TWI464753B - Method for forming conductive film at room temperature - Google Patents

Method for forming conductive film at room temperature Download PDF

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TWI464753B
TWI464753B TW100126414A TW100126414A TWI464753B TW I464753 B TWI464753 B TW I464753B TW 100126414 A TW100126414 A TW 100126414A TW 100126414 A TW100126414 A TW 100126414A TW I464753 B TWI464753 B TW I464753B
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silver
room temperature
lauric acid
conductive film
substrate
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TW201306056A (en
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Teng Yuan Dong
Chen Ni Chen
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Univ Nat Sun Yat Sen
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Description

在室溫下形成導電薄膜之方法Method of forming a conductive film at room temperature

本發明係關於一種在室溫下形成導電薄膜之方法,特別是關於一種在室溫下以聯胺做為還原劑將預塗在可撓式基板上並以月桂酸根為保護基的銀奈米粒子膜化學還原成導電銀薄膜之方法。BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a method for forming a conductive film at room temperature, and more particularly to a silver nanoparticle precoated on a flexible substrate and having lauric acid as a protective group at room temperature using hydrazine as a reducing agent. A method of chemically reducing a particle film into a conductive silver film.

低成本之液態直接印刷技術可應用於各種圖案化及沈積製程中,例如可應用於製做積體電路(IC)、大尺寸液晶顯示器(LCD)之玻璃基板電路或發光二極體晶圓之表面電路,或者應用於修復IC斷路、做為電子標籤或無線射頻識別(RFID)標籤等。傳統上,通常是藉由微影(lithography)製程進行電鍍及蝕刻來形成導電圖案線路,但由於其建構一層電路所需的步驟極為繁多複雜,故相對較為費時,且加工成本亦較高昂。因此,對相關產業來說,確實需要能簡化製程及降低製造成本的直接印刷技術,其中此技術係將金屬奈米粒子(nanoparticles)經去除溶劑及熱處理後快速的轉換成為低阻值金屬導體,以製做導電線路。Low-cost liquid direct printing technology can be applied to various patterning and deposition processes, such as glass substrate circuits or light-emitting diode wafers for integrated circuit (IC), large-size liquid crystal display (LCD). Surface circuits, either used to repair IC breaks, as electronic tags or radio frequency identification (RFID) tags. Conventionally, conductive pattern lines are usually formed by electroplating and etching by a lithography process. However, since the steps required to construct a layer of circuits are extremely complicated, it is relatively time consuming and expensive to process. Therefore, for related industries, there is a need for direct printing technology that simplifies the process and reduces manufacturing costs. This technology rapidly converts nanoparticles into low-resistance metal conductors after solvent removal and heat treatment. To make conductive lines.

現今,其中一種直接印刷技術是先以金屬奈米粒子混合溶劑後做為印刷油墨,接著再藉由噴墨方式來將印刷油墨噴印在基板上形成導電線路,其中金屬奈米粒子較佳取材自銀,銀比金更適合應用於此技術領域,其原因在於:銀在所有金屬中具有最高的導電性,而金過高的材料成本則影響其在電子領域的可應用性。Nowadays, one of the direct printing technologies is to use a metal nanoparticle mixed solvent as a printing ink, and then to print a printing ink on a substrate by an inkjet method to form a conductive line, wherein the metal nanoparticle is preferably obtained. Silver, silver is more suitable for this technology than silver, because silver has the highest conductivity among all metals, and the high material cost of gold affects its applicability in the electronics field.

舉例來說,本案發明人先前在2009年05月27日於Physical Chemistry Chemical Physics(2009,vol. 11,p. 6269-6275)期刊發表之「以飽和正癸酸根為保護基之均勻銀奈米粒子的單一步驟合成法:直接噴印油墨形成金屬銀薄膜(One-step synthesis of uniform silver nanoparticles capped by saturated decanoate: direct spray printing ink to form metallic silver films)」揭示了使用以正癸酸根保護之銀奈米粒子(C9 H19 COO2 -Ag)做為印刷油墨。然而,以正癸酸根保護之銀奈米粒子的操作穩定性在室溫下僅維持了一天,其原因在於受到二氧化碳的脫附(desorption)及其他分解片段影響所致。因此,需要改用其他的保護劑來穩定已生產出來之銀奈米粒子,否則將大幅影響銀奈米粒子在直接印刷技術上之可應用性。再者,上述以正癸酸根為保護基的銀奈米粒子係塗佈在硬式矽基板上,並以大於150℃以上之高溫鍛燒的方式來將銀奈米粒子之鍍膜還原成為高導電性銀薄膜。惟,上述高溫鍛燒的處理方式也使得此製程無法應用於不耐熱的可撓式塑膠基板上,並且製程耗費的時間較長,及高溫通入氫氣進行還原反應的危險性較高。For example, the inventor of the present invention previously published in the Journal of Physical Chemistry Chemical Physics (2009, vol. 11, p. 6269-6275) on May 27, 2009, "Saturated Silver Nanoparticles Protected by Saturated Nitrate" One-step synthesis of uniform silver nanoparticles capped by saturated decanoate: direct spray printing ink to form metallic silver films" reveals the use of silver protected with ortho-rutate Nanoparticles (C 9 H 19 COO 2 -Ag) are used as printing inks. However, the operational stability of the silver nanoparticles protected with n-decanoate was only maintained for one day at room temperature due to the desorption of carbon dioxide and other decomposition fragments. Therefore, it is necessary to use other protective agents to stabilize the silver nanoparticles that have been produced, otherwise it will greatly affect the applicability of silver nanoparticles in direct printing technology. Further, the silver nanoparticles coated with the ruthenate as a protective group are coated on a hard ruthenium substrate, and the silver nanoparticle is reduced to a high conductivity by calcination at a temperature higher than 150 ° C. Silver film. However, the above-mentioned high-temperature calcination treatment method also makes the process unsuitable for use on a heat-resistant flexible plastic substrate, and the process takes a long time, and the risk of a hydrogenation reaction at a high temperature is high.

故,有必要提供一種在室溫下形成導電薄膜之方法,以解決習用技術所存在的問題。Therefore, it is necessary to provide a method of forming a conductive film at room temperature to solve the problems of the conventional technology.

