TWI472494B - Laser scoring of a moving glass ribbon having a non-constant speed - Google Patents

Laser scoring of a moving glass ribbon having a non-constant speed Download PDF

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Publication number
TWI472494B
TWI472494B TW99137656A TW99137656A TWI472494B TW I472494 B TWI472494 B TW I472494B TW 99137656 A TW99137656 A TW 99137656A TW 99137656 A TW99137656 A TW 99137656A TW I472494 B TWI472494 B TW I472494B
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glass ribbon
laser
glass
lens unit
component
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TW99137656A
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Chinese (zh)
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TW201116495A (en
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Anatoli Anatolyevich Abramov
James William Brown
Naiyue Zhou
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Corning Inc
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/0215Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the ribbon being in a substantially vertical plane
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073Shaping the laser spot
    • B23K26/0736Shaping the laser spot into an oval shape, e.g. elliptic shape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/0235Ribbons
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/09Severing cooled glass by thermal shock
    • C03B33/091Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Laser Beam Processing (AREA)

Description

對以非固定速度移動的玻璃帶進行雷射刻痕Laser scoring of glass ribbons moving at non-fixed speeds

本揭露係相關於對移動玻璃帶進行雷射刻痕的方法與設備,且特定言之,係相關於用以在玻璃帶速度隨著時間變化時,對移動玻璃帶進行刻痕的方法與設備。The present disclosure relates to a method and apparatus for laser scoring a moving glass ribbon, and in particular, to a method and apparatus for scoring a moving glass ribbon as the ribbon speed changes over time. .

以下的討論係參照於以垂直方向移動的玻璃帶,其為在此揭示之方法與設備的典型應用。然而,此方向已假定僅為促進演示之用,且必不以任何方式被解釋為限制本揭露之用。The following discussion refers to a glass ribbon that moves in a vertical direction, which is a typical application of the methods and apparatus disclosed herein. However, this direction has been assumed to be merely for the purpose of promoting the presentation and is not to be construed as limiting the disclosure.

類似地,雖然在此揭示之方法與設備之一應用,係為對於不在計畫中(非意為)的玻璃帶速度變異(例如肇因於用以製造玻璃帶之製程變異),必須瞭解本揭露之方法與設備係可等地應用於在計畫中(意為)的速度變化(係與諸如玻璃組成、製造速度、片料尺寸、或類似者的變化相關)。Similarly, although one of the methods and apparatus disclosed herein is applied to variations in the speed of the glass ribbon that are not planned (not intended) (eg, due to process variations used to fabricate the glass ribbon), it is necessary to understand this The disclosed methods and apparatus can be applied equally to speed changes in the plan (meaning) related to changes such as glass composition, manufacturing speed, sheet size, or the like.

如在此與在申請專利範圍中所使用者,用詞「裂口(vent)」表示形成於玻璃表面中的切割口(cut),此切割口完全穿過玻璃厚度,或僅穿過玻璃厚度的一部分。因此,此用詞包含完整裂口、部分裂口、完整中心裂縫(complete median cracks)、以及部分中心裂縫,其中完整裂口與完整中心裂縫完全穿過玻璃厚度,部分裂口與部分中心裂縫穿過玻璃厚度的一部分。As used herein and in the context of the patent application, the term "vent" means a cut formed in the surface of a glass that passes completely through the thickness of the glass or only through the thickness of the glass. portion. Therefore, the term includes complete cracks, partial cracks, complete median cracks, and partial center cracks, where the complete and complete center cracks completely pass through the glass thickness, and some of the cracks and part of the center crack pass through the glass thickness. portion.

如在此與在申請專利範圍中所使用的,用詞「發光裝置」表示任何析出(emanate)光的裝置,且包含產生光的主動裝置(例如雷射),以及接收並發射由另一裝置產生的光(例如自雷射接收光束,且將光束成形並/或聚焦的裝置)。As used herein and in the scope of the claims, the term "lighting device" means any device that emits light, and includes an active device that produces light (eg, a laser), and receives and transmits by another device. The generated light (e.g., a device that receives a beam from a laser and shapes and/or focuses the beam).

習知上,係使用機械工具以進行玻璃刻痕。然而亦存在著使用雷射放射(laser radiation)的替代方案,例如波長為10.6μm之CO2 雷射放射,以將玻璃加熱並經由溫度梯度產生張力應力(tensile stress)。使用雷射以進行玻璃刻痕的方案係討論於共同轉讓的美國專利第5,776,220號「用於斷開脆性材料之方法與設備」,以及美國專利第6,327,875號「在雷射刻痕中控制中心裂縫深度」。Conventionally, mechanical tools are used to perform glass scoring. However, there is also an alternative to using laser radiation (laser radiation), e.g. having a wavelength of 10.6μm of CO 2 laser radiation in order to heat the glass and tensile stress gradients (tensile stress) via the temperature. U.S. Patent No. 5,776,220, "Method and Apparatus for Breaking Brittle Materials", and U.S. Patent No. 6,327,875, "Controlling Center Cracks in Laser Scoring", U.S. Patent No. 6,327,875, the disclosure of which is incorporated herein by reference. depth".

如第1圖所示,在雷射刻痕期間,沿著刻痕線115在玻璃112的主表面114上產生裂口。為了產生裂口,在玻璃表面上靠近邊緣處形成小起始裂紋111,隨後將具有覆蓋區(footprint)113的雷射光束121傳播過玻璃表面,繼之以由冷卻噴嘴119產生的冷卻區域,以將小起始裂紋111轉換成裂口。使用雷射光束加熱玻璃,並隨後馬上以冷卻劑使玻璃驟冷,以產生熱能梯度以及對應的應力場,應力場使起始裂紋傳播進而形成裂口。As shown in FIG. 1, a crack is created on the major surface 114 of the glass 112 along the score line 115 during the laser scoring. To create a crack, a small initial crack 111 is formed on the surface of the glass near the edge, and then a laser beam 121 having a footprint 113 is propagated through the glass surface, followed by a cooling zone created by the cooling nozzle 119. The small initial crack 111 is converted into a crack. The glass is heated using a laser beam and the glass is then immediately quenched with a coolant to create a thermal energy gradient and a corresponding stress field that propagates the initial crack to form a breach.

共同轉讓的美國專利公開號第2008/0264994號(‘994公開案),描述用於對移動玻璃帶進行雷射刻痕的系統,其中行動托架沿著線性軌道移動,該線性軌道以角度α傾斜於橫截於玻璃帶動作方向之線。A system for performing laser scoring of a moving glass ribbon is described in commonly-assigned U.S. Patent Publication No. 2008/0264994 (the '994 publication), wherein the motion carrier is moved along a linear orbit at an angle a Tilt to a line that is transverse to the direction of movement of the glass ribbon.

本發明之第2圖與第3圖簡要地圖示說明該’994公開案系統。在此等圖式中,玻璃帶由元件符號13表示、行動托架由元件符號14表示、線性軌道由元件符號15表示、軌道的支撐結構(支撐框架)由元件符號11表示、而製造玻璃帶的裝備(例如融合下拉機(fusion draw machine))由元件符號9表示。如’994公開案中所討論的,從固定參照座標(例如第2圖中的xyz參照座標)來看,玻璃帶以速度S玻璃帶 朝向量16的方向移動,托架以速度S托架 朝向量17的方向移動,其中S玻璃帶 、S托架 以及角度α滿足以下關係:Figures 2 and 3 of the present invention briefly illustrate the '994 publication system. In these figures, the glass ribbon is represented by the component symbol 13, the motion carrier is represented by the component symbol 14, the linear track is represented by the component symbol 15, and the support structure (support frame) of the track is represented by the component symbol 11, and the glass ribbon is manufactured. The equipment (for example, a fusion draw machine) is represented by the symbol 9 . As discussed in the '994 publication, from the fixed reference coordinates (eg, the xyz reference coordinates in Figure 2), the glass ribbon moves in the direction of the amount 16 with the velocity S glass ribbon , and the carriage is oriented at the speed S bracket. The direction of the amount 17 moves, wherein the S glass ribbon , the S bracket, and the angle α satisfy the following relationship:

S托架 =S玻璃帶 /sinα。 方程式(1)S bracket = S glass ribbon / sinα. Equation (1)

以此方式,托架與玻璃帶齊步前進,或者更精確地說,托架速度之平行於玻璃帶移動方向的分量量值係等於S玻璃帶 。因而從玻璃帶看來,托架單純地以向量18的方向移動,亦即沿著垂直(perpendicular)於玻璃帶移動方向的線7越過玻璃帶,且托架速度S刻痕 為:In this way, the carriage advances in unison with the glass ribbon or, more precisely, the component of the carriage speed parallel to the direction of movement of the glass ribbon is equal to the S- glass ribbon . Thus, from the perspective of the glass ribbon, the carriage simply moves in the direction of the vector 18, i.e., across the glass ribbon along a line 7 that is perpendicular to the direction of movement of the glass ribbon, and the carriage speed S is scored as:

S刻痕 =S托架 cosα。 方程式(2)S- scoring = S- bracket cosα. Equation (2)

如同在’994公開案中描述者,提供雷射光束的發光裝置,與提供冷卻液體(例如水)流的噴嘴係耦合至托架,且在托架沿著線性軌道移動時一起形成越過玻璃帶寬度的裂口。在一些具體實施例中,機械刻痕頭(例如,刻痕輪)亦耦合至托架,以在玻璃帶中形成起始裂紋。另外作為替代方案,亦可由與托架分離的裝備形成起始裂紋。As described in the '994 publication, a light-emitting device that provides a laser beam is coupled to the carriage with a nozzle system that provides a flow of cooling liquid (eg, water), and is formed over the glass ribbon as the carriage moves along the linear track. The gap of the width. In some embodiments, a mechanical score head (eg, a score wheel) is also coupled to the bracket to form an initial crack in the glass ribbon. Alternatively, an initial crack may be formed by equipment that is separate from the carrier.

