TWI462598B - Method of manufacturing electret films and loudspeakers comprising the same - Google Patents
Method of manufacturing electret films and loudspeakers comprising the same Download PDFInfo
- Publication number
- TWI462598B TWI462598B TW098122211A TW98122211A TWI462598B TW I462598 B TWI462598 B TW I462598B TW 098122211 A TW098122211 A TW 098122211A TW 98122211 A TW98122211 A TW 98122211A TW I462598 B TWI462598 B TW I462598B
- Authority
- TW
- Taiwan
- Prior art keywords
- polymer
- electret
- speaker
- film
- containing solution
- Prior art date
Links
Landscapes
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Laminated Bodies (AREA)
Description
本發明係關於駐極體材料,且特別關於一駐極體揚聲器與其製造方法。This invention relates to electret materials, and more particularly to an electret speaker and method of making same.
一靜電揚聲器依照庫倫定律(coulomb's law),同時具有相異或同性之電荷的兩個導體可產生推或挽力(push or pull force)。交變的推挽靜電力可導致具靜電荷振動板(diaphragm)的振動,且因此產生聲音。一靜電揚聲器一般包括兩個多孔導電板或電極板與一介於導電板或電極板之間且由其所驅動的振動板。氣隙(air gap)可將電極與振動板隔開以提供振動板振動之空間。振動板通常薄且輕,且因此使靜電揚聲器之暫態反應(transition response)、於高頻之延伸性(expansion capability)、聲音流暢度(smoothness of sound)、聲音逼真度(acoustic fidelity)與低失真度(distortion),優於其他形式之揚聲器,例如電動(dynamic)、動圈(moving coil)式或壓電(piezoelectric)式揚聲器。此外,振動板必須具備靜電荷,以當訊號傳至電極板時,在藉由電極板所形成電場的作用下,允許誘導靜電力驅動振動板。An electrostatic speaker is based on coulomb's law, and two conductors having different or identical charges can produce a push or pull force. Alternating push-pull electrostatic forces can cause vibrations with electrostatically charged diaphragms and thus produce sound. An electrostatic speaker typically includes two porous conductive plates or electrode plates and a vibrating plate interposed between and driven by the conductive plates or electrode plates. An air gap separates the electrode from the diaphragm to provide room for vibration of the diaphragm. The vibrating plate is usually thin and light, and thus makes the transient response of the electrostatic speaker, the expiration capability of the high frequency, the smoothness of sound, the acoustic fidelity and the low Distortion is superior to other forms of speakers, such as dynamic, moving coil or piezoelectric speakers. In addition, the vibrating plate must have an electrostatic charge to allow the induced electrostatic force to drive the vibrating plate under the action of the electric field formed by the electrode plate when the signal is transmitted to the electrode plate.
由於結構簡單,靜電揚聲器可被製造成多種尺寸以適應日增之對於小且薄之電子裝置的需要。然而一般靜電揚聲器選用一直流對直流電源轉換器(DC-DC converter)以提供由導體所構成振動板上的靜電荷。考慮到直流對直流電源轉換器之尺寸、成本與電源消耗,已發展駐極體材料來取代直流對直流電源轉換器。駐極體為一具有一準永久電荷或偶極極化的介電材料。一駐極體產生內部及外部電場,其可為一永磁的靜電等效,請參閱G. M. Sessler於1980在Topics in Applied Physics vol. 33第一章第1頁所載及美國專利第4,288,584號(Mishra)。駐極體電荷可包括淨電荷(例如表面及/或空間電荷)及/或偶極極化。淨電荷包括捕捉正及負電荷載體層。Due to their simple structure, electrostatic speakers can be manufactured in a variety of sizes to accommodate the growing demand for small and thin electronic devices. However, in general, an electrostatic speaker uses a DC-DC converter to provide a static charge on a diaphragm formed by a conductor. Considering the size, cost and power consumption of DC-to-DC power converters, electret materials have been developed to replace DC-to-DC power converters. The electret is a dielectric material having a quasi-permanent charge or dipole polarization. An electret produces internal and external electric fields, which can be an electrostatic equivalent of a permanent magnet, see GM Sessler, 1980, in Topics in Applied Physics vol. 33, Chapter 1, page 1 and US Patent No. 4,288,584 ( Mishra). The electret charge can include a net charge (eg, surface and/or space charge) and/or dipole polarization. The net charge includes capturing positive and negative charge carrier layers.
一示範之駐極體揚聲器顯示於第1圖中,其可包括多孔電極板6a與6b及一駐極體振動板4。電極6a與6b可具有一些開口61a與61b且於各電極板上至少具有30%開孔率。電極板6a與6b可由金屬或覆蓋導電薄膜之塑膠材料形成。開口61a與61b可提供允許聲波通過。駐極體振動板4可包括一導電層2,其被夾於駐極體層1a與1b之間。駐極體層1a與1b可包括正電荷或負電荷或經定位後於駐極體振動板4的垂直方向具有相對偶極極化。藉由支持構件5a與5b可維持電極板6a與6b及駐極體振動板4在適當的地方。可由絕緣材料製造支持構件5a與5b。藉由絕緣元件51a、51b、52a與52b可將電極板6a、6b與駐極體振動板分開。在一駐極體揚聲器之操作中,各訊號源7a與7b分別經由導線8a與8b輸出一交替訊號至電極板6a與6b。訊號導致在電極板6a與6b及駐極體層1a與1b間發展一時變電場(time-varying electric field),而於電極板6a與6b及駐極體振動板4之間產生一靜電力。靜電力可導致駐極體振動板4振動而產生聲音。所產生之聲波可通過孔洞61a與61b,因此,聲波可於駐極體揚聲器外被收聽。An exemplary electret speaker is shown in Fig. 1, which may include porous electrode plates 6a and 6b and an electret diaphragm 4. The electrodes 6a and 6b may have some openings 61a and 61b and have at least 30% open porosity on each of the electrode plates. The electrode plates 6a and 6b may be formed of metal or a plastic material covering the conductive film. The openings 61a and 61b can provide passage of sound waves. The electret vibrating plate 4 may include a conductive layer 2 sandwiched between the electret layers 1a and 1b. The electret layers 1a and 1b may include a positive or negative charge or may be positioned to have a relative dipole polarization in the vertical direction of the electret vibrating plate 4. The electrode plates 6a and 6b and the electret vibrating plate 4 can be maintained in place by the supporting members 5a and 5b. The support members 5a and 5b can be made of an insulating material. The electrode plates 6a, 6b can be separated from the electret diaphragm by the insulating members 51a, 51b, 52a and 52b. In the operation of an electret speaker, each of the signal sources 7a and 7b outputs an alternating signal to the electrode plates 6a and 6b via the wires 8a and 8b, respectively. The signal causes a time-varying electric field to develop between the electrode plates 6a and 6b and the electret layers 1a and 1b, and an electrostatic force is generated between the electrode plates 6a and 6b and the electret vibrating plate 4. The electrostatic force can cause the electret vibrating plate 4 to vibrate to generate sound. The generated sound waves can pass through the holes 61a and 61b, so that the sound waves can be heard outside the electret speakers.
