TWI448385B - Colored membrance structure for the propose of improve the appearance of the product and manufacturing method of colored membrance for improving the appearance of the product - Google Patents
Colored membrance structure for the propose of improve the appearance of the product and manufacturing method of colored membrance for improving the appearance of the product Download PDFInfo
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Description
本發明是有關於一種有色膜結構作為增加產品外觀之用途與用於增加產品外觀之有色膜結構之製造方法，特別是有關於一種以薄膜沉積法形成一層粗糙金屬層以減少光反射率之有色膜結構。 The present invention relates to a colored film structure as a method for increasing the appearance of a product and a method for manufacturing a colored film structure for increasing the appearance of a product, and more particularly to a colored film formed by a thin film deposition method to reduce light reflectance. Membrane structure.
目前，在各種樂器、家電與3C產品中，擁有光鮮亮麗的外觀不但可以提升買氣，更可以提升產品本身的工藝價值。因此，各家廠商都必須在產品表面的色澤與質感上下工夫，才能讓自家的產品能得到更多消費者的青睞。習知外觀加工的方式有電鍍、烤漆或真空濺鍍，其中電鍍大多只能電鍍於金屬材質的外殼上，電鍍加工的過層中還會產生大量的電鍍廢水，以至汙染環境，且電鍍容易在表面產生微顆粒而影響觀感。烤漆加工具有亮面、色彩鮮豔與不易掉漆之優點，但其表面往往容易沾上指紋而變髒，而增加清潔上之問題。真空濺鍍加工具有低成本、產量大與符合環保法令之優點，但缺點是真空濺鍍加工往往無法呈現特定之顏色，例如白色。 At present, in all kinds of musical instruments, home appliances and 3C products, having a glamorous and beautiful appearance can not only enhance the purchase of gas, but also enhance the craft value of the product itself. Therefore, all manufacturers must work hard on the surface color and texture of the product, so that their products can be favored by more consumers. Conventional appearance processing methods include electroplating, baking varnish or vacuum sputtering. Most of the electroplating can only be electroplated on the metal casing, and a large amount of electroplating wastewater is generated in the electroplated layer, which pollutes the environment and is easy to plate. The surface produces microparticles that affect the look and feel. The paint processing has the advantages of bright surface, bright color and easy to drop paint, but the surface is often easily stained with fingerprints, which increases the problem of cleaning. Vacuum sputtering processes have the advantages of low cost, high yield, and compliance with environmental laws, but the disadvantage is that vacuum sputtering processes often fail to present a particular color, such as white.
有鑑於上述習知技藝之問題，本發明之其中一目的就是在提供一種色膜結構作為增加產品外觀之用途，以增加產品外觀之工藝價值。 In view of the above-mentioned problems of the prior art, one of the objects of the present invention is to provide a color film structure as an application for increasing the appearance of the product to increase the process value of the product appearance.
緣是，為達上述目的，本發明之有色膜結構作為增加產品外觀之用途，其包含：一基板；一粗糙金屬層，此粗糙金屬層位於基板上，此粗糙金屬層之表面具有一粗糙度，用以降低光反射率；以及一顯色層，此顯色層係位於粗糙金屬層之表面上，有色膜結構藉以使有色膜結構顯現一顏色；一保護層，此保護層係位於顯色層上，藉以保護顯色層於大氣或其他環境下不會產生氧化現象或化學變化現象。 In order to achieve the above object, the colored film structure of the present invention is used for increasing the appearance of the product, comprising: a substrate; a rough metal layer, the rough metal layer is located on the substrate, and the surface of the rough metal layer has a roughness For reducing the light reflectivity; and a color developing layer on the surface of the rough metal layer, the colored film structure is used to make the colored film structure appear a color; a protective layer, the protective layer is located in the color developing layer On the layer, the chromogenic layer is protected from oxidation or chemical changes in the atmosphere or other environments.
其中，此保護層之膜厚範圍係10nm至1000nm，該保護層之材質係為氧化矽(SiOx)或氧化鋁(AlOx)，且x係為一有理數。 The thickness of the protective layer ranges from 10 nm to 1000 nm, and the material of the protective layer is cerium oxide (SiOx) or aluminum oxide (AlOx), and the x system is a rational number.