第4圖簡要地圖示說明此等’994公開案的態樣,其中元件符號21、22、與23在刻痕製程初級階段代表(1)冷卻液體覆蓋區、(2)雷射光束覆蓋區、以及(3)起始裂紋的位置,且元件符號31與32代表在完成起始後之一時間點上,冷卻液體覆蓋區與雷射光束覆蓋區之位置。Figure 4 is a simplified illustration of the aspect of the '994 publication, in which the component symbols 21, 22, and 23 represent (1) the cooling liquid footprint and (2) the laser beam footprint in the primary stage of the scoring process. And (3) the position of the initial crack, and the symbol numbers 31 and 32 represent the positions of the cooling liquid coverage area and the laser beam coverage area at a point in time after completion of the start.

如同在’994公開案中所討論者,可使用控制系統以控制托架動作,致使方程式(1)被滿足。控制系統可從導引玻璃帶之滾輪,或監視玻璃帶速度之獨立感測器,獲得S玻璃帶 資訊以作為輸入。’994公開案亦描述以控制線性軌道15之傾斜角度α滿足方程式(1)。然而,公開案並未討論α變化對S托架 變化的準則、以及與當S托架 及/或α變化時維持有效的裂口構成相關的議題。本揭露處理此等議題,並提供在面對S玻璃帶 變化時、用以維持有效的雷射刻痕之方法與設備。As discussed in the '994 publication, a control system can be used to control the carriage action, causing equation (1) to be satisfied. The control system can obtain S glass ribbon information as input from a roller that guides the glass ribbon, or an independent sensor that monitors the speed of the glass ribbon . The '994 publication also describes that the inclination angle α of the linear track 15 is controlled to satisfy equation (1). However, the publication does not discuss the criteria for the variation of the alpha change to the S- bracket , and the issues associated with the formation of a crack that remains effective when the S- bracket and/or alpha changes. The present disclosure addresses these issues and provides methods and apparatus for maintaining effective laser scoring in the face of changes in the S- glass ribbon .

依照第一態樣揭示生產玻璃片料的方法,其包含以下步驟:A method of producing a glass flake is disclosed in accordance with a first aspect, comprising the steps of:

(I) 形成移動玻璃帶(13),玻璃帶具有隨時間變化之速度S玻璃帶(I) forming a moving glass ribbon (13) having a speed-varying S- glass ribbon over time;

(II) 以一方法沿著橫截於玻璃帶的動作方向之線(7),在玻璃帶(13)表面形成裂口,該方法包含以下步驟:(II) Forming a slit on the surface of the glass ribbon (13) in a manner along a line (7) transverse to the direction of action of the glass ribbon, the method comprising the steps of:

(a)將裝載發光裝置(51)與噴嘴(119)之托架(14),沿著線性軌道(15)以速度S托架 位移,線性軌道以角度α相對於線(7)傾斜,致使托架動作具有(i)平行於線(7)之第一分量(18)、與(ii)平行於玻璃帶(13)動作方向之第二分量(16),發光裝置(51)發射由雷射(41)產生之光束,且噴嘴(119)發射冷卻液體;(a) displacing the carriage (14) carrying the illuminating device (51) and the nozzle (119) along the linear track (15) at a speed S bracket , the linear track being inclined at an angle α with respect to the line (7), resulting in The carriage action has (i) a first component (18) parallel to the line (7), and (ii) a second component (16) parallel to the direction of action of the glass ribbon (13), and the illumination device (51) is emitted by the lightning Shooting (41) the generated beam, and the nozzle (119) emits a cooling liquid;

(b)動態地調整S托架 、角度α、或S托架 與角度α兩者,致使托架(14)動作之第二分量與玻璃帶(13)齊步;以及(b) dynamically adjusting the S- bracket , the angle α, or both the S- bracket and the angle α such that the second component of the action of the carriage (14) is in step with the glass ribbon (13);

(c)藉由改變產生由發光裝置(51)發射之光束的雷射(41)之功率P雷射 ,補正步驟(II)(b)之動態調整;以及(c) correcting the dynamic adjustment of step (II) (b) by changing the power P laser that produces the laser (41) of the beam emitted by the illumination device (51);

(III)沿著在步驟(II)中形成的裂口,將玻璃片料自玻璃帶(13)中分離。(III) The glass flakes are separated from the glass ribbon (13) along the crack formed in the step (II).

依照第二態樣,在第一態樣提供的方法中:According to the second aspect, in the method provided by the first aspect:

(i) S玻璃帶 為如以下的型式:(i) S glass ribbon is of the following type:

S玻璃帶 =S0 +ΔS0S glass ribbon = S 0 + ΔS 0 ,

其中S0 與ΔS0 分別為額定恆定分量與玻璃帶速度之隨時間變化之分量;以及Where S 0 and ΔS 0 are the components of the nominal constant component and the ribbon speed as a function of time;

(ii) 當|ΔS0 |>0.03S0 時,步驟(II)(b)包含以下步驟:變化α。(ii) When |ΔS 0 |>0.03S 0 , step (II)(b) comprises the following steps: changing α.

依照第三態樣,在第一態樣提供的方法中:According to the third aspect, in the method provided by the first aspect:

(i) 步驟(II)(b)包含以下步驟:變化α;(i) Step (II)(b) comprises the following steps: changing α;

(ii) 在玻璃帶處,由發光裝置發射的光束具有長度L與寬度W;(ii) at the glass ribbon, the light beam emitted by the illumination device has a length L and a width W;

(iii) 發光裝置包含決定L之第一透鏡單元與決定W之第二透鏡單元;(iii) the illuminating device includes a first lens unit that determines L and a second lens unit that determines W;

(iv) 第一透鏡單元包含至少一個透鏡元件;以及(iv) the first lens unit comprises at least one lens element;

(v) 步驟(II)更包含以下步驟:調整該至少一個透鏡元件之角方向(angular orientation),以補正肇因於α變化之光束方向相對於線的變化。(v) Step (II) further comprises the step of adjusting an angular orientation of the at least one lens element to compensate for a change in the direction of the beam due to the change in α with respect to the line.

依照第四態樣,在第三態樣提供的方法中,第二透鏡單元包含至少一個透鏡元件,且在α變化時,透鏡元件相對於托架的角方向保持恆定。According to a fourth aspect, in the method provided by the third aspect, the second lens unit comprises at least one lens element, and the lens element remains constant with respect to the angular direction of the carriage when α changes.

依照第五態樣,在第三態樣或第四態樣提供的方法中,第一透鏡單元與第二透鏡單元之每一者僅包含一透鏡元件。According to a fifth aspect, in the method of the third aspect or the fourth aspect, each of the first lens unit and the second lens unit includes only one lens element.

依照第六態樣,在第一態樣提供的方法中:According to the sixth aspect, in the method provided by the first aspect:

(i) S玻璃帶 為如以下的型式:(i) S glass ribbon is of the following type:

S玻璃帶 =S0 +ΔS0S glass ribbon = S 0 + ΔS 0 ,

其中S0 與ΔS0 分別為額定恆定分量與玻璃帶速度之隨時間變化之分量;以及Where S 0 and ΔS 0 are the components of the nominal constant component and the ribbon speed as a function of time;

(ii) 當|ΔS0 |0.03S0 時,步驟(II)(b)包含以下步驟:將α保持恆定。(ii) when |ΔS 0 | At 0.03S 0 , step (II) (b) comprises the step of keeping α constant.

依照第七態樣,在第六態樣提供的方法中,步驟(II)(c)中P雷射 的變化滿足以下關係:According to the seventh aspect, in the method provided in the sixth aspect, the change in the P laser in the step (II) (c) satisfies the following relationship:

dP雷射 /dS玻璃帶 =k‧ctn(α),dP laser / dS glass ribbon = k‧ctn (α),

其中k為一常數。Where k is a constant.

依照第八態樣,在第七態樣提供的方法中,P雷射 以雷射功率最大值的百分比來表現,且k<1.0。According to an eighth aspect, in the method provided by the seventh aspect, the P laser is expressed as a percentage of the maximum laser power, and k < 1.0.

依照第九態樣,在第一態樣提供的方法中,步驟(II)包含以下步驟:將雷射光從雷射沿著一路徑發送至發光裝置,該路徑包含將雷射光包裝(encase)於一殼體(housing)中之適應性(flexible)雷射光束輸送系統,該殼體具有添附至(affixed to)雷射或雷射之支撐結構的第一末端,以及添附至線性軌道或線性軌道之支撐結構的第二末端,該殼體包含至少一個關節(joint)與至少一個容許第一末端與第二末端相對於彼此於三度空間中旋轉與位移之延伸管。According to a ninth aspect, in the method of the first aspect, the step (II) comprises the step of transmitting laser light from the laser along a path to the illumination device, the path comprising encapsulating the laser light A flexible laser beam delivery system in a housing having a first end affixed to a laser or laser support structure and attached to a linear or linear track A second end of the support structure, the housing including at least one joint and at least one extension tube that allows rotation and displacement of the first end and the second end relative to each other in a three degree space.

依照第十態樣,在第一態樣至第九態樣中之任一態樣提供的方法中,玻璃帶係由下拉製程(downdraw process)形成。According to a tenth aspect, in any of the first aspect to the ninth aspect, the glass ribbon is formed by a downdraw process.

依照第十一態樣,在第一態樣至第十態樣中之任一態樣提供的方法中,玻璃片料係為顯示裝置之基底。According to an eleventh aspect, in any one of the first aspect to the tenth aspect, the glass flake is a substrate of the display device.

