the mounting position of the heat radiating fan 500 can be easily operated in addition to the back surface 210c of the main body 210 when it is desired to be mounted on the upper surface 210b of the main body 210, so that the mounting of the resin sealing type semiconductor device 200A on the substrate can be improved. Installation freedom.

下面對製造實施方式一的樹脂密封型半導體裝置200A的樹脂密封用模具700進行說明。Next, a resin sealing mold 700 for manufacturing the resin-sealed semiconductor device 200A of the first embodiment will be described.

圖8及圖9是表示製造實施方式一的樹脂密封型半導體裝置200A的樹脂密封用模具700的說明圖。圖8是表示從斜方向觀察主體210的正面210d時的樹脂密封型半導體裝置200A與樹脂密封用模具700的關係的說明圖;圖9是表示從斜下方向觀察主體210的背面210c時的樹脂密封型半導體裝置200A與樹脂密封用模具700的關係的說明圖。FIG. 8 and FIG. 9 are explanatory views showing a resin sealing mold 700 for manufacturing the resin-sealed semiconductor device 200A according to the first embodiment. 8 is an explanatory view showing a relationship between the resin-sealed type semiconductor device 200A and the resin sealing mold 700 when the front surface 210d of the main body 210 is viewed from an oblique direction. FIG. 9 is a view showing the resin when the back surface 210c of the main body 210 is viewed from the obliquely downward direction. An explanatory view of the relationship between the hermetic semiconductor device 200A and the resin sealing mold 700.

樹脂密封用模具700是由一對模具(第一模具710及第二模具720)構成的。第一模具710,是在將主體210分為正面210d側與背面210c側時,與正面210d側相對應的模具,第二模具720,是在將主體210分為正面210d側與背面210c側時,與背面210c側相對應的模具。另外,圖8及圖9所示的,是在樹脂密封用模具700內注入的樹脂硬化後,將第一模具710及第二模具720取下的狀態,這在樹脂密封型半導體裝置200A的製造工程中,與圖2(d)所示的工程相對應。在圖2(d)中省略了第一模具710及第二模具720。The resin sealing mold 700 is composed of a pair of molds (a first mold 710 and a second mold 720). The first mold 710 is a mold corresponding to the front surface 210d side when the main body 210 is divided into the front surface 210d side and the back surface 210c side, and the second mold 720 is divided into the front surface 210d side and the back surface 210c side when the main body 210 is divided. A mold corresponding to the side of the back surface 210c. In addition, as shown in FIG. 8 and FIG. 9, after the resin injected in the resin sealing mold 700 is cured, the first mold 710 and the second mold 720 are removed, and the resin sealing type semiconductor device 200A is manufactured. In the project, it corresponds to the project shown in Figure 2(d). The first mold 710 and the second mold 720 are omitted in FIG. 2(d).

下面根據圖8及圖9對第一模具710及第二模具720進行說明。第一模具710,具有設置了用於向內部注入樹脂的空間的模具腔體711,第二模具720也同樣,具有設置了用於向內部注入樹脂的空間的模具腔體721。另外,在第一模具710的模具腔體711及第二模具720的模具腔體721各自的內部面中,用於形成主體210的下面210a的面分別為下面成形面714、724,在圖8及圖9中顯示的第一模具710及第二模具720的狀態是,該下面成形面714、724水準(xy平面上)且朝向上方(箭頭z方向)放置。Next, the first mold 710 and the second mold 720 will be described with reference to FIGS. 8 and 9. The first mold 710 has a mold cavity 711 provided with a space for injecting resin into the inside, and the second mold 720 has a mold cavity 721 provided with a space for injecting resin into the inside. Further, in the respective inner faces of the mold cavity 711 of the first die 710 and the die cavity 721 of the second die 720, the faces for forming the lower surface 210a of the body 210 are the lower forming faces 714, 724, respectively, in FIG. The state of the first mold 710 and the second mold 720 shown in FIG. 9 is such that the lower forming surfaces 714, 724 are level (on the xy plane) and are placed upward (in the arrow z direction).

首先通過圖8對第二模具720進行說明。如圖8所示,第二模具720具有用於形成主體210的第二螺絲通過部400的突出部722(以下簡稱“第二突出部722”)。First, the second mold 720 will be described with reference to Fig. 8 . As shown in FIG. 8, the second mold 720 has a protruding portion 722 (hereinafter simply referred to as "second protruding portion 722") for forming the second screw passing portion 400 of the main body 210.

在第二突出部722的上端,形成有平坦面722a,在第二突出部722的先端,形成有呈半圓形的先端彎曲面722c。該先端彎曲面722c被形成在從第二突出部722的上端形成的平坦面722a沿z軸至箭頭z’方向的預定位置。A flat surface 722a is formed at an upper end of the second protruding portion 722, and a tip end curved surface 722c having a semicircular shape is formed at a tip end of the second protruding portion 722. The tip end curved surface 722c is formed at a predetermined position along the z-axis to the arrow z' direction from the flat surface 722a formed from the upper end of the second protrusion portion 722.

另外,在第二突出部722的下端,形成有呈半圓形的下端彎曲面722b。該下端彎曲面722b被形成在從第二突出部722的基部沿y軸至箭頭y方向的預定位置。而且,先端彎曲面722c與下端彎曲面722b之間,形成有以預定的角度(例如45度)傾斜的傾斜面722d。Further, a lower end curved surface 722b having a semicircular shape is formed at the lower end of the second protruding portion 722. The lower end curved surface 722b is formed at a predetermined position from the base of the second protrusion 722 in the y-axis to the arrow y direction. Further, between the tip end curved surface 722c and the lower end curved surface 722b, an inclined surface 722d inclined at a predetermined angle (for example, 45 degrees) is formed.

另外,如圖9所示,第一模具710具有用於形成主體210的第一螺絲通過部300的突出部712(以下簡稱“第一突出部712”)。In addition, as shown in FIG. 9, the first mold 710 has a protruding portion 712 (hereinafter simply referred to as "first protruding portion 712") for forming the first screw passing portion 300 of the main body 210.

在第一突出部712的下端,形成有平坦面712a,在第一突出部712的上端,形成有呈半圓形的上端彎曲面712b。該上端彎曲面712b被形成在從第一突出部712的基部沿y軸至箭頭y’方向的預定位置。A flat surface 712a is formed at a lower end of the first protruding portion 712, and an upper end curved surface 712b having a semicircular shape is formed at an upper end of the first protruding portion 712. The upper end curved surface 712b is formed at a predetermined position from the base of the first protrusion 712 in the y-axis to the arrow y' direction.

另外,在第一突出部712的先端,形成有呈半圓形的先端彎曲面712c。該先端彎曲面712c被形成在從第一突出部712的下端形成的平坦面712a沿z軸至箭頭z方向的預定位置。而且,在上端彎曲面712b與先端彎曲面712c之間,形成有與第二突出部722的傾斜面722d同樣的以預定角度(這時為45度)傾斜的傾斜面712d。另外,傾斜面712d與傾斜面722d為相互對應的形狀。Further, a tip end curved surface 712c having a semicircular shape is formed at the tip end of the first protruding portion 712. The tip end curved surface 712c is formed at a predetermined position along the z-axis to the arrow z direction from the flat surface 712a formed from the lower end of the first protrusion portion 712. Further, between the upper end curved surface 712b and the tip end curved surface 712c, an inclined surface 712d inclined at a predetermined angle (45 degrees at this time) similar to the inclined surface 722d of the second protruding portion 722 is formed. Further, the inclined surface 712d and the inclined surface 722d have mutually corresponding shapes.

另外,為了明確區分在第一突出部712形成的先端彎曲面712c與在第二突出部722形成的先端彎曲面722c,以下可能將在第一突出部712形成的先端彎曲面712c表述為“第一先端彎曲面712c”,將在第二突出部722形成的先端彎曲面722c表述為“第二先端彎曲面722c”。同樣,為了明確區分在第一突出部712形成的傾斜面712d與在第二突出部722形成的傾斜面722d,以下可能將在第一突出部712形成的傾斜面712d表述為“第一傾斜面712d”,將在第二突出部722形成的傾斜面722d表述為“第二傾斜面722d”。In addition, in order to clearly distinguish the tip end curved surface 712c formed in the first protruding portion 712 from the tip end curved surface 722c formed in the second protruding portion 722, the tip end curved surface 712c formed in the first protruding portion 712 may be expressed as "the first" The tip end curved surface 712c" expresses the tip end curved surface 722c formed in the second protruding portion 722 as "second tip curved surface 722c". Similarly, in order to clearly distinguish the inclined surface 712d formed in the first protruding portion 712 from the inclined surface 722d formed in the second protruding portion 722, it is possible to express the inclined surface 712d formed at the first protruding portion 712 as "the first inclined surface" hereinafter. 712d", the inclined surface 722d formed in the second protruding portion 722 is expressed as "second inclined surface 722d".

圖10是表示在第一模具710與第二模具720在對面設置的狀態時第一突出部712與第二突出部722的關係的擴大斷面圖。另外,圖10是在圖8中使第一模具710與第二模具720正確對面設置狀態時的e-e矢視斷面圖,表示的是注入樹脂之前的狀態。另外,在圖10中,省略了樹脂密封型半導體裝置200A的引線架100A等的圖示。FIG. 10 is an enlarged cross-sectional view showing a relationship between the first protruding portion 712 and the second protruding portion 722 when the first mold 710 and the second mold 720 are disposed opposite to each other. In addition, FIG. 10 is an e-e cross-sectional view showing a state in which the first mold 710 and the second mold 720 are correctly disposed opposite each other in FIG. 8, and shows a state before the resin is injected. In addition, in FIG. 10, illustration of the lead frame 100A etc. of the resin sealing type semiconductor device 200A is abbreviate|omitted.

如圖10所示,第一模具710與第二模具720在對面設置的狀態下,第一突出部712的第一傾斜面712d與第二突出部722的第二傾斜面722d緊密相接。另外,第一模具710與第二模具720在對面設置的狀態時,設置在第二模具720上的第二突出部722不與引線架100A的晶粒座(第一晶粒座111及第二晶粒座112)相抵接。這是因為,如對圖3的說明所述,第一晶粒座111及第二晶粒座112上形成有空間部S。As shown in FIG. 10, in a state where the first mold 710 and the second mold 720 are disposed opposite each other, the first inclined surface 712d of the first protruding portion 712 and the second inclined surface 722d of the second protruding portion 722 are in close contact with each other. In addition, when the first mold 710 and the second mold 720 are disposed opposite each other, the second protrusion 722 disposed on the second mold 720 does not overlap with the die holder of the lead frame 100A (the first die pad 111 and the second The die pads 112) abut. This is because, as described with reference to FIG. 3, the space portion S is formed on the first die pad 111 and the second die pad 112.

在圖10所示的狀態下,向由模具腔體711與模具腔體721形成的空間內注入樹脂,在注入的樹脂硬化後,按圖8及圖9所示取下第一模具710及第二模具720後,即可形成如圖2(d)所示的主體210。另外通過沖切模具(圖中未標示)將系杆130及輔助杆140分離,即可製造如圖2(e)所示的樹脂密封型半導體裝置200A。In the state shown in FIG. 10, resin is injected into the space formed by the mold cavity 711 and the mold cavity 721, and after the injected resin is cured, the first mold 710 and the first mold are removed as shown in FIGS. 8 and 9. After the second mold 720, the body 210 as shown in Fig. 2(d) can be formed. Further, by separating the tie bar 130 and the auxiliary lever 140 by a punching die (not shown), the resin-sealed type semiconductor device 200A shown in Fig. 2(e) can be manufactured.

即,通過第一模具710的第一突出部712的上端彎曲面712b,可以形成第一螺絲通過部300的彎曲部311(參照圖4(b)及圖5(a)),通過第一突出部712的第一先端彎曲面712c,可以形成第一螺絲通過部300的彎曲部321(參照圖4(b)及圖5(d))。另外,通過第二模具720的第二突出部722的下端彎曲面722b,可以形成第二螺絲通過部400的彎曲部411(參照圖4(b)及圖5(b)),通過第二突出部722的第二先端彎曲面722c,可以形成第二螺絲通過部400的彎曲部421(參照圖4(b)及圖5(c))。That is, the curved portion 311 of the first screw passing portion 300 can be formed by the upper end curved surface 712b of the first protruding portion 712 of the first die 710 (refer to FIGS. 4(b) and 5(a)), through the first protruding The first tip end curved surface 712c of the portion 712 can form the curved portion 321 of the first screw passing portion 300 (see FIGS. 4(b) and 5(d)). Further, the curved portion 411 of the second screw passing portion 400 can be formed by the lower end curved surface 722b of the second protruding portion 722 of the second mold 720 (refer to FIGS. 4(b) and 5(b)), and the second protruding portion is formed. The second tip end curved surface 722c of the portion 722 can form the curved portion 421 of the second screw passing portion 400 (see FIGS. 4(b) and 5(c)).

另外,在樹脂密封用模具700內的樹脂硬化後,將第一模具710及第二模具720分離時,將第一模具710向圖8及圖9所示的箭頭y方向錯開,同時將第二模具720向圖8及圖9所示的箭頭y’方向錯開,即可將第一模具710及第二模具720分離。Further, when the resin in the resin sealing mold 700 is cured, when the first mold 710 and the second mold 720 are separated, the first mold 710 is shifted in the direction of the arrow y shown in FIGS. 8 and 9 and the second is The mold 720 is shifted in the direction of the arrow y' shown in FIGS. 8 and 9, and the first mold 710 and the second mold 720 can be separated.

另外,在樹脂硬化後,之所以可以將第一模具710及第二模具720分離,是因為樹脂密封用模具700為圖8及圖9所示的結構。即,在將第一模具710及第二模具720兩者分離時,第一突出部712及第二突出部722為對於硬化的樹脂沒有牽連的形狀。另外,在將第一模具710及第二模具720分離後,將主體210從一側的模具中取出時,需使用壓出銷。Further, after the resin is cured, the first mold 710 and the second mold 720 can be separated because the resin sealing mold 700 has the structure shown in FIGS. 8 and 9. That is, when the first mold 710 and the second mold 720 are separated from each other, the first protruding portion 712 and the second protruding portion 722 have a shape that is not implicated for the cured resin. Further, after the first mold 710 and the second mold 720 are separated, when the main body 210 is taken out from the mold on one side, an extrusion pin is used.

實施方式二Embodiment 2

圖11是表示實施方式二的樹脂密封型半導體裝置200B的說明圖。圖11(a)是表示實施方式二的樹脂密封型半導體裝置200B的外觀的斜視圖,圖11(b)是表示實施方式二的樹脂密封型半導體裝置200B的引線架100B的斜視圖。其中,圖11(b)所示的引線架100B,是從該引線架100B中除去了系杆(圖中未標示)及輔助杆(圖中未標示)的狀態。FIG. 11 is an explanatory view showing a resin-sealed semiconductor device 200B according to the second embodiment. Fig. 11 (a) is a perspective view showing an appearance of a resin sealing type semiconductor device 200B according to a second embodiment, and Fig. 11 (b) is a perspective view showing a lead frame 100B of the resin sealing type semiconductor device 200B according to the second embodiment. Here, the lead frame 100B shown in FIG. 11(b) is in a state in which the tie bar (not shown) and the auxiliary lever (not shown) are removed from the lead frame 100B.

實施方式二的樹脂密封型半導體裝置200B,基本上與實施方式一的樹脂密封型半導體裝置200A具有相同的結構,但樹脂密封型半導體裝置200B設有半導體元件151、154兩個半導體元件這一點與實施方式一的樹脂密封型半導體裝置200A不同。The resin-sealed semiconductor device 200B of the second embodiment has basically the same configuration as the resin-sealed semiconductor device 200A of the first embodiment, but the resin-sealed semiconductor device 200B is provided with two semiconductor elements of the semiconductor elements 151 and 154. The resin-sealed semiconductor device 200A of the first embodiment is different.

