TWI491815B - Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device - Google Patents

Description

Hydrostatic gas bearing and linear motion guiding device using the same

The present invention relates to a static pressure gas bearing and a linear motion guiding device using the static pressure gas bearing.

A precision working machine or a semiconductor exposure apparatus is required to accurately position a workpiece such as a processing tool or a substrate with high precision. Therefore, a linear motion guiding device that mounts a static pressure gas bearing that generates friction with a positioning device that hardly contacts the processing tool or the workpiece is used. Such a linear motion guiding device is configured to store a pressurized fluid between a movable platform as a mounting table of a workpiece and a guide rail as a guiding member, and the movable platform can be moved in a non-contact manner with respect to the guide rail.

As a throttling form of the air blowing port of the static pressure gas bearing mounted on the linear motion guiding device, there are porous throttling, surface throttling, orifice throttling, self-forming orifice, etc.; the load is adjusted according to each application side. Capacity and bearing rigidity are used on one side.

For example, Patent Document 1 is a bearing that is fixed to either a supported body or a support and that is supported by a pressurized bearing that is movably supported by pressurized air supplied to the bearing surface via a bearing member. The member is a graphite carbon-based material in which the diameter of the material particles is substantially uniform and the uniformity of the open pores is obtained.

Further, in Patent Document 2, as a gas bearing device that achieves high attenuation while maintaining high rigidity, it is proposed that two bearing faces that are substantially parallel to each other and a bearing gap between the two bearing faces are provided via Small hole A gas bearing device for supplying at least one gas conduit of a gas.

Further, Patent Document 3 proposes a static pressure gas bearing including: a base material including a porous body; and a surface throttle layer including a bonding material to be bonded to the base material and previously passed through the desired air A perforated plate produced by adjusting the diameter and distribution of the through-holes in a volume manner; the gas is ejected through the surface throttling layer, and the supported member is supported by the static pressure.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 63-231020

[Patent Document 2] Japanese Patent Publication No. 2006-510856

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2001-56027

[Patent Document 4] Japanese Patent Laid-Open Publication No. 2008-82449

Although the above-mentioned static pressure gas bearing can realize ultra-low friction, ultra-high precision and ultra-high-speed motion, it is inevitably costly because it mainly uses high-strength metal or ceramic as a bearing material and requires high-precision grinding processing. Expensive problem.

However, in the case of ultra-low friction, ultra-high precision, and ultra-high-speed motion, for example, in the case of non-contact handling of a liquid crystal screen or the like, or moving the article horizontally without changing the temperature, if a static pressure gas bearing is used, The advantages of the configuration of the device are simplified, but on the other hand, since the static pressure gas bearing itself is expensive, the actual situation is that it cannot be fully utilized in this application.

In view of the above actual situation, in order to provide a full use in various fields The present invention has previously proposed a static pressure gas bearing having a resin bearing member having a plurality of air outlets having an orifice shape or a small orifice throttle shape on the upper surface thereof. And a lower surface having an air supply port communicating with the plurality of air blowing ports; and a base body joined to the lower surface of the resin bearing member and covering the air supply port connected to the air supply groove to cover the air supply groove (Patent Document 4).

According to the static pressure gas bearing disclosed in Patent Document 4, since the resin bearing member constituting the static pressure gas bearing can be formed by injection molding using a mold, mechanical processing is not required, and the structure of the base body is formed only by connecting the resin. The gas supply port of the bearing member can assemble the static pressure gas bearing only by the joint of the resin bearing member and the base body, so that the static pressure gas bearing can be mass-produced, thereby providing an inexpensive static pressure gas bearing.

However, since the air blowing port of the static pressure gas bearing disclosed in Patent Document 4 is formed by injection molding, it is a self-forming orifice or orifice orifice having a diameter of about 0.2 to 0.4 mm. The shape is such that the amount of air blown from the air outlet is too large to cause self-excited vibration, so it is still necessary to improve it for practical use.

The present invention has been made in view of the above problems, and an object thereof is to provide a static pressure gas bearing which can be mass-produced and inexpensive, and a linear motion guiding device using the static pressure gas bearing.

A static pressure gas bearing according to the present invention is characterized by comprising: a bearing base having a base portion, a cylindrical projecting portion protruding from a peripheral edge of one surface of the base portion, and one end opening on one side of the base portion and the other end at the base portion Outside surface a gas supply passage having an upper opening; and a synthetic resin bearing body having an annular concave portion formed on one surface facing one of the base portions, an annular groove opened on the other surface, and one end connected to the ring a plurality of air blowing holes which are open to the annular bottom surface of the annular recess and which serve as self-forming orifices; and the bearing body is fitted to the cylinder of the base surface adjacent to one outer peripheral surface The inner surface of the protrusion is then integrated with the bearing base at the fitting portion; the annular groove has a width of at least 0.3 mm and a depth of at least 0.01 mm; the air blowing hole has a diameter of at least 30 μm at one end thereof, and A self-forming orifice is formed between the annular recess and the annular groove.

