TWI468286B - A copper foil composite, and a molded body and a method for producing the same - Google Patents

A copper foil composite, and a molded body and a method for producing the same Download PDF

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Publication number
TWI468286B
TWI468286B TW102100395A TW102100395A TWI468286B TW I468286 B TWI468286 B TW I468286B TW 102100395 A TW102100395 A TW 102100395A TW 102100395 A TW102100395 A TW 102100395A TW I468286 B TWI468286 B TW I468286B
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Taiwan
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copper foil
layer
resin layer
foil composite
strength
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TW102100395A
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Chinese (zh)
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TW201334957A (en
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Koichiro Tanaka
Kazuki Kammuri
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Jx Nippon Mining & Metals Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/022Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0393Flexible materials
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0137Materials
    • H05K2201/0141Liquid crystal polymer [LCP]
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0137Materials
    • H05K2201/0145Polyester, e.g. polyethylene terephthalate [PET], polyethylene naphthalate [PEN]
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0137Materials
    • H05K2201/0158Polyalkene or polyolefin, e.g. polyethylene [PE], polypropylene [PP]
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/0723Electroplating, e.g. finish plating

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Laminated Bodies (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Structure Of Printed Boards (AREA)

Description

銅箔複合體、以及成形體及其製造方法Copper foil composite, molded body and method of producing the same

本發明係關於一種積層銅箔與樹脂層而成之銅箔複合體、以及成形體及其製造方法。The present invention relates to a copper foil composite in which a copper foil and a resin layer are laminated, and a molded body and a method for producing the same.

積層銅箔與樹脂層而成之銅箔複合體係應用於FPC(可撓性印刷電路板)、電磁波遮罩材、RF-ID(無線IC標籤)、面狀發熱體、及散熱體等。例如,於FPC之情形時,於基底樹脂層之上形成有銅箔之電路,保護電路之覆蓋層膜覆蓋電路,而成為樹脂層/銅箔/樹脂層之積層構造。A copper foil composite system in which a copper foil and a resin layer are laminated is applied to an FPC (Flexible Printed Circuit Board), an electromagnetic wave mask, an RF-ID (wireless IC tag), a planar heat generating body, and a heat sink. For example, in the case of FPC, a circuit of copper foil is formed on the base resin layer, and a cover film of the protective circuit covers the circuit to form a laminated structure of a resin layer/copper foil/resin layer.

因此,此種銅箔複合體之加工性,要求以MIT彎曲性為代表之彎折性、以IPC彎曲性為代表之高循環彎曲性,而提出有彎折性或彎曲性優異之銅箔複合體(例如,專利文獻1~3)。例如,FPC可於行動電話之鉸鏈部等可動部彎折,或為謀求電路之小空間化而彎折使用,但作為變形模式,如以上述MIT彎曲試驗、或IPC彎曲試驗為代表般為單軸彎曲,以不成為嚴苛之變形模式之方式予以設計。Therefore, the workability of the copper foil composite is required to be a copper foil composite excellent in bending property or bending property, which is characterized by bending property represented by MIT bending property and high cycle bending property represented by IPC bending property. Body (for example, Patent Documents 1 to 3). For example, the FPC can be bent at a movable portion such as a hinge portion of a mobile phone, or bent for a small space of the circuit, but as a deformation mode, it is represented by the MIT bending test or the IPC bending test. The shaft is bent and designed in such a way that it does not become a severe deformation mode.

又,於將銅箔複合體使用於電磁波遮罩材等之情形時,成為樹脂層/銅箔之積層構造,要求此種銅箔複合體之表面發揮耐蝕性及長期穩定之電接點性能。In addition, when the copper foil composite is used for an electromagnetic wave mask or the like, the resin layer/copper foil has a laminated structure, and the surface of the copper foil composite is required to exhibit corrosion resistance and long-term stable electrical contact performance.

[專利文獻1]日本特開2010-100887號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2010-100887

[專利文獻2]日本特開2009-111203號公報[Patent Document 2] Japanese Patent Laid-Open Publication No. 2009-111203

[專利文獻3]日本特開2007-207812號公報[Patent Document 3] Japanese Patent Laid-Open Publication No. 2007-207812

然而,若對上述銅箔複合體進行壓製加工等,則成為與MIT彎曲試驗、或IPC彎曲試驗不同之嚴苛(複雜)的變形模式,故而有銅箔斷裂之問題。而且,只要可對銅箔複合體進行壓製加工,則可使含有電路的構造體符合製品形狀。However, when the copper foil composite is subjected to press working or the like, it is a severe (complex) deformation mode different from the MIT bending test or the IPC bending test, and thus the copper foil is broken. Further, as long as the copper foil composite can be subjected to press working, the structure including the circuit can be made to conform to the shape of the product.

因此,本發明之目的在於提供一種即便進行如壓製加工等不同於單軸彎曲之嚴苛(複雜)的變形亦可防止銅箔破裂從而加工性優異、進而長時間穩定發揮耐蝕性及電接點性能之銅箔複合體、以及成形體及其製造方法。Accordingly, it is an object of the present invention to provide a method for preventing cracking of a copper foil by performing severe (complex) deformation different from uniaxial bending such as press working, thereby improving workability and further stably exhibiting corrosion resistance and electrical contact for a long period of time. A copper foil composite having properties, a molded body, and a method for producing the same.

本發明人等發現,藉由將樹脂層之變形行為傳遞至銅箔,使銅箔亦與樹脂層相同地變形,而使銅箔之收縮不易產生並提高延展性,可防止銅箔破裂,從而完成本發明。亦即,以樹脂層之變形行為傳遞至銅箔之方式規定樹脂層及銅箔之特性。進而,為了長時間穩定發揮耐蝕性及電接點性能,而規定銅箔表面之被覆層。The present inventors have found that by transferring the deformation behavior of the resin layer to the copper foil, the copper foil is also deformed in the same manner as the resin layer, so that the shrinkage of the copper foil is less likely to occur and the ductility is improved, thereby preventing the copper foil from being broken. The present invention has been completed. That is, the characteristics of the resin layer and the copper foil are defined in such a manner that the deformation behavior of the resin layer is transmitted to the copper foil. Further, in order to stably exhibit corrosion resistance and electrical contact performance for a long period of time, a coating layer on the surface of the copper foil is defined.

即,本發明之銅箔複合體積層有銅箔與樹脂層,於將上述銅箔之厚度設為t2 (mm),將拉伸應變4%時之上述銅箔的應力設為f2 (MPa),將上述樹脂層之厚度設為t3 (mm),將拉伸應變4%時之上述樹脂層的應力設為f3 (MPa)時,滿足式1:(f3 ×t3 )/(f2 ×t2 )≧1,並且於將上述銅箔與上述樹脂層之180°剝離接著強度設為f1 (N/mm),將上述銅箔複合體之拉伸應變30%時的強度設為F(MPa),將上述銅箔複合體之厚度設為T(mm)時,滿足式2:1≦24.3f1 /(F×T);於上述銅箔中之未積層有上述樹脂層之面,形成有合計厚度0.001~5.0μm之Ni層及/或Ni合金層。That is, the copper foil composite volume layer of the present invention has a copper foil and a resin layer, and the thickness of the copper foil is t 2 (mm), and the stress of the copper foil when the tensile strain is 4% is f 2 ( MPa), the thickness of the resin layer is t 3 (mm), and when the stress of the resin layer at a tensile strain of 4% is f 3 (MPa), the formula 1: (f 3 × t 3 ) is satisfied. / (f 2 × t 2 ) ≧ 1, and the copper foil and the resin layer are 180° peeled off and the strength is set to f 1 (N/mm), and the tensile strain of the copper foil composite is 30%. When the thickness of the copper foil composite is T (mm), the formula 2:1≦24.3f 1 /(F×T) is satisfied; On the surface of the resin layer, a Ni layer and/or a Ni alloy layer having a total thickness of 0.001 to 5.0 μm are formed.

較佳為該Ni層及/或Ni合金層之合計厚度為0.001~0.50μm。Preferably, the total thickness of the Ni layer and/or the Ni alloy layer is 0.001 to 0.50 μm.

較佳為,在未達上述樹脂層之玻璃轉移溫度的溫度下,上述式1及式2 成立。Preferably, the above formula 1 and formula 2 are at a temperature that does not reach the glass transition temperature of the above resin layer. Established.

較佳為,上述銅箔複合體之拉伸斷裂應變1與上述樹脂層單體之拉伸斷裂應變L之比1/L為0.7~1。Preferably, the ratio 1/L of the tensile strain at break 1 of the copper foil composite to the tensile strain at break L of the resin layer is 0.7 to 1.

本發明之成形體係對上述金屬箔複合體進行加工而成。本發明之成形體例如可藉由進行壓製加工、使用有上下模具之突出加工、拉延加工之其他加工等立體地加工。The molding system of the present invention is obtained by processing the above metal foil composite. The molded article of the present invention can be processed three-dimensionally by, for example, press working, protrusion processing using upper and lower molds, and other processing such as drawing processing.

