TWI487566B - The method of refining organic materials with impurities through ionic liquids and apparatus therefore - Google Patents

The method of refining organic materials with impurities through ionic liquids and apparatus therefore Download PDF

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TWI487566B
TWI487566B TW103120686A TW103120686A TWI487566B TW I487566 B TWI487566 B TW I487566B TW 103120686 A TW103120686 A TW 103120686A TW 103120686 A TW103120686 A TW 103120686A TW I487566 B TWI487566 B TW I487566B
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organic material
ionic liquid
sublimation
purifying
storage tank
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TW201524588A (en
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Tae Won Kim
Jong Ho Lee
Jae Cheol Park
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Korea Ind Tech Inst
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Description

利用離子液體的有機材料純化方法及純化裝置Organic material purification method and purification device using ionic liquid

本發明涉及基於離子液體技術的有機材料純化方法及純化裝置,更具體地說,本發明涉及作為篩選多種離子液體(Ionic liquids)和純化物件有機材料之間最佳提取組合的裝置,即使使用微量的OLED(Organic Light Emitting Diodes)有機材料,還能用實驗迅速地確認何種離子液體最適合於物件有機材料再結晶化的有機材料簡易純化方法及純化裝置。The present invention relates to an organic material purification method and a purification apparatus based on an ionic liquid technology, and more particularly to a device for screening an optimal extraction combination between an ionic liquid (Ionic liquids) and an organic material of a purified article, even if a trace amount is used. OLED (Organic Light Emitting Diodes) organic materials, can also be used to quickly confirm which ionic liquid is most suitable for the organic material recrystallization of the material, simple purification method and purification device.

另外,本發明也涉及將離子液體作為篩檢程式可以大量純化OLED有機材料的有機材料純化方法及純化裝置。In addition, the present invention also relates to an organic material purification method and a purification apparatus capable of using a ionic liquid as a screening program to mass-purify an OLED organic material.

最近OLED顯示裝置被關注作為下一代顯示裝置。其理由是不僅不需要無機LED所需求的高驅動電壓,還具有自身發光、薄片、快速回應時間、廣視角等的優點和因各種有機化合物易於彩色化的優點。這種OLED是指空穴和電子在發光層再結合後以激發態形成激發子(exciton),從形成的激發子的能量放出特定波長光的發光元件。Recently, OLED display devices have been attracting attention as next-generation display devices. The reason for this is that not only the high driving voltage required for the inorganic LED is not required, but also the advantages of self-luminescence, flakes, fast response time, wide viewing angle, and the like, and the advantage that various organic compounds are easily colored. Such an OLED refers to a light-emitting element in which holes and electrons are recombined in an illuminating layer to form an exciton in an excited state, and light of a specific wavelength is emitted from the energy of the formed exciton.

第1圖是顯示OLED結構的概念圖。如第1圖所示,OLED是在玻璃等的透明基板(Glass)110上依序形成陽極(Anode)120,空穴注入層(Hole injection layer : HIL)130,空穴傳輸層(Hole transport layer : HTL)140,有機發光層(Emission layer : EML)150,電子傳輸層(Electron transport layer : ETL)160,電子注入層(Electron injection layer : EIL)170及陰極(Cathode)180的多層結構所構成。Figure 1 is a conceptual diagram showing the structure of an OLED. As shown in FIG. 1, the OLED is formed by sequentially forming an anode (Anode) 120, a hole injection layer (HIL) 130, and a hole transport layer on a transparent substrate 110 such as glass. : HTL) 140, an organic light-emitting layer (EML) 150, an electron transport layer (ETL) 160, an electron injection layer (Electron injection layer: EIL) 170, and a cathode (Cathode) 180 .

製作如上所述多層結構的OLED需要用於發光及傳輸電荷的有機物。但是,因為這種有機物不僅干預電子和電動的注入,而且直接干預空穴和電子的再結合,所以有機物的純度是影響OLED的彩色,發光效率及壽命的非常重要的因素。即,有機物內的少量雜質不僅是增加注入電荷的熄滅機率,降低空穴和電子的再結合機率而降低發光效率,而且由於雜質的添加形成新的能級是降低發光彩色純度的因素。An OLED in which a multilayer structure as described above is produced requires an organic substance for emitting light and transferring charges. However, because this organic matter not only interferes with the injection of electrons and electricity, but also directly interferes with the recombination of holes and electrons, the purity of organic matter is a very important factor affecting the color, luminous efficiency and lifetime of OLEDs. That is, a small amount of impurities in the organic matter is not only an increase in the probability of extinction of the injected charge, a decrease in the recombination probability of holes and electrons, but a decrease in luminous efficiency, and a new energy level due to the addition of impurities is a factor that lowers the purity of the luminescent color.

因此,為了完成高輝度、高效率、長壽命的電場發光元件,包含電場發光元件結構的優化、空穴(或是電子)注入及傳輸特性良好的新材料開發、以及有機發光層的新材料開發在內,需要提高OLED有機物的純度。Therefore, in order to complete an electric field light-emitting element having high luminance, high efficiency, and long life, it is necessary to optimize the structure of the electric field light-emitting element, develop a new material with good hole (or electron) injection and transmission characteristics, and develop a new material for the organic light-emitting layer. Within, there is a need to increase the purity of OLED organics.

另一方面,純化OLED有機物通常利用溶劑的再結晶或昇華的再結晶方法。昇華的再結晶方法是在真空下昇華有機材料後再結晶,所以有不含雜質的特性。因此,有機電場發光元件的有機材料的純化方法通常使用昇華純化方法。On the other hand, purification of OLED organics typically utilizes a recrystallization or sublimation recrystallization process of the solvent. The recrystallization method of sublimation is to recrystallize the organic material under vacuum, so that it has the property of not containing impurities. Therefore, a method of purifying an organic material of an organic electric field light-emitting element generally employs a sublimation purification method.

在此,昇華(sublimate)是指在相平衡圖的三相點以下的溫度和壓力下產生的氣體-固體相的遷移現象。即使在常壓下加熱分解的物質,在三相點以下的低壓下,在較高的溫度也保持不分解的狀態。利用這種性質在能控制溫度斜率的昇華裝置中,對混合物加熱以物質尚未分解的狀態與不同昇華點的雜質分離的操作稱為真空昇華法(vacuum sublimation method)。這種真空昇華法是純粹的物理方法,因不使用補助試劑或其餘的化學方法,具有無試劑污染、高分離度的優點,對OLED有機材料的純化是有用的方法。Here, sublimate refers to the migration phenomenon of a gas-solid phase generated at a temperature and pressure below the triple point of the phase equilibrium diagram. Even if the substance which is heated and decomposed under normal pressure is maintained at a low temperature below the triple point, it does not decompose at a higher temperature. With this property, in a sublimation device capable of controlling the temperature slope, an operation of heating the mixture to separate the impurities from the different sublimation points in a state in which the substance has not been decomposed is referred to as a vacuum sublimation method. This vacuum sublimation method is a purely physical method, and has the advantages of no reagent contamination and high resolution because it does not use a supplementary reagent or the remaining chemical methods, and is a useful method for purification of OLED organic materials.

目前,通常使用的OLED有機材料的純化方法是連續昇華(train sublimation)純化法。此方法是在中空的長管末端置放純化物件材料,利用真空泵將管的內部抽成真空的狀態下,用加熱器對管加熱在整個管上形成溫度斜率。由此,根據要分離的材料和雜質的昇華點的不同,利用再結晶位置的差異可以分離材料。根據情況,自從溫度高處向溫度低處,在真空度不會降低很多的範圍內,流動與構成純化裝置的材料不反應的氮或惰性氣體,作為搬運有機材料氣體的運輸氣體。這種運輸氣體起圓滑地流動有機材料氣體的作用。At present, the purification method of the commonly used OLED organic material is a train sublimation purification method. In this method, the purified material is placed at the end of the hollow long tube, and the inside of the tube is evacuated by a vacuum pump, and the tube is heated by the heater to form a temperature gradient across the tube. Thus, depending on the material to be separated and the sublimation point of the impurity, the material can be separated by the difference in recrystallization position. Depending on the situation, nitrogen or an inert gas that does not react with the material constituting the purification device flows as a transport gas for transporting the organic material gas, from a high temperature to a low temperature, in a range where the degree of vacuum does not decrease much. This transport gas acts as a smooth flowing organic material gas.

第2圖是概略地顯示用於執行連續昇華純化法的根據現有技術的昇華純化裝置構成關係的構成圖。如第2圖所示,有機材料原料放在坩堝240中,將坩堝240配置在第2石英玻璃管210內一側。另一方面,第2石英玻璃管210的外側是第1石英玻璃管220圍繞的結構。在此,雖然沒有顯示坩堝240,其構成是正好套進在開放兩端部的中空圓筒石英管的兩端部,並由不銹鋼材料製成,具有一對有孔的蓋。Fig. 2 is a view schematically showing the configuration of a sublimation purification apparatus according to the prior art for performing a continuous sublimation purification method. As shown in Fig. 2, the organic material is placed in the crucible 240, and the crucible 240 is placed on the inner side of the second quartz glass tube 210. On the other hand, the outer side of the second quartz glass tube 210 is a structure in which the first quartz glass tube 220 is surrounded. Here, although the crucible 240 is not shown, it is configured to fit right at both end portions of the hollow cylindrical quartz tube at the open end portions, and is made of a stainless steel material, and has a pair of perforated covers.

加熱器250設置得圍繞第1石英玻璃管220的一側。此時,加熱器250設置在對應坩堝240位置的位置。真空泵230是設置在第2石英玻璃管210的另一側,起保持第2石英玻璃管210內部真空狀態的作用。The heater 250 is disposed around one side of the first quartz glass tube 220. At this time, the heater 250 is disposed at a position corresponding to the position of the crucible 240. The vacuum pump 230 is provided on the other side of the second quartz glass tube 210, and functions to maintain the vacuum state inside the second quartz glass tube 210.

具有上述結構的昇華純化裝置200是首先利用真空泵230將第2石英玻璃管210的內部抽成真空狀態,將小量的運輸氣體流向設置有真空泵230的第2石英玻璃管210整體,形成微細的壓力斜率。並且,利用加熱器250慢慢加熱在第2石英玻璃管210整體形成溫度斜率,此時形成的溫度分佈顯示正態分佈曲線的形狀。In the sublimation purification apparatus 200 having the above configuration, first, the inside of the second quartz glass tube 210 is evacuated by the vacuum pump 230, and a small amount of transport gas flows to the entire second quartz glass tube 210 provided with the vacuum pump 230 to form a fine Pressure slope. Further, the temperature gradient of the entire second quartz glass tube 210 is gradually heated by the heater 250, and the temperature distribution formed at this time shows the shape of the normal distribution curve.

另外,當坩堝240的溫度高過其所含的純化物件有機材料原料的昇華點時,材料開始昇華,此時形成的氣體分子向坩堝240的外部流出後,由壓力斜率的作用開始向設置有真空泵230的方向移動。此時,比有機材料原料的昇華點高的雜質就滯留在坩堝240內部。In addition, when the temperature of the crucible 240 is higher than the sublimation point of the raw material of the organic material contained in the purified material, the material begins to sublimate, and after the gas molecules formed at this time flow out to the outside of the crucible 240, the pressure slope is started to be set. The direction of the vacuum pump 230 moves. At this time, impurities higher than the sublimation point of the organic material raw material are retained inside the crucible 240.

設置有真空泵230的方向移動的氣體分子在具有昇華點以下溫度的第2石英玻璃管210區間再遷移到固體相,在第2石英玻璃管210的內側表面形成結晶。元件符號260表示在第2石英玻璃管210的內側表面以結晶狀態形成的純化材料。另外,經過一定時間後停止加熱慢慢冷卻到室溫,解開第2石英玻璃管210刮出並回收結晶狀態的純化材料260。The gas molecules in the direction in which the vacuum pump 230 is moved are further migrated to the solid phase in the second quartz glass tube 210 having the temperature lower than the sublimation point, and crystals are formed on the inner surface of the second quartz glass tube 210. Reference numeral 260 denotes a purified material which is formed in a crystal state on the inner surface of the second quartz glass tube 210. Further, after a certain period of time, the heating was stopped and the temperature was gradually cooled to room temperature, and the second quartz glass tube 210 was unwound and the purified material 260 in a crystalline state was recovered.

然而,在OLED使用的有機材料(提存材料)必須是雜質含量極小的高純度狀態,因此只靠一次的純化很難獲得所需純度的材料。因此,利用第2圖所示裝置的純化方法是需要反復數次昇華純化過程才能獲得高純度的材料,反復的純化過程所需的操作時間長,不適合大量生產。However, the organic material (extracting material) used in the OLED must be in a highly pure state in which the impurity content is extremely small, so that it is difficult to obtain a material of a desired purity by one-time purification. Therefore, the purification method using the apparatus shown in Fig. 2 requires repeated sublimation purification processes to obtain a high-purity material, and the repeated purification process requires a long operation time and is not suitable for mass production.

另外,因為要經過多步昇華純化程序,只能獲得初期投入有機材料的70%以下的純化量,具有成本高、耗電量多的問題。In addition, since the multi-step sublimation purification procedure is required, only a purification amount of 70% or less of the initial input organic material can be obtained, which has a problem of high cost and high power consumption.

換句話說,昇華純化法為例,雖然具有利用有機材料的昇華點差異將原料物質可以純化成高純度有機物質的優點,但是純化過程在反復昇華-冷凝的過程中相當量的有機物質與惰性氣體一起排出而損失,具有最終純化物質對比出發物質的收率非常低的問題。另外,還有根據各有機材料優化提存設備時消耗巨大時間和費用的問題。In other words, the sublimation purification method is an example. Although there is an advantage that the raw material can be purified into a high-purity organic substance by utilizing the difference in sublimation point of the organic material, the purification process has a considerable amount of organic matter and inertness in the process of repeated sublimation-condensation. The gas is discharged together and lost, and there is a problem that the yield of the final purified material is very low compared to the starting material. In addition, there is a problem in that it takes a lot of time and expense to optimize the storage of the device according to each organic material.

