TWI449200B - Guidance device for solar silicon chip guide and its testing machine - Google Patents

Guidance device for solar silicon chip guide and its testing machine Download PDF

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TWI449200B
TWI449200B TW101108693A TW101108693A TWI449200B TW I449200 B TWI449200 B TW I449200B TW 101108693 A TW101108693 A TW 101108693A TW 101108693 A TW101108693 A TW 101108693A TW I449200 B TWI449200 B TW I449200B
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guiding
unit
traction
solar
conveying
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TW201338188A (en
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Chroma Ate Inc
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Description

供太陽能矽晶片導引的導引裝置及其檢測機台Guide device for guiding solar raft wafer and its detection machine

本發明是有關於一種導引裝置,且特別是有關於一種供太陽能矽晶片檢測機台用的導引裝置。The present invention relates to a guiding device, and more particularly to a guiding device for a solar raft wafer inspection machine.

太陽能具有取之不竭、用之不盡、及綠色環保等特性,且在太陽能板的光電轉換效率不斷提升之下,使得太陽能之需求量快速的成長,於現今被看好的潔淨能源中,已成為不可或缺的能源之一。然而,發展太陽能所面臨的主要問題包括成本、生產良率及其光電轉換效率,尤其在這太陽能設備需求快速增加的年代,如何降低生產成本並縮減檢測與篩選分類的時間更顯得格外重要。業者為提高生產力、保持競爭優勢,大都採用自動化方式進行晶圓的製造與搬運,不僅可以節省人事成本、也同時提高生產效率;而為因應工廠自動化,輸送系統以及輸送路線的設計更是非常重要的。Solar energy is inexhaustible, inexhaustible, and environmentally friendly. Under the continuous improvement of the photoelectric conversion efficiency of solar panels, the demand for solar energy has grown rapidly. In today's optimistic clean energy, Become one of the indispensable energy sources. However, the main problems in the development of solar energy include cost, production yield and photoelectric conversion efficiency. Especially in the era of rapid increase in demand for solar equipment, how to reduce production costs and reduce the time of detection and screening classification is particularly important. In order to improve productivity and maintain competitive advantage, most of them use automated methods to manufacture and transport wafers, which not only saves personnel costs, but also improves production efficiency. In order to meet the needs of factory automation, transportation systems and transportation routes are very important. of.

目前,太陽能板之主要元件為太陽能矽晶片,太陽能矽晶片既輕且薄,在自動化製造與檢測過程中,倘若稍有不慎,即有可能造成破損、缺角或割損,導致良率下降;更麻煩的是,一旦產生肉眼無法察覺的微細裂縫,雖然此種微裂的寬度甚小,但由於微裂會阻斷太陽能矽晶片內部光電子的傳遞,因而明顯降低太陽能矽晶片所生電能的傳輸效率,尤其在安裝使用一段時間後,因為太陽光的照射以及溫度的變化,微裂將可能受熱應力而繼續擴大,對於輸出電能的影響也會增大。At present, the main components of solar panels are solar tantalum wafers. Solar tantalum wafers are both light and thin. In the process of automated manufacturing and testing, if they are slightly inadvertent, they may cause damage, corners or cuts, resulting in a drop in yield. More troublesome is that once the micro cracks that are invisible to the naked eye are generated, although the width of the microcracks is very small, since the microcracks block the transfer of photoelectrons inside the solar crucible wafer, the electric energy generated by the solar crucible wafer is significantly reduced. Transmission efficiency, especially after installation and use for a period of time, due to the irradiation of sunlight and temperature changes, microcracks may continue to expand due to thermal stress, and the impact on output power will also increase.

由此得知,太陽能矽晶片的微裂問題,將成為業界檢測的困擾,圖4所示習知技術揭露一種用於太陽能矽晶片之導引裝置,其包含兩組平行配置之夾具91,夾具91內緣可沿箭號方向,以緩衝材92接觸並夾制輸送帶上之太陽能矽晶片6,使其歸回正確位置,但此動作並無法在太陽能矽晶片6行進中運作,必須強迫太陽能矽晶片6暫停在對應導引裝置9之位置,由導引裝置9推擠導正後再繼續前進。尤其在輸送過程中未必只設有單一組導引裝置9,每逢導正時都需停頓,無疑減緩自動化檢測機台的輸送過程,使得檢測機台的檢測速率降低;更進一步,由於兩側夾具91推擠,若被輸送的太陽能矽晶片歪斜稍多,亦可能因推擠碰撞而破片,使成本提高而降低產出效能。It is known that the microcracking problem of the solar tantalum wafer will become a problem in the industry. The conventional technology shown in FIG. 4 discloses a guiding device for a solar crucible wafer, which comprises two sets of jigs 91 arranged in parallel, and a jig. The inner edge of 91 can contact the solar buffer wafer 6 on the conveyor belt in the direction of the arrow with the cushioning material 92 to return it to the correct position, but this action cannot be operated in the solar crucible chip 6, and the solar crucible must be forced. The wafer 6 is paused at the position of the corresponding guiding device 9, and is pushed by the guiding device 9 to continue the advancement. Especially in the conveying process, it is not necessary to provide only a single group of guiding devices 9, and every time the guiding time needs to be paused, the transmission process of the automatic testing machine is undoubtedly slowed down, so that the detection rate of the testing machine is lowered; further, due to both sides When the jig 91 is pushed, if the solar ray wafer to be transported is slightly skewed, it may be broken due to the push collision, which increases the cost and reduces the output efficiency.