然而,為了使駐極體揚聲器增強其聲音逼真度(acoustic fidelity)與低失真度(low distortion),其需要一具有極佳之駐極體特性的駐極體材料與需要小心處理的製程以製造一薄的駐極體-金屬-駐極體結構。已知可由不同聚合物製作駐極體。藉由一直流電暈處理,於聚合物駐極體薄膜中產生電荷。上述不同的聚合物包括含氟聚合物,例如聚四氟乙烯(poly-tetrafluoroethylene,PTFE)與氟化乙丙烯(fluorinated ethylene propylene,FEP),其即使於高溫及高濕度下仍可提升穩定的駐極體特性。然而,含氟聚合物可能較昂貴且需要特定的製程技術。含氟聚合物表面具有低的摩擦係數,致無緊抓或黏附-鬆脫(stick-slip)特性,因此,這些含氟聚合物無法緊密黏合金屬且不適合用來製成駐極體揚聲器系統中的一駐極體振動板。已知亦可由非氟聚合物製作駐極體,例如聚苯乙烯(polystyrene,PS)、聚碳酸酯樹脂(polycarbonate,PC)、聚氯乙烯(polyvinyl chloride,PVC)、聚甲基丙烯酸甲酯(polymethylmethacrylate,PMMA)及環烯烴共聚合物(cyclic olefin copolymer,COC)。上述這些非氟聚合物應用於製作駐極體振動板時是較含氟聚合物應用於製作駐極體揚聲器容易得多。然而,由這些非氟聚合物製作的駐極體的最初高表面電壓,會相當快速地下降,特別於高濕度時。因此,實有必要製作一種非氟聚合物駐極體,其駐極體特性可維持一較長時間週期。However, in order for an electret speaker to enhance its acoustic fidelity and low distortion, it requires an electret material with excellent electret characteristics and a process that requires careful handling to manufacture. A thin electret-metal-electret structure. It is known that electrets can be made from different polymers. An electric charge is generated in the polymer electret film by a continuous current corona treatment. The above different polymers include fluoropolymers, such as poly-tetrafluoroethylene (PTFE) and fluorinated ethylene propylene (FEP), which can enhance stable residence even under high temperature and high humidity. Polar body characteristics. However, fluoropolymers can be relatively expensive and require specific process technologies. The fluoropolymer surface has a low coefficient of friction, resulting in no grip or stick-slip characteristics. Therefore, these fluoropolymers do not adhere to metals and are not suitable for use in electret speaker systems. An electret vibrating plate. It is also known to make electrets from non-fluoropolymers, such as polystyrene (PS), polycarbonate (PC), polyvinyl chloride (PVC), polymethyl methacrylate ( Polymethylmethacrylate, PMMA) and cyclic olefin copolymer (COC). The use of these non-fluoropolymers described above in the fabrication of electret vibrating plates is much easier than the use of fluoropolymers in the fabrication of electret speakers. However, the initial high surface voltage of the electret made from these non-fluoropolymers drops quite rapidly, especially at high humidity. Therefore, it is necessary to produce a non-fluoropolymer electret whose electret characteristics can be maintained for a long period of time.
美國專利第4,654,546號及第6,852,402號揭露一種由聚丙烯製作的多孔鐵駐極體薄膜(cellular ferroelectret film),在電暈充電的過程中,電場導致每一聚合物晶胞內產生介電崩潰,介電崩潰儲存相同或相異電荷於晶胞的相對內表面。多孔鐵駐極體的每一晶胞其側壁具有扮演類似一偶極的空間電荷,因此,多孔鐵駐極體扮演類似一偶極駐極體,其具有一大偶極矩且較固態駐極體具有更佳駐極體特性。A porous ferroelectret film made of polypropylene, which causes a dielectric collapse in each polymer cell during corona charging, is disclosed in U.S. Patent Nos. 4,654,546 and 6,852,402. Dielectric collapse stores the same or different charges on the opposite inner surface of the unit cell. Each cell of a porous iron electret has a space charge that acts like a dipole. Therefore, the porous iron electret acts like a dipole electret with a large dipole moment and a solid-state electret. The body has better electret characteristics.
習知技藝中,多孔鐵駐極體的孔洞是由包含例如矽酸鹽微細外來顆粒的聚合物進行聚合物高度拉伸時自發性開孔所形成的。同時或依序以兩垂直方向拉伸,以形成具有透鏡形狀孔洞的薄膜。由於電漿電子無法足夠加速,以離子化氣體分子,致孔洞對於藉由內部微電漿放電的有效充電來說常常太過淺碟。此外,當使用一薄膜拉伸技術製作一多孔鐵駐極體時,薄膜厚度的控制亦相當困難。In the prior art, the pores of the porous iron electret are formed by spontaneous opening of the polymer when the polymer is highly stretched by a polymer containing, for example, fine foreign particles of citrate. The film is stretched simultaneously or sequentially in two perpendicular directions to form a film having a lens-shaped hole. Since the plasma electrons are not sufficiently accelerated to ionize the gas molecules, the pores are often too shallow for efficient charging by internal microplasma discharge. In addition, when a porous iron electret is fabricated using a film stretching technique, film thickness control is also quite difficult.
本發明之一實施例,提供一種駐極體薄膜的製作方法,包括:提供一含聚合物之溶液,該含聚合物之溶液包括至少一聚合物材料,至少一溶劑,以及至少一介面活性劑;塗覆該含聚合物之溶液,以提供一濕潤聚合物薄膜;移除該濕潤聚合物薄膜中至少一部分之溶劑,以提供一聚合物薄膜;以及對該聚合物薄膜進行一電暈充電,以形成該駐極體薄膜。An embodiment of the present invention provides a method for fabricating an electret film, comprising: providing a polymer-containing solution, the polymer-containing solution comprising at least one polymer material, at least one solvent, and at least one surfactant. Coating the polymer-containing solution to provide a wet polymer film; removing at least a portion of the solvent from the wet polymer film to provide a polymer film; and subjecting the polymer film to a corona charging, To form the electret film.