本發明之成形體的製造方法係對上述金屬箔複合體進行加工。The method for producing a molded article of the present invention is to process the metal foil composite described above.

根據本發明,可獲得一種即便進行如壓製加工等不同於單軸彎曲之嚴苛(複雜)的變形亦可防止銅箔破裂而加工性優異、進而長時間穩定發揮耐蝕性及電接點性能的銅箔複合體。According to the present invention, it is possible to obtain a severe (complex) deformation different from uniaxial bending such as press working, thereby preventing the copper foil from being broken and having excellent workability, and further stably exhibiting corrosion resistance and electrical contact performance for a long period of time. Copper foil composite.

2‧‧‧打孔機2‧‧‧punching machine

4‧‧‧基座4‧‧‧Base

10‧‧‧杯突試驗裝置10‧‧‧ cup test device

20‧‧‧試驗片20‧‧‧Test strips

r‧‧‧半徑R‧‧‧ Radius

f1 ‧‧‧銅箔與樹脂層之180°剝離接著強度f 1 ‧‧‧180° peeling strength of copper foil and resin layer

F‧‧‧銅箔複合體之拉伸應變30%時之強度F‧‧‧Strength of tensile strain at 30% of copper foil composite

T‧‧‧銅箔複合體之厚度Thickness of T‧‧‧ copper foil composite

圖1係實驗表示f1 與(F×T)之關係的圖。Figure 1 is a graph showing the relationship between f 1 and (F × T).

圖2係表示進行加工性之評價的杯突試驗裝置之構成的圖。Fig. 2 is a view showing the configuration of a cupping test apparatus for evaluating workability.

本發明之銅箔複合體係積層銅箔與樹脂層而構成。本發明之銅箔複合體例如可應用於FPC(可撓性印刷電路板)、電磁波遮罩材、RF-ID(無線IC標籤)、面狀發熱體、及散熱體,但並非限定於該等。The copper foil composite system of the present invention is formed by laminating a copper foil and a resin layer. The copper foil composite of the present invention can be applied to, for example, an FPC (Flexible Printed Circuit Board), an electromagnetic wave mask, an RF-ID (wireless IC tag), a planar heat generating body, and a heat sink, but is not limited thereto. .

<銅箔><copper foil>

銅箔之厚度t2 較佳為0.004~0.05mm(4~50μm)。若t2 未達0.004mm(4μm),則存在銅箔之延展性顯著降低而使銅箔複合體之加工性未提高之情形。銅箔較佳為具有4%以上之拉伸斷裂應變。若t2 超過0.05mm(50μm),則存在於製成銅箔複合體時銅箔單體之特性的影響大幅地顯現而使銅箔複合體之加工性未提高的情形。The thickness t 2 of the copper foil is preferably 0.004 to 0.05 mm (4 to 50 μm). When t 2 is less than 0.004 mm (4 μm), the ductility of the copper foil is remarkably lowered, and the workability of the copper foil composite is not improved. The copper foil preferably has a tensile strain at break of 4% or more. When t 2 exceeds 0.05 mm (50 μm), the influence of the characteristics of the copper foil single body when the copper foil composite is formed is largely exhibited, and the workability of the copper foil composite is not improved.

作為銅箔,可使用壓延銅箔、電解銅箔、藉由金屬化而實現之銅箔等,但較佳為藉由再結晶而使加工性優異、同時可降低強度(f2 )之壓延銅箔。於在銅箔表面形成有用於接著、防銹之處理層之情形時,亦將該等包含於銅箔中而予以考慮。As the copper foil, a rolled copper foil, an electrolytic copper foil, a copper foil obtained by metallization, or the like can be used. However, it is preferably a rolled copper which is excellent in workability by recrystallization and can reduce strength (f 2 ). Foil. In the case where a treatment layer for subsequent rust prevention is formed on the surface of the copper foil, it is also considered to be included in the copper foil.

<樹脂層><Resin layer>

作為樹脂層,並無特別限制,可將樹脂材料塗佈於銅箔而形成樹脂層,但較佳為可貼附於銅箔之樹脂膜。作為樹脂膜,可列舉PET(聚對苯二甲酸乙二酯)膜、PEN(聚萘二甲酸乙二酯)、PI(聚醯亞胺)膜、LCP(液晶聚合物)膜、及PP(聚丙烯)膜。The resin layer is not particularly limited, and the resin material may be applied to the copper foil to form a resin layer, but is preferably a resin film which can be attached to the copper foil. Examples of the resin film include PET (polyethylene terephthalate) film, PEN (polyethylene naphthalate), PI (polyimide) film, LCP (liquid crystal polymer) film, and PP ( Polypropylene) film.

作為樹脂膜與銅箔之積層方法,可於樹脂膜與銅箔之間使用接著劑,亦可將樹脂膜熱壓接於銅箔。又,若接著劑層之強度低,則難以提高銅箔複合體之加工性,因此接著劑層之強度較佳為樹脂層之應力(f3 )的1/3以上。其原因在於:於本發明中,藉由「將樹脂層之變形行為傳遞至銅箔,使銅箔亦與樹脂層相同地變形,從而使銅箔之收縮不易產生並提高延展性」一事作為技術思想,若接著劑層之強度低,則於接著劑層之變形有所緩和,而使樹脂之行為不會傳遞至銅箔。As a method of laminating the resin film and the copper foil, an adhesive may be used between the resin film and the copper foil, or the resin film may be thermocompression bonded to the copper foil. Further, when the strength of the adhesive layer is low, it is difficult to improve the workability of the copper foil composite. Therefore, the strength of the adhesive layer is preferably 1/3 or more of the stress (f 3 ) of the resin layer. The reason for this is that, in the present invention, by transferring the deformation behavior of the resin layer to the copper foil, the copper foil is deformed in the same manner as the resin layer, so that the shrinkage of the copper foil is less likely to occur and the ductility is improved. The idea is that if the strength of the adhesive layer is low, the deformation of the adhesive layer is moderated, and the behavior of the resin is not transmitted to the copper foil.

再者,於使用接著劑之情形時,下述樹脂層之特性係以使接著劑層與樹脂層合併而成者為對象。Further, in the case of using an adhesive, the properties of the resin layer described below are intended to combine the adhesive layer and the resin layer.

樹脂層之厚度t3 較佳為0.012~0.12mm(12~120μm)。若t3 未達0.012mm(12μm),則存在成為(f3 ×t3 )/(f2 ×t2 )<1之情況。若t3 厚於0.12mm(120μm),則樹脂層之柔軟性(可撓性)降低且剛性變得過高,而使加工性劣化。樹脂層較佳為具有40%以上之拉伸斷裂應變。The thickness t 3 of the resin layer is preferably from 0.012 to 0.12 mm (12 to 120 μm). When t 3 is less than 0.012 mm (12 μm), there is a case where (f 3 × t 3 ) / (f 2 × t 2 ) < When t 3 is thicker than 0.12 mm (120 μm), the flexibility (flexibility) of the resin layer is lowered and the rigidity is excessively high, and the workability is deteriorated. The resin layer preferably has a tensile strain at break of 40% or more.

<銅箔複合體><copper foil composite>

作為積層上述銅箔與樹脂層而成之銅箔複合體之組合,可列舉銅箔/樹脂層之雙層構造、或銅箔/樹脂層/銅箔之3層構造。於樹脂層之兩側存在銅箔(銅箔/樹脂層/銅箔)之情形時,整體之(f2 ×t2 )之值係設為將對2層銅箔各者進行計算所得之各(f2 ×t2 )之值相加而成者。The combination of the copper foil composite in which the copper foil and the resin layer are laminated may be a two-layer structure of a copper foil/resin layer or a three-layer structure of a copper foil/resin layer/copper foil. In the case where a copper foil (copper foil/resin layer/copper foil) is present on both sides of the resin layer, the value of the whole (f 2 × t 2 ) is set to be calculated for each of the two layers of copper foil. The values of (f 2 × t 2 ) are added together.

<180°剝離接著強度><180° peeling strength>

銅箔因其厚度薄而容易於厚度方向產生收縮。若產生收縮,則銅箔斷裂,故而延展性降低。另一方面,樹脂層具有於拉伸時不易產生收縮之特徵(均勻應變之區域較廣)。因此,於銅箔與樹脂層之複合體中,藉由將樹脂層之變形行為傳遞至銅箔,使銅箔亦與樹脂相同地變形,從而使銅箔不易產生收縮,而提高延展性。此時,若銅箔與樹脂層之接著強度低,則無法將樹脂層之變形行為傳遞至銅箔,而使延展性未提高(剝離而使銅破裂)。Copper foil is easy to shrink in the thickness direction because of its thin thickness. If shrinkage occurs, the copper foil is broken, so ductility is lowered. On the other hand, the resin layer has a feature that it is less likely to cause shrinkage upon stretching (the area of uniform strain is wider). Therefore, in the composite of the copper foil and the resin layer, the deformation behavior of the resin layer is transmitted to the copper foil, and the copper foil is also deformed in the same manner as the resin, so that the copper foil is less likely to shrink and the ductility is improved. At this time, if the bonding strength between the copper foil and the resin layer is low, the deformation behavior of the resin layer cannot be transmitted to the copper foil, and the ductility is not improved (peeling and copper is broken).