加以,太陽能矽晶片一旦破片,也可能反向有部分碎片戳入夾具91中,使得停機保養維護的頻率無謂提高,增加額外的停機時間與人力成本,在在都使檢測效率降低。因此,如何確保受測太陽能矽晶片可以在輸送過程中,保持在檢測機台上的適當位置,以便在所有自動化檢驗過程中,順利取得正確檢測數值,避免無謂的誤判、刮傷、甚至破片、以及停機保養維護,即是本發明的重點。In addition, once the solar raft wafer is fragmented, some fragments may be poked into the jig 91 in the reverse direction, so that the frequency of maintenance and repair of the shutdown is unnecessarily increased, and additional downtime and labor cost are added, and the detection efficiency is lowered. Therefore, how to ensure that the solar raft wafer under test can be kept in the proper position on the inspection machine during the transportation process, so that in all automated inspection processes, the correct detection value can be smoothly obtained, avoiding unnecessary misjudgment, scratching, or even fragmentation. As well as downtime maintenance, it is the focus of the present invention.

本發明之一目的在提供一種供太陽能矽晶片導引的導引裝置,以確保受測太陽能矽晶片在輸送過程中,不致偏離預定位置。It is an object of the present invention to provide a guiding device for guiding a solar crucible wafer to ensure that the solar crucible wafer under test does not deviate from a predetermined position during transport.

本發明另一目的在提供一種供太陽能矽晶片導引的導引裝置,完全同步致動輸送單元及導引單元,減少受測太陽能矽晶片在導引過程中受損而造成破片的機率。Another object of the present invention is to provide a guiding device for guiding a solar crucible wafer, which fully activates the conveying unit and the guiding unit to reduce the probability of damage caused by the damaged solar crucible wafer during the guiding process.

本發明再一目的在提供一種具有上述導引裝置的太陽能矽晶片檢測機台,藉由同步致動輸送單元及導引單元,反向降低受測太陽能矽晶片在導引過程中損及導引單元的風險,以降低因而停機維修的頻率。Still another object of the present invention is to provide a solar raft wafer inspection machine having the above-mentioned guiding device, which can reduce the damage of the solar ray wafer under test during the guiding process by synchronously actuating the conveying unit and the guiding unit. The risk of the unit is to reduce the frequency of downtime maintenance.

本發明又一目的在提供一種具有上述導引裝置的太陽能矽晶片檢測機台,增加檢測效率,繼而有效提升產出效能。Another object of the present invention is to provide a solar tantalum wafer inspection machine having the above-described guiding device, which increases the detection efficiency and, in turn, effectively improves the output efficiency.

本發明提供一種太陽能矽晶片檢測機台用的導引裝置,供導引待測太陽能矽晶片,此導引裝置主要包括輸送單元、導引單元以及同步致動單元;其中,輸送單元用於承載並沿著一個傳輸方向傳輸上述太陽能矽晶片,且導引單元導正上述太陽能矽晶片並相對於上述輸送單元彼此鏡像設置,而同步致動單元包括一轉動動力源及傳輸上述轉動動力源之轉動的連動件,使得上述導引單元在傳輸方向有效速率等同於輸送單元在傳輸方向速率。The invention provides a guiding device for a solar raft wafer detecting machine for guiding a solar raft wafer to be tested, the guiding device mainly comprises a conveying unit, a guiding unit and a synchronous actuating unit; wherein the conveying unit is used for carrying And transmitting the solar raft wafer along a transport direction, and the guiding unit guides the solar raft wafer and mirrors each other with respect to the transport unit, and the synchronous actuating unit includes a rotating power source and transmits the rotating power source. The linkage causes the above-mentioned guiding unit to have an effective rate in the transport direction equal to the transport unit in the transport direction rate.

本發明另提供一種具有上述導引裝置的太陽能矽晶片檢測機台,此太陽能矽晶片檢測機台包括基座、設置於基座的導引裝置、對應輸送單元的檢測裝置、接收檢測裝置所傳來檢驗資料的處理裝置、以及接受處理裝置的指令並分類上述太陽能矽晶片的分類裝置。The present invention further provides a solar raft wafer inspection machine having the above-mentioned guiding device, the solar raft wafer detecting machine table comprising a pedestal, a guiding device disposed on the pedestal, a detecting device corresponding to the conveying unit, and a receiving detecting device A processing device for inspecting data, and a sorting device for accepting the instructions of the processing device and classifying the solar wafer.