為了解決上述問題,本發明人要提供,利用在真空中亦能使用的離子液體作為溶劑,透過選定有機材料的純化溫度、最合適的離子液體等,迅速地優化基於離子液體程序的純化程序參數,能大量純化OLED有機材料的基於離子液體程序的嶄新有機材料純化程序。In order to solve the above problems, the present inventors have provided that the ionic liquid which can be used in a vacuum can be used as a solvent to rapidly optimize the purification procedure parameters based on the ionic liquid program by the purification temperature of the selected organic material, the most suitable ionic liquid, and the like. A new organic material purification program based on an ionic liquid program capable of purifying OLED organic materials in large quantities.

可是,由於OLED有機材料的原料的價錢太貴,要實驗基於離子液體程序的大量純化程序,具有費用等的現實障礙。因此,需要以實驗室的水準,將各種離子液體作為物件迅速地確認目的有機材料的昇華氣體是否再結晶化,並研究這種再結晶化的離子液體的溫度、壓力條件及隨溫度的溶解度變化等,探索新純化程序的可能性並優化程序條件的簡易純化裝置。由此,可以期待節省基於離子液體程序的新大量純化程序的程序費用、節省優化程序所需時間等的效果。However, since the price of the raw material of the OLED organic material is too expensive, it is necessary to experiment with a large number of purification procedures based on the ionic liquid program, which has practical obstacles such as cost. Therefore, it is necessary to quickly confirm whether the sublimation gas of the target organic material is recrystallized by using various ionic liquids as an object, and to study the temperature, pressure conditions and solubility changes of the recrystallized ionic liquid. Etc., a simple purification device that explores the possibilities of new purification procedures and optimizes program conditions. Thus, it is expected to save the program cost of a new large-scale purification program based on the ionic liquid program, and the effect of saving the time required for optimizing the program.

(發明需要解決的問題)(The problem that the invention needs to solve)

因此,本發明是為了解決如前所述的現有技術問題而提出,其目的是提供,利用在真空中穩定的離子液體使小量的有機材料再結晶化,在實驗上可以確認有機材料純化程序的,利用離子液體的有機材料簡易純化方法及純化裝置。Accordingly, the present invention has been made to solve the above-mentioned problems of the prior art, and an object thereof is to provide a process for confirming the purification of an organic material by experimentally recrystallizing a small amount of an organic material by using an ionic liquid which is stable in a vacuum. A simple purification method and a purification device for an organic material using an ionic liquid.

另外,本發明的另一目的是提供,將在真空中穩定的離子液體作為篩檢程式可以方便地大量純化生產OLED有機材料的,利用離子液體的有機材料純化方法及純化裝置。In addition, another object of the present invention is to provide an organic material purification method and a purification apparatus using an ionic liquid, which can conveniently mass-purify an OLED organic material by using an ionic liquid which is stable in a vacuum as a screening program.

(解決問題之技術手段)(Technical means to solve the problem)

為了完成如上所述的目的,根據本發明的利用離子液體的有機材料簡易純化方法是,作為在真空氣氛中利用離子液體純化OLED(Organic Light Emitting Diodes)有機材料的純化方法,包含:將含有雜質的OLED有機材料昇華的昇華步驟;擴散的所述有機材料的昇華氣體溶解在所述離子液體的溶解步驟;以及在所述離子液體使所述有機材料過飽和,由此將所述有機材料再結晶化的再結晶化步驟。In order to accomplish the object as described above, a simple purification method of an organic material using an ionic liquid according to the present invention is a purification method for purifying an OLED (Organic Light Emitting Diodes) organic material by using an ionic liquid in a vacuum atmosphere, comprising: containing impurities a sublimation step of sublimation of the OLED organic material; a step of dissolving the diffused gas of the organic material dissolved in the ionic liquid; and supersaturating the organic material in the ionic liquid, thereby recrystallizing the organic material The recrystallization step.

另外,根據本發明,其特徵在於,在所述昇華步驟中所述有機材料是透過加熱而昇華。Further, according to the invention, the organic material is sublimated by heating in the sublimation step.

另外,根據本發明,其特徵在於,所述離子液體是塗布在基板上,且在所述溶解步驟中,為了調整所述有機材料的溶解度,調整所述基板的溫度。Further, according to the invention, the ionic liquid is coated on a substrate, and in the dissolving step, in order to adjust the solubility of the organic material, the temperature of the substrate is adjusted.

另外,根據本發明,其特徵在於,在所述溶解步驟中將所述基板的溫度保持在室溫~200℃範圍內。Further, according to the invention, it is characterized in that the temperature of the substrate is maintained in the range of room temperature to 200 ° C in the dissolving step.

另外,為了完成如上所述的目的,根據本發明的利用離子液體的有機材料簡易純化裝置,作為在真空氣氛中利用離子液體純化OLED(Organic Light Emitting Diodes)有機材料的裝置,包含:將含有雜質的OLED有機材料昇華的昇華手段;擴散的所述有機材料的昇華氣體溶解在所述離子液體使所述有機材料過飽和,由此將所述有機材料再結晶化的再結晶化手段。In addition, in order to accomplish the object as described above, the simple purification apparatus for an organic material using an ionic liquid according to the present invention, as an apparatus for purifying an organic material of an OLED (Organic Light Emitting Diodes) by using an ionic liquid in a vacuum atmosphere, comprises: containing impurities Sublimation means for sublimation of the OLED organic material; a sublimation gas of the diffused organic material dissolved in the ionic liquid to supersaturate the organic material, thereby recrystallizing the organic material.

另外,根據本發明,其特徵在於,所述昇華手段包含:收容所述有機材料的坩堝;設置有所述坩堝並具有一定內部容積的處理腔體;將所述處理腔體的內部抽成真空狀態的真空泵;以及對所述坩堝加熱的第1加熱器。Further, according to the present invention, the sublimation means includes: a crucible containing the organic material; a processing chamber provided with the crucible and having a certain internal volume; and evacuating the inside of the processing chamber a vacuum pump in a state; and a first heater that heats the crucible.

另外,根據本發明,其特徵在於,所述昇華手段還包含將所述坩堝的上部側選擇地開放或封閉的快門。Further, according to the present invention, the sublimation means further includes a shutter that selectively opens or closes an upper side of the crucible.

另外,根據本發明,其特徵在於,所述再結晶化手段包含:塗布所述離子液體的基板;支持所述基板的護板;設置在所述處理腔體的上部對所述基板加熱的第2加熱器;以及形成在所述第2加熱器的下部支持所述護板的支持部件。Further, according to the present invention, the recrystallization means includes: a substrate on which the ionic liquid is applied; a shield that supports the substrate; and a portion that is heated on the substrate at an upper portion of the processing chamber a heater; and a support member formed to support the shield at a lower portion of the second heater.

另外,根據本發明,其特徵在於,所述再結晶化手段還包含設置在所述支持部件測定所述基板溫度的熱電偶(thermocouple),利用所述熱電偶測定的溫度控制所述第2加熱器的溫度。Further, according to the present invention, the recrystallization means further includes a thermocouple provided on the support member to measure the temperature of the substrate, and the second heating is controlled by a temperature measured by the thermocouple. Temperature of the device.

另外,根據本發明,其特徵在於,所述離子液體是以液滴(droplet)形態塗布在所述基板上。Further, according to the invention, the ionic liquid is applied onto the substrate in the form of a droplet.

另外,根據本發明,其特徵在於,還包含將所述再結晶化的有機材料拍攝分析的分析手段。Further, according to the present invention, there is further provided an analysis means for photographing and analyzing the recrystallized organic material.

另外,根據本發明,其特徵在於,所述分析手段包含測定所述再結晶化的有機材料厚度的厚度測定器(thickness monitor)。Further, according to the invention, the analysis means includes a thickness monitor for measuring the thickness of the recrystallized organic material.

另外,為了完成如上所述的目的,根據本發明的利用離子液體的有機材料純化方法,作為在真空氣氛中利用離子液體純化OLED(Organic Light Emitting Diodes)有機材料的純化方法,包含:將含有雜質的OLED有機材料昇華的昇華步驟;流動所述有機材料的昇華氣體接觸所述離子液體的流動步驟;所述昇華氣體溶解在所述離子液體的溶解步驟;以及在所述離子液體使所述有機材料過飽和,由此將所述有機材料再結晶化的再結晶化步驟。In addition, in order to accomplish the object as described above, the method for purifying an organic material using an ionic liquid according to the present invention as a method for purifying an organic material of an OLED (Organic Light Emitting Diodes) by using an ionic liquid in a vacuum atmosphere includes: containing impurities a sublimation step of sublimation of the OLED organic material; a flow step of contacting the sublimation gas of the organic material to contact the ionic liquid; a step of dissolving the sublimation gas in the dissolution of the ionic liquid; and a step of dissolving the organic liquid in the ionic liquid The material is supersaturated, thereby recrystallizing the organic material.

另外,根據本發明,其特徵在於,所述流動步驟中,所述昇華氣體被惰性氣體強制流動到在儲存槽儲存的離子液體內。Further, according to the present invention, in the flowing step, the sublimation gas is forcibly flowed by the inert gas into the ionic liquid stored in the storage tank.

另外,根據本發明,其特徵在於,所述溶解步驟和所述再結晶化步驟之間還包含將不溶解並收集在所述儲存槽上部的所述惰性氣體向所述儲存槽的外部排出的排出步驟。Further, according to the present invention, the dissolving step and the recrystallization step further include discharging the inert gas which is not dissolved and collected in the upper portion of the storage tank to the outside of the storage tank Discharge step.

另外,根據本發明,其特徵在於,所述再結晶化步驟之後還包含將所述再結晶化的有機材料從所述離子液體回收的回收步驟。Further, according to the present invention, the recrystallization step further includes a recovery step of recovering the recrystallized organic material from the ionic liquid.

另外,根據本發明,其特徵在於,所述昇華氣體混入所述離子液體之前為使溫度保持在所述有機材料的昇華點以上對所述昇華氣體加熱的加熱步驟。Further, according to the present invention, the heating step of heating the sublimation gas to maintain the temperature above the sublimation point of the organic material before the sublimation gas is mixed into the ionic liquid.

另外,根據本發明,其特徵在於,所述溶解步驟中為了調整所述有機材料的溶解度調整所述離子液體的溫度。Further, according to the present invention, in the dissolving step, the temperature of the ionic liquid is adjusted in order to adjust the solubility of the organic material.

另外,根據本發明,其特徵在於,所述排出步驟中排出的所述惰性氣體是回收利用為所述流動步驟的載氣。Further, according to the invention, the inert gas discharged in the discharging step is a carrier gas which is recycled as the flow step.

另外,為了完成如上所述的目的,根據本發明的利用離子液體的有機材料純化裝置,作為在真空氣氛中利用離子液體純化OLED(Organic Light Emitting Diodes)有機材料的裝置,包含:將含有雜質的OLED有機材料昇華的昇華手段;流動所述有機材料的昇華氣體接觸所述離子液體的流動手段;以及將所述昇華氣體溶解於所述離子液體使所述有機材料過飽和,由此將所述有機材料再結晶化的再結晶化手段。In addition, in order to accomplish the object as described above, an organic material purification apparatus using an ionic liquid according to the present invention, as an apparatus for purifying an OLED (Organic Light Emitting Diodes) organic material by using an ionic liquid in a vacuum atmosphere, includes: containing impurities a sublimation means for sublimating an OLED organic material; a means for flowing a sublimation gas flowing the organic material to contact the ionic liquid; and dissolving the sublimation gas in the ionic liquid to supersaturate the organic material, thereby Recrystallization means for recrystallization of materials.

另外,根據本發明,其特徵在於,所述昇華手段包含:收容所述有機材料的坩堝;設置有所述坩堝並具有一定內部容積的處理腔體;將所述處理腔體的內部抽成真空狀態的真空泵;以及對所述坩堝加熱的第1加熱器。Further, according to the present invention, the sublimation means includes: a crucible containing the organic material; a processing chamber provided with the crucible and having a certain internal volume; and evacuating the inside of the processing chamber a vacuum pump in a state; and a first heater that heats the crucible.

另外,根據本發明,其特徵在於,所述再結晶化手段包含:收容所述離子液體的儲存槽;一側與所述處理腔體的內部連通,另一側浸入所述儲存槽的離子液體的連接導管;以及將所述儲存槽的內部抽成真空狀態的真空泵。Further, according to the present invention, the recrystallization means includes: a storage tank for accommodating the ionic liquid; one side communicating with the inside of the processing chamber; and the other side immersing the ionic liquid in the storage tank a connecting conduit; and a vacuum pump that draws the interior of the storage tank into a vacuum state.

另外,根據本發明,其特徵在於,還包含為了保持所述有機材料的昇華點對所述連接導管的外部加熱的第2加熱器。Further, according to the invention, there is further provided a second heater for heating the outside of the connecting duct in order to maintain the sublimation point of the organic material.

另外,根據本發明,其特徵在於,還包含為了調整所述有機材料的溶解度對含有所述離子液體的所述儲存槽的下部加熱的第3加熱器。Further, according to the present invention, the third heater for heating the lower portion of the storage tank containing the ionic liquid in order to adjust the solubility of the organic material is further included.

另外,根據本發明,其特徵在於,還包含設置在所述儲存槽的內側上部,將所述有機材料的純化中使用的所述離子液體在真空中加熱到一定溫度以上蒸發後收集,以便回收利用的離子液體收集部。Further, according to the present invention, it is characterized in that it further comprises an inner side upper portion of the storage tank, and the ionic liquid used for purification of the organic material is heated in a vacuum to a certain temperature or more and evaporated to collect Ionized liquid collection unit utilized.