依照第十二態樣揭示生產玻璃片料的方法,其包含以下步驟:A method of producing a glass flake is disclosed in accordance with a twelfth aspect, comprising the steps of:

(I) 形成移動玻璃帶(13);(I) forming a moving glass ribbon (13);

(II) 以一方法沿著橫截於玻璃帶的動作方向之線(7),在玻璃帶(13)之表面形成裂口,該方法包含將裝載發光裝置(51)與噴嘴(119)之托架(14),沿著線性軌道(15)位移,線性軌道以角度α相對於線(7)傾斜,致使托架動作具有(i)平行於線(7)之第一分量(18),與(ii)平行於玻璃帶(13)動作方向之第二分量(16),發光裝置(51)發射由雷射(41)產生之光束,且噴嘴(119)發射冷卻液體;以及(II) Forming a slit in the surface of the glass ribbon (13) along a line (7) transverse to the direction of movement of the glass ribbon in a manner, the method comprising loading the light-emitting device (51) with the nozzle (119) The frame (14) is displaced along the linear track (15), and the linear track is inclined at an angle α with respect to the line (7) such that the carriage action has (i) parallel to the first component (18) of the line (7), and (ii) a second component (16) parallel to the direction of action of the glass ribbon (13), the illumination device (51) emits a beam of light generated by the laser (41), and the nozzle (119) emits a cooling liquid;

(III)使用在步驟(II)中形成的裂口,將玻璃片料從玻璃帶(13)中分離;其中:(III) separating the glass flakes from the glass ribbon (13) using the slit formed in the step (II); wherein:

(i) 在玻璃帶(13)上,由發光裝置發射的光束具有長度L與寬度W;(i) on the glass ribbon (13), the light beam emitted by the illumination device has a length L and a width W;

(ii)發光裝置(51)包含決定L之第一透鏡單元(53)與決定W之第二透鏡單元(55);(ii) the illuminating device (51) includes a first lens unit (53) that determines L and a second lens unit (55) that determines W;

(iii)第一透鏡單元(53)包含至少一個透鏡元件(81);(iii) the first lens unit (53) comprises at least one lens element (81);

(iv) 改變α,以改變托架(14)動作之第一分量與第二分量(18、16)之相對的量值;以及(iv) changing α to vary the relative magnitude of the first component and the second component (18, 16) of the action of the carriage (14);

(v) 調整該至少一個透鏡元件(81)之角方向,以補正肇因於α的變化之光束方向相對於線的變化。(v) adjusting the angular direction of the at least one lens element (81) to correct the change in the beam direction with respect to the line due to the change in α.

依照第十三態樣,由第十二態樣提供之方法中,第二透鏡單元包含至少一個透鏡元件,且在α變化時,透鏡元件的角方向相對於托架保持恆定。According to a thirteenth aspect, in the method of the twelfth aspect, the second lens unit includes at least one lens element, and the angular direction of the lens element is kept constant with respect to the carriage when α changes.

依照第十四態樣,由第十二態樣提供之方法中,第一透鏡單元與第二透鏡單元之每一者僅包含一透鏡元件。According to a fourteenth aspect, in the method of the twelfth aspect, each of the first lens unit and the second lens unit includes only one lens element.

依照第十五態樣,在由第十二態樣至第十四態樣中之任一態樣提供之方法中,玻璃帶係由下拉製程形成。According to a fifteenth aspect, in the method of any one of the twelfth aspect to the fourteenth aspect, the glass ribbon is formed by a pull-down process.

依照第十六態樣,在第十二態樣至第十五態樣中之任一態樣提供的方法中,玻璃片料係為顯示裝置之基底。According to a sixteenth aspect, in any one of the twelfth aspect to the fifteenth aspect, the glass flake is a substrate of the display device.

依照第十七態樣揭示生產玻璃片料的方法,其包含以下步驟:A method of producing a glass flake is disclosed in accordance with the seventeenth aspect, comprising the steps of:

(I) 形成移動玻璃帶(13);(I) forming a moving glass ribbon (13);

(II) 以一方法沿著橫截於玻璃帶的動作方向之線(7),在玻璃帶(13)之表面形成裂口,該方法包含以下步驟:(II) Forming a slit on the surface of the glass ribbon (13) in a manner along a line (7) transverse to the direction of movement of the glass ribbon, the method comprising the steps of:

(a)將裝載發光裝置(51)與噴嘴(119)之托架(14),沿著線性軌道(15)位移,線性軌道以角度α相對於線(7)傾斜,致使托架動作具有(i)平行於線(7)之第一分量(18),與(ii)平行於玻璃帶(13)動作方向之第二分量(16),發光裝置(51)發射雷射光束,且噴嘴(119)發射冷卻液體;以及(a) displacing the carriage (14) carrying the illuminating device (51) and the nozzle (119) along the linear track (15), the linear track being inclined at an angle α with respect to the line (7), causing the carriage action to have ( i) parallel to the first component (18) of the line (7), and (ii) parallel to the second component (16) of the direction of action of the glass ribbon (13), the illumination device (51) emits a laser beam, and the nozzle ( 119) emitting a cooling liquid;

(b)將雷射光(43)自雷射(41)沿著路徑發送至發光裝置(51),該路徑包含將雷射光(43)包裝於一殼體中之適應性雷射光束輸送系統(61),該殼體具有添附至雷射(41)或雷射之支撐結構的第一末端(65),以及添附至線性軌道(15)或線性軌道之支撐結構(11)的第二末端(67),該殼體包含至少一個關節(62)與至少一個容許第一末端與第二末端(65、67)相對於彼此旋轉與位移於三度空間中之延伸管(64)。;以及(b) transmitting laser light (43) from the laser (41) along the path to the illumination device (51), the path comprising an adaptive laser beam delivery system for packaging the laser light (43) in a housing ( 61) the housing has a first end (65) attached to the laser (41) or laser support structure, and a second end attached to the linear track (15) or the support structure (11) of the linear track ( 67) The housing includes at least one joint (62) and at least one extension tube (64) that allows the first end and the second end (65, 67) to rotate and displace relative to each other in a three degree space. ;as well as

(III)沿著在步驟(II)中形成的裂口,將玻璃片料從玻璃帶(13)中分離。(III) The glass flakes are separated from the glass ribbon (13) along the slit formed in the step (II).

依照第十八態樣,由第十七態樣提供之方法中,該適應性雷射光束輸送系統包含一光束擴張器(beam expander)。According to an eighteenth aspect, in the method of the seventeenth aspect, the adaptive laser beam delivery system comprises a beam expander.

依照第十九態樣,在由第十七態樣或第十八態樣之任一態樣提供之方法中,玻璃帶係由下拉製程形成。According to a nineteenth aspect, in the method of any one of the seventeenth aspect or the eighteenth aspect, the glass ribbon is formed by a pull-down process.

依照第二十態樣,在第十七態樣至第十九態樣中之任一態樣提供的方法中,玻璃片料係為顯示裝置之基底。According to a twentieth aspect, in the method of any one of the seventeenth aspect to the nineteenth aspect, the glass flake is a substrate of the display device.

亦揭示用於實作上述方法之設備。Apparatus for carrying out the above method is also disclosed.

在上揭本發明各種態樣之摘要中使用的元件符號,僅為閱讀方便之用,並不意為且不可被解釋為對本發明範疇之限制。更一般地來說,必需瞭解前述之大體描述與下述之詳盡描述兩者對於本發明皆僅為示例性之用,且意為提供用以瞭解本發明本質與特性的綜觀或架構。The use of the component symbols in the summary of the various aspects of the present invention is for convenience of reading and is not intended to be construed as limiting the scope of the invention. More generally, the foregoing general description and the following detailed description of the invention are intended to be illustrative of the invention.

額外的本發明特徵與優點係載於以下「實施方式」中,且在某種程度上將已顯然於在本發明領域具有通常知識者,或將可以如在此所描述般實作本發明而認知。提供附加圖式以更加瞭解本發明,並併入附加圖式以組成此說明書的一部分。必需被瞭解的是各種在此說明書與圖式內揭示的本發明特徵,可由任意組合及所有組合使用。Additional features and advantages of the invention will be set forth in the <RTIgt; </RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; Cognition. Additional figures are provided to further understand the present invention and incorporate additional figures to form part of this specification. It is to be understood that the various features of the invention disclosed in this specification and drawings may be used in any combination and all combinations.

在一般用語中,玻璃帶速度可被描述為由額定分量S0 與自額定值的偏移(offset)ΔS0In general terms, the ribbon speed can be described as the offset ΔS 0 from the nominal component S 0 from the nominal value:

S玻璃帶 =S0 +ΔS0 。 方程式(3)S glass ribbon = S 0 + ΔS 0 . Equation (3)

S0 and ΔS0 兩者皆可為對時間的函數。例如,S0 可因有意的(例如)製造速率變化而改變,而ΔS0 可因無意的製程狀態變化而改變。通常地,肇因於S0 變化之S玻璃帶 的改變,相較於肇因於ΔS0 變化之S玻璃帶 的改變為較不頻繁,雖然在例如在新製程的除錯(debugging)期間,其中需要測試額定玻璃帶速度序列,相反的情況是可實現的。對於下述討論,將假設在有興趣的時間框架上S0 為恆定,且ΔS0 代表玻璃帶速度對S0 的變動,且包含有意與無意的變動兩者。Both S 0 and ΔS 0 can be a function of time. For example, S 0 may change due to intentional, for example, manufacturing rate changes, while ΔS 0 may change due to unintended process state changes. Generally, prompted by changing the S glass ribbon variation of S 0, S compared prompted by changing the variation of the glass ribbon ΔS 0 to less frequently, although the new process, for example, during debugging (the debugging), It is necessary to test the rated glass ribbon speed sequence, and the opposite is achievable. For the following discussion, it will be assumed that S 0 is constant over an interesting time frame, and ΔS 0 represents the variation of the glass ribbon velocity versus S 0 and includes both intentional and unintentional variations.