其中，此基板之材質係為玻璃、金屬、不鏽鋼或高分子材料。該基板可選擇性與粗糙金屬層之間沉積一緩衝層，用以緊密結合該基板與該粗糙金屬層，該緩衝層之材質係為鎳、鉻、各種鎳合金或各種鉻合金。 The material of the substrate is glass, metal, stainless steel or polymer material. The substrate may selectively deposit a buffer layer between the rough metal layer for tightly bonding the substrate and the rough metal layer. The buffer layer is made of nickel, chromium, various nickel alloys or various chromium alloys.
其中，此粗糙金屬層之材質係為錫、鋅、銦、各種錫合金、各種銦合金或各種鋅合金，該粗糙金屬層之膜厚範圍係5nm至1000nm，該粗糙金屬層之平均表面粗糙度(Ra)範圍係為可例如為約0.06微米(μm)至約0.25微米之間。 Wherein, the material of the rough metal layer is tin, zinc, indium, various tin alloys, various indium alloys or various zinc alloys, and the thickness of the rough metal layer ranges from 5 nm to 1000 nm, and the average surface roughness of the rough metal layer The (Ra) range can be, for example, between about 0.06 micrometers (μm) to about 0.25 micrometers.
其中，該顯色層之材質係為銅、鋁、銀、鎳、鉻、鋯、鈦、氧化銅、氧化鋁、氧化銀、氧化鎳、氧化鉻、氧化鋯、氧化鈦、氮化 鋁、氮化鉻、氮化鋯、氮化鈦或不鏽鋼，顯色層之膜厚範圍係30nm至5500nm。 Wherein, the material of the color developing layer is copper, aluminum, silver, nickel, chromium, zirconium, titanium, copper oxide, aluminum oxide, silver oxide, nickel oxide, chromium oxide, zirconium oxide, titanium oxide, and nitriding. Aluminum, chromium nitride, zirconium nitride, titanium nitride or stainless steel, the color development layer has a film thickness ranging from 30 nm to 5,500 nm.
根據本發明之另一目的，提出一種環保又節能之用於增加產品外觀之有色膜結構之製造方法。 According to another object of the present invention, an environmentally friendly and energy-saving manufacturing method for a colored film structure for increasing the appearance of a product is proposed.
本發明之一種用於增加產品外觀之有色膜結構之製造方法，包含下列步驟：提供一基板；形成一粗糙金屬層於該基板上，此粗糙金屬層之表面具有一粗糙度，藉以減少顯色層反射率；以及形成一顯色層於此粗糙金屬層之表面上，藉以使此有色膜結構顯現出一顏色。形成一保護層於顯色層上，藉以保護顯色層於大氣或其他環境下不產生氧化現象或化學變化現象。 A manufacturing method of a colored film structure for increasing the appearance of a product comprises the steps of: providing a substrate; forming a rough metal layer on the substrate, the surface of the rough metal layer having a roughness to reduce color development Layer reflectivity; and forming a color developing layer on the surface of the rough metal layer, whereby the colored film structure exhibits a color. A protective layer is formed on the color developing layer to protect the color developing layer from oxidation or chemical changes in the atmosphere or other environments.
其中，此粗糙金屬層係以濺鍍、蒸鍍、化學沉積(Chemical Vapor Deposition,CVD)、電漿化學氣相沉積(Plasma enhanced Chemical Vapor Deposition,PECVD)或塗佈等沉積法形成於該基板上，且此粗糙金屬層之材質為錫、鋅、銦、各種錫合金、各種鋅合金或各種銦合金。此粗糙金屬層之平均表面粗糙度範圍係為可例如為約0.06微米至約0.25微米之間。 Wherein, the rough metal layer is formed on the substrate by sputtering, vapor deposition, chemical vapor deposition (CVD), plasma enhanced chemical Vapor Deposition (PECVD) or coating. And the material of the rough metal layer is tin, zinc, indium, various tin alloys, various zinc alloys or various indium alloys. The average surface roughness of the rough metal layer can range, for example, from about 0.06 microns to about 0.25 microns.
其中，此顯色層係以濺鍍、蒸鍍、CVD、PECVD或塗佈等沉積法形成於粗糙金屬層之表面上，此顯色層之材質係為銅、鋁、銀、鎳、鉻、鋯、鈦、氧化銅、氧化鋁、氧化銀、氧化鎳、氧化鉻、氧化鋯、氧化鈦、氮化鋁、氮化鉻、氮化鋯、氮化鈦或不鏽鋼。 Wherein, the color developing layer is formed on the surface of the rough metal layer by sputtering, vapor deposition, CVD, PECVD or coating, and the coloring layer is made of copper, aluminum, silver, nickel, chromium, Zirconium, titanium, copper oxide, aluminum oxide, silver oxide, nickel oxide, chromium oxide, zirconium oxide, titanium oxide, aluminum nitride, chromium nitride, zirconium nitride, titanium nitride or stainless steel.
