TWI468256B - - Google Patents

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Publication number
TWI468256B
TWI468256B TW101108642A TW101108642A TWI468256B TW I468256 B TWI468256 B TW I468256B TW 101108642 A TW101108642 A TW 101108642A TW 101108642 A TW101108642 A TW 101108642A TW I468256 B TWI468256 B TW I468256B
Authority
TW
Taiwan
Application number
TW101108642A
Other languages
Chinese (zh)
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TW201336622A (zh
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Filing date
Publication date
Application filed filed Critical
Priority to TW101108642A priority Critical patent/TW201336622A/zh
Publication of TW201336622A publication Critical patent/TW201336622A/zh
Application granted granted Critical
Publication of TWI468256B publication Critical patent/TWI468256B/zh

Links

TW101108642A 2012-03-14 2012-03-14 彈性拋光載具及應用其的拋光裝置及拋光方法 TW201336622A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW101108642A TW201336622A (zh) 2012-03-14 2012-03-14 彈性拋光載具及應用其的拋光裝置及拋光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW101108642A TW201336622A (zh) 2012-03-14 2012-03-14 彈性拋光載具及應用其的拋光裝置及拋光方法

Publications (2)

Publication Number Publication Date
TW201336622A TW201336622A (zh) 2013-09-16
TWI468256B true TWI468256B (enrdf_load_stackoverflow) 2015-01-11

Family

ID=49627640

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101108642A TW201336622A (zh) 2012-03-14 2012-03-14 彈性拋光載具及應用其的拋光裝置及拋光方法

Country Status (1)

Country Link
TW (1) TW201336622A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115302382A (zh) * 2022-07-26 2022-11-08 常熟市佳德汽车零部件有限公司 一种摩托车发动机护盖加工用的表面自动抛光装置
CN115351661B (zh) * 2022-09-30 2023-01-13 武汉乾希科技有限公司 用于光通信器件的盒式管壳的开盖设备和开盖方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6183354B1 (en) * 1996-11-08 2001-02-06 Applied Materials, Inc. Carrier head with a flexible membrane for a chemical mechanical polishing system
US6277009B1 (en) * 1997-12-31 2001-08-21 Applied Materials, Inc. Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus
JP2002283231A (ja) * 2001-03-27 2002-10-03 Nisshin Steel Co Ltd 研磨装置における自動研磨圧力制御方法
TWI230108B (en) * 2004-01-02 2005-04-01 Gau Woei Super Hard Tool Co Lt Automatic tool feeding device for a grinder
TWI289493B (en) * 2004-03-30 2007-11-11 Hon Hai Prec Ind Co Ltd Polish device and polish method
TWI325602B (en) * 2007-02-15 2010-06-01 Au Optronics Corp Polishing device and automatic polishing method thereof
TWI336279B (en) * 2002-10-17 2011-01-21 Ebara Corp Polishing state monitoring apparatus and polishing apparatus and method
TWM409129U (en) * 2011-01-17 2011-08-11 Tian-Ran Wen polishing apparatus

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6183354B1 (en) * 1996-11-08 2001-02-06 Applied Materials, Inc. Carrier head with a flexible membrane for a chemical mechanical polishing system
US6277009B1 (en) * 1997-12-31 2001-08-21 Applied Materials, Inc. Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus
JP2002283231A (ja) * 2001-03-27 2002-10-03 Nisshin Steel Co Ltd 研磨装置における自動研磨圧力制御方法
TWI336279B (en) * 2002-10-17 2011-01-21 Ebara Corp Polishing state monitoring apparatus and polishing apparatus and method
TWI230108B (en) * 2004-01-02 2005-04-01 Gau Woei Super Hard Tool Co Lt Automatic tool feeding device for a grinder
TWI289493B (en) * 2004-03-30 2007-11-11 Hon Hai Prec Ind Co Ltd Polish device and polish method
TWI325602B (en) * 2007-02-15 2010-06-01 Au Optronics Corp Polishing device and automatic polishing method thereof
TWM409129U (en) * 2011-01-17 2011-08-11 Tian-Ran Wen polishing apparatus

Also Published As

Publication number Publication date
TW201336622A (zh) 2013-09-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees