TWI461230B - Filtration film for filtrating the blood serum and method for manufacturing the same and filtration device - Google Patents

Filtration film for filtrating the blood serum and method for manufacturing the same and filtration device Download PDF

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TWI461230B
TWI461230B TW099134138A TW99134138A TWI461230B TW I461230 B TWI461230 B TW I461230B TW 099134138 A TW099134138 A TW 099134138A TW 99134138 A TW99134138 A TW 99134138A TW I461230 B TWI461230 B TW I461230B
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filter
substrate
hole
filter film
film
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TW099134138A
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TW201215418A (en
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Yu Cheng Lin
Chia Hsien Yeh
Shian Chin Lai
Jia Wei Hong
Chun Han Wu
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Univ Nat Cheng Kung
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用於過濾血清之過濾薄膜及其製造方法與過濾裝置Filter film for filtering serum, manufacturing method thereof and filtering device

本發明關於一種過濾薄膜及其製造方法與過濾裝置,詳言之,係關於一種用於過濾血清之過濾薄膜及其製造方法與過濾裝置。The present invention relates to a filter film, a method for producing the same, and a filter device, and more particularly to a filter film for filtering serum, a method for producing the same, and a filter device.

習知血液過濾方法有下列三種:1.利用離心機以旋轉方式把血球與血清分離;2.利用介電泳原理搭配微機電製程進行分離;及3.經過非接觸式高波長雷射將血球血清分離。There are three kinds of conventional blood filtration methods: 1. Separating blood cells from serum by means of a centrifuge; 2. Separating by microelectromechanical process using dielectrophoresis principle; and 3. Blood cell serum by non-contact high-wavelength laser Separation.

第一種利用離心機之旋轉把血球與血清分離方式,係將全血置入試管中,再放置在離心機上,並利用血液中血球比重不同來進行分離。但此方式的缺點為藥品及樣本的使用消耗量較大,所需的處理時間也較為冗長。The first method of separating the blood cells from the serum by the rotation of the centrifuge is to place the whole blood in a test tube, place it on a centrifuge, and separate the blood cells by the specific gravity of the blood. However, the disadvantage of this method is that the consumption of drugs and samples is large, and the processing time required is also rather lengthy.

第二種利用介電泳原理搭配微機電製程進行分離方式,係利用介電泳力,根據粒子和外部溶液間不同的導電度和介電常數,並施以非均勻之交流電場,可使粒子產生非對稱的極化現象,此時粒子受電場作用力會往高或低電場強度處移動。利用介電泳原理,可讓不同粒徑大小或不同表面帶電量之微粒產生分離效果,但其所需製程繁瑣,所需儀器設備也較昂貴。The second method of separating the microelectromechanical process using the principle of dielectrophoresis is to use the dielectrophoretic force to generate a non-uniform alternating electric field according to the different conductivity and dielectric constant between the particle and the external solution. A symmetric polarization phenomenon in which a particle is moved by an electric field force to a high or low electric field strength. Using the principle of dielectrophoresis, particles with different particle sizes or different surface charge levels can be separated, but the required process is cumbersome and the required equipment is expensive.

第三種利用非接觸式高波長雷射將血球血清分離方式,由於雷射光聚焦原理,利用相反方向光壓可形成一穩定能量阱,並且能夠鉗住微小粒子,上述方式是以光鉗方式來操作流體裝置內的粒子,並且是一種具備非接觸性、非侵入式的工具,因此利用雷射光鉗來捕捉、移動與操控微粒亦可運用於血液分離,但是昂貴的雷射光學設備是此研究的最大困難。The third method uses a non-contact high-wavelength laser to separate blood cells from the blood. Due to the principle of laser light focusing, a stable energy trap can be formed by using the opposite direction light pressure, and the tiny particles can be clamped. The operation of particles in fluid devices, and is a non-contact, non-invasive tool, so the use of laser light clamps to capture, move and manipulate particles can also be used for blood separation, but expensive laser optics is the study The biggest difficulty.

上述習知方式均需要多個步驟才能過濾得到產物、樣本消耗量大、耗費時間較長、製程繁瑣且儀器設備昂貴。The above conventional methods require multiple steps to filter the product, the sample consumption is large, the time is long, the process is cumbersome, and the equipment is expensive.

因此,有必要提供一種創新且具進步性的用於過濾血清之過濾薄膜及其製造方法與過濾裝置,以解決上述問題。Therefore, it is necessary to provide an innovative and progressive filter film for filtering serum, a method for producing the same, and a filtering device to solve the above problems.