其中，此基板之材質係為玻璃、金屬、不鏽鋼或高分子材料。其中，該基板更可以選擇性與粗糙金屬層之間沉積一緩衝層，用以緊密結合基板與粗糙金屬層。此外，此緩衝層之材質為鎳、鉻、 各種鎳合金或各種鉻合金。 The material of the substrate is glass, metal, stainless steel or polymer material. Wherein, the substrate can selectively deposit a buffer layer between the rough metal layer for tightly bonding the substrate and the rough metal layer. In addition, the buffer layer is made of nickel, chrome, Various nickel alloys or various chromium alloys.
承上所述，依本發明之有色膜結構作為增加產品外觀之用途與用於增加產品外觀之有色膜結構之製造方法，其可具有一或多個下述優點： As described above, the colored film structure according to the present invention can be used as a manufacturing method for increasing the appearance of the product and a colored film structure for increasing the appearance of the product, which may have one or more of the following advantages:
(1)此用於增加產品外觀之有色膜結構之製造方法可藉由薄膜沉積法製造，藉以減少環境污染以及能源消耗，並具有低溫成膜之特點。 (1) The manufacturing method of the colored film structure for increasing the appearance of the product can be produced by a thin film deposition method to reduce environmental pollution and energy consumption, and has the characteristics of low-temperature film formation.
(2)此有色膜結構作為增加產品外觀之用途可藉由粗糙金屬層減少光反射率，藉此形成特定顏色。 (2) The use of the colored film structure as an effect of increasing the appearance of the product can reduce the light reflectance by the rough metal layer, thereby forming a specific color.
(3)此有色膜結構作為增加產品外觀之用途具有一保護層保護顯色層，藉此避免有色膜結構之顯色層變質並可提升有色膜硬度。 (3) The colored film structure has a protective layer for protecting the color developing layer as an application for increasing the appearance of the product, thereby preventing deterioration of the color developing layer of the colored film structure and improving the hardness of the colored film.
10‧‧‧基板 10‧‧‧Substrate
12‧‧‧粗糙金屬層 12‧‧‧Rough metal layer
121‧‧‧表面 121‧‧‧ surface
14‧‧‧顯色層 14‧‧‧Color layer
16‧‧‧保護層 16‧‧‧Protective layer
18‧‧‧緩衝層 18‧‧‧ Buffer layer
S1‧‧‧提供基板 S1‧‧‧ provides substrate
S2‧‧‧進行第一形成步驟 S2‧‧‧First formation step
S3‧‧‧進行第二形成步驟 S3‧‧‧Second forming step
S4‧‧‧進行第三形成步驟 S4‧‧‧ for the third formation step
第1圖係為本發明之有色膜結構作為增加產品外觀之用途之示意圖。 Figure 1 is a schematic illustration of the colored film structure of the present invention as an application for increasing the appearance of the product.
第2圖係為本發明之有色膜結構作為增加產品外觀之用途之粗糙金屬層之示意圖。 Figure 2 is a schematic illustration of the colored film structure of the present invention as a rough metal layer for use in increasing the appearance of the product.
第3圖係為本發明之用於增加產品外觀之有色膜結構之製造方法之流程圖。 Figure 3 is a flow diagram of a method of making a colored film structure for increasing the appearance of a product of the present invention.
第4圖係為本發明之平均反射率示意圖。 Figure 4 is a schematic diagram of the average reflectance of the present invention.