根據本發明提出之技術特徵,透過導引裝置之承載及導正待測太陽能矽晶片,可大幅地降低損壞太陽能矽晶片邊緣之風險,並正確地傳送到預定受測位置處;如此一來,可有效克服習知問題,提供更佳的測試效率與更佳產出良率。According to the technical features of the present invention, the risk of damaging the edge of the solar raft wafer can be greatly reduced by carrying and guiding the solar raft wafer to be tested through the guiding device, and correctly transmitted to the predetermined measured position; thus, It can effectively overcome common problems and provide better test efficiency and better output yield.

有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之較佳實施例的詳細說明中,將可清楚的呈現。The foregoing and other objects, features, and advantages of the invention are set forth in the <RTIgt;

圖1及圖2為本發明導引裝置之第一較佳實施例的立體圖及側視圖。導引裝置1與習知技術同樣是設置於太陽能矽晶片檢測機台上。前述導引裝置1主要包括輸送單元11、導引單元12及同步致動單元13。輸送單元11主要用以承載並傳輸太陽能矽晶片6,且在本實施例中,是例釋為包括兩組皮帶輪111以及兩條分別受上述兩組皮帶輪111帶動、用以輸送上述太陽能矽晶片6的輸送帶112;由輸送單元11傳輸的太陽能矽晶片6,同樣藉由導引單元12進行方位導正;鑑於太陽能矽晶片6為對稱性結構,導引單元12也鏡像對稱地設置於輸送單元11的兩側,以對稱地維持其行進方向。1 and 2 are a perspective view and a side view of a first preferred embodiment of the guiding device of the present invention. The guiding device 1 is disposed on the solar raft wafer detecting machine as in the prior art. The aforementioned guiding device 1 mainly comprises a conveying unit 11, a guiding unit 12 and a synchronous actuating unit 13. The transport unit 11 is mainly used for carrying and transmitting the solar raft wafer 6, and in the present embodiment, is illustrated as including two sets of pulleys 111 and two of the two sets of pulleys 111 respectively for transporting the solar raft wafer 6 The conveyor belt 112; the solar crucible wafer 6 transported by the transport unit 11 is also oriented by the guiding unit 12; in view of the symmetrical structure of the solar crucible wafer 6, the guiding unit 12 is also mirror-symmetrically disposed on the transport unit Both sides of the 11 maintain their direction of travel symmetrically.

兩組導引單元12分別包括有一個導輪121、至少一個從動輪122、以及一個受導輪121驅動而環繞上述從動輪122的牽引皮帶123。其中,導輪121是負責接受上游的動力傳輸而率先致動,再由環繞其上的牽引皮帶123連動到從動輪122。如熟於此技術領域者所能輕易理解,若機台本身包括多個單元,例如多組檢測以及分類單元,則為使得受測太陽能矽晶片在每一關都正確對位,亦可在輸送帶112兩側設置多對導引單元12,確保太陽能矽晶片在機台的各環節,均能被正確定位檢測與汲取。The two sets of guiding units 12 respectively include a guide wheel 121, at least one driven wheel 122, and a traction belt 123 driven by the guide wheel 121 to surround the driven wheel 122. The guide wheel 121 is responsible for receiving the power transmission in the upstream direction and is first actuated, and then connected to the driven wheel 122 by the traction belt 123 surrounding the guide wheel 123. As can be easily understood by those skilled in the art, if the machine itself includes a plurality of units, such as multiple sets of detection and classification units, the measured solar raft wafers are correctly aligned at each level, and can also be transported. A plurality of pairs of guiding units 12 are disposed on both sides of the belt 112 to ensure that the solar raft wafers are correctly positioned, detected and captured at all stages of the machine.

為便說明起見,在此定義接觸導引單元12開始導正太陽能矽晶片6時,太陽能矽晶片6於輸送帶112上的位置為導正位置。亦即,當太陽能矽晶片6由輸送單元11傳輸至導正位置時,牽引皮帶123將接觸到太陽能矽晶片6,開始導正位置偏移與歪斜的太陽能矽晶片6,而牽引皮帶123暴露於外側、介於導輪121與從動輪122間、供接觸太陽能矽晶片6的部分在此定義為作用面1231,且為避免太陽能矽晶片6被導正時發生不當碰撞或擠壓而破片,牽引皮帶123的作用面1231與輸送帶112的輸送方向夾有如圖所示的一銳角。For the sake of explanation, when the contact guiding unit 12 is started to guide the solar raft wafer 6, the position of the solar raft wafer 6 on the conveyor belt 112 is a positive position. That is, when the solar crucible wafer 6 is transported by the transport unit 11 to the guiding position, the traction belt 123 will contact the solar crucible wafer 6, starting to guide the positional offset and skewed solar crucible wafer 6, and the traction belt 123 is exposed to The outer portion, between the guide wheel 121 and the driven wheel 122, the portion for contacting the solar raft wafer 6 is herein defined as the active surface 1231, and is broken to avoid undue collision or squeezing when the solar raft wafer 6 is guided. The acting surface 1231 of the belt 123 and the conveying direction of the conveyor belt 112 have an acute angle as shown.