因此,必須提高接著強度。作為接著強度,剪切接著力被認為是直接性指標,但若提高接著強度,使剪切接著力與銅箔複合體之強度為同等水平,則除接著面以外之部位斷裂,故而變得難以進行測定。Therefore, the bonding strength must be increased. As the adhesion strength, the shear adhesion is considered to be a directness index. However, if the adhesion strength is increased and the shear adhesion is equal to the strength of the copper foil composite, the portion other than the adhesion surface is broken, which makes it difficult. The measurement was carried out.

根據此種情況,於本發明中使用180°剝離接著強度f1 之值。剪切接著強度與180°剝離接著強度之絕對值完全不同,但加工性或拉伸伸長率、與180°剝離接著強度之間可見關聯,因此將180°剝離接著強度作為接著強度之指標。According to this case, the value of 180° peeling followed by the strength f 1 is used in the present invention. The shearing strength was completely different from the absolute value of the 180° peeling strength, but the workability or tensile elongation was found to be related to the 180° peeling strength. Therefore, the 180° peeling strength was used as an index of the strength.

此處,實際上認為「斷裂時之強度=剪切密合力」,例如認為於如需要30%以上之拉伸應變之情形時,成為「30%之流動應力≦剪切密合力」,於如需要50%以上之拉伸應變之情形時,成為「50%之流動應力≦剪切密合力」。而且,根據本發明人等之實驗,若拉伸應變成為30%以上,則加工性變得良好,因此如下所述般採用拉伸應變為30%時之強度作為銅箔複合體之強度F。Here, it is considered that "strength at break = shear adhesion" is considered to be "30% flow stress ≦ shear adhesion force" when it is required to have a tensile strain of 30% or more. When a tensile strain of 50% or more is required, it becomes "50% flow stress ≦ shear adhesion". Further, according to the experiment of the inventors of the present invention, when the tensile strain is 30% or more, the workability is improved. Therefore, the strength at which the tensile strain is 30% is used as the strength F of the copper foil composite as follows.

圖1係實驗表示f1 與(F×T)之關係的圖,對下述各實施例及比較例之f1 與(F×T)之值進行繪製。(F×T)係於拉伸應變30%時對銅箔複合體施加之力,若將此視作為為了使加工性提高所必需之最低限度之剪切接著強度,則若f1 與(F×T)之絕對值相同,兩者便於斜度1中可見關聯。Figure 1 is a graph showing the relationship experimental and (F × T) of f, f of the following Examples and Comparative Examples of 1 and the value (F × T) of each of the embodiments drawn. (F×T) is the force applied to the copper foil composite at a tensile strain of 30%, and if this is regarded as the minimum shear strength necessary for improving the workability, then f 1 and (F) ×T) has the same absolute value, and the two are easy to see the correlation in the slope 1.

然而,於圖1中,並非所有資料之f1 與(F×T)均為相同之關聯,關於加工性較差之各比較例,相對於(F×T)之f1 之相關係數(亦即,通過圖1之原點,相對於(F×T)之f1 的斜度)較小,與此相對應,180°剝離接著強度較差。另一方面,各實施例之斜度大於各比較例之斜度,斜度最小之實施例17(恰好於應變30%時斷裂者)之斜度為1/24.3,因此將該值視作為了提高加工性所必需之最低限度之剪切接著強度與180°剝離接著強度之間的相關係數。即,將剪切接著力視作180°剝離接著強度f1 之24.3倍。However, in Fig. 1, not all of the data f 1 and (F × T) are the same correlation, and for each of the comparative examples with poor workability, the correlation coefficient with respect to f 1 of (F × T) (that is, With the origin of Fig. 1, the slope of f 1 with respect to (F × T) is small, and correspondingly, the 180° peeling is inferior in strength. On the other hand, the slope of each example is larger than the slope of each comparative example, and the inclination of the embodiment 17 (which is just broken when the strain is 30%) is 1/24.3, so the value is regarded as The correlation coefficient between the minimum shear strength and the 180° peel strength required to improve the workability. That is, the shearing force was regarded as 180° peeling and then 24.3 times the strength f 1 .

再者,於比較例3之情形時,圖1之斜度超過1/24.3,但下述式1:(f3 ×t3 )/(f2 ×t2 )未達1,故而加工性劣化。Further, in the case of Comparative Example 3, the slope of FIG. 1 exceeded 1/24.3, but the following formula 1: (f 3 × t 3 ) / (f 2 × t 2 ) did not reach 1, so the workability deteriorated. .

180°剝離接著強度係每單位寬度之力(N/mm)。180° peeling followed by strength (N/mm) per unit width.

於銅箔複合體為3層構造且存在複數個接著面時,使用各接著面中之180°剝離接著強度最低之值。其原因在於最脆弱之接著面會進行剝離。When the copper foil composite has a three-layer structure and a plurality of subsequent faces exist, the 180° peeling in each of the adjoining faces is used to have the lowest strength. The reason is that the most vulnerable side will be peeled off.

又,可改變使銅箔與樹脂層積層複合時之壓力或溫度條件而提高接著強度。較佳為於不損傷樹脂層之範圍內同時增加積層時之壓力、溫度。Further, the pressure or temperature conditions at the time of laminating the copper foil and the resin layer can be changed to improve the bonding strength. It is preferable to simultaneously increase the pressure and temperature at the time of laminating without damaging the resin layer.

作為提高銅箔與樹脂層之接著強度之方法,可列舉:藉由鉻酸鹽處理等而於銅箔表面(樹脂層側之面,以下適當稱為「接著面」)設置Cr氧化物層,或者對銅箔表面實施粗化處理,或者於銅箔表面設置Ni層或者Ni合金層,或者於銅箔表面被覆Ni之後設置Cr氧化物層。又,如下所述般於與樹脂層為相反側之銅箔表面(非接著面)形成Ni層或者Ni合金層,亦可於在非接著面形成此Ni層或者Ni合金層之同時,以同一步驟於接著面亦形 成Ni層或者Ni合金層。甚至,亦可於在接著面形成Ni層或者Ni合金層後,形成Cr氧化物層。As a method of improving the adhesive strength between the copper foil and the resin layer, a Cr oxide layer is provided on the surface of the copper foil (the surface on the resin layer side, hereinafter referred to as "the adhesion surface" as appropriate) by chromate treatment or the like. Alternatively, the copper foil surface may be subjected to a roughening treatment, or a Ni layer or a Ni alloy layer may be provided on the surface of the copper foil, or a Cr oxide layer may be provided after the surface of the copper foil is coated with Ni. Further, as described below, a Ni layer or a Ni alloy layer is formed on the surface (non-bonding surface) of the copper foil opposite to the resin layer, and the Ni layer or the Ni alloy layer may be formed on the non-bonding surface while being the same Step by step A Ni layer or a Ni alloy layer. Alternatively, a Cr oxide layer may be formed after forming a Ni layer or a Ni alloy layer on the succeeding surface.

接著面側之Cr氧化物層之厚度較佳為設為以Cr重量計為5~100μg/dm2 。該厚度可根據利用濕式分析所獲得之鉻含量而算出。又,Cr氧化物層之存在可藉由是否能利用X射線光電子光譜(XPS)檢測出Cr來進行判定(Cr之波峰因氧化而位移)。The thickness of the Cr oxide layer on the surface side is preferably 5 to 100 μg/dm 2 in terms of the weight of Cr. This thickness can be calculated from the chromium content obtained by wet analysis. Further, the presence of the Cr oxide layer can be determined by whether or not the Cr can be detected by X-ray photoelectron spectroscopy (XPS) (the peak of Cr is displaced by oxidation).

接著面側之上述Ni層或Ni合金層之厚度較佳為設為0.001~5.0μm。若Ni層或Ni合金層之厚度超過5.0μm,則有銅箔(以及銅箔複合體)之延展性降低之情形。The thickness of the Ni layer or the Ni alloy layer on the surface side is preferably 0.001 to 5.0 μm. When the thickness of the Ni layer or the Ni alloy layer exceeds 5.0 μm, the ductility of the copper foil (and the copper foil composite) may be lowered.

又,可改變使銅箔與樹脂層積層複合時之壓力或溫度條件而提高接著強度。較佳為於不損傷樹脂層之範圍內同時增加積層時之壓力、溫度。Further, the pressure or temperature conditions at the time of laminating the copper foil and the resin layer can be changed to improve the bonding strength. It is preferable to simultaneously increase the pressure and temperature at the time of laminating without damaging the resin layer.