請參閱第1圖，其係為本發明之有色膜結構作為增加產品外觀之用途之示意圖。圖中，有色膜結構包含基板10，此基板10係例如 為玻璃、金屬、不鏽鋼或高分子材料等材料。此基板10上設有粗糙金屬層12，粗糙金屬層12之表面具有一粗糙度，用以降低反射率。粗糙金屬層12上設有顯色層14，藉以使有色膜結構顯現一顏色。顯色層14上設有保護層16，藉以保護顯色層14。其中基板10與該粗糙金屬層12之間可選擇性具有一緩衝層18，此緩衝層18用以使基板10與粗糙金屬層12具有更好之接合效果。此外，粗糙金屬層12之厚度範圍例如5至1000奈米(nm)，較佳為100至500奈米(nm)；顯色層14之厚度範圍例如30至5500奈米(nm)，較佳為350至1500奈米(nm)；保護層16之厚度範圍例如10至1000奈米(nm)，較佳為30至110奈米(nm)。 Please refer to Fig. 1, which is a schematic view of the colored film structure of the present invention as an application for increasing the appearance of the product. In the figure, the colored film structure comprises a substrate 10, which is, for example, It is made of glass, metal, stainless steel or polymer materials. The substrate 10 is provided with a rough metal layer 12 having a roughness on the surface of the rough metal layer 12 for reducing the reflectance. A color developing layer 14 is provided on the rough metal layer 12, whereby the colored film structure exhibits a color. A protective layer 16 is disposed on the color developing layer 14 to protect the color developing layer 14. A buffer layer 18 is selectively disposed between the substrate 10 and the rough metal layer 12, and the buffer layer 18 is used to better bond the substrate 10 and the rough metal layer 12. Further, the thickness of the rough metal layer 12 is, for example, 5 to 1000 nanometers (nm), preferably 100 to 500 nanometers (nm); and the thickness of the color developing layer 14 is, for example, 30 to 5,500 nanometers (nm), preferably The thickness of the protective layer 16 is, for example, 10 to 1000 nanometers (nm), preferably 30 to 110 nanometers (nm).
請參閱第2圖，其係為本發明之有色膜結構作為增加產品外觀之用途之粗糙金屬層之示意圖。圖中，粗糙金屬層12之表面121具有一粗糙度，此表面121可使光線進行反複反射，藉以吸收光線降低反射率，避免發生例如全反射之情況。其中，此粗糙金屬層12之材質係例如為錫、鋅、銦、各種錫合金、各種鋅合金或各種銦合金之金屬，藉由將低熔點金屬以例如薄膜沉積法，且例如濺鍍法，形成於該基板10上，藉此產生一粗糙金屬層12。此外，基板10與粗糙金屬層12之間可選擇性具有一緩衝層18，此緩衝層18之材質係例如為鎳、鉻、各種鎳合金以及各種鉻合金。此粗糙金屬層12之表面121之平均表面粗糙度(Ra)範圍係為可例如為約0.06微米(μm)至約0.25微米之間，較佳為約0.08微米(μm)至約0.13微米之間。 Please refer to Fig. 2, which is a schematic view of the colored film structure of the present invention as a rough metal layer for the purpose of increasing the appearance of the product. In the figure, the surface 121 of the rough metal layer 12 has a roughness, and the surface 121 allows the light to be repeatedly reflected, thereby absorbing light to reduce the reflectance and avoiding, for example, total reflection. The material of the rough metal layer 12 is, for example, tin, zinc, indium, various tin alloys, various zinc alloys or metals of various indium alloys, by using a low melting point metal, for example, a thin film deposition method, and for example, a sputtering method. It is formed on the substrate 10, thereby producing a rough metal layer 12. In addition, a buffer layer 18 may be selectively disposed between the substrate 10 and the rough metal layer 12. The material of the buffer layer 18 is, for example, nickel, chromium, various nickel alloys, and various chromium alloys. The surface 121 of the rough metal layer 12 has an average surface roughness (Ra) ranging, for example, from about 0.06 micrometers (μm) to about 0.25 micrometers, preferably from about 0.08 micrometers (μm) to about 0.13 micrometers. .