本發明之一實施例,提供一種揚聲器,包括:一音頻訊號輸入,其具有一第一訊號源端與一第二訊號源端,該音頻訊號輸入用以接受一音頻訊號;兩電極,被設置為彼此分離;以及一駐極體薄膜,包括至少一駐極體層(electret layer),且遠端耦合於該兩電極之間。值得注意的是,該兩電極之一第一電極與該第一訊號源端耦合,該兩電極之一第二電極與該第二訊號源端耦合。該駐極體薄膜與該第一電極及該第二電極相互作用,以回應由該第一訊號源端與該第二訊號源端提供的音頻訊號。此外,該駐極體薄膜藉由振動以產生聲音。在一實施例中,該駐極體層包括一聚合物層,其具有複數個孔洞且由一濕潤聚合物薄膜所形成。An embodiment of the present invention provides a speaker, comprising: an audio signal input having a first signal source end and a second signal source end, the audio signal input for receiving an audio signal; and two electrodes are set Separating from each other; and an electret film comprising at least one electret layer and a distal end coupled between the two electrodes. It is noted that one of the two electrodes is coupled to the first signal source, and one of the two electrodes is coupled to the second signal source. The electret film interacts with the first electrode and the second electrode to respond to an audio signal provided by the first signal source and the second signal source. Further, the electret film is vibrated to generate sound. In one embodiment, the electret layer comprises a polymer layer having a plurality of pores and formed from a wet polymer film.
為了讓本發明能更明顯易懂,下文特舉實施例,並配合所附圖示,作詳細說明如下:In order to make the invention more apparent and obvious, the following detailed description of the embodiments and the accompanying drawings
本發明之一實施例中,可於非氟聚合物薄膜內產生孔洞,藉此改善非氟聚合物駐極體薄膜的駐極體特性。在一實施例中,孔洞形狀可類似球狀,且其內表面可包含部分放電。一駐極體揚聲器可由一非氟聚合物駐極體薄膜的駐極體振動板所製作。本發明之一實施例,可提供一種多孔非氟聚合物駐極體薄膜的製作方法。In one embodiment of the invention, voids can be created in the non-fluoropolymer film, thereby improving the electret characteristics of the non-fluoropolymer electret film. In an embodiment, the shape of the hole may be spherical like and the inner surface may comprise a partial discharge. An electret speaker can be fabricated from an electret vibrating plate of a non-fluoropolymer electret film. In one embodiment of the present invention, a method of fabricating a porous non-fluoropolymer electret film can be provided.
本發明之一實施例係關於一非氟聚合物駐極體薄膜,其由一含聚合物的溶液所形成。含聚合物的溶液可包括至少一聚合物材料與至少一介面活性劑。聚合物材料可包括一或多種環烯烴共聚合物(cyclic olefin copolymer,COC)、聚苯乙烯(polystyrene,PS)、聚碳酸酯(polycarbonate,PC)、聚甲基丙烯酸甲酯(polymethylmethacrylate,PMMA)、聚氯乙烯(polyvinyl chloride,PVC)、聚亞醯胺(polyimide,PI)、聚醚醯亞胺(polyetherimide,PEI)、高密度聚乙烯(high density polyethylene,HDPE)與聚丙烯(polypropylene,PP)。介面活性劑可包括一或多種(n+1)-羥基烷酸((n+1)-hydroxy-alkanoic acid)、(n+1)-胺基烷酸((n+1)-amino-alkanoic acid)、HO-(CH2 )n -COOH、2,3-雙-(n-羥基-烷氧基)-琥拍酸(2,3-bis(n-hydroxy-alkyloxy)-succinic acid)、2,3-雙-(n-胺基-烷氧基)-琥珀酸(2,3-bis(n-amino-alkyloxy)-succinic acid)、(n+1)-三唑烷酸((n+1)-triazol-alkanoic acid)、2,3-雙-(n-三唑-烷氧基)-琥珀酸(2,3-bis(n-triazol-alkyloxy)-succinic acid)、十二烷基硫酸鈉(sodium dodecyl sulfate,SDS)、兩性介面活性劑、非離子型介面活性劑、陰離子型介面活性劑與陽離子型介面活性劑。為溶解聚合物材料與介面活性劑於溶液形態,於含聚合物的溶液中可加入一或多種的溶劑,例如丙酮、四氫呋喃(tetrahydrofuran,THF)、甲苯(toluene)、二甲苯(xylene)、對二甲苯(p-xylene)、二氯甲烷(dichloromethane)、三氯甲烷(chloroform)、n-甲基吡咯酮(n-methylpyrrolidone,NMP)與二甲基甲醯胺(dimethylformamide,DMF)。第2圖顯示一長鏈疏水碳氫化合物之分子式。此碳氫化合物可具有一高極性羧酸官能基(carboxylic acid group)[-COOH]於一端;在另一端,其可為羥基官能基或胺基官能基,因此可生成(n+1)-羥基烷酸或(n+1)-胺基烷酸。在本發明之一實施例中,混合之聚合物溶液可包括羥基酸化合物(hydroxyl acid compound),例如8-羥基辛酸的介面活性劑與環烯烴共聚合物的聚合物材料。具體而言,以重量濃度1-10,000ppm之羥基酸化合物可溶於四氫呋喃中而產生溶液A1。重量百分比濃度0.1-15之環烯烴共聚合物可溶於一溶劑例如甲苯、二甲苯或對二甲苯中,以產生溶液B1。在一例子中,環烯烴共聚合物可為德國TOPAS環烯烴共聚合物或Arton環烯烴共聚合物中的至少一個,包括但不限於品級8007、6013、5013、5017與6017。溶液A1和B1根據一定比例進行混合,使得所得混合之聚合物溶液中,溶液A1以重量計算約為0.01-30,000ppm。在一實施例中,8-羥基辛酸可具有如下之結構HO-(CH2 )n -COOH,n=7。One embodiment of the invention is directed to a non-fluoropolymer electret film formed from a polymer-containing solution. The polymer-containing solution can include at least one polymeric material and at least one interfacing agent. The polymer material may include one or more cyclic olefin copolymer (COC), polystyrene (PS), polycarbonate (PC), polymethylmethacrylate (PMMA). , polyvinyl chloride (PVC), polyimide (PI), polyetherimide (PEI), high density polyethylene (HDPE) and polypropylene (polypropylene, PP ). The surfactant may include one or more (n+1)-hydroxy-alkanoic acid, (n+1)-aminoalkanoic acid ((n+1)-amino-alkanoic Acid), HO-(CH 2 ) n -COOH, 2,3-bis-(n-hydroxy-alkyloxy)-succinic acid, 2,3-bis(n-amino-alkyloxy)-succinic acid, (n+1)-triazolic acid ((n +1)-triazol-alkanoic acid), 2,3-bis(n-triazol-alkyloxy)-succinic acid, dodecane Sodium sulphate (SDS), amphoteric surfactant, nonionic surfactant, anionic surfactant and cationic surfactant. In order to dissolve the polymer material and the surfactant in a solution form, one or more solvents may be added to the polymer-containing solution, such as acetone, tetrahydrofuran (THF), toluene, xylene, and P-xylene, dichloromethane, chloroform, n-methylpyrrolidone (NMP) and dimethylformamide (DMF). Figure 2 shows the molecular formula of a long chain hydrophobic hydrocarbon. The hydrocarbon may have a highly polar carboxylic acid group [-COOH] at one end; at the other end, it may be a hydroxy functional group or an amine functional group, thus generating (n+1)- Hydroxyalkanoic acid or (n+1)-aminoalkanoic acid. In one embodiment of the invention, the mixed polymer solution may comprise a hydroxy acid compound, such as a polymeric material of an 8-hydroxyoctanoic acid interfacial agent and a cyclic olefin copolymer. Specifically, the hydroxy acid compound having a weight concentration of 1-10,000 ppm is soluble in tetrahydrofuran to produce a solution A1. The cyclic olefin copolymer having a weight percentage of 0.1-15 is soluble in a solvent such as toluene, xylene or p-xylene to produce solution B1. In one example, the cycloolefin copolymer can be German TOPAS Cycloolefin copolymer or Arton At least one of the cyclic olefinic copolymers includes, but is not limited to, grades 8007, 6013, 5013, 5017, and 6017. The solutions A1 and B1 are mixed according to a ratio such that the solution A1 is about 0.01 to 30,000 ppm by weight in the resulting mixed polymer solution. In one embodiment, the 8-hydroxyoctanoic acid may have the structure HO-(CH 2 ) n -COOH, n=7.
