TWI449930B - Method of determining quality of silicon brick - Google Patents
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本發明是有關於一種品質判定方法,且特別是有關於一種矽晶棒的品質判定方法。The present invention relates to a quality determination method, and more particularly to a method for determining the quality of a twin rod.
太陽能是一種乾淨無污染且取之不盡、用之不竭的能源,在解決目前石化能源面臨短缺且造成污染的情況下,太陽能是備受矚目的焦點。由於太陽能電池可直接將太陽能轉換為電能,因此已成為目前產業界相當重要的研究課題之一。Solar energy is a clean, pollution-free and inexhaustible source of energy. Solar energy is the focus of attention in the face of the current shortage of petrochemical energy and pollution. Since solar cells can directly convert solar energy into electrical energy, it has become one of the most important research topics in the industry.
大多數太陽能電池是由矽晶片製成。矽晶片是利用矽原料形成的晶錠(ingot),經鋸切後形成多個矽晶棒,再對矽晶棒進行切割而形成之。目前,針對矽晶棒整體進行載子壽命(carrier lifetime)量測所得的值,直接對矽晶棒進行品質判定。然而,由於載子壽命量測容易受晶體表面粗糙度、機台探頭狀況等外界因素影響,故容易造成批次之載子壽命量測數據間的誤差,而造成品質判定不精準。Most solar cells are made from germanium wafers. The tantalum wafer is an ingot formed from a tantalum raw material, which is formed by sawing to form a plurality of twin rods, and then cutting the twin rods. At present, the value of the carrier lifetime measurement is measured for the whole of the twin rod, and the quality of the twin rod is directly determined. However, since the life measurement of the carrier is easily affected by external factors such as the surface roughness of the crystal and the condition of the probe of the machine, it is easy to cause errors between the measurement data of the carrier life of the batch, and the quality determination is not accurate.
因此,亟需一種可準確地判定矽晶棒品質的改善方法。Therefore, there is a need for an improved method for accurately determining the quality of a twin rod.
本發明提供一種矽晶棒的品質判定方法,其在進行切料步驟之前,即可準確地判定矽晶棒的品質。The present invention provides a method for determining the quality of a twin rod, which can accurately determine the quality of the twin rod before the cutting step.
本發明提出一種矽晶棒的品質判定方法,此方法先對至少一矽晶棒進行多點載子壽命的量測,並將載子壽命的數據由大到小進行排序。接著,找出前X%群組中的第一最低載子壽命LDx ,其中X=10~20中的任一數值;以及找出前Y%群組中的第二最低載子壽命LDY ,其中Y=40~90中的任一數值。然後,計算出LDx 對LDY 的比值,且判斷比值是否小於一預定值。The invention provides a method for determining the quality of a twin rod. The method first measures the multi-point carrier lifetime of at least one crystal rod, and sorts the data of the carrier lifetime from large to small. Next, find the first lowest carrier lifetime LD x in the pre-X% group, where X = any value of 10-20; and find the second lowest carrier lifetime LD Y in the pre-Y% group , where Y = 40~90. Then, the ratio of LD x to LD Y is calculated, and it is judged whether or not the ratio is smaller than a predetermined value.
在本發明之一實施例中,上述X為10,Y為50到80中的任一數值。In an embodiment of the invention, X is 10 and Y is any one of 50 to 80.
在本發明之一實施例中,上述預定值小於等於1.5。In an embodiment of the invention, the predetermined value is less than or equal to 1.5.
在本發明之一實施例中,上述預定值隨Y成正比變化。In an embodiment of the invention, the predetermined value varies in proportion to Y.
在本發明之一實施例中,上述矽晶棒的平均載子壽命大於等於3 μs。In an embodiment of the invention, the above-mentioned twin rod has an average carrier lifetime of greater than or equal to 3 μs.
在本發明之一實施例中,在計算出上述比值的步驟之後,矽晶棒的品質判定方法更包括對矽晶棒進行切料步驟,使矽晶棒的使用料與回收料分開。In an embodiment of the present invention, after the step of calculating the ratio, the method for determining the quality of the twin rod further comprises performing a cutting step on the twin rod to separate the used material of the twin rod from the recycled material.
在本發明之一實施例中,在進行上述切料步驟之後,矽晶棒的品質判定方法更包括對矽晶棒進行切片步驟,以形成多個矽晶片。In an embodiment of the invention, after performing the cutting step, the method for determining the quality of the twin rod further comprises a step of slicing the twin rod to form a plurality of tantalum wafers.