本發明之主要目的在於提供一種在室溫下形成導電薄膜之方法,其係先將硝酸銀加入含有月桂酸之溶液中,再依序滴入正丁基胺作為銀離子配位基以及滴入聯胺稀釋水溶液將銀離子還原為銀奈米粒子,以初步得到以飽和月桂酸根做為穩定保護基之銀奈米粒子,接著再以環已烷做為長效溶劑來將上述以月桂酸根做為保護基之銀奈米粒子旋塗或噴印於基板表面上,以形成圖案化之銀奈米粒子膜,最後再將基板浸入高濃度聯胺水溶液中,以將銀奈米粒子膜化學還原成導電銀薄膜,此方法不但可以簡便及快速的在基板上印刷形成圖案化薄膜或線路,而且製程也可以全程可在室溫下進行,因此可以大幅增加銀奈米粒子在不耐高溫之低成本可撓式基板(如PET基板)上的應用潛力。The main object of the present invention is to provide a method for forming a conductive film at room temperature by first adding silver nitrate to a solution containing lauric acid, and then sequentially dropping n-butylamine as a silver ion ligand and dropping into the joint. Amine diluted aqueous solution reduces silver ions to silver nanoparticles to initially obtain silver nanoparticles with saturated lauric acid as a stable protecting group, and then using cyclohexane as a long-acting solvent to treat the above lauric acid as The silver nanoparticles of the protecting group are spin-coated or sprayed on the surface of the substrate to form a patterned silver nanoparticle film, and finally the substrate is immersed in a high concentration aqueous solution of hydrazine to chemically reduce the silver nanoparticle film into Conductive silver film, this method can not only easily and quickly print on the substrate to form patterned film or circuit, but also the process can be carried out at room temperature, so it can greatly increase the low cost of silver nanoparticles. Application potential on flexible substrates such as PET substrates.

本發明之次要目的在於提供一種在室溫下形成導電薄膜之方法,其係預先以含0.5 wt%月桂酸之環己烷做為溶劑來將以月桂酸根做為保護基之銀奈米粒子配製成5.0至15.0 wt%之30天期長效保存溶液,使銀奈米粒子在含月桂酸之環己烷溶液中不易相互聚集凝結,並保持奈米顆粒之尺寸均勻性,因此可提高銀奈米粒子應用在噴印製程時之印刷品質。A secondary object of the present invention is to provide a method for forming a conductive film at room temperature by previously using a cyclohexane containing 0.5 wt% of lauric acid as a solvent to treat silver nanoparticles having lauric acid as a protective group. Formulated as a 30-day long-acting preservation solution of 5.0 to 15.0 wt%, so that the silver nanoparticles are less likely to aggregate and coagulate in the cyclohexane solution containing lauric acid, and maintain the uniformity of the size of the nanoparticles, thereby improving The printing quality of silver nanoparticles used in the printing process.

為達上述之目的,本發明提供一種在室溫下形成導電薄膜之方法,其包含下列步驟:To achieve the above object, the present invention provides a method of forming a conductive film at room temperature, which comprises the following steps:

(a)、將硝酸銀加入含有月桂酸之非極性溶劑中,成為一第一混合液;(b)、將正丁基胺滴入該第一混合液中作為硝酸銀之銀離子配位基,成為一第二混合液;(c)、將聯胺稀釋水溶液滴入該第二混合液中,成為一第三混合液,其中聯胺將銀離子還原為銀奈米粒子,同時以月桂酸之月桂酸根做為保護基圍繞在該銀奈米粒子周圍;(d)、由該第三混合液中分離出以月桂酸根做為保護基之銀奈米粒子;(e)、以環已烷做為溶劑來將上述以月桂酸根做為保護基之銀奈米粒子調配成為一第四混合液;(f)、將該第四混合液施加於一基板之一表面上,以形成一以月桂酸根做為保護基之銀奈米粒子膜;以及(g)、將該基板浸入聯胺水溶液中,以將該銀奈米粒子膜化學還原成一導電銀薄膜;其中上述步驟(a)至(g)皆在室溫下進行。(a) adding silver nitrate to a non-polar solvent containing lauric acid to form a first mixed liquid; (b) dropping n-butylamine into the first mixed liquid as a silver ion ligand of silver nitrate, a second mixed liquid; (c), a dilute aqueous solution of hydrazine is dropped into the second mixed liquid to form a third mixed liquid, wherein the hydrazine reduces the silver ions to silver nanoparticles, and at the same time, the lauric acid The acid radical surrounds the silver nanoparticle as a protective group; (d) the silver nanoparticle with lauric acid as a protective group is separated from the third mixed liquid; (e), using cyclohexane as Solvent to prepare the above silver nanoparticle with lauric acid as a protective group as a fourth mixed liquid; (f) applying the fourth mixed liquid to one surface of a substrate to form a lauric acid Protecting the base silver nanoparticle film; and (g) immersing the substrate in an aqueous hydrazine solution to chemically reduce the silver nanoparticle film into a conductive silver film; wherein the steps (a) to (g) are It is carried out at room temperature.

在本發明之一實施例中,在步驟(a)中,硝酸銀之銀離子與月桂酸之月桂酸根的莫耳數比為1:2。In one embodiment of the invention, in step (a), the molar ratio of silver nitrate silver ions to lauric acid laurate is 1:2.

在本發明之一實施例中,在步驟(a)中,該非極性溶劑為甲苯。In an embodiment of the invention, in step (a), the non-polar solvent is toluene.

在本發明之一實施例中,在步驟(b)中,硝酸銀之銀離子與正丁基胺的莫耳數比為1:2。In one embodiment of the invention, in step (b), the molar ratio of silver ion silver nitrate to n-butylamine is 1:2.

在本發明之一實施例中,在步驟(c)中,硝酸銀之銀離子與聯胺稀釋水溶液中之聯胺的莫耳數比為2:1。In one embodiment of the invention, in step (c), the molar ratio of the silver nitrate silver ion to the hydrazine in the diamine diluted aqueous solution is 2:1.

在本發明之一實施例中,在步驟(c)中,上述以月桂酸根做為保護基之銀奈米粒子的平均粒徑範圍為6.20±0.57nm(奈米)。In an embodiment of the present invention, in the step (c), the silver nanoparticles having the lauric acid as a protective group have an average particle diameter ranging from 6.20 ± 0.57 nm (nano).

在本發明之一實施例中,在步驟(d)中,先將丙酮加入該第三混合液中,使上述以月桂酸根做為保護基之銀奈米粒子沈澱,接著以甲醇與丙酮進行清洗、離心及減壓濃縮抽乾,以得到上述以月桂酸根做為保護基之銀奈米粒子。In an embodiment of the present invention, in the step (d), acetone is first added to the third mixed liquid to precipitate the silver nanoparticles having the lauric acid as a protective group, followed by washing with methanol and acetone. The mixture was centrifuged and concentrated under reduced pressure to obtain the above-mentioned silver nanoparticles having lauric acid as a protective group.

在本發明之一實施例中,在步驟(e)中,該第四混合液是:預先以含0.5wt%月桂酸之環己烷做為溶劑來將步驟(d)之銀奈米粒子配製成具有5.0至15.0wt%銀奈米粒子之第四混合液,該第四混合液是一30天長效保存溶液,其較佳具有10.0wt%的銀奈米粒子。In an embodiment of the present invention, in the step (e), the fourth mixed liquid is: the silver nanoparticle of the step (d) is prepared in advance by using cyclohexane containing 0.5 wt% of lauric acid as a solvent. A fourth mixture having 5.0 to 15.0% by weight of silver nanoparticles is prepared, which is a 30-day long-acting preservation solution which preferably has 10.0% by weight of silver nanoparticles.

在本發明之一實施例中,在步驟(f)中,該第四混合液係選擇以旋轉塗佈或噴墨印刷方式施加於該基板之表面上。In an embodiment of the invention, in step (f), the fourth mixture is selected to be applied to the surface of the substrate by spin coating or ink jet printing.