即,實施方式二的樹脂密封型半導體裝置200B,是具有2個半導體元件(例如二極體等)151、154的樹脂密封型半導體裝置200B,具有作為第一外部導線的1個第一外部導線121、作為第二外部導線的2個第二外部導線123和124、以及晶粒座180。另外,作為接合連接端子,實施方式二的樹脂密封型半導體裝置200B還具有第一接合連接端子171與第二接合連接端子172。In other words, the resin-sealed semiconductor device 200B of the second embodiment is a resin-sealed semiconductor device 200B having two semiconductor elements (for example, diodes) 151 and 154, and has one first external lead as the first external lead. 121. Two second outer leads 123 and 124 as second outer leads, and a die pad 180. Further, as the joint connection terminal, the resin-sealed type semiconductor device 200B of the second embodiment further has a first joint connection terminal 171 and a second joint connection terminal 172.

第一接合連接端子171的一端與一側的半導體元件151連接,同時,另一端與2個第二外部導線123、124中的第二外部導線123的連接部123a連接,從而將半導體元件151與第二外部導線123進行電氣連接。One end of the first joint connection terminal 171 is connected to the semiconductor element 151 on one side, and the other end is connected to the connection portion 123a of the second outer lead 123 of the two second outer leads 123, 124, thereby connecting the semiconductor element 151 with The second outer lead 123 is electrically connected.

第二接合連接端子172的一端與另一側的半導體元件154連接,同時,別一端與2個第二外部導線123、124中的第二外部導線124的連接部124a連接,從而將半導體元件154與第二外部導線124進行電氣連接。One end of the second joint connection terminal 172 is connected to the semiconductor element 154 on the other side, and the other end is connected to the connection portion 124a of the second outer lead 124 of the two second outer leads 123, 124, thereby the semiconductor element 154. Electrically connected to the second outer lead 124.

另外,在實施方式二的樹脂密封型半導體裝置200B中,在主體210上,與實施方式一的樹脂密封型半導體裝置200A同樣,設有第一螺絲通過部300及第二螺絲通過部400。但在實施方式二的樹脂密封型半導體裝置200B中,在主體210上,在比位於端部的外部導線(例如第一外部導線121)更橫向(沿x軸的方向)上,形成有伸出的“伸出部”,該“伸出部”上設有第一螺絲通過部300及第二螺絲通過部400。Further, in the resin-sealed semiconductor device 200B of the second embodiment, the first screw passing portion 300 and the second screw passing portion 400 are provided in the main body 210 similarly to the resin-sealed semiconductor device 200A of the first embodiment. However, in the resin-sealed type semiconductor device 200B of the second embodiment, the main body 210 is formed to protrude more laterally (in the direction of the x-axis) than the external lead (for example, the first outer lead 121) located at the end portion. The "extension portion" is provided with a first screw passing portion 300 and a second screw passing portion 400.

另外,第一螺絲通過部300及第二螺絲通過部400的結構,與實施方式一的樹脂密封型半導體裝置200A同樣。另外,由第一螺絲通過部300及第二螺絲通過部400形成的第一插通路徑Wa(圖11中未標示,參照圖5)的中心軸Pa在y軸方向的位置及第二插通路徑Wb(圖11中未標示,參照圖5)的中心軸Pb在z軸方向的位置等,也與實施方式一的樹脂密封型半導體裝置200A相同。The configuration of the first screw passing portion 300 and the second screw passing portion 400 is the same as that of the resin sealed semiconductor device 200A of the first embodiment. Further, the position of the central axis Pa of the first insertion path Wa (not shown in FIG. 11 and not shown in FIG. 5) formed by the first screw passing portion 300 and the second screw passing portion 400 in the y-axis direction and the second insertion The position of the central axis Pb of the path Wb (not shown in FIG. 11 and referring to FIG. 5) in the z-axis direction is the same as that of the resin-sealed semiconductor device 200A of the first embodiment.

另外,在實施方式二的樹脂密封型半導體裝置200B中,晶粒座180通過使裝載部180a的主體210的上面210b側端部向正面210d側彎曲90度,具有彎曲平面部180b。該彎曲平面部180b的彎曲先端部,與實施方式一的樹脂密封型半導體裝置200A同樣,至少被設定在比第一插通路徑Wa的中心軸Pa(參照圖5(c))更靠近主體210的正面210d側。因此,彎曲平面部180b的彎曲長度k,與實施方式一的樹脂密封型半導體裝置200A同樣,與晶粒座180沿z軸方向伸出部分的高度h同等或幾乎同等。In the resin-sealed semiconductor device 200B of the second embodiment, the die pad 180 has a curved flat portion 180b by bending the end portion on the upper surface 210b side of the main body 210 of the mounting portion 180a by 90 degrees toward the front surface 210d side. Similarly to the resin-sealed semiconductor device 200A of the first embodiment, the curved tip end portion of the curved flat portion 180b is set at least closer to the main body 210 than the central axis Pa of the first insertion path Wa (see FIG. 5(c)). The front side of the 210d side. Therefore, the bending length k of the curved flat portion 180b is equal to or nearly equal to the height h of the projection portion of the die pad 180 in the z-axis direction, similarly to the resin-sealed semiconductor device 200A of the first embodiment.

圖12是表示在實施方式二的樹脂密封型半導體裝置200B上安裝散熱扇500的狀態示意圖。圖12(a)是表示將散熱扇500安裝在主體210的背面210c上的狀態示意圖,圖12(b)是表示將散熱扇500安裝在主體210的上面210b上的狀態示意圖。FIG. 12 is a schematic view showing a state in which the heat dissipation fan 500 is attached to the resin-sealed semiconductor device 200B of the second embodiment. Fig. 12 (a) is a schematic view showing a state in which the heat radiating fan 500 is attached to the rear surface 210c of the main body 210, and Fig. 12 (b) is a view showing a state in which the heat radiating fan 500 is attached to the upper surface 210b of the main body 210.

這樣,在實施方式二的樹脂密封型半導體裝置200B中,如圖12所示,可以選擇性地將散熱扇500安裝在主體210的背面210c或上面210b上。從而可以提高樹脂密封型半導體裝置200B的安裝自由度。As described above, in the resin-sealed semiconductor device 200B of the second embodiment, as shown in FIG. 12, the heat dissipation fan 500 can be selectively attached to the back surface 210c or the upper surface 210b of the main body 210. Thereby, the degree of freedom in mounting of the resin-sealed type semiconductor device 200B can be improved.

另外,在將散熱扇500安裝在主體210的上面210b時,由於散熱扇500以較大的範圍與彎曲平面部180b對向,因而與將散熱扇500安裝在背面210c上時同樣,可以獲得較高的散熱效果。這是因為,彎曲平面部180b的彎曲長度k與實施方式一的樹脂密封型半導體裝置200A同樣,與晶粒座180沿z軸方向伸出部分的高度同等或幾乎同等。Further, when the heat radiating fan 500 is mounted on the upper surface 210b of the main body 210, since the heat radiating fan 500 faces the curved flat portion 180b with a large range, the same as when the heat radiating fan 500 is mounted on the rear surface 210c, High heat dissipation. This is because the bending length k of the curved flat portion 180b is equal to or nearly equal to the height of the projection portion of the die pad 180 in the z-axis direction, similarly to the resin-sealed type semiconductor device 200A of the first embodiment.

另外,在製造實施方式二的樹脂密封型半導體裝置200B時使用的樹脂密封用模具,可以使用與實施方式一的樹脂密封型半導體裝置200A中使用的樹脂密封用模具700基本相同結構的模具。但是,在實施方式二的樹脂密封型半導體裝置200B中,由於第一螺絲通過部300及第二螺絲通過部400的位置與實施方式一的樹脂密封型半導體裝置200A不同,因而第一模具710的第一突出部712及第二模具720的第二突出部722,雖然在圖中未標示,但被設置在與製造實施方式一的樹脂密封型半導體裝置200A時使用的樹脂密封用模具700不同的位置。In the resin sealing mold used in the production of the resin-sealed semiconductor device 200B of the second embodiment, a mold having substantially the same structure as the resin sealing mold 700 used in the resin-sealed semiconductor device 200A of the first embodiment can be used. However, in the resin-sealed semiconductor device 200B of the second embodiment, since the positions of the first screw passage portion 300 and the second screw passage portion 400 are different from those of the resin-sealed type semiconductor device 200A of the first embodiment, the first mold 710 is The first protruding portion 712 and the second protruding portion 722 of the second mold 720 are different from those of the resin sealing mold 700 used in the production of the resin-sealed semiconductor device 200A of the first embodiment, although not shown in the drawings. position.

實施方式三Embodiment 3

圖13是表示實施方式三的樹脂密封型半導體裝置200C的說明圖。圖13(a)是表示實施方式三的樹脂密封型半導體裝置200C的外觀的斜視圖,圖13(b)是表示實施方式3的樹脂密封型半導體裝置200C使用的引線架100C的斜視圖。其中,圖13(b)所示的引線架100C,是從該引線架100C中去除了系杆(圖中未標示)及輔助杆(圖中未標示)的狀態。FIG. 13 is an explanatory view showing a resin-sealed semiconductor device 200C according to the third embodiment. Fig. 13 (a) is a perspective view showing an appearance of a resin sealed semiconductor device 200C according to a third embodiment, and Fig. 13 (b) is a perspective view showing a lead frame 100C used in the resin sealed semiconductor device 200C of the third embodiment. Here, the lead frame 100C shown in FIG. 13(b) is a state in which a tie bar (not shown) and an auxiliary lever (not shown) are removed from the lead frame 100C.

實施方式三的樹脂密封型半導體裝置200C,基本上具有與實施方式一的樹脂密封型半導體裝置200A同樣的結構,但與實施方式一的樹脂密封型半導體裝置200A不同的是,樹脂密封型半導體裝置200C是具有3端子型的半導體元件190的樹脂密封型半導體裝置200C。The resin-sealed semiconductor device 200C of the third embodiment basically has the same configuration as the resin-sealed semiconductor device 200A of the first embodiment. However, unlike the resin-sealed semiconductor device 200A of the first embodiment, the resin-sealed semiconductor device is different from the resin-sealed semiconductor device 200A of the first embodiment. 200C is a resin-sealed type semiconductor device 200C having a three-terminal type semiconductor element 190.

即,實施方式三的樹脂密封型半導體裝置200C是具有3端子型的半導體元件190(例如POWER MOSFET、IGBT、閘流電晶體等)的樹脂密封型半導體裝置,具有作為第一外部導線的1個第一外部導線121、作為第二外部導線的2個第二外部導線123和124、以及晶粒座180。另外,作為接合連接端子,實施方式三的樹脂密封型半導體裝置200C還具有第一接合連接端子171和第二接合連接端子172。In other words, the resin-sealed semiconductor device 200C of the third embodiment is a resin-sealed semiconductor device having a three-terminal type semiconductor element 190 (for example, a POWER MOSFET, an IGBT, a thyristor or the like), and has one as the first external lead. The first outer lead 121, the two second outer leads 123 and 124 as the second outer lead, and the die pad 180. Further, as the joint connection terminal, the resin-sealed type semiconductor device 200C of the third embodiment further has a first joint connection terminal 171 and a second joint connection terminal 172.

第一接合連接端子171的一端與半導體元件190的第一區域相連接,同時,另一端與2個第二外部導線123和124中一側的第二外部導線123的連接部123a連接,從而將半導體元件190的第一區域與第二外部導線123進行電氣連接。One end of the first joint connection terminal 171 is connected to the first region of the semiconductor element 190, and the other end is connected to the connection portion 123a of the second outer conductor 123 on one of the two second outer conductors 123 and 124, thereby The first region of the semiconductor component 190 is electrically connected to the second outer conductor 123.

第二接合連接端子172的一端與不同於半導體元件190的第一區域的第二區域相連接,同時,另一端與2個第二外部導線123和124中另一側的第二外部導線124的連接部124a連接,從而將半導體元件190的第二區域與第二外部導線進行電氣連接。One end of the second joint connection terminal 172 is connected to a second region different from the first region of the semiconductor element 190, while the other end is connected to the second outer conductor 124 of the other of the two second outer conductors 123 and 124 The connection portion 124a is connected to electrically connect the second region of the semiconductor element 190 with the second external lead.

另外,在實施方式三的樹脂密封型半導體裝置200C中,在主體210上,與實施方式二的樹脂密封型半導體裝置200B同樣設置有第一螺絲通過部300及第二螺絲通過部400。即,在實施方式三的樹脂密封型半導體裝置200C中,與實施方式二的樹脂密封型半導體裝置200B同樣,在主體210上,在比位於端部的外部導線(例如第一外部導線121)更橫向(沿x軸的方向)上,形成有伸出的“伸出部”,該“伸出部”上設有第一螺絲通過部300及第二螺絲通過部400。Further, in the resin-sealed semiconductor device 200C of the third embodiment, the first screw passing portion 300 and the second screw passing portion 400 are provided on the main body 210 in the same manner as the resin-sealed semiconductor device 200B of the second embodiment. In the resin-sealed semiconductor device 200C of the third embodiment, similarly to the resin-sealed semiconductor device 200B of the second embodiment, the main body 210 is more external than the external lead (for example, the first external lead 121) located at the end. In the lateral direction (in the direction of the x-axis), an extended "projecting portion" is formed, and the "projecting portion" is provided with a first screw passing portion 300 and a second screw passing portion 400.

另外,在實施方式三的樹脂密封型半導體裝置200C中,晶粒座180也同樣通過使裝或部180a的主體210的上面210b側端部向正面210d側彎曲90度,形成彎曲平面部180b。該彎曲平面部180b的彎曲先端部與實施方式一的樹脂密封型半導體裝置200A同樣,至少被設定在比第一插通路徑Wa的中心軸Pa(參照圖5(c))更靠近主體210的正面210d側的位置。因此,彎曲平面部180b的彎曲長度k與實施方式一的樹脂密封型半導體裝置200A同樣,與晶粒座180沿z軸方向的高度h同等或幾乎同等。In the resin-sealed semiconductor device 200C of the third embodiment, the die pad 180 also bends the end portion on the upper surface 210b side of the main body 210 of the package portion 180a by 90 degrees toward the front surface 210d side to form a curved flat portion 180b. Similarly to the resin-sealed semiconductor device 200A of the first embodiment, the curved tip end portion of the curved flat portion 180b is set at least closer to the main body 210 than the central axis Pa of the first insertion path Wa (see FIG. 5(c)). The position on the front side of the 210d side. Therefore, the bending length k of the curved flat portion 180b is equal to or nearly equal to the height h of the die pad 180 in the z-axis direction, similarly to the resin-sealed semiconductor device 200A of the first embodiment.

在實施方式三的樹脂密封型半導體裝置200C上安裝散熱扇500時,可以與實施方式二的樹脂密封型半導體裝置200B同樣進行(參照圖12),並可獲得與實施方式二的樹脂密封型半導體裝置200B同樣的效果。When the heat dissipation fan 500 is mounted on the resin-sealed semiconductor device 200C of the third embodiment, it can be similar to the resin-sealed semiconductor device 200B of the second embodiment (see FIG. 12), and the resin-sealed semiconductor of the second embodiment can be obtained. The same effect of the device 200B.

另外,製造實施方式三的樹脂密封型半導體裝置200C時使用的樹脂密封用模具,可以使用與實施方式一的樹脂密封型半導體裝置200A中使用的樹脂密封用模具700基本相同結構的模具。但在實施方式三的樹脂密封型半導體裝置200C中,與實施方式二的樹脂密封型半導體裝置200B同樣,由於第一螺絲通過部300及第二螺絲通過部400的位置與實施方式一的樹脂密封型半導體裝置200A不同,因而第一模具710的第一突出部712及第二模具720的第二突出部722,雖然在圖中未標示,但被設置在與製造實施方式一的樹脂密封型半導體裝置200A時使用的樹脂密封用模具700不同的位置。In the resin sealing mold used in the resin sealing type semiconductor device 200C of the third embodiment, a mold having substantially the same structure as the resin sealing mold 700 used in the resin sealing type semiconductor device 200A of the first embodiment can be used. In the resin-sealed semiconductor device 200C of the third embodiment, similarly to the resin-sealed semiconductor device 200B of the second embodiment, the positions of the first screw passing portion 300 and the second screw passing portion 400 are sealed with the resin of the first embodiment. The semiconductor device 200A is different, and thus the first protruding portion 712 of the first mold 710 and the second protruding portion 722 of the second mold 720 are provided in the resin-sealed semiconductor of the first embodiment, although not shown in the drawings. The resin sealing mold 700 used in the apparatus 200A has different positions.