在本發明之另一實施例中,混合之聚合物溶液可包括羥基酸化合物,例如8-羥基辛酸的介面活性劑與聚苯乙烯、聚碳酸酯、聚氯乙烯與聚甲基丙烯酸甲酯聚合物材料中至少一種。具體而言,1-10,000ppm之羥基酸化合物可溶解於例如二氯甲烷或三氯甲烷溶液中以產生溶液A2。聚合物,如聚苯乙烯、聚碳酸酯、聚氯乙烯或聚甲基丙烯酸甲酯,以0.1-10重量百分比溶解於一溶劑以形成溶液B2-1、B2-2、B2-3與B2-4。在一例子中,溶劑可為三氯甲烷。溶液A2可以與溶液B2-1、B2-2、B2-3或B2-4按一定比例混合,使所得混合之聚合物溶液中,溶液A2以重量計算約為0.01-30,000ppm。In another embodiment of the present invention, the mixed polymer solution may include a hydroxy acid compound, such as an 8-hydroxyoctanoic acid surfactant, polymerized with polystyrene, polycarbonate, polyvinyl chloride, and polymethyl methacrylate. At least one of the materials. Specifically, 1-10,000 ppm of the hydroxy acid compound can be dissolved in, for example, a dichloromethane or chloroform solution to produce a solution A2. A polymer, such as polystyrene, polycarbonate, polyvinyl chloride or polymethyl methacrylate, is dissolved in a solvent in an amount of 0.1 to 10% by weight to form solutions B2-1, B2-2, B2-3 and B2- 4. In one example, the solvent can be chloroform. The solution A2 may be mixed with the solution B2-1, B2-2, B2-3 or B2-4 in a ratio such that the solution A2 is about 0.01 to 30,000 ppm by weight in the obtained mixed polymer solution.
第3圖顯示一長鏈疏水碳氫化合物之分子式。此碳氫化合物具有兩個高極性羧酸官能基[-COOH]於一端;在另一端,其可具有羥基官能基或胺基官能基,因此可生成2,3-雙-(n-羥基-烷氧基)琥珀酸與2,3-雙-(n-胺基-烷氧基)琥珀酸。在本發明另一實施例中,混合之聚合物溶液可包括2,3-雙-(n-羥基-烷氧基)琥珀酸與2,3-雙-(n-胺基-烷氧基)的至少一種。以重量計算1-10,000ppm的2,3-雙-(n-羥基-烷氧基)-琥珀酸或2,3-雙-(n-胺基-烷氧基)-琥珀酸可溶解於溶劑中,以形成溶液A3。在一實施例中,溶劑可為四氫呋喃、二氯甲烷或三氯甲烷。溶液A3可以與B2-1、B2-2、B2-3或B2-4按一定比例混合,使所得混合之聚合物溶液中,溶液A3以重量計約為0.01-30,000ppm。Figure 3 shows the molecular formula of a long chain hydrophobic hydrocarbon. This hydrocarbon has two highly polar carboxylic acid functional groups [-COOH] at one end; at the other end, it may have a hydroxy functional group or an amine functional group, thus generating 2,3-bis-(n-hydroxy- Alkoxy)succinic acid and 2,3-bis-(n-amino-alkoxy)succinic acid. In another embodiment of the present invention, the mixed polymer solution may include 2,3-bis-(n-hydroxy-alkoxy)succinic acid and 2,3-bis-(n-amino-alkoxy). At least one of them. 1 to 10,000 ppm by weight of 2,3-bis-(n-hydroxy-alkoxy)-succinic acid or 2,3-bis-(n-amino-alkoxy)-succinic acid soluble in solvent Medium to form solution A3. In one embodiment, the solvent can be tetrahydrofuran, dichloromethane or chloroform. The solution A3 may be mixed with B2-1, B2-2, B2-3 or B2-4 in a ratio such that the solution A3 is from about 0.01 to 30,000 ppm by weight in the resulting mixed polymer solution.
在一實施例中,利用一含聚合物的溶液製作一駐極體薄膜的方法可包括以下步驟。將大約15wt%的Topas環烯烴共聚合物8007小球溶於一甲苯溶液(例如甲苯,Acros,99%,密度約0.866g/mL)。加熱上述溶液至80℃及/或攪拌,以提供溶液A。於室溫(約25℃)下,將大約0.01~1wt%的8-羥基辛酸溶於四氫呋喃(例如四氫呋喃,Aldrich,99%,密度約0.899g/mL),以提供溶液B。溶液A與溶液B可以95~5的重量比混合。在一實施例中,將混合溶液置於一攪拌器約10分鐘與一超音波裝置(例如超音波攪拌器或清洗器)約5分鐘,得到溶液C。In one embodiment, the method of making an electret film using a polymer-containing solution can include the following steps. Will be about 15wt% of Topas The cycloolefin copolymer 8007 pellet was dissolved in a toluene solution (e.g., toluene, Acros, 99%, density about 0.866 g/mL). The above solution was heated to 80 ° C and/or stirred to provide solution A. About 0.01 to 1% by weight of 8-hydroxyoctanoic acid is dissolved in tetrahydrofuran (e.g., tetrahydrofuran, Aldrich, 99%, density about 0.899 g/mL) at room temperature (about 25 ° C) to provide solution B. Solution A and solution B may be mixed in a weight ratio of 95 to 5. In one embodiment, the mixed solution is placed in an agitator for about 10 minutes with an ultrasonic device (such as an ultrasonic mixer or washer) for about 5 minutes to obtain solution C.