為了在S玻璃帶 變化時使托架與玻璃帶齊步前進,亦即為了使托架動作從玻璃帶看來為一直線,需要改變S托架 與α之一者或兩者。通常,改變S托架 比改變α簡單。然而依照本揭露,已發現在不犧牲從玻璃帶分離之玻璃片料之邊緣品質的狀況下,S托架 僅可在一受限範圍中變化。In order to advance the carriage with the glass ribbon as the S- glass ribbon changes, i.e., to make the carriage movement appear straight from the glass ribbon, it is necessary to change one or both of the S- bracket and the alpha. Generally, changing the S- bracket is simpler than changing a. However, in accordance with the present disclosure, it has been found that the S- seat can only be varied in a limited range without sacrificing the edge quality of the glass flakes separated from the glass ribbon.

尤其,已發現在S托架 變化時,為了將雷射刻痕製程保持在可被接受的製程視窗內,需要控制雷射功率。特定言之,雷射功率需要隨著S托架 增加而增加,並隨著S托架 下降而下降。然而,在將系統維持在其製程視窗內的同時,可達成的雷射功率變化位準相當有限。此效應於第5圖中說明,其以公厘/秒(mm/sec)沿著水平軸繪製S玻璃帶 、以mm/sec沿著左手邊垂直軸繪製速度、並以最大功率之百分比沿著右手邊垂直軸繪製雷射功率。第5圖圖示的曲線為基於以3.8° α值獲得之量測資料。In particular, it has been found that in order to maintain the laser scoring process within an acceptable process window when the S- bracket changes, it is desirable to control the laser power. In particular, the laser power needs to increase as the S- bracket increases and decreases as the S- bracket falls. However, while maintaining the system within its process window, the achievable level of laser power variation is quite limited. This effect is illustrated in Figure 5, which plots the S- glass strip along the horizontal axis in mm/sec, the velocity along the left-hand vertical axis in mm/sec, and along the maximum power percentage. The vertical power of the right hand side draws the laser power. The graph illustrated in Fig. 5 is based on measurement data obtained at a value of 3.8° α.

產生第5圖資料的實驗顯示,從玻璃帶分離的玻璃片料邊緣屬性,係重複地可被接受於玻璃帶額定速率(在此情況下為50 mm/sec)之±3%的窄範圍內。換言之,依據上述的方程式(3),當|ΔS0 |0.03‧S0 時,托架速度與調整雷射功率的組合可被用於配合玻璃帶速度的變化,但當|ΔS0 |>0.03‧S0 時,亦需改變α以提供可靠的邊緣品質。Experiments that produced the data in Figure 5 show that the edge properties of the glass flakes separated from the glass ribbon are repeatedly accepted within a narrow range of ± 3% of the nominal rate of the glass ribbon (50 mm/sec in this case). . In other words, according to equation (3) above, when |ΔS 0 | At 0.03‧S 0 , the combination of the carriage speed and the adjusted laser power can be used to match the change in the speed of the glass ribbon, but when |ΔS 0 |> 0.03‧S 0 , the α needs to be changed to provide reliable edge quality. .

第5圖亦顯示,補正S玻璃帶 變化所需的雷射功率變化可為對S玻璃帶 之線性函數。如此的線性相依性可促進對雷射刻痕製程的控制。對於如此的具體實施例,dP雷射 /dS玻璃帶 可被改寫為dP雷射 /dS玻璃帶 =k‧ctn(α),其中k為一常數。換言之,在當增加S托架 以匹配S玻璃帶 的增加量時,刻痕速度增加的速率為ctn(α)(亦即,dS刻痕 /dS玻璃帶 =ctn(α);見上述方程式(1)與(2))之時,為維持可靠的邊緣構成,需要增加的雷射功率可小於、大於、或等於ctn(α),取決於k的值。在根據第5圖資料(以最大功率的一百分比表示雷射功率)的情況下,k係小於1.0。如將為顯然地,k對於任意特殊應用、以及對於任意雷射功率之特殊單位(例如,最大功率的百分比、瓦特數、與類似者)之特定值,已可被在本發明領域中具有通常知識者決定。Figure 5 also shows that the change in laser power required to correct the S- glass ribbon change can be a linear function of the S- glass ribbon . Such linear dependence promotes control of the laser scoring process. For such a specific embodiment, the dP laser /dS glass ribbon can be rewritten as dP laser /dS glass ribbon = k‧ctn (α), where k is a constant. In other words, when the S- bracket is increased to match the increase amount of the S- glass ribbon , the rate at which the scoring speed increases is ctn(α) (that is, dS scoring /dS glass ribbon = ctn(α); see equation above ( At 1) and (2)), in order to maintain a reliable edge configuration, the increased laser power required to be less than, greater than, or equal to ctn(α) depends on the value of k. In the case of the data according to Fig. 5 (the laser power is expressed as a percentage of the maximum power), k is less than 1.0. As will be apparent, k can be used in any particular application, as well as specific values for special units of arbitrary laser power (eg, percentage of maximum power, wattage, and the like), which may already be common in the field of the invention. The intellectual decides.

第6圖至第9圖說明可用以改變角度α,以配合S玻璃帶 變化(例如變化量>0.03‧S0 )的設備。特定言之,第6圖簡要地說明可用於此目的之設備的綜合示例性配置,而第7圖至第9圖圖示一特定示例性具體實施例。在第6圖中,自其中分離個別玻璃片料的玻璃帶以元件符號13代表、用於可移動托架之線性軌道以元件符號15代表、且製造玻璃帶的裝備(例如融合下拉機)以元件符號9代表。為了簡化演示,在第6圖至第9圖中以浮動光學頭(51)代表托架,需瞭解托架可包含其他裝備,包含用於冷卻液體之噴嘴。浮動光學頭51接收由雷射41產生之雷射光束43,並引導光束使光束朝向玻璃帶13。如以上連帶第1圖至第4圖所討論者,結合冷卻液體的雷射光束將形成於玻璃中的起始裂紋延伸,以製造越過玻璃帶寬度的裂口,個別玻璃片料從裂口處與玻璃帶分離。Figures 6 through 9 illustrate devices that can be used to change the angle a to match the S- glass ribbon variation (e.g., the amount of change > 0.03‧S 0 ). In particular, Figure 6 briefly illustrates a comprehensive exemplary configuration of a device that can be used for this purpose, while Figures 7 through 9 illustrate a particular exemplary embodiment. In Fig. 6, the glass ribbon from which the individual glass flakes are separated is represented by the symbol 13, the linear track for the movable carriage is represented by the component symbol 15, and the equipment for manufacturing the glass ribbon (for example, the fusion pull-down machine) is The symbol 9 is represented. To simplify the demonstration, the brackets are represented by floating optical heads (51) in Figures 6 through 9, and it is to be understood that the brackets may contain other equipment, including nozzles for cooling the liquid. The floating optical head 51 receives the laser beam 43 generated by the laser 41 and directs the beam toward the glass ribbon 13. As discussed above in connection with Figures 1 through 4, the laser beam in combination with the cooling liquid extends the initial crack formed in the glass to create a crack across the width of the glass ribbon, with individual glass flakes from the crack and the glass. Belt separation.

在第6圖中,圖示以反射鏡45與47將雷射光束導引至浮動光學頭,反射鏡45與47位於殼體49內,殼體49具有適合的光孔(aperture)或耦接器(couplings)(未圖示),以從雷射接收光並將光發送至浮動光學頭。可主動控制反射鏡45與47的位置和角方向,以在角度α變化時保持雷射光束,使雷射光束瞄準浮動光學頭。雖然僅圖示兩反射鏡,若為所需,可使用額外的反射鏡。In Fig. 6, the laser beam is guided to the floating optical head by mirrors 45 and 47, and the mirrors 45 and 47 are located in the housing 49, and the housing 49 has a suitable aperture or coupling. Couplings (not shown) to receive light from a laser and send the light to a floating optical head. The position and angular orientation of the mirrors 45 and 47 can be actively controlled to maintain the laser beam as the angle a changes, aiming the laser beam at the floating optical head. Although only two mirrors are illustrated, additional mirrors may be used if desired.

除了用以配合α的變化以外,反射鏡的位置與角方向亦可用以補正雷射41與軌道15之間的相對位移,相對位移係由溫度變化(例如從室溫到與玻璃帶生產有關之作業溫度升高)、機械振動、與類似者所導致。由於所需的功率位準,雷射41一般相當巨大,且因此在生產設定環境中雷射41常被安置在分離自軌道15之支撐結構上。結果導致,雷射41與軌道15可經受(undergo)相對於彼此的位移,因此迫使雷射光束需要接連不斷地瞄準浮動光學頭。可由使用電腦控制系統主動地變化反射鏡45與47的方向及/或位置,以達成此接連不斷地瞄準,電腦控制系統從適合的訊號轉換器(transducer)獲得關於雷射(及/或其支撐系統)與線性軌道(及/或其支撐系統)位置之輸入資料。In addition to the change in alpha, the position and angular direction of the mirror can also be used to correct the relative displacement between the laser 41 and the track 15, the relative displacement being a change in temperature (eg from room temperature to the production of the glass ribbon). Increased operating temperature), mechanical vibration, and the like. Due to the required power level, the laser 41 is typically quite large, and thus the laser 41 is often placed on the support structure separated from the track 15 in a production setting environment. As a result, the laser 41 and the track 15 can be undergoed with respect to each other, thus forcing the laser beam to continuously aim at the floating optical head. The direction and/or position of the mirrors 45 and 47 can be actively changed by using a computer control system to achieve this continuous aiming, and the computer control system obtains information about the laser (and/or its support from a suitable transducer). System) Input data for the position of the linear track (and/or its supporting system).