實施方式四Embodiment 4

圖14是表示實施方式四的樹脂密封型半導體裝置200D的結構的說明圖。圖14(a)是表示從橫向方向觀察樹脂密封型半導體裝置200D的正面210d時的斜視圖,圖14(b)是表示從斜下方向觀察樹脂密封型半導體裝置200D的背面210c時的斜視圖。實施方式四的樹脂密封型半導體裝置200D也與實施方式一的樹脂密封型半導體裝置200A同樣,是單列直插橋式二極體。另外,圖14所示的是未安裝散熱扇500的狀態。FIG. 14 is an explanatory view showing a configuration of a resin-sealed semiconductor device 200D according to the fourth embodiment. (a) of FIG. 14 is a perspective view when the front surface 210d of the resin-sealed semiconductor device 200D is viewed from the lateral direction, and (b) is a perspective view when the rear surface 210c of the resin-sealed semiconductor device 200D is viewed from the obliquely downward direction. . Similarly to the resin-sealed semiconductor device 200A of the first embodiment, the resin-sealed semiconductor device 200D of the fourth embodiment is a single-row in-line bridge diode. In addition, FIG. 14 shows a state in which the heat dissipation fan 500 is not mounted.

實施方式四的樹脂密封型半導體裝置200D與實施方式一的樹脂密封型半導體裝置200A同樣,具有主體210、引線架100D(參照圖16)的外部導線(第一外部導線121、122及第二外部導線123、124)。另外,主體210的側面形狀(沿x軸方向觀察的形狀)為正方形狀。另外,實施方式四的樹脂密封型半導體裝置200D的製造工程,由於可以通過與實施方式一的樹脂密封型半導體裝置200A同樣的製造工程(參照圖2)製造,因而在此省略其說明。Similarly to the resin-sealed semiconductor device 200A of the first embodiment, the resin-sealed semiconductor device 200D of the fourth embodiment has external wires (first external wires 121 and 122 and second external portions) of the main body 210 and the lead frame 100D (see FIG. 16). Wires 123, 124). Further, the side shape (the shape viewed in the x-axis direction) of the main body 210 is a square shape. In addition, the manufacturing process of the resin-sealed semiconductor device 200D of the fourth embodiment can be manufactured by the same manufacturing process (see FIG. 2) as the resin-sealed semiconductor device 200A of the first embodiment, and thus the description thereof will be omitted.

實施方式四的樹脂密封型半導體裝置200D與實施方式一的樹脂密封型半導體裝置200A的較大不同,是第一螺絲通過部300及第二螺絲通過部400的結構。在以下的說明中,將實施方式四的樹脂密封型半導體裝置200D的第一螺絲通過部及第二螺絲通過部表述為“第一螺絲通過部300D”及“第二螺絲通過部400D”。The resin-sealed semiconductor device 200D of the fourth embodiment differs from the resin-sealed semiconductor device 200A of the first embodiment in the configuration of the first screw passing portion 300 and the second screw passing portion 400. In the following description, the first screw passing portion and the second screw passing portion of the resin-sealed type semiconductor device 200D of the fourth embodiment are referred to as "first screw passing portion 300D" and "second screw passing portion 400D".

圖15是表示從各個方向觀察實施方式四的樹脂密封型半導體裝置200D的第一螺絲通過部300D及第二螺絲通過部400D的說明圖。圖15(a)是從主體210的正面210d觀察的說明圖,圖15(b)是表示從主體210的背面210c觀察的說明圖,圖15(c)是表示從主體210的上面210b觀察的說明圖,圖15(d)是表示從主體210的下面210a觀察的說明圖。FIG. 15 is an explanatory view showing the first screw passing portion 300D and the second screw passing portion 400D of the resin-sealed type semiconductor device 200D of the fourth embodiment as seen from the respective directions. Fig. 15(a) is an explanatory view as seen from the front surface 210d of the main body 210, Fig. 15(b) is an explanatory view as seen from the rear surface 210c of the main body 210, and Fig. 15(c) is a view as seen from the upper surface 210b of the main body 210. FIG. 15(d) is an explanatory view showing the lower surface 210a of the main body 210.

另外,在圖15(a)及圖15(b)中,上面210b被標示在圖中的上側位置,在圖15(c)及圖15(d)中,正面210d被標示在圖中的左側位置。In addition, in FIGS. 15(a) and 15(b), the upper surface 210b is indicated on the upper side in the drawing, and in FIGS. 15(c) and 15(d), the front surface 210d is indicated on the left side in the drawing. position.

如圖14及圖15所示,第一螺絲通過部300D,將正面210d從上面210b至下面210a形成以預定寬度m開口的開口槽351,該開口槽351在上面210b呈U字狀,具有呈半圓形的彎曲部352及開口部353(參照圖15(c)及圖15(d))。另外,在圖15(c)及圖15(d)中,開口部353是以細長的橢圓狀虛線框標示的,這表示開口部353位於該虛線框內。As shown in FIGS. 14 and 15, the first screw passing portion 300D forms an opening groove 351 which is opened at a predetermined width m from the upper surface 210b to the lower surface 210a, and the opening groove 351 has a U shape on the upper surface 210b. The semicircular curved portion 352 and the opening portion 353 (see FIGS. 15(c) and 15(d)). 15(c) and 15(d), the opening 353 is indicated by an elongated elliptical dotted line frame, which indicates that the opening 353 is located in the broken line frame.

另外,彎曲部352位於主體210的上面210b的正面210d側端邊與背面210c側端邊之間,同時,開口部353位於主體210的上面210b的正面210d側端邊。另外,彎曲部352及開口部353被形成至主體210的下面210a(參照圖15(a)),該彎曲部352被作為第一插通路徑Wa使用。Further, the curved portion 352 is located between the end side of the front surface 210d side of the upper surface 210b of the main body 210 and the end side of the back surface 210c side, and the opening portion 353 is located at the side of the front surface 210d side of the upper surface 210b of the main body 210. Further, the curved portion 352 and the opening portion 353 are formed to the lower surface 210a of the main body 210 (see FIG. 15(a)), and the curved portion 352 is used as the first insertion path Wa.

在這裡,彎曲部352的中心Pc,在實施方式四的樹脂密封型半導體裝置200D中,位於主體210的y軸方向的尺寸的例如1/2的位置(主體210的正面210d與背面210c之間的例如中間位置),同時位於主體210的x軸方向的尺寸的例如1/2的位置。另外,彎曲部352的中心Pc,是指在將彎曲部352作為向相對側(正面210d側)延長的假想圓考慮時,該假想圓的中心Pc。另外,形成彎曲部352的假想圓的直徑與開口槽351的寬度m相同,該直徑(以下稱“直徑m”)為用於固定散熱扇500的螺絲600可以通過的程度。Here, the center Pc of the curved portion 352 is located at a position of, for example, 1/2 of the dimension of the main body 210 in the y-axis direction in the resin-sealed type semiconductor device 200D of the fourth embodiment (between the front surface 210d and the rear surface 210c of the main body 210) For example, the intermediate position) is located at a position of, for example, 1/2 of the dimension of the body 210 in the x-axis direction. In addition, the center Pc of the curved portion 352 refers to the center Pc of the virtual circle when the curved portion 352 is considered as an imaginary circle extending toward the opposite side (the front surface 210d side). Further, the diameter of the imaginary circle forming the curved portion 352 is the same as the width m of the opening groove 351, and the diameter (hereinafter referred to as "diameter m") is such a degree that the screw 600 for fixing the heat dissipation fan 500 can pass.

另外,第二螺絲通過部400D被作為貫穿開口槽351的彎曲部352至背面210c的貫通孔451形成,該貫通孔451被作為第二插通路徑Wb使用,在觀察正面210d或背面210c時呈圓形(參照圖15(a)、圖15(b))。另外,貫通孔451的直徑與開口槽351的寬度m相同。Further, the second screw passage portion 400D is formed as a through hole 451 that penetrates the curved portion 352 of the opening groove 351 to the back surface 210c. The through hole 451 is used as the second insertion path Wb, and is observed when the front surface 210d or the back surface 210c is observed. Round (see Fig. 15 (a), Fig. 15 (b)). Further, the diameter of the through hole 451 is the same as the width m of the opening groove 351.

另外,貫通孔451的中心軸Pd的位置,在實施方式4的樹脂密封型半導體裝置200D中,是在主體210的z軸方向的尺寸的例如1/2的位置(主體210的上面210b與下面210a之間的例如中間位置),同時位於主體210的x軸方向的尺寸的例如1/2位置(主體210的兩側面210e之間的例如中間位置)。In the resin-sealed semiconductor device 200D of the fourth embodiment, the position of the central axis Pd of the through-hole 451 is, for example, 1/2 of the dimension of the main body 210 in the z-axis direction (the upper surface 210b of the main body 210 and the lower surface) For example, an intermediate position between 210a, at the same time, for example, a position of 1/2 of the dimension of the main body 210 in the x-axis direction (for example, an intermediate position between the both side faces 210e of the main body 210).

而且,經過第一螺絲通過部300D的彎曲部352的中心Pc(參照圖15(c))的沿z軸方向的中心線L5(參照圖15(a))與和第二螺絲通過部400D的貫通孔451的中心軸Pd(參照圖15(a))一致的沿y軸方向的中心線L6(參照圖15(c))正交。另外,關於彎曲部352的中心Pc及貫通孔451的中心軸Pd的位置,如果設定經過彎曲部352的中心Pc的中心線L5及與貫通孔451的中心軸Pd一致的中心線L6直交,則可以沿x軸、y軸及z軸分別略微錯開一些位置。Further, the center line L5 (see FIG. 15(a)) in the z-axis direction (see FIG. 15(a)) and the second screw passing portion 400D passing through the center Pc (see FIG. 15(c)) of the curved portion 352 of the first screw passing portion 300D The center line L6 (see FIG. 15(c)) along the y-axis direction in which the central axis Pd of the through hole 451 (see FIG. 15(a)) coincides is orthogonal to each other. In addition, when the center Pc of the curved portion 352 and the central axis Pd of the through hole 451 are set to be orthogonal to the center line L5 passing through the center Pc of the curved portion 352 and the center line L6 that coincides with the central axis Pd of the through hole 451, Some positions can be slightly offset along the x-axis, y-axis, and z-axis, respectively.

主體210的第一螺絲通過部300D的彎曲部352及第二螺絲通過部400D的貫通孔451被設定在這樣的位置,且,散熱扇500的陰螺紋部500a的位置被設定為上述的位置(散熱扇側安裝面510的中央部),因而在將散熱扇500安裝在主體210的背面210c或上面210b時,均可以使散熱扇500在穩定的狀態下安裝。這是因為,將散熱扇500安裝在主體210的背面210c或上面210b時的螺絲固定位置,在主體210中,分別位於背面210c或上面210b的幾乎中央。另外,在散熱扇500中,位於散熱扇側安裝面510的中央。The curved portion 352 of the first screw passage portion 300D of the main body 210 and the through hole 451 of the second screw passage portion 400D are set at such positions, and the position of the female screw portion 500a of the heat dissipation fan 500 is set to the above position ( Since the central portion of the cooling fan side mounting surface 510 is attached to the rear surface 210c or the upper surface 210b of the main body 210, the heat radiating fan 500 can be mounted in a stable state. This is because the screw fixing position when the heat dissipation fan 500 is attached to the back surface 210c or the upper surface 210b of the main body 210 is located substantially at the center of the back surface 210c or the upper surface 210b in the main body 210. Further, in the heat dissipation fan 500, it is located at the center of the heat dissipation fan side mounting surface 510.

下面對實施方式四的樹脂密封型半導體裝置200D使用的引線架100D進行說明。引線架100D的結構,基本上與實施方式一的樹脂密封型半導體裝置200A使用的引線架100A相同,因而對於相同的部分則標記同一符號。Next, the lead frame 100D used in the resin-sealed semiconductor device 200D of the fourth embodiment will be described. The structure of the lead frame 100D is basically the same as that of the lead frame 100A used in the resin-sealed type semiconductor device 200A of the first embodiment, and therefore the same portions are denoted by the same reference numerals.

圖16是表示實施方式四的樹脂密封型半導體裝置200D中的引線架100D的第一晶粒座111及第二晶粒座112的說明圖。FIG. 16 is an explanatory view showing the first die pad 111 and the second die pad 112 of the lead frame 100D in the resin-sealed semiconductor device 200D of the fourth embodiment.

如圖16所示,第一晶粒座111,通過使用於裝載半導體元件151、152的裝載部111a、111b中的111a的主體210的上面210b側端部向正面210d側(y軸方向)彎曲90度,形成有彎曲平面部111d。另外,第二晶粒座112,通過使用於裝載半導體元件153、154的裝載部112a、112b的主體210的上面210b側端部分別向正面210d側(y軸方向)彎曲90度,形成有彎曲平面部112d、112e。另外,設彎曲平面部111d、112d、112e的彎曲長度為“k”。As shown in FIG. 16, the first die pad 111 is bent toward the front surface 210d side (y-axis direction) by the end portion on the upper surface 210b side of the main body 210 of the 111a of the mounting portions 111a and 111b on which the semiconductor elements 151 and 152 are mounted. At 90 degrees, a curved flat portion 111d is formed. Further, the second die pad 112 is bent by 90 degrees toward the front surface 210d side (y-axis direction) by the end portions on the upper surface 210b side of the main body 210 of the mounting portions 112a and 112b on which the semiconductor elements 153 and 154 are mounted, and is formed to be curved. Flat portions 112d and 112e. Further, it is assumed that the curved lengths of the curved flat portions 111d, 112d, and 112e are "k".

該彎曲長度k,彎曲平面部111d、112d、112e的彎曲先端部至少位於比第一螺絲通過部300的彎曲部352的中心Pc(參照圖15(c))更靠近主體210的正面210d側。另外,在實施方式四的樹脂密封型半導體裝置200D中,彎曲長度k與第一晶粒座111及第二晶粒座112在z軸方向的伸出部分的高度h(參照圖3)同等或幾乎同等。The curved length k, the curved tip end portions of the curved flat portions 111d, 112d, and 112e are located at least closer to the front surface 210d side of the main body 210 than the center Pc (see FIG. 15(c)) of the curved portion 352 of the first screw passing portion 300. Further, in the resin-sealed semiconductor device 200D of the fourth embodiment, the bending length k is equal to the height h (see FIG. 3) of the protruding portions of the first die pad 111 and the second die pad 112 in the z-axis direction. Almost the same.

這樣,由於彎曲長度k與第一晶粒座111及第二晶粒座112在z軸方向的伸出部分的高度h(參照圖3)同等或幾乎同等,因而在將這些晶粒座及半導體元件等進行樹脂密封時,主體210的側面形狀可以為正方形狀。Thus, since the bending length k is equal to or nearly equal to the height h (see FIG. 3) of the protruding portions of the first die pad 111 and the second die pad 112 in the z-axis direction, these die pads and semiconductors are used. When the element or the like is resin-sealed, the side surface shape of the main body 210 may be square.

由於主體210的側面形狀為正方形狀,主體210的上面210b可以與原本具有較大面積的主體210的背面210c具有同等的面積。Since the side surface shape of the main body 210 is a square shape, the upper surface 210b of the main body 210 can have the same area as the rear surface 210c of the main body 210 having a large area.