According to the static pressure gas bearing of the present invention, the synthetic resin bearing system is fitted to the inner surface of the cylindrical projecting portion of the base portion adjacent to the outer peripheral surface of one surface, and is integrated with the bearing base by the adhesive portion in the fitting portion. And the synthetic resin bearing body has an annular groove opened on the other surface and a plurality of air blowing ports having one end communicating with the annular groove and the other end opening in the annular recess; the annular groove having at least 0.3 mm a width and a depth of at least 0.01 mm; the air blowing hole has a diameter of at least 30 μm at one end thereof, and a self-forming orifice is formed between the annular recess and the annular groove; The annular groove and the plurality of air blowing outlets enable mass production and can be produced inexpensively.

In a preferred embodiment, the annular groove has a width of 0.3 to 1.0 mm or 0.3 to 0.7 mm and a depth of 0.01 to 0.05 mm or 0.01 to 0.03 mm; the air blowing hole has a diameter of 30 to 120 μm at one end.

Preferably, each of the annular groove and the air blowing hole is formed by laser processing. As a processing laser, it can be self-contained by carbon dioxide laser, YAG laser, UV laser, excimer laser and other options.

When each of the annular groove and the air blowing hole is formed by laser processing, it can be formed instantaneously by machining or the like, such as cutting, and can be mass-produced and can be produced at low cost.

In the static pressure gas bearing of the present invention, a spherical pressure receiving recess may be formed on the other surface of the bearing base. The spherical compression recess includes a frustoconical recess or a concave spherical portion that is open on the other surface; and the spherical recessed portion may be formed directly on the other surface of the bearing base.

In the static pressure gas bearing of the present invention, a cylindrical recess formed on the other surface may be formed on the other surface of the bearing base, and the insert may be fitted and fixed to the cylindrical recess; the spherical recess may also have a recess And a frustoconical surface formed on one side of the insert on the other side of the bearing base and formed on the insert.

In the static pressure gas bearing of the present invention, a cylindrical recessed portion that is open on the other surface is formed on the other surface of the bearing base; a fitting block is fitted and fixed to the cylindrical recessed portion; and the spherically pressed recessed portion may also have a bearing A concave spherical surface that is open on one side of the insert on the other side of the base and formed on the insert.

In the static pressure gas bearing having the spherical pressure receiving concave portion on the other surface of the bearing base body, the spherical body of the spherical body bolt may be attached by sliding the spherical concave portion of the spherical body, and the automatic rotation of the spherical body may be added to the static pressure gas bearing. Core function.

In the static pressure gas bearing of the present invention, the bearing system may have, in addition to the annular groove, a large-diameter annular groove formed on the other surface thereof and surrounding the annular groove on the outer side of the annular groove. One end is open to the annular groove and The other end is a plurality of first radial grooves opening in the large-diameter annular groove; a small-diameter annular groove formed on the inner side of the annular groove; and one end is open at the annular groove and the other end is a plurality of second radial grooves opening in the small-diameter annular groove; the large-diameter annular grooves, the small-diameter annular grooves, and the first and second radial grooves may also be formed in the bearing body On the other side.

The static pressure gas bearing to which the automatic aligning function is added can be applied to a linear motion guiding device which is a positioning device of a mounting table of a workpiece. In other words, the linear motion guiding device including the static pressure gas bearing of the present invention may be disposed on the outer side of the guiding member having the upper guiding surface and the both side guiding surfaces, and is provided with the upper guiding surface facing the upper plate and the both sides facing each other. The cross section to one of the side plates is a movable platform of a font; a ball stud having an inner side of the ball is respectively disposed on an inner surface of the lower surface of the upper platform and the side plate of the movable platform; and, above the ball stud and the guiding member The static pressure gas bearing may be disposed between the guiding surface and the guiding surfaces of the two sides, so that the spherical recessed portion of the ball head is slidably connected to the ball body of the ball stud, and the guiding surface and the guiding surfaces of the bearing body and the guiding member are guided. Facing the direction.

According to the linear motion guiding device described above, the compressed air is ejected from the upper guiding surface of the guiding member and the guiding surfaces on both sides by a plurality of air blowing holes from the bearing body, and can be formed on the bearing body and the upper guiding surface and the guiding surfaces on both sides. The air lubricating film between the two holds the movable platform in a non-contact state with respect to the upper guiding surface and the side guiding surfaces. Moreover, if the bearing gap between the bearing body and the upper guiding surface and the guiding surfaces on both sides is not uniform, a pressure difference is generated in each part of the bearing gap; by using the pressure difference, the static pressure gas bearing is made to be uniform in the direction of the bearing gap. The core is dynamically adjusted to maintain a state in which the upper guide surface and the guide surfaces on both sides are parallel. Therefore, the accuracy of the parts such as the parallelism and the straight angle of the guiding member and the movable platform can be set to a relatively high precision, and in addition to the low cost of the above-described static pressure gas bearing itself, an inexpensive linear motion guiding device can be provided.