本發明提供一種用於過濾血清之過濾薄膜,包括:複數個過濾孔、一第一表面及一第二表面。該第一表面具有複數個弧面,該等弧面之間為該等過濾孔。該第二表面係相對於該第一表面,具有複數個凹陷區,該等凹陷區對應該等過濾孔。The invention provides a filter film for filtering serum, comprising: a plurality of filter holes, a first surface and a second surface. The first surface has a plurality of arc faces, and the filter holes are between the arc faces. The second surface has a plurality of recessed regions relative to the first surface, and the recessed regions correspond to filter holes.

本發明另提供一種用於過濾血清之過濾薄膜製造方法,包括以下步驟:(a)提供一基板;(b)形成一光阻層於該基板之一表面;(c)於該光阻層形成複數個光阻圖樣,並顯露該基板之部分表面;(d)形成一合金層於該光阻圖樣及基板上;及(e)分離該合金層及該光阻圖樣與基板,以製成一過濾薄膜,其包括:複數個過濾孔、一第一表面及一第二表面,該第一表面具有複數個弧面,該等弧面之間為該等過濾孔,該第二表面係對應於該第一表面,具有複數個凹陷區,該等凹陷區對應該等過濾孔。The invention further provides a method for manufacturing a filter film for filtering serum, comprising the steps of: (a) providing a substrate; (b) forming a photoresist layer on a surface of the substrate; and (c) forming the photoresist layer. a plurality of photoresist patterns and exposing a portion of the surface of the substrate; (d) forming an alloy layer on the photoresist pattern and the substrate; and (e) separating the alloy layer and the photoresist pattern and the substrate to form a The filter film comprises: a plurality of filter holes, a first surface and a second surface, the first surface having a plurality of arc faces, wherein the arc faces are between the filter holes, the second surface corresponding to The first surface has a plurality of recessed regions, and the recessed regions correspond to filter holes.

本發明另提供一種用於過濾血清之過濾裝置,包括:一第一基底及至少一過濾薄膜。該第一基底具有一第一貫穿孔。至少一過濾薄膜設置於該第一基底之該第一貫穿孔相對位置上,該過濾薄膜具有複數個過濾孔、一第一表面及一第二表面,該第一表面具有複數個弧面,該等弧面之間為該等過濾孔,該第二表面係對應於該第一表面,具有複數個凹陷區,該等凹陷區對應該等過濾孔。The invention further provides a filtering device for filtering serum, comprising: a first substrate and at least one filtering film. The first substrate has a first through hole. The at least one filter film is disposed at a position opposite to the first through hole of the first substrate, the filter film has a plurality of filter holes, a first surface and a second surface, the first surface having a plurality of curved surfaces, Between the equal arc faces are the filter holes, and the second surface corresponds to the first surface, and has a plurality of recessed regions, and the recessed regions correspond to the filter holes.

因此,利用本發明之過濾裝置可迅速取得分離之血清,且待檢樣本消耗量可大幅降低,大幅降低所需樣品量,並可免除繁雜的處理程序。另外,本發明之過濾裝置容易架設,一般實驗室即可架設,且不需昂貴儀器即可進行實驗,可減少實驗成本,並可降低裝置成本。本發明之過濾裝置利用多層過濾的原理,並以一驅動裝置推動全血,可提供一個快速、方便、低成本且微型化的過濾平台。Therefore, the separated serum can be quickly obtained by the filtering device of the present invention, and the consumption of the sample to be inspected can be greatly reduced, the amount of the sample required can be greatly reduced, and the complicated processing procedure can be eliminated. In addition, the filtering device of the present invention is easy to erect, and can be erected in a general laboratory, and experiments can be performed without expensive instruments, which can reduce the experiment cost and reduce the device cost. The filtering device of the present invention utilizes the principle of multi-layer filtration and pushes whole blood with a driving device, thereby providing a fast, convenient, low-cost and miniaturized filtering platform.

另外,利用該過濾薄膜之圓弧面設計,可使待過濾血液由該圓弧面流至該等過濾孔,並利用該等過濾孔之孔徑過濾待過濾血液。並可使用多層過濾薄膜,其過濾範圍為2 μm至8 μm,可依序將大粒子到較小粒子批次過濾,以提升過濾效率而無阻塞之虞。In addition, by using the arc surface design of the filter film, the blood to be filtered flows from the arc surface to the filter holes, and the blood to be filtered is filtered by the pore diameter of the filter holes. Multi-layer filter membranes can be used with a filtration range of 2 μm to 8 μm, which can sequentially filter large particles to smaller particles to improve filtration efficiency without blocking.

