TWI473897B - - Google Patents
Info
- Publication number
- TWI473897B TWI473897B TW100148248A TW100148248A TWI473897B TW I473897 B TWI473897 B TW I473897B TW 100148248 A TW100148248 A TW 100148248A TW 100148248 A TW100148248 A TW 100148248A TW I473897 B TWI473897 B TW I473897B
- Authority
- TW
- Taiwan
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100148248A TW201326437A (zh) | 2011-12-23 | 2011-12-23 | 具自轉及公轉複合式真空濺鍍設備 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100148248A TW201326437A (zh) | 2011-12-23 | 2011-12-23 | 具自轉及公轉複合式真空濺鍍設備 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201326437A TW201326437A (zh) | 2013-07-01 |
| TWI473897B true TWI473897B (OSRAM) | 2015-02-21 |
Family
ID=49224804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100148248A TW201326437A (zh) | 2011-12-23 | 2011-12-23 | 具自轉及公轉複合式真空濺鍍設備 |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201326437A (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5887391B1 (ja) * | 2014-08-22 | 2016-03-16 | 三井金属鉱業株式会社 | スパッタリングターゲット用ターゲット材の製造方法および爪部材 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4798663A (en) * | 1985-02-01 | 1989-01-17 | Leybold-Heraeus Gmbh | Sputtering installation for the reactive coating of a substrate with hard materials |
-
2011
- 2011-12-23 TW TW100148248A patent/TW201326437A/zh unknown
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4798663A (en) * | 1985-02-01 | 1989-01-17 | Leybold-Heraeus Gmbh | Sputtering installation for the reactive coating of a substrate with hard materials |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201326437A (zh) | 2013-07-01 |