在本發明之一實施例中,上述矽晶棒用於製作太陽能電池。In one embodiment of the invention, the above-described twin rods are used to make solar cells.
在本發明之一實施例中,上述比值與太陽能電池之轉換效率相關。In an embodiment of the invention, the ratio is related to the conversion efficiency of the solar cell.
在本發明之一實施例中,上述各個矽晶棒的比值與轉換效率的決定係數(R2 )大於各個矽晶棒之單一群組之最低載子壽命與轉換效率的決定係數(R2 )。The coefficient of determination (R 2) in one embodiment of the invention, the coefficient of determination of the ratio of the conversion efficiency of each of the silicon rod (R 2) greater than the minimum carrier lifetime and the conversion efficiency of each single group of the silicon rod .
基於上述,本發明提供一種利用與轉換效率相關之載子壽命量測數據分佈的比值為判定依據,以在矽晶棒進行切料步驟之前,準確判定矽晶棒的品質。Based on the above, the present invention provides a basis for determining the ratio of the carrier lifetime measurement data distribution associated with the conversion efficiency to accurately determine the quality of the crystallizing rod prior to the cutting step of the twin rod.
為讓本發明之上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the present invention will be more apparent from the following description.
圖1是依照本發明之一實施例之矽晶棒品質判定方法的流程圖。圖2是依照本發明之一實施例之矽晶棒的載子壽命分佈圖。BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing a method for determining the quality of a twin rod in accordance with an embodiment of the present invention. 2 is a diagram showing the carrier lifetime distribution of a twin rod in accordance with an embodiment of the present invention.
請參照圖1,進行步驟S100,對至少一矽晶棒進行多點載子壽命的量測,並將所得載子壽命的數據由大到小進行排列。如參照圖2,將量測所得載子壽命的數據由大到小排列,以得到一曲線。Referring to FIG. 1, step S100 is performed to measure the multi-point carrier lifetime of at least one of the crystal rods, and the data of the obtained carrier lifetimes are arranged from large to small. As shown in Fig. 2, the data of the measured carrier lifetimes are ranked from large to small to obtain a curve.
接著,進行步驟S102,在數據排列中,找出前X%群組中的第一最低載子壽命LDX 。在一實施例中,X為10到20中的任一數值。因此,如參照圖2所示,當X為10時,LD10 約為9.54 μs。然而,本發明並不以此為限。Next, proceeding to step S102, in the data arrangement, the first lowest carrier lifetime LD X in the previous X% group is found. In an embodiment, X is any one of 10 to 20. Therefore, as shown in FIG. 2, when X is 10, the LD 10 is about 9.54 μs. However, the invention is not limited thereto.
之後,進行步驟S104,在相同數據排列中,找出前Y%群組中的第二最低載子壽命LDY 。在一實施例中,Y為40到90中的任一數值。在另一實施例中,Y為50到80 中的任一數值。在一實施例中,當Y為60時,LD60 約為6.45 μs,如參照圖2所示。Thereafter, step S104 is performed to find the second lowest carrier lifetime LD Y in the previous Y% group in the same data arrangement. In an embodiment, Y is any one of 40 to 90. In another embodiment, Y is any one of 50 to 80. In one embodiment, when Y is 60, the LD 60 is about 6.45 μs, as shown in FIG.
然後,進行步驟S106,計算出LDX 對LDY 的比值(LDX /LDY ),並判斷此比值是否小於一預定值,以判定矽晶棒的品質。在一實施例中,所述預定值例如是小於等於1.5。另外,所述預定值可隨Y成正比變化。在一實施例中,隨Y的變化,預定值例如可在1.3到1.5的範圍中變化。如參照圖2所示,LD10 /LD60 約為1.48(=9.54 μs/6.45 μs),此數值小於1.5,亦即落入所設定的預定值範圍內。在上述實施例中,LDX /LDY 比值是以LD10 /LD60 為例來說明之,但本發明並不以此為限。在其他實施例中,LDX /LDY 例如是LD10 /LD40 、LD10 /LD45 、LD10 /LD50 、LD10 /LD55 、LD10 /LD65 、LD10 /LD70 、LD10 /LD75 、LD10 /LD80 、LD10 /LD85 或LD10 /LD90 。Then, in step S106, the ratio (LD X /LD Y ) of LD X to LD Y is calculated, and it is judged whether the ratio is less than a predetermined value to determine the quality of the twin rod. In an embodiment, the predetermined value is, for example, 1.5 or less. Additionally, the predetermined value may vary in proportion to Y. In an embodiment, the predetermined value may vary, for example, in the range of 1.3 to 1.5 as a function of Y. As shown in Fig. 2, LD 10 /LD 60 is about 1.48 (=9.54 μs / 6.45 μs), and this value is less than 1.5, that is, falls within the predetermined range set. In the above embodiment, the LD X /LD Y ratio is exemplified by LD 10 /LD 60 , but the invention is not limited thereto. In other embodiments, LD X /LD Y is, for example, LD 10 /LD 40 , LD 10 /LD 45 , LD 10 /LD 50 , LD 10 /LD 55 , LD 10 /LD 65 ,LD 10 /LD 70 ,LD 10 / LD 75 , LD 10 / LD 80 , LD 10 / LD 85 or LD 10 / LD 90 .