將溶液C旋轉塗佈於一銅箔基板,例如利用一旋轉塗佈裝置,以大約1,500rpm的條件操作約2次,每次約20秒,以提供一濕潤聚合物薄膜。濕潤聚合物薄膜以室溫或20~25℃乾燥約30分鐘,亦可置於一真空烘箱(約0.1托)或一壓力低於大氣壓的烘箱中加熱約8小時。薄膜中大部分或全部的溶劑或水會蒸散,可得到一具有平均尺寸約1微米孔洞的聚合物薄膜。在一實施例中,多孔聚合物薄膜的厚度約為8±1微米。Solution C is spin coated onto a copper foil substrate, for example, using a spin coating apparatus, at about 1,500 rpm for about 2 times, about 20 seconds each time, to provide a wet polymer film. The wet polymer film is dried at room temperature or 20 to 25 ° C for about 30 minutes, and may be placed in a vacuum oven (about 0.1 Torr) or an oven at a pressure lower than atmospheric pressure for about 8 hours. Most or all of the solvent or water in the film will evaporate, resulting in a polymer film having pores having an average size of about 1 micron. In one embodiment, the porous polymer film has a thickness of about 8 ± 1 micron.
於薄膜形成後,進行一充電製程,例如在一實施例中,利用一具有一針板(偏壓-20KV)的放電裝置,以形成一駐極體薄膜。放電板或針與薄膜之間的距離大約可為4公分。在一實施例中,充電製程可在溫度約20~25℃,相對濕度(relative humidity,RH)約45~50%的條件下進行。溫度、距離、相對濕度及放電偏壓可依據不同因素加以調整,例如上述參數值、其他外部條件、薄膜材料、厚度或性質及預期的駐極體特性。After the film is formed, a charging process is performed. For example, in one embodiment, a discharge device having a pin plate (bias of -20 KV) is used to form an electret film. The distance between the discharge plate or needle and the film can be approximately 4 cm. In one embodiment, the charging process can be carried out at a temperature of about 20 to 25 ° C and a relative humidity (RH) of about 45 to 50%. Temperature, distance, relative humidity, and discharge bias can be adjusted based on various factors, such as the above parameter values, other external conditions, film materials, thickness or properties, and expected electret characteristics.
在一實施例中,利用一含聚合物的溶液製作一駐極體薄膜的方法可包括以下步驟。將大約15wt%的Topas環烯烴共聚合物8007小球溶於一甲苯溶液(例如甲苯,Acros,99%,密度約0.866g/mL)。加熱上述溶液至80℃及/或攪拌,以提供溶液A。於室溫(約25℃)下,將大約1wt%的2-(6-硫醇己基)丙二酸(2-(6-mercaptohexyl)malonic acid)溶於四氫呋喃(例如四氫呋喃,Aldrich,99%,密度約0.899g/mL),以提供溶液B。溶液A與溶液B可以90~10的重量比混合。在一實施例中,將混合溶液置於一攪拌器約10分鐘與一超音波裝置(例如超音波攪拌器或清洗器)約5分鐘,得到溶液C。In one embodiment, the method of making an electret film using a polymer-containing solution can include the following steps. Will be about 15wt% of Topas The cycloolefin copolymer 8007 pellet was dissolved in a toluene solution (e.g., toluene, Acros, 99%, density about 0.866 g/mL). The above solution was heated to 80 ° C and/or stirred to provide solution A. About 1% by weight of 2-(6-mercaptohexyl)malonic acid is dissolved in tetrahydrofuran (for example, tetrahydrofuran, Aldrich, 99%, at room temperature (about 25 ° C). The density was about 0.899 g/mL) to provide solution B. Solution A and solution B may be mixed in a weight ratio of 90 to 10. In one embodiment, the mixed solution is placed in an agitator for about 10 minutes with an ultrasonic device (such as an ultrasonic mixer or washer) for about 5 minutes to obtain solution C.
將溶液C旋轉塗佈於一銅箔基板,例如利用一旋轉塗佈裝置,以大約1,500rpm的條件操作約2次,每次約20秒,以提供一濕潤聚合物薄膜。濕潤聚合物薄膜以室溫或20~25℃乾燥約30分鐘,亦可置於一真空烘箱(約0.1托)或一壓力低於大氣壓的烘箱中加熱約8小時。薄膜中大部分或全部的溶劑或水會蒸散,可得到一具有平均尺寸約100奈米孔洞的聚合物薄膜。在一實施例中,多孔聚合物薄膜的厚度約為8±1微米。Solution C is spin coated onto a copper foil substrate, for example, using a spin coating apparatus, at about 1,500 rpm for about 2 times, about 20 seconds each time, to provide a wet polymer film. The wet polymer film is dried at room temperature or 20 to 25 ° C for about 30 minutes, and may be placed in a vacuum oven (about 0.1 Torr) or an oven at a pressure lower than atmospheric pressure for about 8 hours. Most or all of the solvent or water in the film will evaporate to provide a polymer film having pores having an average size of about 100 nm. In one embodiment, the porous polymer film has a thickness of about 8 ± 1 micron.
於薄膜形成後,進行一充電製程,例如在一實施例中,利用一具有一針板(偏壓-20KV)的放電裝置,以形成一駐極體薄膜。放電板或針與薄膜之間的距離大約可為4公分。在一實施例中,充電製程可在溫度約20~25℃,相對濕度(relative humidity,RH)約45~50%的條件下進行。溫度、距離、相對濕度及放電偏壓可依據不同因素加以調整,例如上述參數值、其他外部條件、薄膜材料、厚度或性質及預期的駐極體特性。After the film is formed, a charging process is performed. For example, in one embodiment, a discharge device having a pin plate (bias of -20 KV) is used to form an electret film. The distance between the discharge plate or needle and the film can be approximately 4 cm. In one embodiment, the charging process can be carried out at a temperature of about 20 to 25 ° C and a relative humidity (RH) of about 45 to 50%. Temperature, distance, relative humidity, and discharge bias can be adjusted based on various factors, such as the above parameter values, other external conditions, film materials, thickness or properties, and expected electret characteristics.
在一實施例中,利用一含聚合物的溶液製作一駐極體薄膜的方法可包括以下步驟。將大約15wt%的Topas環烯烴共聚合物8007小球溶於一甲苯溶液(例如甲苯,Acros,99%,密度約0.866g/mL)。加熱上述溶液至80℃及/或攪拌,以提供溶液A。於室溫(約25℃)下,將大約1wt%的2-(10-羥基癸基)丙二酸(2-(10-hydroxydecyl)malonic acid)溶於四氫呋喃(例如四氫呋喃,Aldrich,99%,密度約0.899g/mL),以提供溶液B。溶液A與溶液B可以95~5的重量比混合。在一實施例中,將混合溶液置於一攪拌器約10分鐘與一超音波裝置(例如超音波攪拌器或清洗器)約5分鐘,得到溶液C。In one embodiment, the method of making an electret film using a polymer-containing solution can include the following steps. Will be about 15wt% of Topas The cycloolefin copolymer 8007 pellet was dissolved in a toluene solution (e.g., toluene, Acros, 99%, density about 0.866 g/mL). The above solution was heated to 80 ° C and/or stirred to provide solution A. About 1% by weight of 2-(10-hydroxydecyl)malonic acid is dissolved in tetrahydrofuran (for example, tetrahydrofuran, Aldrich, 99%, at room temperature (about 25 ° C) The density was about 0.899 g/mL) to provide solution B. Solution A and solution B may be mixed in a weight ratio of 95 to 5. In one embodiment, the mixed solution is placed in an agitator for about 10 minutes with an ultrasonic device (such as an ultrasonic mixer or washer) for about 5 minutes to obtain solution C.