圖1顯示本發明第一實施例用於過濾血清之過濾裝置之示意圖;圖2顯示本發明第一實施例過濾薄膜及基底之分解示意圖。配合參考圖1及圖2,本發明用於過濾血清之過濾裝置10包括:一第一基底111、一第二基底112及至少一過濾薄膜121、122、123。該第一基底111具有一第一貫穿孔113。該第二基底112具有一第二貫穿孔114,相對於該第一貫穿孔113。至少一過濾薄膜121、122、123設置於該第一基底111之該第一貫穿孔113相對位置上。1 is a schematic view showing a filtration device for filtering serum according to a first embodiment of the present invention; and FIG. 2 is a schematic exploded view showing a filtration film and a substrate according to a first embodiment of the present invention. Referring to FIG. 1 and FIG. 2, the filter device 10 for filtering serum of the present invention comprises: a first substrate 111, a second substrate 112 and at least one filter film 121, 122, 123. The first substrate 111 has a first through hole 113. The second substrate 112 has a second through hole 114 opposite to the first through hole 113. The at least one filter film 121, 122, 123 is disposed at a position opposite to the first through hole 113 of the first substrate 111.

在本實施例中,該過濾裝置10具有三個過濾薄膜:一第一過濾薄膜121、一第二過濾薄膜122及一第三過濾薄膜123,依序由上至下設置於該第一基底上111。每一過濾薄膜具有複數個過濾孔。其中該第一過濾薄膜121之第一過濾孔(例如其直徑為7μm)大於該第二過濾薄膜122之第二過濾孔(例如其直徑為4μm),該第二過濾薄膜122之第二過濾孔大於該第三過濾薄膜123之第三過濾孔(例如其直徑為2 μm)。因此過濾薄膜可利用多層過濾,其過濾範圍為2 μm至8 μm,可依序將大粒子到較小粒子批次過濾,以提升過濾效率而無阻塞之虞。並且該等過濾薄膜可選用具有高度生物相容性的合金作為薄膜材料,以避免過濾血液時產生免疫排斥或汙染檢體的可能。In this embodiment, the filter device 10 has three filter films: a first filter film 121, a second filter film 122, and a third filter film 123, which are sequentially disposed on the first substrate from top to bottom. 111. Each filter membrane has a plurality of filter pores. The first filter hole of the first filter film 121 (for example, having a diameter of 7 μm) is larger than the second filter hole of the second filter film 122 (for example, the diameter thereof is 4 μm), and the second filter hole of the second filter film 122 is the second filter hole. The third filter hole (for example, having a diameter of 2 μm) larger than the third filter film 123. Therefore, the filter membrane can utilize multi-layer filtration with a filtration range of 2 μm to 8 μm, which can sequentially filter large particles to smaller particle batches to improve filtration efficiency without blocking. And the filter film can be selected from a highly biocompatible alloy as a film material to avoid the possibility of immune rejection or contamination of the sample when filtering blood.

本發明之該過濾裝置10另包括一驅動裝置13,連接至該第一基底111之該第一貫穿孔113,用以驅動待過濾血液流經該等過濾薄膜121、122、123。該驅動裝置13可作為驅動微流體之動力,以達到輸送流體之目的,並可調整流速單位為mL/min或μL/min,以適合不同流體(待過濾血液)的驅動需求。The filter device 10 of the present invention further includes a driving device 13 connected to the first through hole 113 of the first substrate 111 for driving the blood to be filtered to flow through the filtering films 121, 122, and 123. The driving device 13 can be used as a driving force for driving the microfluid to achieve the purpose of transporting the fluid, and can adjust the flow rate unit in mL/min or μL/min to suit the driving requirements of different fluids (blood to be filtered).

本發明之該過濾裝置10另包括一輸入接頭14及一輸出接頭15,分別設置於該第二基底112之該第二貫穿孔114及該第一基底111之該第一貫穿孔113。該輸入接頭14可用以與注射針筒連接免於過濾樣本外漏;該輸出接頭15可用以連接至該驅動裝置13。該輸入接頭14及該輸出接頭15係為鐵氟龍接頭(Polytetrafluoroethene,PTFE)。The filter device 10 of the present invention further includes an input connector 14 and an output connector 15 respectively disposed on the second through hole 114 of the second substrate 112 and the first through hole 113 of the first substrate 111. The input connector 14 can be used to connect to the syringe barrel to protect the sample from leaking; the output connector 15 can be used to connect to the drive unit 13. The input connector 14 and the output connector 15 are Polytetrafluoroethene (PTFE).