因此,本發明係透過相對值而非絕對值的方式,利用載子壽命量測數據之兩群組的比值作為主要判定矽晶棒品質的依據。Therefore, the present invention utilizes the ratio of the two groups of carrier lifetime measurement data as a basis for determining the quality of the twin rod by means of relative values rather than absolute values.
除了本發明的判定依據之外,對矽晶棒的平均載子壽命進行計算亦可作為判定依據之一。在一實施例中,矽晶棒的平均載子壽命例如是大於等於約3 μs。另外,更可使用本領域具有通常知識者已知的其他判定依據。In addition to the determination basis of the present invention, the calculation of the average carrier lifetime of the twin rod can also be used as one of the basis for determination. In one embodiment, the average carrier lifetime of the twin rod is, for example, greater than or equal to about 3 μs. In addition, other determinations known to those of ordinary skill in the art can be used.
另外,本發明之方法計算出來的LDX /LDY 比值與太陽能電池的轉換效率相關,將在實例1中進一步說明。因此,藉由本發明之方法計算出來的LDX /LDY 比值可用以判定 矽晶棒品質的優劣。In addition, the LD X /LD Y ratio calculated by the method of the present invention is related to the conversion efficiency of the solar cell and will be further illustrated in Example 1. Therefore, the LD X /LD Y ratio calculated by the method of the present invention can be used to determine the quality of the twin rod.
在計算出LDX /LDY 比值後,可對矽晶棒進行切料步驟,以使矽晶棒的使用料與回收料分開。接著,在切料步驟之後,更可對矽晶棒進行切片步驟,以形成多個可用於製作太陽能電池的矽晶片。切料步驟與切片步驟為本領域具有通常知識者所熟知的步驟,於此不再贅述。After calculating the LD X /LD Y ratio, the dicing bar can be subjected to a dicing step to separate the strontium rod from the regrind. Next, after the cutting step, the twinning bar can be further subjected to a slicing step to form a plurality of tantalum wafers that can be used to fabricate solar cells. The cutting step and the slicing step are well known in the art to those skilled in the art and will not be described again.
基於上述,本發明在進行切片步驟或甚至切料步驟之前,即可藉由與太陽能電池的轉換效率相關之LDX /LDY 比值來掌握矽晶棒的優劣。Based on the above, the present invention can grasp the advantages and disadvantages of the twin rod by the ratio of LD X /LD Y related to the conversion efficiency of the solar cell before performing the slicing step or even the cutting step.
以下,藉由具體實例詳細說明本實施例之特點及功效。然而,這些實例並非用以限制本發明。Hereinafter, the features and effects of the embodiment will be described in detail by way of specific examples. However, these examples are not intended to limit the invention.
圖3a為各個矽晶棒之單一群組之最低載子壽命與矽晶棒轉換效率之關係曲線圖,其中單一群組之最低載子壽命例如是圖3a中的LD60 ,但並不以此為限。另外,圖3b為各個矽晶棒的LDX /LDY 比值與矽晶棒轉換效率之關係曲線圖,其中LDX /LDY 比值例如是圖3b中的LD10 /LD60 ,但並不以此為限。Figure 3a is a graph showing the relationship between the lowest carrier lifetime and the conversion efficiency of a single crystal of a single group of crystals, wherein the lowest carrier lifetime of a single group is, for example, LD 60 in Figure 3a, but not Limited. In addition, FIG. 3b is a graph showing the relationship between the LD X /LD Y ratio of each twin rod and the conversion efficiency of the twin rod, wherein the LD X /LD Y ratio is, for example, LD 10 /LD 60 in FIG. 3b, but not This is limited.