In the static pressure gas bearing of the present invention, preferably, the bearing body is formed of a thermoplastic synthetic resin such as a polyacetal resin, a polyamide resin, or a polyphenylene sulfide resin; and, preferably, the bearing matrix is composed of polyacetal. a thermoplastic synthetic resin such as a resin, a polyamide resin, or a polyphenylene sulfide resin, or a glass-containing fiber, a glass powder, a carbon fiber, or an inorganic filler containing 30 to 50% by mass of the thermoplastic filler; Thermoplastic synthetic resin, or aluminum or aluminum alloy. The bearing body and the bearing base made of the synthetic resin may be formed by mechanically processing a synthetic resin material, or may be formed by injection molding using a mold.

According to the present invention, it is possible to provide a static pressure gas bearing which can be mass-produced and inexpensive, and a linear motion guiding device using the static pressure gas bearing.

Next, the present invention will be described in further detail based on examples of preferred embodiments shown in the drawings. In addition, the invention is not limited to the examples.

In FIGS. 1 to 5, the static pressure gas bearing 1 preferably includes a bearing base 2 which is made of thermoplasticity such as polyacetal resin (POM), polyamide resin (PA), and polyphenylene sulfide resin (PPS). Synthetic resin, or thermoplastic synthetic resin containing 30 to 50% by mass of glass fiber, glass powder, carbon fiber or inorganic filler containing reinforcing filler, or aluminum Or an aluminum alloy; and a synthetic resin bearing body 3 which is integrally joined to the bearing base 2 by an adhesive and is preferably a thermoplastic synthetic resin such as a polyacetal resin, a polyamide resin or a polyphenylene sulfide resin. form.

In particular, as shown in FIGS. 6 and 7, the bearing base 2 includes a base portion 4, and a cylindrical projecting portion 6 integrally formed above the outer surface Y of the outer peripheral surface of the base portion 4 in a plan view of the circular surface 5; the base portion 4; The other side is a circular surface 7; an air supply opening 10 having a circular opening 9 having an end 8 open to the circular surface 5 of the base 4; and one end 11 communicating with the air supply opening 10 and the other end An air supply passage 13 is formed in the outer peripheral surface 12 of the base body 4.

An internal thread 15 is formed on the inner peripheral surface 14 of the end portion of the air supply passage 13 which is open on the outer peripheral surface 12 of the base portion 4; the internal thread 15 is screwed to the external thread of the air supply pipe plug 16; and the air supply pipe plug 16 is fixed to the bearing base body 2 The base portion 4 is on the outer peripheral surface 12.

In particular, as shown in FIGS. 8 to 10, the bearing body 3 is provided with an annular recess 18 formed on a surface 17 which is circular in plan view from a surface 5 of the base portion 4 which is circular in plan view; An annular groove 20 opening in a circular shape on the surface 19; a plurality of air blowing holes 25 having one end 21 communicating with the annular groove 20 and the other end 22 opening in the annular bottom surface 24 of the annular recess 18 And adjacent to a peripheral surface 23 that is a circular surface 17 in plan view.

The annular groove 20 is defined by an annular bottom surface 26 and mutually opposite cylindrical side faces 27; the annular groove 20 has a width W of at least 0.3 mm and a depth d of at least 0.01 mm; the air blowing hole 25 has one end 21 In this example, the diameter D is at least 30 μm from the one end 21 to the other end 22, and a self-forming orifice is formed between the annular recess 18 and the annular groove 20.

The annular recess 18 is opened by the other end 22 of the air blowing hole 25 The bottom surface 24, the outer circumferential surface 28 connected to the outer edge of the annular bottom surface 24, and the inner circumferential surface 29 connected to the inner edge of the annular bottom surface 24 are formed; the outer circumferential surface 28 and the inner circumferential surface 29 are formed as The annular bottom surface 24 gradually expands the frustoconical surfaces 31 and 32 toward the opening 30 of the annular recess 18.

The bearing body 3 is fitted to the inner surface of the cylindrical projecting portion 6 of the bearing base 2 by the outer peripheral surface 23 of the adjacent one surface 17, and is integrated with the bearing base 2 by the adhesive agent in the fitting portion.

In the static pressure gas bearing 1, for example, an annular groove 20 having a width W of at least 0.3 mm and a depth d of at least 0.01 mm, which is formed on the surface 19 of the bearing body 3, can be formed by laser processing, and the end 21 is annularly concave. The other end 22 is open at the annular bottom surface 24 of the annular recess 18 and has a plurality of air outlet holes 25 having a diameter D of at least 30 μm.

Since the above-described static pressure gas bearing 1 is integrated with the bearing base 2 by the bearing body 3 by the adhesive, it can be easily manufactured and inexpensive. Further, if the air blowing hole 25 has a diameter of at least 30 μm, it is a very small diameter, so that generation of self-excited vibration caused by a large amount of air ejection from the air blowing hole 25 can be suppressed.

Next, an example of a method of manufacturing the static pressure gas bearing 1 shown in FIGS. 1 to 5 will be described. First, synthetic resin or aluminum or aluminum alloy containing the reinforcing filler shown in FIGS. 6 and 7 is prepared. The bearing base 2 and the bearing body 3 of the synthetic resin bearing body 3 shown in FIGS. 8 to 10 do not have the annular groove 20 and the air blowing hole 25; as shown in FIG. 11, the bearing body 3a is rounded. The opening portion 30 of the annular recessed portion 18 communicates with the opening portion 9 of the air supply hole 10 of the bearing base 2, and the outer peripheral surface 23 adjacent to the one surface 17 of the bearing body 3a is fitted to the bearing. After the inner surface of the cylindrical projecting portion 6 of the base 2, the fitting portion is integrally formed by the adhesive to form the assembled body 33 of the integrated bearing base 2 and the bearing body 3a.