將溶液C旋轉塗佈於一銅箔基板,例如利用一旋轉塗佈裝置,以大約1,500rpm的條件操作約2次,每次約20秒,以提供一濕潤聚合物薄膜。濕潤聚合物薄膜以室溫或20~25℃乾燥約30分鐘,亦可置於一真空烘箱(約0.1托)或一壓力低於大氣壓的烘箱中加熱約8小時。薄膜中大部分或全部的溶劑或水會蒸散,可得到一具有平均尺寸約400奈米孔洞的聚合物薄膜。在一實施例中,多孔聚合物薄膜的厚度約為8±1微米。Solution C is spin coated onto a copper foil substrate, for example, using a spin coating apparatus, at about 1,500 rpm for about 2 times, about 20 seconds each time, to provide a wet polymer film. The wet polymer film is dried at room temperature or 20 to 25 ° C for about 30 minutes, and may be placed in a vacuum oven (about 0.1 Torr) or an oven at a pressure lower than atmospheric pressure for about 8 hours. Most or all of the solvent or water in the film will evaporate to provide a polymer film having pores having an average size of about 400 nm. In one embodiment, the porous polymer film has a thickness of about 8 ± 1 micron.
於薄膜形成後,進行一充電製程,例如在一實施例中,利用一具有一針板(偏壓-20KV)的放電裝置,以形成一駐極體薄膜。放電板或針與薄膜之間的距離大約可為4公分。在一實施例中,充電製程可在溫度約20~25℃,相對濕度(relative humidity,RH)約45~50%的條件下進行。溫度、距離、相對濕度及放電偏壓可依據不同因素加以調整,例如上述參數值、其他外部條件、薄膜材料、厚度或性質及預期的駐極體特性。After the film is formed, a charging process is performed. For example, in one embodiment, a discharge device having a pin plate (bias of -20 KV) is used to form an electret film. The distance between the discharge plate or needle and the film can be approximately 4 cm. In one embodiment, the charging process can be carried out at a temperature of about 20 to 25 ° C and a relative humidity (RH) of about 45 to 50%. Temperature, distance, relative humidity, and discharge bias can be adjusted based on various factors, such as the above parameter values, other external conditions, film materials, thickness or properties, and expected electret characteristics.
在本發明之一實施例中,混合之聚合物溶液可包括至少兩種不同之聚合物溶液。重量百分比為1-15的環烯烴共聚合物可溶解於溶劑中以形成溶液A4。不同類型的聚合物材料,如聚苯乙烯可溶解於溶劑中以形成溶液B4。在一例子中,溶劑可以是甲苯、二甲苯與對二甲苯中的至少一種。以適當比例混合溶液A4和B4,由此得到一混合溶液。在乾燥與電暈充電(corona charge)製程後,可以觀察到混合聚合物的表面電壓較原始聚合物的表面電壓有所增加。第5圖為顯示環烯烴共聚物和聚苯乙烯混合物的表面電壓的曲線圖。如第5圖所示,混合之環烯烴共聚合物/聚苯乙烯於一85/15或15/85的比例中,其表面電壓至少增加190%。可以發現,混合聚合物具有結晶介面,且因此改善電荷儲存能力與穩定度。In one embodiment of the invention, the mixed polymer solution may comprise at least two different polymer solutions. The cyclic olefinic copolymer having a weight percentage of 1-15 can be dissolved in a solvent to form solution A4. Different types of polymeric materials, such as polystyrene, are soluble in the solvent to form solution B4. In an example, the solvent may be at least one of toluene, xylene, and p-xylene. The solutions A4 and B4 were mixed in an appropriate ratio, thereby obtaining a mixed solution. After the drying and corona charge process, it was observed that the surface voltage of the mixed polymer increased compared to the surface voltage of the original polymer. Figure 5 is a graph showing the surface voltage of a cyclic olefin copolymer and a polystyrene mixture. As shown in Fig. 5, the mixed cycloolefin copolymer/polystyrene has a surface voltage of at least 190% in a ratio of 85/15 or 15/85. It has been found that the mixed polymer has a crystalline interface and thus improves charge storage capacity and stability.
在一實施例中,聚碳酸酯、聚甲基丙烯酸甲酯與聚氯乙烯之至少一個可溶於一溶劑,例如甲苯、二甲苯或對二甲苯中。此外,聚乙烯與聚丙烯之至少一個在約120℃溫度下溶解於對二甲苯中,以一適合的比例將這些溶液進行混合,由此產生一混合溶液。與上述實施例相似,在另一實施例中,聚亞醯胺與聚醚醯亞胺可溶於一溶劑中,例如n-甲基呲咯酮或二甲基甲醯胺,以一適合的比例將這些溶液進行混合,由此產生一混合溶液。In one embodiment, at least one of polycarbonate, polymethyl methacrylate and polyvinyl chloride is soluble in a solvent such as toluene, xylene or p-xylene. Further, at least one of polyethylene and polypropylene is dissolved in p-xylene at a temperature of about 120 ° C, and these solutions are mixed in a suitable ratio, thereby producing a mixed solution. Similar to the above embodiment, in another embodiment, the polymethyleneamine and the polyetherimine are soluble in a solvent such as n-methylpyrrolidone or dimethylformamide, to a suitable one. These solutions are mixed in proportion, thereby producing a mixed solution.