第7圖至第9圖圖示說明可被動地配合α變化、亦可配合雷射41與軌道15由於溫度變化、機械振動及類似者的相對位置變化的具體實施例。此具體實施例包含將雷射光包裝於殼體中之適應性雷射光束輸送系統61,殼體具有添附至雷射41或雷射之支撐結構的第一末端65,以及添附至線性軌道15或線性軌道之支撐結構(例如在第7圖至第9圖中的支撐結構11)的第二末端67,將第二末端67添附至線性軌道15具有以下優點:當角度α改變時,因為軌道、第二末端、與光學頭隨著α變化而做為一個單元移動,所以雷射光束可保持瞄準浮動光學頭51。Figures 7 through 9 illustrate specific embodiments in which the alpha change can be passively matched, as well as the relative positional changes of the laser 41 and track 15 due to temperature changes, mechanical vibrations, and the like. This particular embodiment includes an adaptive laser beam delivery system 61 that packages laser light into a housing having a first end 65 attached to a support structure of the laser 41 or laser, and attached to the linear track 15 or The second end 67 of the support structure of the linear track (for example, the support structure 11 in FIGS. 7 to 9), the attachment of the second end 67 to the linear track 15 has the advantage that when the angle α is changed, because of the track, The second end moves as a unit with the optical head as a changes in alpha, so the laser beam can remain aimed at the floating optical head 51.

如第7圖至第9圖所圖示,輸送系統的殼體包含至少一個關節62,與至少一個容許第一末端與第二末端(65、67)相對於彼此於三度空間中旋轉與位移之延伸管64。以此方式,輸送系統的第一末端與第二末端,實質上可不使從雷射至系統的光輸入或至浮動光學頭的光輸出衰減(degrading),而相對於彼此移動。因為提供了可被安裝、且隨後允許無操作者介入的情況下可在延伸的時間期間內運行的強健系統,此為重要的優點。至少一個關節與至少一個延伸管的結合亦促進了刻痕系統的安裝、校準(alignment)、與維護(servicing)。就此而言,值得被注意的是光束指向精確度的要求相當嚴格;例如,對於光束中心自浮動光學頭中線的偏離(deviation),適合的規格可為±100μm或更少,於距離三公尺或更多(自輸送系統之最後一面反射鏡)。As illustrated in Figures 7-9, the housing of the delivery system includes at least one joint 62, and at least one of the first end and the second end (65, 67) are allowed to rotate and displace in a three degree space relative to each other. The extension tube 64. In this manner, the first end and the second end of the delivery system may substantially not move the light input from the laser to the system or the light output to the floating optical head, but move relative to each other. This is an important advantage because it provides a robust system that can be installed and then allowed to operate during extended periods of time without operator intervention. The combination of at least one joint and at least one extension tube also facilitates the installation, alignment, and servicing of the scoring system. In this regard, it is worth noting that the requirements for beam pointing accuracy are quite strict; for example, for the deviation of the center of the beam from the center line of the floating optical head, a suitable specification can be ±100 μm or less at a distance of three meters. Or more (from the last mirror of the conveyor system).

亦如第7圖至第9圖所圖示的,適應性雷射光束輸送系統61可包含光束擴張器63,以促使雷射光束傳輸至浮動光學頭,且隨後傳輸至玻璃帶。見共同申請、共同轉讓之美國專利申請號第12/220,948號「對於非平面材料之刻痕」(此後稱為’948申請案)。輸送系統亦可包含一圓偏光板(circular polarizer)(未圖示於第7圖至第9圖)。系統可使用市售如由American Laser Enterprises of Wixom,Michigan製造的裝備以建造。As also illustrated in Figures 7 through 9, the adaptive laser beam delivery system 61 can include a beam expander 63 to cause the laser beam to be transmitted to the floating optical head and subsequently to the glass ribbon. See U.S. Patent Application Serial No. 12/220,948, the entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire content The conveyor system may also include a circular polarizer (not shown in Figures 7 through 9). The system can be constructed using equipment commercially available, such as manufactured by American Laser Enterprises of Wixom, Michigan.

現在討論浮動光學頭51,如第10圖圖示,浮動光學頭可包含用以控制雷射光束在玻璃帶13上的長度之第一透鏡單元53、用以控制雷射光束寬度的第二透鏡單元55、以及用以引導光束使光束朝向玻璃帶的轉向反射鏡69。例如,第一透鏡單元可包含將光束以沿著第2圖z軸的方向(亦即垂直於第2圖紙平面的方向)而擴張之單一負圓柱狀透鏡元件,而例如,第二透鏡單元可包含將光束以正交(orthogonal)於軌道15在通過軌道中線之一平面、且平行於第2圖中x-y平面之方向收縮之單一正圓柱狀透鏡元件。當然,更多的透鏡元件可被用於第一透鏡單元與第二透鏡單元之任一者或兩者中。The floating optical head 51 will now be discussed. As illustrated in Fig. 10, the floating optical head may include a first lens unit 53 for controlling the length of the laser beam on the glass ribbon 13, and a second lens for controlling the width of the laser beam. Unit 55, and a steering mirror 69 for directing the beam of light toward the glass ribbon. For example, the first lens unit may comprise a single negative cylindrical lens element that expands the beam in a direction along the z-axis of FIG. 2 (ie, perpendicular to the second plane of the drawing), for example, the second lens unit may A single positive cylindrical lens element that orients the beam orthogonal to the track 15 in a plane through one of the track centerlines and parallel to the xy plane in FIG. 2 is included. Of course, more lens elements can be used in either or both of the first lens unit and the second lens unit.

第12圖圖示說明第一透鏡單元與第二透鏡單元在傳播光束上的作用。如本圖式所圖示者,進入浮動光學頭的光束具有圓截面83且以箭頭91的方向傳播。光束進入擴張光束之第一透鏡單元53,致使在離開透鏡單元時光束具有以元件符號85表示之組態。其後,光束穿過第二透鏡單元且被反射鏡69反射至玻璃帶。在第12圖中,第二透鏡單元與反射鏡的組合作用以元件符號93表示。若軌道15為水平的,則在玻璃帶處產生的光束將具有由第12圖中元件符號89所表示的組態與方向。然而,當軌道15以角度α傾斜於水平下時,在玻璃帶處,光束呈現由第12圖中元件符號87所表示的方向。換言之,光束往上旋轉角度α。Figure 12 illustrates the effect of the first lens unit and the second lens unit on the propagating beam. As illustrated in this figure, the beam entering the floating optical head has a circular cross section 83 and propagates in the direction of arrow 91. The beam enters the first lens unit 53 of the dilated beam such that the beam has a configuration indicated by element symbol 85 when exiting the lens unit. Thereafter, the light beam passes through the second lens unit and is reflected by the mirror 69 to the glass ribbon. In Fig. 12, the combination of the second lens unit and the mirror is indicated by the symbol 93. If the track 15 is horizontal, the beam produced at the glass ribbon will have the configuration and orientation represented by element symbol 89 in Figure 12. However, when the track 15 is inclined at an angle α at an angle α, at the glass ribbon, the light beam assumes the direction indicated by the symbol 81 in Fig. 12. In other words, the beam is rotated upward by an angle a.

值得被注意的是,若s托架 與α被選定以滿足方程式(1),則有角度的光束仍以一直線(例如線7)位移越過玻璃帶,但光束主軸不再沿著該線。事實上,此於光束路徑與光束主軸間的不匹配已被發現,因為光束主軸不再完全對齊冷卻液體與起始裂紋走過的路徑,所以可導致不可靠的刻痕及/或低劣的邊緣品質。It is worth noting that if the s- slot and a are selected to satisfy equation (1), the angled beam is still displaced across the ribbon by a straight line (e.g., line 7), but the beam axis no longer follows the line. In fact, this mismatch between the beam path and the beam's major axis has been discovered because the beam's major axis is no longer perfectly aligned with the path through which the cooling liquid and the starting crack pass, resulting in unreliable nicks and/or poor edges. quality.

為了解決此問題,第一透鏡單元可如第11圖中圖示般被建造,以允許透鏡元件81之圓柱軸、或多重透鏡元件(若被使用)之圓柱軸被旋轉,以使光束主軸方向與光束越過玻璃帶表面之動作方向對齊。如第11圖所圖示,透鏡元件53可包含有步進馬達75安置於其上之殼體73,步進馬達75驅動齒輪77以相應地驅動大齒輪79,而透鏡元件81係貼於大齒輪79之上。步進馬達由將透鏡元件81與軌道15之角度配位(coordinate)的控制器啟動。尤其,如在第12圖中所圖示說明,控制器導致一或多個透鏡元件之圓柱軸沿著平行於軌道15的一軸旋轉α,此旋轉方向導致光束87旋轉,使其與光束方向89對齊。To solve this problem, the first lens unit can be constructed as illustrated in Fig. 11 to allow the cylindrical axis of the lens element 81, or the cylindrical axis of the multiple lens element (if used) to be rotated, so that the beam axis direction Align with the direction of movement of the beam across the surface of the ribbon. As illustrated in Fig. 11, the lens element 53 may include a housing 73 on which the stepper motor 75 is disposed, the stepper motor 75 drives the gear 77 to drive the large gear 79 accordingly, and the lens element 81 is attached to the large Above the gear 79. The stepper motor is activated by a controller that coordinates the angle of the lens element 81 with the track 15. In particular, as illustrated in Fig. 12, the controller causes the cylindrical axis of one or more lens elements to rotate a along an axis parallel to the track 15, which causes the beam 87 to rotate, causing it to be aligned with the beam direction 89. Align.