在本發明之一實施例中,在步驟(f)中,該基板選自一可撓式塑膠基板、一玻璃基板或一矽晶圓基板,其中該可撓式塑膠基板較佳為聚對苯二甲酸乙二醇酯(polyethylene terephthalate,PET)之基板。In an embodiment of the invention, in the step (f), the substrate is selected from a flexible plastic substrate, a glass substrate or a germanium wafer substrate, wherein the flexible plastic substrate is preferably polyparaphenylene. A substrate of polyethylene terephthalate (PET).

在本發明之一實施例中,在步驟(g)中,該聯胺水溶液的聯胺濃度介於70至90wt%,例如為80wt%。In an embodiment of the invention, in step (g), the hydrazine aqueous solution has a hydrazine concentration of from 70 to 90% by weight, for example 80% by weight.

在本發明之一實施例中,步驟(a)至(g)皆在介於0至50℃之間的室溫下進行,較佳為介於10至40℃之間,特別是介於20至30℃之間,例如為25℃。In an embodiment of the invention, steps (a) to (g) are carried out at room temperature between 0 and 50 ° C, preferably between 10 and 40 ° C, especially between 20 Between 30 ° C, for example 25 ° C.

為了讓本發明之上述及其他目的、特徵、優點能更明顯易懂,下文將特舉本發明較佳實施例,並配合所附圖式,作詳細說明如下。再者,本發明所提到的方向用語,例如「上」、「下」、「內」、「外」或「側面」等,僅是參考附加圖式的方向。因此,使用的方向用語是用以說明及理解本發明,而非用以限制本發明。The above and other objects, features and advantages of the present invention will become more <RTIgt; Furthermore, the directional terminology referred to in the present invention, such as "upper", "lower", "inside", "outside" or "side", is merely a reference to the direction of the additional drawing. Therefore, the directional terminology used is for the purpose of illustration and understanding of the invention.

請參照第1至3圖所示,本發明第一實施例之在室溫下形成導電薄膜之方法主要包含下列步驟:(a)、將硝酸銀(AgNO3 )加入含有月桂酸(dodecanoic acid,C11 H23 COOH,又稱為正十二酸或正十二烷酸)之非極性溶劑中,成為一第一混合液;(b)、將正丁基胺(n-butylamine,又稱為正丁胺)滴入該第一混合液中作為硝酸銀之銀離子配位基(ligand),成為一第二混合液;(c)、將聯胺(hydrazine,N2 H4 ‧H2 O,又稱為聯氨)稀釋水溶液滴入該第二混合液中,成為一第三混合液,其中聯胺將銀離子還原為銀奈米粒子(nanoparticles,NPs),同時月桂酸之月桂酸根做為保護基(capping ligand)圍繞在該銀奈米粒子周圍;(d)、由該第三混合液中分離出以月桂酸根做為保護基之銀奈米粒子(Ag-C11 H23 CO2 );(e)、以環已烷(cyclohexane)做為溶劑來將上述以月桂酸根做為保護基之銀奈米粒子調配成為一第四混合液;(f)、將該第四混合液旋轉塗佈(spinning coating)於一基板之一表面上,以形成一以月桂酸根做為保護基之銀奈米粒子膜;以及(g)、將該基板浸入(immersing)聯胺水溶液中,以將該銀奈米粒子膜化學還原成一導電銀薄膜;其中上述步驟(a)至(g)皆在室溫下進行。本發明將於下文利用第1至3圖逐一詳細說明第一及第二實施例之上述各步驟的實施細節及其反應原理。Referring to Figures 1 to 3, the method for forming a conductive film at room temperature according to the first embodiment of the present invention mainly comprises the following steps: (a) adding silver nitrate (AgNO 3 ) to decanoic acid (C) 11 H 23 COOH, also known as n-dodecanoic acid or n-dodecanoic acid, is a first mixed solution; (b) n-butylamine (also known as n-butylamine) butylamine) was added dropwise to the first mixture of silver nitrate as silver ions ligand (ligand), into a second mixture; (c), the hydrazine (hydrazine, N 2 H 4 ‧H 2 O, and A diluted aqueous solution called hydrazine is added to the second mixed solution to form a third mixed liquid in which the hydrazine reduces the silver ions to silver nanoparticles (NPs), while the lauric acid lauric acid is used as a protection. a capping ligand surrounding the silver nanoparticle; (d) separating silver nanoparticles (Ag-C 11 H 23 CO 2 ) using lauric acid as a protecting group from the third mixture; (e) using cyclohexane as a solvent to blend the above silver nanoparticles with lauric acid as a protective group into a fourth mixture (f) spin coating the surface of one of the substrates to form a silver nanoparticle film having lauric acid as a protective group; and (g) The substrate is immersed in an aqueous hydrazine solution to chemically reduce the silver nanoparticle film into a conductive silver film; wherein the above steps (a) to (g) are carried out at room temperature. DETAILED DESCRIPTION OF THE INVENTION The present invention will be described in detail below with reference to Figures 1 through 3, and the details of the implementation of the above-described steps of the first and second embodiments and their reaction principles will be explained in detail.

請參照第1圖所示,本發明第一實施例之在室溫下形成導電薄膜之方法首先進行步驟(a),其係將硝酸銀加入含有月桂酸之非極性溶劑中,成為一第一混合液。在本步驟中,本發明係取31.69毫升的甲苯做為非極性溶劑,並加入3.3387克(16.67 mmol)的月桂酸(dodecanoic acid)至甲苯中,攪拌至溶解後,再加入1.4156克(8.33 mmol)的硝酸銀(AgNO3 ),含銀離子0.25莫耳濃度,其中該第一混合液中的硝酸銀係用以做為銀離子前驅物(precursor),及該第一混合液中的月桂酸在下述步驟(c)中將做為銀奈米粒子的保護基capping ligand),但在此步驟中,月桂酸尚未與硝酸銀有任何反應。再者,在步驟(a)中,硝酸銀之銀離子與月桂酸之月桂酸根的莫耳數比基本上係維持在1:2。該非極性溶劑較佳選自甲苯,但依需求仍可選自其他等效非極性溶劑。Referring to FIG. 1 , the method for forming a conductive film at room temperature according to the first embodiment of the present invention first performs the step (a) of adding silver nitrate to a non-polar solvent containing lauric acid to form a first mixture. liquid. In this step, the present invention takes 31.69 ml of toluene as a non-polar solvent, and adds 3.3387 g (16.67 mmol) of dodecanoic acid to toluene, and after stirring until dissolved, 1.4156 g (8.33 mmol) is added. Silver nitrate (AgNO 3 ) containing 0.25 molar concentration of silver ions, wherein silver nitrate in the first mixture is used as a silver ion precursor, and lauric acid in the first mixture is as follows In step (c), it will serve as a protecting ligand for silver nanoparticles, but in this step, lauric acid has not reacted with silver nitrate. Further, in the step (a), the molar ratio of the silver nitrate silver ion to the lauric acid laurate is maintained substantially at 1:2. The non-polar solvent is preferably selected from toluene, but may be selected from other equivalent non-polar solvents as desired.