The other surface 19 of the bearing body 3a of the assembly 33 thus integrated is irradiated with a laser by a laser processing machine to form an annular groove 20 having a width W of 0.3 to 1.0 mm and a depth d of 0.01 to 0.05 mm. The diameter D of the opening of the annular bottom surface 24 of the annular recess 18 from the annular bottom surface 26 on the annular bottom surface 26 of the annular groove 20 is at least 30 μm, preferably 30 to 120. A plurality of air blowing holes 25 in the shape of an orifice of μm are used to fabricate the static pressure gas bearing 1.

As the processing laser to be used, it is selected from a carbon dioxide laser, a YAG laser, a UV laser or an excimer laser; and it is preferable to use a carbon dioxide laser.

An annular groove 20 centered on a circular arc with a diameter of 30 mm and a width of 0.5 mm and a depth of 0.05 mm can be used with a 9.5 W laser beam with a laser output of 1000 mm/s and a repeated number of typing times. And processing time is 2 seconds to form and process on the surface 19 of the bearing body 3a formed of polyphenylene sulfide resin; and the annular bottom surface 26 of the annular groove 20 penetrates the bearing body from the annular bottom surface 26 The air blowing hole 25 of the self-forming orifice shape having a diameter of 0.06 mm and opening in the annular bottom surface 24 of the annular recess 18 can have a laser output of 14 W and a processing time of 15 seconds. The direction is processed in 10 positions at 10 equal positions.

Although the bearing body 3 of the static pressure gas bearing 1 is provided with an annular groove 20, in addition to the annular groove 20, as shown in FIG. 12, the bearing body 3 may be provided on the other surface 19 of the bearing body 3. And surrounding the ring on the outer side of the annular groove 20 a large-diameter annular groove 34 which is concentric with the annular groove 20; one end portion 35 is opened in the annular groove 20 and the other end portion 36 is opened in a plurality of radial shapes of the large-diameter annular groove 34 a groove 37; a small-diameter annular groove 38 formed on the inner side of the annular groove 20 and concentric with the annular groove 20; and one end portion 39 is open in the annular recess 20 and the other end portion 40 is in a small diameter ring shape A plurality of radial grooves 41 are formed in the recess 38.

In the static pressure gas bearing 1 having the bearing body 3 shown in Fig. 12, compressed air supplied to the annular groove 20 is supplied to the large-diameter annular groove 34 and the small-diameter annular recess via the radial grooves 37 and 41. Since the groove 38 is provided, the supply area becomes large, whereby stable floating can be achieved, for example, in the floating of the article.

13 to 16 show another embodiment of the static pressure gas bearing 1; the other central portion of the bearing base 2 having a circular plan surface 7 is formed with an opening 42 having a circular shape in plan view on the surface 7. The spherical pressure receiving recess 43 has a frustoconical recess 46 that is defined by a bottom surface 44 that is circular in plan view and a frustoconical surface 45 that extends from the bottom surface 44 until the opening 42 extends.

The bearing base 2 including the spherical recessed portion 43 having the frustoconical recess 46 is connected to the opening of the annular recess 18 of the bearing body 3 in the same manner as the static gas bearing 1 described above. The portion 30 is fitted to the inner surface of the cylindrical projecting portion 6 of the bearing base 2 adjacent to the outer peripheral surface 23 of the bearing body 3, and then the bearing base 2 and the bearing body are formed by an adhesive followed by the fitting portion. 3 integrated assembly 47.

The other surface 19 of the bearing body 3 of the assembly body 47 thus integrated is subjected to laser irradiation by a laser processing machine to form a width W of 0.3 to 1.0 mm and deep. The annular groove 20 having a degree d of 0.01 to 0.05 mm and the annular bottom surface 24 of the annular recessed portion 20 penetrate the bearing body 3 from the annular bottom surface 26 to the annular bottom surface 24 of the annular recess 18 The opening D has a diameter D of at least 30 μm, preferably 30 to 120 μm, and a plurality of air-blowing holes 25 in the shape of an orifice, thereby producing a static pressure gas bearing 1.

As shown in Fig. 16, in the static pressure gas bearing 1 thus formed, the spherical body 49 of the ball stud 48 is slidably attached to the frustoconical surface 45 of the spherical pressure receiving recess 43 of the bearing base 2, and an automatic adjustment is added. Core function.

17 to 20 show another embodiment of the static pressure gas bearing 1; the other portion of the bearing base 2 having a circular plan surface 7 is formed on the surface 7 with an opening having a circular shape in plan view. The spherical pressure receiving portion 43 of the spherical body 43 has a concave spherical portion 51 which is defined by a bottom surface 44 having a circular shape in plan view and a concave spherical surface 50 extending from the bottom surface 44 to the opening portion 42.