另外,根據本發明,其特徵在於,所述離子液體收集部包含:固定在所述儲存槽內側面的收集板;以及固定在所述儲存槽內側面將所述收集板收集的離子液體收集的收集桶。Further, according to the present invention, the ionic liquid collecting portion includes: a collecting plate fixed to an inner side surface of the storage tank; and an ionic liquid collected on the inner side of the storage tank to collect the ionic liquid collected by the collecting plate Collect buckets.

另外,根據本發明,其特徵在於,還包含將所述收集桶收集的離子液體退回所述儲存槽的離子液體退回手段。Further, according to the present invention, there is further provided an ionic liquid retreating means for returning the ionic liquid collected by the collection tub to the storage tank.

另外,根據本發明,其特徵在於,還包含與所述儲存槽選擇地連通,並構成得能結合分離,個別回收所述再結晶化的有機材料的回收桶。Further, according to the present invention, there is further provided a recovery tank which is selectively connected to the storage tank and configured to be capable of being combined and separated to individually recover the recrystallized organic material.

另外,根據本發明,其特徵在於,所述流動手段包含連接在所述處理腔體的一側供應惰性氣體的惰性氣體供應源,所述再結晶化手段還包含將在所述儲存槽的離子液體上面收集的所述惰性氣體向所述儲存槽的外部排出的排出泵。Further, according to the present invention, the flow means includes an inert gas supply source for supplying an inert gas to one side of the processing chamber, and the recrystallization means further includes ions to be used in the storage tank A discharge pump that discharges the inert gas above the liquid to the outside of the storage tank.

另外,根據本發明,其特徵在於,還包含將透過所述排出泵排出的惰性氣體退回所述惰性氣體供應源的惰性氣體退回手段。Further, according to the present invention, the present invention further includes an inert gas retracting means for returning the inert gas discharged through the discharge pump to the inert gas supply source.

(對照先前技術之功效)(cf. the efficacy of prior art)

本發明是即使昇華微量的有機材料,在離子液體可以確認再結晶化,因此具有以微量的有機材料易於確認有機材料的純化可能性的優點。According to the present invention, even if a trace amount of an organic material is sublimated, recrystallization can be confirmed in an ionic liquid, and therefore it is easy to confirm the possibility of purification of an organic material with a trace amount of an organic material.

另外,本發明是由於離子液體的非揮發性,在微量的離子液體使有機材料的昇華氣體容易過飽和,由此具有可以迅速地確認有機材料的再結晶化程序的優點。Further, in the present invention, since the ionic liquid is non-volatile, the sublimation gas of the organic material is easily supersaturated in a trace amount of the ionic liquid, whereby the recrystallization process of the organic material can be quickly confirmed.

另外,本發明是裝置的構成非常簡單,即使有機材料不同,具有可以節省探索最好的離子液體並優化程序條件所需的費用和時間的優點。In addition, the present invention is a very simple construction of the apparatus, and even if the organic materials are different, there is an advantage that the cost and time required to explore the best ionic liquid and optimize the process conditions can be saved.

另外,本發明是將在有機材料的昇華純化程序中產生的昇華氣體混入在真空中亦然穩定的離子液體內,並將離子液體作為昇華氣體的液體篩檢程式,由此具有可以大幅提高有機材料的純化收率的優點。In addition, the present invention is a liquid screening method in which a sublimation gas generated in a sublimation purification process of an organic material is mixed in an ionic liquid which is stable in a vacuum, and the ionic liquid is used as a sublimation gas, thereby having a substantial increase in organic The advantage of the purified yield of the material.

另外,本發明是調整裝置的容量,利用大量的離子液體,向離子液體內部投入有機材料直到過飽和度界限,由此可以大量純化有機材料,具有可使有機材料低價化的優點。Further, the present invention is an adjustment device having a large amount of ionic liquid, and the organic material is introduced into the ionic liquid to the supersaturation limit, whereby the organic material can be purified in a large amount, and the organic material can be reduced in cost.

另外,本發明是透過離子液體的再純化程序可以回收利用,由此具有可以實現製造程序綠色化的優點。Further, the present invention can be recycled by the re-purification procedure of the ionic liquid, thereby having the advantage that the manufacturing process can be greened.

以下,結合附圖對根據本發明的利用離子液體的有機材料純化方法及純化裝置的較佳實施例進行詳細的說明。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of an organic material purification method and a purification apparatus using an ionic liquid according to the present invention will be described in detail with reference to the accompanying drawings.

<第1實施例><First Embodiment>

第3圖是根據本發明第1實施例的利用離子液體的有機材料簡易純化裝置構成關係的斜視圖。如第3圖所示,根據本實施例的有機材料簡易純化裝置300是在真空氣氛中利用離子液體純化OLED有機材料的裝置,包含:將含有雜質的OLED有機材料昇華的昇華手段;擴散的有機材料的昇華氣體溶解在離子液體使有機材料過飽和,由此將有機材料再結晶化的再結晶化手段。另外,根據本實施例的有機材料簡易純化裝置300,其構成還包含:將在離子液體再結晶化的有機材料拍攝分析的分析手段;和在整體上控制昇華手段、再結晶化手段及分析手段操作的控制手段。Fig. 3 is a perspective view showing the relationship of the constitution of an organic material simple purification apparatus using an ionic liquid according to the first embodiment of the present invention. As shown in FIG. 3, the organic material simple purification device 300 according to the present embodiment is a device for purifying an OLED organic material by using an ionic liquid in a vacuum atmosphere, comprising: a sublimation means for sublimating an OLED organic material containing impurities; and a diffused organic A recrystallization method in which a sublimation gas of a material is dissolved in an ionic liquid to supersaturate an organic material, thereby recrystallizing the organic material. In addition, the organic material simple purification device 300 according to the present embodiment further comprises: an analysis means for photographing and analyzing an organic material recrystallized in an ionic liquid; and controlling the sublimation means, the recrystallization means, and the analysis means as a whole Control means of operation.

根據本實施例的離子液體可以利用化學式1的1-丁基-3-甲基咪唑雙(三氟甲烷磺醯)亞胺鹽(1-Butyl-3-methylimidazorium bis(trifluoromethyl sulfonyl)imide)(BMIM TFSI),或化學式2的1-辛基-3-甲基咪唑雙(三氟甲烷磺醯)亞胺鹽(1-Octyl-3-methylimidazorium bis(trifluoromethyl sulfonyl)imide)(OMIM TFSI)。或,也可以使用1-乙基-3-甲基咪唑雙(三氟甲烷磺醯)亞胺鹽(1-Ethyl-3-methylimidazorium bis(trifluoromethyl sulfonyl)imide)(EMIM TFSI)。The ionic liquid according to the present embodiment can utilize 1-Butyl-3-methylimidazorium bis(trifluoromethyl sulfonyl)imide (BMIM) of Chemical Formula 1. TFSI), or 1-octyl-3-methylimidazorium bis(trifluoromethyl sulfonyl)imide (OMIM TFSI) of Chemical Formula 2. Alternatively, 1-Ethyl-3-methylimidazorium bis(trifluoromethyl sulfonyl)imide (EMIM TFSI) can also be used.

化學式1 Chemical formula 1

化學式2 Chemical formula 2

如上所述的離子液體(BMIM TFSI, OMIM TFSI, EMIM TFSI)是非揮發性有機溶劑,在離子液體內有機(organic)物質和雜質反復無數次溶解-再結晶化的過程中,由於先達到過飽和度的有機材料先再結晶化的機制,可以使用在各種有機材料的純化及再結晶化。The ionic liquid (BMIM TFSI, OMIM TFSI, EMIM TFSI) as described above is a non-volatile organic solvent. In the process of repeated dissolution-recrystallization of organic substances and impurities in an ionic liquid, the supersaturation is first achieved. The mechanism of recrystallization of organic materials can be used for purification and recrystallization of various organic materials.

另一方面,BMIM TFSI,OMIM TFSI,EMIM TFSI具有低熔點(low melting point)、低蒸汽壓(low vapor pressure)、不燃性(nonflammable)、有機分子離子組成(consist of organic molecular ions)、陽離子和陰離子的組合可控性(controllable properties by combinations of anions and cations)等特性。On the other hand, BMIM TFSI, OMIM TFSI, EMIM TFSI has a low melting point, a low vapor pressure, a nonflammable, a consist of organic molecular ions, a cation and Characteristics such as controllable properties by combinations of anions and cations.

根據本實施例的離子液體是用於有機材料的純化及再結晶化,在100~120℃,10-7 Torr也能以液體相穩定,亦可在真空中當作溶劑。The ionic liquid according to the present embodiment is used for purification and recrystallization of an organic material, and can be stabilized in a liquid phase at 100 to 120 ° C, 10 -7 Torr, or as a solvent in a vacuum.

另一方面,作為根據本實施例的有機材料原料,可以使用作為空穴傳輸層(HTL)材料的NPB(N,N'-bis(naphthalen-1-yl)-N,N'-bis(phenyl)-benzidine)材料。在此,NPB的昇華點是180℃以上。因此,構成昇華手段的處理腔體內的坩堝加熱到200℃以上時開始昇華。On the other hand, as the raw material of the organic material according to the present embodiment, NPB (N, N'-bis(naphthalen-1-yl)-N, N'-bis (phenyl) as a hole transport layer (HTL) material can be used. )-benzidine) material. Here, the sublimation point of NPB is 180 ° C or more. Therefore, when the crucible in the processing chamber constituting the sublimation means is heated to 200 ° C or more, sublimation is started.

另一方面,製作OLED元件所使用的沉積材料(有機材料原料)是除了如上所述的物質以外,還有很多種。因此,本發明可將這些不同種類的有機材料當作原料使用。On the other hand, the deposition material (organic material raw material) used for the production of the OLED element is various in addition to the materials as described above. Therefore, the present invention can use these different kinds of organic materials as raw materials.

以下,對根據本實施例的有機材料簡易純化裝置300的構成因素間的結合關係進行詳細的說明。Hereinafter, the bonding relationship between the constituent elements of the organic material simple purification device 300 according to the present embodiment will be described in detail.

昇華手段是由收容含雜質的有機材料原料321的坩堝320;在一側設置有坩堝320並具有一定內部容積的處理腔體310;將處理腔體310的內部抽成真空狀態的真空泵(未圖示);對坩堝320加熱的第1加熱器322;以及將坩堝320的上部側選擇地開放或封閉的快門340(shutter)所構成。The sublimation means is a crucible 320 containing a raw material 321 of an organic material containing impurities; a processing chamber 310 having a crucible 320 on one side and having a certain internal volume; and a vacuum pump for evacuating the inside of the processing chamber 310 (not shown) A first heater 322 that heats the crucible 320; and a shutter 340 that selectively opens or closes the upper side of the crucible 320.

在此,快門340的構成可以覆蓋坩堝320的上端,但與坩堝320的上端相隔一定距離覆蓋較好。這種快門340的控制作用是使隨著對坩堝320加熱而昇華的有機材料的昇華氣體根據真空中的擴散現象同時向再結晶化手段移動。Here, the shutter 340 may be configured to cover the upper end of the crucible 320, but is preferably covered with a certain distance from the upper end of the crucible 320. The control function of the shutter 340 is such that the sublimation gas of the organic material sublimated as the enthalpy 320 is heated is simultaneously moved to the recrystallization means in accordance with the diffusion phenomenon in the vacuum.

再結晶化手段是設置在處理腔體310內部與坩堝320相對的位置,使有機材料的昇華氣體在離子液體內再結晶化,是由塗布離子液體331的矽基板330,支持矽基板330的護板333,設置固定在處理腔體310上部的第2加熱器332,形成在第2加熱器332的下部支持護板333的支持部件334,以及設置在支持部件334測定矽基板330溫度的熱電偶335(thermocouple)所構成。The recrystallization means is disposed at a position opposite to the crucible 320 inside the processing chamber 310 to recrystallize the sublimation gas of the organic material in the ionic liquid, and is supported by the crucible substrate 330 coated with the ionic liquid 331 to support the crucible substrate 330. The plate 333 is provided with a second heater 332 fixed to the upper portion of the processing chamber 310, a support member 334 formed on the lower support plate 333 of the second heater 332, and a thermocouple provided on the support member 334 for measuring the temperature of the substrate 330. 335 (thermocouple).

在此,離子液體331是以小液滴(droplet)的形態塗布在矽基板330上。另一方面,熱電偶335是測定矽基板330的實際溫度,即根據第2加熱器332施加的溫度測定矽基板330的實際溫度透過控制手段用於調整第2加熱器332的溫度。Here, the ionic liquid 331 is coated on the ruthenium substrate 330 in the form of a droplet. On the other hand, the thermocouple 335 measures the actual temperature of the crucible substrate 330, that is, the actual temperature permeation control means of the crucible substrate 330 is used to adjust the temperature of the second heater 332 based on the temperature applied by the second heater 332.

分析手段是拍攝分析在離子液體331中再結晶化的純化材料,其構成具有厚度測定器350(thickness monitor)等。The analysis means is a purification material which is recrystallized in the ionic liquid 331 by photographing and analysis, and has a thickness monitor 350 or the like.

控制手段的作用是整體上控制昇華手段的第1加熱器322的溫度及快門340的操作、再結晶化手段的第2加熱器332的溫度、以及分析手段的操作等。The function of the control means is to control the temperature of the first heater 322, the operation of the shutter 340, the temperature of the second heater 332 of the recrystallization means, and the operation of the analysis means as a whole.

以下,說明利用如上所述構成的本實施例的有機材料簡易純化裝置純化有機材料的方法。Hereinafter, a method of purifying an organic material using the organic material simple purification apparatus of the present embodiment configured as described above will be described.