請參閱第4圖，其係為本發明之平均反射率示意圖。如第1圖與第4圖所示，以玻璃為基板10之材質，於此基板10濺鍍一層銦(In) 形成粗糙金屬層12，再於粗糙金屬層12濺鍍一層銀(Ag)為顯色層14，此有色膜結構在可見光波長400奈米至800奈米之間平均反射率為84.22%。以玻璃為基板10之材質，於此基板10濺鍍一層銀(Ag)為顯色層14而不濺鍍粗糙金屬層12，此有色膜結構在可見光波長400奈米至800奈米之間平均反射率為94.84%。由此可知，已形成粗糙金屬層12之有色膜結構之平均光反射會小於未形成粗糙金屬層12之有色膜結構。故，本發明於有色膜結構中有形成一層粗糙金屬層12，藉以吸收光線降低反射率，並且避免發生例如全反射之情況。 Please refer to FIG. 4, which is a schematic diagram of the average reflectance of the present invention. As shown in FIGS. 1 and 4, glass is used as the material of the substrate 10, and a layer of indium (In) is sputtered on the substrate 10. A rough metal layer 12 is formed, and a layer of silver (Ag) is sputtered on the rough metal layer 12 to form a color developing layer 14. The average reflectance of the colored film structure between 400 nm and 800 nm is 84.22%. The glass is used as the material of the substrate 10, and the substrate 10 is sputtered with a layer of silver (Ag) as the color developing layer 14 without sputtering the rough metal layer 12, and the colored film structure is averaged between visible light wavelengths of 400 nm and 800 nm. The reflectance was 94.84%. It can be seen that the average light reflection of the colored film structure in which the rough metal layer 12 has been formed is smaller than that of the colored film structure in which the rough metal layer 12 is not formed. Therefore, the present invention forms a rough metal layer 12 in the colored film structure, thereby absorbing light to reduce reflectance and avoiding, for example, total reflection.
如第1圖與第2圖所示，顯色層14係形成於粗糙金屬層12之上，此顯色層14係用以使有色膜結構顯現一顏色。此顯色層14之成分例如為銅、鋁、銀、鎳、鉻、鋯、鈦、氧化銅、氧化鋁、氧化銀、氧化鎳、氧化鉻、氧化鋯、氧化鈦、氮化鋁、氮化鉻、氮化鋯、氮化鈦或不鏽鋼，此有色薄膜材料係以薄膜沉積法，例如濺鍍、蒸鍍、化學沉積(CVD)、電漿化學氣相沉積(PECVD)或塗佈等方法，形成於粗糙金屬層12之上。保護層16係形成於顯色層14之上，保護層16係用以保護顯色層於大氣或其他環境下不會產生氧化現象或化學變化現象。保護層16之成分例如為氧化矽(SiOx)或氧化鋁(AlOx)，且x係為一有理數。此保護層16之形成方法例如以薄膜沉積法，例如例如濺鍍、蒸鍍、化學沉積(CVD)、電漿化學氣相沉積(PECVD)或塗佈等方法，形成一層矽氧化物或鋁氧化物於顯色層14上。 As shown in Figs. 1 and 2, the color developing layer 14 is formed on the rough metal layer 12, and the color developing layer 14 serves to make the colored film structure appear a color. The composition of the chromogenic layer 14 is, for example, copper, aluminum, silver, nickel, chromium, zirconium, titanium, copper oxide, aluminum oxide, silver oxide, nickel oxide, chromium oxide, zirconium oxide, titanium oxide, aluminum nitride, or nitride. Chromium, zirconium nitride, titanium nitride or stainless steel. The colored film material is deposited by thin film deposition, such as sputtering, evaporation, chemical deposition (CVD), plasma chemical vapor deposition (PECVD) or coating. Formed on the rough metal layer 12. The protective layer 16 is formed on the color developing layer 14, and the protective layer 16 is used to protect the color developing layer from oxidation or chemical changes in the atmosphere or other environments. The composition of the protective layer 16 is, for example, cerium oxide (SiOx) or aluminum oxide (AlOx), and x is a rational number. The protective layer 16 is formed by, for example, thin film deposition, for example, sputtering, evaporation, chemical deposition (CVD), plasma chemical vapor deposition (PECVD), or coating to form a layer of tantalum oxide or aluminum oxide. The object is on the color developing layer 14.
如第1圖與第2圖所示，本發明之第一實施例如有色膜結構之一粗糙金屬層12之材質為銦，此粗糙金屬層12之厚度為350奈米(nm) ，此粗糙金屬層12之表面121之平均表面粗糙度(Ra)為0.103微米(μm)，此粗糙金屬層12上之此顯色層14之材質為鋁，所以此顯色層14之顏色為銀白色，此顯色層14之厚度為800奈米(nm)。此顯色層14上之保護層16之材質為矽氧化物(SiOx)，此保護層16之厚度為85奈米(nm)。綜前所述，此第一實施例之有色膜結構係產生一銀白色澤。 As shown in FIGS. 1 and 2, the first embodiment of the present invention, for example, a material having a colored film structure, the rough metal layer 12 is made of indium, and the thickness of the rough metal layer 12 is 350 nm (nm). The surface 121 of the rough metal layer 12 has an average surface roughness (Ra) of 0.103 micrometers (μm). The color of the color developing layer 14 on the rough metal layer 12 is aluminum, so the color of the color developing layer 14 is Silver white, the color developing layer 14 has a thickness of 800 nanometers (nm). The material of the protective layer 16 on the color developing layer 14 is cerium oxide (SiOx), and the protective layer 16 has a thickness of 85 nm. As described above, the colored film structure of this first embodiment produces a silvery white color.