如第10圖所圖示,第二透鏡單元55亦可裝備步進馬達與齒輪機構(gear train),以改變此單元圓柱軸的方向。然而事實上,已發現第二透鏡單元圓柱軸與玻璃帶上刻痕線之垂直線間的對準偏移(misalignment),與第一透鏡單元圓柱軸與刻痕線間的對準偏移比起來係不那麼的令人煩惱。相應地,對於許多應用而言,第二透鏡單元可具有相對於托架為固定的方向,因此減少了光學系統的複雜度以及花費。As illustrated in Fig. 10, the second lens unit 55 can also be equipped with a stepper motor and a gear train to change the direction of the cylindrical axis of the unit. However, in fact, the misalignment between the cylindrical axis of the second lens unit and the vertical line of the score line on the glass ribbon has been found, and the alignment offset ratio between the cylindrical axis of the first lens unit and the score line is It’s not so troublesome to get up. Accordingly, for many applications, the second lens unit can have a fixed orientation relative to the carrier, thus reducing the complexity and expense of the optical system.

如將被瞭解者,在第10圖與第11圖中圖示的設備僅為說明性的,且可使用各種其他機制以改變第一與第二透鏡單元之透鏡元件的圓柱軸方向。另外,名稱「第一透鏡單元」與「第二透鏡單元」需不被解讀為隱含單元在雷射光束之作業上的次序。雖然如在圖式中圖示者,第一透鏡單元係在第二透鏡單元前,但若需要可反向配置單元。第一與第二透鏡單元可具有各種「配方(prescription)」,取決於刻痕系統的規格。對於第一與第二透鏡單元,’948申請案包含代表性的功率、間距等等的實例,可相關聯使用於本揭露。該申請案之配方係使用市售ZEMAX光學設計軟體(ZEMAX Development Corporation,Bellevue,Washington)以獲得。類似地,本揭露之光學系統配方可使用ZEMAX或其他市售或客製光學設計程式以獲得。As will be appreciated, the apparatus illustrated in Figures 10 and 11 is merely illustrative, and various other mechanisms may be used to change the cylindrical axis direction of the lens elements of the first and second lens units. In addition, the names "first lens unit" and "second lens unit" need not be interpreted as the order of the hidden unit on the operation of the laser beam. Although the first lens unit is in front of the second lens unit as illustrated in the drawings, the unit can be reversely configured if desired. The first and second lens units can have various "prescriptions" depending on the specifications of the scoring system. For the first and second lens units, the '948 application contains examples of representative power, spacing, etc., which may be used in connection with the present disclosure. The formulation of this application was obtained using a commercially available ZEMAX Optical Design Software (ZEMAX Development Corporation, Bellevue, Washington). Similarly, the optical system formulations of the present disclosure can be obtained using ZEMAX or other commercially available or custom optical design programs.

在實施時,上述本發明之各種態樣可被結合以用於製造自動補正玻璃帶速度變化的系統。例如,使用關於S玻璃帶 的輸入資料,控制器可同時地調整(1)S托架 、(2)P雷射 、(3)軌道15的角度α、以及(4)雷射光束的主軸(或主軸與短軸(minor axis)兩者)的方向,以使雷射刻痕與邊緣品質達成位於所需的製程視窗內。經由使用適應性雷射光束輸送系統,此等調整無需手動介入即可進行。In implementation, the various aspects of the invention described above can be combined for use in a system for automatically correcting the change in ribbon speed. For example, using input data about the S- glass ribbon , the controller can simultaneously adjust (1) the S- bracket , (2) the P laser , (3) the angle a of the track 15 , and ( 4 ) the main axis of the laser beam ( Or the direction of both the major axis and the minor axis, so that the laser scoring and edge quality are achieved within the desired process window. By using an adaptive laser beam delivery system, such adjustments can be made without manual intervention.

如可見於前述者,本發明提供促進雷射刻痕的方法與相關聯的設備,並相應地提供以下好處:乾淨且堅固的邊緣、對玻璃組成與厚度不敏感、以及最小的玻璃帶動作擾動。此外,藉由增加軌道角度α,雷射刻痕可於減低的刻痕速度下執行,其允許深刻痕或全體切割(full body cutting)。As can be seen from the foregoing, the present invention provides methods and associated apparatus for facilitating laser scoring and correspondingly provides the following benefits: clean and robust edges, insensitivity to glass composition and thickness, and minimal glass belt motion disturbances . Furthermore, by increasing the orbital angle a, the laser scoring can be performed at a reduced scoring speed, which allows for deep or full body cutting.

各種不背離本發明之範疇與精神的修改將顯然於在本發明領域具有通常知識者。例如,做為執行刻痕於單一方向、且隨後重置(reset)以執行下一刻痕之替代方案,可建造系統使系統可執行刻痕於去回方向,例如在第2圖中從左至右,隨後從右至左,諸如此類。以下的申請專利範圍係意為包覆對在此提出之此等與其他類型具體實施例之修改、變化、以及等具體實施例。Modifications that do not depart from the scope and spirit of the invention will be apparent to those of ordinary skill in the invention. For example, as an alternative to performing a score in a single direction and then resetting to perform the next score, the system can be constructed to cause the system to perform a score in the direction of the return, such as from left to right in Figure 2 Right, then right to left, and so on. The scope of the following claims is intended to cover the modifications, variations, and equivalent embodiments of the various embodiments disclosed herein.

111...起始裂紋111. . . Initial crack

112...玻璃112. . . glass

113...覆蓋區113. . . Coverage area

114...主表面114. . . Main surface

115...刻痕線115. . . Scoring line

119...冷卻噴嘴119. . . Cooling nozzle

121...雷射光束121. . . Laser beam

7...線7. . . line

9...製造玻璃帶的裝備9. . . Equipment for making glass ribbon

11...線性軌道之支撐結構11. . . Linear orbital support structure

13...玻璃帶13. . . Glass belt

14...托架14. . . bracket

15...軌道15. . . track

16...第二分量16. . . Second component

17...向量17. . . vector

18...第一分量18. . . First component

21...冷卻液體覆蓋區twenty one. . . Cooling liquid coverage area

22...雷射光束覆蓋區twenty two. . . Laser beam coverage area

23...起始裂紋位置twenty three. . . Initial crack location

31...冷卻液體覆蓋區31. . . Cooling liquid coverage area

32...雷射光束覆蓋區32. . . Laser beam coverage area

41...雷射41. . . Laser

43...雷射光43. . . laser

45...反射鏡45. . . Reflector

47...反射鏡47. . . Reflector

49...殼體49. . . case

51...浮動光學頭51. . . Floating optical head

53...第一透鏡單元53. . . First lens unit

55...第二透鏡單元55. . . Second lens unit

57...S刻痕 對S玻璃帶 曲線57. . . S- scoring on S glass ribbon curve

59...最大雷射功率之百分比曲線59. . . Maximum laser power percentage curve

61...適應性雷射光束輸送系統61. . . Adaptive laser beam delivery system

62...關節62. . . joint

63...光束擴張器63. . . Beam expander

64...延伸管64. . . Extension tube

65...第一末端65. . . First end

67...第二末端67. . . Second end

69...轉向反射鏡69. . . Steering mirror

73...殼體73. . . case

75...步進馬達75. . . Stepper motor

77...齒輪77. . . gear

79...大齒輪79. . . big gear

81...透鏡元件81. . . Lens element

83...圓截面83. . . Circular section

85...光束85. . . beam

87...光束方向87. . . Beam direction

89...光束方向89. . . Beam direction

91...箭頭(方向)91. . . Arrow (direction)

93...光束(組合作用)93. . . Beam (combination)

第1圖為圖示說明雷射刻痕製程之簡要示意圖;Figure 1 is a schematic diagram illustrating a laser scoring process;

第2圖為圖示說明根據’994公開案之雷射刻痕系統之簡要示意圖;Figure 2 is a schematic illustration of a laser scoring system according to the '994 publication;

第3圖為圖示說明第2圖之托架動作之簡要示意圖;Figure 3 is a schematic view showing the operation of the carriage of Figure 2;

第4圖為圖示說明在刻痕製程開始及其後之一時間點上,冷卻液體、雷射光束、以及起始裂紋的位置之簡要示意圖;Figure 4 is a schematic diagram showing the position of the cooling liquid, the laser beam, and the initial crack at one of the beginning and the end of the scoring process;

第5圖為繪製(1)S刻痕 (左手邊垂直軸)對S玻璃帶 (水平軸)(曲線57)、以及(2)最大雷射功率之百分比(右手邊垂直軸)對S玻璃帶 (水平軸)(曲線59)的圖表,S刻痕 與S玻璃帶 的單位為公厘/秒(mm/sec),且對於此等曲線α等於3.8°;Figure 5 is a plot of (1) S- score (left-hand vertical axis) versus S- glass ribbon (horizontal axis) (curve 57), and (2) percentage of maximum laser power (right-hand vertical axis) versus S- glass ribbon (horizontal axis) (curve 59) graph, S- scoring and S- glass ribbon units are in mm/sec (mm/sec), and for these curves α is equal to 3.8°;

第6圖為圖示說明用於提供雷射光至浮動光學頭之系統的簡要示意圖;Figure 6 is a schematic diagram illustrating a system for providing laser light to a floating optical head;

第7圖為對使用適應性雷射光束輸送系統以提供雷射光至浮動光學頭之具體實施例的透視圖;Figure 7 is a perspective view of a particular embodiment of the use of an adaptive laser beam delivery system to provide laser light to a floating optical head;

第8圖為第7圖所示之系統的側視圖;Figure 8 is a side view of the system shown in Figure 7;

第9圖為第7圖所示之系統的俯視圖;Figure 9 is a plan view of the system shown in Figure 7;

第10圖為第7圖中之浮動光學頭的透視圖,該浮動光學頭的一部分殼體被移除,以說明第一透鏡單元、第二透鏡單元、以及在此具體實施例中使用之轉向反射鏡的位置;Figure 10 is a perspective view of the floating optical head of Figure 7 with a portion of the housing of the floating optical head removed to illustrate the first lens unit, the second lens unit, and the steering used in this embodiment. The position of the mirror;

第11圖為第7圖中之浮動光學頭之第一透鏡單元的透射圖;Figure 11 is a transmission diagram of the first lens unit of the floating optical head in Figure 7;

第12圖為圖示說明穿過第7圖中之浮動光學頭的雷射光束之形狀與方向的簡要示意圖。Figure 12 is a schematic diagram showing the shape and direction of a laser beam passing through the floating optical head of Figure 7.