第4圖是利用在第3圖顯示的利用離子液體的有機材料簡易純化裝置的純化方法相關流程圖。如第3圖及第4圖所示,首先在處理腔體310的內部設置含有有機材料原料321的坩堝320,將坩堝320的上部以快門340封閉的狀態設置,利用真空泵把處理腔體310的內部抽成真空(S410)。Fig. 4 is a flow chart showing a purification method using an organic material simple purification apparatus using an ionic liquid shown in Fig. 3. As shown in FIGS. 3 and 4, first, a crucible 320 containing an organic material raw material 321 is provided inside the processing chamber 310, and an upper portion of the crucible 320 is closed with a shutter 340, and the processing chamber 310 is treated by a vacuum pump. The inside is evacuated (S410).

接著,利用第1加熱器322對坩堝320解熱到有機材料的昇華點。那就變成有機材料和部分雜質混合的有機材料的昇華氣體(S420)。這樣昇華的有機材料的昇華氣體被封閉坩堝320上部的快門340漸漸聚集在一起。Next, the first heater 322 is used to desorb the crucible 320 to the sublimation point of the organic material. Then, it becomes a sublimation gas of an organic material in which an organic material and a part of impurities are mixed (S420). The sublimation gas of such a sublimated organic material is gradually gathered by the shutter 340 at the upper portion of the closed crucible 320.

然後,經過一定時間後開放快門340時,有機材料的昇華氣體靠自身的推進力向矽基板330擴散移動,有機材料的昇華氣體沉積在離子液體331。然後,有機材料的昇華氣體接觸在矽基板330上塗布的離子液體331,溶解在離子液體331,再結晶化成有機材料(S430,S440)。即,溶解在離子液體331的有機材料的昇華氣體達到過飽和狀態時,再結晶化成有機材料,析出高純度的純化材料。Then, when the shutter 340 is opened after a certain period of time, the sublimation gas of the organic material diffuses and moves toward the crucible substrate 330 by its own propulsive force, and the sublimation gas of the organic material is deposited on the ionic liquid 331. Then, the sublimation gas of the organic material contacts the ionic liquid 331 coated on the ruthenium substrate 330, is dissolved in the ionic liquid 331, and is recrystallized into an organic material (S430, S440). In other words, when the sublimation gas of the organic material dissolved in the ionic liquid 331 is supersaturated, it is recrystallized into an organic material to precipitate a highly purified material.

此時,矽基板330的溫度保持在室溫~200℃範圍內較好。其理由是以離子液體為例,因為C、H、F、N、O元素構成的高分子物質以離子形態存在,具有在高溫分子結構被破壞而不能保持原有性質的特性。即,雖然各離子液體之間略有差異,但大約在200℃左右改變特性,所以離子液體的使用溫度範圍限制在室溫~200℃。即,在離子液體的特性不變化的範圍內,為使有機材料過飽和透過矽基板330提高離子液體的溫度,而且低於室溫時,不能溶解足量的有機材料,不能使有機材料再結晶化。At this time, it is preferable that the temperature of the ruthenium substrate 330 is maintained in the range of room temperature to 200 °C. The reason for this is that an ionic liquid is exemplified, and a polymer material composed of elements of C, H, F, N, and O exists in an ion form, and has a characteristic that a high molecular structure is destroyed at a high temperature and the original property cannot be maintained. That is, although there is a slight difference between the ionic liquids, the characteristics are changed at about 200 ° C, so the use temperature range of the ionic liquid is limited to room temperature to 200 ° C. That is, in the range where the characteristics of the ionic liquid do not change, the temperature of the ionic liquid is increased by supersaturating the organic material through the ruthenium substrate 330, and when it is lower than room temperature, a sufficient amount of the organic material cannot be dissolved, and the organic material cannot be recrystallized. .

另一方面,在離子液體331析出的純化材料相關資訊可從厚度測定器350確認。另外,析出的高純度純化材料可以從處理腔體310適當地回收。On the other hand, information on the purified material deposited in the ionic liquid 331 can be confirmed from the thickness measuring device 350. In addition, the precipitated high purity purified material can be appropriately recovered from the processing chamber 310.

因此,本發明能容易進行,昇華微量的有機材料並溶解在離子液體331後再結晶化的實驗,且可以適用在利用離子液體的有機材料大量純化裝置。Therefore, the present invention can be easily carried out, an experiment of sublimating a trace amount of an organic material and dissolving it in the ionic liquid 331 and recrystallizing it, and can be applied to a mass purification apparatus using an organic material of an ionic liquid.

<第2實施例><Second embodiment>

第5圖是根據本發明第2實施例的利用離子液體的有機材料純化裝置構成關係的概念圖。如第5圖所示,本實施例的有機材料純化裝置500包含:將含有雜質的OLED有機材料昇華的昇華手段;流動有機材料的昇華氣體接觸離子液體的流動手段;以及將昇華氣體溶解於所述離子液體使有機材料過飽和,由此將有機材料再結晶化的再結晶化手段。另外,本實施例的有機材料純化裝置500的構成還包含控制昇華手段、流動手段及再結晶化手段操作的控制手段。Fig. 5 is a conceptual diagram showing the relationship of the constitution of an organic material purifying apparatus using an ionic liquid according to a second embodiment of the present invention. As shown in FIG. 5, the organic material purification device 500 of the present embodiment includes: a sublimation means for sublimating an OLED organic material containing impurities; a flow means for contacting a sublimation gas of the flowing organic material to contact the ionic liquid; and dissolving the sublimation gas in the The crystallization liquid re-saturates the organic material, thereby recrystallizing the organic material. Further, the configuration of the organic material purification device 500 of the present embodiment further includes a control means for controlling the operation of the sublimation means, the flow means, and the recrystallization means.

在此,昇華手段包含:收容有機材料原料511的坩堝510;設置有坩堝510並具有一定內部容積的處理腔體520;將處理腔體520的內部抽成真空狀態的真空泵550;以及對所述坩堝510加熱的第1加熱器512而構成。而且,流動手段包含連接於處理腔體520的一側,供應惰性氣體的惰性氣體供應源560而構成。Here, the sublimation means includes: a crucible 510 containing an organic material raw material 511; a processing chamber 520 provided with a crucible 510 and having a certain internal volume; a vacuum pump 550 that evacuates the inside of the processing chamber 520 into a vacuum state; The first heater 512 heated by the crucible 510 is configured. Further, the flow means includes an inert gas supply source 560 that supplies an inert gas to the side connected to the processing chamber 520.

並且,再結晶化手段包含:收容離子液體541的儲存槽540;一側與處理腔體520的內部連通,另一側浸入儲存槽540的離子液體541的連接導管530;將儲存槽540的內部抽成真空狀態的真空泵550;以及在儲存槽540的離子液體541上面收集的氣體向儲存槽540的外部排出的排出泵553而構成。Further, the recrystallization means includes: a storage tank 540 for accommodating the ionic liquid 541; a connection conduit 530 which is in communication with the inside of the processing chamber 520 on one side and immersed in the storage tank 540 on the other side; and an inside of the storage tank 540 The vacuum pump 550 which is evacuated and the discharge pump 553 which discharges the gas collected on the ionic liquid 541 of the storage tank 540 to the outside of the storage tank 540 are constituted.

另一方面,處理腔體520和儲存槽540是在上側相互連接,在其連接部位設置真空泵550。而且,在真空泵550的連接線上分別設置與處理腔體520及儲存槽540選擇地連通的閥門551、552。On the other hand, the processing chamber 520 and the storage tank 540 are connected to each other on the upper side, and a vacuum pump 550 is provided at a joint portion thereof. Further, valves 551 and 552 that selectively communicate with the processing chamber 520 and the storage tank 540 are provided on the connection line of the vacuum pump 550, respectively.

並且,在儲存槽540的上部側還可以包含將有機材料的純化中使用的離子液體541收集,以便經過純化程序能回收利用的離子液體收集部570而構成。Further, on the upper side of the storage tank 540, an ionic liquid 541 used for purification of an organic material may be collected to be collected by the ionic liquid collecting portion 570 which can be recovered by a purification procedure.

根據本實施例所使用的離子液體541及有機材料原料511是與第1實施例相同。The ionic liquid 541 and the organic material raw material 511 used in the present embodiment are the same as in the first embodiment.

坩堝510設置在處理腔體520的底面側,在其下部具有第1加熱器512而構成。另外,坩堝510的內部是以可以收容純化物件有機材料原料511的形態構成。The crucible 510 is provided on the bottom surface side of the processing chamber 520, and has a first heater 512 at its lower portion. Further, the inside of the crucible 510 is configured to be capable of accommodating the raw material 511 of the purified material.

另一方面,連接導管530配置的形態是其一側連接於處理腔體520的上部,另一側透過儲存槽540的上部延長,浸入離子液體541。在這種連接導管530的周圍還可以設置對連接導管530加熱的第2加熱器531。在此,第2加熱器531的作用是將後述的混合氣體透過連接導管530混入離子液體541的過程中,為使混合昇華氣體513能保持昇華點對連接導管530的周圍加熱。On the other hand, the connection duct 530 is disposed in such a manner that one side thereof is connected to the upper portion of the processing chamber 520, and the other side is extended through the upper portion of the storage tank 540, and is immersed in the ionic liquid 541. A second heater 531 that heats the connection duct 530 may be provided around the connection duct 530. Here, the second heater 531 functions to mix the mixed gas passing through the connection duct 530 into the ionic liquid 541, and to heat the periphery of the connection duct 530 so that the mixed sublimation gas 513 can maintain the sublimation point.

而且,在儲存槽540的下部還可以設置第3加熱器542。在此,第3加熱器542的作用是對離子液體541加熱,調整混合昇華氣體513在離子液體541溶解的溶解度。另外,在儲存槽540的上部側還可以設置排出泵553。此時,在排出泵553的設置線上還設置閥門554較好。Further, a third heater 542 may be provided in the lower portion of the storage tank 540. Here, the third heater 542 functions to heat the ionic liquid 541 and adjust the solubility of the mixed sublimation gas 513 in the ionic liquid 541. Further, a discharge pump 553 may be provided on the upper side of the storage tank 540. At this time, it is preferable to provide the valve 554 on the line of the discharge pump 553.

另外,在儲存槽540的上部側還可以設置離子液體收集部570。在此,離子液體收集部570的作用是將有機材料的純化中使用的離子液體541蒸發後收集,以便能經過分離雜質和溶解的有機材料的純化程序後回收利用,其構成包含:固定在儲存槽540的內側面,具有曲面形態的收集板571,固定在儲存槽540的內側面,將收集板571收集的離子液體收集的收集桶572。Further, an ionic liquid collecting portion 570 may be provided on the upper side of the storage tank 540. Here, the ionic liquid collecting portion 570 functions to evaporate the ionic liquid 541 used in the purification of the organic material, and collect it so as to be recovered after the purification process of separating the impurities and the dissolved organic material, and the composition includes: fixing in the storage The inner side surface of the groove 540 has a collecting plate 571 having a curved surface shape, and is fixed to the inner side surface of the storage tank 540, and collects the collecting tank 572 of the ionic liquid collected by the collecting plate 571.

以下說明利用如上所述構成的本實施例的有機材料純化裝置純化有機材料的方法。A method of purifying an organic material using the organic material purifying apparatus of the present embodiment constructed as described above will be described below.

第6圖是使用在第5圖顯示的利用離子液體的有機材料純化裝置的純化方法相關流程圖。如第5圖及第6圖所示,首先在處理腔體520的內部設置含有有機材料原料511的坩堝510,在儲存槽540注入適當量的離子液體541後,利用真空泵550將處理腔體520和儲存槽540抽成真空。然後,利用第1加熱器512將坩堝510加熱到有機材料的昇華點。產生混合有機材料和部分雜質的有機材料的混合昇華氣體513(S610)。Fig. 6 is a flow chart showing the purification method using the organic material purifying apparatus using the ionic liquid shown in Fig. 5. As shown in FIGS. 5 and 6, first, a crucible 510 containing an organic material raw material 511 is disposed inside the processing chamber 520, and after an appropriate amount of the ionic liquid 541 is injected into the storage tank 540, the processing chamber 520 is processed by a vacuum pump 550. And the storage tank 540 is evacuated. Then, the crucible 510 is heated by the first heater 512 to the sublimation point of the organic material. A mixed sublimation gas 513 of an organic material in which an organic material and a part of impurities are mixed is produced (S610).

在此狀態下,惰性氣體供應源560向處理腔體520的內部供應惰性氣體。此時,真空度不明顯降低的範圍內與構成有機材料純化裝置500的材料不反應的氮或氬氣等當作惰性氣體使用。這種惰性氣體的作用是將混合昇華氣體513流動到儲存槽540內的離子液體541中,與混合昇華氣體513混合成混合氣體(S620)。In this state, the inert gas supply source 560 supplies an inert gas to the inside of the processing chamber 520. At this time, nitrogen or argon gas which does not react with the material constituting the organic material purification device 500 in the range where the degree of vacuum is not significantly lowered is used as an inert gas. The inert gas functions to flow the mixed sublimation gas 513 into the ionic liquid 541 in the storage tank 540, and mixes with the mixed sublimation gas 513 to form a mixed gas (S620).

這樣形成的混合氣體514隨著處理腔體520內部壓力的上升,透過連接導管530混入離子液體541內形成氣泡(S630)。另一方面,混合氣體514透過連接導管530向離子液體541內混入的過程中,設置在連接導管530周圍的第2加熱器531對連接導管530的周圍加熱,由此混合昇華氣體513以保持昇華點的狀態可以混入離子液體541。The mixed gas 514 thus formed is mixed with the ionic liquid 541 through the connection duct 530 to form bubbles as the pressure inside the processing chamber 520 rises (S630). On the other hand, in the process in which the mixed gas 514 is mixed into the ionic liquid 541 through the connection duct 530, the second heater 531 provided around the connection duct 530 heats the periphery of the connection duct 530, thereby mixing the sublimation gas 513 to maintain sublimation. The state of the dots can be mixed into the ionic liquid 541.