如第1圖與第2圖所示，本發明之第二實施例如有色膜結構之一粗糙金屬層12之材質為錫，此粗糙金屬層12之厚度為350奈米(nm)，此粗糙金屬層12之表面121之平均表面粗糙度(Ra)為0.085微米(μm)。此粗糙金屬層12上之此顯色層14之材質為銀，所以此顯色層14之顏色為白色，此顯色層14之厚度為1200奈米(nm)。此顯色層14上之保護層16之材質為矽氧化物，此保護層16之厚度為90奈米(nm)。綜前所述，此第一實施例之有色膜結構係產生一珍珠白色澤。 As shown in FIGS. 1 and 2, a second embodiment of the present invention, such as a colored film structure, is made of tin, and the rough metal layer 12 has a thickness of 350 nm (nm). The surface 121 of the layer 12 has an average surface roughness (Ra) of 0.085 micrometers (μm). The material of the color developing layer 14 on the rough metal layer 12 is silver, so the color of the color developing layer 14 is white, and the color developing layer 14 has a thickness of 1200 nanometers (nm). The material of the protective layer 16 on the color developing layer 14 is tantalum oxide, and the thickness of the protective layer 16 is 90 nanometers (nm). As described above, the colored film structure of this first embodiment produces a pearl white color.
請參閱第3圖，其係為本發明之用於增加產品外觀之有色膜結構之製造方法之流程圖。圖中，步驟S1係提供一基板10，此基板10係經過清洗步驟，此基板10之材質係為玻璃、金屬、不鏽鋼或高分子材料等材料。步驟S2係進行第一形成步驟，此第一形成步驟係於基板10上例如以薄膜沉積法，例如濺鍍、蒸鍍、化學沉積(CVD)、電漿化學氣相沉積(PECVD)或塗佈等方法，形成一層粗糙金屬層12，此粗糙金屬層12係為低熔點金屬，例如錫、鋅、銦、各種錫合金、各種鋅合金或各種銦合金。步驟S3係進行第二形成步驟，此第二形成步驟係於粗糙金屬層12上形成一顯色層14。此顯色層14之形成方法係例如以薄膜沉積法，例如濺鍍、蒸鍍、化 學沉積(CVD)、電漿化學氣相沉積(PECVD)或塗佈等方法，形成一層有色薄膜於粗糙金屬層12上，此有色薄膜之材質例如為銅、鋁、銀、鎳、鉻、鋯、鈦、氧化銅、氧化鋁、氧化銀、氧化鎳、氧化鉻、氧化鋯、氧化鈦、氮化鋁、氮化鉻、氮化鋯、氮化鈦或不鏽鋼。步驟S4係進行第三形成步驟，此第三形成步驟係於顯色層14上形成一保護層16，此保護層16之形成方法例如以薄膜沉積法，例如例如濺鍍、蒸鍍、化學沉積(CVD)、電漿化學氣相沉積(PECVD)或塗佈等方法，形成一層矽氧化物或鋁氧化物於顯色層14上。 Please refer to FIG. 3, which is a flow chart of a method for manufacturing a colored film structure for increasing the appearance of a product of the present invention. In the figure, step S1 provides a substrate 10 which is subjected to a cleaning step. The material of the substrate 10 is made of glass, metal, stainless steel or a polymer material. Step S2 is performed by a first forming step on the substrate 10, for example, by thin film deposition, such as sputtering, evaporation, chemical deposition (CVD), plasma chemical vapor deposition (PECVD), or coating. In a method, a rough metal layer 12 is formed, which is a low melting point metal such as tin, zinc, indium, various tin alloys, various zinc alloys or various indium alloys. Step S3 is performed by a second forming step of forming a color developing layer 14 on the rough metal layer 12. The method of forming the coloring layer 14 is, for example, a thin film deposition method such as sputtering, evaporation, or chemical conversion. a method of deposition (CVD), plasma chemical vapor deposition (PECVD) or coating to form a colored film on the rough metal layer 12, such as copper, aluminum, silver, nickel, chromium, zirconium. , titanium, copper oxide, aluminum oxide, silver oxide, nickel oxide, chromium oxide, zirconium oxide, titanium oxide, aluminum nitride, chromium nitride, zirconium nitride, titanium nitride or stainless steel. Step S4 is a third forming step of forming a protective layer 16 on the color developing layer 14. The protective layer 16 is formed by, for example, thin film deposition, such as, for example, sputtering, evaporation, or chemical deposition. A method of (CVD), plasma chemical vapor deposition (PECVD) or coating forms a layer of tantalum oxide or aluminum oxide on the color developing layer 14.