9...製造玻璃帶的裝備9. . . Equipment for making glass ribbon

13...玻璃帶13. . . Glass belt

15...軌道15. . . track

41...雷射41. . . Laser

43...雷射光43. . . laser

45...反射鏡45. . . Reflector

47...反射鏡47. . . Reflector

49...殼體49. . . case

51...浮動光學頭51. . . Floating optical head

53...第一透鏡單元53. . . First lens unit

55...第二透鏡單元55. . . Second lens unit

Claims (10)

一種生產玻璃片料的方法,包含以下步驟:(I) 形成一移動玻璃帶,該玻璃帶具有一隨時間變化之速度S玻璃帶 ;(II) 以一方法沿著橫截於該玻璃帶動作方向之一線,在該玻璃帶之一表面形成一裂口,該方法包含以下步驟:(a)將裝載一發光裝置與一噴嘴之一托架,沿著一線性軌道以一速度S托架 位移,該線性軌道以一角度α相對於該線傾斜,致使該托架之動作具有(i)平行於該線之一第一分量,與(ii)平行於該玻璃帶之該動作方向之一第二分量,該發光裝置發射由一雷射所產生之一光束,且該噴嘴發射一冷卻液體;(b)動態地調整該S托架 、該角度α、或該S托架 與該角度α兩者,致使該托架之該動作之該第二分量與該玻璃帶齊步;以及(c)藉由改變該雷射之功率P雷射 ,補正(II)(b)中之動態調整步驟,該雷射產生由該發光裝置發射之該光束;以及(III)沿著在步驟(II)中形成的該裂口,將一玻璃片料自該玻璃帶中分離。A method of producing a glass flake comprising the steps of: (I) forming a moving glass ribbon having a time-varying S- glass ribbon ; (II) acting in a manner transverse to the glass ribbon the line direction is formed on a surface of one of the glass with a gap, the method comprising the steps of: (a) loading one of a light emitting device and a nozzle carrier, the carrier along a linear displacement of the rail at a speed S, The linear track is inclined relative to the line at an angle a such that the action of the carriage has (i) a first component parallel to one of the lines and (ii) a second parallel to the direction of movement of the glass ribbon a component, the illuminating device emits a light beam generated by a laser, and the nozzle emits a cooling liquid; (b) dynamically adjusting the S- bracket , the angle α, or the S- bracket and the angle α Causing the second component of the action of the carriage to be in step with the glass ribbon; and (c) correcting the dynamic adjustment step in (II) (b) by changing the power of the laser , P The laser produces the light beam emitted by the illumination device; and (III) along step (II) The slit is formed to separate a glass flake from the glass ribbon. 如申請專利範圍第1項所述之方法,其中:(i) S玻璃帶 為如以下的型式:S玻璃帶 =S0 +ΔS0 ,其中S0 與ΔS0 分別為一額定恆定分量與該玻璃帶速度之一隨時間變化之分量;以及(ii) 當|ΔS0 |>0.03S0 時,步驟(II)(b)包含以下步驟:變化α。The method of claim 1, wherein: (i) the S glass ribbon is of the following type: S glass ribbon = S 0 + ΔS 0 , wherein S 0 and ΔS 0 are respectively a nominal constant component and The component of one of the ribbon speeds as a function of time; and (ii) when |ΔS 0 |> 0.03S 0 , step (II)(b) comprises the step of varying α. 如申請專利範圍第1項所述之方法,其中:(i) 步驟(II)(b)包含以下步驟:變化α;(ii) 在該玻璃帶處,由該發光裝置發射的該光束具有一長度L與一寬度W;(iii) 該發光裝置包含用以決定L之一第一透鏡單元與用以決定W之一第二透鏡單元;(iv) 該第一透鏡單元包含至少一個透鏡元件;以及(v) 步驟(II)更包含以下步驟:調整該至少一個透鏡元件之角方向(angular orientation),以補正肇因於α變化之該光束方向相對於該線的變化。The method of claim 1, wherein: (i) step (II) (b) comprises the steps of: changing α; (ii) at the glass ribbon, the light beam emitted by the light emitting device has a a length L and a width W; (iii) the illuminating device comprises a first lens unit for determining L and a second lens unit for determining W; (iv) the first lens unit comprises at least one lens element; And (v) step (II) further comprises the step of adjusting an angular orientation of the at least one lens element to compensate for a change in the direction of the beam relative to the line due to a change in a. 如申請專利範圍第3項所述之方法,其中該第二透鏡單元包含至少一個透鏡元件,且在α變化時,該透鏡元件相對於該托架的該角方向保持恆定。The method of claim 3, wherein the second lens unit comprises at least one lens element, and the lens element remains constant with respect to the angular direction of the carrier when α changes. 如申請專利範圍第1項所述之方法,其中:(i) S玻璃帶 為如以下的型式:S玻璃帶 =S0 +ΔS0 ,其中S0 與ΔS0 分別為一額定恆定分量與該玻璃帶速度之一隨時間變化之分量;以及(ii) 當|ΔS0 |0.03S0 時,步驟(II)(b)包含以下步驟:將α保持恆定。The method of claim 1, wherein: (i) the S glass ribbon is of the following type: S glass ribbon = S 0 + ΔS 0 , wherein S 0 and ΔS 0 are respectively a nominal constant component and The component of one of the ribbon speeds as a function of time; and (ii) when |ΔS 0 | At 0.03S 0 , step (II) (b) comprises the step of keeping α constant. 如申請專利範圍第5項所述之方法,其中步驟(II)(c)中該P雷射 的變化滿足以下關係:dP雷射 /dS玻璃帶 =k‧ctn(α),其中k為一常數。The method of claim 5, wherein the change in the P laser in the step (II) (c) satisfies the following relationship: dP laser /dS glass ribbon = k‧ctn (α), wherein k is one constant. 如申請專利範圍第1項所述之方法,其中步驟(II)包含以下步驟:將雷射光從該雷射沿著一路徑發送至該發光裝置,該路徑包含將該雷射光包裝(encase)於一殼體(housing)中之一適應性雷射光束輸送系統,該殼體具有添附至(affixed to)該雷射或該雷射之一支撐結構的一第一末端,以及添附至該線性軌道或該線性軌道之一支撐結構的一第二末端,該殼體包含至少一個關節(joint)與至少一個容許該第一末端與該第二末端相對於彼此於三度空間中旋轉與位移之延伸管。The method of claim 1, wherein the step (II) comprises the step of transmitting laser light from the laser along a path to the illumination device, the path comprising encapsulating the laser light An adaptive laser beam delivery system in a housing having a first end affixed to the laser or one of the support structures of the laser, and attached to the linear track Or a second end of the linear track supporting structure, the housing comprising at least one joint and at least one extension allowing rotation and displacement of the first end and the second end relative to each other in a three-dimensional space tube. 一種生產玻璃片料的方法,包含以下步驟:(I) 形成一移動玻璃帶;(II) 以一方法沿著橫截於該玻璃帶動作方向之一線,在該玻璃帶之一表面形成一裂口,該方法包含以下步驟:將裝載一發光裝置與一噴嘴之一托架,沿著一線性軌道位移,該線性軌道以角度α相對於該線傾斜,致使該托架動作具有(i)平行於該線之一第一分量,與(ii)平行於該玻璃帶動作方向之一第二分量,該發光裝置發射由一雷射產生之一光束,且該噴嘴發射一冷卻液體;以及(III)使用在步驟(II)中形成的該裂口,將一玻璃片料從該玻璃帶中分離;其中:(i) 在該玻璃帶處,由該發光裝置發射的該光束具有一長度L與一寬度W;(ii) 該發光裝置包含決定L之一第一透鏡單元與決定W之一第二透鏡單元;(iii) 該第一透鏡單元包含至少一個透鏡元件;(iv) 改變α,以改變該托架動作之該第一分量與該第二分量之該相對的量值;以及(v) 調整該至少一個透鏡元件之該角方向,以補正肇因於α的變化之該光束方向相對於該線的變化。A method of producing a glass flake comprising the steps of: (I) forming a moving glass ribbon; (II) forming a slit on one surface of the glass ribbon in a direction along a line transverse to the direction of movement of the glass ribbon The method comprises the steps of: loading a light-emitting device and a nozzle of a nozzle along a linear track that is inclined at an angle a relative to the line such that the carriage action has (i) parallel to a first component of the line, and (ii) a second component parallel to one of the directions of movement of the glass ribbon, the illumination device emitting a beam of light generated by a laser, and the nozzle emits a cooling liquid; and (III) Using the slit formed in step (II), a glass flake is separated from the glass ribbon; wherein: (i) at the glass ribbon, the light beam emitted by the illumination device has a length L and a width W; (ii) the illuminating device comprises a first lens unit that determines one of L and a second lens unit that determines W; (iii) the first lens unit includes at least one lens element; (iv) changes α to change the The first action of the carriage The relative magnitude of the amount of the second component; and a change in the line (v) adjusting the angular direction of the at least one lens element, the correction to the beam direction change prompted by α with respect to the sum. 如申請專利範圍第8項所述之方法,其中該第二透鏡單元包含至少一個透鏡元件,且在α變化時,該透鏡元件之該角方向相對於該托架保持恆定。The method of claim 8, wherein the second lens unit comprises at least one lens element, and the angular direction of the lens element remains constant relative to the carrier when α changes. 一種生產玻璃片料的方法,包含以下步驟:(I) 形成一移動玻璃帶;(II) 以一方法沿著橫截於該玻璃帶的動作方向之該線,在該玻璃帶之一表面形成一裂口,該方法包含以下步驟:(a)將裝載一發光裝置與一噴嘴之一托架,沿著一線性軌道位移,該線性軌道以一角度α相對於該線傾斜,致使該托架動作具有(i)平行於該線之一第一分量,與(ii)平行於該玻璃帶動作方向之一第二分量,該發光裝置發射一雷射光束,且該噴嘴發射一冷卻液體;以及(b)將雷射光自一雷射沿著一路徑發送至該發光裝置,該路徑包含將該雷射光包裝於一殼體中之一適應性雷射光束輸送系統,該殼體具有添附至該雷射或該雷射之一支撐結構的一第一末端,以及添附至該線性軌道或該線性軌道之一支撐結構的第二末端,該殼體包含至少一個關節與至少一個容許該第一末端與該第二末端相對於彼此旋轉與位移於三度空間中之延伸管;以及(III)沿著在步驟(II)中形成的該裂口,將一玻璃片料從該玻璃帶中分離。A method of producing a glass flake comprising the steps of: (I) forming a moving glass ribbon; (II) forming a surface of one of the glass ribbons along a line transverse to the direction of movement of the glass ribbon in a manner A split, the method comprising the steps of: (a) displacing a illuminator and a nozzle of a nozzle along a linear track that is inclined at an angle a relative to the line, causing the cradle to act Having (i) a first component parallel to one of the lines, and (ii) a second component parallel to one of the directions of movement of the glass ribbon, the illumination device emitting a laser beam, and the nozzle emits a cooling liquid; b) transmitting laser light from a laser along a path to the illumination device, the path comprising an adaptive laser beam delivery system for packaging the laser light in a housing, the housing having an attachment to the lightning a first end of the support structure of the laser or a second end of the support structure attached to the linear track or the linear track, the housing including at least one joint and at least one of the first end The second end An extension tube that is rotated and displaced relative to each other in a three degree space; and (III) a glass sheet is separated from the glass ribbon along the slit formed in step (II).
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Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014079478A1 (en) 2012-11-20 2014-05-30 Light In Light Srl High speed laser processing of transparent materials
EP2754524B1 (en) 2013-01-15 2015-11-25 Corning Laser Technologies GmbH Method of and apparatus for laser based processing of flat substrates being wafer or glass element using a laser beam line
EP2781296B1 (en) 2013-03-21 2020-10-21 Corning Laser Technologies GmbH Device and method for cutting out contours from flat substrates using a laser
US9815730B2 (en) 2013-12-17 2017-11-14 Corning Incorporated Processing 3D shaped transparent brittle substrate
US11556039B2 (en) 2013-12-17 2023-01-17 Corning Incorporated Electrochromic coated glass articles and methods for laser processing the same
US9676167B2 (en) 2013-12-17 2017-06-13 Corning Incorporated Laser processing of sapphire substrate and related applications
US9701563B2 (en) 2013-12-17 2017-07-11 Corning Incorporated Laser cut composite glass article and method of cutting
US20150165560A1 (en) 2013-12-17 2015-06-18 Corning Incorporated Laser processing of slots and holes
US10293436B2 (en) 2013-12-17 2019-05-21 Corning Incorporated Method for rapid laser drilling of holes in glass and products made therefrom
US9850160B2 (en) 2013-12-17 2017-12-26 Corning Incorporated Laser cutting of display glass compositions
US10442719B2 (en) 2013-12-17 2019-10-15 Corning Incorporated Edge chamfering methods
KR102445217B1 (en) 2014-07-08 2022-09-20 코닝 인코포레이티드 Methods and apparatuses for laser processing materials
CN208586209U (en) 2014-07-14 2019-03-08 康宁股份有限公司 A kind of system for forming multiple defects of restriction profile in workpiece
WO2016010943A2 (en) 2014-07-14 2016-01-21 Corning Incorporated Method and system for arresting crack propagation
TWI659793B (en) 2014-07-14 2019-05-21 美商康寧公司 Systems and methods for processing transparent materials using adjustable laser beam focal lines
US10526234B2 (en) 2014-07-14 2020-01-07 Corning Incorporated Interface block; system for and method of cutting a substrate being transparent within a range of wavelengths using such interface block
US10047001B2 (en) 2014-12-04 2018-08-14 Corning Incorporated Glass cutting systems and methods using non-diffracting laser beams
CN107406293A (en) 2015-01-12 2017-11-28 康宁股份有限公司 The substrate through heat tempering is cut by laser using Multiphoton Absorbtion method
EP3274306B1 (en) 2015-03-24 2021-04-14 Corning Incorporated Laser cutting and processing of display glass compositions
EP3274313A1 (en) 2015-03-27 2018-01-31 Corning Incorporated Gas permeable window and method of fabricating the same
EP3319911B1 (en) 2015-07-10 2023-04-19 Corning Incorporated Methods of continuous fabrication of holes in flexible substrate sheets and products relating to the same
JP6938543B2 (en) 2016-05-06 2021-09-22 コーニング インコーポレイテッド Laser cutting and removal of contoured shapes from transparent substrates
US10410883B2 (en) 2016-06-01 2019-09-10 Corning Incorporated Articles and methods of forming vias in substrates
US10794679B2 (en) 2016-06-29 2020-10-06 Corning Incorporated Method and system for measuring geometric parameters of through holes
JP7090594B2 (en) 2016-07-29 2022-06-24 コーニング インコーポレイテッド Equipment and methods for laser machining
EP3507057A1 (en) 2016-08-30 2019-07-10 Corning Incorporated Laser processing of transparent materials
CN109803786B (en) 2016-09-30 2021-05-07 康宁股份有限公司 Apparatus and method for laser processing of transparent workpieces using non-axisymmetric beam spots
EP3529214B1 (en) 2016-10-24 2020-12-23 Corning Incorporated Substrate processing station for laser-based machining of sheet-like glass substrates
US10752534B2 (en) 2016-11-01 2020-08-25 Corning Incorporated Apparatuses and methods for laser processing laminate workpiece stacks
US10688599B2 (en) 2017-02-09 2020-06-23 Corning Incorporated Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines
US10580725B2 (en) 2017-05-25 2020-03-03 Corning Incorporated Articles having vias with geometry attributes and methods for fabricating the same
US11078112B2 (en) 2017-05-25 2021-08-03 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same
US10626040B2 (en) 2017-06-15 2020-04-21 Corning Incorporated Articles capable of individual singulation
US11554984B2 (en) 2018-02-22 2023-01-17 Corning Incorporated Alkali-free borosilicate glasses with low post-HF etch roughness
CN109108736B (en) * 2018-07-25 2020-05-29 郑州旭飞光电科技有限公司 Correction method of substrate glass grinding equipment