也就是,本例中兩組導引單元12的導輪121之間,相對距離是大於待測太陽能矽晶片6的寬度,即使太陽能矽晶片6由輸送帶112輸送而來時略有偏斜,仍然可以被兩個導輪121間的開口所容納;當待測太陽能矽晶片6被輸送到導正位置後,將會觸及兩側導引單元12中至少一者的牽引皮帶123的作用面1231,由於本例中兩組導引單元12的從動輪122間,距離大致對應於太陽能矽晶片6的寬度,而小於兩個導輪121間的距離,藉此相對應地形成一漸縮之導引空間,使得太陽能矽晶片6在傳輸及導正的過程中,逐漸受兩導引單元12的兩作用面1231夾制,位置從而趨於理想。如此一來,可確保太陽能矽晶片6以正確的位置進入下個階段的製程。That is, in this example, the relative distance between the guide wheels 121 of the two sets of guiding units 12 is greater than the width of the solar raft wafer 6 to be tested, even if the solar raft wafer 6 is slightly deflected by the conveyor belt 112, It can still be accommodated by the opening between the two guide wheels 121; when the solar raft wafer 6 to be tested is transported to the guiding position, the active surface 1231 of the traction belt 123 of at least one of the two side guiding units 12 will be touched. Since the distance between the driven wheels 122 of the two sets of guiding units 12 in this example, the distance substantially corresponds to the width of the solar raft wafer 6, and less than the distance between the two guide wheels 121, thereby correspondingly forming a tapered guide. The space is such that the solar raft wafer 6 is gradually sandwiched by the two active surfaces 1231 of the two guiding units 12 during the transmission and guiding, and the position tends to be ideal. In this way, it is ensured that the solar crucible wafer 6 enters the next stage of the process in the correct position.

值得一提的是,本發明之主要技術特徵是在導引裝置1中設置一組同步致動單元13,用以使得導引單元12在其傳輸方向有效速率等同於輸送單元11在其傳輸方向速率。相較之下,由於前述習知技術需將輸送帶暫停,讓太陽能矽晶片靜候夾具的夾制,並且在對位後,再度開啟輸送帶,一方面無謂遲滯輸送流程,另方面,在輸送帶重新啟動時,仍有可能再度造成被輸送的太陽能矽晶片重新偏斜。尤其對於偏斜情況稍嚴重的矽晶片,更會在撞擊瞬間產生損害。It is worth mentioning that the main technical feature of the present invention is to provide a set of synchronous actuating units 13 in the guiding device 1 such that the guiding unit 12 has an effective rate in its transmission direction equal to the conveying unit 11 in its transmission direction. rate. In contrast, due to the aforementioned prior art, the conveyor belt needs to be suspended, the solar raft wafer waiting fixture is clamped, and after the alignment, the conveyor belt is opened again, on the one hand, there is no need to delay the conveying process, and on the other hand, in the conveying When the belt is restarted, it is still possible to cause the transmitted solar raft wafer to be deflected again. Especially for the sputum wafers with a slightly skewed condition, damage will occur at the moment of impact.

更進一步,本案具有一組同步致動單元13,包括轉動動力源131、藉由轉動動力源131作動的連動件132、以及由連動件132傳動至另一側導引單元12的傳動組件133。為方便說明起見,在本例中定義連動件132包括有第一牽引輪1321、第二牽引輪1322、第三牽引輪1323、轉向牽引輪1324、以及至少一條連接上述牽引輪的傳動皮帶1325。Furthermore, the present invention has a set of synchronous actuating units 13 including a rotary power source 131, a link 132 actuated by a rotary power source 131, and a drive assembly 133 that is driven by the link 132 to the other side guide unit 12. For convenience of explanation, the linkage 132 is defined in this example to include a first traction wheel 1321, a second traction wheel 1322, a third traction wheel 1323, a steering traction wheel 1324, and at least one transmission belt 1325 connecting the traction wheels. .

首先,第一牽引輪1321以一樞軸(未標號)樞設於輸送單元11之一側,其轉動方向等同於輸送方向;當啟動同步致動單元13的轉動動力源131時,此轉動動力源131將驅動第一牽引輪1321,而樞軸的牽動,使其接著驅動輸送單元11之皮帶輪111,進而帶動輸送帶112向輸送方向承載並傳輸太陽能矽晶片6。同時,第一牽引輪1321藉由傳動皮帶1325連結至第二牽引輪1322,使其跟著轉動,因此,和第一牽引輪1321呈90度夾角的相對立體關係;再由第二牽引輪1322帶動同側導輪121平行轉動。First, the first traction wheel 1321 is pivotally disposed on one side of the conveying unit 11 with a pivot (not labeled), and its rotation direction is equivalent to the conveying direction; when the rotating power source 131 of the synchronous actuation unit 13 is activated, the rotational power is The source 131 will drive the first traction sheave 1321, and the pivoting of the hub will cause the pulley 111 of the transport unit 11 to be driven, thereby driving the conveyor belt 112 to carry and transport the solar crucible wafer 6 in the transport direction. At the same time, the first traction wheel 1321 is coupled to the second traction wheel 1322 by the transmission belt 1325 so as to rotate accordingly, and thus has a relative stereoscopic relationship with the first traction wheel 1321 at an angle of 90 degrees; and then driven by the second traction wheel 1322 The same side guide wheel 121 rotates in parallel.