圖3顯示本發明第二實施例複數個基底之結合示意圖;圖4顯示本發明第二實施例過濾薄膜及基底之分解示意圖。配合參考圖3及圖4,本發明第二實施例之該過濾裝置30包括:一第一基底311、一第二基底312、一第三基底313及至少一過濾薄膜32。該第一基底311具有一第一貫穿孔314。該第二基底312具有一第二貫穿孔315,相對於該第一貫穿孔314。該第三基底313設置於該第二基底312上,該第三基底313具有一第三貫穿孔316,相對於該第二貫穿孔315。在本實施例中,該第二貫穿孔(例如其直徑為8 mm)大於該第三貫穿孔(例如其直徑為3 mm),該第三貫穿孔等於該第一貫穿孔。3 is a schematic view showing the combination of a plurality of substrates according to a second embodiment of the present invention; and FIG. 4 is a schematic exploded view showing the filter film and the substrate of the second embodiment of the present invention. Referring to FIG. 3 and FIG. 4 , the filter device 30 of the second embodiment of the present invention includes a first substrate 311 , a second substrate 312 , a third substrate 313 , and at least one filter film 32 . The first substrate 311 has a first through hole 314. The second substrate 312 has a second through hole 315 opposite to the first through hole 314 . The third substrate 313 is disposed on the second substrate 312 , and the third substrate 313 has a third through hole 316 opposite to the second through hole 315 . In this embodiment, the second through hole (for example, having a diameter of 8 mm) is larger than the third through hole (for example, having a diameter of 3 mm), and the third through hole is equal to the first through hole.

本發明之該過濾裝置30另包括一第一黏著層331,設置於該過濾薄膜32與該第二基底312之間,且另包括一第二黏著層332,設置於該第三基底313與該第二基底312之間。第一黏著層331及該第二黏著層332可為雙面黏性材料,以作為層間黏著物來固定該等基底,以確保過濾效能穩定且過濾樣本不外露。The filter device 30 of the present invention further includes a first adhesive layer 331 disposed between the filter film 32 and the second substrate 312, and further comprising a second adhesive layer 332 disposed on the third substrate 313 and the Between the second substrates 312. The first adhesive layer 331 and the second adhesive layer 332 may be double-sided adhesive materials to fix the substrates as interlayer adhesives to ensure stable filtration performance and the filter sample is not exposed.

該第一基底311、該第二基底312及該第三基底313係為聚甲基丙烯酸甲酯(Polymethylmethacrylate,PMMA)、聚雙甲基矽氧烷(Poly-dimethylsiloxane,PDMS)、環氧樹脂(Epoxy)、金屬或玻璃,其具備較高的機械強度並且是高生物相容性的高分子材料。The first substrate 311, the second substrate 312 and the third substrate 313 are polymethylmethacrylate (PMMA), poly-dimethylsiloxane (PDMS), epoxy resin (Poly-dimethylsiloxane). Epoxy), metal or glass, which has high mechanical strength and is a highly biocompatible polymer material.

實驗以膠體微粒水溶液取代全血血液來進行過濾的前驅實驗,並可由此前驅實驗預估全血分離的實際效果,實驗流程如下:1.量取5 μL的4 μm粒徑膠體微粒;2.量取5 μL的17 μm粒徑膠體微粒;3.備妥4 μm及17 μm兩種不同尺寸大小的膠體粒子後,混以1 mL之去離子水,即可完成膠體粒子試劑製備;4.膠體粒子試劑製備完成後,置入1mL容量之注射針筒中;5.利用鐵氟龍橋接頭來連結注射針筒及過濾晶片;6.以一驅動動力,預設大約1分鐘可注射完畢;及7.可藉由觀察倒立式光學顯微鏡顯示過濾結果。The experiment used a colloidal particle aqueous solution to replace the whole blood to filter the precursor experiment, and the precursor experiment can predict the actual effect of whole blood separation. The experimental procedure is as follows: 1. Measure 5 μL of 4 μm particle size colloidal particles; Measure 5 μL of colloidal particles of 17 μm particle size; 3. Prepare colloidal particles with different sizes of colloidal particles of 4 μm and 17 μm, and mix 1 mL of deionized water to prepare colloidal particle reagents; 4. After the preparation of the colloidal particle reagent is completed, the injection syringe is placed in a 1 mL capacity; 5. The Teflon bridge connector is used to connect the injection syringe and the filter wafer; 6. With a driving force, the injection can be completed in about 1 minute; 7. The filtration results can be displayed by observing an inverted optical microscope.