請參照第1圖所示,本發明第一實施例之在室溫下形成導電薄膜之方法接著進行步驟(b),其係將正丁基胺滴入該第一混合液中作為硝酸銀之銀離子配位基,成為一第二混合液。在本步驟中,本發明係以每秒一滴方式將1.6473毫升(16.67 mmol)的正丁基胺(n-butylamine)加入,並在2.5分鐘內滴完後,再持續反應3.5分鐘,過程中該第二混合液漸轉為乳白色混濁懸浮液,也就是當中的正丁基胺被用以暫時做為銀離子之配體(ligand),使銀離子與硝酸銀先行分離,此時該乳白色混濁懸浮之樣態即是顯示該第二混合液包含了銀離子與正丁基胺相配位後所形成之複合物。在步驟(b)中,硝酸銀之銀離子與正丁基胺的莫耳數比基本上係維持在1:2。Referring to FIG. 1, the method for forming a conductive film at room temperature according to the first embodiment of the present invention is followed by the step (b) of dropping n-butylamine into the first mixed liquid as silver nitrate. The ionic ligand becomes a second mixed solution. In this step, the present invention adds 1.6473 ml (16.67 mmol) of n-butylamine in one drop per second, and after the dropwise addition in 2.5 minutes, the reaction is continued for 3.5 minutes. The second mixture gradually turns into a milky white turbid suspension, that is, n-butylamine is used as a ligand for silver ions, so that silver ions and silver nitrate are separated first, and the milky white turbid suspension is suspended. The aspect shows that the second mixture contains a complex formed by the coordination of silver ions with n-butylamine. In step (b), the molar ratio of silver ion silver nitrate to n-butylamine is substantially maintained at 1:2.

請參照第1圖所示,本發明第一實施例之在室溫下形成導電薄膜之方法接著進行步驟(c),其係將聯胺(N2 H4 ‧H2 O)稀釋水溶液滴入該第二混合液中,成為一第三混合液。在本步驟中,本發明係預先將80 wt%聯胺(N2 H4 ‧H2 O)溶液加入25毫升去離子水中稀釋,以調配成聯胺稀釋水溶液做為一化學還原液,其中包含0.2607克(4.17 mmol)之聯胺。接著,待上述步驟(b)之正丁基胺反應3.5分鐘後,再以每秒一滴的方式將預調配之聯胺稀釋水溶液加入該第二混合液中,而成為一第三混合液,其滴定需時15分鐘。完成滴定後,接著再反應3小時,其中聯胺用以將上述以正丁基胺為臨時配體之銀離子還原為金屬態之銀原子,並使其進一步再聚集成為銀奈米粒子,同時月桂酸之月桂酸根則用以做為保護基圍繞在該銀奈米粒子周圍。在步驟(c)中,硝酸銀之銀離子與聯胺稀釋水溶液中之聯胺的莫耳數比基本上係維持在2:1。Referring to FIG. 1, the method for forming a conductive film at room temperature according to the first embodiment of the present invention is followed by the step (c) of dropping a dilute aqueous solution of hydrazine (N 2 H 4 ‧H 2 O) In the second mixed liquid, it becomes a third mixed liquid. In this step, the present invention preliminarily dilutes 80 wt% hydrazine (N 2 H 4 ‧H 2 O) solution into 25 ml of deionized water to prepare a hydrazine diluted aqueous solution as a chemical reducing solution, which comprises 0.2607 g (4.17 mmol) of hydrazine. Then, after the reaction of the n-butylamine in the above step (b) for 3.5 minutes, the pre-formed aqueous solution of the hydrazine diluted into the second mixture is added to the second mixture in a drop per second to become a third mixed solution. The titration takes 15 minutes. After completion of the titration, the reaction is further carried out for 3 hours, wherein the hydrazine is used to reduce the silver ion having the n-butylamine as a temporary ligand to a metallic silver atom, and further reaggregate into silver nanoparticles, while The lauric acid laurate is used as a protective group around the silver nanoparticle. In the step (c), the molar ratio of the silver nitrate silver ion to the hydrazine in the diamine diluted aqueous solution is maintained substantially at 2:1.

更詳細來說,在步驟(c)中,以正丁基胺為臨時配體之銀離子可以進一步被聯胺還原成金屬態之銀原子,而且多個金屬態之銀原子會相互聚集(cluster)成為奈米等級之銀奈米粒子,在聚集後,上述之銀奈米粒子的平均粒徑範圍大致為6.20±0.57 nm(奈米),其中每一銀奈米粒子實際上是由為數十至數百個銀原子聚集而成的,同時銀奈米粒子之最外層將與月桂酸根反應形成離子型複合物,其中最外層之銀原子將轉變成帶正電銀離子,以鍵結數個帶負電荷之月桂酸根(如第1圖最右側所示),該些月桂酸根即用以做為保護基並圍繞在該銀奈米粒子(Ag-C11 H23 CO2 )周圍,藉此可以避免發生相鄰銀奈米粒子之間進一步再相互聚集結合而擴大粒徑尺寸的問題,進而有效限制銀奈米粒子內部聚集的銀原子總數不再增加,以穩定維持銀奈米粒子的粒徑尺寸,此舉的優點在於銀奈米粒子之粒徑尺寸得到穩定控制,將可以有效避免後續步驟在形成圖案化線路時因導電顆粒過大而影響線路導電品質。In more detail, in the step (c), the silver ion having n-butylamine as a temporary ligand may be further reduced by the hydrazine into a metallic silver atom, and the silver atoms of the plurality of metal states may aggregate with each other (cluster) ) becomes a nanometer-sized silver nanoparticle. After aggregation, the average particle diameter of the above-mentioned silver nanoparticle particles is approximately 6.20±0.57 nm (nano), wherein each silver nanoparticle is actually counted Ten to hundreds of silver atoms are aggregated, and the outermost layer of silver nanoparticles will react with laurate to form an ionic complex, in which the outermost silver atoms will be converted into positively charged silver ions to bond a negatively charged laurate (as shown at the far right of Figure 1), which is used as a protective group and surrounds the silver nanoparticles (Ag-C 11 H 23 CO 2 ). This can avoid the problem that the adjacent silver nanoparticles are further aggregated and then aggregated to expand the particle size, thereby effectively limiting the total number of silver atoms accumulated inside the silver nanoparticles to no longer increase, so as to stably maintain the silver nanoparticles. Particle size, the advantage of this is that it is Yinnai. The particle size of the particle to obtain a stable control, can effectively prevent the subsequent steps of conductive lines affected by the quality of the conductive particles are too large when forming a patterned circuit.