請同時參照圖3a以及圖3b,由圖形中分別得到之迴歸分析的決定係數(Coefficient of Determination,R2 )可發現各個矽晶棒的LDX /LDY 比值與轉換效率的決定係數大於各個矽晶棒之單一群組之最低載子壽命與轉換效率的決定係數。換言之,在圖3a及圖3b中,其顯示出LDX /LDY 比值是一個更具決定性的因素,比起單一群組的量測值, LDX /LDY 比值與轉換效率的關連性更高。Referring to FIG. 3a and FIG. 3b simultaneously, the coefficient of determination (R 2 ) of the regression analysis obtained in the graph can be found that the LD X /LD Y ratio of each crystal rod and the coefficient of determination of conversion efficiency are larger than each 矽. The coefficient of determination of the lowest carrier lifetime and conversion efficiency for a single group of ingots. In other words, in Figures 3a and 3b, it shows that the LD X /LD Y ratio is a more decisive factor, and the LD X /LD Y ratio is more related to the conversion efficiency than the single group measurement. high.
因此,可使用LDX /LDY 比值得知由矽晶棒所製得的太陽能電池之轉換效率範圍,進而判定矽晶棒的品質。Therefore, the conversion efficiency range of the solar cell produced by the twin rod can be known using the LD X /LD Y ratio, and the quality of the twin rod can be determined.
圖4繪示LD60 與LD10 /LD60 之間兩次量測之誤差值的比較。Figure 4 shows a comparison of the error values of two measurements between LD 60 and LD 10 /LD 60 .
首先,將一矽晶棒經由如圖1所示之步驟S100到S104來得到第一LD10 、第一LD60 及LD10 /LD60 的第一比值。接著,對同一矽晶棒再次進行步驟S100到S104,而得到第二LD10 、第二LD60 及LD10 /LD60 的第二比值。然後,將第一LD60 與第二LD60 相減,以得到LD60 兩次量測間的誤差值。同樣地,將LD10 /LD60 的第一比值與LD10 /LD60 的第二比值相減,以得到LD10 /LD60 兩次量測間的誤差值。重複上述步驟,對各個矽晶棒進行LD60 以及LD10 /LD60 兩次量測之誤差值的計算,並將所得到的各個誤差值進行作圖,以得到圖4。First, a first bar of the first LD 10 , the first LD 60, and the LD 10 /LD 60 is obtained by passing a crystal bar through steps S100 to S104 as shown in FIG. Next, steps S100 to S104 are performed again on the same twin rod, and second ratios of the second LD 10 , the second LD 60, and the LD 10 /LD 60 are obtained. Then, the first LD 60 is subtracted from the second LD 60 to obtain an error value between the two measurements of the LD 60 . Similarly, the first ratio LD 10 / LD 60 and the second ratio LD 10 / LD 60 is subtracted, to obtain an error value between LD 10 / LD 60 measured twice. The above steps were repeated, and the error values of the two measurements of LD 60 and LD 10 /LD 60 were measured for each of the twin rods, and the obtained error values were plotted to obtain FIG.
參照圖4,其呈現出LD10 /LD60 比值之誤差的分佈範圍小於LD60 之誤差的分佈範圍。換言之,比起使用為絕對值的LD60 來進行實驗,使用為相對值的LD10 /LD60 比值來進行實驗具有較好的再現性。因此,利用LD10 /LD60 的比值作為判定品質的依據,可降低結果受到例如晶體的缺陷、表面粗糙度、坩堝回擴以及機台誤差等影響的程度,進而大幅提高矽晶棒品質判定的準確性。Referring to FIG. 4, it is shown that the distribution range of the error of the LD 10 /LD 60 ratio is smaller than the distribution range of the error of the LD 60 . In other words, it is better to perform experiments using the LD 10 /LD 60 ratio which is a relative value than the experiment using the LD 60 which is an absolute value. Therefore, by using the ratio of LD 10 /LD 60 as the basis for determining the quality, it is possible to reduce the degree of influence of, for example, crystal defects, surface roughness, enthalpy retraction, and machine error, thereby greatly improving the quality of the twin rod. accuracy.
圖5繪示LD40 與LD10 /LD40 之間兩次量測之誤差值的比較。在此實例中,除了選用LD40 而不是LD60 外,以與實例2相同的步驟來計算各個矽晶棒進行兩次量測間的誤差值,並作圖。FIG. 5 illustrates a comparison of error values between two measurements between LD 40 and LD 10 /LD 40 . In this example, the error values between the two measurements were calculated and plotted in the same procedure as in Example 2 except that LD 40 was used instead of LD 60 .