參考圖5,其顯示該前驅實驗結果之示意圖。其顯示出本發明過濾裝置之良好過濾效果,其中圖5左側之圖顯示過濾前的4 μm及17 μm混合膠體粒子溶液,而圖5右側之圖則顯示已將大於過濾孔徑的17 μm膠體粒子過濾掉。Referring to Figure 5, a schematic of the results of the precursor experiment is shown. It shows a good filtering effect of the filtering device of the present invention, wherein the left side of Figure 5 shows the 4 μm and 17 μm mixed colloidal particle solutions before filtration, while the right side of Figure 5 shows the 17 μm colloidal particles larger than the filtration pore size. Filtered.

因此,利用本發明之過濾裝置可迅速取得分離之血清,且待檢樣本消耗量可大幅降低,大幅降低所需樣品量,並可免除繁雜的處理程序。另外,本發明之過濾裝置容易架設,一般實驗室即可架設,且不需昂貴儀器即可進行實驗,可減少實驗成本,並可降低裝置成本。本發明之過濾裝置利用多層過濾的原理,並以一驅動裝置推動全血,可提供一個快速、方便、低成本且微型化的過濾平台。Therefore, the separated serum can be quickly obtained by the filtering device of the present invention, and the consumption of the sample to be inspected can be greatly reduced, the amount of the sample required can be greatly reduced, and the complicated processing procedure can be eliminated. In addition, the filtering device of the present invention is easy to erect, and can be erected in a general laboratory, and experiments can be performed without expensive instruments, which can reduce the experiment cost and reduce the device cost. The filtering device of the present invention utilizes the principle of multi-layer filtration and pushes whole blood with a driving device, thereby providing a fast, convenient, low-cost and miniaturized filtering platform.

參考圖6至圖10,顯示本發明用於過濾血清之過濾薄膜製造方法之示意圖。首先參考圖6,提供一基板51,及形成一光阻層52於該基板51之一表面。參考圖7及圖8,於該光阻層52形成複數個光阻圖樣521,並顯露該基板51之部分表面。在本實施例中,設置一光罩53於該光阻層52上方,該光罩53具有複數個對應圖樣,相對應於該等光阻圖樣521(如圖7所示)。再進行曝光及顯影,以形成該等光阻圖樣(如圖8所示)。在本實施例中,該等光阻圖樣521係為圓形。Referring to Figures 6 through 10, there are shown schematic views of a method of making a filter membrane for filtering serum of the present invention. Referring first to FIG. 6, a substrate 51 is provided, and a photoresist layer 52 is formed on one surface of the substrate 51. Referring to FIG. 7 and FIG. 8, a plurality of photoresist patterns 521 are formed on the photoresist layer 52, and a part of the surface of the substrate 51 is exposed. In this embodiment, a photomask 53 is disposed above the photoresist layer 52. The photomask 53 has a plurality of corresponding patterns corresponding to the photoresist patterns 521 (shown in FIG. 7). Exposure and development are then performed to form the photoresist patterns (as shown in Figure 8). In the present embodiment, the photoresist patterns 521 are circular.

參考圖9,形成一合金層55於該光阻圖樣521及基板51上。在本實施例中,係以電鑄(Electroforming)形成該合金層55。參考圖10,分離該合金層55及該光阻圖樣521與基板51,以製成一過濾薄膜55,其包括:複數個過濾孔551、一第一表面552及一第二表面553,該第一表面具有複數個弧面555,該等弧面555之間為該等過濾孔551,該第二表面553係對應於該第一表面552,具有複數個凹陷區556,該等凹陷區556對應該等過濾孔551。Referring to FIG. 9, an alloy layer 55 is formed on the photoresist pattern 521 and the substrate 51. In the present embodiment, the alloy layer 55 is formed by electroforming. Referring to FIG. 10, the alloy layer 55 and the photoresist pattern 521 and the substrate 51 are separated to form a filter film 55, which includes: a plurality of filter holes 551, a first surface 552, and a second surface 553. A surface has a plurality of curved surfaces 555, and the curved surfaces 555 are between the filtering holes 551. The second surface 553 corresponds to the first surface 552 and has a plurality of concave regions 556. The filter hole 551 should be waited for.