另外,在實施方式一的樹脂密封型半導體裝置200A中的引線架100A中,第二晶粒座112的彎曲平面部112d、112e的先端由第二連接部112c連接,但在實施方式四的樹脂密封型半導體裝置200D的引線架100D中,第二晶粒座112的彎曲平面部112d、112e的後端由第二連接部112c連接,彎曲平面部112d、112e的先端相互隔離。這是因為,實施方式四的樹脂密封型半導體裝置200D的主體210,如圖14所示,在主體210的正面210d中需要從主體210的下面210a至上面210b之間形成開口槽351。Further, in the lead frame 100A in the resin-sealed semiconductor device 200A of the first embodiment, the tips of the curved flat portions 112d and 112e of the second die pad 112 are connected by the second connecting portion 112c, but the resin of the fourth embodiment In the lead frame 100D of the hermetic semiconductor device 200D, the rear ends of the curved flat portions 112d and 112e of the second die pad 112 are connected by the second connecting portion 112c, and the tips of the curved flat portions 112d and 112e are isolated from each other. This is because, as shown in FIG. 14, the main body 210 of the resin-sealed type semiconductor device 200D of the fourth embodiment needs to form the opening groove 351 from the lower surface 210a to the upper surface 210b of the main body 210 in the front surface 210d of the main body 210.

另外,在引線架100D的晶粒座(第一晶粒座111及第二晶粒座112)上,形成有空間部S1、S2。該空間部S1、S2是為了避免該晶粒座與用於形成主體210的樹脂密封用模具800(參照圖19及圖20)的第一模具810上設置的第一突出部812及第二模具820上設置的第二突出部822相抵接。Further, space portions S1 and S2 are formed on the die pad holders (the first die pad 111 and the second die pad 112) of the lead frame 100D. The space portions S1 and S2 are a first protruding portion 812 and a second mold which are provided on the first mold 810 for avoiding the die holder and the resin sealing mold 800 (see FIGS. 19 and 20) for forming the main body 210. The second protrusions 822 provided on the 820 abut.

通過形成這樣的空間部S1、S2,在使用樹脂密封用模具800形成主體210時,構成該引線架100D的晶粒座(第一晶粒座111及第二晶粒座112)就可以不與第一模具810上設置的第一突出部812及第二模具820上設置的第二突出部822相抵接。因此,就可以順利地將晶粒座(第一晶粒座111及第二晶粒座112)設置在樹脂密封用模具800內。When the main body 210 is formed by using the resin sealing mold 800 by forming the space portions S1 and S2, the die pad (the first die pad 111 and the second die pad 112) constituting the lead frame 100D may not The first protrusion 812 provided on the first mold 810 and the second protrusion 822 provided on the second mold 820 abut. Therefore, the die pad (the first die pad 111 and the second die pad 112) can be smoothly placed in the resin sealing mold 800.

圖17是表示在實施方式四的樹脂密封型半導體裝置200D的主體210的背面210c上安裝散熱扇500的說明圖。圖17(a)為斜視圖,圖17(b)是表示第一螺絲通過部300D及第二螺絲通過部400D與螺絲600的關係的放大斷面圖。FIG. 17 is an explanatory view showing that the heat dissipation fan 500 is attached to the back surface 210c of the main body 210 of the resin-sealed semiconductor device 200D of the fourth embodiment. 17(a) is a perspective view, and FIG. 17(b) is an enlarged cross-sectional view showing the relationship between the first screw passing portion 300D and the second screw passing portion 400D and the screw 600.

在將散熱扇500安裝在主體210的背面210c上時,如圖17所示,將貫通孔451作為第二插通路徑Wb使用,將散熱扇500安裝在主體210的背面210c。即,在將散熱扇500與主體210的背面210c接觸的狀態下,將螺絲600的先端從第一螺絲通過部300D穿過第二螺絲通過部400D的貫通孔451(參照圖17(b))後,從主體210的背面210c突出,將螺絲600的先端部插入散熱扇500的陰螺紋部500a並旋緊,從而固定散熱扇500。這樣,即可以將散熱扇500安裝在主體210的背面210c上。When the heat dissipation fan 500 is attached to the back surface 210c of the main body 210, as shown in FIG. 17, the through hole 451 is used as the second insertion path Wb, and the heat dissipation fan 500 is attached to the back surface 210c of the main body 210. In other words, in a state where the heat radiating fan 500 is in contact with the back surface 210c of the main body 210, the leading end of the screw 600 passes through the through hole 451 of the second screw passing portion 400D from the first screw passing portion 300D (refer to FIG. 17(b)). Thereafter, the front end portion of the screw 600 protrudes from the back surface 210c of the main body 210, and the tip end portion of the screw 600 is inserted into the female screw portion 500a of the heat dissipation fan 500 to be screwed, thereby fixing the heat dissipation fan 500. Thus, the heat dissipation fan 500 can be mounted on the back surface 210c of the main body 210.

如圖17所示將散熱扇500安裝在主體210的背面210c上時,由於散熱扇500以較大面積與第一晶粒座111及第二晶粒座112對向,因而可以獲得較高的散熱效果。這是因為,如圖16所示,位於主體210的背面210c的第一晶粒座111及第二晶粒座112具有較大的面積,散熱扇500通過與具有這樣較大面積的第一晶粒座111及第二晶粒座112對向設置,因而可以獲得較高的散熱效果。When the heat dissipation fan 500 is mounted on the back surface 210c of the main body 210 as shown in FIG. 17, since the heat dissipation fan 500 is opposed to the first die pad 111 and the second die pad 112 with a large area, a high height can be obtained. heat radiation. This is because, as shown in FIG. 16, the first die pad 111 and the second die pad 112 located on the back surface 210c of the main body 210 have a large area, and the heat dissipation fan 500 passes through the first crystal having such a large area. The granular seat 111 and the second die holder 112 are disposed opposite to each other, so that a high heat dissipation effect can be obtained.

圖18是表示在實施方式四的樹脂密封型半導體裝置200D的上面210b上安裝散熱扇500的說明圖。圖18(a)為斜視圖,圖18(b)是表示第一螺絲通過部300D及第二螺絲通過部400D與螺絲600的關係的放大斷面圖。FIG. 18 is an explanatory view showing that the heat dissipation fan 500 is attached to the upper surface 210b of the resin-sealed semiconductor device 200D of the fourth embodiment. 18(a) is a perspective view, and FIG. 18(b) is an enlarged cross-sectional view showing the relationship between the first screw passing portion 300D and the second screw passing portion 400D and the screw 600.

在將散熱扇500安裝在主體210的上面210b上時,如圖18所示,將開口槽351的彎曲部352作為第一插通路徑Wa使用,將散熱扇500安裝在主體210的上面210b。即,在將散熱扇500載放在主體210的上面210b上的狀態下,將螺絲600的先端部穿過主體210的第一螺絲通過部300D的開口槽351的彎曲部352後,從主體210的上面210b突出,並將螺絲600的先端部插入散熱扇500的陰螺紋部500a並旋緊,將散熱扇500固定。這樣,即可將散熱扇500安裝在主體210的上面210b上。When the heat radiating fan 500 is attached to the upper surface 210b of the main body 210, as shown in FIG. 18, the curved portion 352 of the opening groove 351 is used as the first insertion path Wa, and the heat radiating fan 500 is attached to the upper surface 210b of the main body 210. That is, in a state where the heat radiating fan 500 is placed on the upper surface 210b of the main body 210, the leading end portion of the screw 600 passes through the curved portion 352 of the opening groove 351 of the first screw passing portion 300D of the main body 210, and is then passed from the main body 210. The upper surface 210b protrudes, and the tip end portion of the screw 600 is inserted into the female screw portion 500a of the heat dissipation fan 500 and screwed to fix the heat dissipation fan 500. Thus, the heat dissipation fan 500 can be mounted on the upper surface 210b of the main body 210.

如圖18所示將散熱扇500安裝在主體210的上面210b上時,與將散熱扇500安裝在主體210的背面210c時同樣,也可以獲得較高的散熱效果。這是因為,在將散熱扇500安裝在主體210的上面210b時,彎曲平面部111d、111e及彎曲平面部112d、112e與裝載部111a、111b及裝載部112a、112b具有幾乎同等面積,散熱扇側安裝面510是以與彎曲平面部111d、111e及彎曲平面部112d、112e對向的狀態被安裝。When the heat dissipation fan 500 is mounted on the upper surface 210b of the main body 210 as shown in FIG. 18, a high heat dissipation effect can be obtained as in the case where the heat dissipation fan 500 is attached to the back surface 210c of the main body 210. This is because when the heat radiating fan 500 is attached to the upper surface 210b of the main body 210, the curved flat portions 111d and 111e and the curved flat portions 112d and 112e have almost the same area as the loading portions 111a and 111b and the loading portions 112a and 112b, and the heat radiating fan The side mounting surface 510 is attached in a state of being opposed to the curved flat portions 111d and 111e and the curved flat portions 112d and 112e.

即,彎曲平面部111d及彎曲平面部112d、112e的彎曲長度k,與第一晶粒座111及第二晶粒座112沿z軸方向的高度h同等或幾乎同等(參照圖16),因而主體210的側面形狀為正方形狀,因此,主體210的上面210b與原本具有較大面積的主體210的背面210c具有同等的面積。In other words, the curved length k of the curved flat portion 111d and the curved flat portions 112d and 112e is equal to or nearly equal to the height h of the first die pad 111 and the second die pad 112 in the z-axis direction (see FIG. 16). Since the side surface of the main body 210 has a square shape, the upper surface 210b of the main body 210 has the same area as the rear surface 210c of the main body 210 having a large area.

這樣,在將散熱扇500安裝在主體210的上面210b上時(參照圖18),散熱扇500以較大的面積與彎曲平面部111d、112d、112e對向,因而與將散熱扇500安裝在主體210的背面210c時同樣,可以獲得較高的散熱效果。Thus, when the heat radiating fan 500 is mounted on the upper surface 210b of the main body 210 (refer to FIG. 18), the heat radiating fan 500 faces the curved flat portions 111d, 112d, and 112e with a large area, and thus the heat radiating fan 500 is mounted. Also in the case of the back surface 210c of the main body 210, a high heat dissipation effect can be obtained.

如以上說明所述,通過實施方式四的樹脂密封型半導體裝置200D,可以選擇性地將散熱扇500安裝在主體210的背面210c或上面210b上(參照圖17及圖18)。因此,散熱扇500的安裝位置除了主體210的背面210c以外,在希望安裝在主體210的上面210b上時,也可以很容易操作,從而可以提高在將樹脂密封型半導體裝置200D安裝在基板上時的安裝自由度。As described above, the resin sealing type semiconductor device 200D of the fourth embodiment can selectively attach the heat dissipation fan 500 to the back surface 210c or the upper surface 210b of the main body 210 (see FIGS. 17 and 18). Therefore, the mounting position of the heat radiating fan 500 can be easily operated when it is desired to be mounted on the upper surface 210b of the main body 210 in addition to the back surface 210c of the main body 210, so that the mounting of the resin sealing type semiconductor device 200D on the substrate can be improved. Installation freedom.

接下來對製造實施方式四的樹脂密封型半導體裝置200D的樹脂密封用模具800進行說明。Next, a resin sealing mold 800 for manufacturing the resin-sealed type semiconductor device 200D of the fourth embodiment will be described.

圖19及圖20是表示製造實施方式四的樹脂密封型半導體裝置200D時使用的樹脂密封用模具800的說明圖。圖19是表示從斜向方向觀察主體210的正面210d時樹脂密封型半導體裝置200D與樹脂密封用模具800的關係的說明圖,圖20是表示從斜向方向觀察主體210的背面210c時樹脂密封型半導體裝置200D與樹脂密封用模具800的關係的說明圖。19 and FIG. 20 are explanatory views showing a resin sealing mold 800 used in the production of the resin-sealed semiconductor device 200D of the fourth embodiment. 19 is an explanatory view showing a relationship between the resin-sealed semiconductor device 200D and the resin sealing mold 800 when the front surface 210d of the main body 210 is viewed from the oblique direction, and FIG. 20 is a resin seal when the rear surface 210c of the main body 210 is viewed from the oblique direction. An explanatory view of the relationship between the semiconductor device 200D and the resin sealing mold 800.

樹脂密封用模具800是由一對模具(第一模具810及第二模具820)構成的。第一模具810,在將主體210分為正面210d側與背面210c側時,是與正面210d側相對應的模具;第二模具820,在將主體210分為正面210d側與背面210c時,是與背面210c側相對應的模具。另外,圖19及圖20所示的,是在樹脂密封用模具800內注入的樹脂硬化後,將第一模具810及第二模具820取下的狀態。The resin sealing mold 800 is composed of a pair of molds (a first mold 810 and a second mold 820). The first mold 810 is a mold corresponding to the front surface 210d side when the main body 210 is divided into the front surface 210d side and the back surface 210c side, and the second mold 820 is divided into the front surface 210d side and the back surface 210c when the main body 210 is divided. A mold corresponding to the side of the back surface 210c. In addition, as shown in FIG. 19 and FIG. 20, the resin injected in the resin sealing mold 800 is cured, and the first mold 810 and the second mold 820 are removed.

下面通過圖19及圖20對第一模具810及第二模具820進行說明。第一模具810具有設置了用於向內部注入樹脂的空間的模具腔體811,第二模具820也同樣,具有設置了用於向內部注入樹脂的空間的模具腔體821。另外,在圖19及圖20中,關於第一模具810的模具腔體811及第二模具820的模具腔體821各自內部的面,分別將用於形成主體210的下面210a的面設為下面成形面814、824,圖中顯示的第一模具810及第二模具820的放置狀態,是該下面成形面814、824水準(xy平面上)且朝向上方(箭頭z方向)。Next, the first mold 810 and the second mold 820 will be described with reference to FIGS. 19 and 20. The first mold 810 has a mold cavity 811 provided with a space for injecting resin into the inside, and the second mold 820 has a mold cavity 821 provided with a space for injecting resin into the inside. In addition, in FIGS. 19 and 20, the surfaces of the mold cavity 811 of the first die 810 and the die cavity 821 of the second die 820 are respectively formed as the lower surface of the lower surface 210a of the main body 210. The molding surfaces 814 and 824, and the first mold 810 and the second mold 820 shown in the drawing are placed at the level of the lower molding surfaces 814 and 824 (in the xy plane) and upward (in the arrow z direction).

首先通過圖19對第二模具820進行說明。如圖19所示,第二模具820具有用於形成第二螺絲通過部400D的突出部822(以下簡稱“第二突出部822”)。第二突出部822被形成為先端面822a為圓形的圓柱狀突出部,沿y軸突出。在以下說明中,可能將第二突出部822表述為圓柱狀突出部822。First, the second mold 820 will be described with reference to Fig. 19 . As shown in FIG. 19, the second mold 820 has a protruding portion 822 (hereinafter simply referred to as "second protruding portion 822") for forming the second screw passing portion 400D. The second projecting portion 822 is formed as a cylindrical projecting portion in which the front end surface 822a is circular and protrudes along the y-axis. In the following description, the second protrusion 822 may be expressed as a cylindrical protrusion 822.

另外,如圖20所示,第一模具810具有用於形成第一螺絲通過部300D的突出部812(以下簡稱“第一突出部812”)。在第一突出部812的先端,沿z軸從模具腔體811內部的上面至下面形成有呈半圓形的彎曲面812a。另外,在彎曲面812a上,形成有與第二模具820的圓柱狀突出部822的先端面822a(以下簡稱“圓柱先端面822a”)的形狀相對應的具有先端面813a的圓柱狀突出部813(以下稱為“輔助突出部813”)。In addition, as shown in FIG. 20, the first mold 810 has a protruding portion 812 (hereinafter simply referred to as "first protruding portion 812") for forming the first screw passing portion 300D. At the tip end of the first protrusion 812, a semicircular curved surface 812a is formed along the z-axis from the upper surface to the lower surface of the inside of the mold cavity 811. Further, on the curved surface 812a, a cylindrical projection 813 having a front end surface 813a corresponding to the shape of the front end surface 822a of the cylindrical projection 822 of the second mold 820 (hereinafter referred to as "cylinder front end surface 822a") is formed. (hereinafter referred to as "auxiliary protrusion 813").