另一方面,混入離子液體541的混合氣體形成氣泡,氣泡內的混合昇華氣體513在離子液體541溶解,惰性氣體在離子液體541不溶解,向離子液體541的外部浮出,收集在儲存槽540的上部。這樣在儲存槽540的上部收集的惰性氣體由排出泵553向儲存槽540的外部排出回收(S640)。另一方面,向儲存槽540外部排出回收的惰性氣體透過惰性氣體退回手段退回惰性氣體供應源560可以回收利用。在此,惰性氣體退回手段是由普通的泵等構成。On the other hand, the mixed gas mixed in the ionic liquid 541 forms a bubble, the mixed sublimation gas 513 in the bubble dissolves in the ionic liquid 541, the inert gas does not dissolve in the ionic liquid 541, and floats to the outside of the ionic liquid 541, and is collected in the storage tank 540. The upper part. The inert gas thus collected in the upper portion of the storage tank 540 is discharged to the outside of the storage tank 540 by the discharge pump 553 (S640). On the other hand, the inert gas discharged to the outside of the storage tank 540 is returned to the inert gas supply source 560 through the inert gas return means and can be recycled. Here, the inert gas retracting means is constituted by a general pump or the like.

混合昇華氣體513在離子液體541溶解時,因為純化物件有機材料的含量比雜質絕對的高,有機材料先達到過飽和狀態,先開始再結晶化而析出高純度的純化材料543(S650)。此時,利用在儲存槽540的下部設置的第3加熱器542可以調整混合昇華氣體513在離子液體541溶解的溶解度。由此,調整對混合昇華氣體513的離子液體541的溶解度,在離子液體541可以控制有機材料的過飽和度及有機材料的再結晶化速度等。因此在再結晶化過程可使雜質的混入最小化,這樣在離子液體541內析出的高純度純化材料543從儲存槽540適當地回收就可。例如,在儲存槽540的一側形成通口,回收純化材料543。When the mixed sublimation gas 513 is dissolved in the ionic liquid 541, since the content of the organic material of the purified article is absolutely higher than that of the impurity, the organic material first reaches a supersaturation state, and the recrystallization is first started to precipitate a high-purity purified material 543 (S650). At this time, the solubility of the mixed sublimation gas 513 dissolved in the ionic liquid 541 can be adjusted by the third heater 542 provided at the lower portion of the storage tank 540. Thereby, the solubility of the ionic liquid 541 mixed with the sublimation gas 513 is adjusted, and the ionic liquid 541 can control the supersaturation of the organic material, the recrystallization rate of the organic material, and the like. Therefore, the mixing of impurities can be minimized in the recrystallization process, so that the high-purity purification material 543 precipitated in the ionic liquid 541 can be appropriately recovered from the storage tank 540. For example, a port is formed on one side of the storage tank 540, and the purified material 543 is recovered.

如上所述,回收在離子液體541內析出的高純度純化材料543後,在離子液體541內包含在混合氣體溶解的有機材料和小量雜質達到過飽和之前會滯留一部分。另外,隨著純化程序的進行,在離子液體541內的雜質含量增加,在經過一定時間後雜質成分也達到過飽和度,再結晶化的有機材料內產生雜質的混入。這個時候將用於純化程序的離子液體交換成高純度的離子液體較好。As described above, after the high-purity purification material 543 precipitated in the ionic liquid 541 is recovered, a part of the ionic liquid 541 is contained before the organic material dissolved in the mixed gas and the small amount of impurities reach supersaturation. Further, as the purification procedure proceeds, the content of impurities in the ionic liquid 541 increases, and after a certain period of time, the impurity component also reaches a degree of supersaturation, and impurities are mixed in the recrystallized organic material. At this time, it is preferred to exchange the ionic liquid used for the purification process into a high-purity ionic liquid.

另一方面,溶解的有機材料及雜質與離子液體比較其蒸發溫度相互不同。即,離子液體的蒸發溫度低於有機材料及雜質。利用這種特性可將離子液體成分單獨分離純化。為此,將第3加熱器542設定在離子液體的蒸發溫度加熱時,離子液體蒸發,透過離子液體收集部570的收集板571回收在收集桶572,只留下高濃縮的有機材料及雜質。這樣殘留的高濃縮有機材料及雜質個別收集後,透過使用普通溶劑的再處理,進行有機材料和雜質的分離程序後,具有一定水準純度的有機材料可以再利用為再結晶化的原料。另外,在收集桶572回收的離子液體透過離子液體退回手段退回儲存槽540內部再可以回收利用。在此,離子液體退回手段是由普通的泵等構成。On the other hand, dissolved organic materials and impurities have different evaporation temperatures from ionic liquids. That is, the evaporation temperature of the ionic liquid is lower than that of the organic material and impurities. With this property, the ionic liquid components can be separated and purified separately. For this reason, when the third heater 542 is set to be heated at the evaporation temperature of the ionic liquid, the ionic liquid evaporates, and is collected in the collecting tank 572 through the collecting plate 571 of the ionic liquid collecting portion 570, leaving only the highly concentrated organic material and impurities. After the high-concentration organic materials and impurities remaining as described above are separately collected, the organic material and the impurities are separated by a re-treatment using a common solvent, and the organic material having a certain level of purity can be reused as a recrystallized raw material. In addition, the ionic liquid recovered in the collection tank 572 is returned to the inside of the storage tank 540 through the ionic liquid return means and can be recycled. Here, the ionic liquid retracting means is constituted by a general pump or the like.

另一方面,本實施例的有機材料純化裝置500,混合氣體混入儲存槽540的離子液體541後,為使氣泡內的混合昇華氣體513與離子液體541接觸容易溶解,還可以包含使氣泡的容積變得更小的氣泡微細化手段。On the other hand, in the organic material purification device 500 of the present embodiment, after the mixed gas is mixed into the ionic liquid 541 of the storage tank 540, the mixed sublimation gas 513 in the bubble is easily dissolved in contact with the ionic liquid 541, and the volume of the bubble may be included. A means of miniaturizing bubbles becomes smaller.

另外,本實施例的有機材料純化裝置500,為使混合昇華氣體513容易接觸離子液體541,還可以包含接觸擴大手段。例如,混合昇華氣體513與惰性氣體混合的狀態下,引導在離子液體541中通過一定時間,由此可以促進昇華氣體的溶解。Further, the organic material purification device 500 of the present embodiment may further include a contact expansion means for allowing the mixed sublimation gas 513 to easily contact the ionic liquid 541. For example, in a state where the mixed sublimation gas 513 is mixed with the inert gas, it is guided to pass through the ionic liquid 541 for a certain period of time, whereby the dissolution of the sublimation gas can be promoted.

<第3實施例><Third embodiment>

第7圖是根據本發明第3實施例的利用離子液體的有機材料純化裝置構成關係的概念圖。如第7圖所示,根據本實施例的有機材料純化裝置500A是為使能圓滑地回收純化材料543A,除了部分變更儲存槽540A的形態和第3加熱器542A的配置以外,均與第2實施例的有機材料純化裝置500相同的構成。因此,在本實施例對同一的構成因素使用同一的元件符號,並省略其說明。Fig. 7 is a conceptual diagram showing the relationship of the constitution of an organic material purifying apparatus using an ionic liquid according to a third embodiment of the present invention. As shown in Fig. 7, the organic material purifying apparatus 500A according to the present embodiment is configured to enable the smooth recovery of the purified material 543A, except for partially changing the form of the storage tank 540A and the arrangement of the third heater 542A. The organic material purification device 500 of the embodiment has the same configuration. Therefore, the same component symbols are used for the same constituent elements in the present embodiment, and the description thereof will be omitted.

本實施例的儲存槽540A是以漏斗形態構成其下部,且下部側的構成單獨具有純化材料543A的回收桶544。此時,回收桶544的構成是在儲存槽540A的下端可分離結合。因此,在回收桶544漸漸堆積透過如上所述的程序析出的純化材料543A。另一方面,在儲存槽540A的下部還設置控制離子液體向回收桶544移動的閥門545。因此,在回收桶544內部堆積一定量的純化材料543A時,封閉閥門545。從儲存槽540A分離回收桶544回收純化材料543A。The storage tank 540A of the present embodiment has a lower portion formed in a funnel shape, and the lower side constitutes a recovery tank 544 having a purification material 543A alone. At this time, the recovery tank 544 is configured to be detachably coupled at the lower end of the storage tank 540A. Therefore, the purification material 543A precipitated through the above-described procedure is gradually accumulated in the recovery tank 544. On the other hand, a valve 545 for controlling the movement of the ionic liquid to the recovery tank 544 is also provided at a lower portion of the storage tank 540A. Therefore, when a certain amount of purified material 543A is accumulated inside the recovery tank 544, the valve 545 is closed. The purified material 543A is recovered by separating the recovery tank 544 from the storage tank 540A.

另一方面,本實施例的第3加熱器542A是根據儲存槽540A的下部具有回收桶544,設置在儲存槽540A的側面以間接加熱的方式加熱,以便能圓滑地析出純化材料543A。On the other hand, the third heater 542A of the present embodiment has a recovery tank 544 according to the lower portion of the storage tank 540A, and is heated in an indirect heating manner on the side surface of the storage tank 540A so that the purified material 543A can be smoothly deposited.

以下,包含如上所述利用離子液體的有機材料的純化與否,將純化效果根據實驗過程及結果等進行說明。Hereinafter, the purification of the organic material using the ionic liquid as described above is included, and the purification effect will be described based on the experimental procedure, the results, and the like.

1.1. 有機材料簡易純化實驗裝置Simple purification experiment device for organic materials

第8圖是概略地顯示利用離子液體的有機材料簡易純化實驗裝置構成關係的斜視圖。如第8圖所示,有機材料簡易純化實驗裝置主要區分成,將有機材料原料昇華的昇華部,將有機材料昇華氣體在離子液體內再結晶化的再結晶化部,以及將再結晶化的有機材料(純化材料)分析的分析部。另一方面,再結晶化部及分析部是由陶瓷加熱器、厚度測定器(thickness monitor)、熱電偶(thermo-couple)、護板(mask)構成,昇華部是由快門(shutter)、坩堝及加熱器構成。再結晶化部是在Si wafer上以液滴(droplet)形態塗布離子液體後固定在護板以固定在陶瓷加熱器,昇華部是將純化物件有機材料原料裝載在坩堝上。Fig. 8 is a perspective view schematically showing the relationship between the constitution of an organic material simple purification experimental apparatus using an ionic liquid. As shown in Fig. 8, the organic material simple purification experimental device is mainly divided into a sublimation portion that sublimates the organic material raw material, a recrystallization portion that recrystallizes the organic material sublimation gas in the ionic liquid, and a recrystallized portion. Analytical section for analysis of organic materials (purified materials). On the other hand, the recrystallization unit and the analysis unit are composed of a ceramic heater, a thickness monitor, a thermo-couple, and a mask, and the sublimation unit is a shutter or a cymbal. And the heater is composed. The recrystallization unit is formed by applying an ionic liquid in the form of a droplet on the Si wafer, and then fixing it to the ceramic plate to be fixed to the ceramic heater. The sublimation unit is for loading the raw material of the purified material on the crucible.

在利用如上所述構成的有機材料簡易純化實驗裝置的實驗,昇華部內的有機材料原料的蒸發量是透過昇華部的溫度來控制,為使從昇華部供應的有機材料在離子液體內結晶化,調整陶瓷加熱器的溫度探索了最好的結晶化溫度。In the experiment of the simple purification apparatus of the organic material constituted as described above, the evaporation amount of the organic material in the sublimation portion is controlled by the temperature of the sublimation portion, and the organic material supplied from the sublimation portion is crystallized in the ionic liquid. Adjusting the temperature of the ceramic heater explores the best crystallization temperature.

2.2. 有機材料純化實驗準備步驟Organic material purification experiment preparation steps (( 昇華部Sublimation Department ))

將要純化的有機材料原料定量(weighing)後投入坩堝安置在昇華部內部。此時,使用的有機材料原料是NPB(N,N'-di(biphenyl-4-yl)-N,N'-bis(2-methyl-biphenyl-4-yl)biphenyl-4,4'-diamine)。The raw material of the organic material to be purified is weighed, put into the crucible, and placed inside the sublimation part. At this time, the organic material used is NPB (N, N'-di(biphenyl-4-yl)-N, N'-bis(2-methyl-biphenyl-4-yl)biphenyl-4, 4'-diamine ).

3.3. 有機材料提存實驗準備步驟Organic material extraction experiment preparation steps (( 再結晶化部及分析部Recrystallization Department and Analysis Department ))

在Si wafer(50x50mm2 )上將離子液體以液滴(droplet)形態塗布後安裝在護板。然後,連接在陶瓷加熱器的支持部件上固定護板後,透過熱電偶和厚度測定器確認有機材料的結晶化溫度和從昇華部供應的有機材料的量,探索了最好的有機材料純化條件。此時,使用的離子液體是OMIM TFSI。The ionic liquid was applied as a droplet on a Si wafer (50 x 50 mm 2 ) and mounted on a shield. Then, after fixing the shield on the supporting member of the ceramic heater, the crystallization temperature of the organic material and the amount of the organic material supplied from the sublimation portion were confirmed by a thermocouple and a thickness measuring device, and the best organic material purification conditions were explored. . At this time, the ionic liquid used is OMIM TFSI.

