TWI471827B - A method and apparatus for monitoring spontaneous combustion gas leakage - Google Patents

Description

Method and device for monitoring spontaneous combustion gas leakage

The invention relates to a method and a device for monitoring self-igniting gas leakage, in particular to a method and a device for monitoring whether a self-igniting gas is leaked by a thermal image analyzer.

In the semiconductor process, it is often necessary to use a self-igniting gas. Therefore, it is necessary to provide a pyrophoric gas storage and delivery system for outputting a pyrophoric gas for use. For example, methane is colorless, reacts with air, and has suffocating properties. In contact with air, it will spontaneously ignite. When burning, it will release smouldering smoke. The main hazard is spontaneous combustion in the air and potential violent combustion hazard. In case of high temperature or flame, if the cylinder pressure relief device fails, the cylinder may be caused. Explosion, if methane is released under high pressure or at high flow rates, a delayed explosion may occur, which is a very dangerous substance.

In view of the high risk of methane, so that the storage and delivery system for methane supply requires high-intensity protection measures and high detection, it is possible to prevent accidents from occurring, in order to avoid the storage of methane in a confined space. There is a possibility of explosion, and the methane is stored in the open space, but it will cause the gas detector to not monitor whether the methane is leaking or not. Please refer to the fourth figure to solve the gas detector (A). It is not easy to detect whether there is any leakage of methane in the open space. It is equipped with a plurality of flame sensors (B) (UV-IR or Dual-IR) in the methane storage and delivery system to sense whether methane is present. Leak, however, only use a flame sensor to monitor whether methane is leaking. There are problems with it as follows:

1. When the methane emission concentration rises sharply by more than 75% and the flow rate is fast, the methane leak may not spontaneously ignite, so the flame sensor cannot react immediately, causing an explosion of doubt.

2. When the humidity is high, the methane leak may not spontaneously ignite, causing the flame sensor (UV-IR or Dual-IR) to be unable to be monitored, and there is a possibility of explosion.

Based on the above, it can be known that the gas detector and the flame sensor cannot completely monitor the leakage of the methane storage and delivery system. In detail, the gas detector and the flame sensor may occur due to various factors. Delayed sensing is such that it cannot be strained immediately, resulting in insufficient protection strength. Therefore, it is necessary to improve the above problems, thereby improving the protection strength of the methane.

Therefore, in order to improve the conventional protection of the self-igniting gas, the insufficiency of the self-igniting gas is leaked, and there is a doubt that the reaction cannot be sensed immediately. The present inventors have been working hard to improve the production of the conventional technology. The problem is to propose a method for monitoring the leakage of self-igniting gas, which allows the spontaneous combustion gas to be leaked at an early stage, and can be immediately detected, thereby reducing the chance of ignition.

The self-igniting gas is automatically stopped by the control unit to minimize the hazard.

To achieve the above-mentioned effects, a thermal image analyzer is provided in the pyrophoric gas storage and delivery system for detecting the temperature change of the pyrophoric gas storage and delivery system by a method for monitoring the spontaneous combustion gas leakage. The reaction temperature rise is caused by the reaction of the pyrophoric gas with the air, and the temperature is detected according to the thermal image analyzer The degree of change determines whether the spontaneous combustion gas is leaking.

The self-igniting gas storage and delivery system configuration comprises a self-igniting gas cylinder, an output line, a pneumatic valve, a punching disk and a preheating pressure regulating disk.

The thermal image analyzer signal is connected to a control unit, and the control unit performs the opening and closing of the pneumatic valve according to the detection result of the thermal image analyzer to prevent the spontaneous combustion gas from leaking out, thereby achieving the monitoring purpose.

The above pyrophoric gas contains one of hydrazine methane or phosphine.

To perform the above method, a device for monitoring the leakage of self-igniting gas includes a pyrophoric gas storage and delivery system, and the device comprises a self-igniting gas cylinder, an output pipeline, a pneumatic valve, a punching disk and a preheating pressure regulating disk for outputting a pyrophoric gas for use; a thermal image analyzer disposed in the pyrophoric gas storage and delivery system for detecting temperature; and a control unit for receiving the thermal image The analyzer detects a temperature signal and performs the above-mentioned pneumatic valve opening and closing according to the temperature signal.

The above pyrophoric gas contains one of hydrazine methane or phosphine.

The effect of the invention:

1. The present invention utilizes a thermal image analyzer to sense a pyrophoric gas, which can be immediately detected in the early stage of spontaneous combustion of the pyrophoric gas to reduce the chance of ignition.

2. The pneumatic valve is automatically closed by the control unit to reduce the hazard and improve the protection strength of the self-igniting gas.

3. The self-igniting gas storage and delivery system is monitored by a thermal image analyzer, so that the self-igniting gas storage and delivery system can be safely placed in an open space.

4. The self-igniting gas storage and delivery system is installed in an open space, and the protection strength of the self-igniting gas is not reduced.

(1)‧‧‧Spontaneous gas storage and delivery system

(11)‧‧‧Spontaneous gas cylinders

(12)‧‧‧Output lines

(13)‧‧‧Pneumatic valve

(14) ‧ ‧ rushing tray

(15) ‧‧‧Preheating pressure regulating disk

(2) ‧‧‧ Thermal Image Analyzer

(3) ‧‧‧Control unit

(A) ‧ ‧ gas detector

(B)‧‧‧ Flame Sensor

The first figure is a schematic diagram illustrating the monitoring method of the preferred embodiment.