於銅箔中之未積層有上述樹脂層之面(非接著面),為了賦予長時間穩定之電接點性而形成有合計厚度0.001~5.0μm之Ni層及/或Ni合金層。若該等層之合計厚度未達0.001μm,則無法獲得穩定之電接點性。該等層之合計厚度變得愈厚則愈可提高電接點性能之穩定性,但即便合計厚度超過5.0μm,上述效果亦飽和。Ni層及/或Ni合金層之合計厚度較佳為0.001~0.50μm,更佳為0.005~0.10μm。A Ni layer and/or a Ni alloy layer having a total thickness of 0.001 to 5.0 μm are formed in the copper foil on the surface (non-bonding surface) on which the resin layer is not laminated, in order to provide stable electrical contact properties for a long period of time. If the total thickness of the layers is less than 0.001 μm, stable electrical contact properties cannot be obtained. The thicker the total thickness of the layers is, the more stable the electrical contact performance is. However, even if the total thickness exceeds 5.0 μm, the above effects are saturated. The total thickness of the Ni layer and/or the Ni alloy layer is preferably 0.001 to 0.50 μm, more preferably 0.005 to 0.10 μm.

又,Ni合金層較佳為下述合金:含有20wt%以上之Ni,進而含有合計5wt%以上之Zn、Sn、Co、Cr、Mn、V、P、B、W、Mo、Fe中之一種以上,剩餘部分為不可避免之雜質。Further, the Ni alloy layer is preferably an alloy containing 20% by weight or more of Ni, and further containing 5% by weight or more of Zn, Sn, Co, Cr, Mn, V, P, B, W, Mo, and Fe. Above, the remaining part is an unavoidable impurity.

再者,於銅箔之非接著面形成有上述之Ni層或Ni合金層之至少一者即可。又,於在銅箔之非接著面形成有Ni層及Ni合金層兩者之情形時,可為自最表面起為Ni層/Ni合金層之順序,亦可為自最表面起為Ni合金層/Ni層之順序。又,「合計厚度」係指Ni層之厚度與Ni合金層之厚度的合計值。Further, at least one of the Ni layer or the Ni alloy layer described above may be formed on the non-contiguous surface of the copper foil. Further, in the case where both the Ni layer and the Ni alloy layer are formed on the non-contiguous surface of the copper foil, the Ni layer/Ni alloy layer may be used from the outermost surface, or the Ni alloy may be used from the outermost surface. The order of the layers/Ni layers. Moreover, the "total thickness" means the total value of the thickness of the Ni layer and the thickness of the Ni alloy layer.

<(f3 ×t3 )/(f2 ×t2 )><(f 3 ×t 3 )/(f 2 ×t 2 )>

接下來,對申請專利範圍之((f3 ×t3 )/(f2 ×t2 ))(以下稱為「式1」)之意義進行說明。銅箔複合體係積層有相同寬度(尺寸)之銅箔與樹脂層,因而式1表示對構成銅箔複合體之銅箔與樹脂層施加之力的比。因此,該比為1以上意味著對樹脂層側施加更多之力,樹脂層側之強度高於銅箔。而且,銅箔未斷裂表示良好之加工性。Next, the meaning of ((f 3 × t 3 ) / (f 2 × t 2 )) (hereinafter referred to as "Formula 1") of the patent application scope will be described. Since the copper foil composite system has a copper foil and a resin layer having the same width (size), the formula 1 represents the ratio of the force applied to the copper foil constituting the copper foil composite and the resin layer. Therefore, the ratio of 1 or more means that more force is applied to the resin layer side, and the strength of the resin layer side is higher than that of the copper foil. Moreover, the fact that the copper foil is not broken indicates good processability.

另一方面,若成為(f3 ×t3 )/(f2 ×t2 )<1,則係對銅箔側施加更多之力,故而不會產生「將樹脂層之變形行為傳遞至銅箔而使銅箔亦與樹脂相同地變形」之上述作用。On the other hand, if (f 3 × t 3 ) / (f 2 × t 2 ) < 1, the force is applied to the side of the copper foil, so that the deformation behavior of the resin layer is not transmitted to the copper. The foil acts to deform the copper foil in the same manner as the resin.

此處,f2 及f3 只要為產生塑性變形後之相同應變量下之應力即可,但考慮銅箔之拉伸斷裂應變與樹脂層(例如PET膜)之塑性變形開始之應變,而設為拉伸應變4%之應力。再者,f2 及f3 (以及f1 )係全部設為MD(Machine Direction,縱向)之值。Here, f 2 and f 3 may be stresses under the same strain amount after plastic deformation, but considering the strain at break of the tensile fracture strain of the copper foil and the plastic deformation of the resin layer (for example, PET film), It is a tensile strain of 4% strain. Further, f 2 and f 3 (and f 1 ) are all set to values of MD (Machine Direction).

<24.3f1 /(F×T)><24.3f 1 /(F×T)>

接下來,對申請專利範圍之(24.3f1 /(F×T))(以下稱為「式2」)之意義進行說明。如上所述,由於剪切接著力係180°剝離接著強度f1 之約24.3倍,因而24.3f1 表示為了提高銅箔與樹脂層之加工性所必需之最低限度的接著強度,其中,上述剪切接著力直接表示為了提高加工性而所必需之最低限度的銅箔與樹脂層之接著強度。另一方面,(F×T)為對銅箔複合體施加之力,因而式2成為銅箔與樹脂層之接著強度和銅箔複合體之拉伸阻力的比。而且,若銅箔複合體被拉伸,則於銅箔與樹脂層之界面,藉由欲進行 局部變形之銅箔與欲進行拉伸均勻應變之樹脂而施加剪切應力。因此,若接著強度低於該剪切應力,則銅與樹脂層剝離,而無法將樹脂層之變形行為傳遞至銅箔,從而銅箔之延展性未提高。Next, the meaning of the patent application range (24.3f 1 /(F×T)) (hereinafter referred to as "Formula 2") will be described. As described above, since the shearing force is 180° peeling and then the strength f 1 is about 24.3 times, 24.3f 1 represents the minimum bonding strength necessary for improving the workability of the copper foil and the resin layer, wherein the shearing is performed. The cutting force directly indicates the minimum bonding strength between the copper foil and the resin layer necessary for improving the workability. On the other hand, (F × T) is a force applied to the copper foil composite, and therefore, Formula 2 becomes a ratio of the adhesion strength between the copper foil and the resin layer and the tensile resistance of the copper foil composite. Further, when the copper foil composite is stretched, a shear stress is applied to the interface between the copper foil and the resin layer by a copper foil to be locally deformed and a resin to be uniformly stretched. Therefore, if the strength is lower than the shear stress, the copper and the resin layer are peeled off, and the deformation behavior of the resin layer cannot be transmitted to the copper foil, so that the ductility of the copper foil is not improved.

亦即,若式2之比未達1,則接著強度變得比對銅箔複合體施加之力弱而使銅箔與樹脂變得易剝離,銅箔因壓製成形等加工而斷裂。In other words, when the ratio of the formula 2 is less than 1, the subsequent strength becomes weaker than the force applied to the copper foil composite, and the copper foil and the resin are easily peeled off, and the copper foil is broken by processing such as press molding.

若式2之比為1以上,則銅與樹脂層不剝離而可將樹脂層之變形行為傳遞至銅箔,從而使銅箔之延展性提高。再者,式2之比越高越佳,但實現10以上之值通常較為困難,故而較佳為將式2之上限設為10。When the ratio of Formula 2 is 1 or more, the copper and the resin layer are not peeled off, and the deformation behavior of the resin layer can be transmitted to the copper foil, thereby improving the ductility of the copper foil. Further, the higher the ratio of the formula 2, the better, but it is usually difficult to achieve a value of 10 or more. Therefore, it is preferable to set the upper limit of the formula 2 to 10.

再者,認為24.3f1 /(F×T)越大,加工性越提高,但樹脂層之拉伸應變l與24.3f1 /(F×T)不成比例。此係受到(f3 ×t3 )/(f2 ×t2 )之大小、銅箔、樹脂層單體之延展性之影響所造成,但只要為滿足24.3f1 /(F×T)≧1、(f3 ×t3 )/(f2 ×t2 )≧1之銅箔與樹脂層之組合,便可獲得具有所需加工性之複合體。Further, it is considered that the larger the 24.3f 1 /(F×T), the more the workability is improved, but the tensile strain l of the resin layer is not proportional to 24.3f 1 /(F×T). This is caused by the influence of (f 3 × t 3 ) / (f 2 × t 2 ), the ductility of the copper foil and the resin layer monomer, but as long as it satisfies 24.3f 1 /(F × T)≧ 1. A combination of a copper foil of (f 3 × t 3 ) / (f 2 × t 2 ) ≧ 1 and a resin layer, whereby a composite having desired workability can be obtained.