接著配置第三牽引輪1323以及轉向牽引輪1324,上述轉向牽引輪1324介於第二牽引輪1322及第三牽引輪1323之間,因此傳動皮帶1325會先連接至轉向牽引輪1324再連接至第三牽引輪1323,顧名思義,透過轉向牽引輪1324,可以使第二牽引輪1322及第三牽引輪1323兩者呈相反方向轉動,如圖示前者為順時針轉動,後者就為逆時針轉動,反之亦然。也就是,上述第一牽引輪1321及轉向牽引輪1324彼此平行且呈反向旋轉,造成第二牽引輪1322及第三牽引輪1323分別沿著一個垂直於上述第一牽引輪1321或轉向牽引輪1324軸向的樞軸、彼此反向旋轉。Then, the third traction wheel 1323 and the steering traction wheel 1324 are disposed. The steering traction wheel 1324 is interposed between the second traction wheel 1322 and the third traction wheel 1323. Therefore, the transmission belt 1325 is first connected to the steering traction wheel 1324 and then connected to the first The three traction wheels 1323, as the name implies, can rotate the second traction wheel 1322 and the third traction wheel 1323 in opposite directions through the steering traction wheel 1324. As shown in the figure, the former rotates clockwise, and the latter rotates counterclockwise. Also. That is, the first traction wheel 1321 and the steering traction wheel 1324 are parallel to each other and rotate in the opposite direction, so that the second traction wheel 1322 and the third traction wheel 1323 are respectively perpendicular to the first traction wheel 1321 or the steering traction wheel. The 1324 axial pivots rotate in opposite directions.

由於本例中的第一牽引輪1321、第二牽引輪1322、第三牽引輪1323及轉向牽引輪1324皆位於輸送帶112的一側,用於同步驅動輸送單元11及同側的導引單元12;因此,同步致動單元13更包括一個與第三牽引輪1323藉由樞軸連結的傳動組件133,透過另一皮帶傳動至輸送帶112另一側的導引單元12,此時另一側的導引單元12將和第三牽引輪1323同向且同步地轉動,上述所有的連動關係,將使得輸送帶112兩側導引單元12作為作用面1231處的牽引皮帶123,以彼此等速、且反向對稱地朝向輸送方向旋轉導引。Since the first traction wheel 1321, the second traction wheel 1322, the third traction wheel 1323 and the steering traction wheel 1324 in this example are all located on one side of the conveyor belt 112, the driving unit 11 and the guiding unit on the same side are synchronously driven. Therefore, the synchronous actuating unit 13 further includes a transmission assembly 133 coupled to the third traction sheave 1323 via a pivot, and is driven by another belt to the guiding unit 12 on the other side of the conveyor belt 112. The guiding unit 12 on the side will rotate in the same direction and synchronously with the third traction wheel 1323. All the above-mentioned linkage relationship will cause the guiding units 12 on both sides of the conveyor belt 112 to serve as the traction belt 123 at the acting surface 1231, etc. The guide is rotated in the conveying direction in a speed and in a reverse symmetry.

更進一步,考慮輸送帶112與牽引皮帶123的作用面1231間留有夾角,因此牽引皮帶123在本例中,將被賦予略大於輸送帶112的旋轉速度,使得將牽引皮帶123的移動速度區分為平行於輸送帶112、及垂直於輸送帶112的兩種分量時,平行於輸送帶112的移動速度分量將等於輸送帶112的速度。藉此,被輸送帶112所運送的太陽能矽晶片6,接觸牽引皮帶123時,牽引皮帶123在輸送方向將具有等同於輸送帶112的等效移動速度,與被輸送太陽能矽晶片6間沒有速度差,從而將推擠或壓迫造成破片的機率降至最低。Further, considering that the conveyor belt 112 has an angle with the acting surface 1231 of the traction belt 123, the traction belt 123 will be given a rotational speed slightly larger than the conveyor belt 112 in this example, so that the moving speed of the traction belt 123 is distinguished. When parallel to the conveyor belt 112 and perpendicular to the two components of the conveyor belt 112, the moving speed component parallel to the conveyor belt 112 will be equal to the speed of the conveyor belt 112. Thereby, when the solar raft wafer 6 conveyed by the conveyor belt 112 contacts the traction belt 123, the traction belt 123 will have an equivalent moving speed equivalent to the conveyor belt 112 in the conveying direction, and no speed between the solar ray wafer 6 being conveyed. Poor, thus minimizing the chance of pushing or pressing a fragment.

當然,傳動組件133不一定如圖中所示在第三牽引輪1323之下再加上一轉輪,亦可考慮由傳動皮帶1325直接致動另一側的導引單元12,或其他類似變化。此外,除所在位置以及作用的對象不同之外,各個牽引輪的構造大致與第一牽引輪1321相符,在此不予贅述;而本案的優勢亦在於,上述轉動動力源131可改牽引其他上述牽引輪之任一者來致動所有其他的牽引輪旋轉,均可導致相同效果。Of course, the transmission assembly 133 does not necessarily have a revolving wheel under the third traction sheave 1323 as shown in the figure. It is also conceivable to directly actuate the guiding unit 12 on the other side by the transmission belt 1325, or other similar changes. . In addition, the configuration of each traction wheel is substantially the same as that of the first traction wheel 1321 except for the location and the object to be applied, and will not be described herein. The advantage of the present invention is that the rotary power source 131 can be redirected to the other ones. Any one of the traction wheels to actuate all other traction wheel rotations can result in the same effect.