The second figure is a flow chart illustrating the implementation process of the monitoring method of the preferred embodiment.

The third figure is a schematic diagram illustrating the monitoring device of the preferred embodiment.

The fourth picture is a conventional way of monitoring methane.

With regard to the technical features and the enhancement of the present invention, the preferred embodiments of the following drawings can be clearly presented. First, as shown in the first and second figures, a method for monitoring the leakage of a pyrophoric gas, the aforementioned spontaneous combustion The gas may be methane (SiH ₄ ) or phosphine, and the method is to provide a thermal image analyzer (2) in the pyrophoric gas storage and delivery system (1), the aforementioned self-igniting gas storage and The conveying system (1) configuration includes a self-igniting gas cylinder (11), an output line (12), a pneumatic valve (13), a punching plate (14) and a preheating pressure regulating plate (15) for self-igniting The gas output is used, wherein the punching disk (14) and the preheating pressure regulating disk (15) are known technologies, and their functions are not described in detail herein, and the thermal image analyzer (2) can detect Measuring the temperature change of the self-igniting gas storage and delivery system (1), and determining whether the pyrophoric gas is leaked according to the temperature change detected by the thermal image analyzer (2), further indicating that the pyrophoric gas and Air contact can cause high temperature or spontaneous combustion, so through the thermal image analyzer (2) Measuring ambient temperature, and then reached the monitor whether the self-ignitability of the gas leakage purpose.

Preferably, the thermal image analyzer (2) signal is connected to a control unit. (3) The control unit (3) performs the opening and closing of the pneumatic valve (13) according to the detection result of the thermal image analyzer (2), in detail, if the thermal image analyzer (2) detects It is detected that the temperature of the pyrophoric gas storage and delivery system (1) is abnormal, and the control unit (3) performs the closing of the pneumatic valve (13) to stop the supply of the pyrophoric gas to reduce the chance of gas explosion. .

Referring to the third figure, the present invention provides an apparatus for performing the above method. The apparatus for monitoring a spontaneous combustion gas leakage includes the methane or phosphine, and the apparatus comprises: A self-igniting gas storage and delivery system (1), the configuration comprising a pyrophoric gas cylinder (11), an output line (12), a pneumatic valve (13), a punching plate (14) and a preheating The pressure regulating disk (15) is used to output the pyrophoric gas for use.

A thermal image analyzer (2) is disposed in the pyrophoric gas storage and delivery system (1) for detecting temperature.

A control unit (3) receives the temperature signal detected by the thermal image analyzer (2), and performs the opening and closing of the pneumatic valve (13) according to the temperature signal.

When the self-igniting gas storage and delivery system (1) has a self-igniting gas leakage, the ambient temperature of the pyrophoric gas storage and delivery system (1) is increased, and is detected by the thermal image analyzer (2). The ambient temperature is abnormal, the pneumatic valve (13) is closed by the control unit (3), and the self-igniting gas storage and delivery system (1) can be disposed in an open space, in addition to being accurately monitored, Can reduce the chance of gas explosion.

However, the above description is only a preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes and modifications according to the scope of the present invention and the description of the invention are the present invention. Within the scope of the patent.

(1)‧‧‧Spontaneous gas storage and delivery system

(11)‧‧‧Spontaneous gas cylinders

(12)‧‧‧Output lines

(13)‧‧‧Pneumatic valve

(14) ‧ ‧ rushing tray

(15) ‧‧‧Preheating pressure regulating disk

(2) ‧‧‧ Thermal Image Analyzer

(3) ‧‧‧Control unit

Claims (4)

A method for monitoring self-igniting gas leakage is provided in a self-igniting gas storage and delivery system provided with a self-igniting gas cylinder, an output pipeline, a pneumatic valve, a flushing disk and a preheating pressure regulating disk a thermal image analyzer for detecting a temperature change of the pyrophoric gas storage and delivery system, and reacting the temperature rise caused by the reaction of the pyrophoric gas with the air, and detecting the temperature change according to the thermal image analyzer The thermal image analyzer is connected to a control unit, and the control unit performs the opening and closing of the pneumatic valve according to the detection result of the thermal image analyzer. The method for monitoring leakage of a spontaneous combustion gas as described in claim 1, wherein the pyrophoric gas comprises one of: methane or phosphine. The utility model relates to a device for monitoring spontaneous gas leakage, comprising: a pyrophoric gas storage and delivery system, comprising a self-igniting gas cylinder, an output pipeline, a pneumatic valve, a punching disk and a preheating pressure regulating disk; And the pyrophoric gas is output for use; a thermal image analyzer is disposed in the self-igniting gas storage and delivery system for detecting temperature; and a control unit receives the detected by the thermal image analyzer A temperature signal is executed, and the pneumatic valve is opened and closed according to the temperature signal. The apparatus for monitoring leakage of a self-igniting gas as described in claim 3, wherein the pyrophoric gas comprises one of: methane or phosphine.