此處,使用拉伸應變30%時之強度作為銅箔複合體之強度F的原因在於,如上所述,若拉伸應變成為30%以上,則加工性變得良好。又,其原因在於,進行了銅箔複合體之拉伸試驗,其結果為:直至拉伸應變30%,會因應變而導致流動應力產生較大之差,而30%以後則即便藉由拉伸應變亦不會使流動應力產生較大之差(稍微進行加工硬化,但曲線之斜度變得相當小)。Here, the reason why the strength at the tensile strain of 30% is used as the strength F of the copper foil composite is that, as described above, when the tensile strain is 30% or more, the workability is improved. Further, the reason for this is that the tensile test of the copper foil composite is carried out, and as a result, the tensile stress is 30%, and the flow stress is greatly deteriorated by the strain, and even after 30%, the tensile stress is obtained. The tensile strain does not cause a large difference in flow stress (slightly work hardening, but the slope of the curve becomes quite small).

再者,銅箔複合體之拉伸應變並非為30%以上之情形時,將銅箔複合體之拉伸強度設為F。In addition, when the tensile strain of the copper foil composite is not 30% or more, the tensile strength of the copper foil composite is F.

如上所述,本發明之銅箔複合體係即便進行如壓製加工等之不同於單軸彎曲之嚴苛(複雜)的變形,亦可防止銅箔破裂,而使加工性優異。特別是本發明適於如壓製加工之立體成形。藉由將銅箔複合體進行 立體成形,可使銅箔複合體成為複雜之形狀,或可使銅箔複合體之強度提高,例如亦可將銅箔複合體本身作為各種電源電路之框體,從而可謀求零件件數或成本之減少。As described above, the copper foil composite system of the present invention can prevent the copper foil from being broken and excellent in workability even if it is subjected to severe (complex) deformation such as press processing which is different from uniaxial bending. In particular, the invention is suitable for stereolithography such as press processing. By conducting a copper foil composite The three-dimensional forming can make the copper foil composite into a complicated shape or increase the strength of the copper foil composite. For example, the copper foil composite itself can be used as a frame of various power supply circuits, thereby achieving the number of parts or costs. Reduced.

<l/L><l/L>

銅箔複合體之拉伸斷裂應變l與樹脂層單體之拉伸斷裂應變L的比l/L較佳為0.7~1。The ratio l/L of the tensile strain at break l of the copper foil composite to the tensile rupture strain L of the resin layer monomer is preferably 0.7 to 1.

通常,樹脂層之拉伸斷裂應變壓倒性地高於銅箔之拉伸斷裂應變,同樣地,樹脂層單體之斷裂應變壓倒性地高於銅箔複合體之拉伸斷裂應變。 另一方面,如上所述,於本發明中,將樹脂層之變形行為傳遞至銅箔而使銅箔之延展性提高,伴隨於此,可使銅箔複合體之拉伸斷裂應變提高至樹脂層單體之拉伸斷裂應變之70~100%。而且,若比l/L為0.7以上,則壓製成形性進一步提高。Generally, the tensile strain at break of the resin layer is overwhelmingly higher than the tensile strain at break of the copper foil, and likewise, the strain at break of the resin layer is overwhelmingly higher than the tensile strain at break of the copper foil composite. On the other hand, as described above, in the present invention, the deformation behavior of the resin layer is transmitted to the copper foil to improve the ductility of the copper foil, and accordingly, the tensile strain at break of the copper foil composite can be improved to the resin. The tensile fracture strain of the layer monomer is 70~100%. Further, when the ratio l/L is 0.7 or more, the press formability is further improved.

再者,銅箔複合體之拉伸斷裂應變l為進行拉伸試驗時之拉伸斷裂應變,於樹脂層與銅箔同時斷裂時設為該值,於銅箔先斷裂時設為銅箔斷裂時之值。Further, the tensile strain at break l of the copper foil composite is the tensile strain at break when the tensile test is performed, and is set to be the value when the resin layer and the copper foil are simultaneously broken, and is set to be broken when the copper foil is first broken. The value of time.

<樹脂層之Tg><Tg of resin layer>

通常,樹脂層於高溫下強度降低或接著力降低,故而於高溫下變得難以滿足(f3 ×t3 )/(f2 ×t2 )≧1、或1≦24.3f1 /(F×T)。例如,於樹脂層之Tg(玻璃轉移溫度)以上之溫度,存在變得難以維持樹脂層之強度或接著力之情形,若為未達Tg之溫度,則有變得容易維持樹脂層之強度或接著力之傾向。亦即,若為未達樹脂層之Tg(玻璃轉移溫度)之溫度(例如5℃~ 215℃),則銅箔複合體變得容易滿足(f3 ×t3 )/(f2 ×t2 )≧1、及1≦24.3f1 /(F×T)。再者,即便在未達Tg之溫度,亦認為有如下傾向:溫度較高一方之樹脂層之強度或密合力變小,而變得難以滿足式1及式2(參照下述實施例19-21)。In general, the strength of the resin layer is lowered at a high temperature or the force is lowered, so that it becomes difficult to satisfy (f 3 × t 3 ) / (f 2 × t 2 ) ≧ 1, or 1 ≦ 24.3f 1 / (F × at a high temperature. T). For example, at a temperature higher than the Tg (glass transition temperature) of the resin layer, it may become difficult to maintain the strength or the adhesion force of the resin layer. If the temperature is less than Tg, it may become easy to maintain the strength of the resin layer or Then the tendency of force. That is, if the temperature of the Tg (glass transition temperature) of the resin layer is not reached (for example, 5 ° C to 215 ° C), the copper foil composite becomes easily satisfied (f 3 × t 3 ) / (f 2 × t 2 ) ≧ 1, and 1 ≦ 24.3f 1 / (F × T). In addition, even if the temperature is less than Tg, it is considered that the strength or the adhesion force of the resin layer having a higher temperature becomes smaller, and it becomes difficult to satisfy Formulas 1 and 2 (refer to Example 19 below). twenty one).

進而,明確:於滿足式1及式2之情形時,即便在未達樹脂層之Tg的相對較高之溫度(例如40℃~215℃),亦可維持銅箔複合體之延展性。若即便在未達樹脂層之Tg的相對較高之溫度(例如40℃~215℃)亦可維持銅箔複合體之延展性,則於溫壓製等方法中亦表現出優異之加工性。又,對於樹脂層而言,溫度較高者其成形性較好。又,由於為了於壓製後保持形狀(為了不因彈性變形而恢復至原狀),而進行溫壓製,故就此點而言亦較佳為,即便在未達樹脂層之Tg之相對較高之溫度(例如40℃~215℃),亦可維持銅箔複合體之延展性。Further, it is clear that when the formula 1 and the formula 2 are satisfied, the ductility of the copper foil composite can be maintained even at a relatively high temperature (for example, 40 ° C to 215 ° C) which does not reach the Tg of the resin layer. If the ductility of the copper foil composite is maintained even at a relatively high temperature (for example, 40 ° C to 215 ° C) of the Tg of the resin layer, excellent workability is exhibited in a method such as warm pressing. Further, in the case of the resin layer, the moldability is good in the case where the temperature is higher. Further, since it is subjected to warm pressing in order to maintain the shape after pressing (in order not to return to the original state due to elastic deformation), it is also preferable in this point even if the temperature of the Tg of the resin layer is not relatively high. (For example, 40 ° C ~ 215 ° C), can also maintain the ductility of the copper foil composite.

再者,於銅箔複合體含有接著劑層與樹脂層之情形時,採用Tg(玻璃轉移溫度)最低之層之Tg。Further, in the case where the copper foil composite contains the adhesive layer and the resin layer, the Tg of the layer having the lowest Tg (glass transition temperature) is used.

[實施例][Examples]

<銅箔複合體之製造><Manufacture of Copper Foil Composite>

對由精銅(tough pitch copper)所構成之鑄錠進行熱壓延,藉由表面切割而除去氧化物之後,重複冷壓延、退火與酸洗,使其變薄至表1之厚度t2 (mm),最後進行退火而確保加工性,藉由苯并三唑進行防銹處理,從而獲得銅箔。為使銅箔成為於寬度方向均勻之組織,而使冷壓延時之張力及壓延材料之寬度方向之軋縮條件均一。於後續之退火中,以於寬度方向成 為均勻之溫度分佈的方式,使用複數個加熱器進行溫度管理,測定銅之溫度並予以控制。The ingot formed of tough pitch copper is subjected to hot rolling, and after removing the oxide by surface cutting, the cold rolling, annealing and pickling are repeated to make it thin to the thickness t 2 of Table 1 ( Mm), finally annealing is performed to ensure workability, and rust-preventing treatment is performed by benzotriazole to obtain a copper foil. In order to make the copper foil a uniform structure in the width direction, the tension of the cold pressing delay and the rolling direction of the rolled material are uniform. In the subsequent annealing, a plurality of heaters are used for temperature management so that the width direction becomes a uniform temperature distribution, and the temperature of the copper is measured and controlled.