總而言之,所有的轉輪(包括皮帶輪111、導輪121、從動輪122、牽引輪)皆是由轉動動力源131為最初的動力來源,再藉由前述連動方式,一個一個的帶動其他的轉輪,繼而達成輸送單元11與導引單元12同步且同一方向地朝向輸送方向運轉。All in all, all the runners (including the pulley 111, the guide wheel 121, the driven wheel 122, the traction wheel) are the original power source by the rotary power source 131, and the other runners are driven one by one by the aforementioned linkage mode. Then, the conveying unit 11 is synchronized with the guiding unit 12 and operated in the same direction in the conveying direction.

請參閱圖3所示,應用本發明之太陽能矽晶片檢測機台更包含基座2、設置於基座2的導引裝置1、對應於導引裝置1之輸送單元的檢測裝置3、接收檢測裝置3所傳來檢驗資料的處理裝置4、以及接受處理裝置4的指令並分類上述太陽能矽晶片的分類裝置5。其中,上述太陽能矽晶片經前述導引方式承載並傳送至對應預定受測位置接受檢測,並透過檢測裝置3分別將太陽能矽晶片之表面影像及顏色影像等資料擷取下來,並將所得資料輸出至處理裝置4,再由處理裝置4判斷,並由接受處理裝置4指令之分類裝置5進行太陽能矽晶片的分類。另外,導引裝置1的同步致動單元是受該處理裝置4之指令而被驅動。Referring to FIG. 3, the solar cell wafer inspection machine to which the present invention is applied further includes a base 2, a guiding device 1 disposed on the base 2, a detecting device 3 corresponding to the conveying unit of the guiding device 1, and receiving detection. The processing device 4 that transmits the inspection data from the device 3 and the classification device 5 that receives the instructions of the processing device 4 and classifies the solar raft wafer. The solar raft wafer is carried by the guiding method and transmitted to the corresponding predetermined measured position for detection, and the surface image and the color image of the solar raft wafer are respectively taken out by the detecting device 3, and the obtained data is output. The processing device 4 is further determined by the processing device 4, and the classification device 5 instructed by the processing device 4 sorts the solar wafers. In addition, the synchronous actuating unit of the guiding device 1 is driven by the command of the processing device 4.

綜上所述,本發明之太陽能矽晶片導引裝置及具有該太陽能矽晶片導引裝置的檢測機台與習知技術相互比較時,透過導引單元及輸送單元之連動,更可以降低受測太陽能矽晶片在檢測過程中受損的機率,使得各檢測裝置在量測時的產出良率提升,避免在自動化檢測過程中造成無謂損壞,且成本與習知結構相彷卻功能更優異,實為最佳解決方案。In summary, when the solar raft wafer guiding device of the present invention and the detecting machine having the solar raft wafer guiding device are compared with the prior art, the linkage between the guiding unit and the conveying unit can further reduce the measured The probability of damage to the solar raft wafer during the inspection process increases the yield yield of each detection device during measurement, avoids unnecessary damage during the automatic inspection process, and the cost is similar to the conventional structure but the function is better. For the best solution.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許的更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。The present invention has been disclosed in the above embodiments, and is not intended to limit the present invention. Any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

1、9...導引裝置1, 9. . . Guide device

2...基座2. . . Pedestal

3...檢測裝置3. . . Testing device

4...處理裝置4. . . Processing device

5...分類裝置5. . . Sorting device

6...太陽能矽晶片6. . . Solar germanium wafer

11...輸送單元11. . . Conveyor unit

111...皮帶輪111. . . Pulley

112...輸送帶112. . . conveyor

12...導引單元12. . . Guidance unit

121...導輪121. . . Guide wheel

122...從動輪122. . . driven wheel

123...牽引皮帶123. . . Traction belt

1231...作用面1231. . . Action surface

13...同步致動單元13. . . Synchronous actuation unit

131...轉動動力源131. . . Rotating power source

132...連動件132. . . Linkage

1321...第一牽引輪1321. . . First traction wheel

1322...第二牽引輪1322. . . Second traction wheel

1323...第三牽引輪1323. . . Third traction wheel

1324...轉向牽引輪1324. . . Steering wheel

1325...傳動皮帶1325. . . Transmission belt

133...傳動組件133. . . Transmission component

91...夾具91. . . Fixture

92...緩衝材92. . . Cushioning material

圖1是本案之太陽能矽晶片導引裝置之第一較佳實施例的立體圖。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view of a first preferred embodiment of a solar crucible wafer guiding device of the present invention.

圖2是圖1之太陽能矽晶片導引裝置之第一較佳實施例的側視圖。2 is a side elevational view of the first preferred embodiment of the solar raft wafer guiding device of FIG. 1.