具有這樣結構的第一模具810和第二模具820在對接的狀態下,形成在第一模具810的彎曲面812a的輔助突出部813的先端面813a與第二模具820的圓柱狀突出部822的圓柱先端面822a則緊密相接。The first mold 810 and the second mold 820 having such a structure are formed in a butt joint state, and the first end surface 813a of the auxiliary protrusion 813 of the curved surface 812a of the first mold 810 and the cylindrical protrusion 822 of the second mold 820 are formed. The cylindrical front end faces 822a are in close contact.

圖21是表示第一模具810與第二模具820在對接狀態時第一突出部812與第二突出部822的關係的放大斷面圖。另外,圖21是在圖19中第一模具810與第二模具820在對接狀態時f-f的矢視斷面圖,表示的是注入樹脂前的狀態。另外,在圖21中,省略了樹脂密封型半導體裝置200D的引線架100D等的圖示。21 is an enlarged cross-sectional view showing the relationship between the first protruding portion 812 and the second protruding portion 822 when the first die 810 and the second die 820 are in the butted state. 21 is a cross-sectional view showing the f-f of the first mold 810 and the second mold 820 in the mated state in FIG. 19, showing a state before the resin is injected. In addition, in FIG. 21, illustration of the lead frame 100D etc. of the resin sealing type semiconductor device 200D is abbreviate|omitted.

如圖21所示,第一模具810和第二模具820在對接的狀態下,形成在第一突出部812的彎曲面812a的輔助突出部813的先端面813a與第二突出部822(圓柱狀突出部822)的圓柱先端面822a緊密相接。As shown in FIG. 21, in a state where the first mold 810 and the second mold 820 are butted, the front end surface 813a and the second protrusion portion 822 of the auxiliary protrusion portion 813 of the curved surface 812a of the first protrusion portion 812 are formed (cylindrical shape). The cylindrical leading end faces 822a of the projections 822) are in close contact.

另外,第一模具810和第二模具820在對接的狀態時,第一突出部812及第二突出部822不會與引線架100D的晶粒座(第一晶粒座111及第二晶粒座112)相抵接。這是因為,如在圖16中的說明所述,第一晶粒座111及第二晶粒座112上形成有空間部S1、S2。In addition, when the first mold 810 and the second mold 820 are in the butted state, the first protrusion 812 and the second protrusion 822 do not overlap with the die holder of the lead frame 100D (the first die pad 111 and the second die) Block 112) abuts. This is because, as described in the description of FIG. 16, the space portions S1 and S2 are formed on the first die pad 111 and the second die pad 112.

如圖21所示的狀態,向模具腔體811與模具腔體821形成的空間內注入樹脂,在注入的樹脂硬化後,如圖19及圖20所示,將第一模具810及第二模具820分離,即可形成主體210。另外,通過沖切模具(圖中未標示)將系杆130及輔助杆140(均參照圖2)分離,即可製造樹脂密封型半導體裝置200D。In the state shown in FIG. 21, resin is injected into the space formed by the mold cavity 811 and the mold cavity 821, and after the injected resin is cured, as shown in FIGS. 19 and 20, the first mold 810 and the second mold are formed. The body 210 is formed by separating 820. Further, the resin sealing type semiconductor device 200D can be manufactured by separating the tie bar 130 and the auxiliary lever 140 (both referring to FIG. 2) by a punching die (not shown).

在這樣製造的樹脂密封型半導體裝置200D的主體210中,通過第一模具810的第一突出部812,可以形成第一螺絲通過部300D,另外,通過形成在第一突出部812的彎曲面812a上的輔助突出部813和第二模具820的第二突出部822(圓柱狀突出部822),可以形成第二螺絲通過部400D(貫通孔451)。In the main body 210 of the resin-sealed type semiconductor device 200D thus manufactured, the first screw passing portion 300D can be formed by the first protruding portion 812 of the first mold 810, and the curved surface 812a formed on the first protruding portion 812 can be formed. The upper auxiliary protruding portion 813 and the second protruding portion 822 (cylindrical protruding portion 822) of the second mold 820 can form the second screw passing portion 400D (through hole 451).

另外,在樹脂密封用模具800內的樹脂硬化後,將第一模具810及第二模具820分離時,可以按圖19及圖20所示的箭頭y方向將第一模具810取下,同時按圖19及圖20所示的箭頭y’方向將第二模具820取下,即可將第一模具810及第二模具820分離。Further, when the resin in the resin sealing mold 800 is cured, when the first mold 810 and the second mold 820 are separated, the first mold 810 can be removed in the direction of the arrow y shown in FIGS. 19 and 20, and simultaneously pressed. The first mold 810 and the second mold 820 can be separated by removing the second mold 820 in the direction of the arrow y' shown in FIGS. 19 and 20.

這樣,在樹脂硬化後,之所以可以將第一模具810及第二模具820分離,是由於樹脂密封用模具800為圖19及圖20所示的結構。即,將第一模具810及第二模具820沿其各自取下的方向(第一模具810為箭頭y方向、第二模具820為箭頭y’方向)分離時,第一突出部812及第二突出部822對於硬化的樹脂沒有牽連的形狀。另外,將第一模具810及第二模具820分離後,將主體210從一側的模具中取出時,需使用壓出銷。Thus, after the resin is cured, the first mold 810 and the second mold 820 can be separated because the resin sealing mold 800 has the structure shown in FIGS. 19 and 20. That is, when the first mold 810 and the second mold 820 are separated in the direction in which they are respectively removed (the first mold 810 is in the direction of the arrow y and the second mold 820 is in the direction of the arrow y'), the first protruding portion 812 and the second portion The protrusion 822 has no shape to be implicated for the hardened resin. Further, after the first mold 810 and the second mold 820 are separated, when the main body 210 is taken out from the mold of one side, an extrusion pin is used.

另外,在實施方式四中,是以具有與實施方式一的樹脂密封型半導體裝置200A同樣結構的樹脂密封型半導體裝置200D為例進行的說明,但實際上,通過變更形成第一螺絲通過部300D及第二螺絲通過部400D的位置,也可以適用於實施方式二的樹脂密封型半導體裝置200B及實施方式三的樹脂密封型半導體裝置200C。In the fourth embodiment, the resin-sealed semiconductor device 200D having the same configuration as the resin-sealed semiconductor device 200A of the first embodiment is described as an example. However, the first screw-passing portion 300D is actually formed by changing. The position of the second screw passing portion 400D can also be applied to the resin sealed semiconductor device 200B of the second embodiment and the resin sealed semiconductor device 200C of the third embodiment.

實施方式五Embodiment 5

圖22是表示實施方式五的樹脂密封型半導體裝置200E的說明圖。圖22(a)是表示從斜向方向觀察樹脂密封型半導體裝置200E的背面210c時的斜視圖,圖22(b)是散熱扇500的斜視圖,圖22(c)是表示在主體210的上面210b安裝散熱扇500的狀態圖。FIG. 22 is an explanatory view showing a resin-sealed semiconductor device 200E according to the fifth embodiment. (a) of FIG. 22 is a perspective view when the back surface 210c of the resin-sealed semiconductor device 200E is viewed from an oblique direction, FIG. 22(b) is a perspective view of the heat dissipation fan 500, and FIG. 22(c) is a view of the main body 210. The state diagram of the heat sink fan 500 is installed on the upper 210b.

實施方式五的樹脂密封型半導體裝置200E,可以防止將散熱扇500安裝在主體210時的錯位。另外,在實施方式五的樹脂密封型半導體裝置200E中,設置有與實施方式四的樹脂密封型半導體裝置200D同樣的螺絲通過部(第一螺絲通過部300D及第二螺絲通過部400D)。In the resin-sealed semiconductor device 200E of the fifth embodiment, it is possible to prevent misalignment when the heat dissipation fan 500 is attached to the main body 210. Further, in the resin-sealed semiconductor device 200E of the fifth embodiment, the screw passing portion (the first screw passing portion 300D and the second screw passing portion 400D) similar to the resin-sealed type semiconductor device 200D of the fourth embodiment is provided.

如圖22所示,實施方式五的樹脂密封型半導體裝置200E,在主體210的背面210c的上端角部,設置有斷面為L字狀的防錯位用結合部291、292,在散熱扇500側,設置有與各個防錯位用結合部291、292結合的突起511、512。另外,在圖22中,對於與圖14相同的構成元素則標記相同的符號。As shown in FIG. 22, in the resin-sealed semiconductor device 200E of the fifth embodiment, the misalignment-preventing joint portions 291 and 292 having an L-shaped cross section are provided at the upper end corner portion of the back surface 210c of the main body 210. On the side, projections 511 and 512 which are coupled to the respective misalignment preventing joint portions 291 and 292 are provided. In FIG. 22, the same constituent elements as those in FIG. 14 are denoted by the same reference numerals.

另外,設置在主體210側的防錯位用結合部291、292與設置在散熱扇500側的突起511、512,在將散熱扇500安裝在主體210的背面210c或上面210b時,被設置為可以共用的位置關係。另外,在主體210的防錯位用結合部291、292與散熱扇500的突起511、512結合的狀態下,第一螺絲通過部300D的彎曲部352的中心Pc或第二螺絲通過部400D的貫通孔451的中心軸Pd,必然被預先設定為與散熱扇500的陰螺紋部500a的中心軸一致。Further, the misalignment prevention coupling portions 291 and 292 provided on the main body 210 side and the projections 511 and 512 provided on the side of the heat dissipation fan 500 are provided so as to be attached to the rear surface 210c or the upper surface 210b of the main body 210. Shared location relationship. Further, in a state in which the misalignment preventing coupling portions 291 and 292 of the main body 210 are coupled to the projections 511 and 512 of the heat radiating fan 500, the center Pc of the curved portion 352 of the first screw passing portion 300D or the second screw passing portion 400D is penetrated. The central axis Pd of the hole 451 is necessarily set in advance so as to coincide with the central axis of the female screw portion 500a of the heat dissipation fan 500.

在這樣的結構中,在將散熱扇500安裝在主體210的上面210b時,將散熱扇500或放在主體210上,使主體210的防錯位用結合部291、292與散熱扇500的突起511、512結合,通過螺絲600進行固定。另外,在將散熱扇500安裝在主體210的背面210c時,使散熱扇500的突起511、512成為主體210的上面210b側,使散熱扇500的突起511、512與主體210的防錯位用結合部291、292結合,並通過螺絲600進行固定。In such a configuration, when the heat dissipating fan 500 is mounted on the upper surface 210b of the main body 210, the heat dissipating fan 500 is placed on the main body 210, and the misalignment preventing portions 291, 292 of the main body 210 and the protrusion 511 of the heat dissipating fan 500 are provided. The 512 is combined and fixed by the screw 600. Further, when the heat dissipation fan 500 is attached to the back surface 210c of the main body 210, the projections 511 and 512 of the heat dissipation fan 500 are set to the upper surface 210b side of the main body 210, and the projections 511 and 512 of the heat dissipation fan 500 are combined with the misalignment prevention of the main body 210. The portions 291, 292 are combined and fixed by screws 600.

這樣,在將散熱扇500安裝在主體210的狀態時,由於散熱扇500的突起511、512與主體210的防錯位用結合部291、292結合,因而可以限制散熱扇500的活動。這樣,散熱扇500就不會出現錯位,可以長時間保持對於主體210的安裝狀態。As described above, when the heat radiating fan 500 is attached to the main body 210, the projections 511 and 512 of the heat radiating fan 500 are coupled to the misalignment preventing portions 291 and 292 of the main body 210, so that the movement of the cooling fan 500 can be restricted. Thus, the heat dissipation fan 500 does not appear to be misaligned, and the installation state for the main body 210 can be maintained for a long time.

在將散熱扇500安裝在主體210的上面210b時,第一螺絲通過部300D成為開口槽351,主體210的正面210d成為開口,因而可能出現螺絲600在正面210d側錯位的情況,另外,散熱扇500還可能從主體210脫落。但是,在實施方式五的樹脂密封型半導體裝置200E中,主體210上設置的防錯位用結合部291、292與散熱扇500的突起511、512為結合的結構,因而散熱扇500不會出現在主體210的正面210d錯位,散熱扇500也不會從主體210上脫落,因而可以長時間保持散熱扇500正確的安裝狀態。When the heat dissipating fan 500 is attached to the upper surface 210b of the main body 210, the first screw passing portion 300D becomes the opening groove 351, and the front surface 210d of the main body 210 becomes an opening, so that the screw 600 may be displaced on the front surface 210d side, and the cooling fan may be disposed. The 500 may also fall off from the main body 210. However, in the resin-sealed semiconductor device 200E of the fifth embodiment, the misalignment preventing coupling portions 291 and 292 provided on the main body 210 are combined with the projections 511 and 512 of the heat dissipation fan 500, so that the heat dissipation fan 500 does not appear in the structure. The front surface 210d of the main body 210 is displaced, and the heat dissipation fan 500 does not fall off from the main body 210, so that the heat dissipating fan 500 can be properly mounted for a long time.

另外,設置在主體210上的防錯位用結合部291、292與設置在散熱扇500上的突起511、512,由於在將散熱扇500安裝在主體210上時對散熱扇500進行定位的功能,因而可以提高安裝散熱扇500時的可操作性。In addition, the misalignment prevention coupling portions 291 and 292 provided on the main body 210 and the projections 511 and 512 provided on the heat dissipation fan 500 function to position the heat dissipation fan 500 when the heat dissipation fan 500 is mounted on the main body 210. Therefore, the operability at the time of installing the heat dissipation fan 500 can be improved.

要在主體210的背面210c設置圖22所示的防錯位用結合部291、292,只需在第二模具820上形成與防錯位用結合部291、292對應的突出部(圖中未標示)即可。這時,由於防錯位用結合部291、292是圖22所示的斷面為L字形狀,因而突出部可以是對硬化的樹脂沒有牽連的形狀。因此,在樹脂硬化後,可以將第一模具810和第二模具820分離。In order to provide the misalignment preventing joint portions 291 and 292 shown in FIG. 22 on the back surface 210c of the main body 210, it is only necessary to form a projection portion corresponding to the misalignment preventing joint portions 291 and 292 on the second mold 820 (not shown). Just fine. At this time, since the joint portions 291 and 292 for preventing misalignment have an L-shaped cross section as shown in FIG. 22, the protruding portion may have a shape that is not implicated in the cured resin. Therefore, after the resin is hardened, the first mold 810 and the second mold 820 can be separated.

另外,關於設置在主體210上的防錯位用結合部291、292的形狀,並不限於圖22所示的斷面為L字形狀,但必須是在將樹脂密封用模具800取下時,第二模具820對於硬化的樹脂沒有牽連的形狀。另外,防錯位用結合部291、292的數量並不限於2個。In addition, the shape of the joints 291 and 292 for preventing misalignment provided on the main body 210 is not limited to the L-shaped cross section shown in FIG. 22, but it is necessary to remove the resin sealing mold 800. The two molds 820 have no shape to be implicated for the hardened resin. Further, the number of the misalignment preventing coupling portions 291 and 292 is not limited to two.

另外,設置防錯位用結合部291、292的位置也並不限於圖22所示的位置。但在具有正面210d作為開口的第一螺絲通過部300D的主體210中,在該主體210的上面210b上安裝散熱扇500時,為了避免散熱扇500在正面210d側錯位,應將防錯位用結合部291、292設置在防止散熱扇500在正面210d側錯位的位置。Further, the position at which the joint portions 291 and 292 for preventing the misalignment are not limited to the position shown in FIG. However, in the main body 210 of the first screw passing portion 300D having the front surface 210d as an opening, when the heat dissipating fan 500 is mounted on the upper surface 210b of the main body 210, in order to prevent the heat dissipating fan 500 from being displaced on the front surface 210d side, the misalignment prevention position should be combined. The portions 291 and 292 are provided at positions where the heat dissipation fan 500 is prevented from being displaced on the front surface 210d side.