進而,對所獲得之銅箔之兩面分別進行表1所示之表面處理之後,使用表1所示之樹脂膜(樹脂層),以(樹脂層之Tg+50℃)以上之溫度藉由真空加壓(加壓壓力200N/cm2 )積層樹脂膜,從而製作表1所示之層構造之銅箔複合體。實施例5係使用接著劑而積層銅箔與樹脂膜,從而製作銅箔複合體。Further, after the surface treatment shown in Table 1 was performed on both sides of the obtained copper foil, the resin film (resin layer) shown in Table 1 was used, and the vacuum was applied at a temperature (Tg + 50 ° C or more of the resin layer). A resin film was laminated under pressure (pressure: 200 N/cm 2 ) to prepare a copper foil composite having a layer structure shown in Table 1. In Example 5, a copper foil and a resin film were laminated using an adhesive to form a copper foil composite.

再者,表1中,Cu表示銅箔,PI表示聚醯亞胺膜,PET表示聚對苯二甲酸乙二酯膜。又,PI、PET之Tg分別為220℃、70℃。Further, in Table 1, Cu represents a copper foil, PI represents a polyimide film, and PET represents a polyethylene terephthalate film. Further, the Tg of PI and PET were 220 ° C and 70 ° C, respectively.

再者,於銅箔之單面(不與樹脂層接著之面)形成表1所示之厚度的Ni(合金)層。於銅箔之相反面(與樹脂層之接著面)進行表1所示之表面處理。表面處理之條件如下所述。Further, a Ni (alloy) layer having a thickness shown in Table 1 was formed on one side of the copper foil (the surface not to be adjacent to the resin layer). The surface treatment shown in Table 1 was carried out on the opposite side of the copper foil (the same surface as the resin layer). The conditions of the surface treatment are as follows.

鉻酸鹽處理:使用鉻酸鹽浴(K2 Cr2 O7 :0.5~5g/L),以電流密度1~10A/dm2 進行電解處理。基於鉻酸鹽處理之Cr氧化物層之附著量設為35μg/dm2Chromate treatment: Electrolytic treatment was carried out using a chromate bath (K 2 Cr 2 O 7 : 0.5 to 5 g/L) at a current density of 1 to 10 A/dm 2 . The adhesion amount of the chromate-treated Cr oxide layer was set to 35 μg/dm 2 .

被覆Ni+鉻酸鹽處理:使用Ni鍍浴(Ni離子濃度:1~30g/L之瓦特浴),以鍍敷液溫度25~60℃、電流密度0.5~10A/dm2 進行鍍Ni後,與上述同樣地進行鉻酸鹽處理。被覆Ni之厚度設為0.010μm。Covered Ni+chromate treatment: Ni plating bath (Ni ion concentration: 1~30g/L watt bath), plating temperature 25~60°C, current density 0.5~10A/dm 2 after Ni plating, and The chromate treatment was carried out in the same manner as above. The thickness of the coated Ni was set to 0.010 μm.

粗化處理:使用處理液(Cu:10~25g/L;H2 SO4 :20~100g/L),以溫度20~40℃、電流密度30~70A/dm2 、電解時間1~5秒進行電解處理。其後,使用Ni-Co鍍敷液(Co離子濃度:5~20g/L;Ni離子濃度:5~20g/L;pH:1.0~4.0),以溫度25~60℃、電流密度:0.5~10A/dm2 進行鍍Ni-Co。Roughening treatment: use treatment liquid (Cu: 10~25g/L; H 2 SO 4 : 20~100g/L), temperature 20~40°C, current density 30~70A/dm 2 , electrolysis time 1~5 seconds Perform electrolytic treatment. Thereafter, a Ni-Co plating solution (Co ion concentration: 5 to 20 g/L; Ni ion concentration: 5 to 20 g/L; pH: 1.0 to 4.0) was used, and the temperature was 25 to 60 ° C, and the current density was 0.5 to 0.5. 10A/dm 2 was plated with Ni-Co.

再者,於銅箔之非接著面之Ni(合金)層的形成,係分別以與上述被覆Ni相同的條件來進行。Further, the formation of the Ni (alloy) layer on the non-adhesion surface of the copper foil was carried out under the same conditions as those of the above-mentioned coated Ni.

又,於實施例24之情形時,於銅箔之非接著面形成厚2.5μm之Ni-Zn層。另一方面,於銅箔之接著面亦形成Ni-Zn層後,進行與上述相同的鉻酸鹽處理。Ni-Zn層係藉由使用Ni-Zn鍍敷浴(Ni離子濃度:15~20g/L;Zn離子濃度:10~20g/L)、鍍敷液溫度50℃、電流密度4.0A/dm2 進行鍍敷而形成。分析了Ni-Zn層,其結果,合金組成為Ni:Zn=75:25(wt%)。Further, in the case of Example 24, a Ni-Zn layer having a thickness of 2.5 μm was formed on the non-bonding surface of the copper foil. On the other hand, after the Ni-Zn layer was formed on the succeeding surface of the copper foil, the same chromate treatment as described above was carried out. The Ni-Zn layer is made by using a Ni-Zn plating bath (Ni ion concentration: 15-20 g/L; Zn ion concentration: 10-20 g/L), plating bath temperature 50 ° C, current density 4.0 A/dm 2 It is formed by plating. The Ni-Zn layer was analyzed, and as a result, the alloy composition was Ni:Zn = 75:25 (wt%).

於實施例25之情形時,於銅箔之非接著面形成厚2.5μm之Ni-P層。另一方面,於銅箔之接著面亦形成Ni-P層後,進行與上述相同的鉻酸鹽處理。Ni-P層係藉由使用Ni-P鍍敷浴(Ni離子濃度:15~20g/L;P濃度:5g/L)、鍍敷液溫度50~60℃、電流密度4A/dm2 進行鍍敷而形成。分析了Ni-P層,其結果,合金組成為Ni:P=95:5(wt%)。In the case of Example 25, a Ni-P layer having a thickness of 2.5 μm was formed on the non-adjacent surface of the copper foil. On the other hand, after the Ni-P layer was formed on the succeeding surface of the copper foil, the same chromate treatment as described above was carried out. The Ni-P layer is plated by using a Ni-P plating bath (Ni ion concentration: 15-20 g/L; P concentration: 5 g/L), a plating solution temperature of 50 to 60 ° C, and a current density of 4 A/dm 2 . Formed by the application. The Ni-P layer was analyzed, and as a result, the alloy composition was Ni:P = 95:5 (wt%).

於實施例26之情形時,於銅箔之非接著面形成厚2.5μm之Ni-Sn層。另一方面,於銅箔之接著面亦形成Ni-Sn層後,進行與上述相同的鉻酸鹽處理。Ni-Sn層係藉由使用Ni-Sn鍍敷浴(Ni離子濃度:15~20g/L;Sn離子濃度:10~15g/L)、鍍敷液溫度45℃、電流密度4.0A/dm2 進行鍍敷而形成。分析了Ni-Sn層,其結果,合金組成為Ni:Sn=80:20(wt%)。In the case of Example 26, a Ni-Sn layer having a thickness of 2.5 μm was formed on the non-bonding surface of the copper foil. On the other hand, after the Ni-Sn layer was formed on the succeeding surface of the copper foil, the same chromate treatment as described above was carried out. The Ni-Sn layer is made by using a Ni-Sn plating bath (Ni ion concentration: 15-20 g/L; Sn ion concentration: 10-15 g/L), plating bath temperature 45 ° C, current density 4.0 A/dm 2 It is formed by plating. The Ni-Sn layer was analyzed, and as a result, the alloy composition was Ni:Sn=80:20 (wt%).

於實施例27之情形時,除了將銅箔之非接著面之Ni-Sn層的厚度變更為0.3μm以外,以與實施例26相同的方式形成各層。分析了Ni-Sn層,其結果,合金組成為Ni:Sn=80:20(wt%)。In the case of Example 27, each layer was formed in the same manner as in Example 26 except that the thickness of the Ni-Sn layer of the non-adhesive surface of the copper foil was changed to 0.3 μm. The Ni-Sn layer was analyzed, and as a result, the alloy composition was Ni:Sn=80:20 (wt%).