The bearing base 2 including the spherical pressure receiving recessed portion 43 having the concave spherical portion 51 is connected to the opening of the annular recessed portion 18 of the bearing body 3 in the same manner as the above-described static pressure gas bearing 1 . 30. The outer peripheral surface 23 of the bearing body 3 adjacent to the one surface 17 is fitted to the inner surface of the cylindrical projecting portion 6 of the bearing base 2, and then the bearing base 2 and the bearing body 3 are formed by an adhesive followed by the fitting portion. Integrated assembly 52.

The other surface 19 of the bearing body 3 of the assembly 52 thus integrated is subjected to laser irradiation by a laser processing machine to form an annular groove 20 having a width W of 0.3 to 1.0 mm and a depth d of 0.01 to 0.05 mm. The diameter D of the opening on the annular bottom surface 26 of the annular recess 20 from the annular bottom surface 26 and the annular bottom surface 24 of the annular recess 18 is at least 30 μm, preferably at least 30 μm. A plurality of air blowing holes 25 of a self-forming orifice shape of 30 to 120 μm are used to fabricate the static pressure gas bearing 1.

As shown in Fig. 20, in the static pressure gas bearing 1 thus formed, the spherical body 49 of the ball stud 48 is slidably attached to the concave spherical surface 50 of the spherical pressure receiving concave portion 43 of the bearing base 2, and an automatic aligning function is added. .

21 to 26 show another embodiment of the static pressure gas bearing 1 to which the automatic aligning function is added. A cylindrical recess 55 having a circular bottom surface 54 that is open on the surface 7 is formed on the central portion of the bearing base 2 in a plan view of the circular surface 7; as shown in FIG. 23, the cylindrical recess 55 is embedded. The block 64 is fitted and fixed with the one surface 58 facing the bottom surface 54 of the cylindrical recess 55 and the other surface 61 being flush with the other surface 7 of the bearing base 2, the insert 64 having a cylindrical body 56 and one end 57 on one side of the cylindrical body 56. The circular opening 59 of the upper opening 58 has a recessed portion of the frustoconical surface 62 which is connected to the other end 60 of the circular opening 59 and extends from the other end 60 toward the other surface 61 of the cylindrical body 56 and opens on the other surface 61. 63. The spherical pressure receiving recess 43 has the frustoconical surface 62.

The bearing base 2 to which the insert 64 is fitted and fixed is connected to the opening 30 of the annular recess 18 of the bearing body 3 in the same manner as the above-described static pressure gas bearing 1 and the bearing body is formed. 3, the outer peripheral surface 23 adjacent to the one surface 17 is fitted to the inner surface of the cylindrical projecting portion 6 of the bearing base 2, and then an assembly for integrating the bearing base 2 and the bearing body 3 is formed by an adhesive followed by the fitting portion. 65.

The other surface 19 of the bearing body 3 of the assembly 65 thus integrated is subjected to laser irradiation by a laser processing machine to form an annular groove 20 having a width W of 0.3 to 1.0 mm and a depth d of 0.01 to 0.05 mm. And regulating the annular groove 20 The annular bottom surface 26 penetrates the bearing body 3 from the annular bottom surface 26 and has a diameter D of at least 30 μm, preferably 30 to 120 μm, which is open in the annular bottom surface 24 of the annular recess 18 . The air blowing port 25 of the orifice shape is used to fabricate the static pressure gas bearing 1.

As shown in Fig. 26, in the static pressure gas bearing 1 thus formed, the ball is slidably arranged by the frustoconical surface 62 of the concave portion 63 of the insert 64 fitted to the cylindrical recess 55 of the bearing base 2. The ball 49 of the head bolt 48 is attached with a self-aligning function.

27 to 30 show another embodiment of the static pressure gas bearing 1 to which the automatic aligning function is added. As shown in Fig. 22, a cylindrical recess 55 having a circular bottom surface 54 that is open on the surface 7 is formed in a central portion of the bearing base 2 which is circular in plan view 7; as shown in Fig. In the cylindrical recess 55, the insert 64 is fitted and fixed to the bottom surface 54 of the cylindrical recess 55 and the other surface 61 is flush with the other surface 7 of the bearing base 2, and the insert 64 is provided with a cylinder 56, A circular hole 59 having an end 57 open to one face 58 of the cylindrical body 56 and a concave spherical surface having the other end 60 connected to the circular hole 59 from the other end 60 toward the other face 61 of the cylindrical body 56 and opening on the other face 61 The recess 63 of 66. The spherical pressure receiving recess 43 has the concave spherical surface 66.

The bearing base 2 to which the insert 64 is fitted and fixed is connected to the opening 30 of the annular recess 18 of the bearing body 3 in the same manner as the above-described static pressure gas bearing 1 and the bearing body is formed. 3, the outer peripheral surface 23 adjacent to the one surface 17 is fitted to the inner surface of the cylindrical projecting portion 6 of the bearing base 2, and then an assembly for integrating the bearing base 2 and the bearing body 3 is formed by an adhesive followed by the fitting portion. 67.