請參照第1圖所示,本發明第一實施例之在室溫下形成導電薄膜之方法接著進行步驟(d),其係由該第三混合液中分離出以月桂酸根做為保護基之銀奈米粒子(Ag-C11 H23 CO2 )。在本步驟中,當上述聯胺反應結束後,先將200毫升的丙酮加入該第三混合液中,使上述以月桂酸根做為保護基之銀奈米粒子沈澱,接著以甲醇與丙酮等溶液進行清洗、離心及減壓濃縮抽乾等處理,如此即可以得到呈深藍色以月桂酸根做為保護基之銀奈米粒子粉末。惟,本發明之分離方式並不限於此,本發明亦可使用其他現有分離技術或其他溶劑來由該第三混合液中分離出以月桂酸根做為保護基之銀奈米粒子。Referring to FIG. 1, the method for forming a conductive film at room temperature according to the first embodiment of the present invention is followed by the step (d) of separating the lauric acid as a protective group from the third mixed solution. Silver nanoparticles (Ag-C 11 H 23 CO 2 ). In this step, after the hydrazine reaction is completed, 200 ml of acetone is first added to the third mixture to precipitate the silver nanoparticles having the lauric acid as a protective group, followed by a solution of methanol and acetone. The cleaning, centrifugation, and concentration under vacuum are carried out, so that a silver nanoparticle powder having a dark blue color and a lauric acid as a protective group can be obtained. However, the separation method of the present invention is not limited thereto, and the present invention may also use other existing separation techniques or other solvents to separate silver nanoparticles having lauric acid as a protective group from the third mixed liquid.

請參照第2圖所示,本發明第一實施例之在室溫下形成導電薄膜之方法接著進行步驟(e),其係以環已烷做為溶劑來將上述以月桂酸根做為保護基之銀奈米粒子調配成為一第四混合液10。在本步驟中,本發明係預先以已含0.5 wt%月桂酸之環己烷做為溶劑,並將步驟(d)之銀奈米粒子加入此溶劑中以配製成具有5.0至15.0 wt%銀奈米粒子之一第四混合液10,其中該第四混合液10是一長效保存懸浮液,其較佳具有10.0 wt%的銀奈米粒子,該第四混合液10因含有0.5 wt%月桂酸以及環己烷,因而有利於穩定的保存以月桂酸根做為保護基之銀奈米粒子至少約30天或以上,以月桂酸根做為保護基之銀奈米粒子可以穩定的懸浮於含有0.5 wt%月桂酸的環己烷溶劑中,因此該第四混合液10不但可用於儲存備用之用途,並且也可避免銀奈米粒子在保存期間發生因進一步聚集而擴大粒徑的問題發生。Referring to FIG. 2, the method for forming a conductive film at room temperature according to the first embodiment of the present invention is followed by the step (e) of using the above-mentioned lauric acid as a protecting group using cyclohexane as a solvent. The silver nanoparticles are blended to form a fourth mixed liquid 10. In this step, the present invention preliminarily uses cyclohexane having 0.5 wt% of lauric acid as a solvent, and adding silver nanoparticles of the step (d) to the solvent to prepare 5.0 to 15.0 wt%. a fourth mixed liquid 10 of silver nanoparticles, wherein the fourth mixed liquid 10 is a long-acting preservation suspension, which preferably has 10.0 wt% of silver nanoparticles, and the fourth mixed liquid 10 contains 0.5 wt% % lauric acid and cyclohexane, thus facilitating stable storage of silver nanoparticles with lauric acid as a protective group for at least about 30 days or more, and silver nanoparticles with lauric acid as a protective group can be stably suspended in It contains 0.5 wt% of lauric acid in cyclohexane solvent, so the fourth mixed liquid 10 can be used not only for storage purposes, but also to avoid the problem that the silver nanoparticles are enlarged due to further aggregation during storage. .

請參照第2圖所示,本發明第一實施例之在室溫下形成導電薄膜之方法接著進行步驟(f),其係將該第四混合液10旋轉塗佈(spinning coating)於一基板20之一表面上,以形成一以月桂酸根做為保護基之銀奈米粒子膜11。在本實施例中,該第四混合液10係選擇以旋轉塗佈的方式經由一旋塗液分配器30施加於該基板20之一上表面上,其中該基板20可選自一可撓式塑膠基板、一玻璃基板或一矽晶圓基板,其中較佳選自可撓式塑膠基板,例如為由不耐高溫之低成本聚對苯二甲酸乙二醇酯(polyethylene terephthalate,PET)材料製成之基板。在本步驟中,本發明係以含10 wt%以月桂酸根做為保護基之銀奈米粒子(Ag-C11 H23 CO2 )的第四混合液10來進行旋塗作業,其中該基板20被置於一轉盤上,且其以每分鐘2000轉之轉速持續15秒的旋轉塗佈,以便均勻的塗佈於該基板20(例如為PET基板)上。待氮氣吹乾(或風乾)使該第四混合液10中的環己烷完全揮發後,即可於該基板20之表面上以形成一以月桂酸根做為保護基之銀奈米粒子膜11。Referring to FIG. 2, the method for forming a conductive film at room temperature according to the first embodiment of the present invention is followed by the step (f) of spin coating the fourth mixed solution 10 on a substrate. On one of the surfaces 20, a silver nanoparticle film 11 having lauric acid as a protective group is formed. In this embodiment, the fourth mixed liquid 10 is selected to be applied to one surface of the substrate 20 via a spin-on liquid dispenser 30 in a spin coating manner, wherein the substrate 20 may be selected from a flexible type. a plastic substrate, a glass substrate or a wafer substrate, wherein the substrate is preferably selected from a flexible plastic substrate, for example, made of a low-temperature polyethylene terephthalate (PET) material. The substrate. In this step, the present invention performs a spin coating operation with a fourth mixed liquid 10 containing 10 wt% of silver nanoparticles (Ag-C 11 H 23 CO 2 ) having a lauric acid as a protective group, wherein the substrate 20 was placed on a turntable and it was spin coated at 2000 rpm for 15 seconds to be evenly applied to the substrate 20 (e.g., a PET substrate). After the nitrogen is blown dry (or air-dried) to completely volatilize the cyclohexane in the fourth mixed solution 10, a silver nanoparticle film 11 having lauric acid as a protective group can be formed on the surface of the substrate 20. .