於實施例28之情形時,於銅箔之非接著面以Ni層、Sn層之順序形成Ni層、Sn層後,於氮環境中施加180℃、7小時之熱處理。另一方面,於銅箔之接著面形成Ni層後,進行與上述相同的鉻酸鹽處理。Ni層係藉由使用硫酸Ni浴(Ni離子濃度:25g/L)、鍍敷液溫度45℃、電流密度4A/dm2 而形成。Sn層係藉由使用苯酚磺酸浴(Sn離子濃度:30g/L)、鍍敷液溫度45℃、電流密度8A/dm2 而形成。以SEM觀察銅箔之非接著面側之鍍敷剖面的2次電子影像,其結果為形成有2層,分析最表層側之層,其結果為Ni:Sn=30:70(wt%),根據其結果,判斷為Ni-Sn層。分析基材側之層,其結果為Sn為5wt%以下,剩餘部分為Ni,根據其結果,判斷為Ni層。各層之厚度分別為0.1μm(合計厚度為0.2μm)。In the case of Example 28, a Ni layer and a Sn layer were formed in the order of the Ni layer and the Sn layer on the non-bonding surface of the copper foil, and then heat treatment was applied at 180 ° C for 7 hours in a nitrogen atmosphere. On the other hand, after the Ni layer was formed on the succeeding surface of the copper foil, the same chromate treatment as described above was carried out. The Ni layer was formed by using a Ni bath of sulfuric acid (Ni ion concentration: 25 g/L), a plating solution temperature of 45 ° C, and a current density of 4 A/dm 2 . The Sn layer was formed by using a phenolsulfonic acid bath (Sn ion concentration: 30 g/L), a plating solution temperature of 45 ° C, and a current density of 8 A/dm 2 . The secondary electron image of the plated cross section on the non-adjacent surface side of the copper foil was observed by SEM. As a result, two layers were formed, and the layer on the outermost layer side was analyzed. As a result, Ni:Sn=30:70 (wt%), Based on the result, it was judged to be a Ni-Sn layer. The layer on the side of the substrate was analyzed, and as a result, Sn was 5 wt% or less, and the remainder was Ni, and based on the result, it was judged to be a Ni layer. The thickness of each layer was 0.1 μm (total thickness 0.2 μm).

Cr氧化物層之附著量、Ni層及Ni合金層之厚度係將形成有該等層之100mm×100mm之銅箔於混合有HNO3 (2重量%)及HCl(5重量%)之溶液中溶解,並藉由ICP發光分光分析裝置(SII NanoTechnology Inc.製造,型號SFC-3100)來定量該溶液中之各金屬濃度,從而算出。對各試樣進行5次測定,將其平均值設為附著量(厚度)。The adhesion amount of the Cr oxide layer, the thickness of the Ni layer and the Ni alloy layer are 100 mm × 100 mm copper foil in which the layers are formed in a solution in which HNO 3 (2% by weight) and HCl (5% by weight) are mixed. The solution was dissolved and quantified by ICP emission spectroscopic analyzer (manufactured by SII NanoTechnology Inc., model SFC-3100) to quantify the concentration of each metal in the solution. Each sample was measured five times, and the average value thereof was defined as the adhesion amount (thickness).

再者,Ni層及Ni合金層之厚度係根據藉由上述方法定量而得之各金屬的質量,使用公知之比重進行換算而得。Further, the thickness of the Ni layer and the Ni alloy layer is obtained by converting the mass of each metal obtained by the above method and using a known specific gravity.

<拉伸試驗><Tensile test>

由銅箔複合體製作複數個寬度12.7mm之短條狀之拉伸試驗片。關於銅箔、及樹脂膜之拉伸試驗,將積層前之銅箔單體及樹脂膜單體製成12.7mm之短條狀。A plurality of short tensile test pieces having a width of 12.7 mm were prepared from the copper foil composite. In the tensile test of the copper foil and the resin film, the copper foil monomer and the resin film monomer before lamination were formed into a short strip shape of 12.7 mm.

繼而,藉由拉伸試驗機,依據JIS-Z2241,於與銅箔之壓延方向平行之方向進行拉伸試驗。將拉伸試驗時之試驗溫度示於表1。Then, a tensile test was performed in a direction parallel to the rolling direction of the copper foil by a tensile tester in accordance with JIS-Z2241. The test temperatures at the time of the tensile test are shown in Table 1.

<180°剝離試驗><180° peel test>

進行180°剝離試驗,測定180°剝離接著強度f1 。首先,由銅箔複合體製作複數個寬度12.7mm之短條狀之剝離試驗片。將試驗片之銅箔面固定於SUS(不鏽鋼)板,沿180°方向剝除樹脂層。關於銅箔存在於樹脂層之兩面 之實施例,於去除單面之銅箔後,將相反面之銅箔側固定於SUS板,沿180°方向剝除離樹脂層。其他條件係依據JIS-C5016。A 180° peel test was performed, and 180° peeling followed by strength f 1 was measured. First, a plurality of strip-shaped peeling test pieces each having a width of 12.7 mm were produced from a copper foil composite. The copper foil surface of the test piece was fixed to a SUS (stainless steel) plate, and the resin layer was peeled off in the 180° direction. In the embodiment in which the copper foil was present on both surfaces of the resin layer, after the copper foil of one side was removed, the copper foil side of the opposite surface was fixed to the SUS plate, and the resin layer was peeled off in the 180° direction. Other conditions are based on JIS-C5016.

再者,於JIS之標準中係剝除銅箔層,於實施例中剝除樹脂層係為了減小由銅箔之厚度、剛性造成之影響。Further, in the JIS standard, the copper foil layer is peeled off, and in the embodiment, the resin layer is peeled off in order to reduce the influence of the thickness and rigidity of the copper foil.

<加工性之評價><Evaluation of processability>

使用圖2所示之杯突試驗裝置10進行加工性之評價。杯突試驗裝置10具備基座4及打孔機2,基座4具有圓錐台狀之斜面,圓錐台自上向下地使前端變細,圓錐台之斜面之角度自水平面成60°。又,於圓錐台之下側,連通有直徑15mm且深度7mm之圓孔。另一方面,打孔機2形成前端為直徑14mm之半球狀圓柱,可向圓錐台之圓孔插入打孔機2前端之半球部。The evaluation of the workability was carried out using the cupping test apparatus 10 shown in Fig. 2 . The cupping test apparatus 10 includes a susceptor 4 and a puncher 2, and the pedestal 4 has a truncated cone-shaped inclined surface. The truncated cone has a tapered front end from the top to the bottom, and the angle of the inclined surface of the truncated cone is 60° from the horizontal plane. Further, a circular hole having a diameter of 15 mm and a depth of 7 mm was connected to the lower side of the truncated cone. On the other hand, the punching machine 2 is formed into a hemispherical cylinder having a diameter of 14 mm at the front end, and can be inserted into the hemispherical portion of the front end of the punching machine 2 into the circular hole of the truncated cone.

再者,圓錐台之前端變細的前端與圓錐台之下側之圓孔的連接部分附有半徑(r)=3mm之圓角。Further, the connecting portion of the tapered front end of the truncated cone and the circular hole at the lower side of the truncated cone is rounded with a radius (r) = 3 mm.

繼而,將銅箔複合體衝壓成直徑30mm之圓板狀試驗片20,且將銅箔複合體載置於基座4之圓錐台的斜面,將打孔機2自試驗片20上方下壓並朝基座4之圓孔插入。藉此,試驗片20成形為錐形杯狀。Then, the copper foil composite was punched into a disk-shaped test piece 20 having a diameter of 30 mm, and the copper foil composite was placed on the inclined surface of the truncated cone of the susceptor 4, and the punch 2 was pressed down from the test piece 20 and Insert into the round hole of the base 4. Thereby, the test piece 20 is formed into a conical cup shape.

再者,在僅於銅箔複合體之單面存在樹脂層之情形時,使樹脂層朝上載置於基座4。又,於在銅箔複合體之兩面存在樹脂層之情形時,使與M面接著之樹脂層朝上而載置於基座4。於銅箔複合體之兩面為Cu之情形時,無論哪一面朝上均可。Further, in the case where the resin layer is present only on one side of the copper foil composite, the resin layer is placed on the susceptor 4 toward the top. Further, when a resin layer is present on both surfaces of the copper foil composite, the resin layer next to the M surface is placed upward and placed on the susceptor 4. In the case where both sides of the copper foil composite are Cu, either side may face upward.

藉由目測來判斷成形後之試驗片20內之銅箔有無破裂,且基於以下之基準進行加工性之評價。The presence or absence of cracking of the copper foil in the test piece 20 after the molding was judged by visual inspection, and the workability was evaluated based on the following criteria.

◎:銅箔未破裂,於銅箔亦無褶皺◎: The copper foil is not broken, and there is no wrinkle in the copper foil.

○:銅箔未破裂,但於銅箔有少許褶皺○: The copper foil is not broken, but there is a slight wrinkle in the copper foil.

×:銅箔破裂×: Copper foil is broken

<耐蝕性之評價><Evaluation of Corrosion Resistance>

於壓力98±10KPa下,對銅箔積層體中之未積層有樹脂層之面,將調整為氯化鈉濃度5±1wt%、pH=6.5~7.2之溫度為35±2℃的鹽水進行460小時噴霧之後,目測觀察外觀。又,藉由XPS對該表面分析銅箔成分之有無。Under the pressure of 98±10 KPa, the surface of the copper foil laminate which is not laminated with the resin layer is adjusted to a brine having a sodium chloride concentration of 5±1 wt% and a pH of 6.5 to 7.2 at a temperature of 35±2° C. After an hour of spraying, the appearance was visually observed. Further, the surface was analyzed for the presence or absence of the copper foil component by XPS.