圖3是本案用於太陽能矽晶片導引裝置之檢測機台的立體圖。Fig. 3 is a perspective view of the detecting machine for the solar raft wafer guiding device of the present invention.

圖4是習知之導引裝置的示意圖。Figure 4 is a schematic illustration of a conventional guiding device.

1...導引裝置1. . . Guide device

6...太陽能矽晶片6. . . Solar germanium wafer

11...輸送單元11. . . Conveyor unit

111...皮帶輪111. . . Pulley

112...輸送帶112. . . conveyor

12...導引單元12. . . Guidance unit

121...導輪121. . . Guide wheel

122...從動輪122. . . driven wheel

123...牽引皮帶123. . . Traction belt

1231...作用面1231. . . Action surface

13...同步致動單元13. . . Synchronous actuation unit

131...轉動動力源131. . . Rotating power source

132...連動件132. . . Linkage

1321...第一牽引輪1321. . . First traction wheel

1322...第二牽引輪1322. . . Second traction wheel

1323...第三牽引輪1323. . . Third traction wheel

1324...轉向牽引輪1324. . . Steering wheel

1325...傳動皮帶1325. . . Transmission belt

133...傳動組件133. . . Transmission component

Claims (10)

一種太陽能矽晶片檢測機台用的導引裝置,供導引待測太陽能矽晶片,該導引裝置包括:一供承載並沿著一個傳輸方向傳輸上述太陽能矽晶片的輸送單元;至少一對供導正該輸送單元上之上述太陽能矽晶片的導引單元,且上述導引單元相對於上述輸送單元彼此鏡像對稱地分別設置於該輸送單元的兩側;以及一組使得上述導引單元在該傳輸方向有效速率等同於上述輸送單元在該傳輸方向速率的同步致動單元,該同步致動單元包括一個轉動動力源、及傳輸上述轉動動力源之轉動的連動件。A guiding device for a solar raft wafer inspection machine for guiding a solar raft wafer to be tested, the guiding device comprising: a conveying unit for carrying and transmitting the solar raft wafer along a conveying direction; at least one pair a guiding unit for guiding the solar raft wafer on the conveying unit, and the guiding unit is respectively disposed on both sides of the conveying unit with respect to the conveying unit in mirror symmetry; and a group is such that the guiding unit is The transmission direction effective rate is equivalent to the synchronous actuation unit of the transport unit at the transmission direction rate, and the synchronous actuation unit includes a rotational power source and a linkage for transmitting the rotation of the rotational power source. 如申請專利範圍第1項所述的導引裝置,其中該輸送單元包括兩組皮帶輪,及兩條分別受上述兩組的皮帶輪帶動、用以輸送上述太陽能矽晶片的輸送帶。The guiding device of claim 1, wherein the conveying unit comprises two sets of pulleys, and two conveying belts respectively driven by the two sets of pulleys for conveying the solar raft wafer. 如申請專利範圍第2項所述的導引裝置,其中上述導引單元分別包括:一個導輪;至少一個從動輪;及一個受該導輪驅動而環繞上述從動輪的牽引皮帶,其中該牽引皮帶具有一個對應上述輸送帶之一的作用面,且該作用面與上述輸送方向夾一銳角。The guiding device of claim 2, wherein the guiding unit comprises: a guiding wheel; at least one driven wheel; and a traction belt driven by the guiding wheel to surround the driven wheel, wherein the traction belt The belt has an active surface corresponding to one of the conveyor belts, and the active surface is at an acute angle to the conveying direction. 如申請專利範圍第3項所述的導引裝置,其中該連動件包括:一組驅動上述組皮帶輪的第一牽引輪;兩組分別驅動上述兩個導輪的第二及第三牽引輪;一個介於上述第二及第三牽引輪中的轉向牽引輪;及至少一條連接上述牽引輪的傳動皮帶;其中,上述第一及轉向牽引輪彼此反向旋轉,第二及第三牽引輪分別沿著一個垂直於上述第一牽引輪軸向的樞軸、彼此反向旋轉;且上述牽引輪之一是受該轉動動力源致動而旋轉。The guiding device of claim 3, wherein the linking member comprises: a set of first traction wheels driving the set of pulleys; and two sets of second and third traction wheels respectively driving the two guide wheels; a steering traction wheel interposed between the second and third traction wheels; and at least one transmission belt connecting the traction wheels; wherein the first and the steering traction wheels rotate in opposite directions to each other, and the second and third traction wheels respectively Rotating in opposite directions with each other along a pivot axis perpendicular to the axial direction of the first traction sheave; and one of the traction wheels is rotated by the rotational power source. 如申請專利範圍第4項所述的導引裝置,其中該第二及第三牽引輪位於上述輸送帶的一側,且其中一者是供驅動位於上述輸送帶同側的上述導引單元;該同步致動單元更包括受上述第二及第三牽引輪其中另一者驅動、並傳動至上述輸送帶另一側導引單元的傳動組件。The guiding device of claim 4, wherein the second and third traction wheels are located on one side of the conveyor belt, and one of the guiding units is for driving the guiding unit located on the same side of the conveyor belt; The synchronous actuating unit further includes a transmission assembly that is driven by the other of the second and third traction wheels and that is coupled to the other side of the conveyor belt. 