4.4. 陶瓷加熱器Ceramic heater -- 熱電偶溫度Thermocouple temperature

第9圖是在第8圖顯示的有機材料簡易純化實驗裝置中根據陶瓷加熱器的設定溫度表示基板溫度變化的圖形。在第9圖中可以看出,在本實驗裝置安裝的陶瓷加熱器的設定溫度升到300~500℃後,實際傳達再結晶化部的溫度透過熱電偶確認的結果顯示如第9圖一樣的溫度梯度。Fig. 9 is a graph showing changes in substrate temperature in accordance with the set temperature of the ceramic heater in the organic material simple purification experimental apparatus shown in Fig. 8. It can be seen from Fig. 9 that after the set temperature of the ceramic heater installed in the experimental apparatus is raised to 300 to 500 ° C, the result of actually confirming the temperature of the recrystallization portion through the thermocouple is as shown in Fig. 9. Temperature gradient.

這種溫度變化實驗是為了確認在Si wafer上塗布的離子液體的結晶化溫度先進行的,根據其實驗結果實際結晶化溫度不是以陶瓷加熱器的溫度,而是以熱電偶測定的溫度作為基礎進行了純化實驗。This temperature change experiment was performed to confirm that the crystallization temperature of the ionic liquid coated on the Si wafer was first performed. According to the experimental results, the actual crystallization temperature was not based on the temperature of the ceramic heater but the temperature measured by the thermocouple. A purification experiment was performed.

5.5. 根據昇華部有機材料昇華溫度的沉積率變化According to the deposition rate of sublimation temperature of organic materials in sublimation (( 結晶化溫度Crystallization temperature : R.T): R.T)

第10圖是在第8圖顯示的有機材料簡易純化實驗裝置中結晶化溫度(基板溫度)是室溫時根據NPB有機材料的昇華溫度表示沉積率及整個有機物厚度變化量的圖形。本實驗是結晶化溫度為室溫時,改變昇華部的昇華溫度,透過厚度測定器分析了NPB有機材料的沉積率及整個厚度。其實驗結果,在第10圖中可以看出,確認有機材料的昇華溫度越上升,沉積率以0.1~9Å/sec增加,整個有機物的厚度以0.011~1.64μm變化。Fig. 10 is a graph showing the deposition rate and the change amount of the entire organic substance according to the sublimation temperature of the NPB organic material when the crystallization temperature (substrate temperature) is room temperature in the simple purification apparatus for organic materials shown in Fig. 8. In this experiment, the sublimation temperature of the sublimation part was changed when the crystallization temperature was room temperature, and the deposition rate and the entire thickness of the NPB organic material were analyzed by a thickness measuring device. The experimental results can be seen in Fig. 10, confirming that the sublimation temperature of the organic material increases, the deposition rate increases by 0.1 to 9 Å/sec, and the thickness of the whole organic substance changes from 0.011 to 1.64 μm.

6.6. 根據昇華部有機材料昇華溫度的沉積率變化According to the deposition rate of sublimation temperature of organic materials in sublimation (( 結晶化溫度Crystallization temperature : 100: 100 °C ))

第11圖是在第8圖顯示的有機材料簡易純化實驗裝置中結晶化溫度(基板溫度)是100℃時根據NPB有機材料的昇華溫度表示沉積率及整個有機物厚度變化量的圖形。本實驗是結晶化溫度為100℃時,改變昇華部的昇華溫度,透過厚度測定器分析了NPB有機材料的沉積率及整個厚度。其實驗結果,在第11圖中可以看出,確認有機材料的昇華溫度越上升,沉積率以0.1~9.2Å/sec增加,整個有機物的厚度以0.011~1.51μm變化。Fig. 11 is a graph showing the deposition rate and the change amount of the entire organic substance according to the sublimation temperature of the NPB organic material when the crystallization temperature (substrate temperature) is 100 ° C in the simple purification apparatus for organic materials shown in Fig. 8. In this experiment, the sublimation temperature of the sublimation part was changed when the crystallization temperature was 100 ° C, and the deposition rate and the entire thickness of the NPB organic material were analyzed by a thickness measuring device. The experimental results can be seen in Fig. 11 to confirm that the higher the sublimation temperature of the organic material is, the deposition rate increases from 0.1 to 9.2 Å/sec, and the thickness of the entire organic material changes from 0.011 to 1.51 μm.

7.7. 根據昇華部有機材料昇華溫度的沉積率變化According to the deposition rate of sublimation temperature of organic materials in sublimation (( 結晶化溫度Crystallization temperature : 110: 110 °C ))

第12圖是在第8圖顯示的有機材料簡易純化實驗裝置中結晶化溫度(基板溫度)是110℃時根據NPB有機材料的昇華溫度表示沉積率及整個有機物厚度變化量的圖形。本實驗是結晶化溫度為110℃時,改變昇華部的昇華溫度,透過厚度測定器分析了NPB有機材料的沉積率及整個厚度。其實驗結果,在第12圖中可以看出,確認有機材料的昇華溫度越上升,沉積率以0.1~12.8Å/sec增加,整個有機物的厚度以0.013~2.37μm變化。Fig. 12 is a graph showing the deposition rate and the change amount of the entire organic substance according to the sublimation temperature of the NPB organic material when the crystallization temperature (substrate temperature) is 110 ° C in the simple purification apparatus for organic materials shown in Fig. 8. In this experiment, the sublimation temperature of the sublimation part was changed at a crystallization temperature of 110 ° C, and the deposition rate and the entire thickness of the NPB organic material were analyzed by a thickness measuring device. The experimental results can be seen in Fig. 12, confirming that the sublimation temperature of the organic material increases, the deposition rate increases from 0.1 to 12.8 Å/sec, and the thickness of the entire organic substance changes from 0.013 to 2.37 μm.

8.8. 透過光學顯微鏡的離子液體內In an ionic liquid through an optical microscope NPBNPB 有機材料結晶化圖像Organic material crystallized image

第13圖是在第8圖顯示的有機材料簡易純化實驗裝置中根據有機材料昇華溫度及基板溫度透過光學顯微鏡分析在離子液體內NPB有機材料結晶化過程的照片。在第13圖中可以看出,在昇華部的昇華溫度(180℃)沒有產生NPB有機材料的昇華,沒用向離子液體供應材料。可是,NPB有機材料的昇華溫度增加到200℃以上時,開始進行昇華,確認離子液體的結晶化溫度(基板溫度)越上升,純化的NPB有機材料的結晶粒大小越大。Fig. 13 is a photograph showing the crystallization process of NPB organic material in an ionic liquid by an optical microscope according to the sublimation temperature of the organic material and the substrate temperature in the simple purification apparatus for organic materials shown in Fig. 8. As can be seen from Fig. 13, the sublimation temperature (180 ° C) of the sublimation portion did not cause sublimation of the NPB organic material, and no material was supplied to the ionic liquid. However, when the sublimation temperature of the NPB organic material is increased to 200 ° C or more, sublimation is started, and it is confirmed that the crystallization temperature (substrate temperature) of the ionic liquid increases, and the crystal grain size of the purified NPB organic material increases.

9.9. 透過Through SEMSEM 分析的離子液體內Analytical ionic liquid NPBNPB 有機材料結晶化圖像Organic material crystallized image

第14圖是在第8圖顯示的有機材料簡易純化實驗裝置製造的NPB有機材料結晶度圖像(SEM分析)。即,第14圖是以光學顯微鏡將NPB有機材料的結晶化度分析的結果作為基礎,根據有機材料昇華溫度(200,220℃)、結晶化溫度(R.T,100,110℃)對NPB有機材料結晶化度進行SEM表面分析的。在第14圖中可以看出,離子液體的結晶化溫度為R.T,100℃時,NPB有機材料的結晶化度顯示最突出的特性,在結晶化溫度(110℃)顯示結晶化度變低的現象。Fig. 14 is a NPB organic material crystallinity image (SEM analysis) manufactured by the simple purification apparatus for organic materials shown in Fig. 8. That is, Figure 14 is based on the results of crystallization analysis of NPB organic materials by optical microscopy, based on organic material sublimation temperature (200, 220 ° C), crystallization temperature (RT, 100, 110 ° C) versus NPB organic materials. The degree of crystallization was analyzed by SEM surface. As can be seen from Fig. 14, the crystallization temperature of the ionic liquid is RT. At 100 ° C, the crystallization degree of the NPB organic material shows the most outstanding characteristics, and the crystallization degree (110 ° C) shows that the degree of crystallization becomes low. phenomenon.

10.10. 透過Through RAMANRAMAN 分析的analysis NPBNPB 有機材料的結晶相分析Crystallographic phase analysis of organic materials

第15圖是由第8圖顯示的有機材料簡易純化實驗裝置再結晶化的NPB有機材料的結晶相和純化前的NPB有機材料的結晶相透過Raman分析分析的圖形。在第15圖中可以看出,在NPB有機材料的昇華溫度(220℃),結晶化溫度(基板溫度)(110℃)的純化條件下,再結晶化的NPB有機材料的結晶峰值顯示1125,1199,1222,1289,1328,1375,1529,1574,1609cm-1 的Raman shift值,顯示與純化前的NPB有機材料的結晶相幾乎一致的Raman shift值。這表示透過離子液體再結晶化時,沒有失去raw NPB有機材料具有的結晶性而再結晶化。Fig. 15 is a graph showing the crystal phase of the NPB organic material recrystallized by the organic material simple purification experimental apparatus shown in Fig. 8 and the crystal phase of the NPB organic material before purification by Raman analysis. As can be seen from Fig. 15, the crystallization peak of the recrystallized NPB organic material shows 1125 under the purification conditions of the NPB organic material sublimation temperature (220 ° C) and crystallization temperature (substrate temperature) (110 ° C). The Raman shift value of 1199, 1222, 1289, 1328, 1375, 1529, 1574, 1609 cm -1 shows a Raman shift value almost identical to the crystalline phase of the NPB organic material before purification. This means that when recrystallization by the ionic liquid, the crystallinity of the raw material of the raw NPB is not lost and recrystallization is achieved.

11.11. 透過光學顯微鏡分析的Analyzed by optical microscope NPBNPB 有機材料的結晶粒大小分析Analysis of crystal size of organic materials

第16圖是由第8圖顯示的有機材料簡易純化實驗裝置再結晶化的NPB有機材料的結晶粒大小(b)和純化前的NPB有機材料的結晶粒大小(a)透過光學顯微鏡分析的照片。在第16圖中可以看出,以純化前的NPB有機材料為例,根據倍率(x50,x100,x200)確認結晶粒形狀及大小的結果,顯示隨機方向性粉末形態的結晶粒形狀,結晶粒大小也顯示沒有一定模式的多種形態的粒子大小。可是,以離子液體內再結晶化的NPB有機材料為例,顯示具有dendrite(樹枝)結構的結晶粒形態,也顯示結晶化的NPB有機材料的最大直徑是50um大小,由此確認相對於原料物質NPB有機材料的結晶性大幅提高。Figure 16 is a graph showing the crystal grain size (b) of the NPB organic material recrystallized by the simple purification apparatus for organic materials shown in Fig. 8 and the crystal grain size of the NPB organic material before purification (a) Photographs analyzed by optical microscopy . As can be seen from Fig. 16, the NPB organic material before purification is taken as an example, and the crystal grain shape and size are confirmed according to the magnification (x50, x100, x200), and the crystal grain shape of the random directional powder form is shown. The size also shows the particle size of multiple morphologies without a certain pattern. However, the NPB organic material recrystallized in an ionic liquid is taken as an example, and the crystal grain morphology having a dendrite structure is shown, and the maximum diameter of the crystallized NPB organic material is also 50 μm, thereby confirming the relative material substance. The crystallinity of NPB organic materials is greatly improved.

Raman資料顯示原料物質和純化的NPB有機材料的結晶相幾乎一致的傾向,很難正確地預測結晶相方面的改善,但透過光學顯微鏡分析,確認透過離子液體純化法可以保持原料物質具有的結晶相,並提高結晶性及結晶粒大小。Raman data shows that the crystal phase of the raw material and the purified NPB organic material almost coincide, and it is difficult to accurately predict the improvement of the crystal phase. However, it is confirmed by optical microscopy that the ionic liquid purification method can maintain the crystal phase of the raw material. And increase crystallinity and crystal grain size.

12.12. 結論in conclusion

將利用離子液體純化的NPB有機材料物質和原料物質的資料比較分析的結果,確認到再結晶化的NPB有機材料的明顯變化。與透過多次反復昇華-冷凝過程進行有機材料純化的昇華純化法比較,在離子液體內利用有機材料物質的過飽和度再結晶的方法是不僅簡化程序,而且只將純粹有機材料物質再結晶化,具有提高純度的優點。The results of comparative analysis of the NPB organic material and the raw material purified by the ionic liquid confirmed the significant change of the recrystallized NPB organic material. Compared with the sublimation purification method for purifying organic materials through repeated iterative sublimation-condensation processes, the method of recrystallizing the supersaturation of the organic material in the ionic liquid is not only to simplify the procedure, but also to recrystallize only the pure organic material. It has the advantage of improving the purity.

另一方面,雖然本實驗是透過容量小的有機材料簡易純化實驗裝置完成,但從如上所述的實驗結果可以看出,像本發明一樣的有機材料的簡易純化技術及大量純化技術上均可適用。On the other hand, although the experiment was carried out through a simple purification experimental apparatus for an organic material having a small capacity, it can be seen from the experimental results as described above that the simple purification technique and a large amount of purification techniques of the organic material like the present invention can be Be applicable.

