TWI477314B - - Google Patents

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Publication number
TWI477314B
TWI477314B TW101134524A TW101134524A TWI477314B TW I477314 B TWI477314 B TW I477314B TW 101134524 A TW101134524 A TW 101134524A TW 101134524 A TW101134524 A TW 101134524A TW I477314 B TWI477314 B TW I477314B
Authority
TW
Taiwan
Application number
TW101134524A
Other versions
TW201412379A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to TW101134524A priority Critical patent/TW201412379A/zh
Publication of TW201412379A publication Critical patent/TW201412379A/zh
Application granted granted Critical
Publication of TWI477314B publication Critical patent/TWI477314B/zh

Links

TW101134524A 2012-09-20 2012-09-20 矽乙烷之純化方法 TW201412379A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW101134524A TW201412379A (zh) 2012-09-20 2012-09-20 矽乙烷之純化方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW101134524A TW201412379A (zh) 2012-09-20 2012-09-20 矽乙烷之純化方法

Publications (2)

Publication Number Publication Date
TW201412379A TW201412379A (zh) 2014-04-01
TWI477314B true TWI477314B (zh) 2015-03-21

Family

ID=53185917

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101134524A TW201412379A (zh) 2012-09-20 2012-09-20 矽乙烷之純化方法

Country Status (1)

Country Link
TW (1) TW201412379A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI658001B (zh) * 2018-01-05 2019-05-01 台灣特品化學股份有限公司 觸媒提升矽烷反應生成及其製程副產物全回收的系統

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116459788B (zh) * 2022-01-11 2024-09-17 烟台万华电子材料有限公司 一种乙硅烷提纯剂及其制备方法和应用

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102633262A (zh) * 2012-04-01 2012-08-15 多氟多化工股份有限公司 一种甲硅烷的制备方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102633262A (zh) * 2012-04-01 2012-08-15 多氟多化工股份有限公司 一种甲硅烷的制备方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
James H. Lorenz，A Survey of the Preparation，A Subcontract Report ，Solar Energy Research Institute，December 1983 Patrick A. Taylor，Purification techniques and analytical methods for gaseous and metallic impurities in high-purity silane，Journal of Crystal Growth，89，1，28，1988 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI658001B (zh) * 2018-01-05 2019-05-01 台灣特品化學股份有限公司 觸媒提升矽烷反應生成及其製程副產物全回收的系統

Also Published As

Publication number Publication date
TW201412379A (zh) 2014-04-01

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