參考圖11,其顯示該過濾薄膜之第二表面之示意圖。配合參考圖10及圖11,在本實施例中,該等弧面555係為圓弧面,圓弧面包括一頂端及一底端,該底端設置於該等過濾孔551之周邊。該等凹陷區556之面積係大於過濾孔551之面積。該等凹陷區556係為圓形。待過濾血液係由該第一表面552輸入,經過濾孔551,由該第二表面553輸出。利用該過濾薄膜之圓弧面設計,可使待過濾血液由該圓弧面流至該等過濾孔551,並利用該等過濾孔551之孔徑過濾待過濾血液。另可使用多層過濾薄膜,其過濾範圍為2 μm至8 μm,可依序將大粒子到較小粒子批次過濾,以提升過濾效率而無阻塞之虞。該過濾薄膜選用具有高度生物相容性的合金作為薄膜材料,以避免過濾血液時產生免疫排斥或汙染檢體的可能。Referring to Figure 11, a schematic view of the second surface of the filter membrane is shown. With reference to FIG. 10 and FIG. 11 , in the embodiment, the arc surfaces 555 are arcuate surfaces, and the arc surface includes a top end and a bottom end, and the bottom end is disposed at the periphery of the filter holes 551 . The area of the recessed areas 556 is larger than the area of the filter holes 551. The recessed areas 556 are circular. The blood to be filtered is input from the first surface 552, and is output from the second surface 553 through the filter hole 551. By using the circular arc surface design of the filter film, the blood to be filtered flows from the circular arc surface to the filter holes 551, and the blood to be filtered is filtered by the pore diameter of the filter holes 551. A multi-layer filter membrane with a filtration range of 2 μm to 8 μm can be used to sequentially filter large particles into smaller particle batches to improve filtration efficiency without clogging. The filter film uses a highly biocompatible alloy as a film material to avoid the possibility of immune rejection or contamination of the sample when filtering blood.

惟上述實施例僅為說明本發明之原理及其功效,而非用以限制本發明。因此,習於此技術之人士對上述實施例進行修改及變化仍不脫本發明之精神。本發明之權利範圍應如後述之申請專利範圍所列。However, the above embodiments are merely illustrative of the principles and effects of the invention and are not intended to limit the invention. Therefore, those skilled in the art can make modifications and changes to the above embodiments without departing from the spirit of the invention. The scope of the invention should be as set forth in the appended claims.

10...第一實施例過濾裝置10. . . First embodiment filter device

13...驅動裝置13. . . Drive unit

14...輸入接頭14. . . Input connector

15...輸出接頭15. . . Output connector

30...本發明第二實施例之過濾裝置30. . . Filter device of the second embodiment of the present invention

32...過濾薄膜32. . . Filter film

51...基板51. . . Substrate

52...光阻層52. . . Photoresist layer

53...光罩53. . . Mask

55...合金層、過濾薄膜55. . . Alloy layer, filter film

111...第一基底111. . . First substrate

112...第二基底112. . . Second substrate

113...第一貫穿孔113. . . First through hole

114...第二貫穿孔114. . . Second through hole

121...第一過濾薄膜121. . . First filter film

122...第二過濾薄膜122. . . Second filter film

123...第三過濾薄膜123. . . Third filter film

311...第一基底311. . . First substrate

312...第二基底312. . . Second substrate

313...第三基底313. . . Third substrate

314...第一貫穿孔314. . . First through hole

315...第二貫穿孔315. . . Second through hole

316...第三貫穿孔316. . . Third through hole

331...第一黏著層331. . . First adhesive layer

332...第二黏著層332. . . Second adhesive layer

521...光阻圖樣521. . . Photoresist pattern

551...過濾孔551. . . Filter hole

552...第一表面552. . . First surface

553...第二表面553. . . Second surface

555...弧面555. . . Curved surface

556...凹陷區556. . . Sag area

圖1顯示本發明第一實施例用於過濾血清之過濾裝置之示意圖;Figure 1 is a schematic view showing a filtration device for filtering serum according to a first embodiment of the present invention;

圖2顯示本發明第一實施例過濾薄膜及基底之分解示意圖;2 is a schematic exploded view of a filter film and a substrate according to a first embodiment of the present invention;

圖3顯示本發明第二實施例複數個基底之結合示意圖;3 is a schematic view showing the combination of a plurality of substrates in the second embodiment of the present invention;

圖4顯示本發明第二實施例過濾薄膜及基底之分解示意圖;4 is a schematic exploded view showing a filter film and a substrate according to a second embodiment of the present invention;

圖5顯示前驅實驗結果之示意圖;Figure 5 shows a schematic diagram of the results of the precursor experiment;

圖6至圖10顯示本發明用於過濾血清之過濾薄膜製造方法之示意圖;及6 to 10 are schematic views showing a method of manufacturing a filter film for filtering serum according to the present invention; and

圖11顯示該過濾薄膜之第二表面之示意圖。Figure 11 shows a schematic view of the second surface of the filter membrane.