The other surface 19 of the bearing body 3 of the assembly 67 thus integrated is subjected to laser irradiation by a laser processing machine to form an annular groove 20 having a width W of 0.3 to 1.0 mm and a depth d of 0.01 to 0.05 mm. The diameter D of the opening on the annular bottom surface 26 of the annular recessed portion 18 from the annular bottom surface 26 and the annular bottom surface 24 of the annular recess 18 is at least 30 μm, preferably 30. A plurality of air blowing holes 25 of the shape of the self-forming orifice of ~120 μm are used to fabricate the static pressure gas bearing 1.

As shown in Fig. 30, in the static pressure gas bearing 1 thus formed, the ball stud bolt 48 is disposed by slidingly engaging the concave spherical surface 66 of the concave portion 63 of the insert 64 fixed to the cylindrical recess 55 of the bearing base 2. The ball 49 is attached with an automatic core adjustment function.

It is formed and fixed to the bearing base 2 by a self-lubricating thermoplastic synthetic resin such as a polyacetal resin, a polyamide resin, or a polyester resin, or a copper or copper alloy, which is excellent in sliding properties. Another insert 64 of the cylindrical recess 55 in the central portion of the circular face 7 in a plan view can smoothly perform the frustoconical surface 62 of the recess 63 of the insert 64 or the sphere of the concave spherical surface 66 and the ball stud 48. 49 sliding.

Fig. 31 shows a linear motion guiding device 68 using the hydrostatic gas bearing 1 shown in Fig. 26. The linear motion guiding device 68 is formed of the following members: a guiding member 71 having an upper guiding surface 69 and both side guiding surfaces 70 and 70 The cross section of the pair of side plates 73 and 73 opposite to the upper plate 72 and the two side guide surfaces 70 and 70 disposed on the outer side of the guide member 71 is opposite to the upper guide surface 69 a movable platform 74 of a font; a ball stud 48 that erects the ball 49 on the inner surface 76 of the lower surface 75 of the upper surface 75 and the side surfaces 73 and 73 of the upper surface 75 of the movable platform 74 toward the inner side; Between the guiding surface 69 of the guiding member 71 and the guiding surfaces 70 and 70 of the two sides, the frustoconical surface 62 of the insert 64 is slidably connected to the ball 49 of the ball stud 48, and the other surface 19 of the bearing body 3 is guided. The guide surface 69 above the member 71 and the static pressure gas bearing 1 disposed opposite to the both side guide surfaces 70 and 70.

According to the linear motion guiding device 68, compressed air is injected onto the upper guiding surface 69 of the guiding member 71 and the both guiding surfaces 70 and 70 from the plurality of air blowing holes 25 of the bearing body 3, and can be formed in the bearing body 3 The other surface 19 and the air guiding film between the guiding surface 69 of the guiding member 71 and the guiding surfaces 70 and 70 on both sides maintain the movable platform 74 in the non-contact state with respect to the upper guiding surface 69 and the two guiding surfaces 70 and 70. . Moreover, if the bearing gap between the bearing body 3 and the upper guiding surface 69 and the two guiding surfaces 70 and 70 is not uniform, a pressure difference will occur in each part of the bearing gap, but the static pressure gas bearing 1 can be made by the pressure difference. The core is automatically aligned in a direction in which the bearing gap is uniform, and is maintained in a state of being parallel with respect to the upper guide surface 69 and the both side guide surfaces 70 and 70. Therefore, the accuracy of the parts such as the parallelism and the straight angle of the guiding member 71 and the movable stage 74 can be set to a coarser precision, and in addition to the low cost of the static pressure gas bearing 1 itself, the linear motion guiding device 68 can be manufactured. Ease of use and cost reduction.

In the linear motion guiding device 68, the static pressure gas bearing 1 as shown in FIG. 26 is used as the static pressure gas bearing 1 to which the automatic aligning function is added, but FIG. 16, FIG. 20, and FIG. 30 may be used instead. The hydrostatic gas bearing 1 is shown.

As described above, since the bearing body and the bearing base system are fitted to the inner surface of the cylindrical projecting portion of the bearing base by the outer peripheral surface of the bearing body adjacent to one surface, the joint is used. The bonding agent is integrated with the fitting portion, so that the joint surface of the bearing body and the bearing base body is firmly sealed; and a ring having a width W of 0.3 to 1.0 mm and a depth d of 0.01 to 0.05 mm is formed on one surface of the bearing body. a groove, and a plurality of self-formed orifice shapes having a diameter D of at least 30 μm opening from the annular bottom surface to the annular bottom surface of the annular groove on the annular bottom surface of the annular groove The air blows out the hole; since the annular groove and the air blowing hole can be formed without machining, it is possible to provide not only an inexpensive static pressure gas bearing but also an easy to manufacture using the static pressure gas bearing. And a linear motion guiding device with reduced cost.