其中，於第一形成步驟中，可選擇性先形成一層緩衝層18於基板10上，再於此緩衝層18上形成粗糙金屬層12，藉以加強粗糙金屬層12與基板10之結合。此緩衝層18之形成方法例如以薄膜沉積法，例如濺鍍、蒸鍍、化學沉積(CVD)、電漿化學氣相沉積(PECVD)或塗佈等方法，形成一層鎳、鉻、各種鎳合金以及各種鉻合金於基板10上。 In the first forming step, a buffer layer 18 is selectively formed on the substrate 10, and a rough metal layer 12 is formed on the buffer layer 18 to strengthen the bonding of the rough metal layer 12 and the substrate 10. The buffer layer 18 is formed by a thin film deposition method such as sputtering, evaporation, chemical deposition (CVD), plasma chemical vapor deposition (PECVD) or coating to form a layer of nickel, chromium, various nickel alloys. And various chrome alloys on the substrate 10.
以上所述僅為舉例性，而非為限制性者。任何未脫離本發明之精神與範疇，而對其進行之效修改或變更，均應包含於後附之申請專利範圍中。 The above is intended to be illustrative only and not limiting. Any modification or alteration of the spirit and scope of the present invention should be included in the scope of the appended claims.
10‧‧‧基板 10‧‧‧Substrate
12‧‧‧粗糙金屬層 12‧‧‧Rough metal layer
14‧‧‧顯色層 14‧‧‧Color layer
16‧‧‧保護層 16‧‧‧Protective layer
18‧‧‧緩衝層 18‧‧‧ Buffer layer
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| TWI615528B (en) * | 2015-06-04 | 2018-02-21 | 福懋興業股份有限公司 | Multi-colored transparent fabric and method for manufacturing the same |
| CN106498391B (en) * | 2016-09-29 | 2019-04-30 | 歌尔股份有限公司 | The multi-layer film structure of heat-tinting |
| CN107604323B (en) * | 2017-08-01 | 2019-04-23 | 赣州市德普特科技有限公司 | A kind of fuselage composite membrane and the preparation method and application thereof |
| CN107815657B (en) * | 2017-11-07 | 2019-07-12 | 福建工程学院 | A kind of alumina ceramic coating of Color tunable and preparation method thereof |
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| TW286299B (en) * | 1992-06-29 | 1996-09-21 | Sumitomo Electric Industries | |
| JP2003003292A (en) * | 2001-05-11 | 2003-01-08 | Lucent Technol Inc | Coated metallic product |
| TW200701878A (en) * | 2005-02-17 | 2007-01-01 | Asahi Glass Co Ltd | Conductive laminated body, electromagnetic wave shielding film for plasma display and protection plate for plasma display |
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| JP2011056683A (en) * | 2009-09-07 | 2011-03-24 | Nissha Printing Co Ltd | Decorative sheet, method for manufacturing the same, and decorative article |
| EP2434031B1 (en) * | 2010-09-28 | 2013-05-15 | Haute Ecole Arc | White decorative covering, decorative item and method |
| TWM438377U (en) * | 2012-04-13 | 2012-10-01 | Juant Technology Co Ltd | Colored membrance structure |
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| TW286299B (en) * | 1992-06-29 | 1996-09-21 | Sumitomo Electric Industries | |
| JP2003003292A (en) * | 2001-05-11 | 2003-01-08 | Lucent Technol Inc | Coated metallic product |
| TW200701878A (en) * | 2005-02-17 | 2007-01-01 | Asahi Glass Co Ltd | Conductive laminated body, electromagnetic wave shielding film for plasma display and protection plate for plasma display |
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