TWI477629B - Composite target and method for making the same - Google Patents

Description

Composite target and preparation method thereof

The invention relates to a composite target and a preparation method thereof, in particular to a composite target capable of preparing a transparent film with hydrophobic, ultraviolet shielding and self-cleaning functions and a preparation method of the composite target.

There are many methods for coating the surface of glass, mainly physical vapor deposition, chemical vapor deposition and sol-gel. The vacuum magnetron sputtering technology commonly used in physical vapor deposition can design a multi-layer complex film system, and the film layer is coated on the glass substrate, which is one of the most widely used glass coating technologies.

Based on the special properties of the glass substrate, there is a high requirement for the film layer of the glass coating. Generally, the film layer is required to have high light transmittance, selective light transmission, high barrier ratio, such as high infrared ray, ultraviolet blocking effect, etc. Therefore, the choice of membrane design is very important. At present, it is necessary to realize a transparent functional film having hydrophobic, ultraviolet shielding and self-cleaning effect on glass, and it is usually required to design a corresponding multilayer composite film structure, which leads to a long process time for preparing the film and an increase in the cost of the product.

In view of the above, it is necessary to provide a composite target which can produce a transparent film having hydrophobic, ultraviolet shielding and self-cleaning functions.

In addition, it is also necessary to provide a method of preparing the above composite target.

A composite target comprising 50% to 85% by mass of titanium oxide and the balance of tin oxide or aluminum oxide.

A method for preparing a composite target, comprising the steps of: 50%-80% by mass of titanium oxide powder, 15%-50% by mass of tin oxide powder or alumina powder, and mass percentage 5%-10% of the binder is uniformly mixed to prepare a mixture; the mixture is placed in a mold and hot pressed to form a green body; the green body is sintered at a high temperature; and naturally cooled after sintering.

The composite target of the invention can be used for preparing transparent film with hydrophobic, ultraviolet shielding and self-cleaning functions by vacuum magnetron sputtering; the preparation method of the composite target of the invention has simple process, short process period, easy design, control and wide application range.

The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

A composite target according to a preferred embodiment of the present invention contains 50% to 85% by mass of titanium oxide and the balance of tin oxide or aluminum oxide.

The preparation method of the above composite target comprises the steps of: 50%-80% by mass of titanium oxide powder, 15%-50% by mass of tin oxide or aluminum oxide powder, and the mass percentage is 5%-10 % of the binder is mixed and stirred Evenly, a mixture was prepared. The titanium oxide powder may have a purity of 97 to 99% and a particle size of 70 to 90 μm. The tin oxide powder may have a purity of 97 to 99% and a particle size of 70 to 90 μm. The alumina powder may have a purity of 97 to 99% and a particle size of 70 to 90 μm. The binder contains ethyl ruthenate and an organic solvent, and the mass ratio of the ethyl ruthenate and the organic solvent may be 1:10. The organic solvent can be ethanol or acetone.

An appropriate amount of the above mixture is placed in a mold, and the mixture is pressed into a green body. The pressing temperature can range from 100 to 300 ° C and the pressure can range from 100 to 200 tons.

The press-formed body is subjected to high-temperature sintering at a sintering temperature of 900 to 1800 ° C and a sintering time of 3-4 h. The organic solvent and organic matter in the binder are burned away during sintering, and the cerium in the binder is present in the composite target in the form of cerium oxide after sintering.

After the sintering is completed, it is naturally cooled to obtain the composite target.

The composite target of the invention can be used for preparing transparent film with hydrophobic, ultraviolet shielding and self-cleaning functions by vacuum magnetron sputtering; the preparation method of the composite target of the invention has simple process, short process period, easy design, control and wide application range.

In summary, the present invention complies with the requirements of the invention patent and submits a patent application according to law. The above description is only the preferred embodiment of the present invention, and equivalent modifications or variations made by those skilled in the art will be covered by the following claims.

Claims (7)

A composite target comprising 50% to 85% by mass of titanium oxide and the balance of tin oxide or aluminum oxide. A method for preparing a composite target, comprising the steps of: 50%-80% by mass of titanium oxide powder, 15%-50% by mass of tin oxide powder or alumina powder, and mass percentage 5%-10% of the binder is uniformly mixed to prepare a mixture; the mixture is placed in a mold and hot pressed to form a green body; the green body is sintered at a high temperature; and naturally cooled after sintering. The method for preparing a composite target according to claim 2, wherein the titanium oxide powder has a purity of 97-99% and a particle size of 70-90 μm; and the tin oxide powder has a purity of 97-99. %, particle size is 70-90 μm; the alumina powder has a purity of 97-99% and a particle size of 70-90 μm. The method for preparing a composite target according to the second aspect of the invention, wherein the binder comprises ethyl orthosilicate and an organic solvent, wherein a mass ratio of ethyl ortho-ruthenium to an organic solvent is 1:10. The method for producing a composite target according to claim 4, wherein the organic solvent is ethanol or acetone. The method for preparing a composite target according to claim 2, wherein the hot pressing has a temperature in the range of 100 to 300 ° C and a pressure of 100 to 200 tons. The method for preparing a composite target according to claim 2, wherein the high temperature sintering has a temperature in the range of 900 to 1800 ° C and a sintering time of 3-4 h.