另外,在實施方式五中,在將散熱扇500安裝在主體210的上面210b上時和安裝在背面210c上時,是將防錯位用結合部291、292共用的,但在將散熱扇500安裝在主體210的上面210b上時和安裝在背面210c上時,可以分別在主體210上設置專用的防錯位用結合部291、292。例如,防錯位用結合部291、292不僅是設置在主體210的背面210c的上端角部,也可以是設置在主體210的背面210c的下端角部。Further, in the fifth embodiment, when the heat radiating fan 500 is attached to the upper surface 210b of the main body 210 and to the rear surface 210c, the misalignment preventing joint portions 291 and 292 are shared, but the heat dissipating fan 500 is mounted. When the upper surface 210b of the main body 210 is attached to the rear surface 210c, dedicated misalignment preventing joint portions 291, 292 may be provided on the main body 210, respectively. For example, the misalignment preventing coupling portions 291 and 292 may be provided not only at the upper end corner portion of the rear surface 210c of the main body 210 but also at the lower end corner portion of the rear surface 210c of the main body 210.

另外,在主體210上形成的防錯位用結合部291、292,在圖22中,標示了在主體210上作為凹陷部設置的實例,而實際上也可以不是凹陷部,而是在主體210上設置為突起。這時,在散熱扇500上,則需要設置與該突起結合的凹陷部。In addition, the misalignment preventing joint portions 291, 292 formed on the main body 210, in FIG. 22, are illustrated as an example of being disposed as a recessed portion on the main body 210, but may not actually be a depressed portion but on the main body 210. Set to protrusion. At this time, on the heat radiating fan 500, it is necessary to provide a recessed portion that is combined with the projection.

另外,在實施方式五中,是以設置了與實施方式四的樹脂密封型半導體裝置200D同樣的螺絲通過部(第一螺絲通過部300D及第二螺絲通過部400D)時為例進行的說明,實際上也可以適用於實施方式一的樹脂密封型半導體裝置200A、實施方式二的樹脂密封型半導體裝置200B、以及實施方式三的樹脂密封型半導體裝置200C。但在實施方式二的樹脂密封型半導體裝置200B及實施方式三的樹脂密封型半導體裝置200C的情況時,由於第一螺絲通過部300及第二螺絲通過部400的中心不位於主體210的中心,因而在將散熱扇500安裝在主體210的上面210b上和背面210c上時,需要分別設置專用的防錯位用結合部291、292。In the fifth embodiment, the screw passing portion (the first screw passing portion 300D and the second screw passing portion 400D) similar to the resin sealing type semiconductor device 200D of the fourth embodiment is described as an example. Actually, it can be applied to the resin-sealed semiconductor device 200A of the first embodiment, the resin-sealed semiconductor device 200B of the second embodiment, and the resin-sealed semiconductor device 200C of the third embodiment. However, in the case of the resin-sealed semiconductor device 200B of the second embodiment and the resin-sealed semiconductor device 200C of the third embodiment, since the centers of the first screw passing portion 300 and the second screw passing portion 400 are not located at the center of the main body 210, Therefore, when the heat radiating fan 500 is mounted on the upper surface 210b and the back surface 210c of the main body 210, it is necessary to separately provide dedicated misalignment preventing joint portions 291 and 292.

另外,本發明並不限於上述的各實施方式,只要不脫離本發明的宗旨,還可以有各種各樣的變形方式。例如,可以是下述的變形方式。The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the invention. For example, it may be the following modification.

(1)在上述各實施方式中,第一螺絲通過部300及第二螺絲通過部400(在實施方式四中為第一螺絲通過部300D及第二螺絲通過部400D),都是由樹脂密封用模具700(在實施方式四中為樹脂密封用模具800)形成的,實際上也可以是通過鑽頭等開孔用機器形成。例如,如以往的樹脂密封型半導體裝置900(參照圖24)那樣,在通過樹脂密封工程在主體930上設置散熱扇安裝用的螺絲過孔H(參照圖24)時,可以通過鑽頭等開孔機器形成與該螺絲過孔H(水準方向的螺絲過孔)正交的垂直方向的螺絲過孔。(1) In the above embodiments, the first screw passing portion 300 and the second screw passing portion 400 (the first screw passing portion 300D and the second screw passing portion 400D in the fourth embodiment) are sealed by a resin. The mold 700 (the resin sealing mold 800 in the fourth embodiment) may be formed by a machine for drilling a drill or the like. For example, when a screw hole H for mounting a heat dissipating fan (see FIG. 24) is provided in the main body 930 by a resin sealing process, the resin sealing type semiconductor device 900 (see FIG. 24) can be opened by a drill or the like. The machine forms a screw hole in the vertical direction orthogonal to the screw hole H (the screw hole in the horizontal direction).

圖23是表示通過鑽頭等開孔用機器形成作為螺絲通過部的螺絲過孔時的樹脂密封型半導體裝置200F的結構的示意圖。如圖23所示,樹脂密封型半導體裝置200F,在主體210上,設置有作為例如實施方式一~實施方式三的第一螺絲通過部300的水準方向的螺絲過孔H1,同時,設置有作為例如實施方式一~實施方式三的第二螺絲通過部400的垂直方向的螺絲過孔H2。另外,在實施方式四中,第二螺絲通過部400D,也可以通過開孔用機器形成。FIG. 23 is a schematic view showing a configuration of the resin sealing type semiconductor device 200F when a screw through hole as a screw passing portion is formed by a drilling machine such as a drill. As shown in FIG. 23, the resin sealing type semiconductor device 200F is provided with a screw through hole H1 in the horizontal direction of the first screw passing portion 300 of the first to third embodiments, for example, as the main body 210. For example, the second screw of the first embodiment to the third embodiment passes through the screw through hole H2 in the vertical direction of the portion 400. Further, in the fourth embodiment, the second screw passing portion 400D may be formed by an opening machine.

這樣,在設置2個螺絲過孔H1、H2時,例如,如以往的樹脂密封型半導體裝置900(參照圖24)那樣,當已經通過樹脂密封工程設置了1個螺絲過孔H(水準方向的螺絲過孔H1)時,通過鑽頭等形成與該水準方向的螺絲過孔H1正交的垂直方向的螺絲過孔H2。另外,在樹脂密封工程中,也可以不設置任何螺絲過孔,而是在樹脂密封工程結束的階段,通過鑽頭等重新設置水準方向的螺絲過孔H1與垂直方向的螺絲過孔H2。When the two screw via holes H1 and H2 are provided, for example, as in the conventional resin sealing type semiconductor device 900 (see FIG. 24), one screw via hole H has been provided by the resin sealing process (in the horizontal direction) In the case of the screw through hole H1), the screw through hole H2 in the vertical direction orthogonal to the screw through hole H1 in the horizontal direction is formed by a drill or the like. Further, in the resin sealing process, the screw through hole H1 in the horizontal direction and the screw through hole H2 in the vertical direction may be newly set by the drill or the like at the end of the resin sealing process.

(2)在上述的實施方式一及實施方式四中,作為樹脂密封型半導體裝置,是使用單列直插橋式二極體對本發明的樹脂密封型半導體裝置進行的說明,在上述的實施方式二中,是使用具有2個半導體元件的樹脂密封型半導體裝置對本發明的樹脂密封型半導體裝置進行的說明,在上述的實施方式三中,是使用具有3端子型半導體元件的樹脂密封型半導體裝置對本發明的樹脂密封型半導體裝置進行的說明,但實際上本發明並不以這些樹脂密封型半導體裝置為限,也可以適用於其它的樹脂密封型半導體裝置。(2) In the first embodiment and the fourth embodiment, the resin-sealed semiconductor device of the present invention is described as a resin-sealed semiconductor device using a single-row in-line bridge diode, and in the second embodiment described above The resin-sealed semiconductor device of the present invention is described using a resin-sealed semiconductor device having two semiconductor elements. In the third embodiment, a resin-sealed semiconductor device having a three-terminal type semiconductor device is used. Although the resin sealing type semiconductor device of the invention has been described, the present invention is not limited to these resin sealing type semiconductor devices, and can be applied to other resin sealing type semiconductor devices.

(3)在上述的實施方式一及實施方式四中,是使用具有4條外部導線的樹脂密封型半導體裝置對本發明的樹脂密封型半導體裝置進行的說明,在上述的實施方式二及實施方式三中,是使用具有3條外部導線的樹脂密封型半導體裝置對本發明的樹脂密封型半導體裝置進行的說明,但實際上本發明並不以這些樹脂密封型半導體裝置為限,還可以適用於具有2條或5條以上的外部導線的樹脂密封型半導體裝置。(3) In the above-described first and fourth embodiments, the resin-sealed semiconductor device of the present invention is described using a resin-sealed semiconductor device having four external wires, and the second and third embodiments described above In the resin-sealed semiconductor device of the present invention, a resin-sealed semiconductor device having three external wires is used. However, the present invention is not limited to these resin-sealed semiconductor devices, and may be applied to have 2 A resin-sealed type semiconductor device of strips or five or more external leads.

(4)在上述的各實施方式中,作為接合連接端子,是使用由板狀金屬部件製作的接合連接端子,但本發明並不以此為限,也可以使用線狀接合連接端子作為接合連接端子。這時,半導體元件與第二外部導線的連接可以使用線接合的手法進行連接。(4) In the above embodiments, the joint connection terminal is a joint connection terminal made of a plate-shaped metal member. However, the present invention is not limited thereto, and a wire joint connection terminal may be used as the joint connection. Terminal. At this time, the connection of the semiconductor element and the second external lead can be connected using a wire bonding method.

(5)在實施方式一中說明的樹脂密封用模具700,其第一模具710的第一突出部712及第二模具720的第二突出部722的形狀,並不限於圖8及圖9所示的形狀。即,第一模具710的第一突出部712及第二模具720的第二突出部722的形狀,只要是在通過樹脂密封可以在主體210上形成上述實施方式中說明的第一螺絲通過部300和第二螺絲通過部400,且,在樹脂硬化後將第一模具710及第二模具720分別沿其取下的方向取下時,只要是對於硬化的樹脂沒有牽連的形狀即可。(5) In the resin sealing mold 700 described in the first embodiment, the shape of the first protruding portion 712 of the first die 710 and the second protruding portion 722 of the second die 720 is not limited to those of FIGS. 8 and 9 . The shape shown. That is, the shape of the first protruding portion 712 of the first mold 710 and the second protruding portion 722 of the second mold 720 may be formed on the main body 210 by the resin sealing to form the first screw passing portion 300 explained in the above embodiment. And the second screw passing portion 400, and when the first mold 710 and the second mold 720 are respectively removed in the direction in which the resin is cured, the shape is not implicated in the cured resin.

同樣,在實施方式四中說明的樹脂密封用模具800,其第一模具810的第一突出部812及第二模具820的第二突出部822的形狀,也並不限於圖19及圖20所示的形狀。Similarly, in the resin sealing mold 800 described in the fourth embodiment, the shapes of the first protruding portion 812 of the first die 810 and the second protruding portion 822 of the second die 820 are not limited to those of FIGS. 19 and 20 . The shape shown.

100A,100B,100C,100D...引線架100A, 100B, 100C, 100D. . . Lead frame

110...半導體元件安裝部110. . . Semiconductor component mounting

111...第一晶粒座111. . . First die holder

111d,111e,112d,112e,180b...彎曲平面部111d, 111e, 112d, 112e, 180b. . . Curved plane

112...第二晶粒座112. . . Second die holder

121~124...外部導線(第一外部導線及第二外部導線)121~124. . . External wire (first outer wire and second outer wire)

130...系杆130. . . Tie

140...輔助杆140. . . Auxiliary rod

151~154,190...半導體元件151~154,190. . . Semiconductor component

200A,200B,200C,200D,200E,200F...樹脂密封型半導體裝置200A, 200B, 200C, 200D, 200E, 200F. . . Resin sealed semiconductor device

210...主體210. . . main body

210a...主體的下面210a. . . Under the main body

210b...主體的上面210b. . . Top of the body

210c...主體的背面210c. . . Back of the main body

210d...主體的正面210d. . . Front of the main body

210e...主體的側面210e. . . Side of the body

291,292...防錯位用結合部291,292. . . Anti-dislocation joint

300,300D...第一螺絲通過部300,300D. . . First screw passage

310...第一U字狀空間310. . . First U-shaped space

311,321,352,411,421...彎曲部311,321,352,411,421. . . Bending

320...第二U字狀空間320. . . Second U-shaped space

351...開口槽351. . . Open slot

400,400D...第二螺絲通過部400,400D. . . Second screw passage

410...第三U字狀空間410. . . Third U-shaped space

420...第四U字狀空間420. . . Fourth U-shaped space

451...貫通孔451. . . Through hole

500...散熱扇500. . . Cooling fan

500a...陰螺紋部500a. . . Female thread

510...散熱扇側安裝面510. . . Cooling fan side mounting surface

700,800...樹脂密封用模具700,800. . . Resin sealing mold

710,810...第一模具710,810. . . First mold

711,721,811,821...模具腔體711,721,811,821. . . Mold cavity

712,812...第一突出部712,812. . . First protrusion

712a...平坦面712a. . . Flat surface

712b...上端彎曲面712b. . . Upper curved surface

712c...先端彎曲面(第一先端彎曲面)712c. . . Tip curved surface (first tip curved surface)

712d...傾斜面(第一傾斜面)712d. . . Inclined surface (first inclined surface)

714,724,814,824...下面成形面714,724,814,824. . . Forming surface below

720,820...第二模具720,820. . . Second mold

722,822...第二突出部722,822. . . Second protrusion

722a...平坦面722a. . . Flat surface

722b...下端彎曲面722b. . . Bottom curved surface

722c...先端彎曲面(第二先端彎曲面)722c. . . Tip curved surface (second leading curved surface)

722d...傾斜面(第二傾斜面)722d. . . Inclined surface (second inclined surface)

812a...彎曲面812a. . . Curved surface

813...輔助突出部813. . . Auxiliary protrusion

H1,H2...螺絲孔H1, H2. . . screw hole

Pa...第一插通路徑Wa的中心軸Pa. . . The central axis of the first insertion path Wa

Pb...第二插通路徑Wb的中心軸Pb. . . Central axis of the second insertion path Wb

Pc...彎曲部的中心Pc. . . Center of the bend

Pd...貫通孔的中心軸Pd. . . Central axis of the through hole

S,S1,S2...空間部S, S1, S2. . . Space department

Wa...第一插通路徑Wa. . . First insertion path

Wb...第二插通路徑Wb. . . Second insertion path

圖1是表示實施方式一的樹脂密封型半導體裝置200A的結構的說明圖;1 is an explanatory view showing a configuration of a resin-sealed semiconductor device 200A according to the first embodiment;

圖2是表示實施方式一的樹脂密封型半導體裝置200A的製造工程的說明圖;FIG. 2 is an explanatory view showing a manufacturing process of the resin-sealed semiconductor device 200A according to the first embodiment;

圖3是表示第一晶粒座111及第二晶粒座112的放大圖;3 is an enlarged view showing the first die pad 111 and the second die pad 112;

圖4是表示第一螺絲通過部300及第二螺絲通過部400的說明圖;4 is an explanatory view showing the first screw passing portion 300 and the second screw passing portion 400;

圖5是表示從各個方向觀察圖4所述的第一螺絲通過部300及第二螺絲通過部400的說明圖;FIG. 5 is an explanatory view showing the first screw passing portion 300 and the second screw passing portion 400 illustrated in FIG. 4 as seen from various directions;

圖6是表示在主體210的背面210c上安裝散熱扇500的說明圖;FIG. 6 is an explanatory view showing that the heat dissipation fan 500 is attached to the back surface 210c of the main body 210;