請參照第2圖所示,本發明第一實施例之在室溫下形成導電薄膜之方法接著進行步驟(g),其係將該基板20浸入聯胺水溶液中,以將該銀奈米粒子膜11化學還原成一導電銀薄膜12。在本步驟中,該聯胺水溶液的聯胺濃度係明顯高於步驟(c)使用的聯胺稀釋水溶液的聯胺濃度,其中本步驟之聯胺水溶液的聯胺濃度係介於70至90 wt%,例如較佳為80 wt%。在本實施例中,本發明係將步驟(f)塗佈完成的銀奈米粒子膜11以市售80 wt%聯胺(N2 H4 )水溶液在室溫25℃下浸泡一個小時,經由化學還原即可得到一導電銀薄膜12,最後再以去離子水清洗該導電銀薄膜12之表面,並以氮氣吹乾(或風乾)。更詳言之,上述聯胺可以將該銀奈米粒子膜11中的銀奈米粒子外表上的銀離子也還原成為金屬態之銀原子,並同時使月桂酸根脫附(desorption)離開銀奈米粒子,還原及脫附後,銀奈米粒子僅含金屬態之銀原子,並可緊密的附著結合於該基板20之上表面。Referring to FIG. 2, the method for forming a conductive film at room temperature according to the first embodiment of the present invention is followed by the step (g) of immersing the substrate 20 in an aqueous hydrazine solution to form the silver nanoparticle. The film 11 is chemically reduced into a conductive silver film 12. In this step, the hydrazine concentration of the aqueous hydrazine solution is significantly higher than the hydrazine concentration of the aqueous hydrazine solution used in the step (c), wherein the hydrazine concentration of the aqueous hydrazine solution in this step is between 70 and 90 wt. %, for example, is preferably 80 wt%. In the present embodiment, the present invention is to soak the silver nanoparticle film 11 coated in the step (f) with a commercially available 80 wt% aqueous solution of hydrazine (N 2 H 4 ) at room temperature 25 ° C for one hour. Chemically, a conductive silver film 12 is obtained, and finally the surface of the conductive silver film 12 is washed with deionized water and blown dry (or air dried) with nitrogen. More specifically, the above hydrazine can also reduce the silver ions on the outer surface of the silver nanoparticles in the silver nanoparticle film 11 into a metallic silver atom, and simultaneously desorb the lauric acid from the silver lining. After the rice particles are reduced and desorbed, the silver nanoparticles contain only metallic silver atoms and can be tightly bonded to the upper surface of the substrate 20.

值得注意的是,上述步驟(a)至(g)皆在室溫下進行,本發明之室溫係指介於0至50℃之間的常溫,較佳係指介於10至40℃之間,特別是介於20至30℃之間,例如為21、23、25、27、29℃。再者,藉由上述步驟(a)至(g)製做之導電銀薄膜12係特別適合應用於晶圓上積體電路(IC)或薄膜電晶體液晶顯示器(TFT-LCD)的透明導電層的線路製作上或應用在其微小斷路缺陷的修復上。It should be noted that the above steps (a) to (g) are all carried out at room temperature, and the room temperature of the present invention means a normal temperature between 0 and 50 ° C, preferably between 10 and 40 ° C. In particular, it is between 20 and 30 ° C, for example 21, 23, 25, 27, 29 ° C. Furthermore, the conductive silver film 12 made by the above steps (a) to (g) is particularly suitable for use in a transparent conductive layer of an integrated circuit (IC) or a thin film transistor liquid crystal display (TFT-LCD) on a wafer. The line is fabricated or applied to the repair of its minor breakage defects.

請參照第3圖所示,本發明第二實施例之在室溫下形成導電薄膜之方法係相似於本發明第一實施例,並大致沿用相同元件名稱及圖號,但相較於該第一較佳實施例,該第二實施例係包含下列步驟:(a)、將硝酸銀(AgNO3 )加入含有月桂酸(C11 H23 COOH)之非極性溶劑中,成為一第一混合液;(b)、將正丁基胺滴入該第一混合液中作為硝酸銀之銀離子配位基,成為一第二混合液;(c)、將聯胺(N2 H4 ‧H2 O)稀釋水溶液滴入該第二混合液中,成為一第三混合液,其中聯胺將銀離子還原為銀奈米粒子,同時月桂酸之月桂酸根做為保護基圍繞在該銀奈米粒子周圍;(d)、由該第三混合液中分離出以月桂酸根做為保護基之銀奈米粒子(Ag-C11 H23 CO2 );(e)、以環已烷做為溶劑來將上述以月桂酸根做為保護基之銀奈米粒子調配成為一第四混合液;(f)、將該第四混合液噴墨印刷(inkjet printing)於一基板之一表面上,以形成一以月桂酸根做為保護基之銀奈米粒子膜;以及(g)、將該基板浸入聯胺水溶液中,以將該銀奈米粒子膜化學還原成一導電銀薄膜;其中上述步驟(a)至(g)皆在室溫下進行。Referring to FIG. 3, the method for forming a conductive film at room temperature according to the second embodiment of the present invention is similar to the first embodiment of the present invention, and substantially uses the same component name and figure number, but compared to the first In a preferred embodiment, the second embodiment comprises the steps of: (a) adding silver nitrate (AgNO 3 ) to a non-polar solvent containing lauric acid (C 11 H 23 COOH) to form a first mixed liquid; (b) adding n-butylamine to the first mixed liquid as a silver ion ligand of silver nitrate to form a second mixed liquid; (c), hydrazine (N 2 H 4 ‧H 2 O) The diluted aqueous solution is dropped into the second mixed liquid to form a third mixed liquid, wherein the hydrazine reduces the silver ions to silver nanoparticles, and the lauric acid lauric acid surrounds the silver nanoparticles as a protective group; (d) separating silver nanoparticles (Ag-C 11 H 23 CO 2 ) having lauric acid as a protective group from the third mixed liquid; (e) using cyclohexane as a solvent The silver nanoparticle with lauric acid as a protecting group is formulated into a fourth mixed liquid; (f) the inkjet printing of the fourth mixed liquid (inkje t printing) on one surface of a substrate to form a silver nanoparticle film with lauric acid as a protective group; and (g) immersing the substrate in an aqueous hydrazine solution to coat the silver nanoparticle film Chemically reducing to a conductive silver film; wherein the above steps (a) to (g) are carried out at room temperature.

在本發明第二實施例中,其差異特徵係:如第3圖所示,第二實施例之步驟(f)進一步改為採用噴墨印刷(inkjet printing)方式來取代旋塗(spinning coating)的方式。在本發明第二實施例中,該第四混合液10係選擇以旋塗的方式經由一噴墨液分配器40施加於該基板20之一上表面上,其中該基板20可選自一可撓式塑膠基板、一玻璃基板或一矽晶圓基板,其中較佳選自可撓式塑膠基板,例如為由不耐高溫之低成本PET材料製成之基板。In the second embodiment of the present invention, the difference is characterized in that, as shown in FIG. 3, the step (f) of the second embodiment is further changed to an inkjet printing method instead of a spin coating. The way. In the second embodiment of the present invention, the fourth mixed liquid 10 is selected to be applied to one of the upper surfaces of the substrate 20 via an inkjet liquid dispenser 40 in a spin coating manner, wherein the substrate 20 may be selected from the group consisting of A flexible plastic substrate, a glass substrate or a wafer substrate, preferably selected from a flexible plastic substrate, such as a substrate made of a low-cost PET material that is not resistant to high temperatures.