10‧‧‧第一實施例過濾裝置10‧‧‧First embodiment filter device

13‧‧‧驅動裝置13‧‧‧ drive

14‧‧‧輸入接頭14‧‧‧Input connector

15‧‧‧輸出接頭15‧‧‧Output connector

111‧‧‧第一基底111‧‧‧First base

112‧‧‧第二基底112‧‧‧Second substrate

Claims (20)

一種用於過濾血清之過濾薄膜,包括:複數個過濾孔;一第一表面,具有複數個弧面,該等弧面之間為該等過濾孔;一第二表面,係相對於該第一表面,具有複數個凹陷區,該等凹陷區對應該等過濾孔。A filter film for filtering serum, comprising: a plurality of filter holes; a first surface having a plurality of arc faces, wherein the arc faces are between the filter holes; and a second surface opposite to the first The surface has a plurality of recessed regions, and the recessed regions correspond to the filter holes. 如請求項1之過濾薄膜,其中該等弧面係為圓弧面,圓弧面包括一頂端及一底端,該底端設置於該等過濾孔之周邊。The filter film of claim 1, wherein the arc surface is a circular arc surface, the arc surface includes a top end and a bottom end, and the bottom end is disposed at a periphery of the filter holes. 如請求項1之過濾薄膜,其中凹陷區之面積係大於過濾孔之面積。The filter film of claim 1, wherein the area of the recessed area is larger than the area of the filter hole. 如請求項1之過濾薄膜,其中凹陷區係為圓形。The filter film of claim 1, wherein the recessed area is circular. 如請求項1之過濾薄膜,其中待過濾血液係由該第一表面輸入,經過濾孔,由該第二表面輸出。The filter film of claim 1, wherein the blood to be filtered is input from the first surface, and is output through the filter hole through the second surface. 如請求項1之過濾薄膜,其中該過濾薄膜之材質為合金。The filter film of claim 1, wherein the filter film is made of an alloy. 一種用於過濾血清之過濾薄膜製造方法,包括以下步驟:(a) 提供一基板;(b) 形成一光阻層於該基板之一表面;(c) 於該光阻層形成複數個光阻圖樣,並顯露該基板之部分表面;(d) 形成一合金層於該光阻圖樣及基板上;及(e) 分離該合金層及該光阻圖樣與基板,以製成一過濾薄膜,其包括:複數個過濾孔、一第一表面及一第二表面,該第一表面具有複數個弧面,該等弧面之間為該等過濾孔,該第二表面係對應於該第一表面,具有複數個凹陷區,該等凹陷區對應該等過濾孔。A method for manufacturing a filter film for filtering serum, comprising the steps of: (a) providing a substrate; (b) forming a photoresist layer on a surface of the substrate; and (c) forming a plurality of photoresists on the photoresist layer Patterning and exposing a portion of the surface of the substrate; (d) forming an alloy layer on the photoresist pattern and the substrate; and (e) separating the alloy layer and the photoresist pattern and the substrate to form a filter film The method includes: a plurality of filter holes, a first surface, and a second surface, the first surface having a plurality of arc surfaces, wherein the arc surfaces are between the filter holes, the second surface corresponding to the first surface There are a plurality of recessed areas, and the recessed areas correspond to filter holes. 如請求項7之製造方法,其中在步驟(c)中,另包括以下步驟:(c1)設置一光罩於該光阻層上方,該光罩具有複數個對應圖樣,相對應於該等光阻圖樣;及(c2)進行曝光及顯影,以形成該等光阻圖樣。The manufacturing method of claim 7, wherein in the step (c), the method further comprises the steps of: (c1) providing a reticle above the photoresist layer, the reticle having a plurality of corresponding patterns corresponding to the light Resisting the pattern; and (c2) performing exposure and development to form the photoresist pattern. 如請求項7之製造方法,其中在步驟(c)中,該等光阻圖樣係為圓形。The manufacturing method of claim 7, wherein in the step (c), the photoresist patterns are circular. 一種用於過濾血清之過濾裝置,包括:一第一基底,具有一第一貫穿孔;及至少一過濾薄膜,設置於該第一基底之該第一貫穿孔相對位置上,該過濾薄膜具有複數個過濾孔、一第一表面及一第二表面,該第一表面具有複數個弧面,該等弧面之間為該等過濾孔,該第二表面係對應於該第一表面,具有複數個凹陷區,該等凹陷區對應該等過濾孔。