圖7是表示在主體210的上面210b上安裝散熱扇500的說明圖;FIG. 7 is an explanatory view showing that the heat dissipation fan 500 is mounted on the upper surface 210b of the main body 210;

圖8是表示用於製造實施方式一的樹脂密封型半導體裝置200A的樹脂密封用模具700的說明圖;FIG. 8 is an explanatory view showing a resin sealing mold 700 for manufacturing the resin-sealed semiconductor device 200A of the first embodiment;

圖9是表示用於製造實施方式一的樹脂密封型半導體裝置200A的樹脂密封用模具700的說明圖;FIG. 9 is an explanatory view showing a resin sealing mold 700 for manufacturing the resin-sealed semiconductor device 200A of the first embodiment;

圖10是表示第一模具710與第二模具720對面設置狀態下的第一突出部712與第二突出部722的關係的放大斷面圖;FIG. 10 is an enlarged cross-sectional view showing the relationship between the first protruding portion 712 and the second protruding portion 722 in a state in which the first mold 710 and the second mold 720 are disposed opposite to each other;

圖11是表示實施方式二的樹脂密封型半導體裝置200B的說明圖;FIG. 11 is an explanatory view showing a resin-sealed semiconductor device 200B according to the second embodiment;

圖12是表示在實施方式二的樹脂密封型半導體裝置200B上安裝散熱扇500的狀態的說明圖;FIG. 12 is an explanatory view showing a state in which the heat dissipation fan 500 is attached to the resin-sealed semiconductor device 200B of the second embodiment;

圖13是表示實施方式三的樹脂密封型半導體裝置200C的說明圖;FIG. 13 is an explanatory view showing a resin-sealed semiconductor device 200C according to the third embodiment;

圖14是表示實施方式四的樹脂密封型半導體裝置200D的結構的說明圖;FIG. 14 is an explanatory view showing a configuration of a resin-sealed semiconductor device 200D according to the fourth embodiment;

圖15是表示從各個方向觀察實施方式四的樹脂密封型半導體裝置200D的第一螺絲通過部300D及第二螺絲通過部400D的說明圖;15 is an explanatory view showing the first screw passing portion 300D and the second screw passing portion 400D of the resin-sealed type semiconductor device 200D of the fourth embodiment as seen from the respective directions;

圖16是表示實施方式四的樹脂密封型半導體裝置200D的引線架100D的第一晶粒座111及第二晶粒座112的說明圖;FIG. 16 is an explanatory view showing the first die pad 111 and the second die pad 112 of the lead frame 100D of the resin-sealed semiconductor device 200D according to the fourth embodiment;

圖17是表示在實施方式四的樹脂密封型半導體裝置200D的主體210的背面210c上安裝散熱扇500的狀態的說明圖;FIG. 17 is an explanatory view showing a state in which the heat dissipation fan 500 is attached to the back surface 210c of the main body 210 of the resin-sealed semiconductor device 200D of the fourth embodiment;

圖18是表示在實施方式四的樹脂密封型半導體裝置200D的主體210的上面210b上安裝散熱扇500的狀態的說明圖;FIG. 18 is an explanatory view showing a state in which the heat dissipation fan 500 is attached to the upper surface 210b of the main body 210 of the resin-sealed semiconductor device 200D of the fourth embodiment;

圖19是表示用於製造實施方式四的樹脂密封型半導體裝置200D的樹脂密封用模具800的說明圖;FIG. 19 is an explanatory view showing a resin sealing mold 800 for manufacturing the resin-sealed semiconductor device 200D of the fourth embodiment;

圖20是表示用於製造實施方式四的樹脂密封型半導體裝置200D的樹脂密封用模具800的說明圖;FIG. 20 is an explanatory view showing a resin sealing mold 800 for manufacturing the resin-sealed semiconductor device 200D of the fourth embodiment;

圖21是表示第一模具810與第二模具820在對面設置的狀態下第一突出部812與第二突出部822的關係的放大斷面圖;21 is an enlarged cross-sectional view showing the relationship between the first protruding portion 812 and the second protruding portion 822 in a state where the first mold 810 and the second mold 820 are disposed opposite each other;

圖22是表示實施方式五的樹脂密封型半導體裝置200E的說明圖;FIG. 22 is an explanatory view showing a resin-sealed semiconductor device 200E according to the fifth embodiment;

圖23是表示通過鑽頭等開孔機器形成作為螺絲通過部的螺絲過孔時樹脂密封型半導體裝置200F的結構的示意圖;FIG. 23 is a schematic diagram showing a configuration of a resin-sealed type semiconductor device 200F when a screw via hole as a screw passing portion is formed by a drilling machine such as a drill;

圖24是表示非專利文獻1公開的以往的樹脂密封型半導體裝置900的斜視圖;FIG. 24 is a perspective view showing a conventional resin sealing type semiconductor device 900 disclosed in Non-Patent Document 1;

圖25是表示在圖24所示的以往樹脂密封型半導體裝置900上安裝散熱扇980的狀態的示意圖。FIG. 25 is a schematic view showing a state in which the heat dissipation fan 980 is attached to the conventional resin-sealed semiconductor device 900 shown in FIG.

121~124...外部導線(第一外部導線及第二外部導線)121~124. . . External wire (first outer wire and second outer wire)

200A...樹脂密封型半導體裝置200A. . . Resin sealed semiconductor device

210...主體210. . . main body

210a...主體的下面210a. . . Under the main body

210b...主體的上面210b. . . Top of the body

210d...主體的正面210d. . . Front of the main body

210e...主體的側面210e. . . Side of the body

300...第一螺絲通過部300. . . First screw passage

400...第二螺絲通過部400. . . Second screw passage

Claims (19)