在本步驟(f)中,本發明係以含10 wt%以月桂酸根做為保護基之銀奈米粒子(Ag-C11 H23 CO2 )的第四混合液10來進行噴印作業,其中該基板20被固定在一作業平台或一移動平台上,且接著以該噴墨液分配器40來對該基板20之上表面進行噴墨作業,以便均勻的將該第四混合液10噴印於該基板20(例如為PET基板)上。待氮氣吹乾(或風乾)使該第四混合液10中的環己烷完全揮發後,即可於該基板20之表面上以形成一以月桂酸根做為保護基之銀奈米粒子膜13,其可以是圖案化之線路形狀。接著,在步驟(g)中,其係將該基板20浸入聯胺水溶液中,以將該銀奈米粒子膜13化學還原成一導電銀薄膜14。該第二實施例之步驟(a)至(e)及(g)則大致相同於第一實施例,故於此不再另予重複說明。In the present step (f), the present invention performs a printing operation by using a fourth mixed liquid 10 containing 10 wt% of silver nanoparticles (Ag-C 11 H 23 CO 2 ) having a lauric acid as a protective group. Wherein the substrate 20 is fixed on a working platform or a moving platform, and then the inkjet liquid distributor 40 is used to perform an inkjet operation on the upper surface of the substrate 20 to uniformly spray the fourth mixed liquid 10 It is printed on the substrate 20 (for example, a PET substrate). After the nitrogen is blown dry (or air-dried) to completely volatilize the cyclohexane in the fourth mixed solution 10, a silver nanoparticle film 13 having lauric acid as a protective group can be formed on the surface of the substrate 20. It can be a patterned line shape. Next, in the step (g), the substrate 20 is immersed in an aqueous hydrazine solution to chemically reduce the silver nanoparticle film 13 into a conductive silver film 14. Steps (a) to (e) and (g) of the second embodiment are substantially the same as those of the first embodiment, and thus the description thereof will not be repeated.

如上所述,相較於現有形成導電薄膜之方法使用以正癸酸根保護之銀奈米粒子在室溫下的奈米粒子穩定性不佳且需以大於150℃以上之高溫鍛燒的方式才能將銀奈米粒子之鍍膜在硬式矽基板上還原成為高導電性銀薄膜而不適用於不耐熱的可撓式塑膠基板上並具製程耗時及高危險性等缺點,第1至3圖之本發明係先將硝酸銀加入含有月桂酸之溶液中,再依序滴入正丁基胺作為銀離子配位基以及滴入聯胺稀釋水溶液將銀離子還原為銀奈米粒子,以初步得到以飽和月桂酸根做為穩定保護基之銀奈米粒子,接著再以環已烷做為長效溶劑來將上述以月桂酸根做為保護基之銀奈米粒子旋塗或噴印於基板表面上,以形成圖案化之銀奈米粒子膜,最後再將基板浸入高濃度聯胺水溶液中,以將銀奈米粒子膜化學還原成導電銀薄膜,此方法不但可以簡便及快速的在基板上印刷形成圖案化薄膜或線路,而且製程也可以全程可在室溫下進行,因此可以大幅增加銀奈米粒子在不耐高溫之低成本可撓式基板(如PET基板)上的應用潛力。As described above, compared with the prior art method of forming a conductive film, the silver nanoparticles protected with orthosilicate have poor stability of the nano particles at room temperature and need to be calcined at a temperature higher than 150 ° C. The silver nanoparticle coating is reduced on the hard crucible substrate to form a highly conductive silver film, which is not suitable for the heat-resistant flexible plastic substrate, and has the disadvantages of time-consuming and high-risk process, and the first to third figures In the present invention, silver nitrate is first added to a solution containing lauric acid, and then n-butylamine is added as a silver ion ligand in sequence, and the silver ion is reduced to silver nanoparticles by dropwise addition of a diamine diluted aqueous solution to obtain a preliminary Saturated lauric acid as a stable protective group of silver nanoparticles, and then using cyclohexane as a long-acting solvent to spin or spray the above-mentioned silver nanoparticles with lauric acid as a protective group on the surface of the substrate. In order to form a patterned silver nanoparticle film, and finally immersing the substrate in a high concentration aqueous solution of hydrazine to chemically reduce the silver nanoparticle film into a conductive silver film, the method can be printed on the substrate simply and quickly. Forming a patterned thin film or a line, but the whole process may be carried out at room temperature, the applied potential can be greatly increased the cost of silver nanoparticles in the flexible substrate (e.g., PET substrate) is not of high temperature.

再者,本發明係預先以含0.5 wt%月桂酸之環己烷做為溶劑來將以月桂酸根做為保護基之銀奈米粒子配製成5.0至15.0 wt%之30天期長效保存溶液,使銀奈米粒子在含月桂酸之環己烷溶液中不易相互聚集凝結,並保持奈米顆粒之尺寸均勻性,因此可提高銀奈米粒子應用在噴印製程時之印刷品質。Furthermore, the present invention preliminarily preserves a silver nanoparticle having lauric acid as a protective group by using cyclohexane containing 0.5 wt% of lauric acid as a solvent for a period of 30 to 15.0 wt% for 30 days. The solution makes the silver nanoparticles not easily aggregate and coagulate in the cyclohexane-containing cyclohexane solution, and maintains the uniformity of the size of the nanoparticles, thereby improving the printing quality of the silver nanoparticles applied in the printing process.

雖然本發明已以較佳實施例揭露,然其並非用以限制本發明,任何熟習此項技藝之人士,在不脫離本發明之精神和範圍內,當可作各種更動與修飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。The present invention has been disclosed in its preferred embodiments, and is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application.

10‧‧‧第四混合液10‧‧‧ fourth mixture

11‧‧‧銀奈米粒子膜11‧‧‧Silver Nanoparticle Film

12‧‧‧導電銀薄膜12‧‧‧ Conductive silver film

13‧‧‧銀奈米粒子膜13‧‧‧Silver Nanoparticle Film

14‧‧‧導電銀薄膜14‧‧‧ Conductive silver film

20‧‧‧基板20‧‧‧Substrate

30‧‧‧旋塗液分配器30‧‧‧Spin coating dispenser

40‧‧‧噴墨液分配器40‧‧‧Inkjet Dispenser

第1圖:本發明第一實施例之在室溫下形成導電薄膜之方法的步驟(a)至(d)之示意圖。Fig. 1 is a view showing the steps (a) to (d) of the method for forming a conductive film at room temperature according to the first embodiment of the present invention.

第2圖:本發明第一實施例之在室溫下形成導電薄膜之方法的步驟(e)至(g)之示意圖。Fig. 2 is a view showing the steps (e) to (g) of the method of forming a conductive film at room temperature in the first embodiment of the present invention.

第3圖:本發明第二實施例之在室溫下形成導電薄膜之方法的步驟(e)至(g)之示意圖。Fig. 3 is a view showing the steps (e) to (g) of the method of forming a conductive film at room temperature in the second embodiment of the present invention.

