TWI470046B - - Google Patents
Info
- Publication number
- TWI470046B TWI470046B TW100126696A TW100126696A TWI470046B TW I470046 B TWI470046 B TW I470046B TW 100126696 A TW100126696 A TW 100126696A TW 100126696 A TW100126696 A TW 100126696A TW I470046 B TWI470046 B TW I470046B
- Authority
- TW
- Taiwan
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW100126696A TW201305291A (zh) | 2011-07-28 | 2011-07-28 | 化學機械拋光液 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW100126696A TW201305291A (zh) | 2011-07-28 | 2011-07-28 | 化學機械拋光液 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201305291A TW201305291A (zh) | 2013-02-01 |
TWI470046B true TWI470046B (zh) | 2015-01-21 |
Family
ID=48169033
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW100126696A TW201305291A (zh) | 2011-07-28 | 2011-07-28 | 化學機械拋光液 |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW201305291A (zh) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200611965A (en) * | 2004-05-28 | 2006-04-16 | Cabot Microelectronics Corp | Electrochemical-mechanical polishing composition and method for using the same |
TW200714699A (en) * | 2005-10-14 | 2007-04-16 | Applied Materials Inc | Process and composition for electrochemical mechanical polishing |
-
2011
- 2011-07-28 TW TW100126696A patent/TW201305291A/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200611965A (en) * | 2004-05-28 | 2006-04-16 | Cabot Microelectronics Corp | Electrochemical-mechanical polishing composition and method for using the same |
TW200714699A (en) * | 2005-10-14 | 2007-04-16 | Applied Materials Inc | Process and composition for electrochemical mechanical polishing |
Also Published As
Publication number | Publication date |
---|---|
TW201305291A (zh) | 2013-02-01 |