◎:未確認有變色,銅箔未露出(未自表面檢測出銅箔成分)◎: No discoloration was confirmed, and the copper foil was not exposed (the copper foil component was not detected from the surface)

○:確認有如白色模糊之變色,銅箔未露出(未自表面檢測出銅箔成分)○: It was confirmed that there was a white-colored discoloration, and the copper foil was not exposed (the copper foil component was not detected from the surface)

×:確認有因銅箔之氧化而引起之黑色的變色、或因生鏽而引起之綠色的變色,銅箔露出(自表面檢測出銅箔成分)×: It was confirmed that black discoloration due to oxidation of copper foil or discoloration due to rust caused by green, and copper foil was exposed (copper foil component was detected from the surface)

<電接點性能之穩定性之評價><Evaluation of the stability of electrical contact performance>

以180℃將各試驗片大氣加熱1000小時之後,對未積層有樹脂層之銅箔面測定接觸電阻。使用山崎精機公司製造之電接點模擬器CRS-1,藉由四端子法進行測定。探針:金探針、接觸負載:40g、滑動速度:1mm/min、滑動距離:1mm。After each test piece was heated at 180 ° C for 1,000 hours in the atmosphere, the contact resistance was measured on the surface of the copper foil on which the resin layer was not laminated. The electric contact simulator CRS-1 manufactured by Yamazaki Seiki Co., Ltd. was used for measurement by a four-terminal method. Probe: Gold probe, contact load: 40 g, sliding speed: 1 mm/min, sliding distance: 1 mm.

○:接觸電阻未達10mΩ○: Contact resistance is less than 10mΩ

×:接觸電阻為10mΩ以上×: The contact resistance is 10 mΩ or more.

將所獲得之結果示於表1、表2。再者,表1之試驗溫度表示進行F、f1 、f2 、f3 、及加工性之評價的溫度。The results obtained are shown in Tables 1 and 2. Further, the test temperature shown in Table 1 for F, f 1, f 2, temperature f 3, and the evaluation of workability.

如由表1、表2所明確般,於各實施例之情形時,同時滿足(f3 ×t3 )/(f2 ×t2 )≧1、及1≦24.3f1 /(F×T),從而成為加工性優異者。又,於各實施例之情形時,電接點性能及耐蝕性亦優異。As is clear from Tables 1 and 2, in the case of each embodiment, (f 3 × t 3 ) / (f 2 × t 2 ) ≧ 1, and 1 ≦ 24.3f 1 / (F × T) are simultaneously satisfied. ), and thus become excellent in workability. Moreover, in the case of each of the examples, electrical contact performance and corrosion resistance were also excellent.

再者,若將使用有相同構成之銅箔積層體之實施例15與實施例19進行比較,則可知相較於實施例19,以室溫(約25℃)進行拉伸試驗而測定 了F等之實施例15者其(f3 ×t3 )/(f2 ×t2 )之值較大,於實施例19中由於試驗溫度上升而使樹脂層變脆弱(f3 減小)。Further, when Example 15 using the copper foil laminate having the same structure was compared with Example 19, it was found that the tensile test was carried out at room temperature (about 25 ° C) in comparison with Example 19. In Example 15, the value of (f 3 × t 3 ) / (f 2 × t 2 ) was large, and in Example 19, the resin layer became weak due to an increase in the test temperature (f 3 was decreased).

另一方面,於不對銅箔進行表面處理而積層樹脂膜之比較例1之情形時,接著強度降低,24.3f1 /(F×T)之值未達1,加工性劣化。On the other hand, in the case of Comparative Example 1 in which the resin film was laminated without subjecting the copper foil to surface treatment, the strength was lowered, and the value of 24.3f 1 /(F × T) was less than 1, and the workability was deteriorated.

亦於將積層時之加壓壓力減小至100N/cm2 之比較例2、4之情形時,接著強度降低,24.3f1 /(F×T)之值未達1,加工性劣化。In the case of Comparative Examples 2 and 4 in which the pressure at the time of lamination was reduced to 100 N/cm 2 , the strength was lowered, and the value of 24.3 f 1 /(F × T) was less than 1, and the workability was deteriorated.

於減薄樹脂膜之厚度的比較例3之情形時,樹脂膜之強度與銅箔相比變弱,(f3 ×t3 )/(f2 ×t2 )之值未達1,加工性劣化。In the case of Comparative Example 3 in which the thickness of the resin film was reduced, the strength of the resin film was weaker than that of the copper foil, and the value of (f 3 × t 3 ) / (f 2 × t 2 ) was less than 1, and workability was obtained. Deterioration.

在不與樹脂層接著之面的鍍Ni之厚度未達0.001μm之比較例5之情形時,電接點性能及耐蝕性劣化。In the case of Comparative Example 5 in which the thickness of Ni plating not on the surface of the resin layer was less than 0.001 μm, electrical contact performance and corrosion resistance were deteriorated.

f1 ‧‧‧銅箔與樹脂層之180°剝離接著強度f 1 ‧‧‧180° peeling strength of copper foil and resin layer

F‧‧‧銅箔複合體之拉伸應變30%時之強度F‧‧‧Strength of tensile strain at 30% of copper foil composite

T‧‧‧銅箔複合體之厚度Thickness of T‧‧‧ copper foil composite

Claims (7)

一種銅箔複合體,積層有銅箔與樹脂層,其特徵在於:於將該銅箔之厚度設為t2 (mm),將拉伸應變4%時之該銅箔的應力設為f2 (MPa),將該樹脂層之厚度設為t3 (mm),將拉伸應變4%時之該樹脂層的應力設為f3 (MPa)時,滿足式1:(f3 ×t3 )/(f2 ×t2 )≧1;並且於將該銅箔與該樹脂層之180°剝離接著強度設為f1 (N/mm),將該銅箔複合體之拉伸應變30%時的強度設為F(MPa),將該銅箔複合體之厚度設為T(mm)時,滿足式2:1≦24.3f1 /(F×T);於該銅箔中之未積層有樹脂層之面,形成有合計厚度0.001~5.0μm之Ni層及/或Ni合金層。A copper foil composite having a copper foil and a resin layer laminated thereon, wherein the thickness of the copper foil is t 2 (mm), and the stress of the copper foil when the tensile strain is 4% is f 2 (MPa), the thickness of the resin layer is t 3 (mm), and when the stress of the resin layer at a tensile strain of 4% is f 3 (MPa), the formula 1: (f 3 × t 3 ) is satisfied. / (f 2 × t 2 ) ≧ 1; and the copper foil is peeled off from the resin layer by 180° and the strength is set to f 1 (N/mm), and the tensile strain of the copper foil composite is 30%. When the thickness of the copper foil composite is T (mm), the formula 2:1≦24.3f 1 /(F×T) is satisfied; the layer is not laminated in the copper foil. On the surface of the resin layer, a Ni layer and/or a Ni alloy layer having a total thickness of 0.001 to 5.0 μm are formed. 如申請專利範圍第1項之銅箔複合體,其中,該Ni層及/或Ni合金層之合計厚度為0.001~0.50μm。 The copper foil composite according to claim 1, wherein the Ni layer and/or the Ni alloy layer have a total thickness of 0.001 to 0.50 μm. 如申請專利範圍第1項之銅箔複合體,其中,在未達該樹脂層之玻璃轉移溫度的溫度下,該式1及式2成立。 The copper foil composite according to claim 1, wherein the formulas 1 and 2 are established at a temperature that does not reach the glass transition temperature of the resin layer. 如申請專利範圍第2項之銅箔複合體,其中,在未達該樹脂層之玻璃轉移溫度的溫度下,該式1及式2成立。 The copper foil composite according to claim 2, wherein the formulas 1 and 2 are established at a temperature that does not reach the glass transition temperature of the resin layer. 如申請專利範圍第1至4項中任一項之銅箔複合體,其中,該銅箔複合體之拉伸斷裂應變l與該樹脂層單體之拉伸斷裂應變L之比l/L為0.7~1。 The copper foil composite according to any one of claims 1 to 4, wherein a ratio l/L of the tensile strain at break l of the copper foil composite to the tensile strain at break L of the resin layer is 0.7~1. 一種成形體,其係對申請專利範圍第1至5項中任一項之銅箔複合體進行加工而成。 A molded body obtained by processing a copper foil composite according to any one of claims 1 to 5. 一種成形體之製造方法,其係對申請專利範圍第1至5項中任一項之 銅箔複合體進行加工。 A method of manufacturing a shaped body, which is in any one of claims 1 to 5 The copper foil composite is processed.
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