10...第四混合液10. . . Fourth mixture

11...銀奈米粒子膜11. . . Silver nanoparticle film

12...導電銀薄膜12. . . Conductive silver film

20...基板20. . . Substrate

30...旋塗液分配器30. . . Spin coating dispenser

Claims (12)

一種在室溫下形成導電薄膜之方法,其包含:(a)、將硝酸銀加入含有月桂酸之非極性溶劑中,成為一第一混合液;(b)、將正丁基胺滴入該第一混合液中作為硝酸銀之銀離子配位基,成為一第二混合液;(c)、將聯胺稀釋水溶液滴入該第二混合液中,成為一第三混合液,其中聯胺將銀離子還原為銀奈米粒子,同時以月桂酸之月桂酸根做為保護基圍繞在該銀奈米粒子周圍;(d)、由該第三混合液中分離出以月桂酸根做為保護基之銀奈米粒子;(e)、以含0.5wt%月桂酸之環已烷做為溶劑來將步驟(d)之銀奈米粒子調配成為一第四混合液;(f)、將該第四混合液施加於一基板之一表面上,以形成一以月桂酸根做為保護基之銀奈米粒子膜;以及(g)、將該基板浸入濃度介於70至90wt%的聯胺水溶液中,以將該銀奈米粒子膜化學還原成一導電銀薄膜;其中上述步驟(a)至(g)皆在室溫下進行。 A method for forming a conductive film at room temperature, comprising: (a) adding silver nitrate to a non-polar solvent containing lauric acid to form a first mixed liquid; (b) dropping n-butylamine into the first a silver ion ligand as a silver nitrate ion in a mixed solution; (c), a dilute aqueous solution of hydrazine is dropped into the second mixed liquid to form a third mixed liquid, wherein the hydrazine is silver The ions are reduced to silver nanoparticles, and the lauric acid of lauric acid is used as a protective group around the silver nanoparticles; (d) the silver with the lauric acid as a protective group is separated from the third mixture Nanoparticles; (e), using 0.5% by weight of cyclohexane of lauric acid as a solvent to prepare the silver nanoparticles of step (d) into a fourth mixture; (f), the fourth mixture Applying a liquid to a surface of a substrate to form a silver nanoparticle film having lauric acid as a protective group; and (g) immersing the substrate in an aqueous solution of hydrazine having a concentration of 70 to 90% by weight, Chemically reducing the silver nanoparticle film into a conductive silver film; wherein the above steps (a) to (g) are at room temperature Go on. 如申請專利範圍第1項所述之在室溫下形成導電薄膜之方法,其中在步驟(a)中,硝酸銀之銀離子與月桂酸之月桂酸根的莫耳數比為1:2。 A method of forming a conductive film at room temperature as described in claim 1, wherein in step (a), the molar ratio of silver nitrate silver ions to lauric acid laurate is 1:2. 如申請專利範圍第1項所述之在室溫下形成導電薄 膜之方法,其中在步驟(a)中,該非極性溶劑為甲苯。 Forming a thin conductive film at room temperature as described in claim 1 A method of film, wherein in step (a), the non-polar solvent is toluene. 如申請專利範圍第1項所述之在室溫下形成導電薄膜之方法,其中在步驟(b)中,硝酸銀之銀離子與正丁基胺的莫耳數比為1:2。 A method of forming a conductive film at room temperature as described in claim 1, wherein in step (b), the molar ratio of silver ion silver nitrate to n-butylamine is 1:2. 如申請專利範圍第1項所述之在室溫下形成導電薄膜之方法,其中在步驟(c)中,硝酸銀之銀離子與聯胺稀釋水溶液中之聯胺的莫耳數比為2:1。 The method for forming a conductive film at room temperature according to claim 1, wherein in the step (c), the molar ratio of the silver nitrate silver ion to the hydrazine diluted aqueous solution in the aqueous solution is 2:1. . 如申請專利範圍第1項所述之在室溫下形成導電薄膜之方法,其中在步驟(c)中,上述以月桂酸根做為保護基之銀奈米粒子的平均粒徑範圍為6.20±0.57奈米。 The method for forming a conductive film at room temperature according to claim 1, wherein in the step (c), the average particle diameter of the silver nanoparticles having the lauric acid as a protective group is 6.20±0.57. Nano. 如申請專利範圍第1項所述之在室溫下形成導電薄膜之方法,其中在步驟(d)中,先將丙酮加入該第三混合液中,使上述以月桂酸根做為保護基之銀奈米粒子沈澱,接著以甲醇與丙酮進行清洗、離心及減壓濃縮抽乾,以得到上述以月桂酸根做為保護基之銀奈米粒子。 The method for forming a conductive film at room temperature according to claim 1, wherein in the step (d), acetone is first added to the third mixture to make the lauric acid as a protective base. The nanoparticles were precipitated, followed by washing with methanol and acetone, centrifugation, and concentration under reduced pressure to obtain the above-mentioned silver nanoparticles having lauric acid as a protective group. 如申請專利範圍第1項所述之在室溫下形成導電薄膜之方法,其中在步驟(e)中,該第四混合液具有5.0至15.0wt%的銀奈米粒子。 A method of forming a conductive film at room temperature as described in claim 1, wherein in the step (e), the fourth mixture has 5.0 to 15.0% by weight of silver nanoparticles. 如申請專利範圍第1項所述之在室溫下形成導電薄膜之方法,其中在步驟(f)中,該第四混合液係選擇以旋轉塗佈或噴墨印刷方式施加於該基板之表面上。 A method of forming a conductive film at room temperature as described in claim 1, wherein in the step (f), the fourth mixture is selected to be applied to the surface of the substrate by spin coating or ink jet printing. on. 如申請專利範圍第1項所述之在室溫下形成導電薄 膜之方法,其中在步驟(f)中,該基板選自一可撓式塑膠基板、一玻璃基板或一矽晶圓基板。 Forming a thin conductive film at room temperature as described in claim 1 The method of the film, wherein in the step (f), the substrate is selected from a flexible plastic substrate, a glass substrate or a wafer substrate. 如申請專利範圍第10項所述之在室溫下形成導電薄膜之方法,其中該可撓式塑膠基板為聚對苯二甲酸乙二醇酯基板。 The method for forming a conductive film at room temperature according to claim 10, wherein the flexible plastic substrate is a polyethylene terephthalate substrate. 如申請專利範圍第1項所述之在室溫下形成導電薄膜之方法,其中步驟(a)至(g)皆在介於20至30℃之間的室溫下進行。A method of forming a conductive film at room temperature as described in claim 1, wherein steps (a) to (g) are carried out at room temperature between 20 and 30 °C.
TW100126414A 2011-07-26 2011-07-26 Method for forming conductive film at room temperature TWI464753B (en)

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TW200510060A (en) * 2003-09-09 2005-03-16 Ulvac Inc Metallic nano-particle and method for producing same, liquid dispersion of metallic nano-particle and method for producing same, metal thin line, metal film and method for producing same
CN101870832A (en) * 2010-05-06 2010-10-27 复旦大学 Method for preparing nano silver conductive ink

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
TW200510060A (en) * 2003-09-09 2005-03-16 Ulvac Inc Metallic nano-particle and method for producing same, liquid dispersion of metallic nano-particle and method for producing same, metal thin line, metal film and method for producing same
CN101870832A (en) * 2010-05-06 2010-10-27 复旦大学 Method for preparing nano silver conductive ink

Non-Patent Citations (1)

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Title
Dong TY, Chen WT, Wang CW, Chen CP, Chen CN, Lin MC, Song JM, Chen IG, Kao TH, "One-Step Synthesis of Uniform Silver Nanoparticle Capped by Saturated Decanoate: Direct Spray Printing Ink to Form Metallic Silver Film", Phys. Chem. Chem. Phys. 2009,11, 6269-6275, Epub 2009 May 27 *

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