產業利用性Industrial utilization

透過如上所述的實施例及實驗例,可以看出,本發明是利用溶解度差異的純化程序,在離子液體內有機(organic)物質和雜質反復無數次溶解-再結晶化的過程中,由於先達到過飽和度的有機材料首先進行再結晶化的機制,只靠1次的程序可以進行對多種有機材料的純化及再結晶化。Through the above examples and experimental examples, it can be seen that the present invention utilizes a purification procedure for the difference in solubility, in the process of repeated dissolution-recrystallization of organic substances and impurities in an ionic liquid, The organic material that achieves supersaturation is firstly recrystallized, and the purification and recrystallization of various organic materials can be performed by one procedure.

另外,本發明是在真空狀態的條件下純化有機材料,由此可使外部污染源供應的雜質最小化,可以獲得高純度的有機材料(純化材料)。Further, the present invention purifies an organic material under a vacuum condition, thereby minimizing impurities supplied from an external pollution source, and obtaining a high-purity organic material (purified material).

另外,由於本發明是以離子液體作為篩檢程式,並在離子液體內進行純化過程,所以不僅沒有載氣(carrier gas)的損失,而且回收再結晶化的有機材料後,再使用離子液體可以純化有機材料,由此具有節省在純化程序中消耗的原材料損失及製造成本的效果。In addition, since the present invention uses an ionic liquid as a screening program and performs a purification process in an ionic liquid, not only the carrier gas is not lost, but also the ionic liquid can be used after recovering the recrystallized organic material. The organic material is purified, thereby having the effect of saving raw material loss and manufacturing cost consumed in the purification process.

以上,結合附圖說明了本發明的利用離子液體的有機材料純化方法及純化裝置的技術事項,但這是以本發明的較佳實施例為例進行的說明。因此,本發明並不受限於所述記載的實施例,明顯的,在本發明所屬技術領域中具有通常知識者在不脫離本發明的思想及範圍下可以實施多種修正及變形,所以這種變形例或修正例應屬於本發明的申請專利範圍。The technical matters of the organic material purification method and the purification apparatus using the ionic liquid of the present invention have been described above with reference to the accompanying drawings, but this is exemplified by a preferred embodiment of the present invention. Therefore, the present invention is not limited to the described embodiments, and it is obvious that those skilled in the art can implement various modifications and variations without departing from the spirit and scope of the invention. Modifications or modifications are intended to fall within the scope of the patent application of the present invention.

110‧‧‧透明基板
120‧‧‧陽極
130‧‧‧空穴注入層
140‧‧‧空穴傳輸層
150‧‧‧有機發光層
160‧‧‧電子傳輸層
170‧‧‧電子注入層
180‧‧‧陰極
200‧‧‧昇華純化裝置
210‧‧‧第2石英玻璃管
220‧‧‧第1石英玻璃管
230‧‧‧真空泵
240‧‧‧坩堝
250‧‧‧加熱器
260‧‧‧純化材料
300‧‧‧有機材料簡易純化裝置
310‧‧‧處理腔體
320‧‧‧坩堝
321‧‧‧有機材料原料
322‧‧‧第1加熱器
330‧‧‧矽基板
331‧‧‧離子液體
332‧‧‧第2加熱器
333‧‧‧護板
334‧‧‧支持部件
335‧‧‧熱電偶
340‧‧‧快門
350‧‧‧厚度測定器
S410‧‧‧步驟410
S420‧‧‧步驟420
S430‧‧‧步驟430
S440‧‧‧步驟440
500‧‧‧有機材料純化裝置
500A‧‧‧有機材料純化裝置
510‧‧‧坩堝
511‧‧‧有機材料原料
512‧‧‧第1加熱器
513‧‧‧混合昇華氣體
514‧‧‧混合氣體
520‧‧‧處理腔體
530‧‧‧連接導管
531‧‧‧第2加熱器
540‧‧‧儲存槽
540A‧‧‧儲存槽
541‧‧‧離子液體
542‧‧‧第3加熱器
542A‧‧‧第3加熱器
543‧‧‧純化材料
543A‧‧‧純化材料
544‧‧‧回收桶
545‧‧‧閥門
550‧‧‧真空泵
551‧‧‧閥門
552‧‧‧閥門
553‧‧‧排出泵
554‧‧‧閥門
560‧‧‧惰性氣體供應源
570‧‧‧離子液體收集部
571‧‧‧收集板
572‧‧‧收集桶
110‧‧‧Transparent substrate
120‧‧‧Anode
130‧‧‧ hole injection layer
140‧‧‧ hole transport layer
150‧‧‧Organic light-emitting layer
160‧‧‧Electronic transport layer
170‧‧‧Electronic injection layer
180‧‧‧ cathode
200‧‧‧ Sublimation purification unit
210‧‧‧2nd quartz glass tube
220‧‧‧1st quartz glass tube
230‧‧‧vacuum pump
240‧‧‧坩埚
250‧‧‧heater
260‧‧‧ Purified materials
300‧‧‧Simple material purification device
310‧‧‧Processing chamber
320‧‧‧坩埚
321‧‧‧Organic materials
322‧‧‧1st heater
330‧‧‧矽 substrate
331‧‧‧ ionic liquid
332‧‧‧2nd heater
333‧‧‧ Guard
334‧‧‧Support parts
335‧‧‧ thermocouple
340‧‧ ‧Shutter
350‧‧‧ Thickness measuring device
S410‧‧‧Step 410
S420‧‧‧Step 420
S430‧‧‧Step 430
S440‧‧‧Step 440
500‧‧‧Organic material purification unit
500A‧‧‧Organic material purification unit
510‧‧‧坩埚
511‧‧‧Organic materials
512‧‧‧1st heater
513‧‧‧ mixed sublimation gas
514‧‧‧ mixed gas
520‧‧‧Processing chamber
530‧‧‧Connecting catheter
531‧‧‧2nd heater
540‧‧‧ storage tank
540A‧‧‧ storage tank
541‧‧‧ ionic liquid
542‧‧‧3rd heater
542A‧‧‧3rd heater
543‧‧‧ Purified materials
543A‧‧‧ Purified materials
544‧‧‧Recycling bin
545‧‧‧ valve
550‧‧‧vacuum pump
551‧‧‧ Valve
552‧‧‧ Valve
553‧‧‧Draining pump
554‧‧‧ Valve
560‧‧‧Inert gas supply
570‧‧‧Ionic Liquid Collection Department
571‧‧‧ collecting board
572‧‧‧ collection bucket

第1圖是顯示OLED結構的概念圖。 第2圖是概略地顯示根據現有技術的昇華純化裝置構成關係的構成圖。 第3圖是根據本發明第1實施例的利用離子液體的有機材料簡易純化裝置構成關係的概念圖。 第4圖是使用在圖3顯示的利用離子液體的有機材料簡易純化裝置的純化方法相關流程圖。 第5圖是根據本發明第2實施例的利用離子液體的有機材料純化裝置構成關係的概念圖。 第6圖是使用在圖5顯示的利用離子液體的有機材料純化裝置的純化方法相關流程圖。 第7圖是根據本發明第3實施例的利用離子液體的有機材料純化裝置構成關係的概念圖。 第8圖是概略地顯示利用離子液體的有機材料簡易純化實驗裝置構成關係的斜視圖。 第9圖是在圖8顯示的有機材料簡易純化實驗裝置中根據加熱器的設定溫度表示基板溫度變化的圖形。 第10圖至第12圖是在圖8顯示的有機材料簡易純化實驗裝置中在各結晶化溫度(基板溫度)根據有機材料的昇華溫度表示沉積率及整個有機物厚度變化量的圖形。 第13圖是在圖8顯示的有機材料簡易純化實驗裝置中根據有機材料蒸發溫度及基板溫度透過光學顯微鏡分析在離子液體內NPB有機材料結晶化過程的照片。 第14圖是在圖8顯示的有機材料簡易純化實驗裝置製造的NPB有機材料結晶度圖像(SEM分析)。 第15圖是由圖8顯示的有機材料簡易純化實驗裝置再結晶化的NPB有機材料的結晶相和純化前的NPB有機材料的結晶相透過Raman分析分析的圖形。 第16圖是由圖8顯示的有機材料簡易純化實驗裝置再結晶化的NPB有機材料的結晶粒大小和純化前的NPB有機材料的結晶粒大小透過光學顯微鏡分析的照片。Figure 1 is a conceptual diagram showing the structure of an OLED. Fig. 2 is a view schematically showing the configuration of a sublimation purification apparatus according to the prior art. Fig. 3 is a conceptual diagram showing the relationship of the constitution of an organic material simple purification apparatus using an ionic liquid according to the first embodiment of the present invention. Fig. 4 is a flow chart showing the purification method using the simple purification apparatus for an organic material using an ionic liquid shown in Fig. 3. Fig. 5 is a conceptual diagram showing the relationship of the constitution of an organic material purifying apparatus using an ionic liquid according to a second embodiment of the present invention. Fig. 6 is a flow chart showing the purification method using the organic material purifying apparatus using the ionic liquid shown in Fig. 5. Fig. 7 is a conceptual diagram showing the relationship of the constitution of an organic material purifying apparatus using an ionic liquid according to a third embodiment of the present invention. Fig. 8 is a perspective view schematically showing the relationship between the constitution of an organic material simple purification experimental apparatus using an ionic liquid. Fig. 9 is a graph showing changes in substrate temperature in accordance with the set temperature of the heater in the organic material simple purification experiment apparatus shown in Fig. 8. Fig. 10 to Fig. 12 are graphs showing the deposition rate and the change amount of the entire organic substance at each crystallization temperature (substrate temperature) in accordance with the sublimation temperature of the organic material in the simple purification apparatus for organic materials shown in Fig. 8. Fig. 13 is a photograph showing the crystallization process of the NPB organic material in the ionic liquid by optical microscopy according to the evaporation temperature of the organic material and the substrate temperature in the simple purification apparatus for organic materials shown in Fig. 8. Fig. 14 is a NPB organic material crystallinity image (SEM analysis) manufactured by the simple purification apparatus for organic materials shown in Fig. 8. Fig. 15 is a graph obtained by Raman analysis of the crystal phase of the NPB organic material recrystallized by the organic material simple purification experimental apparatus shown in Fig. 8 and the crystal phase of the NPB organic material before purification. Fig. 16 is a photograph of the crystal grain size of the NPB organic material recrystallized by the organic material simple purification experimental apparatus shown in Fig. 8 and the crystal grain size of the NPB organic material before purification by optical microscopy.

500‧‧‧有機材料純化裝置 500‧‧‧Organic material purification unit

510‧‧‧坩堝 510‧‧‧坩埚

511‧‧‧有機材料原料 511‧‧‧Organic materials

512‧‧‧第1加熱器 512‧‧‧1st heater

513‧‧‧混合昇華氣體 513‧‧‧ mixed sublimation gas

514‧‧‧混合氣體 514‧‧‧ mixed gas

520‧‧‧處理腔體 520‧‧‧Processing chamber

530‧‧‧連接導管 530‧‧‧Connecting catheter

531‧‧‧第2加熱器 531‧‧‧2nd heater

540‧‧‧儲存槽 540‧‧‧ storage tank

541‧‧‧離子液體 541‧‧‧ ionic liquid

542‧‧‧第3加熱器 542‧‧‧3rd heater

543‧‧‧純化材料 543‧‧‧ Purified materials

550‧‧‧真空泵 550‧‧‧vacuum pump

551‧‧‧閥門 551‧‧‧ Valve

552‧‧‧閥門 552‧‧‧ Valve

553‧‧‧排出泵 553‧‧‧Draining pump

554‧‧‧閥門 554‧‧‧ Valve

560‧‧‧惰性氣體供應源 560‧‧‧Inert gas supply

570‧‧‧離子液體收集部 570‧‧‧Ionic Liquid Collection Department

571‧‧‧收集板 571‧‧‧ collecting board

572‧‧‧收集桶 572‧‧‧ collection bucket

Claims (30)