一種樹脂密封型半導體裝置,其特徵在於:具有一個把半導體元件與半導體元件安裝部被樹脂密封的主體,以及從所述主體向外部沿預定方向伸出的外部導線,當所述外部導線伸出的面為所述主體的下面、其反面為所述主體的上面、所述下面與所述上面之間可以安裝散熱扇的面為所述主體的背面、其反面為所述主體的正面時,在所述主體的不同面上,設有將所述散熱扇安裝在所述背面或所述上面的第一螺絲通過部及第二螺絲通過部。 A resin-sealed type semiconductor device having a body in which a semiconductor element and a semiconductor element mounting portion are resin-sealed, and an external wire extending from the body to the outside in a predetermined direction, when the external wire protrudes The surface of the main body is the lower surface of the main body, the reverse surface of which is the upper surface of the main body, and the surface on which the heat dissipating fan can be mounted between the lower surface and the upper surface is the back surface of the main body, and the reverse side thereof is the front surface of the main body. A first screw passing portion and a second screw passing portion for mounting the heat dissipating fan on the back surface or the upper surface are provided on different faces of the main body. 如申請專利範圍第1項所述的樹脂密封型半導體裝置,其特徵在於:所述半導體元件安裝部,由用於安裝所述半導體元件的板狀的晶粒座構成,所述晶粒座具有裝載所述半導體元件的裝載部、以及使該裝載部的所述上面側的端部向所述正面側彎曲形成的彎曲平面部。 The resin-sealed semiconductor device according to claim 1, wherein the semiconductor element mounting portion is formed of a plate-like die pad for mounting the semiconductor element, and the die pad has A loading portion for loading the semiconductor element and a curved flat portion formed by bending an end portion of the upper surface side of the loading portion toward the front surface side. 如申請專利範圍第2項所述的樹脂密封型半導體裝置,其特徵在於:所述彎曲平面部的先端部,被形成在比所述正面與所述背面之間的中間位置更靠近所述正面側的位置。 The resin-sealed type semiconductor device according to claim 2, wherein the tip end portion of the curved flat portion is formed closer to the front surface than an intermediate portion between the front surface and the back surface Side position. 如申請專利範圍第1~3項任一項所述的樹脂密封型半導體裝置,其特徵在於:所述主體上設有用於防止所述散熱扇的安裝位置錯位的防錯位用結合部。 The resin-sealed type semiconductor device according to any one of claims 1 to 3, wherein the main body is provided with a misalignment preventing joint for preventing a position at which the heat radiating fan is displaced. 如申請專利範圍第1~3項任一項所述的樹脂密封型半導體 裝置,其特徵在於:由所述第一螺絲通過部及所述第二螺絲通過部形成用於穿過螺絲的第一插通路徑及第二插通路徑,所述第一插通路徑及所述第二插通路徑被交又設置。 The resin-sealed semiconductor according to any one of claims 1 to 3 The device is characterized in that a first insertion path and a second insertion path for passing through the screw are formed by the first screw passing portion and the second screw passing portion, the first insertion path and the The second plug-in path is set and handed over. 如申請專利範圍第1~3項任一項所述的樹脂密封型半導體裝置,其特徵在於:所述第一螺絲通過部及所述第二螺絲通過部,是通過用於形成該第一螺絲通過部的具有第一突出部的第一模具及用於形成該第二螺絲通過部的具有第二突出部的第二模具構成的樹脂密封用模具形成的。 The resin-sealed semiconductor device according to any one of claims 1 to 3, wherein the first screw passing portion and the second screw passing portion are formed by forming the first screw It is formed by a resin sealing mold composed of a first mold having a first protruding portion and a second mold having a second protruding portion for forming the second screw passing portion. 如申請專利範圍第6項所述的樹脂密封型半導體裝置,其特徵在於:所述第一螺絲通過部由第一U字狀空間及與該第一U字狀空間共用空間的第二U字狀空間構成,所述第一U字狀空間為在所述正面具有呈半圓形的彎曲部及開口部的U字狀,所述彎曲部位於所述正面的所述上面側的端邊與所述下面側的端邊之間,同時,所述開口部位於所述正面的所述下面側的端邊,該第一U字狀空間被形成至面向所述背面的預定位置,所述第二U字狀空間為在所述下面具有呈半圓形的彎曲部及開口部的U字狀,所述彎曲部位於所述下面的所述正面側的端邊與所述背面側的端邊之間,同時,所述開口部位於所述下面的所述正面側的端邊,該第二U字狀空間被形成至面向所述上面的預定位置,所述第二螺絲通過部由第三U字狀空間及與該第三U字狀空間共用空間的第四U字狀空間構成,所述第三U字狀空間為在所述背面具有呈半圓形的彎曲部及 開口部的U字狀,所述彎曲部位於所述背面的所述上面側的端邊與所述下面側的端邊之間,同時,所述開口部位於所述背面的所述上面側的端邊,該第三U字狀空間被形成至面向所述正面的預定位置,所述第四U字狀空間為在所述上面具有呈半圓形的彎曲部及開口部的U字狀,所述彎曲部位於所述上面的所述正面側的端邊與所述背面側的端邊之間,同時,所述開口部位於所述上面的所述北面側的端邊,該第四U字狀空間被形成至面向所述下面的預定位置,所述第一螺絲通過部及所述第二螺絲通過部共用空間,在觀察所述上面或所述下面時,由所述第二U字狀空間的彎曲部與所述第四U字狀空間的彎曲部形成呈圓形的所述第一插通路徑,在觀察所述正面或所述背面時,由所述第一U字狀空間的彎曲部與所述第三U字狀空間的彎曲部形成呈圓形的所述第二插通路徑。 The resin-sealed type semiconductor device according to claim 6, wherein the first screw passing portion is formed by a first U-shaped space and a second U-shaped space sharing the space with the first U-shaped space. The first U-shaped space has a U-shape having a semicircular curved portion and an opening portion on the front surface, and the curved portion is located at an end side of the upper surface side of the front surface Between the end sides of the lower side, and at the same time, the opening portion is located at an end side of the lower surface side of the front surface, and the first U-shaped space is formed to a predetermined position facing the back surface, the first The U-shaped space has a U-shape having a semicircular curved portion and an opening portion on the lower surface, and the curved portion is located on the front side end side and the back side end side of the lower surface Meanwhile, at the same time, the opening portion is located at an end side of the lower surface of the lower surface, the second U-shaped space is formed to a predetermined position facing the upper surface, and the second screw passage portion is formed by a third portion a U-shaped space and a fourth U-shaped space sharing the space with the third U-shaped space, The third U-shaped space has a semi-circular curved portion on the back surface and a U-shape of the opening portion between the end side of the upper surface side of the back surface and the end side of the lower surface side, and the opening portion is located on the upper surface side of the back surface The third U-shaped space is formed at a predetermined position facing the front surface, and the fourth U-shaped space has a U-shape having a semicircular curved portion and an opening portion on the upper surface. The curved portion is located between the end side of the upper front side and the end side of the back side, and at the same time, the opening portion is located at an end side of the upper side of the upper side, the fourth U a word space is formed to a predetermined position facing the lower surface, the first screw passage portion and the second screw passage portion share a space, and when the upper surface or the lower surface is observed, the second U word The curved portion of the space and the curved portion of the fourth U-shaped space form the first insertion path that is circular, and when the front surface or the back surface is observed, the first U-shaped space The curved portion and the curved portion of the third U-shaped space form the second insertion path that is circular 如申請專利範圍第7項所述的樹脂密封型半導體裝置,其特徵在於:在將所述散熱扇安裝在所述背面的狀態時,所述螺絲由所述第一U字狀空間的彎曲部和所述第三U字狀空間的彎曲部定位,在將所述散熱扇安裝在所述上面的狀態時,所述螺絲由所述第二U字狀空間的彎曲部和所述第四U字狀空間的彎曲部定位。 The resin-sealed type semiconductor device according to claim 7, wherein the screw is bent by the first U-shaped space when the heat dissipating fan is attached to the back surface. Positioning with a curved portion of the third U-shaped space, the screw is bent by the second U-shaped space and the fourth U when the heat dissipating fan is mounted on the upper surface The curved portion of the word space is positioned. 如申請專利範圍第6項所述的樹脂密封型半導體裝置,其特徵在於:所述第一螺絲通過部作為開口槽是通過對所述正面從所述上面至所述下面進行開槽而形成的,該開口槽是在所述上面具有呈半圓形的彎曲部與開口部的U字狀,所述彎曲部位於所述上面的 所述正面側的端邊與所述背面側的端邊之間,同時,所述開口部位於所述上面的所述正面側的端邊,所述彎曲部及所述開口部被形成至所述正面,該彎曲部被作為所述第一插通路徑使用,所述第二螺絲通過部被形成為貫通從所述彎曲面至所述背面的貫通孔,該貫通孔被作為所述第二插通路徑使用,在觀察所述正面或所述背面時呈圓形。 The resin-sealed type semiconductor device according to claim 6, wherein the first screw passage portion is formed as an open groove by grooving the front surface from the upper surface to the lower surface. The open groove has a U-shape having a semicircular curved portion and an opening portion on the upper surface, and the curved portion is located on the upper surface Between the end side of the front side and the end side of the back side, and at the same time, the opening is located at the front side of the upper surface, and the curved portion and the opening are formed to In the front surface, the curved portion is used as the first insertion path, and the second screw passage portion is formed to penetrate a through hole from the curved surface to the back surface, and the through hole is used as the second The insertion path is used to be circular when observing the front side or the back side. 如申請專利範圍第1~3項任一項所述的樹脂密封型半導體裝置,其特徵在於:在所述第一螺絲通過部及所述第二螺絲通過部中,至少一個螺絲通過部是通過開孔用機器在所述主體上形成的。 The resin-sealed semiconductor device according to any one of claims 1 to 3, wherein at least one of the first screw passing portion and the second screw passing portion passes The opening is formed on the body by a machine. 一種用於製造樹脂密封型半導體裝置的樹脂密封用模具,其特徵在於:所述樹脂密封型半導體裝置具有通過樹脂將半導體元件和半導體元件安裝部密封的主體,以及,從所述主體向外部沿預定方向伸出的外部導線,設所述外部導線伸出的為所述主體的下面、其反面為所述主體的上面、所述下面與所述上面之間可以安裝散熱扇的面為所述主體的背面、其反面為所述主體的正面時,用於將所述散熱扇安裝在所述背面或所述上面的第一螺絲通過部及第二螺絲通過部,被設置在所述主體的不同的面,所述樹脂密封用模具,具有在將所述主體分為所述正面側及所述背面側時,與所述正面側對應的第一模具及與所述背面側對應的第二模具,所述第一模具的模具腔體上設有用於形成所述第一螺絲通過部的第一突出部,所述第二模具的模具腔體上設有用於形成所述第二螺絲通過部的第二突出部,所述第一突出部及所述第二突出部,在向所述第一模具的模具 腔體的開口面與第二模具的模具腔體的開口面對接形成的空間中注入樹脂形成所述主體時,為可以在該主體上形成所述第一螺絲通過部及所述第二螺絲通過部的形狀。 A resin sealing mold for manufacturing a resin-sealed semiconductor device, characterized in that the resin-sealed semiconductor device has a body that seals a semiconductor element and a semiconductor element mounting portion by a resin, and from the body to the outside An external wire extending in a predetermined direction, wherein the outer wire protrudes from a lower surface of the main body, the reverse surface thereof is an upper surface of the main body, and a surface on which a heat dissipating fan can be mounted between the lower surface and the upper surface is When the back surface of the main body and the reverse side thereof are the front surface of the main body, the first screw passing portion and the second screw passing portion for mounting the heat dissipating fan on the back surface or the upper surface are provided in the main body In the different surface, the resin sealing mold has a first mold corresponding to the front side and a second corresponding to the back side when the main body is divided into the front side and the back side a mold, a mold cavity of the first mold is provided with a first protrusion for forming the first screw passage portion, and a mold cavity of the second mold is provided for forming the mold Two screws through the second projection portion, the first portion and the second protruding portion protruding in a mold to the first mold The first screw passing portion and the second screw may be formed on the main body when the opening is formed in the space formed by the opening surface of the cavity facing the opening of the mold cavity of the second mold to form the main body. Pass the shape of the part. 如申請專利範圍第11項所述的樹脂密封用模具,其特徵在於:在所述第一模具的模具腔體及所述第二模具的模具腔體各自內部的各個面中,形成所述主體的下面的面為下面成形面,在使該下面成形面水準且朝向上方放置所述第一模具及所述第二模具的狀態下,從所述第一模具的模具腔體的開口面及所述第二模具的模具腔體的開口面分別觀察所述第一模具的模具腔體內部及所述第二模具的模具腔體內部時,設左右方向為x軸、前後方向為y軸、上下方向為z軸,所述第一突出部在該第一突出部的下端形成為平坦面,同時,在該第一突出部的先端,從所述第一突出部的下端沿z軸至預定位置,形成有呈半圓形的第一先端彎曲面,在所述第一突出部的上端,從該第一突出部的基部沿y軸至預定的位置,形成有呈半圓形的上端彎曲面,在所述第一先端彎曲面與所述上端彎曲面之間,形成有以預定角度傾斜的第一傾斜面,所述第二突出部在該第二突出部的上端形成有平坦面,同時,在該第二突出部的先端,在從該第二突出部的上端側沿z軸至預定位置,形成有呈半圓形的第二先端彎曲面,在所述第二突出部的下端,在從該第二突出部的基部沿y軸至預定的位置,形成有呈半圓形的下端彎曲面,在所述第二先端彎曲面與所述下端彎曲面之間,形成有具有與所述第一傾斜面對應的形狀的第二傾斜面。 The resin sealing mold according to claim 11, wherein the main body is formed in each of the inner surfaces of the mold cavity of the first mold and the mold cavity of the second mold. The lower surface of the mold is the lower molding surface, and the opening surface of the mold cavity of the first mold is placed in a state where the lower molding surface is leveled and the first mold and the second mold are placed upward. When the opening surface of the mold cavity of the second mold is respectively observed inside the mold cavity of the first mold and the inside of the mold cavity of the second mold, the left-right direction is the x-axis, the front-rear direction is the y-axis, and the upper and lower sides are The direction is a z-axis, the first protrusion is formed as a flat surface at a lower end of the first protrusion, and at a tip end of the first protrusion, from a lower end of the first protrusion along a z-axis to a predetermined position Forming a semi-circular first leading end curved surface, and at an upper end of the first protruding portion, a semi-circular upper end curved surface is formed from a base portion of the first protruding portion along a y-axis to a predetermined position At the first tip end curved surface and the Between the upper end curved faces, a first inclined surface inclined at a predetermined angle is formed, the second protruding portion is formed with a flat surface at an upper end of the second protruding portion, and at the apex of the second protruding portion, at the The upper end side of the second protrusion is formed along the z-axis to a predetermined position, and is formed with a semi-circular second tip end curved surface at a lower end of the second protrusion portion at a y-axis from a base portion of the second protrusion portion a predetermined lower end curved surface is formed, and between the second front end curved surface and the lower end curved surface, a second slope having a shape corresponding to the first inclined surface is formed surface. 如申請專利範圍第11項所述的樹脂密封用模具,其特徵在於:在所述第一模具的模具腔體及所述第二模具的模具腔體各自內部的各個面中,形成所述主體的下面的面為下面成形面,在使 該下面成形面水準且朝向上方放置所述第一模具及所述第二模具的狀態下,從所述第一模具的模具腔體的開口面及所述第二模具的模具腔體的開口面分別觀察所述第一模具的模具腔體內部及所述第二模具的模具腔體內部時,設左右方向為x軸、前後方向為y軸、上下方向為z軸,所述第一突出部在該第一突出部的先端,沿z軸從所述第一模具的內部的上端至下端形成有呈半圓形的彎曲面,所述第二突出部形成有沿y軸方向,且向在所述第一突出部的先端形成的彎曲面突出的圓柱狀突出部。 The resin sealing mold according to claim 11, wherein the main body is formed in each of the inner surfaces of the mold cavity of the first mold and the mold cavity of the second mold. The lower surface is the lower forming surface, The opening surface of the mold cavity of the first mold and the opening surface of the mold cavity of the second mold in a state where the lower molding surface is horizontal and the first mold and the second mold are placed upward When the inside of the mold cavity of the first mold and the inside of the mold cavity of the second mold are respectively observed, the left and right directions are the x-axis, the front-rear direction is the y-axis, and the vertical direction is the z-axis, and the first protrusion is At a tip end of the first protrusion, a semicircular curved surface is formed from an upper end to a lower end of the inner portion of the first mold along the z-axis, and the second protrusion is formed along the y-axis direction and is oriented a cylindrical protrusion protruding from a curved surface formed by the tip end of the first protrusion. 如申請專利範圍第11項所述的樹脂密封用模具,其特徵在於:在所述第一突出部的先端形成的彎曲面上,沿y軸方向設置有突出部,該突出部具有與所述圓柱狀突出部的圓柱先端面對應形狀的先端面。 The resin sealing mold according to claim 11, wherein a protruding portion is provided on a curved surface formed at a tip end of the first protruding portion in a y-axis direction, the protruding portion having the same The cylindrical leading end face of the cylindrical projection corresponds to the leading end face of the shape. 如申請專利範圍第11~14項任一項所述的樹脂密封用模具,其特徵在於:所述第二模具,具有形成防錯位用結合部的卡合成形部,所述防錯位用結合部,在將所述散熱扇安裝在所述主體的狀態下,用於防止所述散熱扇的位置錯位。 The resin sealing mold according to any one of the above-mentioned claims, wherein the second mold has a card-forming portion that forms a joint for preventing misalignment, and the joint for preventing misalignment In a state where the heat dissipation fan is mounted on the main body, the position of the heat dissipation fan is prevented from being displaced. 一種製造樹脂密封型半導體裝置的樹脂密封型半導體裝置的製造方法,其特徵在於:所述樹脂密封型半導體裝置,具有一個把半導體元件及半導體元件安裝部通過樹脂密封的主體、以及從所述主體向外部沿預定方向伸出的外部導線,當所述外部導線伸出的面為所述主體的下面、其反面為所述主體的上面、所述下面與所述上面之間可以安裝散熱扇的面為所述主體的背面、其反面為所述主體的正面時,所述主體的所述背面或所述上面分別設有將所述散熱扇安裝在所 述主體的第一螺絲通過部及第二螺絲通過部,所述樹脂密封型半導體裝置的製造方法,具有準備樹脂密封用模具的樹脂密封用模具準備工程,所述模具具有在將所述主體分為所述正面側及所述背面側時,與所述正面側的主體對應的第一模具及與所述背面側的主體對應的第二模具,所述第一模具的模具腔體上設有用於形成所述第一螺絲通過部的第一突出部,所述第二模具的模具腔體上設有用於形成所述第二螺絲通過部的第二突出部,所述第一突出部及所述第二突出部,在向所述第一模具的模具腔體的開口面與第二模具的模具腔體的開口面對接形成的空間中注入樹脂形成所述主體時,為可以在該主體上形成所述第一螺絲通過部及所述第二螺絲通過部的形狀;在所述半導體元件安裝部安裝所述半導體元件的半導體元件安裝工程;將包含所述半導體元件與所述半導體元件安裝部的預定範圍,通過所述樹脂密封用模具覆蓋後,向該樹脂密封用模型注入樹脂,將包含所述半導體元件與所述半導體元件安裝部的預定範圍以樹脂密封的樹脂密封工程。 A method of manufacturing a resin-sealed semiconductor device for manufacturing a resin-sealed semiconductor device, characterized in that the resin-sealed semiconductor device has a body in which a semiconductor element and a semiconductor element mounting portion are sealed by a resin, and a body from the body An external wire extending outward in a predetermined direction, wherein a surface of the outer wire protruding from the lower surface of the main body, a reverse surface thereof is an upper surface of the main body, and a heat dissipating fan may be installed between the lower surface and the upper surface When the surface is the back surface of the main body and the reverse side is the front surface of the main body, the rear surface or the upper surface of the main body is respectively provided with the heat dissipation fan installed therein The first screw passing portion and the second screw passing portion of the main body, the method for manufacturing a resin sealing type semiconductor device, comprising a resin sealing mold preparation process for preparing a resin sealing mold, wherein the mold has a body for dividing the main body In the case of the front side and the back side, a first mold corresponding to the front side main body and a second mold corresponding to the back side main body are provided on the mold cavity of the first mold a first protrusion forming the first screw passing portion, and a second protrusion portion for forming the second screw passing portion, the first protrusion portion and the The second protruding portion is formed by injecting a resin into a space formed by the opening face of the mold cavity of the first mold facing the opening of the mold cavity of the second mold to form the main body. Forming a shape of the first screw passing portion and the second screw passing portion; mounting a semiconductor element mounting work on the semiconductor element mounting portion; and including the semiconductor element The predetermined range of the semiconductor element mounting portion is covered with the resin sealing mold, and then the resin is injected into the resin sealing mold to seal the predetermined range of the semiconductor element and the semiconductor element mounting portion with a resin-sealed resin. engineering. 一種用於樹脂密封型半導體裝置的引線架,其特徵在於:所述樹脂密封型半導體裝置,具有一個把半導體元件及半導體元件安裝部通過樹脂密封的主體、以及從所述主體向外部沿預定方向伸出的外部導線,當所述外部導線伸出的面為所述主體的下面、其反面為所述主體的上面、所述下面與所述上面之間可以安裝散熱扇的面為所述主體的背面、其反面為所述主體的正面時,所述主體的所述背面或所述上面分別設有將所述散熱扇安裝在所述主體的第一螺絲通過部及第二螺絲通過部, 所述引線架,具有安裝所述半導體元件的板狀的晶粒座及所述外部導線,所述晶粒座具有裝載所述半導體元件的裝載部,以及,通過使該裝載部的所述上面側的端部向所述正面側彎曲形成的彎曲平面部。 A lead frame for a resin-sealed type semiconductor device, characterized in that the resin-sealed type semiconductor device has a body in which a semiconductor element and a semiconductor element mounting portion are sealed by a resin, and a predetermined direction from the body to the outside An external conductor extending, wherein the surface on which the outer conductor protrudes is the lower surface of the main body, the opposite surface of which is the upper surface of the main body, and the surface on which the heat dissipation fan can be mounted is the main body When the back surface and the reverse side thereof are the front surface of the main body, the back surface or the upper surface of the main body is respectively provided with a first screw passing portion and a second screw passing portion for mounting the heat dissipating fan on the main body. The lead frame having a plate-shaped die pad mounting the semiconductor element and the external lead, the die pad having a loading portion for loading the semiconductor component, and by passing the upper surface of the loading portion The end portion of the side is bent toward the front side to form a curved flat portion. 如申請專利範圍第17項所述的引線架,其特徵在於:所述彎曲平面部的先端,被形成在比所述正面與所述背面之間的中間位置更靠近所述正面側的位置。 The lead frame according to claim 17, wherein the tip end of the curved flat portion is formed at a position closer to the front side than an intermediate position between the front surface and the back surface. 一種與樹脂密封用模具一同使用製造樹脂密封型半導體裝置的引線架,其特徵在於:所述樹脂密封型半導體裝置,具有一個把半導體元件及半導體元件安裝部通過樹脂密封的主體、以及從所述主體向外部的沿預定方向伸出的外部導線,當所述外部導線伸出的面為所述主體的下面、其反面為所述主體的上面、所述下面與所述上面之間可以安裝散熱扇的面為所述主體的背面、其反面為所述主體的正面時,所述主體的所述背面或所述上面分別設有將所述散熱扇安裝在所述主體的第一螺絲通過部及第二螺絲通過部,所述樹脂密封用模具,具有將所述主體分為所述正面側及所述背面側時,與所述正面側的主體對應的第一模具及與所述背面側的主體對應的第二模具,所述第一模具的模具腔體上設有用於形成所述第一螺絲通過部的第一突出部,所述第二模具的模具腔體上設有用於形成所述第二螺絲通過部的第二突出部,所述第一突出部及所述第二突出部,在向所述第一模具的模具腔體的開口面與第二模具的模具腔體的開口面對接形成的空間中注入樹脂形成所述主體時,為可以在該主體上形成所述第一螺絲通過部及所述第二螺絲通過部的形狀,所述引線架,具有安裝半導體元件的板狀的晶粒座及所述外部 導線,在所述晶粒座上,形成有空間部,用於避免與所述樹脂密封用模具的所述第一模具的模具腔體上設置的所述第一突出部及所述第二模具的模具腔體上設置的所述第二突出部中的至少一個相抵接。 A lead frame for manufacturing a resin-sealed semiconductor device together with a mold for sealing a resin, characterized in that the resin-sealed semiconductor device has a body in which a semiconductor element and a semiconductor element mounting portion are sealed by a resin, and An external wire extending outward from the main body in a predetermined direction, wherein a surface on which the outer wire protrudes is a lower surface of the main body, a reverse surface thereof is an upper surface of the main body, and a heat dissipation can be installed between the lower surface and the upper surface When the surface of the fan is the back surface of the main body and the reverse side thereof is the front surface of the main body, the back surface or the upper surface of the main body is respectively provided with a first screw passing portion for mounting the heat dissipating fan on the main body And a second screw passing portion, wherein the resin sealing mold has a first mold corresponding to the front side body and the back side when the main body is divided into the front side and the back side a second mold corresponding to the main body, the mold cavity of the first mold is provided with a first protrusion for forming the first screw passage portion, and the mold of the second mold a second protruding portion for forming the second screw passing portion is provided on the cavity, the first protruding portion and the second protruding portion are on an opening surface of the mold cavity of the first mold When the resin is formed in the space formed by the opening of the mold cavity of the two molds to form the main body, the shape of the first screw passing portion and the second screw passing portion may be formed on the main body. a lead frame having a plate-like die pad mounting semiconductor element and the outer portion a wire having a space portion formed on the die pad for avoiding the first protrusion and the second mold provided on a mold cavity of the first mold of the resin sealing mold At least one of the second protrusions provided on the mold cavity abuts.
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