1‧‧‧Static gas bearing

2‧‧‧ bearing base

3‧‧‧ bearing body

3a‧‧‧ bearing body

4‧‧‧ base

5‧‧‧ Face

6‧‧‧Cylinder protrusion

7‧‧‧ Face

8‧‧‧End

9‧‧‧ openings

10‧‧‧ Air supply holes

11‧‧‧End

12‧‧‧ outside the base 4

13‧‧‧ gas supply path

14‧‧‧End of the inner circumference of the end

15‧‧‧ internal thread

16‧‧‧ gas supply plug

17‧‧‧ Face

18‧‧‧Round recess

19‧‧‧ Face

20‧‧‧ annular groove

21‧‧‧End

22‧‧‧The other end

23‧‧‧ outer perimeter

24‧‧‧Ringed bottom surface

25‧‧‧Air blowout hole

26‧‧‧Ring bottom surface

27‧‧‧Cylinder side

28‧‧‧ outer perimeter

29‧‧‧ inner circumference

30‧‧‧ openings

31‧‧‧ openings

32‧‧‧Frustum

33‧‧‧Assembly

34‧‧‧ Large diameter annular groove

35‧‧‧One end

36‧‧‧Other end

37‧‧‧radial grooves

38‧‧‧Small diameter annular groove

39‧‧‧One end

40‧‧‧Other end

41‧‧‧radial grooves

42‧‧‧ openings

43‧‧‧Sphere compression recess

44‧‧‧ bottom

45‧‧‧Frustum

46‧‧‧Frustum conical recess

47‧‧‧Assembly

48‧‧‧ ball studs

49‧‧‧ sphere

50‧‧‧ concave spherical surface

51‧‧‧ concave ball

52‧‧‧Assembly

54‧‧‧ bottom

55‧‧‧Cylindrical recess

56‧‧‧Cylinder

57‧‧‧End

58‧‧‧ side

59‧‧‧ round hole

60‧‧‧The other end

61‧‧‧The other side

62‧‧‧Frustum

63‧‧‧ recess

64‧‧‧Block

65‧‧‧Assembly

66‧‧‧ concave spherical surface

67‧‧‧ recess

68‧‧‧Linear motion guiding device

69‧‧‧Upper guide surface

70‧‧‧ both sides of the guide surface

71‧‧‧Guiding components

72‧‧‧Upper board

73‧‧‧ side board

74‧‧‧ movable platform

75‧‧‧ lower surface

76‧‧‧ inside

Fig. 1 is a plan view showing a preferred embodiment of the embodiment of the present invention.

Fig. 2 is a cross-sectional explanatory view taken along line II-II of Fig. 1.

Figure 3 is a bottom plan view of Figure 1.

Figure 4 is a bottom plan view of the bearing body of Figure 1.

Fig. 5 is an enlarged cross-sectional explanatory view of an essential part of Fig. 1.

Figure 6 is a top plan view of the bearing base.

Fig. 7 is a cross-sectional explanatory view taken along line VII-VII of Fig. 6.

Fig. 8 is a plan view of the bearing body.

Fig. 9 is a cross-sectional explanatory view taken along line IX-IX of Fig. 8.

Figure 10 is a bottom plan view of Figure 8.

Fig. 11 is a cross-sectional explanatory view showing an assembly of a bearing body and a bearing base.

Fig. 12 is a plan explanatory view showing another embodiment of the bearing body.

Figure 13 is a bottom plan view showing another embodiment of the bearing base.

Figure 14 is a cross-sectional explanatory view taken along line XIV-XIV of Figure 13;

Fig. 15 is a cross-sectional explanatory view showing an assembly of a bearing body and a bearing base.

Fig. 16 is a cross-sectional explanatory view showing a static pressure gas bearing to which an automatic aligning function is added.

Figure 17 is a bottom plan view showing another embodiment of the bearing base.

Fig. 18 is a cross-sectional explanatory view taken along line XVII-XVIII of Fig. 17;

Fig. 19 is a cross-sectional explanatory view showing an assembly of a bearing body and a bearing base.

Fig. 20 is a cross-sectional explanatory view showing a static pressure gas bearing to which an automatic aligning function is added.

Figure 21 is a bottom plan view showing another embodiment of the bearing base.

Figure 22 is a cross-sectional explanatory view taken along the line XXII-XXII of Figure 21.

Figure 23 is a cross-sectional explanatory view of the block.

Fig. 24 is a cross-sectional explanatory view showing a bearing base to which a block is fitted and fixed.

Fig. 25 is a cross-sectional explanatory view showing an assembly of a bearing body and a bearing base.

Fig. 26 is a cross-sectional explanatory view showing a static pressure gas bearing to which an automatic aligning function is added.

Figure 27 is a cross-sectional explanatory view showing another embodiment of the block.

Fig. 28 is a cross-sectional explanatory view showing a bearing base to which a block is fitted and fixed.

Fig. 29 is a cross-sectional explanatory view showing an assembly of a bearing body and a bearing base.

Fig. 30 is a cross-sectional explanatory view showing a static pressure gas bearing to which an automatic aligning function is added.

Figure 31 is a cross-sectional explanatory view of the linear guiding device.