一種利用離子液體的有機材料簡易純化方法,其特徵在於,作為在真空氣氛中利用離子液體純化OLED(Organic Light Emitting Diodes)有機材料的純化方法,包含: 將含有雜質的OLED有機材料昇華的昇華步驟; 擴散的所述有機材料的昇華氣體溶解在所述離子液體的溶解步驟;以及 在所述離子液體使所述有機材料過飽和,由此將所述有機材料再結晶化的再結晶化步驟。A method for purifying an organic material using an ionic liquid, characterized in that the method for purifying an organic material of an OLED (Organic Light Emitting Diodes) by using an ionic liquid in a vacuum atmosphere comprises: a sublimation step of sublimating an OLED organic material containing impurities a step of dissolving the diffused gas of the organic material dissolved in the ionic liquid; and a recrystallization step of re-saturating the organic material in the ionic liquid, thereby recrystallizing the organic material. 如申請專利範圍第1項所述的利用離子液體的有機材料簡易純化方法,其特徵在於, 在所述昇華步驟中所述有機材料是透過加熱而昇華。The method for simple purification of an organic material using an ionic liquid according to the first aspect of the invention is characterized in that, in the sublimation step, the organic material is sublimated by heating. 如申請專利範圍第1項所述的利用離子液體的有機材料簡易純化方法,其特徵在於, 所述離子液體是塗布在基板上, 且在所述溶解步驟中,為了調整所述有機材料的溶解度,調整所述基板的溫度。The method for simple purification of an organic material using an ionic liquid according to claim 1, wherein the ionic liquid is coated on a substrate, and in the dissolving step, in order to adjust the solubility of the organic material Adjusting the temperature of the substrate. 如申請專利範圍第3項所述的利用離子液體的有機材料簡易純化方法,其特徵在於, 在所述溶解步驟中將所述基板的溫度保持在室溫~200℃範圍內。The method for simple purification of an organic material using an ionic liquid according to claim 3, wherein the temperature of the substrate is maintained in a range of from room temperature to 200 ° C in the dissolving step. 一種利用離子液體的有機材料簡易純化裝置,其特徵在於,作為在真空氣氛中利用離子液體純化OLED(Organic Light Emitting Diodes)有機材料的裝置,包含: 將含有雜質的OLED有機材料昇華的昇華手段;和 擴散的所述有機材料的昇華氣體溶解在所述離子液體使所述有機材料過飽和,由此將所述有機材料再結晶化的再結晶化手段。An apparatus for simply purifying an organic material using an ionic liquid, characterized in that, as an apparatus for purifying an organic material of an OLED (Organic Light Emitting Diodes) by using an ionic liquid in a vacuum atmosphere, comprising: a sublimation means for sublimating an OLED organic material containing impurities; And a recrystallization means in which the sublimated gas of the diffused organic material is dissolved in the ionic liquid to supersaturate the organic material, thereby recrystallizing the organic material. 如申請專利範圍第5項所述的利用離子液體的有機材料簡易純化裝置,其特徵在於, 所述昇華手段包含:收容所述有機材料的坩堝;設置有所述坩堝並具有一定內部容積的處理腔體;將所述處理腔體的內部抽成真空狀態的真空泵;以及對所述坩堝加熱的第1加熱器。The apparatus for simple purification of an organic material using an ionic liquid according to claim 5, wherein the sublimation means comprises: a crucible containing the organic material; and a treatment provided with the crucible and having a certain internal volume a cavity; a vacuum pump that evacuates the inside of the processing chamber; and a first heater that heats the crucible. 如申請專利範圍第6項所述的利用離子液體的有機材料簡易純化裝置,其特徵在於, 所述昇華手段還包含將所述坩堝的上部側選擇地開放或封閉的快門。The apparatus for simple purification of an organic material using an ionic liquid according to claim 6, wherein the sublimation means further comprises a shutter that selectively opens or closes an upper side of the crucible. 如申請專利範圍第6項所述的利用離子液體的有機材料簡易純化裝置,其特徵在於, 所述再結晶化手段包含:塗布所述離子液體的基板;支持所述基板的護板;設置在所述處理腔體的上部對所述基板加熱的第2加熱器;以及形成在所述第2加熱器的下部支持所述護板的支持部件。The apparatus for simple purification of an organic material using an ionic liquid according to claim 6, wherein the recrystallization means comprises: a substrate coated with the ionic liquid; a shield supporting the substrate; a second heater that heats the substrate at an upper portion of the processing chamber; and a support member that supports the shield at a lower portion of the second heater. 如申請專利範圍第8項所述的利用離子液體的有機材料簡易純化裝置,其特徵在於, 所述再結晶化手段還包含設置在所述支持部件測定所述基板溫度的熱電偶(thermocouple), 利用所述熱電偶測定的溫度控制所述第2加熱器的溫度。The apparatus for simple purification of an organic material using an ionic liquid according to claim 8, wherein the recrystallization means further includes a thermocouple provided on the support member to measure the temperature of the substrate, The temperature of the second heater is controlled by the temperature measured by the thermocouple. 如申請專利範圍第8項所述的利用離子液體的有機材料簡易純化裝置,其特徵在於, 所述離子液體是以液滴(droplet)形態塗布在所述基板上。The apparatus for simple purification of an organic material using an ionic liquid according to the invention of claim 8, wherein the ionic liquid is applied to the substrate in the form of a droplet. 如申請專利範圍第5項至第10項中任一項所述的利用離子液體的有機材料簡易純化裝置,其特徵在於, 還包含將所述再結晶化的有機材料拍攝分析的分析手段。The apparatus for simple purification of an organic material using an ionic liquid according to any one of claims 5 to 10, further comprising an analysis means for photographing and analyzing the recrystallized organic material. 如申請專利範圍第11項所述的利用離子液體的有機材料簡易純化裝置,其特徵在於, 所述分析手段包含測定所述再結晶化的有機材料厚度的厚度測定器(thickness monitor)。The apparatus for simple purification of an organic material using an ionic liquid according to claim 11, wherein the analysis means includes a thickness monitor for measuring a thickness of the recrystallized organic material. 一種利用離子液體的有機材料純化方法,其特徵在於,作為在真空氣氛中利用離子液體純化OLED(Organic Light Emitting Diodes)有機材料的純化方法,包含: 將含有雜質的OLED有機材料昇華的昇華步驟; 流動所述有機材料的昇華氣體接觸所述離子液體的流動步驟; 所述昇華氣體溶解在所述離子液體的溶解步驟;以及 在所述離子液體使所述有機材料過飽和,由此將所述有機材料再結晶化的再結晶化步驟。A method for purifying an organic material using an ionic liquid, characterized in that, as a purification method for purifying an OLED (Organic Light Emitting Diodes) organic material by using an ionic liquid in a vacuum atmosphere, comprising: a sublimation step of sublimating an OLED organic material containing impurities; a step of flowing a sublimation gas flowing the organic material into contact with the ionic liquid; a step of dissolving the sublimation gas in the ionic liquid; and supersaturating the organic material in the ionic liquid, thereby A recrystallization step of recrystallization of the material. 如申請專利範圍第13項所述的利用離子液體的有機材料純化方法,其特徵在於, 所述流動步驟中,所述昇華氣體被惰性氣體強制流動到在儲存槽儲存的離子液體內。The method for purifying an organic material using an ionic liquid according to claim 13 is characterized in that, in the flowing step, the sublimation gas is forcibly flowed by an inert gas into the ionic liquid stored in the storage tank. 如申請專利範圍第14項所述的利用離子液體的有機材料純化方法,其特徵在於, 所述溶解步驟和所述再結晶化步驟之間還包含將不溶解並收集在所述儲存槽上部的所述惰性氣體向所述儲存槽的外部排出的排出步驟。The method for purifying an organic material using an ionic liquid according to claim 14, wherein the dissolving step and the recrystallization step further comprise not dissolving and collecting in the upper portion of the storage tank. a step of discharging the inert gas to the outside of the storage tank. 如申請專利範圍第13項所述的利用離子液體的有機材料純化方法,其特徵在於, 所述再結晶化步驟之後還包含將所述再結晶化的有機材料從所述離子液體回收的回收步驟。The method for purifying an organic material using an ionic liquid according to claim 13, wherein the recrystallization step further comprises a recovery step of recovering the recrystallized organic material from the ionic liquid. . 如申請專利範圍第14項所述的利用離子液體的有機材料純化方法,其特徵在於, 所述昇華氣體混入所述離子液體之前為使溫度保持在所述有機材料的昇華點以上對所述昇華氣體加熱的加熱步驟。The method for purifying an organic material using an ionic liquid according to claim 14, wherein the sublimation gas is maintained in a temperature above a sublimation point of the organic material before the sublimation gas is mixed into the ionic liquid. Heating step for gas heating. 如申請專利範圍第13項所述的利用離子液體的有機材料純化方法,其特徵在於, 所述溶解步驟中為了調整所述有機材料的溶解度調整所述離子液體的溫度。The method for purifying an organic material using an ionic liquid according to claim 13, wherein in the dissolving step, the temperature of the ionic liquid is adjusted in order to adjust the solubility of the organic material. 如申請專利範圍第15項所述的利用離子液體的有機材料純化方法,其特徵在於, 所述排出步驟中排出的所述惰性氣體是回收利用為所述流動步驟的載氣。The method for purifying an organic material using an ionic liquid according to claim 15, wherein the inert gas discharged in the discharging step is a carrier gas recovered as the flow step. 一種利用離子液體的有機材料純化裝置,其特徵在於,作為在真空氣氛中利用離子液體純化OLED(Organic Light Emitting Diodes)有機材料的裝置,包含: 將含有雜質的OLED有機材料昇華的昇華手段; 流動所述有機材料的昇華氣體接觸所述離子液體的流動手段;以及 將所述昇華氣體溶解於所述離子液體使所述有機材料過飽和,由此將所述有機材料再結晶化的再結晶化手段。An organic material purification device using an ionic liquid, characterized in that, as an apparatus for purifying an OLED (Organic Light Emitting Diodes) organic material by using an ionic liquid in a vacuum atmosphere, comprising: a sublimation means for sublimating an OLED organic material containing impurities; a means for flowing the sublimation gas of the organic material to contact the ionic liquid; and a recrystallization means for dissolving the sublimation gas in the ionic liquid to supersaturate the organic material, thereby recrystallizing the organic material . 如申請專利範圍第20項所述的利用離子液體的有機材料純化裝置,其特徵在於, 所述昇華手段包含:收容所述有機材料的坩堝;設置有所述坩堝並具有一定內部容積的處理腔體;將所述處理腔體的內部抽成真空狀態的真空泵;以及對所述坩堝加熱的第1加熱器。The apparatus for purifying an organic material using an ionic liquid according to claim 20, wherein the sublimation means comprises: a crucible containing the organic material; and a processing chamber provided with the crucible and having a certain internal volume; a vacuum pump that evacuates the interior of the processing chamber; and a first heater that heats the crucible. 如申請專利範圍第21項所述的利用離子液體的有機材料純化裝置,其特徵在於, 所述再結晶化手段包含:收容所述離子液體的儲存槽;一側與所述處理腔體的內部連通,另一側浸入所述儲存槽的離子液體的連接導管;以及將所述儲存槽的內部抽成真空狀態的真空泵。The apparatus for purifying an organic material using an ionic liquid according to claim 21, wherein the recrystallization means comprises: a storage tank for accommodating the ionic liquid; and one side and an inner portion of the processing chamber a connecting conduit that communicates with the ionic liquid immersed in the storage tank on the other side; and a vacuum pump that draws the inside of the storage tank into a vacuum state. 如申請專利範圍第22項所述的利用離子液體的有機材料純化裝置,其特徵在於, 還包含為了保持所述有機材料的昇華點對所述連接導管的外部加熱的第2加熱器。The apparatus for purifying an organic material using an ionic liquid according to claim 22, further comprising a second heater for heating the outside of the connecting duct to maintain a sublimation point of the organic material. 如申請專利範圍第22項所述的利用離子液體的有機材料純化裝置,其特徵在於, 還包含為了調整所述有機材料的溶解度對含有所述離子液體的所述儲存槽的下部加熱的第3加熱器。The apparatus for purifying an organic material using an ionic liquid according to claim 22, further comprising a third heating unit for heating the lower portion of the storage tank containing the ionic liquid in order to adjust the solubility of the organic material Heater. 如申請專利範圍第24項所述的利用離子液體的有機材料純化裝置,其特徵在於, 還包含設置在所述儲存槽的內側上部,將所述有機材料的純化中使用的所述離子液體在真空中加熱到一定溫度以上蒸發後收集,以便回收利用的離子液體收集部。The apparatus for purifying an organic material using an ionic liquid according to claim 24, further comprising: disposed on an inner upper portion of the storage tank, the ionic liquid used in the purification of the organic material The liquid is collected by heating in a vacuum to a certain temperature or more and evaporated to collect the ionic liquid collecting portion. 如申請專利範圍第25項所述的利用離子液體的有機材料純化裝置,其特徵在於, 所述離子液體收集部包含:固定在所述儲存槽內側面的收集板;以及固定在所述儲存槽內側面將所述收集板收集的離子液體收集的收集桶。The apparatus for purifying an organic material using an ionic liquid according to claim 25, wherein the ionic liquid collecting portion comprises: a collecting plate fixed to an inner side surface of the storage tank; and being fixed in the storage tank A collecting bucket for collecting the ionic liquid collected by the collecting plate on the inner side. 如申請專利範圍第26項所述的利用離子液體的有機材料純化裝置,其特徵在於, 還包含將所述收集桶收集的離子液體退回所述儲存槽的離子液體退回手段。The apparatus for purifying an organic material using an ionic liquid according to claim 26, further comprising an ionic liquid retreating means for returning the ionic liquid collected by the collection tank to the storage tank. 如申請專利範圍第22項所述的利用離子液體的有機材料純化裝置,其特徵在於, 還包含與所述儲存槽選擇地連通,並構成得能結合分離,個別回收所述再結晶化的有機材料的回收桶。The apparatus for purifying an organic material using an ionic liquid according to claim 22, further comprising selectively communicating with the storage tank, and configured to be capable of combining and separating, and separately recovering the recrystallized organic Recycling bin for materials. 如申請專利範圍第22項所述的利用離子液體的有機材料純化裝置,其特徵在於, 所述流動手段包含連接在所述處理腔體的一側供應惰性氣體的惰性氣體供應源, 所述再結晶化手段還包含將在所述儲存槽的離子液體上面收集的所述惰性氣體向所述儲存槽的外部排出的排出泵。The apparatus for purifying an organic material using an ionic liquid according to claim 22, wherein the flow means comprises an inert gas supply source for supplying an inert gas to a side of the processing chamber, the The crystallization means further includes a discharge pump that discharges the inert gas collected above the ionic liquid of the storage tank to the outside of the storage tank. 如申請專利範圍第29項所述的利用離子液體的有機材料純化裝置,其特徵在於, 還包含將透過所述排出泵排出的惰性氣體退回所述惰性氣體供應源的惰性氣體退回手段。The apparatus for purifying an organic material using an ionic liquid according to claim 29, further comprising an inert gas retracting means for returning the inert gas discharged through the discharge pump to the inert gas supply source.
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JP2009106917A (en) * 2007-10-29 2009-05-21 Kiriyama Seisakusho:Kk Separation-purification apparatus for sublimable substance
WO2013176443A1 (en) * 2012-05-21 2013-11-28 Rohm And Haas Electronic Materials Korea Ltd. Sublimation purification apparatus and method

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JP2009106917A (en) * 2007-10-29 2009-05-21 Kiriyama Seisakusho:Kk Separation-purification apparatus for sublimable substance
WO2013176443A1 (en) * 2012-05-21 2013-11-28 Rohm And Haas Electronic Materials Korea Ltd. Sublimation purification apparatus and method

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