TWI458000B - - Google Patents
Info
- Publication number
- TWI458000B TWI458000B TW101121553A TW101121553A TWI458000B TW I458000 B TWI458000 B TW I458000B TW 101121553 A TW101121553 A TW 101121553A TW 101121553 A TW101121553 A TW 101121553A TW I458000 B TWI458000 B TW I458000B
- Authority
- TW
- Taiwan
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW101121553A TW201351489A (zh) | 2012-06-15 | 2012-06-15 | 分流裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW101121553A TW201351489A (zh) | 2012-06-15 | 2012-06-15 | 分流裝置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201351489A TW201351489A (zh) | 2013-12-16 |
TWI458000B true TWI458000B (ko) | 2014-10-21 |
Family
ID=50158110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW101121553A TW201351489A (zh) | 2012-06-15 | 2012-06-15 | 分流裝置 |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW201351489A (ko) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200421475A (en) * | 2003-04-10 | 2004-10-16 | Grand Plastic Technology Corp | Liquid collection apparatus for single wafer spin etcher |
US20070119476A1 (en) * | 2005-11-25 | 2007-05-31 | Takashi Hara | Substrate processing apparatus and substrate processing method |
US20080142051A1 (en) * | 2006-12-19 | 2008-06-19 | Akio Hashizume | Recovery cup cleaning method and substrate treatment apparatus |
US20090050175A1 (en) * | 2007-08-21 | 2009-02-26 | Takayoshi Tanaka | Substrate cleaning apparatus and substrate cleaning method |
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2012
- 2012-06-15 TW TW101121553A patent/TW201351489A/zh unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200421475A (en) * | 2003-04-10 | 2004-10-16 | Grand Plastic Technology Corp | Liquid collection apparatus for single wafer spin etcher |
US20070119476A1 (en) * | 2005-11-25 | 2007-05-31 | Takashi Hara | Substrate processing apparatus and substrate processing method |
US20080142051A1 (en) * | 2006-12-19 | 2008-06-19 | Akio Hashizume | Recovery cup cleaning method and substrate treatment apparatus |
US20090050175A1 (en) * | 2007-08-21 | 2009-02-26 | Takayoshi Tanaka | Substrate cleaning apparatus and substrate cleaning method |
Also Published As
Publication number | Publication date |
---|---|
TW201351489A (zh) | 2013-12-16 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4A | Issue of patent certificate for granted invention patent |