在本發明另一實施例中,於上述實施例中提到的聚合物溶液可包括或更包括一高極性羧酸[-COOH],以改善駐極體性質。在一實施例中,於上述實施例所提到的聚合物溶液可塗覆於一不織布(non-woven)材料上,如聚乙烯(polyethylene,PE)、聚丙烯(polypropylene,PP)、聚對苯二甲酸乙二酯(poly(ethylene terephthalate),PET)、尼龍(nylon)、聚丙烯與尼龍的混合物或聚丙烯與聚對苯二甲酸乙二酯的混合物。在一實施例中,聚合物溶液可更包括奈米尺寸顆粒或微米尺寸纖維。在一例子中,顆粒或纖維可為聚對苯二甲酸乙烯酯(poly(ethylene terephthalate),PET)、聚四氟乙烯(polytetrafluoroethylene,PTFE)、氟化乙丙烯(fluorinated ethylene propylene,FEP)、二氧化矽(silicon dioxide)、氧化鋁、二氧化鈦與高密度聚乙烯的至少一種。In another embodiment of the invention, the polymer solution referred to in the above examples may include or include a highly polar carboxylic acid [-COOH] to improve the electret properties. In one embodiment, the polymer solution mentioned in the above embodiments may be applied to a non-woven material such as polyethylene (PE), polypropylene (PP), poly pair. Poly(ethylene terephthalate, PET), nylon (nylon), a mixture of polypropylene and nylon or a mixture of polypropylene and polyethylene terephthalate. In an embodiment, the polymer solution may further comprise nano-sized particles or micron-sized fibers. In one example, the particles or fibers may be poly(ethylene terephthalate, PET), polytetrafluoroethylene (PTFE), fluorinated ethylene propylene (FEP), At least one of silicon dioxide, aluminum oxide, titanium dioxide, and high density polyethylene.
為製成駐極體層,可利用旋轉塗佈(spin coating)、網版印刷(screen-printing)、噴霧塗佈(spraying coating)、濺鍍、蒸鍍與刮刀塗佈(scraping)技術的至少之一塗覆上述混合溶液於一表面或一下方層,以形成一濕潤聚合物薄膜。之後例如於一受控制環境或一控制溫度中乾燥此濕潤聚合物薄膜。在一實施例中,可提供一溫度20~25℃的環境,然而,可改變環境條件,以控制乾燥製程,例如使用一如上所述的烘箱。乾燥製程允許移除濕潤聚合物薄膜中至少一部分的溶劑,以提供一聚合物薄膜。在乾燥製程中,聚合物與高極性化合物可形成一自我組裝(self-assembling)結構,其具有於奈米至微米尺寸範圍之孔洞。在一實施例中,依上述製程所形成的聚合物薄膜具有複數個尺寸介於約數奈米的孔洞,例如10奈米至約10微米。此種結構可增加混合聚合物之駐極體區域。To form an electret layer, at least a spin coating, a screen-printing, a spray coating, a sputtering, an evaporation, and a scraping technique can be utilized. The mixed solution is applied to a surface or an underlying layer to form a wet polymer film. The wet polymer film is then dried, for example, in a controlled environment or at a controlled temperature. In one embodiment, an environment at a temperature of 20 to 25 ° C can be provided, however, environmental conditions can be varied to control the drying process, such as using an oven as described above. The drying process allows removal of at least a portion of the solvent from the wet polymeric film to provide a polymeric film. In the drying process, the polymer and the highly polar compound form a self-assembling structure with pores ranging from nanometer to micrometer size. In one embodiment, the polymeric film formed by the above process has a plurality of pores having a size between about several nanometers, such as from 10 nanometers to about 10 microns. This configuration increases the electret region of the mixed polymer.
在一實施例中,當介面活性劑濃度高於臨界微胞濃度(critical micelle concentration,CMC)時,於含聚合物的溶液中會形成聚合物/介面活性劑微胞,而形成的孔洞在一電暈充電過程中可維持介電崩潰,改善非氟聚合物駐極體薄膜的駐極體特性。在一實施例中,聚合物材料與介面活性劑的重量比約為0.01~105 ppm。In one embodiment, when the concentration of the surfactant is higher than the critical micelle concentration (CMC), the polymer/interactivator micelles are formed in the polymer-containing solution, and the formed pores are in The dielectric collapse can be maintained during corona charging to improve the electret characteristics of the non-fluoropolymer electret film. In one embodiment, the weight of the polymer material to the interface of the active agent ratio of about 0.01 ~ 10 5 ppm.
此外,藉由一充電製程可改善聚合物層之駐極體特性或導入聚合物層的電荷,例如一電暈充電製程。一非氟駐極體薄膜可藉由上述揭露的製程而形成。在一例子中,可將環烯烴共聚合物之駐極體特性提高至140%,如第6圖所示。可藉由連續式捲繞(roll-to-roll)製程來形成一駐極體層,如第4圖中之1a與1b。形成之駐極體層的厚度約為0.5-100μm。In addition, the electret characteristics of the polymer layer or the charge introduced into the polymer layer can be improved by a charging process, such as a corona charging process. A non-fluorine electret film can be formed by the process disclosed above. In one example, the electret characteristics of the cyclic olefin copolymer can be increased to 140%, as shown in FIG. An electret layer can be formed by a roll-to-roll process, such as 1a and 1b in FIG. The electret layer formed has a thickness of about 0.5 to 100 μm.
參見第4圖,薄膜4包括兩個駐極體層1a與1b及一位於駐極體層1a與1b之間的導電層2。駐極體層可利用上述相關之製程來形成。導電層2可為金、銀、鋁、銅或其他導電材料來製成。可藉由噴霧塗佈(spraying coating)、旋轉塗佈、濺鍍(sputtering)、蒸鍍(evaporation)與網版印刷製程中的至少一種將導電層2覆蓋於駐極體層1a上,以形成結構3。在一實施例中,使用電子束蒸鍍(e-beam evaporator)將金屬層蒸鍍至駐極體層上。經由一真空熱壓合(vacuum thermal compression)、機械壓合或連續式捲繞(roll-to-roll)製程技術將駐極體層1b形成於結構3之上,以形成一駐極體-金屬-駐極體薄膜。一電暈充電製程可增加薄膜4之電荷儲存穩定度。在此考量下,薄膜4可適用於如駐極體揚聲器使用之振動板。在一例子中,一靜電揚聲器包括薄膜4與兩電極,電極與一音頻訊號輸入電性耦合。電極具有開口以允許聲波通過開口。薄膜4被夾在電極之間,且各個電極與薄膜4之間都具有氣隙。薄膜4可為一與電極遠端耦合且與電極絕緣的促動器,以便與電極相互作用,回應來自音頻訊號輸入的音頻訊號,並振動以產生聲波。Referring to Fig. 4, the film 4 comprises two electret layers 1a and 1b and a conductive layer 2 between the electret layers 1a and 1b. The electret layer can be formed using the related processes described above. Conductive layer 2 can be made of gold, silver, aluminum, copper or other electrically conductive material. The conductive layer 2 may be coated on the electret layer 1a by at least one of spray coating, spin coating, sputtering, evaporation, and screen printing to form a structure 3. In one embodiment, the metal layer is evaporated onto the electret layer using an e-beam evaporator. The electret layer 1b is formed on the structure 3 via a vacuum thermal compression, mechanical press or roll-to-roll process to form an electret-metal Electret film. A corona charging process can increase the charge storage stability of the film 4. In this regard, the film 4 can be applied to a vibrating plate such as an electret speaker. In one example, an electrostatic speaker includes a membrane 4 and two electrodes, the electrodes being electrically coupled to an audio signal input. The electrode has an opening to allow sound waves to pass through the opening. The film 4 is sandwiched between the electrodes, and each of the electrodes and the film 4 has an air gap. The membrane 4 can be an actuator coupled to the distal end of the electrode and insulated from the electrode to interact with the electrode, to respond to an audio signal from the audio signal input, and to vibrate to produce an acoustic wave.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope is subject to the definition of the scope of the patent application attached.