1‧‧‧Static gas bearing

2‧‧‧ bearing base

3‧‧‧ bearing body

5‧‧‧ Face

6‧‧‧Cylinder protrusion

7‧‧‧ Face

9‧‧‧ openings

10‧‧‧ Air supply holes

17‧‧‧ Face

18‧‧‧Round recess

19‧‧‧ Face

20‧‧‧ annular groove

23‧‧‧ outer perimeter

24‧‧‧Ringed bottom surface

25‧‧‧Air blowout hole

26‧‧‧Ring bottom surface

28‧‧‧ outer perimeter

29‧‧‧ inner circumference

30‧‧‧ openings

31‧‧‧ openings

32‧‧‧Frustum

Claims (13)

A static pressure gas bearing, comprising: a bearing base having a base portion, a cylindrical protrusion protruding from a periphery of one side of the base portion, and one end opening on one side of the base portion and the other end on the outer periphery of the base portion a gas supply passage opening on the surface; and a synthetic resin bearing body having an annular concave portion formed on one surface facing the base portion, an annular groove opening on the other surface, and one end communicating with a plurality of air blowing holes formed in the annular groove and having the other end open on the annular bottom surface of the annular recess as a self-forming orifice; and the bearing body is fitted to a circle adjacent to the outer peripheral surface of one side The inner surface of the barrel protrusion is then integrated with the bearing base at the fitting portion; the annular groove has a width of at least 0.3 mm and a depth of at least 0.01 mm; the air blowing hole has a diameter of at least 30 μm at one end thereof, and Forming a self-forming orifice between the annular recess and the annular groove; the annular recess is formed by an annular bottom surface, a peripheral surface connected to the outer edge of the annular bottom surface, and connected to the annular bottom surface Defined by the inner circumference of the inner edge The outer peripheral surface and the inner peripheral surface are each formed as a frustoconical surface that gradually expands from the annular bottom surface toward the opening of the annular recess. The static pressure gas bearing of claim 1, wherein the annular groove has a width of 0.3 to 1.0 mm or 0.3 to 0.7 mm, and a depth of 0.01 to 0.05 mm or 0.01 to 0.03 mm; the air blowing hole has 30 at one end thereof. A diameter of 120 μm. The static pressure gas bearing of claim 1, wherein each of the annular groove and the air blowing hole is formed by laser processing. The static pressure gas bearing of claim 2, wherein each of the annular groove and the air blowing hole is formed by laser processing. A static pressure gas bearing according to any one of claims 1 to 4, wherein a spherical pressure recess is formed on the other surface of the bearing base. The static pressure gas bearing of claim 5, wherein the spherical compression recess has a frustoconical recess that is open on the other side of the bearing base. The static pressure gas bearing of claim 5, wherein the spherical compression recess has a concave spherical portion that is open on the other side of the bearing base. The static pressure gas bearing of claim 5, wherein a cylindrical recess formed on the other surface is formed on the other surface of the bearing base; the insert is fixedly fitted to the cylindrical recess; the spherical recessed portion has a bearing The other side of the base body is open on one side of the insert and is formed on the frustoconical surface of the insert. The static pressure gas bearing of claim 5, wherein a cylindrical recess formed on the other surface is formed on the other surface of the bearing base; the insert is fixedly fitted to the cylindrical recess; the spherical recessed portion has a bearing A concave spherical surface that is open on one side of the insert on the other side of the base and formed on the insert. The static pressure gas bearing according to any one of claims 1 to 4, wherein the bearing body has, in addition to the annular groove, and is formed on the other surface thereof and surrounds the annular groove on the outer side of the annular groove a large-diameter annular groove; a plurality of first radial grooves opening at one end of the annular groove and opening at the other end in the large-diameter annular groove; forming a small inner side of the annular groove Diameter annular groove; and one end is open in the annular groove and the other end is small a plurality of second radial grooves of the annular annular groove opening. The static pressure gas bearing of claim 5, wherein the bearing body has, in addition to the annular groove, a large-diameter annular concave formed on the other surface thereof and surrounding the annular groove on the outer side of the annular groove a plurality of first radial grooves opening at one end of the annular groove and opening at the other end in the large-diameter annular groove; a small-diameter annular groove formed on the inner side of the annular groove; And a plurality of second radial grooves having one end open in the annular groove and the other end opening in the small diameter annular groove. The static pressure gas bearing according to any one of claims 6 to 9, wherein the bearing body has, in addition to the annular groove, and is formed on the other surface thereof and surrounds the annular groove on the outer side of the annular groove a large-diameter annular groove; a plurality of first radial grooves opening at one end of the annular groove and opening at the other end in the large-diameter annular groove; forming a small inner side of the annular groove a diameter annular groove; and a plurality of second radial grooves having one end open at the annular groove and the other end opening in the small diameter annular groove. A linear motion guiding device is characterized in that: on the outer side of the guiding member having the upper guiding surface and the two side guiding surfaces, a pair of upper side plates facing the upper guiding plate and the opposite sides are arranged The cross section is a movable platform of a font type; on the inner surface of the lower surface of the upper platform and the side plates of the movable platform, a ball stud having a ball body facing inward is respectively disposed; and a guiding surface above the ball stud bolt and the guiding member And a static pressure gas bearing according to any one of claims 1 to 12, wherein the spherical pressure receiving recess is slidably coupled to the ball of the ball stud and guides the bearing body and the guiding member. Face and face guide each other.