一種太陽能矽晶片檢測機台,包括:一個基座;一種設置於該基座的導引裝置,包括:一供承載並沿著一個傳輸方向傳輸上述太陽能矽晶片的輸送單元;至少一對供導正該輸送單元上之上述太陽能矽晶片的導引單元,且上述導引單元相對於上述輸送單元彼此鏡像對稱地分別設置於該輸送單元的兩側;以及一組使得上述導引單元在該傳輸方向有效速率等同於上述輸送單元在該傳輸方向速率的同步致動單元,該同步致動單元包括單一轉動動力源、及傳輸上述轉動動力源之轉動的連動件;一個對應該輸送單元的檢測裝置;一個接收該檢測裝置所傳來檢驗資料的處理裝置;以及一個接受該處理裝置的指令、分類上述太陽能矽晶片的分類裝置。A solar raft wafer inspection machine includes: a susceptor; a guiding device disposed on the pedestal, comprising: a conveying unit for carrying and transporting the solar raft wafer in a conveying direction; at least one pair of guiding a guiding unit of the solar raft wafer on the transport unit, and the guiding unit is disposed on both sides of the transport unit in mirror symmetry with respect to the transport unit; and a set such that the guiding unit is in the transmission The direction effective rate is equivalent to the synchronous actuating unit of the transport unit at the transmission direction rate, the synchronous actuating unit comprises a single rotating power source, and a linking member for transmitting the rotation of the rotating power source; and a detecting device corresponding to the conveying unit a processing device that receives the inspection data transmitted by the detecting device; and a sorting device that receives the command from the processing device and classifies the solar wafer. 如申請專利範圍第6項所述的太陽能矽晶片檢測機台,其中該同步致動導引單元是受該處理裝置指令而被驅動。 The solar tantalum wafer inspection machine of claim 6, wherein the synchronous actuation guide unit is driven by the processing device command. 如申請專利範圍第6項所述的太陽能矽晶片檢測機台,其中該輸送單元包括兩組皮帶輪,及兩條分別受上述兩組的皮帶輪帶動、用以輸送上述太陽能矽晶片的輸送帶;且上述導引單元分別包括:一個導輪;至少一個從動輪;及一個受該導輪驅動而環繞上述從動輪的牽引皮帶,其中該牽引皮帶具有一個對應上述輸送帶之一的作用面,且該作用面與上述輸送方向夾一銳角。 The solar raft wafer inspection machine of claim 6, wherein the conveying unit comprises two sets of pulleys, and two conveyor belts respectively driven by the two sets of pulleys for conveying the solar raft wafer; The guiding units respectively include: a guide wheel; at least one driven wheel; and a traction belt driven by the guide wheel to surround the driven wheel, wherein the traction belt has an active surface corresponding to one of the conveyor belts, and the traction belt has The active surface is at an acute angle to the above conveying direction. 如申請專利範圍第8項所述的太陽能矽晶片檢測機台,其中該連動件包括:一組驅動上述組皮帶輪的第一牽引輪;兩組分別驅動上述兩個導輪的第二及第三牽引輪;一個介於上述第二及第三牽引輪中的轉向牽引輪;及至少一條連接上述牽引輪的傳動皮帶;其中,上述第一及轉向牽引輪彼此反向旋轉,第二及第三牽引輪分別沿著一個垂直於上述第一牽引輪軸向的樞軸、彼此反向旋轉;且上述牽引輪之一是受該轉動動力源致動而旋轉。 The solar raft wafer inspection machine of claim 8, wherein the linkage comprises: a set of first traction wheels driving the set of pulleys; and two sets of second and third driving the two guide wheels respectively a traction sheave; a steering traction wheel interposed between the second and third traction wheels; and at least one transmission belt connecting the traction wheels; wherein the first and the steering traction wheels rotate in opposite directions, second and third The traction wheels are respectively rotated in opposite directions along a pivot axis perpendicular to the axial direction of the first traction wheel; and one of the traction wheels is rotated by the rotational power source. 如申請專利範圍第9項所述的太陽能矽晶片檢測機台,其中該第二及第三牽引輪位於上述輸送帶的一側,且其中一者是供驅動位於上述輸送帶同側的上述導引單元;該同步致動單元更包括受上述第二及第三牽引輪其中另一者驅動、並傳動至上述輸送帶另一側導引單元的傳動組件。The solar tantalum wafer inspection machine of claim 9, wherein the second and third traction wheels are located on one side of the conveyor belt, and one of the guides is for driving the same guide on the same side of the conveyor belt. The synchronous actuation unit further includes a transmission assembly that is driven by the other of the second and third traction wheels and that is coupled to the other side of the conveyor belt.
TW101108693A 2012-03-14 2012-03-14 Guidance device for solar silicon chip guide and its testing machine TWI449200B (en)

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TWM340279U (en) * 2008-03-20 2008-09-11 Chroma Ate Inc Redirection device for solar silicon chip inspector and delivery device thereof

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