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3282140A (en) * 1964-02-29 1966-11-01 Asahi Glass Co Ltd Method of and apparatus for automatically cutting a glass ribbon
US3932726A (en) * 1972-10-12 1976-01-13 Glaverbel-Mecaniver S.A. Glass cutting
US20080264994A1 (en) * 2007-04-30 2008-10-30 Patrick Jean Pierre Herve Apparatus, system, and method for scoring a moving glass ribbon
WO2008140818A2 (en) * 2007-05-15 2008-11-20 Corning Incorporated Method and apparatus for scoring and separating a brittle material with a single beam of radiation

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5776220A (en) 1994-09-19 1998-07-07 Corning Incorporated Method and apparatus for breaking brittle materials
US5871134A (en) * 1994-12-27 1999-02-16 Asahi Glass Company Ltd. Method and apparatus for breaking and cutting a glass ribbon
US6327875B1 (en) 1999-03-09 2001-12-11 Corning Incorporated Control of median crack depth in laser scoring
TW592868B (en) * 2001-07-18 2004-06-21 Mitsuboshi Diamond Ind Co Ltd Device and method for scribing fragile material substrate
JP4952992B2 (en) * 2006-12-26 2012-06-13 日本電気硝子株式会社 Glass plate scribing method and glass plate scribing apparatus
KR100949152B1 (en) * 2007-11-23 2010-03-25 삼성코닝정밀유리 주식회사 Apparatus for cutting glass using laser
US8053704B2 (en) * 2008-05-27 2011-11-08 Corning Incorporated Scoring of non-flat materials

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3282140A (en) * 1964-02-29 1966-11-01 Asahi Glass Co Ltd Method of and apparatus for automatically cutting a glass ribbon
US3932726A (en) * 1972-10-12 1976-01-13 Glaverbel-Mecaniver S.A. Glass cutting
US20080264994A1 (en) * 2007-04-30 2008-10-30 Patrick Jean Pierre Herve Apparatus, system, and method for scoring a moving glass ribbon
WO2008140818A2 (en) * 2007-05-15 2008-11-20 Corning Incorporated Method and apparatus for scoring and separating a brittle material with a single beam of radiation

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