同樣地,由圖5可發現到LD10 /LD40 比值之誤差的分佈範圍小於LD40 之誤差的分佈範圍。因此,使用LD10 /LD40 的比值來進行實驗具有較好的再現性,從而較準確地反應矽晶棒的品質。Similarly, it can be seen from Fig. 5 that the distribution of the error of the LD 10 /LD 40 ratio is smaller than the distribution of the error of the LD 40 . Therefore, the experiment using the ratio of LD 10 /LD 40 has better reproducibility, thereby more accurately reflecting the quality of the twin rod.
圖6繪示LD90 與LD10 /LD90 之間兩次量測之誤差值的比較。在此實例中,除了選用LD90 而不是LD60 外,以與實例2相同的步驟來計算各個矽晶棒進行兩次量測間的誤差值,並作圖。Figure 6 shows a comparison of the error values of the two measurements between LD 90 and LD 10 /LD 90 . In this example, the error values between the two measurements were calculated and plotted in the same procedure as in Example 2 except that LD 90 was used instead of LD 60 .
同樣地,由圖6可發現到LD10 /LD90 比值之誤差的分佈範圍小於LD90 之誤差的分佈範圍。因此,使用LD10 /LD90 的比值來進行實驗具有較好的再現性,從而較準確地反應矽晶棒的品質。Similarly, it can be seen from Fig. 6 that the distribution range of the error of the LD 10 /LD 90 ratio is smaller than the distribution range of the error of the LD 90 . Therefore, the experiment using the ratio of LD 10 /LD 90 has better reproducibility, thereby more accurately reflecting the quality of the twin rod.
綜上所述,本發明提供一種透過載子壽命量測數據分佈的比值作為判定依據的矽晶棒品質判定方法。此方法係採用相對值的方式,使得可降低批次量測數據之間的誤差程度,且此方法計算出的LDX /LDY 比值與轉換效率相關,故在矽晶棒進行切料步驟之前,即能夠準確地判定矽晶棒的品質。換言之,本發明的方法與需完成太陽能電池製作才可取得轉換效率的習知方法相比,能夠更早判斷太陽能 電池的轉換效率範圍。In summary, the present invention provides a method for determining the quality of a twin rod by using a ratio of the distribution of the carrier lifetime measurement data as a basis for determination. This method uses a relative value, so that the degree of error between the batch measurement data can be reduced, and the LD X /LD Y ratio calculated by this method is related to the conversion efficiency, so before the crystallization rod performs the cutting step That is, the quality of the twin rod can be accurately determined. In other words, the method of the present invention can determine the range of conversion efficiency of the solar cell earlier than conventional methods that require solar cell fabrication to achieve conversion efficiency.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.
S100~S106‧‧‧步驟S100~S106‧‧‧Steps
圖1是依照本發明之一實施例之矽晶棒品質判定方法的流程圖。BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing a method for determining the quality of a twin rod in accordance with an embodiment of the present invention.
圖2是依照本發明之一實施例之矽晶棒的載子壽命分佈圖。2 is a diagram showing the carrier lifetime distribution of a twin rod in accordance with an embodiment of the present invention.
圖3a為各個矽晶棒之單一群組之最低載子壽命與矽晶棒轉換效率之關係曲線圖。Figure 3a is a graph showing the relationship between the lowest carrier lifetime and the conversion efficiency of a twin rod for a single group of individual crystal rods.
圖3b為各個矽晶棒的LDX /LDY 比值與矽晶棒轉換效率之關係曲線圖。Fig. 3b is a graph showing the relationship between the LD X /LD Y ratio of each twin rod and the conversion efficiency of the twin rod.
圖4繪示LD60 與LD10 /LD60 之間兩次量測之誤差值的比較。Figure 4 shows a comparison of the error values of two measurements between LD 60 and LD 10 /LD 60 .
圖5繪示LD40 與LD10 /LD40 之間兩次量測之誤差值的比較。FIG. 5 illustrates a comparison of error values between two measurements between LD 40 and LD 10 /LD 40 .
圖6繪示LD90 與LD10 /LD90 之間兩次量測之誤差值的比較。Figure 6 shows a comparison of the error values of the two measurements between LD 90 and LD 10 /LD 90 .
S100~S106‧‧‧步驟S100~S106‧‧‧Steps
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