1a、1b...駐極體層1a, 1b. . . Electret layer
2...導電層2. . . Conductive layer
3...結構3. . . structure
4...振動板或薄膜4. . . Vibrating plate or film
5a、5b...支持構件5a, 5b. . . Support component
51a、51b、52a、52b...絕緣元件51a, 51b, 52a, 52b. . . Insulating element
6a、6b...多孔電極6a, 6b. . . Porous electrode
61a、61b...開口61a, 61b. . . Opening
7a、7b...訊號源7a, 7b. . . Signal source
8a、8b...導線8a, 8b. . . wire
第1圖為先前技術之駐極體揚聲器的斷面圖。Figure 1 is a cross-sectional view of a prior art electret speaker.
第2圖為一疏水碳氫化合物之分子式。Figure 2 is a molecular formula of a hydrophobic hydrocarbon.
第3圖為一疏水碳氫化合物之分子式。Figure 3 is a molecular formula of a hydrophobic hydrocarbon.
第4圖顯示本發明一實施例駐極體揚聲器之部分斷面圖。Fig. 4 is a partial cross-sectional view showing an electret speaker according to an embodiment of the present invention.
第5圖為一曲線圖,其顯示環烯烴共聚合物與聚苯乙烯之混合物的表面電壓。Figure 5 is a graph showing the surface voltage of a mixture of a cyclic olefin copolymer and polystyrene.
第6圖為一表格,顯示於不同厚度中環烯烴共聚合物與混合之環烯烴共聚合物之表面電價。Figure 6 is a table showing the surface electricity valence of a cyclic olefin copolymer and a mixed cyclic olefin copolymer in different thicknesses.
1a、1b...駐極體層1a, 1b. . . Electret layer
2...導電層2. . . Conductive layer
3...結構3. . . structure
4...振動板或薄膜4. . . Vibrating plate or film
Claims (33)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/186,779 US8111847B2 (en) | 2008-01-02 | 2008-08-06 | Electret materials, electret speakers, and methods of manufacturing the same |
US12/422,784 US8776367B2 (en) | 2008-03-10 | 2009-04-13 | Method of manufacturing an electret film |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201008304A TW201008304A (en) | 2010-02-16 |
TWI462598B true TWI462598B (en) | 2014-11-21 |
Family
ID=44827408
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW098122211A TWI462598B (en) | 2008-08-06 | 2009-07-01 | Method of manufacturing electret films and loudspeakers comprising the same |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI462598B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI465118B (en) | 2009-10-22 | 2014-12-11 | Ind Tech Res Inst | Electret diaphragm and speaker using the same |
TWI626854B (en) * | 2016-11-24 | 2018-06-11 | 財團法人金屬工業研究發展中心 | Electret thin film and manufacturing method thereof |
CN115124837B (en) * | 2021-12-28 | 2023-05-09 | 苏州太湖电工新材料股份有限公司 | Polyimide composite film |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5256176A (en) * | 1990-03-12 | 1993-10-26 | Mitsui Petrochemical Industries, Ltd. | Film electret and an electret filter |
TW559844B (en) * | 2001-06-18 | 2003-11-01 | Toray Industries | Process and apparatus for production of electret products |
TWI268275B (en) * | 1999-09-24 | 2006-12-11 | 3M Innovative Properties Co | Fluorochemical oligomeric compound, polymer composition comprising same, shaped article comprising same and oily mist resistant electret filter medium comprising same |
TWI294250B (en) * | 2005-12-16 | 2008-03-01 | Ind Tech Res Inst |
-
2009
- 2009-07-01 TW TW098122211A patent/TWI462598B/en active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5256176A (en) * | 1990-03-12 | 1993-10-26 | Mitsui Petrochemical Industries, Ltd. | Film electret and an electret filter |
TWI268275B (en) * | 1999-09-24 | 2006-12-11 | 3M Innovative Properties Co | Fluorochemical oligomeric compound, polymer composition comprising same, shaped article comprising same and oily mist resistant electret filter medium comprising same |
TW559844B (en) * | 2001-06-18 | 2003-11-01 | Toray Industries | Process and apparatus for production of electret products |
TWI294250B (en) * | 2005-12-16 | 2008-03-01 | Ind Tech Res Inst |
Also Published As
Publication number | Publication date |
---|---|
TW201008304A (en) | 2010-02-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8776367B2 (en) | Method of manufacturing an electret film | |
TWI386074B (en) | Electret material, electret speakers, and methods of manufacturing the same | |
CN101654524B (en) | Electret materials, electret speakers, and methods of manufacturing the same | |
JP6071932B2 (en) | Electroacoustic conversion film | |
TWI465118B (en) | Electret diaphragm and speaker using the same | |
Mandal et al. | Improved performance of a polymer nanogenerator based on silver nanoparticles doped electrospun P (VDF–HFP) nanofibers | |
CN1993000B (en) | Electro-acoustic actuator and method for manufacture | |
US8641919B2 (en) | Piezoelectric compositions | |
TWI294250B (en) | ||
JP6196400B2 (en) | Electroacoustic conversion film | |
US20130026411A1 (en) | Piezoelectric polymer film element, in particular polymer foil, and process for the production thereof | |
CN104836473B (en) | Acquire the generator and sound transducer of acoustic energy | |
US9456283B2 (en) | Electrostatic electroacoustic transducer and fabricating methods for the same | |
TWI836088B (en) | Piezoelectric film | |
JP2014207391A (en) | Power generation element, power generation device, power generation unit, and power generation element installation method | |
TWI462598B (en) | Method of manufacturing electret films and loudspeakers comprising the same | |
TW201228409A (en) | Thin film electret, manufacturing method of thin film electret and voice broadcasting apparatus thereof | |
TWI827851B (en) | Polymer composite piezoelectric body, and piezoelectric film | |
WO2013015385A1 (en) | Electret and method for manufacturing same, and electrostatic induction type conversion element | |
KR20220116302A (en) | piezoelectric film | |
JP2013162051A (en) | Piezoelectric element made of fluororesin film and manufacturing method therefor | |
JP2012511443A (en) | Ferro-electret multilayer composite and method for producing ferro-electret multilayer composite with parallel tubular channels | |
Park et al. | Textile speaker using polyvinylidene fluoride/ZnO nanopillar on Au textile for enhancing the sound pressure level | |
KR20220004724A (en) | piezoelectric film | |
US10841709B2 (en) | Nanocomposite graphene polymer membrane assembly, and manufacturing method thereof |