A filter device for filtering serum, comprising: a first substrate having a first through hole; and at least one filter film disposed at a relative position of the first through hole of the first substrate, the filter film having a plurality of a filter hole, a first surface and a second surface, the first surface having a plurality of curved surfaces, the curved surfaces being between the curved surfaces, the second surface corresponding to the first surface, having a plurality A recessed area corresponding to the filter holes. 如請求項10之過濾裝置,其中該等過濾薄膜包括一第一過濾薄膜、一第二過濾薄膜及一第三過濾薄膜,依序由上至下設置於該第一基底上,其中該第一過濾薄膜之第一過濾孔大於該第二過濾薄膜之第二過濾孔,該第二過濾薄膜之第二過濾孔大於該第三過濾薄膜之第三過濾孔。The filter device of claim 10, wherein the filter film comprises a first filter film, a second filter film and a third filter film, which are sequentially disposed on the first substrate from top to bottom, wherein the first The first filter hole of the filter film is larger than the second filter hole of the second filter film, and the second filter hole of the second filter film is larger than the third filter hole of the third filter film. 如請求項10之過濾裝置,另包括一驅動裝置,連接至該第一基底之該第一貫穿孔,用以驅動待過濾血液流經該過濾薄膜。The filtering device of claim 10, further comprising a driving device connected to the first through hole of the first substrate for driving the blood to be filtered to flow through the filtering film. 如請求項10之過濾裝置,另包括一第二基底,設置於該過濾薄膜上,該第二基底具有一第二貫穿孔,相對於該第一貫穿孔。The filter device of claim 10, further comprising a second substrate disposed on the filter film, the second substrate having a second through hole opposite to the first through hole. 如請求項13之過濾裝置,另包括一輸入接頭及一輸出接頭,分別設置於該第二基底之該第二貫穿孔及該第一基底之該第一貫穿孔。The filter device of claim 13, further comprising an input connector and an output connector respectively disposed on the second through hole of the second substrate and the first through hole of the first substrate. 如請求項14之過濾裝置,其中該輸入接頭及該輸出接頭係為鐵氟龍接頭(Polytetrafluoroethene,PTFE)。The filter device of claim 14, wherein the input connector and the output connector are Polytetrafluoroethene (PTFE). 如請求項13之過濾裝置,另包括一第一黏著層,設置於該過濾薄膜與該第二基底之間。The filtering device of claim 13, further comprising a first adhesive layer disposed between the filter film and the second substrate. 如請求項13之過濾裝置,另包括一第三基底,設置於該第二基底上,該第三基底具有一第三貫穿孔,相對於該第二貫穿孔。The filtering device of claim 13, further comprising a third substrate disposed on the second substrate, the third substrate having a third through hole opposite to the second through hole. 如請求項17之過濾裝置,另包括一第二黏著層,設置於該第三基底與該第二基底之間。The filtering device of claim 17, further comprising a second adhesive layer disposed between the third substrate and the second substrate. 如請求項17之過濾裝置,其中該第二貫穿孔大於該第三貫穿孔,該第三貫穿孔等於該第一貫穿孔。The filter device of claim 17, wherein the second through hole is larger than the third through hole, and the third through hole is equal to the first through hole. 如請求項17之過濾裝置,其中該第一基底、該第二基底及該第三基底係為聚甲基丙烯酸甲酯(Polymethylmethacrylate,PMMA)、聚雙甲基矽氧烷(Poly-dimethylsiloxane,PDMS)、環氧樹脂(Epoxy)、金屬或玻璃。The filter device of claim 17, wherein the first substrate, the second substrate, and the third substrate are polymethylmethacrylate (PMMA), poly-dimethylsiloxane (PDMS). ), epoxy (Epoxy), metal or glass.
TW099134138A 2010-10-07 2010-10-07 Filtration film for filtrating the blood serum and method for manufacturing the same and filtration device TWI461230B (en)

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